JP2022189773A - Salt, acid generator, resist composition, and method for producing resist pattern - Google Patents

Abstract

To provide a salt which allows a resist pattern having a good pattern collapse margin (PCM) to be produced, and a resist composition containing the same.SOLUTION: An acid generator contains a triphenyl sulfonium salt having a specific substituent.SELECTED DRAWING: None

Description

The present invention relates to a salt, an acid generator, a resist composition, and a method for producing a resist pattern.

特許文献２には、下記式で表される塩及び該塩を酸発生剤として含有するレジスト組成物が記載されている。

特許文献３には、下記式で表される塩及び該塩を酸発生剤として含有するレジスト組成物がそれぞれ記載されている。

Patent Document 1 describes a salt represented by the following formula and a resist composition containing the salt as an acid generator.

Patent Document 2 describes a salt represented by the following formula and a resist composition containing the salt as an acid generator.

Patent Document 3 describes a salt represented by the following formula and a resist composition containing the salt as an acid generator.

JP 2011-085878 A JP 2020-015713 A JP 2020-046661 A

An object of the present invention is to provide a salt that forms a resist pattern with better pattern collapse resistance (PCM) than a resist pattern formed from a resist composition containing the above salt.

［式（Ｉ）中、
Ｒ^１、Ｒ^２及びＲ^３は、それぞれ独立に、＊－Ｏ－Ｒ^１０、＊－Ｏ－ＣＯ－Ｒ^１０、＊－Ｏ－ＣＯ－Ｏ－Ｒ^１０又は＊－Ｏ－Ｌ^１０－ＣＯ－Ｏ－Ｒ^１０を表し、＊は、ベンゼン環との結合部位を表す。
Ｌ^１０は、炭素数１～６のアルカンジイル基を表す。
Ｒ^１０は、塩基不安定基を表す。
Ｒ^４、Ｒ^５、Ｒ^６、Ｒ^７、Ｒ^８及びＲ^９は、それぞれ独立に、ハロゲン原子、炭素数１～１２のハロアルキル基又は炭素数１～１８の炭化水素基を表し、該炭化水素基は、置換基を有してもよく、該ハロアルキル基及び該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－、－ＣＯ－又は－ＳＯ_２－で置き換わっていてもよい。
Ａ^１、Ａ^２及びＡ^３は、それぞれ独立に、炭素数２～２０の炭化水素基を表し、該炭化水素基は、置換基を有してもよく、該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－で置き換わっていてもよい。
ｍ１は、１～５のいずれかの整数を表し、ｍ１が２以上のとき、複数の括弧内の基は互いに同一であっても異なってもよい。
ｍ２は、０～５のいずれかの整数を表し、ｍ２が２以上のとき、複数の括弧内の基は互いに同一であっても異なってもよい。
ｍ３は、０～５のいずれかの整数を表し、ｍ３が２以上のとき、複数の括弧内の基は互いに同一であっても異なってもよい。
ｍ４は、０～４のいずれかの整数を表し、ｍ４が２以上のとき、複数のＲ^４は互いに同一であっても異なってもよい。
ｍ５は、０～４のいずれかの整数を表し、ｍ５が２以上のとき、複数のＲ^５は互いに同一であっても異なってもよい。
ｍ６は、０～４のいずれかの整数を表し、ｍ６が２以上のとき、複数のＲ^６は互いに同一であっても異なってもよい。
ｍ７は、０～４のいずれかの整数を表し、ｍ７が２以上のとき、複数のＲ^７は互いに同一であっても異なってもよい。
ｍ８は、０～５のいずれかの整数を表し、ｍ８が２以上のとき、複数のＲ^８は互いに同一であっても異なってもよい。
ｍ９は、０～５のいずれかの整数を表し、ｍ９が２以上のとき、複数のＲ^９は互いに同一であっても異なってもよい。
但し、１≦ｍ１＋ｍ７≦５、０≦ｍ２＋ｍ８≦５、０≦ｍ３＋ｍ９≦５である。
ＡＩ^－は、有機アニオンを表す。］
［２］Ａ^１が、＊－Ｘ^０１－Ｌ^０１－又は＊－Ｌ^０１－Ｘ^０１－であり、Ａ^２が、＊－Ｘ^０２－Ｌ^０２－又は＊－Ｌ^０２－Ｘ^０２－であり、Ａ^３が、＊－Ｘ^０３－Ｌ^０３－又は＊－Ｌ^０３－Ｘ^０３－である（Ｘ^０１、Ｘ^０２及びＸ^０３は、それぞれ独立に、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－を表す。Ｌ^０１、Ｌ^０２及びＬ^０３は、それぞれ独立に、炭素数１～１９の炭化水素基を表し、該炭化水素基は、置換基を有してもよく、該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－で置き換わっていてもよい。＊は、Ｒ^１、Ｒ^２又はＲ^３が結合するベンゼン環との結合部位を表す。）［１］に記載の酸発生剤。
［３］Ｘ^０１、Ｘ^０２及びＸ^０３が、それぞれ独立に、－Ｏ－又は－Ｓ－である［２］記載の酸発生剤。
［４］Ｌ^０１、Ｌ^０２及びＬ^０３が、それぞれ独立に、炭素数１～６のアルカンジイル基（該アルカンジイル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－で置き換わっていてもよい。）である［２］又は［３］に記載の酸発生剤。
［５］Ｒ^１０の塩基不安定基が、式（１ｂ）で表される基である［１］～［４］のいずれかに記載の酸発生剤。

［式（１ｂ）中、Ｒ^ｂａ１及びＲ^ｂａ２は、それぞれ独立に、水素原子、フッ素原子又はフッ素原子を有する炭素数１～６のアルキル基を表す。
Ｒ^ｂａ３は、フッ素原子又はフッ素原子を有する炭素数１～６のアルキル基を表す。
＊は結合部位を表す。］
［６］ＡＩ^－が、スルホン酸アニオン、スルホニルイミドアニオン、スルホニルメチドアニオン又はカルボン酸アニオンである［１］～［５］のいずれかに記載の酸発生剤。
［７］ＡＩ^－はスルホン酸アニオンであり、スルホン酸アニオンは式（Ｉ－Ａ）で表されるアニオンである［１］～［６］のいずれかに記載の酸発生剤。

［式（Ｉ－Ａ）中、
Ｑ^１及びＱ^２は、それぞれ独立に、水素原子、フッ素原子、炭素数１～６のアルキル基又は炭素数１～６のペルフルオロアルキル基を表す。
Ｌ^１は、炭素数１～２４の飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基で置換されていてもよい。
Ｙ^１は、置換基を有していてもよいメチル基又は置換基を有していてもよい炭素数３～２４の脂環式炭化水素基を表し、該脂環式炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。］
［８］［１］～［７］のいずれかに記載の酸発生剤と酸不安定基を有する樹脂とを含有するレジスト組成物。
［９］酸不安定基を有する樹脂が、式（ａ１－０）で表される構造単位、式（ａ１－１）で表される構造単位及び式（ａ１－２）で表される構造単位からなる群より選ばれる少なくとも１種を含む［８］に記載のレジスト組成物。

［式（ａ１－０）、式（ａ１－１）及び式（ａ１－２）中、
Ｌ^a01、Ｌ^ａ１及びＬ^ａ２は、それぞれ独立に、－Ｏ－又は＊－Ｏ－（ＣＨ_２）_ｋ１－ＣＯ－Ｏ－を表し、ｋ１は１～７のいずれかの整数を表し、＊は－ＣＯ－との結合部位を表す。
Ｒ^a01、Ｒ^ａ４及びＲ^ａ５は、それぞれ独立に、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｒ^a02、Ｒ^a03及びＲ^a04は、それぞれ独立に、炭素数１～８のアルキル基、炭素数３～１８の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組み合わせた基を表す。
Ｒ^ａ６及びＲ^ａ７は、それぞれ独立に、炭素数１～８のアルキル基、炭素数２～８のアルケニル基、炭素数３～１８の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組合せることにより形成される基を表す。
ｍ１は０～１４のいずれかの整数を表す。
ｎ１は０～１０のいずれかの整数を表す。
ｎ１’は０～３のいずれかの整数を表す。］
［１０］酸不安定基を有する樹脂が、式（ａ２－Ａ）で表される構造単位を含む［８］又は［９］に記載のレジスト組成物。

［式（ａ２－Ａ）中、
Ｒ^a50は、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｒ^a51は、ハロゲン原子、ヒドロキシ基、炭素数１～６のアルキル基、炭素数１～６のアルコキシ基、炭素数２～１２のアルコキシアルキル基、炭素数２～１２のアルコキシアルコキシ基、炭素数２～４のアルキルカルボニル基、炭素数２～４のアルキルカルボニルオキシ基、アクリロイルオキシ基又はメタクリロイルオキシ基を表す。
Ａ^a50は、単結合又は^＊－Ｘ^a51－（Ａ^a52－Ｘ^a52）_nｂ－を表し、＊は－Ｒ^a50が結合する炭素原子との結合部位を表す。
Ａ^a52は、炭素数１～６のアルカンジイル基を表す。
Ｘ^a51及びＸ^a52は、それぞれ独立に、－Ｏ－、－ＣＯ－Ｏ－又は－Ｏ－ＣＯ－を表す。
ｎｂは、０又は１を表す。
ｍｂは０～４のいずれかの整数を表す。ｍｂが２以上のいずれかの整数である場合、複数のＲ^a51は互いに同一であっても異なってもよい。］
［１１］酸発生剤から発生する酸よりも酸性度の弱い酸を発生する塩をさらに含有する［８］～［１０］のいずれかに記載のレジスト組成物。
［１２］（１）［８］～［１１］のいずれかに記載のレジスト組成物を基板上に塗布する工程、
（２）塗布後の組成物を乾燥させて組成物層を形成する工程、
（３）組成物層に露光する工程、
（４）露光後の組成物層を加熱する工程、及び
（５）加熱後の組成物層を現像する工程、を含むレジストパターンの製造方法。
［１３］式（Ｉ）で表される塩。

［式（Ｉ）中、
Ｒ^１、Ｒ^２及びＲ^３は、それぞれ独立に、＊－Ｏ－Ｒ^１０、＊－Ｏ－ＣＯ－Ｒ^１０、＊－Ｏ－ＣＯ－Ｏ－Ｒ^１０又は＊－Ｏ－Ｌ^１０－ＣＯ－Ｏ－Ｒ^１０を表し、＊は、ベンゼン環との結合部位を表す。
Ｌ^１０は、炭素数１～６のアルカンジイル基を表す。
Ｒ^１０は、塩基不安定基を表す。
Ｒ^４、Ｒ^５、Ｒ^６、Ｒ^７、Ｒ^８及びＲ^９は、それぞれ独立に、ハロゲン原子、炭素数１～１２のハロアルキル基又は炭素数１～１８の炭化水素基を表し、該炭化水素基は、置換基を有してもよく、該ハロアルキル基及び該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－、－ＣＯ－又は－ＳＯ_２－で置き換わっていてもよい。
Ａ^１、Ａ^２及びＡ^３は、それぞれ独立に、炭素数２～２０の炭化水素基を表し、該炭化水素基は、置換基を有してもよく、該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－で置き換わっていてもよい。
ｍ１は、１～５のいずれかの整数を表し、ｍ１が２以上のとき、複数の括弧内の基は互いに同一であっても異なってもよい。
ｍ２は、０～５のいずれかの整数を表し、ｍ２が２以上のとき、複数の括弧内の基は互いに同一であっても異なってもよい。
ｍ３は、０～５のいずれかの整数を表し、ｍ３が２以上のとき、複数の括弧内の基は互いに同一であっても異なってもよい。
ｍ４は、０～４のいずれかの整数を表し、ｍ４が２以上のとき、複数のＲ^４は互いに同一であっても異なってもよい。
ｍ５は、０～４のいずれかの整数を表し、ｍ５が２以上のとき、複数のＲ^５は互いに同一であっても異なってもよい。
ｍ６は、０～４のいずれかの整数を表し、ｍ６が２以上のとき、複数のＲ^６は互いに同一であっても異なってもよい。
ｍ７は、０～４のいずれかの整数を表し、ｍ７が２以上のとき、複数のＲ^７は互いに同一であっても異なってもよい。
ｍ８は、０～５のいずれかの整数を表し、ｍ８が２以上のとき、複数のＲ^８は互いに同一であっても異なってもよい。
ｍ９は、０～５のいずれかの整数を表し、ｍ９が２以上のとき、複数のＲ^９は互いに同一であっても異なってもよい。
但し、１≦ｍ１＋ｍ７≦５、０≦ｍ２＋ｍ８≦５、０≦ｍ３＋ｍ９≦５である。
ＡＩ^－は、有機アニオンを表す。］
［１４］Ａ^１が、＊－Ｘ^０１－Ｌ^０１－又は＊－Ｌ^０１－Ｘ^０１－であり、Ａ^２が、＊－Ｘ^０２－Ｌ^０２－又は＊－Ｌ^０２－Ｘ^０２－であり、Ａ^３が、＊－Ｘ^０３－Ｌ^０３－又は＊－Ｌ^０３－Ｘ^０３－である（Ｘ^０１、Ｘ^０２及びＸ^０３は、それぞれ独立に、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－を表す。Ｌ^０１、Ｌ^０２及びＬ^０３は、それぞれ独立に、炭素数１～１９の炭化水素基を表し、該炭化水素基は、置換基を有してもよく、該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－で置き換わっていてもよい。＊は、Ｒ^１、Ｒ^２又はＲ^３が結合するベンゼン環との結合部位を表す。）［１３］に記載の塩。
［１５］Ｘ^０１、Ｘ^０２及びＸ^０３が、それぞれ独立に、－Ｏ－又は－Ｓ－である［１４］に記載の塩。
［１６］Ｌ^０１、Ｌ^０２及びＬ^０３が、それぞれ独立に、炭素数１～６のアルカンジイル基（該アルカンジイル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－で置き換わっていてもよい。）である［１４］又は［１５］に記載の塩。
［１７］Ｒ^１０の塩基不安定基が、式（１ｂ）で表される基である［１３］～［１６］のいずれかに記載の塩。

［式（１ｂ）中、Ｒ^ｂａ１及びＲ^ｂａ２は、それぞれ独立に、水素原子、フッ素原子又はフッ素原子を有する炭素数１～６のアルキル基を表す。
Ｒ^ｂａ３は、フッ素原子又はフッ素原子を有する炭素数１～６のアルキル基を表す。
＊は結合部位を表す。］
［１８］ＡＩ^－が、スルホン酸アニオン、スルホニルイミドアニオン、スルホニルメチドアニオン又はカルボン酸アニオンである［１３］～［１７］のいずれかに記載の塩。
［１９］ＡＩ^－はスルホン酸アニオンであり、スルホン酸アニオンは式（Ｉ－Ａ）で表されるアニオンである［１３］～［１８］のいずれかに記載の塩。

［式（Ｉ－Ａ）中、
Ｑ^１及びＱ^２は、それぞれ独立に、水素原子、フッ素原子、炭素数１～６のアルキル基又は炭素数１～６のペルフルオロアルキル基を表す。
Ｌ^１は、炭素数１～２４の飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基で置換されていてもよい。
Ｙ^１は、置換基を有していてもよいメチル基又は置換基を有していてもよい炭素数３～２４の脂環式炭化水素基を表し、該脂環式炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。］ The present invention includes the following inventions.
[1] An acid generator containing a salt represented by formula (I).

[in the formula (I),
R ¹ , R ² and R ³ are each independently *-OR ^{10 , *-O-CO-R 10 ,} *-O-CO-OR ¹⁰ or *-OL ¹⁰ -CO- represents OR ¹⁰ , and * represents the binding site to the benzene ring.
L ¹⁰ represents an alkanediyl group having 1 to 6 carbon atoms.
R ¹⁰ represents a base labile group.
R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ each independently represent a halogen atom, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon The group may have a substituent, and —CH ₂ — contained in the haloalkyl group and the hydrocarbon group may be replaced with —O—, —S—, —CO— or —SO ₂ —. good.
A ¹ , A ² and A ³ each independently represent a hydrocarbon group having 2 to 20 carbon atoms, the hydrocarbon group may have a substituent, and the —CH _2- may be replaced by -O-, -CO-, -S- or -SO ₂ -.
m1 represents an integer of 1 to 5, and when m1 is 2 or more, groups in parentheses may be the same or different.
m2 represents an integer of 0 to 5, and when m2 is 2 or more, groups in parentheses may be the same or different.
m3 represents an integer of 0 to 5, and when m3 is 2 or more, groups in parentheses may be the same or different.
m4 represents an integer of 0 to 4, and when m4 is 2 or more, multiple ^R4 's may be the same or different.
m5 represents an integer of 0 to 4, and when m5 is 2 or more, multiple R5's may be the ^same or different.
m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R6 may be the ^same or different.
m7 represents an integer of 0 to 4, and when m7 is 2 or more, multiple R ⁷ may be the same or different.
m8 represents an integer of 0 to 5, and when m8 is 2 or more, multiple R ^8s may be the same or different.
m9 represents an integer of 0 to 5, and when m9 is 2 or more, multiple R ^9s may be the same or different.
However, 1≤m1+m7≤5, 0≤m2+m8≤5, and 0≤m3+m9≤5.
AI ⁻ represents an organic anion. ]
[2] A ¹ is *-X ⁰¹ -L ⁰¹ - or *-L ⁰¹ -X ⁰¹ - and A ² is *-X ⁰² -L ⁰² - or *-L ⁰² -X ⁰² - , A ³ is *-X ⁰³ -L ⁰³ - or *-L ⁰³ -X ⁰³ - (X ⁰¹ , X ⁰² and X ⁰³ are each independently -O-, -CO-, -S- or —SO ₂ —, L ⁰¹ , L ⁰² and L ⁰³ each independently represent a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon group may have a substituent; —CH ₂ — contained in the hydrocarbon group may be replaced with —O—, —CO—, —S— or —SO ₂ — * indicates benzene to which R ¹ , R ² or R ³ is attached represents a bonding site with a ring.) The acid generator described in [1].
[3] The acid generator according to [2], wherein X ⁰¹ , X ⁰² and X ⁰³ are each independently -O- or -S-.
[4] L ⁰¹ , L ⁰² and L ⁰³ are each independently an alkanediyl group having 1 to 6 carbon atoms (-CH ₂ - contained in the alkanediyl group is replaced with -O- or -CO-; The acid generator according to [2] or [3], which is .
[5] The acid generator according to any one of [1] to [4], wherein the base labile group of R ¹⁰ is a group represented by formula (1b).

[In the formula (1b), R ^ba1 and R ^ba2 each independently represent a hydrogen atom, a fluorine atom or a fluorine atom-containing alkyl group having 1 to 6 carbon atoms.
R ^ba3 represents a fluorine atom or a fluorine atom-containing alkyl group having 1 to 6 carbon atoms.
* represents a binding site. ]
[6] The acid generator according to any one of [1] to [5], wherein AI ⁻ is a sulfonate anion, a sulfonylimide anion, a sulfonylmethide anion or a carboxylate anion.
[7] The acid generator according to any one of [1] to [6], wherein AI- is a sulfonate anion, ^and the sulfonate anion is an anion represented by formula (IA).

[In the formula (IA),
Q ¹ and Q ² each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms or a perfluoroalkyl group having 1 to 6 carbon atoms.
L ¹ represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and —CH ₂ — contained in the saturated hydrocarbon group may be replaced with —O— or —CO—; A hydrogen atom contained in may be substituted with a fluorine atom or a hydroxy group.
Y ¹ represents an optionally substituted methyl group or an optionally substituted alicyclic hydrocarbon group having 3 to 24 carbon atoms, and is included in the alicyclic hydrocarbon group -CH ₂ - may be replaced by -O-, -S-, -SO ₂ - or -CO-. ]
[8] A resist composition containing the acid generator according to any one of [1] to [7] and a resin having an acid-labile group.
[9] The resin having an acid-labile group is a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), and a structural unit represented by formula (a1-2). The resist composition according to [8], containing at least one selected from the group consisting of:

[In formula (a1-0), formula (a1-1) and formula (a1-2),
L ^a01 , L ^a1 and L ^a2 each independently represent —O— or *—O—(CH ₂ ) _k1 —CO—O—, k1 represents an integer of 1 to 7, * is represents the binding site with -CO-.
R ^a01 , R ^a4 and R ^a5 each independently represent a hydrogen atom, a halogen atom or an optionally halogenated alkyl group having 1 to 6 carbon atoms.
R ^a02 , R ^a03 and R ^a04 each independently represent an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or Represents a combined group.
R ^a6 and R ^a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic group having 6 to 18 carbon atoms. It represents a hydrocarbon group or a group formed by combining these groups.
m1 represents any integer from 0 to 14;
n1 represents any integer from 0 to 10;
n1' represents an integer of 0 to 3; ]
[10] The resist composition of [8] or [9], wherein the resin having an acid-labile group contains a structural unit represented by formula (a2-A).

[In the formula (a2-A),
R ^a50 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.
R ^a51 is a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, It represents an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.
A ^a50 represents a single bond or ^* -X ^a51 -(A ^a52 -X ^a52 ) _nb -, and * represents a bonding site with the carbon atom to which -R ^a50 bonds.
A ^a52 represents an alkanediyl group having 1 to 6 carbon atoms.
X ^a51 and X ^a52 each independently represent -O-, -CO-O- or -O-CO-.
nb represents 0 or 1;
mb represents an integer from 0 to 4; When mb is any integer of 2 or more, multiple R ^a51 may be the same or different. ]
[11] The resist composition according to any one of [8] to [10], further comprising a salt that generates an acid weaker in acidity than the acid generated from the acid generator.
[12] (1) a step of applying the resist composition according to any one of [8] to [11] onto a substrate;
(2) a step of drying the applied composition to form a composition layer;
(3) exposing the composition layer;
(4) a step of heating the composition layer after exposure; and (5) a step of developing the composition layer after heating.
[13] A salt represented by the formula (I).

[in the formula (I),
R ¹ , R ² and R ³ are each independently *-OR ^{10 , *-O-CO-R 10 ,} *-O-CO-OR ¹⁰ or *-OL ¹⁰ -CO- represents OR ¹⁰ , and * represents the binding site to the benzene ring.
L ¹⁰ represents an alkanediyl group having 1 to 6 carbon atoms.
R ¹⁰ represents a base labile group.
R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ each independently represent a halogen atom, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon The group may have a substituent, and —CH ₂ — contained in the haloalkyl group and the hydrocarbon group may be replaced with —O—, —S—, —CO— or —SO ₂ —. good.
A ¹ , A ² and A ³ each independently represent a hydrocarbon group having 2 to 20 carbon atoms, the hydrocarbon group may have a substituent, and the —CH _2- may be replaced by -O-, -CO-, -S- or -SO ₂ -.
m1 represents an integer of 1 to 5, and when m1 is 2 or more, groups in parentheses may be the same or different.
m2 represents an integer of 0 to 5, and when m2 is 2 or more, groups in parentheses may be the same or different.
m3 represents an integer of 0 to 5, and when m3 is 2 or more, groups in parentheses may be the same or different.
m4 represents an integer of 0 to 4, and when m4 is 2 or more, multiple ^R4 's may be the same or different.
m5 represents an integer of 0 to 4, and when m5 is 2 or more, multiple R5's may be the ^same or different.
m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R6 may be the ^same or different.
m7 represents an integer of 0 to 4, and when m7 is 2 or more, multiple R ⁷ may be the same or different.
m8 represents an integer of 0 to 5, and when m8 is 2 or more, multiple R ^8s may be the same or different.
m9 represents an integer of 0 to 5, and when m9 is 2 or more, multiple R ^9s may be the same or different.
However, 1≤m1+m7≤5, 0≤m2+m8≤5, and 0≤m3+m9≤5.
AI ⁻ represents an organic anion. ]
[14] A ¹ is *-X ⁰¹ -L ⁰¹ - or *-L ⁰¹ -X ⁰¹ - and A ² is *-X ⁰² -L ⁰² - or *-L ⁰² -X ⁰² - , A ³ is *-X ⁰³ -L ⁰³ - or *-L ⁰³ -X ⁰³ - (X ⁰¹ , X ⁰² and X ⁰³ are each independently -O-, -CO-, -S- or —SO ₂ —, L ⁰¹ , L ⁰² and L ⁰³ each independently represent a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon group may have a substituent; —CH ₂ — contained in the hydrocarbon group may be replaced with —O—, —CO—, —S— or —SO ₂ — * indicates benzene to which R ¹ , R ² or R ³ is attached represents the binding site to the ring.) The salt of [13].
[15] The salt of [14], wherein X ⁰¹ , X ⁰² and X ⁰³ are each independently -O- or -S-.
[16] L ⁰¹ , L ⁰² and L ⁰³ are each independently an alkanediyl group having 1 to 6 carbon atoms (-CH ₂ - contained in the alkanediyl group is replaced with -O- or -CO- The salt according to [14] or [15], which is
[17] The salt according to any one of [13] to [16], wherein the base labile group of R ¹⁰ is a group represented by formula (1b).

[In the formula (1b), R ^ba1 and R ^ba2 each independently represent a hydrogen atom, a fluorine atom or a fluorine atom-containing alkyl group having 1 to 6 carbon atoms.
R ^ba3 represents a fluorine atom or a fluorine atom-containing alkyl group having 1 to 6 carbon atoms.
* represents a binding site. ]
[18] The salt according to any one of [13] to [17], wherein AI ⁻ is a sulfonate anion, a sulfonylimide anion, a sulfonylmethide anion or a carboxylate anion.
[19] The salt according to any one of [13] to [18], wherein AI- is a sulfonate anion, ^and the sulfonate anion is an anion represented by formula (IA).

[In the formula (IA),
Q ¹ and Q ² each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms or a perfluoroalkyl group having 1 to 6 carbon atoms.
L ¹ represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and —CH ₂ — contained in the saturated hydrocarbon group may be replaced with —O— or —CO—; A hydrogen atom contained in may be substituted with a fluorine atom or a hydroxy group.
Y ¹ represents an optionally substituted methyl group or an optionally substituted alicyclic hydrocarbon group having 3 to 24 carbon atoms, and is included in the alicyclic hydrocarbon group -CH ₂ - may be replaced by -O-, -S-, -SO ₂ - or -CO-. ]

By using the resist composition containing the salt of the present invention, a resist pattern with good pattern collapse resistance (PCM) can be produced.

As used herein, "(meth)acrylic monomer" means "at least one of acrylic monomer and methacrylic monomer". Notations such as "(meth)acrylate" and "(meth)acrylic acid" have the same meaning. Any of the groups described in this specification that can have both a linear structure and a branched structure may be used. When —CH ₂ — contained in a hydrocarbon group or the like is replaced with —O—, —S—, —CO— or —SO ₂ —, the same examples apply to each group. A "combined group" means a group in which two or more of the exemplified groups are combined, and the valences of these groups may be appropriately changed depending on the bonding form. "Derived from" or "derived from" refers to the polymerization of a polymerizable C=C bond contained in the molecule to a -C-C- group (single bond). Where stereoisomers exist, all stereoisomers are included.

［式中、全ての符号は、それぞれ前記と同じ意味を表す。］ [Salt Represented by Formula (I)]
The present invention relates to a salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)").
In the salt (I), the negatively charged side is sometimes referred to as "anion (I)" and the positively charged side is referred to as "cation (I)".

[In the formula, all symbols have the same meanings as described above. ]

［式（Ｉ－Ｃ）中、全ての符号は、式（Ｉ）と同じ意味を表す。］ [Cation (I)]
The cation (I) of the salt of formula (I) is the cation of formula (IC).

[In formula (IC), all symbols have the same meanings as in formula (I). ]

In formula (I), the alkanediyl group in L ¹⁰ contained in R ¹ , R ² and R ³ includes methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, linear alkanediyl groups such as pentane-1,5-diyl group and hexane-1,6-diyl group; and ethane-1,1-diyl group, propane-1,1-diyl group and propane-1,2 -diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1, Branched alkanediyl groups such as 4-diyl group and 2-methylbutane-1,4-diyl group can be mentioned.
L ¹⁰ is preferably an alkanediyl group having 1 to 3 carbon atoms, more preferably a methylene group.

［式（１ｂ）中、Ｒ^ｂａ１及びＲ^ｂａ２は、それぞれ独立に、水素原子、フッ素原子又はフッ素原子を有する炭素数１～６のアルキル基を表す。
Ｒ^ｂａ３は、フッ素原子又はフッ素原子を有する炭素数１～６のアルキル基を表す。
＊は結合部位を表す。］ The base-labile group of R ¹⁰ contained in R ¹ , R ² and R ³ means that the group containing the group represented by R ¹⁰ is desorbed upon contact with a base (e.g., 2.38% tetramethylammonium hydroxide aqueous solution). It means a group in which a leaving group is eliminated to form a carboxy group or a hydroxy group.
As the base-labile group, a group represented by formula (1b) (hereinafter sometimes referred to as "base-labile group (1b)") is preferred.

[In the formula (1b), R ^ba1 and R ^ba2 each independently represent a hydrogen atom, a fluorine atom or a fluorine atom-containing alkyl group having 1 to 6 carbon atoms.
R ^ba3 represents a fluorine atom or a fluorine atom-containing alkyl group having 1 to 6 carbon atoms.
* represents a binding site. ]

Examples of alkyl groups having fluorine atoms for R ^ba1 , R ^ba2 and R ^ba3 include trifluoromethyl group, 2,2,2-trifluoroethyl group, perfluoroethyl group, 2,2,3,3,3- pentafluoropropyl group, 1-trifluoromethyl-2,2,2-trifluoroethyl group, perfluoropropyl group, 2,2,3,3,4,4,4-heptafluorobutyl group, perfluorobutyl group, 2 , 2,3,3,4,4,5,5,5-nonafluoropentyl group, perfluoropentyl group, perfluorohexyl group and the like. The number of carbon atoms in the alkyl group having a fluorine atom is preferably 1-5, more preferably 1-4, still more preferably 1-3.
R ^ba1 is preferably a hydrogen atom or a fluorine atom.
R ^ba2 is preferably a hydrogen atom, a fluorine atom or a trifluoromethyl group, more preferably a hydrogen atom or a fluorine atom.
R ^ba3 is preferably a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a perfluoroalkylmethyl group having 2 to 5 carbon atoms, more preferably a fluorine atom or a perfluoroalkyl group having 1 to 4 carbon atoms. preferable.
—C(R ^ba1 )(R ^ba2 )(R ^ba3 ) is a perfluoroalkyl group having 1 to 4 carbon atoms, a perfluoroalkylmethyl group having 1 to 4 carbon atoms, or 1-trifluoromethyl-2,2,2- A trifluoroethyl group is preferable, and a perfluoroalkyl group having 1 to 4 carbon atoms or a perfluoroalkylmethyl group having 1 to 4 carbon atoms is more preferable.
R ¹ , R ² and R ³ are preferably *-O-CO-R ¹⁰ , *-O-CO-O-R ¹⁰ or *-OL ¹⁰ -CO-O-R ¹⁰ , * -O-CO-R ¹⁰ or *-OL ¹⁰ -CO-OR ¹⁰ is more preferred. * represents a bonding site with a benzene ring.
The bonding positions of R ¹ , R ² and R ³ to the benzene ring may each independently be any of the o-position, m-position and p-position with respect to the bonding positions of A ¹ , A ² and A ³ . Among them, R ¹ , R ² and R ³ are each independently preferably bonded at the p-position or m-position with respect to the bonding position of A ¹ , A ² and A ³ , It is more preferable to have

具体的には、単環式の脂環式炭化水素基としては、シクロプロピル基、シクロブチル基、シクロペンチル基、シクロヘキシル基、シクロヘプチル基、シクロオクチル基、シクロデシル基等の単環式シクロアルキル基が挙げられる。多環式の脂環式炭化水素基としては、デカヒドロナフチル基、アダマンチル基、ノルボルニル基等の多環式シクロアルキル基、スピロシクロヘキサン－１，２’－シクロペンタン基、スピロアダマンタン－２，３’－シクロペンタン基等のシクロアルキル基、ノルボニル基もしくはアダマンチル基とそれぞれにスピロで結合したシクロアルキル基を有するスピロ環等が挙げられる。脂環式炭化水素基の炭素数は、好ましくは３～１８であり、より好ましくは３～１６であり、さらに好ましくは３～１２である。
芳香族炭化水素基としては、フェニル基、ナフチル基、ビフェニル基、アントリル基、フェナントリル基、ビナフチル基等が挙げられる。芳香族炭化水素基の炭素数は、好ましくは６～１８であり、より好ましくは６～１４であり、さらに好ましくは６～１０である。
組み合わせることにより形成される基としては、芳香族炭化水素基と鎖式炭化水素基とを組み合わせた基（例えば、芳香族炭化水素基－アルカンジイル基－＊、アルキル基－芳香族炭化水素基－＊）、脂環式炭化水素基と鎖式炭化水素基とを組み合わせた基（例えば、脂環式炭化水素基－アルカンジイル基－＊、アルキル基－脂環式炭化水素基－＊）、芳香族炭化水素基と脂環式炭化水素基とを組み合わせた基（例えば、芳香族炭化水素基－脂環式炭化水素基－＊、脂環式炭化水素基－芳香族炭化水素基－＊）が挙げられる。＊は結合部位を表す。
芳香族炭化水素基－アルカンジイル基－＊としては、ベンジル基、フェネチル基等のアラルキル基が挙げられる。
アルキル基－芳香族炭化水素基－＊としては、トリル基、キシリル基、クメニル基等が挙げられる。
脂環式炭化水素基－アルカンジイル基－＊としては、シクロヘキシルメチル基、シクロヘキシルエチル基、１－（アダマンタン－１－イル）メチル基、１－（アダマンタン－１－イル）－１－メチルエチル基等のシクロアルキルアルキル基等が挙げられる。
アルキル基－脂環式炭化水素基－＊としては、メチルシクロヘキシル基、ジメチルシクロヘキシル基、２－アルキルアダマンタン－２－イル基等のアルキル基を有するシクロアルキル基等が挙げられる。
芳香族炭化水素基－脂環式炭化水素基－＊としては、フェニルシクロヘキシル基等が挙げられる。
脂環式炭化水素基－芳香族炭化水素基－＊としては、シクロヘキシルフェニル基等が挙げられる。
なお、組み合わせにおいて、脂環式炭化水素基、芳香族炭化水素基、鎖式炭化水素基は、それぞれ２種以上を組み合わせてもよい。また、いずれの基がベンゼン環に結合していてもよい。
ハロアルキル基及び炭化水素基に含まれる－ＣＨ₂－が、－Ｏ－、－Ｓ－、－ＣＯ－又は－ＳＯ_２－に置き換わった基としては、ヒドロキシ基（メチル基中に含まれる－ＣＨ₂－が、－Ｏ－に置き換わった基）、チオール基（メチル基中に含まれる－ＣＨ₂－が、－Ｓ－に置き換わった基）、カルボキシ基（エチル基中に含まれる－ＣＨ₂－ＣＨ₂－が、－Ｏ－ＣＯ－に置き換わった基）、アルコキシ基（アルキル基中に含まれる任意の位置の－ＣＨ₂－が、－Ｏ－に置き換わった基）、アルキルチオ基（アルキル基中に含まれる任意の位置の－ＣＨ₂－が、－Ｓ－に置き換わった基）、アルコキシカルボニル基（アルキル基中に含まれる任意の位置の－ＣＨ₂－ＣＨ₂－が、－Ｏ－ＣＯ－に置き換わった基）、アルキルカルボニル基（アルキル基中に含まれる任意の位置の－ＣＨ₂－が、－ＣＯ－に置き換わった基）、アルキルスルホニル基（アルキル基中に含まれる任意の位置の－ＣＨ₂－が、－ＳＯ_２－に置き換わった基）、アルキルカルボニルオキシ基（アルキル基中に含まれる任意の位置の－ＣＨ₂－ＣＨ₂－が、－ＣＯ－Ｏ－に置き換わった基）、オキシ基（メチレン基中に含まれる－ＣＨ₂－が、－Ｏ－に置き換わった基）、カルボニル基（メチレン基中に含まれる－ＣＨ₂－が、－ＣＯ－に置き換わった基）、チオ基（メチレン基中に含まれる－ＣＨ₂－が、－Ｓ－に置き換わった基）、スルホニル基（メチレン基中に含まれる－ＣＨ₂－が、－ＳＯ_２－に置き換わった基）、アルカンジイルオキシ基（アルカンジイル基中に含まれる任意の位置の－ＣＨ₂－が、－Ｏ－に置き換わった基）、アルカンジイルオキシカルボニル基（アルカンジイル基中に含まれる任意の位置の－ＣＨ₂－ＣＨ₂－が、－Ｏ－ＣＯ－に置き換わった基）、アルカンジイルカルボニル基（アルカンジイル基中に含まれる任意の位置の－ＣＨ₂－が、－ＣＯ－に置き換わった基）、アルカンジイルカルボニルオキシ基（アルカンジイル基中に含まれる任意の位置の－ＣＨ₂－ＣＨ₂－が、－ＣＯ－Ｏ－に置き換わった基）、アルカンジイルチオ基（アルカンジイル基中に含まれる任意の位置の－ＣＨ₂－が、－Ｓ－に置き換わった基）、アルカンジイルスルホニル基（アルカンジイル基中に含まれる任意の位置の－ＣＨ₂－が、－ＳＯ_２－に置き換わった基）、シクロアルコキシ基、シクロアルキルアルコキシ基、アルコキシカルボニルオキシ基、芳香族炭化水素基－カルボニルオキシ基、芳香族炭化水素基－カルボニル基、芳香族炭化水素基－オキシ基、ハロアルコキシ基（ハロアルキル基中に含まれる任意の位置の－ＣＨ₂－が、－Ｏ－に置き換わった基）、ハロアルコキシカルボニル基（ハロアルキル基中に含まれる任意の位置の－ＣＨ₂－ＣＨ₂－が、－Ｏ－ＣＯ－に置き換わった基）、ハロアルキルカルボニル基（ハロアルキル基中に含まれる任意の位置の－ＣＨ₂－が、－ＣＯ－に置き換わった基）、ハロアルキルカルボニルオキシ基（ハロアルキル基中に含まれる任意の位置の－ＣＨ₂－ＣＨ₂－が、－ＣＯ－Ｏ－に置き換わった基）、これらの基のうち２種以上を組み合わせた基等が挙げられる。
アルコキシ基としては、炭素数１～１７のアルコキシ基が挙げられ、例えば、メトキシ基、エトキシ基、プロポキシ基、ブトキシ基、ペンチルオキシ基、ヘキシルオキシ基、オクチルオキシ基、２－エチルヘキシルオキシ基、ノニルオキシ基、デシルオキシ基、ウンデシルオキシ基等が挙げられる。アルコキシ基の炭素数は、好ましくは１～１１であり、より好ましくは１～６であり、さらに好ましくは１～４であり、さらにより好ましくは１～３である。
アルキルチオ基としては、炭素数１～１７のアルキルチオ基が挙げられ、例えば、メチルチオ基、エチルチオ基、プロピルチオ基、ブチルチオ基、ペンチルチオ基、ヘキシルチオ基、オクチルチオ基、２－エチルヘキシルチオ基、ノニルチオ基、デシルチオ基、ウンデシルチオ基等が挙げられる。アルキルチオ基の炭素数は、好ましくは１～１１であり、より好ましくは１～６であり、さらに好ましくは１～４であり、さらにより好ましくは１～３である。
アルコキシカルボニル基、アルキルカルボニル基及びアルキルカルボニルオキシ基は、上述したアルキル基又はアルコキシ基にカルボニル基又はカルボニルオキシ基が結合した基を表す。
アルコキシカルボニル基としては、炭素数２～１７のアルコキシカルボニル基が挙げられ、例えば、メトキシカルボニル基、エトキシカルボニル基、ブトキシカルボニル基等が挙げられる。アルキルカルボニル基としては、炭素数２～１８のアルキルカルボニル基が挙げられ、例えば、アセチル基、プロピオニル基及びブチリル基等が挙げられる。アルキルカルボニルオキシ基としては、炭素数２～１７のアルキルカルボニルオキシ基が挙げられ、例えば、アセチルオキシ基、プロピオニルオキシ基、ブチリルオキシ基等が挙げられる。アルコキシカルボニル基の炭素数は、好ましくは２～１１であり、より好ましくは２～６であり、さらに好ましくは２～４であり、さらにより好ましくは２又は３である。アルキルカルボニル基の炭素数は、好ましくは２～１２であり、より好ましくは２～６であり、さらに好ましくは２～４であり、さらにより好ましくは２又は３である。アルキルカルボニルオキシ基の炭素数は、好ましくは２～１１であり、より好ましくは２～６であり、さらに好ましくは２～４であり、さらにより好ましくは２又は３である。
アルキルスルホニル基としては、炭素数１～１７のアルキルスルホニル基が挙げられ、例えば、メチルスルホニル基、エチルスルホニル基、プロピルスルホニル基、ブチルスルホニル基、ペンチルスルホニル基、ヘキシルスルホニル基、オクチルスルホニル基、２－エチルヘキシルスルホニル基、ノニルスルホニル基、デシルスルホニル基、ウンデシルスルホニル基等が挙げられる。アルキルスルホニル基の炭素数は、好ましくは１～１１であり、より好ましくは１～６であり、さらに好ましくは１～４であり、さらにより好ましくは１～３である。
アルカンジイルオキシ基としては、炭素数１～１７のアルカンジイルオキシ基が挙げられ、例えば、メチレンオキシ基、エチレンオキシ基、プロパンジイルオキシ基、ブタンジイルオキシ基、ペンタンジイルオキシ基等が挙げられる。アルカンジイルオキシ基の炭素数は、好ましくは１～１１であり、より好ましくは１～６であり、さらに好ましくは１～４であり、さらにより好ましくは１～３である。
アルカンジイルオキシカルボニル基としては、炭素数２～１７のアルカンジイルオキシカルボニル基が挙げられ、例えば、メチレンオキシカルボニル基、エチレンオキシカルボニル基、プロパンジイルオキシカルボニル基、ブタンジイルオキシカルボニル基等が挙げられる。アルカンジイルカルボニル基としては、炭素数２～１８のアルカンジイルカルボニル基が挙げられ、例えば、メチレンカルボニル基、エチレンカルボニル基、プロパンジイルカルボニル基、ブタンジイルカルボニル基、ペンタンジイルカルボニル基等が挙げられる。アルカンジイルカルボニルオキシ基としては、炭素数２～１７のアルカンジイルカルボニルオキシ基が挙げられ、例えば、メチレンカルボニルオキシ基、エチレンカルボニルオキシ基、プロパンジイルカルボニルオキシ基、ブタンジイルカルボニルオキシ基等が挙げられる。アルカンジイルオキシカルボニル基の炭素数は、好ましくは２～１１であり、より好ましくは２～６であり、さらに好ましくは２～４であり、さらにより好ましくは２又は３である。アルカンジイルカルボニル基の炭素数は、好ましくは２～１２であり、より好ましくは２～６であり、さらに好ましくは２～４であり、さらにより好ましくは２又は３である。アルカンジイルカルボニルオキシ基の炭素数は、好ましくは２～１１であり、より好ましくは２～６であり、さらに好ましくは２～４であり、さらにより好ましくは２又は３である。
アルカンジイルチオ基としては、炭素数１～１７のアルカンジイルチオ基が挙げられ、例えば、メチレンチオ基、エチレンチオ基、プロピレンチオ基等が挙げられる。アルカンジイルチオ基の炭素数は、好ましくは１～１１であり、より好ましくは１～６であり、さらに好ましくは１～４であり、さらにより好ましくは１～３である。
アルカンジイルスルホニル基としては、炭素数１～１７のアルカンジイルスルホニル基が挙げられ、例えば、メチレンスルホニル基、エチレンスルホニル基、プロピレンスルホニル基等が挙げられる。アルカンジイルスルホニル基の炭素数は、好ましくは１～１１であり、より好ましくは１～６であり、さらに好ましくは１～４であり、さらにより好ましくは１～３である。
シクロアルコキシ基としては、炭素数３～１７のシクロアルコキシ基が挙げられ、例えば、シクロヘキシルオキシ基等が挙げられる。シクロアルキルアルコキシ基としては、炭素数４～１７のシクロアルキルアルコキシ基が挙げられ、例えば、シクロヘキシルメトキシ基等が挙げられる。アルコキシカルボニルオキシ基としては、炭素数２～１６のアルコキシカルボニルオキシ基が挙げられ、例えば、ブトキシカルボニルオキシ基等が挙げられる。芳香族炭化水素基－カルボニルオキシ基としては、炭素数７～１７の芳香族炭化水素基－カルボニルオキシ基が挙げられ、例えば、ベンゾイルオキシ基等が挙げられる。芳香族炭化水素基－カルボニル基としては、炭素数７～１７の芳香族炭化水素基－カルボニル基が挙げられ、例えば、ベンゾイル基等が挙げられる。芳香族炭化水素基－オキシ基としては、炭素数６～１６の芳香族炭化水素基－オキシ基が挙げられ、例えば、フェニルオキシ基等が挙げられる。
ハロアルコキシ基、ハロアルコキシカルボニル基、ハロアルキルカルボニル基、ハロアルキルカルボニルオキシ基としては、炭素数１～１１のハロアルコキシ基、炭素数２～１１のハロアルコキシカルボニル基、炭素数２～１２のハロアルキルカルボニル基、炭素数２～１１のハロアルキルカルボニルオキシ基が挙げられ、例えば、上記に例示した基の１以上の水素原子をハロゲン原子に置き換えた基が挙げられる。 また、脂環式炭化水素基に含まれる－ＣＨ_２－が、－Ｏ－、－Ｓ－、－ＣＯ－又は－ＳＯ_２－で置き換わった基としては、以下に表される基等が挙げられる。以下に表される基の－Ｏ－又は－ＣＯ－は、－Ｓ－又は－ＳＯ_２－に置き換わってもよい。結合部位は任意の位置とすることができる。

ハロアルキル基及び炭化水素基に含まれる－ＣＨ_２－が、－Ｏ－、－Ｓ－、－ＣＯ－又は－ＳＯ_２－で置き換わっている場合、置き換わる前の炭素数を該炭化水素基の総炭素数とする。また、その数は、１つでもよいし、２以上でもよい。
Ｒ^４、Ｒ^５、Ｒ^６、Ｒ^７、Ｒ^８及びＲ^９の炭化水素基が有していてもよい置換基としては、ハロゲン原子、シアノ基、炭素数１～１２のアルキル基（該アルキル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい）が挙げられる。
ハロゲン原子としては、上述した基と同様の基が挙げられる。
炭素数１～１２のアルキル基としては、上述した基と同様の基が挙げられる。
置換基として、アルキル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっている場合、置き換わる前の炭素数を該アルキル基の総炭素数とする。置き換わった基としては、ヒドロキシ基、カルボキシ基、アルコキシ基、アルコキシカルボニル基、アルキルカルボニル基、アルキルカルボニルオキシ基等が挙げられる。
アルコキシ基、アルコキシカルボニル基、アルキルカルボニル基及びアルキルカルボニルオキシ基としては、炭素数１～１１のアルコキシ基、炭素数２～１１のアルコキシカルボニル基、炭素数２～１２のアルキルカルボニル基及び炭素数２～１１のアルキルカルボニルオキシ基が挙げられ、上述した基と同様の基が挙げられる。
炭化水素基は、１つの置換基又は複数の置換基を有していてもよい。 Halogen atoms for R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ include fluorine, chlorine, bromine and iodine atoms.
The haloalkyl group having 1 to 12 carbon atoms of R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ represents an alkyl group having 1 to 12 carbon atoms and having a halogen atom. Examples include a fluorinated alkyl group, a chlorinated alkyl group having 1 to 12 carbon atoms, an alkyl bromide group having 1 to 12 carbon atoms, an iodinated alkyl group having 1 to 12 carbon atoms, and the like. Haloalkyl groups include perfluoroalkyl groups having 1 to 12 carbon atoms (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3, 3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group and the like. The haloalkyl group preferably has 1 to 9 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and still more preferably 1 to 3 carbon atoms.
Examples of hydrocarbon groups having 1 to 18 carbon atoms for R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Hydrogen groups and groups formed by combining them are included.
Alkyl groups include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, 2-ethylhexyl group and octyl group. , nonyl group, decyl group, undecyl group and dodecyl group.
The chain hydrocarbon group preferably has 1 to 12 carbon atoms, more preferably 1 to 9 carbon atoms, still more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and still more preferably 1 to 3.
The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and includes the groups shown below. The binding site can be at any position.

