JP2023086272A - Sensor, control method therefor, position adjustment method, robot, method of manufacturing articles using robot, control program, and recording medium - Google Patents

Abstract

To facilitate alignment of a detection unit.SOLUTION: A sensor unit comprising a structure for acquiring force information is provided, the structure being provided with a detection unit for detecting displacement of the structure and reference parts serving as reference positions of the detection unit on the structure.SELECTED DRAWING: Figure 4

Description

The present invention relates to sensors.

In recent years, among robots that have links that operate by joints, robots that can perform control based on force information by arranging sensors on the links to obtain information on the forces applied to the links have attracted attention. there is In particular, by arranging a torque sensor that can acquire torque information as force information, it is possible to control the force generated in the link of the robot and the load or force applied to the part by the end effector arranged at the tip of the robot. has become easier. In Patent Document 1, an output shaft of a speed reducer fixed to a fixed member is connected to a support member, and the output member is coupled to the support member via an elastic body. An articulation device is disclosed that senses the angle of rotation and senses torque between a support member and an output member.

JP 2020-69625 A

The technique described in Patent Document 1 has a detection unit for detecting torque. must be performed accurately in the structure of the torque sensor. However, alignment of the detection portion and the detection target portion in the structure of the torque sensor is a complicated task and takes time.

SUMMARY OF THE INVENTION An object of the present invention is to address such problems, and to facilitate alignment of detection units.

In order to solve the above-described problems, the present invention provides a sensor having a structure for acquiring force information, wherein the structure includes a detection unit for detecting displacement of the structure; and a reference portion that serves as a reference for the position of the detection unit in the structure.

ADVANTAGE OF THE INVENTION According to this invention, position alignment with a detection part and a to-be-detected part can be easily performed.

It is a figure showing a schematic structure of robot system 1000 in an embodiment. 1 is a control block diagram of a robot system 1000 in an embodiment; FIG. It is the schematic of the drive device 231 in embodiment. 1 is a schematic diagram of a structure 102 in an embodiment; FIG. 1 is a cross-sectional view of structure 102 in an embodiment; FIG. 1 is a top view of structure 102 in an embodiment; FIG. It is the schematic of the position adjustment means in embodiment. 1 is a schematic diagram of a substrate 104 in an embodiment; FIG. 1 is a top view of structure 102 in an embodiment; FIG. It is the schematic of the position adjustment means in embodiment. It is a flow chart in an embodiment. 1 is a schematic diagram of a structure 102 in an embodiment; FIG.

DETAILED DESCRIPTION OF THE INVENTION Embodiments for carrying out the present invention will now be described with reference to the embodiments shown in the accompanying drawings. It should be noted that the embodiment shown below is merely an example, and, for example, details of the configuration can be changed as appropriate by those skilled in the art without departing from the scope of the present invention. Further, the numerical values taken up in this embodiment are reference numerical values and do not limit the present invention. In the drawings below, arrows X, Y, and Z indicate the coordinate system of the entire robot system. In general, the XYZ three-dimensional coordinate system represents the world coordinate system of the entire installation environment. In addition, there are cases where the local coordinate system is appropriately used for robot hands, fingers, joints, etc., depending on convenience of control.

(First embodiment)
FIG. 1 shows a schematic configuration of a robot system 1000 of this embodiment. In FIG. 1, a robot system 1000 includes a robot arm body 200 configured as an articulated robot, a control device 300 that controls the robot arm body 200, and an external input device 400.

The robot arm main body 200 of this embodiment is composed of 6-axis articulated joints. The robot arm body 200 is composed of a base 210 and six links 201-206. The links 201 to 206 are rotationally driven by six driving devices 231 to 236 that rotationally drive the joint axes A1 to A6 about the arrows shown. Each of the driving devices 231 to 236 has a motor and a reducer for reducing the output of the motor. In this embodiment, a strain wave gear reducer is used. That is, the motors provided in the driving devices 231 to 236 serve as driving sources for generating driving force for relatively displacing the links 201 to 206 to which the joints are connected. Further, each motor incorporates input shaft encoders 211 to 216 for detecting the rotation angle of the motor itself.

Torque sensors 221 to 226, which are sensors for detecting force information, are respectively provided between the output ends of the driving devices 231 to 236 and the links 201 to 206 rotating together with the output ends. The torque sensors 221 to 226 are provided with structures to be described later and optical encoders for detecting relative movement amounts thereof. When the joints of the robot arm body 200 are driven, the optical encoder detects the amount of relative movement of the structures of the torque sensors 221 to 226 accompanying the relative displacement of the links of the robot arm body 200 . Output shaft encoders 241-246 (FIG. 2) are also provided for directly detecting the output ends of the drive devices 231-236 and the rotational positions of the links 201-206 that rotate with the output ends, respectively. The output shaft encoders 241 to 246 are provided with optical encoders for detecting structures and their relative movement amounts, which will be described later.

