JP2022154814A - Optical drive device - Google Patents

Abstract

To provide a highly reliable optical drive device.SOLUTION: An optical drive device is provided, comprising a movable part 2 capable of having an optical element attached thereto, a driving part 3 for movably holding the movable part 2, and a first fixed part 10 having a fixing surface 171 having one end of the driving part 3 fixed thereto via a joint member, where the fixed surface 171 has protrusions 170a-170c formed thereon.SELECTED DRAWING: Figure 4

Description

The present invention relates to an optical driving device.

In recent years, a smooth impact drive mechanism (SIDM: Smooth Impact Drive Mechanism (registered trademark)) has attracted attention as a drive mechanism using a piezoelectric element. The SIDM is compact and enables high-precision driving, and is used as a driving mechanism for optical driving devices.

For example, Patent Document 1 discloses an optical driving device having an SIDM, which has a lens frame to which a lens can be attached, an actuator that movably holds the lens frame, and a base member that holds the actuator. A device is described. The actuator comprises a piezoelectric element, a drive shaft connected to one end thereof, and a weight connected to the other end. In the lens driving device described in Patent Document 1, the actuator can be held by the base member by fixing the weight to the opening (fixing surface) of the base member.

By the way, in order to enable high-precision driving in this type of optical drive device, it is necessary to assemble each part with high precision. It is preferable to process. However, it is unavoidable that the machining accuracy of each component varies to a certain extent. For example, the surface of the weight member may be inclined or uneven (distorted) due to variations in machining accuracy. If such a weight member is fixed to the opening of the base member, the perpendicularity of the actuator when the bottom surface of the base member is used as a reference plane is lowered, and highly accurate driving cannot be performed.

Japanese Patent Application Laid-Open No. 2020-13063

SUMMARY OF THE INVENTION An object of the present invention is to provide an optical driving device that enables highly accurate driving.

In order to achieve the above object, an optical driving device according to the present invention includes:
a movable part to which an optical element can be attached;
a drive unit that movably holds the movable unit;
a fixing portion in which one end of the driving portion is fixed to a fixing surface via a joint member;
A protrusion is formed on the fixing surface.

In the optical driving device according to the present invention, one end of the driving portion is fixed to the fixed surface via the joint member, and the fixed surface is formed with the convex portion. Therefore, when one end of the drive portion is fixed to the fixed surface, the surface of the drive portion locally abuts the fixed surface at the position of the convex portion, etc. It is limited to the position of the convex portion and the like. Therefore, even if variations in machining accuracy occur on the surface of the driving part fixed to the fixing surface, the possibility that the part affected by the variation comes into contact with the fixing surface is limited. Influence of variations in machining accuracy on the verticality of the driving portion with respect to the reference surface (bottom surface of the fixing portion) is reduced compared to the case where the fixing surface is brought into contact with the entire surface. Therefore, it is possible to assemble the driving part with respect to the fixed part with high assembly accuracy, and the verticality of the driving part is sufficiently secured when the bottom surface of the fixed part is used as a reference plane, enabling highly accurate driving. An optical drive can be realized.

In addition, even if the fixing surface itself has variations in machining accuracy, if the variations do not occur at the position of the projection, the variation will not affect the fixing of one end of the drive unit to the fixing surface. do not have. Therefore, even in such a case, the effects described above can be obtained.

Preferably, the convex portion is plural. With such a configuration, one end of the drive section can be stably fixed to the fixing surface via the plurality of projections while obtaining the above-described effects.

Preferably, a fusion zone is formed at the top of the projection. At the position where the fusion zone is formed, the top of the projection is scooped out, and the height of the projection is lower than before the fusion zone is formed. Therefore, even if the surface of the driving portion fixed to the fixing surface has variations in processing accuracy, it is possible to appropriately adjust the range of the melted portion (that is, adjust the height of the convex portion) according to the degree of variation. Therefore, it is possible to absorb variations in processing accuracy by the convex portion. As a result, it is possible to assemble the driving portion with respect to the fixed portion with high assembly accuracy, and it is possible to sufficiently ensure the verticality of the driving portion when the bottom surface of the fixed portion is used as a reference plane.

Preferably, a plurality of crater-shaped irradiation traces are formed in the melted portion, and the height of the convex portion is larger than the depth of the recesses of the irradiation traces. The melted portion is formed, for example, by irradiating the top of the convex portion with a high-energy beam such as a laser beam. In this case, a crater-shaped irradiation mark is formed on the top of the convex portion. By forming a plurality of such irradiation marks on the apex of the projection, the range of the melted portion can be adjusted with high accuracy. In addition, when the height of the projection is larger than the depth of the dent in the irradiation mark, the height of the projection is dynamically adjusted by irradiating the top of the projection with a high-energy beam such as a laser in multiple stages. can do.

Preferably, the height of the convex portion is greater than variations in processing accuracy of the surface of the driving portion fixed to the fixing surface. With such a configuration, it is possible to adjust the height of the convex portion by a height that is approximately the same as the variation in processing accuracy of the surface of the driving portion fixed to the fixing surface, and the driving portion is fixed to the fixing surface. Variations in processing precision of the surface of the driving portion can be reliably absorbed by the convex portion.

The fixing surface may be formed with three protrusions, and the melting portion may be formed at the top of at least one of the three protrusions. In this case, the height of the projection on which the fusion zone is formed is lower than the height of the remaining two projections, and the imaginary plane formed by the tops of the three projections (the contact with one end of the driving part) The virtual surface forming the surface) is inclined with respect to the reference surface (bottom surface) of the fixed part. Therefore, for example, even if the surface of the driving portion fixed to the fixing surface is inclined due to variations in machining accuracy, the direction of this inclination is matched with the direction of inclination of the above-described imaginary plane. When one end of the portion is fixed to the fixing surface (three convex portions), the convex portions can absorb variations in processing accuracy of the surface of the driving portion fixed to the fixing surface.

The fixing surface may be formed with four protrusions, and the fusion zone may be formed at the top of at least two of the four protrusions. In this case, the height of the two protrusions on which the fusion zone is formed is lower than the height of the remaining two protrusions, and the imaginary plane formed by the tops of the four protrusions The imaginary surface forming the contact surface) is inclined with respect to the reference surface (bottom surface) of the fixed portion. Therefore, for example, even if the surface of the driving portion fixed to the fixing surface is inclined due to variations in machining accuracy, the direction of this inclination is matched with the direction of inclination of the above-described imaginary plane. When one end of the portion is fixed to the fixing surface (four protrusions), the protrusions can absorb variations in processing accuracy of the surface of the driving portion fixed to the fixing surface.

Five of the protrusions may be formed on the fixed surface, and the fusion zone may be formed on the tops of at least three of the five protrusions. In this case, the height of the three protrusions on which the fusion zone is formed is lower than the height of the remaining two protrusions, and the imaginary plane formed by the tops of the five protrusions The imaginary surface forming the contact surface) is inclined with respect to the reference surface (bottom surface) of the fixed portion. Therefore, for example, even if the surface of the driving portion fixed to the fixing surface is inclined due to variations in machining accuracy, the direction of this inclination is matched with the direction of inclination of the above-described imaginary plane. When one end of the portion is fixed to the fixing surface (five protrusions), the protrusions can absorb variations in processing accuracy of the surface of the driving portion fixed to the fixing surface.

Preferably, a plurality of protrusions are discretely formed on the outer edge of the fixing surface. With such a configuration, when one end of the driving portion is fixed to the fixing surface, rattling of the driving portion can be effectively prevented at the tops of the plurality of protrusions.