Specifically, monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl groups. mentioned. Polycyclic alicyclic hydrocarbon groups include polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group and norbornyl group, spirocyclohexane-1,2′-cyclopentane group, spiroadamantane-2,3 A cycloalkyl group such as a '-cyclopentane group, a spiro ring having a cycloalkyl group spiro-bonded to a norbornyl group or an adamantyl group, and the like can be mentioned. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3-18, more preferably 3-16, still more preferably 3-12.
Aromatic hydrocarbon groups include phenyl, naphthyl, biphenyl, anthryl, phenanthryl, and binaphthyl groups. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6-18, more preferably 6-14, still more preferably 6-10.
Examples of the group formed by combining include groups in which an aromatic hydrocarbon group and a chain hydrocarbon group are combined (e.g., aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group- *), a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group (e.g., alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*), aromatic A group combining a group hydrocarbon group and an alicyclic hydrocarbon group (e.g., aromatic hydrocarbon group-alicyclic hydrocarbon group-*, alicyclic hydrocarbon group-aromatic hydrocarbon group-*) mentioned. * represents a binding site.
The aromatic hydrocarbon group-alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group.
Alkyl group-aromatic hydrocarbon group-* includes tolyl group, xylyl group, cumenyl group and the like.
Alicyclic hydrocarbon group-alkanediyl group-* includes cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl group cycloalkylalkyl groups such as
Examples of alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group and 2-alkyladamantan-2-yl group.
The aromatic hydrocarbon group-alicyclic hydrocarbon group-* includes a phenylcyclohexyl group and the like.
The alicyclic hydrocarbon group-aromatic hydrocarbon group-* includes a cyclohexylphenyl group and the like.
In combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may each be combined with two or more kinds. Also, any group may be bonded to the benzene ring.
Examples of groups in which —CH ₂ — contained in haloalkyl groups and hydrocarbon groups are replaced with —O—, —S—, —CO— or —SO ₂ — include hydroxy groups (-CH ₂ - is replaced by -O-), thiol group (group in which -CH ₂ - contained in the methyl group is replaced by -S-), carboxy group (-CH ₂ -CH contained in the ethyl group _2- is replaced with -O-CO-), alkoxy group (group in which any position of -CH ₂ - contained in the alkyl group is replaced with -O-), alkylthio group (in the alkyl group -CH ₂ - at any position contained is replaced with -S-), alkoxycarbonyl group (where -CH ₂ -CH ₂ - at any position contained in an alkyl group is substituted with -O-CO- substituted group), alkylcarbonyl group (group in which -CH ₂ - at any position contained in the alkyl group is replaced with -CO-), alkylsulfonyl group (-CH at any position contained in the alkyl group _2- is replaced with -SO ₂ -), alkylcarbonyloxy group (group in which any position of -CH ₂ -CH ₂ - contained in the alkyl group is replaced with -CO-O-), oxy group (group in which —CH ₂ — contained in the methylene group is replaced by —O—), carbonyl group (group in which —CH ₂ — contained in the methylene group is replaced by —CO—), thio group ( -CH ₂ - contained in a methylene group is replaced with -S-), sulfonyl group (group in which -CH ₂ - contained in a methylene group is replaced with -SO ₂ -), alkanediyloxy group (A group in which —CH ₂ — at any position in the alkanediyl group is replaced with —O—), alkanediyloxycarbonyl group (—CH ₂ —CH ₂ at any position in the alkanediyl group - is replaced with -O-CO-), alkanediylcarbonyl group (group in which any position of -CH ₂ - contained in the alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy group (a group in which —CH ₂ —CH ₂ — at any position in the alkanediyl group is replaced with —CO—O—), alkanediylthio group (—CH at any position in the alkanediyl group) _2- is a group substituted for -S-), alkanediylsulfonyl group (any position contained in the alkanediyl group of —CH ₂ — is replaced with —SO ₂ —), cycloalkoxy group, cycloalkylalkoxy group, alkoxycarbonyloxy group, aromatic hydrocarbon group-carbonyloxy group, aromatic hydrocarbon group-carbonyl group, Aromatic hydrocarbon group -oxy group, haloalkoxy group (group in which -CH ₂ - at any position contained in haloalkyl group is replaced with -O-), haloalkoxycarbonyl group (any position contained in haloalkyl group) -CH ₂ -CH ₂ - at position is replaced with -O-CO-), haloalkylcarbonyl group (haloalkyl group at any position -CH ₂ - is replaced with -CO- ), a haloalkylcarbonyloxy group (a group in which —CH ₂ —CH ₂ — at any position contained in a haloalkyl group is replaced with —CO—O—), a combination of two or more of these groups, etc. is mentioned.
The alkoxy group includes alkoxy groups having 1 to 17 carbon atoms, such as methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, octyloxy, 2-ethylhexyloxy, nonyloxy. group, decyloxy group, undecyloxy group, and the like. The alkoxy group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and still more preferably 1 to 3 carbon atoms.
The alkylthio group includes alkylthio groups having 1 to 17 carbon atoms, such as methylthio, ethylthio, propylthio, butylthio, pentylthio, hexylthio, octylthio, 2-ethylhexylthio, nonylthio, decylthio. group, undecylthio group, and the like. The number of carbon atoms in the alkylthio group is preferably 1-11, more preferably 1-6, even more preferably 1-4, still more preferably 1-3.
An alkoxycarbonyl group, an alkylcarbonyl group and an alkylcarbonyloxy group represent groups in which a carbonyl group or a carbonyloxy group is bonded to the above alkyl group or alkoxy group.
The alkoxycarbonyl group includes alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl and butoxycarbonyl groups. The alkylcarbonyl group includes alkylcarbonyl groups having 2 to 18 carbon atoms, such as acetyl group, propionyl group and butyryl group. The alkylcarbonyloxy group includes alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as acetyloxy, propionyloxy and butyryloxy groups. The alkoxycarbonyl group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms. The alkylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms.
The alkylsulfonyl group includes alkylsulfonyl groups having 1 to 17 carbon atoms, such as methylsulfonyl, ethylsulfonyl, propylsulfonyl, butylsulfonyl, pentylsulfonyl, hexylsulfonyl, octylsulfonyl, 2 -ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms in the alkylsulfonyl group is preferably 1-11, more preferably 1-6, even more preferably 1-4, still more preferably 1-3.
The alkanediyloxy group includes alkanediyloxy groups having 1 to 17 carbon atoms, such as methyleneoxy, ethyleneoxy, propanediyloxy, butanediyloxy, and pentanediyloxy groups. The alkanediyloxy group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and still more preferably 1 to 3 carbon atoms.
The alkanediyloxycarbonyl group includes an alkanediyloxycarbonyl group having 2 to 17 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, a butanediyloxycarbonyl group, and the like. . The alkanediylcarbonyl group includes alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as methylenecarbonyl, ethylenecarbonyl, propanediylcarbonyl, butanediylcarbonyl and pentanediylcarbonyl groups. The alkanediylcarbonyloxy group includes an alkanediylcarbonyloxy group having 2 to 17 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, a butanediylcarbonyloxy group, and the like. . The alkanediyloxycarbonyl group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms. The alkanediylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms. The alkanediylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms.
The alkanediylthio group includes alkanediylthio groups having 1 to 17 carbon atoms, such as methylenethio, ethylenethio and propylenethio groups. The alkanediylthio group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and still more preferably 1 to 3 carbon atoms.
The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group and the like. The alkanediylsulfonyl group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and still more preferably 1 to 3 carbon atoms.
The cycloalkoxy group includes a cycloalkoxy group having 3 to 17 carbon atoms, such as a cyclohexyloxy group. The cycloalkylalkoxy group includes a cycloalkylalkoxy group having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. The alkoxycarbonyloxy group includes an alkoxycarbonyloxy group having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. The aromatic hydrocarbon group-carbonyloxy group includes an aromatic hydrocarbon group-carbonyloxy group having 7 to 17 carbon atoms, such as a benzoyloxy group. The aromatic hydrocarbon group-carbonyl group includes an aromatic hydrocarbon group-carbonyl group having 7 to 17 carbon atoms, such as a benzoyl group. The aromatic hydrocarbon group-oxy group includes an aromatic hydrocarbon group-oxy group having 6 to 16 carbon atoms, such as a phenyloxy group.
The haloalkoxy group, haloalkoxycarbonyl group, haloalkylcarbonyl group and haloalkylcarbonyloxy group include a haloalkoxy group having 1 to 11 carbon atoms, a haloalkoxycarbonyl group having 2 to 11 carbon atoms and a haloalkylcarbonyl group having 2 to 12 carbon atoms. , and haloalkylcarbonyloxy groups having 2 to 11 carbon atoms, such as groups in which one or more hydrogen atoms in the above-exemplified groups are replaced with halogen atoms. In addition, the group in which —CH ₂ — contained in the alicyclic hydrocarbon group is replaced with —O—, —S—, —CO— or —SO ₂ — includes groups represented below. . -O- or -CO- in the groups represented below may be replaced with -S- or -SO ₂ -. The binding site can be at any position.

When —CH ₂ — contained in a haloalkyl group or a hydrocarbon group is replaced with —O—, —S—, —CO— or —SO ₂ —, the total number of carbon atoms in the hydrocarbon group before replacement is number. Moreover, the number may be one, or two or more.
Examples of substituents which the hydrocarbon groups of R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ may have include halogen atoms, cyano groups, alkyl groups having 1 to 12 carbon atoms (the alkyl —CH ₂ — contained in the group may be replaced with —O— or —CO—.
Halogen atoms include the same groups as those described above.
Examples of the alkyl group having 1 to 12 carbon atoms include the same groups as those described above.
When —CH ₂ — contained in an alkyl group as a substituent is replaced with —O— or —CO—, the number of carbon atoms before the replacement is taken as the total number of carbon atoms in the alkyl group. Substituted groups include hydroxy groups, carboxy groups, alkoxy groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, and the like.
The alkoxy group, alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group include an alkoxy group having 1 to 11 carbon atoms, an alkoxycarbonyl group having 2 to 11 carbon atoms, an alkylcarbonyl group having 2 to 12 carbon atoms and an alkylcarbonyl group having 2 carbon atoms. to 11 alkylcarbonyloxy groups, including the same groups as those described above.
The hydrocarbon group may have one substituent or multiple substituents.

具体的には、シクロブタン－１，３－ジイル基、シクロペンタン－１，３－ジイル基、シクロヘキサン－１，４－ジイル基、シクロオクタン－１，５－ジイル基等の単環式シクロアルカンジイル基である単環式の脂環式炭化水素基及び
ノルボルナン－１，４－ジイル基、ノルボルナン－２，５－ジイル基、アダマンタン－１，５－ジイル基、アダマンタン－２，６－ジイル基等の多環式シクロアルカンジイル基である多環式の脂環式炭化水素基が挙げられる。
脂環式炭化水素基の炭素数は、好ましくは３～１８であり、より好ましくは３～１６であり、さらに好ましくは３～１２であり、さらにより好ましくは３～１０である。
芳香族炭化水素基としては、フェニレン基、ナフチレン基、アントリレン基、ビフェニレン基、フェナントリレン基等のアリーレン基等の芳香族炭化水素基が挙げられる。芳香族炭化水素基の炭素数は、好ましくは６～１８であり、より好ましくは６～１４であり、さらに好ましくは６～１０である。
組み合わせることにより形成される基としては、脂環式炭化水素基とアルカンジイル基とを組み合わせた基、芳香族炭化水素基とアルカンジイル基とを組み合わせた基及び脂環式炭化水素基と芳香族炭化水素基とを組み合わせた基が挙げられる。ここで、脂環式炭化水素基及び／又は芳香族炭化水素基との組み合わせにおけるアルカンジイル基は、メチレン基を含んでいてもよい。組み合わせにおいて、鎖式炭化水素基、脂環式炭化水素基、芳香族炭化水素基は、それぞれ２種以上を組み合わせてもよい。また、いずれの基がＲ^１、Ｒ^２又はＲ^３が結合するベンゼン環に結合していてもよい。
脂環式炭化水素基とアルカンジイル基とを組み合わせた基としては、例えば、－２価の脂環式炭化水素基－アルカンジイル基－、－アルカンジイル基－２価の脂環式炭化水素基－アルカンジイル基－、－アルカンジイル基－２価の脂環式炭化水素基－等が挙げられる。
芳香族炭化水素基とアルカンジイル基とを組み合わせた基としては、例えば、－２価の芳香族炭化水素基－アルカンジイル基－、－アルカンジイル基－２価の芳香族炭化水素基－アルカンジイル基－、－アルカンジイル基－２価の芳香族炭化水素基－等が挙げられる。
脂環式炭化水素基と芳香族炭化水素基とを組み合わせた基としては、－芳香族炭化水素基－脂環式炭化水素基－、－脂環式炭化水素基－芳香族炭化水素基－、－脂環式炭化水素基－芳香族炭化水素基－脂環式炭化水素基－等が挙げられる。 Hydrocarbon groups for A ¹ , A ² and A ³ include linear or branched chain hydrocarbon groups (e.g., alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups. , and aromatic hydrocarbon groups, and combinations of two or more of these groups may also be used. The number of carbon atoms in the hydrocarbon group is preferably 2 to 19, more preferably 2 to 18, still more preferably 2 to 16, still more preferably 2 to 14, still more preferably 2 to 12.
Chain hydrocarbon groups include methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12 -diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17-diyl group Linear alkanediyl group and ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group branched alkanes such as groups, 2-methylpropane-1,3-diyl groups, 2-methylpropane-1,2-diyl groups, pentane-1,4-diyl groups, and 2-methylbutane-1,4-diyl groups A diyl group is mentioned.
The chain hydrocarbon group preferably has 2 to 18 carbon atoms, more preferably 2 to 12 carbon atoms, still more preferably 2 to 9 carbon atoms, still more preferably 2 to 6 carbon atoms, and still more preferably 2 to 4, and more preferably 2 or 3.
The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and includes the groups shown below. The binding site can be at any position.

Specifically, monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group and cyclooctane-1,5-diyl group monocyclic alicyclic hydrocarbon groups and norbornane-1,4-diyl groups, norbornane-2,5-diyl groups, adamantane-1,5-diyl groups, adamantane-2,6-diyl groups, etc. and a polycyclic alicyclic hydrocarbon group which is a polycyclic cycloalkanediyl group.
The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3-18, more preferably 3-16, even more preferably 3-12, still more preferably 3-10.
Examples of aromatic hydrocarbon groups include aromatic hydrocarbon groups such as phenylene groups, naphthylene groups, anthrylene groups, biphenylene groups, and arylene groups such as phenanthrylene groups. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6-18, more preferably 6-14, still more preferably 6-10.
Groups formed by combining include a group formed by combining an alicyclic hydrocarbon group and an alkanediyl group, a group formed by combining an aromatic hydrocarbon group and an alkanediyl group, and a group formed by combining an alicyclic hydrocarbon group and an aromatic A group combined with a hydrocarbon group can be mentioned. Here, the alkanediyl group in combination with the alicyclic hydrocarbon group and/or the aromatic hydrocarbon group may contain a methylene group. Combination WHEREIN: A chain|strand hydrocarbon group, an alicyclic hydrocarbon group, and an aromatic hydrocarbon group may each combine 2 or more types. Also, any group may be bonded to the benzene ring to which R ¹ , R ² or R ³ is bonded.
Groups in which an alicyclic hydrocarbon group and an alkanediyl group are combined include, for example, -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-bivalent alicyclic hydrocarbon group -alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group- and the like.
Groups in which an aromatic hydrocarbon group and an alkanediyl group are combined include, for example, -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group- and the like.
Groups in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are combined include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, - alicyclic hydrocarbon group - aromatic hydrocarbon group - alicyclic hydrocarbon group - and the like.

When —CH ₂ — contained in a hydrocarbon group is replaced with —O—, —CO—, —S— or —SO ₂ —, the number of carbon atoms before replacement is taken as the total number of carbon atoms in the hydrocarbon group. . Moreover, the number may be one, or two or more.
The group in which -CH ₂ - contained in the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO ₂ - includes a hydroxy group (-CH ₂ - contained in the methyl group, -O-), carboxy group (group in which -CH ₂ -CH ₂ - contained in the ethyl group is replaced by -O-CO-), thiol group (-CH ₂ contained in the methyl group - is replaced with -S-), alkoxy group (group in which any position of -CH ₂ - contained in the alkyl group is replaced with -O-), alkoxycarbonyl group (contained in the alkyl group A group in which —CH ₂ —CH ₂ — at any position is replaced with —O—CO—), an alkylcarbonyl group (a group in which —CH ₂ — at any position in an alkyl group is replaced with —CO— group), alkylcarbonyloxy group (group in which —CH ₂ —CH ₂ — at any position in the alkyl group is replaced with —CO—O-), alkylthio group (any position in the alkyl group -CH ₂ - is replaced with -S-), alkylsulfonyl group (group in which any position of -CH ₂ - contained in an alkyl group is replaced with -SO ₂ -), oxy group (methylene -CH ₂ - contained in the group is replaced with -O-), carbonyl group (group in which the -CH ₂ - contained in the methylene group is replaced by -CO-), thio group (in the methylene group -CH ₂ - contained in is replaced by -S-), sulfonyl group (group in which -CH ₂ - contained in the methylene group is replaced by -SO ₂ -), alkanediyloxy group (alkanediyl a group in which —CH ₂ — at any position contained in the group is replaced with —O—), alkanediyloxycarbonyl group (where —CH ₂ —CH ₂ — at any position contained in the alkanediyl group —O—CO—), alkanediylcarbonyl group (group in which —CH ₂ — at any position in the alkanediyl group is replaced with —CO—), alkanediylcarbonyloxy group (alkanediyl a group in which —CH ₂ —CH ₂ — at any position contained in the group is replaced with —CO—O—), alkanediylsulfonyl group (where —CH ₂ — at any position contained in the alkanediyl group , a group substituted for —SO ₂ —), an alkanediylthio group (a —CH _2- is a group substituted with -S-), cycloalkoxy group, cycloalkylalkoxy group, alkoxycarbonyloxy group, aromatic hydrocarbon group-carbonyloxy group, aromatic hydrocarbon group-carbonyl group, aromatic hydrocarbon A group-oxy group, a group obtained by combining two or more of these groups, and the like can be mentioned.
The alkoxy group includes alkoxy groups having 1 to 17 carbon atoms, such as methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, octyloxy, 2-ethylhexyloxy, nonyloxy. group, decyloxy group, undecyloxy group, and the like. The alkoxy group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and still more preferably 1 to 3 carbon atoms.
An alkoxycarbonyl group, an alkylcarbonyl group and an alkylcarbonyloxy group represent groups in which a carbonyl group or a carbonyloxy group is bonded to the above alkyl group or alkoxy group.
The alkoxycarbonyl group includes alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl and butoxycarbonyl groups. The alkylcarbonyl group includes alkylcarbonyl groups having 2 to 18 carbon atoms, such as acetyl group, propionyl group and butyryl group. The alkylcarbonyloxy group includes alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as acetyloxy, propionyloxy and butyryloxy groups. The alkoxycarbonyl group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms. The alkylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms.
The alkylthio group includes alkylthio groups having 1 to 17 carbon atoms, such as methylthio, ethylthio, propylthio, butylthio, pentylthio, hexylthio, octylthio, 2-ethylhexylthio, nonylthio, decylthio. group, undecylthio group, and the like. The number of carbon atoms in the alkylthio group is preferably 1-11, more preferably 1-6, even more preferably 1-4, still more preferably 1-3.
The alkylsulfonyl group includes alkylsulfonyl groups having 1 to 17 carbon atoms, such as methylsulfonyl, ethylsulfonyl, propylsulfonyl, butylsulfonyl, pentylsulfonyl, hexylsulfonyl, octylsulfonyl, 2 -ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms in the alkylsulfonyl group is preferably 1-11, more preferably 1-6, even more preferably 1-4, still more preferably 1-3.
The alkanediyloxy group includes alkanediyloxy groups having 1 to 17 carbon atoms, such as methyleneoxy, ethyleneoxy, propanediyloxy, butanediyloxy, and pentanediyloxy groups. The alkanediyloxy group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and still more preferably 1 to 3 carbon atoms.
The alkanediyloxycarbonyl group includes an alkanediyloxycarbonyl group having 2 to 17 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, a butanediyloxycarbonyl group, and the like. . The alkanediylcarbonyl group includes alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as methylenecarbonyl, ethylenecarbonyl, propanediylcarbonyl, butanediylcarbonyl and pentanediylcarbonyl groups. The alkanediylcarbonyloxy group includes an alkanediylcarbonyloxy group having 2 to 17 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, a butanediylcarbonyloxy group, and the like. . The alkanediyloxycarbonyl group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms. The alkanediylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms. The alkanediylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and still more preferably 2 or 3 carbon atoms.
The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group and the like. The alkanediylsulfonyl group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and still more preferably 1 to 3 carbon atoms.
The alkanediylthio group includes alkanediylthio groups having 1 to 17 carbon atoms, such as methylenethio, ethylenethio and propylenethio groups. The alkanediylthio group preferably has 1 to 11 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and still more preferably 1 to 3 carbon atoms.
The cycloalkoxy group includes a cycloalkoxy group having 3 to 17 carbon atoms, such as a cyclohexyloxy group. The cycloalkylalkoxy group includes a cycloalkylalkoxy group having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. The alkoxycarbonyloxy group includes an alkoxycarbonyloxy group having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. The aromatic hydrocarbon group-carbonyloxy group includes an aromatic hydrocarbon group-carbonyloxy group having 7 to 17 carbon atoms, such as a benzoyloxy group. The aromatic hydrocarbon group-carbonyl group includes an aromatic hydrocarbon group-carbonyl group having 7 to 17 carbon atoms, such as a benzoyl group. The aromatic hydrocarbon group-oxy group includes an aromatic hydrocarbon group-oxy group having 6 to 16 carbon atoms, such as a phenyloxy group.

Ａ^１、Ａ^２及びＡ^３の炭化水素基が有していてもよい置換基としては、Ｒ^４～Ｒ^９で挙げた基と同様の基が挙げられる。 In addition, the groups in which —CH ₂ — contained in the alicyclic hydrocarbon group is replaced with —O—, —CO—, —S— or —SO ₂ — include the groups represented below. . -O- or -CO- in the groups represented below may be replaced with -S- or -SO ₂ -. The binding site can be at any position.

Examples of substituents that the hydrocarbon groups of A ¹ , A ² and A ³ may have include the same groups as those listed for R ⁴ to R ⁹ .

A ¹ , A ² and A ³ are each independently a hydrocarbon group having 2 to 20 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ₂ — may be replaced with —O—, —CO—, —S— or —SO ₂ —, provided that at least one —CH ₂ — contained in the hydrocarbon group is —O—, —CO -, -S- or -SO ₂ -). Specifically, A ¹ is *-L ⁰¹¹ -X ⁰¹ -L ⁰¹² -, A ² is *-L ⁰²¹ -X ⁰² -L ⁰²² -, and A ³ is *-L ⁰³¹ - X ⁰³ -L ⁰³² - (X ⁰¹ , X ⁰² and X ⁰³ each independently represent -O-, -CO-, -S- or -SO ₂ -. L ⁰¹¹ , L ⁰¹² , L ⁰²¹ , L ⁰²² , L ⁰³¹ and L ⁰³² each independently represent a single bond or a hydrocarbon group having 1 to 19 carbon atoms, the hydrocarbon group may have a substituent, and the hydrocarbon group -CH ₂ - contained may be replaced with -O-, -CO-, -S- or -SO ₂ - provided that the total carbon number of L ⁰¹¹ and L ⁰¹² is 1-19; , the total carbon number of L ⁰²¹ and L ⁰²² is 1 to 19, and the total carbon number of L ⁰³¹ and L ⁰³² is 1 to 19. * indicates that R ¹ , R ² or R ³ is bonded represents the binding site with the benzene ring that binds to the benzene ring) is more preferable, A ¹ is *-X ⁰¹ -L ⁰¹ - or *-L ⁰¹ -X ⁰¹ -, and A ² is *-X ⁰² -L ⁰² - or *-L ⁰² -X ⁰² -, and A ³ is *-X ⁰³ -L ⁰³ - or *-L ⁰³ -X ⁰³ - (X ⁰¹ , X ⁰² and X ⁰³ are each independently represents —O—, —CO—, —S— or —SO ₂ —, L ⁰¹ , L ⁰² and L ⁰³ each independently represent a hydrocarbon group having 1 to 19 carbon atoms, and the hydrocarbon The group may have a substituent, and —CH ₂ — contained in the hydrocarbon group may be replaced with —O—, —CO—, —S— or —SO ₂ —. , represents the binding site to the benzene ring to which R ¹ , R ² or R ³ binds.) is more preferable.
L ⁰¹¹ , L ⁰¹² , L ⁰²¹ , L ⁰²² , L ⁰³¹ , L ⁰³² , L ⁰¹ , L ⁰² and L ⁰³ hydrocarbon groups having 1 to 19 carbon atoms (the hydrocarbon group may have a substituent --CH ₂ -- contained in the hydrocarbon group may be replaced with --O--, --CO--, --S-- or --SO ₂ --.) has 1 to 19 carbon atoms. and the same groups as those exemplified for A ¹ , A ² and A ³ can be mentioned.
X ⁰¹ , X ⁰² and X ⁰³ are each independently preferably -O- or -S-, more preferably -O-.
L ⁰¹¹ , L ⁰¹² , L ⁰²¹ , L ⁰²² , L ⁰³¹ and L ⁰³² are each independently a single bond or a hydrocarbon group having 1 to 18 carbon atoms (-CH ₂ - contained in the hydrocarbon group is - O—, —CO—, —S— or —SO ₂ —. CH ₂ — may be replaced with —O—, —CO—, —S— or —SO ₂ —.), a single bond, a chain hydrocarbon group having 1 to 9 carbon atoms , an alicyclic hydrocarbon group having 3 to 12 carbon atoms or a group obtained by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 10 carbon atoms (the chain hydrocarbon group and —CH ₂ — contained in the alicyclic hydrocarbon group may be replaced with —O—, —CO—, —S— or —SO ₂ —.), and a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-), and a single bond or An alkanediyl group having 1 to 4 carbon atoms (-CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-) is even more preferable, and a single bond or carbon An alkanediyl group having 1 to 3 numbers (-CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO-) is even more preferable. Among them, single bond, methylene group, ethane-1,1-diyl group, propane-1,1-diyl group, propane-2,2-diyl group, carbonyl group, carbonyloxy group, carbonyloxymethylene group, ethyleneoxy group , a methylenecarbonyloxymethylene group or an ethyleneoxycarbonyl group, a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group or A carbonyl group is more preferred. However, the total carbon number of L ⁰¹¹ and L ⁰¹² is 1 to 19, the total carbon number of L ⁰²¹ and L ⁰²² is 1 to 19, and the total carbon number of L ⁰³¹ and L ⁰³² is 1-19.
L ⁰¹ , L ⁰² and L ⁰³ are each independently a hydrocarbon group having 1 to 18 carbon atoms (-CH ₂ - contained in the hydrocarbon group is -O-, -CO-, -S- or - SO ₂ — may be substituted), and a hydrocarbon group having 1 to 14 carbon atoms (—CH ₂ — contained in the hydrocarbon group includes —O—, —CO—, —S — or —SO ₂ —. 4 and an alicyclic hydrocarbon group having 3 to 10 carbon atoms (-CH ₂ - contained in the chain hydrocarbon group and the alicyclic hydrocarbon group is - O—, —CO—, —S— or —SO ₂ —.) is more preferred, and an alkanediyl group having 1 to 6 carbon atoms (—CH ₂ - may be replaced with -O- or -CO-), and is more preferably an alkanediyl group having 1 to 4 carbon atoms (-CH ₂ - contained in the alkanediyl group is - alkanediyl group having 1 to 3 carbon atoms (-CH ₂ - contained in the alkanediyl group is -O- or - may be substituted with CO—) is even more preferred. Among them, methylene group, ethane-1,1-diyl group, propane-1,1-diyl group, propane-2,2-diyl group, carbonyl group, carbonyloxy group, carbonyloxymethylene group, ethyleneoxy group, methylenecarbonyl It is preferably an oxymethylene group or an ethyleneoxycarbonyl group, and is preferably a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group or a carbonyl group. more preferred.

The bonding positions of A ¹ , A ² and A ³ to the benzene ring to which S ⁺ is bonded may each independently be any of the o-position, m-position and p-position with respect to the bonding position of S ⁺ . Among them, when m1, m2 and m3 are 1, A ¹ , A ² and A ³ are preferably each independently bonded at the p- or m-position relative to the bonding position of S ⁺ , and p It is more preferable to bind to the position. When m1, m2 and m3 are 2, A ¹ , A ² and A ³ are each independently ^bound to the S or is preferably bonded at the m-position, and more preferably two are bonded at the m-position. When m1, m2 and m3 are 3, two of A ¹ , A ² and A ³ are each independently bound at the o-position or m-position and one is at the p-position with respect to the binding position of S ⁺ Alternatively, it is preferably bonded to the m-position, and more preferably two are bonded to the m-position and one is bonded to the p-position. When m1, m2 and m3 are 4, two of A ¹ , A ² and A ³ are each independently bound at the o-position or m-position relative to the binding position of S ⁺ , and two are at the p-position Alternatively, it is preferably bonded at the m-position, and more preferably two are bonded at the o-position and two are bonded at the m-position.
m1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, even more preferably 1 or 2, even more preferably 1.
m2 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, further preferably 0, 1 or 2, and 0 or 1 is even more preferred.
m3 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, further preferably 0, 1 or 2, and 0 or 1 is even more preferred.
m4 is preferably 0, 1, 2 or 4, more preferably 0, 1 or 2.
m5 is preferably 0, 1, 2 or 4, more preferably 0, 1 or 2.
m6 is preferably 0, 1, 2 or 4, more preferably 0, 1 or 2.
m7 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, even more preferably 0 or 1.
m8 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, even more preferably 0 or 1.
m9 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, even more preferably 0 or 1.
Among them, at least one of m8 and m9 is preferably an integer of 1 or more.
R ⁴ , R ⁵ and R ⁶ each independently represents a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 6 carbon atoms (the —CH ₂ — contained in the alkyl group is — It may be substituted with O- or -CO-.), a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms or an alkyl group having 1 to 4 carbon atoms (included in the alkyl group - CH ₂ — may be replaced with —O— or —CO—.) is more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or an alkyl group having 1 to 4 carbon atoms. (-CH ₂ - contained in the alkyl group may be replaced with -O- or -CO-), which is more preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group or a trifluoro A methyl group is even more preferred.
The bonding positions of R ⁴ , R ⁵ and R ⁶ to the benzene ring may each independently be any of the o-position, m-position and p-position with respect to the bonding positions of A ¹ , A ² and A ³ . Among them, when m4, m5 and m6 are 1, R ⁴ , R ⁵ and R ⁶ are each independently bound at the p- or m-position relative to the binding positions of A ¹ , A ² and A ³ It is preferable that it is bonded at the m-position. When m4, m5 and m6 are 2, each of R ⁴ , R ⁵ and R ⁶ is independently bonded to the bonding position of A ¹ , A ² and A ³ at the o-position or m-position; preferably one is bonded to the p-position or the m-position, and more preferably two are bonded to the m-position. When m4, m5 and m6 are 3, two of R ⁴ , R ⁵ and R ⁶ are each independently bonded at the o-position or m-position relative to the bonding position of A ¹ , A ² and A ³ One is preferably bonded to the p-position or the m-position, one is bonded to the o-position, and two are more preferably bonded to the m-position. When m4, m5 and m6 are 4, two of R ⁴ , R ⁵ and R ⁶ are each independently bonded at the o-position or m-position relative to the bonding position of A ¹ , A ² and A ³ and two are preferably bonded at the p-position or the m-position, and more preferably two are bonded at the o-position and two are bonded at the m-position.
R ⁷ , R ⁸ and R ⁹ each independently represents a halogen atom, a fluorinated alkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 6 carbon atoms (the —CH ₂ — contained in the alkyl group is — It may be substituted with O- or -CO-.), a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms or an alkyl group having 1 to 4 carbon atoms (included in the alkyl group - CH ₂ — may be replaced with —O— or —CO—.) is more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or an alkyl group having 1 to 4 carbon atoms. (-CH ₂ - contained in the alkyl group may be replaced with -O- or -CO-), which is more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a hydroxy group, A methoxy group, a methyl group or a t-butyl group is even more preferred.
The bonding positions of R ⁷ , R ⁸ and R ⁹ to the benzene ring may each independently be any of the o-position, m-position and p-position with respect to the bonding position of S ⁺ . Among them, when m7, m8 and m9 are 1, R ⁷ , R ⁸ and R ⁹ are each independently preferably bound at the p- or m-position relative to the binding position of S ⁺ , More preferably, it is bound at the p-position. When m7, m8 and m9 are 2, each of R ⁷ , R ⁸ and R ⁹ is independently bound to the S ⁺ binding position at the o-position or m-position and one at the p-position or preferably at the m-position, more preferably one at the m-position and one at the p- or m-position. When m7, m8 and m9 are 3, two of R ⁷ , R ⁸ and R ⁹ are each independently bound to the S ⁺ binding position at the o-position or m-position, and one is at the p-position Alternatively, it is preferably bonded to the m-position, and more preferably two are bonded to the m-position and one is bonded to the p-position. When m7, m8 and m9 are 4, two of R ⁷ , R ⁸ and R ⁹ are each independently bound at the o- or m-position relative to the binding position of S ⁺ , and two are at the p-position Alternatively, it is preferably bonded at the m-position, and more preferably two are bonded at the m-position, one is bonded at the o-position, and one is bonded at the p-position.

［式（Ｉ－Ｃ－１）中、
Ｒ^１、Ｒ^２、Ｒ^３、Ｒ^４、Ｒ^５、Ｒ^６、Ｒ^７、Ｒ^８、Ｒ^９、ｍ１、ｍ２、ｍ３、ｍ４、ｍ５、ｍ６、ｍ７、ｍ８及びｍ９は、式（Ｉ）と同じ意味を表す。
Ｌ^１、Ｌ^２及びＬ^３は、それぞれ独立に、炭素数１～１８の炭化水素基を表し、該炭化水素基は、置換基を有してもよく、該炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－、－ＣＯ－、－Ｓ－又は－ＳＯ_２－で置き換わっていてもよい。
Ｘ^１、Ｘ^２及びＸ^３は、それぞれ独立に、－Ｏ－又は－Ｓ－を表す。］ Examples of the cation (I) represented by the formula (IC) include cations represented by the formula (IC-1) (hereinafter sometimes referred to as "cation (IC-1)"). .

[In the formula (IC-1),
R ¹ , R ² , R ³ , R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ , R ⁹ , m1, m2, m3, m4, m5, m6, m7, m8 and m9 are represented by formula (I) have the same meaning as
L ¹ , L ² and L ³ each independently represent a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and the —CH _2- may be replaced by -O-, -CO-, -S- or -SO ₂ -.
X ¹ , X ² and X ³ each independently represent -O- or -S-. ]

L ¹ , L ² and L ³ are hydrocarbon groups having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and —CH ₂ — contained in the hydrocarbon group is —O— , —CO—, —S— or —SO ₂ —) is a group similar to the groups listed for A ¹ , A ² and A ³ and having 1 to 18 carbon atoms. is mentioned.
X ¹ is preferably -O-.
X ² is preferably -O-.
X ³ is preferably -O-.
The bonding positions of X ¹ , X ² and X ³ to the benzene ring may each independently be any of the o-position, m-position and p-position with respect to the bonding position of S ⁺ . Among them, the bonding position similar to the bonding position to the benzene ring to which S ⁺ of A ¹ , A ² and A ³ is bonded is preferable.
L ¹ , L ² and L ³ are each independently a hydrocarbon group having 1 to 16 carbon atoms (-CH ₂ - contained in the hydrocarbon group is -O-, -CO-, -S- or - SO ₂ — may be substituted), and a hydrocarbon group having 1 to 14 carbon atoms (—CH ₂ — contained in the hydrocarbon group includes —O—, —CO—, —S — or —SO ₂ —. 4 and an alicyclic hydrocarbon group having 3 to 10 carbon atoms (-CH ₂ - contained in the chain hydrocarbon group and the alicyclic hydrocarbon group is - O—, _—CO— , —S— or —SO ₂ —. - may be replaced with -O- or -CO-), and is more preferably an alkanediyl group having 1 to 4 carbon atoms (-CH ₂ - contained in the alkanediyl group is - alkanediyl group having 1 to 3 carbon atoms (-CH ₂ - contained in the alkanediyl group is -O- or - may be substituted with CO—) is even more preferred. Among them, methylene group, ethane-1,1-diyl group, propane-1,1-diyl group, propane-2,2-diyl group, carbonyl group, carbonyloxy group, carbonyloxymethylene group, ethyleneoxy group, methylenecarbonyl It is preferably an oxymethylene group or an ethyleneoxycarbonyl group, and is preferably a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group or a carbonyl group. more preferred.

Examples of the cation (I) of the salt (I) include cations represented by the following formulas (Ic-1) to (Ic-73).

［式（Ｉ－Ａ）中、
Ｑ^１及びＱ^２は、それぞれ独立に、水素原子、フッ素原子、炭素数１～６のアルキル基又は炭素数１～６のペルフルオロアルキル基を表す。
Ｌ^１は、炭素数１～２４の飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基で置換されていてもよい。
Ｙ^１は、置換基を有していてもよいメチル基又は置換基を有していてもよい炭素数３～２４の脂環式炭化水素基を表し、該脂環式炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。］ [Anion (I)]
The anion (I) of the salt of formula (I) is an organic anion of AI ⁻ .
Organic anions represented ^by AI- include sulfonate anions, sulfonylimide anions, sulfonylmethide anions and carboxylate anions. The organic anion represented by AI ⁻ is preferably a sulfonate anion, more preferably an anion represented by formula (IA).

