JP2022158516A - Three-dimensional shape measuring apparatus - Google Patents

Abstract

To provide a three-dimensional shape measuring apparatus capable of measuring a shape over a wide range on a surface of a measurement subject without requiring a complicated setting operation.SOLUTION: A rotation unit sequentially rotates a measurement subject S about a rotation axis RA to a plurality of preset measurement angular positions. In a state where the measurement subject S is at each measurement angular position, an existence region of the measurement subject S is detected. A measurement region to be imaged by an imaging section for the measurement angular position is set in a direction orthogonal to at least the rotation axis RA on the basis of a detection result. A stage to which the rotation unit is attached, and the imaging section are controlled so that the set measurement region is imaged. In a state where the measurement subject S is at each measurement angular position, a plurality of pieces of three-dimensional shape data corresponding to a plurality of portions of the measurement subject S respectively are generated on the basis of a plurality of pieces of image data generated by the imaging the set measurement region.SELECTED DRAWING: Figure 25

Description

The present invention relates to a three-dimensional shape measuring apparatus that optically measures the three-dimensional shape of an object to be measured.

A three-dimensional shape measuring device is used to measure the three-dimensional shape of an object to be measured. As an example of a three-dimensional shape measuring apparatus, in the shape measuring apparatus of Patent Document 1, a plurality of measurement lights having a plurality of patterns are emitted from a light projecting section from a position obliquely above a measurement object placed on a stage. The object to be measured is sequentially irradiated. At the time of irradiation of each measurement light, the measurement object is imaged by the light receiving section arranged above the stage. Thereby, a plurality of images in which the patterns of the measurement light are projected are obtained. Data indicating the three-dimensional shape of the object to be measured is generated by triangulation based on the plurality of acquired images.

Here, the stage has a mounting surface on which the object to be measured is mounted, which is movable in the X and Y directions parallel to the mounting surface and rotatable around an axis orthogonal to the mounting surface. is configured to be Thereby, the user can measure the shape of a desired portion of the measurement object by moving or rotating the mounting surface while the measurement object is placed on the stage.

JP 2014-055814 A

In the shape measurement method using the triangulation method, blind spots on the surface of the object to be measured, that is, parts of the surface of the object to be measured that cannot be irradiated with the measurement light, and parts of the surface of the object to be measured that cannot be imaged , the shape cannot be measured.

In the shape measuring apparatus described above, the object to be measured on the stage is positioned below the light projecting section and the light receiving section. Therefore, the portion of the object to be measured that faces downward becomes a blind spot. Therefore, even if the object to be measured on the stage is moved or rotated, a specific portion of the surface of the object to be measured cannot be removed from the blind spot. In this case, the portion where the shape of the object to be measured can be measured is limited.

Therefore, it is conceivable to provide the above shape measuring apparatus with an adjusting device for adjusting the position or posture of the object to be measured on the stage. However, if the size of the measurement object in plan view changes due to the adjustment of the position or orientation of the measurement object, the user should capture an image with the light receiving unit each time the position or orientation of the measurement object is adjusted. A region must be set. Such setting work is complicated.

SUMMARY OF THE INVENTION An object of the present invention is to provide a three-dimensional shape measuring apparatus capable of measuring the shape over a wide range on the surface of an object to be measured without complicated setting work.

(1) A three-dimensional shape measuring apparatus according to the present invention is a three-dimensional shape measuring apparatus that generates three-dimensional shape data representing a three-dimensional shape of an object to be measured. around a rotation axis extending in the X-axis direction to a first rotation angle and a second rotation angle; and an optical axis extending in the Z-axis direction orthogonal to the X-axis. an imaging unit for capturing an image of the measurement object held by the holding unit and generating image data for generating three-dimensional shape data representing an image of the measurement object; a translation drive unit that moves the rotation unit relative to the imaging unit so that the imaging field of view of the imaging unit is sequentially moved in the direction; Based on the width of the object to be measured extending in the Y-axis direction, a plurality of first measurement regions are set in line with the Y-axis direction. A setting unit that sets a plurality of second measurement regions aligned in the Y-axis direction based on the width of the measured object that extends in the Y-axis direction, and rotates the measurement object to a first rotation angle to capture an image. The imaging field of view of the imaging unit is sequentially moved to a plurality of first measurement regions to capture an image of the object to be measured, and then the object to be measured is rotated to a second rotation angle to move the imaging field of view of the imaging unit to a plurality of first measurement regions. A control unit for controlling the translation drive unit, the rotation drive unit, and the imaging unit is provided so as to sequentially move to the two measurement regions and image the measurement object.

In the three-dimensional shape measuring apparatus, based on the width of the measurement object extending in the Y-axis direction as seen from the imaging unit in a state where the measurement object is rotated by the first rotation angle, a plurality of A first measurement area is set. Further, a plurality of second measurement regions arranged in the Y-axis direction are set based on the width of the measurement object extending in the Y-axis direction as seen from the imaging unit while the measurement object is rotated by the second rotation angle. be. In this case, the user does not need to perform complicated setting work according to the shape of the measurement object for each of the first rotation angle and the second rotation angle. After that, while the object to be measured is at the first rotation angle, the imaging field of view of the imaging unit is sequentially moved to a plurality of first measurement regions, and the object to be measured is imaged. Further, while the object to be measured is at the second rotation angle, the imaging field of view of the imaging unit is sequentially moved to a plurality of second measurement regions, and the object to be measured is imaged. Three-dimensional shape data corresponding to the first rotation angle and three-dimensional shape data corresponding to the second rotation angle can be generated based on a plurality of image data thus generated. As a result, it is possible to measure the shape over a wide range on the surface of the object to be measured without complicated setting work.

(2) The three-dimensional shape measuring device associates the first rotation angle with the plurality of first measurement regions, and associates the second rotation angle with the plurality of second measurement regions, which are set by the setting unit. A storage unit that stores settings may be further provided, and the control unit may control the translation drive unit, the rotation drive unit, and the imaging unit based on the settings stored in the storage unit.

In this case, based on the settings stored in the storage unit, a portion of the measurement object at the first rotation angle is properly imaged, and a portion of the measurement object at the second rotation angle is properly imaged. be done.

(3) The three-dimensional shape measuring apparatus further includes a detection unit that detects the presence area of the measurement object in the Y-axis direction at each of the first rotation angle and the second rotation angle, and the setting unit detects Based on the width of the detected existence area, the number of first measurement areas and the number of second measurement areas arranged in the Y-axis direction necessary for imaging the entire existence area may be automatically set. .

In this case, the plurality of first measurement regions corresponding to the first rotation angle and the plurality of second measurement regions corresponding to the second rotation angle are obtained based on the detection result of the detection unit without requiring setting work by the user. The measurement area is properly set.

(4) The three-dimensional shape measuring device displays a setting screen for adjusting the plurality of first measurement regions and the plurality of second measurement regions set based on the existence region of the measurement object detected by the detection unit. A display unit for displaying is further provided, and the setting unit is configured to be able to receive an instruction from the user and expand or reduce the number of the first measurement regions and the second measurement regions extending in the Y-axis direction on the setting screen. good too. In this case, the user can measure the shape of the desired portion of the object to be measured.

(5) At each of the first rotation angle and the second rotation angle, the control unit relatively moves the object to be measured in the X-axis direction and the Y-axis direction with respect to the imaging unit and images the object a plurality of times. The imaging unit, the translation driving unit, and the rotation driving unit are controlled so as to generate a map image in which the entire measurement object is captured, and the display unit displays the map image on the setting screen and is set by the setting unit. The plurality of first measurement regions and the plurality of second measurement regions are superimposed and displayed on the map image, and the three-dimensional shape measuring device measures the plurality of first measurement regions and the plurality of second measurement regions, respectively. A data generation unit may be further provided which generates a plurality of corresponding three-dimensional shape data and synthesizes the generated plurality of three-dimensional shape data to generate three-dimensional shape data of the entire measurement object.

In this case, the user can easily grasp the positional relationship between the measurement object at the first rotation angle and the plurality of first measurement regions by visually recognizing the map image corresponding to the first rotation angle. can be done. Also, by visually recognizing the map image corresponding to the second rotation angle, the user can easily grasp the positional relationship between the measurement target at the second rotation angle and the plurality of second measurement regions. can.

Furthermore, according to the above configuration, a plurality of three-dimensional shape data corresponding to the plurality of first measurement regions and the plurality of second measurement regions are generated and synthesized, so that the measurement object can be measured over a wide range of surfaces. It becomes possible to measure the shape across.

(6) The imaging unit includes a first optical system that forms an image of light at a first magnification, a first camera that receives the light imaged by the first optical system, and a second camera that is lower than the first magnification. It includes a second optical system that forms an image of light at a magnification, and a second camera that receives the light formed by the second optical system, and the map image captures the entire measurement object at the second magnification. The data generation unit may generate three-dimensional shape data based on a plurality of image data generated by imaging the plurality of first measurement regions and the plurality of second measurement regions at a first magnification. .

The imaging area of the imaging section corresponding to the second magnification is larger than the imaging area of the imaging section corresponding to the first magnification. Therefore, when imaging at the second magnification so as to cover the entire measurement object, the number of times of imaging is reduced compared to the case of imaging at the first magnification so as to cover the entire measurement object. be able to. According to the above configuration, since the map image is generated by imaging the measurement object at the second magnification, the time required to generate the map image can be shortened.

Also, the plurality of first measurement regions and the plurality of second measurement regions are imaged at a first magnification to generate three-dimensional shape data. In this case, the desired portion of the object to be measured can be measured with higher resolution than when the plurality of first measurement regions and the plurality of second measurement regions are imaged at the second magnification.

(7) The rotation drive section is configured to be capable of sequentially rotating the holding section to a plurality of different rotation angles including the first rotation angle and the second rotation angle, and the setting section is configured to rotate the measurement object at a plurality of angles. A plurality of measurement regions arranged in the Y-axis direction can be set based on the width of the measurement object extending in the Y-axis direction as viewed from the imaging unit at different rotation angles. The translation drive unit and the rotation drive unit rotate the object to be measured by each of the rotation angles, sequentially move the imaging field of view of the imaging unit to a plurality of measurement regions corresponding to the rotation angles, and perform imaging of the object to be measured. , and an imaging unit, and the three-dimensional shape measuring apparatus includes a detection unit that detects the presence area of the measurement object in the Y-axis direction as the width of the measurement object at each of a plurality of different rotation angles, and a detection unit that detects A display unit that displays a setting screen for adjusting the measurement area set for each rotation angle based on the presence area of the measurement object, and a selection of whether the measurement object is box-shaped or shaft-shaped. The display unit displays, as a setting screen, a first setting screen for making settings related to the measurement of the box-shaped measurement object when the box shape is selected by the operation unit. Alternatively, when the shaft shape is selected by the operation unit, a second setting screen may be displayed as the setting screen for making settings related to the measurement of the shaft-shaped measurement object.

In this case, a plurality of measurement regions aligned in the Y-axis direction are set based on the detection result of the detection unit while the measurement object is positioned at each of a plurality of different rotation angles. A setting screen for adjusting the set measurement area is displayed on the display. When the user selects either the box shape or the shaft shape, a setting screen corresponding to each shape is displayed on the display device. Thereby, the user can adjust the measurement area on the first setting screen suitable for the box shape when performing the settings related to the measurement of the box-shaped measurement object. In addition, when the user makes settings related to the measurement of the shaft-shaped measurement object, the user can adjust the measurement region on the second setting screen suitable for the shaft shape.

(8) The operation unit is configured to be able to select a plurality of different discrete rotation angles in a state in which the box shape is selected by the operation unit and the first setting screen is displayed on the display unit. superimposes a plurality of measurement regions detected and set by the detection unit on the image of the measurement object captured at each of the plurality of different rotation angles selected by the operation unit on the first setting screen. may be displayed.

In this case, the object to be measured can be imaged at a plurality of different rotation angles selected by the operation unit. In addition, by viewing the first setting screen, the user can easily grasp the measurement regions corresponding to each of a plurality of different rotation angles.

(9) The display unit, when displaying the second setting screen by selecting the shaft shape by the operation unit, captures an image at a specific one rotation angle among a plurality of different rotation angles on the second setting screen. The image of the object to be measured captured by the unit may be displayed, and the setting unit may receive a designation of a specific rotation angle from the user.

In this case, when the shaft shape is selected, the image of the object to be measured captured at one rotation angle designated by the user is displayed on the second setting screen.

(10) The setting unit may set a plurality of different rotation angles at angular pitches that are integral multiples of a predetermined angle when the box shape is selected by the operation unit. In this case, the measurement object is rotated by the rotation unit at a predetermined angular pitch, and the measurement object is imaged at each rotation.

(11) When the shaft shape is selected by the operation unit, the setting unit selects a plurality of different rotation angles necessary to measure the entire circumference of the shaft-shaped measurement object when the shaft-shaped measurement object is rotated. The pitch is automatically set based on the diameter of the object to be measured, and the control unit controls the rotation drive unit so as to rotate the object to be measured at the pitch of the rotation angle set by the setting unit. good. In this case, the pitch of the rotation angle required to measure the entire circumference of the object having the axial shape is set without complicated setting work.

(12) When the shaft shape is selected by the operation unit, the setting unit receives an input of a rotation angle pitch for rotating the shaft-shaped measurement object from the user. may be limited to the numerical values necessary to measure the entire circumference of the object to be measured when the is rotated. In this case, the user can set a plurality of different rotation angles at the desired pitch. In addition, according to the above configuration, since the pitch of the rotation angle is limited to the numerical value necessary for measuring the entire circumference of the object to be measured, erroneous setting is prevented.

(13) The three-dimensional shape measuring device further includes a data acquisition unit that acquires three-dimensional shape data corresponding to the plurality of first measurement regions, and the setting unit measures the plurality of first measurement regions acquired by the data acquisition unit. A plurality of second measurement regions arranged in the Y-axis direction may be set based on a plurality of three-dimensional shape data corresponding to .

In this case, a plurality of second measurement regions corresponding to the second rotation angle are set based on the three-dimensional shape data of the measurement object at the first rotation angle. Therefore, in order to set a plurality of second measurement regions corresponding to the second rotation angle, it is not necessary to take an image of the measurement object while rotating the measurement object to the second rotation angle in advance. Become.

(14) The three-dimensional shape measuring apparatus further includes a vertical drive section for changing the relative distance in the Z-axis direction between the rotation unit and the imaging section, and the control section controls the first rotation angle and the second rotation angle. A translation drive unit, a vertical drive unit, a rotation drive unit, and a The data generation unit controls the imaging unit, and the data generation unit generates the plurality of first measurement regions based on the plurality of image data generated by imaging the plurality of first measurement regions and the plurality of second measurement regions a plurality of times while changing the relative distance. generating a plurality of three-dimensional shape data respectively corresponding to the measurement region and the plurality of second measurement regions, and synthesizing the generated plurality of three-dimensional shape data to generate three-dimensional shape data of the object to be measured; good too. In this case, the shape of the measurement object can be measured with high accuracy over a wide range in the Z-axis direction.

(15) The three-dimensional shape measuring apparatus further includes a stage to which a rotating unit is attached, and a projector that irradiates pattern light having a periodic pattern from an obliquely upper position on the upper surface of the stage a plurality of times while shifting the phase, The imaging unit is provided above the stage so that the optical axis is aligned with the Z-axis. The image pickup unit irradiates pattern light from the projector onto the measurement object held by the rotation unit, and receives the pattern light reflected from the measurement object. By doing so, the object to be measured is imaged multiple times to generate a plurality of image data representing images of the object to be measured, and the projectors are aligned in the X-axis direction and symmetrical with respect to a virtual plane perpendicular to the X-axis direction. wherein each of the first and second light projection devices is orthogonal to the Y axis and inclined at a predetermined angle with respect to the X and Z axes, respectively The rotating unit has an optical axis, and emits pattern light along the optical axis of the light projecting device toward the optical axis of the imaging unit, and the stage of the rotating unit is at a predetermined reference position with respect to the imaging unit. Sometimes, the irradiation region of the pattern light by the first light projection device, the irradiation region of the pattern light by the second light projection device, and the imaging region of the imaging unit are arranged in a position outside the overlapping space. may be provided in

A space in which the pattern light irradiation region by the first light projection device, the pattern light irradiation region by the second light projection device, and the imaging region of the imaging unit overlap is called a measurement space. According to the above configuration, by arranging the measurement object in the measurement space, the measurement object is irradiated with the pattern light along two mutually different directions. As a result, it is possible to expand the range of the surface of the measurement object irradiated with the pattern light.

Moreover, according to the above configuration, the rotation unit is not located in the measurement space when the stage is at the reference position. Therefore, by arranging the stage and the imaging section so as to have a predetermined positional relationship, it is possible to prevent the rotation unit from restricting the measurable range of the measurement object. Therefore, it is possible to generate highly accurate three-dimensional shape data over a wide range of the surface of the object to be measured placed in the measurement space.

According to the present invention, it is possible to measure the shape over a wider range on the surface of the object to be measured without complicated setting work.

1 is a block diagram showing the configuration of a shape measuring device according to one embodiment of the present invention; FIG. FIG. 2 is a schematic diagram showing the configuration of a measuring section of the shape measuring apparatus of FIG. 1; 2 is an external perspective view of a measuring section of the shape measuring apparatus of FIG. 1; FIG. FIG. 4 is a diagram for explaining the configuration of the rotation unit and attachment and detachment of the rotation unit to and from the stage; FIG. 4 is an external perspective view for explaining the details of the configuration of the holding portion; FIG. 4 is an external perspective view for explaining the details of the configuration of the holding portion; FIG. 4 is an external perspective view for explaining the details of the configuration of the holding portion; 2 is a diagram for explaining a preferable movable stroke range in the Z direction of the stage of FIG. 1; FIG. 2 is a diagram for explaining a preferable movable stroke range in the Z direction of the stage of FIG. 1; FIG. 2 is a diagram for explaining a preferable movable stroke range in the Z direction of the stage of FIG. 1; FIG. It is a figure for demonstrating the principle of a triangulation ranging method. FIG. 5 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by moving the upper surface of the stage in the XY directions; FIG. 10 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by moving the upper surface of the stage in the Z direction; FIG. 5 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by rotating a measurement object around a rotation axis using a rotation unit; FIG. 4 is a diagram for explaining a first calibration function; FIG. FIG. 11 is a diagram for explaining a second calibration function; FIG. FIG. 10 is a diagram for explaining an example of correcting three-dimensional shape data using only the displacement of the rotation axis at the position of the second marker; FIG. 11 is a diagram for explaining a third calibration function; FIG. 2 is a flow chart showing a procedure for measuring the shape of an object using the shape measuring apparatus of FIG. 1; 2 is a flow chart showing a procedure for measuring the shape of an object using the shape measuring apparatus of FIG. 1; 4 is a flow chart showing a procedure for setting a measurement region for shape measurement of a measurement object that involves rotation; FIG. 10 is a diagram showing an example of a basic measurement screen displayed on the display section when the power of the shape measuring apparatus is turned on without the rotating unit attached to the stage. FIG. 23 is a diagram showing an example of an area setting screen displayed on the display unit when the area setting button in FIG. 22 is operated; FIG. 10 is a diagram showing an example of a basic measurement screen displayed on the display section with the rotating unit attached to the stage; FIG. 25 is a diagram for explaining the operation of the shape measuring device that is executed in response to the operation of the box portion button of FIG. 24; FIG. 25 is a diagram showing an example of an area setting screen displayed on the display unit when the box portion button in FIG. 24 is operated; FIG. 25 is a diagram showing an example of an area setting screen displayed on the display unit when the box perimeter button in FIG. 24 is operated; FIG. 25 is a diagram showing an example of a region setting screen displayed on the display unit when the axis button of FIG. 24 is operated; FIG. 25 is a diagram showing an example of a sub-display area displayed on the display unit when the detailed rotation button in FIG. 24 is operated; FIG. 29 is a diagram showing an example of a sub-display area displayed on the display unit when the edit button in FIGS. 26 to 28 is operated; FIG. FIG. 31 is a diagram showing an example of a region setting screen displayed on the display unit when a first calibration check box in FIG. 30 is checked; FIG. 31 is a diagram showing an example of a region setting screen displayed on the display unit when a second calibration check box in FIG. 30 is checked; FIG. 33 is a diagram showing an example of a region setting screen displayed on the display unit when a marker reversal check box in FIG. 32 is checked; FIG. 10 is a diagram showing an example of a region setting screen displayed on the display section with new measurement regions set for the first marker and the second marker; FIG. 4 is an external perspective view showing an example of shape measurement of a measurement object using a rotating unit; FIG. 36 is a diagram showing an example of a three-dimensional shape image based on all three-dimensional shape data obtained by the shape measurement of FIG. 35; FIG. 37 is a diagram obtained by removing a three-dimensional shape image corresponding to the upper surface of the stage from the three-dimensional shape image of FIG. 36; 2 is a block diagram showing a functional configuration of a CPU in FIG. 1; FIG. 4 is a flowchart showing an example of shape measurement processing executed by a CPU; 4 is a flowchart showing an example of shape measurement processing executed by a CPU; 4 is a flowchart showing an example of measurement area setting processing executed by a CPU; 4 is a flowchart showing an example of measurement area setting processing executed by a CPU; FIG. 10 is a diagram showing an example of a region setting screen capable of accepting whether or not to set the measurement range of the measurement object in the Z direction; FIG. 5 is a diagram showing an example of a region setting screen for setting a measurement range in the Z direction of a measurement object; FIG. 4 is a diagram for explaining a function of determining interference between a measurement object and a stage; It is a figure showing the example of composition of the rotation unit concerning other embodiments.

