JP2023126611A - Shape measurement device - Google Patents

Abstract

To provide a shape measurement device that can facilitate an interchange work of a detector.SOLUTION: A shape measurement device (10) comprises: a displacement detector (18) that includes an attachment part to which a gauge head element for measuring a contour shape of a measured object is detachably attached, and detects a displacement when a probe provided on a tip end side of an arm of the gauge head contacts with the measured object; a roughness detector (100) that is for measuring roughness of a surface of the measured object, and is detachably attached to the attachment part; sensors (92A and 92B) that are for detecting which any of the gauge head and the roughness detector is attached to the attachment part; and a control unit (46) that, when it is detected by the sensor that the roughness detector is attached to the attachment part, puts the attachment part of the displacement detector in a fixed state.SELECTED DRAWING: Figure 1

Description

The present invention relates to a shape measuring device, and more particularly, to a shape measuring device in which a measuring element used for measuring the shape of an object (work) to be measured can be replaced.

By moving a detector with a probe along the surface of the workpiece and reading the amount of displacement of the stylus attached to the tip of the probe using a processing unit, it is possible to determine the surface roughness and contour of the workpiece. A shape measuring device for measuring surface texture is known.

Patent Document 1 discloses a shape measuring device in which a probe equipped with a stylus for measuring the shape of a workpiece is detachably attached to a displacement detector. In Patent Document 1, it is possible to change the probe used for measurement depending on the shape of the workpiece, etc.

Japanese Patent Application Publication No. 2016-085204

In the shape measuring device, a displacement detector equipped with a probe used to measure the contour shape of a workpiece and a sensor for detecting roughness (hereinafter referred to as a roughness detector) are interchangeable. There are cases where the contour measurement and roughness measurement of a workpiece are performed using one shape measuring device. In a shape measuring device, when a displacement detector and a roughness detector are made interchangeable, the following problems arise.

First, there is a problem that the replacement work becomes complicated. When removing the displacement detector from the shape measuring device and attaching the roughness detector, it is necessary to reconnect the wiring to send the signal indicating the displacement detected by the roughness detector to the arithmetic processing unit of the shape measuring device. , it is necessary to switch the signal transmission path using software or the like, or to switch the application from contour measurement to roughness measurement.

Furthermore, in order to ensure measurement accuracy of the workpiece, it is necessary to perform calibration work after attaching a displacement detector or the like to the shape measuring device and before starting measurement.

As mentioned above, when making the displacement detector and roughness detector interchangeable in a shape measuring device, work such as removing, attaching, and calibrating the probe and displacement detector is required, which is time-consuming. There is a problem.

Furthermore, if the roughness detector is made replaceable, a place is required to store the roughness detector from the shape measuring device. If a dedicated stand or storage space is provided to store the roughness detector removed from the shape measuring device, there is a problem in that the size of the surface plate and mount of the shape measuring device becomes large.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a shape measuring device that can facilitate detector replacement work and save space.

In order to solve the above-mentioned problems, a shape measuring device according to a first aspect of the present invention includes a mounting part to which a measuring element for measuring the contour shape of a workpiece is detachably attached, and an arm of the measuring element. A displacement detector that detects the displacement when a stylus provided on the tip side of the object comes into contact with the object to be measured, and a roughness detector that measures the roughness of the surface of the object to be measured. a roughness detector that can be detachably attached to the mounting part; a seating sensor that detects whether the measuring head or the roughness detector is attached to the mounting part; and a seating sensor that detects whether the measuring head is attached to the mounting part. and a control device that switches the measurement mode to a contour measurement mode when the roughness measurement mode is detected, and switches the measurement mode to the roughness measurement mode when the seating sensor detects that the roughness detector is attached to the attachment part.

The shape measuring device according to the second aspect of the present invention, in the first aspect, further includes a holding part provided on the side surface of the displacement detector, and the holding part is used when measuring the contour shape of the object to be measured. , serves as a storage location for the roughness detector.

A shape measuring device according to a third aspect of the present invention is a connector for connecting a roughness detector and a control device in the first or second aspect, wherein the shape measuring device is provided in the roughness detector and the mounting portion, respectively. The apparatus further includes a connected connector.

According to the present invention, the measuring head and the roughness detector can be attached easily and stably, and the work involved in replacing the measuring head and the roughness detector can be reduced.

