JP2023113251A - Measurement apparatus - Google Patents

Abstract

To provide a measurement apparatus with high measurement performance.SOLUTION: A measurement apparatus comprises: a light emitting element which emits light toward an object; a plurality of light receiving elements which receives light reflected from the object and is arrayed in the first direction; and a control unit. The control unit executes: the first light reception processing of causing the light receiving element in the first light reception region including the two or more light receiving elements arrayed in the prescribed number in the first direction in the plurality of light receiving elements to receive the light; the first movement processing of moving the light reception region in the first direction by the first number that is less than the prescribed number; and the second light reception processing of causing the light receiving element in the first light reception region after the first movement processing in the plurality of light receiving elements to receive the light.SELECTED DRAWING: Figure 5

Description

The present invention relates to measuring devices.

Patent Literature 1 describes a distance measuring device that measures the distance to a reflecting object based on the flight time of light from when pulsed light is emitted until when reflected light is received.

JP 2021-152536 A

When using a measurement device such as LiDAR, it is preferable to improve the measurement performance as much as possible.

SUMMARY OF THE INVENTION An object of the present invention is to provide a measuring apparatus capable of improving the measuring performance.

In order to achieve the above object, as one aspect of the present invention, there is provided a light-emitting element that emits light toward an object and a plurality of light-receiving elements that are arranged in a first direction and receive light reflected by the object. and a control unit, wherein the control unit receives light from light receiving elements in a first light receiving area including a predetermined number of light receiving elements arranged in the first direction, which is two or more, among the plurality of light receiving elements. a first movement process of moving the light receiving area in the first direction by a first number less than the predetermined number; and among the plurality of light receiving elements, the and a second light-receiving process of causing light-receiving elements in the first light-receiving region to receive light.

In addition, the problems disclosed by the present application and their solutions will be clarified by the description of the mode for carrying out the invention and the drawings.

ADVANTAGE OF THE INVENTION According to this invention, the measuring apparatus which can improve a resolution is provided.

It is a figure which shows the structure of the measuring device 1 in 1st Embodiment. 2 is an explanatory diagram of the functional configuration of the measuring device 1 in the first embodiment; FIG. 3 is a diagram showing part of a light source 12 and a light receiving sensor 22; FIG. In order to facilitate understanding, the diagram is a perspective view from the rear surface (-Z side). FIG. 10 is a diagram showing the relationship between the irradiation areas of the light emitting element 123, the light receiving element 222, and the object 90; 3A and 3B are diagrams illustrating (a) light emission and scanning of a light source 12 and (b) light reception and scanning of a light receiving sensor 22 in Measurement Example 1. FIG. 8A and 8B are diagrams for explaining (a) light emission and scanning of a light source 12 and (b) light reception and scanning of a light receiving sensor 22 in Measurement Example 2; 4 is a flowchart relating to light emission, light reception, and scanning by the control unit 30; (a) An explanatory diagram of a signal processing unit 362 and (b) an explanatory diagram of a histogram. FIG. 11 is a diagram of a light receiving sensor 22 in Measurement Example 3; 13A and 13B are diagrams showing an example of light reception and scanning in (a) section 22A and (b) light reception and scanning in section 22B in Measurement Example 3. FIG. It is a figure which shows the structure of the measuring device 100 in 2nd Embodiment. It is a figure which shows a part of light source 112 in 2nd Embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, it demonstrates, referring drawings for the form for implementing this invention. In the following description, the same or similar configurations may be denoted by common reference numerals, and redundant description may be omitted.

===First embodiment===
(overview)
FIG. 1 is an explanatory diagram of the overall configuration of the measuring device 1. As shown in FIG. In FIG. 2, functional blocks related to each functional unit in the measuring device 1 are shown.

The measuring device 1 is a device that measures the distance to the object 90 . The measurement apparatus 1 emits measurement light, detects the reflected light reflected by the surface of the object 90, and measures the time from the emission of the measurement light to the reception of the reflected light. is measured by the TOF method (Time of Flight). The measuring device 1 has an irradiation section 10 , a light receiving section 20 , a control section 30 and a storage section 50 .