As shown in the figure, a link 201 of a robot arm body 200 is connected to a base 210 by a driving device 231 shown in the figure using a bearing (not shown) so that it can also rotate with a torque sensor 221 . It is assumed that the driving device 231 has a movable range in the arrow direction from the initial posture. The link 202 of the robot arm body 200 is connected to the link 201 by a driving device 232 shown in the figure using bearings (not shown) so that the torque sensor 222 can also rotate. It is assumed that the driving device 232 has a movable range in the arrow direction from the initial posture.

The link 203 of the robot arm body 200 is connected to the link 202 by a driving device 233 shown in the figure using bearings (not shown) so that the torque sensor 223 can also rotate. It is assumed that the driving device 233 has a movable range in the arrow direction from the initial posture. The link 204 of the robot arm body 200 is connected to the link 203 by a driving device 234 shown in the figure using bearings (not shown) so that the torque sensor 224 can also rotate. It is assumed that the driving device 234 has a movable range in the arrow direction from the initial posture.

The link 205 of the robot arm body 200 is connected to the link 204 by a driving device 235 shown in the figure using bearings (not shown) so that the torque sensor 225 can also rotate. It is assumed that the driving device 235 has a movable range in the arrow direction from the initial posture. The link 206 of the robot arm body 200 is connected to the link 205 by a driving device 236 shown in the figure using bearings (not shown) so that the torque sensor 226 can also rotate. It is assumed that the driving device 235 has a movable range in the arrow direction from the initial posture.

An end effector body such as an (electric) hand or a (pneumatically driven) air hand for performing assembly work or movement work in a production line is connected to the tip (predetermined portion) of the link 206 of the robot arm body 200. shall be This end effector body can be attached to the link 206 by (semi-)fixing means (not shown) such as screwing, or can be attached by detachable means (not shown) such as latching (ratchet). shall be In particular, when the end effector body is detachable, there is also a method of controlling the robot arm body 200 and detaching or replacing the end effector body arranged at the supply position (not shown) by the operation of the robot arm body 200 itself. Conceivable.

Here, the tip of the robot arm main body 200 is the link 206 and/or the end effector main body in this embodiment. When the end effector body grips an object, the end effector body and the gripped object (for example, parts, tools, etc.) are called the end of the robot arm body 200 . In other words, the link 206 and/or the end effector body is referred to as a hand, regardless of whether the end effector body is gripping or not gripping an object.

The external input device 400 is provided with, for example, an operation unit including operation keys for moving the posture (position and angle) of the joints of the robot arm body 200 or the hand of the robot arm body 200 . When some operation is performed on the operation unit of the external input device 400, the control device 300 transmits a signal to the drive devices 231 to 236 of each joint in accordance with the operation of the external input device 400, thereby causing the robot arm body 200 to operate. Control. At that time, each part of the robot arm main body 200 is controlled by the control device 300 executing a robot control program including a control program described later.

With the above configuration, the link 206 and/or the end effector body can be moved to any position by the robot arm body 200 to perform desired work. For example, by using a predetermined work and another work as materials and performing a process of assembling the predetermined work and the other work, an assembled work can be manufactured as a product. As described above, the article can be manufactured by the robot arm body 200 . In this embodiment, an example of manufacturing an article by assembling workpieces by the robot arm main body 200 has been described, but the present invention is not limited to this. For example, the robot arm body 200 may be provided with a tool such as a cutting tool or a polishing tool to process a work to manufacture an article.

FIG. 2 is a block diagram showing the detailed configuration of the control system of the robot system 1000 of FIG. The control device 300 is configured by a computer and includes a CPU (Central Processing Unit) 301 as a processor. It also has a ROM (Read Only Memory) 302, a RAM (Random Access Memory) 303, an HDD (Hard Disc Drive) 304, and a recording disc drive 305 as storage units. It also has interfaces 306, 307, 308, 309, 310, and 311 for communicating with each device. The CPU 301, ROM 302, RAM 303, and interfaces 306 to 309 are connected via a bus 311 so as to be communicable with each other.

