JP2023136705A - Photosensitive resin composition, cured film and touch panel - Google Patents
Photosensitive resin composition, cured film and touch panel Download PDFInfo
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- JP2023136705A JP2023136705A JP2022042536A JP2022042536A JP2023136705A JP 2023136705 A JP2023136705 A JP 2023136705A JP 2022042536 A JP2022042536 A JP 2022042536A JP 2022042536 A JP2022042536 A JP 2022042536A JP 2023136705 A JP2023136705 A JP 2023136705A
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- Prior art keywords
- resin composition
- photosensitive resin
- group
- cured film
- compound
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims abstract description 126
- 239000011347 resin Substances 0.000 claims abstract description 47
- 229920005989 resin Polymers 0.000 claims abstract description 47
- 239000002245 particle Substances 0.000 claims abstract description 39
- 239000011817 metal compound particle Substances 0.000 claims abstract description 27
- -1 aluminum compound Chemical class 0.000 claims abstract description 24
- 238000010521 absorption reaction Methods 0.000 claims abstract description 22
- 239000003999 initiator Substances 0.000 claims abstract description 22
- 239000006097 ultraviolet radiation absorber Substances 0.000 claims abstract description 18
- 239000002131 composite material Substances 0.000 claims abstract description 14
- 150000003609 titanium compounds Chemical class 0.000 claims abstract description 14
- 150000003755 zirconium compounds Chemical class 0.000 claims abstract description 14
- 150000003606 tin compounds Chemical class 0.000 claims abstract description 12
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 11
- 125000004185 ester group Chemical group 0.000 claims abstract description 8
- 150000003377 silicon compounds Chemical class 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 47
- 150000001875 compounds Chemical class 0.000 claims description 23
- 125000004432 carbon atom Chemical group C* 0.000 claims description 11
- 238000002834 transmittance Methods 0.000 claims description 10
- 125000000217 alkyl group Chemical group 0.000 claims description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 8
- 238000009826 distribution Methods 0.000 claims description 6
- 238000002296 dynamic light scattering Methods 0.000 claims description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 5
- 150000002736 metal compounds Chemical class 0.000 claims description 5
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- 125000001424 substituent group Chemical group 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
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- 230000000977 initiatory effect Effects 0.000 claims description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 3
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
- 125000000962 organic group Chemical group 0.000 claims description 2
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 claims description 2
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- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 13
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- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 12
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- 239000002253 acid Substances 0.000 description 6
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 6
- 239000011246 composite particle Substances 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- 239000002270 dispersing agent Substances 0.000 description 6
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 6
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- 238000002835 absorbance Methods 0.000 description 5
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- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 5
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- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 5
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 5
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 4
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 4
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- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
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- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 4
- 229920001296 polysiloxane Polymers 0.000 description 4
- BFSVOASYOCHEOV-UHFFFAOYSA-N 2-diethylaminoethanol Chemical compound CCN(CC)CCO BFSVOASYOCHEOV-UHFFFAOYSA-N 0.000 description 3
- XONHRWVRGDYLMG-UHFFFAOYSA-N 3-(tert-butylcarbamoyl)-6-trimethoxysilylhexanoic acid Chemical compound CO[Si](OC)(OC)CCCC(CC(O)=O)C(=O)NC(C)(C)C XONHRWVRGDYLMG-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical group OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 3
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 150000008064 anhydrides Chemical class 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical class C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
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- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 3
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- VQFQVYFUZUTIMU-UHFFFAOYSA-N triethoxy(7-oxabicyclo[4.1.0]heptan-4-ylmethyl)silane Chemical compound C1C(C[Si](OCC)(OCC)OCC)CCC2OC21 VQFQVYFUZUTIMU-UHFFFAOYSA-N 0.000 description 3
- HGCVEHIYVPDFMS-UHFFFAOYSA-N trimethoxy(7-oxabicyclo[4.1.0]heptan-4-ylmethyl)silane Chemical compound C1C(C[Si](OC)(OC)OC)CCC2OC21 HGCVEHIYVPDFMS-UHFFFAOYSA-N 0.000 description 3
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 3
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 3
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- FFJVMNHOSKMOSA-UHFFFAOYSA-N trimethoxy-[1-(oxiran-2-ylmethoxy)butyl]silane Chemical compound CCCC([Si](OC)(OC)OC)OCC1CO1 FFJVMNHOSKMOSA-UHFFFAOYSA-N 0.000 description 1
- DAVVOFDYOGMLNQ-UHFFFAOYSA-N trimethoxy-[1-(oxiran-2-ylmethoxy)ethyl]silane Chemical compound CO[Si](OC)(OC)C(C)OCC1CO1 DAVVOFDYOGMLNQ-UHFFFAOYSA-N 0.000 description 1
- FNBIAJGPJUOAPB-UHFFFAOYSA-N trimethoxy-[1-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)C(CC)OCC1CO1 FNBIAJGPJUOAPB-UHFFFAOYSA-N 0.000 description 1
- KKFKPRKYSBTUDV-UHFFFAOYSA-N trimethoxy-[2-(oxiran-2-ylmethoxy)butyl]silane Chemical compound CO[Si](OC)(OC)CC(CC)OCC1CO1 KKFKPRKYSBTUDV-UHFFFAOYSA-N 0.000 description 1
- ZNXDCSVNCSSUNB-UHFFFAOYSA-N trimethoxy-[2-(oxiran-2-ylmethoxy)ethyl]silane Chemical compound CO[Si](OC)(OC)CCOCC1CO1 ZNXDCSVNCSSUNB-UHFFFAOYSA-N 0.000 description 1
- HTVULPNMIHOVRU-UHFFFAOYSA-N trimethoxy-[2-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CC(C)OCC1CO1 HTVULPNMIHOVRU-UHFFFAOYSA-N 0.000 description 1
- ZQPNGHDNBNMPON-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)butyl]silane Chemical compound CO[Si](OC)(OC)CCC(C)OCC1CO1 ZQPNGHDNBNMPON-UHFFFAOYSA-N 0.000 description 1
- ZOWVSEMGATXETK-UHFFFAOYSA-N trimethoxy-[4-(7-oxabicyclo[4.1.0]heptan-4-yl)butyl]silane Chemical compound C1C(CCCC[Si](OC)(OC)OC)CCC2OC21 ZOWVSEMGATXETK-UHFFFAOYSA-N 0.000 description 1
- GUKYSRVOOIKHHB-UHFFFAOYSA-N trimethoxy-[4-(oxiran-2-ylmethoxy)butyl]silane Chemical compound CO[Si](OC)(OC)CCCCOCC1CO1 GUKYSRVOOIKHHB-UHFFFAOYSA-N 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- 150000003672 ureas Chemical class 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 239000005050 vinyl trichlorosilane Substances 0.000 description 1
- UKRDPEFKFJNXQM-UHFFFAOYSA-N vinylsilane Chemical class [SiH3]C=C UKRDPEFKFJNXQM-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Abstract
Description
本発明は、感光性樹脂組成物、硬化膜およびタッチパネル用部材に関する。 The present invention relates to a photosensitive resin composition, a cured film, and a touch panel member.
静電容量式タッチパネル、液晶表示装置、有機EL装置などには、一般的に、基板上にスズをドープした酸化インジウム(ITO)などの透明電極を形成した透明導電基板が用いられる。ITOにより形成された透明電極は、製膜基板温度により屈折率が大きく変化することから、ITO電極のある部分とない部分において色差が大きくなり、ITO電極パターンが視認される現象(パターン見え)が課題となる。そこで、パターン見えを抑制する技術として、Nb2O5とSiO2の薄膜をアンダーコート層又はトップコート層として設ける技術が開発されている(例えば、特許文献1、2参照)。 Capacitive touch panels, liquid crystal display devices, organic EL devices, and the like generally use a transparent conductive substrate in which a transparent electrode made of tin-doped indium oxide (ITO) or the like is formed on the substrate. The refractive index of transparent electrodes formed from ITO changes greatly depending on the temperature of the substrate on which the film is formed, so the color difference becomes large between areas with and without ITO electrodes, and a phenomenon in which the ITO electrode pattern is visually recognized (pattern visibility) occurs. It becomes a challenge. Therefore, as a technique for suppressing pattern visibility, a technique has been developed in which a thin film of Nb 2 O 5 and SiO 2 is provided as an undercoat layer or a topcoat layer (see, for example, Patent Documents 1 and 2).
近年、さらにディスプレイの視認性を向上させるためITO電極だけでなく絶縁膜のパターン見えを抑制する技術の必要性が高まっており、ITO電極と絶縁膜部の界面における反射を抑制するために高い屈折率を有する感光性材料が求められている。
そこで、高い屈折率を有し、耐薬品性や密着性に優れた感光性材料として、例えば、酸化物微粒子、アルカリ可溶性樹脂、及び特定のフルオレン骨格化合物又は熱硬化性樹脂及び4以上の官能基を有する多官能単量体を含有する樹脂組成物が提案されている(例えば、特許文献3参照)。
In recent years, in order to further improve the visibility of displays, there has been an increasing need for technology that suppresses the visibility of patterns not only in ITO electrodes but also in insulating films. There is a need for a photosensitive material having a high
Therefore, as photosensitive materials having a high refractive index and excellent chemical resistance and adhesion, for example, oxide fine particles, alkali-soluble resins, specific fluorene skeleton compounds or thermosetting resins, and functional groups of 4 or more are used. A resin composition containing a polyfunctional monomer having the following has been proposed (see, for example, Patent Document 3).
また、高い屈折率を有し、パターニング性や耐熱性に優れた感光性材料として、特定の構造を有するアルカリ可溶性樹脂、少なくとも1個のエチレン性不飽和結合を有する光重合性モノマ、光重合開始剤、金属酸化物粒子、界面活性剤、及びシラン化合物を含有する樹脂組成物が提案されている(例えば、特許文献4参照)。 In addition, as a photosensitive material with a high refractive index and excellent patterning properties and heat resistance, we also use alkali-soluble resins with a specific structure, photopolymerizable monomers with at least one ethylenically unsaturated bond, photopolymerization initiation A resin composition containing a surfactant, a metal oxide particle, a surfactant, and a silane compound has been proposed (for example, see Patent Document 4).
特許文献3や4に記載された技術により、耐薬品性や耐熱性、基板密着性に優れた硬化膜を得ることができるものの、膜表面の平滑性が不十分で、絶縁膜として形成される硬化膜上のITO電極の抵抗値が上昇してしまう課題があった。
本発明は、かかる従来技術の課題に鑑み創案されたもので、高い屈折率を有するとともに、膜表面の平滑性が高い硬化膜を形成でき、硬化膜上に形成されるITO電極の抵抗値の上昇を抑制することが可能な感光性樹脂組成物を提供することである。
Although it is possible to obtain a cured film with excellent chemical resistance, heat resistance, and substrate adhesion using the techniques described in Patent Documents 3 and 4, the smoothness of the film surface is insufficient and the cured film is formed as an insulating film. There was a problem that the resistance value of the ITO electrode on the cured film increased.
The present invention was devised in view of the problems of the prior art, and it is possible to form a cured film having a high refractive index and a highly smooth surface, and to reduce the resistance value of the ITO electrode formed on the cured film. It is an object of the present invention to provide a photosensitive resin composition capable of suppressing the increase.
本発明の目的は以下の構成により達成される。すなわち、(A)アルカリ可溶性樹脂、(B)チタン化合物粒子、ジルコニウム化合物粒子、スズ化合物粒子およびアルミニウム化合物粒子からなる群より選ばれる少なくとも1種の金属化合物粒子、またはチタン化合物、ジルコニウム化合物、スズ化合物およびアルミニウム化合物からなる群より選ばれる少なくとも1種の金属化合物と、ケイ素化合物との複合金属化合物粒子、(C)ケトオキシムエステル基を含有し、かつ波長325~340nmの領域に吸収ピークを有する光重合開始剤および(D)波長330~345nmの領域に吸収ピークを有し、かつラジカル重合性基を有する紫外線吸収剤、を含む感光性樹脂組成物である。 The object of the present invention is achieved by the following configuration. That is, (A) an alkali-soluble resin, (B) at least one metal compound particle selected from the group consisting of titanium compound particles, zirconium compound particles, tin compound particles, and aluminum compound particles, or a titanium compound, a zirconium compound, and a tin compound. and composite metal compound particles of at least one metal compound selected from the group consisting of aluminum compounds and a silicon compound; (C) light containing a ketoxime ester group and having an absorption peak in the wavelength range of 325 to 340 nm; This is a photosensitive resin composition containing a polymerization initiator and (D) an ultraviolet absorber having an absorption peak in the wavelength range of 330 to 345 nm and having a radically polymerizable group.
本発明の感光性樹脂組成物によれば、高い屈折率を有するとともに、膜表面の平滑性が高い硬化膜を形成でき、硬化膜上に形成されるITO電極の抵抗値の上昇を抑制することが可能である。 According to the photosensitive resin composition of the present invention, a cured film having a high refractive index and a highly smooth film surface can be formed, and an increase in the resistance value of an ITO electrode formed on the cured film can be suppressed. is possible.
以下、本発明を更に詳細に説明する。
本発明の感光性樹脂組成物は、以下の(A)~(D)を含む感光性樹脂組成物である。
(A)アルカリ可溶性樹脂、(B)チタン化合物粒子、ジルコニウム化合物粒子、スズ化合物粒子およびアルミニウム化合物粒子からなる群より選ばれる少なくとも1種の金属化合物粒子、またはチタン化合物、ジルコニウム化合物、スズ化合物およびアルミニウム化合物からなる群より選ばれる少なくとも1種の金属化合物と、ケイ素化合物との複合金属化合物粒子、(C)ケトオキシムエステル基を含有し、かつ波長325~340nmの領域に吸収ピークを有する光重合開始剤、(D)波長330~345nmの領域に吸収ピークを有し、かつラジカル重合性基を有する紫外線吸収剤を含む感光性樹脂組成物。
The present invention will be explained in more detail below.
The photosensitive resin composition of the present invention is a photosensitive resin composition containing the following (A) to (D).
(A) Alkali-soluble resin, (B) at least one metal compound particle selected from the group consisting of titanium compound particles, zirconium compound particles, tin compound particles, and aluminum compound particles, or titanium compound, zirconium compound, tin compound, and aluminum Composite metal compound particles of at least one metal compound selected from the group consisting of compounds and a silicon compound, (C) photopolymerization initiation containing a ketoxime ester group and having an absorption peak in the wavelength range of 325 to 340 nm. (D) a UV absorber having an absorption peak in the wavelength range of 330 to 345 nm and having a radically polymerizable group.
本発明において、(A)アルカリ可溶性樹脂、(B)チタン化合物粒子、ジルコニウム化合物粒子、スズ化合物粒子およびアルミニウム化合物粒子からなる群より選ばれる少なくとも1種の金属化合物粒子、またはチタン化合物、ジルコニウム化合物、スズ化合物およびアルミニウム化合物からなる群より選ばれる少なくとも1種の金属化合物と、ケイ素化合物との複合金属化合物粒子(以降、(B)金属化合物粒子または複合金属化合物粒子と、略記することもある)、を含有することにより、高い屈折率を有する硬化膜を形成することができる。 In the present invention, (A) an alkali-soluble resin, (B) at least one metal compound particle selected from the group consisting of titanium compound particles, zirconium compound particles, tin compound particles, and aluminum compound particles, or a titanium compound, a zirconium compound, Composite metal compound particles of at least one metal compound selected from the group consisting of tin compounds and aluminum compounds and a silicon compound (hereinafter sometimes abbreviated as (B) metal compound particles or composite metal compound particles); By containing, a cured film having a high refractive index can be formed.
(C)光重合開始剤を含有することにより、未光照射部が現像液で除去されるネガ型の感光性を示し、ネガ型のパターン加工を可能にすることができる。また、ケトオキシムエステル基を含有する光重合開始剤は、高い光反応性を有し、酸素阻害を受けにくいため、表面硬化性に優れ、表面平滑性の高い硬化膜を形成することができる。さらに、ケトオキシムエステル基を含有し、かつ波長325~340nmの領域に吸収ピークを有する光重合開始剤は、400nm以上の領域での吸光度が小さく高い透明性を有するため、透明性に優れた硬化膜が得られる。 (C) By containing a photopolymerization initiator, the non-irradiated area exhibits negative photosensitivity that can be removed by a developer, making it possible to perform negative pattern processing. In addition, a photopolymerization initiator containing a ketoxime ester group has high photoreactivity and is less susceptible to oxygen inhibition, and therefore has excellent surface curability and can form a cured film with high surface smoothness. Furthermore, a photopolymerization initiator containing a ketoxime ester group and having an absorption peak in the wavelength range of 325 to 340 nm has low absorbance in the wavelength range of 400 nm or more and has high transparency, resulting in a cure with excellent transparency. A membrane is obtained.
(D)紫外線吸収剤を含有することで、回折光による未露光部の硬化を抑制し、解像度を向上させることができる。また、ラジカル重合性基を有することで露光や焼成時に樹脂やモノマと架橋できるため、ブリードアウトを抑制し、硬化膜の透明性や表面平滑性を向上させることができる。さらに、波長330~345nmの領域に吸収ピーク有する紫外線吸収剤を用いることで、400nm以上の領域での吸光度が小さく高い透明性を有する硬化膜を形成することができる。 (D) By containing an ultraviolet absorber, curing of unexposed areas due to diffracted light can be suppressed and resolution can be improved. Furthermore, since it has a radically polymerizable group, it can be crosslinked with a resin or monomer during exposure or baking, thereby suppressing bleed-out and improving the transparency and surface smoothness of the cured film. Furthermore, by using an ultraviolet absorber having an absorption peak in the wavelength range of 330 to 345 nm, it is possible to form a cured film with low absorbance in the wavelength range of 400 nm or more and high transparency.