The irradiation unit 10 irradiates the measurement light toward the object 90 . The irradiating unit 10 irradiates measurement light at a predetermined angle of view. The irradiation section 10 has a light source 12 and a projection optical system 14 . The light source 12 emits light. The light source 12 is composed of, for example, a surface emitting laser (VCSEL). The light projection optical system 14 is an optical system that irradiates the object 90 with light emitted from the light source 12 .

In the following description, the direction along the optical axis of the projection optical system 14 (indicated by the dashed-dotted line in FIG. 1) is defined as the Z direction. Note that the object 90 to be measured by the measuring device 1 is separated from the measuring device 1 in the Z direction. A direction perpendicular to the Z direction and in which the light projecting optical system 14 and the light receiving optical system 24 are arranged is defined as the Y direction. A direction perpendicular to the Z direction and the Y direction is defined as the X direction.

The light projection optical system 14 is an optical system for irradiating the object 90 with the light emitted from the light source 12 . A light source 12 is arranged in the focal plane of the projection optical system 14 . The light projecting optical system 14 irradiates the object 90 with light emitted from a light emitting element 123 (described later) of the light source 12 as collimated light. The light projecting optical system 14 is composed of a lens group composed of a plurality of (for example, 5 to 7) lenses (in FIG. 1, the lens group of the light projecting optical system 14 is simply shown). ing).

The light receiving unit 20 receives reflected light from the object 90 . The light receiving section 20 has a light receiving sensor 22 and a light receiving optical system 24 .

The light-receiving optical system 24 is an optical system for causing the light-receiving sensor 22 to receive the reflected light from the object 90 . A light receiving sensor 22 is arranged in the focal plane of the light receiving optical system 24 . The light-receiving optical system 24 collects the light reflected by the object 90 onto a light-receiving element 222 (described later) of the light-receiving sensor 22 . The light-receiving optical system 24, like the light-projecting optical system 14, is each composed of a lens group composed of a plurality of (for example, 5 to 7) lenses (in FIG. 1, the light-receiving optical system 24 lens group is simply shown).

Detailed configurations of the light source 12 and the light receiving sensor 22 will be described later.

The control unit 30 controls the measuring device 1 (FIG. 2). The control unit 30 controls irradiation of light from the irradiation unit 10 . Further, the control unit 30 measures the distance to the object 90 by the TOF method (time of flight) based on the output result of the light receiving unit 20 . The control unit 30 has an arithmetic device and a storage device (not shown). The arithmetic device is, for example, an arithmetic processing device such as a CPU or GPU. A part of the arithmetic device may be composed of an analog arithmetic circuit.

The control section 30 has a setting section 32 , a timing control section 34 and a distance measuring section 36 . The setting unit 32 performs various settings. The timing control section 34 controls the processing timing of each section. For example, the timing control unit 34 controls the timing of emitting light from the light source 12 and the like. The distance measuring unit 36 measures the distance to the object 90 . The distance measurement section 36 has a signal processing section 362 , a time detection section 364 and a distance calculation section 366 . The signal processing section 362 processes the output signal of the light receiving sensor 22 . The time detection unit 364 detects the time of flight of light (time from irradiation of light to arrival of reflected light). The distance calculator 366 calculates the distance to the object 90 .

The storage unit 50 is configured by a main storage device and an auxiliary storage device, and is a device that stores programs and data. Various processes for measuring the distance to the object 90 are executed by the arithmetic device executing the program stored in the storage unit 50 .

The storage unit 50 can store data acquired by the control unit 30 . For example, data obtained by the light receiving unit 20 receiving the reflected light is stored in the storage unit 50 and used for subsequent analysis processing and the like.

