JP2023139679A - Chemical substance detector and chemical substance detection method - Google Patents

Abstract

To efficiently inspect by a simple configuration.SOLUTION: A chemical substance detector comprises: a heating device 1 that heats a wiping member, with chemical substances sticking to an inspection object wiped off; an ion source 5 that ionizes chemical substance-related steam having occurred in the heating device 1 as the wiping member is heated; a mass spectrometer 61 that analyzes the ion generated by the ion source 5; an intake pump 302 that draws in the steam generated in the heating device 1; pipings 201-203 that connect the heating device 1 and the intake pump 302; and a branch part BR which is disposed in the pipings 201-203, and branches the piping 201 into two so that one is connected to the ion source 5 and the other is connected to the intake pump 302.SELECTED DRAWING: Figure 1

Description

The present invention relates to techniques for chemical substance detection devices and chemical substance detection methods.

Trace inspections are used as one way to prevent the introduction of explosives and illegal drugs. For example, if explosives or drugs are attached to the outside of the bag, they may be hidden inside the bag. Therefore, a test is performed in which the surface of the test object is wiped, the deposits are collected, and the deposits are identified using chemical analysis means. Ion mobility methods and mass spectrometry are often used for analysis in such trace inspections.

Patent Document 1 states, ``a step of heating a test piece to which a sample collected from the test object is attached, a step of sucking gas generated from the heated test piece as a sample gas, and a step of sucking the sucked sample gas. a first analysis step of analyzing the mass of the ions of the ionized sample gas to obtain a mass spectrum; and a first analysis step of determining whether ions with a first unique m/z value are present. a determination step; a second analysis step of performing tandem mass spectrometry according to the determination result of the first determination step; and ions of a second unique m/z value in the mass spectrum obtained by the tandem mass spectrometry. and a second determination step of determining whether or not the test piece exists, and the step of heating the test piece includes inserting and heating the test piece between two heating plates facing each other with a distance between them. A method and device for detecting a specific drug are disclosed (see claim 1).

Patent Document 2 describes "a dielectric device having a first electrode, a second electrode, and an inlet and an outlet for a sample and a discharge gas, which are provided between the first electrode and the second electrode. An alternating current voltage is applied to the body part and one of the first electrode and the second electrode, and the sample is heated by the discharge generated between the first electrode and the second electrode. A mass spectrometer is disclosed that has a power source for ionization and a mass spectrometer for analyzing ions discharged from the discharge section, and the discharge is performed at 2 Torr or more and 300 Torr or less. (See item 1).

Patent Document 3 states, ``The present invention comprises a vaporization chamber (1) that vaporizes a test sample, a heater (16) that heats the test sample, and an analyzer (that analyzes the vaporized and ionized sample). 3) and a setting device for setting information regarding the heating temperature of the heater and the gas flow to the vaporization chamber, the setting device is for setting the heating conditions and gas flow for an arbitrary time range, and the setting device A drug detection device is disclosed in which the heater and the suction device are controlled based on the information obtained from the drug detection device (see Abstract).

Patent No. 3800422 Patent No. 5622751 Japanese Patent Application Publication No. 2016-173332

In order to downsize trace inspection devices, a technique has been disclosed in which chemical substances are ionized in an ion source under reduced pressure. However, in order to ionize a chemical substance under reduced pressure, it is necessary to introduce the chemical substance into the ion source through a thin capillary in order to isolate the discharge section that performs ionization from the outside of atmospheric pressure. However, such a configuration requires improvement because inspection takes time.

In view of such problems, it is an object of the present invention to perform efficient inspections with simple configuration changes.

In order to solve the above-mentioned problems, the present invention includes a first heating section that heats a medium from which chemical substances adhering to an inspection object have been wiped off, and a first heating section that heats a medium that is heated by heating the medium. an ion source section that ionizes the vapor related to the chemical substance generated in the ion source section, a first analysis section that analyzes the ions generated in the ion source section, and a suction section that sucks the vapor generated in the first heating section. and a pipe connecting the first heating part and the suction part, and the pipe is provided in the pipe, and the pipe is branched so that one side is connected to the ion source part and the other side is connected to the suction part. It is characterized by having a branch part.
Other solutions will be described as appropriate in the embodiments.

According to the present invention, efficient inspection can be performed with a simple configuration change.

FIG. 1 is a diagram showing the configuration of a trace inspection device according to a first embodiment. It is a figure showing an example of composition of a heating device. It is a flowchart which shows the procedure of the process performed by the trace inspection apparatus in 1st Embodiment. It is a figure showing the example of composition of the trace inspection device in a comparative example. It is a figure showing an example of composition of an ion source used for a trace inspection device. It is a figure showing an example of composition of a trace inspection device concerning a 2nd embodiment. It is a flowchart which shows the procedure of the process performed by the trace inspection apparatus in 2nd Embodiment. FIG. 7 is a diagram showing the configuration of a trace inspection device according to a third embodiment. It is a flowchart which shows the procedure of the process performed by the trace inspection apparatus in 3rd Embodiment. It is a figure showing the composition of the trace inspection device concerning a 4th embodiment. 12 is a flowchart (part 1) showing the procedure of processing performed by the trace inspection device in the fourth embodiment. 12 is a flowchart (part 2) showing the procedure of processing performed by the trace inspection device in the fourth embodiment. FIG. 3 is a diagram showing the hardware configuration of a control device.

Next, modes for carrying out the present invention (referred to as "embodiments") will be described in detail with reference to the drawings as appropriate.

[First embodiment]
<System configuration>
FIG. 1 is a diagram showing the configuration of a trace inspection device T according to the first embodiment. Moreover, FIG. 2 is a diagram showing the configuration of the heating device 1.
As shown in FIG. 1, the trace inspection device (chemical substance detection device) T includes a heating device (first heating section) 1, a flow rate control device 301, an intake pump (suction section) 302, and an ion source (ion source section). 5, a mass spectrometer (first analysis section) 61, an exhaust pump 62, a control device (control section) 71, and an alarm device (alarm section) 72. As the ion source 5, a barrier discharge ion source 5A (see FIG. 5) is used. Mass spectrometer 61 and control device 71 are communicably connected via signal line 801. Further, the control device 71 and the alarm device 72 are communicably connected via a signal line 802. The heating device 1 is connected to a flow rate control device 301 via piping 201 and piping 202. Further, the flow rate control device 301 is connected to an intake pump 302 via a pipe 203. That is, the pipe 201 and the pipe 202 are pipes that connect the heating device 1 and the intake pump 302. Further, the heating device 1 is connected to the ion source 5 via a pipe 201 and a thin tube 401. The branch portion BR will be described later. In this embodiment, the heating device 1 side is appropriately referred to as upstream, and the intake pump 302 or ion source 5 side is referred to as downstream.

<Heating device 1>
First, the configuration of the heating device 1 will be described with reference to FIG. 2, and the configuration other than the heating device 1 in FIG. 1 will be described later.
As shown in FIG. 2, the heating device 1 includes an upper heating section 110 and a lower heating section 120. The lower heating section 120 is movable in the vertical direction (white arrow 141) by a movable rod 131. The upper heating section 110 is fixed. However, the lower heating section 120 may be fixed and the upper heating section 110 may be movable in the vertical direction. Alternatively, both the upper heating section 110 and the lower heating section 120 may be movable in the vertical direction. Incidentally, when the heating device 1 is installed in the trace inspection device T, the ground side is placed at the bottom, and the direction opposite to the ground side is placed at the top.