絶縁膜上に形成されるITO電極の抵抗値上昇を抑制するには、絶縁膜として形成される硬化膜表面の平滑性を高くする必要がある。しかし、金属化合物粒子を含有する感光性樹脂組成物は、露光での光硬化が不十分な場合、現像工程でアルカリ現像液に溶解性の高い樹脂成分が過剰に流されてしまうため、アルカリ現像液に溶解性の低い金属化合物粒子が硬化膜表面に過剰に残存してしまい、硬化膜表面の平滑性が低下する。そのため、酸素阻害を受けにくく、表面硬化性の高い短波長の光を使って露光することで、硬化膜表面の架橋密度を高くすることにより、現像工程でアルカリ現像液に樹脂成分が過剰に流されることを抑制し、硬化膜表面の平滑性を高くすることが必要である。その一方で、金属化合物粒子を含有する感光性樹脂組成物は、金属化合物粒子による光の散乱で300nm以下の短波長領域を活用することが難しかった。そこで、本発明の感光性樹脂組成物は、(C)波長325~340nmの領域に吸収ピークを有する光重合開始剤と、(D)波長330~345nmの領域に吸収ピークを有する紫外線吸収剤の組み合わせにより、露光時のラジカル反応にi線(365nm)より短波長の波長310nm~350nmの光を選択的に活用し、硬化膜表面の架橋密度を高くすることにより、現像工程でアルカリ現像液に樹脂成分が過剰に流されることを抑制し、硬化膜表面の平滑性を高くすることで、硬化膜上に形成されるITO電極の抵抗値上昇を抑制できることを見出した。 In order to suppress an increase in the resistance value of the ITO electrode formed on the insulating film, it is necessary to increase the smoothness of the surface of the cured film formed as the insulating film. However, if photosensitive resin compositions containing metal compound particles are insufficiently photocured upon exposure, excessive resin components that are highly soluble in an alkaline developer will be washed away during the development process. Metal compound particles with low solubility in the liquid remain excessively on the surface of the cured film, reducing the smoothness of the surface of the cured film. Therefore, by exposing to short-wavelength light that is less susceptible to oxygen inhibition and has high surface hardening properties, the crosslinking density on the surface of the cured film is increased, thereby preventing excess resin components from being washed into the alkaline developer during the development process. It is necessary to suppress the occurrence of drying and increase the smoothness of the surface of the cured film. On the other hand, it has been difficult for photosensitive resin compositions containing metal compound particles to utilize a short wavelength region of 300 nm or less due to light scattering by the metal compound particles. Therefore, the photosensitive resin composition of the present invention contains (C) a photopolymerization initiator having an absorption peak in the wavelength range of 325 to 340 nm, and (D) an ultraviolet absorber having an absorption peak in the wavelength range of 330 to 345 nm. Through this combination, light with a wavelength of 310 to 350 nm, which is shorter than the i-line (365 nm), is selectively used for radical reactions during exposure, and by increasing the crosslinking density on the surface of the cured film, it is possible to use an alkaline developer in the development process. It has been found that by suppressing excessive flow of the resin component and increasing the smoothness of the surface of the cured film, it is possible to suppress an increase in the resistance value of the ITO electrode formed on the cured film.
本発明の感光性樹脂組成物は、(A)アルカリ可溶性樹脂を含有する。(A)アルカリ可溶性樹脂とは、アルカリ可溶基を一つ以上有する樹脂をいう。アルカリ可溶性基としては、カルボキシル基、フェノール性水酸基、スルホン酸基、チオール基などが挙げられる。これらの中でも、アルカリに対する溶解性の高さから、カルボキシル基がより好ましい。(A)アルカリ可溶性樹脂としては、例えば、シロキサン樹脂、アクリル樹脂、ビニルエーテル樹脂、ポリヒドロキシスチレン、ノボラック樹脂、ポリイミド、ポリアミド、カルド系樹脂等が挙げられる。これらを2種以上含有してもよい。(A)アルカリ可溶性樹脂は、少なくとも一部にエチレン性不飽和二重結合を有することが好ましく、感光性樹脂組成物から得られる硬化膜の硬度を向上させることができる。(A)アルカリ可溶性樹脂としては、前述の重合体のうち、エチレン性不飽和二重結合の導入の容易さから、シロキサン樹脂、アクリル樹脂、カルド系樹脂がより好ましい。カルド系樹脂がさらに好ましく、硬化膜の耐薬品性や屈折率を向上させることができる。 The photosensitive resin composition of the present invention contains (A) an alkali-soluble resin. (A) The alkali-soluble resin refers to a resin having one or more alkali-soluble groups. Examples of alkali-soluble groups include carboxyl groups, phenolic hydroxyl groups, sulfonic acid groups, and thiol groups. Among these, carboxyl groups are more preferred because of their high solubility in alkalis. (A) Examples of the alkali-soluble resin include siloxane resin, acrylic resin, vinyl ether resin, polyhydroxystyrene, novolac resin, polyimide, polyamide, and cardo resin. Two or more types of these may be contained. (A) The alkali-soluble resin preferably has ethylenically unsaturated double bonds at least in part, and can improve the hardness of the cured film obtained from the photosensitive resin composition. As the alkali-soluble resin (A), among the above-mentioned polymers, siloxane resins, acrylic resins, and cardo-based resins are more preferable from the viewpoint of ease of introducing ethylenically unsaturated double bonds. Cardo-based resins are more preferred and can improve the chemical resistance and refractive index of the cured film.
(A)アルカリ可溶性樹脂の固形分酸価は、30KOHmg/g以上200KOHmg/g以下が好ましい。かかる範囲の酸価を有することにより、様々な現像条件で良好なパターンを形成することが可能になる。 (A) The solid content acid value of the alkali-soluble resin is preferably 30 KOHmg/g or more and 200 KOHmg/g or less. Having an acid value within this range makes it possible to form good patterns under various development conditions.
シロキサン樹脂としては、3官能性アルコキシシラン化合物の加水分解・縮合反応生成物が好ましい。3官能性アルコキシシラン化合物としては、例えば、メチルトリメトキシシラン、メチルトリエトキシシラン、エチルトリメトキシシラン、エチルトリエトキシシラン、ヘキシルトリメトキシシラン、オクタデシルトリメトキシシラン、フェニルトリメトキシシラン、フェニルトリエトキシシラン、ナフチルトリメトキシシラン、アントラセニルトリメトキシシラン、3-アミノプロピルトリエトキシシラン、N-(2-アミノエチル)-3-アミノプロピルトリメトキシシラン、3-(N,N-ジグリシジル)アミノプロピルトリメトキシシラン、3-グリシドキシシプロピルトリメトキシシラン、グリシドキシメチルトリメトキシシラン、グリシドキシメチルトリエトキシシラン、α-グリシドキシエチルトリメトキシシラン、α-グリシドキシエチルトリエトキシシラン、β-グリシドキシエチルトリメトキシシラン、β-グリシドキシエチルトリエトキシシラン、α-グリシドキシプロピルトリメトキシシラン、α-グリシドキシプロピルトリエトキシシラン、β-グリシドキシプロピルトリメトキシシラン、β-グリシドキシプロピルトリエトキシシラン、γ-グリシドキシプロピルトリメトキシシラン、γ-グリシドキシプロピルトリエトキシシラン、γ-グリシドキシプロピルトリプロポキシシシラン、γ-グリシドキシプロピルトリイソプロポキシシシラン、γ-グリシドキシプロピルトリブトキシシラン、α-グリシドキシブチルトリメトキシシラン、α-グリシドキシブチルトリエトキシシラン、β-グリシドキシブチルトリメトキシシラン、β-グリシドキシブチルトリエトキシシラン、γ-グリシドキシブチルトリメトキシシラン、γ-グリシドキシブチルトリエトキシシラン、δ-グリシドキシブチルトリメトキシシラン、δ-グリシドキシブチルトリエトキシシラン、(3,4-エポキシシクロヘキシル)メチルトリメトキシシラン、(3,4-エポキシシクロヘキシル)メチルトリエトキシシラン、(3,4-エポキシシクロヘキシル)メチルトリメトキシシラン、(3,4-エポキシシクロヘキシル)メチルトリエトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリプロポキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリブトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリメトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリエトキシシラン、3-(3,4-エポキシシクロヘキシル)プロピルトリメトキシシラン、3-(3,4-エポキシシクロヘキシル)プロピルトリエトキシシラン、4-(3,4-エポキシシクロヘキシル)ブチルトリメトキシシラン、4-(3,4-エポキシシクロヘキシル)ブチルトリエトキシシラン、トリフルオロメチルトリメトキシシラン、トリフルオロメチルトリエトキシシラン、トリフルオロプロピルトリメトキシシラン、トリフルオロプロピルトリエトキシシラン、3-メルカプトプロピルトリメトキシシラン、3-ウレイドプロピルトリエトキシシラン、3-イソシアネートプロピルトリエトキシシラン、p-スリチルトリメトキシシラン、3-(tert-ブチルカルバモイル)-6-(トリメトキシシリル)へキサン酸、2-(2-(tert-ブチルアミノ)-2-オキソエチル)-5-(トリメトキシシリル)ペンタン酸、3-(イソプロピルカルバモイル)-6-(トリメトキシシリル)へキサン酸、2-(2-(イソプロピルアミノ)-2-オキソエチル)-5-(トリメトキシシリル)ペンタン酸、3-(イソブチルカルバモイル)-6-(トリメトキシシリル)へキサン酸、2-(2-(イソプチルアミノ)-2-オキソエチル)-5-(トリメトキシシリル)ペンタン酸、3-(tert-ペンチルカルバモイル)-6-(トリメトキシシリル)へキサン酸、2-(2-(tert-ペンチルアミノ)-2-オキソエチル)-5-(トリメトキシシリル)ペンタン酸、3-(tert-ブチルカルバモイル)-6-(トリエトキシシリル)へキサン酸、2-(2-(tert-ブチルアミノ)-2-オキソエチル)-5-(トリエトキシシリル)ペンタン酸、3-(tert-ブチルカルバモイル)-6-(トリメトキシシリル)ペンタン酸、2-(2-(tert-ブチルアミノ)-2-オキソエチル)-5-(トリメトキシシリル)ブタン酸、2-(tert-ブチルカルバモイル)-4-(2-(トリメトキシシリル)エチル)シクロヘキサンカルボン酸、2-(tert-ブチルカルバモイル)-5-(2-(トリメトキシシリル)エチル)シクロヘキサンカルボン酸、3-トリメトキシシリルプロピルコハク酸無水物、3-トリエトキシシシリルプロピルコハク酸無水物、4-(2-トリメトキシシリルエチル)シクロヘキシル-1,2-ジカルボン酸無水物、4-(2-トリエトキシシリルエチル)シクロヘキシル-1,2-ジカルボン酸無水物、3-(3-トリメトキシシリルプロピル)シクロヘキシル-1,2-ジカルボン酸無水物、3-(3-トリエトキシシリルプロピル)シクロヘキシル-1,2-ジカルボン酸無水物、4-(2-トリメトキシシリルエチル)フタル酸無水物、4-(2-トリエトキシシリルエチル)フタル酸無水物、3-(3-トリメトキシシリルプロピル)フタル酸無水物などが挙げられる。 The siloxane resin is preferably a hydrolysis/condensation reaction product of a trifunctional alkoxysilane compound. Examples of trifunctional alkoxysilane compounds include methyltrimethoxysilane, methyltriethoxysilane, ethyltrimethoxysilane, ethyltriethoxysilane, hexyltrimethoxysilane, octadecyltrimethoxysilane, phenyltrimethoxysilane, and phenyltriethoxysilane. , naphthyltrimethoxysilane, anthracenyltrimethoxysilane, 3-aminopropyltriethoxysilane, N-(2-aminoethyl)-3-aminopropyltrimethoxysilane, 3-(N,N-diglycidyl)aminopropyltrimethoxy Silane, 3-glycidoxycypropyltrimethoxysilane, glycidoxymethyltrimethoxysilane, glycidoxymethyltriethoxysilane, α-glycidoxyethyltrimethoxysilane, α-glycidoxyethyltriethoxysilane, β- Glycidoxyethyltrimethoxysilane, β-glycidoxyethyltriethoxysilane, α-glycidoxypropyltrimethoxysilane, α-glycidoxypropyltriethoxysilane, β-glycidoxypropyltrimethoxysilane, β- Glycidoxypropyltriethoxysilane, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropyltriethoxysilane, γ-glycidoxypropyltripropoxysilane, γ-glycidoxypropyltriisopropoxysilane , γ-glycidoxypropyltributoxysilane, α-glycidoxybutyltrimethoxysilane, α-glycidoxybutyltriethoxysilane, β-glycidoxybutyltrimethoxysilane, β-glycidoxybutyltriethoxysilane , γ-glycidoxybutyltrimethoxysilane, γ-glycidoxybutyltriethoxysilane, δ-glycidoxybutyltrimethoxysilane, δ-glycidoxybutyltriethoxysilane, (3,4-epoxycyclohexyl)methyl Trimethoxysilane, (3,4-epoxycyclohexyl)methyltriethoxysilane, (3,4-epoxycyclohexyl)methyltrimethoxysilane, (3,4-epoxycyclohexyl)methyltriethoxysilane, 2-(3,4- Epoxycyclohexyl)ethyltripropoxysilane, 2-(3,4-epoxycyclohexyl)ethyltributoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltributoxysilane Ethoxysilane, 3-(3,4-epoxycyclohexyl)propyltrimethoxysilane, 3-(3,4-epoxycyclohexyl)propyltriethoxysilane, 4-(3,4-epoxycyclohexyl)butyltrimethoxysilane, 4- (3,4-epoxycyclohexyl)butyltriethoxysilane, trifluoromethyltrimethoxysilane, trifluoromethyltriethoxysilane, trifluoropropyltrimethoxysilane, trifluoropropyltriethoxysilane, 3-mercaptopropyltrimethoxysilane, 3 -Ureidopropyltriethoxysilane, 3-isocyanatepropyltriethoxysilane, p-slytyltrimethoxysilane, 3-(tert-butylcarbamoyl)-6-(trimethoxysilyl)hexanoic acid, 2-(2-(tert-butylcarbamoyl)-6-(trimethoxysilyl)hexanoic acid, -butylamino)-2-oxoethyl)-5-(trimethoxysilyl)pentanoic acid, 3-(isopropylcarbamoyl)-6-(trimethoxysilyl)hexanoic acid, 2-(2-(isopropylamino)-2- oxoethyl)-5-(trimethoxysilyl)pentanoic acid, 3-(isobutylcarbamoyl)-6-(trimethoxysilyl)hexanoic acid, 2-(2-(isobutylamino)-2-oxoethyl)-5-( Trimethoxysilyl)pentanoic acid, 3-(tert-pentylcarbamoyl)-6-(trimethoxysilyl)hexanoic acid, 2-(2-(tert-pentylamino)-2-oxoethyl)-5-(trimethoxysilyl) ) Pentanoic acid, 3-(tert-butylcarbamoyl)-6-(triethoxysilyl)hexanoic acid, 2-(2-(tert-butylamino)-2-oxoethyl)-5-(triethoxysilyl)pentanoic acid , 3-(tert-butylcarbamoyl)-6-(trimethoxysilyl)pentanoic acid, 2-(2-(tert-butylamino)-2-oxoethyl)-5-(trimethoxysilyl)butanoic acid, 2-( tert-butylcarbamoyl)-4-(2-(trimethoxysilyl)ethyl)cyclohexanecarboxylic acid, 2-(tert-butylcarbamoyl)-5-(2-(trimethoxysilyl)ethyl)cyclohexanecarboxylic acid, 3-tri Methoxysilylpropylsuccinic anhydride, 3-triethoxysilylpropylsuccinic anhydride, 4-(2-trimethoxysilylethyl)cyclohexyl-1,2-dicarboxylic anhydride, 4-(2-triethoxysilylethyl) ) Cyclohexyl-1,2-dicarboxylic anhydride, 3-(3-trimethoxysilylpropyl)cyclohexyl-1,2-dicarboxylic anhydride, 3-(3-triethoxysilylpropyl)cyclohexyl-1,2-dicarboxylic Acid anhydride, 4-(2-trimethoxysilylethyl) phthalic anhydride, 4-(2-triethoxysilylethyl) phthalic anhydride, 3-(3-trimethoxysilylpropyl) phthalic anhydride, etc. Can be mentioned.
アクリル樹脂としては、カルボキシル基を有するものが好ましく、不飽和カルボン酸とエチレン性不飽和化合物の共重合体がより好ましい。
不飽和カルボン酸としては、例えば、アクリル酸、メタクリル酸、クロトン酸、ビニル酢酸等のモノカルボン酸類、イタコン酸、マレイン酸、フマル酸等のジカルボン酸またはその酸無水物、フタル酸モノ(2-(メタ)アクリロイロキシエチル)等の多価カルボン酸モノエステル類等が挙げられる。
As the acrylic resin, one having a carboxyl group is preferable, and a copolymer of an unsaturated carboxylic acid and an ethylenically unsaturated compound is more preferable.
Examples of unsaturated carboxylic acids include monocarboxylic acids such as acrylic acid, methacrylic acid, crotonic acid, and vinyl acetic acid, dicarboxylic acids such as itaconic acid, maleic acid, and fumaric acid, or their acid anhydrides, and phthalic acid mono(2- (meth)acryloyloxyethyl) and other polyhydric carboxylic acid monoesters.