FIG. 1 is an external perspective view of a shape measuring device according to an embodiment of the present invention. FIG. 2 is a block diagram showing a shape measuring device according to an embodiment of the present invention. FIG. 3 is a perspective view showing a state in which a measuring element for contour shape measurement is attached to a displacement detector. FIG. 4 is a perspective view showing a state in which a roughness detector is attached to a displacement detector. FIG. 5 is an exploded perspective view showing an enlarged engagement member when a measuring element for contour shape measurement is attached to a displacement detector. FIG. 6 is an exploded perspective view showing an enlarged engagement member when a roughness detector is attached to a displacement detector. FIG. 7 is a block diagram showing a shape measuring device according to a modified example of the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a shape measuring device according to the present invention will be described with reference to the accompanying drawings.

[Shape measuring device]
FIG. 1 is an external perspective view of a shape measuring device according to an embodiment of the present invention. The following description will be made using a three-dimensional orthogonal coordinate system in which the XY plane is a horizontal plane and the Z direction is a vertical direction.

As shown in FIG. 1, the shape measuring device 10 includes a surface plate 12, a column 14, an X-axis drive unit 16, a displacement detector 18, a probe 20, an input device 22, and a display device 24.

The shape measuring device 10 is capable of replacing the measuring stylus 20 attached to the displacement detector 18 for measuring the contour shape with the roughness detector 100, and is capable of measuring the contour shape of the object to be measured (workpiece). It is possible to perform measurements and to measure the roughness of the workpiece surface. Here, the measurement of the contour shape is to detect displacement of the workpiece surface over a relatively long period, and the measurement of surface roughness is to detect the displacement of the workpiece surface over a shorter period. The measurement resolution for measuring the contour shape is, for example, on the order of 0.01 μm, while the measurement resolution for measuring the surface roughness is, for example, on the order of 0.1 to 10 nm.

The surface plate 12 is arranged so that its upper surface is substantially horizontal. A workpiece to be measured is placed on the upper surface of the surface plate 12 .

The column 14 is erected substantially perpendicularly to the upper surface of the surface plate 12. An X-axis drive section 16 is attached to the column 14. The column 14 is provided with a Z-axis drive section (not shown) for moving the X-axis drive section 16, and the X-axis drive section 16 is moved ±Z along the column 14 by this Z-axis drive section. It is possible to move in the direction.

A displacement detector 18 is attached to the lower side (−Z side) of the X-axis drive unit 16. The X-axis drive unit 16 holds the displacement detector 18 movably in the ±X directions.

Further, the shape measuring device 10 according to the present embodiment may include a Y-axis drive unit (not shown) that relatively moves the surface plate 12 and the column 14 in the ±Y direction.

As the X-axis drive unit 16, the Y-axis drive unit, and the Z-axis drive unit, for example, a feed screw mechanism having a ball screw, a nut member screwed to the ball screw, and a motor for rotating the ball screw is used. be able to. Note that the X-axis drive unit 16, Y-axis drive unit, and Z-axis drive unit may include mechanisms other than the feed screw mechanism (for example, a mechanism for converting the rotational force of a motor into reciprocating linear motion, a rack-and-pinion mechanism, etc.). etc.) may be used.

The displacement detector 18 has a housing 50 and a mounting portion 44 (see FIG. 3, etc.). The housing 50 has a substantially rectangular parallelepiped shape extending in the X direction, and includes a detection control section (numeral 46 in FIG. 2, etc.), a displacement reading section (numeral 48 in FIG. 2, etc.) for reading the displacement of the probe 20, and the like. ing.

The mounting portion 44 protrudes from the side surface of the housing 50 on the −X side. The mounting portion 44 is capable of swinging in the vertical direction (±Z direction) about a rotating shaft (not shown) as a fulcrum. A measuring stylus 20 for contour shape measurement or a roughness detector (reference numeral 100 in FIG. 2, etc.) is attached to the attachment portion 44 .

In the example shown in FIG. 1, a measuring stylus 20 for contour measurement is attached to the attachment portion 44 of the displacement detector 18. The probe 20 includes a probe arm 30 and a stylus 32 attached to the tip side of the probe arm 30. The stylus 32 is provided substantially perpendicular to the length direction of the stylus arm 30.