(light source and light receiving sensor)
The light source 12 has a light emitting surface parallel to the XY plane (surface parallel to the X direction and the Y direction), as shown in FIG. The light emitting surface is configured in a rectangular shape. The light emitted from the light source 12 is applied to the object 90 via the light projecting optical system 14 .

The light source 12 has a plurality of light emitting elements 123 arranged two-dimensionally. As shown in FIG. 3, the light emitting elements 123 are formed in rows A, B, C, . . . and columns 1, 2, 3, .

The light receiving sensor 22 has a plurality of light receiving elements 222 arranged two-dimensionally, as shown in FIG. The number and arrangement of light receiving elements 222 are the same as the number and arrangement of light emitting elements 123 . The light receiving elements 222 are formed in each row of A, B, C, . . . and each column of 1, 2, 3, .

The light receiving element 222 outputs a signal corresponding to the amount of light received. Various types of elements can be considered as specific examples of the light receiving element 222, and one example is SPAD (Single Photon Avalanche Diode). A light-receiving element 222 composed of a SPAD outputs a pulse signal when it detects a photon. The light emitting element 123 irradiates the object 90 with light through the light projecting optical system 14 .

The correspondence between the light receiving elements 222 that receive the light emitted by a certain light emitting element 123 is determined in advance. More specifically, one light-receiving element 222 is associated with one light-emitting element 123 so as to be able to receive reflected light. is conjugate.

In this embodiment, the light-emitting elements 123 and the light-receiving elements 222 in the same row and column are associated with each other so as to be conjugate. For example, the light receiving element 222 in row A, column 1 in FIG. 3 can receive and detect light emitted from the light emitting element 123 in row A, column 1. FIG. In the following description, the fact that the light source 12 and the light receiving sensor 22 have the same position or range in the same row and row may be simply referred to as the "same position" or the "same range."

The light receiving elements 222 in the range R in FIG. 3 can receive and detect light emitted from the light emitting elements 123 in the same range R in the light source 12 . At this time, the measurement light emitted from the light emitting element 123 is reflected by the area S on the object 90 and is received by the corresponding light receiving element 222 (FIG. 4).

A group of light receiving elements 222 arranged in a rectangular shape of 3 rows and 3 columns as in range R corresponds to pixels in an image acquired by control unit 30 . The number and arrangement of the light receiving elements 222 forming the pixels can be appropriately set according to the conditions.

(Processing during measurement: Measurement example 1)
The control of the light emitting element 123 by the controller 30 (timing controller 34) during measurement will be described. The control unit 30 measures the object 90 while scanning light and light in a predetermined direction as described below according to the flowchart of FIG. 7 .

First, in step S1, the control unit 30 (timing control unit 34) causes the light source 12 to have a length in the X direction equal to the entire length of the light source 12 in the X direction and to extend by three rows in the Y direction. Determine the emission range.

Next, the control unit 30 causes the light emitting elements 123 within the light emission range to simultaneously emit light to emit pulsed light (S3). In addition, in Fig.5 (a), the light emission range is shown by hatching.

As the light source 12 emits light, the corresponding light receiving element 222 receives the reflected light. In FIG. 5B, the range (light receiving range) of the light receiving element 222 receiving light is indicated by hatching, and the element group forming the pixel is indicated by thick lines.

As described above, one light-receiving element 222 is associated with one light-emitting element 123 so as to be able to receive reflected light. That is, as shown in FIG. 5B, the light receiving range is a range extending along the entire length of the light receiving sensor 22 in the X direction and arranged in three rows in the Y direction.

In step S7, as shown in FIG. 5A, the control unit 30 moves the light emitting range and the light receiving range in the +Y direction by one row, that is, by one element, and causes the light emitting elements 123 within the light emitting range to emit light. Along with this, the light receiving range is also moved in the +Y direction by one element (FIG. 5(b)).

The control unit 30 repeats the processes of steps S1 to S7 at regular intervals. The control unit 30 thus scans the light emission range of the light source 12, the irradiation range on the object 90, and the light receiving range of the light receiving sensor 22 in the +Y direction.

