JP2022537813A - 集積素子のための光ナノ構造リジェクタ及び関連する方法 - Google Patents
集積素子のための光ナノ構造リジェクタ及び関連する方法 Download PDFInfo
- Publication number
- JP2022537813A JP2022537813A JP2021575305A JP2021575305A JP2022537813A JP 2022537813 A JP2022537813 A JP 2022537813A JP 2021575305 A JP2021575305 A JP 2021575305A JP 2021575305 A JP2021575305 A JP 2021575305A JP 2022537813 A JP2022537813 A JP 2022537813A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- radiation
- reaction chamber
- integrated device
- dielectric material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 262
- 238000000034 method Methods 0.000 title claims abstract description 54
- 239000002086 nanomaterial Substances 0.000 claims abstract description 195
- 230000005855 radiation Effects 0.000 claims abstract description 158
- 230000000737 periodic effect Effects 0.000 claims abstract description 34
- 239000000463 material Substances 0.000 claims description 175
- 230000005284 excitation Effects 0.000 claims description 130
- 238000006243 chemical reaction Methods 0.000 claims description 122
- 239000000758 substrate Substances 0.000 claims description 60
- 239000003989 dielectric material Substances 0.000 claims description 39
- 238000004020 luminiscence type Methods 0.000 claims description 31
- 238000004519 manufacturing process Methods 0.000 claims description 27
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 10
- 238000000059 patterning Methods 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 abstract description 16
- 230000009977 dual effect Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 160
- 125000003729 nucleotide group Chemical group 0.000 description 45
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 31
- 229910052710 silicon Inorganic materials 0.000 description 31
- 239000010703 silicon Substances 0.000 description 31
- 239000002773 nucleotide Substances 0.000 description 27
- 150000004767 nitrides Chemical class 0.000 description 25
- 239000000523 sample Substances 0.000 description 24
- 238000004458 analytical method Methods 0.000 description 23
- 229920002120 photoresistant polymer Polymers 0.000 description 20
- 239000000969 carrier Substances 0.000 description 19
- 239000004065 semiconductor Substances 0.000 description 19
- 238000003860 storage Methods 0.000 description 17
- 229910052581 Si3N4 Inorganic materials 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 238000009825 accumulation Methods 0.000 description 15
- 239000012491 analyte Substances 0.000 description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 15
- 238000001514 detection method Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 13
- 230000003595 spectral effect Effects 0.000 description 13
- 230000005684 electric field Effects 0.000 description 12
- 230000004044 response Effects 0.000 description 12
- 230000005693 optoelectronics Effects 0.000 description 11
- 229910052814 silicon oxide Inorganic materials 0.000 description 11
- 238000010521 absorption reaction Methods 0.000 description 9
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 9
- 230000008033 biological extinction Effects 0.000 description 8
- 238000000926 separation method Methods 0.000 description 8
- 239000002356 single layer Substances 0.000 description 8
- 108020004414 DNA Proteins 0.000 description 7
- 238000003491 array Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 239000004020 conductor Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 108020004707 nucleic acids Proteins 0.000 description 5
- 102000039446 nucleic acids Human genes 0.000 description 5
- 150000007523 nucleic acids Chemical class 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 108090000623 proteins and genes Proteins 0.000 description 5
- 238000004088 simulation Methods 0.000 description 5
- 230000002123 temporal effect Effects 0.000 description 5
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 239000006096 absorbing agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000000295 complement effect Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 238000002294 plasma sputter deposition Methods 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 102000053602 DNA Human genes 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000010348 incorporation Methods 0.000 description 3
- -1 periodicity Substances 0.000 description 3
- 238000012163 sequencing technique Methods 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 108090000790 Enzymes Proteins 0.000 description 2
- 102000004190 Enzymes Human genes 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012634 optical imaging Methods 0.000 description 2
