JP2023115614A - Artificial diamond plasma production device - Google Patents

Abstract

To provide an artificial diamond plasma production device which prevents a microwave from reflecting many times on an inner side of a waveguide provided between a microwave supply source and a reaction chamber.SOLUTION: An artificial diamond plasma production device includes: a reaction chamber; a microwave discharge module; and a microwave lens. The microwave discharge module discharges a circular polarized microwave into the reaction chamber. The microwave discharge module includes a polarization pipe, a guide pipe, a first waveguide pipe, and a first linear polarization microwave supply source, which are serially connected along a microwave movement path. The microwave discharge module further includes a second waveguide pipe and a first matching load. The polarization pipe is constructed so that the liner polarization microwave is converted into the circular polarized microwave in accordance with a movement direction of the microwave, or reversely converted. The guide pipe includes a first opening and a second opening facing in different direction.SELECTED DRAWING: Figure 1

Description

TECHNICAL FIELD The present invention relates to an artificial diamond production apparatus, and more particularly to an artificial diamond production apparatus for synthesizing artificial diamond using microwave plasma chemical vapor deposition.

A conventional man-made diamond plasma generation device has a reaction chamber and a microwave emission module. A diamond retainer is placed in the reaction chamber, and a microwave emission module emits 2.45 GHz microwaves toward the reaction chamber to form a local standing wave with a strong electric field on the diamond retainer. .

To create artificial diamonds, a diamond seed crystal is placed on a diamond retainer and the reaction chamber is filled with highly concentrated methane gas. The microwave energy emitted by the microwave emission module heats the methane gas around the diamond seed crystals to extremely high temperatures, forming a plasma ball that attaches the carbon atoms of the methane gas to the diamond seed crystals. As a result, the diamond seed crystals gradually grow into larger size man-made diamonds.

In order to improve the efficiency of producing synthetic diamonds, a synthetic diamond generating device with a circular polarizer and a focusing mechanism is disclosed in Taiwan Patent No. 1734405(B). The microwaves are first converted into circularly polarized microwaves and then focused on the diamond seed crystal to form a stable plasma ball around the diamond seed crystal, thereby improving the efficiency of creating synthetic diamonds. do.

However, test results of a prototype synthetic diamond-growing device according to Taiwan Patent No. 1734405(B) show that although the circularly polarized microwave improves the stability of the plasma ball, the microwave also causes impedance mismatch. tend to reflect multiple times inside the reaction chamber, increasing complex reflected standing waves in the waveguide between the microwave source and the reaction chamber. Complicated reflected standing waves will gradually undermine the stability of the plasma ball around the diamond seed, thus reducing the efficiency of synthetic diamond production.

In short, the artificial diamond production equipment disclosed in Taiwan Patent No. 1734405(B) theoretically improves the efficiency of artificial diamond production, but too much useless microwave energy is accumulated in the reaction chamber. So the actual equipment stops working.

Taiwan Patent No. 1734405(B)

SUMMARY OF THE INVENTION It is a primary object of the present invention to provide an artificial diamond plasma generation apparatus that avoids multiple reflections of microwaves inside the waveguide between the microwave source and the reaction chamber.