The control unit 30 performs the processing as described above over the entire area of the light source 12 and the light receiving sensor 22 . Specifically, when the light emission range and the light reception range move to the +Y side end of the light source 12 and the light receiving sensor 22 (S5: YES), the control unit 30 returns the process to step S1, and again from the -Y side end. Scanning of the light emitting range and the light receiving range is started. The scanning end point may be determined at a position other than the +Y side end of the light source 12 and the light receiving sensor 22 .

Data obtained by receiving the reflected light by the light receiving unit 20 is stored in the storage unit 50 and processed as follows.

FIG. 8A is an explanatory diagram of the signal processing section 362. FIG. The signal processor 362 has an adder 362A, a comparator 362B, and a histogram generator 362C. Here, the processing signal section generates a histogram used in Time Correlated Single Photon Counting (TCSPC) based on the output signal of each light receiving element 222 .

The adder 362A adds the output signals of the light receiving element 222 (SPAD) group forming the pixel. The adder 362A may adjust (shape) the pulse widths output from the light receiving elements 222 and then add the output signals of the plurality of light receiving elements 222 . The comparator 362B compares the output signal of the adder 362A with a threshold, and outputs a signal when the output signal of the adder 362A is greater than or equal to the threshold. The timing at which the comparator 362B outputs a signal is considered to be the timing at which the light receiving element 222 (SPAD) of the light receiving sensor 22 detects light.

By the way, photons of disturbance light are incident on the respective light receiving elements 222 at random in terms of time. On the other hand, the photons of the reflected light are incident on each of the light receiving elements 222 after a predetermined delay time (flight time according to the distance to the object 90) after light irradiation. Therefore, when photons of disturbance light are incident on the light receiving element 222 at random in terms of time, the probability that the output signal of the adder 362A is equal to or higher than the threshold is low. On the other hand, when the photons of the reflected light are incident on the light receiving element 222, the group of light receiving elements 222 forming the pixel detects the photon at the same time. Therefore, the output signals of the plurality of light receiving elements 222 are added by the adding section 362A, and the output signal of the adding section 362A is compared with the threshold value by the comparing section 362B, whereby the light receiving element 222 (SPAD) detects the reflected light. Measure the time that can be considered.

FIG. 8B is an explanatory diagram of a histogram. The horizontal axis in the figure is time, and the vertical axis is frequency (number of times). Based on the output of the comparison unit 362B, the histogram generation unit 362C repeatedly measures the time that the light receiving element 222 (SPAD) of the light receiving sensor 22 detects light, and increments the frequency (number of times) associated with that time. to generate a histogram. When the frequency (number of times) is incremented, the histogram generator 362C may increase the number corresponding to the output signal (added value) of the adder 362A instead of increasing the number by one.

Note that the setting unit 32 (see FIG. 2) presets the number of integrations for generating the histogram. The timing control unit 34 causes the light source 12 of the irradiation unit 10 to emit pulsed light a plurality of times according to the set number of times of integration. A signal is output once or a plurality of times from the adder 362A for one emission of pulsed light from the light source 12 . The histogram generation unit 362C generates a histogram by incrementing the frequency (number of times) according to the output signal of the comparison unit 362B until the set number of times of accumulation is reached.

After generating the histogram, the distance measurement unit 36 (time detection unit 364) detects the time Tf from when the light is emitted until the reflected light arrives, based on the histogram. As shown in FIG. 8B, the distance measurement unit 36 (time detection unit 364) detects the time corresponding to the frequency peak of the histogram, and sets that time as time Tf. Then, the distance measuring section 36 (distance calculating section 366) calculates the distance to the object 90 based on the time Tf.

Through the processing described above, the control unit 30 can generate an image having pixels corresponding to the light emitting elements 123 and calculate the distance to the object 90 for each pixel. The light-receiving element 222, except for the peripheral portion of the light-receiving sensor 22, can receive light multiple times in one image generation and can be the center of the pixel. Therefore, it is possible to generate an image with high resolution.

