JP2023144209A - Device and device handling method - Google Patents

Abstract

To provide a device which does not require a work for installing a separate fixation member around a movable body, and does not require a work for removing the fixation member when being transported to an installation location and executing an installation work.SOLUTION: A device comprises: a chuck body 64 at a tip of which a taper part 64a, that displaces from an open state in which rotation of a ball screw 62 is permitted to a coupling state in which rotation of the ball screw 62 is regulated, is formed; a bracket 63 which arranges the chuck body 64 on the ball screw 62; and a reverse taper part 311c which is formed on a movable body 31, and engages the taper part 64a of the chuck body 64 to make the coupling state.SELECTED DRAWING: Figure 2

Description

The present invention relates to a device including a rail body supported on a base, a movable body movably disposed on the rail body, and a ball screw for moving the movable body, and a method for handling the device. .

The wafer, on which multiple devices such as ICs and LSIs are divided by dividing lines and formed on the surface, is divided into individual device chips by dicing equipment and laser processing equipment, and used for electrical equipment such as mobile phones and personal computers. Ru.

The dicing apparatus includes a chuck table that holds a wafer, a cutting means that cuts the wafer held on the chuck table, and an X-axis feeding means that relatively feeds the chuck table and the cutting means in the X-axis direction. , a Y-axis feeding means for relatively indexing and feeding the chuck table and the cutting means in a Y-axis direction perpendicular to the X-axis direction, and a Y-axis feeding means for relatively indexing and feeding the chuck table and the cutting means in a Z-axis direction perpendicular to the a cassette table on which a cassette containing a plurality of wafers is placed and moves up and down; an unloading means for transporting wafers from the cassette to a temporary receiving table; and a conveying means for conveying the wafer up to (for example, see Patent Document 1).

JP 2019-111628 Publication

When the above-mentioned dicing device is transported to the installation site by a transport vehicle such as a truck, due to shaking and vibration during transport, it may be difficult to move it using the above-mentioned X-axis feeding means, Y-axis feeding means, Z-axis feeding means, etc. If a movable body such as a chuck table moves, the dicing device may be damaged or malfunction, so prepare a separate fixing member and arrange it so that it is interposed around the movable body. , the movable body is transported in a fixed state.

However, when a fixed member is used to prevent the movable body from moving as described above, it is necessary to install the fixed member around the movable body, and also to carry out the installation work when the device arrives at the installation location. In this case, it is necessary to remove the fixing member, and furthermore, it is necessary to dispose of the removed fixing member or collect it for reuse, so there is a problem that the installation work is troublesome and troublesome. . Such problems are not limited to dicing equipment, but include a rail body supported by a base, a movable body movably disposed on the rail body, and a ball screw that moves the movable body. This can occur in any device equipped with, for example, a laser processing device.

The present invention has been made in view of the above facts, and its main technical problem is to eliminate the need for installing a separate fixing member around the movable body when fixing the movable body of the device so that it does not move. An object of the present invention is to provide a device that does not require removing the fixing member when the device is transported to an installation site and installed, and to provide a method for handling the device.

In order to solve the above main technical problem, the present invention provides a rail body supported by a base, a movable body movably disposed on the rail body, and a ball screw for moving the movable body. A device comprising: a chuck body having a tapered portion formed at the tip thereof that is displaced from an open state that allows rotation of the ball screw to a fastened state that restricts rotation of the ball screw by an external force; A device is provided that includes a bracket disposed on a ball screw, and a reverse tapered portion formed on the movable body and engaged with the tapered portion of the chuck body to achieve the fastened state.

Further, according to the present invention, there is provided a device including a rail body supported by a base, a movable body movably disposed on the rail body, and a ball screw for moving the movable body, a chuck body formed on the movable body and having a tapered portion at its tip that is displaced from an open state that allows rotation of the ball screw to a fastened state that restricts rotation of the ball screw by external force; and a chuck body disposed on the ball screw. An apparatus is provided that includes a reverse tapered portion that engages with the tapered portion of the chuck body to bring the chuck body into a fastened state.