FIG. 1 is a schematic perspective view showing an optical driving device according to one embodiment of the invention. 2 is an exploded perspective view of the optical driving device shown in FIG. 1. FIG. 3A is a perspective view of the optical element holding portion shown in FIG. 2. FIG. 3B is a perspective view when the optical element holding portion shown in FIG. 3A is rotated by 180 degrees around the Z axis as a rotation axis. 4 is a perspective view of the first fixing portion shown in FIG. 2. FIG. 5 is a perspective view of the second fixing portion shown in FIG. 2. FIG. 6 is a perspective view of the third fixing portion shown in FIG. 2. FIG. 7 is a plan view of the optical driving device shown in FIG. 1 when the cover and the third fixing portion are removed; FIG. 8A is a perspective view of the optical driving device shown in FIG. 1 with the cover removed. FIG. 8B is a partially transparent perspective view of the optical driving device shown in FIG. 8A. FIG. 8C is a partially transparent perspective view when the optical driving device shown in FIG. 8B is rotated 180 degrees about the Z-axis. 9 is a perspective view showing the detailed configuration of the fixing recess shown in FIG. 4. FIG. 10 is a cross-sectional view showing the detailed configuration of the fixing recess shown in FIG. 9 together with part of the driving section. FIG. 11 is a perspective view showing an example of the shape of irradiation traces forming the fusion zone shown in FIG. FIG. 12A is an enlarged plan view showing an image of the fusion zone formed on the top of the projection. FIG. 12B is an enlarged plan view showing a state in which the fusion zones shown in FIG. 12A are overlapped. 13A is a view showing a method of forming a melted portion in the convex portion of the fixing concave portion shown in FIG. 10; FIG. FIG. 13B is a diagram showing a process subsequent to FIG. 13A. FIG. 13C is a diagram showing a process subsequent to FIG. 13B. FIG. 14A is a cross-sectional view showing a convex portion before forming a fusion zone. FIG. 14B is a cross-sectional view showing a modification of the projection shown in FIG. 14A. FIG. 14C is a cross-sectional view showing another modification of the projection shown in FIG. 14A. 15A is a perspective view showing a modification of the fixing recess shown in FIG. 9. FIG. 15B is a perspective view showing another modification of the fixing recess shown in FIG. 9. FIG.

An embodiment of the present invention will be described below with reference to the drawings.

As shown in FIG. 1, an optical drive device 1 according to one embodiment of the present invention is mounted on a terminal device such as a mobile phone, and can be driven by an SIDM (Smooth Impact Drive Mechanism (registered trademark)) actuator. The optical driving device 1 has an outer shape of a substantially quadrangular prism, and includes a movable portion 2, a driving portion 3, and a fixed portion 4, as shown in FIG. The fixing portion 4 is divided into a first fixing portion 10, a second fixing portion 30, and a third fixing portion 50, the detailed structure of which will be described later.

The driving section 3 is composed of a piezoelectric actuator, and holds the movable section 2 (optical element holding section 60) movably. The drive section 3 has a piezoelectric element 80 , a first shaft 81 and an inertia member 82 .

The drive unit 3 transmits the expansion and contraction of the piezoelectric element 80 to the first shaft 81, and controls the movable unit 2, which is engaged with the first shaft 81 with a predetermined frictional force, according to the speeds of the expansion and contraction of the piezoelectric element 80. It moves by using the difference. The motion direction (movement direction) of the movable portion 2 is the Z-axis direction, which corresponds to the axial direction of the first shaft 81 . When a lens is provided as an optical element in the optical element holding section 60, the moving direction of the movable section 2 is the optical axis direction of the lens.

The piezoelectric element 80 has a prism shape, and inside it, a plurality of dielectric layers and internal electrode layers are alternately laminated in the Z-axis direction. The piezoelectric element 80 is arranged on the second fixing portion 30 . An external electrode (not shown) is formed on each opposing side surface of the piezoelectric element 80, and an internal electrode layer is electrically connected to each external electrode. One end of each of the pair of lead frames 101a and 101b is fixed to each external electrode, and the other end of each of the pair of lead frames 101a and 101b is connected to the circuit board 100 (FIG. 8A). An electric signal (rectangular wave) is applied from the circuit board 100 to the piezoelectric element 80 via the lead frames 101a and 101b, thereby allowing the piezoelectric element 80 to expand and contract in the Z-axis direction. The circuit board 100 is made of FPC (flexible printed circuits).

A first shaft 81 is connected to the upper end of the piezoelectric element 80 . The method of fixing the first shaft 81 and the piezoelectric element 80 is not particularly limited, but it is possible to bond the two with resin, for example. Although the material of the first shaft 81 is not particularly limited, for example, metal, carbon, resin, or the like can be used. This point also applies to the second shaft 85, which will be described later. The first shaft 81 has a columnar shape and reciprocates as the piezoelectric element 80 expands and contracts. The first shaft 81 slidably holds the movable part 2 , its lower end is fixed to the second fixed part 30 and its upper end is fixed to the third fixed part 50 . The diameter (diameter) of the first shaft 81 is larger than the diameter (diameter) of the second shaft 85 . The cross-sectional area of the surface of the first shaft 81 cut in the direction perpendicular to the longitudinal direction is larger than the cross-sectional area of the surface of the second shaft 85 cut in the same direction.

An optical element holding portion 60 constituting the movable portion 2 is frictionally engaged with the outer peripheral surface of the first shaft 81 . The diameter (diameter) of the first shaft 81 is larger than the diameter of the piezoelectric element 80 (the length of one side or the length of the long side). is larger than In the illustrated example, the first shaft 81 has a columnar shape, but the shape is not particularly limited, and may be a polygonal columnar shape.

The inertia member 82 has a prism shape and is connected to the lower end of the piezoelectric element 80 . The inertia member 82 constitutes one end of the drive section 3 . The inertia member 82 is arranged on the first fixing portion 10 , and the position of the connecting portion between the piezoelectric element 80 and the inertia member 82 substantially coincides with the position of the boundary portion between the first fixing portion 10 and the second fixing portion 30 . The inertia member 82 has a function as an inertia body for applying inertia force to the first shaft 81 and is for generating displacement due to expansion and contraction of the piezoelectric element 80 only on the first shaft 81 side. The inertia member 82 is, for example, a weight (weight member), and is made of a material having a higher specific gravity than the piezoelectric element 80 and the first shaft 81 . Although the material of the inertia member 82 is not particularly limited, for example, a metal having a large specific gravity such as tungsten or an alloy containing such a metal can be used. The method of fixing the inertia member 82 and the piezoelectric element 80 is not particularly limited, but it is possible to bond the two with resin, for example.

The second shaft 85 has a columnar shape and slidably supports the movable portion 2 . A lower end portion of the second shaft 85 is fixed to the first fixing portion 10 , and an upper end portion of the second shaft 85 is fixed to the third fixing portion 50 . The optical drive device 1 in this embodiment includes the first shaft 81 and the second shaft 85 , but the second shaft 85 is configured separately from the drive section 3 and mainly function as Further, the second shaft 85 plays a role of restricting the rotation of the movable portion 3 (optical element holding portion 60) as described later.

The movable portion 2 is composed of an optical element holding portion 60, and is configured to be capable of mounting an optical element (not shown) such as an optical lens, an optical prism, or a reflecting mirror. As shown in FIG. 3A, the optical element holding section 60 has a body section 61 . The body portion 61 has a tubular shape, and an element installation opening 62 is formed in the central portion thereof. An optical element can be provided on the inner surface of the element installation opening 62 . Hereinafter, for convenience of explanation, the four corners provided on the main body 61 are referred to as a first corner 61a to a fourth corner 61d, respectively.

A first corner portion 61 a of the main body portion 61 is formed with a stepped portion 63 for installing a magnetic body. The magnetic body installation stepped portion 63 is formed with a predetermined length from the upper surface of the main body portion 61 along the Z-axis direction. The sensor magnet 103 shown in FIG. 2 can be installed in the manner shown in FIG. 7 on the step surface of the stepped portion 63 for installing the magnetic material. The sensor magnet 103 is adhered and fixed to the magnetic body installation stepped portion 63 by, for example, an adhesive. The X-axis direction width and the Y-axis direction width of the magnetic body installation step portion 63 are substantially equal to the X-axis direction width and the Y-axis direction width of the sensor magnet 103, respectively. The height is higher than the height of the sensor magnet 103 .

Here, the sensor magnet 103 will be described. As shown in FIG. 7, the sensor magnet 103 is arranged to face the position sensor 102 fixed to the circuit board 100 in the X-axis direction. The position sensor 102 is installed to detect the magnetic field emitted from the sensor magnet 103 .

When the optical element holding part 60 reciprocates along the Z-axis direction, the position of the sensor magnet 103 in the Z-axis direction is displaced accordingly. At this time, the strength of the magnetic field detected by the position sensor 102 changes according to the position of the sensor magnet 103 in the Z-axis direction. Therefore, the position of the sensor magnet 103 in the Z-axis direction, that is, the position of the optical element holding portion 60 in the Z-axis direction can be detected by analyzing the change in the strength of the magnetic field emitted from the sensor magnet 103. It is possible. A capacitor 104 for noise cancellation is provided on the circuit board 100 at a position adjacent to the position sensor 102 .