Among them, the RAM 303 is used for temporary storage of data such as teaching points and control commands by the operation of the external input device 400 . The ROM 302 stores a basic program 330 such as BIOS for causing the CPU 301 to execute various arithmetic processes. The CPU 301 executes various arithmetic processes based on control programs recorded (stored) in the HDD 304 . The HDD 304 is a storage unit that stores various data and the like that are results of arithmetic processing by the CPU 301 . The recording disk drive 305 can read various data, control programs, and the like recorded on the recording disk 331 . Furthermore, the interfaces 307 and 308 are connected to a monitor 411 on which various images are displayed and an external storage device 412 such as a rewritable non-volatile memory or an external HDD.

The external input device 400 can be, for example, an operation device such as a teaching pendant (TP), but may be another computer device (PC or server) capable of editing a robot program. The external input device 400 can be connected to the control device 300 via wired or wireless communication connection means, and has user interface functions such as robot operation and status display. The target joint angle of each joint input by the external input device 400 is output to the CPU 301 via the interface 306 and the bus 311 .

The CPU 301 receives teaching point data input from the external input device 400, for example, from the interface 306. FIG. Further, the trajectory of each axis of the robot arm body 200 can be generated based on the teaching point data input from the external input device 400, and transmitted to the drive devices 231 to 236 via the interface 309 using the arm motor driver 230. can. The CPU 301 outputs drive command data indicating the control amount of the rotation angle of the motors of the drive devices 231 to 236 to the arm motor driver 230 via the bus 311 and the interface 309 at predetermined intervals.

The arm motor driver 230 calculates the amount of current output to the motors of the driving devices 231 to 236 based on the drive command received from the CPU 301, supplies the current to each motor, and controls the joint angle of each joint. I do. It also outputs detection signals from input shaft encoders 211 to 216, torque sensors 221 to 226, and output shaft encoders 241 to 246 to CPU 301 via interface 309 and bus 311. FIG. The CPU 301 performs feedback control of the motors of the driving devices 231 to 236 so that the current angle values detected by the input shaft encoders 211 to 216 and/or the output shaft encoders 241 to 246 through the arm motor driver 230 become the target angles. Execute. Similarly, feedback control of each motor is performed so that the current torque values of the joints detected by the torque sensors 221 to 226 become the target torque. In this embodiment, one arm motor driver 230 is provided, but each of the driving devices 231 to 236 may be provided with an arm motor driver.

Further, by returning the outputs of the torque sensors 221 to 226 described above to the control device 300 and feeding them back to drive the driving devices 231 to 236, the torque applied to the links 201 to 206 during driving can be controlled. Furthermore, the force generated at the link 206 of the robot arm body 200 can be obtained by calculation from the values of the torque sensors 221 to 226, and the load applied to the parts to be assembled can be feedback-controlled.

The controller 300 may also be connected to a hand motor (not shown) via an interface and a hand motor driver when a robot hand body is used as an end effector body (not shown). The hand motor driver calculates the amount of current to be output to the hand motor based on the drive command received from the CPU 301, supplies the current to the hand motor, and controls the speed of the hand motor. It also outputs a pulse signal from the encoder of the hand motor to the CPU 301 via the interface and bus. That is, the CPU 301 performs feedback control of the hand motor so that the current value of the speed of the hand motor detected by the encoder becomes the target speed via the hand motor driver.

FIG. 3 is a schematic diagram of the driving device 231 in this embodiment. To simplify the explanation, the driving device 231 provided at the joint connecting the base 210 and the link 201 will be described as an example, but other joints are assumed to have the same connection relationship. As shown in FIG. 3 , the driving device 231 includes a fixed member 10 provided with a motor 20 , a speed reducer 30 and a cover 50 . It is assumed that the driving device 231 is provided on the base 210 via the fixing member 10 . A rotating shaft 20a of the motor 20 is connected to a wave generator 31, which is a component of the reduction gear 30, and when the motor 20 rotates, the wave generator 31 also rotates. Then, the flex spline 32 and the circular spline 33, which are components of the speed reducer 30, act as a speed reducer mechanism to reduce the speed by the speed reduction ratio of the speed reducer 30, and the output shaft 34 of the speed reducer 30 rotates. Rotation of the reducer output shaft 34 rotates the drive flange 40 via the torque sensor 221 . A link 201 is provided on the drive flange 40 , and the link 201 rotates as the drive flange 40 rotates.

As drive flange 40 and link 201 rotate, torque is applied to torque sensor 221 and the structure of torque sensor 221 deforms. By detecting this deformation with an optical encoder, which will be described later, the torque applied to the link 201 is acquired using an equation for converting the deformation into torque. Also, the output shaft encoder 241 detects the relative displacement between the cover 50 and the torque sensor 221 rotating together with the driving flange 40 and the link 201 . Since the cover 50 is fixed to the base 210 , the relative displacement between the base 210 and the link 201 can be directly detected by the output shaft encoder 241 . Also, the cover 50 is provided so as to be positionally adjustable with respect to the fixed member 10 .