Furthermore, according to the present invention, there is provided a method for handling the above-mentioned device, wherein the ball screw is rotated in the forward direction to engage the reverse tapered portion with the tapered portion to bring the chuck body into a fastened state. A ball screw fixing step for fixing the device, a device moving step for moving the device to an installation location, and at the installation location, rotating the ball screw in the opposite direction to open the chuck body and releasing the fixation of the ball screw. A method of handling a device is provided comprising: unsecuring.

The device of the present invention includes a rail body supported on a base, a movable body movably disposed on the rail body, and a ball screw for moving the movable body, the device comprising: a chuck body having a tapered portion at its tip that is displaced from an open state that allows rotation of the screw to a fastened state that restricts rotation of the ball screw by an external force; a bracket that arranges the chuck body on the ball screw; A reverse tapered part formed on the movable body and engaged with the tapered part of the chuck body to bring the fastened state into the fastened state is provided, so that a separate fixing member is interposed to prevent the movable body from moving. This eliminates the need for removing the fixing member and further disposing of the fixing member after arriving at the installation site, and it is possible to solve the problem that the installation work is cumbersome due to the surface and the like.

Further, the device of the present invention is a device including a rail body supported on a base, a movable body movably disposed on the rail body, and a ball screw for moving the movable body, a chuck body formed on the movable body and having a tapered portion at its tip that is displaced from an open state that allows rotation of the ball screw to a fastened state that restricts rotation of the ball screw by external force; and a chuck body disposed on the ball screw. and a reverse tapered portion that engages with the tapered portion of the chuck body to bring the chuck body into a fastened state. After arriving at the installation site, it is not necessary to remove the fixing member and further dispose of the fixing member, and it is possible to solve the problem that the installation work is cumbersome due to the surface or the like.

Furthermore, the method for handling the device of the present invention includes a ball screw fixing step of rotating the ball screw in the forward direction to engage the reverse tapered portion with the tapered portion to set the chuck body in a fastened state and fix the ball screw. , a device moving step of moving the device to an installation location, and an unfixing step of rotating the ball screw in the opposite direction to open the chuck body at the installation location to release the fixation of the ball screw. This eliminates the need to use a separate fixing member to prevent the movable body from moving, as well as the need to remove and dispose of the fixing member after arriving at the installation location. The problem of cumbersome work on surfaces can be solved.

FIG. 1 is an overall perspective view of a dicing apparatus according to the present embodiment. FIG. 2 is a perspective view showing a chuck body and a nut member having an inverted tapered portion disposed in the dicing apparatus shown in FIG. 1. FIG. (a) A sectional view showing the chuck body shown in FIG. 2 in an open state, (b) A sectional view showing the chuck body shown in FIG. 2 in a fastened state, and (c) A sectional view showing another embodiment of FIG. 2. be. 2 is a perspective view showing another embodiment of a chuck body and a nut member disposed in the dicing apparatus shown in FIG. 1. FIG. (a) A sectional view of the chuck body shown in FIG. 4 in an open state, and (b) a sectional view of the chuck body shown in FIG. 4 in a fastened state. (a) This is a modification of the embodiment of the chuck body and nut member shown in FIG. 4, and is a cross-sectional view showing the state where the chuck body is in the open state. (b) The chuck body shown in (a) is in the fastened state. FIG.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a device constructed based on the present invention and embodiments of a method of handling the device will be described in detail with reference to the accompanying drawings.

FIG. 1 shows an overall perspective view of a dicing apparatus 1 disclosed as an embodiment of the apparatus of the present invention. The dicing apparatus 1 is disposed on a base 2 and includes a holding means 3 for holding a workpiece, a cutting means 5 for cutting the workpiece held by the holding means 3, and a holding means 3 for cutting the workpiece held by the holding means 3. and the cutting means 5 relative to each other in the X-axis direction indicated by the arrow X in the figure, and the cutting means 5 relative to the Y-axis indicated by the arrow Y in the figure perpendicular to the X-axis direction. and a second feeding means 7 for indexing and feeding in the direction.