These lower heating section 120 and upper heating section 110 are heated to about 200° C. by a heater (not shown). Further, the lower heating section 120 is provided with an opening 121 for taking in air. Further, the upper heating section 110 is connected to the pipe 201 by providing a through hole at the connection part with the pipe 201. In order to prevent adsorption of chemical substances, the pipe 201 is heated to about 200°C.

A wiping member (medium used to wipe off chemical substances attached to the test object) W that has been used to wipe off the surface of the test object (part of concern) such as a bag is inserted into the heating device 1 by the inspector. . When the wiping member W is inserted into the heating device 1, the lower heating section 120 is raised by the movable rod 131. As a result, the wiping member W is sandwiched between the upper heating section 110 and the lower heating section 120, which are heated, respectively. The wiping member W is heated by being sandwiched between the upper heating section 110 and the lower heating section 120. The chemical substances adhering to the wiping member W are vaporized by the heat and sent to the pipe 201 through the through hole provided in the upper heating section 110. The chemical substance introduced into the pipe 201 is sent to the ion source 5 (see FIG. 1) via the thin tube 401 (see FIG. 1) (white arrow 142).

Hereinafter, the configuration of the first embodiment will be described with reference to FIG. 1, with reference to FIG. 2 as appropriate.
First, the inspector inserts into the heating device 1 a wiping member W such as a cloth that has been used to wipe off an object to be inspected such as a bag. In the heating device 1, the wiping member W is heated while being sandwiched from above and below by the heated upper heating section 110 and lower heating section 120. As a result, the chemical substance adhering to the wiping member W is vaporized by the heat of the upper heating section 110 and the lower heating section 120. The vapor of the vaporized chemical substance is sucked in by the suction pump 302 via the pipes 201 to 203. In short, the suction pump 302 sucks the vapor of the chemical substance generated in the heating device 1 . A flow rate control device 301 for adjusting the flow rate of intake air may be provided between the heating device 1 and the intake pump 302. Incidentally, for efficient intake of chemical vapor (hereinafter referred to as vapor), the flow rate by the intake pump 302 is preferably controlled to about 1,000 mL/min. In this way, the heating device 1 heats the medium from which the chemical substances adhering to the inspection object have been wiped off.

A branch portion BR is provided between the heating device 1 and the flow rate control device 301. At the branching portion BR, the pipe 201 is branched into a pipe 202 that allows steam to flow in the direction of the flow rate control device 301 and a capillary tube 401 that allows the steam to flow to the ion source 5 via the capillary tube 401 . That is, the branch part BR is provided in the piping 201 and branches the piping 201 so that one side is connected to the ion source 5 and the other side is connected to the suction pump 302. In addition, when the barrier discharge ion source 5A (see FIG. 5) is used as the ion source 5, the piping connected from the branch part BR to the barrier discharge ion source 5A is used for the barrier discharge ion source 5A, and the heating device 1 This is a thin tube 401 that is thinner than the pipe 201 from to the branch part BR.

In the branch portion BR, most of the chemical vapor generated in the heating device 1 is exhausted by the suction pump 302 via the piping 202 and the piping 203. From the branch BR, a part of the chemical vapor is introduced into the ion source 5 via the thin tube 401. The flow rate introduced into the ion source 5 is determined by the inner diameter and length of the thin tube 401, but is preferably about 1 mL/min to 100 mL/min. Note that the diameter of the pipes 201 and 202 is >> the thin tube 401. Incidentally, the inner diameter of the thin tube 401 is approximately 0.1 mm to 0.2 mm.

The ion source 5 generates chemical ions by ionizing the introduced vapor. That is, the ion source 5 ionizes the vapor related to the chemical substance generated in the heating device 1 by heating the wiping member W. Ions generated by the ion source 5 are sent to a mass spectrometer 61 and subjected to mass analysis. That is, the mass spectrometer 61 analyzes ions generated by the ion source 5. The inside of the mass spectrometer 61 is evacuated to vacuum by an exhaust pump 62. Mass spectrometry results obtained by the mass spectrometer 61 are sent to the control device 71 via a signal line 801. The control device 71 has a database that stores data on the components of chemical substances to be detected such as illegal drugs (for example, components of dangerous substances). The control device 71 determines whether the mass spectrometry results obtained by the mass spectrometer 61 match data on components (for example, components of dangerous substances) stored in the database. If they match, the control device 71 instructs the alarm device 72 to issue an alarm via the signal line 802. The alarm device 72 receives the instruction and issues an alarm.

<Flowchart>
FIG. 3 is a flowchart showing the procedure of processing performed by the trace inspection device T in the first embodiment.
First, the inspector inserts the wiping member W into the heating device 1, and heating is performed by the heating device 1 (S101). Step S101 is a medium heating step in which the wiping member W, which is a medium, is heated by the heating device 1, which is a first heating section.
Then, the steam generated in the heating device 1 is sucked by the suction pump 302 (S102). At this time, when the wiping member W is detected by a sensor (not shown) provided in the heating device 1, suction by the suction pump 302 may be started. Alternatively, suction by the suction pump 302 may continue to be performed while the trace inspection device T is powered on. Step S102 is a suction step in which the steam generated from the wiping member W is suctioned by the suction pump 302.

The steam sucked from the heating device 1 is branched at the branch part BR (S103). A part of the branched vapor is introduced into the ion source 5 through the thin tube 401, and the other vapor is exhausted by the suction pump 302.
The vapor introduced into the ion source 5 is ionized by the ion source 5 and then analyzed by the mass spectrometer 61 (S104). Step S104 is a first analysis step in which a part of the vapor branched at the branching part BR is analyzed by the mass spectrometer 61.
Subsequently, the control device 71 determines whether a detection target component has been detected based on the analysis result by the mass spectrometer 61 (S111). Step S111 is a determination step of determining whether or not a detection target component has been detected as a result of the analysis by the mass spectrometer 61.
If it is not detected (S111→No), the inspector takes out the wiping member W from the heating device 1 (S113), and the process ends.
When the detection target component is detected by the mass spectrometer 61 (S111→Yes), the control device 71 instructs the alarm device 72 to issue an alarm.
The alarm device 72 receives the instruction and issues an alarm (S112). Step S112 is a first alarm step in which the alarm device 72 issues an alarm when the mass spectrometer 61 detects a detection target component as a result of the determination step. Thereafter, the inspector takes out the wiping member W from the heating device 1 (S113), and the process ends.

[Comparative example]
Next, with reference to FIGS. 4 and 5, a conventional trace inspection apparatus Tz will be described as a comparative example with respect to this embodiment.

<Trace inspection device Tz>
FIG. 4 is a diagram illustrating a configuration example of a trace inspection device Tz in a comparative example.
Regarding the trace inspection device Tz in FIG. 4, the same components as in FIG. 1 are denoted by the same reference numerals, and the description thereof will be omitted.
The trace inspection device Tz shown in FIG. 4 differs greatly from the trace inspection device T shown in FIG. 1 in the following points.
That is, the pipe 201a connecting the heating device 1 and the ion source 5 does not have the branch portion BR shown in FIG. Therefore, most of the vapor of the chemical substance evaporated in the heating device 1 is introduced into the ion source 5 via the thin tube 401. Further, the trace inspection device Tz is not equipped with the flow rate control device 301 and the intake pump 302 shown in FIG.

Note that the control device 71 controls the heating device 1 via a signal line 811. Further, the control device 71 controls the ion source 5 via a signal line 812. The control device 71 controls the exhaust pump 62 via a signal line 813. Incidentally, in the trace inspection device T in FIG. 1, the trace inspection device Ta in FIG. 6, the trace inspection device Tb in FIG. 8, and the trace inspection device Tc in FIG. 5. Controls the exhaust pump 62. However, the signal lines 811 to 813 shown in FIG. 4 are omitted in FIGS. 1, 6, 8, and 10 to make the diagrams complicated.