エチレン性不飽和化合物としては、例えば、アクリル酸メチル、メタクリル酸メチル、アクリル酸エチル、メタクリル酸エチル、アクリル酸n-プロピル、アクリル酸イソプロピル、メタクリル酸n-プロピル、メタクリル酸イソプロピル、アクリル酸n-ブチル、メタクリル酸n-ブチル、アクリル酸sec-ブチル、メタクリル酸sec-ブチル、アクリル酸イソ-ブチル、メタクリル酸イソ-ブチル、アクリル酸tert-ブチル、メタクリル酸tert-ブチル、アクリル酸n-ペンチル、メタクリル酸n-ペンチル、2-ヒドロキシエチルアクリレート、2-ヒドロキシエチルメタクリレート、ベンジルアクリレート、ベンジルメタクリレート等の不飽和カルボン酸アルキルエステル、スチレン、p-メチルスチレン、o-メチルスチレン、m-メチルスチレン、α-メチルスチレン等の芳香族ビニル化合物、トリシクロデカニル(メタ)アクリレート等の(架橋)環式炭化水素基、アミノエチルアクリレート等の不飽和カルボン酸アミノアルキルエステル、グリシジルアクリレート、グリシジルメタクリレート等の不飽和カルボン酸グリシジルエステル、酢酸ビニル、プロピオン酸ビニル等のカルボン酸ビニルエステル、アクリロニトリル、メタクリロニトリル、α-クロルアクリロニトリル等のシアン化ビニル化合物、1,3-ブタジエン、イソプレン等の脂肪族共役ジエン、末端にアクリロイル基またはメタクリロイル基を有するポリスチレン、ポリメチルアクリレート、ポリメチルメタクリレート、ポリブチルアクリレート、ポリブチルメタクリレート等が挙げられる。 Examples of ethylenically unsaturated compounds include methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, n-propyl acrylate, isopropyl acrylate, n-propyl methacrylate, isopropyl methacrylate, and n-acrylate. Butyl, n-butyl methacrylate, sec-butyl acrylate, sec-butyl methacrylate, iso-butyl acrylate, iso-butyl methacrylate, tert-butyl acrylate, tert-butyl methacrylate, n-pentyl acrylate, Unsaturated carboxylic acid alkyl esters such as n-pentyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, benzyl methacrylate, styrene, p-methylstyrene, o-methylstyrene, m-methylstyrene, α - Aromatic vinyl compounds such as methylstyrene, (crosslinked) cyclic hydrocarbon groups such as tricyclodecanyl (meth)acrylate, unsaturated carboxylic acid aminoalkyl esters such as aminoethyl acrylate, glycidyl acrylate, glycidyl methacrylate, etc. Carboxylic acid vinyl esters such as saturated carboxylic acid glycidyl esters, vinyl acetate and vinyl propionate, cyanide vinyl compounds such as acrylonitrile, methacrylonitrile and α-chloroacrylonitrile, aliphatic conjugated dienes such as 1,3-butadiene and isoprene, Examples include polystyrene, polymethyl acrylate, polymethyl methacrylate, polybutyl acrylate, polybutyl methacrylate, and the like having an acryloyl group or methacryloyl group at the end.
アクリル樹脂としては、(メタ)アクリル酸由来の構成単位を有するものが好ましく、カルボキシル基に、エチレン性不飽和基とエポキシ基を有する化合物を反応させて得られるものがより好ましく、感度を向上させることができる。エチレン性不飽和基としては、アクリル基、メタクリル基が好ましい。
カルド系樹脂としては、下記式(1-1)または(1-2)で表される構造を繰り返し単位として2つ以上有し、エチレン性不飽和基およびカルボキシル基を含有するものが好ましい。
The acrylic resin is preferably one having a structural unit derived from (meth)acrylic acid, and more preferably one obtained by reacting a carboxyl group with a compound having an ethylenically unsaturated group and an epoxy group, which improves sensitivity. be able to. As the ethylenically unsaturated group, an acrylic group and a methacryl group are preferable.
The cardo-based resin preferably has two or more structures represented by the following formula (1-1) or (1-2) as repeating units, and contains an ethylenically unsaturated group and a carboxyl group.
上記一般式(1-2)中、xは1~2の整数であり、Y1は水素原子もしくは炭素原子数1~10のアルキル基、炭素原子数6~20のアリール基、もしくは隣接するY1同士で形成した環が芳香環となる基である。Y2は炭素原子数1~10のアルキル基、炭素原子数6~20のアリール基、もしくは水素原子を表す。qは0~2の整数である。(1-2)の構造を有するカルド系樹脂としては、合成の容易さから(1-3)の構造を有することが好ましい。 In the above general formula (1-2), x is an integer of 1 to 2, and Y 1 is a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 20 carbon atoms, or the adjacent Y This is a group in which the ring formed by two members becomes an aromatic ring. Y 2 represents an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 20 carbon atoms, or a hydrogen atom. q is an integer from 0 to 2. The cardo resin having the structure (1-2) preferably has the structure (1-3) from the viewpoint of ease of synthesis.
カルド系樹脂としては、例えば、大阪ガスケミカル(株)製オグゾールCR-TR、オグゾールCR-TR2、オグゾールCR-TR3、オグゾールCR-TR4、オグゾールCR-TR5、オグゾールCR-TR6や、新日鉄住金化学(株)製V-259ME、(株)ADEKA製WR-301などが挙げられる。
本発明の感光性樹脂組成物における(A)アルカリ可溶性樹脂の含有量は、所望の膜厚や用途により任意に選ぶことができ、感光性樹脂組成物の固形分100質量%中10~70質量%が好ましい。
Examples of cardo-based resins include Oguzol CR-TR, Oguzol CR-TR2, Oguzol CR-TR3, Oguzol CR-TR4, Oguzol CR-TR5, and Oguzol CR-TR6 manufactured by Osaka Gas Chemical Co., Ltd., and Nippon Steel & Sumikin Chemical Co., Ltd. Examples include V-259ME manufactured by Co., Ltd. and WR-301 manufactured by ADEKA Co., Ltd.
The content of the alkali-soluble resin (A) in the photosensitive resin composition of the present invention can be arbitrarily selected depending on the desired film thickness and application, and is 10 to 70% by weight based on 100% by weight of the solid content of the photosensitive resin composition. % is preferred.
本発明の感光性樹脂組成物は、(B)チタン化合物粒子、ジルコニウム化合物粒子、スズ化合物粒子およびアルミニウム化合物粒子からなる群より選ばれる少なくとも1種の、金属化合物粒子、または、チタン化合物、ジルコニウム化合物、スズ化合物およびアルミニウム化合物からなる群より選ばれる少なくとも1種の、金属化合物とケイ素化合物との複合金属化合物粒子を含有する。 The photosensitive resin composition of the present invention comprises (B) at least one metal compound particle selected from the group consisting of titanium compound particles, zirconium compound particles, tin compound particles and aluminum compound particles, or a titanium compound, a zirconium compound , a tin compound, and an aluminum compound.
金属化合物とケイ素化合物との複合金属化合物粒子としては、酸化ケイ素化合物存在下で金属粒子を合成した酸化ケイ素-金属化合物複合粒子、金属粒子とシランカップリング剤を反応させたシラン表面被覆金属化合物粒子等が挙げられる。これらの中でも、チタン化合物粒子、ジルコニウム化合物粒子またはチタン化合物もしくはジルコニウム化合物とケイ素化合物との複合粒子であることが好ましい。またこれらを2種以上含有してもよい。上記のような金属化合物粒子を含有することにより、硬化物に高い屈折率をもたらすことができる。硬化物が高い屈折率を有するものであれば、それを用いた硬化膜に高い屈折率をもたらすことができる。 Examples of composite metal compound particles of a metal compound and a silicon compound include silicon oxide-metal compound composite particles in which metal particles are synthesized in the presence of a silicon oxide compound, and silane surface-coated metal compound particles in which metal particles are reacted with a silane coupling agent. etc. Among these, titanium compound particles, zirconium compound particles, or composite particles of a titanium compound or a zirconium compound and a silicon compound are preferable. Further, two or more kinds of these may be contained. By containing the metal compound particles as described above, a high refractive index can be provided to the cured product. If the cured product has a high refractive index, a cured film using the cured product can have a high refractive index.
(B)複合金属化合物粒子の例としては、例えば、酸化スズ、酸化チタン、酸化ケイ素の複合粒子である”ナノユース”(登録商標)OT-RB300M7-20、酸化スズ、酸化チタン、酸化ジルコニウム、酸化ケイ素の複合粒子である”ナノユース”OT-RA-305M7-20(いずれも日産化学(株)製)、酸化スズ、酸化チタンの複合粒子である”オプトレイク”(登録商標)TR-502、”オプトレイク”TR-504、酸化チタン、酸化ケイ素複合粒子の”オプトレイク”TR-503 、”オプトレイク”TR-513 、”オプトレイク”TR-520、”オプトレイク”TR-527、”オプトレイク”TR-528、”オプトレイク”TR-529、”オプトレイク”TR-543、”オプトレイク”TR-544、”オプトレイク”TR-550、酸化チタン粒子の”オプトレイク”TR-505(いずれも触媒化成工業(株)製)、酸化ジルコニウム粒子である”ナノユース”OZ-S30M(日産化学(株)製)、DLZ-003W(大研化学工業(株)製)、ZR-010((株)ソーラー製)、SZR-M(堺化学工業(株)製)、等が挙げられる。これらを2種以上含有してもよい。 (B) Examples of composite metal compound particles include "Nano Youth" (registered trademark) OT-RB300M7-20, which is a composite particle of tin oxide, titanium oxide, and silicon oxide, tin oxide, titanium oxide, zirconium oxide, "Nano Youth" OT-RA-305M7-20 (both manufactured by Nissan Chemical Co., Ltd.), which is a composite particle of silicon, "Optorake" (registered trademark) TR-502, which is a composite particle of tin oxide and titanium oxide, Optorake "TR-504", titanium oxide and silicon oxide composite particles "Optorake" TR-503, "Optorake" TR-513, "Optorake" TR-520, "Optorake" TR-527, "Optorake" "TR-528," "Opto Lake" TR-529, "Opto Lake" TR-543, "Opto Lake" TR-544, "Opto Lake" TR-550, titanium oxide particles "Opto Lake" TR-505 (all "Nano Youth" OZ-S30M (manufactured by Nissan Chemical Co., Ltd.), which is a zirconium oxide particle, DLZ-003W (manufactured by Daiken Chemical Industry Co., Ltd.), ZR-010 (manufactured by Daiken Chemical Industry Co., Ltd.) ) manufactured by Solar), SZR-M (manufactured by Sakai Chemical Industry Co., Ltd.), and the like. Two or more types of these may be contained.
(B)複合金属化合物粒子は、表面処理されているものが好ましい。表面処理とは、カップリング剤などの微粒子表面に存在する水酸基と反応し得る化合物を結合させる処理を言う。カップリング剤としては、シランカップリング剤やチタンカップリング剤などが挙げられる。シランカップリング剤としては、例えば、3-(メタ)アクリロキシプロピルトリメトキシシラン、3-(メタ)アクリロキシプロピルメチルジメトキシシラン等の(メタ)アクリロキシシラン類;3-グリシドキシプロピルトリメトキシシラン、3-グリシドキシプロピルトリエトキシシラン、3-グリシドキシプロピルメチルジエトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリメトキシシラン等のエポキシシラン類;ビニルトリメトキシシラン、ビニルトリエトキシシラン、ビニルトリス(β-メトキシエトキシ)シラン、ジメチルビニルメトキシシラン、ビニルトリクロロシラン、ジメチルビニルクロロシラン等のビニルシラン類;N-2-(アミノエチル)-3-アミノプロピルトリメトキシシラン、3-アミノプロピルトリメトキシシラン、N-2-(アミノエチル)-3-アミノプロピルメチルジメトキシシラン等のアミノシラン類;N-(ビニルベンジル)-2-アミノエチル-3-アミノプロピルトリメトキシシランの塩酸塩等の第四級アンモニウム塩類;p-スチリルトリメトキシシラン;フェニルトリメトキシシランなどが挙げられる。チタンカップリング剤としては、例えば、イソプロピルジメタクリルイソステアロイルチタネート、イソプロピルジアクリルイソステアロイルチタネート等のチタネート類等が挙げられる。これらを2種以上用いてもよい。これらの中でも、(メタ)アクリロキシシラン類が特に好ましい。ラジカル重合性基を有するため露光により樹脂やモノマと架橋することができ、複合金属化合物粒子と樹脂やモノマとの相分離を抑制し、透明性を向上させるだけでなく、硬化膜表面の架橋密度がさらに上昇するため、硬化膜表面の平滑性を高くすることができる。 (B) The composite metal compound particles are preferably surface-treated. Surface treatment refers to a treatment in which a compound such as a coupling agent that can react with the hydroxyl groups present on the surface of the fine particles is bonded. Examples of the coupling agent include a silane coupling agent and a titanium coupling agent. Examples of the silane coupling agent include (meth)acryloxysilanes such as 3-(meth)acryloxypropyltrimethoxysilane and 3-(meth)acryloxypropylmethyldimethoxysilane; 3-glycidoxypropyltrimethoxysilane; Epoxysilanes such as silane, 3-glycidoxypropyltriethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane; vinyltrimethoxysilane, vinyltrimethoxysilane, etc. Vinylsilanes such as ethoxysilane, vinyltris(β-methoxyethoxy)silane, dimethylvinylmethoxysilane, vinyltrichlorosilane, dimethylvinylchlorosilane; N-2-(aminoethyl)-3-aminopropyltrimethoxysilane, 3-aminopropyl Aminosilanes such as trimethoxysilane, N-2-(aminoethyl)-3-aminopropylmethyldimethoxysilane; Examples include quaternary ammonium salts; p-styryltrimethoxysilane; phenyltrimethoxysilane. Examples of the titanium coupling agent include titanates such as isopropyl dimethacrylisostearoyl titanate and isopropyl diacryl isostearoyl titanate. Two or more types of these may be used. Among these, (meth)acryloxysilanes are particularly preferred. Because it has a radically polymerizable group, it can be crosslinked with resins and monomers by exposure to light, suppressing phase separation between composite metal compound particles and resins and monomers, and not only improving transparency but also increasing the crosslinking density on the surface of the cured film. further increases, the smoothness of the surface of the cured film can be increased.
(B)複合金属化合物粒子の粒度分布におけるD50値は、分散安定性を向上させる観点から1nm以上が好ましい。また、膜表面の平滑性を向上させるとともに硬化膜中における光の散乱を抑制して透明性を向上させる観点から70nm以下が好ましく、50nm以下がより好ましい。ここで、複合金属化合物粒子の粒度分布におけるD50値は、ガス吸着法や動的光散乱法、X線小角散乱法、透過型電子顕微鏡や走査型電子顕微鏡により粒子径を直接測定する方法等により測定することができる。本発明においては、動的光散乱法により測定した値を指す。用いる機器は特に限定されないが、ダイナミック光散乱高度計DLS-8000(大塚電子(株)製)などを挙げることができる。 (B) The D50 value in the particle size distribution of the composite metal compound particles is preferably 1 nm or more from the viewpoint of improving dispersion stability. Further, from the viewpoint of improving the smoothness of the film surface and suppressing light scattering in the cured film to improve transparency, the thickness is preferably 70 nm or less, more preferably 50 nm or less. Here, the D50 value in the particle size distribution of composite metal compound particles can be determined by a method such as a gas adsorption method, a dynamic light scattering method, a small-angle X-ray scattering method, or a method of directly measuring the particle diameter using a transmission electron microscope or a scanning electron microscope. can be measured. In the present invention, it refers to a value measured by a dynamic light scattering method. The equipment used is not particularly limited, but examples include dynamic light scattering altimeter DLS-8000 (manufactured by Otsuka Electronics Co., Ltd.).
本発明の感光性組成物においては、(B)複合金属化合物粒子が硬化膜の屈折率の観点から固形分中10質量部以上であることが好ましく、15質量部以上であることがより好ましい。また、基材との密着性の観点から、固形分中70質量部以下であることが好ましく、65質量部以下であることがより好ましい。 In the photosensitive composition of the present invention, the (B) composite metal compound particles preferably account for 10 parts by mass or more, more preferably 15 parts by mass or more, based on the solid content from the viewpoint of the refractive index of the cured film. Further, from the viewpoint of adhesion to the base material, it is preferably 70 parts by mass or less in the solid content, and more preferably 65 parts by mass or less.
本発明の感光性樹脂組成物は、(C)ケトオキシムエステル基を含有し、かつ波長325~340nmの領域に吸収ピークを有する光重合開始剤を含有する。本発明における光重合開始剤とは、光(紫外線、電子線を含む)により分解および/または反応し、ラジカルを発生させるものを指す。(C)ケトオキシムエステル基を含有し、かつ波長325~340nmの領域に吸収ピークを有する光重合開始剤としては、1-[4-(フェニルチオ)フェニル]オクタン-1,2-ジオン2-(0-ベンゾイルオキシム)等が挙げられる。市販のラジカル開始剤としては、“イルガキュア”(登録商標)OXE01;“アデカアークルズ”(登録商標)NCI-930((株)ADEKA製);TR-PBG-305、TR-PBG-3057(以上、Tronly製);等が挙げられる。これらを2種以上含有してもよい。 The photosensitive resin composition of the present invention contains (C) a photopolymerization initiator that contains a ketoxime ester group and has an absorption peak in a wavelength range of 325 to 340 nm. The photopolymerization initiator in the present invention refers to one that decomposes and/or reacts with light (including ultraviolet rays and electron beams) to generate radicals. (C) As a photopolymerization initiator containing a ketoxime ester group and having an absorption peak in the wavelength range of 325 to 340 nm, 1-[4-(phenylthio)phenyl]octane-1,2-dione 2-( 0-benzoyloxime) and the like. Commercially available radical initiators include "Irgacure" (registered trademark) OXE01; "ADEKA Arkles" (registered trademark) NCI-930 (manufactured by ADEKA Corporation); TR-PBG-305, TR-PBG-3057 (and above); , manufactured by Tronly); and the like. Two or more types of these may be contained.
