JP2023149955A - Fine adjustment device - Google Patents

Abstract

To provide a fine adjustment device capable of rotating a fine adjustment table to a base part with a simple construction.SOLUTION: A fine adjustment device comprises: a base part; a fine adjustment table; and a rotational device that is arranged to the base part, and rotates the fine adjustment table to the base part. The rotational device contains: a first driving part that contains a first movement member supporting a first supported part of the fine adjustment table, and moves the first movement member along a first shaft line; a second driving part that contains a second movement member supporting a second supported part of which a position is different in a plan view from the first supported part in the fine adjustment table, and moves the second movement member along a second shaft line paralleled to the first shaft line; a third driving part that contains a third movement member supporting a third supported part of which a position is difference in a plan view from the first and second supported parts in the fine adjustment table, and moves the third movement member along a third shaft line paralleled to the first shaft line; and a fourth driving part that rotates the fine adjustment table in a plan view by depressing a side surface of the fine adjustment table.SELECTED DRAWING: Figure 2

Description

The present disclosure relates to a fine movement device.

Patent Document 1 describes a coarse movement table movable along two axes orthogonal to each other, and a fine movement table supported by the coarse movement table and capable of fine movement along two axes orthogonal to each other with respect to the coarse movement table. A table device comprising a table is disclosed.

JP2016-39184A

In the table device of Patent Document 1, there is a desire to rotate the fine movement table with respect to a base supporting the fine movement table in order to adjust the attitude of the fine movement table.

An aspect of the present disclosure aims to provide a fine movement device that can rotate a fine movement table with respect to a base with a simple configuration.

An aspect of the present disclosure includes a base, a fine movement table, and a rotation device that is arranged at the base and rotates the fine movement table with respect to the base, and the rotation device includes a first supported part of the fine movement table. a first driving section that moves the first moving member along a first axis; and a first driving section that moves the first moving member along a first axis; a second driving section that includes a second moving member that supports two supported parts and moves the second moving member along a second axis that is parallel to the first axis; and a second driving part that moves the second moving member along a second axis that is parallel to the first axis; and a third moving member that supports a third supported part at a different position in plan view from the second supported part, and the third moving member is moved along a third axis parallel to the first axis. A fine movement device is provided, which includes a third drive unit that moves the fine movement table, and a fourth drive unit that rotates the fine movement table in plan view by pressing a side surface of the fine movement table.

According to the aspect of the present disclosure, the fine movement table is supported by the first moving member, the second moving member, and the third moving member at three points that are different from each other in plan view. Moreover, the first moving member, the second moving member, and the third moving member move along the first axis, the second axis, and the third axis, which are parallel to each other, respectively. Therefore, by adjusting the amount of movement and direction of movement of the first moving member, second moving member, and third moving member, the fine movement table can be tilted with respect to the axis parallel to the first axis. In other words, the fine movement table can rotate around two axes that are perpendicular to the first axis and perpendicular to each other.

Furthermore, the fine movement table can be rotated in a plan view by having its side surface pressed by the fourth drive unit. In other words, the fine movement table can rotate about an axis parallel to the first axis. Therefore, the fine movement table can rotate about three axes that are orthogonal to each other and include an axis that is parallel to the first axis.

In this way, the fine movement device can finely move the fine movement table so as to rotate with respect to the base with a simple configuration.

In an aspect of the present disclosure, the first moving member may rotationally support the first supported portion.

Thereby, the fine movement device can rotate the fine movement table around the first moving member. Furthermore, compared to the case where the fine movement device includes a member that rotatably supports the fine movement table separately from the first moving member, the number of parts of the fine movement device can be reduced and the structure of the fine movement device can be simplified.

In an aspect of the present disclosure, the first moving member may have a first spherical surface, and the first supported portion may have a tapered surface that makes line contact with the first spherical surface.

Thereby, the first moving member can rotationally support the first supported part with a simple shape.

In an aspect of the present disclosure, the second moving member may movably support the second supported portion, and the third moving member may movably support the third supported portion.

Thereby, the second moving member and the third moving member can support the second supported part and the third supported part so that the fine movement table rotates.

In an aspect of the present disclosure, the second moving member has a second spherical surface, the second supported part has a surface that contacts the second spherical surface, and the third moving member has a third spherical surface. The third supported portion may have a surface that contacts the third spherical surface.

Thereby, the second moving member and the third moving member can support the second supported part and the third supported part with a simple shape so that the fine movement table rotates.

In an aspect of the present disclosure, the device may further include a first magnet that moves the fine movement table toward the base.

Thereby, the contact state between the first moving member and the first supported part, the contact state between the second moving member and the second supported part, and the contact state between the third moving member and the third supported part are controlled by the first magnet. can maintain contact with Therefore, the rotating device can rotate the fine movement table with high precision.

In an aspect of the present disclosure, the device may further include a second magnet that moves the fine movement table in a direction opposite to a direction in which the fourth drive unit presses the fine movement table.

Thereby, the fine movement table can be rotated by the second magnet in a direction opposite to the direction in which the fourth drive section presses the fine movement table. Therefore, it is possible to maintain a state in which the fourth moving member and the side surface of the fine movement table are in contact with each other. Therefore, the fourth drive unit can rotate the fine movement table with high precision.