When the measuring stylus 20 is attached to the displacement detector 18, the shape measuring device 10 can measure the contour shape of the workpiece. On the other hand, when the roughness detector 100 is attached to the displacement detector 18 instead of the measuring head 20, the shape measuring device 10 can measure the roughness of the work surface.

The input device 22 is a device for receiving operation input from an operator, and includes, for example, a keyboard, a mouse, and the like. The input device 22 inputs a control signal corresponding to an operation input from an operator to a control device (reference numeral 200 in FIG. 2, etc.). Note that as the input device 22, for example, a touch panel may be provided on the display screen of the display device 24.

The display device 24 is a device for displaying measurement results and the like, and is, for example, a liquid crystal monitor.

[Control system of shape measuring device]
FIG. 2 is a block diagram showing a shape measuring device according to an embodiment of the present invention.

The control device 200 shown in FIG. 2 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), etc., and receives operation input from an operator via an input device 22, and A control signal is transmitted to each part of the measuring device 10 to control the operation of each part.

The control device 200 detects which of the tracing stylus 20 and the roughness detector 100 is attached to the attachment portion 44, and switches the measurement mode (contour measurement mode and roughness measurement mode).

As shown in FIG. 2, the displacement detector 18 includes a detection control section 46 and a displacement reading section 48.

The detection control unit 46 controls the measurement of the contour shape using the measuring stylus 20. The detection control section 46 includes means (for example, a gripping mechanism, a gripper) for mechanically fixing the mounting section 44 when measuring roughness. The detection control unit 46 switches between a movable state in which the attachment portion 44 is movable and a fixed state in which the attachment portion 44 is fixed, in response to instructions from the control device 200.

The displacement reading unit 48 is a device for reading the displacement of the probe 20 when measuring the contour shape of the workpiece, and is, for example, a linear scale, an arc scale, or an LVDT (Linear Variable Differential Transformer). etc.

When measuring the contour shape of a workpiece, the measuring stylus 20 is attached to the attachment portion 44 . At this time, the roughness detector 100 is held by the fourth engagement member 180 of the displacement detector 18 (see FIGS. 2 and 3). At this time, the wiring 110 between the roughness detector 100 and the control device 200 remains connected (details will be described later).

The control device 200 detects that the probe 20 is attached to the attachment portion 44 based on a detection signal from the first seating sensor 92A (details will be described later). Then, the control device 200 switches the measurement mode of the shape measurement device 10 to the contour measurement mode. Here, the control device 200 starts an application for measuring the contour shape and transmits an instruction to switch to the contour measurement mode to the detection control unit 46.

When the detection control unit 46 receives an instruction to switch to the contour measurement mode from the control device 200, the detection control unit 46 puts the attachment unit 44 into a movable state. As a result, the mounting portion 44 can swing in the vertical direction (hereinafter referred to as the Z1 direction) about the rotating shaft (not shown) as a fulcrum in a state in which the measuring element 20 is attached.

The displacement reading section 48 reads the displacement (displacement in the Z1 direction) when the stylus 32 attached to the tip side of the probe arm 30 of the probe 20 comes into contact with the surface of the workpiece.

The control device 200 acquires the X coordinate of the displacement detector 18 from the X-axis drive unit 16 and calculates the position of the stylus 32 from the size information of the measuring stylus 20 and the like. Then, the control device 200 calculates the contour shape of the workpiece based on the position of the stylus 32 and the displacement of the stylus 32 in the Z1 direction acquired from the displacement reading section 48, and outputs the result to the display device 24.

On the other hand, when measuring the roughness of the workpiece surface, a roughness detector 100 is attached to the attachment portion 44 (see FIG. 4). At this time, the probe 20 may be held by the fourth engagement member 180 of the displacement detector 18, or may be stored at another location. Generally, the gauge head 20 is smaller in size than the roughness detector 100, and there is no need to provide wiring between it and the control device 200, so it can be removed from the displacement detector 18 and stored in another location. Good too.

The control device 200 detects that the roughness detector 100 is attached to the attachment portion 44 based on a detection signal from the second seating sensor 92B (details will be described later). Then, the control device 200 switches the measurement mode of the shape measurement device 10 to the roughness measurement mode. Here, the control device 200 starts an application for roughness measurement and transmits an instruction to switch to the roughness measurement mode to the detection control unit 46.

When the detection control unit 46 receives an instruction to switch to the roughness measurement mode from the control device 200, the detection control unit 46 fixes the attachment unit 44.