- 230000001443 photoexcitation Effects 0.000 description 2
- 108091008695 photoreceptors Proteins 0.000 description 2
- 230000000379 polymerizing effect Effects 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 239000012114 Alexa Fluor 647 Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 108091028043 Nucleic acid sequence Proteins 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 238000004820 blood count Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 231100000481 chemical toxicant Toxicity 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 239000007850 fluorescent dye Substances 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000013079 quasicrystal Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 210000002700 urine Anatomy 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- C—CHEMISTRY; METALLURGY
- C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
- C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
- C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
- C12Q1/68—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
- C12Q1/6869—Methods for sequencing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6402—Atomic fluorescence; Laser induced fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6408—Fluorescence; Phosphorescence with measurement of decay time, time resolved fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
- G01N21/6454—Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
- G02B1/005—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials made of photonic crystals or photonic band gap materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8053—Colour filters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/811—Interconnections
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
- G01N2021/6439—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N2021/6463—Optics
- G01N2021/6471—Special filters, filter wheel
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N2021/7769—Measurement method of reaction-produced change in sensor
- G01N2021/7786—Fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Proteomics, Peptides & Aminoacids (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Zoology (AREA)
- Wood Science & Technology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Biophysics (AREA)
- Plasma & Fusion (AREA)
- Nanotechnology (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Molecular Biology (AREA)
- Microbiology (AREA)
- Biotechnology (AREA)
- General Engineering & Computer Science (AREA)
- Genetics & Genomics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Light Receiving Elements (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Optical Integrated Circuits (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962863635P | 2019-06-19 | 2019-06-19 | |
| US62/863,635 | 2019-06-19 | ||
| PCT/US2020/038415 WO2020257445A1 (en) | 2019-06-19 | 2020-06-18 | Optical nanostructure rejecter for an integrated device and related methods |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022537813A true JP2022537813A (ja) | 2022-08-30 |
| JP2022537813A5 JP2022537813A5 (https=) | 2023-06-30 |
Family
ID=71527981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021575305A Withdrawn JP2022537813A (ja) | 2019-06-19 | 2020-06-18 | 集積素子のための光ナノ構造リジェクタ及び関連する方法 |
Country Status (12)
| Country | Link |
|---|---|
| US (2) | US11692938B2 (https=) |
| EP (1) | EP3980755A1 (https=) |
| JP (1) | JP2022537813A (https=) |
| KR (1) | KR20220024702A (https=) |
| CN (1) | CN114222911A (https=) |
| AU (1) | AU2020297509A1 (https=) |
| BR (1) | BR112021025529A2 (https=) |
| CA (1) | CA3144003A1 (https=) |
| IL (1) | IL289003A (https=) |
| MX (1) | MX2021015773A (https=) |
| TW (1) | TW202115382A (https=) |
| WO (1) | WO2020257445A1 (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2020297509A1 (en) * | 2019-06-19 | 2022-01-27 | Quantum-Si Incorporated | Optical nanostructure rejecter for an integrated device and related methods |
| MX2022001614A (es) | 2019-08-08 | 2022-05-26 | Quantum Si Inc | Eficiencia mejorada de recolección de emisiones en dispositivos ópticos integrados. |
| US11309347B2 (en) | 2020-02-11 | 2022-04-19 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit photodetector |
| EP3936856A1 (en) * | 2020-07-10 | 2022-01-12 | Vrije Universiteit Brussel | Circuit and method for fluorescence lifetime imaging |
| US11683573B2 (en) | 2020-09-02 | 2023-06-20 | Samsung Electronics Co., Ltd. | Folded optic for multicamera device and multicamera device including the same |