In an aspect of the present disclosure, a first intersection point between an orthogonal plane perpendicular to the first axis line and the first axis line, a second intersection point between the orthogonal plane and the second axis line, and a second intersection point between the orthogonal plane and the third axis line. The triangle formed by the third intersection point may be an isosceles triangle in which the length of the side connecting the first intersection point and the second intersection point is equal to the length of the side connecting the first intersection point and the third intersection point. .

As a result, compared to the case where the triangle formed by the first intersection point, the second intersection point, and the third intersection point is not an isosceles triangle, the first moving member and the second moving member correspond to the rotation amount and rotation direction of the fine movement table. , and the amount and direction of movement of the third moving member can be easily calculated.

In an aspect of the present disclosure, the fine movement table may have a line-symmetrical shape in which the axis of symmetry is a straight line that passes through the first intersection point and is perpendicular to the base connecting the second intersection point and the third intersection point in plan view. .

Thereby, even when the fine movement table rotates, the center of gravity of the fine movement table is located near the axis of symmetry in plan view. Therefore, the posture of the fine movement table can be stabilized.

According to the aspect of the present disclosure, the fine movement table can be rotated with respect to the base with a simple configuration.

FIG. 1 is a plan view showing an example of a fine movement device according to the present embodiment and a conveying device to which the fine movement device is attached. FIG. 2 is a plan view of the fine movement device according to this embodiment. FIG. 3 is a side view of the fine movement device according to this embodiment. FIG. 4 is a sectional view of the fine movement device according to this embodiment. FIG. 5 is an axial cross-sectional view of the second drive section and the third drive section according to the present embodiment. FIG. 6 is an axial cross-sectional view of the fourth drive unit according to the present embodiment.

Embodiments according to the present invention will be described below with reference to the drawings, but the present invention is not limited thereto. The components of each embodiment described below can be combined as appropriate. Furthermore, some components may not be used.

In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be explained with reference to this XYZ orthogonal coordinate system. Further, directions along the X-axis, Y-axis, and Z-axis are respectively referred to as the X direction, the Y direction, and the Z direction. Furthermore, rotation (tilt) directions around the X, Y, and Z axes are respectively referred to as the θX direction, the θY direction, and the θZ direction.

In this embodiment, the XY plane is parallel to the main surface S of the base 10, which will be described later. The Z-axis is orthogonal to the main surface S of the base 10. The X-axis is perpendicular to the YZ plane. The Y axis is orthogonal to the XZ plane. The Z axis is orthogonal to the XY plane. The XY plane includes an X axis and a Y axis. The XZ plane includes the X axis and the Z axis. The YZ plane includes the Y axis and the Z axis.

FIG. 1 is a plan view showing an example of a fine movement device according to the present embodiment and a conveying device to which the fine movement device is attached. The fine movement device 1 and the transport device 2 are used, for example, in a part of the semiconductor device manufacturing process in the manufacturing of semiconductor devices.

The fine movement device 1 supports an object for manufacturing semiconductor devices and finely adjusts the posture of the object. The conveyance device 2 supports the fine movement device 1 and conveys the fine movement device 1 so that the object is located at a desired position.

The conveyance device 2 includes a base member 3 and a support member 4 that moves relative to the base member 3. A pair of guide members 3a, a ball screw 3b, and a rotary motor 3c are arranged on the base member 3.

The pair of guide members 3a are arranged on the surface of the base member 3 facing the support member 4 (+Z side surface) so as to extend along the X direction. The ball screw 3b is arranged to extend along the X direction between the pair of guide members 3a. The rotary motor 3c drives the ball screw 3b to rotate.

The support member 4 supports the fine movement device 1 on a surface opposite to the surface facing the base member 3 (-Z side surface). A pair of linear bearings 4a and a nut 4b are arranged on the support member 4.

The pair of linear bearings 4a are each attached to a surface of the support member 4 facing the base member 3, and are fitted with the pair of guide members 3a. The nut 4b is attached to the surface of the support member 4 facing the base member 3, and is coupled to the ball screw 3b.

When the rotary motor 3c rotates the ball screw 3b, the nut 4b moves along the axis of the ball screw 3b. Thereby, the support member 4 is guided by the pair of guide members 3a via the pair of linear bearings 4a. That is, the support member 4 moves along the X direction.

In this way, the transport device 2 is configured so that the support member 4 moves along the X direction, but the transport device 2 is configured so that the support member 4 moves in two directions along the X direction and the Y direction. Alternatively, the conveying device 2 may be configured such that the support member 4 moves in each of three directions along the X direction, the Y direction, and the Z direction.

FIG. 2 is a plan view of the fine movement device according to this embodiment. The fine movement device 1 includes a base 10, a fine movement table 20, and a rotation device 30.

The base 10 is plate-shaped and has a main surface S that faces the fine movement table 20 (+Z side surface). The base 10 is attached to and supported by the support member 4 on the back surface opposite to the main surface S.

The fine movement table 20 has a plate shape, and can place objects for manufacturing semiconductor devices, for example. The fine movement table 20 has a T-shape in plan view, in which a first plate portion 21 extending along the X direction and a second plate portion 22 extending along the Y direction are integrated.

FIG. 3 is a side view of the fine movement device according to this embodiment. FIG. 4 is a sectional view of the fine movement device according to this embodiment. Specifically, FIG. 4 is a cross-sectional view of the fine movement device 1 along a straight line L, which will be described later.