First, the inspector inserts into the heating device 1 a wiping member W (see FIG. 2) that has wiped off the surface of the object to be inspected. The chemical substance adhering to the wiping member W is vaporized by the heat from the heating device 1. The vapor of the chemical substance generated by this vaporization is introduced into the ion source 5 via the pipe 201a. The pipe 201a is heated to prevent adsorption of chemical substances. The ion source 5 generates chemical substance ions by ionizing the introduced vapor.

Then, as in FIG. 1, the ions of the chemical substance generated by the ion source 5 are introduced into the mass spectrometer 61 and subjected to mass analysis. The inside of the mass spectrometer 61 is evacuated to vacuum by an exhaust pump 62. As described above, the heating device 1, ion source 5, mass spectrometer 61, and exhaust pump 62 are each controlled by the control device 71 via the signal lines 801, 811 to 813. The mass spectrometry results (mass spectrometry results) are compared with data on components (for example, components of dangerous substances) stored in a database (not shown) installed in the control device 71. If the control device 71 determines that the component data detected by mass spectrometry matches the component data stored in the database (not shown), the control device 71 sends an alarm via the signal line 802. 72 to issue an alarm. The alarm device 72 receives the instruction and issues an alarm.

<Ion source 5>
FIG. 5 is a diagram showing an example of the configuration of the ion source 5 used in the trace inspection device Tz.
In FIG. 5, a barrier discharge ion source 5A that performs barrier discharge under reduced pressure is shown as an example of the ion source 5. Refer to FIG. 4 as appropriate. Incidentally, the barrier discharge ion source 5A shown in FIG. 5 as the ion source 5 is the ion source 5 used not only in the comparative example but also in the first to fourth embodiments.
The ion source 5 includes a discharge tube 511, an outer tube electrode 512, a heating section 514, an inner tube electrode 515, and an orifice electrode 522. In FIG. 5, a differential pumping section 531, a high vacuum section 532, a porous electrode 541, and a DC power supply 543 constitute a mass spectrometer 61.

In general, in the trace inspection apparatus Tz, an atmospheric pressure chemical ionization method, which ionizes a chemical substance by a chemical reaction in the atmosphere, is often used as the ion source 5, which is different from the barrier discharge ion source 5A. In such an atmospheric pressure chemical ionization method, ions generated in the atmosphere are introduced into the vacuum inside the mass spectrometer 61 through a tube. However, if the tube for introducing ions generated in the atmosphere into the vacuum of the mass spectrometer 61 is made thinner, more ions will be lost in this tube, so the tube cannot be made thinner. Since the tube communicating with atmospheric pressure cannot be made thinner, in order to increase the degree of vacuum in the mass spectrometer 61, it is necessary to increase the displacement of the exhaust pump 62.

Here, in order to downsize the trace inspection device Tz, it is necessary to downsize the exhaust pump 62. However, when the exhaust pump 62 becomes smaller, the degree of vacuum in the mass spectrometer 61 becomes lower in the ion source 5 using the atmospheric pressure chemical ionization method.

Therefore, in the barrier discharge ion source 5A, by reducing the pressure in the ionization region in the ion source 5, the exhaust pump 62 that reduces the pressure inside the mass spectrometer 61 can be downsized. In the barrier discharge ion source 5A, a suction pump for depressurizing the ionization region in the ion source 5 is required separately from the exhaust pump 62, but since the exhaust pump 62 can be significantly downsized, the ionization in the ion source 5 is reduced. Even if a suction pump for reducing the pressure in the area is added, the entire trace inspection device Tz can be downsized. In the barrier discharge ion source 5A, in order to isolate the low-pressure ionization region from the atmosphere, vapor in which chemical substances are vaporized is introduced into the ionization region through the thin tube 401. What passes through the thin tube 401 is not ions but vapor before being ionized, so making the thin tube 401 thinner does not affect the sensitivity of the mass spectrometer 61.

In this way, for the purpose of downsizing the trace inspection device Tz, the barrier discharge ion source 5A is used instead of the ion source 5 based on the atmospheric pressure chemical ionization method. The configuration of the barrier discharge ion source 5A will be further explained below.

In the barrier discharge ion source 5A (ion source 5) shown in FIG. 5, a thin tube 401 with an inner diameter of about 0.1 mm to 0.2 mm and a length of about 10 mm to 100 mm is connected. The thin tube 401 is connected to a pipe 201a connected to the heating device 1 (see FIG. 2). Chemical vapor is introduced from the heating device 1 to the thin tube 401 via this pipe 201a. Furthermore, chemical vapor is introduced into the discharge tube 511 made of an insulating material such as glass through the thin tube 401. Incidentally, the pipe 201a connected to the heating device 1 and the thin tube 401 are connected to each other by a conversion connector CN for converting the diameters of the pipe 201a and the thin tube 401. Further, the pipe 201a, the thin tube 401, and the conversion connector CN are heated to about 200°C.

A cylindrical outer tube electrode 512 is provided on the outside of the discharge tube 511. This outer cylinder electrode 512 is connected to a high frequency power source 513. Further, a heating section 514 is provided further outside the discharge tube 511. The discharge tube 511 is also heated to about 200° C. by the heating unit 514. In the discharge tube 511, an orifice electrode 522 in which an orifice 521 is opened is provided at an end opposite to the connection end of the thin tube 401. Further, at the end of the discharge tube 511 on the orifice electrode 522 side, a cylindrical inner tube electrode 515 is provided inside the discharge tube 511.

The inner cylinder electrode 515 and the orifice electrode 522 are electrically connected and both are connected to a DC power source 523. Between the orifice electrode 522 and the electrode with pores 541 is a differential exhaust section 531 that is evacuated by an exhaust pump 62 (white arrow A2). Note that the differential exhaust section 531 is actually a closed space. Further, as described above, the differential pumping section 531 constitutes the mass spectrometer 61.

When a high frequency of about ±2 kV from 10 kHz to 20 kHz is applied to the outer cylinder electrode 512, a discharge occurs between the outer cylinder electrode 512 and the inner cylinder electrode 515 (discharge section DS). The chemical vapor introduced into the discharge tube 511 is exposed to plasma and ionized in the discharge section DS. For example, when measuring positive ions, a voltage of about 20 to 30 V is applied to the orifice electrode 522 by the DC power supply 523. In this way, the inside of the discharge tube 511 serves as an ionization region.

Further, a voltage of approximately 5 to 10 V is applied to the porous electrode 541 constituting the mass spectrometer 61 by a DC power source 543. Thereby, the positive ions that have passed through the orifice 521 drift in the direction of the porous electrode 541 in the differential pumping section 531. Ions (white arrow A1) that have passed through the pores 542 provided in the pore-equipped electrode 541 are analyzed by a mass spectrometer 61 equipped with a high vacuum section 532.

Note that the high vacuum section 532 constituting the mass spectrometer 61 is evacuated by an exhaust pump 62 (white arrow A3). The high vacuum section 532 is actually a closed space. Note that the interior of the discharge tube 511 is evacuated via the orifice 521 by a suction pump different from the exhaust pump 62, so the pressure is reduced from about 1/10 atmosphere to about 1/100 atmosphere.

