JP2022161036A - Optical detection system and optical detection method - Google Patents

Abstract

To provide an optical detection system and an optical detection method for solving a problem that it is not effective to detect each of a plurality of inspection items by a PL measurement procedure.SOLUTION: An optical detection system includes a mounting module, a laser light supply module, and an optical detection unit. The laser light supply module includes a spatial light modulator for converting a laser beam into a plurality of irradiation light beams. The optical detection unit includes a first optical detection module and a second optical detection module. If the plurality of irradiation light beams is irradiated at the same time on a plurality of inspection items, each inspection item generates an excitation light beam by excitation of a corresponding projection beam. The first optical detection module measures luminous intensity of the excitation light beam of the inspection item in order to obtain information relating to the luminous intensity of the excitation light beam generated by the inspection item. The second optical detection module measures a spectrum of the excitation light beam by the inspection item in order to obtain spectrum information of the excitation light beam generated by the inspection item.SELECTED DRAWING: Figure 1

Description

The present invention relates to detection systems and methods, and more particularly to optical detection systems and methods.

Existing technology may apply electroluminescence or electroluminescence (EL) measurement methods for testing mini-LEDs and micro-LEDs. In the electroluminescence or electroluminescence measurement method (so-called EL measurement method), a probe card is used to give an electric signal to a mini LED or micro LED to emit light, and the light signal generated by the mini LED or micro LED is measured to measure the mini LED or micro LED. A method for measuring the optical properties of

However, as the manufacturing process advances, as the size of the micro-LEDs or mini-LEDs becomes even smaller (e.g., 75 μm or less), the distance between adjacent solder pads of the micro-LEDs or mini-LEDs also becomes smaller, allowing the probe card to It becomes difficult to measure the EL of mini-LEDs. In addition, the distance between adjacent micro-LEDs and mini-LEDs is becoming shorter, and the probe spacing of the probe card cannot be made narrower due to structural restrictions, resulting in multiple micro-LEDs and mini-LEDs. EL cannot be measured at the same time, the efficiency of measurement decreases, and the time and cost involved in inspection increase.

To solve the conventional technical problems described above, a photoluminescence (PL) measurement method (so-called PL measurement method) is applied to the detection of an object (micro LED, mini LED, etc.). In the PL measurement method, the optical characteristics of the object are determined by first applying laser energy to the object to emit light and detecting the optical signal emitted from the object. Specifically, the process of re-emission of photons absorbed by a substance is called the PL measurement method. The theory of quantum mechanics describes this process as material absorbing a photon, jumping to a higher energy level excited state, then returning to a lower energy level while emitting the photon.

The PL measurement method described above can sequentially detect multiple analytes without using a probe card for physical electrical contact. Thus, the use of PL measurements avoids the problems faced by EL measurements when the size of the specimen (such as micro-LEDs or mini-LEDs) is further reduced. However, since PL metrology cannot detect all defects in the specimen, it is somewhat less effective than EL metrology, which can reduce subsequent production yields. In addition, since there are tens of thousands of objects (micro LEDs, mini LEDs, etc.) on a wafer, it is inefficient to detect each of a plurality of objects by the PL measurement method, and the inspection cost cannot be reduced.

In order to solve the above problems, one of the technical means employed in the present invention is to provide the following optical detection system. The optical detection system comprises a mounting module, a laser light supply module and an optical detection unit. A mounting module is used to mount a plurality of subjects. A laser light delivery module includes a spatial light modulator (SLM) and is used to convert a laser beam into multiple illumination light beams. The optical detection unit includes a first optical detection module and a second optical detection module. Therein, in response to simultaneous and corresponding irradiation of a plurality of subjects with a plurality of illuminating light beams, each of said subjects is excited to generate an excitation light beam. The first optical detection module is configured to measure the intensity of an excitation light beam from the subject and generate intensity information of the excitation light beam from the subject. A second optical detection module is configured to measure an optical spectrum of an excitation light beam from a subject and to generate spectral information of the excitation light beam from the subject.

In the optical detection system provided in one of the technical means according to the present invention, a laser beam is first converted into a plurality of illuminating light beams by a laser light supply module equipped with a spatial light modulator (SLM), and then a plurality of Simultaneously and correspondingly irradiating a plurality of subjects with the illuminating light beams of , respectively, to excite each of the subjects to produce a corresponding excitation light beam (ie, PL measurement). Subsequently, the excitation light beam is measured by the first optical detection module to obtain photometric information from the subject (ie, photometric detection). For example, a first optical detection module may simultaneously measure a plurality of excitation light beams to obtain light intensity information for each subject. Furthermore, spectral information from the subject may be acquired by a further second optical detection module (ie, spectral detection). For example, spectral information from at least one analyte may be acquired by a further second optical detection module. That is, in the optical detection system according to the present invention, first, the PL measurement method is used to detect the light intensity of the subject in a predetermined area, and for example, the light intensity of all of the plurality of subjects in the predetermined area is detected at the same time. By doing so, an initial determination of the light intensity is made for the subject. Subsequently, spectral detection is performed on the subject in the predetermined region, and for example, by performing spectral detection (that is, sampling detection) on at least one of a plurality of subjects in the predetermined region, the subject in the predetermined region It is configured to determine whether or not a defect exists in a specimen, and to predict the possibility of defective products by means of sampling detection for a plurality of specimens in a predetermined area, for example. Thus, it is expected to solve the problem of not being able to reliably find out all the defects of the test object only by the PL measurement method without the cost and time required to perform spectrum detection for each test object.

In this way, the optical detection system provided by the present invention solves the problem of undetectability or decreased detection efficiency after miniaturization of the analyte by PL measurement, and effectively improves the detection efficiency for a large amount of analytes. can be improved. In addition, spectrum detection (for example, sampling spectrum detection) can solve the problem that all the defects of the object cannot be detected only by the PL measurement method, and the yield of subsequent processes can be effectively improved.

Another technical means adopted in the present invention to solve the above technical problems is to provide the following optical detection method. The optical detection method first uses a spatial light modulator (SLM) to convert a laser beam into a plurality of illuminating light beams for correspondingly illuminating a plurality of subjects. A plurality of subjects are then correspondingly provided with illumination light beams to correspondingly generate excitation light beams. Then, a first detection step of acquiring light intensity information of the excitation light beam from the subject is performed by measuring the light intensity of the excitation light beam from the subject using the first optical detection module. Then, a second detection step of acquiring spectral information of the excitation light beam from the subject is performed by measuring the optical spectrum of the excitation light beam from the subject using the second optical detection module. Among them, the second detection step may be performed either after the first detection step is finished or while the first detection step is being performed.

The optical detection method provided by the other technical means of the present invention first uses a laser light supply module with a spatial light modulator (SLM) to convert a laser beam into a plurality of illuminating light beams, and then By simultaneously and correspondingly irradiating a plurality of subjects with a plurality of illumination light beams, each subject is excited to generate a corresponding excitation light beam (ie PL measurement). Next, using the first optical detection module, the excitation light beam is measured to obtain photometric information of the subject (ie, photometric detection). For example, the first optical detection module may be configured to simultaneously measure multiple excitation light beams to obtain light intensity information for each subject. It may also be used in a second optical detection module to acquire spectral information of the subject (ie, spectral detection). For example, a second optical detection module may be used to acquire spectral information of at least one of a plurality of analytes. That is, in the optical detection system according to the present invention, first, the PL measurement method is used to detect the luminosity of a subject within a predetermined area, and for example, the luminosity of a plurality of subjects in the predetermined area is detected at the same time. This provides an initial determination of light intensity for the subject (ie, full detection). Next, spectral detection is performed on the subject within the predetermined region, for example, by performing spectral detection (that is, sampling detection) on at least one of a plurality of subjects in the predetermined region, Predict the possibility that defective products are present in the subject. For example, by estimating the possibility of the presence of defects by means of sampling detection for a plurality of objects within a predetermined region, it is possible to save the time for spectral detection for each object. Moreover, it is expected to solve the problem of not being able to reliably find out all the defects of the test object only by the PL measurement method. According to actual needs, the first detection step and the second detection step can be performed synchronously so that the first optical detection module and the second optical detection module for the excitation light beam generated by the subject. Note that the time taken by the module to detect can be effectively saved.

In this way, the optical detection method provided by the present invention solves the problem that detection is not possible or the detection efficiency is lowered after the miniaturization of the subject by the PL measurement method, and the detection efficiency for a large amount of the subject is effectively improved. can be improved. In addition, spectrum detection (for example, sampling spectrum detection) can solve the problem that all the defects of the object cannot be detected only by the PL measurement method, and the yield of subsequent processes can be effectively improved.