光ラジカル重合開始剤の吸収ピークは、以下の方法により求めることができる。まず、光ラジカル重合開始剤を、プロピレングリコールモノメチルエーテルアセテート(以下、「PGMEA」)を用いて濃度0.001質量%に希釈する。得られた希釈液について、紫外-可視分光光度計UV-2600((株)島津製作所製)を用いて、吸光度を測定し、得られた吸光度スペクトルから吸収ピーク波長を求めることができる。 The absorption peak of the photoradical polymerization initiator can be determined by the following method. First, a photoradical polymerization initiator is diluted to a concentration of 0.001% by mass using propylene glycol monomethyl ether acetate (hereinafter referred to as "PGMEA"). The absorbance of the obtained diluted solution can be measured using an ultraviolet-visible spectrophotometer UV-2600 (manufactured by Shimadzu Corporation), and the absorption peak wavelength can be determined from the obtained absorbance spectrum.
本発明の感光性樹脂組成物における(C)光ラジカル重合開始剤の含有量は、ラジカル硬化を十分に進め、硬化膜表面の平滑性、鉛筆硬度をより高くするとともに、電極や配線加工時のアウトガスの発生をより抑制する観点から、固形分中0.1質量%以上が好ましく、1質量%以上がより好ましく、2質量%以上がさらに好ましい。一方、(C)光ラジカル重合開始剤の残留を抑制して耐薬品性をより向上させ、過剰なラジカル発生を抑制して解像度をより向上させる観点から、(C)光ラジカル重合開始剤の含有量は、固形分中20質量%以下が好ましく、15質量%以下がより好ましく、12質量%以下がさらに好ましい。 The content of the (C) radical photopolymerization initiator in the photosensitive resin composition of the present invention is determined to sufficiently promote radical curing, increase the smoothness and pencil hardness of the cured film surface, and improve the hardness during electrode and wiring processing. From the viewpoint of further suppressing the generation of outgas, the content in the solid content is preferably 0.1% by mass or more, more preferably 1% by mass or more, and even more preferably 2% by mass or more. On the other hand, from the viewpoint of further improving chemical resistance by suppressing the residual of (C) photo-radical polymerization initiator and further improving resolution by suppressing excessive radical generation, the inclusion of (C) photo-radical polymerization initiator The amount is preferably 20% by mass or less, more preferably 15% by mass or less, and even more preferably 12% by mass or less based on the solid content.
本発明の感光性樹脂組成物は、さらに(C)光ラジカル重合開始剤以外の光ラジカル重合開始剤を含有してもよく、例えば、アルキルフェノン系光ラジカル重合開始剤、アシルホスフィンオキサイド系光ラジカル重合開始剤、オキシムエステル系光ラジカル重合開始剤、ベンゾフェノン系光ラジカル重合開始剤、オキサントン系光ラジカル重合開始剤、イミダゾール系光ラジカル重合開始剤、ベンゾチアゾール系光ラジカル重合開始剤、ベンゾオキサゾール系光ラジカル重合開始剤、カルバゾール系光ラジカル重合開始剤、トリアジン系光ラジカル重合開始剤、安息香酸エステル系光ラジカル重合開始剤、リン系光ラジカル重合開始剤、チタネート等の無機系光ラジカル重合開始剤などが挙げられる。これらを2種以上含有してもよい。 The photosensitive resin composition of the present invention may further contain a photoradical polymerization initiator other than (C) the photoradical polymerization initiator, such as an alkylphenone-based photoradical polymerization initiator, an acylphosphine oxide-based photoradical Polymerization initiator, oxime ester-based radical photopolymerization initiator, benzophenone-based radical photopolymerization initiator, oxanthone-based radical photopolymerization initiator, imidazole-based radical photopolymerization initiator, benzothiazole-based radical photopolymerization initiator, benzoxazole-based photoinitiator Radical polymerization initiators, carbazole-based radical photopolymerization initiators, triazine-based radical photopolymerization initiators, benzoic acid ester-based radical photopolymerization initiators, phosphorus-based radical photopolymerization initiators, inorganic radical photopolymerization initiators such as titanates, etc. can be mentioned. Two or more types of these may be contained.
本発明の感光性樹脂組成物は、(D)波長330~345nmの領域に吸収ピークを有し、かつラジカル重合性基を有する紫外線吸収剤を含有する。(D)波長335~345nmの領域に吸収ピークを有し、かつラジカル重合性基を有する紫外線吸収剤としては、2-[2-ヒドロキシ-5-[2-(メタクリロイルオキシ)エチル]フェニル]-2H-ベンゾトリアゾール等が挙げられる。市販の紫外線吸収剤としては、RUVA-93(大塚化学(株))等が挙げられる。 The photosensitive resin composition of the present invention contains (D) an ultraviolet absorber having an absorption peak in a wavelength range of 330 to 345 nm and having a radically polymerizable group. (D) The ultraviolet absorber having an absorption peak in the wavelength range of 335 to 345 nm and having a radically polymerizable group is 2-[2-hydroxy-5-[2-(methacryloyloxy)ethyl]phenyl]- Examples include 2H-benzotriazole and the like. Commercially available ultraviolet absorbers include RUVA-93 (manufactured by Otsuka Chemical Co., Ltd.).
紫外線吸収剤の吸収ピークは、以下の方法により求めることができる。まず、紫外線吸収剤を、PGMEAを用いて濃度0.001質量%に希釈する。得られた希釈液について、紫外-可視分光光度計UV-2600((株)島津製作所製)を用いて、吸光度を測定し、得られた吸光度スペクトルから吸収ピーク波長を求めることができる。 The absorption peak of the ultraviolet absorber can be determined by the following method. First, the ultraviolet absorber is diluted to a concentration of 0.001% by mass using PGMEA. The absorbance of the obtained diluted solution can be measured using an ultraviolet-visible spectrophotometer UV-2600 (manufactured by Shimadzu Corporation), and the absorption peak wavelength can be determined from the obtained absorbance spectrum.
本発明の感光性樹脂組成物における(D)紫外線吸収剤の含有量は、i線(365nm)より短波長の波長310nm~350nmの光を選択的に活用し、硬化膜表面の平滑性を高くするとともに、感光性樹脂組成物の解像度を向上させる観点から、固形分中0.1質量%以上が好ましく、0.5質量%以上がより好ましく、1質量%以上がさらに好ましい。一方、(D)紫外線吸収剤の残留を抑制して耐薬品性を向上させるとともに、硬化膜の下地となるガラスなどの基材との密着性を向上させる観点から、(D)紫外線吸収剤の含有量は、固形分中20質量%以下が好ましく、15質量%以下がより好ましく、12質量%以下がさらに好ましい。 The content of the ultraviolet absorber (D) in the photosensitive resin composition of the present invention selectively utilizes light with a wavelength of 310 nm to 350 nm, which is shorter than the i-line (365 nm), and increases the smoothness of the cured film surface. At the same time, from the viewpoint of improving the resolution of the photosensitive resin composition, the solid content is preferably 0.1% by mass or more, more preferably 0.5% by mass or more, and even more preferably 1% by mass or more. On the other hand, from the viewpoint of suppressing the residual amount of the (D) ultraviolet absorber and improving chemical resistance, as well as improving the adhesion to the base material such as glass that is the base of the cured film, the use of (D) the ultraviolet absorber The content is preferably 20% by mass or less in the solid content, more preferably 15% by mass or less, and even more preferably 12% by mass or less.
本発明の感光性樹脂組成物は、さらに(D)紫外線吸収剤以外の紫外線吸収剤を含有してもよく、例えば、紫外線吸収剤としては、透明性、非着色性の面から、ベンゾトリアゾール系化合物、ベンゾフェノン系化合物、トリアジン系化合物等が挙げられる。これらを2種以上含有してもよい。 The photosensitive resin composition of the present invention may further contain (D) an ultraviolet absorber other than the ultraviolet absorber. For example, as the ultraviolet absorber, benzotriazole-based compounds, benzophenone compounds, triazine compounds, and the like. Two or more types of these may be contained.
本発明の感光性樹脂組成物は、ラジカル重合性基を有するモノマを含有することが好ましい。ラジカル重合性基としては、(メタ)アクリロイル基がより好ましい。硬化膜表面の架橋密度を高くすることで平滑性を高くし、硬化膜上に形成されるITO電極の抵抗値上昇を抑制する観点から、ラジカル重合性基を有するモノマが多官能モノマを含有することが好ましい。また、硬化膜の疎水性を高めることにより耐薬品性を向上させる観点から、ラジカル重合性基を有するモノマが芳香族環および/または脂環式炭素環を有するモノマを含有することが好ましい。 The photosensitive resin composition of the present invention preferably contains a monomer having a radically polymerizable group. As the radically polymerizable group, a (meth)acryloyl group is more preferable. The monomer having a radically polymerizable group contains a polyfunctional monomer from the viewpoint of increasing the crosslinking density of the cured film surface to increase smoothness and suppressing an increase in the resistance value of the ITO electrode formed on the cured film. It is preferable. Further, from the viewpoint of improving chemical resistance by increasing the hydrophobicity of the cured film, it is preferable that the monomer having a radically polymerizable group contains a monomer having an aromatic ring and/or an alicyclic carbon ring.
多官能モノマとは、2つ以上のラジカル重合性基を有する化合物をいい、(メタ)アクリロイル基を2つ以上有することが好ましい。2つの(メタ)アクリロイル基を有する化合物としては、例えば、エチレングリコールジ(メタ)アクリレート、ジエチレングリコールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、グリセリンジ(メタ)アクリレート、トリプロピレングリコールジ(メタ)アクリレート、1,3-ブタンジオールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、1,4-ブタンジオールジ(メタ)アクリレート、1,6-ヘキサンジオールジ(メタ)アクリレート、1,9-ノナンジオールジ(メタ)アクリレート、1,10-デカンジオールジ(メタ)アクリレートなどが挙げられる。3つ以上の(メタ)アクリロイル基を有する化合物しては、例えば、グリセリントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、エトキシ化ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、トリペンタエリスリトールヘプタ(メタ)アクリレート、トリペンタエリスリトールオクタ(メタ)アクリレート、テトラペンタエリスリトールノナ(メタ)アクリレート、テトラペンタエリスリトールデカ(メタ)アクリレート、ペンタペンタエリスリトールウンデカ(メタ)アクリレート、ペンタペンタエリスリトールドデカ(メタ)アクリレートなどが挙げられる。これらを2種以上含有してもよい。 The polyfunctional monomer refers to a compound having two or more radically polymerizable groups, and preferably has two or more (meth)acryloyl groups. Examples of compounds having two (meth)acryloyl groups include ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, glycerin di(meth)acrylate, and tripropylene glycol di(meth)acrylate. (meth)acrylate, 1,3-butanediol di(meth)acrylate, neopentyl glycol di(meth)acrylate, 1,4-butanediol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, Examples include 1,9-nonanediol di(meth)acrylate and 1,10-decanediol di(meth)acrylate. Examples of compounds having three or more (meth)acryloyl groups include glycerin tri(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, pentaerythritol tri(meth)acrylate, and pentaerythritol tri(meth)acrylate. Erythritol tetra(meth)acrylate, ethoxylated pentaerythritol tetra(meth)acrylate, dipentaerythritol hexa(meth)acrylate, tripentaerythritol hepta(meth)acrylate, tripentaerythritol octa(meth)acrylate, tetrapentaerythritol nona(meth)acrylate ) acrylate, tetrapentaerythritol deca(meth)acrylate, pentapentaerythritol undeca(meth)acrylate, pentapentaerythritol dodeca(meth)acrylate, and the like. Two or more types of these may be contained.
芳香族環および/または脂環式炭素環を有するモノマとしては、例えば、2,2-[9H-フルオレン-9,9-ジイルビス(1,4-フェニレン)ビスオキシ]ジエタノールジ(メタ)アクリレート、ジメチロールトリシクロデカンジ(メタ)アクリレート、エトキシ化ビスフェノールAジ(メタ)アクリレートなどのアクリル酸エステルなどが挙げられる。これらを2種以上含有してもよい。 Examples of monomers having an aromatic ring and/or alicyclic carbon ring include 2,2-[9H-fluorene-9,9-diylbis(1,4-phenylene)bisoxy]diethanol di(meth)acrylate, Examples include acrylic esters such as methylol tricyclodecane di(meth)acrylate and ethoxylated bisphenol A di(meth)acrylate. Two or more types of these may be contained.
本発明の感光性樹脂組成物におけるラジカル重合性基を有するモノマの合計含有量は、硬化膜表面の平滑性を高くし、絶縁膜上に形成されるITO電極の抵抗値上昇を抑制する観点から、固形分中5質量%以上が好ましく、10質量%以上がより好ましい。 The total content of monomers having a radically polymerizable group in the photosensitive resin composition of the present invention is determined from the viewpoint of increasing the smoothness of the cured film surface and suppressing an increase in the resistance value of the ITO electrode formed on the insulating film. , is preferably 5% by mass or more, more preferably 10% by mass or more in solid content.
本発明の感光性樹脂組成物は、架橋剤を含有してもよい。樹脂の架橋を促進または容易にすることができる。架橋剤としては、例えば、窒素含有有機物、シリコーン樹脂硬化剤、金属アルコキシド、金属キレート、イソシアネート化合物およびその重合体、エポキシ化合物およびその重合体、メチロール化メラミン誘導体、メチロール化尿素誘導体などが挙げられる。これらを2種以上含有してもよい。 The photosensitive resin composition of the present invention may contain a crosslinking agent. Crosslinking of the resin can be promoted or facilitated. Examples of the crosslinking agent include nitrogen-containing organic substances, silicone resin curing agents, metal alkoxides, metal chelates, isocyanate compounds and polymers thereof, epoxy compounds and polymers thereof, methylolated melamine derivatives, methylolated urea derivatives, and the like. Two or more types of these may be contained.
これらの中でも、架橋剤の反応性、得られた硬化膜の耐薬品性などから金属キレート化合物、エポキシ化合物が好ましく用いられる。架橋剤の含有量は、硬化膜の耐薬品性を向上させる観点から、固形分中0.1質量%以上が好ましく、0.5質量%以上がより好ましく、1質量%以上がさらに好ましい。一方、感光性樹脂組成物の解像度を向上させる観点から、架橋剤の含有量は、固形分中10質量%以下が好ましく、8質量%以下がより好ましく、6質量%以下がさらに好ましい。 Among these, metal chelate compounds and epoxy compounds are preferably used in view of the reactivity of the crosslinking agent and the chemical resistance of the obtained cured film. From the viewpoint of improving the chemical resistance of the cured film, the content of the crosslinking agent is preferably 0.1% by mass or more in the solid content, more preferably 0.5% by mass or more, and even more preferably 1% by mass or more. On the other hand, from the viewpoint of improving the resolution of the photosensitive resin composition, the content of the crosslinking agent in the solid content is preferably 10% by mass or less, more preferably 8% by mass or less, and even more preferably 6% by mass or less.
本発明の感光性樹脂組成物は、密着改良剤を含有してもよい。密着改良剤を含有することにより、基材との密着性が向上し、信頼性の高い硬化膜を得ることができる。密着改良剤としては、例えば、脂環式エポキシ化合物や、シランカップリング剤などが挙げられる。脂環式エポキシ化合物としては、例えば、3’,4’-エポキシシクロヘキシメチル-3,4-エポキシシクロヘキサンカルボキシレート、2,2-ビス(ヒドロキシメチル)-1-ブタノールの1,2-エポキシ-4-(2-オキシラニル)シクロヘキサン付加物、ε-カプロラクトン変性3’,4’-エポキシシクロヘキシルメチル3’,4’-エポキシシクロヘキサンカルボキシレート、1,2-エポキシ-4-ビニルシクロヘキサン、ブタンテトラカルボン酸テトラ(3,4-エポキシシクロヘキシルメチル)修飾ε-カプロラクトン、3,4-エポキシシクロヘキシルメチルメタアクリレート、水添ビスフェノールAジグリシジルエーテル、水添ビスフェノールFジグリシジルエーテル、水添ビスフェノールEジグリシジルエーテル、水添ビスフェノールAビス(プロピレングリコールグリシジルエーテル)エーテル、水添ビスフェノールAビス(エチレングリコールグリシジルエーテル)エーテル、1,4-シクロヘキサンジカルボン酸ジグリシジル、1,4-シクロヘキサンジメタノールジグリシジルエーテル等が挙げられる。これらを2種以上含有してもよい。シランカップリング剤としては、例えば、(3,4-エポキシシクロヘキシル)メチルトリメトキシシラン、(3,4-エポキシシクロヘキシル)メチルトリエトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリプロポキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリブトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリメトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリエトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリフェノキシシラン、3-(3,4-エポキシシクロヘキシル)プロピルトリメトキシシラン、3-(3,4-エポキシシクロヘキシル)プロピルトリエトキシシラン、4-(3,4-エポキシシクロヘキシル)ブチルトリメトキシシラン、4-(3,4-エポキシシクロヘキシル)ブチルトリエトキシシランや、下記一般式(2)で表される化合物が挙げられる。 The photosensitive resin composition of the present invention may contain an adhesion improver. By containing the adhesion improver, the adhesion to the base material is improved and a highly reliable cured film can be obtained. Examples of the adhesion improver include alicyclic epoxy compounds and silane coupling agents. Examples of the alicyclic epoxy compound include 3',4'-epoxycyclohexymethyl-3,4-epoxycyclohexanecarboxylate, 1,2-epoxy of 2,2-bis(hydroxymethyl)-1-butanol, 4-(2-oxiranyl)cyclohexane adduct, ε-caprolactone modified 3',4'-epoxycyclohexylmethyl 3',4'-epoxycyclohexanecarboxylate, 1,2-epoxy-4-vinylcyclohexane, butanetetracarboxylic acid Tetra(3,4-epoxycyclohexylmethyl) modified ε-caprolactone, 3,4-epoxycyclohexylmethyl methacrylate, hydrogenated bisphenol A diglycidyl ether, hydrogenated bisphenol F diglycidyl ether, hydrogenated bisphenol E diglycidyl ether, water Examples include hydrogenated bisphenol A bis(propylene glycol glycidyl ether) ether, hydrogenated bisphenol A bis(ethylene glycol glycidyl ether) ether, diglycidyl 1,4-cyclohexanedicarboxylate, and 1,4-cyclohexanedimethanol diglycidyl ether. Two or more types of these may be contained. Examples of the silane coupling agent include (3,4-epoxycyclohexyl)methyltrimethoxysilane, (3,4-epoxycyclohexyl)methyltriethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltripropoxysilane, 2-(3,4-epoxycyclohexyl)ethyltributoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltriethoxysilane, 2-(3, 4-Epoxycyclohexyl)ethyltriphenoxysilane, 3-(3,4-epoxycyclohexyl)propyltrimethoxysilane, 3-(3,4-epoxycyclohexyl)propyltriethoxysilane, 4-(3,4-epoxycyclohexyl) Examples include butyltrimethoxysilane, 4-(3,4-epoxycyclohexyl)butyltriethoxysilane, and a compound represented by the following general formula (2).