As shown in FIG. 3A, the first corner portion 61a of the main body portion 61 is formed with a substrate facing stepped surface 71. As shown in FIG. The substrate facing stepped surface 71 has a stepped shape, and is formed between the side portion located between the first corner portion 61a and the second corner portion 61b of the main body portion 61 and the first corner portion 61a and the fourth corner portion 61d. It is formed so as to straddle the side portion located therebetween. The board facing stepped surface 71 is formed to prevent contact between the side portions of the body portion 61 and the circuit board 100, and is arranged to face the circuit board 100 as shown in FIG. .

As shown in FIG. 3A, stoppers 70a and 70b are formed at the second corner portion 61b of the body portion 61. As shown in FIG. The stopper 70a is provided at a side portion located between the first corner portion 61a and the second corner portion 61b of the body portion 61 and a side portion located between the second corner portion 61b and the third corner portion 61c. It is formed so as to straddle. The stopper 70a protrudes upward from the upper surface of the body portion 61 and forms a step with respect to its periphery. The stopper 70a is for restricting the upward movement of the optical element holding portion 60, and the optical element holding portion 60 is moved until the stopper 70a abuts on the lower surface of the third fixing portion 50 (or to a position just before that). can be moved upward (see FIG. 8A).

Similarly, the projecting portion 70b is positioned between the side portion of the main body portion 61 between the first corner portion 61a and the second corner portion 61b and between the second corner portion 61b and the third corner portion 61c. It is formed so as to straddle the side portion. The protruding portion 70b protrudes downward from the lower surface of the main body portion 61 and forms a step with respect to the periphery thereof. The stopper 70b is for restricting the downward movement of the optical element holding portion 60, and the optical element holding portion 60 is pushed until the stopper 70b abuts on the upper surface of the second fixing portion 30 (or to a position just before that). can be moved downward (see FIG. 8A).

A shaft sliding groove portion 64 is formed in the second corner portion 61 b of the main body portion 61 . The shaft sliding groove portion 64 is formed from the upper surface to the lower surface of the main body portion 61 and is recessed toward the central portion of the main body portion 61 . As shown in FIG. 7, the shaft sliding groove portion 64 has a substantially vertically bent shape when viewed from above. The engaging portion 106 can be arranged inside the shaft sliding groove portion 64 . Details of the engaging portion 106 will be described later.

As shown in FIG. 3A, a pedestal 65 is formed at the lower end of the shaft sliding groove 64 . The pedestal 65 has a predetermined length in the Z-axis direction, and its lower surface is flush with the lower surface of the main body 61 . The engaging portion 106 can be placed on the pedestal 65 .

The engaging portion 106 is made of an elastic member and has a predetermined length in the Z-axis direction. As shown in FIG. 7, the engaging portion 106 is bent in a substantially L shape when viewed from above. The engaging portion 106 is formed by bending a metal plate material having a flat plate shape at approximately 90 degrees by machining. The shape of the engaging portion 106 corresponds to the groove shape of the shaft sliding groove portion 64 , so that the engaging portion 106 can be engaged with the inside of the shaft sliding groove portion 64 . The method of fixing the engaging portion 106 and the shaft sliding groove portion 64 is not particularly limited, but it is possible to bond and fix the two with resin or the like. The engaging portion 106 abuts on the outer peripheral surface of the first shaft 81 and sandwiches the first shaft 81 between a portion on one side and a portion on the other side of the bent portion.

As shown in FIGS. 2 and 7, the pressing member 105 is made of an elastic member, such as a leaf spring. One end of the pressing member 105 is fixed to a pressing member installation hole 66 , which will be described later, with epoxy resin, for example, and the other end is in contact with the outer peripheral surface of the first shaft 81 . A part of the pressing member 105 is bent, so that the pressing member 105 can be arranged along the side portion of the body portion 61 from the second corner portion 61b to the third corner portion 61c of the body portion 61. ing. The pressing member 105 presses the outer peripheral surface of the first shaft 81 at the other end by elastic force.

When viewed from above, the engaging portion 106 and the pressing member 105 are in contact with the outer peripheral surface of the first shaft 81 at three points, and are sandwiched between these members. At this time, a frictional force corresponding to the pressing force of the pressing member 105 acts on the points of contact between the first shaft 81 and each of the pressing member 105 and the engaging portion 106 . As a result, the optical element holding portion 60 can be frictionally engaged with the first shaft 81 via the engaging portion 106 and the pressing member 105, and the movable portion 2 ( A configuration for holding the optical element holding portion 60) is obtained. In this manner, the first shaft 81 holds (supports) the optical element holding portion 60 at the sandwiched position between the pressing member 105 and the engaging portion 106 .

As shown in FIGS. 3A and 7, a pressing member installation hole 66 is formed in the third corner portion 61c of the main body portion 61. As shown in FIG. The pressing member installation hole 66 is positioned between the side portion between the second corner portion 61b and the third corner portion 61c of the body portion 61 and between the third corner portion 61c and the fourth corner portion 61d. It is formed so as to pass through the side portion. The Z-axis direction width of the pressing member installation hole 66 is substantially equal to or larger than the Z-axis direction width of the pressing member 105, and the other end portion of the pressing member 105 is inserted therein. This makes it possible to fix the pressing member 105 to the optical element holding portion 60 .

A T-shaped notch 67 is formed in the third corner portion 61c of the body portion 61 . The T-shaped notch 67 has a T-shape when viewed from above, and extends downward from the upper surface of the body portion 61 . The T-shaped notch 67 is internally connected to the pressing member installation hole 66 . When fixing the pressing member 105 to the pressing member installation hole 66, resin is injected from the T-shaped notch 67, and the pressing member 105 can be adhesively fixed to the pressing member installation hole 66 with the resin. ing.

As shown in FIGS. 3B and 7, a shaft fixing surface 68 is formed at the fourth corner 61d of the body portion 61. As shown in FIG. The shaft fixing surface 68 is formed from the upper surface to the bottom surface of the main body portion 61, and a pair of shaft fixing projections 69, 69 are formed at substantially the center portion in the Z-axis direction. The shaft fixing projections 69 , 69 are fixed to the second shaft 85 and play a role of restricting the rotation of the movable part 2 . The shaft fixing projections 69 , 69 protrude by a predetermined length in a direction substantially perpendicular to the shaft fixing surface 68 . The projection length of the shaft fixing projections 69 , 69 is substantially equal to the diameter of the second shaft 85 .

A pair of contact protrusions 69a, 69a are formed on the facing surfaces of the shaft fixing protrusions 69, 69, respectively. The contact protrusions 69a, 69a protrude toward each other. The contact protrusions 69a, 69a extend substantially perpendicularly to the shaft fixing surface 68 with a predetermined length. The distance between the contact protrusions 69a, 69a is approximately equal to the diameter of the second shaft 85. As shown in FIG. By arranging the second shaft 85 between each of the contact protrusions 69a, 69a, it is possible to engage the second shaft 85 with the contact protrusions 69a, 69a with a predetermined frictional force. It is possible to slidably fix the optical element holding portion 60 to the above. The second shaft 85 restricts the rotation of the optical element holding portion 60 at the positions of the shaft fixing protrusions 69, 69 (contact protrusions 69a, 69a).

As shown in FIGS. 8B and 8C, the length of the holding region 111 of the movable portion 2 held by the first shaft 81 (in other words, the length of the pressing member 105 in the Z-axis direction) L1, and the second shaft Comparing the length of the support area 112 of the movable part 2 supported by 85 (in other words, the length of the shaft fixing projections 69, 69 in the Z-axis direction) L2, the length L1 is longer than the length L2. It's getting bigger.

When the optical drive device 1 is viewed from the side, the support area 112 is arranged inside both ends of the holding area 111 . That is, the upper end of the support area 112 is arranged below the upper end of the holding area 111 , and the lower end of the support area 112 is arranged above the lower end of the holding area 111 .

As shown in FIG. 2, the fixing portion 4 in this embodiment has a first fixing portion 10, a second fixing portion 30, and a third fixing portion 50, which hold the driving portion 3. As shown in FIG. The fixed part 4 is made of resin such as LCP (liquid crystal polymer). The first fixing part 10 and the second fixing part 30 form the lower part of the fixing part 4 (corresponding to the base member in the prior art), and the third fixing part 50 mainly forms the upper part of the fixing part 4 . The fixing part 4 in this embodiment is divided into two parts, a first fixing part 10 and a second fixing part 30, at its lower part.