In certain embodiments, the optical detection system according to the invention further comprises an optical filter module. The optical filter module includes band filters for filtering the plurality of illumination light beams. Among other things, the laser light supply module, the optical detection unit and the optical filter module are arranged in the same optical path. Among other things, each of the subjects is correspondingly excited by an illumination light beam to generate an excitation light beam, and the generated excitation light beams by the subject are passed through a bandpass filter to the first optical detection module and the first optical detection module. are respectively transmitted to two optical detection modules. Among other things, the reflected light beam at the subject due to the illuminating light beam is filtered out by the bandpass filter so as not to reach the first optical detection module and the second optical detection module. Among them, the first optical detection module simultaneously measures the luminosity of the plurality of excitation light beams correspondingly generated by each of the plurality of subjects, thereby obtaining the luminous intensity information of the excitation light beams generated by each of the subjects. configured to Among other things, the second optical detection module measures the optical spectrum of the excitation light beam correspondingly generated by the at least one subject to obtain spectral information of the excitation light beam by the at least one subject. configured as

In the above possible embodiment, in the optical filter module, the bandpass filter is configured to filter the plurality of illumination light beams, and the reflected light beams formed by the illumination light beams being reflected from the subject pass through the bandpass filters. Therefore, only the excitation light beam from the subject will pass through the bandpass filter and be transmitted to the first optical detection module and the second optical detection module. Thus, the first optical detection module and the second optical detection module are not affected by the irradiation light beam itself, and the excitation light beam originating from the subject by the first optical detection module and the second optical detection module. Detection accuracy can be effectively increased. By the way, in the optical detection system according to the present invention, the initial determination of the luminosity of a plurality of objects is performed by simultaneously detecting the luminosity of a plurality of objects in a predetermined area (all detection) by the PL measurement method. Subsequently, by performing spectrum detection (that is, sampling detection) on at least one object from a plurality of objects in the same region as the predetermined region, defects exist in the plurality of objects in the same predetermined region. Predict probability with sampling detection. In this way, it is possible to uncover defects that cannot be reliably discovered only by the PL measurement method, while saving the time required to perform spectrum detection for each object.

In certain embodiments, the laser light delivery module comprises a plurality of laser light oscillators and a plurality of optical lenses positioned adjacent to each of the plurality of laser light oscillators. Each of the optical lenses is used to convert the oscillated light from the laser light oscillator into a laser beam. Among them, a plurality of oscillating lights from a plurality of laser light oscillators have different wavelength bands. Among others, the laser light supply module corresponds to the spectroscopic element. The laser beam from the laser light supply module may be configured to pass through the spectroscopic element and then reach the spatial light modulator, or may be configured to first pass through the spatial light modulator and then reach the spectroscopic element. good too. Among other things, the spatial light modulator is configured to either transmit or reflect the laser beam, thereby converting the laser beam into a plurality of the illumination light beams. The spatial light modulator is also configured to adjust the shortest distance between any two of the illuminating light beams, the number of the illuminating light beams, and the size and shape of the light spots of the illuminating light beams. .

In the above possible embodiments, the spatial light modulator separates or converts the oscillating light into multiple illuminating light beams for simultaneous application to multiple analytes, thus increasing the efficiency of detection for a large number of analytes. It is possible to increase In addition, since the plurality of oscillating lights generated by the plurality of laser light oscillators have different wavelength bands, the optical detection system provided by the present invention can excite subjects with different wavelength bands according to different needs. Therefore, the optical detection system can be suitable for inspection of a plurality of objects with different wavelength bands, and the range of application can be expanded. Here, a laser beam is converted into at least two illuminating light beams by liquid crystal molecules in a spatial light modulator (e.g., a transmissive spatial light modulator or a reflective spatial light modulator) (i.e., the spatial light modulator is , which allows the laser beam to pass through, thereby converting the laser beam into multiple illumination light beams, can increase the efficiency of detection for a large number of analytes. Further, all of the ``minimum distance between any two illuminating light beams'', the ``size and shape of the light spot'', and the ``number of a plurality of illuminating light beams'' can be controlled by controlling the liquid crystal molecules of the spatial light modulator. can be adjusted. That is, the spatial light modulator is configured to be able to adjust the ``minimum distance between any two illuminating light beams,'' the ``size and shape of the light spot,'' and the ``number of a plurality of illuminating light beams.'' be done. In this way, flexibility in using the spatial light modulator is improved, and customization is also expected.

In certain embodiments, the first optical detection module comprises at least one photodiode photometer. The photodiode is configured to acquire intensity information of the excitation light beam correspondingly generated for each subject. Among other things, the second optical detection module includes an optical spectrum analyzer. The optical spectrum analyzer is configured to acquire spectral information of excitation light beams correspondingly generated by at least one of the subjects through the optical lens. The at least one subject is positioned at or near the center of a predetermined area occupied by a plurality of subjects.

In the above possible embodiments, an initial determination of light intensity is made for a plurality of subjects by first using a photometer to simultaneously perform light intensity detection (i.e., full detection) on multiple subjects in a given area. may Next, using an optical spectrum analyzer, spectrum detection is performed on at least one of a plurality of subjects in the same predetermined region as above (i.e., sampling detection), so that the predetermined region is detected by the method of sampling detection. It may be assumed that there are defective products in the plurality of subjects in . As a result, it is not necessary to perform spectral detection on all the specimens one by one, and the problem of not being able to reliably discover all the defects of the specimen with only the photometric device can be solved.

In certain embodiments, the optical detection unit comprises an integrating sphere that receives the excitation light beam. And by attaching the first optical detection module and the second optical detection module to the integrating sphere, the first optical detection module, the second optical detection module and the integrating sphere are integrated as a single optical assembly. Among other things, the first optical detection module comprises a photometer including at least one photodiode. The photodiodes are configured to acquire light intensity information of excitation light beams correspondingly generated by each of the subjects through the integrating sphere. Among other things, the second optical detection module comprises an optical spectrum analyzer. The optical spectrum analyzer is configured to obtain spectral information of excitation light beams correspondingly generated by at least one of the subjects through the integrating sphere. The at least one subject is positioned at or near the center of a predetermined area occupied by a plurality of subjects.

In the above possible embodiments, the first optical detection module, the second optical detection module and the integrating sphere can be integrated as a modular single optical assembly, so that the modularized optical detection unit is , making it more convenient to apply to optical detection systems. Alternatively, an initial determination of the light intensities of a plurality of subjects may be made by first using a photometer to detect the light intensities of a plurality of subjects in a predetermined area at the same time (ie, all detection). Next, using an optical spectrum analyzer, spectral detection is performed on at least one of the plurality of objects in the same predetermined region (i.e., sampling detection), so that the It may be possible to predict whether or not defective products are present in a plurality of objects in a predetermined area. This eliminates the need to perform spectral detection for each test object, and solves the problem of not being able to reliably detect all defects in the test object using only a photometer.

In certain embodiments, the optical detection system according to the invention further comprises an ambient lighting module and an imaging module. The ambient lighting module includes an ambient light emitting structure that generates an ambient light source. The imaging module includes an imaging section. Among them, the laser light supply module, the optical detection unit, the optical filter module, the ambient light supply module and the imaging module are arranged in the same optical path. Among other things, the ambient light supply module is configured to convert an ambient light source, via an optical lens, into an ambient light beam for illuminating the plurality of subjects to provide the required ambient illumination for the plurality of subjects. be. Among other things, when each of the irradiation light beams irradiates the corresponding object to form a light spot, the imaging module determines whether the light spot by each of the irradiation light beams deviates from the corresponding object. is configured to obtain position information of the light spot to determine the position of the light spot. Among other things, the spatial light modulator is configured to move the light spot to the corresponding object when determining that the light spot of the illuminating light beam is displaced from the corresponding object.

In the above possible embodiments, the ambient light beam from the ambient light supply module can irradiate multiple subjects simultaneously, thus providing the required ambient illumination for multiple subjects. In this way, the imaging module can more clearly recognize the position where the light spot of the illumination light beam irradiates the subject. Also, the imaging module is configured to determine whether the light spot by each of the illumination light beams is displaced from the corresponding subject, and the spatial light modulator aligns the light spots of the illumination light beams to correspond to Since it can be configured to be moved to a target object, the present invention can improve the "alignment accuracy" when detecting the object and improve the inspection accuracy.

In certain embodiments, an optical detection system according to the invention further comprises an imaging module, a defect analysis module, and an electrical property detection module. The imaging module includes an imaging section. The imaging unit is configured to acquire light shape information of the light spots formed by the respective irradiation light beams by capturing the light spots formed by the respective irradiation light beams correspondingly irradiating the subject. The defect analysis module is electrically connected to the first optical detection module, the second optical detection module and the imaging module, and provides luminosity and spectral information of excitation light beams correspondingly generated by each of the subject and the illumination. It is configured to obtain light shape information of the light spots of the light beam respectively. The electrical property detection module is adjacent to the mounting module. Among other things, the defect analysis module is configured to determine whether the wavelength band according to the spectral information of the excitation light beam correspondingly generated by each subject is lower than the average wavelength band. The average wavelength band is calculated by averaging a plurality of spectral information of a plurality of excitation light beams in a plurality of subjects, or is prepared in advance by the user. Among other things, the defect analysis module is configured to determine whether the light intensity according to the light intensity information of the excitation light beam correspondingly generated by each subject is lower than the average light intensity. The average light intensity is calculated by averaging a plurality of light intensity information of a plurality of excitation light beams in a plurality of subjects. Among other things, the defect analysis module is configured to determine whether the similarity between the actual light spot pattern and the default light spot pattern according to the light shape information of the light spots of the respective illuminating light beams is 90% or less. Above all, when it is determined that the wavelength band based on the spectral information of the excitation light beam is lower than the average wavelength band, or the luminous intensity based on the luminous intensity information of the excitation light beam is determined to be lower than the average luminous intensity, and the subject is a defective subject. Defined. In this case, the electrical property detection module is configured to obtain an electrical signal from the defective object by electrically contacting the defective object being excited with the illuminating light beam.