[In the formula (IA),
Q ¹ and Q ² each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms or a perfluoroalkyl group having 1 to 6 carbon atoms.
L ¹ represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and —CH ₂ — contained in the saturated hydrocarbon group may be replaced with —O— or —CO—; A hydrogen atom contained in may be substituted with a fluorine atom or a hydroxy group.
Y ¹ represents an optionally substituted methyl group or an optionally substituted alicyclic hydrocarbon group having 3 to 24 carbon atoms, and is included in the alicyclic hydrocarbon group -CH ₂ - may be replaced by -O-, -S-, -SO ₂ - or -CO-. ]

In formula (IA), when —CH ₂ — contained in a saturated hydrocarbon group is replaced with —O— or —CO—, the number of carbon atoms before replacement is the number of carbon atoms in the saturated hydrocarbon group. In addition, when —CH ₂ — contained in an alicyclic hydrocarbon group is replaced with —O—, —S—, —SO ₂ — or —CO—, the number of carbon atoms before replacement is The number of carbon atoms in the group.

The perfluoroalkyl group having 1 to 6 carbon atoms for Q ¹ and Q ² includes a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, and a perfluorotert-butyl group. , perfluoropentyl group and perfluorohexyl group.
Examples of alkyl groups for Q ¹ and Q ² include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl and hexyl groups.
At least one of Q ¹ and Q ² preferably contains a fluorine atom or a perfluoroalkyl group, more preferably at least one is a fluorine atom or a perfluoroalkyl group, each independently a fluorine atom or a trifluoromethyl more preferably a group, and more preferably both fluorine atoms.

The divalent saturated hydrocarbon group for L ¹ includes a linear alkanediyl group, a branched alkanediyl group, a monocyclic or polycyclic bivalent alicyclic saturated hydrocarbon group, and these A group formed by combining two or more of the groups may also be used.
Specifically, methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1 ,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group , tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17-diyl group. alkanediyl group;
ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane- Branched alkanediyl groups such as 1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group;
monocyclic 2 which is a cycloalkanediyl group such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; alicyclic saturated hydrocarbon group;
Polycyclic divalent alicyclic saturated hydrocarbons such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group and the like.
Groups in which —CH ₂ — contained in the divalent saturated hydrocarbon group represented by L ¹ is replaced with —O— or —CO— include, for example, formulas (b1-1) to (b1-3) A group represented by any one of is mentioned. In addition, in the groups represented by formulas (b1-1) to (b1-3) and the groups represented by formulas (b1-4) to (b1-11) which are specific examples thereof, * and * * represents the binding site, * represents the binding site with ^-Y1 .

［式（ｂ１－１）中、
Ｌ^ｂ２は、単結合又は炭素数１～２２の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子に置換されていてもよい。
Ｌ^ｂ３は、単結合又は炭素数１～２２の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよく、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
ただし、Ｌ^ｂ２とＬ^ｂ３との炭素数合計は、２２以下である。
式（ｂ１－２）中、
Ｌ^ｂ４は、単結合又は炭素数１～２２の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子に置換されていてもよい。
Ｌ^ｂ５は、単結合又は炭素数１～２２の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよく、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
ただし、Ｌ^ｂ４とＬ^ｂ５との炭素数合計は、２２以下である。
式（ｂ１－３）中、
Ｌ^ｂ６は、単結合又は炭素数１～２３の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
Ｌ^ｂ７は、単結合又は炭素数１～２３の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよく、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
ただし、Ｌ^ｂ６とＬ^ｂ７との炭素数合計は、２３以下である。］

[In formula (b1-1),
L ^b2 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b3 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and the saturated —CH ₂ — contained in the hydrocarbon group may be replaced with —O— or —CO—.
However, the total number of carbon atoms of L ^b2 and L ^b3 is 22 or less.
In formula (b1-2),
L ^b4 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b5 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and the saturated —CH ₂ — contained in the hydrocarbon group may be replaced with —O— or —CO—.
However, the total number of carbon atoms of L ^b4 and L ^b5 is 22 or less.
In formula (b1-3),
L ^b6 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
L ^b7 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and the saturated —CH ₂ — contained in the hydrocarbon group may be replaced with —O— or —CO—.
However, the total number of carbon atoms of L ^b6 and L ^b7 is 23 or less. ]

In the groups represented by formulas (b1-1) to (b1-3), when —CH ₂ — contained in the saturated hydrocarbon group is replaced with —O— or —CO—, carbon before replacement Let the number be the number of carbon atoms of the saturated hydrocarbon group.
As the divalent saturated hydrocarbon group, the same divalent saturated hydrocarbon group as that of ^L1 can be mentioned.
L ^b2 is preferably a single bond, a methylene group, —CH(CF ₃ )—, —C(CF ₃ ) ₂ —.
L ^b3 is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms.
L ^b4 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms, hydrogen atoms contained in the divalent saturated hydrocarbon group may be substituted with fluorine atoms, methylene group, - CH(CF ₃ )—, —C(CF ₃ ) ₂ — are preferred.
L ^b5 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^b6 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b7 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group; —CH ₂ — contained in the divalent saturated hydrocarbon group may be replaced with —O— or —CO—.
The group in which —CH ₂ — contained in the divalent saturated hydrocarbon group represented by L ¹ is replaced with —O— or —CO— is represented by formula (b1-1) or formula (b1-3). are preferred.

［式（ｂ１－４）中、
Ｌ^ｂ８は、単結合又は炭素数１～２２の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
式（ｂ１－５）中、
Ｌ^ｂ９は、炭素数１～２０の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる－ＣＨ_２－は－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
Ｌ^ｂ１０は、単結合又は炭素数１～１９の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
ただし、Ｌ^ｂ９及びＬ^ｂ１０の合計炭素数は２０以下である。
式（ｂ１－６）中、
Ｌ^ｂ１１は、炭素数１～２１の２価の飽和炭化水素基を表す。
Ｌ^ｂ１２は、単結合又は炭素数１～２０の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
ただし、Ｌ^ｂ１１及びＬ^ｂ１２の合計炭素数は２１以下である。
式（ｂ１－７）中、
Ｌ^ｂ１３は、炭素数１～１９の２価の飽和炭化水素基を表す。
Ｌ^ｂ１４は、単結合又は炭素数１～１８の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる－ＣＨ_２－は－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
Ｌ^ｂ１５は、単結合又は炭素数１～１８の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
ただし、Ｌ^ｂ１３～Ｌ^ｂ１５の合計炭素数は１９以下である。
式（ｂ１－８）中、
Ｌ^ｂ１６は、炭素数１～１８の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる－ＣＨ_２－は－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
Ｌ^ｂ１７は、炭素数１～１８の２価の飽和炭化水素基を表す。
Ｌ^ｂ１８は、単結合又は炭素数１～１７の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基に置換されていてもよい。
ただし、Ｌ^ｂ１６～Ｌ^ｂ１８の合計炭素数は１９以下である。］
Ｌ^ｂ８は、好ましくは炭素数１～４の２価の飽和炭化水素基である。
Ｌ^ｂ９は、好ましくは炭素数１～８の２価の飽和炭化水素基である。
Ｌ^ｂ１０は、好ましくは単結合又は炭素数１～１９の２価の飽和炭化水素基であり、より好ましくは単結合又は炭素数１～８の２価の飽和炭化水素基である。
Ｌ^ｂ１１は、好ましくは炭素数１～８の２価の飽和炭化水素基である。
Ｌ^ｂ１２は、好ましくは単結合又は炭素数１～８の２価の飽和炭化水素基である。
Ｌ^ｂ１３は、好ましくは炭素数１～１２の２価の飽和炭化水素基である。
Ｌ^ｂ１４は、好ましくは単結合又は炭素数１～６の２価の飽和炭化水素基である。
Ｌ^ｂ１５は、好ましくは単結合又は炭素数１～１８の２価の飽和炭化水素基であり、より好ましくは単結合又は炭素数１～８の２価の飽和炭化水素基である。
Ｌ^ｂ１６は、好ましくは炭素数１～１２の２価の飽和炭化水素基である。
Ｌ^ｂ１７は、好ましくは炭素数１～６の２価の飽和炭化水素基である。
Ｌ^ｂ１８は、好ましくは単結合又は炭素数１～１７の２価の飽和炭化水素基であり、より好ましくは単結合又は炭素数１～４の２価の飽和炭化水素基である。 Examples of the group represented by formula (b1-1) include groups represented by formulas (b1-4) to (b1-8).

[In formula (b1-4),
L ^b8 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
In formula (b1-5),
L ^b9 represents a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and —CH ₂ — contained in the divalent saturated hydrocarbon group may be replaced with —O— or —CO—.
L ^b10 represents a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. .
However, the total carbon number of L ^b9 and L ^b10 is 20 or less.
In formula (b1-6),
L ^b11 represents a divalent saturated hydrocarbon group having 1 to 21 carbon atoms.
L ^b12 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. .
However, the total carbon number of L ^b11 and L ^b12 is 21 or less.
In formula (b1-7),
L ^b13 represents a divalent saturated hydrocarbon group having 1 to 19 carbon atoms.
L ^b14 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and —CH ₂ — contained in the divalent saturated hydrocarbon group is replaced with —O— or —CO— good too.
L ^b15 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. .
However, the total carbon number of L ^b13 to L ^b15 is 19 or less.
In formula (b1-8),
L ^b16 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and —CH ₂ — contained in the divalent saturated hydrocarbon group may be replaced with —O— or —CO—.
L ^b17 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms.
L ^b18 represents a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. .
However, the total carbon number of L ^b16 to L ^b18 is 19 or less. ]
L ^b8 is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms.
L ^b9 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^b10 is preferably a single bond or a C 1-19 divalent saturated hydrocarbon group, more preferably a single bond or a C 1-8 divalent saturated hydrocarbon group.
L ^b11 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^b12 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^b13 is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms.
L ^b14 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 6 carbon atoms.
L ^b15 is preferably a single bond or a C 1-18 divalent saturated hydrocarbon group, more preferably a single bond or a C 1-8 divalent saturated hydrocarbon group.
L ^b16 is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms.
L ^b17 is preferably a divalent saturated hydrocarbon group having 1 to 6 carbon atoms.
L ^b18 is preferably a single bond or a C 1-17 divalent saturated hydrocarbon group, more preferably a single bond or a C 1-4 divalent saturated hydrocarbon group.

［式（ｂ１－９）中、
Ｌ^b19は、単結合又は炭素数１～２３の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子に置換されていてもよい。
Ｌ^b20は、単結合又は炭素数１～２３の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子、ヒドロキシ基又はアルキルカルボニルオキシ基に置換されていてもよい。該アルキルカルボニルオキシ基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該アルキルカルボニルオキシ基に含まれる水素原子は、ヒドロキシ基に置換されていてもよい。
ただし、Ｌ^b19及びＬ^b20の合計炭素数は２３以下である。
式（ｂ１－１０）中、
Ｌ^b21は、単結合又は炭素数１～２１の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子に置換されていてもよい。
Ｌ^b22は、単結合又は炭素数１～２１の２価の飽和炭化水素基を表す。
Ｌ^b23は、単結合又は炭素数１～２１の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子、ヒドロキシ基又はアルキルカルボニルオキシ基に置換されていてもよい。該アルキルカルボニルオキシ基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該アルキルカルボニルオキシ基に含まれる水素原子は、ヒドロキシ基に置換されていてもよい。
ただし、Ｌ^b21、Ｌ^b22及びＬ^b23の合計炭素数は２１以下である。
式（ｂ１－１１）中、
Ｌ^b24は、単結合又は炭素数１～２０の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子に置換されていてもよい。
Ｌ^b25は、炭素数１～２１の２価の飽和炭化水素基を表す。
Ｌ^b26は、単結合又は炭素数１～２０の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる水素原子は、フッ素原子、ヒドロキシ基又はアルキルカルボニルオキシ基に置換されていてもよい。該アルキルカルボニルオキシ基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該アルキルカルボニルオキシ基に含まれる水素原子は、ヒドロキシ基に置換されていてもよい。
ただし、Ｌ^b24、Ｌ^b25及びＬ^b26の合計炭素数は２１以下である。］
なお、式（ｂ１－９）で表される基から式（ｂ１－１１）で表される基においては、飽和炭化水素基に含まれる水素原子がアルキルカルボニルオキシ基に置換されている場合、置き換わる前の炭素数を該飽和炭化水素基の炭素数とする。
アルキルカルボニルオキシ基としては、アセチルオキシ基、プロピオニルオキシ基、ブチリルオキシ基、シクロヘキシルカルボニルオキシ基、アダマンチルカルボニルオキシ基等が挙げられる。 Examples of the group represented by formula (b1-3) include groups represented by formulas (b1-9) to (b1-11).

[In the formula (b1-9),
L ^b19 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b20 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, a hydrogen atom contained in the saturated hydrocarbon group being substituted with a fluorine atom, a hydroxy group or an alkylcarbonyloxy group; good too. --CH ₂ -- contained in the alkylcarbonyloxy group may be replaced with --O-- or --CO--, and a hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group.
However, the total carbon number of L ^b19 and L ^b20 is 23 or less.
In formula (b1-10),
L ^b21 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b22 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms.
L ^b23 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group is substituted with a fluorine atom, a hydroxy group or an alkylcarbonyloxy group; good too. --CH ₂ -- contained in the alkylcarbonyloxy group may be replaced with --O-- or --CO--, and a hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group.
However, the total carbon number of L ^b21 , L ^b22 and L ^b23 is 21 or less.
In formula (b1-11),
L ^b24 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.
L ^b25 represents a divalent saturated hydrocarbon group having 1 to 21 carbon atoms.
L ^b26 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group is substituted with a fluorine atom, a hydroxy group or an alkylcarbonyloxy group; good too. --CH ₂ -- contained in the alkylcarbonyloxy group may be replaced with --O-- or --CO--, and a hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group.
However, the total carbon number of L ^b24 , L ^b25 and L ^b26 is 21 or less. ]
In addition, in the group represented by formula (b1-9) to the group represented by formula (b1-11), when the hydrogen atom contained in the saturated hydrocarbon group is substituted with an alkylcarbonyloxy group, it is substituted Let the previous carbon number be the carbon number of this saturated hydrocarbon group.
The alkylcarbonyloxy group includes an acetyloxy group, a propionyloxy group, a butyryloxy group, a cyclohexylcarbonyloxy group, an adamantylcarbonyloxy group and the like.

Examples of the group represented by formula (b1-4) include the following.

Examples of the group represented by formula (b1-5) include the following.

Examples of the group represented by formula (b1-6) include the following.

Examples of the group represented by formula (b1-7) include the following.

Examples of the group represented by formula (b1-8) include the following.

Examples of the group represented by formula (b1-2) include the following.

Examples of the group represented by formula (b1-9) include the following.

Examples of the group represented by formula (b1-10) include the following.

Examples of the group represented by formula (b1-11) include the following.

Examples of alicyclic hydrocarbon groups in which —CH ₂ — contained in the alicyclic hydrocarbon group represented by Y ¹ is not replaced with —O—, —S—, —SO ₂ — or —CO— include , groups represented by formulas (Y1) to (Y11) and formulas (Y36) to (Y38).
When —CH ₂ — contained in the alicyclic hydrocarbon group represented by Y ¹ is replaced with —O—, —S—, —SO ₂ — or —CO—, the number may be 1, or 2 It can be more than that. Such groups include groups represented by formulas (Y12) to (Y35) and formulas (Y39) to (Y43). —O— or —CO— in groups represented by formulas (Y12) to (Y35) and formulas (Y39) to (Y43) may be replaced with —S— or —SO ₂ —. * represents the binding site with ^L1 .

The alicyclic hydrocarbon group represented by Y ¹ is preferably represented by formulas (Y1) to (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31) and formula (Y39). ) to a group represented by any one of formula (Y43), more preferably formula (Y11), formula (Y15), formula (Y16), formula (Y20), formula (Y26), formula (Y27), a group represented by formula (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42) or formula (Y43), more preferably formula (Y11), formula (Y15), a group represented by formula (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42) or formula (Y43) be.
The alicyclic hydrocarbon group represented by Y ¹ is a spiro ring having an oxygen atom such as formulas (Y28) to (Y35), formula (Y39), formula (Y40), formula (Y42) or formula (Y43) , the alkanediyl group between the two oxygen atoms preferably has one or more fluorine atoms. Further, among the alkanediyl groups contained in the ketal structure, the methylene group adjacent to the oxygen atom is preferably not substituted with a fluorine atom.

Examples of substituents of the methyl group represented by Y ¹ include a halogen atom, a hydroxy group, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, a glycidyloxy group, - (CH ₂ ) _ja —CO—O—R ^b1 group or —(CH ₂ ) _ja —O—CO—R ^b1 group (wherein R ^b1 is an alkyl group having 1 to 16 carbon atoms, an alicyclic hydrocarbon group, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, ja represents any integer of 0 to 4. The alkyl group and the alicyclic —CH ₂ — contained in the hydrocarbon group may be replaced with —O—, —SO ₂ — or —CO—, and the alkyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group The contained hydrogen atoms may be replaced with hydroxy groups or fluorine atoms.) and the like.
Substituents for the alicyclic hydrocarbon group represented by Y ¹ include halogen atoms, hydroxy groups, and alkyl groups having 1 to 16 carbon atoms optionally substituted by hydroxy groups (-CH _2- may be replaced with -O- or -CO-), alicyclic hydrocarbon group having 3 to 16 carbon atoms, aromatic hydrocarbon group having 6 to 18 carbon atoms, 7 to 21 carbon atoms aralkyl group, glycidyloxy group, —(CH ₂ ) _ja —CO—O—R ^b1 group or —(CH ₂ ) _ja —O—CO—R ^b1 group (wherein R ^b1 has 1 to 16 carbon atoms an alkyl group, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, ja represents any integer of 0 to 4 —CH ₂ — contained in the alkyl group and the alicyclic hydrocarbon group may be replaced with —O—, —SO ₂ — or —CO—, and the alkyl group and the alicyclic hydrocarbon A hydrogen atom contained in the group and the aromatic hydrocarbon group may be replaced with a hydroxy group or a fluorine atom.) and the like.

Halogen atoms include fluorine, chlorine, bromine and iodine atoms.
Examples of alicyclic hydrocarbon groups include cyclopentyl, cyclohexyl, methylcyclohexyl, dimethylcyclohexyl, cycloheptyl, cyclooctyl, norbornyl and adamantyl groups. The alicyclic hydrocarbon group may have a chain hydrocarbon group, such as a methylcyclohexyl group and a dimethylcyclohexyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3-12, more preferably 3-10.
Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl groups. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and an aromatic hydrocarbon group having a chain hydrocarbon group having 1 to 18 carbon atoms (tolyl group, xylyl group, cumenyl group, mesityl group, p-methylphenyl group, p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), and carbon Examples thereof include aromatic hydrocarbon groups having alicyclic hydrocarbon groups of numbers 3 to 18 (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.). The number of carbon atoms in the aromatic hydrocarbon group is preferably 6-14, more preferably 6-10.
Examples of alkyl groups include methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, 2-ethylhexyl group, octyl group and nonyl. group, decyl group, undecyl group, dodecyl group and the like. The number of carbon atoms in the alkyl group is preferably 1-12, more preferably 1-6, still more preferably 1-4.
Alkyl groups substituted with a hydroxy group include hydroxyalkyl groups such as a hydroxymethyl group and a hydroxyethyl group.
Aralkyl groups include benzyl, phenethyl, phenylpropyl, naphthylmethyl and naphthylethyl groups.
The groups in which —CH ₂ — contained in the alkyl group is replaced with —O—, —SO ₂ —, —CO—, etc. include an alkoxy group, an alkylsulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, or Groups in which these are combined, and the like are included.
Alkoxy groups include methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, heptyloxy, octyloxy, decyloxy and dodecyloxy groups. The alkoxy group preferably has 1 to 12 carbon atoms, more preferably 1 to 6 carbon atoms, and still more preferably 1 to 4 carbon atoms.
The alkylsulfonyl group includes a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group and the like. The number of carbon atoms in the alkylsulfonyl group is preferably 1-12, more preferably 1-6, still more preferably 1-4.
Examples of alkoxycarbonyl groups include methoxycarbonyl, ethoxycarbonyl and butoxycarbonyl groups. The alkoxycarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and still more preferably 2 to 4 carbon atoms.
Examples of alkylcarbonyl groups include acetyl group, propionyl group and butyryl group. The number of carbon atoms in the alkylcarbonyl group is preferably 2-12, more preferably 2-6, still more preferably 2-4.
The alkylcarbonyloxy group includes, for example, an acetyloxy group, a propionyloxy group, a butyryloxy group and the like. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2-12, more preferably 2-6, still more preferably 2-4.
Examples of the combined group include, for example, a group in which an alkoxy group and an alkyl group are combined, a group in which an alkoxy group and an alkoxy group are combined, a group in which an alkoxy group and an alkylcarbonyl group are combined, an alkoxy group and an alkylcarbonyloxy group, and and the like.
Examples of groups in which an alkoxy group and an alkyl group are combined include alkoxyalkyl groups such as a methoxymethyl group, a methoxyethyl group, an ethoxyethyl group and an ethoxymethyl group. The alkoxyalkyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and still more preferably 2 to 4 carbon atoms.
Groups in which an alkoxy group and an alkoxy group are combined include alkoxyalkoxy groups such as a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, and an ethoxyethoxy group. The alkoxyalkoxy group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and still more preferably 2 to 4 carbon atoms.
Groups in which an alkoxy group and an alkylcarbonyl group are combined include alkoxyalkylcarbonyl groups such as a methoxyacetyl group, a methoxypropionyl group, an ethoxyacetyl group and an ethoxypropionyl group. The number of carbon atoms in the alkoxyalkylcarbonyl group is preferably 3-13, more preferably 3-7, still more preferably 3-5.
Groups in which an alkoxy group and an alkylcarbonyloxy group are combined include alkoxyalkylcarbonyloxy groups such as a methoxyacetyloxy group, a methoxypropionyloxy group, an ethoxyacetyloxy group, and an ethoxypropionyloxy group. The number of carbon atoms in the alkoxyalkylcarbonyloxy group is preferably 3-13, more preferably 3-7, still more preferably 3-5.
Groups in which —CH ₂ — contained in the alicyclic hydrocarbon group is replaced with —O—, —SO ₂ —, —CO—, etc. include formulas (Y12) to (Y35), formulas (Y39) to formulas A group represented by (Y43) and the like can be mentioned.

Y ¹ is preferably an optionally substituted alicyclic hydrocarbon group having 3 to 24 carbon atoms, more preferably an optionally substituted alicyclic ring having 3 to 20 carbon atoms. a hydrocarbon group of the formula, more preferably an optionally substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, still more preferably an optionally substituted adamantyl group or —CH ₂ — constituting the alicyclic hydrocarbon group, adamantyl group or norbornyl group, which is an optionally substituted norbornyl group, is —O—, —S—, —SO ₂ — or —CO - may be replaced. Specifically, the following are mentioned.

なかでも、Ｙ^１は、好ましくはアダマンチル基、ヒドロキシアダマンチル基、オキソアダマンチル基、ノルボルナンラクトン基又は式（Ｙ４２）、式（Ｙ１００）～式（Ｙ１１４）、式（Ｙ１３４）～式（Ｙ１３９）で表される基であり、特に好ましくは、ヒドロキシアダマンチル基、オキソアダマンチル基、これらを含む基又は式（Ｙ４２）、式（Ｙ１００）～式（Ｙ１１４）、式（Ｙ１３４）～式（Ｙ１３９）で表される基である。

Among them, Y ¹ is preferably an adamantyl group, a hydroxyadamantyl group, an oxoadamantyl group, a norbornanelactone group or represented by formula (Y42), formula (Y100) to formula (Y114), formula (Y134) to formula (Y139). is a group, particularly preferably a hydroxyadamantyl group, an oxoadamantyl group, a group containing these or represented by formula (Y42), formula (Y100) to formula (Y114), formula (Y134) to formula (Y139) is a group.

Examples of the anion represented by formula (IA) include anions represented by formulas (IA-1) to (IA-65) [hereinafter referred to as "anion (IA -1)”, etc. ] is preferable, formula (IA-1) ~ formula (IA-4), formula (IA-9), formula (IA-10), formula (IA-24) ~ formula (IA-33), formula (IA-36) ~ formula (IA-40), represented by any of formula (IA-47) ~ formula (IA-65) Anions are more preferred.

Here, R ⁱ² to R ⁱ⁷ are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. R ⁱ⁸ is, for example, a chain hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a combination thereof. group, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group. L ^A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q ¹ and Q ² have the same meanings as above.
Specific examples of the anion represented by formula (IA) include anions described in JP-A-2010-204646.

Anions represented by formula (IA) are preferably anions represented by formulas (Ia-1) to (Ia-43).

Among them, formula (Ia-1) ~ formula (Ia-4), formula (Ia-7) ~ formula (Ia-11), formula (Ia-14) ~ formula ( Ia-30) and anions represented by any of formulas (Ia-35) to (Ia-41) are preferred.

スルホニルメチドアニオンとしては、以下のものが挙げられる。

カルボン酸アニオンとしては、以下のものが挙げられる。

The sulfonylimide anions represented by AI ⁻ include the following.

Sulfonylmethide anions include the following.

Carboxylate anions include the following.

Specific examples of salt (I) include salts in which the above-described cations and anions are arbitrarily combined. Specific examples of salt (I) are shown in the table below.
In the table below, each code represents the code attached to the structure representing the anion or cation described above, and "~" indicates that the salt (I) corresponds to the anion (I) or the cation (I) respectively. show. For example, salt (I-1) is a salt consisting of an anion represented by formula (Ia-1) and a cation represented by formula (Ic-1), and salt (I-2) is represented by formula ( A salt consisting of an anion represented by Ia-2) and a cation represented by formula (Ic-1), a salt (I-39) is an anion represented by formula (Ia-1) and a formula A salt consisting of the cation shown by (Ic-2). Further, the salt (I-2775) is a salt consisting of the anion represented by the formula (Ia-39) and the cation represented by the formula (Ic-1), and the salt (I-2776) is represented by the formula ( Ia-39) a salt consisting of an anion represented by formula (Ic-2) and a cation represented by formula (Ic-2), a salt (I-2848) is an anion represented by formula (Ia-40) and a formula (Ic-1) and a cation represented by (Ic-1).

Among them, the salt (I) is represented by formulas (Ia-1) to (Ia-4), formulas (Ia-7) to (Ia-11), formulas (Ia- 14) ~ Formula (Ia-30) and Formula (Ia-35) ~ Formula (Ia-41) and the anion represented by any one of Formula (Ic-1) ~ Formula (I -c-73) is preferably a salt combined with a cation represented by any one, specifically, salt (I-1) to salt (I-4), salt (I-7) to salt (I -11), salt (I-14) to salt (I-30), salt (I-35) to salt (I-38), salt (I-39) to salt (I-42), salt (I- 45) ~ Salt (I-49), Salt (I-52) ~ Salt (I-68), Salt (I-73) ~ Salt (I-76), Salt (I-77) ~ Salt (I-80) ), salt (I-83) to salt (I-87), salt (I-90) to salt (I-106), salt (I-111) to salt (I-114), salt (I-115) to salt (I-118), salt (I-121) to salt (I-125), salt (I-128) to salt (I-144), salt (I-149) to salt (I-152), Salt (I-153) ~ Salt (I-156), Salt (I-159) ~ Salt (I-163), Salt (I-166) ~ Salt (I-182), Salt (I-187) ~ Salt (I-190), salt (I-191) to salt (I-194), salt (I-197) to salt (I-201), salt (I-204) to salt (I-220), salt ( I-225) ~ Salt (I-228), Salt (I-229) ~ Salt (I-232), Salt (I-235) ~ Salt (I-239), Salt (I-242) ~ Salt (I -258), salt (I-263) to salt (I-266), salt (I-267) to salt (I-270), salt (I-273) to salt (I-277), salt (I- 280) to salt (I-296), salt (I-301) to salt (I-304), salt (I-305) to salt (I-308), salt (I-311) to salt (I-315) ), salt (I-318) to salt (I-334), salt (I-339) to salt (I-342), salt (I-343) to salt (I-346), salt (I-349) ~ Salt (I-353), Salt (I-356) ~ Salt (I-372), Salt (I-377) ~ Salt (I-380), Salt (I-381) ~ Salt (I-384), Salt (I-387) ~ Salt (I-391), Salt (I-394) ~ Salt (I-410), Salt (I-415) ~ Salt (I-418), Salt (I-419) ~ Salt (I-422), salt (I-425) to salt (I-429), salt (I-432) to salt (I-448), salt (I-453) to salt (I-456), salt ( I-4 57) ~ Salt (I-460), Salt (I-463) ~ Salt (I-467), Salt (I-470) ~ Salt (I-486), Salt (I-491) ~ Salt (I-494) ), salt (I-495) to salt (I-498), salt (I-501) to salt (I-505), salt (I-508) to salt (I-524), salt (I-529) ~ Salt (I-532), Salt (I-533) ~ Salt (I-536), Salt (I-539) ~ Salt (I-543), Salt (I-546) ~ Salt (I-562), Salt (I-567) ~ Salt (I-570), Salt (I-571) ~ Salt (I-574), Salt (I-577) ~ Salt (I-581), Salt (I-584) ~ Salt (I-600), salt (I-605) to salt (I-608), salt (I-609) to salt (I-612), salt (I-615) to salt (I-619), salt ( I-622) ~ Salt (I-638), Salt (I-643) ~ Salt (I-646), Salt (I-647) ~ Salt (I-650), Salt (I-653) ~ Salt (I -657), salt (I-660) to salt (I-676), salt (I-681) to salt (I-684), salt (I-685) to salt (I-688), salt (I- 691) to salt (I-695), salt (I-698) to salt (I-714), salt (I-719) to salt (I-722), salt (I-723) to salt (I-726) ), salt (I-729) to salt (I-733), salt (I-736) to salt (I-752), salt (I-757) to salt (I-760), salt (I-761) ~ Salt (I-764), Salt (I-767) ~ Salt (I-771), Salt (I-774) ~ Salt (I-790), Salt (I-795) ~ Salt (I-798), Salt (I-799) ~ Salt (I-802), Salt (I-805) ~ Salt (I-809), Salt (I-812) ~ Salt (I-828), Salt (I-833) ~ Salt (I-836), salt (I-837) to salt (I-840), salt (I-843) to salt (I-847), salt (I-850) to salt (I-866), salt ( I-871) ~ Salt (I-874), Salt (I-875) ~ Salt (I-878), Salt (I-881) ~ Salt (I-885), Salt (I-888) ~ Salt (I -904), salt (I-909) to salt (I-912), salt (I-913) to salt (I-916), salt (I-919) to salt (I-923), salt (I- 926) to salt (I-942), salt (I-947) to salt (I-950), salt (I-951) to salt (I-954), salt (I-957) to salt (I-961) ), salt (I-964) ~ salt (I-980), salt (I-985) ~ salt (I-98 8), salt (I-989) to salt (I-992), salt (I-995) to salt (I-999), salt (I-1002) to salt (I-1018), salt (I-1023 ) to salt (I-1026), salt (I-1027) to salt (I-1030), salt (I-1033) to salt (I-1037), salt (I-1040) to salt (I-1056) , Salt (I-1061) ~ Salt (I-1064), Salt (I-1065) ~ Salt (I-1068), Salt (I-1071) ~ Salt (I-1075), Salt (I-1078) ~ Salt (I-1094), Salt (I-1099) to Salt (I-1102), Salt (I-1103) to Salt (I-1106), Salt (I-1109) to Salt (I-1113), Salt (I-1116) to salt (I-1132), salt (I-1137) to salt (I-1140), salt (I-1141) to salt (I-1144), salt (I-1147) to salt ( I-1151), salt (I-1154) to salt (I-1170), salt (I-1175) to salt (I-1178), salt (I-1179) to salt (I-1182), salt (I -1185) to salt (I-1189), salt (I-1192) to salt (I-1208), salt (I-1213) to salt (I-1216), salt (I-1217) to salt (I- 1220), salt (I-1223) to salt (I-1227), salt (I-1230) to salt (I-1246), salt (I-1251) to salt (I-1254), salt (I-1255 ) to salt (I-1258), salt (I-1261) to salt (I-1265), salt (I-1268) to salt (I-1284), salt (I-1289) to salt (I-1292) , Salt (I-1293) ~ Salt (I-1296), Salt (I-1299) ~ Salt (I-1303), Salt (I-1306) ~ Salt (I-1322), Salt (I-1327) ~ Salt (I-1330), Salt (I-1331) to Salt (I-1334), Salt (I-1337) to Salt (I-1341), Salt (I-1344) to Salt (I-1360), Salt (I-1365) to salt (I-1368), salt (I-1369) to salt (I-1372), salt (I-1375) to salt (I-1379), salt (I-1382) to salt ( I-1398), salt (I-1403) to salt (I-1406), salt (I-1407) to salt (I-1410), salt (I-1413) to salt (I-1417), salt (I -1420) to salt (I-1436), salt (I-1441) to salt (I-1444), salt (I-1445) to salt (I-1448), salt (I-1451) to salt (I- 1455), salt (I-1458) to salt (I-1474), salt (I-1479) to salt (I-1482), salt (I-1483) to salt (I-1486), salt (I-1489) to salt ( I-1493), salt (I-1496) to salt (I-1512), salt (I-1517) to salt (I-1520), salt (I-1521) to salt (I-1524), salt (I -1527) to salt (I-1531), salt (I-1534) to salt (I-1550), salt (I-1555) to salt (I-1558), salt (I-1559) to salt (I- 1562), salt (I-1565) to salt (I-1569), salt (I-1572) to salt (I-1588), salt (I-1593) to salt (I-1596), salt (I-1597 ) to salt (I-1600), salt (I-1603) to salt (I-1607), salt (I-1610) to salt (I-1626), salt (I-1631) to salt (I-1634) , Salt (I-1635) ~ Salt (I-1638), Salt (I-1641) ~ Salt (I-1645), Salt (I-1648) ~ Salt (I-1664), Salt (I-1669) ~ Salt (I-1672), Salt (I-1673) to Salt (I-1676), Salt (I-1679) to Salt (I-1683), Salt (I-1686) to Salt (I-1702), Salt (I-1707) to salt (I-1710), salt (I-1711) to salt (I-1714), salt (I-1717) to salt (I-1721), salt (I-1724) to salt ( I-1740), salt (I-1745) to salt (I-1748), salt (I-1749) to salt (I-1752), salt (I-1755) to salt (I-1759), salt (I -1762) to salt (I-1778), salt (I-1783) to salt (I-1786), salt (I-1787) to salt (I-1790), salt (I-1793) to salt (I- 1797), salt (I-1800) to salt (I-1816), salt (I-1821) to salt (I-1824), salt (I-1825) to salt (I-1828), salt (I-1831 ) to salt (I-1835), salt (I-1838) to salt (I-1854), salt (I-1859) to salt (I-1862), salt (I-1863) to salt (I-1866) , Salt (I-1869) ~ Salt (I-1873), Salt (I-1876) ~ Salt (I-1892), Salt (I-1897) ~ Salt (I-1900), Salt (I-1901) ~ Salt (I-1904), Salt (I-1907) to Salt (I-1911), Salt (I-1914) to Salt (I-1930), Salt (I-1935) to Salt (I-1938), Salt (I-1939) to salt (I-1942), salt (I-1945) to salt (I-1949), salt (I-1952) to salt (I-1968), salt (I-1973) to salt ( I-1976), salt (I-1977) to salt (I-1980), salt (I-1983) to salt (I-1987), salt (I-1990) to salt (I-2006), salt (I -2011) to salt (I-2014), salt (I-2015) to salt (I-2018), salt (I-2021) to salt (I-2025), salt (I-2028) to salt (I- 2044), salt (I-2049) to salt (I-2052), salt (I-2053) to salt (I-2056), salt (I-2059) to salt (I-2063), salt (I-2066 ) to salt (I-2082), salt (I-2087) to salt (I-2090), salt (I-2091) to salt (I-2094), salt (I-2097) to salt (I-2101) , Salt (I-2104) ~ Salt (I-2120), Salt (I-2125) ~ Salt (I-2128), Salt (I-2129) ~ Salt (I-2132), Salt (I-2135) ~ Salt (I-2139), Salt (I-2142) to Salt (I-2158), Salt (I-2163) to Salt (I-2166), Salt (I-2167) to Salt (I-2170), Salt (I-2173) ~ salt (I-2177), salt (I-2180) ~ salt (I-2196), salt (I-2201) ~ salt (I-2204), salt (I-2205) ~ salt ( I-2208), salt (I-2211) to salt (I-2215), salt (I-2218) to salt (I-2234), salt (I-2239) to salt (I-2242), salt (I -2243) to salt (I-2246), salt (I-2249) to salt (I-2253), salt (I-2256) to salt (I-2272), salt (I-2277) to salt (I- 2280), salt (I-2281) to salt (I-2284), salt (I-2287) to salt (I-2291), salt (I-2294) to salt (I-2310), salt (I-2315 ) to salt (I-2318), salt (I-2319) to salt (I-2322), salt (I-2325) to salt (I-2329), salt (I-2332) to salt (I-2348) , Salt (I-2353) ~ Salt (I-2356), Salt (I-2357) ~ Salt (I-2360), Salt (I-2363) ~ Salt (I-2367), Salt (I-2370) ~ Salt (I-2386), Salt (I-2391) to Salt (I-2394), Salt (I-2395) to Salt (I-2398), Salt (I-2401) to Salt (I-2405), Salt (I-2408) to salt (I-2424), salt (I-2429) to salt (I-2432), salt (I-2433) to salt (I-2436), salt (I-2439) to salt ( I-2443), salt (I-2446) to salt (I-2462), salt (I-2467) to salt (I-2470), salt (I-2471) to salt (I-2474), salt (I -2477) ~ Salt (I-2481), Salt (I-2484) ~ Salt (I-2500), Salt (I-2505) ~ Salt (I-2508), Salt (I-2509) ~ Salt (I- 2512), salt (I-2515) to salt (I-2519), salt (I-2522) to salt (I-2538), salt (I-2543) to salt (I-2546), salt (I-2547 ) to salt (I-2550), salt (I-2553) to salt (I-2557), salt (I-2560) to salt (I-2576), salt (I-2581) to salt (I-2584) , Salt (I-2585) ~ Salt (I-2588), Salt (I-2591) ~ Salt (I-2595), Salt (I-2598) ~ Salt (I-2614), Salt (I-2619) ~ Salt (I-2622), Salt (I-2623) to Salt (I-2626), Salt (I-2629) to Salt (I-2633), Salt (I-2636) to Salt (I-2652), Salt (I-2657) to salt (I-2660), salt (I-2661) to salt (I-2664), salt (I-2667) to salt (I-2671), salt (I-2674) to salt ( I-2690), salt (I-2695) to salt (I-2698), salt (I-2699) to salt (I-2702), salt (I-2705) to salt (I-2709), salt (I -2712) to salt (I-2728), salt (I-2733) to salt (I-2736), salt (I-2737) to salt (I-2740), salt (I-2743) to salt (I- 2747), salt (I-2750) to salt (I-2766), salt (I-2771) to salt (I-2774), salt (I-2775) to salt (I-2993).

［式中、全ての符号は、それぞれ前記と同じ意味を表す。Ｒ^A、Ｒ^B及びＲ^Cは、それぞれ独立に、炭素数１～１２の炭化水素基を表すか、又は、Ｒ^A、Ｒ^B及びＲ^Cが一緒になって芳香環を形成してもよい。Ｒ^Dは、水素原子又は炭素数１～１２の炭化水素基を表す。］
溶剤としては、クロロホルム、モノクロロベンゼン、アセトニトリル、水などが挙げられる。
反応温度は、通常１５℃～８０℃であり、反応時間は、通常０．５～２４時間である。 <Method for producing salt (I)>
Salt (I) can be produced by reacting a salt represented by formula (Ia) with a salt represented by formula (Ib) in a solvent.

[In the formula, all symbols have the same meanings as described above. R ^A , R ^B and R ^C each independently represent a hydrocarbon group having 1 to 12 carbon atoms, or R ^A , R ^B and R ^C together may form an aromatic ring. . R ^D represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. ]
Solvents include chloroform, monochlorobenzene, acetonitrile, water and the like.
The reaction temperature is generally 15° C. to 80° C., and the reaction time is generally 0.5 to 24 hours.

Examples of the salt represented by formula (Ib) include salts represented by the following formula. These salts can be easily produced by methods similar to those described in JP-A-2011-116747 and JP-A-2016-047815, or by known production methods.

［式中、全ての符号は、それぞれ前記と同じ意味を表す。］
塩基としては、炭酸カリウム、ヨウ化カリウム、ピリジン、トリエチルアミンなどが挙げられる。
溶剤としては、クロロホルム、モノクロロベンゼン、ジメチルホルムアミド、アセトニトリル、酢酸エチル、水などが挙げられる。
反応温度は、通常１５℃～８０℃であり、反応時間は、通常０．５～２４時間である。 In salt (Ia), R ¹ , R ² and R ³ are *—OL ¹⁰ —CO—OR ¹⁰ (salt represented by formula (I-a1)) is represented by the formula It can be produced by reacting a salt represented by (Ic) with a compound represented by formula (Id) in the presence of a base catalyst in a solvent.

[In the formula, all symbols have the same meanings as described above. ]
Bases include potassium carbonate, potassium iodide, pyridine, triethylamine and the like.
Solvents include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, water and the like.
The reaction temperature is generally 15° C. to 80° C., and the reaction time is generally 0.5 to 24 hours.

Compounds represented by formula (Id) include, for example, compounds represented by the following, which are readily available on the market and can be easily produced by known production methods.

［式中、全ての符号は、それぞれ前記と同じ意味を表す。］
触媒としては、炭酸カリウム、水素化ナトリウムなどが挙げられる。
溶剤としては、クロロホルム、モノクロロベンゼン、アセトニトリル、水などが挙げられる。
反応温度は、通常１５℃～１００℃であり、反応時間は、通常０．５～２４時間である。 The salt represented by formula (Ic) is a salt represented by formula (Ie), a compound represented by formula (If1), and a compound represented by formula (I-f2). and a compound represented by formula (I-f3) in the presence of a catalyst in a solvent.

[In the formula, all symbols have the same meanings as described above. ]
Catalysts include potassium carbonate, sodium hydride and the like.
Solvents include chloroform, monochlorobenzene, acetonitrile, water, and the like.
The reaction temperature is generally 15° C. to 100° C., and the reaction time is generally 0.5 to 24 hours.

Examples of the salt represented by the formula (Ie) include salts represented by the following formula, etc., which are readily available on the market.

Examples of the compound represented by the formula (I-f1), the compound represented by the formula (I-f2) and the compound represented by the formula (I-f3) include compounds represented by the following. more readily available.

［式中、全ての符号は、それぞれ前記と同じ意味を表す。
Ｒ^acは、酸不安定基を表す。］
溶剤としては、クロロホルム、モノクロロベンゼン、アセトニトリル、水などが挙げられる。
反応温度は、通常１５℃～１００℃であり、反応時間は、通常０．５～２４時間である。
酸としては、ｐ－トルエンスルホン酸、塩酸などが挙げられる。 The salt represented by formula (Ic) is a salt represented by formula (Ie), a compound represented by formula (I-f4), and a compound represented by formula (I-f5). and a compound represented by formula (I-f6) in the presence of potassium carbonate in a solvent, followed by acid treatment.

[In the formula, all symbols have the same meanings as described above.
R ^ac represents an acid labile group. ]
Solvents include chloroform, monochlorobenzene, acetonitrile, water and the like.
The reaction temperature is generally 15° C. to 100° C., and the reaction time is generally 0.5 to 24 hours.
Examples of acids include p-toluenesulfonic acid and hydrochloric acid.