A three-dimensional shape measuring apparatus according to an embodiment of the present invention will be described below with reference to the drawings. In addition, in the following description, the three-dimensional shape measuring device is abbreviated as a shape measuring device.

[1] Configuration of Shape Measuring Apparatus FIG. 1 is a block diagram showing the configuration of a shape measuring apparatus according to an embodiment of the present invention. FIG. 2 is a schematic diagram showing the configuration of the measuring section of the shape measuring device 500 of FIG. FIG. 3 is an external perspective view of the measuring section of the shape measuring device 500 of FIG.

As shown in FIG. 1 , the shape measuring device 500 includes a measurement section 100 , a PC (personal computer) 200 , a control section 300 and a display section 400 . The measuring section 100 is, for example, a microscope, and includes a plurality of light projecting sections 110A and 110B, a light receiving section 120, an illumination light output section 130, a stage 140, a control board 150 and a rotating unit 190. As shown in FIG. 2, each light projection section 110A, 110B includes a measurement light source 111, a pattern generator 112, a plurality of lenses 113, 114, 115, an aperture 116 and a plurality of folding mirrors 117, 118. FIG. Light receiving unit 120 includes a plurality of cameras 121A, 121B, a plurality of lenses 122, 123A, 123B, a half mirror 124, and diaphragms 125A, 125B.

In the measurement section 100, a measurement space 101 in which the shape of the measurement object S can be measured is determined based on the positional relationship between the light projection sections 110A and 110B and the light reception section 120. FIG. In FIGS. 2 and 3 the measurement space 101 is indicated by a dashed line. A portion of the upper surface 141 s of the stage 140 is positioned in the measurement space 101 . The measurement object S is arranged in the measurement space 101 by placing the measurement object S on the upper surface 141 s of the stage 140 or by holding the measurement object S by a rotation unit 190 which will be described later.

Here, in the measurement unit 100 of FIGS. 2 and 3, the two directions orthogonal to each other within the upper surface 141s of the stage 140 are defined as the X direction and the Y direction, and indicated by arrows X and Y, respectively. The X direction is a direction parallel to the front-rear direction of the measurement unit 100 , and the Y direction is a direction parallel to the left-right direction of the measurement unit 100 . A direction orthogonal to the upper surface 141s of the stage 140 is defined as a Z direction and indicated by an arrow Z. As shown in FIG.

As shown in FIG. 3, stage 140 is provided on base 990 . A post 991 is provided to extend upward from the base 990 . An optical system support 992 is attached to the upper end of the post 991 . The optical system supporter 992 supports the light receiving section 120 so as to be positioned above the stage 140 . Also, the optical system supporter 992 supports the two light projecting sections 110A and 110B so as to be positioned obliquely above the stage 140, respectively. The two light projection units 110A and 110B are arranged side by side in the X direction. More specifically, the two light projecting sections 110A and 110B are arranged symmetrically across a plane that includes the optical axis ROA of the light receiving section 120 and is perpendicular to the X direction. The two light projecting sections 110A and 110B and the light receiving section 120 are housed in a head casing 160 (FIGS. 8 to 10) described later while being supported by the optical system support 992. FIG.

The measurement light source 111 of each of the light projection units 110A and 110B is, for example, a halogen lamp that emits white light. The measurement light source 111 may be another light source such as a white LED (light emitting diode) that emits white light.

As shown in FIGS. 2 and 3, the light emitted from the measurement light source 111 is properly collected by the lens 113 and then reflected by the folding mirror 117 to enter the pattern generator 112 . The pattern generator 112 is, for example, a DMD (digital micromirror device). The pattern generator 112 may be a transmissive LCD (liquid crystal display), a reflective LCD, a LCOS (Liquid Crystal on Silicon), or a mask. The pattern generation unit 112 generates a light flux (hereinafter referred to as pattern light) having a preset pattern for shape measurement and a preset intensity (brightness) from the incident light, and generates pattern light. is emitted from the pattern exit surface 112S (FIG. 3).

The pattern light emitted by the pattern generator 112 is magnified by a plurality of lenses 114 and 115 and an aperture 116 , reflected by a folding mirror 118 , and irradiated onto the measurement object S on the stage 140 . In this embodiment, a plurality of lenses 114 and 115 and a diaphragm 116 constitute a double telecentric optical system TT (FIG. 3).

In the light receiving section 120 , the pattern light reflected upward from the stage 140 by the measurement object S enters the lens 122 of the light receiving section 120 . Part of the pattern light incident on the lens 122 is transmitted through the half mirror 124, condensed and imaged by the lens 123A and the diaphragm 125A, and received by the camera 121A. The remainder of the pattern light incident on lens 122 is reflected by half mirror 124, condensed and imaged by a plurality of lenses 123B and diaphragm 125B of light receiving unit 120, and received by camera 121B.

In light-receiving unit 120 according to the present embodiment, lenses 122 and 123A and diaphragm 125A constitute one double-telecentric optical system corresponding to camera 121A. Lenses 122, 123B and diaphragm 125B constitute another bilateral telecentric optical system corresponding to camera 121B.

Each camera 121A, 121B is, for example, a CCD (charge-coupled device) camera including an imaging element 121a and a lens. The imaging device 121a is, for example, a monochrome CCD (charge-coupled device). The imaging device 121a may be another imaging device such as a CMOS (Complementary Metal Oxide Semiconductor) image sensor. Each pixel of the imaging device 121a outputs an analog electrical signal (hereinafter referred to as a light reception signal) corresponding to the amount of light received to the control substrate 150 (FIG. 1).

In this example, the illumination light output unit 130 emits light with a red wavelength, light with a green wavelength, and light with a blue wavelength to the measurement object S in a time division manner. According to this configuration, a color image of the measuring object S can be picked up by the light receiving section 120 using a monochrome CCD.

Note that the magnification of the lens 123A is lower than that of the lens 123B. Alternatively, the magnification of the lens of camera 121A is lower than the magnification of the lens of camera 121B. Therefore, camera 121A is used as a low-magnification camera, and camera 121B is used as a high-magnification camera. The user can select either one of the low-magnification camera and the high-magnification camera as the camera used for observing and measuring the shape of the object S by operating the operation unit 250, which will be described later.

The control board 150 is mounted with an A/D converter (analog/digital converter) and FIFO (First In First Out) memory (not shown). The received light signals output from the cameras 121A and 121B are sampled at regular sampling intervals and converted into digital signals by the A/D converter of the control board 150 under the control of the control unit 300 . Digital signals output from the A/D converter are sequentially stored in a FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data.

As shown in FIG. 1, the PC 200 includes a CPU (Central Processing Unit) 210 , a ROM (Read Only Memory) 220 , a working memory 230 , a storage device 240 and an operation section 250 . Operation unit 250 also includes a keyboard and a pointing device. A mouse, a joystick, or the like is used as the pointing device.

A system program is stored in the ROM 220 . The working memory 230 consists of RAM (random access memory) and is used for processing various data. The storage device 240 consists of a hard disk or the like. The storage device 240 stores a shape measurement program for measuring the shape of the object S to be measured. Also, the storage device 240 is used to store various data relating to the shape measurement of the object S to be measured.

CPU 210 executes a shape measurement program stored in storage device 240 . Thereby, CPU 210 generates image data based on the pixel data provided from control board 150 . Further, the CPU 210 performs various processes on the generated image data using the working memory 230 and causes the display unit 400 to display an image based on the image data. Further, the CPU 210 gives driving pulses to the stage driving section 146 (to be described later) and the rotation driving section 192 (to be described later). A specific function exhibited by the execution of the shape measurement program by the CPU 210 will be described later. The display unit 400 is configured by, for example, an LCD panel or an organic EL (electroluminescence) panel.

Stage 140 includes an XY stage 141 and a Z stage 142 . The XY stage 141 has an upper surface 141s and an X-direction movement mechanism and a Y-direction movement mechanism. The X direction moving mechanism is a mechanism for moving the upper surface 141s in the X direction. The Y direction moving mechanism is a mechanism for moving the upper surface 141s in the Y direction. The Z stage 142 has a Z direction movement mechanism for moving the upper surface 141s in the Z direction. Note that the stage 140 may include a θ stage or a tilt stage. The θ stage is, for example, a stage having a rotatable mechanism around an axis perpendicular to the upper surface 141s. The tilt stage is a stage having a tiltable mechanism on the basis of an axis parallel to the upper surface 141s.

Here, a plane positioned at the focal point of the light receiving section 120 and perpendicular to the optical axis ROA of the light receiving section 120 is called a focal plane of the light receiving section 120 . As shown in FIGS. 2 and 3, the relative positional relationship among the light projecting units 110A and 110B, the light receiving unit 120, and the stage 140 is such that the optical axis of the light projecting unit 110A directed from the light projecting unit 110A to the upper surface 141s of the stage 140 is TOA1, the optical axis TOA2 of light projecting unit 110B extending from light projecting unit 110B toward upper surface 141s of stage 140, and the optical axis ROA of light receiving unit 120 extending from upper surface 141s of stage 140 toward light receiving unit 120 are the focal planes of light receiving unit 120. set to intersect each other.

A plane including the focal point of the light projecting unit 110A and parallel to the XY directions is called the focal plane of the light projecting unit 110A, and a plane including the focal point of the light projecting unit 110B and parallel to the XY directions is called the focal plane of the light projecting unit 110B. call. In this case, each of the light projecting sections 110A and 110B is configured such that the focal plane of the light projecting section 110A and the focal plane of the light projecting section 110B intersect at a position including the focus of the light receiving section 120. FIG.

With the configuration described above, in the measurement unit 100, the irradiation area of the measurement light from the light projection unit 110A, the irradiation area of the measurement light from the light projection unit 110B, and the imaging area (imaging field of view) of the light receiving unit 120 overlap. space is formed. The overlapping space of these three regions is measurement space 101 . Note that the size of the measurement space 101 differs according to the magnification of the camera selected by the user (high magnification or low magnification). The size of the measurement space 101 when low magnification is selected is larger than the size of the measurement space 101 when high magnification is selected.

A stepping motor is used for each of the X-direction movement mechanism, Y-direction movement mechanism, and Z-direction movement mechanism of the stage 140 . As shown in FIG. 1 , the measuring section 100 includes a stage operating section 145 and a stage driving section 146 as components attached to the stage 140 . The X-direction movement mechanism, Y-direction movement mechanism, and Z-direction movement mechanism of the stage 140 are driven by the stage operation section 145 or the stage drive section 146 in FIG.

The user can move the upper surface 141 s of the stage 140 relative to the light receiving section 120 in the X direction, the Y direction, or the Z direction by manually operating the stage operation section 145 . The stage drive unit 146 supplies current to each stepping motor of the stage 140 based on the drive pulse given from the PC 200, thereby moving the upper surface 141s of the stage 140 relative to the light receiving unit 120 in the X direction, Y direction or Z direction. move in the direction

An encoder is attached to the stepping motor used for each of the X-direction movement mechanism, Y-direction movement mechanism, and Z-direction movement mechanism of the stage 140 . An output signal of each encoder is given to the CPU 210, for example. The CPU 210 changes the position of the upper surface 141s of the stage 140 in the X direction (X position), the position in the Y direction (Y position), or the position in the Z direction (Z position) based on the signals given from the encoders of the stage 140. Amount can be calculated.

In the stage 140, the XY stage 141 has a reference position set in advance in the XY directions. The reference position is the position of the XY stage 141 when the center of the upper surface 141s is positioned on the optical axis ROA of the light receiving section 120, for example. The reference position may be determined such that the entire measurement space 101 overlaps the top surface 141s of the stage 140 in plan view. Therefore, if the measurement space 101 is located on the top surface 141s of the stage 140, the reference position is the position of the XY stage 141 when the portion of the top surface 141s excluding the center is located on the optical axis ROA of the light receiving unit 120. There may be.

As shown in FIGS. 2 and 3, the XY stage 141 according to this embodiment has a rectangular plate shape extending in the X direction. A rotation unit 190 is provided at the end of the XY stage 141 in the X direction. The rotation unit 190 is configured to be attachable to and detachable from the stage 140 .

4A and 4B are diagrams for explaining the configuration of the rotation unit 190 and attachment and detachment of the rotation unit 190 to and from the stage 140. FIG. FIG. 4(a) shows a plan view of the rotation unit 190. As shown in FIG. A plan view of the XY stage 141 is shown in FIG. FIG. 4(c) shows a plan view of the XY stage 141 to which the rotating unit 190 is attached.

As shown in FIG. 4( a ), the rotation unit 190 includes a holding portion 191 and a rotation driving portion 192 . Rotation drive unit 192 has a configuration in which stepping motor sm and power supply unit pp are accommodated in a casing having a substantially rectangular parallelepiped shape. A stepping motor sm is used to rotate the holding portion 191 . A power supply unit pp supplies power to the stepping motor sm. The casing of the rotary drive unit 192 has two end faces es1 and es2 facing each other in the longitudinal direction and two side faces ss1 and ss2 facing each other in the transverse direction.

The holding part 191 is a chuck configured to be able to hold the measurement object S by sandwiching the measurement object S between a pair of holding pieces 92 and 93 (FIGS. 5 to 7), which will be described later. provided to protrude. Further, the holding portion 191 is supported by the stepping motor sm of the rotation driving portion 192 so as to be rotatable around a rotation axis perpendicular to the side surface ss1. Details of the holding portion 191 will be described later. A holding dial 195 for adjusting the distance between a pair of holding pieces 92 and 93 (FIGS. 5 to 7), which will be described later, is provided on the other side surface ss2 of the rotation driving portion 192. As shown in FIG.

Attachment portions 199 for attaching the rotation unit 190 onto the XY stage 141 are provided at the lower ends of both end faces es1 and es2 of the rotation drive portion 192 . The mounting portion 199 is formed with a through hole into which a screw can be inserted. Further, a cable 193 is provided in the rotation driving portion 192 so as to extend outward from the power supply portion pp in the casing through one end surface es2. A connector 194 is provided at the tip of the cable 193 . The cable 193 and the connector 194 are used to supply power to the power supply section pp from a rotation unit board (described later) provided inside the XY stage 141 and to exchange signals between the rotation unit board and the power supply section pp. Used.

As shown in FIG. 4B, the upper surface 141s of the XY stage 141 has a rectangular shape extending in the X direction. Two screw holes 141h respectively corresponding to the two mounting portions 199 of the rotating unit 190 are formed at one end of the upper surface 141s in the X direction. In this example, the XY stage 141 is assumed to be at the reference position. In this case, the outer edge of the measurement space 101 surrounds the center of the upper surface 141s of the XY stage 141 in plan view.

Inside the XY stage 141, a control board (hereinafter referred to as a rotation unit board) is provided for supplying power to the power supply section pp of the rotation unit 190 and for controlling the operation of the rotation drive section 192. . A connector 141 c for electrically connecting the rotation unit board and the rotation unit 190 is provided on one side of the XY stage 141 facing the front of the measurement unit 100 .

As shown in FIG. 4(c), a rotating unit 190 is attached on the XY stage 141. As shown in FIG. During this mounting, the two mounting portions 199 of the rotating unit 190 are positioned over the two screw holes 141 h of the XY stage 141 . A screw is attached to the screw hole 141h through the through hole of each attachment portion 199. As shown in FIG. Thereby, the rotating unit 190 is fixed at a predetermined position on the upper surface 141 s of the XY stage 141 . With the XY stage 141 at the reference position, the rotation unit 190 is positioned in a space separate from the measurement space 101 . In this case, since the rotation unit 190 is not positioned in the measurement space 101, the rotation unit 190 prevents the measurable range of the measurement object S from being restricted.

Furthermore, when the rotation unit 190 is attached to the XY stage 141 , the connector 194 provided on the cable 193 is connected to the connector 141 c of the XY stage 141 . This enables power supply from the XY stage 141 to the rotation unit 190 . Further, the rotation drive section 192 of the rotation unit 190 is controlled by the CPU 210 via the rotation unit substrate of the XY stage 141 .

An encoder is attached to the stepping motor sm of the rotary drive unit 192 . An output signal of the encoder is given to CPU 210 by electrically connecting rotating unit 190 and XY stage 141 . The CPU 210 can calculate the angular position (rotation angle) of the holding portion 191 in the rotation direction based on the signal given from the encoder of the rotation unit 190 .

Here, the details of the holding portion 191 will be described. 5 to 7 are external perspective views for explaining the details of the configuration of the holding portion 191. FIG. As shown in FIG. 5, the holding portion 191 includes a rotation support shaft 91, a pair of holding pieces 92 and 93, and an opening/closing mechanism (not shown).

The rotation support shaft 91 is connected to the stepping motor sm of the rotation drive unit 192 and supported rotatably around the central axis of the rotation support shaft 91 . The pair of holding pieces 92 and 93 each have a semi-cylindrical shape, and are provided so as to sandwich the tip portion of the rotation support shaft 91 and to form a single column with the pair of holding pieces 92 and 93. . The opening/closing mechanism (not shown) changes the distance between the pair of holding pieces 92 and 93 according to the operation of the holding dial 195 (FIG. 4(a)) by the user, as indicated by the white arrows in FIG. As a result, as shown in FIG. 6, the holding portion 191 is configured to be able to hold (grip) the measurement object S by sandwiching a portion of the measurement object S between the pair of holding pieces 92 and 93. ing.

A plurality of holes 92h, 93h are formed in end faces 92e, 93e located at the tips of the holding pieces 92, 93, respectively. A rod-shaped member 94 can be inserted into these plurality of holes 92h and 93h. By selectively inserting a predetermined number of rod-shaped members 94 into the plurality of holes 92h and 93h of the holding pieces 92 and 93, the measurement object S is held using the plurality of rod-shaped members 94 as shown in FIG. It is also possible to

By arranging the measurement object S held by the holding part 191 in the measurement space 101, the three-dimensional shape of the upward facing portion of the measurement object S located in the measurement space 101 can be measured.

According to the configuration of the holding portion 191 described above, the measurement object S is held in a cantilever manner, so the portion of the measurement object S held by the holding portion 191 is reduced. Therefore, by rotating the measurement object S within the measurement space 101, the three-dimensional shape of a wider range of the surface of the measurement object S can be measured.

By the way, the range of the stage 140 that can be vertically moved by the Z-direction moving mechanism (hereinafter referred to as the movable stroke range) is preferably determined based on the positional relationship between the stage 140 and the light receiving section 120, for example. 8 to 10 are diagrams for explaining a preferable movable stroke range in the Z direction of stage 140 in FIG.

8 to 10 show schematic front views of the measurement unit 100. FIG. 8 to 10, the head casing 160 housing the light projecting units 110A and 110B and the light receiving unit 120 is indicated by a two-dot chain line, and the focal plane 120F of the light receiving unit 120 is indicated by a thick dotted line. Furthermore, the rotation axis RA passing through the center of the rotation support shaft 91 (FIGS. 5 to 7) in the rotation unit 190 is indicated by a dashed line. In this example, the lens 122 ( FIG. 2 ) of the light receiving section 120 is positioned at the lower end of the head casing 160 . Further, in this example, the rotation axis RA extends parallel to the X direction with the rotation unit 190 attached to the stage 140 .