(Measurement example 2)
In the above description, the light emitting range and the light receiving range are set to cover three columns in the Y direction, but the light emitting range and light receiving range may cover three rows in the X direction. In this case, the Y-direction lengths of the light-emitting range and the light-receiving range are the same as the total Y-direction lengths of the light source 12 and the light receiving sensor 22, respectively.

The scanning direction in this case is the -X direction as shown in FIG. That is, the light emitting range and the light receiving range are scanned in the -X direction at regular intervals by the control section 30 .

It is also possible to alternately repeat scanning in the X direction and scanning in the Y direction with respect to the light emitting range and the light receiving range. For example, each time the control unit generates one image, it is possible to switch between measurement method 1 and measurement method 2 and change the scanning direction.

Each light-receiving element 222 can receive light multiple times and can serve as the center of a pixel, except for the peripheral portion of the light-receiving sensor 22 . Therefore, it is possible to generate an image with high resolution.

(Measurement example 3)
The light receiving sensor 22 may be divided into two or more sections and the scanning method may be changed in each section. For example, when it is desired to increase the image resolution in the central portion of the image, it is conceivable to divide the light-receiving sensor 22 into central sections 22A and 22B as shown in FIG. In section 22A a scan based on measurement example 1 is performed (FIG. 10(a)), and in section 22B other scanning methods can be applied. For example, in section 22B, scanning for each pixel is performed in the same manner as in the conventional art, that is, scanning is performed by moving the light receiving range by three rows in the +Y direction (FIG. 10(b)).

Note that the same scanning as in Measurement Example 2 may be performed in the section 22A.

By performing the scanning as described above, a high-resolution image can be generated in the section 22A in the central portion of the light receiving sensor 22. FIG. Also, in the section 22B, the scanning speed can be increased to shorten the time required for image generation. Therefore, image generation can be performed quickly or efficiently.

Sections 22A and 22B can also change shape for each image generation. For example, it is conceivable to appropriately change the size and shape of the section 22A according to the movement of the area requiring the high-resolution image.

=== Second Embodiment ===
A measuring device 100 according to the second embodiment will be described below with reference to FIGS. 11 and 12. FIG.

The measurement apparatus 100 further includes a scanning unit 40 in addition to the configuration similar to that of the measurement apparatus 1, and includes a light source 112 having a configuration different from that of the light source 12 (FIG. 11). Below, the same reference numbers are given to the same configurations, parts, etc. as those of the measuring apparatus 1 of the first embodiment, and the description thereof is omitted.

The scanning unit 40 has a function of scanning the measurement light by changing the irradiation angle of the measurement light. Various scanning methods such as photonic crystals and liquid crystals can be employed. For example, the scanning unit 40 may have a mirror that rotates or moves, such as a galvanometer scanner or a MEMS mirror, and the laser beam may be reflected by the mirror and scanned with the laser beam. The mirrors may be one or more plane mirrors, or may be formed in a polyhedral shape. Alternatively, the scanning unit 40 may include a driving device such as a motor, and the measurement light may be scanned by moving the light projecting optical system 14 in the XY directions.

The light source 112 includes light emitting elements 123, and unlike the first embodiment, the light emitting elements 123 are arranged in three rows in the Y direction (FIG. 12). The configuration of the light receiving sensor 22 is the same as in the first embodiment.

Control by the control section 30 (timing control section 34) during measurement is performed as follows. The control unit 30 causes all the light emitting elements 123 of the light source 12 to emit light at regular intervals. In parallel, the control unit 30 controls the scanning unit 40 to change the direction of the scanning light to the +Y direction each time the light emitting element 123 emits light. In this manner, the control unit 30 causes the light receiving range of the light receiving sensor 22 to scan one row (one element) at a time in the +Y direction, similarly to FIG. 5B, and performs image formation similar to that of the first embodiment. .