The roughness detector 100 includes an arm 102, a stylus 104 attached to its tip, and a detector body 106 (see FIGS. 3 and 4). The detector main body 106 includes a sensor for detecting the displacement of the stylus 104 (displacement in the Z1 direction).

The control device 200 calculates the roughness of the workpiece surface based on the displacement of the stylus 104 in the Z1 direction obtained from the roughness detector 100, and outputs the result to the display device 24.

[Measurement mode]
FIG. 3 is a perspective view showing a state in which a measuring element for contour measurement is attached to a displacement detector, and FIG. 4 is a perspective view showing a state in which a roughness detector is attached to a displacement detector.

When measuring the contour shape of a workpiece, as shown in FIG. is retained. On the other hand, when measuring the roughness of the workpiece surface, the roughness detector 100 is attached to the attachment part 44 of the displacement detector 18, as shown in FIG.

As described above, the shape measuring device 10 according to the present embodiment uses the tracing stylus 20 and the roughness detector 100 to measure the contour shape of a workpiece (contour measurement mode) and to measure the roughness of the workpiece surface (roughness measurement mode). It is possible to perform the measurement by switching between the two measurement modes (measurement mode).

(contour measurement mode)
First, a case of measuring the contour shape of a workpiece (contour measurement mode) will be described. FIG. 5 is an exploded perspective view showing an enlarged engagement member when a measuring element for contour shape measurement is attached to a displacement detector.

As shown in FIG. 5, a first engagement member 60 is provided on the base end side of the probe arm 30 of the probe 20. As shown in FIG. Further, a second engaging member 80 is provided on the distal end side of the mounting portion 44 of the displacement detector 18. A magnetized member 68 and a magnet 90 are attached to the first engagement surface 62 of the first engagement member 60 and the second engagement surface 82 of the second engagement member 80, respectively. The first engaging surface 62 and the second engaging surface 82 are removably attracted by a magnetic catch made up of the magnetized member 68 and the magnet 90. As a result, the measuring stylus 20 for contour shape measurement is attached to the displacement detector 18.

The first engaging member 60 and the second engaging member 80 are made of metal, for example, and have a substantially rectangular parallelepiped shape. In the example shown in FIG. 5, the second engagement member 80 is thinner in the Y direction than the first engagement member 60. The first engaging member 60 and the second engaging member 80 are preferably made of non-magnetic material so as not to inhibit the attraction between the magnetized member 68 and the magnet 90.

A first groove 64 and a second groove 66 are formed in the first engagement surface 62 of the first engagement member 60 . The first groove 64 is a linear groove extending parallel to the axial direction of the probe arm 30 . The second groove 66 is a linear groove extending in a direction perpendicular to the axial direction of the probe arm 30 . The cross-sectional shapes of the first groove 64 and the second groove 66 are, for example, approximately V-shaped. The first groove 64 is formed parallel to the probe arm 30 (in other words, in a direction substantially perpendicular to the direction of the normal force when the probe 32 contacts the surface of the workpiece), and the second groove 66 is 1 groove 64 is formed perpendicularly thereto.

In addition, although the first groove 64 and the second groove 66 intersect in FIG. 5, the first groove 64 and the second groove 66 do not need to intersect.

A first positioning pin 84 , a second positioning pin 86 , and a third positioning pin 88 are attached to the second engaging surface 82 of the second engaging member 80 . The first positioning pin 84, the second positioning pin 86, and the third positioning pin 88 are each approximately spherical, conical, or truncated conical. The first positioning pin 84, the second positioning pin 86, and the first groove 64 are arranged so as to face each other when the first engagement surface 62 and the second engagement surface 82 are opposed to each other. Further, the third positioning pin 88 and the second groove 66 are arranged so as to face each other when the first engagement surface 62 and the second engagement surface 82 are opposed to each other.

The magnetized members 68 are attached to the first engaging surface 62 one by one at positions that are approximately symmetrical to the second groove 66 . The material of the magnetized member 68 is not limited as long as it is a magnetic body that is attracted to a magnet 90, which will be described later.

Two magnets 90 are attached to the second engagement surface 82. The magnet 90 is arranged so as to face the two magnetized members 68 attached to the first engagement surface 62 when the first engagement surface 62 and the second engagement surface 82 are opposed to each other. There is.