An artificial diamond plasma generation device has a reaction chamber, a microwave emission module, and a microwave lens. The reaction chamber is hollow and has a microwave window and a diamond retainer. A microwave window is positioned over the reaction chamber such that external microwaves can travel into the reaction chamber through the microwave window. A diamond retainer is placed in the reaction chamber and an imaginary focus region is defined on the diamond retainer. A microwave emission module is positioned outside the reaction chamber and emits circularly polarized microwaves toward a microwave window of the reaction chamber. The microwave emission module has a polarizer tube, a guide tube, a first waveguide, and a first linearly polarized microwave source connected in series. The microwave emission module further has a second waveguide and a first matched load. The polarizer has a circular polarization aperture and a linear polarization aperture. A circular polarizing aperture is positioned on the end of the polarizer tube, facing the microwave window of the reaction chamber. A linear polarization aperture is positioned on the other end of the polarizer. When the external linearly polarized microwaves enter the polarizing tube through the linearly polarized aperture, they are converted to circularly polarized microwaves and exit through the circularly polarized aperture, and the external circularly polarized microwaves are As it enters the polarizer through the opening, it is converted to linearly polarized microwaves and exits through the linearly polarized aperture. The guide tube has a main opening, a first opening, and a second opening. A main aperture is located on the end of the guide tube and connected to the linear polarization aperture of the polarizer tube. A second opening is located on the side wall of the guide tube. The opening direction facing the second opening is non-parallel to the opening direction facing the first opening. An end of the first waveguide is connected to a first opening in the guide tube and another end of the first waveguide is connected to a first linearly polarized microwave source. A first linearly polarized microwave source generates linearly polarized microwaves. The linearly polarized microwaves are converted into circularly polarized microwaves by the polarizing tube and emitted toward the microwave window of the reaction chamber through the circularly polarized aperture of the polarizing tube. The end of the second waveguide is connected to the second opening of the guide tube. A first matched load is mounted on the second waveguide. A microwave lens is positioned between the circular polarization aperture of the polarizer tube of the microwave emission module and the diamond retainer of the reaction chamber. A microwave lens focuses the circularly polarized microwaves emitted by the microwave emission module onto the focal region of the diamond retainer.

An advantage of the present invention is that the microwave emission module has therein a polarizer, a guide tube and a first matched load. When the circularly polarized microwaves are reflected many times due to reasons such as impedance mismatch, the reflected circularly polarized microwaves are transformed back into linearly polarized microwaves, and then through the second opening of the guide tube. through to the first matched load and finally transformed into heat by the first matched load.

As a result, the present invention prevents complex reflected standing waves from forming within the reaction chamber by directing useless microwave energy out of the reaction chamber, thereby stabilizing the surrounding diamond seed crystals. maintain the plasma ball and improve the efficiency of synthetic diamond production.

Specifically, the linearly polarized microwaves emitted by the first linearly polarized microwave source travel through the guide tube, are transformed into circularly polarized microwaves by the polarizing tube, and enter the reaction chamber to produce diamond. Form.

The reflected circularly polarized microwaves are again transformed into linearly polarized microwaves by the polarizer, and the electric field of the linearly polarized microwaves is transformed twice before being transformed by the first linearly polarized microwave source. perpendicular to the electric field of the originally emitted linearly polarized microwave. As a result, the reflected microwaves can no longer exit the guide tube through the first opening, resulting in too much useless microwave energy as per Taiwan Patent No. 1734405(B). Explain why it accumulates in the reaction chamber.

On the other hand, the guide tube in the present invention has a second opening non-parallel to the first opening, whereby the reflected microwave energy is directed through the second opening into the guide tube. be able to exit As a result, unwanted microwave energy is directed out of the reaction chamber.

1 is a perspective view of an artificial diamond plasma generation device according to the present invention; FIG. FIG. 2 is an exploded perspective view of the artificial diamond plasma generation device of FIG. 1; 2 is a cross-sectional perspective view of a portion of the artificial diamond plasma generation apparatus of FIG. 1; FIG. 2 is an enlarged longitudinal cross-sectional view of the artificial diamond plasma generation device of FIG. 1; FIG. 2 is an enlarged cross-sectional view of the artificial diamond plasma generation device of FIG. 1; FIG. FIG. 4 is a perspective view of another embodiment of an artificial diamond plasma generation device according to the present invention; FIG. 7 is an exploded perspective view of the artificial diamond plasma generation device of FIG. 6; 7 is an enlarged longitudinal cross-sectional view of the artificial diamond plasma generation device of FIG. 6; FIG. Figure 9 is an enlarged cross-sectional view of the artificial diamond plasma generating device taken across line 9-9 in Figure 8;

Please refer to FIGS. 1, 2 and 4. FIG. The artificial diamond plasma generation equipment according to the invention comprises a reaction chamber 10 , a microwave emission module and a microwave lens 13 .

