JP2022514745A - パターン化SrB4O7またはPbB4O7結晶に基づく高出力レーザ変換器 - Google Patents
パターン化SrB4O7またはPbB4O7結晶に基づく高出力レーザ変換器 Download PDFInfo
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- GDTSJMKGXGJFGQ-UHFFFAOYSA-N 3,7-dioxido-2,4,6,8,9-pentaoxa-1,3,5,7-tetraborabicyclo[3.3.1]nonane Chemical compound O1B([O-])OB2OB([O-])OB1O2 GDTSJMKGXGJFGQ-UHFFFAOYSA-N 0.000 description 1
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- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
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- QZRNTVPRGQDWRA-UHFFFAOYSA-N strontium;boron;oxygen(2-) Chemical compound [B].[O-2].[Sr+2] QZRNTVPRGQDWRA-UHFFFAOYSA-N 0.000 description 1
- -1 thulium ions Chemical class 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- LSGOVYNHVSXFFJ-UHFFFAOYSA-N vanadate(3-) Chemical compound [O-][V]([O-])([O-])=O LSGOVYNHVSXFFJ-UHFFFAOYSA-N 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
- G02F1/3551—Crystals
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/354—Third or higher harmonic generation
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
- G02F1/3558—Poled materials, e.g. with periodic poling; Fabrication of domain inverted structures, e.g. for quasi-phase-matching [QPM]
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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- G02F1/37—Non-linear optics for second-harmonic generation
- G02F1/377—Non-linear optics for second-harmonic generation in an optical waveguide structure
- G02F1/3775—Non-linear optics for second-harmonic generation in an optical waveguide structure with a periodic structure, e.g. domain inversion, for quasi-phase-matching [QPM]
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2308—Amplifier arrangements, e.g. MOPA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Lasers (AREA)
Abstract
Description
12 周期構造
30、32 3D領域
40 レーザシステム
42 電磁放射源
43 発振器
44 周波数変換器
44 電力増幅器
46 SHG
48 FHG
50 THG
52 FiHG
Claims (10)
- 基本周波数の光を出力するレーザ源と、
前記基本周波数を高調波へ変換するように動作し、SrB4O7(SBO)またはPbB4O7(PBO)結晶に基づく少なくとも1つの周波数変換段を含み、前記SBO/PBO結晶には、結晶軸のそれぞれの周期的に交互になる極性がQPM使用を可能にする複数の領域が構成され、前記領域が、10mmの距離にわたり互いからの逸脱が1ミクロン未満の極めて平行な壁を有する、周波数変換器と
を備える、レーザシステム。 - 前記SBO/PBO結晶が、第2高調波、第3高調波、第4高調波および第5高調波ならびに前記高調波の組合せから成る群から選択される高調波を発生するように構成される、請求項1に記載のレーザシステム。
- 前記SBO/PBO結晶が、光パラメトリック相互作用を提供するように構成される、請求項1に記載のレーザシステム。
- 前記SBO/PBOが、0.2μmと約20μmとの間で変化するVIS~DUV光範囲に対する各領域の厚さ、および最小直径が約1mmから約5cmに及ぶ有効開口を有する、請求項1に記載のレーザシステム。
- 前記レーザ源が、連続波(CW)、準連続波(QCW)またはパルス領域で動作するレーザシステムを含む、請求項1に記載のレーザシステム。
- 前記レーザ源が、ファイバレーザ、イットリウムアルミニウムガラス(YAG)およびディスクレーザから成る群から選択される固体レーザであって、希土類元素から選択される発光ドーパントがドープされた利得媒質が構成され、かつ1から2μm波長範囲の光を出力する、固体レーザを含む、請求項5に記載のレーザシステム。
- 前記レーザ源が、主発振器(MO)電力増幅器(PA)構成を有する、請求項5に記載のレーザシステム。
- 前記レーザ源が、ナノ~サブナノ秒パルス幅範囲の一連のパルスを出力する、請求項7に記載のレーザシステム。
- 前記周波数変換器が、2つの異なる領域期間が形成されたSBO/PBOの単一のモノリシックスラブを含み、前記基本周波数の光が、SHGのための前記期間が設けられたその上流端および前記高調波のための前記期間を有する前記モノリシックスラブの下流ストリーム端を有する前記モノリシックスラブを通して経路に沿って伝搬する、請求項1に記載のレーザシステム。
- 前記SBOが、前記第4高調波で約130nmの波長および少なくとも10Wの平均パワーの単一モード光を出力する、請求項2に記載のレーザシステム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862781386P | 2018-12-18 | 2018-12-18 | |
US62/781,386 | 2018-12-18 | ||
PCT/US2019/067135 WO2020132043A1 (en) | 2018-12-18 | 2019-12-18 | High power laser converter based on patterned srb4bo7 or pbb407 crystal |
Publications (1)
Publication Number | Publication Date |
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JP2022514745A true JP2022514745A (ja) | 2022-02-15 |