The rotation device 30 is disposed on the base 10 and rotates the fine movement table 20 with respect to the base 10. The rotating device 30 includes a first drive section 31 , a second drive section 32 , a third drive section 33 , and a fourth drive section 34 .

The first drive unit 31 is disposed on the main surface S of the base 10 at a position facing the +X side end of the fine movement table 20. The first drive section 31 includes a first housing 31a, a first drive element 31b, a first holding section 31c, and a first moving member 31d. The first drive unit 31 moves the first moving member 31d along the first axis 31e. The first axis 31e is parallel to the Z direction. Note that the first axis 31e may be inclined with respect to the Z direction.

The first housing 31a has a box shape with an open +Z side. The first driving element 31b is housed in the bottom of the first housing 31a, and moves the first moving member 31d. The first drive element 31b is, for example, a piezoelectric element (piezo element) that deforms so that the length along the first axis 31e changes when a voltage is applied.

The first holding portion 31c is housed in the first housing 31a so that its -Z side surface contacts the first drive element 31b and is slidable along the first axis 31e with respect to the first housing 31a. There is. Further, the first holding portion 31c holds the first moving member 31d on the +Z side.

The first moving member 31d has a spherical shape with a first spherical surface 31d1 on the +Z side. Note that the −Z side of the first moving member 31d may have a cylindrical shape, for example, or may be integrated with the first holding portion 31c. The first axis 31e passes through the center of the sphere having the first spherical surface 31d1.

When a voltage is applied to the first drive element 31b, the first drive element 31b is deformed, and the first holding portion 31c and, in turn, the first moving member 31d move along the first axis 31e. Further, the first moving member 31d supports the first supported portion 23 of the fine movement table 20.

The first supported part 23 is arranged on the -Z side surface of the fine movement table 20 so as to face the first moving member 31d. The first supported portion 23 is plate-shaped and has a tapered surface 23a on the surface facing the first moving member 31d. Specifically, the tapered surface 23a is a conical surface having an apex on the +Z side. Note that the tapered surface 23a may be a pyramidal surface.

The first moving member 31d supports the first supported portion 23 so that the first spherical surface 31d1 is in line contact with the tapered surface 23a. That is, the first moving member 31d rotationally supports the first supported part 23.

The second drive unit 32 is disposed on the main surface S of the base 10 at a position facing the +Y side end of the fine movement table 20. The third drive unit 33 is arranged on the main surface S of the base 10 at a position facing the -Y side end of the fine movement table 20.

FIG. 5 is an axial cross-sectional view of the second drive section and the third drive section according to the present embodiment. The second drive section 32 includes a second housing 32a, a second drive element 32b, a second holding section 32c, and a second moving member 32d. The second drive unit 32 moves the second moving member 32d along the second axis 32e. The second axis 32e is parallel to the first axis 31e.

The third drive section 33 includes a third housing 33a, a third drive element 33b, a third holding section 33c, and a third moving member 33d. The third drive unit 33 moves the third moving member 33d along the third axis 33e. The third axis 33e is parallel to the first axis 31e. That is, the first axis 31e, the second axis 32e, and the third axis 33e are each parallel to each other.

The second drive section 32 and the third drive section 33 are configured similarly to the first drive section 31. That is, the second housing 32a and the third housing 33a, the second drive element 32b and the third drive element 33b, the second holding part 32c and the third holding part 33c, and the second moving member 32d and the third moving member 33d are , respectively, are configured similarly to the first housing 31a, the first drive element 31b, the first holding portion 31c, and the first moving member 31d.

When a voltage is applied to the second drive element 32b, the second drive element 32b is deformed, and the second holding portion 32c and, in turn, the second moving member 32d move along the second axis 32e. Further, when a voltage is applied to the third drive element 33b, the third drive element 33b is deformed, and the third holding portion 33c and, in turn, the third moving member 33d move along the third axis 33e.

As shown in FIG. 2, a first intersection point P1 between an orthogonal plane perpendicular to the first axis 31e and the first axis 31e, a second intersection P2 between the orthogonal plane and the second axis 32e, and a third intersection point P2 between the orthogonal plane and the third axis 33e. The triangle formed by the third intersection point P3 is an isosceles triangle in which the length of the side connecting the first intersection point P1 and the second intersection point P2 is equal to the length of the side connecting the first intersection point P1 and the third intersection point P3. It is. Note that when the first axis 31e is along the Z direction, the orthogonal plane is parallel to the main surface S of the base 10.

Further, in a state where the fine movement table 20 is not rotated (tilted) with respect to the base 10, in a plan view, the fine movement table 20 passes through the first intersection P1 and is perpendicular to the base connecting the second intersection P2 and the third intersection P3. It has a line-symmetrical shape with the straight line L as the axis of symmetry. Therefore, the center of gravity G of the fine movement table 20 is located on the straight line L in a plan view without being rotated (tilted) with respect to the base 10.

Further, as shown in FIGS. 3 and 4, the second moving member 32d and the third moving member 33d support the second supported part 24 and the third supported part 25 of the fine movement table 20, respectively.

The second supported portion 24 is arranged on the -Z side surface of the fine movement table 20 so as to face the second moving member 32d. That is, the position of the second supported part 24 is different from the position of the first supported part 23 in plan view. The second supported portion 24 is plate-shaped and has a first plane 24a on the -Z side.

The second moving member 32d supports the second supported portion 24 so that the second spherical surface 32d1 and the first plane 24a are in contact with each other. Specifically, the second spherical surface 32d1 makes point contact with the first plane 24a. In other words, the second moving member 32d movably supports the second supported portion 24.