As shown in FIG. 8, the stage 140 is preferably configured to be arranged at a height position p1 where at least the upper surface 141s is positioned on the focal plane 120F of the light receiving section 120. As shown in FIG. In this case, the rotation unit 190 is preferably designed such that the dimension (height) dh in the Z direction is smaller than the working distance WD from the lens 122 of the light receiving section 120 to the focal plane 120F.

Next, as shown in FIG. 9, the stage 140, with the rotating unit 190 attached, can be arranged at a height position p2 where at least the rotating unit 190's rotation axis RA is positioned on the focal plane 120F of the light receiving unit 120. is preferably configured to In order to realize the arrangements shown in the examples of FIGS. 8 and 9, the movable stroke range RM in the Z direction of the stage 140 in FIG. must be defined so that the position can be adjusted between

Here, the distance from the top surface 141s to the rotation axis RA in the Z direction is defined as a reference distance RD. In this case, as shown in FIG. 10, the stage 140, with the rotating unit 190 attached, is arranged at a height position where the focal plane 120F is separated from the upper surface 141s by a distance twice the reference distance RD. It is more preferable to be configured so that it can be arranged at the height position p3.

According to such a configuration, shape measurement can be performed over a wide range for the measurement object S that does not interfere with the upper surface 141s during rotation about the rotation axis RA. Therefore, the movable stroke range RM in the Z direction of the stage 140 in FIG. It is preferably defined to be positionally adjustable.

As shown in FIG. 1, the control unit 300 includes a control board 310 and an illumination light source 320. As shown in FIG. A CPU (not shown) is mounted on the control board 310 . The CPU of the control board 310 controls the light projecting sections 110A and 110B, the light receiving section 120 and the control board 150 based on commands from the CPU 210 of the PC 200 .

Illumination light source 320 includes, for example, three LEDs that emit red, green, and blue light. By controlling the brightness of the light emitted from each LED, light of any color can be generated from the illumination light source 320 . Light emitted from the illumination light source 320 (hereinafter referred to as illumination light) is output from the illumination light output section 130 of the measurement section 100 through a light guide member (light guide). Note that the illumination light source 320 may be provided in the measurement unit 100 without providing the illumination light source 320 in the control unit 300 . In this case, the measurement unit 100 is not provided with the illumination light output unit 130 .

Illumination light output section 130 in FIG. 2 has an annular shape and is arranged above stage 140 so as to surround light receiving section 120 . As a result, the illumination light output unit 130 irradiates the measurement object S with the illumination light so as not to generate a shadow.

[2] Three-dimensional shape data indicating the three-dimensional shape of the object to be measured (1) Shape measurement of the object to be measured by triangulation The measuring unit 100 measures the shape of the object S by triangulation. . FIG. 11 is a diagram for explaining the principle of the triangulation method. As shown in FIG. 11, for example, an angle γ between the optical axis of the light beam emitted from the light projecting portion 110A and the optical axis of the reflected light incident on the light receiving portion 120 (the optical axis of the light receiving portion 120) is set in advance. be. The angle γ is greater than 0 degrees and less than 90 degrees.

When the measurement object S is not placed on the stage 140 , the light beam emitted from the light projecting section 110 A is reflected by the point O on the upper surface 141 s of the stage 140 and enters the light receiving section 120 . On the other hand, when the measurement target S is placed on the stage 140 , the light beam emitted from the light projecting section 110 A is reflected by the point A on the surface of the measurement target S and enters the light receiving section 120 .

Assuming that the distance in the X direction between the points O and A is d, the height h of the point A of the measuring object S with respect to the upper surface 141s of the stage 140 is given by h=d÷tan(γ). The CPU 210 of the PC 200 in FIG. 1 measures the distance d between the point O and the point A in the X direction based on the pixel data of the measurement object S given by the control board 150 . The CPU 210 also calculates the height h of the point A on the surface of the measurement object S based on the measured distance d. By calculating the heights of all points on the surface of the measurement object S, the three-dimensional shape of the measurement object S is measured.

In order to irradiate light onto all points on the surface of the measurement object S during shape measurement using the triangulation method, pattern light having various patterns is emitted from the light projection units 110A and 110B shown in FIG. 1 toward the stage 140. They are emitted sequentially. For example, striped pattern light having a linear cross section parallel to the Y direction and aligned in the X direction is emitted from each of the light projection units 110A and 110B a plurality of times while its spatial phase is changed. In addition, a code-like pattern light having a linear cross section parallel to the Y direction and having bright portions and dark portions aligned in the X direction is projected while the bright portions and dark portions are changed in the form of a gray code. It is emitted multiple times from the portions 110A and 110B.

In the CPU 210 (FIG. 1), three-dimensional shape data representing the three-dimensional shape of the measuring object S is generated based on the image data of the measuring object S onto which the predetermined pattern light is projected. The three-dimensional shape data includes position data on the surface of the object S to be measured. In the measuring section 100, a three-dimensional coordinate system (hereinafter referred to as a device coordinate system) having a unique positional relationship with respect to the light receiving section 120 is defined. The apparatus coordinate system in this example includes X, Y and Z axes parallel to the X, Y and Z directions. The position data represents coordinates in the device coordinate system, for example. In the following description, the image of the measuring object S displayed based on the three-dimensional shape data is called a three-dimensional shape image.

(2) Synthesis of a plurality of three-dimensional shape data in the XY directions When the measurement target S is placed on the upper surface 141s of the stage 140 and the measurement target S does not fit within the measurement space 101 in the XY directions, , only a part of the upper surface of the measurement object S is irradiated with the pattern light. Therefore, three-dimensional shape data over a wide range of the surface of the measurement object S cannot be obtained.

Therefore, when the upper surface of the measurement object S does not fit within the measurement space 101 in the XY directions, the upper surface 141 s of the stage 140 is moved in the XY directions relative to the light receiving unit 120 so that the measurement object S may be imaged. In this case, it is possible to obtain a plurality of three-dimensional shape data respectively corresponding to a plurality of portions of the measurement object S, and synthesize the obtained plurality of three-dimensional shape data.

FIG. 12 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by moving the upper surface 141s of the stage 140 in the XY directions. For example, as shown in FIG. 12( a ), the user places the object S to be measured on the stage 140 . Also, after the position and orientation of the measuring object S are adjusted on the stage 140, the first three-dimensional shape data is generated by imaging using the pattern light. An example of the three-dimensional shape image acquired by this is shown in FIG.12(e). In addition, in the three-dimensional shape images shown in FIGS. 12(e) to (h) and FIGS. 13(c), (d) and FIGS. is a virtual representation of the outline of the

As shown in FIG. 12A, in this example, only a portion of the measurement object S in the XY directions is placed within the measurement space 101 when the first three-dimensional shape data is generated. Therefore, the three-dimensional shape image shown in FIG. 12( e ) lacks a plurality of portions in the XY directions of the upper surface of the measurement object S.

Therefore, as shown in FIGS. 12(b) to 12(d), the stage 140 is arranged such that a plurality of portions of the measurement object S that are not represented by the first three-dimensional shape data are sequentially arranged in the measurement space 101. is moved in the XY directions. Also, every time each part of the measurement space 101 is arranged in the measurement space 101, an image is captured using the pattern light, and the second to fourth three-dimensional shape data are generated. Three-dimensional shape images corresponding to the second to fourth three-dimensional shape data are shown in FIGS. 12(f) to (h). By repeating the movement of the stage 140 in the XY directions and the imaging of the measurement object S in this manner, a plurality of three-dimensional shape data corresponding to a plurality of portions of the upper surface of the measurement object S are generated. . By synthesizing a plurality of generated three-dimensional shape data, three-dimensional shape data covering a wide range of the surface of the measurement object S is generated. In the following description, synthesis for enlarging the target range of shape measurement of the measurement object S in the XY directions is called planar direction synthesis.

(3) Synthesis of a plurality of three-dimensional shape data in the Z direction With the measurement object S placed on the upper surface 141s of the stage 140, the upper surface of the measurement object S in the Z direction is within the measurement space 101 (light receiving unit 120), the light receiving unit 120 is focused only on a part of the upper surface of the object S to be measured. Therefore, three-dimensional shape data over a wide range of the surface of the measurement object S cannot be obtained.

Therefore, when the upper surface of the measurement object S cannot be accommodated in the measurement space 101 in the Z direction, the upper surface 141s of the stage 140 is moved in the Z direction relative to the light receiving unit 120 so that the measurement object S may be imaged. In this case, it is possible to obtain a plurality of three-dimensional shape data respectively corresponding to a plurality of portions of the measurement object S, and synthesize the obtained plurality of three-dimensional shape data.

FIG. 13 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by moving the upper surface 141s of the stage 140 in the Z direction. For example, as shown in FIG. 13(a), the user places the measurement object S on the stage 140, and the first three-dimensional shape data is generated by performing imaging using the pattern light. . An example of the three-dimensional shape image acquired by this is shown in FIG.13(c).

As shown in FIG. 13A, in this example, only a portion of the upper surface of the measurement object S in the Z direction is arranged within the measurement space 101 when the first three-dimensional shape data is generated. Therefore, the three-dimensional shape image shown in FIG. 13(c) lacks the uppermost end portion of the measuring object S in the Z direction.

Therefore, as shown in FIG. 13B, the upper surface 141s of the stage 140 is moved in the Z direction so that the portion of the measurement object S that is not represented by the first three-dimensional shape data is arranged in the measurement space 101. be moved. Further, imaging is performed using pattern light, and second three-dimensional shape data is generated. A three-dimensional shape image corresponding to the second three-dimensional shape data is shown in FIG. 13(d).

By repeating the movement of the stage 140 in the Z direction and the imaging of the measurement object S in this way, a plurality of three-dimensional shape data corresponding to a plurality of portions of the measurement object S are generated. By synthesizing a plurality of generated three-dimensional shape data, three-dimensional shape data covering a wide range of the surface of the measurement object S is generated. In the following description, synthesis for enlarging the target range of shape measurement of the measurement object S in the Z direction is called height direction synthesis.

(4) Synthesis of a plurality of three-dimensional shape data in the rotation direction Even if the measurement object S held by the rotation unit 190 is arranged in the measurement space 101, the measurement object not facing the direction of the light receiving unit 120 The pattern light reflected by the object S does not enter the light receiving section 120 . Therefore, when measuring the shape of the measurement object S held by the rotation unit 190, a plurality of portions of the measurement object S may be imaged by rotating the measurement object S around the rotation axis RA. In this case, it is possible to obtain a plurality of three-dimensional shape data respectively corresponding to a plurality of portions of the measurement object S, and synthesize the obtained plurality of three-dimensional shape data.

FIG. 14 is a diagram for explaining an example of generating a plurality of three-dimensional shape data by rotating the measurement object S around the rotation axis RA using the rotation unit 190. FIG. For example, as shown in FIG. 14( a ), the user attaches the measuring object S to the holding portion 191 of the rotating unit 190 . In FIGS. 14A to 14C, the holding portion 191 holding the measurement object S is schematically indicated by a chain double-dashed line.

Alignment is performed so that the measurement object S is positioned within the measurement space 101 while the measurement object S is held by the rotation unit 190 . Furthermore, the first three-dimensional shape data is generated by performing imaging using the pattern light. An example of the three-dimensional shape image acquired by this is shown in FIG.14(d).

The measurement object S used in this example has a substantially cylindrical shape extending in one direction, and one end of the measurement object S is held so that the axis of the measurement object S coincides with the rotation axis RA. It is held in the portion 191 . In addition, black dots are added to the end portions of the measurement object S in this example so that the rotation state of the measurement object S can be easily understood.

As shown in FIG. 14( a ), when the first three-dimensional shape data is generated, only a portion of the outer peripheral surface of the measurement object S facing toward the light receiving unit 120 is imaged by the light receiving unit 120 . Therefore, the three-dimensional shape image shown in FIG. 14(d) lacks a relatively wide area on the outer peripheral surface of the object S to be measured.

Therefore, as shown in FIGS. 14(b) and 14(c), a plurality of portions of the outer peripheral surface of the measurement object S that are not represented by the first three-dimensional shape data are arranged in advance so as to sequentially face the light receiving unit 120. The rotation unit 190 rotates the measurement object S at an angular interval (predetermined angular pitch) that is an integral multiple of the determined angle. Also, every time the measurement object S rotates by a predetermined angle, an image is captured using the pattern light, and second and third three-dimensional shape data are generated. Three-dimensional shape images corresponding to the second and third three-dimensional shape data are shown in FIGS. 14(e) and (f).

By repeating the rotation of the measurement object S by a predetermined angle and the imaging of the measurement object S in this manner, a plurality of three-dimensional shape data corresponding to a plurality of portions of the outer peripheral surface of the measurement object S are obtained. generated. By synthesizing a plurality of generated three-dimensional shape data, three-dimensional shape data covering a wide range of the surface of the measurement object S (in this example, the entire outer peripheral surface) is generated. In the following description, synthesis for enlarging the target range of shape measurement of the measurement object S in the rotation direction with respect to the rotation axis RA is referred to as rotation direction synthesis.

[3] Calibration function when performing rotation direction synthesis (1) Overview of calibration function As described above, when performing rotation direction synthesis, the measurement object S is at a predetermined angle with respect to the rotation axis RA It rotates at a predetermined angular pitch from a position (hereinafter referred to as a reference angular position). In addition, the three-dimensional shape data of the measuring object S is generated while it is in the reference angular position, and the three-dimensional shape data of the measuring object S is generated each time it is rotated at a predetermined angular pitch.

Here, if the rotation axis RA of the rotation unit 190 deviates from the design position defined by the device coordinate system due to changes in the temperature environment or use of the measurement unit 100 over time, accurate three-dimensional shape data can be obtained. can't get Therefore, the shape measuring apparatus 500 according to the present embodiment, when measuring the shape of the measurement object S using rotation direction synthesis, shifts the generated three-dimensional shape data from the device coordinate system (shift amount and shift direction ) to offset the first, second and third calibration functions. The first, second and third calibration functions will be described in order.

(2) First Calibration Function FIG. 15 is a diagram for explaining the first calibration function. FIG. 15(a) shows a side view of the holding portion 191 of the rotating unit 190 viewed in the Y direction. As shown in FIG. 15(a), in the holding portion 191, a portion of the rotation support shaft 91 positioned between the rotation driving portion 192 and the holding pieces 92 and 93 serves as the first marker M1. Used for calibration function. The first marker M1 has a cylindrical outer peripheral surface and is provided so that its center is positioned on the rotation axis RA of the rotation unit 190 . The dimensions of the outer peripheral surface of the first marker M1 are known and stored in the storage device 240 of FIG. 1, for example.

In FIG. 15(a), it is assumed that the rotation axis RA of the rotation unit 190 is displaced in parallel from the ideal rotation axis (hereinafter referred to as the design rotation axis) DRA that should exist in the device coordinate system. do. In this case, in order to obtain accurate three-dimensional shape data of the measurement object S, it is necessary to calculate the deviation sv between the design rotation axis DRA and the rotation axis RA.

Therefore, in the first calibration function, the shape of the outer peripheral surface of the first marker M1 is measured together with the measurement object S when measuring the shape of the measurement object S that is rotated. For example, when the measurement object S rotates around the rotation axis RA from the reference angular position at a pitch of 120°, the circumference of the first marker M1 along with the measurement object S is rotated at each of the angular positions of 0°, 120° and 240°. Three-dimensional shape data representing the surface is generated.

The three-dimensional shape data of the first marker M1 corresponding to each of the above three angles is, for example, a QQ line cross section (YZ plane orthogonal to the X direction) passing through the first marker M1 in FIG. has an arc shape at As described above, the dimensions of the outer peripheral surface of the first marker M1 are known. Therefore, as indicated by the thick solid line in FIG. 15B, according to the arc-shaped three-dimensional shape data indicating a part of the outer peripheral surface of the first marker M1, the center of the first marker M1 in the YZ plane CM1 can be calculated. Note that the circle indicated by the dashed-dotted line in FIG. 15(b) represents the three-dimensional shape data of the first marker M1 that should be originally generated based on the design rotation axis DRA.

The center of the first marker M1 is located on the rotation axis RA. Therefore, in the first calibration function, calculating the center of the first marker M1 on the specific YZ plane is equivalent to calculating the position of the rotation axis RA on the specific YZ plane.

The center CM1 of the first marker M1 on the three-dimensional shape data should essentially overlap the design rotation axis DRA on the YZ plane. However, when the actual rotation axis RA deviates from the design rotation axis DRA as described above, the center CM1 of the first marker M1 on the three-dimensional shape data does not overlap the design rotation axis DRA. Therefore, the deviation sv between the center CM1 of the first marker M1 on the three-dimensional shape data and the design rotation axis DRA is calculated.

In this case, as shown in FIG. 15(c), the three-dimensional shape data of the first marker M1 corresponding to each of the plurality of angular positions is corrected so that the deviation sv calculated at the angular position is canceled. By doing so, accurate three-dimensional shape data can be obtained. In other words, the three-dimensional shape data of the first marker M1 generated at each angular position is corrected so that the center CM1 of the first marker M1 on the three-dimensional shape data matches the design rotation axis DRA. , accurate three-dimensional shape data can be obtained.

Therefore, the three-dimensional shape data of the measuring object S generated together with the three-dimensional shape data of the first marker M1 is corrected so that the deviation sv calculated at each angular position is canceled. As a result, accurate three-dimensional shape data of the measuring object S can be obtained. As a result, when synthesizing three-dimensional shape data generated at a plurality of angular positions, it is possible to accurately measure the shape of the measurement object S over a wide range.

(3) Second calibration function FIG. 16 is a diagram for explaining the second calibration function. FIG. 16(a) shows a side view of the holding portion 191 of the rotating unit 190 viewed in the Y direction. In the example of FIG. 16(a), the rotation axis RA of the rotation unit 190 is tilted and deviated from the design rotation axis DRA. In this case, the deviation sv between the design rotation axis DRA and the rotation axis RA varies depending on the position in the X direction. Therefore, even if the three-dimensional shape data of the first marker M1 and the measurement object S are corrected by the first calibration function, depending on the part of the measurement object S, accurate three-dimensional shape data cannot be obtained.

Therefore, in the second calibration function, the second marker M2 is used so that accurate three-dimensional shape data can be obtained even when the actual rotation axis RA is inclined with respect to the design rotation axis DRA. As shown in the balloon in FIG. 16(b), the second marker M2 is composed of a large diameter portion M2a and a small diameter portion M2b. The large-diameter portion M2a and the small-diameter portion M2b each have a columnar shape and are integrally formed so as to be aligned along the axis.

A magnet is built in the large diameter portion M2a. Adhesiveness is imparted to the end surface of the large diameter portion M2a by providing an adhesive or an adhesive sheet. With such a configuration, the second marker M2 can be attached and detached at a desired position of the measurement object S made of a ferromagnetic material by magnetic force, and can be attached to and removed from the measurement object S made of a non-magnetic material by an adhesive force. can be attached and detached at any desired position.

In the second calibration function, for example, the second marker M2 is attached to the part of the measurement object S that is the most distant from the first marker M1. The dimensions of the outer peripheral surfaces of the large diameter portion M2a and the small diameter portion M2b of the second marker M2 are known and stored in the storage device 240 of FIG. 1, for example.

In this state, when measuring the shape of the rotating measuring object S, the measuring object S is rotated to a plurality of predetermined angular positions. Also, the shapes of the outer peripheral surfaces of the measurement object S, the first marker M1 and the second marker M2 are measured at each of the plurality of angular positions. At this time, the deviation sv between the design rotation axis DRA and the rotation axis RA in the Q1-Q1 line section passing through the first marker M1 in FIG. be done.