Reaction chamber 10 is hollow and has microwave window 11 and diamond retainer 12 . The microwave window 11 is microwave transparent and is positioned above the reaction chamber 10 such that external microwaves can travel into the reaction chamber 10 through the microwave window 11 . Rather, microwave window 11 is arranged on the casing of reaction chamber 10 . A diamond retainer 12 is positioned within the reaction chamber 10 . A virtual focal region 121 is defined on the top surface of the diamond retainer 12 .

The microwave emission module is placed outside the reaction chamber 10 and emits circularly polarized microwaves towards the microwave window 11 of the reaction chamber 10 . The microwave emission module has a polarizing tube 21 , a guiding tube 22 , a first waveguide 31 , a first linearly polarized microwave source 32 , a second waveguide 41 and a first matched load 43 . However, in a preferred embodiment, the microwave emission module further comprises a rectangular-circular tube 23 , a connecting sleeve 24 , a second linearly polarized microwave source 42 and a second matched load 33 . A polarizing tube 21, a guiding tube 22, a first waveguide 31, and a first linearly polarized microwave source 32 are connected in series along the microwave travel path.

In a preferred embodiment, the microwave emission module has a stacked assembly 20, a first microwave assembly 30, and a second microwave assembly 40, wherein the first microwave assembly 30 and the second emits linearly polarized microwaves towards the superimposed assembly 20, and then the linearly polarized microwaves from the two microwave assemblies are superimposed within the superimposed assembly 20, They then move together into the reaction chamber 10 .

Please refer to FIGS. The superimposed assembly 20 includes a polarizer tube 21, a guide tube 22, a rectangular-circular tube 23, and a connecting sleeve 24. FIG. A first microwave assembly 30 includes a first waveguide 31 , a first linearly polarized microwave source 32 and a second matched load 33 . A second microwave assembly 40 includes a second waveguide 41 , a second linearly polarized microwave source 42 and a first matched load 43 .

Circular polarization aperture 211 and linear polarization aperture 212 are positioned on corresponding ends of polarizer tube 21, respectively. In a preferred embodiment, the circular polarization aperture 211 (see FIG. 4) is positioned above the lower end of the polarizer 21 and faces the microwave lens 13 and microwave window 11 of the reaction chamber 10, while the linear polarization aperture 211 A polarizing aperture 212 is located on the upper end of the polarizing tube 21 .

The polarizer 21 is configured to convert linearly polarized microwaves into circularly polarized microwaves or circularly polarized microwaves into linearly polarized microwaves, depending on the direction of travel of the microwaves.

Specifically, the external linearly polarized microwaves are converted to circularly polarized microwaves as they enter the polarizing tube 21 through the linearly polarizing aperture 212 and exit the polarizing tube 21 through the circularly polarizing aperture 211 . When external circularly polarized microwaves enter the polarizing tube 21 through the circularly polarized aperture 211 , the circularly polarized microwaves are converted to linearly polarized microwaves and exit the polarizing tube 21 through the linearly polarized aperture 212 .

Please refer to FIGS. Guide tube 22 has a main opening 221 , a first opening 222 and a second opening 223 . In a preferred embodiment, the first opening 222 and the main opening 221 are positioned on opposite sides of the guide tube 22 . Precisely speaking, the main opening 221 is arranged on the lower end of the guide tube 22 , while the first opening 222 is arranged on the upper end of the guide tube 22 . The main opening 221 is connected to the linear polarization opening 212 of the polarizing tube 21 and the second opening 223 is located on the side wall of the guiding tube 22 . That is, the opening direction in which the second opening 223 faces is non-parallel to the opening direction in which the first opening 222 faces.

To be precise, the opening direction facing the first opening 222 is perpendicular to the opening direction facing the second opening 223 . The guide tube 22 is preferably circular in cross-section so that the main opening 221 and the first opening 222 are circular.