FIG. 4 is an external view of the structure 102 of the torque sensor 221 in this embodiment. As shown in FIG. 4, the structural body 102 has a shape in which two disk portions 102a and 102b are connected by a plurality of columnar elastic bodies 102c. Four elastic bodies 102c are provided at intervals of 90° with respect to the disk portions 102a and 102b. The disk portion 102a is provided with two attachment portions 103 at an interval of 180°, and a substrate 104 is fixed to each of the attachment portions 103. As shown in FIG. The mounting portion 103 and the substrate 104 are fixed by a set of two bolts 109a, and the fixing bolt holes (not shown) are provided with a margin for adjusting the position of the substrate 104. . The mounting portion 103 is fixed to the disk portion 102a. The mounting portion 103 and the disk portion 102a are fixed by a set of two bolts 109b, and the fixing bolt holes (not shown) are provided with a margin to adjust the position of the mounting portion 103. It is In the present embodiment, the disc portion 102a may be called the first portion, the disc portion 102b may be called the second portion, and the elastic body 102c may be called the third portion.

A first detection unit 105 is arranged on the surface of the substrate 104. The first detection unit 105 faces the first detection target unit 101 (FIG. 5) provided on the cover 50, and performs the first detection. The portion 105 and the first detected portion 101 are used as an output shaft encoder 241 . Further, a linear portion 110 is provided on the disk portion 102a near each of the substrates 104, and is used as a reference portion when positioning each detection portion.

FIG. 5 is a cross-sectional view of the structure 102 in this embodiment. FIG. 5 is a cross-sectional view taken along the dashed line AA in FIG. 4 in the direction of the arrow; For convenience of explanation, cross sections of the cover 50 and the first detected portion 101 are also shown. As shown in FIG. 5, the disk portion 102b is provided with a mount 106, and the second detected portion 107 is fixed on the mount 106. As shown in FIG. An adhesive is used to fix the mounting base 106 , and the position of the mounting base 106 is adjusted before the adhesive hardens, thereby positioning the second detected portion 107 . A second detection unit 108 is arranged on the back surface of the substrate 104, and the relative displacement between the disc portions 102a and 102b is detected by the second detection target portion 107 and the second detection portion 108. A deformation amount is acquired and used as the torque sensor 221 . Note that in this embodiment, the mounting base 106 may be referred to as the first member, and the mounting portion 103 may be referred to as the second member. A set of the first detection section 105 and the first detected section 101 constitutes one detection unit, and a set of the second detection section 108 and the second detected section 107 constitutes one detection unit.

The second detected portion 107 is arranged on the substrate 104 so as to have a front/back relationship with the first detection portion 105 . By arranging the first detection unit 105 on the front surface of the substrate 104 and the second detection unit 108 on the back surface, it is possible to share the power supply and wiring to the substrate 104, thereby miniaturizing the structure 102. realizable. In this embodiment, the first detection section 105 and the second detection section 108 are detection heads, and the first detection section 101 and the second detection section 107 are scales. The first detected part 101 is an annular scale arranged over the entire circumference of the joint in order to detect the angle of the link 201 . The second detected portion 107 uses a linear scale to detect the displacement of the structure 102 whose displacement amount is very small.

Each scale is a reflective scale and has a grid array optical pattern. The optical pattern is made of Al, Cr, for example. Each detection head is a reflective detection head and has a light emitting element and a light receiving element. Each detection head irradiates each scale with light from the light emitting element, and the light receiving element receives the light reflected from the optical pattern of each scale. Note that the positional relationship between the detection head and the scale may be reversed.

Here, when torque acts on the structure 102 and the disk portion 102a and the disk portion 102b are relatively displaced, the relative positions of the second detecting portion 108 and the second detected portion 107 change. And the irradiation position of the light irradiated to the 2nd detected part 107 moves on a scale. At this time, when the light irradiated to the scale passes through the pattern provided on the scale, the amount of light detected by the light receiving element of the second detection unit 108 changes. The amount of relative movement between the disk portion 102a and the disk portion 102b is detected from the change in the amount of light. The calculation circuit of the substrate 104 or the control device 300 calculates (acquires) a torque detection value by using a sensitivity coefficient for converting the relative movement amount detected by the detection head into torque acting on the torque sensor 221 . Similarly, the relative displacement of the link 201 is detected by the first detecting section 105 and the first detected section 101 and transmitted to the control device 300 via the substrate 104 .