The second marker M2 is used, for example, to find the deviation sv between the design rotation axis DRA and the rotation axis RA in the Q2-Q2 line section passing through the second marker M2 in FIG. 16(b). Specifically, the second marker M2 corresponds to a plurality of predetermined angular positions so that the entire circumference of the large diameter portion M2a (or the small diameter portion M2b) is covered by the Q2-Q2 cross section. Generate three-dimensional shape data of a plurality of circular arcs. After that, at each of the plurality of angular positions, a plurality of arc-shaped three-dimensional shape data are synthesized so as to match the known dimensions of the large diameter portion M2a (or the small diameter portion M2b).

In this case, as shown in FIG. 16(c), it is possible to calculate the center CM2 of the second marker M2 when the second marker M2 is positioned at each of a plurality of angular positions on the Q2-Q2 cross section. . Thereby, the rotation center of the second marker M2, that is, the position of the rotation axis RA in the Q2-Q2 line section can be calculated. Therefore, the deviation sv between the calculated rotation axis RA and the design rotation axis DRA is calculated.

In this way, the deviation sv at the position of the Q1-Q1 line cross section and the deviation sv at the position of the Q2-Q2 line cross section which are separated from each other in the X direction are calculated. Accordingly, it is possible to appropriately calculate the correction amount of the measurement object S located between the first marker M1 and the second marker M2 based on the calculated two deviations sv. Therefore, more accurate three-dimensional shape data of the measurement object S can be obtained. As a result, when synthesizing three-dimensional shape data generated at a plurality of angular positions, it becomes possible to perform more accurate shape measurement of the measurement object S over a wide range.

As described above, according to the second calibration function, the deviation sv of the rotation axis at the position of the second marker M2 in the X direction is calculated. Therefore, depending on the shape of the measurement object S, the three-dimensional shape data may be corrected using only the deviation sv of the rotation axis at the position of the second marker M2. In the present embodiment, the second calibration function includes the function of correcting the three-dimensional shape data using only the deviation sv of the rotation axis at the position of the second marker M2. .

When correcting the three-dimensional shape data using only the deviation sv of the rotation axis at the position of the second marker M2, the second marker M2 is positioned between the measurement object S and the holding unit 191 in the X direction. may be arranged to be positioned

FIG. 17 is a diagram for explaining an example of correcting three-dimensional shape data using only the deviation sv of the rotation axis at the position of the second marker M2. As shown in FIG. 17, in this example, the small diameter portion M2b of the second marker M2 is held by the holding portion 191. As shown in FIG. For example, a disk-shaped measuring object S is attached to the end surface of the large diameter portion M2a of the second marker M2. The measuring object S in FIG. 17 does not have a longitudinal shape extending in one direction. Therefore, even when the three-dimensional shape data is corrected based only on the deviation sv calculated at the position of the second marker M2 adjacent to the measurement object S in the X direction, relatively highly accurate three-dimensional shape data can be obtained. be able to.

(4) Third Calibration Function In the third calibration function, calibration tools corresponding to the first marker M1 and the second marker M2 are not used. In the third calibration function, when measuring the shape of the rotating measurement object S, the rotational axis RA and A deviation sv from the design rotation axis DRA is calculated.

FIG. 18 is a diagram for explaining the third calibration function. FIG. 18(a) shows a cross section orthogonal to the X direction of the measurement object S held by the rotation unit 190. As shown in FIG. In the third calibration function, a plurality of angular positions are set so that the three-dimensional shape data of the portions of the measurement object S that overlap each other in the rotational direction are generated. Then, as indicated by white arrows in FIG. 18(a), the surface of the measurement object S is imaged at a plurality of angular positions, and a plurality of three-dimensional shape data corresponding to the plurality of angular positions are generated. be done. In FIG. 18A, part (three) of the plurality of three-dimensional shape data respectively corresponding to the plurality of angular positions are shown in balloons as data DAa, DAb, and DAc. Data DAa, DAb and DAc are indicated by dotted lines, solid lines and dashed lines, respectively. Between the data DAa and DAb, the portion within the frame of the dotted line is the overlapping portion indicating the common portion of the object S to be measured. Between the data DAb and DAc, the portion within the frame of the dashed-dotted line is the overlapping portion. These overlapping portions can be identified by detecting a specific shape (surface or unevenness) or the like from the generated three-dimensional shape data.

Next, assuming that the center of rotation of the measurement object S is, for example, the design rotation axis DRA, a plurality of three-dimensional shape data corresponding to a plurality of angular positions are arranged on a virtual plane perpendicular to the X direction. In this case, if the deviation sv between the rotation axis RA and the design rotation axis DRA is large, as shown in FIG. A large discrepancy occurs between the parts.

Therefore, the true rotation axis RA of the measurement object S is obtained based on a plurality of three-dimensional shape data corresponding to a plurality of angular positions so that the deviation between the overlapped portions of each two adjacent data is minimized. perform convergence calculations for A plurality of three-dimensional shape data are corrected based on the calculated deviation between the rotation axis RA and the design rotation axis DRA. Thereby, as shown in FIG. 18(c), accurate three-dimensional shape data of the measuring object S can be obtained. As a result, when synthesizing three-dimensional shape data generated at a plurality of angular positions, it is possible to measure the shape of the measurement object S over a wide range while reducing deterioration in measurement accuracy. 18B and 18C, only data DAa, DAb, and DAc are shown among the plurality of three-dimensional shape data corresponding to the plurality of angular positions in FIG. 18A.

[4] Procedure for measuring shape of object S using shape measuring device 500 FIGS. 19 and 20 are flowcharts showing procedures for measuring the shape of the object S using the shape measuring device 500 of FIG. In the initial state, the shape measuring device 500 is powered on. Moreover, in the shape measuring apparatus 500, illumination light is emitted from the illumination light output unit 130 toward the upper surface 141s of the stage 140, except when imaging for shape measurement using pattern light is performed. At this time, the display unit 400 in FIG. 1 displays an image (hereinafter referred to as a live image) based on the image data obtained by the light receiving unit 120 in real time.

First, the user determines whether or not the rotation unit 190 is necessary to measure the shape of a desired portion of the measurement object S (step S1). Therefore, if the rotation unit 190 is necessary, the user determines whether or not the rotation unit 190 is attached to the stage 140 (step S2). If the rotation unit 190 is not attached to the stage 140, the user attaches the rotation unit 190 to the stage 140 (step S3).

With the rotation unit 190 attached to the stage 140 in step S2 or step S3, the user attaches the measurement object S to the holding part 191 of the rotation unit 190 so that at least a part of it is positioned in the measurement space 101 ( step S4). Thereby, the measuring object S is rotatably held around the rotation axis RA. Next, the user adjusts the position of the focal plane 120F of the light receiving unit 120 with respect to the measurement object S (step S5). Specifically, the user operates stage operation unit 145 or operation unit 250 in FIG. adjust the height of the upper surface 141s of the .

Next, the user sets a region (hereinafter referred to as a measurement region) to be imaged by the light receiving section 120 within a plane (for example, a horizontal plane) on the stage 140 perpendicular to the Z direction (step S6). As a result, even if the entire upper surface of the object to be measured S does not fit within the measurement space 101, a plurality of measurement areas are set, and three-dimensional shape data of these measurement areas are generated to perform planar direction synthesis. becomes possible.

The setting of the measurement region is performed by the user operating a region setting screen, which will be described later, displayed on the display unit 400 . Note that when setting the measurement area, an imaging range in the Z direction for performing the above-described height direction synthesis in the Z direction may be determined. The details of setting the measurement area will be described later.

Here, in the above step S1, if the rotation unit 190 is unnecessary, the user places the measurement object S on the stage 140 so that at least a part of it is located in the measurement space 101 (step S11). . Next, the user adjusts the position of the focal plane 120F of the light receiving unit 120 with respect to the measurement object S (step S12) and sets the measurement area (step S13), as in steps S5 and S6.

After that, the user operates the operation unit 250 to command the start of imaging using the pattern light for the set measurement area (step S7). As a result, the set measurement area is irradiated with the pattern light, and an image is captured. Also, three-dimensional shape data is generated for the measurement area.

Next, the user confirms the three-dimensional shape data generated by the work in step S7 as the shape measurement result of the measurement object S (step S21), and checks whether or not there is a missing portion in the three-dimensional shape data. Determine (step S22). When the three-dimensional shape data has no missing part, the user saves the three-dimensional shape data in the working memory 230 or the storage device 240 of FIG. Analysis is performed (step S23). This completes a series of operations.

In step S22 above, if there is a missing portion in the three-dimensional shape data, the user additionally sets the measurement region so that the portion of the measurement object S corresponding to the missing portion in the three-dimensional shape data is imaged. (step S24). Next, the user operates the operation unit 250 to command the start of imaging using the pattern light for the additionally set measurement area (step S25). As a result, three-dimensional shape data representing the shape of the additionally set measurement region is generated. Further, the user operates the operation unit 250 to combine the three-dimensional shape data generated by the work of step S7 with the three-dimensional shape data generated by the work of step S25 (step S26). The operation of step S26 may be omitted if it is automatically performed by the CPU 210 . After that, the user proceeds with the work of step S23.

In the shape measuring apparatus 500 according to the present embodiment, the CPU 210 in FIG. 1 can set the measurement area in one of three modes when measuring the shape of the measurement object S that is rotated by the rotation unit 190. configured as possible. These three types of modes are called a first box-shaped area setting mode, a second box-shaped area setting mode, and an axis-shaped area setting mode.

The first box-shaped area setting mode is a mode suitable for setting a measurement area when performing shape measurement while rotating the box-shaped measurement object S by 360° around the rotation axis RA. The second box-shaped area setting mode is used to set the measurement area when measuring the shape while rotating the box-shaped measurement object S within a predetermined angular range (for example, 180°) around the rotation axis RA. Suitable mode. The axial shape area setting mode is suitable for setting the measurement area when measuring the shape of an object S having an axial shape that is arranged to extend along the rotation axis RA and rotated 360° around the rotation axis RA. mode.

Here, the procedure for setting the measurement area in step S6 will be described in detail. FIG. 21 is a flow chart showing the procedure for setting the measurement area for performing the shape measurement of the measurement object S that involves rotation. The user uses the operation unit 250 to operate a region setting screen, which will be described later, to perform the following setting work.

The user selects any one of the first box-shaped area setting mode, the second box-shaped area setting mode, and the shaft-shaped area setting mode as the mode of CPU 210 for setting the measurement area (step S31).

This selection is specifically performed as follows. First, the user subjectively determines whether the shape of the measurement object S belongs to the box shape or the shaft shape. Then, when the user determines that the shape of the measuring object S belongs to the shaft shape, the user selects the shaft shape region setting mode.

On the other hand, when the user determines that the shape of the measurement object S belongs to the box shape, the user further determines the portion of the measurement object S to be measured. After that, the user selects the first box-shaped area setting mode when the user wants to measure the shape of the measurement object S over the entire circumference (360°) around the rotation axis RA. On the other hand, the user selects the second box-shaped area setting mode when the user wants to measure the shape of the measurement object S over a partial range (for example, 180°) around the rotation axis RA.

Next, the user issues a command to start provisional setting of the measurement area (step S32). In this case, the CPU 210 sets a provisional provisional measurement region for the current measurement object S in response to the provisional measurement region setting command. As a result, an image showing the positional relationship between the measurement object S and the measurement area in a plan view (hereinafter referred to as an area setting map image) is displayed on the display unit 400 .

Therefore, the user confirms the provisionally set temporary measurement area while viewing the area setting map image displayed on the display unit 400 (step S33). Also, the user determines whether or not the measurement area shown in the area setting map image is appropriate (step S34). If the measurement area is not appropriate, the user modifies the measurement area (step S35).

If the measurement area is appropriate in step S34 or if the measurement area is corrected in step S35, the user determines whether or not to use the marker calibration function (the first or second calibration function described above). (step S36). If the marker-based calibration function is not used, the measurement area set at step S36 is set as the normal set area. This completes the setting of the measurement area.

On the other hand, in step S36, when using the calibration function using markers, the user selects at least one of the first marker M1 and the second marker M2 as a marker for the calibration function (step S37). . Here, when the second marker M2 is selected, the user attaches the second marker M2 to the measurement object S. FIG. After that, the user corrects the measurement area so that the marker selected in step S37 is imaged by the light receiving unit 120 (step S38). This completes the setting of the measurement area.

Note that the procedure for setting the measurement area in step S13, that is, the procedure for setting the measurement area when measuring the shape of the measurement object S without rotation, except that the procedures of steps S31 and S36 to S38 are omitted. , is the same as the setting procedure of steps S32 to S35 in FIG.

[5] Various screens displayed on the display unit 400 (1) Basic measurement screen displayed in the initial state FIG. 4 is a diagram showing an example of a basic measurement screen that is sometimes displayed on the display unit 400. FIG. As shown in FIG. 22, the basic measurement screen 401 includes a main display area 410 and a sub display area 420 arranged horizontally. A live image is displayed in the main display area 410 of the basic measurement screen 401 . Thereby, for example, when the measurement object S is placed on the stage 140 so as to be positioned in the measurement space 101, the object image SI showing the surface state of the measurement object S is displayed in the main display area 410. be done.

Also, in the main display area 410 of FIG. 22, a horizontal movement operation window 411 for moving the upper surface 141s of the stage 140 in the XY directions is superimposed on the live image. In the horizontal movement operation window 411, a plurality of (eight in this example) movement buttons 412 are displayed for moving the upper surface 141s of the stage 140 in a plurality of mutually different directions. As a result, the user operates the pointer on the basic measurement screen 401 using the operation unit 250 in FIG. As a result, the top surface 141s of the stage 140 can be moved in the XY directions relative to the measurement space 101, and the imaging area of the light receiving section 120 can be moved.

In the measurement basic screen 401 of FIG. 22, a plurality of buttons and images relating to the shape measurement of the measurement object S are displayed in the sub-display area 420 . Specifically, in the sub-display area 420 of the measurement basic screen 401, an area setting button 421, an edit button 422, an area clear button 423, a view confirmation image 424, a measurement start button 425, and an upper surface removal button 429 are displayed.

The area setting button 421 is a button for the user to command setting of the measurement area. The user operates the area setting button 421, for example, when setting the measurement area in step S13. As a result, an area setting screen 402 shown in FIG. 23, which will be described later, is displayed on the display unit 400 instead of the basic measurement screen 401 shown in FIG.

The edit button 422 is a button for the user to modify the setting of the measurement area. The user can modify and add to the setting contents of the measurement area by operating the edit button 422 during the setting of the measurement area in step S13, for example. Also when the edit button 422 is operated by the user, the area setting screen 402 of FIG. 23, which will be described later, is displayed on the display unit 400 instead of the basic measurement screen 401 of FIG. The area clear button 423 is a button for the user to reset the setting of the measurement area.

The field-of-view confirmation image 424 is an image indicating where the imaging region (imaging field of view) of the light receiving unit 120 is on the top surface 141 s of the stage 140 , for example. In the view confirming image 424, a rectangular index indicating the current imaging area of the light receiving unit 120 is displayed superimposed on the plan view of the upper surface 141s of the stage 140. FIG. After the measurement area is set, the view confirmation image 424 displays an index indicating the imaging area of the light receiving unit 120 and an index indicating the set measurement area so as to be identifiable with respect to the index of the imaging area. In the field-of-view confirmation image 424 of FIG. 22, the index indicating the current imaging area of the light receiving unit 120 is indicated by a solid line. Also, an index indicating the currently set measurement area is indicated by a dotted line.

The measurement start button 425 is a button for the user to command the start of imaging the measurement object S using the pattern light in step S7, for example, in order to obtain the three-dimensional shape data of the measurement object S. When the user operates the measurement start button 425 after setting the measurement area, an image of the set measurement area is captured and three-dimensional shape data of the measurement object S is generated. The top surface removal button 429 is a button for the user to instruct that the three-dimensional shape data of the top surface 141s of the stage 140 should be removed from the measurement results. Note that a magnification switching button (not shown) is also displayed on the measurement basic screen 401 of FIG. Accordingly, the user can observe the surface state of the measuring object S based on the live image displayed at a desired magnification by operating the magnification switching button.

(2) Area setting screen for performing shape measurement of measurement object S without rotation FIG. 23 is an example of an area setting screen displayed on the display unit 400 when the area setting button 421 in FIG. 22 is operated. It is a figure which shows. As shown in FIG. 23, the area setting screen 402 includes a main display area 410 and a sub display area 420, like the basic measurement screen 401. FIG.

When the region setting button 421 in FIG. 22 is operated, the light receiving unit 120 automatically captures an image of the entire measuring object S placed on the stage 140, for example. At this time, if the entire measurement object S does not fit within the imaging area of the light receiving unit 120, the upper surface 141s of the stage 140 is moved relative to the light receiving unit 120 in the XY directions, and the imaging is repeated multiple times. be Based on the image of the measurement object S obtained by imaging, an area where the measurement object S exists (hereinafter referred to as an existing area) is detected within a plane (for example, a horizontal plane) on the stage 140 orthogonal to the Z direction. be done. Then, the detected presence area is provisionally set as a temporary measurement area.

In the area setting screen 402 of FIG. 23, an area setting map image is displayed in the main display area 410. FIG. Here, the measurement area is set such that one or a plurality of unit areas are arranged on the stage 140 with at least a partial area of the measurement space 101 that can be imaged by the light receiving unit 120 at one time as a unit area. Therefore, in the area setting map image, as indicated by dotted lines in FIG. 23, indices indicating the unit areas forming the measurement area are displayed as unit area frames MM together with the object image SI. In the example of FIG. 23, four unit area frames MM are shown so as to cover the entire object image SI.

23, a sub-display area 420 displays a message to adjust the position and size of the measurement area on the area setting map image. Furthermore, an Exclude button 426, an OK button 427 and a Cancel button 428 are displayed. The user can adjust the position and size of each unit area frame MM on the area setting map image by operating the pointer on the area setting screen 402 . The user can also add a unit area frame MM. In this way, the user can easily expand or contract the measurement area in the X and Y directions on the area setting map image.

The exclusion button 426 is a button for the user to specify, as an exclusion area, an area determined not to require shape measurement in the area setting map image. After operating the exclusion button 426, the user designates one of the plurality of unit area frames MM on the area setting map image, thereby removing the portion of the unit area frame MM from the measurement area. can be excluded.

The OK button 427 is a button for the user to command that the setting of the measurement area using the area setting map image is completed. When the user operates the OK button 427, the information of the measurement area set at the time of operating the OK button 427 is stored in the work memory 230 or the storage device 240 of FIG. 1 as normal setting information. The display unit 400 redisplays the measurement basic screen 401 of FIG. 22 that was displayed immediately before instead of the area setting screen 402 of FIG.

A cancel button 428 is a button for the user to reset the measurement area information set on the currently displayed area setting screen 402 and cause the display unit 400 to display the basic measurement screen 401 of FIG. be.

(3) Basic measurement screen displayed when rotating unit 190 is connected With the basic measurement screen 401 of FIG. Install. In this case, the basic measurement screen 401 changes from the display mode shown in FIG. FIG. 24 is a diagram showing an example of a basic measurement screen 401 displayed on the display section 400 with the rotation unit 190 attached to the stage 140. As shown in FIG.

As shown in FIG. 24, when the rotation unit 190 is connected to the stage 140, in addition to the horizontal movement operation window 411 shown in FIG. be.

An origin button 414 , a forward rotation button 415 and a reverse rotation button 416 are displayed in the rotation operation window 413 . The origin button 414 is a button for returning the angular position of the holding portion 191 of the rotating unit 190 to the reference angular position in the direction of rotation about the rotation axis RA.

The forward rotation button 415 is a button for rotating the holding portion 191 of the rotation unit 190 in one direction around the rotation axis RA, and the reverse rotation button 416 rotates the holding portion 191 of the rotation unit 190 in the opposite direction around the rotation axis RA. A button for rotating. As a result, the user operates the pointer on the measurement basic screen 401 using the operation unit 250 in FIG. Click one of the reverse rotation buttons 416 . Thereby, the measuring object S can be rotated in a desired direction around the rotation axis RA on the stage 140 .

Note that the rotation operation window 413 further displays a holding portion mark 417 , a reference posture mark 418 and a plurality of measurement angle position marks 419 . The holding portion mark 417 schematically represents the outer shape of the holding portion 191 viewed in the X direction, and has a circular shape. The reference attitude mark 418 indicates an angular position (hereinafter referred to as a reference attitude position) facing a specific surface of the measurement object S held by the holding unit 191, and the reference attitude position is predetermined. It is set by the CPU 210 or the user according to the specified method. For example, the reference posture position may be the angular position of the measurement object S when the measurement object S is imaged in the widest area by the light receiving unit 120 when the measurement object S rotates around the rotation axis RA.