The third supported part 25 is arranged on the -Z side surface of the fine movement table 20 so as to face the third moving member 33d. That is, the position of the third supported part 25 is different from the position of the first supported part 23 and the second supported part 24 in plan view. The third supported portion 25 is plate-shaped and has a second plane 25a on the −Z side.

The third moving member 33d supports the third supported portion 25 so that the third spherical surface 33d1 and the second plane 25a are in contact with each other. Specifically, the third spherical surface 33d1 makes point contact with the second plane 25a. In other words, the third moving member 33d movably supports the third supported portion 25.

As shown in FIGS. 2 and 3, the fourth drive section 34 is disposed at a position on the -Y side of the first plate section 21 in the base section 10. As shown in FIG. The fourth drive unit 34 rotates the fine movement table 20 in plan view by pressing the side surface of the fine movement table 20.

FIG. 6 is an axial cross-sectional view of the fourth drive unit according to the present embodiment. The fourth drive section 34 includes a fourth housing 34a, a fourth drive element 34b, a fourth holding section 34c, and a fourth moving member 34d. The fourth drive unit 34 moves the fourth moving member 34d along the fourth axis 34e. The fourth axis 34e is orthogonal to the first axis 31e. Specifically, the fourth axis 34e is parallel to the Y direction. Note that the fourth axis 34e may be inclined with respect to the Y direction.

The fourth housing 34a has a box shape with an open +Y side. The fourth drive element 34b is housed in the bottom of the fourth housing 34a, and moves the fourth moving member 34d. The fourth drive element 34b is a piezoelectric element (piezo element) that deforms so that the length along the fourth axis 34e changes when a voltage is applied.

The fourth holding portion 34c is housed in the fourth housing 34a so that its -Y side surface contacts the fourth drive element 34b and is slidable along the fourth axis 34e with respect to the fourth housing 34a. . Further, the fourth holding portion 34c holds the fourth moving member 34d on the +Y side.

The fourth moving member 34d has a fourth spherical surface 34d1 on the +Y side and a cylindrical shape on the -Y side. Note that the fourth moving member 34d may be spherical or may be integrated with the fourth holding portion 34c. The fourth axis 34e passes through the center of the sphere having the fourth spherical surface 34d1.

When a voltage is applied to the fourth drive element 34b, the fourth drive element 34b is deformed, and the fourth holding portion 34c and, in turn, the fourth moving member 34d move along the fourth axis 34e. Further, the fourth moving member 34d presses the side surface of the fine movement table 20 via the pressed portion 26.

As shown in FIGS. 2 and 3, the pressed portion 26 is arranged on the −Y side surface of the first plate portion 21. As shown in FIGS. The pressed portion 26 is plate-shaped and has a third plane 26a on the −Y side. The third plane 26a is perpendicular to the Y-axis when the fine movement table 20 is not rotated. As the fourth moving member 34d moves, the fourth spherical surface 34d1 comes into point contact with the third plane 26a, and presses the third plane 26a toward the +Y side.

As shown in FIGS. 2 to 4, the fine movement device 1 further includes a first magnet 50 and a second magnet 60.

The first magnet 50 moves the fine movement table 20 toward the base 10. The first magnet 50 is arranged on the −Z side surface of the first plate portion 21. The first magnet 50 is, for example, a permanent magnet.

A plate-shaped first magnetic body 11 that attracts the first magnet 50 is arranged on the main surface S of the base 10 at a position facing the first magnet 50 . The first magnetic body 11 includes, for example, iron. Note that the first magnetic body 11 may be a permanent magnet.

The first magnet 50 attracts the first magnetic body 11 to move the fine movement table 20 toward the base 10, that is, toward the −Z side. As a result, the first spherical surface 31d1 and the tapered surface 23a are in contact, the second spherical surface 32d1 is in contact with the first plane 24a, and the third spherical surface 33d1 is in contact with the second plane 25a. Each state can be maintained reliably. Note that the first magnet 50 may be arranged on the main surface S, and the first magnetic body 11 may be arranged on the fine movement table 20.

The second magnet 60 moves the fine movement table 20 in a direction opposite to the direction in which the fourth drive unit 34 presses the fine movement table 20. The second magnet 60 is disposed at a position on the −Y side of the first plate portion 21 in the base portion 10 via a mounting portion 60a. The second magnet 60 is, for example, a permanent magnet.

A plate-shaped second magnetic body 27 that attracts the second magnet 60 is arranged in the first plate portion 21 at a position facing the second magnet 60 and separated from the second magnet 60 . The second magnetic body 27 includes, for example, iron. Note that the second magnetic body 27 may be a permanent magnet.

The second magnet 60 attracts the second magnetic body 27 to move the fine movement table 20 toward the second magnet 60, that is, toward the -Y side. In other words, the fine movement table 20 is moved in the opposite direction to the direction in which the fourth drive unit 34 presses the fine movement table 20. Thereby, the state in which the fourth spherical surface 34d1 and the third plane 26a are in contact can be maintained.

Further, as shown in FIG. 4, the fine movement device 1 further includes a control device 70 that controls the rotation of the fine movement table 20. The control device 70 outputs a control signal for rotating the fine movement table 20 to the first drive element 31b, the second drive element 32b, the third drive element 33b, and the fourth drive element 34b. The control signals output to the first drive element 31b, the second drive element 32b, the third drive element 33b, and the fourth drive element 34b are respectively output to the first drive element 31b, the second drive element 32b, and the third drive element 34b. It includes command values that specify the amount and direction of deformation of the element 33b and the fourth drive element 34b.