In the above practicable embodiment, the defect analysis module determines whether the wavelength band of the excitation light beam is lower than the average wavelength band and whether the luminous intensity of the excitation light beam is lower than the average luminous intensity for each object. , whether or not the degree of similarity between the actual light spot pattern and the default light spot pattern by the light spots of the respective irradiation light beams is reduced. Specimens can be identified. The electrical property detection module is also configured to electrically contact the defective object while exciting the object with the illuminating light beam, thereby acquiring an electrical signal from the defective object. As described above, in the present invention, after the defect analysis module identifies the defective test object, the electrical characteristic detection module performs electrical detection on the defective test object. Since the electrical detection is performed only for defective objects instead of all objects, the time required for electrical detection can be effectively saved.

In certain embodiments, the optical detection method of the present invention further includes converting an ambient light source into an ambient light beam for illuminating the plurality of subjects by an ambient light supply module. Provide the lighting you need. Next, the imaging module acquires the positional information of the light spot formed by irradiating the subject with the irradiation light beam correspondingly, thereby determining whether the light spot of the irradiation light beam is displaced from the corresponding subject. to judge. Among other things, when it is determined that the light spot of the illumination light beam is shifted from the corresponding subject, the spatial light modulator moves the light spot of the illumination light beam to the corresponding subject. Among other things, by simultaneously measuring the luminosity of a plurality of excitation light beams correspondingly generated by each of the plurality of subjects by means of a first optical detection module, the luminosity of the excitation light beams correspondingly generated by each of the subjects is determined. Get information instantly. Among other things, by measuring, by a second optical detection module, the optical spectrum of the excitation light beam correspondingly generated by at least one of the subjects, the excitation light beam correspondingly generated by said at least one subject is determined. obtain the spectral information of Among other things, the spatial light modulator is used to convert the laser beam into a plurality of the illuminating light beams by transmitting or reflecting the laser beam. and using the spatial light modulator to adjust the minimum distance between any two of the illuminating light beams, the number of the plurality of illuminating light beams, and the size and shape of the light spots of the illuminating light beams. It is possible.

In the above possible embodiments, the ambient light beam from the ambient light supply module can irradiate multiple subjects simultaneously, thus providing the required ambient illumination for multiple subjects. In this way, the imaging module can more clearly recognize the position where the light spot of the illumination light beam irradiates the subject. Also, the imaging module is configured to determine whether each light spot of the illumination light beam is displaced from the corresponding subject, and the spatial light modulator aligns the light spot of the illumination light beam to the corresponding subject. Since it can be configured to be moved to a target subject, the present invention can improve the "alignment accuracy" when detecting the subject and improve the detection accuracy. By the way, in the optical detection system according to the present invention, first, by the PL measurement method, light intensity detection is performed simultaneously for a plurality of objects in a predetermined area (that is, all detection), so that an initial determination of the light intensity of the plurality of objects is performed. you can go Next, spectral detection is performed on at least one of the plurality of subjects in the same predetermined region as above (i.e., sampling detection), so that the plurality of subjects in the predetermined region are detected by the method of sampling detection. , whether or not there is a defective product may be estimated. This eliminates the need for spectral detection for each test object, and solves the problem that all defects in the test object cannot be reliably discovered only by the PL measurement method. Alternatively, the laser beam may be converted into at least two illuminating light beams by liquid crystal molecules in a spatial light modulator (eg, a transmissive spatial light modulator or a reflective spatial light modulator). That is, by transmitting the laser beam through the spatial light modulator, the laser beam is converted into a plurality of irradiation light beams. In this way, the efficiency of detection for large numbers of analytes can be increased. Moreover, all of the "shortest distance between any two irradiating light beams", "size and shape of the light spot" and "number of irradiating light beams" can be controlled by controlling the liquid crystal molecules of the spatial light modulator. can be adjusted. That is, the spatial light modulator is configured to be able to adjust "the shortest distance between any two irradiating light beams", "the size and shape of the light spot" and "the number of irradiating light beams". be. In this way, flexibility in using the spatial light modulator is improved, and customization is also expected.

In a specific embodiment, the optical detection method according to the present invention further comprises determining whether the wavelength band according to the spectral information of the excitation light beam correspondingly generated by each object is lower than the average wavelength band. is configured to determine The average wavelength band is calculated by averaging a plurality of spectral information of a plurality of excitation light beams in a plurality of subjects, or is prepared in advance by the user. The defect analysis module is also configured to determine whether the luminous intensity according to the luminous intensity information of the excitation light beam correspondingly generated by each subject is lower than the average luminous intensity. The average luminous intensity is calculated by averaging a plurality of luminous intensity information obtained from a plurality of excitation light beams from a plurality of subjects. Among them, the object determined that the wavelength band according to the spectral information of the excitation light beam is lower than the average wavelength band or the luminous intensity according to the luminous intensity information of the excitation light beam is lower than the average luminous intensity is defined as a defective object. be. In this case, the electrical characteristic detection module acquires an electrical signal from the defective object by electrically contacting the defective object being excited by the illuminating light beam.

In the above practicable embodiment, the defect analysis module determines, for each object, whether the wavelength band of the excitation light beam is lower than the average wavelength band, whether the luminous intensity of the excitation light beam is lower than the average luminous intensity, (and in certain embodiments, it is also possible to determine whether the light spots of each illuminating light beam reduce the similarity between the actual light spot pattern and the default light spot pattern). Therefore, in the present invention, it is possible to identify a defective object from a plurality of objects using the defect analysis module. Also, in the present invention, the electrical signal from the defective object is obtained by electrically contacting the defective object with the electrical characteristic detection module while exciting the object with the illuminating light beam. In this way, in the present invention, after identifying a defective object by the defect analysis module, electrical detection is performed on the defective object by the electrical property detection module. Since electrical detection is performed only on the subject, the time required for electrical detection can be effectively saved.

For a further understanding of the features and technical aspects of the present invention, reference should be made to the following detailed description of the invention and the drawings, however, the drawings are provided for reference and description purposes only and do not limit the invention. is not intended to

1 is a schematic diagram showing a reflective spatial light modulator used in the optical detection system of the first embodiment according to the invention; FIG. 1 is a functional block diagram showing an optical detection system of a first embodiment according to the present invention; FIG. 4 is a flow chart showing the optical detection method of the first embodiment according to the present invention; 1 is a schematic diagram showing a transmissive spatial light modulator used in the optical detection system of the first embodiment according to the invention; FIG. 1 is a schematic diagram showing an integrating sphere used in the optical detection system of the first embodiment according to the present invention; FIG. FIG. 4 is a schematic diagram showing a reflective spatial light modulator used in an optical detection system of a second embodiment according to the invention; FIG. 5 is a functional block diagram showing an optical detection system of a second embodiment according to the invention; Fig. 4 is a flow chart showing an optical detection method of a second embodiment according to the present invention; FIG. 5 is a schematic diagram showing an integrating sphere used in the optical detection system of the second embodiment according to the present invention; Fig. 10 is a schematic diagram showing one example of the optical detection system in the third embodiment according to the present invention (with the laser light supply module in operation); FIG. 11 is a schematic diagram showing another example of the optical detection system according to the third embodiment of the present invention (with another laser light supply module in operation); FIG. 11 is a functional block diagram showing an optical detection system in a third embodiment according to the invention;

Embodiments of the "optical detection system and optical detection method" disclosed by the present invention will be described below with specific examples. Those skilled in the art can understand the advantages and effects of the present invention from the disclosure of this specification. The invention may be practiced or applied with other different embodiments. Equivalent modifications and changes can be made to each detail in this specification based on various aspects or applications without departing from the spirit of the invention. Also, the drawings of the present invention are for simple and schematic illustration and do not show actual dimensions. In the following embodiments, technical matters related to the present invention will be further described, but the disclosed contents do not limit the present invention.

[First embodiment]
As shown in FIGS. 1 and 2, the first embodiment of the present invention provides an optical detection system comprising a mounting module 1, a laser light supply module 2A and an optical detection unit. The optical detection unit includes a first optical detection module 3 and a second optical detection module 4 . For example, as shown in FIG. 2, the mounting module 1, the laser light supply module 2A, the first optical detection module 3 and the second optical detection module 4 are electrically connected to the system control module C (eg, computer). connected, the user can control the mounting module 1, the laser light supply module 2A, the first optical detection module 3 and the second optical detection module 4 by the system control module C; However, the example shown above is only one possible embodiment and is not intended to limit the invention.