A rectangular-circular tube 23 is placed above the guide tube 22 and connected to the first opening 222 . The cross section of the inner surface of the rectangular-circular tube 23 is such that a rectangular opening 231 is formed on one end of the rectangular-circular tube 23 while a circular opening 232 is formed on another end of the rectangular-circular tube 23. It gradually transforms from a rectangle to a circle, as formed in the

A connecting sleeve 24 is positioned around the guide tube 22 . A conversion hole 241 is formed in the connecting sleeve 24 and connects the outer surface and the inner surface of the connecting sleeve 24 . Conversion aperture 241 is preferably elongated and extends upwardly and downwardly.

The opening of the conversion hole 241 formed in the inner surface of the connecting sleeve 24 is connected to the second opening 223 of the guide tube 22, and the width of the conversion hole 241 gradually decreases toward the second opening 223. to In a preferred embodiment, the two opposite walls defined by the conversion hole are stepped such that the width of the conversion hole gradually decreases towards the second opening 223 .

In a preferred embodiment, connecting sleeve 24 and guide tube 22 are integrally formed; in another preferred embodiment, connecting sleeve 24 is a tube separate from guide tube 22 and attached to guide tube 22 by means such as welding. mounted around.

Please refer to FIGS. The first waveguide 31 is preferably rectangular in cross section. One end of the first waveguide 31 is connected to the rectangular opening 231 of the rectangular-circular tube 23 so that the first waveguide 31 is connected to the guide tube 22 via the rectangular-circular tube 23 . connected to Another end of the first waveguide 31 is connected to a first linearly polarized microwave source 32 .

A first linearly polarized microwave source 32 generates TE10 linearly polarized microwaves 81 . The TE10 linearly polarized microwave 81 travels through the rectangular-circular tube 23 , the guide tube 22 and the polarizing tube 21 , and is converted by the polarizing tube 21 into a TE11 circularly polarized microwave 83 . TE11 circularly polarized microwaves 83 exit polarizer 21 through circularly polarized aperture 211 toward microwave window 11 of reaction chamber 10 .

A second matched load 33 is mounted on the first waveguide 31 . More precisely, a circulator 34 is mounted on the first waveguide 31 . When microwaves are present traveling back in the first waveguide 31 toward the first linearly polarized microwave source 32, the circulator 34 provides a second matched load where the microwaves are converted to heat. 33, which protects the first linearly polarized microwave source 32 from the reverse traveling microwaves and eliminates unwanted microwaves within the instrument.

Microwaves traveling backwards in the first waveguide 31 are generated by a second linearly polarized microwave source 42 and reflected by the reaction chamber 10, polarizing tube 21, guiding tube 22, and rectangular- It is the microwaves described below that travel through the circular tube 23 and finally travel in the first waveguide 31 towards the first linearly polarized microwave source 32 .

The second waveguide 41 is preferably rectangular in cross section. One end of the second waveguide 41 is outside the connecting sleeve 24 such that the second waveguide 41 is connected to the second opening 223 of the guide tube 22 via the connecting sleeve 24 . It is connected to the opening of the conversion hole 241 formed in the surface. Another end of the second waveguide 41 is connected to a second linearly polarized microwave source 42 .

A second linearly polarized microwave source 42 generates TE10 linearly polarized microwaves 91 . The TE10 linearly polarized microwave 91 travels through the rectangular-circular tube 23 , the guide tube 22 and the polarizing tube 21 before being converted by the polarizing tube 21 into a TE11 circularly polarized microwave 93 . TE11 circularly polarized microwaves 93 exit polarizer 21 through circularly polarized aperture 211 toward microwave window 11 of reaction chamber 10 . In another preferred embodiment, the second linearly polarized microwave source 42 is omitted.

A first matched load 43 is mounted on the second waveguide 41 . More precisely, a circulator 44 is mounted on the second waveguide 41 . When microwaves are present traveling back in the second waveguide 41 towards the second linearly polarized microwave source 42, the circulator 44 provides a first matched load where the microwaves are converted to heat. 43 to direct the reverse traveling microwaves, thereby protecting the second linearly polarized microwave source 42 from the reverse traveling microwaves and eliminating unwanted microwaves within the instrument.

microwaves traveling backwards in the second waveguide 41 are generated by the first linearly polarized microwave source 32, reflected by the reaction chamber 10, traveling through the polarizing tube 21, the guiding tube 22, It is the microwaves described below that ultimately travel through a second waveguide 41 toward a second linearly polarized microwave source 42 .
The microwaves generated by the first linearly polarized microwave source 32 cannot travel back through the rectangular-circular tube 23 after being reflected by the reaction chamber 10 due to the direction of its electric field, but rather 2 linearly polarized microwave sources 42 .