As shown in FIG. 4 , the first fixing portion 10 has a first base portion 11 . The first base portion 11 has a substantially flat plate shape, and a first opening portion 12 is formed in a substantially central portion thereof. The first opening 12 is formed at a position corresponding to the element installation opening 62 formed in the optical element holding portion 60 described above. For convenience of explanation, the four corners provided on the first base portion 11 are hereinafter referred to as a first corner 11a to a fourth corner 11d, respectively.

A first side concave portion 15 is formed in a side portion of the first base portion 11 located between the first corner portion 11a and the second corner portion 11b. The first side concave portion 15 is formed from one end portion to the other end portion of the first base portion 11 in the X-axis direction and has a predetermined depth in the Y-axis direction. The depth of the first lateral recess 15 in the Y-axis direction is substantially equal to the thickness of the circuit board 100 shown in FIG.

A stepped corner portion 16 is formed at the second corner portion 11b. The stepped corner portion 16 is positioned between the side portion between the first corner portion 11a and the second corner portion 11b of the first base portion 11 and between the second corner portion 11b and the third corner portion 11c. It is formed so as to straddle the side portion. The stepped surface of the stepped corner portion 16 has a substantially triangular shape when viewed from above, and is formed below the upper surface of the first base portion 11 by a predetermined depth.

A fixing concave portion 17 is formed in the stepped corner portion 16 . The fixing recess 17 has a substantially rectangular shape when viewed from above, and its shape corresponds to the shape of the bottom surface of the inertia member 82 shown in FIG. However, the shape of the fixing recess 17 is not limited to the illustrated shape, and may be changed as appropriate according to the shape of the bottom surface of the inertia member 82 .

The fixing recess 17 has a predetermined depth, and an inertia member 82 (FIG. 2) can be placed therein. By accommodating the inertia member 82 inside the fixing recess 17 , the inertia member 82 can be held (fixed) inside the fixing recess 17 . That is, the fixing recess 17 functions as the first holding portion 21 for holding the inertia member 82 .

As shown in FIG. 9 , the fixing recess 17 has a fixing surface 171 and an outer wall portion 172 . The fixed surface 171 is a surface to which the bottom surface of the inertia member 82 (FIG. 2) is fixed. The outer wall portion 172 is formed to surround the outer edge of the fixing surface 171 and extends upward so as to form a substantially right angle with respect to the fixing surface 171 . The height of the outer wall portion 172 may be approximately equal to the height of the inertia member 82, for example.

In the following description, the bottom surface of the first base portion 11 (bottom surface of the first fixing portion 10 ) located on the opposite side of the fixing surface 171 in the Z-axis direction is called a reference surface 110 . The reference plane 110 is an ideal plane parallel to the XY plane, and is parallel to the axis C (FIG. 10) of the drive unit 3 (first shaft 81) ideally arranged to be parallel to the Z axis. perpendicular to each other.

Three protrusions (bosses) 170a to 170c are discretely (spot-like) formed on the fixing surface 171. As shown in FIG. Each of the three projections 170 a to 170 c has a projection shape and is locally formed on the outer edge of the fixing surface 171 . Each of the convex portions 170a to 170c is arranged at predetermined intervals so as to form vertices of a triangle. In the illustrated example, the distance between the projections 170a and 170b, the distance between the projections 170b and 170c, and the distance between the projections 170c and 170a are substantially equal. ing. The formation positions of the projections 170a to 170c are not limited to the positions shown in the drawings, and may be changed within the range of the outer edge of the fixing surface 171 as appropriate. The protrusions 170a and 170b are arranged side by side along the wall surface of the outer wall 172, respectively.

The shape of the protrusions 170a to 170c when viewed from the Z-axis direction is circular, but the shape is not limited to this, and various shapes such as an ellipse, a square, and other polygons are possible. can take

Further, as shown in FIG. 14A, the cross-sectional shape of the tips of the projections 170a to 170c is substantially trapezoidal. Tapered surfaces 175 are formed on tops 170a1 to 170c1 of the projections 170a to 170c, respectively. However, the cross-sectional shape of the tips of the projections 170a to 170c is not limited to this, and may be changed as appropriate. For example, as shown in FIG. 14B, the cross-sectional shape of the tips of the projections 170a to 170c may be circular (rounded tip shape), and as shown in FIG. The shape may be approximately triangular (pointed). Alternatively, the cross-sectional shape of the tips of the projections 170a to 170c may be other polygons or the like.

In this embodiment, the fixing surface 171 includes the surface portions of the projections 170a to 170c, and the fixing surface 171 protrudes in the positive Z-axis direction at the positions where the projections 170a to 170c are formed. shape.

As described above, since the fixed surface 171 is formed with the protrusions 170a to 170c, when the inertia member 82 shown in FIG. The inertia member 82 is fixed to the fixed surface 171 while being in contact (surface contact or point contact) with the top portions 170a1 to 170c1 of .about.170c. That is, the protrusions 170a to 170c support the bottom surface 820 of the inertia member 82 (three-point support) while facing the bottom surface 820 thereof.

On the fixing surface 171, the protrusions 170a to 170c are preferably arranged at positions where the inertia member 82 can be stably installed. When the bottom surface 820 of the inertia member 82 is fixed to the fixed surface 171, the protrusions 170a to 170c abut the outer edge of the bottom surface 820. As shown in FIG.

In the present embodiment, a melting portion 173 is formed at the top portion 170c1 of the convex portion 170c among the convex portions 170a to 170c. The fusion zone 173 is formed on the entire top portion 170c1, but may be formed only on a part of the top portion 170c1. The melted portion 173 is formed by, for example, irradiating the top portion 170c1 of the convex portion 170c with a high-energy beam such as a laser beam. The melted portion 173 is composed of a melted trace having a three-dimensional melted range, and the trace can be known by observing the external appearance or the cross section thereof.

At the position where the melted portion 173 is formed, the top portion 170c1 of the convex portion 170c is melted, and the surface shape or surface condition of the top portion 170c1 is changed. As described below, in the present embodiment, the apex 170c1 of the convex portion 170c is shaped so as to conform to the surface shape of the bottom surface 820 of the inertia member 82 (the surface of the inertia member 82 fixed or placed on the fixing surface 171). By changing the surface shape, when the inertia member 82 is arranged in the fixing recess 17, the perpendicularity of the drive unit 3 (combination of the piezoelectric element 80, the first shaft 81, and the inertia member 82) with respect to the reference surface 110 can be adjusted. It is possible to secure enough.

As shown in FIG. 10, the melted portion 173 is composed of an aggregate of a plurality of irradiation marks 174 formed on the top portion 170c1 of the convex portion 170c by laser irradiation. The range of the melted portion 173 is defined by the range in which the top portion 170c1 is irradiated with the laser. When the laser beam diameter is 0.2 to 0.4 mm, the depth of the irradiation mark 174 is preferably 20 to 50 μm, more preferably 30 to 40 μm. Note that the melted portion 173 may be formed by a single irradiation mark 174 .

As shown in FIG. 11, when the top portion 170c1 of the convex portion 170c is irradiated with the laser only once, the irradiation mark 174 has a crater-like shape. The irradiation mark 174 has, for example, a substantially circular shape when viewed from the Z-axis direction, and has a central protruding portion 174a, an outer peripheral protruding portion 174b, and a groove portion 174c. However, the shape of the irradiation mark 174 is not limited to the illustrated shape, and may have various shapes.

The central protrusion 174 a has a convex shape and is formed substantially in the center of the irradiation mark 174 . The central projecting portion 174a is tapered to have a skirt.

The outer peripheral projecting portion 174 b has a substantially ring-shaped convex shape and is formed on the outer peripheral portion (outer edge portion) of the irradiation mark 174 . The height of the outer peripheral projecting portion 174b is, on average, higher than the height of the central projecting portion 174a. The outer peripheral projecting portion 174b is formed in a tapered shape so as to have a skirt.