Depending on the method of calculation, this scale pattern can be arranged not only with one line but also with a plurality of shading patterns (for example, with different arrangement phases). The pitch of the scale pattern is determined according to the resolution required for position detection.In recent years, with the increasing precision and resolution of encoders, pitches on the order of μm are also available. As described above, the torque sensors 221 to 226 can detect the torque around the axis at the joints in which they are installed based on the detection results of the encoders.

FIG. 6 is a schematic diagram for explaining a method for adjusting the position of the second detected portion 107 in this embodiment. As shown in FIG. 6, positioning of the second detected portion 107 with respect to the structure 102 is performed using a reference line 112 present in the second detected portion 107 and a linear portion 110 provided on the disk portion 102a. The position of the second detected portion 107 is adjusted by changing the relative position between the mounting base 106 and the disk portion 102a while the second detected portion 107 is fixed to the mounting base 106. FIG. When performing the position adjustment, the reference line 112 of the second detected portion 107 and the straight portion 110 are substantially parallel and have a predetermined gap. At this time, the reference line 112 of the second detected portion 107 may use the detection pattern formed on the second detected portion 107 .

FIG. 7 is a schematic diagram for explaining the position adjusting means of the second detected portion 107 in this embodiment. As shown in FIG. 7, when adjusting the position of the second detected part 107, the structural body 102 is fixed to a stage 211 that can be linearly moved and/or rotated. The stage 211 can be moved with linear movement and/or rotation relative to the holding jig 207 . The mounting base 106 to which the second detected portion 107 is fixed is held by the holding jig 207 , and the stage 211 is moved to enable position adjustment between the structure 102 and the second detected portion 107 . When performing the position adjustment, the optical microscope 209 is used to enlarge and confirm the straight portion 110 and the reference line 112 of the second detected portion 107 . This allows accurate positioning. By adjusting the relative positional relationship between the linear portion 110 and the reference line 112 of the second detected portion 107 using the stage 211 before the adhesive that fixes the mount 106 hardens, the second detected portion 107 positioning. This makes it possible to position and provide the second detected portion 107 at a predetermined position and in a predetermined posture with respect to the structure 102 .

FIG. 8 is a schematic diagram for explaining a positioning method of the first detection unit 105 and the second detection unit 108 with respect to the substrate 104 in this embodiment. As shown in FIG. 8, the substrate 104 is provided with predetermined linear portions 114 on the front and back sides thereof as reference portions for the relative positions of the detection portions on the substrate 104 . When fixing the first detection unit 105 to the substrate 104, the reference line 111 of the first detection unit 105 and the linear portion 114 of the substrate 104 on the upper side of the paper surface are substantially parallel to each other and are positioned with a predetermined gap. Similarly, when fixing the second detection unit 108 to the substrate 104, the reference line 115 (not shown in FIG. 8) of the second detection unit 108 and the linear portion 114 on the upper side of the paper surface of the substrate 104 are substantially parallel to each other with a predetermined gap. positioned to have Accordingly, the first detection unit 105 and the second detection unit 108 can be arranged so as to have a front-back relationship after position adjustment with respect to the substrate 104 . At this time, the wiring pattern formed on the second detection unit 108 may be used as the reference line 115 of the second detection unit 108 . As described above, the first detection unit 105 and the second detection unit 108 can be positioned and provided at predetermined positions and in predetermined postures with respect to the substrate 104 .

FIG. 9 is a schematic diagram for explaining a method of adjusting the positions of the first detection section 105 and the second detection section 108 in this embodiment. As shown in FIG. 8, positioning of the first detection unit 105 is performed using a reference line 111 of the first detection unit 105 and a linear portion 110 provided on the structure 102 . The second detection unit 108 is provided on the substrate 104 after position adjustment has been performed in advance so that the substrate 104 has a front-back relationship with respect to the first detection unit 105 . Therefore, by adjusting the position of the first detection section 105, the position of the second detection section 108 can also be adjusted. When the mounting portion 103 to which the substrate 104 is fixed is fixed to the disk portion 102a, the first detection portion 105 is positioned such that the reference line 111 and the linear portion 110 are substantially parallel and have a predetermined gap. At this time, the wiring pattern formed on the first detection unit 105 may be used as the reference line 111 of the first detection unit 105 . Further, when positioning, the object to be moved may be the substrate 104 instead of the mounting portion 103 .