In the shape measurement of the measurement object S that involves rotation, a plurality of angular positions to be imaged by the light receiving unit 120 are used as the measurement angular positions in order to measure the shape of a plurality of portions of the measurement object S around the rotation axis RA. is set as The measurement angle position mark 419 indicates the currently set measurement angle position, and is arranged on the circle of the holding portion mark 417 . In the example of FIG. 24 , a plurality of measurement angle position marks 419 are arranged on the circle of the holder mark 417 at angular intervals of 45° with the center of the holder mark 417 as a reference.

Further, when the rotation unit 190 is connected to the stage 140, in addition to the various buttons (421 to 425, 429) and the view confirmation image 424 shown in FIG. is displayed. Specifically, in the secondary display area 420, a rotation ON button 431, a rotation OFF button 432, a box perimeter button 434, a box portion button 435, an axis button 436, and a rotation detail button 437 are further displayed.

The rotation ON button 431 is operated by the user to perform shape measurement of the measurement object S involving rotation, that is, shape measurement using the rotation function of the rotation unit 190 . When the user operates the rotation ON button 431, the operations of the box perimeter button 434, the box portion button 435, the axis button 436, and the rotation details button 437, which will be described later, become effective, and the plane direction synthesis and rotation direction synthesis are performed. Various settings for At this time, operation of the region setting button 421 is disabled.

The rotation off button 432 is operated by the user to perform shape measurement of the measurement object S without rotation, that is, shape measurement without using the rotation function of the rotation unit 190 . When the user operates the rotation off button 432, the operations of the box perimeter button 434, the box part button 435, the axis button 436, and the rotation details button 437, which will be described later, are disabled, and various settings are made for performing rotation direction synthesis. becomes impossible. At this time, the operation of the region setting button 421 is enabled. As a result, various settings for performing planar direction synthesis are possible.

Box all-around button 434 is a button operated when the user selects the first box-shaped area setting mode as the mode of CPU 210 for setting the measurement area in the operation of step S31. Box portion button 435 is a button operated when the user selects the second box-shaped area setting mode as the mode of CPU 210 for setting the measurement area. The axis button 436 is a button operated when the user selects the axis shape area setting mode as the mode of the CPU 210 for setting the measurement area. Rotation detail button 437 is a button operated when the user wants to set the measurement area in detail regardless of the mode predetermined in CPU 210 .

In view confirmation image 424 of FIG. 24 , the index indicating the measurement area set at the current angular position of measurement object S on the plan view of upper surface 141 s of stage 140 is the current imaging area of light receiving unit 120 . is superimposed and displayed together with a rectangular index indicating .

With the rotation ON button 431 operated, any one of the box perimeter button 434, the box portion button 435, the axis button 436, and the rotation details button 437 is operated. As a result, the area setting screen corresponding to the operated button is displayed on display unit 400 . The area setting screen displayed on the display unit 400 when each button (434, 435, 436, 437) for setting the measurement area is operated will be described below.

(4) Region setting screen for performing shape measurement of measurement object S involving rotation In the present embodiment, a plurality of measurement angular positions are stored in storage device 240 as default information for each measurement region setting mode. It shall be When the box portion button 435 in FIG. 24 is operated, that is, when the user selects the second box-shaped area setting mode as the measurement area setting mode, a plurality of measurement angular positions corresponding to the mode are stored. Read from device 240 and set. Note that the plurality of measurement angular positions may be set by the user's designation.

In this example, 0° (reference angular position), 45°, 90°, 135° and 180° are set as the plurality of measured angular positions. In this case, the existence area of the measurement object S at each measurement angular position is detected, and an area composed of one or a plurality of unit areas so as to cover the detected existence area is a provisional area at the measurement angular position. Temporarily set as measurement area. The contents of this setting, that is, the measurement area associated with each measurement angular position, are stored in either the working memory 230 or the storage device 240, for example.

FIG. 25 is a diagram for explaining the operation of shape measuring device 500 that is executed in response to operation of box portion button 435 in FIG. 25(a) to (e) are external views (end views) of the measuring object S at the angular positions of 0°, 45°, 90°, 135° and 180° as viewed in the X direction. each indicated. In FIGS. 25A to 25E, the portion of the surface of the object S to be subjected to shape measurement is indicated by a thick solid line.

For example, as shown in FIG. 25(a), first, the measurement object S is positioned at the measurement angular position of 0°. After that, the entire measurement object S is automatically imaged by the light receiving unit 120 as in the example of FIG. 23 . FIG. 25(f) shows an example of an image of the measuring object S imaged in the state of FIG. 25(a). An existing region is detected based on the captured image of the measurement object S. FIG. Then, an area including the detected presence area and composed of one or more unit areas is tentatively set as a temporary measurement area corresponding to the measurement angular position of 0°.

Next, as shown in FIG. 25(b), the measurement object S is rotated around the rotation axis RA and positioned at the measurement angular position of 45°. After that, the entire measurement object S is automatically imaged by the light receiving unit 120 . FIG. 25(g) shows an example of an image of the measuring object S captured in the state of FIG. 25(b). An existing region is detected based on the captured image of the measurement object S. FIG. Then, an area including the detected existence area and composed of one or more unit areas is tentatively set as a temporary measurement area corresponding to the measurement angular position of 45°.

After that, rotation, positioning, and imaging of the measuring object S are repeated, and the existence area is detected. 25(h), (i), and (j) show images of the measuring object S taken at the measuring angular positions of 90°, 135°, and 180°, respectively. An area that includes the presence area detected at each measurement angular position and is configured by one or more unit areas is tentatively set as a temporary measurement area corresponding to the measurement angular position. A plurality of temporary measurement areas respectively corresponding to the plurality of measurement angular positions set in this manner are displayed on the display unit 400 .

FIG. 26 is a diagram showing an example of the area setting screen displayed on the display unit 400 by operating the box part button 435 in FIG. In the area setting screen 403 of FIG. 26, an area setting map image corresponding to each of a plurality of measurement angular positions (0°, 45°, 90°, 135° and 180°) is displayed in the main display area 410. .

In the area setting screen 403 of FIG. 26, an angle position list 441 is displayed along with an edit button 422 , an OK button 427 and a cancel button 428 in the sub display area 420 . The angular position list 441 indicates a plurality of measured angular positions currently set. The user selects a desired measured angular position from among the plurality of measured angular positions displayed in the angular position list 441 and operates the edit button 422 . Thereby, the user can easily expand or reduce the measurement area in the X and Y directions on the area setting map image corresponding to the selected measurement angular position, as in the example of FIG.

When rotating the measuring object S having a box shape, there is a high possibility that the range of the existence area in the Y direction changes greatly at a plurality of measurement angular positions. Therefore, the measurement area editing function as described above is very effective in setting the measurement area for the measuring object S having a box shape.

When the OK button 427 is operated on the area setting screen 403 of FIG. 26, the measurement basic screen 401 of FIG. On the other hand, when the cancel button 428 is operated, the information about the measurement area set on the area setting screen 403 is reset, and the basic measurement screen 401 of FIG.

When the box perimeter button 434 in FIG. 24 is operated, that is, when the user selects the first box-shaped area setting mode as the measurement area setting mode, a plurality of measurement angular positions corresponding to the mode are displayed. It is read from the storage device 240 and set. Note that the plurality of measurement angular positions may be set by the user's designation.

In this example, 0° (reference angular position), 45°, 90°, 135°, 180°, 225°, 270° and 315° are set as the plurality of measurement angular positions. In this case, as in the case where the box portion button 435 in FIG. 24 is operated, the existence area of the measurement object S at each measurement angle position is detected, and one or more A region composed of unit regions is provisionally set as a temporary measurement region at the measurement angular position. A plurality of temporary measurement regions corresponding to the plurality of set measurement angular positions are displayed on the display unit 400 .

FIG. 27 is a diagram showing an example of a region setting screen displayed on the display unit 400 when the box perimeter button 434 in FIG. 24 is operated. In the area setting screen 404 of FIG. 27, the main display area 410 corresponds to each of a plurality of measurement angle positions (0°, 45°, 90°, 135°, 180°, 225°, 270° and 315°). area setting map image is displayed.

27, an edit button 422, an OK button 427, a cancel button 428, and an angular position list 441 are displayed in the sub-display area 420 in the same way as the area setting screen 403 in FIG. Accordingly, by operating various buttons (422, 427, 428) and the angular position list 441, the user can correct the setting of the measurement region, command the completion of the setting, and command the reset of the setting. By operating the OK button 427 or the cancel button 428, the basic measurement screen 401 of FIG. 24 is displayed on the display unit 400 again.

When the axis button 436 in FIG. 24 is operated, that is, when the user selects the axis shape area setting mode as the measurement area setting mode, a plurality of measurement angular positions corresponding to the mode are read from the storage device 240. issued and set. Note that the plurality of measurement angular positions may be set by the user's designation.

In this example, 0° (reference angular position), 45°, 90°, 135°, 180°, 225°, 270° and 315° are set as the plurality of measurement angular positions. Here, when the measuring object S having an axial shape extending in one direction is arranged so as to extend along the rotation axis RA and rotated around the rotation axis RA, the outer peripheral surface of the measuring object S and the rotation The distance between the axis RA is kept substantially constant. Therefore, it is considered that existence regions corresponding to a plurality of measurement angular positions are substantially common.

Therefore, when the axis button 436 in FIG. 24 is operated, only the existence area of the measurement object S at one of the plurality of measurement angular positions is detected. Then, an area including the detected presence area and composed of one or more unit areas is tentatively set as a temporary measurement area at all measurement angular positions. A temporary measurement area common to a plurality of measurement angular positions is displayed on the display section 400 .

FIG. 28 is a diagram showing an example of an area setting screen displayed on the display unit 400 by operating the axis button 436 in FIG. In the area setting screen 405 of FIG. 28, an area setting map image corresponding to one measurement angular position (for example, 0°) is displayed in the main display area 410 . 28, an edit button 422, an OK button 427 and a cancel button 428 are displayed in the sub-display area 420 of the area setting screen 405 of FIG. Accordingly, by operating various buttons (422, 427, 428) and the angular position list 441, the user can correct the setting of the measurement region, command the completion of the setting, and command the reset of the setting. By operating the OK button 427 or the cancel button 428, the basic measurement screen 401 of FIG. 24 is displayed on the display unit 400 again.

As described above, when the user selects the shaft shape area setting mode, the existence area is not detected for all of the plurality of measured angular positions. This shortens the time required to detect the presence area. Also, in this case, since only one region setting map image corresponding to one measurement angular position is displayed on the display unit 400, the user does not need to confirm a plurality of region setting map images. Furthermore, it is not necessary to adjust the measurement area for each of the plurality of measurement angular positions. As a result, the work and time required for setting the measurement area can be reduced.

When the user selects the shaft shape area setting mode, one measurement angular position to be displayed may be designated by the CPU 210 by the user operating the operation unit 250 . In this case, the CPU 210 accepts designation of one measurement angular position by the user.

When the detailed rotation button 437 in FIG. 24 is operated, the display mode of the sub-display area 420 changes. FIG. 29 is a diagram showing an example of the sub-display area 420 displayed on the display unit 400 by operating the detailed rotation button 437 in FIG. As shown in FIG. 29, when the rotation details button 437 is operated on the measurement basic screen 401 of FIG. An angle pitch setting portion 454, a measurement count setting portion 455, an exclusion angle input frame 456, a synthesis necessity check box 457, and the like are displayed.

The reference attitude input frame 451 is configured so that the user can input a desired angular position. A reference posture registration button 452 is operated to register the angular position input in the reference posture input frame 451 by the user as a reference posture position. By operating the reference attitude registration button 452, the angular position input to the reference attitude input frame 451 is stored in the working memory 230 or the storage device 240 as the reference attitude position.

The angle condition setting unit 453 is operable by the user to set how to determine a plurality of measurement angle positions. Specifically, the angle condition setting unit 453 is configured with a pull-down button that enables selection of a desired method from among multiple types of setting methods.

The angular pitch setting unit 454 is configured to be operable by the user to set the angular intervals at which the plurality of measurement angular positions are to be set. Specifically, the angular pitch setting section 454 is configured with a pull-down button that allows selection of a desired angle from a plurality of types of angles. The number-of-measurements setting unit 455 is operable by the user to set how many times the three-dimensional shape data should be generated at the angular intervals set by the angular pitch setting unit 454 . The exclusion angle input frame 456 is configured so that the user can input measurement angle positions that do not require the generation of three-dimensional shape data.

The synthesis necessity check box 457 generates a plurality of three-dimensional shape data while rotating the measuring object S at a set angle interval a plurality of times, and then synthesizes the generated plurality of three-dimensional shape data. It is configured to be selectable whether or not.

When the user wishes to synthesize a plurality of pieces of three-dimensional shape data, the user checks the synthesis necessity check box 457 . As a result, a plurality of three-dimensional shape data generated at a plurality of measurement angular positions during the shape measurement of the measurement object S are synthesized. On the other hand, if the user does not want to synthesize a plurality of pieces of three-dimensional shape data, the user does not check the synthesis necessity check box 457 . As a result, a plurality of three-dimensional shape data generated at a plurality of measurement angular positions during the shape measurement of the measurement object S are not synthesized. As described above, when the user operates the detailed rotation button 437 in FIG. 24, the user can further operate various input frames, buttons, and setting sections shown in FIG. Settings can be made.

(5) Correction and addition of settings, etc. When the edit button 422 in FIGS. 26 to 28 is operated, the display mode of the secondary display area 420 changes. FIG. 30 is a diagram showing an example of the sub-display area 420 displayed on the display section 400 by operating the edit button 422 in FIGS. 26-28. As shown in FIG. 30, when the edit button 422 is operated on the area setting screens 402 to 405 shown in FIGS. A message appears asking you to adjust the position and size of the . Also, an Exclude button 426, an OK button 427 and a Cancel button 428 are displayed. Additionally, a first calibration check box 463 and a second calibration check box 464 are displayed.

The first calibration check box 463 is a check box for setting whether or not to use the first configuration function using the first marker M1 in FIG. 15(a). On the other hand, the second calibration check box 464 is a check box for setting whether or not to use the second configuration function using the second marker M2 in FIG. 16(b).

If the user wishes to use the first configuration function using the first marker M1 in the operation of step S36 described above, the user checks the first calibration check box 463 in FIG. In this case, it is necessary to set the measurement area so that the shape measurement is also performed for the first marker M1. Here, since the first marker M1 is a part of the rotation support shaft 91, the existence area of the first marker M1 on the stage 140 is known. Therefore, when the first calibration check box 463 is checked, a new measurement area is set to cover the existence area of the first marker M1 in addition to the currently set measurement area. be done.

FIG. 31 is a diagram showing an example of the area setting screen displayed on the display unit 400 when the first calibration check box 463 in FIG. 30 is checked. In the area setting screen 406 of FIG. 31, an area setting map image corresponding to one specific measurement angular position (for example, 0°) is displayed in the main display area 410 .

In the area setting map image, the measurement area for generating the three-dimensional shape data of the measurement object S is indicated by a plurality of unit area frames MM. Furthermore, in the area setting map image, the measurement area for generating the three-dimensional shape data of the first marker M1 is indicated by a plurality of unit area frames MMa.

In FIG. 31, images of the holding portion 191 and the first marker M1 are indicated by two-dot chain lines. Further, the image portion of the first marker M1 is hatched so that the position of the first marker M1 can be easily understood.

Here, the unit area frame MMa added corresponding to the first marker M1 is different from the unit area frame MM so as to be identifiable with respect to the unit area frame MM corresponding to the measurement object S. (In this example, it is displayed with a thick one-dot chain line). Thereby, the user can easily grasp that a new measurement area has been set in order to use the first calibration function using the first marker M1.

If the user wishes to use the second configure function with the second marker M2, the user checks the second calibration checkbox 464 in FIG. In this case, it is necessary to set the measurement area so that the shape measurement is also performed for the second marker M2. Here, the second marker M2 is attached to the measurement object S by the user in the work of step S37. Therefore, the user needs to set a new measurement area for covering the existence area of the second marker M2 according to the position of the second marker M2 attached to the measurement object S.

FIG. 32 is a diagram showing an example of a region setting screen displayed on the display unit 400 when the second calibration check box 464 in FIG. 30 is checked. In the area setting screen 407 of FIG. 32, similarly to the example of the area setting screen 406 of FIG. be.

Furthermore, in the area setting map image, the measurement area for generating the three-dimensional shape data of the measurement object S is indicated by a plurality of unit area frames MM, and the position of the second marker M2 is specified. A marker image M2i is displayed. In this state, the user places the marker image M2i at a position corresponding to the actual position of the second marker M2 on the area setting map image by dragging the marker image M2i, for example.

A marker reversal check box 465 , an OK button 427 and a cancel button 428 are displayed in the secondary display area 420 . Here, in the shape measuring apparatus 500 according to the present embodiment, the basic posture of the second marker M2 to be attached to the measurement object S when using the second calibration function is determined in advance. For example, the basic posture of the second marker M2 to be attached to the measurement object S is such that the axis of the second marker M2 is parallel or substantially parallel to the rotation axis RA, and the large diameter portion M2a and the small diameter portion are in parallel. In this posture, M2b is arranged so as to be separated from the rotating unit 190 in this order. On the other hand, as shown in the example of FIG. 17, the second marker M2 can also be attached to the rotating unit 190 in a reversed posture in which the basic posture is reversed in the X direction.

The marker reversal check box 465 is a check box for setting whether or not to reverse the orientation of the second marker M2 in the X direction. FIG. 33 is a diagram showing an example of the area setting screen displayed on the display unit 400 when the marker reversal check box 465 in FIG. 32 is checked. As shown in FIG. 33, on the region setting screen 407, the orientation of the marker image M2i is horizontally reversed with respect to the display example of FIG. 32 by checking the marker reversal check box 465. FIG.

After the position and orientation of the marker image M2i are adjusted on the area setting map image as described above, the OK button 427 is operated. Thereby, a new measurement area is set so as to cover the area corresponding to the marker image M2i.

FIG. 34 is a diagram showing an example of a region setting screen displayed on the display unit 400 with new measurement regions set for the first marker M1 and the second marker M2. In the area setting screen 408 of FIG. 34, the area setting map image displayed in the main display area 410 shows the measurement areas for generating the three-dimensional shape data of the object image SI by a plurality of unit area frames MM. . Also, the measurement area for generating the three-dimensional shape data of the first marker M1 is indicated by a plurality of unit area frames MMa. Furthermore, the measurement area for generating the three-dimensional shape data of the second marker M2 is indicated by a plurality of unit area frames MMb. Thereby, the user can easily grasp that a new measurement area has been set in order to use the first and second calibration functions using the first marker M1 and the second marker M2. can be done.

In the example of FIG. 34, the unit area frame MMa corresponding to the first marker M1, the unit area frame MMb corresponding to the second marker M2, and the unit area frame MM corresponding to the measurement object S are identifiably different from each other. displayed in the form. This allows the user to easily grasp the purpose set for each portion of the measurement area.

[6] Upper Surface Removal Function By the way, as described above, when the upper surface removal button 429 in FIGS. 22 and 29 is operated, that is, the fact that the three-dimensional shape data of the upper surface 141s of the stage 140 should be removed from the measurement result is used. It is assumed that the person instructed In this case, in the shape measuring apparatus 500, the three-dimensional shape data corresponding to the upper surface 141s is removed from all the three-dimensional shape data obtained by imaging the measurement object S. A three-dimensional shape image is displayed on the display unit 400 (upper surface removal function). A specific example of this will be described.

FIG. 35 is an external perspective view showing an example of shape measurement of the measuring object S using the rotating unit 190. FIG. As shown in FIG. 35, in this example, the shape of the measuring object S held by the holding portion 191 by the two rod-shaped members 94 is measured while being rotated. In this case, when the upper surface 141s of the stage 140 is positioned within the measurement space 101, three-dimensional shape data indicating the shape of the upper surface 141s is generated together with the three-dimensional shape data indicating the shape of the object S to be measured.