| US11487060B2 (en) * | 2021-03-25 | 2022-11-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device with nanostructures aligned with grating coupler and manufacturing method thereof |
| WO2023064190A1 (en) * | 2021-10-11 | 2023-04-20 | Quantum-Si Incorporated | Light coupling device |
| US12517292B2 (en) * | 2022-08-23 | 2026-01-06 | Photonic Inc. | Method providing suppression of excitation field for quantum light emitters using optical interferometers |
| KR20250066478A (ko) * | 2022-09-14 | 2025-05-13 | 이미지아, 인크. | 메타렌즈, 관통 도파관 반사형 메타표면 커플러 및 기타 메타표면용 재료 |
| CN116594185A (zh) * | 2023-06-07 | 2023-08-15 | 湖南师范大学 | 一种基于光栅结构的偏振无关型可变光功率分束器 |
Family Cites Families (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5814565A (en) | 1995-02-23 | 1998-09-29 | University Of Utah Research Foundation | Integrated optic waveguide immunosensor |
| US6787308B2 (en) | 1998-07-30 | 2004-09-07 | Solexa Ltd. | Arrayed biomolecules and their use in sequencing |
| EP1285290A1 (en) | 2000-04-28 | 2003-02-26 | Edgelight Biosciences, Inc. | Micro-array evanescent wave fluorescence detection device |
| US6917726B2 (en) | 2001-09-27 | 2005-07-12 | Cornell Research Foundation, Inc. | Zero-mode clad waveguides for performing spectroscopy with confined effective observation volumes |
| FR2813121A1 (fr) | 2000-08-21 | 2002-02-22 | Claude Weisbuch | Dispositif perfectionne de support d'elements chromophores |
| US7738086B2 (en) | 2005-05-09 | 2010-06-15 | The Trustees Of Columbia University In The City Of New York | Active CMOS biosensor chip for fluorescent-based detection |
| US7426322B2 (en) | 2005-07-20 | 2008-09-16 | Searete Llc. | Plasmon photocatalysis |
| US20160355869A1 (en) * | 2005-08-02 | 2016-12-08 | University Of Utah Research Foundation | Biosensors including metallic nanocavities |
| US8975216B2 (en) | 2006-03-30 | 2015-03-10 | Pacific Biosciences Of California | Articles having localized molecules disposed thereon and methods of producing same |
| US8207509B2 (en) | 2006-09-01 | 2012-06-26 | Pacific Biosciences Of California, Inc. | Substrates, systems and methods for analyzing materials |
| WO2008028160A2 (en) | 2006-09-01 | 2008-03-06 | Pacific Biosciences Of California, Inc. | Substrates, systems and methods for analyzing materials |
| FR2908888B1 (fr) | 2006-11-21 | 2012-08-03 | Centre Nat Rech Scient | Dispositif pour la detection exaltee de l'emission d'une particule cible |
| WO2009082706A1 (en) | 2007-12-21 | 2009-07-02 | The Trustees Of Columbia University In The City Of New York | Active cmos sensor array for electrochemical biomolecular detection |
| EP2331934B1 (en) | 2008-09-16 | 2020-01-01 | Pacific Biosciences of California, Inc. | Analytic device including a zero mode waveguide substrate |
| US8278728B2 (en) | 2009-10-17 | 2012-10-02 | Florida Institute Of Technology | Array of concentric CMOS photodiodes for detection and de-multiplexing of spatially modulated optical channels |
| EP3460458B1 (en) | 2010-02-19 | 2021-08-11 | Pacific Biosciences of California, Inc. | A method for nucleic acid sequencing |
| US8994946B2 (en) | 2010-02-19 | 2015-03-31 | Pacific Biosciences Of California, Inc. | Integrated analytical system and method |
| EP2375242A1 (en) * | 2010-04-06 | 2011-10-12 | FOM Institute for Atomic and Moleculair Physics | Integrated plasmonic nanocavity sensing device |
| US8865078B2 (en) | 2010-06-11 | 2014-10-21 | Industrial Technology Research Institute | Apparatus for single-molecule detection |
| US8358419B2 (en) * | 2011-04-05 | 2013-01-22 | Integrated Plasmonics Corporation | Integrated plasmonic sensing device and apparatus |
| EP3305400A3 (en) | 2011-10-28 | 2018-06-06 | Illumina, Inc. | Microarray fabrication system and method |
| US9606060B2 (en) | 2012-01-13 | 2017-03-28 | California Institute Of Technology | Filterless time-domain detection of one or more fluorophores |
| US9372308B1 (en) | 2012-06-17 | 2016-06-21 | Pacific Biosciences Of California, Inc. | Arrays of integrated analytical devices and methods for production |
| EP2936222B1 (en) | 2012-12-18 | 2019-07-03 | Pacific Biosciences Of California, Inc. | An optical analytical device |
| US9624540B2 (en) | 2013-02-22 | 2017-04-18 | Pacific Biosciences Of California, Inc. | Integrated illumination of optical analytical devices |
| US10215753B2 (en) | 2013-08-05 | 2019-02-26 | University Of Rochester | Method for the topographically-selective passivation of micro- and nanoscale devices |
| WO2015074001A1 (en) | 2013-11-17 | 2015-05-21 | Quantum-Si Incorporated | Optical system and assay chip for probing, detecting and analyzing molecules |