The base 2 supports a pair of first rail bodies 2a, 2a along the X-axis direction and a pair of second rail bodies 2b, 2b along the Y-axis direction. The holding means 3 includes a first movable body 31 movably disposed on the first rail bodies 2a, 2a, a cylindrical member 32 fixed to the upper surface of the first movable body 31, and a cylindrical member 32. A cover member 33 fixed to the upper part of the cover member 33, a chuck table 34 that protrudes from the upper surface of the cover member 33 and holds the workpiece by suction, and a plurality of (four in this embodiment) arranged at equal intervals around the outer circumference of the chuck table 34. A clamp 35 is provided for gripping a frame arranged to support a workpiece.

The first feeding means 6 includes a motor 61 and a ball screw 62. A motor 61 is disposed at one end of the ball screw 62, and the other end is rotatably supported by a bearing 63 disposed on the base 2. The rotational motion of the motor 61 is transmitted by a ball screw mechanism to a nut member 311 (see also FIG. 2), which will be described later, disposed on the lower surface side of the first movable body 31 via a ball screw 62, resulting in linear motion. is converted to Thereby, the first movable body 31 is moved back and forth in the X-axis direction along the first rail bodies 2a, 2a on the base 2.

The cutting means 5 is supported by a second movable body 53 that is movably disposed along the second rail bodies 2b, 2b along the Y-axis direction, and has a region in which the holding means 3 moves in the X-axis direction. It is arranged at a rear position adjacent to the Y-axis direction. The cutting means 5 includes a spindle unit 50, and a blade cover 52 is disposed on the tip side of the spindle unit 50 to protect a cutting blade 51 fixed to the tip of the rotating spindle and having a cutting edge on the outer periphery. A rotary drive source such as a motor (not shown) is housed at the rear end of the spindle unit 50, and the cutting blade 51 is rotated by rotating the motor. Further, the spindle unit 50 is integrally provided with an imaging means 4 that takes an image of the workpiece held by the holding means 3 and detects an area to be processed.

As shown in the figure, the second movable body 53 includes a horizontal wall portion 53a slidably disposed on the second rail bodies 2b, 2b, and a vertical wall portion 53b erected on the horizontal wall portion 53a. It is equipped with The spindle unit 50 is supported by a vertical wall portion 53b so as to be movable up and down. The second movable body 53 is configured to be movable along the Y-axis direction by the second feeding means 7. The second feeding means 7 includes a motor 71 and a ball screw 72 whose end portion is rotatably supported by a bearing portion 73 disposed on the base 2 . The second feeding means 7 transmits the rotational motion of the motor 71 to a nut member (not shown) disposed on the lower surface side of the horizontal wall portion 53a, converts it into linear motion via a ball screw mechanism, and converts the rotational motion of the motor 71 into a linear motion. The second movable body 53 is moved forward and backward along the second rail bodies 2b, 2b on the table 2 in the Y-axis direction.

A pair of third rail bodies 54, 54 supported along the Z-axis direction (vertical direction) indicated by arrow Z is provided on the side surface of the vertical wall portion 53b of the second movable body 53 (one (shown with a thin line). A third movable body 55 that functions as a support member that supports the spindle unit 50 is slidably attached to the third rail bodies 54 , 54 . A motor 56 is disposed on the vertical wall portion 53b, and the rotation of the motor 56 is controlled by a ball screw mechanism via a ball screw whose one end is rotatably supported by a bearing portion (not shown). It is converted into a linear motion and transmitted to the third movable body 55. By rotating the motor 56 forward or reverse, the third movable body 55 is moved forward and backward in the Z-axis direction.

The dicing apparatus 1 is provided with a control means (not shown). The control means is composed of a computer, and includes a central processing unit (CPU) that executes arithmetic processing according to a control program, a read-only memory (ROM) that stores the control program, etc., and a computer that temporarily stores the calculation results, etc. The device includes a readable/writable random access memory (RAM), an input interface, and an output interface (details are omitted from illustration). The control means can control each operating section of the dicing device 1 and perform alignment based on the image taken by the imaging means 4.