上記一般式(2)中、各R1はそれぞれ同じでも異なってもよく、炭素数1~6のアルキル基を表す。アルキル基はさらに置換基を有していても良い。nは0あるいは1を表す。R2は炭素数3~30の3価の有機基を表す。R3はそれぞれ同じでも異なってもよく、炭素数1~6のアルキル基、炭素数1~6のアルコキシ基、フェニル基、ヒドロキシル基、およびフェノキシ基を表す。なお、R3のこれらの基のうち、ヒドロキシル基以外はさらに置換基を有していても良い。上記一般式(2)で表される化合物としては、例えば、3-(tert-ブチルカルバモイル)―6-(トリメトキシシリル)ヘキサン酸、2-(2-(tert-ブチルアミノ)-2-オキソエチル)-5-(トリメトキシシリル)ペンタン酸、3-(イソプロピルカルバモイル)-6-(トリメトキシシリル)ヘキサン酸、2-(2-(イソプロピルアミノ)-2-オキソエチル)-5-(トリメトキシシリル)ペンタン酸、3-(イソブチルカルバモイル)-6-(トリメトキシシリル)ヘキサン酸、3-(tert-ペンチルカルバモイル)-6-(トリメトキシシリル)ヘキサン酸、2-(2―(tert-ペンチルアミノ)-2-オキソエチル)-5-(トリメトキシシリル)ペンタン酸、6-(ジメトキシメチルシリル)-3-(tert-ブチルカルバモイル)ヘキサン酸、5-(ジメトキシ(メチル)シリル-2-(2-(tert-ブチルアミノ)-2-オキソエチル)ペンタン酸、3-(tert-ブチルカルバモイル)-6-(トリメトキシシリル)ペンタン酸、2-(2-(tert-ブチルアミノ)-2-オキソエチル)-5-(トリメトキシシリル)ブタン酸、2-(tert-ブチルカルバモイル)-4-(2-(トリメトキシシリル)エチル)シクロヘキサンカルボン酸、2-(tert-ブチルカルバモイル)-5-(2-(トリメトキシシリル)エチル)シクロヘキサンカルボン酸などが挙げられる。これらを2種以上含有してもよい。これらの中でも、基材との密着性を向上させる観点から上記一般式(2)で表される化合物が好ましく用いられる。密着改良剤の含有量は、基材との密着性を向上させる観点から、固形分中0.1質量%以上が好ましく、0.5質量%以上がより好ましく、1質量%以上がさらに好ましい。一方、加熱による色変化を抑制する観点から、密着改良剤の含有量は、固形分中10質量%以下が好ましく、8質量%以下がより好ましく、6質量%以下がさらに好ましい。 In the above general formula (2), each R 1 may be the same or different, and represents an alkyl group having 1 to 6 carbon atoms. The alkyl group may further have a substituent. n represents 0 or 1. R 2 represents a trivalent organic group having 3 to 30 carbon atoms. Each R 3 may be the same or different and represents an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a phenyl group, a hydroxyl group, and a phenoxy group. Note that among these groups of R 3 , those other than the hydroxyl group may further have a substituent. Examples of the compound represented by the above general formula (2) include 3-(tert-butylcarbamoyl)-6-(trimethoxysilyl)hexanoic acid, 2-(2-(tert-butylamino)-2-oxoethyl )-5-(trimethoxysilyl)pentanoic acid, 3-(isopropylcarbamoyl)-6-(trimethoxysilyl)hexanoic acid, 2-(2-(isopropylamino)-2-oxoethyl)-5-(trimethoxysilyl) ) Pentanoic acid, 3-(isobutylcarbamoyl)-6-(trimethoxysilyl)hexanoic acid, 3-(tert-pentylcarbamoyl)-6-(trimethoxysilyl)hexanoic acid, 2-(2-(tert-pentylamino) )-2-oxoethyl)-5-(trimethoxysilyl)pentanoic acid, 6-(dimethoxymethylsilyl)-3-(tert-butylcarbamoyl)hexanoic acid, 5-(dimethoxy(methyl)silyl)-2-(2- (tert-butylamino)-2-oxoethyl)pentanoic acid, 3-(tert-butylcarbamoyl)-6-(trimethoxysilyl)pentanoic acid, 2-(2-(tert-butylamino)-2-oxoethyl)- 5-(trimethoxysilyl)butanoic acid, 2-(tert-butylcarbamoyl)-4-(2-(trimethoxysilyl)ethyl)cyclohexanecarboxylic acid, 2-(tert-butylcarbamoyl)-5-(2-( (trimethoxysilyl)ethyl)cyclohexanecarboxylic acid and the like.Two or more types of these may be contained.Among these, from the viewpoint of improving adhesion to the base material, those represented by the above general formula (2) A compound is preferably used.The content of the adhesion improver is preferably 0.1% by mass or more, more preferably 0.5% by mass or more, and 1% by mass based on the solid content, from the viewpoint of improving the adhesion with the base material. % or more.On the other hand, from the viewpoint of suppressing color change due to heating, the content of the adhesion improver is preferably 10% by mass or less in the solid content, more preferably 8% by mass or less, and further preferably 6% by mass or less. preferable.
本発明の感光性樹脂組成物は、溶媒を含有してもよい。溶媒を含有することにより、各成分を均一に溶解することができる。溶媒としては、例えば、脂肪族炭化水素、カルボン酸エステル、ケトン、エーテル、アルコール類などが挙げられる。これらを2種以上含有してもよい。各成分を均一に溶解し、得られる塗布膜の透明性を向上させる観点から、アルコール性水酸基を有する化合物、カルボニル基を有する環状化合物が好ましい。 The photosensitive resin composition of the present invention may contain a solvent. By containing a solvent, each component can be uniformly dissolved. Examples of the solvent include aliphatic hydrocarbons, carboxylic acid esters, ketones, ethers, and alcohols. Two or more types of these may be contained. From the viewpoint of uniformly dissolving each component and improving the transparency of the resulting coating film, compounds having an alcoholic hydroxyl group and cyclic compounds having a carbonyl group are preferred.
アルコール性水酸基を有する化合物としては、例えば、アセトール、3-ヒドロキシ-3-メチル-2-ブタノン、4-ヒドロキシ-3-メチル-2-ブタノン、5-ヒドロキシ-2-ペンタノン、4-ヒドロキシ-4-メチル-2-ペンタノン(ダイアセトンアルコール)、乳酸エチル、乳酸ブチル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノn-プロピルエーテル、プロピレングリコールモノn-ブチルエーテル、プロピレングリコールモノt-ブチルエーテル、3-メトキシ-1-ブタノール、3-メチル-3-メトキシ-1-ブタノール、テトラヒドロフルフリルアルコール等が挙げられる。 Examples of compounds having an alcoholic hydroxyl group include acetol, 3-hydroxy-3-methyl-2-butanone, 4-hydroxy-3-methyl-2-butanone, 5-hydroxy-2-pentanone, 4-hydroxy-4 -Methyl-2-pentanone (diacetone alcohol), ethyl lactate, butyl lactate, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol mono-n-butyl ether, propylene glycol mono-t-butyl ether , 3-methoxy-1-butanol, 3-methyl-3-methoxy-1-butanol, tetrahydrofurfuryl alcohol and the like.
カルボニル基を有する環状化合物の具体例としては、γ-ブチロラクトン、γ-バレロラクトン、δ-バレロラクトン、炭酸プロピレン、N-メチルピロリドン、シクロヘキサノン、シクロヘプタノンなどが挙げられる。これらの中でも、γ-ブチロラクトンが特に好ましく用いられる。
脂肪族炭化水素としては、例えば、キシレン、エチルベンゼン、ソルベントナフサなどが挙げられる。
カルボン酸エステルとしては、例えば、ベンジルアセテート、エチルベンゾエート、γ-ブチロラクトン、メチルベンゾエート、マロン酸ジエチル、2-エチルヘキシルアセテート、2-ブトキシエチルアセテート、3-メトキシ-3-メチル-ブチルアセテート、シュウ酸ジエチル、アセト酢酸エチル、シクロヘキシルアセテート、3-メトキシ-ブチルアセテート、アセト酢酸メチル、エチル-3-エトキシプロピオネート、2-エチルブチルアセテート、イソペンチルプロピオネート、プロピレングリコールモノメチルエーテルプロピオネート、プロピレングリコールモノエチルエーテルアセテート、酢酸エチル、酢酸ブチル、酢酸イソペンチル、酢酸ペンチル、プロピレングリコールモノメチルエーテルアセテートなどが挙げられる。
Specific examples of the cyclic compound having a carbonyl group include γ-butyrolactone, γ-valerolactone, δ-valerolactone, propylene carbonate, N-methylpyrrolidone, cyclohexanone, cycloheptanone, and the like. Among these, γ-butyrolactone is particularly preferably used.
Examples of aliphatic hydrocarbons include xylene, ethylbenzene, and solvent naphtha.
Examples of carboxylic acid esters include benzyl acetate, ethyl benzoate, γ-butyrolactone, methyl benzoate, diethyl malonate, 2-ethylhexyl acetate, 2-butoxyethyl acetate, 3-methoxy-3-methyl-butyl acetate, diethyl oxalate. , ethyl acetoacetate, cyclohexyl acetate, 3-methoxy-butyl acetate, methyl acetoacetate, ethyl-3-ethoxypropionate, 2-ethylbutyl acetate, isopentyl propionate, propylene glycol monomethyl ether propionate, propylene glycol Examples include monoethyl ether acetate, ethyl acetate, butyl acetate, isopentyl acetate, pentyl acetate, propylene glycol monomethyl ether acetate, and the like.
ケトンとしては、例えば、シクロペンタノン、シクロヘキサノンなどが挙げられる。
エーテルとしては、例えば、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールターシャリーブチルエーテル、ジプロピレングリコールモノメチルエーテルなどのプロピレングリコール誘導体などの脂肪族エーテル類などが挙げられる。
Examples of the ketone include cyclopentanone and cyclohexanone.
Examples of the ether include aliphatic ethers such as propylene glycol derivatives such as propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol tertiary butyl ether, and dipropylene glycol monomethyl ether.
これらの中でも、保存安定性の観点からはダイアセトンアルコール、テトラヒドロフルフリルアルコールが好ましく、段差被覆性の点からはロピレングリコールモノメチルエーテルアセテートが好ましい。 Among these, diacetone alcohol and tetrahydrofurfuryl alcohol are preferred from the viewpoint of storage stability, and propylene glycol monomethyl ether acetate is preferred from the viewpoint of step coverage.
本発明の感光性樹脂組成物における溶媒の含有量は、塗布方法などに応じて調整することができる。例えば、スピンコーティングにより塗布する場合には、感光性樹脂組成物全体の50~95質量%が一般的である。 The content of the solvent in the photosensitive resin composition of the present invention can be adjusted depending on the coating method and the like. For example, when applying by spin coating, the amount is generally 50 to 95% by mass of the entire photosensitive resin composition.
本発明の感光性樹脂組成物は、界面活性剤を含有してもよい。界面活性剤を含有することにより、塗布時のフロー性を向上させることができる。界面活性剤としては、例えば、フッ素系界面活性剤;シリコーン系界面活性剤;含フッ素熱分解性界面活性剤;ポリエーテル変性シロキサン系界面活性剤;ポリアルキレンオキシド系界面活性剤;ポリ(メタ)アクリレート系界面活性剤;ラウリル硫酸アンモニウム、ポリオキシエチレンアルキルエーテル硫酸トリエタノールアミンなどの陰イオン界面活性剤;ステアリルアミンアセテート、ラウリルトリメチルアンモニウムクロライドなどの陽イオン界面活性剤;ラウリルジメチルアミンオキサイド、ラウリルカルボキシメチルヒドロキシエチルイミダゾリウムベタインなどの両性界面活性剤;ポリオキシエチレンラウリルエーテル、ポリオキシエチレンステアリルエーテル、ソルビタンモノステアレートなどの非イオン界面活性剤などが挙げられる。これらを2種以上含有してもよい。 The photosensitive resin composition of the present invention may contain a surfactant. By containing a surfactant, flowability during application can be improved. Examples of the surfactant include fluorine-based surfactants; silicone-based surfactants; fluorine-containing thermally decomposable surfactants; polyether-modified siloxane-based surfactants; polyalkylene oxide-based surfactants; poly(meth) Acrylate surfactants; Anionic surfactants such as ammonium lauryl sulfate and polyoxyethylene alkyl ether sulfate triethanolamine; Cationic surfactants such as stearylamine acetate and lauryl trimethylammonium chloride; Lauryl dimethylamine oxide and lauryl carboxymethyl Examples include amphoteric surfactants such as hydroxyethylimidazolium betaine; nonionic surfactants such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, and sorbitan monostearate. Two or more types of these may be contained.
フッ素系界面活性剤の市販品としては、例えば、“メガファック”(登録商標)F142D、同F172、同F173、同F183、同F445、同F470、同F475、同F477(以上、DIC(株)製)、NBX-15、FTX-218((株)ネオス製)などが挙げられる。シリコーン系界面活性剤の市販品としては、例えば、“BYK”(登録商標)-333、BYK-301、BYK-331、BYK-345、BYK-307(ビックケミー・ジャパン(株)製)などが挙げられる。含フッ素熱分解性界面活性剤の市販品としては、例えば、“メガファック”(登録商標)DS-21(DIC(株)製)などが挙げられる。ポリエーテル変性シロキサン系界面活性剤の市販品としては、例えば、“BYK”(登録商標)-345、BYK-346、BYK-347、BYK-348、BYK-349(以上、ビックケミー・ジャパン(株)製)、“シルフェイス”(登録商標)SAG002、同SAG005、同SAG0503A、同SAG008(以上、日信化学工業(株)製)などが挙げられる。 Commercially available fluorosurfactants include, for example, "Megafac" (registered trademark) F142D, F172, F173, F183, F445, F470, F475, and F477 (all of which are manufactured by DIC Corporation). (manufactured by NEOS Co., Ltd.), NBX-15, FTX-218 (manufactured by NEOS Co., Ltd.). Examples of commercially available silicone surfactants include "BYK" (registered trademark)-333, BYK-301, BYK-331, BYK-345, BYK-307 (manufactured by BYK Chemie Japan Co., Ltd.). It will be done. Examples of commercially available fluorine-containing thermally decomposable surfactants include "Megafac" (registered trademark) DS-21 (manufactured by DIC Corporation). Commercially available polyether-modified siloxane surfactants include, for example, "BYK" (registered trademark)-345, BYK-346, BYK-347, BYK-348, BYK-349 (all manufactured by BYK-Chemie Japan Co., Ltd.). ), "Silface" (registered trademark) SAG002, SAG005, SAG0503A, and SAG008 (all manufactured by Nissin Chemical Industry Co., Ltd.).
本発明の感光性樹脂組成物は、分散剤を含有してもよい。分散剤としては、例えば、ポリアクリル酸系分散剤、ポリカルボン酸系分散剤、リン酸系分散剤、シリコーン系分散剤などが挙げられる。 The photosensitive resin composition of the present invention may contain a dispersant. Examples of the dispersant include polyacrylic acid dispersants, polycarboxylic acid dispersants, phosphoric acid dispersants, silicone dispersants, and the like.
本発明の感光性樹脂組成物を用いた硬化膜の製造方法について、例を挙げて説明する。本発明の硬化膜の製造方法は、焼成または剥離液処理などによって(A)アルカリ可溶性樹脂成分をすべて除去する工程を経ず、光および/または熱によって硬化させる工程を有することが好ましい。具体的には、本発明の感光性樹脂組成物を塗布し、露光および現像し、加熱する方法が好ましい。 The method for producing a cured film using the photosensitive resin composition of the present invention will be explained by giving examples. The method for producing a cured film of the present invention preferably includes a step of curing with light and/or heat without the step of removing all the alkali-soluble resin component (A) by baking or treatment with a stripping solution. Specifically, a method in which the photosensitive resin composition of the present invention is applied, exposed and developed, and heated is preferred.
本発明の感光性樹脂組成物を塗布する工程においては、本発明の感光性樹脂組成物を、下地基板上に塗布し、プリベークすることが好ましい。塗布方法としては、例えば、マイクログラビアコーティング、スピンコーティング、ディップコーティング、カーテンフローコーティング、ロールコーティング、スプレーコーティング、スリットコーティングなどが挙げられる。プリベークに用いられる加熱装置としては、例えば、ホットプレート、オーブンなどが挙げられる。プリベークの加熱温度は、50~150℃が好ましく、加熱時間は30秒~30分間が好ましい。プリベーク後の膜厚は、0.03~15μmが好ましい。 In the step of applying the photosensitive resin composition of the present invention, it is preferred that the photosensitive resin composition of the present invention is applied onto a base substrate and prebaked. Examples of the coating method include microgravure coating, spin coating, dip coating, curtain flow coating, roll coating, spray coating, and slit coating. Examples of the heating device used for pre-baking include a hot plate and an oven. The heating temperature for pre-baking is preferably 50 to 150°C, and the heating time is preferably 30 seconds to 30 minutes. The film thickness after prebaking is preferably 0.03 to 15 μm.