In the example shown in FIG. 5, the magnetized member 68 and the magnet 90 have a substantially circular planar shape and are substantially the same size. Note that the shapes and sizes of the magnetized member 68 and the magnet 90 are not limited to these. For example, the magnetized member 68 and the magnet 90 may have substantially congruent planar shapes and may be arranged so as to overlap each other. Further, the number of magnetized members 68 and magnets 90 is not limited to two, and may be one, or three or more, for example.

When attaching the probe 20 to the displacement detector 18, as shown by the white arrow in FIG. The surfaces 82 are faced and overlapped. Then, the magnetized member 68 and the magnet 90 are attracted by magnetic force. At this time, the first positioning pin 84 and the second positioning pin 86 engage with the first groove 64, and the third positioning pin 88 and the second groove 66 engage with each other. Thereby, the relative positions of the first engaging member 60 and the second engaging member 80 are fixed.

According to this embodiment, the first engagement surface 62 and the second engagement surface 82 are parallel to the direction of the normal force when the stylus 32 contacts the surface of the workpiece, and the first groove 64 is formed in a direction perpendicular to the direction of the normal force. Therefore, even when a vertical force acts on the stylus 32, the position of the probe 20 is stable and difficult to shift. Moreover, since the cross-sectional shapes of the first groove 64 and the second groove 66 are V-shaped, which can easily ensure machining accuracy, it is possible to easily ensure mounting accuracy.

When removing the probe 20 from the displacement detector 18, the first engaging member 60 is pulled in the +Y direction to separate the magnetized member 68 and the magnet 90. Thereby, the probe 20 can be easily removed from the displacement detector 18.

Here, the first engagement member 60 and the second engagement member 80 do not need to be entirely rigid. The first engaging member 60 only needs to have such rigidity that deformation of at least the first groove 64 and the second groove 66 can be ignored even if the measuring element 20 is repeatedly attached and detached. For example, the first engagement member 60 may be a composite material made by bonding carbon and metal in which the first groove 64 and the second groove 66 are formed. Like the first engaging member 60, the second engaging member 80 only needs to have such rigidity that deformation of the second engaging surface 82 can be ignored even if the contact point 20 is repeatedly attached and detached. , or may be a composite material as described above.

Similarly, the first positioning pin 84, the second positioning pin 86, and the third positioning pin 88 only need to have such rigidity that deformation can be ignored even if the probe 20 is repeatedly attached and detached.

(Roughness measurement mode)
Next, the case of measuring the roughness of the workpiece surface (roughness measurement mode) will be described. FIG. 6 is an exploded perspective view showing an enlarged engagement member when a roughness detector is attached to a displacement detector.

As shown in FIG. 6, a third engagement member 160 is provided on the base end side of the detector main body 106 of the roughness detector 100. A magnetized member 168 is attached to the third engagement surface 162 of the third engagement member 160. Further, the third engagement surface 162 of the third engagement member 160 has the same configuration as the first engagement member 60, and has a first groove 164 and a second groove 166 formed therein.

When attaching the roughness detector 100 to the displacement detector 18, as shown by the white arrow in FIG. The engaging surfaces 82 are overlapped with each other so as to face each other. Then, the magnetized member 168 and the magnet 90 are attracted by magnetic force. At this time, the first positioning pin 84 and the second positioning pin 86 are engaged with the first groove 164, and the third positioning pin 88 and the second groove 166 are engaged. Thereby, the relative positions of the third engaging member 160 and the second engaging member 80 are fixed.

When removing the roughness detector 100 from the displacement detector 18, the first engaging member 60 is pulled in the +Y direction to separate the magnetized member 168 and the magnet 90. Thereby, the roughness detector 100 can be easily removed from the displacement detector 18.

(Switching measurement mode)
Next, switching of the measurement mode of the shape measuring device 10 according to this embodiment will be explained.

As shown in FIGS. 5 and 6, in the shape measuring device 10 according to the present embodiment, the first seating sensor 92A and the second seating sensor 92B are arranged side by side on the second engagement surface 82 of the second engagement member 80. has been done. The first seating sensor 92A and the second seating sensor 92B are pressure sensors that detect pressure applied to their respective detection surfaces and output electrical signals (detection signals), and are, for example, piezoelectric sensors.