As shown in FIG. 2, a nut member 311 disposed on the lower surface side of the first movable body 31 is screwed into the ball screw 62 of this embodiment, and the ball screw 62 is rotated in the direction indicated by the arrow R1. By rotating in the forward rotation direction, the nut member 311 can be moved in the direction indicated by arrow R2. Note that in FIG. 2, the first movable body 31 connected to the upper surface 311a of the nut member 311 is omitted for convenience of explanation. Further, a chuck body 64 is disposed on the ball screw 62. A tapered portion 64a is formed at the tip of the chuck body 64. The tapered portion 64a is displaced from an open state in which rotation of the ball screw 62 is allowed to a fastened state in which rotation of the ball screw 62 is restricted by an external force. The chuck body 64 includes a shaft portion 64b on the rear end side opposite to the tapered portion 64a in the longitudinal direction, and the rear end portion of the shaft portion 64b is fixed to the bearing portion 63. That is, the bearing portion 63 is a bracket that has the function of arranging the chuck body 64 on the ball screw 62. A through hole 64c is formed in the chuck body 64, passing through the tapered portion 64a and the shaft portion 64b, and into which the ball screw 62 is inserted. Note that the inner diameter of the through hole 64c is slightly larger than the outer diameter of the ball screw 62 by 0.1 to 0.5 mm when no external force is applied to the tapered portion 64a, and is a dimension in which the ball screw 62 is not fixed. is set to . The chuck body 64 is made of, for example, hard urethane resin, and has a tapered portion 64a and a cut portion 64d spanning the shaft portion 64b at equal intervals, except for a portion of the rear end side (bearing portion 63 side) of the shaft portion 64b. A plurality of (four in this embodiment) are formed. Note that the chuck body 64 is not necessarily limited to being made of urethane resin, and may be made of other resins or even metal. However, when the chuck body 64 is made of metal, the parts that come into contact with the ball screw 62 in the fastened state are coated with resin so as not to damage the ball screw 62 when the chuck body 64 is in the fastened state described later. It is preferable to perform

In addition to FIG. 2, as can be understood from FIG. 3, in the nut member 311 formed on the lower surface of the first movable body 31, the flat surface 311b facing the chuck body 64 has the taper of the chuck body 64 described above. An annular reverse tapered portion 311c that engages with the portion 64a is formed.

The dicing apparatus 1 of the present embodiment is generally as described above, and the dicing apparatus 1 described above is transported from a transportation source, for example, an assembly factory of the dicing apparatus 1, to a desired installation location (for example, a processing for cutting semiconductor wafers). This section explains how to handle it when moving it to a factory and installing it.

Before transporting the dicing device 1 from the transport source, a ball screw fixing step is performed to prevent the first movable body 31 from moving due to shaking or vibration during transport. do. In the ball screw fixing step, first, the motor 61 of the first feeding means 6 is operated to rotate the ball screw 62 in the direction indicated by the arrow R1. The electric power (for example, 50 W) supplied to the motor 61 at this time may be smaller than the electric power (for example, 100 W) supplied when the dicing apparatus 1 performs the cutting process. As a result, the first movable body 31 together with the nut member 311 is moved in the direction shown by the arrow R2 in FIG. 3(a), and as shown in FIG. 311c is engaged with the tapered portion 64a of the chuck body 64. After the engagement, the operation of the motor 61 is continued until a predetermined torque is reached, and then the power of the motor 61 is turned off, thereby applying an external force to the tapered portion 64a of the chuck body 64 from the reverse tapered portion 311c. Since the above-mentioned cutting portion 64d is formed, the distal end side of the chuck body 64 is bent in the direction of arrow R3 shown in FIG. 62 is fixed and brought into a fastened state. With the above steps, the ball screw fixing step is completed. By performing the ball screw fixing step in this way, the fixed state of the ball screw 62 is maintained even when the power of the motor 61 is turned off, and even if the dicing apparatus 1 shakes or vibrates during transportation, The first movable body 31 is prevented from moving.

As described above, once the ball screw fixing step is performed and the chuck body 64 is brought into the fastened state, the device moving step is performed to move the dicing device 1 to a desired installation location. Although details of the step of moving the device will be omitted, the device is transported to the installation location by being placed on a transportation vehicle such as a truck.