First, as shown in FIG. 1, the mounting module 1 is used to mount a plurality of subjects D1. The plurality of objects D1 may include, for example, micro LEDs, mini LEDs, or any other type of semiconductor light emitting device. In addition, a plurality of test objects D1 (FIG. 1 illustrates a case where there are two test objects D1) may be attached in advance to a mounting substrate (although there is no numbering in the drawing, the mounting substrate may be a wafer or any base body). Further, the mounting module 1 may be fixed to a mounting structure for the mounting substrate, such as a three-axis slide table or a movable structure. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

Further, as shown in FIG. 1, the laser light supply module 2A includes a spatial light modulator 21 (Spatial Light Modulator, SLM). A spatial light modulator 21 is used to convert the laser beam L1 into a plurality of illumination light beams P1. For example, spatial light modulator 21 may be a transmissive spatial light modulator or a reflective spatial light modulator with liquid crystal molecules. In addition, the main operating principle of the spatial light modulator 21 is to reverse the direction of the optical axis of the liquid crystal molecules by an applied electric field, thereby changing the phase difference between the fast axis and the slow axis of the incident beam, thereby changing the optical axis of the liquid crystal molecules. By changing the direction of , the polarization state and polarization angle of the incident beam are adjusted. Also, the laser light supply module 2A is arranged in a space above or near the mounting module 1 . The laser light supply module 2A may comprise at least one laser light oscillator 22A and a first optical lens 23A (or a first optical assembly including multiple lenses). Also, the first optical lens 23A is arranged adjacent to at least one laser beam oscillator 22A. The first optical lens 23A is positioned downstream of the laser light oscillator 22A in the optical transmission path. The oscillating light S1 (that is, the non-parallel oscillating light S1) from the laser light oscillator 22A is first converted into a laser beam L1 (that is, the parallel laser beam L1) by the first optical lens 23A, and then the laser beam L1 is converted into It is guided to the spatial light modulator 21 after passing through the first spectroscopic element B1. Here, the laser light supply module 2A corresponds to the first spectroscopic element B1. A laser beam L1 passes through a spatial light modulator 21 and is converted into a plurality of illuminating light beams P1 (only two illuminating light beams P2 are shown as an example in FIG. 1), and each of the illuminating light beams P1 is first It is reflected by the first spectroscopic element B1, transmitted through the second spectroscopic element B2, and guided to the corresponding subject D1. That is, one illuminating light beam P1 is correspondingly directed onto one subject D1. In this way, each of the plurality of irradiation light beams P1 irradiates the plurality of subjects D1 simultaneously and correspondingly, so that each of the subjects D1 is excited by the corresponding irradiation light beam P1, and the excitation light beam E1 is correspondingly generated. That is, when one irradiation light beam P1 irradiates a corresponding subject D1, only the subject D1 corresponding to the irradiation light beam P1 generates an excitation light beam E1. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

Also, as shown in FIGS. 1 and 2, the first optical detection module 3 includes a plurality of excitations correspondingly generated by each of a plurality of subjects D1 (eg, a plurality of subjects D1 in a predetermined region). It is configured to obtain luminous intensity information M1 of the excitation light beam E1 by each of the subjects D1 by detecting the luminous intensity of the light beam E1. As an example, the first optical detection module 3 is arranged with a photometer 31 comprising at least one photodiode 310, and the photodiode 310 provides photointensity information of the excitation light beam E1 by each of the subjects D1. arranged to acquire M1. Furthermore, when each of the subjects D1 is excited by the illuminating light beam P1 to correspondingly generate an excitation light beam E1, each of the excitation light beams E1 is first reflected by the second spectroscopic element B2 and then further reflected by the second After passing through the spectroscopic element B3, it reaches at least one photodiode 310 in the photometer 31. FIG. Thus, according to the present invention, the photometric device 31 can acquire the photometric information M1 of the excitation light beams E1 correspondingly generated by each of the subjects D1. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

Also, as shown in FIGS. 1 and 2, the second optical detection module 4 detects correspondingly generated It may be configured to obtain spectral information M2 of the excitation light beams E1 correspondingly generated by at least one of the subjects D1 by detecting the light spectrum of the excitation light beams E1. That is, the number of subjects D1 detected by the second optical detection module 4 is suppressed to be less than the number of subjects D1 detected by the first optical detection module 3 . Specifically, at least one of the subjects D1 detected by the second optical detection module 4 refers to one or some of the plurality of subjects D1 in the predetermined area. That is, tens of thousands of objects D1 can exist in the wafer to be inspected. In this case, the first optical detection module 3 measures most or all of the subject D1, while the second optical detection module 4 measures part of the subject D1. Specifically, the number of analytes D1 detected by the second optical detection module 4 with respect to the number of analytes D1 detected by the first optical detection module 3 is a predetermined percentage, such as 5% or 10%. occupy. As an example, the second optical detection module 4 comprises an optical spectrum analyzer 41 and a second optical lens 42 (or a second optical assembly comprising multiple lenses), and the second optical lens 42 is arranged adjacent to the optical spectrum analyzer 41 . The second optical lens 42 may be positioned upstream of the optical spectrum analyzer 41 in the optical transmission path. The optical spectrum analyzer 41 is also configured to acquire spectral information M2 of the excitation light beam E1 correspondingly generated by the at least one subject D1 via the second optical lens . Specifically, when each subject D1 is excited with a corresponding illumination light beam P1 to correspondingly generate an excitation light beam E1, each excitation light beam E1 is first reflected by the second spectroscopic element B2 and then , is reflected by the second spectroscopic element B3 and reaches the second optical detection module 4 . Thus, according to the present invention, the optical spectrum analyzer 41 can acquire spectral information M2 of the excitation light beam E1 correspondingly generated by at least one of the subjects D1. By the way, at least one of the subjects D1 may be positioned at or near the center of the predetermined area occupied by the plurality of subjects D1. That is, by selecting and exciting at least one subject D1 located near the center of the predetermined area from a predetermined area occupied by a plurality of subjects D1, the optical spectrum analyzer 41 detects at least one of the subjects D1. Spectral information M2 of the excitation light beam E1 can be obtained by two methods. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

In this way, the spatial light modulator 21 splits or converts the oscillation light S1 into a plurality of irradiation light beams P1 so that they can be provided to a plurality of subjects D1 at the same time. efficiency can be improved. For example, if the photometer 31 is used, the photointensities of a plurality of specimens D1 within a predetermined area can be detected simultaneously or sequentially (that is, all of them), so initial determination of the photointensities can be made. Then, by using the optical spectrum analyzer 41, it is possible to further perform spectrum detection (that is, sampling) of at least one of the plurality of subjects D1 within the same predetermined area. It is possible to determine the possibility of defects by sampling the object D1, there is no need to perform spectrum detection for each object D1, and the photometer 31 alone cannot detect all defects in the object D1. Points can be improved. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

Moreover, the optical detection system provided by the first embodiment of the present invention further includes an optical filter module 6, as shown in FIGS. The optical filter module 6 includes a bandpass filter 60 for filtering the plurality of illumination light beams P1. Moreover, the laser light supply module 2A, the first optical detection module 3, the second optical detection module 4 and the optical filter module 6 are arranged on the same optical path. For example, bandpass filter 60 may be a tuned bandpass filter. The bandpass filter 60 is electrically connected to the system control module C so that the system control module C can control the bandpass filter 60 . Moreover, when each of the subjects D1 is excited by a corresponding illuminating light beam P1 to correspondingly generate an excitation light beam E1 (i.e., one subject D1 is excited by only one corresponding illuminating light beam P1). and generates an excitation light beam E1), the excitation light beam E1 by the subject D1 is transmitted by the bandpass filter 60 to the first optical detection module 3 and the second optical detection module 4, respectively. That is, when the excitation light beam E1 is guided to the bandpass filter 60 after being reflected by the second spectroscopic element B2, it can pass through the bandpass filter 60 without being blocked by the bandpass filter 60). Also, when the illuminating light beam P1 is reflected by the corresponding object D1 to form a reflected light beam (not shown), the reflected light beam is blocked by the bandpass filter 60 to the first optical detection module 3 and the second optical detection module 3 . does not reach the optical detection module 4 of . That is, when the reflected light beam is reflected by the second spectroscopic element B2 and guided to the bandpass filter 60, the reflected light beam is blocked by the bandpass filter 60 and cannot pass through the bandpass filter 60. Therefore, the first optical detection module 3 and the second optical detection module 4 receive only the excitation light beam E1 from the subject D1, and the irradiation light beam P1 does not receive the reflected light beam from the subject D1. Thereby, the detection quality of the excitation light beams E1 correspondingly generated by the subject D1 by the first optical detection module 3 and the second optical detection module 4 can be improved. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

Now, since the bandpass filter 60 provided by the optical filter module 6 is used to filter the plurality of illumination light beams P1, the reflected beams formed by the reflection of the corresponding object D1 of each illumination light beam P1 are in the band Only the excitation light beams E1 correspondingly generated by each of the subjects D1, which cannot pass through the pass filter 60, pass through the band pass filter 60 to reach the first optical detection module 3 and the second optical detection module 4. . Thus, the first optical detection module 3 and the second optical detection module 4 are not affected by the irradiation light beam P, and the first optical detection module 3 and the second optical detection module 4 are not affected by the excitation light beam E1 from the subject D1. can effectively improve the quality of detection by the optical detection module 4.