The groove portion 174c is formed between the central protruding portion 174a and the outer peripheral protruding portion 174b. The groove portion 174c has a ring shape and extends in the circumferential direction so as to surround the central protruding portion 174a. The groove 174c has a predetermined depth, and the position of the bottom surface of the groove 174c is lower than the position of the portion of the surface of the top 170c1 of the projection 170c where the irradiation mark 174a is not formed.

Thus, at the position where the melted portion 173 (irradiation mark 174) is formed, the top portion 170c1 of the convex portion 170c is melted and is in a scooped state (recess or depression formed). As shown in FIG. 12A, when the melted portion 173 is formed of a plurality of irradiation marks 174, the plurality of irradiation marks 174 are formed at positions adjacent to each other.

In the illustrated example, each of the plurality of irradiation marks 174 is aligned and formed with a gap between each of the plurality of irradiation marks 174 . However, adjacent irradiation marks 174 may be in contact with each other, or portions of adjacent irradiation marks 174 may overlap each other as shown in FIG. 12B. That is, in each of the adjacent irradiation marks 174, the outer peripheral protrusion 174b (FIG. 11) of one irradiation mark 174 may overlap with the outer peripheral protrusion 174b of the other irradiation mark 174. The marks 174 are connected (fused), and the size of the irradiation marks 174 can be adjusted in a direction to increase. In addition, not only can the surface shape (for example, flatness) of the top portion 170c1 be easily adjusted, but the accuracy thereof can be improved. In each of the adjacent irradiation marks 174, the overlapping range is not limited to the range shown in FIG. 12B. Alternatively, the groove 174c (FIG. 11) of one irradiation mark 174 may overlap the groove 174c of the other irradiation mark 174. As shown in FIG.

At the stage of forming the melted portion 173, the same position of the top portion 170c1 of the convex portion 170c may be irradiated with the laser several times. In this case, the depth of the irradiation mark 174 becomes deeper than when an arbitrary position of the top portion 170c1 is irradiated with the laser only once, and a deep gouging (groove or recess) can be formed in the top portion 170c1. Become.

As shown in FIG. 10, the height of the convex portion 170c with reference to the reference surface 110 (or the portion of the fixed surface 171 where the convex portions 170a to 170c are not formed) corresponds to the depth of the irradiation mark 174 (melted portion). 173 depth). Therefore, the height H2 from the reference surface 110 of the convex portion 170c having the fusion portion 173 is lower than that of the convex portions 170a and 170b having no fusion portion 173 formed thereon. The height H1 of the convex portion 170a and the convex portion 170b are substantially equal.

Here, a virtual plane S is set as a virtual plane that is formed by the tops of the projections 170a to 170c and forms a contact surface with the bottom surface 820 of the inertia member . When the convex portion 170c is irradiated with a laser to form the melted portion 173, the virtual plane S is adjusted so that the height from the reference plane 110 decreases toward the Y-axis negative direction side, and the virtual plane S is formed with an inclined portion inclined so as to approach the reference plane 110 toward the Y-axis negative direction side. Note that the virtual plane S is substantially parallel to the reference plane 110 before laser irradiation is applied to the convex portion 170c.

The height H2 of the projection 170c from the reference surface 110 depends on the surface shape or surface condition of the bottom surface 820 of the inertia member 82. As shown in FIG. For example, in the example shown in FIG. 10 , the bottom surface 820 of the inertia member 82 protrudes toward the reference surface 110 of the first base member 11 due to variations in processing accuracy, and gradually increases toward the negative direction of the Y-axis. It is slanted toward the surface 110 . Therefore, as shown in the figure, the bottom surface 820 is formed with a bottom inclined portion 821 . In the drawings, an ideal bottom surface 820 is indicated by a chain double-dashed line. This ideal plane is substantially parallel to the reference plane 110 .

The height H2 of the projection 170c from the reference surface 110 is a height that takes into consideration the shape of the bottom surface 820 of the inertia member 82, and when the bottom surface 820 is fixed to the projections 170a to 170c, the bottom surface 820 protrudes. It is adjusted so that it can absorb parts. In this embodiment, when the bottom surface 820 is supported at three points by the three projections 170a to 170c, the axis C of the drive unit 3 (first shaft 81) is perpendicular to the reference plane 110. Moreover, the height of the projection 170c is adjusted.

The height H2 of the convex portion 170c from the reference surface 11 is determined by the amount of deviation (manufacturing error or variation) from the ideal surface of the bottom surface 820 at the position of the convex portion 170a and from the ideal surface of the bottom surface 820 at the position of the convex portion 170b. and the deviation width of the bottom surface 820 from the ideal plane at the position of the protrusion 170c.

As shown in FIG. 10, in the bottom surface 820, when the deviation width from the ideal surface is small on the Y-axis positive direction side and the deviation width from the ideal surface is large on the Y-axis negative direction side, the convex portion 170a and the convex portion 170a At the position of the portion 170b, the width of deviation from the ideal plane is small, while at the position of the convex portion 170c, the width of deviation from the ideal plane is large. Therefore, in such a case, the top portion 170c1 of the convex portion 170c is irradiated with laser to form the melted portion 173 (irradiation mark 174). As a result, the height H2 of the convex portion 170c from the reference surface 110 is reduced by the amount of the top portion 170c1 scooped out by the laser irradiation, and steps are formed between the convex portion 170c and the convex portions 170a and 170b.

When irradiating the top portion 170c1 of the convex portion 170c with a laser, for example, the height of this step is determined by the deviation width Δc from the ideal surface of the bottom surface 820 at the position of the convex portion 170c and the ideal bottom surface 820 at the position of the convex portion 170a. The height H2 of the convex portion 170c from the reference surface 110 (the depth of the melted portion 173) is adjusted so as to be approximately equal to the difference (Δc−Δa) from the deviation width Δa from the plane. Alternatively, for example, the height of this step is the difference (Δc -Δb), the height H2 of the convex portion 170c from the reference plane 110 (the depth of the melted portion 173) is adjusted. As a result, when the bottom surface 820 of the inertia member 82 is fixed to the fixed surface 171 (projections 170a to 170c), the axis C of the driving section 3 can be made perpendicular to the reference surface 110. FIG.

Note that even if there is an error from the ideal plane at each position where the projections 170a to 170c are arranged on the bottom surface 820 of the inertia member 82, Δa=Δb=Δc, and the bottom surface 820 of the inertia member 82 is When the drive unit 3 is fixed to the projections 170a to 170c and the axis C of the drive unit 3 is perpendicular to the reference plane 110, the projections 170a to 170c do not need to be irradiated with laser. good. That is, in the present embodiment, when the bottom surface 820 of the inertia member 82 is fixed to the protrusions 170a to 170c and the axis C of the drive unit 3 is inclined with respect to the reference plane 110, the protrusions 170a to 170c Any one of the top portions 170a1 to 170c1 may be irradiated with the laser. Of the convex portions 170a to 170c, the convex portions to be irradiated with laser are any one or two convex portions which are said to be most effective in eliminating the inclination.

In this way, the height of the protrusions 170c and the like from the reference plane 110 is determined based on the deviation (variation) of the bottom surface 820 from the ideal plane at each position of the protrusions 170a to 170c. It is preferable that the heights of the projections 170a to 170c before being formed are larger than the above variation. If the heights of the projections 170a to 170c are smaller than the above variation, the projections 170a to 170c disappear when the tops 170a1 to 170c1 are irradiated with laser, and the heights of the projections 170a to 170c from the reference plane 110 are reduced. This is because it is not possible to sufficiently adjust the thickness. Also, for this reason, the height of the projections 170a to 170c before the formation of the melted portion 173 is greater than the depth of the depression (groove portion 174c) of the irradiation mark 174 shown in FIG. is preferred.

The variation in machining accuracy on the bottom surface 820 of the inertia member 82 is, for example, around 50 μm. Therefore, the height of the projections 170a to 170c before forming the fusion zone 173 (the height of the portion of the fixing surface 171 where the projections 170a to 170c are not formed) is preferably 50 μm. or more, and more preferably 100 μm or more. The height of the protrusions 170a to 170c with the melted portion 173 formed thereon is lower than the height described above by approximately the height corresponding to the variation in the bottom surface 820 of the inertia member .