Examples of the compound represented by the formula (I-f4), the compound represented by the formula (I-f5) and the compound represented by the formula (I-f6) include the compounds represented by the following, etc. more readily available.

［式中、全ての符号は、それぞれ前記と同じ意味を表す。］
塩基としては、水酸化ナトリウム、水酸化カリウムなどが挙げられる。
溶剤としては、クロロホルム、モノクロロベンゼン、ジメチルホルムアミド、アセトニトリル、酢酸エチル、水などが挙げられる。
反応温度は、通常１５℃～８０℃であり、反応時間は、通常０．５～２４時間である。 In the salt (Ia), the salt in which R ¹ , R ² and R ³ are *-OR ¹⁰ (the salt represented by the formula (I-a2)) is represented by the formula (Ic) It can be produced by reacting a salt of formula (I-d2) with a compound represented by formula (I-d2) in the presence of a base catalyst in a solvent.

[In the formula, all symbols have the same meanings as described above. ]
Bases include sodium hydroxide, potassium hydroxide and the like.
Solvents include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, water and the like.
The reaction temperature is generally 15° C. to 80° C., and the reaction time is generally 0.5 to 24 hours.

Compounds represented by formula (I-d2) include, for example, compounds represented by the following, which are readily available on the market and can be easily produced by known production methods.

［式中、全ての符号は、それぞれ前記と同じ意味を表す。］
溶剤としては、クロロホルム、モノクロロベンゼン、ジメチルホルムアミド、アセトニトリル、酢酸エチル、水などが挙げられる。
反応温度は、通常１５℃～８０℃であり、反応時間は、通常０．５～２４時間である。 ^{The salt ( I-} It can be produced by reacting a salt represented by c) with a compound represented by formula (I-d2) in the presence of carbonyldiimidazole in a solvent.

[In the formula, all symbols have the same meanings as described above. ]
Solvents include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, water and the like.
The reaction temperature is generally 15° C. to 80° C., and the reaction time is generally 0.5 to 24 hours.

［式中、全ての符号は、それぞれ前記と同じ意味を表す。］
溶剤としては、クロロホルム、モノクロロベンゼン、ジメチルホルムアミド、アセトニトリル、酢酸エチル、水などが挙げられる。
反応温度は、通常１５℃～８０℃であり、反応時間は、通常０．５～２４時間である。 In salt (Ia), R ¹ , R ² and R ³ are *—O—CO—R ¹⁰ (salt represented by formula (I-a4)) is represented by formula (I-d4) It can be produced by reacting a compound represented by and carbonyldiimidazole in a solvent, and then reacting a salt represented by formula (Ic).

[In the formula, all symbols have the same meanings as described above. ]
Solvents include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, water and the like.
The reaction temperature is generally 15° C. to 80° C., and the reaction time is generally 0.5 to 24 hours.

Compounds represented by formula (I-d4) include, for example, compounds represented by the following, which are readily available on the market and can be easily produced by known production methods.

［式中、全ての符号は、それぞれ前記と同じ意味を表す。］
塩基としては、炭酸カリウム、ヨウ化カリウム、ピリジン、トリエチルアミンなどが挙げられる。
溶剤としては、クロロホルム、モノクロロベンゼン、ジメチルホルムアミド、アセトニトリル、酢酸エチル、水などが挙げられる。
反応温度は、通常１５℃～８０℃であり、反応時間は、通常０．５～２４時間である。 In salt (Ia), R ¹ , R ² and R ³ are *—O—CO—R ¹⁰ (salt represented by formula (I-a4)) is represented by formula (Ic) It can also be produced by reacting a salt represented by with a compound represented by formula (I-d5) in the presence of a base catalyst in a solvent.

[In the formula, all symbols have the same meanings as described above. ]
Bases include potassium carbonate, potassium iodide, pyridine, triethylamine and the like.
Solvents include chloroform, monochlorobenzene, dimethylformamide, acetonitrile, ethyl acetate, water and the like.
The reaction temperature is generally 15° C. to 80° C., and the reaction time is generally 0.5 to 24 hours.

Compounds represented by formula (I-d5) include, for example, compounds represented by the following, which are readily available on the market and can be easily produced by known production methods.

<Acid Generator>
The acid generator of the present invention is an acid generator containing salt (I). 1 type of salt (I) may be included, and 2 or more types of salt (I) may be included.
The acid generator of the present invention may contain an acid generator known in the resist field (hereinafter sometimes referred to as "acid generator (B)") in addition to salt (I). The acid generator (B) may be used alone or in combination of two or more.

The acid generator (B) may be either nonionic or ionic. Nonionic acid generators include sulfonate esters (eg 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxyketone, diazonaphthoquinone 4-sulfonate), sulfones (eg disulfone, ketosulfone, sulfonyldiazomethane) and the like. Typical ionic acid generators are onium salts containing onium cations (eg, diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). The anions of the onium salts include sulfonate anions, sulfonylimide anions, sulfonylmethide anions, and the like.

Examples of the acid generator (B) include JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, US Pat. No. 3,779,778, US Pat. A compound that generates an acid upon exposure to radiation as described in 1. above can be used. Moreover, you may use the compound manufactured by the well-known method. The acid generator (B) may be used in combination of two or more.

［式（Ｂ１）中、
Ｑ^ｂ１及びＱ^ｂ２は、それぞれ独立に、水素原子、フッ素原子、炭素数１～６のアルキル基又は炭素数１～６のペルフルオロアルキル基を表す。
Ｌ^ｂ１は、炭素数１～２４の２価の飽和炭化水素基を表し、該２価の飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよく、該２価の飽和炭化水素基に含まれる水素原子は、フッ素原子又はヒドロキシ基で置換されていてもよい。
Ｙは、置換基を有していてもよいメチル基又は置換基を有していてもよい炭素数３～２４の脂環式炭化水素基を表し、該脂環式炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－Ｓ－、－ＳＯ_２－又は－ＣＯ－に置き換わっていてもよい。
Ｚ１^＋は、有機カチオンを表す。］ Acid generator (B) is preferably a salt represented by formula (B1) (hereinafter sometimes referred to as "acid generator (B1)", excluding salt (I)).

[In the formula (B1),
Q ^b1 and Q ^b2 each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms or a perfluoroalkyl group having 1 to 6 carbon atoms.
L ^b1 represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and —CH ₂ — contained in the divalent saturated hydrocarbon group may be replaced with —O— or —CO— , a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.
Y represents an optionally substituted methyl group or an optionally substituted alicyclic hydrocarbon group having 3 to 24 carbon atoms, included in the alicyclic hydrocarbon group- CH ₂ - may be replaced by -O-, -S-, -SO ₂ - or -CO-.
Z1 ⁺ represents an organic cation. ]

Q ^b1 , Q ^b2 , L ^b1 and Y in formula (B1) are respectively the same as Q ¹ , Q ² , L ¹ and Y ¹ in formula (IA) described above.
Examples of the sulfonate anion in formula (B1) include the same anions as those represented by formula (IA).

式（ｂ２－１）～式（ｂ２－４）において、
Ｒ^b4～Ｒ^b6は、それぞれ独立に、炭素数１～３０の鎖式炭化水素基、炭素数３～３６の脂環式炭化水素基又は炭素数６～３６の芳香族炭化水素基を表し、該鎖式炭化水素基に含まれる水素原子は、ヒドロキシ基、炭素数１～１２のアルコキシ基、炭素数３～１２の脂環式炭化水素基又は炭素数６～１８の芳香族炭化水素基で置換されていてもよく、該脂環式炭化水素基に含まれる水素原子は、ハロゲン原子、炭素数１～１８の脂肪族炭化水素基、炭素数２～４のアルキルカルボニル基又はグリシジルオキシ基で置換されていてもよく、該芳香族炭化水素基に含まれる水素原子は、ハロゲン原子、ヒドロキシ基、炭素数１～１８の脂肪族炭化水素基、炭素数１～１２のフッ化アルキル基又は炭素数１～１２のアルコキシ基で置換されていてもよい。
Ｒ^b4とＲ^b5とは、互いに結合してそれらが結合する硫黄原子と一緒になって環を形成してもよく、該環に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－又は－ＣＯ－に置き換わってもよい。
Ｒ^b7及びＲ^b8は、それぞれ独立に、ハロゲン原子、ヒドロキシ基、炭素数１～１２の脂肪族炭化水素基、炭素数１～１２のフッ化アルキル基又は炭素数１～１２のアルコキシ基を表す。
ｍ２及びｎ２は、それぞれ独立に０～５のいずれかの整数を表す。
ｍ２が２以上のとき、複数のＲ^b7は同一でも異なってもよく、ｎ２が２以上のとき、複数のＲ^b8は同一でも異なってもよい。
Ｒ^b9及びＲ^b10は、それぞれ独立に、炭素数１～３６の鎖式炭化水素基又は炭素数３～３６の脂環式炭化水素基を表す。
Ｒ^b9とＲ^b10とは、互いに結合してそれらが結合する硫黄原子と一緒になって環を形成してもよく、該環に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－又は－ＣＯ－に置き換わってもよい。
Ｒ^b11は、水素原子、炭素数１～３６の鎖式炭化水素基、炭素数３～３６の脂環式炭化水素基又は炭素数６～１８の芳香族炭化水素基を表す。
Ｒ^b12は、炭素数１～１２の鎖式炭化水素基、炭素数３～１８の脂環式炭化水素基又は炭素数６～１８の芳香族炭化水素基を表し、該鎖式炭化水素基に含まれる水素原子は、炭素数６～１８の芳香族炭化水素基で置換されていてもよく、該芳香族炭化水素基に含まれる水素原子は、炭素数１～１２のアルコキシ基又は炭素数１～１２のアルキルカルボニルオキシ基で置換されていてもよい。
Ｒ^b11とＲ^b12とは、互いに結合してそれらが結合する－ＣＨ－ＣＯ－を含めて環を形成していてもよく、該環に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－又は－ＣＯ－に置き換わってもよい。
Ｒ^b13～Ｒ^b18は、それぞれ独立に、ハロゲン原子、ヒドロキシ基、炭素数１～１２の脂肪族炭化水素基、炭素数１～１２のフッ化アルキル基又は炭素数１～１２のアルコキシ基を表す。
Ｒ^b13とＲ^b14とは、互いに結合してそれらが結合するベンゼン環と一緒になって硫黄原子を含む環を形成してもよく、該環に含まれる－ＣＨ₂－は、－Ｏ－、－Ｓ－又は－ＣＯ－に置き換わってもよい。
Ｌ^b31は、硫黄原子又は酸素原子を表す。
ｏ２、ｐ２、ｓ２、及びｔ２は、それぞれ独立に、０～５のいずれかの整数を表す。
ｑ２及びｒ２は、それぞれ独立に、０～４のいずれかの整数を表す。
ｕ２は０又は１を表す。
ｏ２が２以上のとき、複数のＲ^b13は同一又は相異なり、ｐ２が２以上のとき、複数のＲ^b14は同一又は相異なり、ｑ２が２以上のとき、複数のＲ^b15は同一又は相異なり、ｒ２が２以上のとき、複数のＲ^b16は同一又は相異なり、ｓ２が２以上のとき、複数のＲ^b17は同一又は相異なり、ｔ２が２以上のとき、複数のＲ^b18は同一又は相異なる。
ｕ２が０のとき、ｏ２、ｐ２、ｑ２及びｒ２のうちいずれか１つは１以上であり、Ｒ^b13～Ｒ^b1６のうち少なくとも１つはハロゲン原子であることが好ましく、ｕ２が１のとき、ｏ２、ｐ２、ｓ２、ｔ２、ｑ２及びｒ２のうちいずれか１つは１以上であり、Ｒ^b13～Ｒ^b18のうち少なくとも１つはハロゲン原子であることが好ましい。
さらに、ｕ２が０のとき、ｒ２は１以上であることが好ましく、１であることがさらに好ましい。また、ｕ２が０、かつ、ｒ２が１以上のとき、Ｒ^ｂ１６がハロゲン原子であることが好ましい。
脂肪族炭化水素基とは、鎖式炭化水素基及び脂環式炭化水素基を表す。
鎖式炭化水素基としては、メチル基、エチル基、プロピル基、イソプロピル基、ブチル基、ｓｅｃ－ブチル基、ｔｅｒｔ－ブチル基、ペンチル基、ヘキシル基、オクチル基及び２－エチルヘキシル基のアルキル基が挙げられる。
特に、Ｒ^b9～Ｒ^b12の鎖式炭化水素基は、好ましくは炭素数１～１２である。
脂環式炭化水素基としては、単環式又は多環式のいずれでもよく、単環式の脂環式炭化水素基としては、シクロプロピル基、シクロブチル基、シクロペンチル基、シクロへキシル基、シクロヘプチル基、シクロオクチル基、シクロデシル基等のシクロアルキル基が挙げられる。多環式の脂環式炭化水素基としては、デカヒドロナフチル基、アダマンチル基、ノルボルニル基及び下記の基等が挙げられる。

特に、Ｒ^b9～Ｒ^b12の脂環式炭化水素基は、好ましくは炭素数３～１８、より好ましくは炭素数４～１２である。
水素原子が脂肪族炭化水素基で置換された脂環式炭化水素基としては、メチルシクロヘキシル基、ジメチルシクロへキシル基、２－メチルアダマンタン－２－イル基、２－エチルアダマンタン－２－イル基、２－イソプロピルアダマンタン－２－イル基、メチルノルボルニル基、イソボルニル基等が挙げられる。水素原子が脂肪族炭化水素基で置換された脂環式炭化水素基においては、脂環式炭化水素基と脂肪族炭化水素基との合計炭素数が好ましくは２０以下である。
フッ化アルキル基とは、フッ素原子を有する炭素数１～１２のアルキル基を表し、フルオロメチル基、ジフルオロメチル基、トリフルオロメチル基、ペルフルオロブチル基等が挙げられる。フッ化アルキル基の炭素数は、好ましくは１～９であり、より好ましくは１～６であり、さらに好ましくは１～４である。 Organic cations of Z1 ⁺ include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations are more preferred. Specifically, a cation represented by any one of formulas (b2-1) to (b2-4) (hereinafter sometimes referred to as "cation (b2-1)" etc. depending on the formula number) is mentioned.

In formulas (b2-1) to (b2-4),
R ^b4 to R ^b6 each independently represent a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms or an aromatic hydrocarbon group having 6 to 36 carbon atoms; The hydrogen atom contained in the chain hydrocarbon group is a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. It may be substituted, and the hydrogen atom contained in the alicyclic hydrocarbon group is a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group. It may be substituted, and the hydrogen atom contained in the aromatic hydrocarbon group is a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or a carbon It may be substituted with 1 to 12 alkoxy groups.
R ^b4 and R ^b5 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and —CH ₂ — contained in the ring may be —O—, —S— or -CO- may be substituted.
R ^b7 and R ^b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms or an alkoxy group having 1 to 12 carbon atoms. .
m2 and n2 each independently represent an integer of 0 to 5;
When m2 is 2 or more, multiple R ^b7 may be the same or different, and when n2 is 2 or more, multiple R ^b8 may be the same or different.
R ^b9 and R ^b10 each independently represent a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms.
R ^b9 and R ^b10 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and —CH ₂ — contained in the ring may be —O—, —S— or -CO- may be substituted.
R ^b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms.
R ^b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the chain hydrocarbon group The hydrogen atoms contained may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atoms contained in the aromatic hydrocarbon groups are alkoxy groups having 1 to 12 carbon atoms or 1 carbon atoms. It may be optionally substituted with ˜12 alkylcarbonyloxy groups.
R ^b11 and R ^b12 may be bonded to each other to form a ring including —CH—CO— to which they are bonded, and —CH ₂ — contained in the ring may be —O—, —S - or -CO- may be substituted.
R ^b13 to R ^b18 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms or an alkoxy group having 1 to 12 carbon atoms. .
R ^b13 and R ^b14 may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are bonded, and —CH ₂ — contained in the ring may be —O—, -S- or -CO- may be substituted.
L ^b31 represents a sulfur atom or an oxygen atom.
o2, p2, s2, and t2 each independently represent an integer of 0 to 5;
q2 and r2 each independently represent an integer of 0 to 4;
u2 represents 0 or 1;
When o2 is 2 or more, multiple R ^b13 are the same or different, when p2 is 2 or more, multiple R ^b14 are the same or different, and when q2 is 2 or more, multiple R ^b15 are the same or different. , when r2 is 2 or more, the plurality of R ^b16 are the same or different; when s2 is 2 or more, the plurality of R ^b17 are the same or different; when t2 is 2 or more, the plurality of R ^b18 are the same or different; different.
When u2 is 0, any one of o2, p2, q2 and r2 is 1 or more, and at least one of R ^b13 to R ^b16 is preferably a halogen atom; Any one of o2, p2, s2, t2, q2 and r2 is 1 or more, and at least one of R ^b13 to R ^b18 is preferably a halogen atom.
Furthermore, when u2 is 0, r2 is preferably 1 or more, more preferably 1. Further, when u2 is 0 and r2 is 1 or more, ^Rb16 is preferably a halogen atom.
An aliphatic hydrocarbon group represents a chain hydrocarbon group and an alicyclic hydrocarbon group.
Chain hydrocarbon groups include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group and 2-ethylhexyl group. mentioned.
In particular, chain hydrocarbon groups of R ^b9 to R ^b12 preferably have 1 to 12 carbon atoms.
The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and the monocyclic alicyclic hydrocarbon group includes a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cyclo Cycloalkyl groups such as a heptyl group, a cyclooctyl group, and a cyclodecyl group can be mentioned. The polycyclic alicyclic hydrocarbon group includes decahydronaphthyl group, adamantyl group, norbornyl group and the following groups.

In particular, the alicyclic hydrocarbon groups of R ^b9 to R ^b12 preferably have 3 to 18 carbon atoms, more preferably 4 to 12 carbon atoms.
Alicyclic hydrocarbon groups in which hydrogen atoms are substituted with aliphatic hydrocarbon groups include methylcyclohexyl group, dimethylcyclohexyl group, 2-methyladamantan-2-yl group, and 2-ethyladamantan-2-yl group. , 2-isopropyladamantan-2-yl group, methylnorbornyl group, isobornyl group and the like. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total carbon number of the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less.
A fluorinated alkyl group means an alkyl group having 1 to 12 carbon atoms and having a fluorine atom, and includes a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group and the like. The number of carbon atoms in the fluorinated alkyl group is preferably 1-9, more preferably 1-6, still more preferably 1-4.

Ｒ^b9とＲ^b10とが一緒になって形成する環は、単環式、多環式、芳香族性、非芳香族性、飽和及び不飽和のいずれの環であってもよい。この環は、３員環～１２員環が挙げられ、好ましくは３員環～７員環である。例えば、チオラン－１－イウム環（テトラヒドロチオフェニウム環）、チアン－１－イウム環、１，４－オキサチアン－４－イウム環等が挙げられる。
Ｒ^b11とＲ^b12とが一緒になって形成する環は、単環式、多環式、芳香族性、非芳香族性、飽和及び不飽和のいずれの環であってもよい。この環は、３員環～１２員環が挙げられ、好ましくは３員環～７員環である。オキソシクロヘプタン環、オキソシクロヘキサン環、オキソノルボルナン環、オキソアダマンタン環等が挙げられる。 The aromatic hydrocarbon group includes aryl groups such as phenyl group, biphenyl group, naphthyl group and phenanthryl group. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and an aromatic hydrocarbon group having a chain hydrocarbon group having 1 to 18 carbon atoms (tolyl group, xylyl group, cumenyl group, mesityl group, p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), and lipids having 3 to 18 carbon atoms. Examples thereof include aromatic hydrocarbon groups having a cyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.). In addition, when the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms is preferred.
Aromatic hydrocarbon groups in which a hydrogen atom is substituted with an alkoxy group include a p-methoxyphenyl group and the like.
Chain hydrocarbon groups in which hydrogen atoms are substituted with aromatic hydrocarbon groups include aralkyl groups such as benzyl, phenethyl, phenylpropyl, trityl, naphthylmethyl and naphthylethyl groups.
Alkoxy groups include methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, heptyloxy, octyloxy, decyloxy and dodecyloxy groups.
An acetyl group, a propionyl group, a butyryl group, etc. are mentioned as an alkylcarbonyl group.
Halogen atoms include fluorine, chlorine, bromine and iodine atoms.
The alkylcarbonyloxy group includes a methylcarbonyloxy group, an ethylcarbonyloxy group, a propylcarbonyloxy group, an isopropylcarbonyloxy group, a butylcarbonyloxy group, a sec-butylcarbonyloxy group, a tert-butylcarbonyloxy group and a pentylcarbonyloxy group. , hexylcarbonyloxy group, octylcarbonyloxy group and 2-ethylhexylcarbonyloxy group.
The ring formed by R ^b4 and R ^b5 bonded together with the sulfur atom to which they are bonded may be monocyclic, polycyclic, aromatic, non-aromatic, saturated or unsaturated. may be a ring of This ring includes a ring having 3 to 18 carbon atoms, preferably a ring having 4 to 18 carbon atoms. Further, the ring containing a sulfur atom includes a 3- to 12-membered ring, preferably a 3- to 7-membered ring, and examples thereof include the following rings. * represents a binding site.

The ring formed by R ^b9 and R ^b10 together may be a monocyclic, polycyclic, aromatic, non-aromatic, saturated or unsaturated ring. This ring includes a 3- to 12-membered ring, preferably a 3- to 7-membered ring. Examples include thiolan-1-ium ring (tetrahydrothiophenium ring), thian-1-ium ring, 1,4-oxathian-4-ium ring and the like.
The ring formed by R ^b11 and R ^b12 together may be a monocyclic, polycyclic, aromatic, non-aromatic, saturated or unsaturated ring. This ring includes a 3- to 12-membered ring, preferably a 3- to 7-membered ring. oxocycloheptane ring, oxocyclohexane ring, oxonorbornane ring, oxoadamantane ring and the like.

カチオン（ｂ２－２）としては、以下のカチオンが挙げられる。

カチオン（ｂ２－３）としては、以下のカチオンが挙げられる。

カチオン（ｂ２－４）としては、以下のカチオンが挙げられる。

Among the cations (b2-1) to (b2-4), the cation (b2-1) is preferred.
Examples of the cation (b2-1) include the following cations.

Examples of the cation (b2-2) include the following cations.

Examples of the cation (b2-3) include the following cations.

Examples of the cation (b2-4) include the following cations.

The acid generator (B) is a combination of the aforementioned anions and the aforementioned organic cations, and these can be combined arbitrarily. As the acid generator (B), preferably formula (Ia-1) to formula (Ia-4), formula (Ia-7) to formula (Ia-11), formula (I -a-14) ~ formula (Ia-30) and formula (Ia-35) ~ formula (Ia-41) an anion represented by any one, cation (b2-1), cation (b2-2), cations (b2-3) or combinations with cations (b2-4).

As the acid generator (B), those represented by formulas (B1-1) to (B1-60) are preferred. Among them, those containing an arylsulfonium cation are preferable, and formulas (B1-1) to (B1-3), formulas (B1-5) to (B1-7), formulas (B1-11) to (B1-14) ), formulas (B1-20) to (B1-26), formulas (B1-29), and formulas (B1-31) to (B1-60) are particularly preferred.

When salt (I) and acid generator (B) are contained as acid generators, the ratio of the contents of salt (I) and acid generator (B) (mass ratio; salt (I): acid generator ( B)) is generally 1:99 to 99:1, preferably 2:98 to 98:2, more preferably 5:95 to 95:5, still more preferably 10:90 to 90 :10, particularly preferably 15:85 to 85:15.

<Resist composition>
The resist composition of the present invention contains an acid generator containing salt (I) and a resin having an acid-labile group (hereinafter sometimes referred to as "resin (A)"). Here, the term "acid-labile group" refers to a structure having a leaving group, the leaving group being eliminated by contact with an acid, and a constitutional unit having a hydrophilic group (e.g., a hydroxy group or a carboxy group). means a group that converts to units.
The resist composition of the present invention preferably contains a quencher (hereinafter sometimes referred to as "quencher (C)") such as a salt that generates an acid that is weaker in acidity than the acid generated by the acid generator. , a solvent (hereinafter sometimes referred to as "solvent (E)").

<Acid generator>
In the resist composition of the present invention, the total content of the acid generator is preferably 1 part by mass or more and 45 parts by mass or less, more preferably 1 part by mass or more, relative to 100 parts by mass of the resin (A) described later. It is 40 parts by mass or less, more preferably 3 parts by mass or more and 40 parts by mass or less.

<Resin (A)>
The resin (A) contains a structural unit having an acid-labile group (hereinafter sometimes referred to as "structural unit (a1)"). The resin (A) preferably further contains structural units other than the structural unit (a1). Structural units other than the structural unit (a1) include structural units having no acid-labile group (hereinafter sometimes referred to as "structural unit (s)"), structural units other than the structural unit (a1) and the structural unit (s). Structural units (for example, structural units having a halogen atom described later (hereinafter sometimes referred to as "structural unit (a4)"), structural units having a non-eliminating hydrocarbon group described later (hereinafter referred to as "structural unit (a5)" in some cases) and other structural units derived from monomers known in the art.

［式（１）中、Ｒ^a1、Ｒ^a２及びＲ^a3は、それぞれ独立に、炭素数１～８のアルキル基、炭素数２～８のアルケニル基、炭素数３～２０の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組み合わせた基を表すか、Ｒ^a1及びＲ^a2は互いに結合してそれらが結合する炭素原子とともに炭素数３～２０の脂環式炭化水素基を形成する。
ｍａ及びｎａは、それぞれ独立して、０又は１を表し、ｍａ及びｎａの少なくとも一方は１を表す。
＊は結合部位を表す。］

［式（２）中、Ｒ^ａ１’及びＲ^ａ２’は、それぞれ独立に、水素原子又は炭素数１～１２の炭化水素基を表し、Ｒ^ａ３’は、炭素数１～２０の炭化水素基を表すか、Ｒ^ａ２’及びＲ^ａ３’は互いに結合してそれらが結合する炭素原子及びＸとともに炭素数３～２０の複素環基を形成し、該炭化水素基及び該複素環基に含まれる－ＣＨ_２－は、－Ｏ－又は－Ｓ－で置き換わってもよい。
Ｘは、酸素原子又は硫黄原子を表す。
ｎａ’は、０又は１を表す。
＊は結合部位を表す。］ <Structural unit (a1)>
The structural unit (a1) is derived from a monomer having an acid-labile group (hereinafter sometimes referred to as "monomer (a1)").
The acid-labile group contained in the resin (A) is a group represented by formula (1) (hereinafter also referred to as group (1)) and/or a group represented by formula (2) (hereinafter referred to as group (2 )) is preferred.

[In formula (1), R ^a1 , R ^a2 and R ^a3 are each independently an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, or an alicyclic hydrocarbon having 3 to 20 carbon atoms. an aromatic hydrocarbon group having 6 to 18 carbon atoms or a group combining these, or R ^a1 and R ^a2 are bonded to each other and together with the carbon atom to which they are bonded, an alicyclic carbonization having 3 to 20 carbon atoms Form a hydrogen group.
ma and na each independently represent 0 or 1, and at least one of ma and na represents 1;
* represents a binding site. ]

[In formula (2), R ^a1′ and R ^a2′ each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R ^a3′ represents a hydrocarbon group having 1 to 20 carbon atoms. or R ^a2′ and R ^a3′ are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded and X, and the hydrocarbon group and the heterocyclic group include— CH ₂ - may be replaced by -O- or -S-.
X represents an oxygen atom or a sulfur atom.
na' represents 0 or 1;
* represents a binding site. ]

Ｒ^ａ１、Ｒ^ａ２及びＲ^ａ３における芳香族炭化水素基としては、フェニル基、ナフチル基、アントリル基、ビフェニル基、フェナントリル基等のアリール基が挙げられる。
組み合わせた基としては、上述したアルキル基と脂環式炭化水素基とを組み合わせた基（例えば、メチルシクロヘキシル基、ジメチルシクロへキシル基、メチルノルボルニル基、シクロヘキシルメチル基、アダマンチルメチル基、アダマンチルジメチル基、ノルボルニルエチル基等のアルキルシクロアルキル基又はシクロアルキルアルキル基）、ベンジル基等のアラルキル基、アルキル基を有する芳香族炭化水素基（ｐ－メチルフェニル基、ｐ－ｔｅｒｔ－ブチルフェニル基、トリル基、キシリル基、クメニル基、メシチル基、２，６－ジエチルフェニル基、２－メチル－６－エチルフェニル基等）、脂環式炭化水素基を有する芳香族炭化水素基（ｐ－シクロヘキシルフェニル基、ｐ－アダマンチルフェニル基等）、フェニルシクロヘキシル基等のアリール－シクロアルキル基等が挙げられる。
好ましくは、ｍａは０であり、ｎａは１である。
Ｒ^a1及びＲ^a2が互いに結合して脂環式炭化水素基を形成する場合の－Ｃ（Ｒ^a1）（Ｒ^a2）（Ｒ^a3）としては、下記の基が挙げられる。脂環式炭化水素基は、好ましくは炭素数３～１２である。＊は－Ｏ－との結合部位を表す。

Examples of alkyl groups for R ^a1 , R ^a2 and R ^a3 include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group and octyl group.
The alkenyl group for R ^a1 , R ^a2 and R ^a3 includes ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, A nonenyl group is mentioned.
The alicyclic hydrocarbon group for R ^a1 , R ^a2 and R ^a3 may be either monocyclic or polycyclic. The monocyclic alicyclic hydrocarbon group includes cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group and cyclooctyl group. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl group, adamantyl group, norbornyl group and the following groups (* represents a bonding site). The alicyclic hydrocarbon groups of R ^a1 , R ^a2 and R ^a3 preferably have 3 to 16 carbon atoms.

Examples of aromatic hydrocarbon groups for R ^a1 , R ^a2 and R ^a3 include aryl groups such as phenyl, naphthyl, anthryl, biphenyl and phenanthryl groups.
Examples of the combined group include groups obtained by combining the above alkyl groups and alicyclic hydrocarbon groups (e.g., methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyl a dimethyl group, an alkylcycloalkyl group such as a norbornylethyl group or a cycloalkylalkyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (p- cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl groups such as phenylcyclohexyl group, and the like.
Preferably, ma is 0 and na is 1.
Examples of —C(R ^a1 )(R ^a2 )(R ^a3 ) when R ^a1 and R ^a2 combine to form an alicyclic hydrocarbon group include the following groups. The alicyclic hydrocarbon group preferably has 3-12 carbon atoms. * represents a binding site with -O-.

Ｒ^ａ１’及びＲ^ａ２’のうち、少なくとも１つは水素原子であることが好ましい。
ｎａ’は、好ましくは０である。 Examples of hydrocarbon groups for R ^a1′ , R ^a2′ and R ^a3′ include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups and groups formed by combining these groups.
Examples of the alkyl group and the alicyclic hydrocarbon group include the same groups as those exemplified for R ^a1 , R ^a2 and R ^a3 .
Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group and phenanthryl group.
Examples of the combined group include groups obtained by combining the above alkyl groups and alicyclic hydrocarbon groups (e.g., methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyl a dimethyl group, an alkylcycloalkyl group such as a norbornylethyl group or a cycloalkylalkyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (p- cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl groups such as phenylcyclohexyl group, and the like.
When R ^a2′ and R ^a3′ are bonded to each other to form a heterocyclic ring together with the carbon atom to which they are bonded and X, —C(R ^a1′ )(R ^a2′ )—X—R ^a3′ is represented by the following group. * represents the binding site.

At least one of R ^a1′ and R ^a2′ is preferably a hydrogen atom.
na' is preferably zero.

Group (1) includes the following groups.
A group of formula (1) wherein R ^a1 , R ^a2 and R ^a3 are alkyl groups, ma=0 and na=1. The group is preferably a tert-butoxycarbonyl group.
In formula (1), R ^a1 and R ^a2 form an adamantyl group together with the carbon atoms to which they are attached, R ^a3 is an alkyl group, ma = 0 and na = 1. .
A group in which R ^a1 and R ^a2 are each independently an alkyl group, R ^a3 is an adamantyl group, ma=0 and na=1 in formula (1).
Specific examples of the group (1) include the following groups. * represents a binding site.

Specific examples of group (2) include the following groups. * represents a binding site.

Monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid labile group.

Among (meth)acrylic monomers having an acid-labile group, those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms are preferred. When the resin (A) having a structural unit derived from the monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group is used in the resist composition, the resolution of the resist pattern can be improved.

［式（ａ１－０）、式（ａ１－１）及び式（ａ１－２）中、
Ｌ^a01、Ｌ^ａ１及びＬ^ａ２は、それぞれ独立に、－Ｏ－又は＊－Ｏ－（ＣＨ_２）_ｋ１－ＣＯ－Ｏ－を表し、ｋ１は１～７のいずれかの整数を表し、＊は－ＣＯ－との結合部位を表す。
Ｒ^a01、Ｒ^ａ４及びＲ^ａ５は、それぞれ独立に、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｒ^a02、Ｒ^a03及びＲ^a04は、それぞれ独立に、炭素数１～８のアルキル基、炭素数３～１８の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組み合わせた基を表す。
Ｒ^ａ６及びＲ^ａ７は、それぞれ独立に、炭素数１～８のアルキル基、炭素数２～８のアルケニル基、炭素数３～１８の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組合せることにより形成される基を表す。
ｍ１は０～１４のいずれかの整数を表す。
ｎ１は０～１０のいずれかの整数を表す。
ｎ１’は０～３のいずれかの整数を表す。］ As a structural unit derived from a (meth)acrylic monomer having group (1), for example, a structural unit represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)), Structural unit represented by formula (a1-1) (hereinafter sometimes referred to as structural unit (a1-1)) or structural unit represented by formula (a1-2) (hereinafter, structural unit (a1-2 ). Preferably, at least one or two structural units selected from the group consisting of structural unit (a1-0), structural unit (a1-1) and structural unit (a1-2), more preferably structural unit It is at least one or two structural units selected from the group consisting of (a1-1) and structural unit (a1-2). These may be used alone or in combination of two or more.

[In formula (a1-0), formula (a1-1) and formula (a1-2),
L ^a01 , L ^a1 and L ^a2 each independently represent —O— or *—O—(CH ₂ ) _k1 —CO—O—, k1 represents an integer of 1 to 7, * is represents the binding site with -CO-.
R ^a01 , R ^a4 and R ^a5 each independently represent a hydrogen atom, a halogen atom or an optionally halogenated alkyl group having 1 to 6 carbon atoms.
R ^a02 , R ^a03 and R ^a04 each independently represent an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or Represents a combined group.
R ^a6 and R ^a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic group having 6 to 18 carbon atoms. It represents a hydrocarbon group or a group formed by combining these groups.
m1 represents any integer from 0 to 14;
n1 represents any integer from 0 to 10;
n1' represents an integer of 0 to 3; ]

R ^a01 , R ^a4 and R ^a5 are preferably a hydrogen atom or a methyl group, more preferably a methyl group.
L ^a01 , L ^a1 and L ^a2 are preferably an oxygen atom or *—O—(CH ₂ ) _k01 —CO—O— (provided that k01 is preferably any integer of 1 to 4, more preferably is 1.), more preferably an oxygen atom.
R ^a02 , R ^a03 , R ^a04 , R ^a6 and R ^a7 are alkyl groups, alkenyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups and groups in which these groups are combined, and R ^a1 of formula (1), The same groups as those mentioned for R ^a2 and R ^a3 can be mentioned.
The alkyl group for R ^a02 , R ^a03 and R ^a04 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, still more preferably a methyl group.
The alkyl group for R ^a6 and R ^a7 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group or a t-butyl group, still more preferably an ethyl group or an isopropyl group. or a t-butyl group.
The alkenyl group for R ^a6 and R ^a7 is preferably an alkenyl group having 2 to 6 carbon atoms, more preferably an ethenyl group, propenyl group, isopropenyl group or butenyl group.
The alicyclic hydrocarbon groups of R ^a02 , R ^a03 , R ^a04 , R ^a6 and R ^a7 preferably have 5 to 12 carbon atoms, more preferably 5 to 10 carbon atoms.
The aromatic hydrocarbon groups of R ^a02 , R ^a03 , R ^a04 , R ^a6 and R ^a7 preferably have 6 to 12 carbon atoms, more preferably 6 to 10 carbon atoms.
It is preferable that the combined group of an alkyl group and an alicyclic hydrocarbon group have a total carbon number of 18 or less.
It is preferable that the combined group of an alkyl group and an aromatic hydrocarbon group have a total carbon number of 18 or less.
R ^a02 and R ^a03 are preferably an alkyl group having 1 to 6 carbon atoms or an aromatic hydrocarbon group having 6 to 12 carbon atoms, more preferably methyl group, ethyl group, phenyl group or naphthyl group.
R ^a04 is preferably an alkyl group having 1 to 6 carbon atoms or an alicyclic hydrocarbon group having 5 to 12 carbon atoms, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group.
R ^a6 and R ^a7 are preferably an alkyl group having 1 to 6 carbon atoms, an alkenyl group having 2 to 6 carbon atoms or an aromatic hydrocarbon group having 6 to 12 carbon atoms, more preferably a methyl group, an ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group or naphthyl group, more preferably ethyl group, isopropyl group, t-butyl group, ethenyl group or phenyl group.
m1 is preferably an integer from 0 to 3, more preferably 0 or 1.
n1 is preferably an integer from 0 to 3, more preferably 0 or 1.
n1' is preferably 0 or 1.

As the structural unit (a1-0), for example, a structural unit represented by any one of formulas (a1-0-1) to (a1-0-18) and R ^a01 in the structural unit (a1-0) Structural units in which the corresponding methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom) or another alkyl group, and the formulas (a1-0-1) to (a1-0- 10), a structural unit represented by formula (a1-0-13) or formula (a1-0-14) is preferred.

Examples of the structural unit (a1-1) include structural units derived from monomers described in JP-A-2010-204646. Among them, a structural unit represented by any one of formulas (a1-1-1) to (a1-1-7) and a methyl group corresponding to R ^a4 in structural unit (a1-1) is a hydrogen atom or a halogen atom. , a haloalkyl group or other alkyl group is preferred, and a structural unit represented by any one of formulas (a1-1-1) to (a1-1-4) is more preferred.

樹脂（Ａ）が構造単位（ａ１－０）及び／又は構造単位（ａ１－１）及び／又は構造単位（ａ１－２）を含む場合、これらの合計含有率は、樹脂（Ａ）の全構造単位に対して、１０モル％以上が挙げられ、好ましくは１５モル％以上であり、より好ましくは２０モル％以上であり、さらに好ましくは２５モル％以上であり、さらにより好ましくは３０モル％以上である。また、９５モル％以下が挙げられ、好ましくは９０モル％以下であり、より好ましくは８５モル％以下であり、さらに好ましくは７０モル％以下である。具体的には、１０～９５モル％が挙げられ、好ましくは１５～９０モル％であり、より好ましくは２０～８５モル％であり、さらに好ましくは２５～７０モル％であり、さらにより好ましくは３０～７０モル％である。
樹脂（Ａ）が構造単位（ａ１－０）を含む場合、その含有率は、樹脂（Ａ）の全構造単位に対して、５モル％以上が挙げられ、好ましくは１０モル％以上である。また、８０モル％以下が挙げられ、好ましくは７５モル％以下であり、より好ましくは７０モル％以下である。具体的には、５～８０モル％が挙げられ、好ましくは５～７５モル％であり、より好ましくは１０～７０モル％である。
樹脂（Ａ）が構造単位（ａ１－１）及び／又は構造単位（ａ１－２）を含む場合、これらの合計含有率は、樹脂（Ａ）の全構造単位に対して、１０モル％以上が挙げられ、好ましくは１５モル％以上であり、より好ましくは２０モル％以上である。また、９０モル％以下が挙げられ、好ましくは８５モル％以下であり、より好ましくは８０モル％以下であり、さらに好ましくは７５モル％以下でであり、より一層好ましくは７０モル％以下である。具体的には、１０～９０モル％が挙げられ、好ましくは１５～８５モル％であり、より好ましくは２０～８０モル％であり、さらに好ましくは２０～７５モル％であり、さらにより好ましくは２０～７０モル％である。 The structural unit (a1-2) corresponds to a structural unit represented by any one of formulas (a1-2-1) to (a1-2-14) and R ^a5 in the structural unit (a1-2). Structural units in which a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group include formula (a1-2-2), formula (a1-2-5), formula (a1-2-6 ) and structural units represented by any one of formulas (a1-2-10) to (a1-2-14) are preferred.

When the resin (A) contains the structural unit (a1-0) and/or the structural unit (a1-1) and/or the structural unit (a1-2), the total content of these is the total structure of the resin (A) 10 mol % or more, preferably 15 mol % or more, more preferably 20 mol % or more, still more preferably 25 mol % or more, still more preferably 30 mol % or more, relative to the unit is. Further, it is 95 mol % or less, preferably 90 mol % or less, more preferably 85 mol % or less, still more preferably 70 mol % or less. Specifically, it is 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, still more preferably 25 to 70 mol%, still more preferably 30 to 70 mol %.
When the resin (A) contains the structural unit (a1-0), its content is 5 mol % or more, preferably 10 mol % or more, based on the total structural units of the resin (A). Also, it is 80 mol % or less, preferably 75 mol % or less, and more preferably 70 mol % or less. Specifically, it is 5 to 80 mol %, preferably 5 to 75 mol %, more preferably 10 to 70 mol %.
When the resin (A) contains the structural unit (a1-1) and/or the structural unit (a1-2), the total content of these units is 10 mol% or more with respect to the total structural units of the resin (A). preferably 15 mol % or more, more preferably 20 mol % or more. Also, it is 90 mol% or less, preferably 85 mol% or less, more preferably 80 mol% or less, still more preferably 75 mol% or less, and even more preferably 70 mol% or less. . Specifically, it is 10 to 90 mol%, preferably 15 to 85 mol%, more preferably 20 to 80 mol%, still more preferably 20 to 75 mol%, still more preferably 20 to 70 mol %.

［式（ａ１－４）中、
Ｒ^a32は、水素原子、ハロゲン原子、又は、ハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｒ^a33は、ハロゲン原子、ヒドロキシ基、炭素数１～６のアルキル基、炭素数１～６のアルコキシ基、炭素数２～１２のアルコキシアルキル基、炭素数２～１２のアルコキシアルコキシ基、炭素数２～４のアルキルカルボニル基、炭素数２～４のアルキルカルボニルオキシ基、アクリロイルオキシ基又はメタクリロイルオキシ基を表す。
Ａ^a30は、単結合又は^＊－Ｘ^a31－（Ａ^a32－Ｘ^a32）_nc－を表し、＊は－Ｒ^a32が結合する炭素原子との結合部位を表す。
Ａ^a32は、炭素数１～６のアルカンジイル基を表す。
Ｘ^a31及びＸ^a32は、それぞれ独立に、－Ｏ－、－ＣＯ－Ｏ－又は－Ｏ－ＣＯ－を表す。
ｎｃは、０又は１を表す。
ｌａは０～４のいずれかの整数を表す。ｌａが２以上のいずれかの整数である場合、複数のＲ^a33は互いに同一であっても異なっていてもよい。
Ｒ^a34及びＲ^a35はそれぞれ独立に、水素原子又は炭素数１～１２の炭化水素基を表し、Ｒ^a36は、炭素数１～２０の炭化水素基を表すか、Ｒ^a35及びＲ^a36は互いに結合してそれらが結合する－Ｃ－Ｏ－とともに炭素数２～２０の２価の炭化水素基を形成し、該炭化水素基及び該２価の炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－又は－Ｓ－で置き換わってもよい。］ Structural units having group (2) in structural unit (a1) include structural units represented by formula (a1-4) (hereinafter sometimes referred to as “structural unit (a1-4)”). .