Furthermore, as shown in FIGS. 1-3, the first embodiment of the present invention further comprises an optical detection method. In the optical detection method, as shown in FIG. 1, a spatial light modulator 21 is used to convert a laser beam L1 into a plurality of irradiation light beams P1 for irradiating a plurality of subjects D1 (step S100). . Next, as shown in FIG. 1, the subject D1 excited by the illumination light beam P1 correspondingly generates an excitation light beam E1 (step S102). Thereafter, as shown in FIGS. 1 and 2, a first detection step is performed using the first optical detection module 3, wherein the first detection step comprises a plurality of correspondingly generated multiple samples D1, respectively. By detecting the luminosity of the excitation light beams E1 of D1 simultaneously or sequentially, the luminosity information M1 of the excitation light beams E1 correspondingly generated by each of the subjects D1 is obtained (step S104). Furthermore, as shown in FIGS. 1 and 2, a second detection step is performed using a second optical detection module 4, the second detection step correspondingly occurring at least one of the subjects D1. By detecting the optical spectrum of the excitation light beam E1, spectral information M2 of the excitation light beam E1 correspondingly generated by at least one of the subjects D1 is obtained (step S106). For example, the second detection step (step S106) may be performed after the first detection step (step S104) is completed, or may be performed while the first detection step (step S104) is being performed. . That is, according to actual needs, the first detecting step (step S104) and the second detecting step (step S106) can be performed sequentially or synchronously. This effectively saves the detection time of the first optical detection module 3 and the second optical detection module 4 for the excitation light beams E1 correspondingly generated by the respective objects D1. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

It should be noted that, by way of example, as shown in FIGS. 1 and 4, in another embodiment, the spatial light modulator 21 is arranged from one side of the first light-splitting element B1 (eg, as shown in FIG. 1) to the first to the other side of dispersive element B1 (eg, as shown in FIG. 4). Thus, after the laser beam L1 is converted into a plurality of illuminating light beams P1 by the spatial light modulator 21 (only two illuminating light beams P1 are shown as an example in FIG. 1), each illuminating light beam P1 is After being first reflected by the first spectroscopic element B1, each irradiation light beam P1 is emitted toward the corresponding subject D1 after passing through the second spectroscopic element B2. In this way, when a plurality of subjects D1 are simultaneously irradiated with a plurality of corresponding irradiation light beams P1, each subject D1 can correspondingly generate an excitation light beam E1 by excitation of the corresponding irradiation light beam P1 ( That is, when the irradiation light beam P1 is associated with any subject D1, only the subject D1 correspondingly irradiated with the irradiation light beam P1 generates the excitation light beam E1). In this way, as shown in FIG. 1 or FIG. 4, "minimum distance between any two illuminating light beams P1", "size and shape of light spot of illuminating light beam P1", "plurality of illuminating light beams The number of P1' can be adjusted by controlling the liquid crystal molecules of the spatial light modulator 21. FIG. That is, the spatial light modulator 21 adjusts "the minimum distance between any two irradiation light beams P1", "the number of a plurality of irradiation light beams P1", and "the size and shape of the spot of the irradiation light beam P1". can be configured as However, the example shown above is only one possible embodiment and is not intended to limit the invention.

For example, in some embodiments shown in FIGS. 1, 2 and 5, the optical detection unit further comprises an integrating sphere 5 for receiving the excitation light beam E1, the first optical detection module 3, the second optical Note that the first optical detection module 3 and the second optical detection module 4 can be mounted on the integrating sphere 5 so that the detection module 4 and the integrating sphere 5 can be integrated into a single optical assembly S. As a result, after the excitation light beam E1 corresponding to each object D1 has previously passed through the integrating sphere 5 for homogenization, the photodiode 310 of the first optical detection module 3 passes through the integrating sphere 5 to the respective object D1. The light intensity information M1 of the excitation light beam E1 corresponding to D1 is obtained, and the optical spectrum analyzer 41 of the second optical detection module 4 detects the excitation light beam E1 corresponding to at least one subject D1 via the integrating sphere 5. It is possible to adopt a configuration that obtains the spectrum information M2. In this way, the first optical detection module 3, the second optical detection module 4 and the integrating sphere 5 can be integrated into a single modular optical module S, so that the modularized optical detection unit can be used for optical inspection. It is more convenient for the user in applying the device. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

[Second embodiment]
As shown in FIGS. 6 and 7, the optical detection system provided by the second embodiment of the present invention comprises a mounting module 1, a laser light supply module 2A and an optical detection unit. And the optical detection unit comprises a first optical detection module 3 and a second optical detection module 4 . Compare FIG. 6 and FIG. Comparing FIG. 7 and FIG. 2, the biggest difference between the second embodiment and the first embodiment according to the present invention is that the optical detection system according to the second embodiment further includes an ambient light supply module 7, an imaging module 8, a defect analysis module 9 and an electrical characteristic detection module T are provided. For example, the ambient light supply module 7, the imaging module 8, the defect analysis module 9, and the electrical characteristic detection module T are electrically connected to the system control module C. A supply module 7, an imaging module 8, a defect analysis module 9 and an electrical property detection module T can be controlled. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

Furthermore, as shown in FIG. 6, the laser light supply module 2A, the first optical detection module 3, the second optical detection module 4, the optical filter module 6, the ambient light supply module 7 and the imaging module 8 are identical. is placed in the optical path of For example, the ambient light supply module 7 includes an ambient light emitting structure 71 (eg, an LED or other type of light emitting arrangement) that produces an ambient light source A1, and a third optical lens 72 (or a third optical lens including a plurality of lenses). optical assembly), and a third optical lens 72 is positioned adjacent to the ambient light emitting structure 71 (or the third optical lens 72 is positioned in the optical transmission line of the ambient light emitting structure 71). may be placed downstream). In this way, the ambient light supply module 7 converts the ambient light source A1 generated by the ambient light emitting structure 71 into the ambient light beam A2 that irradiates the plurality of subjects D1 through the third optical lens 72, It may be configured to provide the necessary ambient lighting for multiple subjects D1. Furthermore, the imaging module 8 includes an imaging unit 81 (for example, using a CCD or CMOS sensor chip) and a fourth optical lens 82 (or a fourth optical assembly consisting of a plurality of lenses). 82 is arranged adjacent to the imaging section 81 (or the fourth optical lens 82 may be arranged upstream in the optical transmission path of the imaging element 81). Furthermore, when each illuminating light beam P1 irradiates the corresponding subject D1 to form a light spot (not shown), the imaging module 8 detects that the light spot of each illuminating light beam P1 is projected from the corresponding subject D1. It can be configured to capture the position of the light spot to determine if there is a deviation (note that if the light spot of the illuminating light beam P1 is displaced from the corresponding object D1, the object D1 will be excited). , the excitation light beam E1 cannot be generated). Further, if the light spot of the illumination light beam P1 is displaced from the corresponding subject D1, the spatial light modulator 21 can also be configured to move the spot of the illumination light beam P1 to the corresponding subject D1. . As described above, in the present invention, the spatial light modulator 21 is used to adjust the position of the light spot with which the irradiation light beam P1 irradiates the corresponding object D1, and the "positioning accuracy of the object D1 during detection" is adjusted. , and the detection accuracy can be improved. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

In this way, the ambient light beam A2 provided by the ambient light supply module 8 can illuminate multiple subjects D1 simultaneously so as to provide the required ambient illumination for multiple subjects D1, thereby , the imaging module 8 can more clearly identify the light spot position of each irradiation light beam P irradiated onto the subject D1. Further, the imaging module 8 determines whether the light spot of each illuminating light beam P is displaced from the corresponding object D1, and the spatial light modulator 21 aligns the light spot of the illuminating light beam P to the corresponding object D1. Since it can be configured to move to the specimen D1, the present invention can effectively improve the "positioning accuracy" of the specimen D1 during detection, and can improve the detection accuracy.