In the example shown in FIG. 10, the inclination angle of the virtual plane S with respect to the reference plane 110 and the inclination angle of the bottom surface 820 of the inertia member 82 with respect to the reference plane 110 are substantially equal. Further, in a state in which the bottom surface 820 of the inertia member 82 is fixed to the projections 170a to 170c, since the axis C of the driving portion 3 is perpendicular to the reference plane 110, each of the projections 170a to 170c In position, the distance between the reference plane 110 and the ideal plane of the bottom surface 820 of the inertia member 82 is substantially equal.

In the illustrated example, when the bottom surface 820 of the inertia member 82 is fixed to the projections 170a to 170c, the inclination direction of the imaginary plane S and the inclination direction of the bottom inclined portion 821 on the bottom surface 820 substantially match. there is When the bottom surface 820 of the inertia member 82 is fixed to the protrusions 170a to 170c, the bottom surface 820 is arranged so as to correspond to the inclination of the imaginary plane S. Variation in processing accuracy (bottom inclined portion 821) can be absorbed. As a result, the axis C of the driving portion 3 is substantially perpendicular to the reference plane 110 of the first base member 11, and the perpendicularity of the driving portion 3 (inertia member 82, first shaft 81, etc.) to the reference plane 110 is sufficiently secured. can do.

In the present embodiment, when the bottom surface 820 of the inertia member 82 is supported at three points by the protrusions 170a to 170c, the standard of the protrusion 170c is determined based on the deviation of the bottom surface 820 from the ideal plane at the contact portions. The height from the surface 110 is adjusted to ensure the verticality of the drive unit 3 with respect to the reference surface 110 described above. Therefore, the bottom surface 820 may have any shape at positions other than the contact portion. That is, even if the bottom surface 820 has a shape other than an inclined shape, for example, the bottom surface 820 has a plurality of spot-like projections, the effect of the present embodiment can be obtained.

As described above, in the present embodiment, when the bottom surface 820 of the inertia member 82 is distorted by −ε in the negative Z-axis direction in the periphery of the projections 170a to 170c, the fixed surface 171 is A melted portion 173 is formed at the top portion 170c1 of the convex portion 170c so as to cause a distortion of −ε toward the direction side, and the height H2 of the convex portion 170c from the reference plane 110 is reduced, thereby making each of the convex portions 170a to 170c It is possible to cancel the distortion of the bottom surface 820 corresponding to the position.

Incidentally, on the bottom surface 820 of the inertia member 82 shown in FIG. 10, an empirical rule shows that, due to variations in processing accuracy, slopes, unevenness (distortion), etc. are formed across any two sides or more and three sides or less, for example. may occur. For example, on the Y-axis negative direction side of the bottom surface 820, when an inclination, unevenness (distortion), or the like is formed so as to straddle a region of two to three sides of the bottom surface 820, as shown in FIG. By forming the melting portion 173 only in the portion 170c and lowering the height of the convex portion 170c from the reference surface 110, a space (step) is formed to absorb the inclination and unevenness (distortion) of the bottom surface 820. Therefore, the fixing surface 171 can absorb variations in the processing accuracy of the bottom surface 820 (inclination, etc.).

The inertia member 82 is adhered to the fixing recess 17 with resin (resin 200 shown in FIG. 13B). An ultraviolet curable resin is preferably used as the adhesive resin. By filling the inside of the fixing recess 17 with resin, it is possible to firmly hold the inertia member 82 inside the fixing recess 17 due to its adhesive force.

By arranging the inertia member 82 inside the fixing recess 17 and fixing it with resin, the inertia member 82 positioned at the lower end of the drive unit 3 is firmly held by the first holding portion 21 . It is possible to hold. The resin for fixing the inertia member 82 to the first holding portion 21 is preferably a silicone-based resin. By using a silicone-based resin, it becomes possible to absorb the vibration of the drive unit 3 and the impact from the outside with the resin, and the first holding unit 21 can hold a part of the drive unit 3 in a stable state. can.

As shown in FIG. 4 , a narrow step width portion 14 is formed at the third corner portion 11 c of the first base portion 11 . The narrow step portion 14 is formed at a corner where the top surface of the first base portion 11 and the side surface (the side surface located between the second corner portion 11b and the third corner portion 11c) intersect. A narrow fixing piece 54a (FIG. 6) of the third fixing portion 50, which will be described later, is fixed to the stepped narrow portion 14 by adhesion.

A limiting convex portion 19 is formed at a position close to the narrow step width portion 14 . The limiting protrusion 19 has a substantially cylindrical shape and protrudes upward from the upper surface of the first base portion 11 . A tapered surface is formed at the end of the limiting projection 19 . The limiting convex portion 19 is configured to be able to engage with a limiting concave portion 44 (FIG. 5) formed in the bottom surface of the second fixing portion 30, which will be described later. Therefore, it is possible to prevent relative movement and rotation between the first fixed part 10 and the second fixed part 30 . As shown in FIG. 8B, the restricting convex portion 19 is located above the position (first holding portion 21) where the first fixing portion 10 (fixing concave portion 17) holds the inertia member 82. As shown in FIG.

As shown in FIG. 4 , a ring-shaped groove 20 is formed on the upper surface of the first base portion 11 so as to surround the restriction convex portion 19 . The ring-shaped groove 20 prevents the upper surface of the first fixing part 10 from interfering with the bottom surface of the second fixing part 30 when the first fixing part 10 and the second fixing part 30 are combined. is. That is, by forming the ring-shaped groove portion 20 around the limiting convex portion 19 , the burrs around the limiting convex portion 19 cause play at the junction between the upper surface of the first base portion 11 and the bottom surface of the second base portion 31 . It is possible to prevent sticking.

A first small-diameter hole 18 is formed in the fourth corner portion 11 d of the first base portion 11 . The first small-diameter hole 18 is a through hole through which the second shaft 85 shown in FIG. 2 can be inserted. The first small diameter hole 18 has a circular shape when viewed from above, and the diameter (diameter) of the first small diameter hole 18 is approximately equal to or larger than the diameter (diameter) of the second shaft 85. . The lower end of the second shaft 85 is held (supported) by the first small-diameter hole 18 by inserting the lower end of the second shaft 85 into the first small-diameter hole 18 . That is, as shown in FIG. 8B, the first small-diameter hole 18 functions as a fourth holding portion 22 for holding the lower end portion of the second shaft 85. As shown in FIG. The lower end of the second shaft 85 is adhered to the first small diameter hole 18 with resin.

By arranging the lower end of the second shaft 85 inside the first small-diameter hole 18 and fixing it with resin, the lower end of the second shaft 85 is firmly held by the fourth holding portion 22 . It is possible to hold.

The resin for fixing the lower end of the second shaft 85 to the fourth holding portion 22 is preferably epoxy resin. Since the second shaft 85 functions as a column connecting between the first fixing portion 10 and the third fixing portion 50, the lower end of the second shaft 85 is attached to the first fixing portion 10 using epoxy resin. , the lower end of the second shaft 85 is fixed to the first fixing portion 10 with a sufficient adhesive force, and the structural strength of the fixing portion 4 can be sufficiently secured. In addition, since the second shaft 85 is stably held with respect to the first fixing portion 10, the optical element holding portion 60 can be stably supported by the second shaft 85. FIG.

As shown in FIG. 4, a wide step portion 13 is formed between the first corner portion 11a and the fourth corner portion 11d. The wide step portion 13 is formed at a corner where the upper surface of the first base portion 11 and the side surface (the side surface located between the first corner portion 11a and the fourth corner portion 11d) intersect. The width of the wide step portion 13 in the Y-axis direction is wider than the width of the narrow step portion 14 in the Y-axis direction. A wide fixing piece 53a (FIG. 6) of the third fixing portion 50 is fixed to the wide stepped portion 13 by adhesion.

As shown in FIG. 8A , the second fixing part 30 is supported by the first fixing part 10 and arranged (placed) above the first fixing part 10 . As shown in FIG. 5 , the second fixing portion 30 has a second base portion 31 . The second base portion 31 has a substantially flat plate shape, and a second opening portion 32 is formed in a substantially central portion thereof. The second opening 32 is formed at a position corresponding to the first opening 12 of the first fixing portion 10 . Hereinafter, for convenience of explanation, the four corners provided on the second base portion 31 are referred to as a first corner 31a to a fourth corner 31d, respectively.