Microwaves traveling backwards in the first waveguide 31 are generated by a second linearly polarized microwave source 42 and reflected by the reaction chamber 10, polarizing tube 21, guiding tube 22, and rectangular- It is the microwaves described below that travel through the circular tube 23 and finally travel in the first waveguide 31 towards the first linearly polarized microwave source 32 .

The microwave lens 13 is positioned between the circular polarization aperture 211 of the polarizer 21 of the microwave emission module and the diamond retainer 12 of the reaction chamber 10 . The microwave lens 13 focuses the circularly polarized microwaves emitted by the microwave emission module onto the focal region 121 of the diamond retainer 12 .

In a preferred embodiment, the microwave lens 13 is positioned outside the reaction chamber 10 and positioned between the circular polarization aperture 211 and the microwave window 11 of the reaction chamber 10 . Microwave lens 13 is preferably a dielectric convex lens. In another preferred embodiment, the artificial diamond plasma generation device has additional convex and/or concave lenses to improve microwave focusing efficiency.

To use the present invention, diamond seed crystal A is placed within focal region 121 of diamond retainer 12 . A first linearly polarized microwave source 32 generates TE10 linearly polarized microwaves 81 in the first waveguide 31 . TE10 linearly polarized microwaves 81 are converted to TE11 linearly polarized microwaves 82 after traveling through rectangular-circular tube 23 and into guide tube 22 .

On the one hand, the second linearly polarized microwave source 42 generates TE10 linearly polarized microwaves 91 in the second waveguide 41 . The TE10 linearly polarized microwaves 91 are converted into TE11 linearly polarized microwaves 92 after traveling through the conversion hole 241 of the connecting sleeve 24 and into the guide tube 22 .

Finally, the TE11 linearly polarized microwaves 82 originating from the first linearly polarized microwave source 32 and the TE11 linearly polarized microwaves 92 originating from the second linearly polarized microwave source 42 are both directed through the polarizer 21 to It moves downwards and enters the polarizing tube 21 .
The TE11 linearly polarized microwaves 82 and TE11 linearly polarized microwaves 92 are then converted into TE11 circularly polarized microwaves 83 and TE11 circularly polarized microwaves 93 respectively by the polarizing tube 21, focused by the microwave lens 13, and passed through the microwave window. 11 and focused within the focal region 121 to create an artificial diamond.

When the TE11 circularly polarized microwaves 83 and TE11 circularly polarized microwaves 93 are reflected within the reaction chamber 10 , the reflected microwaves originating from the first linearly polarized microwave source 32 are reflected through the second opening 223 . enters the second waveguide 41 via and is eventually converted to heat by the first matched load 43 . On the one hand, reflected microwaves originating from the second linearly polarized microwave source 42 enter the first waveguide 31 through the first opening 222 and eventually the second matched load 33 converted to heat by A detailed process is described below.

When the TE11 circularly polarized microwaves 83 originating from the first linearly polarized microwave source 32 are reflected, the reflected TE11 circularly polarized microwaves 83 travel upward through the polarizing tube 21 and within the guide tube 22 converted to TE11 linearly polarized microwaves 82'. However, the TE11 linearly polarized microwave 82 ′ is perpendicular to the electric field of the TE11 linearly polarized microwave 82 after its electric field has been converted twice by the polarizing tube 21 , so that the TE11 linearly polarized microwave 82 ′ passes through the first opening 222 to the first rather, the TE11 linearly polarized microwaves 82' enter the second waveguide 41 through the second opening 223 and through the first matched load 43 converted to heat.