Once the dicing apparatus 1 is installed at the installation location, the power is turned on to the dicing apparatus 1 after appropriate assembly work and the like. Then, the motor 61 is operated to reversely rotate the ball screw 62 in the direction opposite to the arrow R1 in FIG. At this time, it is preferable that the power input to the motor 61 be larger (for example, 100 W) than the power input when performing the ball screw fixing step. As a result, the nut member 311 separates from the chuck body 64 fixed to the bearing part 63 and enters the state shown in FIG. Returns from the closed state to the open state. In this way, the chuck body 64 is opened, the ball screw 62 is released, and the fixing release step is completed. In the ball screw fixing step described above, the region where the reverse tapered portion 311c of the nut member 311 engages with the tapered portion 64a of the chuck body 64 is located at the first This is an area that the first movable body 31 cannot reach, so that the ball screw 62 will not be unintentionally fixed during cutting and the first movable body 31 will not become immobile. The ball screw fixing step and the fixing release step described above are stored in the control means as a control program, and are executed according to instructions from the operator.

Note that in the above description, only the effects of the chuck body 64 and the reverse tapered portion 311c formed on the nut member 311 of the first movable body 31 were explained, but the configuration corresponding to these is described in the second rail body. 2b, a third movable body that moves on the third rail bodies 54, 54, and is disposed on the second movable body 53 that moves on the second movable body 53 and the ball screw 72 that moves the second movable body 53; 55 and a ball screw (not shown) that moves the third movable body 55. As a result, the second movable body 53 and the third movable body 55 can also be separately installed by performing the ball screw fixing step before the device moving step and the fixing release step after the device moving step. It is fixed without any intervening fixing member.

According to the above-described embodiment, there is the work of interposing a separate fixing member to prevent each movable body from moving, and the work of removing the fixing member and disposing or recovering the fixed member after arriving at the installation location. This eliminates the need for installation work, which solves the problem of cumbersome installation work.

In the embodiment described above, the chuck body 64 is disposed on the ball screw 62 by the bearing portion 63 functioning as a bracket, and the reverse tapered portion 311c that engages with the tapered portion 64a of the chuck body 64 is attached to the first movable body 31. Although an example in which it is formed in the nut member 311 is shown, the present invention is not limited thereto. For example, as shown in FIG. 3(c), a chuck body 64' having a tapered part 64a', a shaft part 64b', a through hole 64c', and a cutting part 64d' similar to the chuck body 64 described above is attached to a first chuck body 64'. A block body 65 having an annular reverse tapered portion 65a disposed on the nut member 311 of the movable body 31 and engaged with the tapered portion 64a′ of the chuck body 64′ may be disposed on the bearing portion 63. . With this configuration, similarly to the above-described embodiment, the ball screw 62 is rotated forward to engage the reverse tapered portion 65a with the tapered portion 64a' of the chuck body 64' to apply an external force to the chuck body 64'. By doing so, it is possible to perform the ball screw fixing step of fixing the ball screw 62 in the fastened state, and it is possible to obtain the same effects as in the above-described embodiment.

The present invention is not limited to the embodiments described above, but includes other embodiments described based on FIGS. 4 to 6. Note that the apparatuses according to other embodiments shown in FIGS. 4 to 6 are those in which only a part of the dicing apparatus 1 shown in FIG. Omitted.

FIG. 4 shows a chuck body 66 with a tapered portion 66a formed at its tip that is displaced from an open state that allows rotation of the ball screw 62 to a fastened state that restricts rotation of the ball screw 62 by an external force, and a chuck body 66 that is connected to a ball screw 62. A chuck body holding member 67 functioning as a bracket disposed on the screw 62 and a nut member 311 of the first movable body 31 engage with the tapered portion 66a of the chuck body 66 to apply an external force to the fastened state. An annular inverted tapered portion 311c is shown in an exploded perspective view.

The chuck body 66 includes a shaft portion 66b on the rear side of the tapered portion 66a, and a quadrangular prism-shaped guide portion 66c is formed at the center of the shaft portion 66b. As shown, the chuck body holding member 67 has a substantially cubic shape, is surrounded by a side wall 67a and is open on the front side, and forms a storage space 67b in which the chuck body 66 is accommodated. Furthermore, a guide hole 67d is formed in the bottom portion 67c of the chuck body holding member 67, into which the guide portion 66c of the chuck body 67 is slidably inserted.