[In the formula (a1-4),
R ^a32 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.
R ^a33 is a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, and a carbon number It represents an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.
A ^a30 represents a single bond or ^* -X ^a31 -(A ^a32 -X ^a32 ) _nc -, and * represents a bonding site with the carbon atom to which -R ^a32 is bonded.
A ^a32 represents an alkanediyl group having 1 to 6 carbon atoms.
X ^a31 and X ^a32 each independently represent -O-, -CO-O- or -O-CO-.
nc represents 0 or 1;
la represents an integer of 0 to 4; When la is any integer of 2 or more, the plurality of R ^a33 may be the same or different.
R ^a34 and R ^a35 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R ^a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R ^a35 and R ^a36 are bonded to each other to form a C2-C20 divalent hydrocarbon group together with -C-O- to which they are bonded, and -CH ₂ - contained in the hydrocarbon group and the divalent hydrocarbon group is - O- or -S- may be substituted. ]

Halogen atoms in R ^a32 and R ^a33 include fluorine, chlorine and bromine atoms.
Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom for R ^a32 include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2, 3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group and perfluoro A hexyl group is mentioned.
R ^a32 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, even more preferably a hydrogen atom or a methyl group.
Examples of alkyl groups for R ^a33 include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl and hexyl groups. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group.
The alkoxy group for R ^a33 includes methoxy, ethoxy, propoxy, isopropoxy, butoxy, sec-butoxy, tert-butoxy, pentyloxy and hexyloxy groups. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and still more preferably a methoxy group.
Alkoxyalkyl groups for R ^a33 include methoxymethyl, ethoxyethyl, propoxymethyl, isopropoxymethyl, butoxymethyl, sec-butoxymethyl and tert-butoxymethyl groups. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, even more preferably a methoxymethyl group.
The alkoxyalkoxy group for R ^a33 includes a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group and a tert-butoxymethoxy group. mentioned. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group.
The alkylcarbonyl group for R ^a33 includes an acetyl group, a propionyl group and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, more preferably an acetyl group.
The alkylcarbonyloxy group for R ^a33 includes an acetyloxy group, a propionyloxy group and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, more preferably an acetyloxy group.
R ^a33 is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, a fluorine atom, an iodine atom, a hydroxy group, a methyl A group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group is more preferable, and a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group is more preferable.

芳香族炭化水素基としては、フェニル基、ナフチル基、アントリル基、ビフェニル基、フェナントリル基等のアリール基等が挙げられる。
組み合わせた基としては、上述したアルキル基と脂環式炭化水素基とを組み合わせた基（例えば、メチルシクロヘキシル基、ジメチルシクロへキシル基、メチルノルボルニル基、シクロヘキシルメチル基、アダマンチルメチル基、アダマンチルジメチル基、ノルボルニルエチル基等のアルキルシクロアルキル基又はシクロアルキルアルキル基）、ベンジル基等のアラルキル基、アルキル基を有する芳香族炭化水素基（ｐ－メチルフェニル基、ｐ－ｔｅｒｔ－ブチルフェニル基、トリル基、キシリル基、クメニル基、メシチル基、２，６－ジエチルフェニル基、２－メチル－６－エチルフェニル基等）、脂環式炭化水素基を有する芳香族炭化水素基（ｐ－シクロヘキシルフェニル基、ｐ－アダマンチルフェニル基等）、フェニルシクロヘキシル基等のアリール－シクロアルキル基等が挙げられる。特に、Ｒ^a36としては、炭素数１～１８のアルキル基、炭素数３～１８の脂環式炭化水素基、炭素数６～１８の芳香族炭化水素基又はこれらを組み合わせることにより形成される基が挙げられる。 *-X ^a31 -(A ^a32 -X ^a32 ) _nc - includes *-O-, *-CO-O-, *-O-CO-, *-CO-O-A ^a32 -CO-O-, *-O-CO- ^Aa32 -O-, *-O- ^Aa32 -CO-O-, *-CO-O- ^Aa32 -O-CO-, *-O-CO- ^Aa32 -O-CO -, and the like. Among them, *-CO-O-, *-CO-O-A ^a32 -CO-O- or *-O-A ^a32 -CO-O- is preferred.
Alkanediyl group for A ^a32 includes methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group and pentane-1,5-diyl group. , hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl and 2-methylbutane-1,4-diyl group.
A ^a32 is preferably a methylene group or an ethylene group.
A ^a30 is preferably a single bond, *-CO-O- or *-CO-O-A ^a32 -CO-O-, a single bond, *-CO-O- or *-CO-O-CH ₂ -CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.
la is preferably 0, 1 or 2, more preferably 0 or 1, and still more preferably 0.
Hydrocarbon groups for R ^a34 , R ^a35 and R ^a36 include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups and groups in which these are combined.
Examples of alkyl groups include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl and octyl groups.
The alicyclic hydrocarbon group may be either monocyclic or polycyclic. The monocyclic alicyclic hydrocarbon group includes cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group and cyclooctyl group. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl group, adamantyl group, norbornyl group and the following groups (* represents a bonding site).

Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group and phenanthryl group.
Examples of the combined group include groups obtained by combining the above alkyl groups and alicyclic hydrocarbon groups (e.g., methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyl a dimethyl group, an alkylcycloalkyl group such as a norbornylethyl group or a cycloalkylalkyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (p- cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl groups such as phenylcyclohexyl group, and the like. In particular, R ^a36 is an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these groups. is mentioned.

R ^a34 is preferably a hydrogen atom.
R ^a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, more preferably a methyl group or an ethyl group.
The hydrocarbon group of R ^a36 is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination of these A group to be formed, more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aralkyl group having 7 to 18 carbon atoms. The alkyl group and alicyclic hydrocarbon group in R ^a36 are preferably unsubstituted. The aromatic hydrocarbon group for R ^a36 is preferably an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

--OC(R ^a34 )(R ^a35 )-OR ^a36 in the structural unit (a1-4) is eliminated upon contact with an acid (eg, p-toluenesulfonic acid) to form a hydroxy group.
—OC(R ^a34 )(R ^a35 )—OR ^a36 preferably bonds to the o-position or p-position of the benzene ring, more preferably to the p-position.

樹脂（Ａ）が、構造単位（ａ１－４）を含む場合、その含有率は、樹脂（Ａ）の全構造単位の合計に対して、１０～９５モル％であることが好ましく、１５～９０モル％であることがより好ましく、２０～８５モル％であることがさらに好ましく、２０～７０モル％であることがさらにより好ましく、２０～６０モル％であることが特に好ましい。 Examples of structural units (a1-4) include structural units derived from monomers described in JP-A-2010-204646. Preferably, the hydrogen atom corresponding to R ^a32 in structural units and structural units (a1-4) represented by formulas (a1-4-1) to (a1-4-24) is a halogen atom or a haloalkyl group. or a structural unit substituted with an alkyl group, more preferably formula (a1-4-1) ~ formula (a1-4-5), formula (a1-4-10), formula (a1-4-13 ), formula (a1-4-14), formula (a1-4-19), and formula (a1-4-20).

When the resin (A) contains the structural unit (a1-4), the content thereof is preferably 10 to 95 mol%, preferably 15 to 90 mol%, based on the total of all structural units of the resin (A). It is more preferably 20 to 85 mol %, even more preferably 20 to 70 mol %, and particularly preferably 20 to 60 mol %.

式（ａ１－５）中、
Ｒ^a8は、ハロゲン原子を有していてもよい炭素数１～６のアルキル基、水素原子又はハロゲン原子を表す。
Ｚ^a1は、単結合又は＊－（ＣＨ₂）_h3－ＣＯ－Ｌ⁵⁴－を表し、ｈ３は１～４のいずれかの整数を表し、＊は、Ｌ⁵¹との結合部位を表す。
Ｌ⁵¹、Ｌ⁵²、Ｌ⁵³及びＬ⁵⁴は、それぞれ独立に、－Ｏ－又は－Ｓ－を表す。
ｓ１は、１～３のいずれかの整数を表す。
ｓ１’は、０～３のいずれかの整数を表す。 Structural units derived from (meth)acrylic monomers having group (2) include structural units represented by formula (a1-5) (hereinafter sometimes referred to as “structural unit (a1-5)”). be done.

In formula (a1-5),
R ^a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom.
Z ^a1 represents a single bond or *—(CH ₂ ) _h3 —CO—L ⁵⁴ —, h3 represents an integer of 1 to 4, and * represents a binding site with L ⁵¹ .
L ⁵¹ , L ⁵² , L ⁵³ and L ⁵⁴ each independently represent -O- or -S-.
s1 represents any integer from 1 to 3;
s1′ represents any integer from 0 to 3;

Halogen atoms include fluorine atoms and chlorine atoms, with fluorine atoms being preferred.
Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, fluoromethyl group and trifluoro A methyl group is mentioned.
In formula (a1-5), R ^a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group.
L ⁵¹ is preferably an oxygen atom.
Preferably, one of L ⁵² and L ⁵³ is —O— and the other is —S—.
As for s1, 1 is preferable.
s1' is preferably an integer of 0-2.
Z ^a1 is preferably a single bond or *—CH ₂ —CO—O—.

Examples of structural units (a1-5) include structural units derived from monomers described in JP-A-2010-61117. Among them, structural units represented by formulas (a1-5-1) to (a1-5-4) are preferable, and represented by formula (a1-5-1) or formula (a1-5-2) Structural units are more preferred.

When the resin (A) contains the structural unit (a1-5), its content is preferably 1 to 50 mol%, more preferably 3 to 45 mol%, based on the total structural units of the resin (A). , more preferably 5 to 40 mol %, and even more preferably 5 to 30 mol %.

The structural unit (a1) also includes the following structural units.

When the resin (A) contains structural units such as the above (a1-3-1) to (a1-3-7), the content is 10 to 10 to the total structural units of the resin (A). 95 mol % is preferred, 15 to 90 mol % is more preferred, 20 to 85 mol % is even more preferred, 20 to 70 mol % is even more preferred, and 20 to 60 mol % is particularly preferred.

<Structural unit (s)>
Structural unit (s) is derived from a monomer having no acid-labile group (hereinafter sometimes referred to as "monomer (s)"). As a monomer leading to the structural unit (s), a monomer having no acid-labile group known in the field of resists can be used.
The structural unit (s) preferably has a hydroxy group or a lactone ring. A structural unit having a hydroxy group and no acid-labile group (hereinafter sometimes referred to as "structural unit (a2)") and/or a structure having a lactone ring and no acid-labile group When a resin containing a unit (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, the resolution of the resist pattern and adhesion to the substrate can be improved.

<Structural unit (a2)>
The hydroxy group possessed by the structural unit (a2) may be an alcoholic hydroxy group or a phenolic hydroxy group.
When producing a resist pattern from the resist composition of the present invention, when using a high-energy beam such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) as an exposure light source, the structural unit (a2) , a structural unit (a2) having a phenolic hydroxy group is preferable, and it is more preferable to use a structural unit (a2-A) described later. When using an ArF excimer laser (193 nm) or the like, the structural unit (a2) is preferably a structural unit (a2) having an alcoholic hydroxy group, and more preferably a structural unit (a2-1) described later. preferable. As the structural unit (a2), one type may be contained alone, or two or more types may be contained.

［式（ａ２－Ａ）中、
Ｒ^a50は、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｒ^a51は、ハロゲン原子、ヒドロキシ基、炭素数１～６のアルキル基、炭素数１～６のアルコキシ基、炭素数２～１２のアルコキシアルキル基、炭素数２～１２のアルコキシアルコキシ基、炭素数２～４のアルキルカルボニル基、炭素数２～４のアルキルカルボニルオキシ基、アクリロイルオキシ基又はメタクリロイルオキシ基を表す。
Ａ^a50は、単結合又は＊－Ｘ^a51－（Ａ^a52－Ｘ^a52）_nｂ－を表し、＊は－Ｒ^a50が結合する炭素原子との結合部位を表す。
Ａ^a52は、炭素数１～６のアルカンジイル基を表す。
Ｘ^a51及びＸ^a52は、それぞれ独立に、－Ｏ－、－ＣＯ－Ｏ－又は－Ｏ－ＣＯ－を表す。
ｎｂは、０又は１を表す。
ｍｂは０～４のいずれかの整数を表す。ｍｂが２以上のいずれかの整数である場合、複数のＲ^a51は互いに同一であっても異なっていてもよい。］ Structural units having a phenolic hydroxy group in structural units (a2) include structural units represented by formula (a2-A) (hereinafter sometimes referred to as “structural unit (a2-A)”).

[In the formula (a2-A),
R ^a50 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.
R ^a51 is a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, It represents an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.
A ^a50 represents a single bond or *-X ^a51 -(A ^a52 -X ^a52 ) _nb -, and * represents a bonding site with the carbon atom to which -R ^a50 bonds.
A ^a52 represents an alkanediyl group having 1 to 6 carbon atoms.
X ^a51 and X ^a52 each independently represent -O-, -CO-O- or -O-CO-.
nb represents 0 or 1;
mb represents an integer of 0 to 4; When mb is any integer of 2 or more, multiple R ^a51 may be the same or different. ]

Halogen atoms in R ^a50 and R ^a51 include fluorine, chlorine and bromine atoms.
Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom for R ^a50 include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2, 3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group and perfluoro A hexyl group is mentioned.
R ^a50 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, even more preferably a hydrogen atom or a methyl group.
Examples of alkyl groups for R ^a51 include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl and hexyl groups. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group.
Alkoxy groups for R ^a51 include methoxy, ethoxy, propoxy, isopropoxy, butoxy, sec-butoxy and tert-butoxy groups. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and still more preferably a methoxy group.
Alkoxyalkyl groups for R ^a51 include methoxymethyl, ethoxyethyl, propoxymethyl, isopropoxymethyl, butoxymethyl, sec-butoxymethyl and tert-butoxymethyl groups. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, even more preferably a methoxymethyl group.
The alkoxyalkoxy group for R ^a51 includes a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group and a tert-butoxymethoxy group. mentioned. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group.
The alkylcarbonyl group for R ^a51 includes an acetyl group, a propionyl group and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, more preferably an acetyl group.
The alkylcarbonyloxy group for R ^a51 includes an acetyloxy group, a propionyloxy group and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, more preferably an acetyloxy group.
R ^a51 is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, a fluorine atom, an iodine atom, a hydroxy group, a methyl A group, methoxy group, ethoxy group, ethoxyethoxy group or ethoxymethoxy group is more preferable, and fluorine atom, iodine atom, hydroxy group, methyl group, methoxy group or ethoxyethoxy group is more preferable.

*-X ^a51 -(A ^a52 -X ^a52 ) _nb - includes *-O-, *-CO-O-, *-O-CO-, *-CO-O-A ^a52 -CO-O-, *-O-CO-A ^a52 -O-, *-O-A ^a52 -CO-O-, *-CO-O-A ^a52 -O-CO-, *-O-CO-A ^a52 -O-CO -, are included. Among them, *-CO-O-, *-CO-OA ^a52 -CO-O- or * ^{-OA a52} -CO-O- is preferred.

The alkanediyl group for A ^a52 includes methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, and pentane-1,5-diyl group. , hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl and 2-methylbutane-1,4-diyl group.
A ^a52 is preferably a methylene group or an ethylene group.

A ^a50 is preferably a single bond, *—CO—O— or *—CO—O—A ^a52 —CO—O—, a single bond, *—CO—O— or *—CO—O—CH ₂ --CO--O-- is more preferred, and a single bond or *--CO--O-- is even more preferred.

mb is preferably 0, 1 or 2, more preferably 0 or 1, and still more preferably 0.
At least one hydroxy group is preferably bonded to the meta-position or para-position of the benzene ring, and more preferably bonded to the meta-position. When the phenyl group has two or more hydroxy groups, the two hydroxy groups are preferably bonded to the meta and para positions, respectively.

樹脂（Ａ）中に構造単位（ａ２－Ａ）が含まれる場合の構造単位（ａ２－Ａ）の含有率は、全構造単位に対して、好ましくは５モル％以上であり、より好ましくは１０モル％以上であり、さらに好ましくは１５モル％以上であり、より一層好ましくは２０モル％以上である。また、好ましくは８０モル％以下であり、より好ましくは７０モル％以下であり、さらに好ましくは６５モル％以下である。具体的には、好ましくは５～８０モル％であり、より好ましくは１０～７０モル％であり、さらに好ましくは１５～６５モル％であり、さらにより好ましくは２０～６５モル％である。
構造単位（ａ２－Ａ）は、例えば構造単位（ａ１－４）を用いて重合した後、ｐ－トルエンスルホン酸等の酸で処理することにより、樹脂（Ａ）に含ませることができる。また、アセトキシスチレン等を用いて重合した後、テトラメチルアンモニウムヒドロキシド等のアルカリで処理することにより、構造単位（ａ２－Ａ）を樹脂（Ａ）に含ませることができる。 Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577.
The structural unit (a2-A) includes structural units represented by formulas (a2-2-1) to (a2-2-24) and formulas (a2-2-1) to (a2-2-24). ) in which the methyl group corresponding to R ^a50 in the structural unit (a2-A) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. Structural unit (a2-A) includes structural units represented by formulas (a2-2-1) to (a2-2-4), structural units represented by formula (a2-2-6), and structural units represented by formula ( a2-2-8), structural units represented by formulas (a2-2-12) to (a2-2-18) and formulas (a2-2-1) to (a2- 2-4), a structural unit represented by formula (a2-2-6), a structural unit represented by formula (a2-2-8), and formulas (a2-2-12) to In the structural unit represented by formula (a2-2-18), it is preferably a structural unit in which the methyl group corresponding to R ^a50 in structural unit (a2-A) is replaced with a hydrogen atom. -3), structural unit represented by formula (a2-2-4), structural unit represented by formula (a2-2-8), formula (a2-2-12) to formula A structural unit represented by (a2-2-14), a structural unit represented by formula (a2-2-18) and a structural unit represented by formula (a2-2-3), a structural unit represented by formula (a2-2- 4), structural units represented by formula (a2-2-8), structural units represented by formulas (a2-2-12) to (a2-2-14), and formula ( a2-2-18), the structural unit is more preferably a structural unit in which the methyl group corresponding to R ^a50 in the structural unit (a2-A) is replaced with a hydrogen atom, and the structural unit represented by the formula (a2-2- 3), a structural unit represented by formula (a2-2-4), a structural unit represented by formula (a2-2-8) and a structural unit represented by formula (a2-2-3) the structural unit represented by formula (a2-2-4), the structural unit represented by formula (a2-2-8), the methyl group corresponding to R ^a50 in structural unit (a2-A) is more preferably a structural unit in which is replaced with a hydrogen atom.

When the structural unit (a2-A) is contained in the resin (A), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol%, based on the total structural units. It is mol % or more, more preferably 15 mol % or more, and still more preferably 20 mol % or more. Also, it is preferably 80 mol % or less, more preferably 70 mol % or less, and still more preferably 65 mol % or less. Specifically, it is preferably 5 to 80 mol %, more preferably 10 to 70 mol %, even more preferably 15 to 65 mol %, still more preferably 20 to 65 mol %.
The structural unit (a2-A) can be included in the resin (A), for example, by polymerizing the structural unit (a1-4) and then treating with an acid such as p-toluenesulfonic acid. Further, the structural unit (a2-A) can be included in the resin (A) by polymerizing with acetoxystyrene or the like and then treating with an alkali such as tetramethylammonium hydroxide.

式（ａ２－１）中、
Ｌ^a3は、－Ｏ－又は＊－Ｏ－（ＣＨ₂）_k2－ＣＯ－Ｏ－を表し、
ｋ２は１～７のいずれかの整数を表す。＊は－ＣＯ－との結合部位を表す。
Ｒ^a14は、水素原子又はメチル基を表す。
Ｒ^a15及びＲ^a16は、それぞれ独立に、水素原子、メチル基又はヒドロキシ基を表す。
ｏ１は、０～１０のいずれかの整数を表す。 A structural unit having an alcoholic hydroxy group in the structural unit (a2) includes a structural unit represented by formula (a2-1) (hereinafter sometimes referred to as "structural unit (a2-1)").

In formula (a2-1),
L ^a3 represents -O- or *-O-(CH ₂ ) _k2 -CO-O-,
k2 represents any integer from 1 to 7; * represents a bonding site with -CO-.
R ^a14 represents a hydrogen atom or a methyl group.
R ^a15 and R ^a16 each independently represent a hydrogen atom, a methyl group or a hydroxy group.
o1 represents an integer from 0 to 10;

In formula (a2-1), L ^a3 is preferably -O-, -O-(CH ₂ ) _f1 -CO-O- (f1 represents an integer of 1 to 4) , and more preferably -O-.
R ^a14 is preferably a methyl group.
R ^a15 is preferably a hydrogen atom.
R ^a16 is preferably a hydrogen atom or a hydroxy group.
o1 is preferably any integer from 0 to 3, more preferably 0 or 1.

樹脂（Ａ）が構造単位（ａ２－１）を含む場合、その含有率は、樹脂（Ａ）の全構造単位に対して、１モル％以上が挙げられ、２モル％以上が好ましい。また、４５モル％以下が挙げられ、好ましくは４０モル％以下であり、より好ましくは３５モル％以下であり、さらに好ましくは２０モル％以下であり、より一層好ましくは１０モル％以下である。具体的には、１～４５モル％が挙げられ、好ましくは１～４０モル％であり、より好ましくは１～３５モル％であり、さらに好ましくは１～２０モル％であり、さらにより好ましくは１～１０モル％である。 Examples of structural units (a2-1) include structural units derived from monomers described in JP-A-2010-204646. Structural units represented by any one of formulas (a2-1-1) to (a2-1-6) are preferred, and any one of formulas (a2-1-1) to (a2-1-4) Structural units represented by the formula (a2-1-1) or (a2-1-3) are more preferable.

When the resin (A) contains the structural unit (a2-1), the content thereof may be 1 mol % or more, preferably 2 mol % or more, based on the total structural units of the resin (A). Also, it is 45 mol % or less, preferably 40 mol % or less, more preferably 35 mol % or less, still more preferably 20 mol % or less, and even more preferably 10 mol % or less. Specifically, it is 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, still more preferably 1 to 20 mol%, still more preferably It is 1 to 10 mol %.

<Structural unit (a3)>
The lactone ring of the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, γ-butyrolactone ring, δ-valerolactone ring, or a condensed ring of a monocyclic lactone ring and another ring. It's okay. Preferable examples include a γ-butyrolactone ring, an adamantanelactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

［式（ａ３－１）、式（ａ３－２）、式（ａ３－３）及び式（ａ３－４）中、
Ｌ^ａ４、Ｌ^ａ５及びＬ^ａ６は、それぞれ独立に、－Ｏ－又は＊－Ｏ－（ＣＨ_２）_ｋ３－ＣＯ－Ｏ－（ｋ３は１～７のいずれかの整数を表す。）で表される基を表す。
Ｌ^ａ７は、－Ｏ－、＊－Ｏ－Ｌ^ａ８－Ｏ－、＊－Ｏ－Ｌ^ａ８－ＣＯ－Ｏ－、＊－Ｏ－Ｌ^ａ８－ＣＯ－Ｏ－Ｌ^ａ９－ＣＯ－Ｏ－又は＊－Ｏ－Ｌ^ａ８－Ｏ－ＣＯ－Ｌ^ａ９－Ｏ－を表す。
Ｌ^ａ８及びＬ^ａ９は、それぞれ独立に、炭素数１～６のアルカンジイル基を表す。
＊はカルボニル基との結合部位を表す。
Ｒ^ａ１８、Ｒ^ａ１９及びＲ^ａ２０は、それぞれ独立に、水素原子又はメチル基を表す。
Ｒ^ａ２４は、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
Ｘ^ａ３は、－ＣＨ_２－又は酸素原子を表す。
Ｒ^ａ２１は炭素数１～４の脂肪族炭化水素基を表す。
Ｒ^ａ２２、Ｒ^ａ２３及びＲ^ａ２５は、それぞれ独立に、カルボキシ基、シアノ基又は炭素数１～４の脂肪族炭化水素基を表す。
ｐ１は０～５のいずれかの整数を表す。
ｑ１は、０～３のいずれかの整数を表す。
ｒ１は、０～３のいずれかの整数を表す。
ｗ１は、０～８のいずれかの整数を表す。
ｐ１、ｑ１、ｒ１及び／又はｗ１が２以上のとき、複数のＲ^ａ２１、Ｒ^ａ２２、Ｒ^ａ２３及び／又はＲ^ａ２５は互いに同一であってもよく、異なっていてもよい。］ Structural unit (a3) is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3) or formula (a3-4). One of these may be contained alone, or two or more may be contained.

[In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4),
L ^a4 , L ^a5 and L ^a6 are each independently represented by —O— or *—O—(CH ₂ ) _k3 —CO—O— (k3 represents an integer of 1 to 7); represents a group.
L ^a7 is -O-, * ^{-OL a8} -O-, * ^{-OL a8} -CO-O-, * ^{-OL a8} -CO- ^{OL a9} -CO-O- or * -OL ^a8 -O-CO-L ^a9 -O-.
L ^a8 and L ^a9 each independently represent an alkanediyl group having 1 to 6 carbon atoms.
* represents a bonding site with a carbonyl group.
R ^a18 , R ^a19 and R ^a20 each independently represent a hydrogen atom or a methyl group.
R ^a24 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.
X ^a3 represents —CH ₂ — or an oxygen atom.
R ^a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms.
R ^a22 , R ^a23 and R ^a25 each independently represent a carboxy group, a cyano group or an aliphatic hydrocarbon group having 1 to 4 carbon atoms.
p1 represents any integer from 0 to 5;
q1 represents an integer of 0 to 3;
r1 represents an integer of 0 to 3;
w1 represents any integer from 0 to 8;
When p1, q1, r1 and/or w1 are 2 or more, a plurality of R ^a21 , R ^a22 , R ^a23 and/or R ^a25 may be the same or different. ]

Examples of the aliphatic hydrocarbon group for R ^a21 , R ^a22 , R ^a23 and R ^a25 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group and tert-butyl group. be done.
Halogen atoms in R ^a24 include fluorine, chlorine, bromine and iodine atoms.
Examples of the alkyl group for R ^a24 include methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group and hexyl group, preferably having 1 to 4 carbon atoms. and more preferably a methyl group or an ethyl group.
The alkyl group having a halogen atom for R ^a24 includes a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, and a perfluoro A hexyl group, a trichloromethyl group, a tribromomethyl group, a triiodomethyl group and the like can be mentioned.
The alkanediyl group for L ^a8 and L ^a9 includes methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5 -diyl group, hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1, 4-diyl group, 2-methylbutane-1,4-diyl group and the like.

In formulas (a3-1) to (a3-3), L ^a4 to L ^a6 are each independently preferably —O— or *—O—(CH ₂ ) _k3 —CO—O—, k3 is an integer of 1 to 4, more preferably -O- and *-O-CH ₂ -CO-O-, more preferably an oxygen atom.
R ^a18 to R ^a21 are preferably methyl groups.
R ^a22 and R ^a23 are each independently preferably a carboxy group, a cyano group or a methyl group.
p1, q1 and r1 are each independently preferably an integer of 0 to 2, more preferably 0 or 1.

（式中、Ｒ^ａ２４、Ｌ^ａ７は、上記と同じ意味を表す。） In formula (a3-4), R ^a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, still more preferably a hydrogen atom or a methyl group is.
R ^a25 is preferably a carboxy group, a cyano group or a methyl group.
L ^a7 is preferably -O- or *-OL ^a8 -CO-O-, more preferably -O-, -O-CH ₂ -CO-O- or -O-C ₂ H ₄ - It is CO—O—.
w1 is preferably an integer from 0 to 2, more preferably 0 or 1.
In particular, formula (a3-4) is preferably formula (a3-4)'.

(In the formula, R ^a24 and L ^a7 have the same meanings as above.)

樹脂（Ａ）が構造単位（ａ３）を含む場合、その合計含有率は、樹脂（Ａ）の全構造単位に対して、１モル％以上が挙げられ、好ましくは３モル％以上であり、より好ましくは５モル％以上であり、さらに好ましくは１０モル％以上である。また、７０モル％以下が挙げられ、好ましくは６５モル％以下であり、より好ましくは６０モル％以下である。具体的には、１～７０モル％が挙げられ、好ましくは３～６５モル％であり、より好ましくは５～６０モル％である。
また、構造単位（ａ３－１）、構造単位（ａ３－２）、構造単位（ａ３－３）又は構造単位（ａ３－４）の含有率は、それぞれ、樹脂（Ａ）の全構造単位に対して、好ましくは１モル％以上であり、より好ましくは３モル％以上であり、さらに好ましくは５モル％以上である。また、好ましくは６０モル％以下であり、より好ましくは５５モル％以下であり、さらに好ましくは５０モル％以下である。具体的には、１～６０モル％が好ましく、３～５５モル％がより好ましく、５～５０モル％がさらに好ましい。 As the structural unit (a3), the monomer described in JP-A-2010-204646, the monomer described in JP-A-2000-122294, the structure derived from the monomer described in JP-A-2012-41274 units. As the structural unit (a3), formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2), formula (a3-3- 1), a structural unit represented by any one of formulas (a3-3-2) and formulas (a3-4-1) to (a3-4-12), and in said structural unit, formula (a3-1 ) to R ^a18 , R ^a19 , R ^a20 and R ^a24 in formulas (a3-4) are preferably structural units in which methyl groups are replaced with hydrogen atoms.

When the resin (A) contains the structural unit (a3), the total content thereof may be 1 mol% or more, preferably 3 mol% or more, relative to the total structural units of the resin (A). It is preferably 5 mol % or more, more preferably 10 mol % or more. Also, it is 70 mol % or less, preferably 65 mol % or less, and more preferably 60 mol % or less. Specifically, it is 1 to 70 mol %, preferably 3 to 65 mol %, more preferably 5 to 60 mol %.
Further, the content of structural unit (a3-1), structural unit (a3-2), structural unit (a3-3) or structural unit (a3-4) is is preferably 1 mol % or more, more preferably 3 mol % or more, still more preferably 5 mol % or more. Also, it is preferably 60 mol % or less, more preferably 55 mol % or less, and still more preferably 50 mol % or less. Specifically, it is preferably 1 to 60 mol %, more preferably 3 to 55 mol %, even more preferably 5 to 50 mol %.

［式（ａ４）中、
Ｒ⁴¹は、水素原子又はメチル基を表す。
Ｒ⁴²は、炭素数１～２４のフッ素原子を有する飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。］
Ｒ⁴²で表される飽和炭化水素基は、鎖式炭化水素基及び単環又は多環の脂環式炭化水素基、並びに、これらを組み合わせることにより形成される基等が挙げられる。 <Structural unit (a4)>
Structural units (a4) include the following structural units.

[In formula (a4),
R ⁴¹ represents a hydrogen atom or a methyl group.
R ⁴² represents a saturated hydrocarbon group having 1 to 24 fluorine atoms, and -CH ₂ - contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. ]
Examples of saturated hydrocarbon groups represented by R ⁴² include chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these groups.

組み合わせにより形成される基としては、１以上のアルキル基又は１以上のアルカンジイル基と、１以上の脂環式炭化水素基とを組み合わせることにより形成される基が挙げられ、－アルカンジイル基－脂環式炭化水素基、－脂環式炭化水素基－アルキル基、－アルカンジイル基－脂環式炭化水素基－アルキル基等が挙げられる。 Chain hydrocarbon groups include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl and octadecyl groups. mentioned. Monocyclic or polycyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl and cyclooctyl; decahydronaphthyl, adamantyl, norbornyl and the following groups (* represents a binding site) and other polycyclic alicyclic hydrocarbon groups.

Groups formed by combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, and -alkanediyl groups- Alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, -alkanediyl group-alicyclic hydrocarbon group-alkyl group and the like.

［式（ａ４－０）中、
Ｒ⁵は、水素原子又はメチル基を表す。
Ｌ^4ａは、単結合又は炭素数１～４の２価の脂肪族飽和炭化水素基を表す。
Ｌ^3ａは、炭素数１～８のペルフルオロアルカンジイル基又は炭素数３～１２のペルフルオロシクロアルカンジイル基を表す。
Ｒ⁶は、水素原子又はフッ素原子を表す。］ The structural unit (a4) is at least selected from the group consisting of formula (a4-0), formula (a4-1), formula (a4-2), formula (a4-3) and formula (a4-4) Structural units represented by one are exemplified.

[In the formula (a4-0),
^R5 represents a hydrogen atom or a methyl group.
L ^4a represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 4 carbon atoms.
L ^3a represents a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms.
^R6 represents a hydrogen atom or a fluorine atom. ]

The divalent aliphatic saturated hydrocarbon group for L ^4a includes linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, ethane-1 ,1-diyl group, propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group and 2-methylpropane-1,2-diyl group, etc. alkanediyl groups.
The perfluoroalkanediyl group for L ^3a includes a difluoromethylene group, a perfluoroethylene group, a perfluoropropane-1,1-diyl group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, and a perfluoropropane group. -2,2-diyl group, perfluorobutane-1,4-diyl group, perfluorobutane-2,2-diyl group, perfluorobutane-1,2-diyl group, perfluoropentane-1,5-diyl group, perfluoropentane -2,2-diyl group, perfluoropentane-3,3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane -1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane -2,2-diyl group, perfluorooctane-3,3-diyl group, perfluorooctane-4,4-diyl group and the like.
The perfluorocycloalkanediyl group for L ^3a includes a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, a perfluoroadamantanediyl group, and the like.

L ^4a is preferably a single bond, a methylene group or an ethylene group, more preferably a single bond or a methylene group.
L ^3a is preferably a C 1-6 perfluoroalkanediyl group, more preferably a C 1-3 perfluoroalkanediyl group.

Examples of the structural unit (a4-0) include structural units shown below and structural units in which the methyl group corresponding to R ⁵ in the structural unit (a4-0) in the following structural units is replaced with a hydrogen atom.

［式（ａ４－１）中、
Ｒ^a41は、水素原子又はメチル基を表す。
Ｒ^a42は、置換基を有していてもよい炭素数１～２０の飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
Ａ^a41は、置換基を有していてもよい炭素数１～６のアルカンジイル基又は式（ａ－ｇ１）で表される基を表す。ただし、Ａ^ａ４１及びＲ^ａ４２のうち少なくとも１つは、置換基としてハロゲン原子（好ましくはフッ素原子）を有する。

〔式（ａ－ｇ１）中、
ｓは０又は１を表す。
Ａ^a42及びＡ^a44は、それぞれ独立に、置換基を有していてもよい炭素数１～５の２価の飽和炭化水素基を表す。
Ａ^a43は、単結合又は置換基を有していてもよい炭素数１～５の２価の脂肪族炭化水素基を表す。
Ｘ^a41及びＸ^a42は、それぞれ独立に、－Ｏ－、－ＣＯ－、－ＣＯ－Ｏ－又は－Ｏ－ＣＯ－を表す。
ただし、Ａ^a42、Ａ^a43、Ａ^a44、Ｘ^a41及びＸ^a42の炭素数の合計は７以下である。〕
＊は結合部位であり、右側の＊が－Ｏ－ＣＯ－Ｒ^a42との結合部位である。］ Structural units (a4) include structural units represented by formula (a4-1).

[In formula (a4-1),
R ^a41 represents a hydrogen atom or a methyl group.
R ^a42 represents an optionally substituted saturated hydrocarbon group having 1 to 20 carbon atoms, and —CH ₂ — contained in the saturated hydrocarbon group is replaced with —O— or —CO— may
A ^a41 represents an optionally substituted alkanediyl group having 1 to 6 carbon atoms or a group represented by formula (a-g1). However, at least one of A ^a41 and R ^a42 has a halogen atom (preferably a fluorine atom) as a substituent.

[In formula (a-g1),
s represents 0 or 1;
A ^a42 and A ^a44 each independently represent an optionally substituted divalent saturated hydrocarbon group having 1 to 5 carbon atoms.
A ^a43 represents a single bond or an optionally substituted C 1-5 divalent aliphatic hydrocarbon group.
X ^a41 and X ^a42 each independently represent -O-, -CO-, -CO-O- or -O-CO-.
However, the total number of carbon atoms of A ^a42 , A ^a43 , A ^a44 , X ^a41 and X ^a42 is 7 or less. ]
* is a binding site, and * on the right side is a binding site with --O--CO--R ^a42 . ]

組み合わせにより形成される基としては、１以上のアルキル基又は１以上のアルカンジイル基と、１以上の脂環式飽和炭化水素基とを組み合わせることにより形成される基が挙げられ、－アルカンジイル基－脂環式飽和炭化水素基、－脂環式飽和炭化水素基－アルキル基、－アルカンジイル基－脂環式飽和炭化水素基－アルキル基等が挙げられる。
Ｒ^a42が有していてもよい置換基としては、ハロゲン原子及び式（ａ－ｇ３）で表される基からなる群より選択される少なくとも１種が挙げられる。ハロゲン原子としては、フッ素原子、塩素原子、臭素原子及びヨウ素原子が挙げられ、好ましくはフッ素原子である。

［式（ａ－ｇ３）中、
Ｘ^a43は、酸素原子、カルボニル基、＊－Ｏ－ＣＯ－又は＊－ＣＯ－Ｏ－を表す。
Ａ^a45は、ハロゲン原子を有していてもよい炭素数１～１７の脂肪族炭化水素基を表す。＊はＲ^a42との結合部位を表す。］
ただし、Ｒ^a42－Ｘ^a43－Ａ^a45において、Ｒ^a42がハロゲン原子を有しない場合は、Ａ^a45は、少なくとも１つのハロゲン原子を有する炭素数１～１７の脂肪族炭化水素基を表す。
Ａ^a45における脂肪族炭化水素基としては、メチル基、エチル基、プロピル基、ブチル基、ペンチル基、ヘキシル基、ヘプチル基、オクチル基、デシル基、ドデシル基、ペンタデシル基、ヘキサデシル基、ヘプタデシル基及びオクタデシル基等のアルキル基；
シクロペンチル基、シクロへキシル基、シクロヘプチル基、シクロオクチル基等の単環式の脂環式炭化水素基；並びにデカヒドロナフチル基、アダマンチル基、ノルボルニル基及び下記の基（＊は結合部位を表す。）等の多環式の脂環式炭化水素基が挙げられる。

組み合わせにより形成される基としては、１以上のアルキル基又は１以上のアルカンジイル基と、１以上の脂環式炭化水素基とを組み合わせることにより形成される基が挙げられ、－アルカンジイル基－脂環式炭化水素基、－脂環式炭化水素基－アルキル基、－アルカンジイル基－脂環式炭化水素基－アルキル基等が挙げられる。
Ｒ^a42は、ハロゲン原子を有してもよい脂肪族炭化水素基が好ましく、ハロゲン原子を有するアルキル基及び／又は式（ａ－ｇ３）で表される基を有する脂肪族炭化水素基がより好ましい。
Ｒ^a42がハロゲン原子を有する脂肪族炭化水素基である場合、好ましくはフッ素原子を有する脂肪族炭化水素基であり、より好ましくはペルフルオロアルキル基又はペルフルオロシクロアルキル基であり、さらに好ましくは炭素数が１～６のペルフルオロアルキル基であり、特に好ましくは炭素数１～３のペルフルオロアルキル基である。ペルフルオロアルキル基としては、ペルフルオロメチル基、ペルフルオロエチル基、ペルフルオロプロピル基、ペルフルオロブチル基、ペルフルオロペンチル基、ペルフルオロヘキシル基、ペルフルオロヘプチル基及びペルフルオロオクチル基等が挙げられる。ペルフルオロシクロアルキル基としては、ペルフルオロシクロヘキシル基等が挙げられる。
Ｒ^a42が、式（ａ－ｇ３）で表される基を有する脂肪族炭化水素基である場合、式（ａ－ｇ３）で表される基に含まれる炭素数を含めて、Ｒ^a42の総炭素数は、１５以下が好ましく、１２以下がより好ましい。式（ａ－ｇ３）で表される基を置換基として有する場合、その数は１個が好ましい。
Ｒ^a42が式（ａ－ｇ３）で表される基を有する脂肪族炭化水素基である場合、Ｒ^a42は、さらに好ましくは式（ａ－ｇ２）で表される基である。

［式（ａ－ｇ２）中、
Ａ^a46は、ハロゲン原子を有していてもよい炭素数１～１７の２価の脂肪族炭化水素基を表す。
Ｘ^a44は、＊＊－Ｏ－ＣＯ－又は＊＊－ＣＯ－Ｏ－を表す（＊＊はＡ^a46との結合部位を表す）。
Ａ^a47は、ハロゲン原子を有していてもよい炭素数１～１７の脂肪族炭化水素基を表す。
ただし、Ａ^a46、Ａ^a47及びＸ^a44の炭素数の合計は１８以下であり、Ａ^a46及びＡ^a47のうち、少なくとも一方は、少なくとも１つのハロゲン原子を有する。
＊はカルボニル基との結合部位を表す。］
Ａ^a46の脂肪族炭化水素基の炭素数は１～６が好ましく、１～３がより好ましい。
Ａ^a47の脂肪族炭化水素基の炭素数は４～１５が好ましく、５～１２がより好ましく、Ａ^a47は、シクロヘキシル基又はアダマンチル基がさらに好ましい。
式（ａ－ｇ２）で表される基の好ましい構造は、以下の構造である（＊はカルボニル基との結合部位である）。

Ａ^a41におけるアルカンジイル基としては、メチレン基、エチレン基、プロパン－１，３－ジイル基、ブタン－１，４－ジイル基、ペンタン－１，５－ジイル基、ヘキサン－１，６－ジイル基等の直鎖状アルカンジイル基；プロパン－１，２－ジイル基、ブタン－１，３－ジイル基、２－メチルプロパン－１，２－ジイル基、１－メチルブタン－１，４－ジイル基、２－メチルブタン－１，４－ジイル基等の分岐状アルカンジイル基が挙げられる。
Ａ^a41のアルカンジイル基における置換基としては、ヒドロキシ基及び炭素数１～６のアルコキシ基等が挙げられる。
Ａ^a41は、好ましくは炭素数１～４のアルカンジイル基であり、より好ましくは炭素数２～４のアルカンジイル基であり、さらに好ましくはエチレン基である。 Examples of saturated hydrocarbon groups for R ^a42 include chain saturated hydrocarbon groups, monocyclic or polycyclic saturated alicyclic hydrocarbon groups, groups formed by combining these groups, and the like.
Chain saturated hydrocarbon groups include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group and octadecyl group. are mentioned.
Examples of monocyclic or polycyclic saturated alicyclic hydrocarbon groups include cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl and other cycloalkyl groups; decahydronaphthyl, adamantyl, norbornyl and the following polycyclic alicyclic saturated hydrocarbon groups such as groups (* represents a bonding site).