Further, when analyzing negative ions, a voltage with the polarity opposite to the voltage described above is applied to the orifice electrode 522 and the electrode with pores 541. That is, a voltage of about -20 to -30V is applied to the orifice electrode 522, and a voltage of about -5V to -10V is applied to the electrode with pores 541. As a result, the negative ions that have passed through the orifice 521 drift in the direction of the porous electrode 541 in the differential pumping section 531.

In this way, in the barrier discharge ion source 5A, vapor is ionized in the discharge section DS, which is under reduced pressure. As a result, the ionization region (inside the discharge tube 511) and the high vacuum section 532 constituting the mass spectrometer 61 (see FIG. 4) are more closely connected than the ion source 5 that uses the atmospheric pressure chemical ionization method that performs ionization at atmospheric pressure. The pressure difference can be reduced. As a result, even if the exhaust pump 62 is downsized, ions can be introduced to the mass spectrometer 61 without difficulty. In the ion source 5 (barrier discharge ion source 5A) shown in FIG. 5, by making the thin tube 401 thinner or longer, the flow rate of gas taken in from the atmosphere can be suppressed, and the ionization region can be kept at a low pressure. can. Thereby, even if a small exhaust pump 62 is used, analysis can be performed with high sensitivity.

However, the flow rate that can be drawn into the barrier discharge ion source 5A through the thin tube 13 is limited to approximately 1 mL/min to 100 mL/min. As shown in FIG. 4, when the heating device 1 and the ion source 5, which is a barrier discharge ion source 5A, are directly connected, the suction flow rate to the ion source 5 is limited, so that the vapor related to the chemical substance generated in the heating device 1 is ionized. It took a long time to reach the source 5, which hindered rapid testing.

With the configuration of the trace inspection device T shown in the first embodiment as shown in FIG. 1, the flow rate between the heating device 1 and the branch portion BR can be increased by the suction of the intake pump 302. As a result, the time during which steam flows between the heating device 1 and the branch portion BR can be ignored. That is, the time during which steam flows between the heating device 1 and the branch portion BR can be shortened. Thereby, the vapor of the chemical substance generated in the heating device 1 can be quickly introduced into the ion source 5 via the thin tube 401. Therefore, faster inspection is possible with a simple configuration change than in the case where the heating device 1 and the ion source 5 are directly connected without providing the branch portion BR, as in the comparative example shown in FIG. In other words, the vapor of the chemical substance generated in the heating device 1 can be quickly introduced into the ion source 5 via the thin tube 401, so that the response of the mass spectrometer 61 can be improved. In short, the vapor related to the chemical substance generated in the heating device 1 can be rapidly transported to the entrance of the thin tube 401 of the ion source 5, and the inspection can be completed in a short time. Therefore, even if the barrier discharge ion source 5A that generates ions under reduced pressure is used to downsize the trace inspection device T, rapid inspection can be performed.

In addition, with the configuration shown in the first embodiment, it is possible to increase the speed of the vapor of the chemical substance generated in the heating device 1 flowing inside the pipe 201. This can prevent chemical substances contained in the steam from adhering to the inside of the pipe 201.

Furthermore, the conventional trace inspection apparatus Tz was not provided with an intake pump 302 for sucking the steam generated in the heating device 1. Therefore, the steam generated in the heating device 1 has been dissipated inside the heating device 1. According to the trace inspection device T according to the first embodiment, the steam generated in the heating device 1 is sucked into the pipe 201 by the suction pump 302 . Therefore, the trace inspection device T according to the first embodiment can prevent the vapor generated in the heating device 1 from dissipating. Further, by using the barrier discharge ion source 5A as the ion source 5, the trace inspection device T can be downsized.

In addition, in the technique described in Patent Document 3, a three-way valve is provided at a location corresponding to the branch portion BR in FIG. This is for exhausting the sample when an excessively high concentration sample is introduced, and its purpose is different from that of the branch portion BR of this embodiment. In this embodiment, the branch part BR is not provided with a valve, and the purpose of use of the branch part BR is completely different from the technique described in Patent Document 3.

[Second embodiment]
Next, a second embodiment of the present invention will be described with reference to FIGS. 6 and 7.

<Trace inspection device Ta>
FIG. 6 is a diagram showing an example of the configuration of the trace inspection device Ta according to the second embodiment.
In FIG. 6, the same components as those in FIG. 1 are designated by the same reference numerals, and the description thereof will be omitted.
The trace inspection device Ta shown in FIG. 6 is different from the trace inspection device T shown in FIG. The point is that this is provided. That is, the spectroscopic analyzer 311 is provided between the branch portion BR and the suction pump 302. The downstream side of the spectroscopic analysis device 311 is connected to the flow rate control device 301 via a pipe 204. Further, the spectrometer 311 is communicably connected to the control device 71 via a signal line 821.

In the trace inspection device T shown in FIG. 1, the vapor of the chemical substance generated in the heating device 1 is sucked in by the suction pump 302, and is branched off at the branch portion BR. A portion of the vapor is then introduced into the ion source 5. As described above, this allows the trace inspection device T shown in FIG. 1 to perform rapid inspection. However, since most of the chemical vapor generated in the heating device 1 flows from the branch portion BR toward the flow rate control device 301, an improvement is desired. Therefore, in the trace inspection device Ta shown in FIG. 6, a spectroscopic analysis device 311 is provided between the branch portion BR and the flow rate control device 301.

As the spectroscopic analysis device 311, it is preferable to use an infrared absorption photometer, a Raman spectrometer, or a terahertz spectrometer that has excellent ability to identify substances. Information regarding the structure of a substance can be obtained using such a spectroscopic analyzer 311. Then, before the main test is performed, a preliminary test is performed in which data on the components of the chemical substance to be detected is obtained in advance by the spectroscopic analyzer 311. By the way, a main inspection is an inspection performed on the object to be inspected, such as a bag, and a pre-inspection is an inspection conducted before the main inspection in order to prepare a database, etc. before the inspection of the object to be inspected. . The data (spectral analysis results) of the spectroscopic analysis results from the preliminary inspection are sent to the control device 71 via the signal line 821. The control device 71 registers the sent spectroscopic analysis results from the preliminary inspection in the database.

During the main inspection, the control device 71 acquires the data of the mass spectrometry results obtained by the mass spectrometer 61 via the signal line 801, and the data obtained by the spectrometer 311 via the signal line 821. Get the data that was created. The control device 71 compares the database of mass spectrometry results with the mass spectrometry results of the main test, and also compares the database of spectroscopic analysis results with the spectroscopic analysis results of the main test. If the component data stored in the database matches at least one of the mass spectrometry results and spectroscopic analysis results in this test, the control device 71 instructs the alarm device 72 to issue an alarm via the signal line 802. do. The alarm device 72 receives the instruction and issues an alarm.

<Flowchart>
FIG. 7 is a flowchart showing the procedure of processing performed by the trace inspection device Ta in the second embodiment. The process shown in FIG. 7 is the process performed in the main examination.
First, the inspector inserts the wiping member W into the heating device 1, and heating is performed by the heating device 1 (S201).
Then, the steam generated in the heating device 1 is sucked by the suction pump 302 (S202). Similar to FIG. 3, when the wiping member W is detected by a sensor (not shown) provided in the heating device 1, the suction pump 302 may start suctioning. Alternatively, suction by the suction pump 302 may continue to be performed while the trace inspection device Ta is powered on.

The steam sucked from the heating device 1 is branched at the branch part BR (S203). Similar to FIG. 3, part of the branched vapor is introduced into the ion source 5 through the thin tube 401, and the other part is exhausted by the suction pump 302.
The vapor introduced into the ion source 5 is ionized by the ion source 5 and then analyzed by the mass spectrometer 61 (S204). Note that the processing in steps S201 to S204 is similar to the processing in steps S101 to S104 in FIG.