| EP2884261B1 (en) * | 2013-12-14 | 2016-09-21 | IMEC vzw | Integrated fluorescence detection |
| US9765395B2 (en) | 2014-04-28 | 2017-09-19 | Nanomedical Diagnostics, Inc. | System and method for DNA sequencing and blood chemistry analysis |
| US10174363B2 (en) | 2015-05-20 | 2019-01-08 | Quantum-Si Incorporated | Methods for nucleic acid sequencing |
| CA2957543A1 (en) * | 2014-08-08 | 2016-02-11 | Quantum-Si Incorporated | Optical system and assay chip for probing, detecting and analyzing molecules |
| EP4421188A3 (en) | 2014-08-08 | 2024-10-23 | Quantum-Si Incorporated | Integrated device with external light source for probing, detecting, and analyzing molecules |
| US9666748B2 (en) | 2015-01-14 | 2017-05-30 | International Business Machines Corporation | Integrated on chip detector and zero waveguide module structure for use in DNA sequencing |
| EP3045896B1 (en) | 2015-01-16 | 2023-06-07 | Personal Genomics, Inc. | Optical sensor with light-guiding feature |
| EP3271762B1 (en) | 2015-03-16 | 2023-01-04 | Pacific Biosciences of California, Inc. | Analytical system comprising integrated devices and systems for free-space optical coupling |
| US10246742B2 (en) | 2015-05-20 | 2019-04-02 | Quantum-Si Incorporated | Pulsed laser and bioanalytic system |
| EP4425153A3 (en) | 2015-06-12 | 2024-11-20 | Pacific Biosciences Of California, Inc. | Integrated target waveguide devices and systems for optical coupling |
| WO2017034995A1 (en) | 2015-08-21 | 2017-03-02 | California Institute Of Technology | Planar diffractive device with matching diffraction spectrum |
| AU2016381685A1 (en) | 2015-12-30 | 2018-07-12 | Omniome, Inc. | Sequencing device |
| US9778191B2 (en) | 2016-02-05 | 2017-10-03 | Personal Genomics, Inc. | Optical sensing module |
| US10533941B2 (en) * | 2016-08-23 | 2020-01-14 | Case Western Reserve University | Optical sensor platform employing hyperbolic metamaterials |
| US11195141B2 (en) | 2018-04-11 | 2021-12-07 | Shippingeasy Group, Inc. | Fulfilment management implementing physical task interaction |
| AU2020297509A1 (en) * | 2019-06-19 | 2022-01-27 | Quantum-Si Incorporated | Optical nanostructure rejecter for an integrated device and related methods |
| MX2022001614A (es) | 2019-08-08 | 2022-05-26 | Quantum Si Inc | Eficiencia mejorada de recolección de emisiones en dispositivos ópticos integrados. |
| WO2023064190A1 (en) | 2021-10-11 | 2023-04-20 | Quantum-Si Incorporated | Light coupling device |
-
2020
- 2020-06-18 AU AU2020297509A patent/AU2020297509A1/en not_active Abandoned
- 2020-06-18 JP JP2021575305A patent/JP2022537813A/ja not_active Withdrawn
- 2020-06-18 EP EP20737711.0A patent/EP3980755A1/en not_active Withdrawn
- 2020-06-18 WO PCT/US2020/038415 patent/WO2020257445A1/en not_active Ceased
- 2020-06-18 CA CA3144003A patent/CA3144003A1/en active Pending
- 2020-06-18 US US16/905,350 patent/US11692938B2/en active Active
- 2020-06-18 CN CN202080056842.2A patent/CN114222911A/zh active Pending
- 2020-06-18 MX MX2021015773A patent/MX2021015773A/es unknown
- 2020-06-18 BR BR112021025529A patent/BR112021025529A2/pt not_active Application Discontinuation
- 2020-06-18 TW TW109120670A patent/TW202115382A/zh unknown
- 2020-06-18 KR KR1020227001807A patent/KR20220024702A/ko not_active Ceased
-
2021
- 2021-12-14 IL IL289003A patent/IL289003A/en unknown
-
2023
- 2023-05-19 US US18/320,964 patent/US12203853B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US12203853B2 (en) | 2025-01-21 |
| US11692938B2 (en) | 2023-07-04 |
| IL289003A (en) | 2022-02-01 |
| CA3144003A1 (en) | 2020-12-24 |
| WO2020257445A1 (en) | 2020-12-24 |
| EP3980755A1 (en) | 2022-04-13 |
| CN114222911A (zh) | 2022-03-22 |
| US20240142378A1 (en) | 2024-05-02 |
| US20200400568A1 (en) | 2020-12-24 |
| KR20220024702A (ko) | 2022-03-03 |
| BR112021025529A2 (pt) | 2022-04-12 |
| WO2020257445A8 (en) | 2021-01-28 |
| MX2021015773A (es) | 2022-04-12 |
| TW202115382A (zh) | 2021-04-16 |
| AU2020297509A1 (en) | 2022-01-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2022537813A (ja) | 集積素子のための光ナノ構造リジェクタ及び関連する方法 | |
| KR102786367B1 (ko) | 광학 거부 광자 구조체들 | |
| TWI873134B (zh) | 具有提升之波束校準靈敏度之分割光柵耦合器 | |
| TWI899087B (zh) | 整合式器件 | |
| CA3168138A1 (en) | Integrated sensor for lifetime characterization | |
| AU2020231492A1 (en) | Optical absorption filter for an integrated device | |
| KR20220140523A (ko) | 수명 플러스 스펙트럼 특성화를 위한 센서 | |
| TW202232745A (zh) | 具有經改良電荷傳送效率之積體電路及相關技術 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230619 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230619 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20231026 |