A second side concave portion 35 is formed in the first corner portion 31 a of the second base portion 31 . The second side concave portion 35 is formed in a side portion located between the first corner portion 31a and the second corner portion 31b of the second base portion 31, and has a predetermined depth in the Y-axis direction. The recessed bottom surface of the second side recessed portion 35 is substantially flush with the recessed portion bottom surface of the first side recessed portion 15 of the first fixing portion 10 shown in FIG. A part of the circuit board 100 shown in FIG. 2 can be arranged so as to straddle the recess 35 .

A long projecting portion 36 and a short projecting portion 37 are formed on the second corner portion 32 a of the second base portion 31 . The long projecting portion 36 and the short projecting portion 37 are arranged so as to be orthogonal to each other, and are arranged inside the stepped corner portion 16 of the first fixing portion 10 as shown in FIG. 8A. As shown in FIG. 5, the long protrusion 36 is formed on the side portion between the second corner 31b and the third corner 31c of the second base portion 31, and the short protrusion 37 is formed on the second base. It is formed on a side portion of the portion 31 located between the first corner portion 31a and the second corner portion 31b. The long projecting portion 36 extends along the Y-axis direction and has a predetermined thickness in the X-axis direction. The short projecting portion 37 extends along the X-axis direction and has a predetermined thickness in the Y-axis direction. The length of downward protrusion of the long protrusion 36 is longer than the length of downward protrusion of the short protrusion 37 , and there is a step between the bottom surface of the long protrusion 36 and the bottom surface of the short protrusion 37 . is formed.

A projecting columnar portion 38 is formed on the bottom surface of the short projecting portion 37 . The protruding columnar portion 38 is formed at a position spaced apart from the long protruding portion 36 by a predetermined distance, and protrudes downward. The downward projection length of the projecting columnar portion 38 is equal to the step width between the bottom surface of the long projecting portion 36 and the bottom surface of the short projecting portion 37 .

A frame insertion passage 39a is formed on one side of the projecting columnar portion 38 in the X-axis direction. The frame insertion path 39a consists of a space formed between the protruding columnar portion 38 and the elongated protruding portion 36, and the lead frame 101a shown in FIG. It can be pulled out toward the substrate 100 (FIG. 8A).

A frame insertion passage 39b is formed on the opposite side of the projecting columnar portion 38 from the frame insertion passage 39a. The frame insertion path 39b is composed of a space like the frame insertion path 39a, and the lead frame 101b shown in FIG. (Fig. 8A). By pulling out the lead frame 101a from one side and pulling out the lead frame 101b from the other side with the protruding columnar portion 38 interposed therebetween, it is possible to achieve good insulation between the lead frames 101a and 101b. .

A second large diameter hole 42 is formed in the second corner portion 31 b of the second base portion 31 . The second large-diameter hole 42 is a through hole and penetrates the second base portion 31 in the Z-axis direction. A first shaft 81 can be inserted through the second large diameter hole 42 .

The second large-diameter hole 42 has a circular shape when viewed from above, and the diameter (diameter) of the second large-diameter hole 42 is substantially equal to or larger than the diameter (diameter) of the first shaft 81. It's becoming As shown in FIG. 8B, the lower end of the first shaft 81 is arranged (passed through) inside the second large-diameter hole 42, and the lower end of the first shaft 81 is held inside the second large-diameter hole 42 ( fixed). That is, the second large-diameter hole 42 functions as a second holding portion 45 for holding the lower end portion of the first shaft 81 . Thus, in this embodiment, a configuration is provided in which the second fixing portion 30 holds a portion of the driving portion 3 .

The lower end of the first shaft 81 is adhered to the second large diameter hole 42 with resin. By filling the inside of the second large-diameter hole 42 with resin, it is possible to firmly hold the lower end portion of the first shaft 81 inside the second large-diameter hole 42 due to its adhesive force. .

By arranging the first shaft 81 inside the second large-diameter hole 42 and fixing it with resin in this manner, the second holding portion 45 allows the first shaft 81 to be positioned below the driving portion 3 . It is possible to firmly hold the lower end of the. The resin for fixing the lower end of the first shaft 81 to the second holding portion 45 is preferably a silicone-based resin. By using a silicone-based resin, it is possible to absorb vibrations of the drive unit 3 and external impacts with the resin. becomes possible. As described above, in the present embodiment, the driving portion 3 is held by the first holding portion 21 (fixing concave portion 17) in the first fixing portion 10, and the second holding portion 45 (second large holding portion 45) in the second fixing portion 30. The driving part 3 is held by the diameter hole 42).

As shown in FIG. 5, a contact fixing portion 41 is formed between the second corner portion 31b and the third corner portion 31c of the second base portion 31. As shown in FIG. As shown in FIG. 8A, the contact fixing portion 41 constitutes a part of the bottom surface of the second base portion 31, contacts the upper surface of the first base portion 11 of the first fixing portion 10, and is fixed thereto ( supported). The bottom surface of the second base portion 31 forms a contact surface with the top surface of the first base portion 11 even at portions other than the contact fixing portion 41 . A contact surface formed adjacent to the Y-axis direction is particularly called a contact fixing portion 41 .

A gap is partially formed between the upper surface of the first fixing portion 10 and the bottom surface of the second fixing portion 30 when the contact fixing portion 41 and the upper surface of the first base portion 11 are in contact with each other. In particular, a resin-filled space 40 is formed as the gap between the bottom surface of the long projecting portion 36 and the top surface of the first base portion 11 . The resin-filled space 40 is filled with, for example, an epoxy-based resin, so that the upper surface of the first base portion 11 and the bottom surface of the long protruding portion 36 can be firmly fixed through the resin. A similar gap is also formed between the bottom surface of the projecting columnar portion 38 and the top surface of the first base portion 11 .

As shown in FIG. 5, the third corner portion 31c of the second base portion 31 is formed with a concave narrow portion 34. As shown in FIG. The concave narrow width portion 34 is formed on a side portion located between the second corner portion 31b and the third corner portion 31c, and has a predetermined depth in the X-axis direction. The recessed bottom surface of the recessed narrow width portion 34 is arranged substantially flush with the recessed bottom surface of the stepped narrow width portion 14 of the first fixing portion 10 shown in FIG. Thus, the narrow fixing piece 54a (FIG. 6) of the third fixing portion 50 is fixed by adhesion. The bottom surface of the concave narrow portion 34 has curved depressions on both sides in the Y-axis direction. Adhesiveness between the narrow portion 34 and the stepped narrow portion 14 and the narrow fixing piece 54a can be enhanced.

A limiting concave portion 44 is formed at a position adjacent to the concave narrow portion 34 . The limiting concave portion 44 is formed on the bottom surface of the second base portion 31 and is formed at a position corresponding to the limiting convex portion 19 of the first fixing portion 10 . The limiting concave portion 44 has a shape corresponding to the limiting convex portion 19 and is formed to be engageable with the limiting convex portion 19 .

A second small-diameter hole 43 is formed in the fourth corner portion 31 d of the second base portion 31 . The second small-diameter hole 43 is a through hole and penetrates the second base portion 31 in the Z-axis direction. The second small-diameter hole 43 is arranged diagonally with respect to the second large-diameter hole 42 with the second opening 32 interposed therebetween. The second small-diameter hole 43 has a circular shape when viewed from above, and as shown in FIGS. 8B and 8C, the second small-diameter hole 43 allows the second shaft 85 to pass therethrough. there is The diameter of the second small-diameter hole 43 is substantially equal to or larger than the diameter of the second shaft 85 and smaller than the diameter of the second large-diameter hole 42 .

The second shaft 85 is only inserted through the inside of the second small-diameter hole 43 , and the inserted portion is not fixed inside the second small-diameter hole 43 with resin or the like. Since the diameter of the second small-diameter hole 43 is substantially equal to the diameter of the second shaft 85, when the second shaft 85 is inserted into the second small-diameter hole 43, the insertion portion is is retained.

As shown in FIG. 5, a recessed wide portion 33 is formed on a side portion of the second base portion 31 located between the first corner portion 31a and the fourth corner portion 31d. As shown in FIG. 8C, the width of the wide recessed portion 33 in the Y-axis direction is substantially equal to the width of the wide stepped portion 13 of the first fixing portion 10 in the Y-axis direction. It is substantially flush with the bottom surface of the concave portion 13 . When the first fixing portion 10 and the second fixing portion 30 are combined, the wide fixing piece 53a (FIG. 6) of the third fixing portion 50 is fixed by adhesion so as to straddle the concave wide portion 33 and the stepped wide portion 13. be done.