プリベーク後、露光および現像によりパターン加工することが好ましい。露光装置としては、例えば、マスクアライナー(LA)、ミラープロジェクションマスクアライナー(MPA)などが挙げられる。露光強度は10~4000J/m2程度(波長365nm露光量換算)が好ましい。パターンを形成するためには所望のマスクを介して露光することが好ましく、全面を硬化させる場合にはマスクを介さずに露光してもよい。露光光源としては、一般的に高圧水銀ランプが用いられ、その主たる波長は302nm、312nm、334nm、365nm、405nmなどが挙げられる。 After prebaking, it is preferable to perform pattern processing by exposure and development. Examples of the exposure device include a mask aligner (LA) and a mirror projection mask aligner (MPA). The exposure intensity is preferably about 10 to 4000 J/m 2 (converted to the exposure amount at a wavelength of 365 nm). In order to form a pattern, it is preferable to expose to light through a desired mask, but when curing the entire surface, exposure may be performed without using a mask. A high-pressure mercury lamp is generally used as the exposure light source, and its main wavelengths include 302 nm, 312 nm, 334 nm, 365 nm, and 405 nm.
次に、現像により未露光部を溶解させ、ネガ型のパターンを得ることができる。現像方法としては、シャワー、ディッピング、パドルなどの方法により現像液に浸漬する方法が挙げられる。現像時間は5秒間~10分間が好ましい。現像液としては、公知のアルカリ現像液が挙げられ、具体例としては、アルカリ金属の水酸化物、炭酸塩、リン酸塩、ケイ酸塩、ホウ酸塩などの無機アルカリ、2-ジエチルアミノエタノール、モノエタノールアミン、ジエタノールアミン等のアミン類、テトラメチルアンモニウムヒドロキサイド、コリン等の4級アンモニウム塩を1種あるいは2種以上含む水溶液等が挙げられる。現像後、水でリンスすることが好ましく、続いて50~150℃の範囲で乾燥ベークを行うこともできる。 Next, the unexposed areas are dissolved by development to obtain a negative pattern. Examples of the developing method include methods of immersing the film in a developer using methods such as showering, dipping, and paddling. The development time is preferably 5 seconds to 10 minutes. Examples of the developer include known alkaline developers, and specific examples include inorganic alkalis such as alkali metal hydroxides, carbonates, phosphates, silicates, and borates, 2-diethylaminoethanol, Examples include aqueous solutions containing one or more of amines such as monoethanolamine and diethanolamine, and quaternary ammonium salts such as tetramethylammonium hydroxide and choline. After development, it is preferable to rinse with water, followed by dry baking at a temperature in the range of 50 to 150°C.
露光および現像後の膜を、前述の加熱装置を用いて加熱することが好ましい。加熱温度は150~450℃が好ましく、加熱時間は20分間~1時間が好ましい。 It is preferable to heat the film after exposure and development using the above-mentioned heating device. The heating temperature is preferably 150 to 450°C, and the heating time is preferably 20 minutes to 1 hour.
本発明の硬化膜は、例えば、タッチパネル用保護膜や金属配線用保護膜などの各種保護膜、タッチパネル用絶縁膜、TFT用絶縁膜、層間絶縁膜などの各種絶縁膜、各種ハードコート材、TFT用平坦化膜、カラーフィルター用オーバーコート、パッシベーション膜、反射防止膜、光学フィルター、カラーフィルター用フォトスペーサー、マイクロレンズとして用いられる。ネガ型感光性を有することから、液晶や有機ELディスプレイのTFT用平坦化膜、絶縁膜、反射防止膜、カラーフィルター用オーバーコート、柱材などに好適に用いられる。これらの中でも、特に、高い基板密着性を有することから、タッチパネル用絶縁膜、金属配線保護膜として好適に用いることができる。金属配線としては、例えば、銅、銀、アルミニウム、クロム、モリブデン、チタン、ITO、IZO(酸化インジウム亜鉛)、AZO(アルミニウム添加酸化亜鉛)、ZnO2などが挙げられる。 The cured film of the present invention can be applied to, for example, various protective films such as a protective film for touch panels and protective films for metal wiring, various insulating films such as insulating films for touch panels, insulating films for TFTs, and interlayer insulating films, various hard coat materials, and TFTs. It is used as a flattening film for color filters, an overcoat for color filters, a passivation film, an antireflection film, an optical filter, a photo spacer for color filters, and a microlens. Because it has negative photosensitivity, it is suitably used for flattening films for TFTs in liquid crystal and organic EL displays, insulating films, antireflection films, overcoats for color filters, pillar materials, and the like. Among these, since it has particularly high substrate adhesion, it can be suitably used as an insulating film for touch panels and a metal wiring protective film. Examples of the metal wiring include copper, silver, aluminum, chromium, molybdenum, titanium, ITO, IZO (indium zinc oxide), AZO (aluminum-doped zinc oxide), and ZnO2.
以下、実施例および比較例を用いて、本発明を更に詳細に説明するが、本発明は以下の実施例に限定されるものではない。 Hereinafter, the present invention will be explained in more detail using Examples and Comparative Examples, but the present invention is not limited to the following Examples.
また、評価方法においては、評価n数の記載がないものは、n=1の評価であり、評価および合成等の各条件において温度が特定されていないものは室温下での実施である。 In addition, in the evaluation method, if there is no description of the number of evaluation n, the evaluation is n=1, and if the temperature is not specified in each condition of evaluation, synthesis, etc., it is performed at room temperature.
<評価方法>
「粒度分布D50値」
複合金属酸化物微粒子の分散液をメチルエチルケトン(MEK)で150倍に希釈した後、粒度分布D50値を動的光散乱法にて測定した。
測定機器:日機装 動的光散乱式粒度分布測定装置
解析条件:
粒子径基準 体積
分散粒子屈折率 酸化ジルコニウム:2.17、酸化チタン:2.62
溶媒屈折率 メチルエチルケトン:1.38。
<Evaluation method>
"Particle size distribution D50 value"
After diluting the dispersion liquid of composite metal oxide fine particles 150 times with methyl ethyl ketone (MEK), the particle size distribution D50 value was measured by a dynamic light scattering method.
Measuring equipment: Nikkiso dynamic light scattering particle size distribution analyzer Analysis conditions:
Particle size standard Volume dispersed particle refractive index Zirconium oxide: 2.17, titanium oxide: 2.62
Solvent refractive index Methyl ethyl ketone: 1.38.
「吸収ピーク波長」
各実施例および比較例に用いた光重合開始剤、紫外線吸収剤を、PGMEAを用いて濃度0.001質量%に希釈した。得られた希釈液について、紫外-可視分光光度計UV-2600((株)島津製作所製)を用いて波長300~400nmにおける吸光度を測定した。得られた吸光度スペクトルから、吸収ピーク波長を求めた。
"Absorption peak wavelength"
The photopolymerization initiator and ultraviolet absorber used in each Example and Comparative Example were diluted with PGMEA to a concentration of 0.001% by mass. The absorbance of the obtained diluted solution at a wavelength of 300 to 400 nm was measured using an ultraviolet-visible spectrophotometer UV-2600 (manufactured by Shimadzu Corporation). The absorption peak wavelength was determined from the obtained absorbance spectrum.
「屈折率」
シリコンウェハー基板上に、各実施例および比較例により得られた感光性樹脂組成物をスピンコーター(ミカサ(株)製MS-A150)を用いてスピンコートした。感光性樹脂組成物を塗布したシリコンウェハー基板を、ホットプレート(アズワン(株)製HHP-230SQ)を用いて100℃で2分間プリベークし、膜厚0.7μmのプリベーク膜を作製した。得られたプリベーク膜を超高圧水銀灯で露光量200mJ/cm2の条件で全面露光した後、自動現像装置(滝沢産業(株)製AD-1200)を用いて、2.38質量%TMAHを用いて60秒間シャワー現像し、次いで水で30秒間リンスした。最後に、オーブン(エスペック(株)製DHS-42)を用いて、空気中230℃で30分間キュアし、膜厚0.5μmの硬化膜を作製した。各硬化膜について、大塚電子(株)製分光エリプソメータFE5000を用いて、550nmにおける屈折率を測定した。
"Refractive index"
The photosensitive resin compositions obtained in each of the Examples and Comparative Examples were spin-coated onto a silicon wafer substrate using a spin coater (MS-A150, manufactured by Mikasa Co., Ltd.). The silicon wafer substrate coated with the photosensitive resin composition was prebaked at 100° C. for 2 minutes using a hot plate (HHP-230SQ manufactured by As One Corporation) to produce a prebaked film with a thickness of 0.7 μm. After exposing the entire surface of the obtained prebaked film with an ultra-high pressure mercury lamp at an exposure amount of 200 mJ/cm2, using an automatic developing device (AD-1200 manufactured by Takizawa Sangyo Co., Ltd.), 2.38% by mass TMAH was used. Shower development was performed for 60 seconds, followed by a 30 second rinse with water. Finally, it was cured in air at 230° C. for 30 minutes using an oven (DHS-42 manufactured by ESPEC Co., Ltd.) to produce a cured film with a thickness of 0.5 μm. For each cured film, the refractive index at 550 nm was measured using a spectroscopic ellipsometer FE5000 manufactured by Otsuka Electronics Co., Ltd.
「透過率」
テンパックスガラス基板(AGCテクノグラス(株)製)上に、各実施例および比較例により得られた感光性樹脂組成物を、スピンコーター(ミカサ(株)製MS-A150)を用いてスピンコートした。感光性樹脂組成物を塗布したテンパックスガラス基板を、ホットプレート(アズワン(株)製HHP-230SQ)を用いて100℃で2分間プリベークし、膜厚1.7μmのプリベーク膜を作製した。得られたプリベーク膜を超高圧水銀灯で露光量200mJ/cm2の条件で全面露光した後、自動現像装置(滝沢産業(株)製AD-1200)を用いて、2.38質量%TMAHを用いて60秒間シャワー現像し、次いで水で30秒間リンスした。最後に、オーブン(エスペック(株)製DHS-42)を用いて、空気中230℃で30分間キュアし、膜厚1.5μmの硬化膜を作製した。
紫外可視フォトダイオードアレー分光光度計MultiSpec-1500((株)島津製作所製)を用いて、テンパックスガラス基板のみの紫外可視吸収スペクトルを測定し、これをリファレンスとした。次に、得られた硬化膜とテンパックスガラスの積層体について、シングルビームで紫外可視吸収スペクトルを測定し、400nmにおける光透過率を求め、リファレンスとの差異を硬化膜の透過率とした。工業的利用の観点から、AおよびBを合格とした。
A:透過率96%以上100%未満
B:透過率93%以上96%未満
C:透過率90%以上93%未満
D:透過率90%未満。
"Transmittance"
The photosensitive resin compositions obtained in each example and comparative example were spin-coated onto a Tempax glass substrate (manufactured by AGC Techno Glass Co., Ltd.) using a spin coater (MS-A150, manufactured by Mikasa Co., Ltd.). did. A Tempax glass substrate coated with the photosensitive resin composition was prebaked at 100° C. for 2 minutes using a hot plate (HHP-230SQ manufactured by As One Co., Ltd.) to produce a prebaked film with a thickness of 1.7 μm. After exposing the entire surface of the obtained prebaked film with an ultra-high pressure mercury lamp at an exposure amount of 200 mJ/cm 2 , using an automatic developing device (AD-1200 manufactured by Takizawa Sangyo Co., Ltd.), 2.38% by mass TMAH was used. Shower development was performed for 60 seconds, followed by rinsing with water for 30 seconds. Finally, it was cured in air at 230° C. for 30 minutes using an oven (DHS-42 manufactured by ESPEC Co., Ltd.) to produce a cured film with a thickness of 1.5 μm.
Using a UV-visible photodiode array spectrophotometer MultiSpec-1500 (manufactured by Shimadzu Corporation), the UV-visible absorption spectrum of only the Tempax glass substrate was measured, and this was used as a reference. Next, the ultraviolet-visible absorption spectrum of the resulting laminate of the cured film and Tempax glass was measured with a single beam, the light transmittance at 400 nm was determined, and the difference from the reference was taken as the transmittance of the cured film. From the viewpoint of industrial use, A and B were judged to be acceptable.
A: Transmittance of 96% or more and less than 100% B: Transmittance of 93% or more and less than 96% C: Transmittance of 90% or more and less than 93% D: Transmittance of less than 90%.
「解像度」
無アルカリガラス基板(ガラス厚み0.7mm)上にITOを膜厚20ナノメートル、抵抗値100Ω/□となるように製膜した基板(以下、ITO基板と記載する。)を準備した。ITO基板上に、各実施例および比較例により得られた感光性樹脂組成物を、スピンコーター(ミカサ(株)製MS-A150)を用いてスピンコートした。感光性樹脂組成物を塗布した無アルカリガラス基板を、ホットプレート(アズワン(株)製HHP-230SQ)を用いて100℃で2分間プリベークし、膜厚1.7μmのプリベーク膜を作製した。得られたプリベーク膜を、マスクアライナー(三永電機製作所(株)製LA-610)を用いて、超高圧水銀灯を光源とし、5、10、20、30、40、50μm幅の1対1の幅を持つマスクを用い、マスクギャップ200μmで露光した。その後、自動現像装置(滝沢産業(株)製AD-1200)を用いて、2.38質量%TMAH水溶液を用いて60秒間シャワー現像し、次いで水で30秒間リンスした。露光および現像後、50μmのラインアンドスペースパターンを1対1の幅に形成する露光量を最適露光量とした。露光量はi線照度計で測定した。最適露光量における現像後の最小パターン寸法を測定し、これを解像度とした。工業的利用の観点から、AおよびBを合格とした。
A:解像度5μmまたは10μm
B:解像度20μmまたは30μm
C:解像度40μm以上。
"resolution"
A substrate (hereinafter referred to as an ITO substrate) was prepared by forming an ITO film on a non-alkali glass substrate (glass thickness: 0.7 mm) to have a film thickness of 20 nanometers and a resistance value of 100 Ω/□. The photosensitive resin compositions obtained in each of the Examples and Comparative Examples were spin-coated onto an ITO substrate using a spin coater (MS-A150, manufactured by Mikasa Co., Ltd.). The alkali-free glass substrate coated with the photosensitive resin composition was prebaked at 100° C. for 2 minutes using a hot plate (HHP-230SQ manufactured by As One Co., Ltd.) to produce a prebaked film with a thickness of 1.7 μm. Using a mask aligner (LA-610 manufactured by San-ei Denki Seisakusho Co., Ltd.) and using an ultra-high pressure mercury lamp as a light source, the obtained pre-baked film was coated in a one-on-one matrix with a width of 5, 10, 20, 30, 40, and 50 μm. Exposure was carried out using a wide mask with a mask gap of 200 μm. Thereafter, using an automatic developing device (AD-1200 manufactured by Takizawa Sangyo Co., Ltd.), shower development was performed using a 2.38% by mass TMAH aqueous solution for 60 seconds, and then rinsed with water for 30 seconds. After exposure and development, the optimum exposure amount was determined to form a 50 μm line-and-space pattern with a width of 1:1. The exposure amount was measured with an i-ray luminometer. The minimum pattern size after development at the optimum exposure amount was measured, and this was taken as the resolution. From the viewpoint of industrial use, A and B were judged to be acceptable.
A: Resolution 5μm or 10μm
B: Resolution 20μm or 30μm
C: Resolution of 40 μm or more.
「膜面の粗さ定量値Ra」
無アルカリガラス基板(ガラス厚み0.7mm)上に各実施例および比較例により得られた感光性樹脂組成物を、スピンコーター(ミカサ(株)製MS-A150)を用いてスピンコートした。感光性樹脂組成物を塗布した無アルカリガラス基板を、ホットプレート(アズワン(株)製HHP-230SQ)を用いて100℃で2分間プリベークし、膜厚1.7μmのプリベーク膜を作製した。得られたプリベーク膜を超高圧水銀灯で最適露光量(50μmのラインアンドスペースパターンを1対1の幅に形成する露光量)にて全面露光した後、自動現像装置(滝沢産業(株)製AD-1200)を用いて、2.38質量%TMAHを用いて60秒間シャワー現像し、次いで水で30秒間リンスした。最後に、オーブン(エスペック(株)製DHS-42)を用いて、空気中230℃で30分間キュアし、膜厚1.5μmの硬化膜を作製した。
"Membrane surface roughness quantitative value Ra"
The photosensitive resin compositions obtained in each of the Examples and Comparative Examples were spin-coated onto a non-alkali glass substrate (glass thickness: 0.7 mm) using a spin coater (MS-A150, manufactured by Mikasa Co., Ltd.). The alkali-free glass substrate coated with the photosensitive resin composition was prebaked at 100° C. for 2 minutes using a hot plate (HHP-230SQ manufactured by As One Co., Ltd.) to produce a prebaked film with a thickness of 1.7 μm. After exposing the entire surface of the obtained prebaked film to an ultra-high pressure mercury lamp at an optimum exposure amount (an exposure amount that forms a 50 μm line-and-space pattern with a 1:1 width), an automatic developing device (AD manufactured by Takizawa Sangyo Co., Ltd.) was used. -1200), shower development was performed using 2.38% by mass TMAH for 60 seconds, and then rinsed with water for 30 seconds. Finally, it was cured in air at 230° C. for 30 minutes using an oven (DHS-42 manufactured by ESPEC Co., Ltd.) to produce a cured film with a thickness of 1.5 μm.