Command values for specifying the amount and direction of deformation of the first drive element 31b, second drive element 32b, third drive element 33b, and fourth drive element 34b are input into the control device 70 by the user, respectively. It may be derived by the control device 70 based on the desired rotation amount of the fine movement table 20, or it may be derived by the control device 70 in advance based on the detection result of a sensor (for example, an optical distance measuring sensor) for detecting the attitude of the object. Based on the difference from the stored predetermined posture, the control device 70 may derive the object to assume the predetermined posture. Note that the control device 70 may centrally control the transport device 2.

Next, the operation of the fine movement device 1 when the control device 70 rotates the fine movement table 20 with respect to the base 10 will be described. First, a case will be described in which the fine movement table 20 rotates along the θX direction with respect to the base 10 from an initial state of the fine movement table 20 in which the +Z side surface of the fine movement table 20 is parallel to the XY plane.

When the fine movement table 20 rotates in the θX direction with respect to the base 10 from the initial state, in the control signal output by the control device 70, for example, the amount of deformation of the first drive element 31b is zero, and the amount of deformation of the second drive element 31b is zero. The amount of deformation of 32b and the amount of deformation of third drive element 33b are the same, and the direction of deformation of second drive element 32b and the direction of deformation of third drive element 33b are opposite.

Based on the control signal, the first driving element 31b does not deform, so the first moving member 31d does not move. By deforming the second drive element 32b and the third drive element 33b based on the control signal, the second moving member 32d and the third moving member 33d move in different directions with the same amount of movement. It moves along the second axis 32e and the third axis 33e.

Due to the operations of the first moving member 31d, the second moving member 32d, and the third moving member 33d, the first supported part 23 moves to the first supported part 23 in a state where the tapered surface 23a and the first spherical surface 31d1 are in contact with each other. The first moving member 31d rotates about the center point of the first spherical surface 31d1 and moves along the Y direction in plan view. The second supported portion 24 rotates with respect to the second moving member 32d, with the first plane 24a and the second spherical surface 32d1 in contact with each other, and moves along the Y direction in a plan view. The third supported portion 25 rotates relative to the third moving member 33d and moves along the Y direction in a plan view while the second plane 25a and the third spherical surface 33d1 are in contact with each other.

Due to the operations of the first supported part 23, the second supported part 24, and the third supported part 25, the fine movement table 20 moves from the initial state to the first position along the θX direction with respect to the base 10. It rotates around the moving member 31d.

In addition, in the control signal, the amount and direction of deformation of the fourth drive element 34b are determined along the fourth axis 34e on the third plane 26a of the pressed portion 26 caused by the rotation of the fine movement table 20 along the θX direction. The amount of deformation and the direction of deformation may be made equal to each other. Such a control signal causes the fourth moving member 34d to move to correspond to the displacement of the third plane 26a caused by the rotation of the fine movement table 20 along the θX direction. This can prevent the fourth moving member 34d from interfering with the rotation of the fine movement table 20 in the θX direction.

Next, a case will be described in which the fine movement table 20 rotates along the θY direction with respect to the base 10 from the initial state. In this case, in the control signal output by the control device 70, for example, the direction of deformation of the first drive element 31b is +Z side or -Z side, and the amount of deformation of the second drive element 32b and the deformation of the third drive element 33b are determined. quantity is zero.

By such a control signal, the first driving element 31b is deformed, so that the first moving member 31d moves toward the +Z side or the -Z side along the first axis 31e, and the second driving element 32b and the third Since the drive element 33b is not deformed, the second moving member 32d and the third moving member 33d do not move.

Due to the operations of the first moving member 31d, the second moving member 32d, and the third moving member 33d, the first supported part 23 moves to the first supported part 23 in a state where the tapered surface 23a and the first spherical surface 31d1 are in contact with each other. The first moving member 31d rotates about the center point of the first spherical surface 31d1 and moves along the X direction in plan view. The second supported portion 24 rotates relative to the second moving member 32d and moves along the X direction in a plan view while the first plane 24a and the second spherical surface 32d1 are in contact with each other. The third supported portion 25 rotates with respect to the third moving member 33d, with the second plane 25a and the third spherical surface 33d1 in contact with each other, and moves along the X direction in a plan view.

Due to the operations of the first supported part 23, the second supported part 24, and the third supported part 25, the fine movement table 20 moves from the initial state to the first position along the θY direction with respect to the base 10. It rotates around the moving member 31d.

Further, as described above, since the third plane 26a of the pressed part 26 is perpendicular to the Y axis, when the fine movement table 20 rotates with respect to the base 10 along the θY direction, the third plane 26a of the pressed part 26 The three planes 26a are not displaced along the fourth axis 34e. In other words, even if the amount of movement of the fourth moving member 34d is zero, the rotation of the fine movement table 20 is not hindered. Therefore, in the control signal, the amount of deformation of the fourth drive element 34b is zero.

Note that when the fine movement table 20 rotates from the initial state with respect to the base 10 along the θY direction, the control signal output by the control device 70 indicates that, for example, the amount of deformation of the first drive element 31b is zero and the amount of deformation of the second drive element 31b is zero. The amount of deformation of the drive element 32b and the amount of deformation of the third drive element 33b may be the same, and the direction of deformation of the second drive element 32b and the direction of deformation of the third drive element 33b may be the same.