FIG. 36 is a diagram showing an example of a three-dimensional shape image based on all three-dimensional shape data obtained by shape measurement in FIG. In the three-dimensional shape image of FIG. 36 and FIG. 37 described later, the position (height) in the Z direction is represented by hatching and dot patterns. In the three-dimensional shape image of FIG. 36 , the portion indicated by the white arrow is the portion representing the top surface 141 s of the stage 140 . When the three-dimensional shape image of the stage 140 is displayed in addition to the object S to be measured in this way, it is difficult for the user to grasp the shape of the object S to be measured.

As shown in FIG. 36, the three-dimensional shape data corresponding to the upper surface 141s of the stage 140 indicates a planar shape that has a certain degree of continuous spread. From these three-dimensional shape data, a data group of a plane having a continuous spread is extracted, and at each measurement angle position, the normal direction of the extracted plane is upward and the position of the Z direction is designed can be identified based on whether it is at the position of the upper surface 141s.

FIG. 37 is a diagram obtained by removing the three-dimensional shape image corresponding to the upper surface 141s of the stage 140 from the three-dimensional shape image of FIG. According to the three-dimensional shape image of FIG. 37, the user can grasp the three-dimensional shape of the measuring object S easily and accurately. Note that the three-dimensional shape images in FIGS. 36 and 37 have different display ranges in the Z direction.

[7] Functional Configuration of CPU 210 in PC 200 FIG. 38 is a block diagram showing the functional configuration of the CPU 210 in FIG. As shown in FIG. 38, the CPU 210 includes a movement control unit 21a, a rotation control unit 21b, an imaging control unit 21c, an area setting unit 21d, a setting screen presentation unit 21e, a rotation angle setting unit 21f, a three-dimensional shape data generation unit 21g, It includes a data synthesis section 21h, a data correction section 21i, an attachment/detachment determination section 21j, and a display control section 21k. These components are implemented by CPU 210 executing a shape measurement program stored in storage device 240 . A part or all of the plurality of components included in CPU 210 may be realized by hardware such as an electronic circuit.

The movement control section 21 a controls the stage driving section 146 so that the position of the upper surface 141 s of the stage 140 moves relative to the light receiving section 120 . In other words, the movement control unit 21a adjusts the relative position of the measurement space 101 to the measurement object S by moving the upper surface 141s of the stage 140 with the measurement object S placed on the stage 140. do. The rotation control section 21b controls the rotation unit 190 so that the measurement object S is sequentially rotated to a plurality of predetermined measurement angular positions during shape measurement of the measurement object S that involves rotation.

The imaging control unit 21c controls the illumination light output unit 130 and the light receiving unit 120 so that the measurement object S placed on the stage 140 is imaged at a low magnification in order to detect the existence area of the measurement object S. do. Further, the imaging control unit 21c controls the light projecting units 110A and 110B and the light receiving unit 120 so that the measurement area set by the area setting unit 21d, which will be described later, is imaged while the measurement object S is at each measurement angle position. to control.

The region setting unit 21d determines the existence region of the measurement object S in a state where the measurement object S is placed on the stage 140 or in a state where the measurement object S held by the rotation unit 190 is at each measurement angle position. To detect. Further, the area setting unit 21d sets the measurement area based on the detection result of the existence area. Further, the area setting section 21d corrects the set measurement area based on the operation of the operation section 250 by the user.

The setting screen presentation unit 21e causes the display unit 400 to display the area setting map image when the measurement area is set by the area setting unit 21d. Further, the setting screen presentation unit 21e superimposes and displays the unit area frames MM, MMa, and MMb on the image of the measurement object S in the area setting map image so that the set measurement area can be identified.

The rotation angle setting unit 21f sets a plurality of measurement angle positions when the shape measurement of the measurement object S involving rotation is performed. Here, the plurality of measured angular positions respectively corresponding to the first box-shaped area setting mode, the second box-shaped area setting mode, and the shaft-shaped area setting mode are stored in the storage device 240 as default information, for example, as described above. stored in

In this case, the rotation angle setting unit 21f performs a plurality of measurements by reading a plurality of measurement angle positions stored in the storage device 240 according to the selected area setting mode when measuring the shape of the measurement object S that involves rotation. Set the angular position. The rotation angle setting section 21f measures the designated angular position when the user receives a designation of a specific angular position by operating the angular pitch setting section 454 of FIG. It may be set as an angular position.

The three-dimensional shape data generation unit 21g generates three-dimensional shape data representing the shape of the measurement object S based on a plurality of image data generated by irradiating the measurement region with pattern light and capturing an image of the measurement region. Generate. The three-dimensional shape data generator 21g also generates three-dimensional shape data representing the shape of the first marker M1 based on a plurality of image data generated by imaging the first marker M1 located in the measurement area. to generate Further, the three-dimensional shape data generator 21g generates three-dimensional shape data representing the shape of the second marker M2 based on a plurality of image data generated by imaging the second marker M2 located in the measurement area. to generate

The data synthesizing unit 21h performs the planar direction synthesizing when the three-dimensional shape data of a plurality of portions of the surface of the measurement object S arranged in the XY directions are individually generated. Further, when the three-dimensional shape data of a plurality of portions arranged around the rotation axis RA on the surface of the object to be measured S are individually generated, the data synthesizing unit 21h responds to the user's instruction for synthesizing. Synthesis of rotation direction is performed. Furthermore, the data synthesizing unit 21h synthesizes the three-dimensional shape data generated by the planar direction synthesis and the three-dimensional shape data generated by the rotation direction synthesis. Further, the data synthesizing unit 21h, for example, when a plurality of pieces of three-dimensional shape data are individually generated in a common measurement area by imaging the surface of the measurement object S at a plurality of positions in the Z direction, The above-mentioned height direction synthesis can also be performed.

The data correction unit 21i determines whether or not to use the first marker M1 and the second marker M2 when the shape measurement of the measurement object S involving rotation is performed. Correction processing of the three-dimensional shape data according to one of the calibration functions is performed. Specifically, in the correction process according to the first calibration function, the data correction unit 21i corrects the measurement object corresponding to each of the plurality of measurement angular positions based on the three-dimensional shape data of the first marker M1 and its dimensions. A plurality of three-dimensional shape data of S are corrected.

In addition, in the correction process according to the second calibration function, the data correcting unit 21i performs correction at a plurality of measured angular positions based on the three-dimensional shape data of the first marker M1 and the second marker M2 and their dimensions. A plurality of three-dimensional shape data of the corresponding measuring object S are corrected. In addition, in the correction process according to the second calibration function, if the three-dimensional shape data of the first marker M1 does not exist, the data correction unit 21i performs correction based on the three-dimensional shape data of the second marker M2 and its dimensions. to correct a plurality of three-dimensional shape data of the measurement object S respectively corresponding to a plurality of measurement angular positions.

Furthermore, in the correction process according to the third calibration function, the data correction unit 21i performs measurement data corresponding to each of the plurality of measurement angular positions based on the overlapping relationship of the three-dimensional shape data of the measurement object S at the plurality of measurement angular positions. A plurality of three-dimensional shape data of the object S are corrected.

The attachment/detachment determination section 21j determines whether the rotation unit 190 is attached to the stage 140 or not. Specifically, the attachment/detachment determination section 21j determines that the rotation unit 190 is attached to the stage 140 when the connector 194 of the rotation unit 190 and the connector 141c of the stage 140 are connected. Further, the attachment/detachment determination section 21j determines that the rotation unit 190 is not attached to the stage 140 when the connector 194 of the rotation unit 190 and the connector 141c of the stage 140 are not connected. Whether or not the connector 194 of the rotation unit 190 and the connector 141c of the stage 140 are connected can be easily determined based on whether or not an electrical signal can be exchanged between the attachment/detachment determining section 21j and the rotation unit 190. can judge.

The display control unit 21k causes the display unit 400 to display a live image of the measurement object S and a three-dimensional shape image of the measurement object S, and displays various setting screens such as a basic measurement screen 401 and area setting screens 402 to 408. 400 is caused to display.

In particular, the display control section 21k causes the display section 400 to display the horizontal movement operation window 411 and the rotation operation window 413 when the rotation unit 190 is attached to the stage 140 . Furthermore, in this case, the display control unit 21k causes the display unit 400 to display an image for performing various settings related to shape measurement of the measurement object S involving rotation.

Further, the display control section 21k causes the display section 400 to display the horizontal movement operation window 411 but does not display the rotation operation window 413 on the display section 400 when the rotation unit 190 is not attached to the stage 140 . Furthermore, in this case, the display control unit 21k causes the display unit 400 to display an image for performing various settings related to the shape measurement of the measurement object S that does not involve rotation.

[8] Shape Measurement Processing FIGS. 39 and 40 are flowcharts showing an example of shape measurement processing executed by the CPU 210. FIG. The shape measurement process of FIGS. 39 and 40 is repeatedly performed at a predetermined cycle by executing the shape measurement program stored in the storage device 240 by the CPU 210 of the PC 200 while the power of the shape measurement device 500 is turned on. . In the initial state, illumination light is emitted from the illumination light output unit 130 toward the stage 140, and the light receiving unit 120 captures an image of the upper surface 141s of the stage 140. FIG.

First, as shown in the example of FIG. 22, the display control unit 21k causes the display unit 400 to display a measurement basic screen 401 including a live image, a measurement start button 425, etc., in a state in which the rotation unit 190 cannot be operated. (Step S101). Therefore, the basic measurement screen 401 displayed in step S101 includes a horizontal movement operation window 411 (FIG. 22) for operating the stage 140, and a rotation operation window 413 (FIG. 24) for operating the rotation unit 190. does not include

Next, the attachment/detachment determination section 21j determines whether or not the rotation unit 190 is attached to the stage 140 (step S102). If the rotation unit 190 is not attached to the stage 140, the attachment/detachment determining section 21j advances the process to step S105, which will be described later. On the other hand, when the rotation unit 190 is attached to the stage 140, the display control unit 21k displays the measurement basic screen 401 on the display unit 400 in a state in which the operation of the rotation unit 190 is possible, as shown in the example of FIG. (step S103). At the time of determination in step S102, the display control section 21k may cause the display section 400 to display a message, an index, or the like indicating whether or not the rotation unit 190 is attached to the stage 140 according to the determination result.

Next, the attachment/detachment determination section 21j determines whether or not the rotation unit 190 is detached while the basic measurement screen 401 (FIG. 24) enabling the operation of the rotation unit 190 is displayed on the display section 400 (step S104). If the rotating unit 190 is detached, the attachment/detachment determination section 21j returns the process to step S101. On the other hand, if the rotation unit 190 is not removed, the movement control section 21a and the rotation control section 21b receive a position adjustment command for the stage 140 and the like (step S105). Position adjustment of the stage 140 and the like is instructed by, for example, the user using the operation unit 250 to operate the horizontal movement operation window 411 (FIGS. 22 and 24) or the rotation operation window 413 (FIG. 24). At this time, the movement control unit 21a moves the upper surface 141s of the stage 140 in the X direction, the Y direction and the Z direction in response to the command to adjust the position of the stage 140. FIG. Further, the rotation control section 21b rotates the holding section 191 of the rotation unit 190 in response to a rotation command of the rotation unit 190 from the user. Thereby, for example, the position of the focal point of the light receiving unit 120 is adjusted.

After that, a measurement area setting process is performed based on the user's operation of the operation unit 250 (step S106). By the measurement area setting process, in the shape measurement of the measurement object S involving rotation, a plurality of measurement angular positions are set, and one or more measurement areas are set for each measurement angular position. Also, in the shape measurement of the measurement object S that does not involve rotation, one or more measurement regions are set. The details of the measurement area setting process executed by the CPU 210 will be described later.

Next, the data synthesizing unit 21h determines whether or not to synthesize a plurality of three-dimensional shape data acquired at a plurality of measurement angular positions when a measurement region for shape measurement of the measurement object S involving rotation is set. A command as to whether or not is received (step S107). This acceptance is performed, for example, based on whether or not the combination necessity check box 457 in FIG. 29 is checked by the user. The processing of step S107 is skipped during shape measurement of the measurement object S that does not involve rotation. Note that, for example, the basic measurement screen 401 of FIG. 22 or 24 may be provided with a synthesis necessity input section for designating whether or not to perform planar direction synthesis and whether to perform rotational direction synthesis. . In this case, the data synthesizing unit 21h may receive input from the synthesizing necessity input unit in step S107.

Next, the data correction unit 21i receives a command as to whether or not the three-dimensional shape data representing the upper surface 141s of the stage 140 is required from the three-dimensional shape data generated by measuring the shape of the measurement object S (step S108). . This reception is performed based on, for example, whether the top face removal button 429 in FIG. 22 or 24 has been operated by the user.

Next, the imaging control unit 21c determines whether or not an instruction to start imaging the measurement object S using the pattern light has been received (step S109). This acceptance is performed, for example, based on whether or not the measurement start button 425 in FIG. 22 or 24 has been operated by the user. When the imaging start command is not received, the imaging control unit 21c determines whether or not there is an instruction to return to the initial state (step S112). This determination is made, for example, based on whether or not the area clear button 423 in FIG. 22 or 24 has been operated by the user. If there is an instruction to return to the initial state, the imaging control unit 21c returns the process to step S101. If there is no command to return to the initial state, the imaging control unit 21c advances the process to step S111, which will be described later.

On the other hand, when a command to start imaging is received, the set measurement area is imaged using pattern light, and three-dimensional shape data is generated based on a plurality of image data obtained by imaging (step S110).

Specifically, when a plurality of measurement angular positions are set, the rotation control unit 21b rotates the rotation unit so that the object S to be measured S is sequentially rotated to the plurality of measurement angular positions set around the rotation axis RA. 190 is controlled. Further, the movement control unit 21a controls the stage driving unit 146 so that the set measurement area of the measurement object S placed on the stage 140 or the measurement object S held by the rotation unit 190 is imaged. to control. Further, the imaging control section 21c controls the light projecting sections 110A and 110B and the light receiving section 120 so that the set measurement area is imaged. Furthermore, the three-dimensional shape data generating section 21g generates three-dimensional shape data of the measurement region based on a plurality of image data obtained by imaging. At this time, the display control unit 21k causes the display unit 400 to display a three-dimensional shape image based on the generated three-dimensional shape data.

Note that the data synthesizing unit 21h synthesizes a plurality of three-dimensional shape data corresponding to a plurality of measured angular positions (rotational direction synthesizing) when it is instructed to synthesize a plurality of three-dimensional shape data in step S107. ). On the other hand, the data synthesizing unit 21h does not synthesize a plurality of three-dimensional shape data corresponding to a plurality of measured angular positions when it is not instructed to synthesize a plurality of three-dimensional shape data in step S107.

In addition, the data correction unit 21i corrects each of the plurality of three-dimensional shape data before synthesis in accordance with the calibration function activated in steps S236 and S237 of the measurement area setting process, which will be described later. Furthermore, the data correction unit 21i performs a three-dimensional shape representing the top surface 141s of the stage 140 from all the generated three-dimensional shape data when it is instructed in step S108 that the three-dimensional shape data representing the top surface 141s is unnecessary. Remove the original shape data.

Next, the region setting unit 21d determines whether or not there is an instruction to reset the measurement region by the user operating the operation unit 250 (step S111). Therefore, when there is a reset command, the area setting unit 21d returns the process to step S106. On the other hand, if there is no reset command, the region setting section 21d terminates a series of shape measurement processing. At this time, the three-dimensional shape data generator 21g stores the generated three-dimensional shape data in the storage device 240 together with various setting information (for example, multiple measurement angular positions and multiple measurement regions).

Details of the measurement area setting process included in the shape measurement process will be described. It should be noted that the measurement area setting process described below corresponds to shape measurement of the measurement object S that is rotated by the rotation unit 190 . 41 and 42 are flowcharts showing an example of the measurement area setting process executed by CPU 210. FIG.

As shown in FIG. 41, the area setting unit 21d first determines whether or not the first or second box-shaped area setting mode is selected as the mode for setting the measurement area (step S201). This determination is made based on whether or not, for example, the box perimeter button 434 or the box portion button 435 in FIG. 24 has been operated by the user in the operation of step S31.

When the first or second box-shaped area setting mode is selected, the rotation angle setting unit 21f reads a plurality of measured angular positions corresponding to the selected box-shaped area setting mode from the storage device 240 (step S202). . A plurality of measurement angular positions are defined at intervals of integral multiples of a predetermined angle (eg, 30°, 45° or 90°). In other words, a plurality of measured angular positions are defined at a predetermined angular pitch. The reading process described above corresponds to a process of setting a plurality of measurement angular positions. Note that the rotation angle setting unit 21f may set a plurality of measurement angle positions based on information specified by the user operating the angle condition setting unit 453, the angular pitch setting unit 454, etc. in FIG. .

Next, an image of the entire measurement object S is taken by the low-magnification camera at each measurement angular position (step S203). At this time, the rotation control section 21b controls the rotation unit 190 so that the measurement object S is sequentially rotated to the set measurement angular positions. Further, the imaging control unit 21c controls the illumination light output unit 130 and the light receiving unit 120 so that the measurement object S is imaged by the low-magnification camera while the measurement object S is at each measurement angle position. Furthermore, the movement control unit 21a moves the stage 140 so that the part of the measurement object S that is not imaged sequentially moves into the imaging area of the light receiving unit 120 when the entire measurement object S is not imaged at once. The upper surface 141s is moved in the XY directions.

After that, the area setting unit 21d detects an existing area corresponding to each measured angular position based on the image data obtained by the imaging in step S203 (step S204). Here, the imaging of the measurement object S in step S203 is performed in order to detect the presence area of the measurement object S in subsequent step S204. Therefore, basically, the entire measurement object S needs to be imaged.

As described above, in step S203, the measurement object S is imaged by the low-magnification camera. The imaging area of camera 121A, which is a low-magnification camera, is larger than the imaging area of camera 121B, which is a high-magnification camera. Therefore, when the entire measurement object S is imaged with a low-magnification camera, the number of imaging operations can be reduced compared to when the entire measurement object S is imaged with a high-magnification camera. Therefore, it is possible to shorten the time required to detect the presence area.

After the process of step S204, the area setting unit 21d provisionally sets an area including the existence area of each detected measurement angular position as the measurement area of the measurement angular position (step S205). Therefore, the setting screen presentation unit 21e generates a region setting map image based on the plurality of image data obtained in step S204 and the measurement regions of the set measurement angular positions, and displays it on the display unit 400 (step S206). At this time, the setting screen presentation unit 21e superimposes one or more unit area frames MM on the image of the measurement object S in the area setting map image so that the set measurement area can be identified.

Next, the area setting unit 21d determines whether setting of the measurement area is completed (step S207). This determination is made, for example, based on whether or not the measurement start button 425 in FIG. 24 has been operated by the user. When the setting of the measurement area is completed, the measurement area setting process ends. On the other hand, if the setting of the measurement area has not been completed, the area setting section 21d determines whether or not there is an instruction to correct the measurement area (step S231). This determination is made, for example, on the area setting screens 403 to 405 of FIGS. 26 to 28, based on whether or not the user has instructed to change, add, or delete the measurement area.

If there is no instruction to correct the measurement area in step S231, the area setting section 21d advances the process to step S233, which will be described later. On the other hand, when there is an instruction to correct the measurement region in step S231, the region setting unit 21d accepts the correction, and corrects the set measurement region according to the received content (step S232).

Next, the data correction unit 21i determines whether there is an instruction to use either the first marker M1 or the second marker M2 for calibration of the three-dimensional shape data (step S233). When there is an instruction to use a marker, the data correction unit 21i determines the type of marker to be used (step S234). The determinations in steps S233 and S234 by the data correction unit 21i are made based on, for example, which one of the first proofreading check box 463 and the second proofreading check box 464 in FIG. 30 is checked by the user.

Next, the data correction unit 21i adds a setting of a new measurement area according to the marker to be used (step S235), and activates the calibration function according to the marker to be used (step S236). After that, the data correction unit 21i returns the process to step S207. It should be noted that in step S236, when the marker to be used is the first marker M1, the first calibration function is activated. On the other hand, if the marker used is the second marker M2, the second calibration function is activated. If there is no instruction to use the marker in step S233, the data correction unit 21i enables the third calibration function (step S237), and returns the process to step S207.