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JP2021535150A Pending JP2022514745A (ja) | 2018-12-18 | 2019-12-18 | パターン化SrB4O7またはPbB4O7結晶に基づく高出力レーザ変換器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11719993B2 (ja) |
EP (1) | EP3881402A4 (ja) |
JP (1) | JP2022514745A (ja) |
KR (1) | KR20210102390A (ja) |
CN (1) | CN113196596A (ja) |
WO (1) | WO2020132043A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20210103502A (ko) * | 2018-12-18 | 2021-08-23 | 아이피지 포토닉스 코포레이션 | 패터닝된 SrB4BO7 및 PbB4O7 결정의 제조 방법 |
WO2020132043A1 (en) | 2018-12-18 | 2020-06-25 | Ipg Photonics Corporation | High power laser converter based on patterned srb4bo7 or pbb407 crystal |
US11237455B2 (en) | 2020-06-12 | 2022-02-01 | Kla Corporation | Frequency conversion using stacked strontium tetraborate plates |
US11567391B1 (en) | 2021-11-24 | 2023-01-31 | Kla Corporation | Frequency conversion using interdigitated nonlinear crystal gratings |
US11899338B2 (en) | 2021-12-11 | 2024-02-13 | Kla Corporation | Deep ultraviolet laser using strontium tetraborate for frequency conversion |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2010256659A (ja) * | 2009-04-27 | 2010-11-11 | National Institute For Materials Science | 波長変換素子および波長変換装置並びにこれらに用いるタンタル酸リチウム単結晶 |
DE102009028819B4 (de) * | 2009-08-21 | 2012-07-19 | Forschungsverbund Berlin E.V. | Vorrichtung und Verfahren zur Verstärkung oder Frequenzwandlung von Laserstrahlung mithilfe der Quasi-Phasenanpassung bei der Vierwellenmischung |
US8068705B2 (en) | 2009-09-14 | 2011-11-29 | Gapontsev Valentin P | Single-mode high-power fiber laser system |
US20130077086A1 (en) * | 2011-09-23 | 2013-03-28 | Kla-Tencor Corporation | Solid-State Laser And Inspection System Using 193nm Laser |
US20130313440A1 (en) * | 2012-05-22 | 2013-11-28 | Kla-Tencor Corporation | Solid-State Laser And Inspection System Using 193nm Laser |
US9509112B2 (en) * | 2013-06-11 | 2016-11-29 | Kla-Tencor Corporation | CW DUV laser with improved stability |
MX2017009080A (es) * | 2015-02-17 | 2017-11-23 | Novartis Ag | Laser ultravioleta de femtosegundo. |
US11487185B2 (en) * | 2018-05-14 | 2022-11-01 | Cornell University | Generation of broadband coherent laser pulses based on adiabatic four-wave mixing in waveguides and fiber |
CN108683072B (zh) * | 2018-05-18 | 2020-07-10 | 北方工业大学 | 一种提高sbo深紫外倍频激光输出效率的方法 |
KR20210103502A (ko) * | 2018-12-18 | 2021-08-23 | 아이피지 포토닉스 코포레이션 | 패터닝된 SrB4BO7 및 PbB4O7 결정의 제조 방법 |
WO2020132043A1 (en) | 2018-12-18 | 2020-06-25 | Ipg Photonics Corporation | High power laser converter based on patterned srb4bo7 or pbb407 crystal |
-
2019
- 2019-12-18 WO PCT/US2019/067135 patent/WO2020132043A1/en unknown
- 2019-12-18 US US17/415,090 patent/US11719993B2/en active Active
- 2019-12-18 JP JP2021535150A patent/JP2022514745A/ja active Pending
- 2019-12-18 CN CN201980083902.7A patent/CN113196596A/zh active Pending
- 2019-12-18 EP EP19898599.6A patent/EP3881402A4/en active Pending
- 2019-12-18 KR KR1020217021906A patent/KR20210102390A/ko not_active Application Discontinuation
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Publication number | Publication date |
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KR20210102390A (ko) | 2021-08-19 |
EP3881402A4 (en) | 2022-09-07 |
US11719993B2 (en) | 2023-08-08 |
CN113196596A (zh) | 2021-07-30 |
WO2020132043A8 (en) | 2021-06-10 |
EP3881402A1 (en) | 2021-09-22 |
WO2020132043A1 (en) | 2020-06-25 |
US20220066283A1 (en) | 2022-03-03 |
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