Further, among the steam branched at the branching part BR, the steam flowing toward the flow rate control device 301 is analyzed by the spectroscopic analyzer 311 (S205). It is desirable that step S204 and step S205 be performed simultaneously. Step S205 is a second analysis step in which the spectrometer 311 analyzes the vapor that has not been analyzed by the mass spectrometer 61 among the vapors branched at the branching part BR.
Then, the control device 71 determines whether a component to be detected is detected based on at least one of the mass analysis results by the mass spectrometer 61 and the spectroscopic analysis results by the spectrometer 311 (S211). In the determination step of step S211, the control device 71 determines whether at least one of the mass spectrometer 61 and the spectrometer 311 has detected a component to be detected.
If it is not detected (S211→No), the inspector takes out the wiping member W from the heating device 1 (S213), and the process ends.
If a detection target component is detected in at least one of the mass spectrometry results and the spectroscopic analysis results (S211→Yes), the control device 71 instructs the alarm device 72 to issue an alarm. The alarm device 72 receives the instruction and issues an alarm (S212). Step S212 is a second alarm step in which the alarm device 72 issues an alarm when it is determined in the determination step of step S211 that a component to be detected is detected by at least one of the mass spectrometer and the spectrometer 311. It is. After that, the inspector takes out the wiping member W from the heating device 1 (S213), and the process ends.

With such a configuration, the steam flowing in the direction of the flow rate control device 301 can be effectively utilized, and the accuracy of the inspection can be further improved.

[Third embodiment]
Next, a third embodiment of the present invention will be described with reference to FIGS. 8 and 9.
FIG. 8 is a diagram showing the configuration of a trace inspection device Tb according to the third embodiment.
In FIG. 8, the same components as those in FIG. 1 are designated by the same reference numerals, and the description thereof will be omitted.
The trace inspection device Tb shown in FIG. 6 differs from the trace inspection device T shown in FIG. 1 in the following points.
(1) A branch portion BR1 is provided between the branch portion BR and the flow rate control device 301. By the branch part BR1, the pipe 202 is divided into a pipe (first flow path) 205 which is a flow path going toward the flow rate control device 301 and a branch pipe which is a flow path going in a direction different from the direction of the flow rate control device 301. (second flow path) 211. The branch part BR1 is provided with a first valve (flow path control part) 901 configured of, for example, a three-way valve, and controls the airflow (including steam) heading towards the pipe 205 and the airflow heading towards the branch pipe 211. are doing. Note that the first valve 901 is controlled by the control device 71 via the signal line 831. (2) The branch pipe 211 is equipped with an adsorbent that adsorbs chemical substances contained in steam. A suction device 321 is provided. A branch pipe 212 connected to the downstream side of the adsorption device 321 joins the pipe 205. In this way, an adsorption device 321 having an adsorbent that adsorbs chemical substances is provided between the branch portion BR and the intake pump 302. In this way, the first valve 901 is provided between the branch part BR and the adsorption device 321 to switch between the pipe 205 through which steam flows toward the intake pump 302 and the branch pipe 211 through which steam flows toward the adsorption device 321. It is being

In the trace inspection device T shown in FIG. 1, the vapor of the chemical substance generated in the heating device 1 is branched off at the branching portion BR. One of the branched vapors is introduced into the ion source 5 to enable rapid inspection, but most of the chemical substance vapor generated in the heating device 1 is transferred from the branch part BR to the flow rate control device. It flows in the direction of 301. Therefore, improvements are desired.

When chemical vapor is generated by the heating device 1, first, the flow from the pipe 202 to the branch pipe 211 is stopped, and the first valve 901 is controlled by the control device 71 so that the steam flows from the pipe 202 to the pipe 205. be done. That is, the control device 71 controls the first valve 901. As a result, the steam is sucked by the first valve 901 from the branch portion BR1 to the flow rate control device 301 in the direction of the flow path A (first flow path). Then, as a result of the analysis by the mass spectrometer 61, when the control device 71 determines that the mass spectrometer 61 has detected a component to be detected, the alarm device 72 issues an alarm. Then, when the alarm is issued, the control device 71 switches the first valve 901. At this time, the first valve 901 is controlled so that the flow in the direction of the pipe 205 is stopped and the steam flows in the direction of the branch pipe 211 (flow path B). As a result, the vapor flows in the direction of adsorption device 321. That is, as the mass spectrometer 61 detects a predetermined chemical substance, the control device 71 causes the first valve 901 to switch the flow path so that the steam flowing through the pipe 205 flows to the branch pipe 211.

As the steam flows into the branch pipe 211 (flow path B: second flow path), chemical substances contained in the steam are adsorbed by the adsorbent of the adsorption device 321. Normally, the chemical vapor from the heating device 1 continues to be generated for about 10 seconds. Therefore, after allowing the chemical substances contained in the vapor to be adsorbed by the adsorbent of the adsorption device 321 for approximately 10 seconds, the control device 71 returns the first valve 901 to its original position and prepares for the next test. Returning the first valve 901 to its original state means allowing steam to flow in the direction of the pipe 205 (flow path A) and preventing steam from flowing in the direction of the branch pipe 211 (flow path B).

Thereafter, the inspector removes the adsorption device 321 that has adsorbed the chemical substance, and extracts the chemical substance adsorbed to the adsorbent by heating the adsorbent or extracting it with a solvent. The extracted chemical substances are then analyzed using precision analysis means such as a gas chromatograph or mass spectrometer. This analysis is different from the analysis by the mass spectrometer 61.

<Flowchart>
FIG. 9 is a flowchart showing the procedure of processing performed by the trace inspection device Tb in the third embodiment.
First, the inspector inserts the wiping member W into the heating device 1, and heating is performed by the heating device 1 (S301).
Then, the steam generated in the heating device 1 is sucked by the suction pump 302 (S302). Similar to FIG. 1, the suction pump 302 may start suctioning when the wiping member W is detected by a sensor (not shown) included in the heating device 1. Alternatively, suction by the suction pump 302 may continue to be performed while the trace inspection device Tb is powered on.

The steam sucked from the heating device 1 is branched at the branch part BR (S303). At this time, the first valve 901 is controlled so that the steam generated by the heating device 1 flows in the direction of the flow path A in FIG. A part of the branched vapor is introduced into the ion source 5 through the thin tube 401, and the other part is exhausted by the suction pump 302.
The vapor introduced into the ion source 5 is ionized by the ion source 5 and then analyzed by the mass spectrometer 61 (S304).
Subsequently, the control device 71 determines whether a detection target component has been detected based on the analysis result by the mass spectrometer 61 (S311).
If it is not detected (S311→No), the inspector takes out the wiping member W from the heating device 1 (S312), and the process ends. Incidentally, steps S301 to S304, S311, and S312 in FIG. 9 are similar to steps S101 to S104, S111, and S113 in FIG. 3.