Furthermore, as shown in FIGS. 6 and 7, the imaging unit 81 captures the light spots formed by the irradiation light beams P1 corresponding to the light spots irradiated on the subject D1. 8 may be configured to acquire the light shape information M3 of each spot of the irradiation light beam P1. a first optical detection module 3, a second optical detection module 4 and an imaging module to respectively obtain the information M1' and the 'spectral information M2', and the 'light shape information M3' of the light spot of each illuminating light beam P1. 8 are electrically connected. In addition, the electrical property detection module T uses the mounting module 1 to obtain a signal (that is, electrical information M4) generated by the subject D1 through electrical contact with the subject D1 excited by the illuminating light beam P1. can be placed anywhere adjacent to the For example, the electrical detection module T includes a movable structure (not shown) and a plurality of conductive probes (not shown) driven into position by the movable structure, the conductive probes It can be used to selectively electrically contact the conductive solder pads of D1. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

For example, as shown in FIG. 6 and FIG. 7, the defect analysis module 9 "each object D1 (for example, at least one of a plurality of objects D1 in the same predetermined area, or a plurality of objects in each predetermined area part of the subject D1) The wavelength band of the spectral information M2 of the correspondingly generated excitation light beam E1 is "an average obtained by averaging a plurality of spectral information M2 by a plurality of excitation light beams E1 of a plurality of subjects D1 Each test object by determining whether it is lower than the waveband (i.e., determined by multiple test subjects D1) or an average waveband preset by the user (i.e., manually determined). It is used to determine whether or not the item D1 is defective. Further, the defect analysis module 9 determines that "each object D1 (for example, at least one of a plurality of objects D1 in the same predetermined area, or a plurality of objects D1 in each predetermined area) correspondingly occurs The luminous intensity included in the light amount information M1 of the excitation light beam E1 obtained by the excitation light beam E1 is lower than the "average luminous intensity calculated by averaging the light amount information M1 of the plurality of excitation light beams E1 of the plurality of subjects D1". may Furthermore, the defect analysis module 9 determines that the "actual light spot pattern according to the light shape information M3 for each light spot of the irradiation light beam P1" is similar to the "default light spot pattern (for example, circle, square, or arbitrary shape)". It can be configured to determine if the degree is 90% or less (or 80%, 70%, 60% or less). It should be noted that the specific subject D1 can be determined by "the wavelength band according to the spectral information M2 of the excitation light beam E1 is lower than the average wavelength band" or "the light intensity value according to the luminous intensity information M1 of the excitation light beam E1 is lower than the average light intensity value". is defined as a defective object, the electrical characteristic detection module T is configured to acquire a signal (that is, electrical information M4) generated by making electrical contact with the defective object being excited by the irradiation light beam P1. may However, the example shown above is only one possible embodiment and is not intended to limit the invention.

In this way, the defect analysis module 9 determines whether "whether the wavelength band of each subject D1 is lower than the average wavelength band", "whether the luminous intensity of each subject D1 is lower than the average luminous intensity", "whether or not each irradiation light The defect analysis module 9 can be configured to determine whether the degree of similarity between the actual light spot pattern by the light spots of the beam P and the default light spot pattern is too low. It becomes possible to know which of the plurality of objects D1 is a defective object. In addition, in the present invention, the defective object is first excited by the irradiation light beam P, the electrical characteristic detection module T is used to electrically contact the defective object, and the signal generated from the defective object (that is, the electrical information M4 ) can be obtained. Therefore, in the present invention, after the defect analysis module 9 identifies the defective object, the electrical characteristic detection module T can be used to electrically inspect the defective object. In the present invention, it is possible to shorten the electrical inspection time because it is only necessary to electrically inspect the defective inspection object instead of electrically inspecting all the inspection objects D1.

Furthermore, as shown in FIGS. 6-8, the second embodiment of the present invention provides the following optical detection method. First, as shown in FIG. 6, a spatial light modulator 21 is provided that is configured to convert a laser beam L1 into a plurality of irradiation light beams P1 that individually irradiate a plurality of subjects D1 (step S200). Next, as shown in FIG. 6, each subject D1 is excited by a corresponding irradiation light beam P1 to generate a corresponding excitation light beam E1 (step S202). Next, as shown in FIGS. 6 and 7, the first optical detection module 3 performs a first detection for simultaneously or sequentially measuring the luminosity of a plurality of excitation light beams E1 corresponding to each of a plurality of subjects D1. It is configured to perform steps to obtain light intensity information M1 for each of the excitation light beams E1 corresponding to each of the subjects D1 (step S204). Next, as shown in FIGS. 6 and 7, the second optical detection module 4 detects at least one of the objects D1 to obtain the spectral information M2 of the excitation light beam E1 corresponding to the object D1. is configured to perform a second detection step of measuring the optical spectrum of the excitation light beam E1 corresponding to (step S206). line. For example, the second detection step (step S206) may be performed after the first detection step (step S204) is completed, or the second detection step (step S204) may be performed while the first detection step (step S204) is in progress. (Step S206) may be implemented. That is, according to actual needs, the first detection step (step S204) and the second detection step (step S206) can be performed sequentially, or the first detection step (step S204) and the second detection step (step S204) can be performed sequentially. detection step (step S206) can be performed at the same time. can be effectively shortened. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

Furthermore, as can be seen from the comparison between FIG. 8 and FIG. 3, the biggest difference between the second embodiment and the first embodiment according to the present invention is that the optical detection method of the second embodiment does not include steps The following procedure is provided after S206. First, as shown in FIG. 6, an ambient light supply module for converting an ambient light source A1 into an ambient light beam A2 that irradiates a plurality of subjects D1 so as to provide the necessary ambient illumination for the plurality of subjects D1. 7 is provided (step S208). Next, as shown in FIG. 6, in order to determine whether the light spot of the illumination light beam P1 is displaced from the corresponding subject D1, the position of the light spot irradiated on the subject D1 by the projection beam P1 is determined. An imaging module 8 is provided for capturing information (step S210). Then, as shown in FIG. 6, "each subject D1 (for example, at least one of a plurality of subjects D1 within the same predetermined area, or a portion of a plurality of subjects D1 within each predetermined area) corresponding to whether the wavelength band of the spectral information M2 of the excitation light beam E1 generated by the excitation light beam E1 is lower than the "average wavelength band obtained by averaging the plurality of spectral information M2 of the plurality of excitation light beams E1 of the plurality of subjects D1" ( That is, whether or not the wavelength band of each subject D1 is lower than the average wavelength band), and "the luminous intensity included in the light amount information M1 of the excitation light beam E1 correspondingly generated by each subject D1" is "a plurality of Is it lower than the "average luminous intensity calculated by averaging the light intensity information M1 of the plurality of excitation light beams E1 of the subject D1 (that is, whether the luminous intensity of each subject D1 is lower than the average luminous intensity)" (not shown in particular) However, in a specific embodiment, it is also possible to determine whether "the degree of similarity between the actual light spot pattern of the light spots of each irradiation light beam P and the default light spot pattern is too low"). The defect analysis module 9 to be judged is arranged (step S212). Next, if "the wavelength band according to the spectral information M2 of the excitation light beam E1 is lower than the average wavelength band" or "the luminous intensity according to the luminous intensity information M1 of the excitation light beam E1 is lower than the average luminous intensity" (or "each irradiation light beam If the object D1 is defined as a defective object due to either "too low similarity between the actual light spot by the light spots of P and the default light spot pattern", the electrical property detection module T will: An electrical signal (electrical information M4) generated by the defective object is obtained by electrically contacting the defective object excited by the irradiation light beam P1 (step S214).

For example, in some embodiments as shown in FIGS. 6, 7 and 9, the optical detection unit further comprises an integrating sphere 5 for receiving the excitation light beam E1, the first optical detection module 3, the second It is worth noting that the integrating sphere 5 can be equipped with both the first optical detection module 3 and the second optical detection module 4 so that the optical detection module 4 and the integrating sphere 5 can be integrated into a single optical assembly S. . As a result, after the excitation light beam E1 corresponding to each object D1 has previously passed through the integrating sphere 5 for homogenization, the photodiode 310 of the first optical detection module 3 passes through the integrating sphere 5 to the respective object D1. 1, and the optical spectrum analyzer 41 of the second optical detection module 4 detects the spectrum of the excitation light beam E1 corresponding to at least one subject D1 via the integrating sphere 5. It is possible to configure to acquire the information M2. In this way, the first optical detection module 3, the second optical detection module 4 and the integrating sphere 5 can be integrated into a single optical module S of modularization, so that the modularized optical detection unit can be used for optical inspection It is more convenient for users in applying the system. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

[Third Embodiment]
10 to 12, the third embodiment of the present invention comprises mounting module 1, laser light supply module 2A, first optical detection module 3 and second optical detection module 4. an optical inspection unit, and a mounting module 1, a laser light supply module 2A, a first optical detection module 3 and a second optical detection module 4 serve the same purpose as in the second embodiment. I will provide a. As can be seen from a comparison of FIG. 10 (or FIG. 11) and FIG. 6 and FIG. 12 and FIG. 7, the most significant differences between the third and second embodiments of the present invention are as follows be. The photodetection system of the third embodiment further comprises a laser light supply module 2B, which converts the laser beam L2 into a plurality of irradiation light beams P2 via the spatial light modulator 21. can be done. For example, the laser light supply module 2B may be placed anywhere above or near the mounting module 1, and the laser light supply module 2B includes at least one laser light source generator 22B and a first optical lens 23B (or a plurality of optical lenses). lens), wherein the first optical lens 23B is positioned adjacent to at least one laser light oscillator 22B (or alternatively, the first optical lens 23B is positioned adjacent to the laser light oscillator 22B). may be arranged downstream of the optical transmission line). Furthermore, the oscillating light S2 (that is, the non-parallel oscillating light S2) generated by the laser light oscillator 22B is converted into a laser beam L2 (that is, the parallel laser beam L1) via the first optical lens 23B, and the laser beam L2 is It is possible to lead to the spatial light modulator 21 in the order of the fifth spectroscopic element B5 and the first spectroscopic element B1. Then, after the laser beam L2 is converted into a plurality of irradiation light beams P2 by the spatial light modulator 21 (only two irradiation light beams P2 are shown as an example in FIG. 1), each irradiation light beam P2 is first is reflected by the spectroscopic element B1, passes through the second spectroscopic element B2, and is irradiated onto the corresponding subject D2 (that is, one irradiation light beam P2 irradiates only one corresponding subject D2). is done). In this way, when a plurality of subjects D2 are simultaneously irradiated with a plurality of corresponding irradiation light beams P2, each subject D2 can generate a corresponding excitation light beam E2 by irradiation with the corresponding irradiation light beam P2 ( That is, when any subject D2 is irradiated correspondingly with the illumination light beam P2, only the subject D2 illuminated by the projection beam P2 can generate the corresponding excitation light beam E2). However, the example shown above is only one possible embodiment and is not intended to limit the invention.