Next, a case will be described in which the fine movement table 20 rotates along the θZ direction with respect to the base 10 from the initial state. In this case, in the control signal output by the control device 70, for example, the amount of deformation of the first drive element 31b, the second drive element 32b, and the third drive element 33b is zero, and the amount of deformation of the fourth drive element 34b is zero. and the direction of deformation correspond to the desired amount of rotation in the θZ direction and the direction of rotation.

Due to such a control signal, the first driving element 31b, the second driving element 32b, and the third driving element 33b are not deformed, so that the first moving member 31d, the second moving member 32d, and the third moving member 33d are not deformed. does not move and the fourth driving element 34b deforms, so that the fourth moving member 34d moves toward the +Y side or the -Y side along the fourth axis 34e.

Due to such operations of the first moving member 31d, second moving member 32d, third moving member 33d, and fourth moving member 34d, the fourth moving member 34d moves toward the +Y side along the fourth axis 34e. In this case, when the fourth moving member 34d presses the pressed portion 26, the pressed portion 26 moves toward the +Y side. On the other hand, when the fourth moving member 34d moves toward the −Y side along the fourth axis 34e, the second magnet 60 and the second magnetic body 27 attract each other, and the pressed portion 26 moves toward the −Y side. .

As the fine movement table 20 is displaced by such movement of the pressed portion 26, the first supported portion 23 is moved relative to the first moving member 31d with the tapered surface 23a and the first spherical surface 31d1 in contact with each other. and rotates along the θZ direction about the first axis 31e as the central axis. The second supported part 24 rotates along the θZ direction with the first axis 31e as a central axis with respect to the second moving member 32d in a state where the first plane 24a and the second spherical surface 32d1 are in contact with each other.

Then, the third supported part 25 moves along the θZ direction with the first axis 31e as the central axis, with the second plane 25a and the third spherical surface 33d1 in contact with each other. do. Furthermore, the pressed portion 26 moves along the θZ direction with the first axis 31e as the central axis, with respect to the fourth moving member 34d, with the third plane 26a and the fourth spherical surface 34d1 in contact with each other.

Due to such operations of the first supported part 23, the second supported part 24, the third supported part 25, and the pressed part 26, the fine movement table 20 moves from the initial state to the first moving member with respect to the base 10. It rotates along the θZ direction around 31d.

Furthermore, the fine movement table 20 is movable in the Z direction without rotating relative to the base 10, that is, it is translatable along the Z direction. When the fine movement table 20 translates along the Z direction with respect to the base 10 from the initial state, in the control signal output by the control device 70, for example, the first drive element 31b, the second drive element 32b, and the third drive The deformation amounts of the elements 33b are the same, and the directions of deformation of the first drive element 31b, the second drive element 32b, and the third drive element 33b are the same.

The first driving element 31b, the second driving element 32b, and the third driving element 33b are deformed by such a control signal, so that the first moving member 31d, the second moving member 32d, and the third moving member 33d move in directions different from each other by the same amount of movement.

Due to the operations of the first moving member 31d, the second moving member 32d, and the third moving member 33d, the first supported part 23 moves in the Z direction with the tapered surface 23a and the first spherical surface 31d1 in contact with each other. Translate along the direction. The second supported portion 24 translates along the Z direction while the first plane 24a and the second spherical surface 32d1 are in contact with each other. The third supported portion 25 translates along the Z direction while the second plane 25a and the third spherical surface 33d1 are in contact with each other.

Due to such operations of the first supported part 23, the second supported part 24, and the third supported part 25, the fine movement table 20 is translated along the Z direction. In this case, as described above, the third plane 26a of the pressed part 26 is perpendicular to the Y axis, so when the fine movement table 20 translates along the Z direction, the third plane 26a of the pressed part 26 26a is not displaced along the fourth axis 34e. In other words, even if the amount of movement of the fourth moving member 34d is zero, translation of the fine movement table 20 in the Z direction is not hindered. Therefore, in the control signal, the amount of deformation of the fourth drive element 34b is zero.

In this way, the rotation device 30 can rotate the fine movement table 20 along the θX direction, the θY direction, and the θZ direction, and can also translate the fine movement table 20 along the Z direction. In other words, the fine movement table 20 has four degrees of freedom. By adjusting the amount of deformation and the direction of deformation of the first driving element 31b, the second driving element 32b, the third driving element 33b, and the fourth driving element 34b, the amount of rotation and the amount of translation of the fine movement table 20 are adjusted. be adjusted. Further, the rotating device 30 is different from the above by adjusting the amount of deformation and the direction of deformation of the first driving element 31b, the second driving element 32b, the third driving element 33b, and the fourth driving element 34b. The fine movement device 1 can be rotated in a direction (for example, a direction whose central axis is an axis that intersects each of the X-axis, Y-axis, and Z-axis).