The chuck body 66 is formed with a tapered portion 66a, and a through hole 66e that passes through the shaft portion 66b and the guide portion 66c and into which the ball screw 62 is inserted. Note that the inner diameter of the through hole 66e is set to be slightly larger, 0.1 to 0.5 mm, than the outer diameter of the ball screw 62 when no external force is applied, which will be described later. The chuck body 66 is made of, for example, hard urethane resin, and has a plurality (four in this embodiment) of cut parts 66f extending over the taper part 66a and the shaft part 66b at equal intervals.

The shaft portion 66b side of the chuck body 66 is inserted into the accommodation space 67b of the chuck body holding member 67, and the shaft portion 66b and guide portion 66c are made to protrude outward from the guide hole 67d, and the spring S is inserted as shown in the figure. An intervening ring nut 66h is screwed onto a male thread 66d formed at the end of the shaft portion 66b to hold the spring S (see also FIG. 5(a)). The open end 67e of the chuck body holding member 67 is fixed to the flat surface 311b side of the nut member 311 of the first movable body 31 by appropriate fixing means, and the above-mentioned members are integrated. As can be understood from FIG. 5(a), when the chuck body 66 is in the open state, due to the action of the spring S, the tapered portion 66a of the chuck body 66 is moved from the reverse tapered portion 311c of the nut member 311. They are placed slightly apart from each other by 2 to 10 mm. With the above configuration, the chuck body 66 is held by the nut member 311 by the chuck body holding member 67 and is also disposed on the ball screw 62.

An embodiment of the ball screw fixing step performed based on the above configuration will be described.

In the ball screw fixing step carried out in the configuration shown in FIGS. 4 and 5, first, as shown in FIG. The motor 61 of No. 6 is operated to rotate the ball screw 62 in the forward rotation direction shown by the arrow R1. The electric power (for example, 50 W) supplied to the motor 61 at this time may be smaller than the electric power (for example, 100 W) supplied when the dicing apparatus 1 performs the cutting process. Thereby, the nut member 311 is moved in the direction shown by arrow R2 in FIG. 5(a). Then, the nut member 311 approaches the bearing portion 63, and the rear end portion 66g of the shaft portion 66b of the chuck body 66 comes into contact with the bearing portion 63, as shown in FIG. 5(b). Further, by continuing the operation of the motor 61, the nut member 311 moves in the direction shown by arrow R2, thereby pushing the chuck body 66 and compressing the spring S. 311c is engaged with the tapered portion 66a of the chuck body 66. Further, by continuing the operation of the motor 61 until a predetermined torque is reached, an external force is applied from the reverse tapered portion 311c to the tapered portion 66a of the chuck body 66, and the above-mentioned cutting portion 66f is formed, so that the chuck body The distal end side of 66 is bent in the direction of arrow R3 shown in FIG. 5(b). As a result, the diameter of the through hole 66e of the chuck body 66 is reduced to a fastened state in which the ball screw 62 is fixed. With the above steps, the ball screw fixing step is completed. By performing the ball screw fixing step in this way, even if the operation of the motor 61 is stopped, the ball screw 62 remains fixed, and even if the dicing apparatus 1 shakes or vibrates during transportation, the first The movable body 31 is prevented from moving.

As described above, once the ball screw fixing step is performed and the chuck body 66 is in the fastened state, the device moving step is performed to move the dicing device 1 to a desired installation location. Although details of the step of moving the device will be omitted, the device is transported to the installation location by being placed on a transportation vehicle such as a truck.

Once the dicing device 1 has been installed at the installation location, the dicing device 1 is powered on, the motor 61 is activated, and the ball screw 62 is reversely rotated in the direction opposite to the arrow R1 in FIG. At this time, it is preferable that the power input to the motor 61 be larger (for example, 100 W) than the power input when performing the ball screw fixing step. As a result, the reverse tapered portion 311c of the nut member 311 separates from the tapered portion 66a of the chuck body 66, the external force applied to the tapered portion 66a of the chuck body 66 is released, and the state is changed from the above-described fastened state as shown in FIG. It returns to the open state shown in (a). In this way, by opening the chuck body 66, the fixing release step of releasing the fixation of the ball screw 62 is completed.