Furthermore, as shown in FIGS. 11 and 12, the first optical detection module 3 detects a plurality of excitation lights generated by a plurality of specimens D2 (for example, a plurality of specimens D2 in the same predetermined area). The luminous intensity of the beam E2 may be measured simultaneously or sequentially to obtain luminous intensity information M1 for the corresponding excitation light beam E2 generated by each subject D2. For example, the first optical detection module 3 includes a photometer 31 with at least one photodiode 310, which provides photometric information M1 for each excitation light beam E2 correspondingly generated by the subject D2. can be configured to obtain Furthermore, after each subject D2 is excited by a corresponding illumination light beam P2 to correspondingly generate an excitation light beam E2, each excitation light beam E2 is first reflected by the second spectroscopic element B2, and then Each excitation light beam E2 is projected toward at least one photodiode 310 of the photometer 31 after passing through the fourth spectroscopic element B4 and the third spectroscopic element B3 in sequence. Thus, in the present invention, the photometric device 31 can be used to obtain the photometric information M1 on the excitation light beam E2 correspondingly generated by each subject D2. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

Also, as shown in FIGS. 11 and 12, the second optical detection module 4 detects an excitation light beam correspondingly generated by at least one subject D2 (i.e., at least one of the plurality of subjects D2). It may be arranged to measure the optical spectrum of the excitation light beams E2 correspondingly generated by at least one of the subjects D2 to obtain the spectral information M2 of E2. For example, the second optical detection module 4 includes an optical spectrum analyzer 41 and a second optical lens 42 (or a second optical assembly including multiple lenses), the second optical lens 42 being the optical spectrum analyzer 41 . (or alternatively, the second optical lens 42 may be placed upstream of the optical spectrum analyzer 41 in the optical transmission line). Also, the optical spectrum analyzer 41 may be configured to acquire, via the second optical lens 42, spectral information M2 regarding the excitation light beam E2 generated by at least one of the subjects D2. Furthermore, after each subject D2 correspondingly generates an excitation light beam E2 by excitation of the corresponding illuminating light beam P2, each excitation light beam E2 is first reflected by the second spectroscopic element B2 and then each excitation light beam E2. The light beam E2 is projected toward the second optical detection module 4 after passing through the fourth spectroscopic element B4 and the third spectroscopic element B3 in order. Thus, in the present invention, the optical spectrum analyzer 41 can be used to obtain spectral information M2 regarding the excitation light beam E2 corresponding to at least one of the subjects D2. Note that at least one subject D2 may be located in the central portion of the predetermined region occupied by the plurality of subjects D2 or in the vicinity thereof. That is, on a predetermined area occupied by a plurality of subjects D2, at least one subject D2 located at or near the center of the predetermined area is selected and excited. Analyzer 41 makes it possible to obtain spectral information M2 of excitation light beams E2 correspondingly generated by at least one subject D2. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

It should be noted that, as shown in FIGS. 10 and 11, two oscillation lights (S1, S2) generated by two laser light oscillators (22A, 22B) (that is, two laser light supply modules (2A, 2B )) have different wavelength bands, the optical inspection system provided by the present invention can be used to inspect objects (D1, P2) with different (excitation) wavelength bands according to different needs. D2) and therefore the optical inspection system provided by the present invention is suitable for the detection of multiple analytes (D1, D2) with different (excitation) wavelength bands, The application of the optical detection system can be further enhanced (that is, the optical detection system according to the present invention switches the oscillation light (S1, S2) when the analytes (D1, D2) have different wavelength bands. , since optical detection can be performed on multiple analytes (D1, D2) with corresponding wavelength bands, there is no need to use separate optical inspection systems to detect analytes with different wavelength bands. no). For example, if one of the specimens D1 (eg, a blue LED) has a wavelength band of about 430 nm to 470 nm, the optical inspection system provided by the present invention selects one of the laser light oscillators 22A to It is possible to provide the oscillating light S1 (that is, the irradiation light beam P1) in the 425 nm wavelength band and use it to excite the subject D1. Also, if another test object D2 (eg, a red LED) has a wavelength band of about 620 nm to 780 nm, the optical inspection system provided by the present invention selects another laser laser light oscillator 22B to have a wavelength band of about 620 nm to 780 nm. Oscillating light S2 (ie, illumination light beam P2) between 512 nm and 552 nm can be provided and used to excite another analyte D2. Furthermore, if still another test object (eg, a green LED) has a wavelength band of about 490 nm to 570 nm, the optical inspection system provided by the present invention uses yet another laser light oscillator (not shown). , in the wavelength range of about 385 nm to 425 nm (ie, the illuminating light beam P2), and may choose to use it to excite yet another subject, eg, a green LED. However, the example shown above is only one possible embodiment and is not intended to limit the invention.

Note that, as shown in FIGS. 10 and 11, the two laser light supply modules (2A, 2B) provided in the third embodiment can be applied to two subjects (D1, D2) having different wavelength bands. Note that this is only an example. In the present invention, the number of laser light supply modules can be increased according to different requirements (for example, the number of multiple objects to be measured in different wavelength bands). It will be adjusted according to the number of light supply modules.

[Beneficial effects of the embodiment]
One of the beneficial effects of the present invention is that in the optical detection system provided by the present invention, "a laser light supply module 2A comprising a spatial light modulator 21 for converting a laser beam L1 into a plurality of illuminating light beams P1". , and "a first optical detection module 3 for measuring the intensity of the excitation light beam E1 generated by the subject D1 and a second optical detection module 3 for measuring the light spectrum of the excitation light beam E1 generated by the subject D1. The luminosity information M1 of the excitation light beam E1 generated by the subject D1 and the spectral information M2 of the excitation light beam E1 generated by the subject D1 can be obtained by the optical detection unit "including the optical detection module 4". In this way, the present invention can effectively improve the detection efficiency of a large number of objects, reduce the incidence of failure to detect all defects in the objects, and effectively improve the subsequent production yield. It is possible.

Another beneficial effect of the present invention is that in the optical detection method provided by the present invention, "a laser light supply module 2A comprising a spatial light modulator 21 for converting a laser beam L1 into a plurality of illuminating light beams P1. , "providing a first optical detection module 3 for performing a first detection step of measuring the intensity of the excitation light beam E1 generated by the subject D1", and "providing an excitation light beam E1 generated by the subject D1 A second optical detection module 4 is provided for performing a second detection step of measuring the optical spectrum of the light beam E1. It is possible to obtain the spectral information M2 of the excitation light beam E1 generated by the specimen D1. In this way, the present invention can effectively improve the detection efficiency of a large number of objects, reduce the incidence of failure to detect all defects in the objects, and effectively improve the subsequent production yield. It is possible.

The content disclosed above is merely a preferred and practicable embodiment of the present invention, and is not intended to limit the scope of the claims of the present invention. All equivalent technical modifications are included in the claims of the present invention.