When the detection target component is detected by the mass spectrometer 61 (S311→Yes), the control device 71 instructs the alarm device 72 to issue an alarm.
The alarm device 72 receives the instruction and issues an alarm (S321).
Furthermore, the control device 71 switches the first valve 901 (S322). In step S322, the control device 71 switches the first valve 901 so that the steam generated in the heating device 1 flows from the flow path A to the flow path B in FIG. In step S322, when the detection target component is detected in step S311, the flow path is switched so that the vapor that has not been analyzed by the mass spectrometer 61 among the vapors branched at the branching part BR flows to the adsorption device 321. This is the flow path switching step 1.
Thereafter, the chemical substances contained in the vapor are adsorbed by the adsorbent provided in the adsorption device 321 (S323).
Then, the control device 71 determines whether a desired time (for example, 10 seconds) has elapsed (S324).
If the desired time has not elapsed (S324→No), the control device 71 returns the process to step S323, and adsorption of the chemical substance to the adsorbent is continued.
If the desired time has elapsed (S324→Yes), the control device 71 returns the first valve 901 to its original state (S325). Returning the first valve 901 to its original state means causing steam to flow in the direction of the flow path A in FIG.

Then, the inspector takes out the wiping member W from the heating device 1 (S326), replaces the suction device 321 (S327), and ends the process.

In the third embodiment, the components of the chemical substance adsorbed on the adsorbent provided in the adsorption device 321 can be analyzed in detail. By doing this, it is possible to analyze in detail whether the trace inspection device Tb correctly reacted to the component to be detected (hazardous material, etc.) or whether it was a false alarm, and if it was a false alarm, which component caused the false alarm. can do. By reflecting the analysis results of the chemical substances adsorbed on the adsorbent in the determination logic and database in the control device 71, it becomes possible to construct a highly accurate trace inspection device Tb with fewer false alarms. Further, among the vapor branched at the branching part BR, the chemical substances not sent to the ion source 5 can be effectively utilized.

[Fourth embodiment]
Next, a fourth embodiment of the present invention will be described with reference to FIGS. 10, 11A, and 11B.

FIG. 10 is a diagram showing the configuration of a trace inspection device Tc according to the fourth embodiment.
In FIG. 10, the same components as those in FIG. 8 are given the same reference numerals, and the description thereof will be omitted.
The trace inspection device Tc is provided with a branch portion BR for branching the vapor of the chemical substance generated in the heating device 1, as in FIG. Further, as in FIG. 8, a branch part BR1 is provided between the branch part BR and the flow rate control device 301 for controlling the flow rate of the intake pump 302. The branch part BR1 has a pipe 205 for directing the airflow (including steam) flowing from the heating device 1 in the direction of the flow rate control device 301, and a branch pipe 221 for causing the air flow (including steam) to flow in a direction other than the flow rate control device 301. branch out. Similar to FIG. 8, a first valve 901 is provided in the branch portion BR1, and the airflow toward the pipe 205 and the airflow toward the branch pipe 221 are controlled by the first valve 901.

The trace inspection device Tc shown in FIG. 10 is different from the trace inspection device Tb shown in FIG. 8 in that a branch portion BR2 is provided between the branch portion BR1 and the suction device 321. In the branch part BR2, a branch pipe 221 connected to the branch part BR1 and a branch pipe 222 connected to the carrier gas supply device 331 merge into a branch pipe 223 in which the adsorption device 321 is provided. .

The branch part BR2 is provided with a second valve (flow path control part) 911, which is composed of, for example, a three-way valve. The airflow of carrier gas from the device (carrier gas supply section) 331 to the adsorption device 321 is controlled. Incidentally, the carrier gas supply device 331 is a device that supplies carrier gas. A carrier gas is a gas that transports chemicals. That is, the carrier gas supply device 331 supplies a carrier gas that transports chemical substances.

Further, on the downstream side of the adsorption device 321, a branch portion BR3 is provided. The branch part BR3 includes a branch pipe 226 that allows the airflow flowing from the adsorption device 321 and flowing through the branch pipe 224 connected to the downstream side of the adsorption device 321 to flow to a confluence with the pipe 205, and a gas chromatograph that analyzes chemical substances. - Branching into a branch pipe 225 that flows to a mass spectrometer (third analysis section) 332. The branch portion BR3 is provided with a third valve (flow path control portion) 912 configured of, for example, a three-way valve. The third valve 912 controls the airflow from the branch pipe 224 to the branch pipe 226 and the airflow from the branch pipe 224 to the branch pipe 225.

The adsorption device 321 is equipped with a temperature control device (second heating section) 333 that heats and cools the adsorption device 321 (heats the adsorption device 321).

Note that each of the first valve 901, the second valve 911, and the third valve 912 is controlled by the control device 71 (signal lines 831, 841, 842). Further, the control device 71 controls the temperature control device 333 via a signal line 851. In addition, the control device 71 controls the carrier gas supply device 331 via a signal line 861.

With such a configuration, the trace inspection device Tc is characterized in that it automatically performs precise analysis of the chemical substance adsorbed on the adsorbent provided in the adsorption device 321.

When chemical vapor is generated by the heating device 1, first, the flow to the branch pipe 221 is stopped, and the first valve 901 is controlled by the control device 71 so that the vapor flows to the pipe 205. As a result, steam is sucked in the flow path A direction from the branch portion BR1 to the flow rate control device 301 by the first valve 901. As a result of the analysis by the mass spectrometer 61, when the control device 71 determines that the mass spectrometer 61 has detected a detection target component (accompanying the detection of a predetermined chemical substance by the mass spectrometer 61), the alarm device 72 is activated. Issue an alarm. Then, when the alarm is issued, the control device 71 switches the first valve 901, the second valve 911, and the third valve 912. At this time, the control device 71 controls the first valve 901 and the second valve 911 so that the steam flows in the direction from the first valve 901 to the adsorption device 321. Further, the control device 71 controls the third valve 912 so that the steam flows in the direction from the adsorption device 321 to the piping 205. As a result, when the alarm device 72 issues an alarm, the vapor of the chemical substance flows into the flow path (flow path B) passing through the adsorption device 321, and the chemical substance contained in the vapor is removed from the adsorption device 321. Adsorbed by adsorbent.

After allowing the adsorbent of the adsorption device 321 to adsorb the chemical substance for a desired time (for example, 10 seconds), the control device 71 returns the first valve 901 to its original position. That is, the control device 71 controls the first valve 901 so that the steam flows through the flow path A. Then, the inspector takes out the wiping member W from the heating device 1.

After that, the control device 71 switches the second valve 911 and the third valve 912 so that the flow path becomes a flow path (flow path C) of carrier gas supply device 331 → adsorption device 321 → gas chromatograph/mass spectrometer 332. . In other words, the control device 71 controls so that the vapor generated in the heating device 1 does not flow into the adsorption device 321 and the carrier gas flows from the carrier gas supply device 331 to the gas chromatograph/mass spectrometer 332 via the adsorption device 321. The second valve 911 and the third valve 912 are controlled.

Furthermore, the control device 71 causes the carrier gas supply device 331 to supply carrier gas. As a result, carrier gas such as helium is flowed from the carrier gas supply device 331 to the adsorption device 321 via the flow path C. At the same time, the control device 71 heats the adsorption device 321 using the temperature control device 333 to desorb the chemical substance adsorbed to the adsorbent of the adsorption device 321. That is, the control device 71 causes the temperature control device 333 to heat the adsorption device 321 . By the way, when carrier gas is flowing in the flow path from carrier gas supply device 331 → adsorption device 321 → gas chromatograph/mass spectrometer 332, the control device 71 controls the flow path from heating device 1 → flow rate control device 301 to The first valve 901 is controlled so that the steam generated in step 1 flows (channel D). That is, the first valve 901, the second valve 911, and the third valve 912 are controlled so that the airflow flows through the flow path C and the flow path D, respectively.