走査型プローブ顕微鏡NanoScope V Dimension Icon(BrukerAXS社製)を用いて、硬化膜表面の粗さ定量値Ra(算術平均粗さ)を測定した。
[測定条件]
探針(Tip) : シリコンカンチレバー
走査モード : タッピングモード
走査範囲 : 3μm□
走査速度 : 0.3Hz
測定環境 : 室温、大気中
工業的利用の観点から、AおよびBを合格とした。
A:Ra0.1nm以上3nm未満
B:Ra3nm以上5nm未満
C:Ra5nm以上10nm未満
D:Ra10nm以上。
The quantitative roughness value Ra (arithmetic mean roughness) of the cured film surface was measured using a scanning probe microscope NanoScope V Dimension Icon (manufactured by BrukerAXS).
[Measurement condition]
Tip: Silicon cantilever Scanning mode: Tapping mode Scanning range: 3μm□
Scanning speed: 0.3Hz
Measurement environment: room temperature, atmosphere From the viewpoint of industrial use, A and B were passed.
A: Ra of 0.1 nm or more and less than 3 nm B: Ra of 3 nm or more and less than 5 nm C: Ra of 5 nm or more and less than 10 nm D: Ra of 10 nm or more.
「ITO抵抗値上昇率」
無アルカリガラス基板(ガラス厚み0.7mm)上に各実施例および比較例により得られた感光性樹脂組成物を、スピンコーター(ミカサ(株)製MS-A150)を用いてスピンコートした。感光性樹脂組成物を塗布した無アルカリガラス基板を、ホットプレート(アズワン(株)製HHP-230SQ)を用いて100℃で2分間プリベークし、膜厚1.7μmのプリベーク膜を作製した。得られたプリベーク膜を超高圧水銀灯で最適露光量(50μmのラインアンドスペースパターンを1対1の幅に形成する露光量)にて全面露光した後、自動現像装置(滝沢産業(株)製AD-1200)を用いて、2.38質量%TMAHを用いて60秒間シャワー現像し、次いで水で30秒間リンスした。最後に、オーブン(エスペック(株)製DHS-42)を用いて、空気中230℃で30分間キュアし、膜厚1.5μmの硬化膜を作製した。
得られた硬化膜の上に、ITOを膜厚20ナノメートルとなるよう製膜し、ITO抵抗値を測定した。無アルカリガラス基板上にITOを膜厚20ナノメートルとなるよう製膜した場合の抵抗値100Ω/□をリファレンスとし、リファレンスに対するITO抵抗値上昇率を算出した。工業的利用の観点から、AおよびBを合格とした。
A:ITO抵抗値上昇率0.1%以上5%未満
B:ITO抵抗値上昇率5%以上10%未満
C:ITO抵抗値上昇率10%以上15%未満
D:ITO抵抗値上昇率15%以上。
"ITO resistance increase rate"
The photosensitive resin compositions obtained in each of the Examples and Comparative Examples were spin-coated onto a non-alkali glass substrate (glass thickness: 0.7 mm) using a spin coater (MS-A150, manufactured by Mikasa Co., Ltd.). The alkali-free glass substrate coated with the photosensitive resin composition was prebaked at 100° C. for 2 minutes using a hot plate (HHP-230SQ manufactured by As One Co., Ltd.) to produce a prebaked film with a thickness of 1.7 μm. After exposing the entire surface of the obtained prebaked film to an ultra-high pressure mercury lamp at an optimum exposure amount (an exposure amount that forms a 50 μm line-and-space pattern with a 1:1 width), an automatic developing device (AD manufactured by Takizawa Sangyo Co., Ltd.) was used. -1200), shower development was performed using 2.38% by mass TMAH for 60 seconds, and then rinsed with water for 30 seconds. Finally, it was cured in air at 230° C. for 30 minutes using an oven (DHS-42 manufactured by ESPEC Co., Ltd.) to produce a cured film with a thickness of 1.5 μm.
ITO was formed into a film having a thickness of 20 nanometers on the obtained cured film, and the ITO resistance value was measured. Using a resistance value of 100 Ω/□ when ITO was formed as a film thickness of 20 nanometers on a non-alkali glass substrate as a reference, the rate of increase in ITO resistance value with respect to the reference was calculated. From the viewpoint of industrial use, A and B were judged to be acceptable.
A: ITO resistance increase rate of 0.1% or more and less than 5% B: ITO resistance increase rate of 5% or more and less than 10% C: ITO resistance increase rate of 10% or more and less than 15% D: ITO resistance increase rate of 15% that's all.
〔合成例1〕
エチレン性不飽和基およびカルボキシル基を含有するカルド系樹脂のPGMEA溶液である「WR-301(商品名)」((株)ADEKA製)を準備した。「WR-301」の固形分濃度は45質量%、固形分酸価は100KOHmg/gであり、GPC法により測定されるポリスチレン換算の質量平均分子量(Mw)は5500である。「WR-301」を100g計量し、PGMEAを12.5g添加して撹拌し、固形分濃度が40質量%のカルド系樹脂溶液(P-1)を得た。
[Synthesis example 1]
“WR-301 (trade name)” (manufactured by ADEKA Corporation), which is a PGMEA solution of cardo-based resin containing an ethylenically unsaturated group and a carboxyl group, was prepared. The solid content concentration of "WR-301" is 45% by mass, the solid content acid value is 100 KOHmg/g, and the mass average molecular weight (Mw) in terms of polystyrene measured by GPC method is 5500. 100 g of "WR-301" was weighed, and 12.5 g of PGMEA was added and stirred to obtain a cardo-based resin solution (P-1) with a solid content concentration of 40% by mass.
〔合成例2〕
500mlのフラスコに2,2’-アゾビス(イソブチロニトリル)1.0g、PGMEA100gを仕込んだ。フラスコ内を窒素置換した後120℃に加熱して、滴下管よりスチレン5.2g、グリシジルメタクリレート35.5g、ジシクロペンタニルメタクリレート41.0gの混合物を2.5時間かけて滴下した。次に、フラスコ内を空気置換し、アクリル酸17.0gにトリスジメチルアミノメチルフェノール0.3g、ハイドロキノン0.3gを添加し、120℃で5時間加熱撹拌した。さらに、テトラヒドロ無水フタル酸30.4g、トリエチルアミン0.5gを加え120℃で4時間加熱撹拌した後、PGMEAを加えて固形分濃度が40質量%のアクリル樹脂溶液(PA-1)を得た。アクリル樹脂のMwは14000、酸価は140mgKOH/gであった。
[Synthesis example 2]
A 500 ml flask was charged with 1.0 g of 2,2'-azobis(isobutyronitrile) and 100 g of PGMEA. After purging the inside of the flask with nitrogen, the flask was heated to 120° C., and a mixture of 5.2 g of styrene, 35.5 g of glycidyl methacrylate, and 41.0 g of dicyclopentanyl methacrylate was added dropwise from a dropping tube over 2.5 hours. Next, the inside of the flask was purged with air, and 0.3 g of trisdimethylaminomethylphenol and 0.3 g of hydroquinone were added to 17.0 g of acrylic acid, and the mixture was heated and stirred at 120° C. for 5 hours. Further, 30.4 g of tetrahydrophthalic anhydride and 0.5 g of triethylamine were added and heated and stirred at 120° C. for 4 hours, and then PGMEA was added to obtain an acrylic resin solution (PA-1) with a solid content concentration of 40% by mass. The Mw of the acrylic resin was 14,000, and the acid value was 140 mgKOH/g.
〔合成例3〕
500mlのフラスコに2,2’-アゾビス(イソブチロニトリル)を1.1g、シクロヘキサノン100g仕込んだ。フラスコ内を窒素置換した後80℃に加熱して、滴下管よりn-ブチルメタクリレート37.2g、2-ヒドロキシエチルメタクリレート12.9g、メタクリル酸12.0g、パラクミルフェノールエチレンオキサイド変性アクリレート(東亞合成(株)製「“アロニックス”(登録商標)M-110」)20.7gの混合物を2時間かけて滴下した。滴下終了後、さらに3時間加熱撹拌した後、PGMEAを加えて固形分濃度が40質量%のアクリル樹脂溶液(PA-2)を得た。アクリル樹脂のMwは25000、酸価は90mgKOH/gであった。 〔合成例4〕
PGMEA200gに3-トリメトキシシリルプロピルコハク酸無水物41.97g(0.16mol)とt-ブチルアミン11.70g(0.16mol)を加えてしばらく室温にて撹拌した後、40℃にて2時間撹拌した。その後80℃まで昇温し、6時間加熱撹拌した。得られた溶液を固形分濃度が20質量%になるようにPGMEAを追加し、3-(tert-ブチルカルバモイル)-6-(トリメトキシシリル)へキサン酸、2-(2-(tert-ブチルアミノ)-2-オキソエチル)-5-(トリメトキシシリル)ペンタン酸の混合溶液であるシランカップリング剤(G―1)溶液を得た。
[Synthesis example 3]
A 500 ml flask was charged with 1.1 g of 2,2'-azobis(isobutyronitrile) and 100 g of cyclohexanone. After purging the inside of the flask with nitrogen, it was heated to 80°C, and 37.2 g of n-butyl methacrylate, 12.9 g of 2-hydroxyethyl methacrylate, 12.0 g of methacrylic acid, paracumylphenol ethylene oxide-modified acrylate (Toagosei Co., Ltd.) A mixture of 20.7 g of "Aronix (registered trademark) M-110" manufactured by Co., Ltd.) was added dropwise over 2 hours. After the dropwise addition was completed, the solution was further heated and stirred for 3 hours, and then PGMEA was added to obtain an acrylic resin solution (PA-2) with a solid content concentration of 40% by mass. The Mw of the acrylic resin was 25,000, and the acid value was 90 mgKOH/g. [Synthesis example 4]
Add 41.97 g (0.16 mol) of 3-trimethoxysilylpropylsuccinic anhydride and 11.70 g (0.16 mol) of t-butylamine to 200 g of PGMEA, stir at room temperature for a while, and then stir at 40°C for 2 hours. did. Thereafter, the temperature was raised to 80°C, and the mixture was heated and stirred for 6 hours. PGMEA was added to the obtained solution so that the solid content concentration was 20% by mass, and 3-(tert-butylcarbamoyl)-6-(trimethoxysilyl)hexanoic acid, 2-(2-(tert-butyl) A silane coupling agent (G-1) solution, which is a mixed solution of amino)-2-oxoethyl)-5-(trimethoxysilyl)pentanoic acid, was obtained.
〔実施例1〕
黄色灯下にて、ジルコニアナノ粒子のMEK30質量%分散液(ソーラー(株)製「ZR-010」(以下、ZR-010と記載する。))25.04gを、ダイアセトンアルコール(以下、DAAと記載する)42.50g、PGMEA18.13gに溶解した。そして、1,2-オクタンジオン,1-[4-(フェニルチオ)-2-(O-ベンゾイルオキシム)](BASF製「“イルガキュア”(登録商標)OXE01」(以下、OXE-01と記載する。))0.67g、2-[2-ヒドロキシ-5-[2-(メタクリロイルオキシ)エチル]フェニル]-2H-ベンゾトリアゾール(大塚化学(株)製「RUVA-93」(以下、RUVA-93と記載する。))0.54g、合成例1により得られたカルド系樹脂溶液(P-1)4.65g、ジペンタエリスリトールヘキサアクリレート(「“カヤラッド”(登録商標)DPHA(商品名)」日本化薬(株)製)1.42g、9,9-ビス[4-(2-アクリロイルオキシエトキシ)フェニル]フルオレンのPGMEA50質量%溶液(大阪ガスケミカル(株)製「“オグソール”(登録商標)EA-0250P」(以下、EA-0250Pと記載する。))5.39g、合成例4により得られたシランカップリング剤(G-1)溶液1.35g、シリコーン系界面活性剤である“BYK”(登録商標)-333(ビックケミー・ジャパン(株)製)のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-1)を得た。得られた感光性樹脂組成物(A-1)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Example 1]
Under a yellow light, 25.04 g of a 30% by mass dispersion of zirconia nanoparticles in MEK (“ZR-010” manufactured by Solar Corporation (hereinafter referred to as ZR-010)) was mixed with diacetone alcohol (hereinafter referred to as DAA). 42.50 g of PGMEA was dissolved in 18.13 g of PGMEA. And 1,2-octanedione, 1-[4-(phenylthio)-2-(O-benzoyloxime)] (“Irgacure” (registered trademark) OXE01 manufactured by BASF (hereinafter referred to as OXE-01). )) 0.67 g, 2-[2-hydroxy-5-[2-(methacryloyloxy)ethyl]phenyl]-2H-benzotriazole (Otsuka Chemical Co., Ltd. "RUVA-93" (hereinafter referred to as RUVA-93) )) 0.54 g, 4.65 g of cardo-based resin solution (P-1) obtained in Synthesis Example 1, dipentaerythritol hexaacrylate (“Kayalad” (registered trademark) DPHA (trade name)” Japan) 1.42 g (manufactured by Kayaku Co., Ltd.), 50% by mass solution of 9,9-bis[4-(2-acryloyloxyethoxy)phenyl]fluorene in PGMEA (Oxol (registered trademark), manufactured by Osaka Gas Chemical Co., Ltd.) 5.39 g of ``EA-0250P'' (hereinafter referred to as EA-0250P), 1.35 g of the silane coupling agent (G-1) solution obtained in Synthesis Example 4, ``BYK'' which is a silicone surfactant. 0.30 g of a 10% by mass solution of PGMEA (registered trademark)-333 (manufactured by BIC Chemie Japan Co., Ltd.) was added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-1). A cured film of the obtained photosensitive resin composition (A-1) was prepared by the method described above, and evaluated by the method described above.
〔実施例2〕
黄色灯下にて、ZR-010の30.07gを、DAA42.50g、PGMEA15.73gに溶解した。そして、OXE-01を0.74g、RUVA-93を0.60g、(P-1)を3.84g、DPHAを0.74g、EA-0250Pを4.14g、(G-1)溶液1.34g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-2)を得た。得られた感光性樹脂組成物(A-2)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Example 2]
Under yellow light, 30.07 g of ZR-010 was dissolved in 42.50 g of DAA and 15.73 g of PGMEA. Then, 0.74 g of OXE-01, 0.60 g of RUVA-93, 3.84 g of (P-1), 0.74 g of DPHA, 4.14 g of EA-0250P, and (G-1) solution 1. 34g of “BYK” (registered trademark)-333 in a 10% by weight PGMEA solution 0.30g were added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-2). A cured film of the obtained photosensitive resin composition (A-2) was prepared by the method described above, and evaluated by the method described above.
〔実施例3〕
黄色灯下にて、ZR-010の9.80gを、DAA42.50g、PGMEA27.24gに溶解した。そして、OXE-01を0.80g、RUVA-93を0.53g、(P-1)を6.68g、DPHAを4.70g、EA-0250Pを6.09g、(G-1)溶液1.34g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-3)を得た。得られた感光性樹脂組成物(A-3)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Example 3]
Under a yellow light, 9.80 g of ZR-010 was dissolved in 42.50 g of DAA and 27.24 g of PGMEA. Then, 0.80 g of OXE-01, 0.53 g of RUVA-93, 6.68 g of (P-1), 4.70 g of DPHA, 6.09 g of EA-0250P, and (G-1) solution 1. 34g of “BYK” (registered trademark)-333 in a 10% by weight PGMEA solution 0.30g were added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-3). A cured film of the obtained photosensitive resin composition (A-3) was prepared by the method described above, and evaluated by the method described above.
〔実施例4〕
OXE-01の代わりに“アデカクルーズ”(登録商標)NCI-930((株)ADEKA製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-4)を調製した。得られた感光性樹脂組成物(A-4)を用いて、実施例1と同様に評価を行った。
[Example 4]
A photosensitive resin composition (A-4) was prepared in the same manner as in Example 1, except that "ADEKA CRUISE" (registered trademark) NCI-930 (manufactured by ADEKA Corporation) was used instead of OXE-01. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-4).
〔実施例5〕
OXE-01の代わりにTR-PBG-305(TRONLY製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-5)を調製した。得られた感光性樹脂組成物(A-5)を用いて、実施例1と同様に評価を行った。
[Example 5]
A photosensitive resin composition (A-5) was prepared in the same manner as in Example 1, except that TR-PBG-305 (manufactured by TRONLY) was used instead of OXE-01. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-5).
〔実施例6〕
OXE-01の代わりにTR-PBG-3057(TRONLY製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-6)を調製した。得られた感光性樹脂組成物(A-6)を用いて、実施例1と同様に評価を行った。
[Example 6]
A photosensitive resin composition (A-6) was prepared in the same manner as in Example 1, except that TR-PBG-3057 (manufactured by TRONLY) was used instead of OXE-01. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-6).
〔実施例7〕
OXE-01の代わりにSPI-03(Samyang製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-7)を調製した。得られた感光性樹脂組成物(A-7)を用いて、実施例1と同様に評価を行った。
[Example 7]
A photosensitive resin composition (A-7) was prepared in the same manner as in Example 1 except that SPI-03 (manufactured by Samyang) was used instead of OXE-01. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-7).
〔実施例8〕
OXE-01の代わりにTPM-DT7(TAKOMA製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-8)を調製した。得られた感光性樹脂組成物(A-8)を用いて、実施例1と同様に評価を行った。
[Example 8]
A photosensitive resin composition (A-8) was prepared in the same manner as in Example 1 except that TPM-DT7 (manufactured by TAKOMA) was used instead of OXE-01. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-8).