By performing such processing, it is possible to generate an image with high resolution, as in Measurement Example 1. FIG. In addition, the light source 12 can have a simple configuration with a small number of light emitting elements.

The light source 112 may include only one row of the light emitting elements 123 in the Y direction. In this case, the light-emitting element 123 should have a Y-direction length necessary for the light-receiving elements 222 to receive light for three columns.

In the light source 12, the light emitting elements 123 may be arranged in three rows in the X direction and scanned in the X direction. In this case, the light receiving sensor 22 performs scanning and measurement similar to the measurement example 2.

=== Variation ===
In each of the above-described embodiments, the amount of movement of the light receiving range during scanning was the amount of one element, but the light receiving range may be moved by the size of one or more elements. That is, for example, when the light receiving range is three columns (three rows) of elements, the light receiving range may be moved by two columns (two rows) each time the light source 12 emits light. That is, the amount of movement of the light-receiving range can be appropriately set while satisfying the condition that it is smaller than the length of the light-receiving range in the scanning direction.

The arrangement of the light emitting elements 123 or the light receiving elements 222 in the light source 12 or the light receiving sensor 22 may be a one-dimensional arrangement instead of a two-dimensional arrangement.

＝＝＝Summary＝＝＝
The measurement devices 1 and 100 include a light emitting element 123 that emits light toward the object 90, a plurality of light receiving elements 222 that receive light reflected by the object 90 and are arranged in a first direction, and a control unit. 30; The control unit 30 selects a light receiving element within a light receiving range (corresponding to a first light receiving area) including a predetermined number of two or more light receiving elements 222 arranged in a first direction (for example, the Y direction) among the plurality of light receiving elements 222. a first light receiving process (S3) for causing the light receiving elements 222 to receive light; a first movement process (S7) for moving the light receiving range in the first direction by a first number smaller than a predetermined number; and a second light receiving process (SS3) for causing the light receiving elements 222 in the first light receiving area after the moving process to receive light.

With the above configuration, it is possible to suppress a decrease in resolution that occurs when scanning is performed in units of pixels, and to generate an image with high resolution. That is, it is possible to realize the measuring devices 1 and 100 with high measurement performance. The energy density can be increased by partially illuminating and scanning instead of illuminating the entire field of view of the light source 12 at once.

The light receiving range includes a group of light receiving elements 222 corresponding to one pixel of the image acquired by the control unit 30 in each of the first light receiving process and the second light receiving process.

In the above configuration, scanning and measurement can be performed using a SPAD as the light receiving element 222 . Also, an image with high resolution can be generated. More specifically, when a plurality of pixels are grouped into one pixel, it is possible to expand the dynamic range and reduce the number of times of integration for distance measurement, compared to the case where one light receiving element 222 is one pixel. Become. Therefore, the measuring devices 1 and 100 with high measurement performance can be realized.

The control unit 30 performs the first light receiving process, the moving process, and the second light receiving process at regular image intervals in the plurality of images acquired by the light received by the plurality of light receiving elements 222 .

With the above configuration, it is possible to switch between the measurement method using the first light reception processing, the movement processing, and the second light reception processing, and the measurement method in which scanning is performed in units of pixels, for example, for each image. By executing processing for high-resolution image generation at regular image intervals, the time required to generate a plurality of images can be shortened, and the processing can be executed quickly. Also, high-resolution image generation can be suppressed to the necessary quantity.

The plurality of light receiving elements 222 are also arranged in a second direction (for example, the X direction) intersecting the first direction.

With the above configuration, it is possible to acquire a two-dimensional image with high resolution.

After acquiring an image by executing the first light receiving process, the moving process, and the second light receiving process, the control unit 30 selects two or more of the plurality of light receiving elements 222 that are arranged in the second direction in a prescribed number of light receiving elements. a third light receiving process of causing the light receiving elements 222 in the second light receiving area including 222 to receive light; a second moving process of moving the second light receiving area in the second direction by a second number smaller than the specified number; Another image is acquired by executing a fourth light receiving process for causing the light receiving elements 222 in the second light receiving area after the second movement process to receive light among the plurality of light receiving elements 222 .