The chemical substances desorbed from the adsorbent of the adsorption device 321 are introduced together with a carrier gas into a gas chromatograph/mass spectrometer 332 for precise analysis. After the analysis by the gas chromatograph/mass spectrometer 332 has been performed for a desired time, the controller 71 cools the adsorption device 321 using the temperature controller 333 and returns the second valve 911 and the third valve 912 to their original state. Return to Returning the second valve 911 and the third valve 912 to their original states means that the control device 71 controls the second valve 911 and the third valve 912 so that the gas flows in the direction of the flow path B. This stops the carrier gas from flowing into the adsorption device 321, and the inspector replaces the adsorption device 321 in preparation for the next inspection.

<Flowchart>
FIGS. 11A and 11B are flowcharts showing the procedure of processing performed by the trace inspection device Tc in the fourth embodiment.
First, the inspector inserts the wiping member W into the heating device 1, and heating is performed by the heating device 1 (S401 in FIG. 11A).
Then, the steam generated in the heating device 1 is sucked by the suction pump 302 (S402). Similar to FIG. 1, the suction pump 302 may start suctioning when the wiping member W is detected by a sensor (not shown) included in the heating device 1. Alternatively, suction by the suction pump 302 may continue to be performed while the trace inspection device Tc is powered on.

The steam sucked from the heating device 1 is branched at the branch part BR (S403). At this time, the first valve 901 is controlled so that the steam flows in the direction of the flow path A in FIG. A part of the branched vapor is introduced into the ion source 5 through the thin tube 401, and the other part is exhausted by the suction pump 302.
The vapor introduced into the ion source 5 is ionized by the ion source 5 and then analyzed by the mass spectrometer 61 (S404).
Subsequently, the control device 71 determines whether or not a detection target component has been detected based on the analysis result by the mass spectrometer 61 (S411).
If it is not detected (S411→No), the inspector takes out the wiping member W from the heating device 1 (S422), and the process ends. Incidentally, steps S401 to S404, S411, and S412 in FIG. 9 are the same processes as S101 to S104, S111, and S113 in FIG.

When the detection target component is detected by the mass spectrometer 61 (S411→Yes), the control device 71 instructs the alarm device 72 to issue an alarm.
Upon receiving the instruction, the alarm device 72 issues an alarm (S421).
Further, the control device 71 switches the first valve 901, the second valve 911, and the third valve 912 (valve) (S422). In step S422, the control device 71 switches the first valve 901, the second valve 911, and the third valve 912 so that the steam flows from the flow path A to the flow path B in FIG.
Thereafter, the chemical substances contained in the vapor are adsorbed by the adsorbent provided in the adsorption device 321 (S423).
Then, the control device 71 determines whether a desired time (for example, 10 seconds) has elapsed (S424).
If the desired time has not elapsed (S424→No), the control device 71 returns the process to step S423, and adsorption of the chemical substance to the adsorbent is continued.
If the desired time has elapsed (S424→Yes), the control device 71 returns the first valve 901 to its original state (S425). Returning the first valve 901 to its original state means bringing the steam into a state in which it flows in the direction of the flow path A in FIG. 10.
Then, the inspector takes out the wiping member W from the heating device 1 (S426).
Note that the processes in steps S421 to S426 are similar to steps S321 to S326 in FIG.

Subsequently, the control device 71 switches the second valve 911 and the third valve 912 (S431). At this time, the control device 71 controls the second valve 911 and the third valve 912 so that the flow path becomes a flow path (flow path C) of carrier gas supply device 331 → adsorption device 321 → gas chromatograph/mass spectrometer 332. Switch. In step S431, the control device 71 determines that after step S422 (first flow path switching step), the steam generated in the heating device 1 does not flow into the adsorption device 321, and the carrier gas is transferred from the carrier gas supply device 331 to the adsorption device. This is a second flow path switching step in which the flow path is switched so that the gas flows into the gas chromatograph/mass spectrometer 332 via the gas chromatograph/mass spectrometer 321 .
Further, the control device 71 introduces the carrier gas into the adsorption device 321 by causing the carrier gas supply device 331 to supply the carrier gas to the branch pipes 222 and 223 (S432). Step S432 is a carrier gas supply step in which the control device (control unit) 71 causes the carrier gas supply device 331 to supply carrier gas after step S431. Further, the control device 71 causes the temperature control device 333 to heat the adsorption device 321, thereby heating the adsorbent provided in the adsorption device 321 and desorbing the chemical substance (S433 in FIG. 11B). Step S433 is an adsorption unit heating step in which the adsorption device 321 is heated by the temperature control device 333 after step S432.

The desorbed chemical substance is introduced into the gas chromatograph/mass spectrometer (GC/MS) 332 via the branch pipe 224 → third valve 912 → branch pipe 225. As a result, the gas chromatograph/mass spectrometer (GC/MS) 332 analyzes the desorbed chemical substance (S441). Step S441 is a second analysis step in which analysis is performed using the gas chromatograph/mass spectrometer 332.
Then, the control device 71 determines whether a desired time has elapsed (S442). The desired time in step S442 is the time required for analysis by the gas chromatograph/mass spectrometer 332.
If the desired time has not elapsed (S442→No), the control device 71 returns the process to step S441. As a result, analysis by the gas chromatograph/mass spectrometer 332 continues.

If the desired time has elapsed (S442→Yes), the control device 71 controls the temperature control device 333 to cool the adsorption device 321 (S443).
Further, the control device 71 returns the second valve 911 and the third valve 912 to their original states (S444). Returning the second valve 911 and the third valve 912 to their original states means controlling the second valve 911 and the third valve 912 so that the flow path becomes the flow path B in FIG. 10 .
Thereafter, the inspector replaces the suction device 321 in preparation for the next measurement (S445), and the process ends.

In the trace inspection devices T, Ta to Tc of the first to third embodiments, when an alarm is issued by the alarm device 72, the inspection object (bag, etc.) is opened to confirm the inside of the inspection object (bag, etc.). Inspections etc. will be conducted. In contrast, according to the fourth embodiment, the results of precise analysis by the gas chromatograph/mass spectrometer 332 can be obtained within several minutes after the alarm is issued. In other words, since the results of precise analysis are known while preparations are being made for an unsealing inspection, etc., if the alarm is a false alarm, the time-consuming unsealing inspection etc. can be stopped. This makes it possible to eliminate unnecessary inspections and speed up trace inspections.

[Hardware configuration]
FIG. 12 is a diagram showing the hardware configuration of the control device 71.
The control device 71 is composed of a PC (Personal Computer) or the like, and includes a memory 711 that is a main storage device and a CPU (Central Processing Unit) 712 that is an arithmetic device. The control device 71 is a secondary storage device, and includes a storage device 713 including an HD (Hard Disk) and an SSD (Solid State Drive), a mass spectrometer 61, an alarm device 72, a first valve 901, and a second valve. 911, a third valve 912, a carrier gas supply device 331, a communication device 714 for communicating with the temperature control device 333, and the like.

Then, the program stored in the storage device 713 is loaded into the memory 711 and executed by the CPU 712, thereby executing each process shown in FIG. 3, FIG. 7, FIG. 9, FIG. 11A, and FIG. 11B.

The present invention is not limited to the embodiments described above, and includes various modifications. For example, the embodiments described above are described in detail to explain the present invention in an easy-to-understand manner, and the present invention is not necessarily limited to having all the configurations described. Furthermore, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. Furthermore, it is possible to add, delete, or replace some of the configurations of each embodiment with other configurations.

Further, the branch pipe 212 in FIG. 8 joins the pipe 205 on the downstream side. However, the present invention is not limited to this, and a configuration may be adopted in which the branch pipe 212 does not merge with the pipe 205 by providing an intake pump other than the intake pump 302 on the downstream side of the branch pipe 212. The same applies to the branch pipe 226 in FIG.

