JP2022553302A5 - - Google Patents
Info
- Publication number
- JP2022553302A5 JP2022553302A5 JP2022523396A JP2022523396A JP2022553302A5 JP 2022553302 A5 JP2022553302 A5 JP 2022553302A5 JP 2022523396 A JP2022523396 A JP 2022523396A JP 2022523396 A JP2022523396 A JP 2022523396A JP 2022553302 A5 JP2022553302 A5 JP 2022553302A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- intermediate layer
- substrate support
- different
- heating element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962923912P | 2019-10-21 | 2019-10-21 | |
| US62/923,912 | 2019-10-21 | ||
| PCT/US2020/056436 WO2021080953A1 (en) | 2019-10-21 | 2020-10-20 | Monolithic anisotropic substrate supports |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022553302A JP2022553302A (ja) | 2022-12-22 |
| JP2022553302A5 true JP2022553302A5 (https=) | 2025-03-07 |
| JP7702392B2 JP7702392B2 (ja) | 2025-07-03 |
Family
ID=75620030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022523396A Active JP7702392B2 (ja) | 2019-10-21 | 2020-10-20 | モノリシック異方性基板支持体 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240128062A1 (https=) |
| JP (1) | JP7702392B2 (https=) |
| KR (1) | KR102900427B1 (https=) |
| CN (1) | CN114846597A (https=) |
| WO (1) | WO2021080953A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102901061B1 (ko) * | 2020-03-13 | 2025-12-16 | 램 리써치 코포레이션 | 기판 프로세싱 시스템들을 위한 스터드 어레이들을 갖는 본딩 층들을 포함하는 기판 지지부들 |
| US12094748B2 (en) * | 2021-08-18 | 2024-09-17 | Applied Materials, Inc. | Bipolar esc with balanced RF impedance |
| JP7677862B2 (ja) * | 2021-09-17 | 2025-05-15 | 東京エレクトロン株式会社 | プラズマ処理装置 |
| US12581880B2 (en) | 2022-11-02 | 2026-03-17 | Applied Materials, Inc. | Faraday faceplate |
| US20240412957A1 (en) * | 2023-06-07 | 2024-12-12 | Applied Materials, Inc. | High temperature biasable heater with advanced far edge electrode, electrostatic chuck, and embedded ground electrode |
| US20250357073A1 (en) * | 2024-05-20 | 2025-11-20 | Applied Materials, Inc. | Electrically conductive ceramic electric field blocking plate |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5800618A (en) * | 1992-11-12 | 1998-09-01 | Ngk Insulators, Ltd. | Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof |
| GB2329515B (en) * | 1997-09-18 | 2002-03-13 | Trikon Equip Ltd | Platen for semiconductor workpieces |
| JPH11260534A (ja) * | 1998-01-09 | 1999-09-24 | Ngk Insulators Ltd | 加熱装置およびその製造方法 |
| US7544251B2 (en) * | 2004-10-07 | 2009-06-09 | Applied Materials, Inc. | Method and apparatus for controlling temperature of a substrate |
| JP4394667B2 (ja) * | 2006-08-22 | 2010-01-06 | 日本碍子株式会社 | ヒータ付き静電チャックの製造方法 |
| KR101120599B1 (ko) * | 2008-08-20 | 2012-03-09 | 주식회사 코미코 | 세라믹 히터, 이의 제조 방법 및 이를 포함하는 박막 증착 장치 |
| US10049948B2 (en) * | 2012-11-30 | 2018-08-14 | Lam Research Corporation | Power switching system for ESC with array of thermal control elements |
| JP5819895B2 (ja) * | 2013-09-05 | 2015-11-24 | 日本碍子株式会社 | 静電チャック |
| KR101994006B1 (ko) * | 2014-06-23 | 2019-06-27 | 니혼도꾸슈도교 가부시키가이샤 | 정전 척 |
| US10690414B2 (en) * | 2015-12-11 | 2020-06-23 | Lam Research Corporation | Multi-plane heater for semiconductor substrate support |
| KR101814554B1 (ko) * | 2017-09-13 | 2018-01-03 | 주식회사 티에스시 | 에지전극이 내장된 정전척 및 그 제조방법 |
-
2020
- 2020-10-20 JP JP2022523396A patent/JP7702392B2/ja active Active
- 2020-10-20 WO PCT/US2020/056436 patent/WO2021080953A1/en not_active Ceased
- 2020-10-20 KR KR1020227017180A patent/KR102900427B1/ko active Active
- 2020-10-20 US US17/769,430 patent/US20240128062A1/en active Pending
- 2020-10-20 CN CN202080088821.9A patent/CN114846597A/zh active Pending
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