Groups formed by combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups and one or more alicyclic saturated hydrocarbon groups, and -alkanediyl groups Examples include - alicyclic saturated hydrocarbon group, - alicyclic saturated hydrocarbon group - alkyl group, - alkanediyl group - alicyclic saturated hydrocarbon group - alkyl group, and the like.
The substituent that R ^a42 may have includes at least one selected from the group consisting of halogen atoms and groups represented by formulas (a-g3). A halogen atom includes a fluorine atom, a chlorine atom, a bromine atom and an iodine atom, preferably a fluorine atom.

[In the formula (a-g3),
X ^a43 represents an oxygen atom, a carbonyl group, *--O--CO-- or *--CO--O--.
A ^a45 represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom. * represents the binding site with ^Ra42 . ]
However, in R ^a42 -X ^a43 -A ^a45 , when R ^a42 does not have a halogen atom, A ^a45 represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms and having at least one halogen atom.
Aliphatic hydrocarbon groups for A ^a45 include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl and an alkyl group such as an octadecyl group;
Monocyclic alicyclic hydrocarbon groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group and cyclooctyl group; decahydronaphthyl group, adamantyl group, norbornyl group and the following groups ) and other polycyclic alicyclic hydrocarbon groups.

Groups formed by combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups and one or more alicyclic hydrocarbon groups, and -alkanediyl groups- Alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, -alkanediyl group-alicyclic hydrocarbon group-alkyl group and the like.
R ^a42 is preferably an aliphatic hydrocarbon group which may have a halogen atom, more preferably an alkyl group having a halogen atom and/or an aliphatic hydrocarbon group having a group represented by formula (a-g3) .
When R ^a42 is an aliphatic hydrocarbon group having a halogen atom, it is preferably an aliphatic hydrocarbon group having a fluorine atom, more preferably a perfluoroalkyl group or a perfluorocycloalkyl group, still more preferably having a carbon number of It is a perfluoroalkyl group having 1 to 6 carbon atoms, particularly preferably a perfluoroalkyl group having 1 to 3 carbon atoms. Perfluoroalkyl groups include perfluoromethyl, perfluoroethyl, perfluoropropyl, perfluorobutyl, perfluoropentyl, perfluorohexyl, perfluoroheptyl and perfluorooctyl groups. A perfluorocyclohexyl group etc. are mentioned as a perfluorocycloalkyl group.
When R ^a42 is an aliphatic hydrocarbon group having a group represented by formula (a-g3), the total number of R ^a42 including the number of carbon atoms contained in the group represented by formula (a-g3) The number of carbon atoms is preferably 15 or less, more preferably 12 or less. When it has a group represented by formula (a-g3) as a substituent, the number thereof is preferably one.
When R ^a42 is an aliphatic hydrocarbon group having a group represented by formula (a-g3), R ^a42 is more preferably a group represented by formula (a-g2).

[In the formula (a-g2),
A ^a46 represents a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom.
X ^a44 represents **-O-CO- or **-CO-O- (** represents a binding site with A ^a46 ).
A ^a47 represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a halogen atom.
However, the total number of carbon atoms of A ^a46 , A ^a47 and X ^a44 is 18 or less, and at least one of A ^a46 and A ^a47 has at least one halogen atom.
* represents a bonding site with a carbonyl group. ]
The number of carbon atoms in the aliphatic hydrocarbon group of A ^a46 is preferably 1-6, more preferably 1-3.
The number of carbon atoms in the aliphatic hydrocarbon group of A ^a47 is preferably 4 to 15, more preferably 5 to 12, and A ^a47 is more preferably a cyclohexyl group or an adamantyl group.
A preferred structure of the group represented by formula (a-g2) is the following structure (* is a bonding site with a carbonyl group).

Alkanediyl group for A ^a41 includes methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group and hexane-1,6-diyl group. straight-chain alkanediyl groups such as; Branched alkanediyl groups such as 2-methylbutane-1,4-diyl group can be mentioned.
Examples of substituents on the alkanediyl group of A ^a41 include a hydroxy group and an alkoxy group having 1 to 6 carbon atoms.
A ^a41 is preferably an alkanediyl group having 1 to 4 carbon atoms, more preferably an alkanediyl group having 2 to 4 carbon atoms, and still more preferably an ethylene group.

The divalent saturated hydrocarbon groups represented by A ^a42 , A ^a43 and A ^a44 in the group represented by the formula (a-g1) include linear or branched alkanediyl groups and monocyclic or polycyclic divalent Examples thereof include alicyclic hydrocarbon groups and groups formed by combining an alkanediyl group and a divalent alicyclic hydrocarbon group. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group and the like.
Substituents of the divalent saturated hydrocarbon groups represented by A ^a42 , A ^a43 and A ^a44 include a hydroxy group and an alkoxy group having 1 to 6 carbon atoms.
s is preferably zero.
Among the groups represented by the formula (a-g1), examples of groups in which X ^a42 is -O-, -CO-, -CO-O- or -O-CO- include the following groups. In the following examples, * and ** each represent a binding site, and ** is the binding site for --O--CO--R ^a42 .

As the structural unit represented by formula (a4-1), the following structural units and the methyl group corresponding to R ^a41 in the structural unit represented by formula (a4-1) in the following structural units is replaced with a hydrogen atom. Structural units replaced are included.

［式（ａ４－２）中、
Ｒ^f5は、水素原子又はメチル基を表す。
Ｌ⁴⁴は、炭素数１～６のアルカンジイル基を表し、該アルカンジイル基に含まれる－ＣＨ₂－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。
Ｒ^f6は、炭素数１～２０のフッ素原子を有する飽和炭化水素基を表す。
ただし、Ｌ⁴⁴及びＲ^f6の合計炭素数の上限は２１である。］ Structural units (a4) include structural units represented by formula (a4-2).

[In formula (a4-2),
R ^f5 represents a hydrogen atom or a methyl group.
L ⁴⁴ represents an alkanediyl group having 1 to 6 carbon atoms, and --CH ₂ -- contained in the alkanediyl group may be replaced with --O-- or --CO--.
R ^f6 represents a saturated hydrocarbon group having 1 to 20 carbon atoms and a fluorine atom.
However, the upper limit of the total carbon number of L ⁴⁴ and R ^f6 is 21. ]

Examples of the alkanediyl group having 1 to 6 carbon atoms for L ⁴⁴ include the same groups as those exemplified for the alkanediyl group for A a ⁴¹ .
Examples of the saturated hydrocarbon group for R ^f6 include the same groups as those exemplified for R ^a42 .
The alkanediyl group having 1 to 6 carbon atoms in L ⁴⁴ is preferably an alkanediyl group having 2 to 4 carbon atoms, and more preferably an ethylene group.

Examples of structural units represented by formula (a4-2) include structural units represented by formulas (a4-1-1) to (a4-1-11). A structural unit in which the methyl group corresponding to R ^f5 in the structural unit (a4-2) is replaced with a hydrogen atom is also included as the structural unit represented by the formula (a4-2).

［式（ａ４－３）中、
Ｒ^f7は、水素原子又はメチル基を表す。
Ｌ⁵は、炭素数１～６のアルカンジイル基を表す。
Ａ^f13は、フッ素原子を有していてもよい炭素数１～１８の２価の飽和炭化水素基を表す。
Ｘ^f12は、＊－Ｏ－ＣＯ－又は＊－ＣＯ－Ｏ－を表す（＊はＡ^f13との結合部位を表す。）。
Ａ^f14は、フッ素原子を有していてもよい炭素数１～１７の飽和炭化水素基を表す。
但し、Ａ^f13及びＡ^f14の少なくとも１つは、フッ素原子を有し、Ｌ⁵、Ａ^f13及びＡ^f14の合計炭素数の上限は２０である。］ Structural units (a4) include structural units represented by formula (a4-3).

[In formula (a4-3),
R ^f7 represents a hydrogen atom or a methyl group.
L ⁵ represents an alkanediyl group having 1 to 6 carbon atoms.
A ^f13 represents a C 1-18 divalent saturated hydrocarbon group which may have a fluorine atom.
X ^f12 represents *--O--CO-- or *--CO--O-- (* represents a binding site with A ^f13 ).
A ^f14 represents a C 1-17 saturated hydrocarbon group which may have a fluorine atom.
However, at least one of A ^f13 and A ^f14 has a fluorine atom, and the upper limit of the total carbon number of L ⁵ , A ^f13 and A ^f14 is 20. ]

The alkanediyl group for ^{L5 includes the same groups as those exemplified for the alkanediyl group for Aa41 .}
The divalent saturated hydrocarbon group which may have a fluorine atom in A ^f13 preferably has a divalent chain saturated hydrocarbon group which may have a fluorine atom and a fluorine atom is a divalent saturated alicyclic hydrocarbon group, more preferably a perfluoroalkanediyl group.
Examples of the divalent chain saturated hydrocarbon group which may have a fluorine atom include alkanediyl groups such as a methylene group, an ethylene group, a propanediyl group, a butanediyl group and a pentanediyl group; a difluoromethylene group, a perfluoroethylene group, perfluoroalkanediyl groups such as perfluoropropanediyl group, perfluorobutanediyl group and perfluoropentanediyl group;
The divalent saturated alicyclic hydrocarbon group which may have a fluorine atom may be either monocyclic or polycyclic. Monocyclic groups include a cyclohexanediyl group, a perfluorocyclohexanediyl group, and the like. Examples of polycyclic groups include an adamantanediyl group, a norbornanediyl group, a perfluoroadamantanediyl group, and the like.
Examples of saturated hydrocarbon groups and optionally fluorine-containing saturated hydrocarbon groups for A ^f14 include groups similar to those exemplified for R ^a42 . Among them, trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, Fluorination such as 2,2,3,3,4,4,5,5,5-nonafluoropentyl, pentyl, hexyl, perfluorohexyl, heptyl, perfluoroheptyl, octyl and perfluorooctyl groups Alkyl group, cyclopropylmethyl group, cyclopropyl group, cyclobutylmethyl group, cyclopentyl group, cyclohexyl group, perfluorocyclohexyl group, adamantyl group, adamantylmethyl group, adamantyldimethyl group, norbornyl group, norbornylmethyl group, perfluoroadamantyl group , a perfluoroadamantylmethyl group, and the like.

In formula (a4-3), L ⁵ is preferably an ethylene group.
The divalent saturated hydrocarbon group of A ^f13 is preferably a group containing a divalent chain saturated hydrocarbon group having 1 to 6 carbon atoms and a divalent alicyclic saturated hydrocarbon group having 3 to 12 carbon atoms, A divalent chain hydrocarbon group having 2 to 3 carbon atoms is more preferred.
The saturated hydrocarbon group of A ^f14 is preferably a group containing a chain saturated hydrocarbon group having 3 to 12 carbon atoms and an alicyclic saturated hydrocarbon group having 3 to 12 carbon atoms, and a saturated chain hydrocarbon group having 3 to 10 carbon atoms. Groups containing a hydrocarbon group and an alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms are more preferred. Among them, A ^f14 is preferably a group containing an alicyclic saturated hydrocarbon group having 3 to 12 carbon atoms, more preferably a cyclopropylmethyl group, a cyclopentyl group, a cyclohexyl group, a norbornyl group and an adamantyl group. .

Examples of structural units represented by formula (a4-3) include structural units represented by formulas (a4-1′-1) to (a4-1′-11). A structural unit in which the methyl group corresponding to R ^f7 in the structural unit (a4-3) is replaced with a hydrogen atom is also included as the structural unit represented by the formula (a4-3).

［式（ａ４－４）中、
Ｒ^f21は、水素原子又はメチル基を表す。
Ａ^f21は、－（ＣＨ₂）_j1－、－（ＣＨ₂）_j2－Ｏ－（ＣＨ₂）_j3－又は－（ＣＨ₂）_j4－ＣＯ－Ｏ－（ＣＨ₂）_j5－を表す。
ｊ１～ｊ５は、それぞれ独立に、１～６のいずれかの整数を表す。
Ｒ^f22は、フッ素原子を有する炭素数１～１０の飽和炭化水素基を表す。］ Structural units (a4) also include structural units represented by formula (a4-4).

[In the formula (a4-4),
R ^f21 represents a hydrogen atom or a methyl group.
A ^f21 represents -(CH ₂ ) _j1 -, -(CH ₂ ) _j2 -O-(CH ₂ ) _j3 - or -(CH ₂ ) _j4 -CO-O-(CH ₂ ) _j5 -.
j1 to j5 each independently represent an integer of 1 to 6;
R ^f22 represents a C 1-10 saturated hydrocarbon group having a fluorine atom. ]

The saturated hydrocarbon group represented by R ^{f22 includes the same saturated hydrocarbon group represented by R a42 .} R ^f22 is preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom or an alicyclic hydrocarbon group having 1 to 10 carbon atoms having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom. An alkyl group having 1 to 6 carbon atoms and having a fluorine atom is more preferred.

In formula (a4-4), A ^f21 is preferably --(CH ₂ ) _j1 --, more preferably an ethylene group or a methylene group, and still more preferably a methylene group.

As the structural unit represented by formula (a4-4), for example, in structural units represented by the following structural units and structural units represented by the following formulas, the methyl group corresponding to R ^f21 in structural unit (a4-4) is hydrogen Structural units replaced with atoms are included.

When the resin (A) contains the structural unit (a4), its content is preferably 1 to 20 mol%, more preferably 2 to 15 mol%, based on the total structural units of the resin (A). ~10 mol% is more preferred.

［式（ａ５－１）中、
Ｒ⁵¹は、水素原子又はメチル基を表す。
Ｒ⁵²は、炭素数３～１８の脂環式炭化水素基を表し、該脂環式炭化水素基に含まれる水素原子は炭素数１～８の脂肪族炭化水素基で置換されていてもよい。
Ｌ⁵⁵は、単結合又は炭素数１～１８の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－又は－ＣＯ－に置き換わっていてもよい。］ <Structural unit (a5)>
Examples of non-leaving hydrocarbon groups possessed by the structural unit (a5) include groups having linear, branched or cyclic hydrocarbon groups. Among them, the structural unit (a5) is preferably a group having an alicyclic hydrocarbon group.
Examples of the structural unit (a5) include structural units represented by formula (a5-1).

[In formula (a5-1),
^R51 represents a hydrogen atom or a methyl group.
R ⁵² represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. .
L ⁵⁵ represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and —CH ₂ — contained in the saturated hydrocarbon group may be replaced with —O— or —CO— . ]

The alicyclic hydrocarbon group for R ⁵² may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cyclopropyl, cyclobutyl, cyclopentyl and cyclohexyl groups. Examples of polycyclic alicyclic hydrocarbon groups include adamantyl groups and norbornyl groups.
Aliphatic hydrocarbon groups having 1 to 8 carbon atoms are, for example, methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group and 2 - alkyl groups such as ethylhexyl groups.
A 3-methyladamantyl group etc. are mentioned as an alicyclic hydrocarbon group which has a substituent.
R ⁵² is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, more preferably an adamantyl group, a norbornyl group or a cyclohexyl group.
The divalent saturated hydrocarbon group for L ⁵⁵ includes a divalent saturated chain hydrocarbon group and a saturated divalent alicyclic hydrocarbon group, preferably a saturated chain divalent hydrocarbon group. .
Examples of divalent chain saturated hydrocarbon groups include alkanediyl groups such as methylene, ethylene, propanediyl, butanediyl and pentanediyl groups.
The bivalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. The monocyclic alicyclic saturated hydrocarbon group includes cycloalkanediyl groups such as cyclopentanediyl group and cyclohexanediyl group. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include an adamantanediyl group and a norbornanediyl group.

式（Ｌ１－１）中、
Ｘ^x1は、＊－Ｏ－ＣＯ－又は＊－ＣＯ－Ｏ－を表す（＊はＬ^x1との結合部位を表す。）。
Ｌ^x1は、炭素数１～１６の２価の脂肪族飽和炭化水素基を表す。
Ｌ^x2は、単結合又は炭素数１～１５の２価の脂肪族飽和炭化水素基を表す。
ただし、Ｌ^x1及びＬ^x2の合計炭素数は、１６以下である。
式（Ｌ１－２）中、
Ｌ^x3は、炭素数１～１７の２価の脂肪族飽和炭化水素基を表す。
Ｌ^x4は、単結合又は炭素数１～１６の２価の脂肪族飽和炭化水素基を表す。
ただし、Ｌ^x3及びＬ^x4の合計炭素数は、１７以下である。
式（Ｌ１－３）中、
Ｌ^x5は、炭素数１～１５の２価の脂肪族飽和炭化水素基を表す。
Ｌ^x6及びＬ^x7は、それぞれ独立に、単結合又は炭素数１～１４の２価の脂肪族飽和炭化水素基を表す。
ただし、Ｌ^x5、Ｌ^x6及びＬ^x7の合計炭素数は、１５以下である。
式（Ｌ１－４）中、
Ｌ^x8及びＬ^x9は、単結合又は炭素数１～１２の２価の脂肪族飽和炭化水素基を表す。
Ｗ^x1は、炭素数３～１５の２価の脂環式飽和炭化水素基を表す。
ただし、Ｌ^x8、Ｌ^x9及びＷ^x1の合計炭素数は、１５以下である。 Groups in which —CH ₂ — contained in the divalent saturated hydrocarbon group represented by L ⁵⁵ is replaced with —O— or —CO— include, for example, formulas (L1-1) to (L1-4) and the group represented by In the following formulas, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom.

In formula (L1-1),
X ^x1 represents *-O-CO- or *-CO-O- (* represents a binding site with L ^x1 ).
L ^x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms.
L ^x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms.
However, the total carbon number of L ^x1 and L ^x2 is 16 or less.
In formula (L1-2),
L ^x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms.
L ^x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms.
However, the total carbon number of L ^x3 and L ^x4 is 17 or less.
In formula (L1-3),
L ^x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms.
L ^x6 and L ^x7 each independently represent a single bond or a divalent saturated aliphatic hydrocarbon group having 1 to 14 carbon atoms.
However, the total carbon number of L ^x5 , L ^x6 and L ^x7 is 15 or less.
In formula (L1-4),
L ^x8 and L ^x9 each represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms.
W ^x1 represents a divalent saturated alicyclic hydrocarbon group having 3 to 15 carbon atoms.
However, the total carbon number of L ^x8 , L ^x9 and W ^x1 is 15 or less.

L ^x1 is preferably a C 1-8 divalent aliphatic saturated hydrocarbon group, more preferably a methylene group or an ethylene group.
L ^x2 is preferably a single bond or a C 1-8 divalent aliphatic saturated hydrocarbon group, more preferably a single bond.
L ^x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^x5 is preferably a C 1-8 divalent aliphatic saturated hydrocarbon group, more preferably a methylene group or an ethylene group.
L ^x6 is preferably a single bond or a C 1-8 divalent aliphatic saturated hydrocarbon group, more preferably a methylene group or an ethylene group.
L ^x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms.
L ^x8 is preferably a single bond or a divalent saturated aliphatic hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group.
L ^x9 is preferably a single bond or a divalent saturated aliphatic hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group.
W ^x1 is preferably a divalent saturated alicyclic hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

Examples of the group represented by formula (L1-1) include the divalent groups shown below.

Examples of the group represented by formula (L1-2) include the divalent groups shown below.

Examples of the group represented by formula (L1-3) include the divalent groups shown below.

Examples of the group represented by formula (L1-4) include the divalent groups shown below.

L ⁵⁵ is preferably a single bond or a group represented by formula (L1-1).

樹脂（Ａ）が、構造単位（ａ５）を含む場合、その含有率は、樹脂（Ａ）の全構造単位に対して、１～３０モル％が好ましく、２～２０モル％がより好ましく、３～１５モル％がさらに好ましい。 Examples of the structural unit (a5-1) include the structural units shown below and structural units in which the methyl group corresponding to R ⁵¹ in the structural unit (a5-1) in the following structural units is replaced with a hydrogen atom.

When the resin (A) contains the structural unit (a5), the content thereof is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, based on the total structural units of the resin (A). ~15 mol% is more preferred.

<Structural unit (a6)>
Structural unit (a6) is a structural unit having a —SO ₂ — group, and preferably has a —SO ₂ — group in its side chain.
A structural unit having a —SO ₂ — group may have a linear structure having a —SO ₂ — group, or may have a branched structure having a —SO ₂ — group, It may have a cyclic structure (monocyclic and polycyclic structures) having a —SO ₂ — group. A structural unit having a cyclic structure containing a —SO ₂ — group is preferred, and a structural unit having a cyclic structure (sultone ring) containing —SO ₂ —O— is more preferred.

The sultone ring includes rings represented by the following formulas (T ¹ -1), (T ¹ -2), (T ¹ -3) and (T ¹ -4). The binding site can be at any position. The sultone ring may be monocyclic, but preferably polycyclic. A polycyclic sultone ring means a bridged ring containing —SO ₂ —O— as an atomic group constituting the ring, and is represented by formulas (T ¹ -1) and (T ¹ -2). ring. The sultone ring may further contain a heteroatom in addition to —SO ₂ —O— as an atomic group constituting the ring, like the ring represented by formula (T ¹ -2). A heteroatom includes an oxygen atom, a sulfur atom or a nitrogen atom, preferably an oxygen atom.

The sultone ring may have a substituent, and examples of the substituent include a halogen atom, an alkyl group having 1 to 12 carbon atoms optionally having a hydroxy group, a halogen atom, a hydroxy group, a cyano group, and 1 carbon atom. alkoxy groups of up to 12 carbon atoms, aryl groups of 6 to 12 carbon atoms, aralkyl groups of 7 to 12 carbon atoms, glycidyloxy groups, alkoxycarbonyl groups of 2 to 12 carbon atoms and alkylcarbonyl groups of 2 to 4 carbon atoms, and the like. be done.
Halogen atoms include fluorine, chlorine, bromine and iodine atoms.
Alkyl groups include methyl, ethyl, propyl, butyl, pentyl, hexyl, octyl and decyl groups, preferably alkyl groups having 1 to 6 carbon atoms, more preferably methyl groups. is.
The alkyl group having a halogen atom includes a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, trichloromethyl group, tribromomethyl group and triiodomethyl group, preferably trifluoromethyl group.
Alkyl groups having a hydroxy group include hydroxyalkyl groups such as a hydroxymethyl group and a 2-hydroxyethyl group.
Alkoxy groups include methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, heptyloxy, octyloxy, decyloxy and dodecyloxy groups.
Aryl groups include phenyl, naphthyl, anthryl, p-methylphenyl, p-tert-butylphenyl, p-adamantylphenyl, tolyl, xylyl, cumyl, mesityl, biphenyl, and phenanthryl groups. groups, 2,6-diethylphenyl groups and 2-methyl-6-ethylphenyl groups.
Aralkyl groups include benzyl, phenethyl, phenylpropyl, naphthylmethyl and naphthylethyl groups.
The alkoxycarbonyl group includes groups in which an alkoxy group and a carbonyl group such as a methoxycarbonyl group and an ethoxycarbonyl group are bonded, preferably an alkoxycarbonyl group having 6 or less carbon atoms, more preferably a methoxycarbonyl group. mentioned.
Alkylcarbonyl groups include acetyl, propionyl and butyryl groups.
A sultone ring having no substituent is preferred from the viewpoint of facilitating the production of the monomer leading to the structural unit (a6).

［式（Ｔ１’）中、
Ｘ^１１は、酸素原子、硫黄原子又はメチレン基を表す。
Ｒ^４１は、ハロゲン原子又はヒドロキシ基を有していてもよい炭素数１～１２のアルキル基、ハロゲン原子、ヒドロキシ基、シアノ基、炭素数１～１２のアルコキシ基、炭素数６～１２のアリール基、炭素数７～１２のアラルキル基、グリシジルオキシ基、炭素数２～１２のアルコキシカルボニル基又は炭素数２～４のアルキルカルボニル基を表す。
ｍａは、０～９のいずれかの整数を表す。ｍａが２以上のとき、複数のＲ^４１は同一であっても異なってもよい。
結合部位は任意の位置である。］
Ｘ^１１は、好ましくは酸素原子又はメチレン基であり、より好ましくはメチレン基である。
Ｒ^４１としては、スルトン環の置換基と同様のものが挙げられ、ハロゲン原子又はヒドロキシ基を有していてもよい炭素数１～１２のアルキル基が好ましい。
スルトン環としては、式（Ｔ１）で表される環がより好ましい。

［式（Ｔ１）中、
Ｒ^８は、ハロゲン原子又はヒドロキシ基を有していてもよい炭素数１～１２のアルキル基、ハロゲン原子、ヒドロキシ基、シアノ基、炭素数１～１２のアルコキシ基、炭素数６～１２のアリール基、炭素数７～１２のアラルキル基、グリシジルオキシ基、炭素数２～１２のアルコキシカルボニル基あるいは炭素数２～４のアルキルカルボニル基を表す。
ｍは、０～９のいずれかの整数を表す。ｍが２以上のとき、複数のＲ^８は同一であっても異なってもよい。
結合部位は任意の位置である。］
Ｒ^８は、Ｒ^４１と同様のものが挙げられる。
式（Ｔ１’）におけるｍａ及び式（Ｔ１）におけるｍは、好ましくは０又は１であり、より好ましくは０である。
式（Ｔ１’）で表される環及び式（Ｔ１）で表される環としては、以下の環が挙げられる。結合部位は任意の位置である。

スルトン環を有する構造単位は、下記の基を有することが好ましい。下記基における＊は結合部位を表す。

As the sultone ring, a ring represented by the following formula (T1') is preferable.

[in the formula (T1′),
X ¹¹ represents an oxygen atom, a sulfur atom or a methylene group.
R ⁴¹ is an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, or an aryl group having 6 to 12 carbon atoms. aralkyl group having 7 to 12 carbon atoms, glycidyloxy group, alkoxycarbonyl group having 2 to 12 carbon atoms or alkylcarbonyl group having 2 to 4 carbon atoms.
ma represents any integer from 0 to 9; When ma is 2 or more, multiple R ⁴¹ may be the same or different.
The binding site can be any position. ]
X ¹¹ is preferably an oxygen atom or a methylene group, more preferably a methylene group.
As R ⁴¹ , the same substituents as those for the sultone ring can be mentioned, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group is preferred.
As the sultone ring, a ring represented by formula (T1) is more preferable.

[In formula (T1),
R ⁸ is an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, or an aryl group having 6 to 12 carbon atoms. aralkyl group having 7 to 12 carbon atoms, glycidyloxy group, alkoxycarbonyl group having 2 to 12 carbon atoms or alkylcarbonyl group having 2 to 4 carbon atoms.
m represents any integer from 0 to 9; When m is 2 or more, multiple R ^8s may be the same or different.
The binding site can be any position. ]
Examples of R ⁸ include those similar to those of R ⁴¹ .
ma in formula (T1′) and m in formula (T1) are preferably 0 or 1, more preferably 0.
The ring represented by formula (T1′) and the ring represented by formula (T1) include the following rings. The binding site can be any position.

A structural unit having a sultone ring preferably has the following groups. * in the following group represents a binding site.

A structural unit having a —SO ₂ — group preferably further has a group derived from a polymerizable group. Examples of the polymerizable group include vinyl group, acryloyl group, methacryloyl group, acryloyloxy group, methacryloyloxy group, acryloylamino group, methacryloylamino group, acryloylthio group and methacryloylthio group.
Among them, the monomer leading to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer.

［式（Ｉｘ）中、Ｒ^ｘは、ハロゲン原子を有してもよい炭素数１～６のアルキル基、水素原子又はハロゲン原子を表す。
Ａ^ｘｘは、酸素原子、－Ｎ（Ｒ^ｃ）－又は硫黄原子を表す。
Ａ^ｘは、炭素数１～１８の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－ＣＯ－又は－Ｎ（Ｒ^ｄ）－に置き換わっていてもよい。
Ｘ^１１は、酸素原子、硫黄原子又はメチレン基を表す。
Ｒ^４１は、ハロゲン原子又はヒドロキシ基を有していてもよい炭素数１～１２のアルキル基、ハロゲン原子、ヒドロキシ基、シアノ基、炭素数１～１２のアルコキシ基、炭素数６～１２のアリール基、炭素数７～１２のアラルキル基、グリシジルオキシ基、炭素数２～１２のアルコキシカルボニル基又は炭素数２～４のアルキルカルボニル基を表す。
ｍａは、０～９のいずれかの整数を表す。ｍａが２以上のとき、複数のＲ^４１は同一であっても異なってもよい。
Ｒ^ｃ及びＲ^ｄは、互いに独立に、水素原子又は炭素数１～６のアルキル基を表す。］
Ｒ^ｘのハロゲン原子としては、フッ素原子、塩素原子、臭素原子及びヨウ素原子が挙げられる。
Ｒ^ｘのアルキル基としては、例えば、メチル基、エチル基、ｎ－プロピル基、イソプロピル基、ｎ－ブチル基、ｓｅｃ－ブチル基、ｔｅｒｔ－ブチル基、ｎ－ペンチル基及びｎ－ヘキシル基等が挙げられ、好ましくは炭素数１～４のアルキル基であり、より好ましくはメチル基又はエチル基である。
Ｒ^ｘのハロゲン原子を有するアルキル基としては、例えば、トリフルオロメチル基、ペルフルオロエチル基、ペルフルオロプロピル基、ペルフルオロイソプロピル基、ペルフルオロブチル基、ペルフルオロｓｅｃ－ブチル基、ペルフルオロｔｅｒｔ－ブチル基、ペルフルオロペンチル基、ペルフルオロヘキシル基、トリクロロメチル基、トリブロモメチル基及びトリヨードメチル基などが挙げられる。
Ｒ^ｘは、好ましくは水素原子又は炭素数１～４のアルキル基であり、より好ましくは水素原子、メチル基又はエチル基であり、さらに好ましくは水素原子又はメチル基である。
Ａ^ｘの２価の飽和炭化水素基としては、直鎖状アルカンジイル基、分岐状アルカンジイル基、単環式又は多環式の２価の脂環式飽和炭化水素基が挙げられ、これらの基のうち２種以上を組合せたものでもよい。
具体的には、メチレン基、エチレン基、プロパン－１，３－ジイル基、プロパン－１，２－ジイル基、ブタン－１，４－ジイル基、ペンタン－１，５－ジイル基、ヘキサン－１，６－ジイル基、ヘプタン－１，７－ジイル基、オクタン－１，８－ジイル基、ノナン－１，９－ジイル基、デカン－１，１０－ジイル基、ウンデカン－１，１１－ジイル基、ドデカン－１，１２－ジイル基、トリデカン－１，１３－ジイル基、テトラデカン－１，１４－ジイル基、ペンタデカン－１，１５－ジイル基、ヘキサデカン－１，１６－ジイル基、ヘプタデカン－１，１７－ジイル基、エタン－１，１－ジイル基、プロパン－１，１－ジイル基及びプロパン－２，２－ジイル基等の直鎖状アルカンジイル基；
ブタン－１，３－ジイル基、２－メチルプロパン－１，３－ジイル基、２－メチルプロパン－１，２－ジイル基、ペンタン－１，４－ジイル基、２－メチルブタン－１，４－ジイル基等の分岐状アルカンジイル基；
シクロブタン－１，３－ジイル基、シクロペンタン－１，３－ジイル基、シクロヘキサン－１，４－ジイル基、シクロオクタン－１，５－ジイル基等のシクロアルカンジイル基である単環式の２価の脂環式飽和炭化水素基；
ノルボルナン－１，４－ジイル基、ノルボルナン－２，５－ジイル基、アダマンタン－１，５－ジイル基、アダマンタン－２，６－ジイル基等の多環式の２価の脂環式飽和炭化水素基等が挙げられる。
Ｒ^４１、Ｘ^１１及びｍａは、式（Ｔ１’）と同様のものが挙げられる。
スルトン環としては、上述のものが挙げられ、中でも、結合位置が特定された上述のものが好ましい。 Structural unit (a6) is preferably a structural unit represented by formula (Ix).

[In formula (Ix), R ^x represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom.
A ^xx represents an oxygen atom, -N(R ^c )- or a sulfur atom.
A ^x represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and —CH ₂ — contained in the saturated hydrocarbon group is —O—, —CO— or —N(R ^d )— may be replaced.
X ¹¹ represents an oxygen atom, a sulfur atom or a methylene group.
R ⁴¹ is an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, or an aryl group having 6 to 12 carbon atoms. aralkyl group having 7 to 12 carbon atoms, glycidyloxy group, alkoxycarbonyl group having 2 to 12 carbon atoms or alkylcarbonyl group having 2 to 4 carbon atoms.
ma represents any integer from 0 to 9; When ma is 2 or more, multiple R ⁴¹ may be the same or different.
R ^c and R ^d each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. ]
Halogen atoms for R ^x include fluorine, chlorine, bromine and iodine atoms.
The alkyl group for R ^x includes, for example, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, n-pentyl group and n-hexyl group. and preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group.
The alkyl group having a halogen atom for R ^x includes, for example, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, and a perfluoropentyl group. , perfluorohexyl group, trichloromethyl group, tribromomethyl group and triiodomethyl group.
R ^x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, still more preferably a hydrogen atom or a methyl group.
The divalent saturated hydrocarbon group for A ^x includes a linear alkanediyl group, a branched alkanediyl group, and a monocyclic or polycyclic bivalent alicyclic saturated hydrocarbon group. A combination of two or more of the groups may also be used.
Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1 ,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group , dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, heptadecane-1, linear alkanediyl groups such as 17-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group and propane-2,2-diyl group;
butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4- a branched alkanediyl group such as a diyl group;
monocyclic 2 which is a cycloalkanediyl group such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; alicyclic saturated hydrocarbon group;
Polycyclic bivalent alicyclic saturated hydrocarbons such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group and the like.
Examples of R ⁴¹ , X ¹¹ and ma are the same as those of formula (T1′).
Examples of the sultone ring include those described above, and among these, the above-described ones whose binding positions are specified are preferable.

Structural units (a6) include the following structural units.

Among them, structural units represented by formula (a6-1), formula (a6-2), formula (a6-6), formula (a6-7), formula (a6-8) and formula (a6-12) are preferred, and structural units represented by formulas (a6-1), (a6-2), (a6-7) and (a6-8) are more preferred.
When the resin (A) has the structural unit (a6), the content thereof is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, based on the total structural units of the resin (A), and 3 ~30 mol% is more preferred.

<Structural unit (II)>
The resin (A) may further contain a structural unit that is decomposed by exposure to generate an acid (hereinafter sometimes referred to as "structural unit (II)"). Specific examples of the structural unit (II) include structural units described in JP-A-2016-79235. A structural unit having a group and an organic anion is preferred.

［式（ＩＩ－２－Ａ’）中、
Ｘ^ＩＩＩ３は、炭素数１～１８の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－Ｓ－又は－ＣＯ－に置き換わっていてもよく、該飽和炭化水素基に含まれる水素原子は、ハロゲン原子、ハロゲン原子を有していてもよい炭素数１～６のアルキル基又はヒドロキシ基で置き換わっていてもよい。
Ａ^ｘ１は、炭素数１～８のアルカンジイル基を表し、該アルカンジイル基に含まれる水素原子は、フッ素原子又は炭素数１～６のペルフルオロアルキル基で置換されていてもよい。
ＲＡ^－は、スルホナート基又はカルボキシレート基を表す。
Ｒ^ＩＩＩ３は、水素原子、ハロゲン原子又はハロゲン原子を有していてもよい炭素数１～６のアルキル基を表す。
ＺＡ^＋は、有機カチオンを表す。］ A structural unit having a sulfonate group or carboxylate group and an organic cation in a side chain is preferably a structural unit represented by formula (II-2-A').

[In the formula (II-2-A '),
X ^III3 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and —CH ₂ — contained in the saturated hydrocarbon group may be replaced with —O—, —S— or —CO— A hydrogen atom contained in the saturated hydrocarbon group may be replaced with a halogen atom, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, or a hydroxy group.
A ^x1 represents an alkanediyl group having 1 to 8 carbon atoms, and a hydrogen atom contained in the alkanediyl group may be substituted with a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms.
RA- represents a sulfonate group ^or a carboxylate group.
R ^III3 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.
ZA ⁺ represents an organic cation. ]

Halogen atoms represented by R ^III3 include fluorine, chlorine, bromine and iodine atoms.
The alkyl group having 1 to 6 carbon atoms and optionally having a halogen atom represented by R ^III3 includes an alkyl group having 1 to 6 carbon atoms and optionally having a halogen atom represented by R ^a8 . The same can be mentioned.
The alkanediyl group having 1 to 8 carbon atoms represented by A ^x1 includes methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group and pentane-1,5-diyl group. , hexane-1,6-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2, 4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. mentioned.
The perfluoroalkyl group having 1 to 6 carbon atoms which may be substituted in A ^x1 includes a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, and a perfluorotert -butyl group, perfluoropentyl group, perfluorohexyl group and the like.
Examples of the divalent saturated hydrocarbon group having 1 to 18 carbon atoms represented by X ^III3 include a linear or branched alkanediyl group and a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group. and may be a combination of these.
Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1 ,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group , dodecane-1,12-diyl group and other linear alkanediyl groups; butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group , pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group and other branched alkanediyl groups; cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1 ,4-diyl group, cycloalkanediyl group such as cyclooctane-1,5-diyl group; norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane Divalent polycyclic alicyclic saturated hydrocarbon groups such as -2,6-diyl group and the like can be mentioned.
Examples of saturated hydrocarbon groups in which —CH ₂ — is replaced with —O—, —S— or —CO— include divalent groups represented by formulas (X1) to (X53). mentioned. However, -CH ₂ - contained in the saturated hydrocarbon group has 17 or less carbon atoms before being replaced with -O-, -S- or -CO-. In the formula below, * and ** represent binding sites, and * represents a binding site with ^Ax1 .

X ³ represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms.
X ⁴ represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms.
X ⁵ represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.
X ⁶ represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms.
X ⁷ represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms.
X ⁸ represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.

Examples of ZA ⁺ in formula (II-2-A′) include the same cations Z1 ⁺ in the salt represented by formula (B1).

［式（ＩＩ－２－Ａ）中、
Ｒ^ＩＩＩ３、Ｘ^ＩＩＩ３及びＺＡ^＋は、上記と同じ意味を表す。
ｚ２Ａは、０～６のいずれかの整数を表す。
Ｒ^ＩＩＩ２及びＲ^ＩＩＩ４は、それぞれ独立して、水素原子、フッ素原子又は炭素数１～６のペルフルオロアルキル基を表し、ｚ２Ａが２以上のとき、複数のＲ^ＩＩＩ２及びＲ^ＩＩＩ４は互いに同一であってもよいし、異なっていてもよい。
Ｑ^ａ及びＱ^ｂは、それぞれ独立して、フッ素原子又は炭素数１～６のペルフルオロアルキル基を表す。］
Ｒ^ＩＩＩ２、Ｒ^ＩＩＩ４、Ｑ^ａ及びＱ^ｂで表される炭素数１～６のペルフルオロアルキル基としては、前述のＱ^ｂ１で表される炭素数１～６のペルフルオロアルキル基と同じものが挙げられる。 The structural unit represented by formula (II-2-A') is preferably a structural unit represented by formula (II-2-A).

[In the formula (II-2-A),
R ^III3 , X ^III3 and ZA ⁺ have the same meanings as above.
z2A represents an integer of 0-6.
R ^III2 and R ^III4 each independently represent a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms, and when z2A is 2 or more, a plurality of R ^III2 and R ^III4 are the same may be different.
Q ^a and Q ^b each independently represent a fluorine atom or a C 1-6 perfluoroalkyl group. ]
Examples of the perfluoroalkyl group having 1 to 6 carbon atoms represented by R ^III2 , R ^III4 , Q ^a and Q ^b include the same perfluoroalkyl groups having 1 to 6 carbon atoms represented by Q ^b1 described above. .

［式（ＩＩ－２－Ａ－１）中、
Ｒ^ＩＩＩ２、Ｒ^ＩＩＩ３、Ｒ^ＩＩＩ４、Ｑ^a、Ｑ^b及びＺＡ^＋は、上記と同じ意味を表す。
Ｒ^ＩＩＩ５は、炭素数１～１２の飽和炭化水素基を表す。
ｚ２Ａ１は、０～６のいずれかの整数を表す。
Ｘ^Ｉ2は、炭素数１～１１の２価の飽和炭化水素基を表し、該飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－Ｓ－又は－ＣＯ－に置き換わっていてもよく、該飽和炭化水素基に含まれる水素原子は、ハロゲン原子又はヒドロキシ基で置換されていてもよい。］
Ｒ^ＩＩＩ５で表される炭素数１～１２の飽和炭化水素基としては、メチル基、エチル基、プロピル基、イソプロピル基、ブチル基、ｓｅｃ－ブチル基、ｔｅｒｔ－ブチル基、ペンチル基、ヘキシル基、ヘプチル基、オクチル基、ノニル基、デシル基、ウンデシル基及びドデシル基等の直鎖又は分岐のアルキル基が挙げられる。
Ｘ^Ｉ２で表される２価の飽和炭化水素基としては、Ｘ^ＩＩＩ３で表される２価の飽和炭化水素基と同様のものが挙げられる。 The structural unit represented by formula (II-2-A) is preferably a structural unit represented by formula (II-2-A-1).

[In the formula (II-2-A-1),
R ^III2 , R ^III3 , R ^III4 , Q ^a , Q ^b and ZA ⁺ have the same meanings as above.
R ^III5 represents a saturated hydrocarbon group having 1 to 12 carbon atoms.
z2A1 represents an integer of 0-6.
X ^I2 represents a divalent saturated hydrocarbon group having 1 to 11 carbon atoms, and —CH ₂ — contained in the saturated hydrocarbon group may be replaced with —O—, —S— or —CO—. A hydrogen atom contained in the saturated hydrocarbon group may be substituted with a halogen atom or a hydroxy group. ]
Examples of saturated hydrocarbon groups having 1 to 12 carbon atoms represented by R ^III5 include methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, Linear or branched alkyl groups such as heptyl group, octyl group, nonyl group, decyl group, undecyl group and dodecyl group can be mentioned.
The divalent saturated hydrocarbon group represented by X ^I2 includes the same divalent saturated hydrocarbon groups as those represented by X ^III3 .

［式（ＩＩ－２－Ａ－２）中、
Ｒ^ＩＩＩ３、Ｒ^ＩＩＩ５及びＺＡ^＋は、上記と同じ意味を表す。
ｍ及びｎＡは、互いに独立に、１又は２を表す。］ As the structural unit represented by formula (II-2-A-1), a structural unit represented by formula (II-2-A-2) is preferable.

[In the formula (II-2-A-2),
R ^III3 , R ^III5 and ZA ⁺ have the same meanings as above.
m and nA each independently represent 1 or 2; ]

Examples of structural units represented by formula (II-2-A′) include the following structural units, and groups corresponding to methyl groups in R ^III3 are hydrogen atoms, halogen atoms (e.g., fluorine atoms), or halogen atoms. Structural units substituted with an optionally substituted alkyl group having 1 to 6 carbon atoms (eg, trifluoromethyl group, etc.) and structural units described in WO 2012/050015 can be mentioned. ZA ⁺ represents an organic cation.