Similar to the TE11 circularly polarized microwaves 83, when the TE11 circularly polarized microwaves 93 are reflected, the reflected TE11 circularly polarized microwaves 93 travel upward through the polarizing tube 21, and within the guide tube 22, the TE11 linear converted into polarized microwaves 92'. The TE11 linearly polarized microwave 92 ′ cannot enter the second waveguide 41 but enters the first waveguide 31 and is converted to heat by the second matched load 33 . is possible.

Another advantage of the present invention is that by converting linearly polarized microwaves to circularly polarized microwaves, the electric field distribution of the circularly polarized microwaves is more uniformly distributed within the reaction chamber 10 .
The present invention superimposes circularly polarized microwaves from a first linearly polarized microwave source 32 and a second linearly polarized microwave source 42 to increase the microwave power, thereby increasing the power of the diamond retainer 12. It is possible to increase the growth rate of the artificial diamond above.

Please refer to FIGS. A second embodiment of the present invention is substantially the same as the first embodiment described above, with the difference that the first opening 222A of the guide tube 22A is located on the side wall of the guide tube 22A. is. Further, the connecting sleeve 24A has two conversion holes 241A, a first conversion hole 241A and a second conversion hole 241A.

One of the two opposite openings of the first conversion hole 241A is connected to the first opening 222A of the guide tube 22A, and the other of the two opposite openings of the first conversion hole 241A is It is connected to the first waveguide 31A. The width of the first conversion hole 241A gradually decreases toward the first opening 222A.

One of the two opposite openings of the second conversion hole 241A is connected to the second opening 223A of the guide tube 22A, and the other of the two opposite openings of the second conversion hole 241A is It is connected to the second waveguide 41A. The width of the second conversion hole 241A gradually decreases toward the second opening 223A.

In short, by having the polarizer tube 21, the guide tube 22, and the first matched load 43, the TE11 circularly polarized microwaves 83 originating from the first linearly polarized microwave source 32 are not caused by reasons such as impedance mismatches. and reflected within the reaction chamber 10, the reflected circularly polarized microwaves are converted back into TE11 linearly polarized microwaves 82' and then through the second opening 223 of the guide tube 22 into the first It can travel to a matched load and eventually be converted to heat by a first matched load 43 .

As a result, the present invention prevents complex reflected standing waves from forming within the reaction chamber 10 by directing unwanted microwave energy out of the reaction chamber 10, thereby to maintain a stable plasma ball and improve the efficiency of artificial diamond production.

Claims (10)