Note that, similarly to the previously described embodiment, the configuration corresponding to the above-described chuck body 66 and the reverse tapered portion 311c that engages with the tapered portion 66a of the chuck body 66 to bring it into the fastened state is replaced with the second rail body. 2b, a third movable body that moves on the third rail bodies 54, 54, and is disposed on the second movable body 53 that moves on the second movable body 53 and the ball screw 72 that moves the second movable body 53; 55 and a ball screw (not shown) that moves the third movable body 55. As a result, by performing the ball screw fixing step before the device moving step described above, the second movable body 53 and the third movable body 55 can also be fixed without intervening a separate fixing member. I can do it.

The above-described embodiment also eliminates the need for intervening a separate fixing member to prevent each movable body from moving, and the need to remove the fixing member and dispose of the fixing member after arriving at the installation location. This solves the problem of cumbersome installation work on surfaces.

As mentioned above, the embodiment described based on FIGS. 4 and 5 can be further modified. For convenience of explanation, a perspective view is omitted, but as shown in a cross-sectional view in FIG. 6, the ball screw 62 is displaced from an open state in which rotation is allowed to a fastened state in which rotation of the ball screw 62 is restricted by an external force. A chuck body 68 having a tapered portion 68a formed at its tip may be disposed on the nut member 311 on the first movable body 31 side. The chuck body 68 has substantially the same configuration as the chuck body 64 described based on FIGS. 2 and 3, and includes a tapered portion 68a and a shaft portion 68b, and the rear end side of the shaft portion 68b is connected to the nut member 311. is fixed to the plane 311b. The chuck body 68 is formed with a through hole 68c that passes through the tapered portion 68a and the shaft portion 68b and into which the ball screw 62 is inserted. , is set to be slightly larger than the outer diameter of the ball screw 62 by 0.1 to 0.5 mm. The chuck body 68 is made of, for example, hard urethane resin, and has a tapered portion 68a and a cut portion 68d spanning the shaft portion 68b at equal intervals, except for a portion of the rear end side (the nut member 311 side) of the shaft portion 68b. Multiple formations are formed.

Further, the ball screw 62 is provided with a block body 69 having an annular reverse tapered portion 69a that engages with the tapered portion 68a of the chuck body 68 to bring the chuck body 68 into a fastened state. The block body 69 is housed in an internal space 81 of a block body holding member 80 having a cubic shape substantially similar to the above-described chuck body holding member 67, and the block body holding member 80 is fixed to the nut member 311. The shaft portion 69b of the block body 69 on the opposite side to the reverse tapered portion 69a is exposed from the guide hole 82 of the block body holding member 80, and a ring nut 69d is screwed onto the rear end portion 69c to complete the block body holding member. A spring S is held between 80 and 80. As shown in FIG. 6(a), when the nut member 311 is separated from the bearing portion 63, the reverse tapered portion 69a is slightly separated from the tapered portion 68a of the chuck body 68 by 2 to 10 mm due to the action of the spring S. The current state will be maintained.

When carrying out the above-mentioned ball screw fixing step with the configuration shown in FIG. Rotate. The electric power (for example, 50 W) supplied to the motor 61 at this time may be smaller than the electric power (for example, 100 W) supplied when the dicing apparatus 1 performs the cutting process. Thereby, the nut member 311 is moved in the direction shown by arrow R2 in FIG. 6(a). Then, as the nut member 311 approaches the bearing portion 63, the rear end portion 69c of the block body 69 having the reverse tapered portion 69a comes into contact with the bearing portion 63, as shown in FIG. 6(b). By continuing to operate the motor 61, the spring S is compressed, and the block body 69 moves toward the chuck body 68, and the reverse tapered portion 69a formed on the block body 69 is connected to the tapered portion 68a of the chuck body 68. to engage. Further, by continuing the operation of the motor 61 until a predetermined torque is reached, an external force is applied from the reverse tapered portion 69a of the block body 69 to the tapered portion 68a of the chuck body 68, and the above-mentioned fractured portion 68d is formed. As a result, the tip side of the chuck body 68 is bent in the direction of arrow R3 shown in FIG. 6(b). Then, the diameter of the through hole 68c of the chuck body 68 is reduced to a fastened state in which the ball screw 62 is fixed, and the ball screw fixing step is completed.