A first actuation pin 70 is attached to the first engagement surface 62 of the first engagement member 60 of the probe 20 . The first actuation pin 70 and the detection surface of the first seating sensor 92A are arranged to face each other when the first engagement surface 62 and the second engagement surface 82 are opposed to each other.

The first actuation pin 70 protrudes from the first engagement surface 62, and when the first engagement member 60 and the second engagement member 80 are engaged, the first operation pin 70 contacts and presses the detection surface of the first seating sensor 92A. do.

When the first seating sensor 92A is pressed by the first actuation pin 70, it outputs a detection signal to the control device 200 (see FIG. 2).

When the detection signal is input from the first seating sensor 92A, the control device 200 determines that the probe 20 is attached to the attachment portion 44. Then, the control device 200 switches the measurement mode of the shape measurement device 10 to the contour measurement mode.

On the other hand, a second actuation pin 170 is attached to the third engagement surface 162 of the third engagement member 160 of the roughness detector 100. The second actuation pin 170 and the detection surface of the second seating sensor 92B are arranged to face each other when the third engagement surface 162 and the second engagement surface 82 are opposed to each other.

The second actuation pin 170 protrudes from the third engagement surface 162, and when the third engagement member 160 and the second engagement member 80 are engaged, the second actuation pin 170 contacts and presses the detection surface of the second seating sensor 92B. do.

The second seating sensor 92B outputs a detection signal to the control device 200 when pressed by the second actuation pin 170.

When the detection signal is input from the second seating sensor 92B, the control device 200 determines that the roughness detector 100 is attached to the attachment portion 44. Then, the control device 200 switches the measurement mode of the shape measurement device 10 to the roughness measurement mode.

In addition, in this embodiment, although the measuring element 20 and the roughness detector 100 are identified by the first seating sensor 92A and the second seating sensor 92B, the present invention is not limited to this. For example, IC (Integrated Circuit) tags storing identification information of the measuring element 20 and roughness detector 100 are attached to the first engaging member 60 and the third engaging member 160, respectively, and the second engaging member 80 An IC tag reader may be attached to identify the probe 20 and the roughness detector 100. In this case, only one IC tag reader functions as a seating sensor.

[Roughness detector storage location]
Next, the storage location of the roughness detector 100 will be explained. In the shape measuring device 10 according to the present embodiment, the roughness detector 100 is attached to the side surface of the displacement detector 18 and held when measuring the contour shape.

As shown in FIGS. 3 and 4, on the +Y side surface of the housing 50 of the displacement detector 18, there is a fourth An engaging member 180 (holding portion) is attached.

As shown in FIG. 4, the fourth engagement surface 182 of the fourth engagement member 180 has a first positioning pin 184, a second positioning pin 186, and a third positioning pin 188, similarly to the second engagement member 80. is installed. The first positioning pin 184, the second positioning pin 186, and the third positioning pin 188 are each approximately spherical, conical, or truncated conical. The first positioning pin 184 and the second positioning pin 186 and the first groove 164 of the roughness detector 100 face each other when the third engagement surface 162 and the fourth engagement surface 182 are opposed to each other. It is arranged like this. Further, the third positioning pin 188 and the second groove 166 of the roughness detector 100 are arranged to face each other when the third engagement surface 162 and the fourth engagement surface 182 are opposed to each other. ing.

Two magnets 190 are attached to the fourth engagement surface 182. The magnet 190 is arranged so as to face the two magnetized members 168 attached to the third engagement surface 162 when the third engagement surface 162 and the fourth engagement surface 182 are opposed to each other. There is.

When measuring a contour shape, by engaging the third engaging member 160 of the roughness detector 100 and the fourth engaging member 180 of the displacement detector 18, the roughness detector 100 is used for displacement detection. Attach it to the side of the container 18. At this time, there is no need to remove the wiring 110 between the roughness detector 100 and the control device 200 (see FIG. 3).

According to this embodiment, by using the magnetic catch, the measuring element 20 and the roughness detector 100 can be easily and stably attached. Further, by providing a storage location for the roughness detector 100 on the side surface of the displacement detector 18, space saving can be realized. Furthermore, since the wiring between the roughness detector 100 and the control device 200 can be left connected, the work involved in replacing the probe 20 and the roughness detector 100 can be reduced.