In step S201 above, if the first or second box-shaped region setting mode is not selected, the region setting unit 21d determines whether the shaft-shaped region setting mode is selected as the mode for setting the measurement region. (step S211). This determination is made, for example, based on whether the axis button 436 in FIG. 24 has been operated by the user.

When the shaft-shaped region setting mode is selected, the rotation angle setting unit 21f reads a plurality of measured angular positions corresponding to the shaft-shaped region setting mode from the storage device 240 (step S212). This reading process, like the process of step S202, corresponds to the process of setting a plurality of measurement angular positions. The rotation angle setting unit 21f may set a plurality of measurement angular positions based on conditions designated by the user operating the angle condition setting unit 453, the angular pitch setting unit 454, etc. in FIG. . At this time, the angular pitch that can be set by the angular pitch setting unit 454 may be limited to a numerical value necessary for measuring the entire circumference of the measurement object S when the measurement object S is rotated, for example. This prevents setting an inappropriate angular pitch.

Next, an image of the entire measurement object S is captured by the low-magnification camera at one of the plurality of measurement angular positions (step S213). At this time, the rotation control section 21b controls the rotation unit 190 so that the object S to be measured is held at one of the set measurement angular positions. In addition, the imaging control unit 21c controls the illumination light output unit 130 and the light receiving unit 120 so that the measurement object S is imaged by the low-magnification camera while the measurement object S is at one measurement angle position. . Furthermore, the movement control unit 21a moves the stage 140 so that the part of the measurement object S that is not imaged sequentially moves into the imaging area of the light receiving unit 120 when the entire measurement object S is not imaged at once. The upper surface 141s is moved in the XY directions.

After that, the area setting unit 21d detects an existence area corresponding to one measured angular position based on the image data obtained by the imaging in step S213 (step S214), and advances the process to step S205. In the above step S213, similarly to the process of step S203, the measurement object S is imaged by the low-magnification camera. As a result, the time required to detect the presence area can be shortened.

If the shaft shape area setting mode is not selected in step S211, the area setting unit 21d determines whether or not an instruction to set the measurement area in detail has been received (step S221). This determination is made, for example, based on whether the detailed rotation button 437 in FIG. 24 has been operated by the user.

When receiving a command to set the measurement area in detail, the area setting unit 21d accepts the setting of the measurement area (step S222). Here, for example, conditions specified by the user operating the angle condition setting section 453 and the angle pitch setting section 454 shown in FIG. 29 are accepted. After that, the area setting unit 21d advances the process to step S207.

In the measurement area setting process corresponding to the shape measurement of the measurement object S that does not involve rotation, after the existence area of the measurement object S is detected, steps S205 to S207, S231, and S232 are performed. is processed.

[9] Effect (1) In the shape measuring apparatus 500 according to the present embodiment, when setting the measurement area for performing the shape measurement of the measurement object S that involves rotation, a plurality of measurements set in at least the Y direction are performed. Existence areas of the measuring object S corresponding to the respective angular positions are detected. In other words, the width of the measurement object S extending at least in the Y direction when the measurement object S at each of the set measurement angular positions is viewed from the light receiving unit 120 is detected.

Moreover, a plurality of measurement regions to be imaged by the light receiving unit 120 for each measurement angular position are set based on the detection result of the existence region of the measurement angular position at least in the Y direction. In this case, the user does not need to perform complicated setting work according to the shape of the measurement object S for each measurement angular position. After that, the measuring object S is sequentially rotated to a plurality of set measurement angular positions. With the measurement object S at each measurement angle position, the imaging area of the light receiving unit 120 is sequentially moved to at least a plurality of measurement areas in the Y direction, and the measurement object S is imaged. Three-dimensional shape data corresponding to each measured angular position can be generated based on a plurality of image data generated in this way. As a result, it is possible to measure the shape over a wide range on the surface of the object S without complicated setting work.

(2) In the shape measuring apparatus 500 according to the present embodiment, the object S to be measured is placed on the upper surface 141s of the stage 140, and the object S to be measured is irradiated with the pattern light. Alternatively, while the measurement object S is held by the rotation unit 190, the measurement object S rotating around the rotation axis RA that intersects the optical axis ROA of the light receiving unit 120 is irradiated with the pattern light. The measurement object S irradiated with the pattern light is imaged by the light receiving unit 120 . Three-dimensional shape data of the measuring object S is generated based on a plurality of image data obtained by imaging.

In this case, the user places the measurement object S on the upper surface of the stage or rotates the measurement object S by the rotation unit so that the pattern light is incident on the shape of the desired portion of the measurement object S. can be done. As a result, it becomes possible to measure the shape over a wide range on the surface of the object S to be measured.

(3) In the shape measuring apparatus 500 according to the present embodiment, it is possible to use the first configuration function using the first marker M1, for example, in order to measure the shape of the measurement object S that involves rotation. set. In this case, the first marker M1 and the measurement object S are imaged. Three-dimensional shape data of the first marker M1 and three-dimensional shape data of the measuring object S are generated based on the image data obtained by the imaging. Correction processing of the three-dimensional shape data according to the first calibration function is performed based on the three-dimensional shape data of the first marker M1 and the dimensions of the first marker M1.

In this case, since the three-dimensional shape data of the first marker M1 is generated while the measuring object S is held by the holding unit 191, the holding unit 191 holds the measuring object S, and the holding unit 191 When the rotation state changes, the rotation state of the first marker M1 also changes in the same manner as the holding portion 191. FIG. Therefore, the three-dimensional shape data of the first marker M1 is more suitable for correcting the three-dimensional shape data of the measurement object S than when the measurement object S is not held by the holding unit 191. It becomes a thing. As a result, it is possible to measure the shape of the object S over a wide range with high accuracy.

Note that the first marker M1 forms part of the holding portion 191 . Therefore, in order to calibrate the shape measuring apparatus 500, the work of attaching the calibration tool to the holding part 191 and the work of exchanging the calibration tool attached to the holding part 191 with the measurement object S are unnecessary. Therefore, the time required for calibrating the shape measuring device 500 is shortened.

(4) In the shape measuring apparatus 500, the use of the second configuration function using the second marker M2 is set in order to measure the shape of the measurement object S that involves rotation. In this case, the second marker M2 and the measurement object S are imaged, and three-dimensional shape data of the second marker M2 and three-dimensional shape data of the measurement object S obtained by the imaging are generated. Correction processing of the three-dimensional shape data according to the second calibration function is performed based on the three-dimensional shape data of the second marker M2 and the dimensions of the second marker M2. According to the second calibration function, the measurement accuracy of the measurement object S is improved by using the three-dimensional shape data of the first marker M1 and the second marker M2.

Furthermore, the shape measuring apparatus 500 is set to use a third configuration function that does not use the first marker M1 and the second marker M2 in order to measure the shape of the measurement object S that involves rotation. be. In this case, based on the three-dimensional shape data of the measuring object S, correction processing of the three-dimensional shape data according to the third calibration function is performed. According to the third calibration function, it is not necessary to image the first marker M1 and the second marker M2, so the time required for measuring the measurement object S can be shortened.

(5) The user selects one of the first to third calibration functions by checking or unchecking either the first calibration check box 463 or the second calibration check box 464 in FIG. 31, for example. You can choose one. Therefore, since a desired calibration function can be easily selected according to the purpose of shape measurement, the convenience of shape measurement of the measurement object S is improved.

[10] Other Embodiments (1) In the shape measurement process according to the above embodiment, the area setting unit 21d sets the measurement range of the measurement object S in the Z direction when setting the measurement area of the measurement object S. You may Further, when the set imaging range in the Z direction exceeds the range of the measurement space 101 in the Z direction (range of the depth of field of the light receiving unit 120), synthesis in the height direction may be performed.

In this case, the area setting screen is displayed on the display unit 400 so as to accept whether or not it is necessary to set the measurement range of the measurement object S in the Z direction, for example. FIG. 43 is a diagram showing an example of a region setting screen capable of accepting whether or not it is necessary to set the measurement range of the measurement object S in the Z direction. In the area setting screen 404 of FIG. 43, the height range button 471 is displayed in the secondary display area 420 while the area setting map image is displayed in the main display area 410 .

The user operates the height range button 471 to set the measurement range in the Z direction. Thereby, the area setting screen for setting the measurement range of the measurement object S in the Z direction is displayed on the display unit 400 . FIG. 44 is a diagram showing an example of a region setting screen for setting the measurement range of the measurement object S in the Z direction.

On the area setting screen 409 of FIG. 44, various images and operation window is displayed.

Specifically, in the main display area 410, the area setting map image IMa of the measurement angular position designated by the angular position list 441 and the area setting of the measurement angular position shifted by 90° from the designated measurement angular position are displayed. A map image IMb is displayed. An upper limit mark 472 and a lower limit mark 473 respectively indicating the upper limit position and lower limit position of the measurement range in the Z direction are superimposed on the area setting map image IMb so as to be vertically slidable. As a result, the user can vertically slide the upper limit mark 472 and the lower limit mark 473 while viewing the image of the measurement object S displayed in the area setting map image IMb, thereby adjusting the Z angle at the specified measurement angle position. Direction measurement range can be set.

Further, in the main display area 410, a range setting window 481 is displayed for designating the measurement range in the Z direction numerically or for issuing a command for automatic setting. The range setting window 481 displays an upper limit input section 482 and a lower limit input section 483 for the user to input numerical values for the upper limit position and lower limit position of the measurement range in the Z direction, respectively. The range setting window 481 also displays a width input section 484 and a center input section 485 for the user to input numerical values for the size of the measurement range in the Z direction (vertical width) and its center position. . Further, the range setting window 481 displays an automatic setting button 486 for commanding automatic setting of the measurement range in the Z direction for each of all the measurement angular positions.

Thereby, the user can set the measurement range by inputting numerical values into the upper limit input section 482 and the lower limit input section 483 instead of operating the upper limit mark 472 and the lower limit mark 473 . Alternatively, the user can set the measurement range by inputting numerical values into the width input section 484 and the center input section 485 . Alternatively, the user can set the measurement range in the Z direction for all measurement angular positions by operating the automatic setting button 486 .

Note that when the automatic setting button 486 is operated, the area setting unit 21d may set the measurement range for each measurement angular position as follows. For example, when setting the measurement range in the Z direction for one measurement angle position, the area setting unit 21d reads the area setting map image of the measurement angle position shifted by 90° from the one measurement angle position. Further, the area setting unit 21d detects the range in the Z direction where the measurement object S exists from the read area setting map image, and sets the detected range as the range in the Z direction of one measurement angular position.

Alternatively, the area setting unit 21d can also set the measurement range for each measurement angular position as follows. For example, the rotation control section 21b sequentially moves the rotation unit 190 to a plurality of measurement angular positions. Therefore, the imaging control unit 21c causes the light receiving unit 120 to image a plurality of portions of the measurement object S in a state of being at each measurement angle position, and the light receiving unit 120 captures each of the plurality of portions of the measurement object S facing upward. The stage 140 is moved in the Z direction so that the focal plane 120F is aligned. Then, the region setting unit 21d sets the measurement range based on the movement range of the stage 140 in the Z direction.

In this case, when the measurement range exceeds the range of the measurement space 101 (the range of the depth of field of the light receiving unit 120), the imaging control unit 21c allows the plurality of portions of the measurement object S to be within the range of the measurement space 101. As included, multiple positions of the top surface 141s in the Z direction may be determined.

Alternatively, the area setting unit 21d can also set the measurement range for each measurement angular position as follows. For example, the rotation control section 21b sequentially moves the rotation unit 190 to a plurality of measurement angular positions. Therefore, the imaging control unit 21c captures an image of the measurement object S using the pattern light while the measurement object S is at each measurement angle position, and generates three-dimensional shape data to generate three-dimensional shape data of the measurement object S in the Z direction. The position of the upper end of S is detected. Then, the region setting unit 21d sets the measurement range based on the generated three-dimensional shape data of the object S to be measured. When imaging the measurement object S for setting the measurement range in the Z direction, it is preferable to reduce the number of pattern light irradiations by using pattern light with low resolution as so-called rough measurement.

As described above, the measurement range of the measurement object S in the Z direction is set. As a result, when the measurement range set at an arbitrary measurement angular position exceeds the measurement space 101, the CPU 210 generates three-dimensional shape data a plurality of times while changing the position of the stage 140 in the Z direction at the measurement angular position. can do. Moreover, by performing height direction synthesis using a plurality of generated three-dimensional shape data, it becomes possible to measure the shape over a wider range on the surface of the object to be measured.

(2) In the shape measurement process according to the above embodiment, when measuring the shape of the measurement object S involving rotation, each measurement angular position is imaged using illumination light, but the present invention is not limited to this.

The CPU 210 may perform the following processing in order to detect the presence area of the measurement object S corresponding to each measurement angular position. For example, in step S204, the rotation control unit 21b controls the rotation unit 190 so that the measurement object S is held at some representative angular positions (for example, 0° and 180°) out of the plurality of measurement angular positions. do. In addition, the imaging control unit 21c controls the light projecting unit so that a plurality of image data are generated by imaging the measurement object S while irradiating the pattern light while the measurement object S is at each representative angular position. 110A, 110B and light receiving section 120 are controlled. The three-dimensional shape data generator 21g generates three-dimensional shape data corresponding to each representative angular position based on a plurality of image data generated with the measurement object S at each representative angular position.

In this case, when the three-dimensional shape data corresponding to one representative angular position of 0° and the three-dimensional shape data corresponding to another representative angular position of 180° are combined, almost the entire measurement object S can be obtained. You can grasp the shape. Therefore, the area setting unit 21d detects the existing area of the measurement object S corresponding to the plurality of measurement angular positions based on the generated three-dimensional shape data. According to the above processing, it is not necessary to image the measurement object at each of the plurality of angular positions in order to detect the existence region for the plurality of measurement angular positions.

The three-dimensional shape data generated for detecting the existence area does not require high measurement accuracy. Therefore, when generating the three-dimensional shape data for detecting the existing region, the pattern light having a lower resolution than when generating the three-dimensional shape data for obtaining the shape of the measurement object S is used. It is preferable to reduce the number of times of irradiation.

(3) In the shape measurement process according to the above embodiment, the data synthesizing unit 21h receives an instruction as to whether or not to synthesize three-dimensional shape data at a plurality of measurement angular positions in the process of step S107. The invention is not so limited.

In step S107, the data synthesizer 21h may accept to synthesize only a part of the plurality of three-dimensional shape data of the plurality of measured angular positions. In this case, for example, in the sub-display area 420 of FIG. 29, instead of the synthesis necessity check box 457, an input section or the like for selecting the measurement angle position at which the three-dimensional shape data should be synthesized from among the plurality of measurement angle positions. may be provided.

When it is accepted to synthesize only the plurality of three-dimensional shape data obtained at some of the plurality of measured angular positions, the data synthesizing unit 21h synthesizes a part of the plurality of three-dimensional shape data according to the received information. may be synthesized only.

Note that the display unit 400 may display a data synthesizing command section for instructing whether or not to synthesize at least a portion of the three-dimensional shape data arranged in the rotational direction. Specifically, a check box or the like for individually designating three-dimensional shape data to be synthesized is displayed as a data synthesizing command section in the sub-display area 420 of the area setting screens 403 to 405 in FIGS. may Thereby, the user can acquire the three-dimensional shape data of the shape of the measurement object S in a desired manner.

(4) In the above embodiment, the rotation angle setting unit 21f reads a plurality of measurement angular positions predetermined for each mode from the storage device 240 in the process of step S212, and sets the plurality of measurement angular positions. However, the invention is not so limited.

As the process of step S212, the rotation angle setting unit 21f may set a plurality of measurement angular positions by the following method instead of reading a plurality of predetermined measurement angular positions.

For example, when the axis shape area setting mode is selected in step S211, the rotation angle setting unit 21f first shifts the Z direction of the stage 140 so that the focal plane 120F of the light receiving unit 120 coincides with the highest part of the object S to be measured. Adjust the direction position. Next, the rotation angle setting unit 21f determines the position of the stage 140 in the Z direction when the focal plane 120F of the light receiving unit 120 is positioned on the surface of the measurement object S, and the working distance WD (FIG. 8) of the light receiving unit 120. , the radial size (actual size) of the measurement object S with reference to the rotation axis RA is calculated.

In this case, it is possible to grasp the size of the measurement area set on the outer peripheral surface of the measurement object S based on the calculated size. As a result, when the measurement object S is imaged by the light receiving unit 120 while being rotated around the rotation axis RA, the rotation angle setting unit 21f is set such that two measurement regions that are continuous in the rotation direction partially overlap each other. may set a plurality of measurement angular positions. Alternatively, the rotation angle setting unit 21f presents to the user a measurement angle position where two measurement regions that are continuous in the rotation direction partially overlap each other, and displays a message or the like to guide the user to set the measurement angle position. 400 may be displayed.

According to the method of setting the measurement angular position described above, the measurement area is appropriately set so as to cover the entire surface of the measurement object S in the rotation direction of the measurement object S held by the rotation unit 190 .

(5) The shape measuring device 500 according to the above embodiment may have a so-called autofocus function. For example, the position of the upper surface 141s in the Z direction may be adjusted so that the focal plane 120F of the light receiving unit 120 is located on at least part of the measuring object S when the light receiving unit 120 captures the image of the measuring object S. Alternatively, the position of the lens 122 within the light receiving section 120 may be adjusted.

(6) In the shape measurement process according to the above embodiment, the measurement area is set by the user confirming the area setting map image, but the present invention is not limited to this. In the shape measurement process, for example, the shape of the measuring object S may be measured according to a user's command without generating the area setting map image.

Specifically, with the rotating unit 190 attached to the stage 140, the user should operate the operation unit 250 to measure the shape of the measurement object S without checking the area setting map image. command. In this case, the CPU 210 performs imaging using pattern light at each of a plurality of predetermined measurement angular positions, and generates three-dimensional shape data.

Therefore, the CPU 210 sets one measurement area corresponding to each measurement angular position, generates three-dimensional shape data for the one measurement area, and determines whether the measurement object S exists from the generated three-dimensional shape data. While estimating (detecting) the area, a new measurement area is set as necessary. At this time, the new measurement area is set so as to partially overlap the one measurement area. After that, the CPU 210 generates three-dimensional shape data, estimates (detects) the area where the measurement object S exists, and sets a new measurement area for the new measurement area.

In this manner, the CPU 210 alternately repeats the generation of the three-dimensional shape data, the estimation of the area where the measurement object S exists, and the setting of the measurement area for each measurement angle position, thereby allowing the measurement object S to be measured. Circumferential shape measurements may be taken.

(7) In the shape measuring apparatus 500 according to the above-described embodiment, the information about the measurement angular position and the measurement area set at the time of shape measurement of the measurement object S is set together with the three-dimensional shape data of the measurement object S. may be stored in the storage device 240 as In this case, for example, by reading the setting information stored in the storage device 240 according to the measurement object S, the measurement angular position and the measurement area may be set based on the read setting information.

In this way, since the shape measuring apparatus 500 has the function of storing and reading setting information, the user can set the measurement angle position and the measurement area when sequentially measuring the shapes of a large number of measurement objects S having the same shape. No need to repeat work.

(8) In the process of step S203 of the shape measurement process according to the above embodiment, the measurement object S is imaged by the low-magnification camera at a plurality of measurement angle positions. At this time, based on the image data of the measurement object S captured at each measurement angular position, it is determined whether or not the measurement object S interferes with the stage 140 at other measurement angular positions. may Furthermore, for other measurement angular positions determined to interfere with the measurement object S and the stage 140, imaging of the measurement object S is skipped, and a message to the effect that the measurement object S and the stage 140 interfere is displayed. Alternatively, an index or the like may be displayed on the display unit 400 .

FIG. 45 is a diagram for explaining the interference determination function between the measuring object S and the stage 140. FIG. For example, it is assumed that the area setting map image of FIG. 45(a) is generated by imaging the measurement object S at one measurement angular position. In this case, the position of the rotation axis RA on the area setting map image is known, as indicated by the dashed line RAi in FIG. 45(a). Therefore, by obtaining the distance di1 between one end of the target object image SI and the one-dot chain line RAi in the direction perpendicular to the rotation axis RA on the region setting map image, it is possible to determine how the one end of the measurement target S is located. You can find out if it rotates with a certain radius.