〔実施例9〕
黄色灯下にて、ZR-010の24.53gを、DAA42.50g、PGMEA19.19gに溶解した。そして、OXE-01を1.14g、RUVA-93を0.89g、カルド系樹脂溶液(P-1)を3.81g、DPHAを1.23g、EA-0250Pを5.15g、(G-1)溶液1.27g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-9)を得た。得られた感光性樹脂組成物(A-9)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Example 9]
Under a yellow light, 24.53 g of ZR-010 was dissolved in 42.50 g of DAA and 19.19 g of PGMEA. Then, 1.14g of OXE-01, 0.89g of RUVA-93, 3.81g of cardo-based resin solution (P-1), 1.23g of DPHA, 5.15g of EA-0250P, (G-1 ) solution and 0.30 g of a 10% by mass PGMEA solution of "BYK" (registered trademark)-333 were added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-9). A cured film of the obtained photosensitive resin composition (A-9) was prepared by the method described above, and evaluated by the method described above.
〔実施例10〕
黄色灯下にて、ZR-010の10.03gを、DAA42.50g、PGMEA26.43gに溶解した。そして、OXE-01を0.42g、RUVA-93を0.28g、カルド系樹脂溶液(P-1)を7.52g、DPHAを4.83g、EA-0250Pを6.30g、(G-1)溶液1.40g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-10)を得た。得られた感光性樹脂組成物(A-10)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Example 10]
Under a yellow light, 10.03 g of ZR-010 was dissolved in 42.50 g of DAA and 26.43 g of PGMEA. Then, 0.42g of OXE-01, 0.28g of RUVA-93, 7.52g of cardo-based resin solution (P-1), 4.83g of DPHA, 6.30g of EA-0250P, (G-1 ) solution and 0.30 g of a 10% by mass PGMEA solution of "BYK" (registered trademark)-333 were added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-10). A cured film of the obtained photosensitive resin composition (A-10) was prepared by the method described above, and evaluated by the method described above.
〔実施例11〕
黄色灯下にて、ZR-010の24.52gを、DAA42.50g、PGMEA18.94gに溶解した。そして、OXE-01を0.77g、RUVA-93を1.03g、カルド系樹脂溶液(P-1)を4.19g、DPHAを1.29g、EA-0250Pを5.16g、(G-1)溶液1.29g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-11)を得た。得られた感光性樹脂組成物(A-11)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Example 11]
Under a yellow light, 24.52 g of ZR-010 was dissolved in 42.50 g of DAA and 18.94 g of PGMEA. Then, 0.77g of OXE-01, 1.03g of RUVA-93, 4.19g of cardo-based resin solution (P-1), 1.29g of DPHA, 5.16g of EA-0250P, (G-1 ) solution and 0.30 g of a 10% by mass PGMEA solution of "BYK" (registered trademark)-333 were added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-11). A cured film of the obtained photosensitive resin composition (A-11) was prepared by the method described above, and evaluated by the method described above.
〔実施例12〕
黄色灯下にて、ZR-010の25.64gを、DAA42.50g、PGMEA17.56gに溶解した。そして、OXE-01を0.69g、RUVA-93を0.27g、カルド系樹脂溶液(P-1)を4.64g、DPHAを1.44g、EA-0250Pを5.49g、(G-1)溶液1.37g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-12)を得た。得られた感光性樹脂組成物(A-12)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Example 12]
Under a yellow light, 25.64 g of ZR-010 was dissolved in 42.50 g of DAA and 17.56 g of PGMEA. Then, 0.69g of OXE-01, 0.27g of RUVA-93, 4.64g of cardo-based resin solution (P-1), 1.44g of DPHA, 5.49g of EA-0250P, (G-1 ) solution and 0.30 g of a 10% by mass PGMEA solution of "BYK" (registered trademark)-333 were added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-12). A cured film of the obtained photosensitive resin composition (A-12) was prepared by the method described above, and evaluated by the method described above.
〔実施例13〕
黄色灯下にて、ZR-010の24.33gを、DAA42.50g、PGMEA19.49gに溶解した。そして、OXE-01を1.36g、RUVA-93を0.99g、カルド系樹脂溶液(P-1)を3.77g、DPHAを1.11g、EA-0250Pを4.90g、(G-1)溶液1.24g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-13)を得た。得られた感光性樹脂組成物(A-13)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Example 13]
Under a yellow light, 24.33 g of ZR-010 was dissolved in 42.50 g of DAA and 19.49 g of PGMEA. Then, 1.36g of OXE-01, 0.99g of RUVA-93, 3.77g of cardo-based resin solution (P-1), 1.11g of DPHA, 4.90g of EA-0250P, (G-1 ) solution and 0.30 g of a 10% by mass PGMEA solution of "BYK" (registered trademark)-333 were added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-13). A cured film of the obtained photosensitive resin composition (A-13) was prepared by the method described above, and evaluated by the method described above.
〔実施例14〕
黄色灯下にて、ZR-010の10.22gを、DAA42.50g、PGMEA26.10gに溶解した。そして、OXE-01を0.29g、RUVA-93を0.14g、カルド系樹脂溶液(P-1)を7.66g、DPHAを4.89g、EA-0250Pを6.47g、(G-1)溶液1.43g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-14)を得た。得られた感光性樹脂組成物(A-14)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Example 14]
Under a yellow light, 10.22 g of ZR-010 was dissolved in 42.50 g of DAA and 26.10 g of PGMEA. Then, 0.29g of OXE-01, 0.14g of RUVA-93, 7.66g of cardo-based resin solution (P-1), 4.89g of DPHA, 6.47g of EA-0250P, (G-1 ) solution and 0.30 g of a 10% by mass PGMEA solution of "BYK" (registered trademark)-333 were added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-14). A cured film of the obtained photosensitive resin composition (A-14) was prepared by the method described above, and evaluated by the method described above.
〔実施例15〕
黄色灯下にて、ZR-010の24.32gを、DAA42.50g、PGMEA19.28gに溶解した。そして、OXE-01を0.76g、RUVA-93を1.27g、カルド系樹脂溶液(P-1)を3.96g、DPHAを1.27g、EA-0250Pを5.07g、(G-1)溶液1.27g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-15)を得た。得られた感光性樹脂組成物(A-15)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Example 15]
Under a yellow light, 24.32 g of ZR-010 was dissolved in 42.50 g of DAA and 19.28 g of PGMEA. Then, 0.76g of OXE-01, 1.27g of RUVA-93, 3.96g of cardo-based resin solution (P-1), 1.27g of DPHA, 5.07g of EA-0250P, (G-1 ) solution and 0.30 g of a 10% by mass PGMEA solution of "BYK" (registered trademark)-333 were added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-15). A cured film of the obtained photosensitive resin composition (A-15) was prepared by the method described above, and evaluated by the method described above.
〔実施例16〕
黄色灯下にて、ZR-010の25.64gを、DAA42.50g、PGMEA17.52gに溶解した。そして、OXE-01を0.69g、RUVA-93を0.14g、カルド系樹脂溶液(P-1)を4.68g、DPHAを1.46g、EA-0250Pを5.68g、(G-1)溶液1.39g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-16)を得た。得られた感光性樹脂組成物(A-16)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Example 16]
Under a yellow light, 25.64 g of ZR-010 was dissolved in 42.50 g of DAA and 17.52 g of PGMEA. Then, 0.69g of OXE-01, 0.14g of RUVA-93, 4.68g of cardo-based resin solution (P-1), 1.46g of DPHA, 5.68g of EA-0250P, (G-1 ) solution and 0.30 g of a 10% by mass PGMEA solution of "BYK" (registered trademark)-333 were added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-16). A cured film of the obtained photosensitive resin composition (A-16) was prepared by the method described above, and evaluated by the method described above.
〔実施例17〕
ZR-010の代わりにチタニアナノ粒子のMEK30質量%分散液(日産化学(株)製「OT-RA305K7-AC」)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-17)を調製した。得られた感光性樹脂組成物(A-17)を用いて、実施例1と同様に評価を行った。
[Example 17]
A photosensitive resin composition (A-17 ) was prepared. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-17).
〔実施例18〕
ZR-010の代わりにジルコニアナノ粒子のメタノール30質量%分散液(堺化学工業(株)製「SZR-M」)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-18)を調製した。得られた感光性樹脂組成物(A-18)を用いて、実施例1と同様に評価を行った。
[Example 18]
A photosensitive resin composition (A- 18) was prepared. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-18).
〔実施例19〕
ZR-010の代わりにチタニアナノ粒子のメタノール30質量%分散液(日産化学(株)製「OT-RA305M7-20」)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-19)を調製した。得られた感光性樹脂組成物(A-19)を用いて、実施例1と同様に評価を行った。
[Example 19]
A photosensitive resin composition (A- 19) was prepared. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-19).
〔実施例20〕
ZR-010の代わりにジルコニアナノ粒子のメタノール30質量%分散液(日産化学(株)製「OZ-S30M」)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-20)を調製した。得られた感光性樹脂組成物(A-20)を用いて、実施例1と同様に評価を行った。
[Example 20]
A photosensitive resin composition (A-20 ) was prepared. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-20).
〔比較例1〕
OXE-01の代わりに“イルガキュア”(登録商標)OXE02(BASF製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-21)を調製した。得られた感光性樹脂組成物(A-21)を用いて、実施例1と同様に評価を行った。
[Comparative example 1]
A photosensitive resin composition (A-21) was prepared in the same manner as in Example 1, except that "Irgacure" (registered trademark) OXE02 (manufactured by BASF) was used instead of OXE-01. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-21).
〔比較例2〕
OXE-01の代わりに“アデカクルーズ”(登録商標)N-1919((株)ADEKA製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-22)を調製した。得られた感光性樹脂組成物(A-22)を用いて、実施例1と同様に評価を行った。
[Comparative example 2]
A photosensitive resin composition (A-22) was prepared in the same manner as in Example 1, except that "ADEKA CRUISE" (registered trademark) N-1919 (manufactured by ADEKA Corporation) was used instead of OXE-01. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-22).
〔比較例3〕
OXE-01の代わりに“イルガキュア”(登録商標)819(BASF製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-23)を調製した。得られた感光性樹脂組成物(A-23)を用いて、実施例1と同様に評価を行った。
[Comparative example 3]
A photosensitive resin composition (A-23) was prepared in the same manner as in Example 1, except that "Irgacure" (registered trademark) 819 (manufactured by BASF) was used instead of OXE-01. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-23).
〔比較例4〕
OXE-01の代わりにTR-PBG-304(TRONLY製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-24)を調製した。得られた感光性樹脂組成物(A-24)を用いて、実施例1と同様に評価を行った。
[Comparative example 4]
A photosensitive resin composition (A-24) was prepared in the same manner as in Example 1, except that TR-PBG-304 (manufactured by TRONLY) was used instead of OXE-01. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-24).
〔比較例5〕
OXE-01の代わりにTR-PBG-345(TRONLY製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-25)を調製した。得られた感光性樹脂組成物(A-25)を用いて、実施例1と同様に評価を行った。
[Comparative example 5]
A photosensitive resin composition (A-25) was prepared in the same manner as in Example 1 except that TR-PBG-345 (manufactured by TRONLY) was used instead of OXE-01. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-25).
〔比較例6〕
OXE-01の代わりに“イルガキュア”(登録商標)379(チバスペシャリティケミカル(株)製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-26)を調製した。得られた感光性樹脂組成物(A-26)を用いて、実施例1と同様に評価を行った。
[Comparative example 6]
A photosensitive resin composition (A-26) was prepared in the same manner as in Example 1, except that "Irgacure" (registered trademark) 379 (manufactured by Ciba Specialty Chemical Co., Ltd.) was used instead of OXE-01. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-26).
〔比較例7〕
RUVA-93の代わりに“Tinuvin”(登録商標)PS(BASF製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-27)を調製した。得られた感光性樹脂組成物(A-27)を用いて、実施例1と同様に評価を行った。
[Comparative example 7]
A photosensitive resin composition (A-27) was prepared in the same manner as in Example 1, except that "Tinuvin" (registered trademark) PS (manufactured by BASF) was used instead of RUVA-93. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-27).
〔比較例8〕
RUVA-93の代わりに“Tinuvin”(登録商標)384-2(BASF製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-28)を調製した。得られた感光性樹脂組成物(A-28)を用いて、実施例1と同様に評価を行った。
[Comparative example 8]
A photosensitive resin composition (A-28) was prepared in the same manner as in Example 1, except that "Tinuvin" (registered trademark) 384-2 (manufactured by BASF) was used instead of RUVA-93. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-28).
〔比較例9〕
RUVA-93の代わりに“Tinuvin”(登録商標)405(BASF製)を用いた以外は実施例1と同様にして感光性樹脂組成物(A-29)を調製した。得られた感光性樹脂組成物(A-29)を用いて、実施例1と同様に評価を行った。
[Comparative example 9]
A photosensitive resin composition (A-29) was prepared in the same manner as in Example 1 except that "Tinuvin" (registered trademark) 405 (manufactured by BASF) was used instead of RUVA-93. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-29).
〔比較例10〕
黄色灯下にて、ZR-010の25.98gを、DAA42.50g、PGMEA17.27gに溶解した。そして、OXE-01を0.70g、カルド系樹脂溶液(P-1)を4.65g、DPHAを1.47g、EA-0250Pを5.74g、(G-1)溶液1.40g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-30)を得た。得られた感光性樹脂組成物(A-30)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Comparative Example 10]
Under a yellow light, 25.98 g of ZR-010 was dissolved in 42.50 g of DAA and 17.27 g of PGMEA. Then, 0.70 g of OXE-01, 4.65 g of cardo resin solution (P-1), 1.47 g of DPHA, 5.74 g of EA-0250P, 1.40 g of (G-1) solution, “BYK 0.30 g of a 10% by mass solution of PGMEA (registered trademark)-333 was added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-30). A cured film of the obtained photosensitive resin composition (A-30) was prepared by the method described above, and evaluated by the method described above.
〔比較例11〕
カルド系樹脂溶液(P-1)の代わりに合成例2により得られたアクリル樹脂溶液(PA-1)を用いた以外は比較例10と同様にして感光性樹脂組成物(A-31)を調製した。得られた感光性樹脂組成物(A-31)を用いて、実施例1と同様に評価を行った。
[Comparative Example 11]
A photosensitive resin composition (A-31) was prepared in the same manner as in Comparative Example 10, except that the acrylic resin solution (PA-1) obtained in Synthesis Example 2 was used instead of the cardo-based resin solution (P-1). Prepared. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-31).
〔比較例12〕
黄色灯下にて、ジルコニアナノ粒子の水20質量%分散液(日産化学(株)製「ZR-20AS」)の41.27gを、DAA42.50g、PGMEA3.13gに溶解した。そして、OXE-01を0.28g、アクリル樹脂溶液(PA-1)を10.14g、10官能のウレタンアクリレート(ケーエスエム(株)製「KUA-10H」)を1.68g、シランカップリング剤「KBM-403」(商品名)(信越化学(株)製)0.70g、“BYK”(登録商標)-333のPGMEA10質量%溶液0.30gを加え、撹拌した。次いで0.2μmのフィルターでろ過を行い、感光性樹脂組成物(A-32)を得た。得られた感光性樹脂組成物(A-32)について、前記方法で硬化膜を作製し、前述の方法により評価した。
[Comparative example 12]
Under a yellow light, 41.27 g of a 20% by mass dispersion of zirconia nanoparticles in water ("ZR-20AS" manufactured by Nissan Chemical Co., Ltd.) was dissolved in 42.50 g of DAA and 3.13 g of PGMEA. Then, 0.28 g of OXE-01, 10.14 g of acrylic resin solution (PA-1), 1.68 g of 10-functional urethane acrylate ("KUA-10H" manufactured by KSM Co., Ltd.), and silane coupling agent " 0.70 g of "KBM-403" (trade name) (manufactured by Shin-Etsu Chemical Co., Ltd.) and 0.30 g of a 10% by mass solution of "BYK" (registered trademark)-333 in PGMEA were added and stirred. Next, filtration was performed using a 0.2 μm filter to obtain a photosensitive resin composition (A-32). A cured film of the obtained photosensitive resin composition (A-32) was prepared by the method described above, and evaluated by the method described above.
〔比較例13〕
アクリル樹脂溶液(PA-1)の代わりに合成例3により得られたアクリル樹脂溶液(PA-2)を用いた以外は比較例12と同様にして感光性樹脂組成物(A-33)を調製した。得られた感光性樹脂組成物(A-33)を用いて、実施例1と同様に評価を行った。
[Comparative example 13]
A photosensitive resin composition (A-33) was prepared in the same manner as in Comparative Example 12, except that the acrylic resin solution (PA-2) obtained in Synthesis Example 3 was used instead of the acrylic resin solution (PA-1). did. Evaluation was performed in the same manner as in Example 1 using the obtained photosensitive resin composition (A-33).
各実施例および比較例における樹脂組成物の組成を表1、2に、評価結果を表3に示す。
実施例において作製した感光性樹脂組成物によれば、高い屈折率を有するとともに、膜表面の平滑性が高い硬化膜を形成でき、硬化膜上に形成されるITO電極の抵抗値の上昇を抑制することができる。
The compositions of the resin compositions in each example and comparative example are shown in Tables 1 and 2, and the evaluation results are shown in Table 3.
According to the photosensitive resin composition prepared in the examples, a cured film having a high refractive index and a highly smooth film surface can be formed, and an increase in the resistance value of the ITO electrode formed on the cured film can be suppressed. can do.
本発明の感光性樹脂組成物によれば、高い屈折率を有するとともに、膜表面の平滑性が高い硬化膜を形成でき、硬化膜上に形成されるITO電極の抵抗値の上昇を抑制することができるため、タッチパネル用保護膜や金属配線用保護膜などの各種保護膜、タッチパネル用絶縁膜、TFT用絶縁膜、層間絶縁膜などの各種絶縁膜として好適に用いることができる。 According to the photosensitive resin composition of the present invention, a cured film having a high refractive index and a highly smooth film surface can be formed, and an increase in the resistance value of an ITO electrode formed on the cured film can be suppressed. Therefore, it can be suitably used as various protective films such as a protective film for touch panels and protective films for metal wiring, and various insulating films such as insulating films for touch panels, insulating films for TFTs, and interlayer insulating films.
Claims (8)
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