Further, in this embodiment, a barrier discharge ion source 5A is used as the ion source 5, but the present invention is also applicable to an ion source 5 using an atmospheric pressure chemical ionization method.

Moreover, a part or all of the above-described configurations, functions, control device 71, database, etc. may be realized in hardware by designing, for example, an integrated circuit. Moreover, each of the above-described configurations, functions, etc. may be realized by software by having a processor such as the CPU 712 interpret and execute a program for realizing each function. Information such as programs, tables, files, etc. that realize each function can be stored in the memory 711, a recording device such as an SSD (Solid State Drive), or an IC (Integrated Circuit) card, in addition to being stored in an HD (Hard Disk). The data can be stored in a recording medium such as an SD (Secure Digital) card, a DVD (Digital Versatile Disc), or the like.
Furthermore, in each embodiment, control lines and information lines are shown that are considered necessary for explanation, and not all control lines and information lines are necessarily shown in terms of the product. In reality, almost all configurations can be considered interconnected.

1 Heating device (first heating section)
5 Ion source (ion source part)
5A Barrier discharge ion source (ion source part)
61 Mass spectrometer (first analysis section)
71 Control device (control unit)
72 Alarm device (alarm unit)
201 - 205, 201a Piping 211, 212, 221 - 226 Branch pipe 301 Flow rate control device 302 Suction pump (suction part)
311 Spectroscopic analyzer (second analysis section)
321 Adsorption device (adsorption part)
331 Carrier gas supply device (carrier gas supply unit)
332 Gas chromatograph/mass spectrometer (third analysis section)
333 Temperature control device (second heating section)
401 Thin tube 901 First valve (flow path control section)
911 Second valve (flow path control section)
913 Third valve (flow path control section)
BR, BR1 to BR3 Branch part A flow path (first flow path)
B flow path (second flow path)
C, D Flow path T, Ta~Tc, Tz Trace inspection device (chemical substance detection device)
W Wiping member (medium)
S101 Insertion heating (medium heating process)
S102 Suction of generated steam (suction process)
S104 Analysis using a mass spectrometer (first analysis step)
S112 Issue an alarm (first alarm step)
S205 Analysis using an optical analyzer (second analysis step)
S212 Issue an alarm (second alarm process)
S322 Switch the first valve (first flow path switching step)
S431 Switching the second valve and third valve (second flow path switching step)
S432 Introducing carrier gas to the adsorption device (carrier gas supply process)
S433 Heating the adsorption device and desorbing the chemical substance (adsorption part heating step)
S441 Analysis of desorbed chemical substances by GC/MS (second analysis step)

Claims (15)

a first heating section that heats a medium from which chemical substances attached to the inspection object have been wiped;
an ion source unit that ionizes vapor related to the chemical substance generated in the first heating unit by heating the medium;
a first analysis section that analyzes ions generated in the ion source section;
a suction unit that sucks the steam generated in the first heating unit;
Piping connecting the first heating section and the suction section;
a branching part provided in the piping and branching the piping so that one side is connected to the ion source part and the other side is connected to the suction part;
A chemical substance detection device comprising: The chemical substance detection device according to claim 1, wherein a second analysis section is provided between the branch section and the suction section. The chemical substance detection device according to claim 2, wherein the second analysis section is a spectroscopic analysis section. The chemical substance detection device according to claim 3, wherein the spectroscopic analysis section is any one of an infrared absorption photometer, a Raman spectrometer, and a terahertz spectrometer. The chemical substance detection device according to claim 1, further comprising an adsorption part having an adsorbent that adsorbs the chemical substance, provided between the branch part and the suction part. Flow path control for switching between a first flow path through which the steam flows toward the suction section and a second flow path through which the steam flows toward the suction section between the branch section and the adsorption section. A department has been set up,
comprising a control section that controls the flow path control section,
The control unit includes:
Upon detection of a predetermined chemical substance by the first analysis section, the flow path control section switches the flow path so that the steam flowing through the first flow path flows to the second flow path. The chemical substance detection device according to claim 5, characterized in that: a carrier gas supply section that supplies a carrier gas for transporting the chemical substance;
a third analysis section that analyzes the chemical substance;
a second heating section that heats the adsorption section;
has
The control unit includes:
As the first analysis section detects a predetermined chemical substance, the vapor generated in the first heating section does not flow into the adsorption section, and the carrier gas flows from the carrier gas supply section to the adsorption section. controlling the flow path control unit so that the carrier gas flows into the third analysis unit through the carrier gas supply unit, and causing the carrier gas supply unit to supply the carrier gas, and heating the adsorption unit by the second heating unit. The chemical substance detection device according to claim 6, characterized in that: The ion source section is a barrier discharge ion source,
The pipe connected from the branch part to the barrier discharge ion source is used in the barrier discharge ion source, and is a thinner tube than the pipe from the first heating part to the branch part. The chemical substance detection device according to claim 1. a first heating section that heats a medium for wiping off chemical substances adhering to the inspection target;
an ion source unit that ionizes vapor related to the chemical substance generated in the first heating unit by heating the medium;
a first analysis section that analyzes ions generated in the ion source section;
a suction unit that sucks the steam generated in the first heating unit;
Piping connecting the first heating section and the suction section;
a branching part provided in the piping and branching the piping so that one side is connected to the ion source part and the other side is connected to the suction part;
A chemical substance detection device having
a medium heating step of heating the medium by the first heating section;
a suction step of sucking the vapor generated from the medium with the suction section;
a first analysis step of analyzing a part of the vapor branched at the branching section in the first analysis section;
a determination step of determining whether or not a detection target component has been detected as a result of the analysis in the first analysis unit;
A chemical substance detection method characterized by performing the following. A second analysis section is provided between the branch section and the suction section,
A second analysis step of analyzing, in the second analysis section, steam that has not been analyzed by the first analysis section among the vapors branched by the branching section. 9. The chemical substance detection method described in 9. In the determination step,
11. The chemical substance detection method according to claim 10, further comprising determining whether a component to be detected is detected by at least one of the first analysis section and the second analysis section. The chemical substance according to claim 9, characterized in that a first alarm step is executed in which an alarm section issues an alarm when the first analysis section detects a component to be detected as a result of the determination step. Detection method. In the determination step, when it is determined that a detection target component has been detected in at least one of the first analysis section and the second analysis section, a second alarm step is performed in which the alarm section issues an alarm. The chemical substance detection method according to claim 11, characterized in that: An adsorption part having an adsorbent that adsorbs the chemical substance is provided between the branch part and the suction part,
When a detection target component is detected in the determination step, switching the flow path so that the vapor that has not been analyzed by the first analysis section among the vapors branched at the branching section flows to the adsorption section. The chemical substance detection method according to claim 9, characterized in that a first channel switching step is performed. a carrier gas supply unit that supplies a carrier gas for transporting the chemical substance to the adsorption unit;
a third analysis section that analyzes the chemical substance;
a second heating section that heats the adsorption section;
has
After the first flow path switching step, the steam generated in the first heating section does not flow into the adsorption section, and the carrier gas flows from the carrier gas supply section through the adsorption section to the third a second flow path switching step of switching the flow path so that the flow flows into the analysis section;
After the second flow path switching step, a carrier gas supply step of supplying the carrier gas from the carrier gas supply section;
After the carrier gas supply step, an adsorption unit heating step in which the adsorption unit is heated by the second heating unit;
a second analysis step in which the third analysis section performs analysis;
15. The chemical substance detection method according to claim 14, wherein:

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