JP2023029240A - 形状適応機構及び形状適応装置 - Google Patents

形状適応機構及び形状適応装置 Download PDF

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JP2023029240A
JP2023029240A JP2022116483A JP2022116483A JP2023029240A JP 2023029240 A JP2023029240 A JP 2023029240A JP 2022116483 A JP2022116483 A JP 2022116483A JP 2022116483 A JP2022116483 A JP 2022116483A JP 2023029240 A JP2023029240 A JP 2023029240A
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rotational
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JP2023029240A5 (enExample
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行生 武田
Yukio Takeda
零司 安東
Reiji Ando
滋規 齋藤
Shigenori Saito
雄介 菅原
Yusuke Sugawara
祐樹 田岡
Yuki Taoka
功太郎 干場
Kotaro Hoshiba
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Tokyo Institute of Technology NUC
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JP2022116483A 2021-08-20 2022-07-21 形状適応機構及び形状適応装置 Pending JP2023029240A (ja)

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JP2023029240A5 JP2023029240A5 (enExample) 2025-07-29

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7614687B1 (ja) 2023-08-30 2025-01-16 国立大学法人東京科学大学 静電吸着デバイス、反り矯正方法、及び取付方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7614687B1 (ja) 2023-08-30 2025-01-16 国立大学法人東京科学大学 静電吸着デバイス、反り矯正方法、及び取付方法
WO2025047804A1 (ja) * 2023-08-30 2025-03-06 国立大学法人東京工業大学 静電吸着デバイス、反り矯正方法、及び取付方法

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