C: System control module 1: Mounting modules 2A, 2B: Laser light supply module 21: Spatial light modulators 22A, 22B: Laser light oscillators 23A, 23B: First optical lens 3: First optical detection module 31: Photometer 310: Photodiode 4: Second optical detection module 41: Optical spectrum analyzer 42: Second optical lens 5: Integrating sphere 6: Optical filter module 60: Bandpass filter 7: Ambient light supply module 71: Environment Light emitting structure 72: Third optical lens 8: Imaging module 81: Imaging unit 82: Fourth optical lens 9: Defect analysis module T: Electrical characteristic detection module S: Single optical assembly B1: First spectroscopic element B2: Second spectroscopic element B3: Third spectroscopic element B4: Fourth spectroscopic element B5: Fifth spectroscopic element M1: Luminous intensity information M2: Spectrum information M3: Light shape information M4: Electrical characteristic information D1, D2: Subject S1, S2: oscillation light L1, L2: laser beam P1, P2: irradiation light beam E1, E2: excitation light beam A1: environment light source A2: environment light beam

Claims (10)

a mounting module for mounting a plurality of subjects;
a laser light delivery module including a spatial light modulator that converts a laser beam into a plurality of illumination light beams;
an optical detection unit comprising a first optical detection module and a second optical detection module, wherein
a plurality of said illuminating light beams simultaneously and correspondingly illuminating a plurality of said subjects, each said subject being excited by a corresponding said illuminating light beam and correspondingly generating an excitation light beam;
the first optical detection module is configured to obtain light intensity information of the excitation light beam by the subject by measuring the light intensity of the excitation light beam by the subject;
The second optical detection module is configured to obtain spectral information of the excitation light beam from the subject by measuring an optical spectrum of the excitation light beam from the subject.
An optical detection system, characterized in that: further comprising an optical filter module including a bandpass filter for filtering a plurality of said illumination light beams;
the laser light supply module, the optical detection unit, and the optical filter module are arranged on the same optical path;
When each of the subjects is excited by the corresponding illumination light beam to correspondingly generate the excitation light beam, the excitation light beam correspondingly generated by each of the subjects is passed through the bandpass filter to the respectively transmitted to the first optical detection module and the second optical detection module;
When each said illumination light beam is reflected by the corresponding said object to form a reflected light beam, said reflected light beam is filtered by said bandpass filter to said first optical detection module and said second optical detection module. without reaching
The first optical detection module simultaneously measures the luminosity of the plurality of excitation light beams generated by each of the plurality of subjects, thereby measuring the intensity of the excitation light beams correspondingly generated by each of the subjects. configured to obtain luminosity information,
The second optical detection module measures the excitation light beam correspondingly generated by at least one of the subjects by measuring an optical spectrum of the excitation light beam correspondingly generated by at least one of the subjects. configured to obtain spectral information of a light beam;
2. The optical detection system of claim 1. The laser light supply module includes a plurality of laser light oscillators, and a plurality of optical lenses arranged adjacent to the plurality of laser light oscillators, and each of the optical lenses is adapted to target the laser light oscillators. is used to correspondingly convert the oscillated light by the laser beam,
The plurality of laser light oscillators are configured to generate the oscillation light having wavelength bands different from each other, the laser light supply module corresponds to a spectroscopic element, and the laser beams from the laser light supply module are After passing through the element, it reaches the spatial light modulator, or after passing through the spatial light modulator, it reaches the spectroscopic element,
The spatial light modulator converts the laser beam into a plurality of the illumination light beams by transmitting or reflecting the laser beam, and the spatial light modulator is configured to divide any two of the illumination light beams. configured to be able to adjust the minimum distance, the number of said illumination light beams, and the size and shape of the light spots of said illumination light beams;
2. The optical detection system of claim 1. The first optical detection module comprises a photometer including at least one photodiode for obtaining the photometric information about the excitation light beam correspondingly generated by each of the subjects. configured,
The second optical detection module comprises an optical spectrum analyzer, which acquires the spectral information about the excitation light beam correspondingly generated by the at least one subject through an optical lens. wherein at least one of the subjects is located at or near the center of a predetermined region occupied by the plurality of subjects;
2. The optical detection system of claim 1. The optical detection unit comprises an integrating sphere for receiving the excitation light beam, and the first optical detection module and the second optical detection module are attached to the integrating sphere so that the first optical the detection module, the second optical detection module and the integrating sphere are integrated into a single optical assembly;
The first optical detection module comprises a photometer including at least one photodiode, the photodiode receiving the photometric information about the excitation light beam correspondingly generated by each of the subjects under test by the integrating sphere. configured to get
The second optical detection module comprises an optical spectrum analyzer, which obtains the spectral information about the excitation light beam correspondingly generated by at least one of the subjects through the integrating sphere. wherein the at least one subject is located at or near the center of a predetermined region occupied by a plurality of the subjects;
2. The optical detection system of claim 1. The optical detection system comprises:
an ambient lighting module including an ambient light emitting structure for generating an ambient light source;
an imaging module including an imaging device, wherein the laser light supply module, the optical detection unit, the optical filter module, the ambient light supply module, and the imaging module are arranged on the same optical path;
The ambient light supply module converts the ambient light source through an optical lens into ambient light beams for illuminating the plurality of subjects, thereby providing a necessary illumination environment for the plurality of subjects;
When each of the illumination light beams irradiates the corresponding subject to form a light spot, the imaging module is configured to obtain position information of the light spots, whereby the determining whether the light spot is displaced from the corresponding subject;
when determining that the light spot by the illuminating light beam is shifted from the corresponding object, the spatial light modulator moves the light spot by the illuminating light beam to the corresponding object;
2. The optical detection system of claim 1. The optical detection system comprises:
an imaging module including an imaging device that acquires light shape information about the light spots formed by the irradiation light beams by imaging the light spots formed by correspondingly irradiating the subject with the irradiation light beams;
electrically connected to the first optical detection module, the second optical detection module, and the imaging module, for the luminous intensity information, the spectral information, and the excitation light beams correspondingly generated by the subject, respectively; a defect analysis module configured to obtain the light shape information about the light spots by each of the illuminating light beams;
an electrical characteristic detection module arranged adjacent to the mounting module;
further comprising
The defect analysis module is configured to determine whether a wavelength band related to the spectral information of the excitation light beam correspondingly generated by each of the objects is lower than an average wavelength band, and is calculated by averaging a plurality of spectral information on a plurality of excitation light beams in a plurality of subjects, or is prepared in advance by a user,
The defect analysis module is configured to determine whether the light intensity related to the light intensity information of the excitation light beam correspondingly generated by each of the subjects is lower than an average light intensity, wherein the average light intensity is a plurality of It is calculated by averaging a plurality of the light intensity information regarding the plurality of excitation light beams in the subject,
The defect analysis module is configured to determine whether a similarity between an actual light spot pattern and a default light spot pattern regarding the light shape information of the light spots by each of the irradiation light beams is 90% or less. is,
It is determined that the wavelength band related to the spectral information of the excitation light beam from any of the subjects is lower than the average wavelength band, or the luminous intensity related to the luminous intensity information from the excitation light beam is determined to be less than the average luminous intensity. is determined to be low, the object is defined as a defective object, and the electrical property detection module electrically contacts the defective object being excited by the illuminating light beam, thereby: configured to acquire an electrical signal generated by the defective subject;
2. The optical detection system of claim 1. providing a spatial light modulator that is used to convert a laser beam into a plurality of illuminating light beams for illuminating each of a plurality of subjects;
each said subject being excited by a corresponding said illumination light beam to correspondingly generate an excitation light beam;
providing a first optical detection module for performing a first detection step of obtaining light intensity information of the excitation light beam by the subject by measuring the light intensity of the excitation light beam by the subject;
providing a second optical detection module for performing a second detection step of obtaining spectral information of the excitation light beam from the subject by measuring an optical spectrum of the excitation light beam from the subject;
the second detection step is performed after the first detection step is completed or performed while the first detection step is in progress;
An optical detection method characterized by: The optical detection method further comprises:
providing an ambient light supply module for converting an ambient light source into a beam of ambient light for illuminating a plurality of said subjects, thereby providing the required ambient lighting for said subjects;
Determining whether or not the light spot of the irradiation light beam is displaced from the corresponding object by taking in the position information of the light spot formed by the irradiation light beam correspondingly irradiating the object. provided with an imaging module,
when determining that the light spot by the irradiation light beam is shifted from the corresponding object, the spatial light modulator moves the light spot by the irradiation light beam to the corresponding object;
The first optical detection module simultaneously measures the intensity of the plurality of excitation light beams correspondingly generated by each of the plurality of subjects to detect the excitation light correspondingly generated by each of the subjects. configured to obtain luminosity information of the beam,
The second optical detection module measures the excitation light beam correspondingly generated by at least one of the subjects by measuring an optical spectrum of the excitation light beam correspondingly generated by at least one of the subjects. configured to obtain spectral information of a light beam,
The spatial light modulator converts the laser beam into a plurality of the illumination light beams by transmitting or reflecting the laser beam, and the spatial light modulator is configured to divide any two of the illumination light beams. configured to be able to adjust the minimum distance, the number of said illumination light beams, and the size and shape of the light spots of said illumination light beams;
The optical detection method according to claim 8. determining whether the wavelength band related to the spectral information of the excitation light beam correspondingly generated by each of the subjects is lower than an average wavelength band; further comprising a defect analysis module configured to determine whether a light intensity for the light intensity information of the excitation light beam is less than an average light intensity;
The average wavelength band is calculated by averaging a plurality of spectral information on a plurality of excitation light beams in a plurality of subjects, or is prepared in advance by a user, and the average luminous intensity is a plurality of It is calculated by averaging a plurality of the light intensity information regarding the plurality of excitation light beams in the subject,
It is determined that the wavelength band related to the spectral information of the excitation light beam from any of the subjects is lower than the average wavelength band, or the luminous intensity related to the luminous intensity information from the excitation light beam is determined to be less than the average luminous intensity. is also determined to be low, defining the subject as a defective subject,
providing an electrical property detection module for acquiring an electrical signal generated by the defective object by electrically contacting the defective object being excited by the illuminating light beam;
The optical detection method according to claim 8.

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