［式（ＩＩ－１－１）中、
Ａ^ＩＩ１は、単結合又は２価の連結基を表す。
Ｒ^ＩＩ１は、炭素数６～１８の２価の芳香族炭化水素基を表す。
Ｒ^ＩＩ２及びＲ^ＩＩ３は、それぞれ独立して、炭素数１～１８の炭化水素基を表し、Ｒ^ＩＩ２及びＲ^ＩＩ３は互いに結合してそれらが結合する硫黄原子とともに環を形成していてもよい。
Ｒ^II4は、水素原子、ハロゲン原子又はハロゲン原子を有してもよい炭素数１～６のアルキル基を表す。
Ａ^－は、有機アニオンを表す。］
Ｒ^ＩＩ１で表される炭素数６～１８の２価の芳香族炭化水素基としては、フェニレン基及びナフチレン基等が挙げられる。
Ｒ^ＩＩ２及びＲ^ＩＩ３で表される炭化水素基としては、アルキル基、脂環式炭化水素基、芳香族炭化水素基及びこれらを組み合わせることにより形成される基等が挙げられる。
アルキル基及び脂環式炭化水素基は、上記と同様のものが挙げられる。
芳香族炭化水素基としては、フェニル基、ナフチル基、アントリル基、ビフェニル基、フェナントリル基等のアリール基が挙げられる。
組み合わせた基としては、上述したアルキル基と脂環式炭化水素基とを組み合わせた基、ベンジル基等のアラルキル基、アルキル基を有する芳香族炭化水素基（ｐ－メチルフェニル基、ｐ－ｔｅｒｔ－ブチルフェニル基、トリル基、キシリル基、クメニル基、メシチル基、２，６－ジエチルフェニル基、２－メチル－６－エチルフェニル基等）、脂環式炭化水素基を有する芳香族炭化水素基（ｐ－シクロヘキシルフェニル基、ｐ－アダマンチルフェニル基等）、フェニルシクロヘキシル基等のアリール－シクロアルキル基等が挙げられる。 Ｒ^ＩＩ４で表されるハロゲン原子としては、フッ素原子、塩素原子、臭素原子及びヨウ素原子等が挙げられる。
Ｒ^ＩＩ４で表されるハロゲン原子を有していてもよい炭素数１～６のアルキル基としては、Ｒ^ａ８で表されるハロゲン原子を有していてもよい炭素数１～６のアルキル基と同じものが挙げられる。
Ａ^ＩＩ１で表される２価の連結基としては、例えば、炭素数１～１８の２価の飽和炭化水素基が挙げられ、該２価の飽和炭化水素基に含まれる－ＣＨ_２－は、－Ｏ－、－Ｓ－又は－ＣＯ－で置き換わっていてもよい。具体的には、Ｘ^ＩＩＩ３で表される炭素数１～１８の２価の飽和炭化水素基と同じものが挙げられる。 A structural unit having a sulfonio group and an organic anion in a side chain is preferably a structural unit represented by formula (II-1-1).

[In the formula (II-1-1),
^AII1 represents a single bond or a divalent linking group.
R ^II1 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms.
R ^II2 and R ^II3 each independently represent a hydrocarbon group having 1 to 18 carbon atoms, and R ^II2 and R ^II3 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded.
R ^II4 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.
A ⁻ represents an organic anion. ]
Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by R ^II1 include a phenylene group and a naphthylene group.
The hydrocarbon groups represented by R ^II2 and R ^II3 include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups and groups formed by combining these groups.
Examples of the alkyl group and the alicyclic hydrocarbon group are the same as those described above.
Aromatic hydrocarbon groups include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl groups.
Examples of the combined group include a group obtained by combining an alkyl group and an alicyclic hydrocarbon group described above, an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert- butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups ( p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl groups such as phenylcyclohexyl group, and the like. Halogen atoms represented by ^RII4 include fluorine, chlorine, bromine and iodine atoms.
The alkyl group having 1 to 6 carbon atoms which may have a halogen atom represented by R ^II4 includes an alkyl group having 1 to 6 carbon atoms which may have a halogen atom represented by R ^a8 . The same can be mentioned.
The divalent linking group represented by A ^II1 includes, for example, a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and —CH ₂ — contained in the divalent saturated hydrocarbon group is -O-, -S- or -CO- may be substituted. Specific examples thereof include the same divalent saturated hydrocarbon groups having 1 to 18 carbon atoms represented by X ^III3 .

As the structural unit containing a cation in formula (II-1-1), the structural unit represented below and a group corresponding to a methyl group in R ^II4 are a hydrogen atom, a halogen atom (e.g., a fluorine atom) or a halogen Structural units substituted with alkyl groups having 1 to 6 carbon atoms which may have atoms (eg, trifluoromethyl group, etc.), and the like.

Organic anions represented by A ⁻ include sulfonate anions, sulfonylimide anions, sulfonylmethide anions and carboxylate anions. The organic anion represented by A ⁻ is preferably a sulfonate anion, and the sulfonate anion is more preferably an anion contained in the salt represented by the above formula (B1). The sulfonylimide anion, sulfonylmethide anion and carboxylate anion are more preferably the anion AI ⁻ contained in the salt represented by formula (I) above.

Examples of structural units represented by formula (II-1-1) include structural units represented below.

When the resin (A) contains the structural unit (II), the content of the structural unit (II) is preferably 1 to 20 mol% of the total structural units of the resin (A), and more It is preferably 2 to 15 mol %, more preferably 3 to 10 mol %.

The resin (A) may contain structural units other than the structural units described above, and examples of such structural units include structural units well known in the art.

Resin (A) is preferably a resin composed of structural unit (a1) and structural unit (s), that is, a copolymer of monomer (a1) and monomer (s).
Structural unit (a1) is preferably a group consisting of structural unit (a1-0), structural unit (a1-1) and structural unit (a1-2) (preferably the structural unit having a cyclohexyl group or a cyclopentyl group) is at least one selected from, more preferably at least two, still more preferably at least two selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2).
Structural unit (s) is preferably at least one selected from the group consisting of structural unit (a2) and structural unit (a3). Structural unit (a2) is preferably structural unit (a2-1) or structural unit (a2-A). Structural unit (a3) is preferably a group consisting of a structural unit represented by formula (a3-1), a structural unit represented by formula (a3-2) and a structural unit represented by formula (a3-4) is at least one selected from
Each structural unit that constitutes the resin (A) may be used alone or in combination of two or more, and is produced by a known polymerization method (e.g., radical polymerization method) using a monomer that leads to these structural units. be able to. The content of each structural unit in the resin (A) can be adjusted by adjusting the amount of monomer used for polymerization.
The weight average molecular weight of the resin (A) is preferably 2,000 or more (more preferably 2,500 or more, still more preferably 3,000 or more) and 50,000 or less (more preferably 30,000 or less, further preferably is 15,000 or less). As used herein, the weight average molecular weight is a value obtained by gel permeation chromatography under the conditions described in Examples.

<Resins other than resin (A)>
The resist composition of the present invention may be used in combination with a resin other than the resin (A).
Examples of the resin other than the resin (A) include a resin containing the structural unit (a4) or the structural unit (a5) (hereinafter sometimes referred to as resin (X)).
As the resin (X), among others, a resin containing the structural unit (a4) is preferable.
In the resin (X), the content of the structural unit (a4) is preferably 30 mol% or more, more preferably 40 mol% or more, based on the total of all structural units of the resin (X). , more preferably 45 mol % or more.
Structural units that the resin (X) may further include structural units (a1), structural units (a2), structural units (a3), and structural units derived from other known monomers. Among them, the resin (X) is preferably a resin consisting only of the structural unit (a4) and/or the structural unit (a5).
Each structural unit that constitutes the resin (X) may be used alone or in combination of two or more. Using a monomer that induces these structural units, the resin (X) is produced by a known polymerization method (e.g., radical polymerization method). can do. The content of each structural unit in the resin (X) can be adjusted by adjusting the amount of the monomer used for polymerization.
The weight average molecular weight of resin (X) is preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less). The means for measuring the weight-average molecular weight of resin (X) is the same as for resin (A).

When the resist composition of the present invention contains resin (X), its content is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, relative to 100 parts by mass of resin (A). , more preferably 1 to 40 parts by mass, still more preferably 1 to 30 parts by mass, and even more preferably 1 to 8 parts by mass.

The content of the resin (A) in the resist composition is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less, relative to the solid content of the resist composition. Further, when a resin other than the resin (A) is included, the total content of the resin (A) and the resin other than the resin (A) is 80% by mass or more and 99% by mass with respect to the solid content of the resist composition. It is preferably less than or equal to 90% by mass or more, and more preferably 90% by mass or more and 99% by mass or less. As used herein, "the solid content of the resist composition" means the total amount of components excluding the solvent (E) described below from the total amount of the resist composition. The solid content and resin content of the resist composition can be measured by known analytical means such as liquid chromatography or gas chromatography.

<Solvent (E)>
The content of the solvent (E) in the resist composition is usually 90% by mass or more and 99.9% by mass or less, preferably 92% by mass or more and 99% by mass or less, more preferably 94% by mass or more and 99% by mass. % or less. The content of the solvent (E) can be measured by known analytical means such as liquid chromatography or gas chromatography.

Examples of the solvent (E) include glycol ether esters such as ethyl cellosolve acetate, methyl cellosolve acetate and propylene glycol monomethyl ether acetate; glycol ethers such as propylene glycol monomethyl ether; ethyl lactate, butyl acetate, amyl acetate and ethyl pyruvate; ketones such as acetone, methyl isobutyl ketone, 2-heptanone and cyclohexanone; cyclic esters such as γ-butyrolactone; One kind of the solvent (E) may be used alone, or two or more kinds may be used.

<Quencher (C)>
Examples of the quencher (C) include salts that generate acids weaker in acidity than those generated from basic nitrogen-containing organic compounds and acid generators. When the resist composition contains the quencher (C), the content of the quencher (C) is preferably about 0.01 to 15% by mass, based on the solid content of the resist composition. It is more preferably about 01 to 10% by mass, even more preferably about 0.1 to 8% by mass, even more preferably about 0.1 to 7% by mass.
Basic nitrogen-containing organic compounds include amines and ammonium salts. Amines include aliphatic amines and aromatic amines. Aliphatic amines include primary, secondary and tertiary amines.

Amines include 1-naphthylamine, 2-naphthylamine, aniline, diisopropylaniline, 2-, 3- or 4-methylaniline, 4-nitroaniline, N-methylaniline, N,N-dimethylaniline, diphenylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, triethylamine, trimethylamine, tripropylamine, tributylamine, tripentylamine, trihexylamine, tri heptylamine, trioctylamine, trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine, methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, methyldioctylamine, methyldinonylamine, methyldidecylamine, ethyldibutylamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine, ethyldioctylamine, ethyldinonylamine, ethyldidecylamine, dicyclohexylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, tri isopropanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3'-dimethyldiphenylmethane, 4,4'-diamino-3 , 3′-diethyldiphenylmethane, 2,2′-methylenebisaniline, imidazole, 4-methylimidazole, pyridine, 4-methylpyridine, 1,2-di(2-pyridyl)ethane, 1,2-di(4- pyridyl)ethane, 1,2-di(2-pyridyl)ethene, 1,2-di(4-pyridyl)ethene, 1,3-di(4-pyridyl)propane, 1,2-di(4-pyridyloxy ) ethane, di(2-pyridyl) ketone, 4,4′-dipyridyl sulfide, 4,4′-dipyridyl disulfide, 2,2′-dipyridylamine, 2,2′-dipicolylamine, bipyridine and the like, Diisopropylaniline is preferred, and 2,6-diisopropylaniline is more preferred.

Ammonium salts include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethyl ammonium hydroxide, tetra-n-butylammonium salicylate and choline;

The acidity of a salt that generates an acid that is weaker than the acid generated from the acid generator is indicated by the acid dissociation constant (pKa). The salt that generates an acid weaker in acidity than the acid generated from the acid generator is a salt having an acid dissociation constant of -3<pKa, preferably -1<pKa<7. and more preferably a salt with 0<pKa<5.
Examples of the salt that generates an acid weaker in acidity than the acid generated from the acid generator include salts represented by the following formula, and salts represented by the formula (D) described in JP-A-2015-147926 (hereinafter referred to as Sometimes referred to as "weak acid inner salt (D)"), and JP 2012-229206, JP 2012-6908, JP 2012-72109, JP 2011-39502 and patent Examples thereof include salts described in JP-A-2011-191745. The salt that generates an acid weaker in acidity than the acid generated by the acid generator is preferably a salt that generates a carboxylic acid that is weaker in acidity than the acid generated by the acid generator (a salt having a carboxylic acid anion). and more preferably a weak acid inner salt (D), and more preferably a diphenyl iodonium salt containing a phenyl group with a substituted carboxylate anion among the weak acid inner salts (D).

［式（Ｄ）中、
Ｒ^D1及びＲ^D2は、それぞれ独立に、炭素数１～１２の炭化水素基、炭素数１～６のアルコキシ基、炭素数２～７のアシル基、炭素数２～７のアシルオキシ基、炭素数２～７のアルコキシカルボニル基、ニトロ基又はハロゲン原子を表す。
ｍ’及びｎ’は、それぞれ独立に、０～４のいずれかの整数を表し、ｍ’が２以上の場合、複数のＲ^D1は同一であっても異なってもよく、ｎ’が２以上の場合、複数のＲ^D2は同一であっても異なってもよい。］
Ｒ^D1及びＲ^D2の炭化水素基としては、鎖式炭化水素基、脂環式炭化水素基、芳香族炭化水素基及びこれらを組み合わせることにより形成される基等が挙げられる。
鎖式炭化水素基としては、メチル基、エチル基、プロピル基、イソプロピル基、ブチル基、イソブチル基、ｔｅｒｔ－ブチル基、ペンチル基、ヘキシル基、ノニル基等のアルキル基が挙げられる。
脂環式炭化水素基としては、単環式及び多環式のいずれでもよく、飽和及び不飽和のいずれでもよい。シクロプロピル基、シクロブチル基、シクロペンチル基、シクロへキシル基、シクロノニル基、シクロドデシル基等のシクロアルキル基、ノルボニル基、アダマンチル基等が挙げられる。
芳香族炭化水素基としては、フェニル基、１－ナフチル基、２－ナフチル基、２－メチルフェニル基、３－メチルフェニル基、４－メチルフェニル基、４－エチルフェニル基、４－プロピルフェニル基、４－イソプロピルフェニル基、４－ブチルフェニル基、４－ｔ－ブチルフェニル基、４－ヘキシルフェニル基、４－シクロヘキシルフェニル基、アントリル基、ｐ－アダマンチルフェニル基、トリル基、キシリル基、クメニル基、メシチル基、ビフェニル基、フェナントリル基、２，６－ジエチルフェニル基、２－メチル－６－エチルフェニル基等のアリール基等が挙げられる。
これらを組み合わせることにより形成される基としては、アルキル－シクロアルキル基、シクロアルキル－アルキル基、アラルキル基（例えば、フェニルメチル基、１－フェニルエチル基、２－フェニルエチル基、１－フェニル－１－プロピル基、１－フェニル－２－プロピル基、２－フェニル－２－プロピル基、３－フェニル－１－プロピル基、４－フェニル－１－ブチル基、５－フェニル－１－ペンチル基、６－フェニル－１－ヘキシル基等）等が挙げられる。
アルコキシ基としては、メトキシ基、エトキシ基等が挙げられる。
アシル基としては、アセチル基、プロパノイル基、ベンゾイル基、シクロヘキサンカルボニル基等が挙げられる。
アシルオキシ基としては、上記アシル基にオキシ基（－Ｏ－）が結合した基等が挙げられる。
アルコキシカルボニル基としては、上記アルコキシ基にカルボニル基（－ＣＯ－）が結合した基等が挙げられる。
ハロゲン原子としては、フッ素原子、塩素原子、臭素原子等が挙げられる。
Ｒ^D1及びＲ^D2は、それぞれ独立に、炭素数１～８のアルキル基、炭素数３～１０のシクロアルキル基、炭素数１～６のアルコキシ基、炭素数２～４のアシル基、炭素数２～４のアシルオキシ基、炭素数２～４のアルコキシカルボニル基、ニトロ基又はハロゲン原子が好ましい。
ｍ’及びｎ’は、それぞれ独立に、０～２のいずれかの整数であることが好ましく、０であることがより好ましい。ｍ’が２以上の場合、複数のＲ^D1は同一であっても異なってもよく、ｎ’が２以上の場合、複数のＲ^D2は同一であっても異なってもよい。 As the weak acid inner salt (D), diphenyliodonium having an iodonium cation to which two phenyl groups are bonded and a carboxylate anion substituted by at least one of the two phenyl groups bonded to the iodonium cation. Salts are preferred, and specific examples include salts represented by the following formulas.

[In the formula (D),
R ^D1 and R ^D2 are each independently a hydrocarbon group having 1 to 12 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 7 carbon atoms, an acyloxy group having 2 to 7 carbon atoms, and a carbon number represents 2 to 7 alkoxycarbonyl groups, nitro groups or halogen atoms;
m' and n' each independently represent an integer of 0 to 4, and when m' is 2 or more, the plurality of R ^D1 may be the same or different, and n' is 2 or more , the plurality of R ^D2 may be the same or different. ]
Examples of hydrocarbon groups for R ^D1 and R ^D2 include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, groups formed by combining these groups, and the like.
Chain hydrocarbon groups include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group and nonyl group.
The alicyclic hydrocarbon group may be monocyclic or polycyclic, and may be saturated or unsaturated. cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cyclononyl group and cyclododecyl group; norbornyl group; adamantyl group;
Aromatic hydrocarbon groups include phenyl group, 1-naphthyl group, 2-naphthyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, 4-ethylphenyl group and 4-propylphenyl group. , 4-isopropylphenyl group, 4-butylphenyl group, 4-t-butylphenyl group, 4-hexylphenyl group, 4-cyclohexylphenyl group, anthryl group, p-adamantylphenyl group, tolyl group, xylyl group, cumenyl group , mesityl group, biphenyl group, phenanthryl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group and the like.
Groups formed by combining these groups include alkyl-cycloalkyl groups, cycloalkyl-alkyl groups, aralkyl groups (e.g., phenylmethyl group, 1-phenylethyl group, 2-phenylethyl group, 1-phenyl-1 -propyl group, 1-phenyl-2-propyl group, 2-phenyl-2-propyl group, 3-phenyl-1-propyl group, 4-phenyl-1-butyl group, 5-phenyl-1-pentyl group, 6 -phenyl-1-hexyl group, etc.).
The alkoxy group includes a methoxy group, an ethoxy group, and the like.
The acyl group includes acetyl group, propanoyl group, benzoyl group, cyclohexanecarbonyl group and the like.
Examples of the acyloxy group include groups in which an oxy group (--O--) is bonded to the above acyl group.
Examples of the alkoxycarbonyl group include groups in which a carbonyl group (--CO--) is bonded to the above alkoxy group.
A fluorine atom, a chlorine atom, a bromine atom etc. are mentioned as a halogen atom.
R ^D1 and R ^D2 each independently represent an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 4 carbon atoms, and an acyl group having 2 to 4 carbon atoms. Acyloxy groups having 2 to 4 carbon atoms, alkoxycarbonyl groups having 2 to 4 carbon atoms, nitro groups or halogen atoms are preferred.
Each of m' and n' is preferably an integer of 0 to 2, more preferably 0. When m' is 2 or more, multiple R ^D1 may be the same or different, and when n' is 2 or more, multiple R ^D2 may be the same or different.

More specific examples include the following salts.

<Other ingredients>
The resist composition of the present invention may optionally contain components other than the components described above (hereinafter sometimes referred to as "other components (F)"). Other components (F) are not particularly limited, and additives known in the field of resists, such as sensitizers, dissolution inhibitors, surfactants, stabilizers, dyes, etc., can be used.

<Preparation of resist composition>
The resist composition of the present invention comprises a salt (I), a resin (A), and, if necessary, an acid generator (B), a resin other than the resin (A), a solvent (E), and a quencher (C). and other components (F). The mixing order is arbitrary and not particularly limited. The temperature during mixing can be appropriately selected from 10 to 40° C. depending on the type of resin and the solubility of the resin in the solvent (E). An appropriate mixing time can be selected from 0.5 to 24 hours depending on the mixing temperature. The mixing means is also not particularly limited, and stirring and mixing can be used.
After mixing each component, it is preferable to filter using a filter having a pore size of about 0.003 to 0.2 μm.

<Method for manufacturing resist pattern>
The method for producing a resist pattern of the present invention comprises:
(1) a step of applying the resist composition of the present invention onto a substrate;
(2) a step of drying the applied composition to form a composition layer;
(3) exposing the composition layer;
(4) heating the exposed composition layer; and (5) developing the heated composition layer.
The coating of the resist composition on the substrate can be carried out using a commonly used device such as a spin coater. Examples of the substrate include an inorganic substrate such as a silicon wafer, and an organic substrate having a resist film formed on the surface thereof. Before applying the resist composition, the substrate may be washed, and an antireflection film or the like may be formed on the substrate.
By drying the applied composition, the solvent is removed and a composition layer is formed. Drying is carried out, for example, by evaporating the solvent using a heating device such as a hot plate (so-called pre-baking), or by using a decompression device. The heating temperature is preferably 50 to 200° C., and the heating time is preferably 10 to 180 seconds. Moreover, the pressure for drying under reduced pressure is preferably about 1 to 1.0×10 ⁵ Pa.
The resulting composition layer is usually exposed using an exposure machine. The exposure machine may be an immersion exposure machine. As the exposure light source, a KrF excimer laser (wavelength: 248 nm), an ArF excimer laser (wavelength: 193 nm), an F2 excimer laser ₍ wavelength: 157 nm) that emits a laser beam in the ultraviolet region, a solid-state laser source (YAG or semiconductor laser etc.) and emits harmonic laser light in the far ultraviolet region or vacuum ultraviolet region by wavelength conversion, electron beam, and extreme ultraviolet light (EUV). can be done. In the present specification, these irradiations with radiation may be collectively referred to as "exposure". During exposure, exposure is usually performed through a mask corresponding to the desired pattern. When the exposure light source is an electron beam, exposure may be performed by direct drawing without using a mask.
The exposed composition layer is subjected to a heat treatment (so-called post-exposure bake) in order to promote the deprotection reaction at the acid-labile groups. The heating temperature is usually about 50 to 200°C, preferably about 70 to 150°C. A chemical treatment (silylation) may be performed to adjust the hydrophilicity or hydrophobicity of the resin on the surface side of the composition after heating. Moreover, before the development, the steps of applying a resist composition, drying, exposing, and heating may be repeatedly performed on the exposed composition layer.
The composition layer after heating is usually developed using a developer using a developing device. The developing method includes a dipping method, a paddle method, a spraying method, a dynamic dispensing method, and the like. The development temperature is preferably, for example, 5 to 60° C., and the development time is preferably, for example, 5 to 300 seconds. A positive resist pattern or a negative resist pattern can be produced by selecting the type of developer as follows.
When producing a positive resist pattern from the resist composition of the present invention, an alkaline developer is used as the developer. The alkaline developer may be any of various alkaline aqueous solutions used in this field. Examples thereof include aqueous solutions of tetramethylammonium hydroxide and (2-hydroxyethyl)trimethylammonium hydroxide (commonly known as choline). The alkaline developer may contain a surfactant.
After development, the resist pattern is preferably washed with ultrapure water, and then water remaining on the substrate and pattern is removed.
When producing a negative resist pattern from the resist composition of the present invention, a developer containing an organic solvent (hereinafter sometimes referred to as "organic developer") is used as the developer.
Examples of organic solvents contained in the organic developer include ketone solvents such as 2-hexanone and 2-heptanone; glycol ether ester solvents such as propylene glycol monomethyl ether acetate; ester solvents such as butyl acetate; glycols such as propylene glycol monomethyl ether. ether solvents; amide solvents such as N,N-dimethylacetamide; aromatic hydrocarbon solvents such as anisole;
The content of the organic solvent in the organic developer is preferably 90% by mass or more and 100% by mass or less, more preferably 95% by mass or more and 100% by mass or less, and still more preferably substantially only the organic solvent.
Among them, as the organic developer, a developer containing butyl acetate and/or 2-heptanone is preferable. The total content of butyl acetate and 2-heptanone in the organic developer is preferably 50% by mass or more and 100% by mass or less, more preferably 90% by mass or more and 100% by mass or less, and substantially contains butyl acetate and/or 2-heptanone. - more preferably only heptanone.
The organic developer may contain a surfactant. In addition, the organic developer may contain a trace amount of water.
During development, the development may be stopped by replacing the organic developer with a solvent of a different type.
It is preferable to wash the resist pattern after development with a rinsing liquid. The rinse liquid is not particularly limited as long as it does not dissolve the resist pattern, and a solution containing a general organic solvent can be used, preferably an alcohol solvent or an ester solvent.
After cleaning, it is preferable to remove the rinse liquid remaining on the substrate and pattern.

<Application>
The resist composition of the present invention is a resist composition for KrF excimer laser exposure, a resist composition for ArF excimer laser exposure, a resist composition for electron beam (EB) exposure or a resist composition for EUV exposure. It is suitable as a resist composition for line (EB) exposure or as a resist composition for EUV exposure, and is useful for microfabrication of semiconductors.

EXAMPLES The present invention will be described more specifically with reference to examples. In the examples, "%" and "parts" representing the content or amount used are based on mass unless otherwise specified.
A weight average molecular weight is the value calculated|required by the gel permeation chromatography. The analysis conditions for gel permeation chromatography are as follows.
Column: TSKgel Multipore HXL-M x 3+guardcolumn (manufactured by Tosoh Corporation)
Eluent: Tetrahydrofuran Flow rate: 1.0 mL/min
Detector: RI detector Column temperature: 40℃
Injection volume: 100 μl
Molecular weight standard: Standard polystyrene (manufactured by Tosoh Corporation)
The structure of the compound was confirmed by measuring the molecular ion peak using mass spectrometry (LC: Agilent Model 1100, MASS: Agilent Model LC/MSD). In the following examples, the value of this molecular ion peak is indicated by "MASS".

式（Ｉ－８－ａ）で表される化合物２２．５５部、式（Ｉ－８－ｃ）で表される塩４．５６部、酢酸エチル１５０部及びテトラヒドロフラン１５部を混合し、２３℃で３０分間攪拌した。得られた混合溶液に、式（Ｉ－８－ｂ）で表される化合物１３．１０部を添加し、２３℃で１８時間攪拌した。得られた反応マスに、ｎ－ヘプタン５０部及びイオン交換水７０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。回収された有機層にイオン交換水７０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を４回繰り返した。得られた有機層を濃縮し、濃縮マスをカラム（シリカゲル６０Ｎ（球状、中性）１００－２１０μｍ；関東化学（株）製、展開溶媒：ｎ－ヘプタン／酢酸エチル＝１／１）分取することにより、式（Ｉ－８－ｄ）で表される化合物８．９１部を得た。

式（Ｉ－８－ｄ）で表される化合物１．０２部及びテトラヒドロフラン１０部を混合し、２３℃で３０分間攪拌した後、５℃まで冷却し、水素化ナトリウム０．１４部を添加した。得られた混合物に、式（Ｉ－８－ｅ）で表される塩１．８２部を添加し、５℃で３時間撹拌した。得られた混合物に、１Ｎ塩酸６．３０部を加えた後、２３℃まで昇温し、２３℃で６時間攪拌した。得られた混合物に、クロロホルム３０部及びイオン交換水１５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層を濃縮した後、濃縮残渣に、アセトニトリル１部及びｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－８－ｆ）で表される塩１．５５部を得た。

式（Ｉ－８－ｆ）で表される塩０．９８部及びジメチルホルムアミド３０部を混合し、２３℃で３０分間攪拌した後、炭酸カリウム０．１６部及びヨウ化カリウム０．０５部を添加し、７５℃まで昇温した。得られた混合物に、式（Ｉ－８－ｇ）で表される化合物０．８２部を添加し、７５℃で５時間撹拌した後、２３℃まで冷却した。得られた混合物に、クロロホルム５０部及び５％シュウ酸水溶液２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮することにより、式（Ｉ－８－ｈ）で表される塩１．１８部を得た。

式（Ｉ－８－ｈ）で表される塩０．８９部、式（Ｉ－８－ｉ）で表される塩１．０２部、クロロホルム３０部及び酢酸エチル１５部を混合し、２３℃で２時間攪拌した。得られた混合物に、イオン交換水２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－８）で表される塩１．４２部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ５２５．１
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ５１７．１ Example 1: Synthesis of salt represented by formula (I-8)

22.55 parts of the compound represented by the formula (I-8-a), 4.56 parts of the salt represented by the formula (I-8-c), 150 parts of ethyl acetate and 15 parts of tetrahydrofuran were mixed and heated to 23°C. and stirred for 30 minutes. 13.10 parts of the compound represented by the formula (I-8-b) was added to the obtained mixed solution, and the mixture was stirred at 23° C. for 18 hours. 50 parts of n-heptane and 70 parts of ion-exchanged water were added to the resulting reaction mass, and the mixture was stirred at 23° C. for 30 minutes. After adding 70 parts of ion-exchanged water to the recovered organic layer and stirring at 23° C. for 30 minutes, the organic layer was taken out by liquid separation. This washing operation was repeated four times. The obtained organic layer is concentrated, and the concentrated mass is collected by column (silica gel 60N (spherical, neutral) 100-210 μm; manufactured by Kanto Chemical Co., Ltd., developing solvent: n-heptane/ethyl acetate=1/1). As a result, 8.91 parts of the compound represented by formula (I-8-d) was obtained.

1.02 parts of the compound represented by the formula (I-8-d) and 10 parts of tetrahydrofuran were mixed, stirred at 23°C for 30 minutes, cooled to 5°C, and 0.14 parts of sodium hydride was added. . To the resulting mixture, 1.82 parts of the salt represented by formula (I-8-e) was added and stirred at 5°C for 3 hours. After adding 6.30 parts of 1N hydrochloric acid to the obtained mixture, the temperature was raised to 23° C. and the mixture was stirred at 23° C. for 6 hours. 30 parts of chloroform and 15 parts of ion-exchanged water were added to the obtained mixture, and the mixture was stirred at 23° C. for 30 minutes, and then separated to obtain an organic layer. After concentrating the obtained organic layer, 1 part of acetonitrile and 30 parts of tert-butyl methyl ether were added to the concentration residue and stirred at 23° C. for 30 minutes. 1.55 parts of the salt represented by (I-8-f) was obtained.

After mixing 0.98 parts of the salt represented by the formula (I-8-f) and 30 parts of dimethylformamide and stirring at 23° C. for 30 minutes, 0.16 parts of potassium carbonate and 0.05 parts of potassium iodide are added. was added and the temperature was raised to 75°C. To the resulting mixture, 0.82 part of the compound represented by formula (I-8-g) was added, stirred at 75°C for 5 hours, and then cooled to 23°C. After adding 50 parts of chloroform and 20 parts of a 5% aqueous oxalic acid solution to the obtained mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. After adding 20 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the liquid was separated and the organic layer was taken out. This washing operation was repeated 5 times. By concentrating the obtained organic layer, 1.18 parts of the salt represented by the formula (I-8-h) was obtained.

0.89 parts of the salt represented by the formula (I-8-h), 1.02 parts of the salt represented by the formula (I-8-i), 30 parts of chloroform and 15 parts of ethyl acetate were mixed and heated to 23°C. and stirred for 2 hours. After adding 20 parts of ion-exchanged water to the resulting mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. This washing operation was repeated 5 times. The resulting organic layer is concentrated, 30 parts of tert-butyl methyl ether is added to the concentrated residue, and the mixture is stirred at 23° C. for 30 minutes. 1.42 parts of the salt of the formula are obtained.
MASS (ESI (+) Spectrum): M ⁺ 525.1
MASS (ESI (-) Spectrum): M ^- 517.1

式（Ｉ－８－ｈ）で表される塩０．８９部、式（Ｉ－１６－ｉ）で表される塩０．９１部、クロロホルム３０部及び酢酸エチル１５部を混合し、２３℃で２時間攪拌した。得られた混合物に、イオン交換水２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－１６）で表される塩１．４０部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ５２５．１
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４６７．１ Example 2: Synthesis of salt represented by formula (I-16)

0.89 parts of the salt represented by the formula (I-8-h), 0.91 parts of the salt represented by the formula (I-16-i), 30 parts of chloroform and 15 parts of ethyl acetate were mixed and heated to 23°C. and stirred for 2 hours. After adding 20 parts of ion-exchanged water to the resulting mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. This washing operation was repeated 5 times. The resulting organic layer is concentrated, 30 parts of tert-butyl methyl ether is added to the concentrated residue, and the mixture is stirred at 23° C. for 30 minutes. 1.40 parts of the salt represented by are obtained.
MASS (ESI (+) Spectrum): M ⁺ 525.1
MASS (ESI (-) Spectrum): M ^- 467.1

式（Ｉ－８－ｈ）で表される塩０．８９部、式（Ｉ－１７－ｉ）で表される塩０．６８部、クロロホルム３０部及び酢酸エチル１５部を混合し、２３℃で２時間攪拌した。得られた混合物に、イオン交換水２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮した後、濃縮残渣に、アセトニトリル１部及びｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－１７）で表される塩１．２２部を得た。 Example 3: Synthesis of salt represented by formula (I-17)

0.89 parts of the salt represented by the formula (I-8-h), 0.68 parts of the salt represented by the formula (I-17-i), 30 parts of chloroform and 15 parts of ethyl acetate were mixed and heated to 23°C. and stirred for 2 hours. After adding 20 parts of ion-exchanged water to the resulting mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. This washing operation was repeated 5 times. After concentrating the obtained organic layer, 1 part of acetonitrile and 30 parts of tert-butyl methyl ether were added to the concentration residue, and the mixture was stirred at 23° C. for 30 minutes. 1.22 parts of the salt represented by (I-17) was obtained.

MASS (ESI (+) Spectrum): M ⁺ 525.1
MASS (ESI (-) Spectrum): M ^- 323.1

式（Ｉ－８－ｄ）で表される化合物１．０２部及びテトラヒドロフラン２０部を混合し、２３℃で３０分間攪拌した後、５℃まで冷却し、水素化ナトリウム０．１４部を添加した。得られた混合物に、式（Ｉ－２８２－ｅ）で表される塩２．６０部を添加し、５℃で３時間撹拌した。得られた混合物に、１Ｎ塩酸６．３０部を加えた後、２３℃まで昇温し、２３℃で６時間攪拌した。得られた混合物に、クロロホルム３０部及びイオン交換水１５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層を濃縮した後、濃縮残渣に、アセトニトリル１部及びｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－２８２－ｆ）で表される塩１．９５部を得た。

式（Ｉ－２８２－ｆ）で表される塩１．３０部及びジメチルホルムアミド３０部を混合し、２３℃で３０分間攪拌した後、炭酸カリウム０．１６部及びヨウ化カリウム０．０５部を添加し、７５℃まで昇温した。得られた混合物に、式（Ｉ－８－ｇ）で表される化合物０．８２部を添加し、７５℃で５時間撹拌した後、２３℃まで冷却した。得られた混合物に、クロロホルム５０部及び５％シュウ酸水溶液２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮することにより、式（Ｉ－２８２－ｈ）で表される塩１．４６部を得た。

式（Ｉ－２８２－ｈ）で表される塩１．１２部、式（Ｉ－１６－ｉ）で表される塩０．９１部、クロロホルム３０部及び酢酸エチル１５部を混合し、２３℃で２時間攪拌した。得られた混合物に、イオン交換水２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて２３℃で３０分間攪拌した後、ろ過することにより、式（Ｉ－２８２）で表される塩１．５３部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ６６１．１
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４６７．１ Example 4: Synthesis of salt represented by formula (I-282)

1.02 parts of the compound represented by the formula (I-8-d) and 20 parts of tetrahydrofuran were mixed, stirred at 23°C for 30 minutes, cooled to 5°C, and 0.14 parts of sodium hydride was added. . To the obtained mixture, 2.60 parts of the salt represented by the formula (I-282-e) was added and stirred at 5°C for 3 hours. After adding 6.30 parts of 1N hydrochloric acid to the obtained mixture, the temperature was raised to 23° C. and the mixture was stirred at 23° C. for 6 hours. 30 parts of chloroform and 15 parts of ion-exchanged water were added to the obtained mixture, and the mixture was stirred at 23° C. for 30 minutes, and then separated to obtain an organic layer. After concentrating the obtained organic layer, 1 part of acetonitrile and 30 parts of tert-butyl methyl ether were added to the concentration residue and stirred at 23° C. for 30 minutes. 1.95 parts of the salt represented by (I-282-f) were obtained.

After mixing 1.30 parts of the salt represented by the formula (I-282-f) and 30 parts of dimethylformamide and stirring at 23° C. for 30 minutes, 0.16 parts of potassium carbonate and 0.05 parts of potassium iodide were added. was added and the temperature was raised to 75°C. To the resulting mixture, 0.82 part of the compound represented by formula (I-8-g) was added, stirred at 75°C for 5 hours, and then cooled to 23°C. After adding 50 parts of chloroform and 20 parts of a 5% aqueous oxalic acid solution to the obtained mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. After adding 20 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the liquid was separated and the organic layer was taken out. This washing operation was repeated 5 times. By concentrating the obtained organic layer, 1.46 parts of the salt represented by the formula (I-282-h) was obtained.

1.12 parts of the salt represented by the formula (I-282-h), 0.91 parts of the salt represented by the formula (I-16-i), 30 parts of chloroform and 15 parts of ethyl acetate were mixed and heated to 23°C. and stirred for 2 hours. After adding 20 parts of ion-exchanged water to the resulting mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. This washing operation was repeated 5 times. The obtained organic layer is concentrated, 30 parts of tert-butyl methyl ether is added to the concentrated residue, and the mixture is stirred at 23° C. for 30 minutes and then filtered to obtain a salt represented by formula (I-282) 1. 53 parts were obtained.
MASS (ESI (+) Spectrum): M ⁺ 661.1
MASS (ESI (-) Spectrum): M ^- 467.1

式（Ｉ－２８２－ｆ）で表される塩０．７５部及びジメチルホルムアミド３０部を混合し、２３℃で３０分間攪拌した後、炭酸カリウム０．０８部及びヨウ化カリウム０．０３部を添加し、７５℃まで昇温した。得られた混合物に、式（Ｉ－１４６０－ｇ）で表される化合物０．３０部を添加し、７５℃で５時間撹拌した後、２３℃まで冷却した。得られた混合物に、クロロホルム５０部及び５％シュウ酸水溶液２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮することにより、式（Ｉ－１４６０－ｈ）で表される塩０．８１部を得た。

式（Ｉ－１４６０－ｈ）で表される塩０．５２部、式（Ｉ－１６－ｉ）で表される塩０．４５部、クロロホルム３０部及び酢酸エチル１５部を混合し、２３℃で２時間攪拌した。得られた混合物に、イオン交換水２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて２３℃で３０分間攪拌した後、ろ過することにより、式（Ｉ－１４６０）で表される塩０．７７部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ６１７．１
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４６７．１ Example 5: Synthesis of salt represented by formula (I-1460)

After mixing 0.75 parts of the salt represented by the formula (I-282-f) and 30 parts of dimethylformamide and stirring at 23° C. for 30 minutes, 0.08 parts of potassium carbonate and 0.03 parts of potassium iodide are added. was added and the temperature was raised to 75°C. To the obtained mixture, 0.30 part of the compound represented by the formula (I-1460-g) was added, stirred at 75°C for 5 hours, and then cooled to 23°C. 50 parts of chloroform and 20 parts of a 5% aqueous oxalic acid solution were added to the obtained mixture, and the mixture was stirred at 23° C. for 30 minutes. After adding 20 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the liquid was separated and the organic layer was taken out. This washing operation was repeated 5 times. By concentrating the obtained organic layer, 0.81 part of the salt represented by the formula (I-1460-h) was obtained.

0.52 parts of the salt represented by the formula (I-1460-h), 0.45 parts of the salt represented by the formula (I-16-i), 30 parts of chloroform and 15 parts of ethyl acetate were mixed and heated to 23°C. and stirred for 2 hours. After adding 20 parts of ion-exchanged water to the resulting mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. This washing operation was repeated 5 times. The obtained organic layer is concentrated, 30 parts of tert-butyl methyl ether is added to the concentrated residue, and the mixture is stirred at 23° C. for 30 minutes and then filtered to give a salt of formula (I-1460) of 0.01. 77 parts were obtained.
MASS (ESI (+) Spectrum): M ⁺ 617.1
MASS (ESI (-) Spectrum): M ^- 467.1

式（Ｉ－１４９８－ｂ）で表される化合物１．７７部及びクロロホルム３０部を混合し、２３℃で３０分間攪拌した。得られた混合溶液に、カルボニルジイミダゾール１．４６部を添加し、さらに、５０℃で２時間攪拌した。得られた混合溶液に、式（Ｉ－１４９８－ａ）で表される塩４．０６部を添加し、さらに、５０℃で３時間攪拌した後、２３℃まで冷却した。得られた混合物に、１Ｎ塩酸６．３０部を加えた後、２３℃まで昇温し、２３℃で６時間攪拌した。得られた混合物に、クロロホルム５０部及びイオン交換水２５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層を濃縮した後、濃縮残渣に、アセトニトリル１部及びｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－１４９８－ｃ）で表される塩４．１２部を得た。

式（Ｉ－１４９８－ｃ）で表される塩０．７７部及びジメチルホルムアミド３０部を混合し、２３℃で３０分間攪拌した後、炭酸カリウム０．０８部及びヨウ化カリウム０．０３部を添加し、７５℃まで昇温した。得られた混合物に、式（Ｉ－１４６０－ｇ）で表される化合物０．３０部を添加し、７５℃で５時間撹拌した後、２３℃まで冷却した。得られた混合物に、クロロホルム５０部及び５％シュウ酸水溶液２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮することにより、式（Ｉ－１４９８－ｈ）で表される塩０．８４部を得た。

式（Ｉ－１４９８－ｈ）で表される塩０．５３部、式（Ｉ－１６－ｉ）で表される塩０．４５部、クロロホルム３０部及び酢酸エチル１５部を混合し、２３℃で２時間攪拌した。得られた混合物に、イオン交換水２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて２３℃で３０分間攪拌した後、ろ過することにより、式（Ｉ－１４９８）で表される塩０．７８部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ６３１．１
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４６７．１ Example 6: Synthesis of salt represented by formula (I-1498)

1.77 parts of the compound represented by formula (I-1498-b) and 30 parts of chloroform were mixed and stirred at 23° C. for 30 minutes. To the resulting mixed solution, 1.46 parts of carbonyldiimidazole was added, and the mixture was further stirred at 50°C for 2 hours. To the obtained mixed solution, 4.06 parts of the salt represented by the formula (I-1498-a) was added, further stirred at 50°C for 3 hours, and then cooled to 23°C. After adding 6.30 parts of 1N hydrochloric acid to the obtained mixture, the temperature was raised to 23° C. and the mixture was stirred at 23° C. for 6 hours. 50 parts of chloroform and 25 parts of ion-exchanged water were added to the obtained mixture, and the mixture was stirred at 23° C. for 30 minutes, and then separated to obtain an organic layer. After concentrating the obtained organic layer, 1 part of acetonitrile and 30 parts of tert-butyl methyl ether were added to the concentration residue and stirred at 23° C. for 30 minutes. 4.12 parts of the salt represented by (I-1498-c) were obtained.