As described above, according to the present embodiment, the fine movement device 1 includes the fine movement table 20 and the rotation device 30, which is arranged on the base 10 and rotates the fine movement table 20 with respect to the base 10. . The rotation device 30 includes a first moving member 31d that supports the first supported part 23 of the fine movement table 20, a first drive unit 31 that moves the first movement member 31d along the first axis 31e, and a fine movement table. 20 includes a second moving member 32d that supports a second supported part 24 whose position in plan view is different from that of the first supported part 23, and a second movement along a second axis 32e parallel to the first axis 31e. A second driving section 32 that moves the member 32d, and a third moving member that supports the third supported section 25, which is located at a different position in plan view from the first supported section 23 and the second supported section 24 on the fine movement table 20. 33d, and which moves the third moving member 33d along the third axis 33e parallel to the first axis 31e, by pressing the side surface of the fine movement table 20, the fine movement table 20 is A fourth drive unit 34 is provided.
According to this, the fine movement table 20 is supported by the first moving member 31d, the second moving member 32d, and the third moving member 33d at three points that are different from each other in plan view. Moreover, the first moving member 31d, the second moving member 32d, and the third moving member 33d move along the first axis 31e, the second axis 32e, and the third axis 33e, which are parallel to each other, respectively. Therefore, by adjusting the amount and direction of movement of the first moving member 31d, second moving member 32d, and third moving member 33d, the fine movement table 20 is tilted with respect to the axis parallel to the first axis 31e. can do. In other words, the fine movement table 20 can rotate about two axes that are orthogonal to the first axis 31e and that are orthogonal to each other.
Further, the fine movement table 20 can be rotated in a plan view by having its side surface pressed by the fourth drive unit 34. In other words, the fine movement table 20 can rotate around an axis parallel to the first axis 31e. Therefore, the fine movement table 20 can rotate around three mutually perpendicular axes including an axis parallel to the first axis 31e.
In this manner, the fine movement device 1 can finely move the fine movement table 20 so as to rotate with respect to the base 10 with a simple configuration.

Further, in this embodiment, the first moving member 31d rotationally supports the first supported part 23.
Thereby, the fine movement device 1 can rotate the fine movement table 20 around the first moving member 31d. Furthermore, compared to the case where the fine movement device 1 includes a member that rotationally supports the fine movement table 20 separately from the first moving member 31d, the number of parts of the fine movement device 1 can be reduced and the structure of the fine movement device 1 can be simplified. can.

Moreover, in this embodiment, the first moving member 31d has a first spherical surface 31d1. The first supported portion 23 has a tapered surface 23a that makes line contact with the first spherical surface 31d1.
Thereby, the first moving member 31d can rotationally support the first supported part 23 with a simple shape.

Further, in this embodiment, the second moving member 32d movably supports the second supported portion 24. The third moving member 33d movably supports the third supported portion 25.
Thereby, the second moving member 32d and the third moving member 33d can support the second supported part 24 and the third supported part 25 so that the fine movement table 20 rotates.

Moreover, in this embodiment, the second moving member 32d has a second spherical surface 32d1. The second supported portion 24 has a surface that contacts the second spherical surface 32d1. The third moving member 33d has a third spherical surface 33d1. The third supported portion 25 has a surface that contacts the third spherical surface 33d1.
Thereby, the second moving member 32d and the third moving member 33d can support the second supported part 24 and the third supported part 25 with a simple shape so that the fine movement table 20 rotates.

Further, in this embodiment, the fine movement device 1 includes a first magnet 50 that moves the fine movement table 20 toward the base 10.
As a result, the first magnet 50 moves the first moving member 31d, the second moving member 32d, the third moving member 33d, the first supported part 23, the second supported part 24, and the third supported part 25 can be maintained in contact with each other. Therefore, the rotation device 30 can rotate the fine movement table 20 with high precision.

Further, in this embodiment, the fine movement device 1 includes a second magnet 60 that moves the fine movement table 20 in a direction opposite to the direction in which the fourth drive unit 34 presses the fine movement table 20.
Thereby, the fine movement table 20 can be rotated by the second magnet 60 in a direction opposite to the direction in which the fourth driving section 34 presses the fine movement table 20 . Therefore, the second magnet 60 can maintain the state in which the fourth moving member 34d and the side surface of the fine movement table 20 are in contact with each other. Therefore, the fourth drive unit 34 can rotate the fine movement table 20 with high precision.

In the present embodiment, a first intersection point P1 between an orthogonal plane perpendicular to the first axis 31e and the first axis 31e, a second intersection P2 between the orthogonal plane and the second axis 32e, and a second intersection point P2 between the orthogonal plane and the third axis 33e. The triangle formed by the third intersection point P3 is an isosceles triangle in which the length of the side connecting the first intersection point P1 and the second intersection point P2 is equal to the length of the side connecting the first intersection point P1 and the third intersection point P3. It is.
As a result, compared to the case where the triangle formed by the first intersection point P1, the second intersection point P2, and the third intersection point P3 is not an isosceles triangle, the first movement corresponding to the amount of rotation and the direction of rotation of the fine movement table 20. The amount and direction of movement of the member 31d, the second moving member 32d, and the third moving member 33d, and the amount and deformation of the first drive element 31b, the second drive element 32b, and the third drive element 33b. The direction of can be easily calculated.

In addition, in the present embodiment, the fine movement table 20 is linearly symmetrical in plan view with a straight line L passing through the first intersection P1 and orthogonal to the base connecting the second intersection P2 and the third intersection P3 as an axis of symmetry. It is the shape.
Thereby, even when the fine movement table 20 rotates, the center of gravity G of the fine movement table 20 is located near the axis of symmetry in plan view. Therefore, the posture of the fine movement table 20 can be stabilized.