With the above configuration, for example, measurement by scanning in the Y direction (measurement example 1) and measurement by scanning in the X direction (measurement example 2) can be alternately performed. By changing the scanning direction, the light-receiving elements 222 other than the peripheral portion of the light-receiving sensor 22 can receive the light evenly, and a high-resolution image can be generated.

In a section 22B (corresponding to a first region) that is part of an inclusion region that includes a plurality of light receiving elements 222, the control unit 30 performs a first light receiving process and moves the light receiving range in the first direction by a predetermined number. A third moving process of moving and a second light receiving process are executed, and in a section 22A (corresponding to a second area) obtained by excluding the first area from the inclusion area, the first light receiving process and the first moving process are performed. , and a second light receiving process.

With the above configuration, for example, the process of Measurement Example 3 can be executed. In the light-receiving sensor 22, the image can be quickly generated by performing the processing according to the measurement examples 1, 2, etc. only for the section requiring a high-resolution image, and performing the processing different from the scanning method for the other sections. .

Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above embodiments and includes various modifications. In addition, the above-described embodiment describes the configuration in detail in order to explain the present invention in an easy-to-understand manner, and is not necessarily limited to those having all the described configurations. Moreover, it is possible to add, delete, or replace a part of the configuration of the above embodiment with another configuration.

1, 100 Measuring device 10 Irradiating unit 12 Light source 14 Light projecting optical system 20 Light receiving unit 22 Light receiving sensor 222 Light receiving element 24 Light receiving optical system 90 Object

Claims (8)

a light-emitting element that emits light toward an object;
a plurality of light receiving elements arranged in a first direction for receiving light reflected by the object;
a control unit;
The control unit
a first light-receiving process for causing a light-receiving element within a first light-receiving region including a predetermined number of two or more light-receiving elements arranged in the first direction among the plurality of light-receiving elements to receive light;
a first moving process of moving the light receiving region in the first direction by a first number smaller than the predetermined number;
and a second light-receiving process for causing a light-receiving element in the first light-receiving region after the first movement process to receive light among the plurality of light-receiving elements. 2. The measuring device according to claim 1, wherein said first light receiving area includes a light receiving element group corresponding to one pixel of an image acquired by said control unit in each of said first light receiving process and said second light receiving process. The control unit
3. The measurement according to claim 1 or 2, wherein the first light receiving process, the moving process, and the second light receiving process are performed at regular image intervals in a plurality of images obtained by light received by the plurality of light receiving elements. Device. 3. The measuring device according to claim 1, wherein said plurality of light receiving elements are also arranged in a second direction intersecting said first direction. The control unit
After acquiring an image by executing the first light receiving process, the moving process, and the second light receiving process,
a third light-receiving process for causing light-receiving elements in a second light-receiving region including two or more predetermined number of light-receiving elements arranged in the second direction among the plurality of light-receiving elements to receive light;
a second moving process of moving the second light receiving area in the second direction by a second number less than the prescribed number;
a fourth light-receiving process for causing the light-receiving elements in the second light-receiving region after the second movement process to receive light among the plurality of light-receiving elements;
5. The measurement device of claim 4, wherein the further image is obtained by performing a. The control unit
In a first region that is part of an inclusion region that includes the plurality of light receiving elements,
the first light receiving process;
a third moving process of moving the first light receiving area in the first direction by the predetermined number;
and executing the second light receiving process,
In a second region obtained by excluding the first region from the inclusion region,
The measuring device according to any one of claims 1 to 5, which executes the first light receiving process, the first moving process, and the second light receiving process. 7. The measuring device according to any one of claims 1 to 6, wherein the predetermined number is three. 8. The measuring device according to any one of claims 1 to 7, wherein said first number is one.

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