After mixing 0.77 parts of the salt represented by the formula (I-1498-c) and 30 parts of dimethylformamide and stirring at 23° C. for 30 minutes, 0.08 parts of potassium carbonate and 0.03 parts of potassium iodide are added. was added and the temperature was raised to 75°C. To the obtained mixture, 0.30 part of the compound represented by the formula (I-1460-g) was added, stirred at 75°C for 5 hours, and then cooled to 23°C. After adding 50 parts of chloroform and 20 parts of a 5% aqueous oxalic acid solution to the obtained mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. After adding 20 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the liquid was separated and the organic layer was taken out. This washing operation was repeated 5 times. By concentrating the obtained organic layer, 0.84 part of the salt represented by the formula (I-1498-h) was obtained.

0.53 parts of the salt represented by the formula (I-1498-h), 0.45 parts of the salt represented by the formula (I-16-i), 30 parts of chloroform and 15 parts of ethyl acetate were mixed and heated to 23°C. and stirred for 2 hours. After adding 20 parts of ion-exchanged water to the resulting mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. This washing operation was repeated 5 times. The obtained organic layer was concentrated, 30 parts of tert-butyl methyl ether was added to the concentrated residue, and the mixture was stirred at 23° C. for 30 minutes and then filtered to give a salt of formula (I-1498) of 0.01. 78 parts were obtained.
MASS (ESI (+) Spectrum): M ⁺ 631.1
MASS (ESI (-) Spectrum): M ^- 467.1

式（Ｉ－１８０２－ｂ）で表される化合物４．３４部及びジメチルホルムアミド３０部を混合し、２３℃で３０分間攪拌した。得られた混合物を０℃に冷却した後、水素化ナトリウム０．３０部を混合し、０℃で４時間攪拌した。得られた混合物に、０℃で、式（Ｉ－８－ｅ）で表される塩３．１７部を添加し、０℃で３時間攪拌することにより、式（Ｉ－１８０２－ｃ）で表される塩を含む混合物を得た。得られた混合物を２３℃まで昇温した後、１Ｎ塩酸７．００部を加えた後、２３℃まで昇温し、２３℃で６時間攪拌した。得られた混合物に、クロロホルム５０部及びイオン交換水２５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層を濃縮した後、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－１８０２－ｆ）で表される塩４．８２部を得た。

式（Ｉ－１８０２－ｆ）で表される塩１．５７部及びジメチルホルムアミド３０部を混合し、２３℃で３０分間攪拌した後、炭酸カリウム０．１６部及びヨウ化カリウム０．０５部を添加し、７５℃まで昇温した。得られた混合物に、式（Ｉ－８－ｇ）で表される化合物０．８２部を添加し、７５℃で５時間撹拌した後、２３℃まで冷却した。得られた混合物に、クロロホルム５０部及び５％シュウ酸水溶液２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮することにより、式（Ｉ－１８０２－ｈ）で表される塩１．６６部を得た。

式（Ｉ－１８０２－ｈ）で表される塩０．６５部、式（Ｉ－１６－ｉ）で表される塩０．４５部、クロロホルム３０部及び酢酸エチル１５部を混合し、２３℃で２時間攪拌した。得られた混合物に、イオン交換水２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて２３℃で３０分間攪拌した後、ろ過することにより、式（Ｉ－１８０２）で表される塩０．８９部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ７７６．９
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４６７．１ Example 7: Synthesis of Salt Represented by Formula (I-1802)

4.34 parts of the compound represented by the formula (I-1802-b) and 30 parts of dimethylformamide were mixed and stirred at 23° C. for 30 minutes. After the resulting mixture was cooled to 0°C, 0.30 part of sodium hydride was added and stirred at 0°C for 4 hours. To the resulting mixture, 3.17 parts of the salt represented by the formula (I-8-e) was added at 0°C and stirred at 0°C for 3 hours to obtain the compound of the formula (I-1802-c). A mixture containing the indicated salt was obtained. After heating the obtained mixture to 23° C., 7.00 parts of 1N hydrochloric acid was added, and then the temperature was raised to 23° C. and stirred at 23° C. for 6 hours. 50 parts of chloroform and 25 parts of ion-exchanged water were added to the obtained mixture, and the mixture was stirred at 23° C. for 30 minutes, and then separated to obtain an organic layer. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether was added to the concentrated residue and stirred at 23° C. for 30 minutes. 4.82 parts of the salt represented by -f) are obtained.

After mixing 1.57 parts of the salt represented by the formula (I-1802-f) and 30 parts of dimethylformamide and stirring at 23° C. for 30 minutes, 0.16 parts of potassium carbonate and 0.05 parts of potassium iodide were added. was added and the temperature was raised to 75°C. To the resulting mixture, 0.82 part of the compound represented by formula (I-8-g) was added, stirred at 75°C for 5 hours, and then cooled to 23°C. After adding 50 parts of chloroform and 20 parts of a 5% aqueous oxalic acid solution to the obtained mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. After adding 20 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the liquid was separated and the organic layer was taken out. This washing operation was repeated 5 times. By concentrating the obtained organic layer, 1.66 parts of the salt represented by the formula (I-1802-h) was obtained.

0.65 parts of the salt represented by the formula (I-1802-h), 0.45 parts of the salt represented by the formula (I-16-i), 30 parts of chloroform and 15 parts of ethyl acetate were mixed and heated to 23°C. and stirred for 2 hours. After adding 20 parts of ion-exchanged water to the resulting mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. This washing operation was repeated 5 times. The obtained organic layer is concentrated, 30 parts of tert-butyl methyl ether is added to the concentrated residue, and the mixture is stirred at 23° C. for 30 minutes and then filtered to give a salt of formula (I-1802) of 0.01. 89 parts were obtained.
MASS (ESI (+) Spectrum): M ⁺ 776.9
MASS (ESI (-) Spectrum): M ^- 467.1

式（Ｉ－１８０２－ｆ）で表される塩１．５７部及びジメチルホルムアミド３０部を混合し、２３℃で３０分間攪拌した後、炭酸カリウム０．１６部及びヨウ化カリウム０．０５部を添加し、７５℃まで昇温した。得られた混合物に、式（Ｉ－１４６０－ｇ）で表される化合物０．６２部を添加し、７５℃で５時間撹拌した後、２３℃まで冷却した。得られた混合物に、クロロホルム５０部及び５％シュウ酸水溶液２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮することにより、式（Ｉ－１８４０－ｈ）で表される塩１．６０部を得た。

式（Ｉ－１８４０－ｈ）で表される塩０．６１部、式（Ｉ－１６－ｉ）で表される塩０．４５部、クロロホルム３０部及び酢酸エチル１５部を混合し、２３℃で２時間攪拌した。得られた混合物に、イオン交換水２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて２３℃で３０分間攪拌した後、ろ過することにより、式（Ｉ－１８４０）で表される塩０．７９部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ７３２．９
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４６７．１ Example 8: Synthesis of salt represented by formula (I-1840)

After mixing 1.57 parts of the salt represented by the formula (I-1802-f) and 30 parts of dimethylformamide and stirring at 23° C. for 30 minutes, 0.16 parts of potassium carbonate and 0.05 parts of potassium iodide were added. was added and the temperature was raised to 75°C. To the obtained mixture, 0.62 part of the compound represented by the formula (I-1460-g) was added, stirred at 75°C for 5 hours, and then cooled to 23°C. After adding 50 parts of chloroform and 20 parts of a 5% aqueous oxalic acid solution to the obtained mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. After adding 20 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the liquid was separated and the organic layer was taken out. This washing operation was repeated 5 times. By concentrating the obtained organic layer, 1.60 parts of the salt represented by the formula (I-1840-h) was obtained.

0.61 parts of the salt represented by the formula (I-1840-h), 0.45 parts of the salt represented by the formula (I-16-i), 30 parts of chloroform and 15 parts of ethyl acetate were mixed and heated to 23°C. and stirred for 2 hours. After adding 20 parts of ion-exchanged water to the resulting mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. This washing operation was repeated 5 times. The obtained organic layer is concentrated, 30 parts of tert-butyl methyl ether is added to the concentrated residue, and the mixture is stirred at 23° C. for 30 minutes and then filtered to give a salt of formula (I-1840) of 0.01. 79 copies were obtained.
MASS (ESI (+) Spectrum): M ⁺ 732.9
MASS (ESI (-) Spectrum): M ^- 467.1

式（Ｉ－２１４４－ｂ）で表される化合物４．３４部及びジメチルホルムアミド３０部を混合し、２３℃で３０分間攪拌した。得られた混合物を０℃に冷却した後、水素化ナトリウム０．３０部を混合し、０℃で４時間攪拌した。得られた混合物に、０℃で、式（Ｉ－８－ｅ）で表される塩３．１７部を添加し、０℃で３時間攪拌することにより、式（Ｉ－２１４４－ｃ）で表される塩を含む混合物を得た。得られた混合物を２３℃まで昇温した後、１Ｎ塩酸７．００部を加えた後、２３℃まで昇温し、２３℃で６時間攪拌した。得られた混合物に、クロロホルム５０部及びイオン交換水２５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層を濃縮した後、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－２１４４－ｆ）で表される塩４．６６部を得た。

式（Ｉ－２１４４－ｆ）で表される塩１．５７部及びジメチルホルムアミド３０部を混合し、２３℃で３０分間攪拌した後、炭酸カリウム０．１６部及びヨウ化カリウム０．０５部を添加し、７５℃まで昇温した。得られた混合物に、式（Ｉ－８－ｇ）で表される化合物０．８２部を添加し、７５℃で５時間撹拌した後、２３℃まで冷却した。得られた混合物に、クロロホルム５０部及び５％シュウ酸水溶液２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水２０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮することにより、式（Ｉ－２１４４－ｈ）で表される塩１．３８部を得た。

式（Ｉ－２１４４－ｈ）で表される塩０．６５部、式（Ｉ－１６－ｉ）で表される塩０．４５部、クロロホルム３０部及び酢酸エチル１５部を混合し、２３℃で２時間攪拌した。得られた混合物に、イオン交換水２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて２３℃で３０分間攪拌した後、ろ過することにより、式（Ｉ－２１４４）で表される塩０．８７部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ７７６．９
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４６７．１ Example 9: Synthesis of salt represented by formula (I-2144)

4.34 parts of the compound represented by formula (I-2144-b) and 30 parts of dimethylformamide were mixed and stirred at 23° C. for 30 minutes. After the resulting mixture was cooled to 0°C, 0.30 part of sodium hydride was added and stirred at 0°C for 4 hours. To the resulting mixture, 3.17 parts of the salt represented by the formula (I-8-e) was added at 0°C and stirred at 0°C for 3 hours to give the compound of the formula (I-2144-c). A mixture containing the indicated salt was obtained. After heating the obtained mixture to 23° C., 7.00 parts of 1N hydrochloric acid was added, and then the temperature was raised to 23° C. and stirred at 23° C. for 6 hours. 50 parts of chloroform and 25 parts of ion-exchanged water were added to the obtained mixture, and the mixture was stirred at 23° C. for 30 minutes, and then separated to obtain an organic layer. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether was added to the concentrated residue and stirred at 23° C. for 30 minutes. 4.66 parts of the salt represented by -f) are obtained.

After mixing 1.57 parts of the salt represented by the formula (I-2144-f) and 30 parts of dimethylformamide and stirring at 23° C. for 30 minutes, 0.16 parts of potassium carbonate and 0.05 parts of potassium iodide were added. was added and the temperature was raised to 75°C. To the resulting mixture, 0.82 part of the compound represented by formula (I-8-g) was added, stirred at 75°C for 5 hours, and then cooled to 23°C. After adding 50 parts of chloroform and 20 parts of a 5% aqueous oxalic acid solution to the obtained mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. After adding 20 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the liquid was separated and the organic layer was taken out. This washing operation was repeated 5 times. By concentrating the obtained organic layer, 1.38 parts of the salt represented by the formula (I-2144-h) was obtained.

0.65 parts of the salt represented by the formula (I-2144-h), 0.45 parts of the salt represented by the formula (I-16-i), 30 parts of chloroform and 15 parts of ethyl acetate were mixed and heated to 23°C. and stirred for 2 hours. After adding 20 parts of ion-exchanged water to the resulting mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. This washing operation was repeated 5 times. The obtained organic layer is concentrated, 30 parts of tert-butyl methyl ether is added to the concentrated residue, and the mixture is stirred at 23° C. for 30 minutes and then filtered to give a salt of formula (I-2144) of 0.5 parts. 87 parts were obtained.
MASS (ESI (+) Spectrum): M ⁺ 776.9
MASS (ESI (-) Spectrum): M ^- 467.1

式（Ｉ－１８０２－ｂ）で表される化合物１３．０２部及びジメチルホルムアミド５０部を混合し、２３℃で３０分間攪拌した。得られた混合物を０℃に冷却した後、水素化ナトリウム０．９０部を混合し、０℃で４時間攪拌した。得られた混合物に、０℃で、式（Ｉ－２４８６－ｅ）で表される塩３．５３部を添加し、０℃で３時間攪拌することにより、式（Ｉ－２４８６－ｃ）で表される塩を含む混合物を得た。得られた混合物を２３℃まで昇温した後、１Ｎ塩酸２１部を加えた後、２３℃まで昇温し、２３℃で６時間攪拌した。得られた混合物に、クロロホルム１００部及びイオン交換水２５部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層を濃縮した後、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（Ｉ－２４８６－ｆ）で表される塩５．３３部を得た。

式（Ｉ－２４８６－ｆ）で表される塩３．３２部及びジメチルホルムアミド５０部を混合し、２３℃で３０分間攪拌した後、炭酸カリウム０．４８部及びヨウ化カリウム０．１５部を添加し、７５℃まで昇温した。得られた混合物に、式（Ｉ－８－ｇ）で表される化合物２．４８部を添加し、７５℃で５時間撹拌した後、２３℃まで冷却した。得られた混合物に、クロロホルム１００部及び５％シュウ酸水溶液６０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、イオン交換水５０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮することにより、式（Ｉ－２４８６－ｈ）で表される塩３．６４部を得た。

式（Ｉ－２４８６－ｈ）で表される塩１．４７部、式（Ｉ－１６－ｉ）で表される塩０．４５部、クロロホルム３０部及び酢酸エチル１５部を混合し、２３℃で２時間攪拌した。得られた混合物に、イオン交換水２０部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を５回繰り返した。得られた有機層を濃縮し、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて２３℃で３０分間攪拌した後、ろ過することにより、式（Ｉ－２４８６）で表される塩１．５７部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ １８０４．６
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ４６７．１ Example 10: Synthesis of salt represented by formula (I-2486)

13.02 parts of the compound represented by formula (I-1802-b) and 50 parts of dimethylformamide were mixed and stirred at 23° C. for 30 minutes. After the resulting mixture was cooled to 0°C, 0.90 parts of sodium hydride was added and stirred at 0°C for 4 hours. To the resulting mixture, 3.53 parts of the salt represented by the formula (I-2486-e) was added at 0°C and stirred at 0°C for 3 hours to give the compound of the formula (I-2486-c). A mixture containing the indicated salt was obtained. After heating the obtained mixture to 23° C., 21 parts of 1N hydrochloric acid was added, the temperature was raised to 23° C., and the mixture was stirred at 23° C. for 6 hours. 100 parts of chloroform and 25 parts of ion-exchanged water were added to the obtained mixture, and the mixture was stirred at 23° C. for 30 minutes, and then liquid-separated and the organic layer was taken out. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether was added to the concentrated residue, and after stirring at 23° C. for 30 minutes, the supernatant was removed and concentrated to obtain formula (I-2486 5.33 parts of the salt represented by -f) are obtained.

After mixing 3.32 parts of the salt represented by the formula (I-2486-f) and 50 parts of dimethylformamide and stirring at 23° C. for 30 minutes, 0.48 parts of potassium carbonate and 0.15 parts of potassium iodide were added. was added and the temperature was raised to 75°C. To the obtained mixture, 2.48 parts of the compound represented by formula (I-8-g) was added, stirred at 75°C for 5 hours, and then cooled to 23°C. After adding 100 parts of chloroform and 60 parts of a 5% aqueous oxalic acid solution to the obtained mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. After adding 50 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the liquid was separated and the organic layer was taken out. This washing operation was repeated 5 times. By concentrating the obtained organic layer, 3.64 parts of the salt represented by the formula (I-2486-h) was obtained.

1.47 parts of the salt represented by the formula (I-2486-h), 0.45 parts of the salt represented by the formula (I-16-i), 30 parts of chloroform and 15 parts of ethyl acetate were mixed and heated to 23°C. and stirred for 2 hours. After adding 20 parts of ion-exchanged water to the resulting mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. This washing operation was repeated 5 times. The obtained organic layer is concentrated, 30 parts of tert-butyl methyl ether is added to the concentrated residue, and the mixture is stirred at 23° C. for 30 minutes and then filtered to obtain a salt represented by formula (I-2486) 1. 57 copies were obtained.
MASS (ESI (+) Spectrum): M ⁺ 1804.6
MASS (ESI (-) Spectrum): M ^- 467.1

式（ＩＸ－５－ｂ）で表される化合物２．２５部及びクロロホルム３０部を混合し、２３℃で３０分間攪拌した。得られた混合溶液に、カルボニルジイミダゾール０．７３部を添加し、さらに、５０℃で２時間攪拌した。得られた混合溶液に、式（ＩＸ－５－ａ）で表される塩１．４２部を添加し、さらに、５０℃で３時間攪拌した後、２３℃まで冷却した。得られた混合物に、５％シュウ酸水溶液１５部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層にイオン交換水１５部を加えて２３℃で３０分間攪拌した後、分液して有機層を取り出した。得られた有機層に、式（Ｉ－８－ｉ）で表される塩２．６３部を添加し、２３℃で２時間攪拌した。得られた反応物に、クロロホルム３０部及びイオン交換水３０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。回収された有機層に、イオン交換水３０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を７回繰り返した。得られた有機層を濃縮した後、濃縮残渣に、ｔｅｒｔ－ブチルメチルエーテル３０部を加えて、２３℃で３０分間攪拌した後、上澄み液を除去し、濃縮することにより、式（ＩＸ－５）で表される塩２．１８部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ７６０．８
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ５１７．１ Synthesis Example 1: Synthesis of Salt Represented by Formula (IX-5)

2.25 parts of the compound represented by formula (IX-5-b) and 30 parts of chloroform were mixed and stirred at 23° C. for 30 minutes. 0.73 part of carbonyldiimidazole was added to the obtained mixed solution, and the mixture was further stirred at 50° C. for 2 hours. 1.42 parts of the salt represented by the formula (IX-5-a) was added to the resulting mixed solution, stirred at 50°C for 3 hours, and then cooled to 23°C. After adding 15 parts of a 5% aqueous oxalic acid solution to the obtained mixture and stirring at 23° C. for 30 minutes, the mixture was separated and the organic layer was taken out. After adding 15 parts of ion-exchanged water to the obtained organic layer and stirring at 23° C. for 30 minutes, the liquid was separated and the organic layer was taken out. 2.63 parts of the salt represented by formula (I-8-i) was added to the obtained organic layer, and the mixture was stirred at 23° C. for 2 hours. 30 parts of chloroform and 30 parts of ion-exchanged water were added to the obtained reactant, and the mixture was stirred at 23° C. for 30 minutes, and then separated to obtain an organic layer. After adding 30 parts of ion-exchanged water to the recovered organic layer and stirring at 23° C. for 30 minutes, the organic layer was taken out by liquid separation. This washing operation was repeated seven times. After concentrating the obtained organic layer, 30 parts of tert-butyl methyl ether was added to the concentrated residue and stirred at 23° C. for 30 minutes. ) are obtained.
MASS (ESI (+) Spectrum): M ⁺ 760.8
MASS (ESI (-) Spectrum): M ^- 517.1

式（Ｉ－８－ｅ）で表される塩１．４３部、式（ＩＸ－６－ｂ）で表される化合物２．１１部及びジメチルホルムアミド１０部を混合し、２３℃で３０分間攪拌した。得られた混合物に、炭酸カリウム０．４０部を添加し、２３℃で３０分間攪拌した後、さらに、９０℃で２０時間撹拌することにより、式（ＩＸ－６－ｃ）で表される塩を含む混合物を得た。得られた混合物を２３℃まで冷却した後、５％シュウ酸水溶液１１部を加えて２３℃で３０分間攪拌した後、式（Ｉ－８－ｉ）で表される塩２．６３部を添加し、２３℃で７時間攪拌した。得られた反応物に、クロロホルム３０部及びイオン交換水３０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。回収された有機層に、イオン交換水３０部を添加し、２３℃で３０分間攪拌した後、分液して有機層を取り出した。この水洗操作を７回繰り返した。得られた有機層を濃縮し、濃縮混合物をカラム（シリカゲル６０Ｎ（球状、中性）１００－２１０μｍ；関東化学（株）製、展開溶媒：メタノール／クロロホルム＝１／１）を用いて分取することにより、式（ＩＸ－６）で表される塩０．４４部を得た。
ＭＡＳＳ（ＥＳＩ（＋）Ｓｐｅｃｔｒｕｍ）：Ｍ^＋ ７７６．８
ＭＡＳＳ（ＥＳＩ（－）Ｓｐｅｃｔｒｕｍ）：Ｍ^－ ５１７．１ Synthesis Example 2: Synthesis of Salt Represented by Formula (IX-6)

1.43 parts of the salt represented by the formula (I-8-e), 2.11 parts of the compound represented by the formula (IX-6-b) and 10 parts of dimethylformamide are mixed and stirred at 23° C. for 30 minutes. did. To the resulting mixture, 0.40 parts of potassium carbonate was added, stirred at 23°C for 30 minutes, and further stirred at 90°C for 20 hours to give a salt represented by the formula (IX-6-c). A mixture containing After cooling the resulting mixture to 23° C., 11 parts of a 5% aqueous oxalic acid solution was added and stirred at 23° C. for 30 minutes, and then 2.63 parts of a salt represented by formula (I-8-i) was added. and stirred at 23° C. for 7 hours. 30 parts of chloroform and 30 parts of ion-exchanged water were added to the obtained reactant, and the mixture was stirred at 23° C. for 30 minutes, and then separated to obtain an organic layer. After adding 30 parts of ion-exchanged water to the recovered organic layer and stirring at 23° C. for 30 minutes, the organic layer was taken out by liquid separation. This washing operation was repeated seven times. The obtained organic layer is concentrated, and the concentrated mixture is fractionated using a column (silica gel 60N (spherical, neutral) 100-210 μm; manufactured by Kanto Chemical Co., Ltd., developing solvent: methanol/chloroform=1/1). Thus, 0.44 parts of a salt represented by formula (IX-6) was obtained.
MASS (ESI (+) Spectrum): M ⁺ 776.8
MASS (ESI (-) Spectrum): M ^- 517.1

Synthesis of Resin Compounds (monomers) used for synthesizing resin (A) are shown below. Hereinafter, these compounds are referred to as "monomer (a1-1-3)" and the like according to their formula numbers.

Synthesis Example 3 [Synthesis of Resin A1]
Using monomer (a1-1-3), monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2) and monomer (a1-4-2) as monomers, The molar ratio [monomer (a1-1-3): monomer (a1-2-6): monomer (a2-1-3): monomer (a3-4-2): monomer (a1-4-2)] is , 20:35:3:15:27, and this monomer mixture was further mixed with methyl isobutyl ketone in an amount 1.5 times the mass of the total mass of all the monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total amount of monomers. C. for about 5 hours. Thereafter, an aqueous solution of p-toluenesulfonic acid (2.5% by weight) in an amount of 2.0 times the weight of the total weight of all monomers was added to the polymerization reaction solution, stirred for 12 hours, and separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, filtered and collected to obtain Resin A1 having a weight average molecular weight of about 5.3×10 ³ with a yield of 63%. This resin A1 has the following structural units.

Synthesis Example 4 [Synthesis of resin A2]
Using monomer (a1-1-3), monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2) and monomer (a1-4-13) as monomers, The molar ratio [monomer (a1-1-3):monomer (a1-2-6):monomer (a2-1-3):monomer (a3-4-2):monomer (a1-4-13)] is , 20:35:3:15:27, and this monomer mixture was further mixed with methyl isobutyl ketone in an amount 1.5 times the mass of the total mass of all the monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total amount of monomers. C. for about 5 hours. Thereafter, an aqueous solution of p-toluenesulfonic acid (2.5% by weight) in an amount of 2.0 times the weight of the total weight of all monomers was added to the polymerization reaction solution, stirred for 12 hours, and separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, filtered and collected to obtain Resin A2 having a weight average molecular weight of about 5.1×10 ³ with a yield of 61%. This resin A2 has the following structural units.

Synthesis Example 5 [Synthesis of resin A3]
As monomers, monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2) and monomer (a1-4-19) are used, and the molar ratio [monomer (a1-2 -6): Monomer (a2-1-3): Monomer (a3-4-2): Monomer (a1-4-19)] are mixed in a ratio of 53:3:12:32, and , 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total amount of monomers. C. for about 5 hours. Thereafter, an aqueous solution of p-toluenesulfonic acid (2.5% by weight) in an amount of 2.0 times the mass of all monomers was added to the polymerization reaction solution, stirred for 12 hours, and then separated. The collected organic layer was poured into a large amount of n-heptane to precipitate the resin, filtered and collected to obtain Resin A3 having a weight average molecular weight of about 5.5×10 ³ with a yield of 74%. This resin A3 has the following structural units.

Synthesis Example 6 [Synthesis of resin A4]
As monomers, monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2) and monomer (a1-4-2) are used, and the molar ratio [monomer (a1-2 -6): Monomer (a2-1-3): Monomer (a3-4-2): Monomer (a1-4-2)] are mixed in a ratio of 53:3:12:32, and , 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total amount of monomers. C. for about 5 hours. Thereafter, an aqueous solution of p-toluenesulfonic acid (2.5% by weight) in an amount of 2.0 times the mass of all monomers was added to the polymerization reaction solution, stirred for 12 hours, and then separated. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin, filtered and recovered to obtain Resin A4 having a weight average molecular weight of about 5.3×10 ³ with a yield of 88%. This resin A4 has the following structural units.

Synthesis Example 7 [Synthesis of Resin A5]
As monomers, monomer (a1-2-6), monomer (a2-1-3), monomer (a3-4-2) and monomer (a1-4-13) are used, and the molar ratio [monomer (a1-2 -6): Monomer (a2-1-3): Monomer (a3-4-2): Monomer (a1-4-13)] are mixed in a ratio of 53:3:12:32, and , 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol%, respectively, based on the total amount of monomers. C. for about 5 hours. Thereafter, an aqueous solution of p-toluenesulfonic acid (2.5% by weight) in an amount of 2.0 times the mass of all monomers was added to the polymerization reaction solution, stirred for 12 hours, and then separated. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin, filtered and recovered to obtain Resin A5 having a weight average molecular weight of about 5.1×10 ³ with a yield of 79%. This resin A5 has the following structural units.

<Preparation of resist composition>
As shown in Table 2, a resist composition was prepared by mixing the following components and filtering the resulting mixture through a fluororesin filter having a pore size of 0.2 μm.

ＩＸ－５：式（ＩＸ－５）で表される塩
ＩＸ－６：式（ＩＸ－６）で表される塩
＜クエンチャー（Ｃ）＞
Ｃ１：特開２０１１－３９５０２号公報記載の方法で合成

＜溶剤＞
プロピレングリコールモノメチルエーテルアセテート ４００部
プロピレングリコールモノメチルエーテル １００部
γ－ブチロラクトン ５部 <Resin>
A1 to A5: Resin A1 to Resin A5
<Salt (I)>
I-8: salt represented by formula (I-8) I-16: salt represented by formula (I-16) I-17: salt represented by formula (I-17) I-282: formula Salt represented by (I-282) I-1460: Salt represented by formula (I-1460) I-1498: Salt represented by formula (I-1498) I-1802: Formula (I-1802) Salt represented by I-1840: a salt represented by the formula (I-1840) I-2144: a salt represented by the formula (I-2144) I-2486: a salt represented by the formula (I-2486) <Acid generator>
IX-1
IX-2
IX-3
IX-4

IX-5: Salt represented by Formula (IX-5) IX-6: Salt represented by Formula (IX-6) <Quencher (C)>
C1: synthesized by the method described in JP-A-2011-39502

<Solvent>
Propylene glycol monomethyl ether acetate 400 parts Propylene glycol monomethyl ether 100 parts γ-butyrolactone 5 parts

(Evaluation of resist composition by electron beam exposure: organic solvent development)
A 6-inch silicon wafer was treated with hexamethyldisilazane at 90° C. for 60 seconds on a direct hotplate. This silicon wafer was spin-coated with the resist composition so that the film thickness of the composition layer was 0.04 μm. Then, it was pre-baked for 60 seconds on a direct hot plate at the temperature shown in the "PB" column of Table 2 to form a composition layer. The composition layer formed on the wafer is exposed to a line-and-space pattern (pitch 60 nm/line width 30 nm).
After the exposure, post-exposure baking was performed for 60 seconds on a hot plate at the temperature shown in the "PEB" column of Table 2. Next, the composition layer on the silicon wafer was developed using butyl acetate (manufactured by Tokyo Kasei Kogyo Co., Ltd.) as a developer by a dynamic dispensing method at 23° C. for 20 seconds to obtain a resist pattern. .
The resulting resist pattern (line and space pattern) was observed with a scanning electron microscope, and the effective sensitivity was defined as the exposure dose at which the line width and space width of the line and space pattern with a pitch of 60 nm were 1:1.

比較組成物１～６と比較して、組成物１～１５でのパターン消失が観察されないレジストパターンの最小線幅が小さく、パターン倒れ評価が良好であった。
上記の結果から、本発明の塩、該塩を含むレジスト組成物によれば、パターン倒れ耐性（ＰＣＭ）が良好であることがわかる。 <Pattern Collapse Evaluation (PCM) Evaluation>
The line width of the line pattern becomes narrower as the amount of exposure decreases, and pattern disappearance is more likely to occur. The numbers indicate the minimum line width (nm) of the resist pattern at which pattern disappearance due to collapsing or peeling is not observed in the line pattern formed with an exposure amount equal to or less than the effective sensitivity. Table 3 shows the results.

Compared to Comparative Compositions 1 to 6, Compositions 1 to 15 had a smaller minimum line width of the resist pattern in which pattern disappearance was not observed, and the evaluation of pattern collapse was favorable.
The above results show that the salt of the present invention and the resist composition containing the salt have good pattern collapse resistance (PCM).

(Evaluation of resist composition by electron beam exposure: alkali development)
A 6-inch silicon wafer was treated with hexamethyldisilazane at 90° C. for 60 seconds on a direct hotplate. This silicon wafer was spin-coated with the resist composition so that the film thickness of the composition layer was 0.04 μm. After that, it was pre-baked for 60 seconds on a direct hot plate at the temperature shown in the "PB" column of Table 2 to form a composition layer. The composition layer formed on the wafer is exposed to a line and space pattern (pitch 60 nm/line width 30 nm).
After the exposure, post-exposure baking was performed for 60 seconds on a hot plate at the temperature shown in the "PEB" column of Table 2. Next, the composition layer on the silicon wafer was puddle-developed at 23° C. for 60 seconds using a 2.38 mass % tetramethylammonium hydroxide aqueous solution as a developer to obtain a resist pattern.
The obtained resist pattern (line and space pattern) was observed with a scanning electron microscope, and the effective sensitivity was defined as the exposure dose at which the line width and space width of the line and space pattern with a pitch of 60 nm became 1:1.

比較組成物１～６と比較して、組成物１～１５でのパターン消失が観察されないレジストパターンの最小線幅が小さく、パターン倒れ評価が良好であった。
上記の結果から、本発明の塩、該塩を含むレジスト組成物によれば、パターン倒れ耐性（ＰＣＭ）が良好であることがわかる。 <Pattern Collapse Evaluation (PCM) Evaluation>
The line width of the line pattern becomes narrower as the exposure dose increases, and pattern disappearance is more likely to occur. The numbers indicate the minimum line width (nm) of the resist pattern at which pattern disappearance due to collapsing or peeling is not observed in the line pattern formed with an exposure dose equal to or greater than the effective sensitivity. Table 4 shows the results.

Compared to Comparative Compositions 1 to 6, Compositions 1 to 15 had a smaller minimum line width of the resist pattern in which pattern disappearance was not observed, and the evaluation of pattern collapse was favorable.
The above results show that the salt of the present invention and the resist composition containing the salt have good pattern collapse resistance (PCM).

INDUSTRIAL APPLICABILITY A resist composition containing the salt of the present invention can obtain a resist pattern having good pattern collapse resistance (PCM).

Claims (19)

An acid generator containing a salt represented by formula (I).

[in the formula (I),
R ¹ , R ² and R ³ are each independently *-OR ^{10 , *-O-CO-R 10 ,} *-O-CO-OR ¹⁰ or *-OL ¹⁰ -CO- represents OR ¹⁰ , and * represents the binding site to the benzene ring.
L ¹⁰ represents an alkanediyl group having 1 to 6 carbon atoms.
R ¹⁰ represents a base labile group.
R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ each independently represent a halogen atom, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon The group may have a substituent, and —CH ₂ — contained in the haloalkyl group and the hydrocarbon group may be replaced with —O—, —S—, —CO— or —SO ₂ —. good.
A ¹ , A ² and A ³ each independently represent a hydrocarbon group having 2 to 20 carbon atoms, the hydrocarbon group may have a substituent, and the —CH _2- may be replaced by -O-, -CO-, -S- or -SO ₂ -.
m1 represents an integer of 1 to 5, and when m1 is 2 or more, groups in parentheses may be the same or different.
m2 represents an integer of 0 to 5, and when m2 is 2 or more, groups in parentheses may be the same or different.
m3 represents an integer of 0 to 5, and when m3 is 2 or more, groups in parentheses may be the same or different.
m4 represents an integer of 0 to 4, and when m4 is 2 or more, multiple ^R4 's may be the same or different.
m5 represents an integer of 0 to 4, and when m5 is 2 or more, multiple R5's may be the ^same or different.
m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R6 may be the ^same or different.
m7 represents an integer of 0 to 4, and when m7 is 2 or more, multiple R ⁷ may be the same or different.
m8 represents an integer of 0 to 5, and when m8 is 2 or more, multiple R ^8s may be the same or different.
m9 represents an integer of 0 to 5, and when m9 is 2 or more, multiple R ^9s may be the same or different.
However, 1≤m1+m7≤5, 0≤m2+m8≤5, and 0≤m3+m9≤5.
AI ⁻ represents an organic anion. ] A ¹ is *-X ⁰¹ -L ⁰¹ - or *-L ⁰¹ -X ⁰¹ -, A ² is *-X ⁰² -L ⁰² - or *-L ⁰² -X ⁰² -, and A ³ is *-X ⁰³ -L ⁰³ - or *-L ⁰³ -X ⁰³ - (X ⁰¹ , X ⁰² and X ⁰³ are each independently -O-, -CO-, -S- or -SO ₂ — L ⁰¹ , L ⁰² and L ⁰³ each independently represent a hydrocarbon group having 1 to 19 carbon atoms, the hydrocarbon group optionally having a substituent, the hydrocarbon group —CH ₂ — contained in may be replaced with —O— ^, —CO—, —S—, or —SO ₂ — ^* indicates ^a represents a binding site.) The acid generator according to claim 1. 3. The acid generator according to claim 2, wherein X ⁰¹ , X ⁰² and X ⁰³ are each independently -O- or -S-. L ⁰¹ , L ⁰² and L ⁰³ are each independently an alkanediyl group having 1 to 6 carbon atoms (-CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO- ), the acid generator according to claim 2. 2. The acid generator according to claim 1, wherein the base ^- labile group of R10 is a group represented by formula (1b).

[In the formula (1b), R ^ba1 and R ^ba2 each independently represent a hydrogen atom, a fluorine atom or a fluorine atom-containing alkyl group having 1 to 6 carbon atoms.
R ^ba3 represents a fluorine atom or a fluorine atom-containing alkyl group having 1 to 6 carbon atoms.
* represents a binding site. ] The acid generator according to Claim 1 ^, wherein AI- is a sulfonate anion, a sulfonylimide anion, a sulfonylmethide anion or a carboxylate anion. 2. The acid generator according to claim 1, wherein AI- is a sulfonate anion, ^and the sulfonate anion is an anion represented by formula (IA).

[In the formula (IA),
Q ¹ and Q ² each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms or a perfluoroalkyl group having 1 to 6 carbon atoms.
L ¹ represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and —CH ₂ — contained in the saturated hydrocarbon group may be replaced with —O— or —CO—; A hydrogen atom contained in may be substituted with a fluorine atom or a hydroxy group.
Y ¹ represents an optionally substituted methyl group or an optionally substituted alicyclic hydrocarbon group having 3 to 24 carbon atoms, and is included in the alicyclic hydrocarbon group -CH ₂ - may be replaced by -O-, -S-, -SO ₂ - or -CO-. ] A resist composition comprising the acid generator according to any one of claims 1 to 7 and a resin having an acid-labile group. A group in which the resin having an acid-labile group comprises a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), and a structural unit represented by formula (a1-2). 9. The resist composition according to claim 8, comprising at least one selected from.

[In formula (a1-0), formula (a1-1) and formula (a1-2),
L ^a01 , L ^a1 and L ^a2 each independently represent —O— or *—O—(CH ₂ ) _k1 —CO—O—, k1 represents an integer of 1 to 7, * is represents the binding site with -CO-.
R ^a01 , R ^a4 and R ^a5 each independently represent a hydrogen atom, a halogen atom or an optionally halogenated alkyl group having 1 to 6 carbon atoms.
R ^a02 , R ^a03 and R ^a04 each independently represent an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or Represents a combined group.
R ^a6 and R ^a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic group having 6 to 18 carbon atoms. It represents a hydrocarbon group or a group formed by combining these groups.
m1 represents any integer from 0 to 14;
n1 represents any integer from 0 to 10;
n1' represents an integer of 0 to 3; ] 9. The resist composition according to claim 8, wherein the resin having an acid labile group contains a structural unit represented by formula (a2-A).

[In the formula (a2-A),
R ^a50 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.
R ^a51 is a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, It represents an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.
A ^a50 represents a single bond or ^* -X ^a51 -(A ^a52 -X ^a52 ) _nb -, and * represents a bonding site with the carbon atom to which -R ^a50 is bonded.
A ^a52 represents an alkanediyl group having 1 to 6 carbon atoms.
X ^a51 and X ^a52 each independently represent -O-, -CO-O- or -O-CO-.
nb represents 0 or 1;
mb represents an integer from 0 to 4; When mb is any integer of 2 or more, multiple R ^a51 may be the same or different. ] 9. The resist composition according to claim 8, further comprising a salt that generates an acid weaker in acidity than the acid generated from the acid generator. (1) a step of applying the resist composition according to claim 8 onto a substrate;
(2) a step of drying the applied composition to form a composition layer;
(3) exposing the composition layer;
(4) heating the composition layer after exposure; and (5) developing the composition layer after heating;
A method of manufacturing a resist pattern comprising: A salt of the formula (I).

[in the formula (I),
R ¹ , R ² and R ³ are each independently *-OR ^{10 , *-O-CO-R 10 ,} *-O-CO-OR ¹⁰ or *-OL ¹⁰ -CO- represents OR ¹⁰ , and * represents the binding site to the benzene ring.
L ¹⁰ represents an alkanediyl group having 1 to 6 carbon atoms.
R ¹⁰ represents a base labile group.
R ⁴ , R ⁵ , R ⁶ , R ⁷ , R ⁸ and R ⁹ each independently represent a halogen atom, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon The group may have a substituent, and —CH ₂ — contained in the haloalkyl group and the hydrocarbon group may be replaced with —O—, —S—, —CO— or —SO ₂ —. good.
A ¹ , A ² and A ³ each independently represent a hydrocarbon group having 2 to 20 carbon atoms, the hydrocarbon group may have a substituent, and the —CH _2- may be replaced by -O-, -CO-, -S- or -SO ₂ -.
m1 represents an integer of 1 to 5, and when m1 is 2 or more, groups in parentheses may be the same or different.
m2 represents an integer of 0 to 5, and when m2 is 2 or more, groups in parentheses may be the same or different.
m3 represents an integer of 0 to 5, and when m3 is 2 or more, groups in parentheses may be the same or different.
m4 represents an integer of 0 to 4, and when m4 is 2 or more, multiple ^R4 's may be the same or different.
m5 represents an integer of 0 to 4, and when m5 is 2 or more, multiple R5's may be the ^same or different.
m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R6 may be the ^same or different.
m7 represents an integer of 0 to 4, and when m7 is 2 or more, multiple R ⁷ may be the same or different.
m8 represents an integer of 0 to 5, and when m8 is 2 or more, multiple R ^8s may be the same or different.
m9 represents an integer of 0 to 5, and when m9 is 2 or more, multiple R ^9s may be the same or different.
However, 1≤m1+m7≤5, 0≤m2+m8≤5, and 0≤m3+m9≤5.
AI ⁻ represents an organic anion. ] A ¹ is *-X ⁰¹ -L ⁰¹ - or *-L ⁰¹ -X ⁰¹ -, A ² is *-X ⁰² -L ⁰² - or *-L ⁰² -X ⁰² -, and A ³ is *-X ⁰³ -L ⁰³ - or *-L ⁰³ -X ⁰³ - (X ⁰¹ , X ⁰² and X ⁰³ are each independently -O-, -CO-, -S- or -SO ₂ — L ⁰¹ , L ⁰² and L ⁰³ each independently represent a hydrocarbon group having 1 to 19 carbon atoms, the hydrocarbon group optionally having a substituent, the hydrocarbon group —CH ₂ — contained in may be replaced with —O— ^, —CO—, —S—, or —SO ₂ — ^* indicates ^a represents the binding site.) The salt of claim 13. The salt according to claim 14, wherein X ⁰¹ , X ⁰² and X ⁰³ are each independently -O- or -S-. L ⁰¹ , L ⁰² and L ⁰³ are each independently an alkanediyl group having 1 to 6 carbon atoms (-CH ₂ - contained in the alkanediyl group may be replaced with -O- or -CO- .) is a salt according to claim 14 or 15. 15. The salt according to claim 13 or 14, wherein the base ^- labile group of R10 is a group represented by formula (1b).

[In the formula (1b), R ^ba1 and R ^ba2 each independently represent a hydrogen atom, a fluorine atom or a fluorine atom-containing alkyl group having 1 to 6 carbon atoms.
R ^ba3 represents a fluorine atom or a fluorine atom-containing alkyl group having 1 to 6 carbon atoms.
* represents a binding site. ] A salt according to claim 13 or 14 ^, wherein AI- is a sulfonate, sulfonylimide, sulfonylmethide or carboxylate anion. A salt according to claim 13 or 14, wherein AI ^- is a sulfonate anion, the sulfonate anion being an anion of formula (IA).

[In the formula (IA),
Q ¹ and Q ² each independently represent a hydrogen atom, a fluorine atom, an alkyl group having 1 to 6 carbon atoms or a perfluoroalkyl group having 1 to 6 carbon atoms.
L ¹ represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and —CH ₂ — contained in the saturated hydrocarbon group may be replaced with —O— or —CO—; A hydrogen atom contained in may be substituted with a fluorine atom or a hydroxy group.
Y ¹ represents an optionally substituted methyl group or an optionally substituted alicyclic hydrocarbon group having 3 to 24 carbon atoms, and is included in the alicyclic hydrocarbon group -CH ₂ - may be replaced by -O-, -S-, -SO ₂ - or -CO-. ]