FIG. 10 is a diagram for explaining the position adjusting means of the first detection section 105 and the second detection section 108 in this embodiment. As shown in FIG. 10 , when adjusting the positions of the first detection unit 105 and the second detection unit 108 , the structure 102 is fixed to a stage 211 that can move linearly and/or rotate. The stage 211 can be moved with linear movement and/or rotation relative to the holding jig 208 . Therefore, by holding the substrate 104 provided with the first detection unit 105 and the second detection unit 108 and the attachment unit 103 provided with the substrate 104 with the holding jig 208, the structure 102 and the first detection unit are held. 105 and the second detection unit 108 can be adjusted. In this embodiment, the mounting portion 103 is held by the holding jig 208, but the substrate 104 may be held. When adjusting the position, the optical microscope 209 is used to magnify the linear portion 110 and the reference line 115 of the first detection portion 105 for confirmation. This allows accurate positioning. The relative positional relationship between the linear portion 110 and the reference line 112 of the second detected portion 107 is adjusted by the stage 211 while adjusting the position of the attached portion 103 by the bolt 109b and the bolt hole, thereby obtaining the second detected portion 107. Positioning of the portion 107 is performed. This makes it possible to position and provide the second detected portion 107 at a predetermined position and in a predetermined posture with respect to the structure 102 . Although the reference line 112 is used in this embodiment, the linear portion 114 provided on the substrate 104 may be used.

FIG. 11 is a flow chart showing the position adjustment procedure of the second detected portion 107, the first detecting portion 105, and the second detecting portion 108 in this embodiment. As shown in FIG. 11, first, in S101, the structure 102 is fixed to the stage 211. As shown in FIG. Next, in S102, the mounting base 106 provided with the second detected portion 107 is temporarily arranged on the elastic body 102 with an adhesive before hardening. Next, in S<b>103 , the mounting base 106 is held by the holding jig 207 . Next, in S104, the reference line 112 of the second detected portion 107 and the linear portion 110 provided on the disk portion 102a are adjusted and fixed before the adhesive is cured so that they are substantially parallel and have a predetermined gap. do. Adjustment of the 2nd detected part 107 is complete|finished by the above.

Next, in S105, as described with reference to FIG. 8, the first detection unit 105 and the second detection unit 108 are positioned on the substrate 104 in a predetermined position, in a predetermined posture, and on the front and back sides with reference to the linear portion 114 of the substrate 104. Adjust and fix.

Next, in S<b>106 , the substrate 104 provided with the first detection section 105 and the second detection section 108 is fixed to the mounting section 103 . Next, in S<b>107 , the substrate 104 and the mounting portion 103 are held by the holding jig 208 . Next, in S108, using the bolt 109b and the bolt hole for attaching the mounting portion 103, the reference line 111 of the first detection portion 105 and the linear portion 110 provided on the disk portion 102a are substantially parallel and a predetermined gap is formed. Position and fix so as to have In S108, the linear portion 114 of the substrate 104 may be used. Thus, the adjustment between the first detection unit 105 and the second detection unit 108 is completed.

Then, in S109, after the positional adjustment of the detection section and the detection target section provided in the structure 102 is completed, the structure 102 is removed from the stage 211, and the detection section and the detection target section adjustment work provided in the structure 102 is completed. do.

Then, in S110, when the structure 102 is attached to the output shaft 34, the first detecting portion 105 is arranged to face the first detected portion 101 of the cover 50 in a substantially parallel relationship. Since the position of the first detection unit 105 has already been adjusted and arranged, by adjusting the cover 50 with the first detection unit 105 as a reference, the first detection unit 105 and the first detected unit 101 are arranged substantially parallel to each other. They can be arranged facing each other in a relationship.

As described above, according to the present embodiment, the structure 102 of the torque sensor is provided with the linear portion 110 that serves as the reference portion for the first detection portion 105, the second detection portion 108, and the second detection portion 107 arranged in the structure 102. are provided. Accordingly, since the structure 102 is provided with the reference portion, the position can be adjusted using the structure itself as a reference without newly providing a reference part or the like. Therefore, it is possible to easily adjust the positions of the first detecting section 105, the second detecting section 108, and the second detected section 107 arranged in the structure 102. FIG. Further, when fixing the first detection unit 105 and the second detection unit 108 to the substrate 104, the position is adjusted and fixed on the basis of the linear portion 114 having the same shape as the linear portion 110 of the structure 102. . As a result, since the first detection unit 105 and the second detection unit 108 provided in the structure 102 are based on a straight line portion having approximately the same shape, it is possible to improve the accuracy of the relative positional relationship between the two. .