According to the above embodiment, the displacement detector 18 for measuring the contour shape of the workpiece can remain attached to the X-axis drive unit 16. If the displacement detector 18 is removed in the roughness measurement mode, the position in the ZX direction will need to be calibrated when the displacement detector 18 is reattached to the X-axis drive unit 16, but in this embodiment, Since the displacement detector 18 does not need to be replaced, it is possible to reduce the chances of the displacement detector 18 being misaligned in the ZX direction. This eliminates the need for calibration work when transitioning from roughness measurement mode to contour measurement mode.

Note that in this embodiment, when holding the roughness detector 100, the stylus 104 is directed toward the +X side, but the present invention is not limited to this. It is preferable that the position and orientation of the fourth engaging member 180 be adjusted so that the roughness detector 100 can hold the wiring 110 in an orientation in which the length of the wiring 110 can be made shorter, for example.

[Modified example]
Next, a modification of this embodiment will be described.

FIG. 7 is a block diagram showing a shape measuring device according to a modified example of the present invention. In the above embodiment, when the roughness detector 100 is attached or detached, the wiring 110 between the roughness detector 100 and the control device 200 is not removed. On the other hand, in the modified example, connectors 112 and 114 are provided for connection between the roughness detector 100 and the control device 200, and the wiring is connected at the same time as the roughness detector 100 is installed.

As shown in FIG. 7, the connector 112 is attached to the third engagement surface 162 of the third engagement member 160 of the roughness detector 100, and the second engagement surface 82 of the second engagement member 80 A connector 114 is attached to the.

The connectors 112 and 114 may be contact type connectors or non-contact type connectors (for example, those using wireless communication).

According to this example, since the wiring can be connected at the same time as the installation of the roughness detector 100, the measuring stylus 20 and the roughness detector 100 can be easily replaced.

When the connectors 112 and 114 are of a contact type, the connectors 114 and 112 may be provided in the first positioning pin 84 or the second positioning pin 86 and the first groove 64, respectively, or the connectors 114 and 112 may be provided in the first positioning pin 84 or the second positioning pin 86 and the first groove 64, or Connectors 114 and 112 may be provided in the two grooves 66, respectively. In this case, since the number of contact points between the third engaging member 160 and the second engaging member 80 does not increase, the mounting accuracy of the roughness detector 100 can be ensured.

DESCRIPTION OF SYMBOLS 10... Shape measuring device, 12... Surface plate, 14... Column, 16... X-axis drive part, 18... Displacement detector, 20... Gauge head, 22... Input device, 24... Display device, 30... Gauge head arm, 44 ...Mounting section, 46...Detection control section, 48...Displacement reading section, 50...Housing, 60...First engagement member, 62...First engagement surface, 64...First groove, 66...Second groove, 68... Magnetized member, 70...First operating pin, 80...Second engagement member, 82...Second engagement surface, 84...First positioning pin, 86...Second positioning pin, 88...Third positioning pin, 90... Magnet, 92A...First seating sensor, 92B...Second seating sensor, 100...Roughness detector, 102...Arm, 104...Stylus, 106...Detector body, 110...Wiring, 112, 114...Connector, 160... Third engagement member, 162...Third engagement surface, 164...First groove, 166...Second groove, 168...Magnetized member, 170...Second operating pin, 180...Fourth engagement member, 182...Third engagement member 4 engaging surfaces, 184...first positioning pin, 186...second positioning pin, 188...third positioning pin, 190...magnet, 200...control device

Claims (3)

The measuring device is provided with a mounting part to which a measuring head for measuring the contour shape of the object to be measured is detachably attached, and the displacement when a stylus provided at the tip side of the arm of the measuring object comes into contact with the object to be measured. a displacement detector to detect;
a roughness detector for measuring the roughness of a surface of an object to be measured, the roughness detector being detachably attached to the attachment part;
a sensor for detecting which of the measuring element and the roughness detector is attached to the attachment part;
a control unit that sets the attachment portion of the displacement detector to a fixed state when the sensor detects that the roughness detector is attached to the attachment portion;
A shape measuring device comprising: further comprising a holding part provided on a side surface of the displacement detector,
The shape measuring device according to claim 1, wherein the holding section serves as a storage location for the roughness detector when measuring the contour shape of the object to be measured. 3. A connector for connecting the roughness detector and a control device of the shape measuring device, further comprising a connector provided on the roughness detector and the mounting portion, respectively. Shape measuring device.

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