By performing the ball screw fixing step as described above, the ball screw 62 continues to be fixed even when the operation of the motor 61 is stopped, and even if the dicing apparatus 1 shakes or vibrates during transportation, the ball screw 62 remains fixed. The first movable body 31 is prevented from moving. Further, by disposing the same configuration as shown in FIG. 6 on the second movable body 53 and the third movable body 55, the dicing apparatus 1 can be Even if the device shakes or vibrates, the second movable body 53 and the third movable body 55 are prevented from moving.

The present invention is not limited to the embodiments described above. The above-described embodiment shows an example in which the device of the present invention is applied to the dicing device 1, but the movable body is provided with a rail body supported by a base and movably disposed on the rail body. and a ball screw that moves the movable body, and can be applied to any other processing equipment (eg, laser processing equipment, grinding equipment, inspection equipment, workpiece conveyance equipment, etc.).

1: Dicing device 2: Base 2a, 2a: First rail body 2b, 2b: Second rail body 3: Holding means 31: First movable body 311: Nut member 311a: Upper surface 311b: Plane 311c: Reverse Tapered portion 32: Cylindrical member 33: Cover member 34: Chuck table 35: Clamp 4: Imaging means 5: Cutting means 51: Spindle unit 52: Blade cover 53: Second movable body 53a: Horizontal wall portion 53b: Vertical wall portion 54, 54: Third rail body 55: Third movable body 56: Motor 6: First feeding means 61: Motor 62: Ball screw 63: Bearing part (bracket)
64, 64': Chuck body 64a, 64a': Tapered part 64b, 64b': Shaft part 64c, 64c': Through hole 64d, 64d': Cutting part 65: Block body 65a: Reverse taper part 66: Chuck body 66a: Tapered part 66b: Shaft part 66c: Guide part 66d: Male thread 66e: Through hole 66f: Cutting part 66g: Rear end part 66h: Ring nut 67: Chuck body holding member 67a: Side wall 67b: Accommodation space 67c: Guide part 67d: Guide Hole 67e: Open end 68: Chuck body 68a: Tapered part 68b: Shaft 68c: Through hole 68d: Cutting part 69: Block body 69a: Reverse tapered part 69b: Shaft 69c: Rear end 7: Second feed Means 71: Motor 72: Ball screw 73: Bearing part (bracket)
80: Block body holding member 82: Guide hole S: Spring

Claims (3)

A device including a rail body supported by a base, a movable body movably disposed on the rail body, and a ball screw for moving the movable body,
A chuck body having a tapered portion at its tip that is displaced from an open state that allows rotation of the ball screw to a fastened state that restricts rotation of the ball screw by an external force, and a bracket that arranges the chuck body on the ball screw. and a reverse tapered portion formed on the movable body and engaged with the tapered portion of the chuck body to bring the fastened state into place. A device including a rail body supported by a base, a movable body movably disposed on the rail body, and a ball screw for moving the movable body,
a chuck body formed on the movable body and having a tapered portion at its tip that is displaced from an open state that allows rotation of the ball screw to a fastened state that restricts rotation of the ball screw by external force; and a chuck body disposed on the ball screw. A device comprising: a reverse tapered portion that engages with the tapered portion of the chuck body to bring the chuck body into a fastened state. A method for handling the device according to claim 1 or 2, comprising:
a ball screw fixing step of fixing the ball screw by rotating the ball screw in the forward direction to engage the reverse tapered portion with the tapered portion to bring the chuck body into a fastened state;
a device moving step of moving the device to an installation location;
a fixing release step of rotating the ball screw in the opposite direction at the installation location to open the chuck body and releasing the fixation of the ball screw;
How to handle equipment that includes.

Images