Further, by adjusting the positions of the substrate 104 and the mounting portion 103, the positions of the first detection portion 105 and the second detection portion 108 can be adjusted, and the efficiency of the position adjustment work can be improved. Furthermore, since the position of the second detected portion 107 is adjusted first, the second detected portion 107 cannot be seen by the first detection portion 105, and the position of the second detected portion 107 cannot be adjusted. You can also prevent it from slipping. In this embodiment, the linear portion 110 of the structure 102 is used as the reference portion, but the shape of which the optical microscope 209 can detect the edge is not limited to the linear portion.

(Second embodiment)
Next, a second embodiment will be described in detail. In the following, hardware and control system configurations that are different from those of the first embodiment will be illustrated and explained. Also, the same parts as those of the first embodiment can have the same configurations and functions as those described above, and detailed descriptions thereof will be omitted.

FIG. 12 is an enlarged view of the linear portion 110 and its vicinity in this embodiment. FIG. 12(a) is a perspective view, and FIG. 12(b) is a top view. FIG. 12(c) is a cross-sectional view taken in the direction of the arrow from the dashed line BB in FIG. 12(a). FIG. 12(a) is a perspective view of the external appearance of a detection device relating to Example 2 of the present invention. As shown in FIGS. 12A, 12B, and 12C, in this embodiment, the disk portion 102a is provided with the linear portion 110, and the disk portion 102b is provided with the linear portion 113. As shown in FIGS. Further, the linear portion 110 is formed by providing a concave portion in the disk portion 102a so that the linear portion 110 and the linear portion 113 do not overlap when the optical microscope 209 is used for alignment. As described above, the straight portion 110 and the straight portion 113 are provided at different heights and are not overlapped in the predetermined direction (Z direction). Note that in this embodiment, the linear portion 110 may be referred to as a first reference portion, and the linear portion 113 may be referred to as a second reference portion.

As shown in FIG. 12(c), the linear portion 110 is approximately the reference line 111 of the first detection portion 105 when positioning the substrate 104 on which the first detection portion 105 and the second detection portion 108 are provided. placed at the same height. Further, the linear portion 113 is provided at substantially the same height as the reference line 112 of the second detected portion 107 when positioning the mount 106 on which the second detected portion 107 is provided. When positioning the first detecting portion 105 and the second detecting portion 108 while observing from an optical microscope 209 (not shown in FIG. 12), the linear portion 110 is used to position the second detecting portion 107. When positioning the straight portion 113 is used.

As described above, according to the present embodiment, the difficulty in observing a straight portion due to the difference in the depth of field of the optical microscope 209 (not shown in FIG. 12) is resolved, and the detection portion and the portion to be detected provided in the structure 102 Positioning work can be made easier. In addition, in a predetermined structure, the present embodiment and modifications may be combined with the above-described first embodiment and modifications.

(Other embodiments)
The position adjustment in the embodiment described above is specifically performed by an operator. However, it may be executed by a control device capable of controlling the optical microscope 209 and the stage 211 . Therefore, it is also possible to read and execute a recording medium recording a software program capable of executing the functions described above. In this case, the program itself read from the recording medium implements the functions of the above-described embodiments, and the program itself and the recording medium recording the program constitute the present invention.

In each embodiment, the computer-readable recording medium is each ROM, each RAM, or each flash ROM, and the case where the program is stored in the ROM, RAM, or flash ROM has been described. However, the present invention is not limited to such a form. A program for carrying out the present invention may be recorded on any recording medium as long as it is a computer-readable recording medium. For example, an HDD, an external storage device, a recording disk, or the like may be used as a recording medium for supplying the control program.

Further, in the various embodiments described above, the robot arm main body 200 uses a multi-joint robot arm having a plurality of joints, but the number of joints is not limited to this. Although a vertical multi-axis configuration is shown as the type of robot arm, the configuration equivalent to the above can also be implemented for different types of joints such as horizontal multi-joint type, parallel link type, and orthogonal robot. In addition, the present invention may be applied to an artificial hand or artificial leg equipped with a force detecting sensor such as a torque sensor, or a powered suit (power assist suit).

Further, in the various embodiments described above, instead of the robot arm main body 200, based on the information in the storage device provided in the control device, the operation of stretching, bending, stretching, vertical movement, horizontal movement, turning, or a combination of these operations is automatically performed. It is applicable to machines that can perform

The present invention is not limited to the above-described embodiments, and many modifications are possible within the technical concept of the present invention. Moreover, the effects described in the embodiments of the present invention are merely enumerations of the most suitable effects resulting from the present invention, and the effects of the present invention are not limited to those described in the embodiments of the present invention.