In addition, in this embodiment, the tapered surface 23a of the first supported part 23 may be replaced with a flat surface or a curved surface. In this case, the fine movement device 1 rotatably supports the fine movement table 20 at a position different from that of the first supported part 23, the second supported part 24, and the third supported part 25, instead of the first moving member 31d. It may further include a member.

Further, the first plane 24a of the second supported part 24, the second plane 25a of the third supported part 25, and the third plane 26a of the pressed part 26 may be replaced with curved surfaces. Furthermore, the first spherical surface 31d1, the second spherical surface 32d1, the third spherical surface 33d1, and the fourth spherical surface 34d1 of the first moving member 31d, the second moving member 32d, the third moving member 33d, and the fourth moving member 34d are , may be replaced with a conical surface.

Further, the first moving member 31d, the second moving member 32d, the third moving member 33d, and the fourth moving member 34d are the first supported part 23, the second supported part 24, and the third supported part, respectively. 25 and the pressed portion 26 may be in surface contact with each other. In this case, the first moving member 31d, the second moving member 32d, the third moving member 33d, and the fourth moving member 34d may have a cylindrical shape, and the end faces of the first supported part 23 and the second supported part 24 , may be in surface contact with the third supported part 25 and the pressed part 26.

Further, the triangle formed by the first intersection point P1, the second intersection point P2, and the third intersection point P3 may be a triangle other than an isosceles triangle. The shape of the fine movement table 20 may be a polygonal shape in a plan view other than a T-shape in a plan view, or a shape other than a line-symmetrical shape.

Further, the fine movement device 1 does not need to include the first magnet 50. In this case, the first moving member 31d, the second moving member 32d, and the third moving member 33d each move the first supported part 23, the second supported part 24, and the third supported part 23 due to the weight of the fine movement table 20. The support portion 25 may be supported.

Further, the second magnet 60 and the pressed portion 26 may be arranged on the +Y side surface of the first plate portion 21. In this case, the pressed portion 26 is, for example, a permanent magnet, and is arranged so as to repel the second magnet 60.

Further, the fine movement device 1 does not need to include the second magnet 60. In this case, the fine movement device 1 may include a pressing member that presses the side surface of the fine movement table 20 in a direction opposite to the direction in which the fourth drive unit 34 presses the fine movement table 20.

Note that the pressed portion 26 may not be placed on the first plate portion 21 and the fourth moving member 34d may directly press the side surface of the fine movement table 20. In this case, the surface of the fourth moving member 34d that contacts the fine movement table 20 may be a cylindrical surface.

1 Fine movement device 10 Base 20 Fine movement table 23 First supported part 23a Tapered surface 24 Second supported part 24a First plane 25 Third supported part 25a Second plane 30 Rotating device 31 First drive part 31d First moving member 31d1 First spherical surface 31e First axis 32 Second driving section 32d Second moving member 32d1 Second spherical surface 32e Second axis 33 Third driving section 33d Third moving member 33d1 Third spherical surface 33e Third axis 34 Fourth driving section 34d Fourth moving member 34d1 Fourth spherical surface 34e Fourth axis 50 First magnet 60 Second magnet G Center of gravity L Straight line P1 First intersection P2 Second intersection P3 Third intersection

Claims (9)

The base and
fine movement table,
a rotation device disposed on the base and rotating the fine movement table with respect to the base;
The rotating device is
a first drive unit that includes a first moving member that supports a first supported portion of the fine movement table and moves the first moving member along a first axis;
The fine movement table includes a second moving member that supports a second supported part that is at a different position in plan view from the first supported part, and the second moving member is moved along a second axis parallel to the first axis. a second drive unit that moves the member;
a third moving member that supports a third supported part at a different position in plan view from the first supported part and the second supported part in the fine movement table, and a third axis parallel to the first axis; a third drive unit that moves the third moving member along;
a fourth drive unit that rotates the fine movement table in a plan view by pressing a side surface of the fine movement table;
Microtremor device. the first moving member rotatably supports the first supported part;
The fine movement device according to claim 1. The first moving member has a first spherical surface,
The first supported part has a tapered surface that makes line contact with the first spherical surface.
The fine movement device according to claim 2. the second moving member movably supports the second supported part;
the third moving member movably supports the third supported part;
The fine movement device according to any one of claims 1 to 3. The second moving member has a second spherical surface,
The second supported part has a surface that contacts the second spherical surface,
The third moving member has a third spherical surface,
The third supported part has a surface that contacts the third spherical surface,
The fine movement device according to claim 4. further comprising a first magnet that moves the fine movement table toward the base;
The fine movement device according to any one of claims 1 to 5. further comprising a second magnet that moves the fine movement table in a direction opposite to the direction in which the fourth drive unit presses the fine movement table;
The fine movement device according to any one of claims 1 to 6. formed by a first intersection between an orthogonal plane perpendicular to the first axis and the first axis, a second intersection between the orthogonal plane and the second axis, and a third intersection between the orthogonal plane and the third axis; The triangle is an isosceles triangle in which the length of the side connecting the first intersection point and the second intersection point is equal to the length of the side connecting the first intersection point and the third intersection point,
The fine movement device according to any one of claims 1 to 7. The fine movement table has, in a plan view, a line-symmetrical shape with an axis of symmetry being a straight line passing through the first intersection and orthogonal to the base connecting the second intersection and the third intersection.
The fine movement device according to claim 8.

Images