a hollow reaction chamber, a microwave window positioned over said reaction chamber such that external microwaves can travel into said reaction chamber through said microwave window; a reaction chamber having a diamond retainer disposed within the reaction chamber, the diamond retainer having an imaginary focal region defined on the diamond retainer;
a polarizing tube, a guiding tube, a first waveguide, and a first polarizing tube, a guiding tube, a first waveguide, and a first polarizing tube, disposed outside the reaction chamber and emitting circularly polarized microwaves toward the microwave window of the reaction chamber; a microwave emission module having a linearly polarized microwave source and further having a second waveguide and a first matched load;
The polarizer is positioned on one end of the polarizer, with a circular polarization aperture facing the microwave window of the reaction chamber, and a linear polarization aperture positioned on another end of the polarizer. , has
External linearly polarized microwaves are converted to circularly polarized microwaves as they enter the polarizer tube through the linearly polarized aperture and exit through the circularly polarized aperture, wherein the external circularly polarized microwaves are converted to linearly polarized microwaves as it enters the polarizer tube through the circularly polarized aperture and exits through the linearly polarized aperture;
The guide tube was disposed on the end of the guide tube, a main opening connected to the linear polarization opening of the polarizer tube, a first opening, and a side wall of the guide tube. a second opening, wherein the opening direction facing the second opening is non-parallel to the opening direction facing the first opening;
An end of the first waveguide is connected to the first opening of the guide tube and another end of the first waveguide is connected to the first linearly polarized microwave source. connected to
The linearly polarized microwave source generates linearly polarized microwaves, the linearly polarized microwaves are converted to circularly polarized microwaves by the polarizing tube, and the reaction occurs through the circularly polarized aperture of the polarizing tube. emitted toward the microwave window of the chamber;
the end of the second waveguide is connected to the second opening of the guide tube;
the first matched load mounted on the second waveguide;
A microwave lens is disposed between the circularly polarized aperture of the polarizing tube of the microwave emission module and the diamond retainer of the reaction chamber to receive the circularly polarized microwaves emitted by the microwave emission module. focused on the focus module of the diamond retainer,
Artificial diamond plasma generator. The microwave emission module is mounted at another end of the second waveguide and is a second linearly polarized microwave source for generating linearly polarized microwaves, the linearly polarized microwaves comprising: a second linearly polarized microwave source that is converted into circularly polarized microwaves by the polarizing tube and emitted toward the microwave window of the reaction chamber through the circularly polarized opening of the polarizing tube; and a second matched load mounted on the first waveguide. The guide pipe of the microwave emission module is circular in cross section, and the first waveguide and the second waveguide of the microwave emission module are rectangular in cross section. 3. The artificial diamond plasma generating device according to claim 1 or 2, wherein The first opening and the main opening are positioned on opposite sides of the guide tube, and the microwave emitting module is located between the first waveguide and the first opening of the guide tube. 4. The artificial diamond plasma generation according to claim 3, characterized in that it has a rectangular-circular tube connected in between, wherein the cross-section of the inner surface of said rectangular-circular tube is gradually deformed from rectangular to circular. device. The first opening and the main opening are arranged on opposite sides of the guide tube, the microwave emitting module has a connecting sleeve located around the guide tube, and the second guide tube has a connecting sleeve. A wave tube is connected to an outer surface of said connecting sleeve, said connecting sleeve being an elongated conversion hole connecting said outer and inner surfaces of said connecting sleeve, said conversion hole having two opposite openings. is connected to the second opening of the guide tube, the other of the two opposite openings of the conversion hole is connected to the second waveguide, and the width of the conversion hole is 4. An artificial diamond plasma generating device according to claim 3, characterized in that has a conversion aperture that tapers towards said second opening. 2. Claim characterized in that two opposite walls defined by said conversion hole are stepped such that said width of said conversion hole gradually decreases towards said second opening. 6. The artificial diamond plasma generation device according to 5. The microwave emitting module has a connecting sleeve positioned around the guide tube, the second waveguide being connected to an outer surface of the connecting sleeve, the connecting sleeve being connected to the an elongate conversion hole connecting an outer surface and an inner surface, one of two opposite openings of said conversion hole being connected to said second opening of said guide tube; the other of the two opposite openings being connected to the second waveguide, the width of the conversion hole gradually decreasing towards the second opening. The artificial diamond plasma generation device according to claim 4, wherein 2. Claim characterized in that two opposite walls defined by said conversion hole are stepped such that said width of said conversion hole gradually decreases towards said second opening. 8. The artificial diamond plasma generation device according to 7. The first opening of the guide tube is located on the side wall of the guide tube, the microwave emitting module has a connecting sleeve located around the guide tube, and the second waveguide A tube is connected to the outer surface of the connecting sleeve, the connecting sleeve has two conversion holes, each of the conversion holes being elongated and connecting to the outer surface and the inner surface of the connecting sleeve; one conversion hole is a first conversion hole, one of two opposite openings of the first conversion hole being connected to the first opening of the guide tube; The other of the two opposite openings of the conversion hole is connected to the first waveguide, and the width of the first conversion hole gradually decreases towards the first opening. one conversion hole and a second conversion hole, wherein one of the two opposite openings of said second conversion hole is connected to said second opening of said guide tube; the other of the two opposite openings of the conversion hole of is connected to the second waveguide, the width of the second conversion hole gradually decreasing towards the second opening 4. An artificial diamond plasma generating device according to claim 3, characterized in that it has two conversion holes which are the second conversion holes. 3. The opening direction facing the first opening of the guide tube is perpendicular to the opening direction facing the second opening of the guide tube. The artificial diamond plasma generation device according to .

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