REFERENCE SIGNS LIST 10 fixing member 20 motor 20a rotating shaft 30 reduction gear 31 wave generator 32 flex spline 33 circular spline 34 output shaft 40 drive flange 50 cover 101 first detected part 102 structure 103 attachment part 104 substrate 105 first detection part 106 attachment Table 107 Second detected part 108 Second detection part 109a, 109b Bolt 110, 113, 114 Linear part 102a, 102b Disk part 102c Elastic body 111, 112, 115 Reference line 211 Stage 200 Robot arm body 201, 202, 203, 204, 205, 206 Links 207, 208 Holding jig 209 Optical microscope 210 Base 211, 212, 213, 214, 215, 216 Input shaft encoder 221, 222, 223, 224, 225, 226 Torque sensor 230 Arm motor driver 231 , 232, 233, 234, 235, 236 Drive device 241, 242, 243, 244, 245, 246 Output shaft encoder

Claims (21)

A sensor having a structure for acquiring force information,
The structure contains
a detection unit for detecting displacement of the structure;
a reference portion that serves as a reference for the position of the detection unit in the structure,
A sensor characterized by: The sensor of claim 1, wherein
The detection unit has a detection section and a detection target section,
The reference portion serves as a reference for a relative positional relationship between the detection portion and the detected portion in the structure,
A sensor characterized by: 3. The sensor of claim 2, wherein
The detection unit is provided in the structure so as to be substantially parallel to the reference unit and have a predetermined gap,
The detected part is provided in the structure so as to be substantially parallel to the reference part and have a predetermined gap,
A sensor characterized by: A sensor according to any one of claims 1 to 3,
The reference portion has a shape that can detect an edge,
A sensor characterized by: A sensor according to any one of claims 1 to 4,
The reference portion is a straight portion,
A sensor characterized by: A sensor according to any one of claims 1 to 5,
The structure has a first part, a second part, and a third part connecting the first part and the second part,
The reference part is arranged in either the first part or the second part,
A sensor characterized by: 3. The sensor of claim 2, wherein
The structure has a first part, a second part, and a third part connecting the first part and the second part,
The reference portion has a first reference portion and a second reference portion,
The first reference portion is provided at the first portion, the second reference portion is provided at the second portion, and heights of the first reference portion and the second reference portion are different,
A sensor characterized by: A sensor according to claim 7, wherein
The first reference portion and the second reference portion are provided so as not to overlap in a predetermined direction,
A sensor characterized by: A sensor according to claim 7 or 8,
The first reference portion is provided higher than the second reference portion and is provided by a recess,
A sensor characterized by: 4. The sensor according to claim 2 or 3,
The part to be detected is provided on a first member, the first member is provided on the structure with an adhesive, and the reference part and a predetermined portion of the part to be detected are attached to each other before the adhesive hardens. to adjust the relative position of the first member and the structure,
The detection part is provided on a second member, and the second member is provided on the structure by a bolt and a bolt hole, and the reference part, the predetermined portion of the detection part, the bolt, and the bolt hole are used. to adjust the relative position of the second member and the structure;
A sensor characterized by: 11. The sensor of claim 10, wherein
Adjusting the position of the second member and the structure after adjusting the position of the first member and the structure;
A sensor characterized by: A sensor according to claim 10 or 11,
fixing the first member or the second member by holding;
fixing the structure to a stage;
Adjusting the relative position between the first member and the structure or the relative position between the second member and the structure by moving the structure on the stage;
A sensor characterized by: 4. The sensor according to claim 2 or 3,
The detection unit is provided on a substrate,
provided at a predetermined position on the substrate with a predetermined posture on the basis of a predetermined linear portion on the substrate;
A sensor characterized by: 14. The sensor of claim 13, wherein
The detection unit has a first detection unit and a second detection unit,
The first detection unit and the second detection unit are provided in a front-back relationship via the substrate,
A sensor characterized by: 4. The sensor according to claim 2 or 3,
The detection unit is a detection head, the detected unit is a scale,
The detection unit and the detected unit have a reference line,
A sensor characterized by: A robot comprising a sensor according to any one of claims 1-15. 17. A method of manufacturing an article, comprising manufacturing an article using the robot according to claim 16. A control method for a sensor having a structure for acquiring force information, comprising:
The structure contains
a detection unit for detecting displacement of the structure;
a reference portion that serves as a reference for the position of the detection unit in the structure,
acquiring the force information based on the detection result of the detection unit;
A control method characterized by: In a sensor having a structure for acquiring force information, a method for adjusting the position of a detection unit included in the structure, comprising:
The structure is provided with a reference portion that serves as a reference for the position of the detection unit in the structure,
adjusting the position of the detection unit in the structure based on the reference portion;
A position adjustment method characterized by: A control program capable of executing the control method according to claim 18. A computer-readable recording medium storing the control program according to claim 20.

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