FIG. 45(b) shows a side view of the rotation unit 190 corresponding to the area setting map image of FIG. 45(a) as viewed in the X direction. As described above, if the radius at which one end of the measurement object S rotates can be obtained, the obtained radius d1, the rotation unit 190 and the stage 140 are shown in FIG. 45(b). The angular range rθ in which one end portion of the measurement object S interferes with the stage 140 can be obtained based on the actual dimension of .

(9) In the shape measuring apparatus 500 according to the above embodiment, the rotating unit 190 has a configuration in which the holding portion 191 protrudes from the side surface ss1 of the casing of the rotation driving portion 192. However, the present invention It is not limited to this.

FIG. 46 is a diagram showing a configuration example of a rotating unit 190 according to another embodiment. As shown in FIG. 46( a ), the rotation unit 190 of this example includes a fixed holding member 810 and a rotary holding member 820 in addition to the holding portion 191 and the rotation driving portion 192 . The fixed holding member 810 is composed of two strut portions 811 and a connecting portion 812 . The connecting portion 812 is provided so as to extend in the horizontal direction. The two pillars 811 are provided so as to extend upward from both ends of the connecting portion 812 . The connecting portion 812 connects the lower end portions of the two supporting columns 811 and is configured to be installable on the upper surface 141 s of the stage 140 .

The rotary holding member 820 is provided between the two support columns 811 of the fixed holding member 810 . The rotation holding member 820 is composed of two supporting columns 821 and a connecting portion 822 . One end of each of the one strut portions 821 is rotatably supported by one of the strut portions 811 of the fixed holding member 810 around a predetermined rotating shaft 830 . One end of each of the other strut portions 821 is rotatably supported by the other strut portion 811 of the fixed holding member 810 around a predetermined rotation axis 830 . The other ends of the two strut portions 821 are connected by a connecting portion 822 . A rotation driving portion 192 is attached to the connecting portion 822 .

According to the above configuration, while the fixed holding member 810 is fixed on the stage 140, the rotary holding member 820 can be rotated with respect to the fixed holding member 810 as shown in FIG. 46(b). As a result, the degree of freedom of the adjustable posture of the measuring object S held by the holding portion 191 can be improved.

(10) In the measuring unit 100 according to the above embodiment, the stage driving unit 146 moves the stage 140 relative to the light receiving unit 120 in order to adjust the positional relationship between the upper surface 141s of the stage 140 and the light receiving unit 120. 141 s of upper surfaces are moved. The invention is not limited to this.

For example, the measurement unit 100 has a configuration in which the optical system supporter 992 is movably supported on the top surface 141s of the stage 140 in order to adjust the positional relationship between the top surface 141s of the stage 140 and the light receiving unit 120. may have. Further, a driving section for moving the optical system support 992 may be provided.

(11) In the shape measuring apparatus 500 according to the above embodiment, the first marker M1 and the second marker M2 used in the first and second calibration functions each have a cylindrical outer peripheral surface. The invention is not limited to this.

A shaft member having a regular polygonal cross section may be used as the first marker M1 and the second marker M2. In this case, the number of vertices of the regular polygon representing the cross section of the shaft member is preferably greater than four.

(12) In the shape measuring apparatus 500 according to the above embodiment, the measurement object S is irradiated with the pattern light a plurality of times, and the measurement object S is imaged. Three-dimensional shape data is generated based on a plurality of image data obtained by imaging. However, the invention is not limited to the above examples.

The three-dimensional shape data may be generated based on image data obtained by another imaging method instead of imaging with irradiation of pattern light. For example, three-dimensional shape data may be generated by a stereo method by imaging the measurement object S with a plurality of light receiving units 120 or by imaging the measurement object S from a plurality of positions.

(13) In shape measuring apparatus 500 according to the above-described embodiment, stage 140 is provided for placing measurement object S and for supporting rotation unit 190, but the present invention is not limited to this. The stage 140 may not be provided if the shape of the measurement object S held by the rotation unit 190 can be measured. In this case, the rotating unit 190 is attached to the pedestal 990 of FIG. 3, for example.

(14) The shape measuring apparatus 500 according to the above embodiment has first, second and third calibration functions, but the present invention is not limited to this. Shape measuring device 500 may not have at least some of the first, second and third calibration functions.

(15) In the shape measurement process according to the above embodiment, when performing shape measurement of the object S to be measured that is rotated by the rotation unit 190, a plurality of measurement angular positions are set by the measurement area setting process. The invention is not limited to this.

When performing shape measurement of the measurement object S with rotation by the rotation unit 190, in the measurement area setting process, for example, one measurement angle position designated by the user may be settable.

In this case, the user operates the operation unit 250 to specify, for example, one measurement angular position and give the CPU 210 a shape measurement command corresponding to the one measurement angular position. Therefore, the CPU 210 controls each component of the shape measuring device 500 so that three-dimensional shape data corresponding to one designated angular position is generated in response to a shape measurement command corresponding to one measurement angular position. control elements. Thereby, the user can acquire the three-dimensional shape data of the shape of the measurement object S in a desired manner.

(16) In the shape measuring apparatus 500 according to the above embodiment, when setting the measurement region for performing shape measurement of the measurement object S that involves rotation, based on the image of the measurement object S obtained by imaging, A presence area is detected, but the invention is not so limited. The existence area is detected based on the dimension information (for example, CAD data, etc.) of the measurement object S stored in advance in the storage device 240, or the input dimension information obtained by the CPU 210. may be

(17) In the above embodiment, when setting the measurement area for performing the shape measurement of the measurement object S involving rotation, the existence area of the measurement object S at each measurement angular position is detected. Also, based on the existence area of the measurement object S, a plurality of measurement areas corresponding to each measurement angular position are set. The invention is not limited to this example.

In the shape measuring apparatus 500 according to the above embodiment, when setting the measurement area for performing the shape measurement of the measurement object S that involves rotation, the measurement object in the X direction and the Y direction at each measurement angular position The width of S may be detected. In this case, a plurality of measurement regions corresponding to each measurement angular position may be set based on the detected width.

[11] Correspondence between each constituent element of the claims and each element of the embodiment Hereinafter, an example of correspondence between each constituent element of the claim and each element of the embodiment will be described. In the above embodiment, the shape measuring device 500 is an example of a three-dimensional shape measuring device, the holding section 191 is an example of a holding section, the rotation axis RA is an example of a rotation axis, and the rotation drive section 192 is a rotation drive. , and the rotation unit 190 is an example of the rotation unit.

Further, the light receiving unit 120 and the CPU 210 are examples of the imaging unit, the detection unit and the data acquisition unit, the XY stage 141 and the stage driving unit 146 are examples of the translation driving unit, and the CPU 210 is an example of the setting unit and the control unit. , ROM 220, work memory 230, and storage device 240 are examples of the storage unit, and the display unit 400 is an example of the display unit.

The three-dimensional shape data generation unit 21g and the data synthesis unit 21h of the CPU 210 are examples of the data generation unit, the lens 123B is an example of the first optical system, the camera 121B is an example of the first camera, and the lens 123A. is an example of the second optical system, and the camera 121A is an example of the second camera.

Further, the light receiving unit 120 and the CPU 210 are examples of the detection unit, the operation unit 250 is an example of the operation unit, the Z stage 142 and the stage driving unit 146 are examples of the vertical driving unit, and the stage 140 is an example of the stage. The upper surface 141s of the stage 140 is an example of the upper surface, the light projecting units 110A and 110B are examples of projectors, the light projecting unit 110A is an example of a first light projecting device, and the light projecting unit 110B is an example of a second light projecting device. In the measurement space 101, the pattern light irradiation area by the first light projection apparatus, the pattern light irradiation area by the second light projection apparatus, and the imaging area of the imaging unit overlap. It is an example of space.

Various other elements having the structure or function described in the claims can be used as each component of the claims.

21a movement control unit 21b rotation control unit 21c imaging control unit 21d area setting unit 21e setting screen presentation unit 21f rotation angle setting unit 21g three-dimensional shape data generation unit 21h data Synthesis unit 21i Data correction unit 21j Detachment determination unit 21k Display control unit 91 Rotation support shaft 92, 93 Holding piece 92e, 93e, es1, es2 End face 92h, 93h Hole, 94... Rod-shaped member 100... Measuring part 101... Measuring space 110A, 110B... Light projecting part 111... Measuring light source 112... Pattern generating part 112S... Pattern emitting surface 113, 114, 115, 122, 123A, DESCRIPTION OF SYMBOLS 123B... Lens, 116, 125A, 125B... Diaphragm, 117, 118... Mirror, 120... Light-receiving part, 120F... Focal plane, 121a... Imaging element, 121A, 121B... Camera, 124... Half mirror, 130... Illumination light output part , 140... Stage, 141... XY stage, 141c, 194... Connector, 141h... Screw hole, 141s... Upper surface, 142... Z stage, 145... Stage operating unit, 146... Stage driving unit, 150, 310... Control board, 160 Head casing 190 Rotating unit 191 Holding part 192 Rotary drive part 193 Cable 195 Holding dial 199 Mounting part 200 PC 210 CPU 220 ROM 230 For work Memory 240 Storage device 250 Operation unit 300 Control unit 320 Illumination light source 400 Display unit 401 Basic measurement screen 402 to 409 Area setting screen 410 Main display area 411 Horizontal Movement operation window 412 Movement button 413 Rotation operation window 414 Origin button 415 Forward rotation button 416 Reverse rotation button 417 Holding part mark 418 Reference attitude mark 419 Measurement angle position mark , 420... Sub-display area, 421... Area setting button, 422... Edit button, 423... Area clear button, 424... View confirmation image, 425... Measurement start button, 426... Exclude button, 427... OK button, 428... Cancel button 429 Top face removal button 431 Rotation ON button 432 Rotation OFF button 434 Box whole circumference button 435 Box part button 436 Axis button 437 Rotation detail button 441 Angle position list 451 ... reference attitude input frame, 452 ... reference attitude registration button, 453 ... angle condition setting section, 454 ... angle pitch setting section, 455 ... Number of measurement setting unit 456 Excluded angle input frame 457 Synthesis necessity check box 463 First calibration check box 464 Second calibration check box 465 Marker inversion check box 471 Range button 472... Upper limit mark, 473... Lower limit mark, 481... Range setting window, 482... Upper limit input section, 483... Lower limit input section, 484... Width input section, 485... Center input section, 486... Automatic setting button, 500... Shape measurement Apparatus 810 Fixed holding member 811, 821 Strut part 812, 822 Connecting part 820 Rotating holding member 830, RA Rotating shaft 990 Pedestal 991 Strut 992 Optical system support, DRA... Design rotation axis, IMa, IMb... Area setting map image, M1... First marker, M2... Second marker, M2a... Large diameter part, M2b... Small diameter part, M2i... Marker image, MM, MMa, MMb: unit area frame, pp: power source, rθ: angle range, RD: reference distance, RM: movable stroke range, ROA, TOA1, TOA2: optical axis, S: object to be measured, SI: object image, sm: Stepping motor, ss1, ss2... Side surface, sv... Deviation, WD... Working distance

Claims (15)

A three-dimensional shape measuring device that generates three-dimensional shape data representing the three-dimensional shape of an object to be measured,
a rotation unit including a holding section that holds the object to be measured and a rotation driving section that rotates the holding section to a first rotation angle and a second rotation angle around a rotation axis extending in the X-axis direction;
Image data for generating three-dimensional shape data showing an image of the measurement object, which has an optical axis extending in the Z-axis direction orthogonal to the X-axis and is held by the holding unit, by imaging the measurement object an imaging unit for generating
a translation drive unit that moves the rotation unit relative to the imaging unit so that the imaging field of the imaging unit is sequentially moved in the Y-axis direction orthogonal to the X-axis and the Z-axis;
A plurality of first measurements arranged in the Y-axis direction based on the width of the measurement object extending in the Y-axis direction viewed from the imaging unit while the measurement object is rotated by the first rotation angle. A region is set, and arranged in the Y-axis direction based on the width of the measurement object extending in the Y-axis direction as seen from the imaging unit in a state where the measurement object is rotated to the second rotation angle. a setting unit for setting a plurality of second measurement regions;
The object to be measured is rotated to the first rotation angle, the imaging field of view of the imaging unit is sequentially moved to the plurality of first measurement regions, and the object to be measured is imaged. and the imaging field of the imaging unit is sequentially moved to the plurality of second measurement regions to capture an image of the measurement object. A three-dimensional shape measuring apparatus, comprising: a drive unit; and a control unit that controls the imaging unit. A memory that stores the setting that associates the first rotation angle with the plurality of first measurement regions and the setting that associates the second rotation angle with the plurality of second measurement regions, which are set by the setting unit. further comprising the
2. The three-dimensional shape measuring apparatus according to claim 1, wherein said control section controls said translation drive section, said rotation drive section, and said imaging section based on settings stored in said storage section. further comprising a detection unit that detects an existence area of the measurement object in the Y-axis direction at each of the first rotation angle and the second rotation angle,
Based on the width of the existence area detected by the detection unit, the setting unit determines the number of the first measurement areas arranged in the Y-axis direction necessary for capturing an image of the entire existence area and the second measurement area. 3. The three-dimensional shape measuring apparatus according to claim 1, wherein the number of regions is automatically set. a display unit configured to display a setting screen for adjusting the plurality of first measurement regions and the plurality of second measurement regions set based on the existence region of the measurement object detected by the detection unit; prepared,
The setting unit is configured to receive an instruction from a user and expand or reduce the number of the first measurement area and the second measurement area extending in the Y-axis direction on the setting screen. 3. The three-dimensional shape measuring device according to 3. The control unit relatively moves the object to be measured in the X-axis direction and the Y-axis direction with respect to the imaging unit at each of the first rotation angle and the second rotation angle. controlling the imaging unit, the translation driving unit, and the rotation driving unit so as to generate a map image in which the entire measurement object is imaged by imaging repeatedly;
The display unit displays the map image on the setting screen, and superimposes the plurality of first measurement regions and the plurality of second measurement regions set by the setting unit on the map image. and
The three-dimensional shape measuring device generates a plurality of three-dimensional shape data respectively corresponding to the plurality of first measurement regions and the plurality of second measurement regions, and synthesizes the generated plurality of three-dimensional shape data. 5. The three-dimensional shape measuring apparatus according to claim 4, further comprising: a data generator for generating three-dimensional shape data of the entire measurement object. The imaging unit is
a first optical system that forms an image of light at a first magnification;
a first camera that receives light imaged by the first optical system;
a second optical system that forms an image of light at a second magnification lower than the first magnification;
a second camera that receives the light imaged by the second optical system,
the map image is generated by imaging the entire measurement object at the second magnification;
The data generation unit generates the three-dimensional shape data based on the plurality of image data generated by imaging the plurality of first measurement regions and the plurality of second measurement regions at the first magnification. The three-dimensional shape measuring device according to claim 5. The rotation drive section is configured to be capable of sequentially rotating the holding section to a plurality of different rotation angles including the first rotation angle and the second rotation angle,
The setting unit is arranged in the Y-axis direction based on the width of the measurement object extending in the Y-axis direction as viewed from the imaging unit when the measurement object is at each of the plurality of different rotation angles. is configured to be able to set the measurement area of
The control unit rotates the measurement object to each of the plurality of different rotation angles, sequentially moves the imaging field of view of the imaging unit to the plurality of measurement regions corresponding to the rotation angles, and rotates the measurement object. controlling the translation drive unit, the rotation drive unit, and the imaging unit so as to perform imaging of
The three-dimensional shape measuring device
a detection unit that detects the presence area of the measurement object in the Y-axis direction as a width of the measurement object at each of the plurality of different rotation angles;
a display unit for displaying a setting screen for adjusting the measurement area set for each rotation angle based on the existence area of the measurement object detected by the detection unit;
an operation unit for selecting whether the object to be measured is box-shaped or shaft-shaped,
The display unit displays, as the setting screen, a first setting screen for performing settings related to measurement of a box-shaped measurement object when a box shape is selected by the operation unit. 3. The three-dimensional shape measuring apparatus according to claim 1, wherein, when is selected, a second setting screen for setting the measurement of the shaft-shaped object to be measured is displayed as the setting screen. The operation unit is configured to be able to select a plurality of different discrete rotation angles in a state where the first setting screen is displayed on the display unit by selecting a box shape with the operation unit,
The display unit is set on the image of the measurement object captured at each of the plurality of different rotation angles selected by the operation unit on the first setting screen as detected by the detection unit. 8. The three-dimensional shape measuring apparatus according to claim 7, wherein the plurality of measurement areas are displayed in a superimposed manner. When the second setting screen is displayed by selecting the shaft shape by the operation unit, the display unit is configured to display the second setting screen at a specific one rotation angle among the plurality of different rotation angles. displaying an image of the object to be measured captured by the imaging unit;
9. The three-dimensional shape measuring apparatus according to claim 7, wherein said setting unit receives designation of said one specific rotation angle from a user. 10. The setting unit according to any one of claims 7 to 9, wherein, when the box shape is selected by the operation unit, the plurality of different rotation angles are set at angular pitches that are integral multiples of a predetermined angle. The three-dimensional shape measuring device according to the item. When the shaft shape is selected by the operation unit, the setting unit sets the plurality of different rotation angles necessary to measure the entire circumference of the measurement object when the shaft-shaped measurement object is rotated. automatically set the pitch of based on the diameter of the object to be measured,
The tertiary according to any one of claims 7 to 10, wherein the control unit controls the rotation drive unit so as to rotate the measurement object at the pitch of the rotation angle set by the setting unit. Original shape measuring device. The setting unit receives input from the user of a rotation angle pitch for rotating the measurement object having the shaft shape when the shaft shape is selected by the operation unit, and the pitch of the rotation angle is used for the measurement. 12. The three-dimensional shape measuring apparatus according to any one of claims 7 to 11, wherein the numerical values are limited to values necessary for measuring the entire circumference of the object to be measured when the object is rotated. further comprising a data acquisition unit that acquires three-dimensional shape data corresponding to the plurality of first measurement regions;
The setting unit can set a plurality of second measurement regions aligned in the Y-axis direction based on the plurality of three-dimensional shape data corresponding to the plurality of first measurement regions acquired by the data acquisition unit. 3. The three-dimensional shape measuring apparatus according to claim 1, wherein the three-dimensional shape measuring apparatus is configured to: further comprising a vertical drive unit for changing the relative distance in the Z-axis direction between the rotation unit and the imaging unit;
The control unit captures images of the plurality of first measurement regions and the plurality of second measurement regions at each of the first rotation angle and the second rotation angle a plurality of times while changing the relative distance. controlling the translation drive section, the vertical drive section, the rotation drive section, and the imaging section to generate a plurality of the image data;
The data generator performs the plurality of first measurements based on a plurality of image data generated by imaging the plurality of first measurement regions and the plurality of second measurement regions a plurality of times while changing the relative distance. generating a plurality of three-dimensional shape data respectively corresponding to the region and the plurality of second measurement regions, and synthesizing the generated plurality of three-dimensional shape data to generate the three-dimensional shape data of the measurement object; The three-dimensional shape measuring apparatus according to claim 5 or 6. a stage on which the rotating unit is attached;
a projector that irradiates the upper surface of the stage with patterned light having a periodic pattern from an obliquely upper position a plurality of times while shifting the phase;
The imaging unit is provided above the stage such that an optical axis thereof coincides with the Z-axis, and pattern light is emitted from the projector onto the measurement object held by the rotation unit. capturing images of the object to be measured a plurality of times by receiving the reflected pattern light to generate a plurality of image data representing images of the object to be measured;
The projector includes first and second projection devices arranged in the X-axis direction and arranged symmetrically with respect to a virtual plane perpendicular to the X-axis direction,
Each of the first and second light projecting devices has an optical axis orthogonal to the Y-axis and inclined at a predetermined angle with respect to the X-axis and the Z-axis, respectively. emitting pattern light along the axis toward the optical axis of the imaging unit;
When the stage is at a predetermined reference position with respect to the imaging section, the rotating unit is configured to: The three-dimensional shape measuring apparatus according to any one of claims 1 to 14, provided so as to be arranged at a position out of a space in which the irradiation region of and the imaging region of the imaging unit overlap.

Images