As shown in FIG. 6 , the third fixing portion 50 has a top plate portion 51 . The top plate portion 51 has a substantially flat plate shape, and a third opening portion 52 is formed in a substantially central portion thereof. The third opening 52 is formed at a position corresponding to the first opening 12 of the first fixing portion 10 and the second opening 32 of the second fixing portion 30 . Hereinafter, for convenience of explanation, the four corners provided on the top plate portion 51 are referred to as a first corner 51a to a fourth corner 51d, respectively.

A third large-diameter hole 55 is formed in the second corner portion 51 b of the top plate portion 51 . The third large-diameter hole 55 is a through hole and penetrates the top plate portion 51 in the Z-axis direction. A first shaft 81 can be inserted through the third large-diameter hole 55 .

The third large-diameter hole 55 has a circular shape when viewed from above, and the diameter (diameter) of the third large-diameter hole 55 is substantially equal to or larger than the diameter of the first shaft 81 . As shown in FIG. 8B , the upper end of the first shaft 81 is arranged (inserted through) inside the third large-diameter hole 55 , and the upper end of the first shaft 81 is held inside the third large-diameter hole 55 ( fixed). That is, the third large-diameter hole 55 functions as a third holding portion 58 for holding the upper end portion of the first shaft 81 . Thus, in this embodiment, a configuration is obtained in which the third fixing portion 30 holds a portion of the driving portion 3 , and the third fixing portion 50 is connected to the first fixing portion 10 and the first fixing portion 10 via the first shaft 81 . 2 The structure supported by the fixed part 30 is obtained.

The upper end of the first shaft 81 is adhered to the third large diameter hole 55 with resin. By filling the inside of the third large-diameter hole 55 with resin, it is possible to firmly hold the upper end portion of the first shaft 81 inside the third large-diameter hole 55 due to its adhesive force. .

By arranging the first shaft 81 inside the third large-diameter hole 55 and fixing it with resin, the third holding portion 58 allows the first shaft 81 to be positioned above the driving portion 3 . It is possible to firmly hold the upper end of the. The resin for fixing the upper end of the first shaft 81 to the third holding portion 58 is preferably a silicone-based resin. By using a silicone-based resin, it is possible to absorb vibrations of the drive unit 3 and external impacts with the resin. It is possible. In addition, it is possible to prevent problems that may occur at the joint between the upper end of the first shaft 81 and the third large-diameter hole 55 due to thermal contraction (linear expansion) of the first shaft 81 .

Here, the position where the upper end of the first shaft 81 is fixed inside the third large diameter hole 55 of the third fixing part 50 and the position where the lower end of the first shaft 81 is fixed inside the second large diameter hole 55 of the second fixing part 30 The distance between the fixed positions inside the hole 42 (the distance between the fixed positions of the fixed part 4 to which the upper end and the lower end of the first shaft 81 are fixed, or the second holding part 45 and the third holding part 45) 58) is L3. Also, the position where the upper end of the second shaft 85 is fixed inside the third small diameter hole 56 of the third fixing part 50 and the position where the lower end of the second shaft 85 is between the first small diameter hole 18 of the first fixing part 10 The distance between the position where it is fixed inside (the distance between each fixed position of the fixed part 4 to which each end of the second shaft 85 is fixed, or between the fourth holding part 22 and the fifth holding part 59 ) is defined as L4. In this embodiment, the distance L3 is smaller than the distance L4.

As shown in FIG. 6 , a narrow protrusion 54 is formed at the third corner 51 c of the top plate portion 51 . The narrow projecting portion 54 is formed on a side portion of the top plate portion 51 located between the second corner portion 51b and the third corner portion 51c. The narrow protrusion 54 has a surface parallel to the YZ plane and protrudes downward. As shown in FIG. 8A, when the third fixing portion 50 is combined with the first fixing portion 10 and the second fixing portion 30, the narrow protruding portion 54 extends between the top plate portion 51 and the second fixing portion 30. Connecting.

A narrow fixed piece 54 a is formed at the lower end of the narrow protrusion 54 . The Y-axis direction width of the narrow fixing piece 54a is smaller than the Y-axis direction width of the narrow protrusion 54, and as shown in FIG. It is approximately equal to the Y-axis direction width of each concave narrow portion 34 of the fixing portion 30 . The narrow fixing piece 54a is arranged so as to straddle the stepped narrow width portion 14 and the concave narrow width portion 34 that are connected in the Z-axis direction, and is adhesively fixed to these with resin.

As shown in FIG. 6 , a third small-diameter hole 56 is formed in the fourth corner portion 51d of the top plate portion 51 . The third small-diameter hole 56 is a through hole and penetrates the top plate portion 51 in the Z-axis direction. The third small-diameter hole 56 is arranged diagonally with respect to the third large-diameter hole 55 with the third opening 52 interposed therebetween. The third small-diameter hole 56 has a circular shape when viewed from above, and as shown in FIGS. 8B and 8C, the second shaft 85 can be inserted through the third small-diameter hole 56. there is The diameter of the third small-diameter hole 56 is substantially equal to or larger than the diameter of the second shaft 85 and smaller than the diameter of the third large-diameter hole 55 .

The upper end of the second shaft 85 is arranged (passed through) inside the third small-diameter hole 56 , and the upper end of the second shaft 85 is held (fixed) inside the third small-diameter hole 56 . That is, the third small-diameter hole 56 functions as a fifth holding portion 59 for holding the upper end portion of the second shaft 85 .

The upper end of the second shaft 85 is adhered to the third small diameter hole 56 with resin. By filling the inside of the third small-diameter hole 56 with resin, it is possible to firmly hold the upper end portion of the second shaft 85 inside the third small-diameter hole 56 due to its adhesive force. The resin for fixing the upper end of the second shaft 85 to the fifth holding portion 59 is preferably a silicone-based resin. By using a silicone-based resin, it is possible to absorb the vibration of the drive unit 3 and the impact from the outside with the resin. In addition, it is possible to prevent problems that may occur at the joint between the upper end of the second shaft 85 and the third small-diameter hole 56 due to thermal contraction (linear expansion) of the second shaft 85 .

The upper end of the second shaft 85 is formed with a tapered surface 85a so as to increase its surface area. Therefore, at the upper end of the second shaft 85, it is possible to secure a sufficient bonding area with the resin filled inside the third small-diameter hole 56, and the second shaft 85 can be moved through the resin. It can be firmly fixed inside the third small-diameter hole 56 . Further, by forming the tapered surface 85a, it is possible to obtain an effect that the resin can be easily poured into the inside of the third small-diameter hole 56 from the outside (upper side). A similar tapered surface is also formed on the lower end of the second shaft 85, so that it is possible to secure a sufficient bonding area with the resin filled inside the first small-diameter hole 18 of the first fixing portion 10. It is possible.

As shown in FIGS. 6 and 8C, a wide protruding portion 53 is formed on a side portion of the top plate portion 51 located between the first corner portion 51a and the fourth corner portion 51d. The wide protrusion 53 has a surface parallel to the YZ plane and protrudes downward. When the third fixing portion 50 is combined with the first fixing portion 10 and the second fixing portion 30 , the wide protruding portion 53 connects between the top plate portion 51 and the second fixing portion 30 .

As shown in FIGS. 6 and 8C, a wide fixed piece 53a is formed at the lower end of the wide protruding portion 53. As shown in FIGS. The Y-axis direction width of the wide fixing piece 53a is smaller than the Y-axis direction width of the wide protrusion 53, and the wide stepped portion 13 of the first fixing portion 10 and the concave wide portion 33 of the second fixing portion 30 each have a smaller width. is approximately equal to the width in the Y-axis direction. The wide fixing piece 53a is arranged so as to straddle the stepped wide portion 13 and the concave wide portion 33 that are connected in the Z-axis direction, and is adhesively fixed to these with resin.

As shown in FIGS. 6 and 8A, a step is formed on the inner surface of the wide protruding portion 53, and a stepped side surface 57 is formed in a portion lowered by the step. A portion of the circuit board 100 is arranged on the stepped side surface 57 . When a portion of the circuit board 100 is placed on the stepped side surface 57, the surface of the circuit board and the inner surface of the wide protrusion 53 (portion adjacent to the stepped side surface 57) are substantially flush with each other.

As shown in FIG. 2 , the cover 90 is made of metal such as SUS and has a cover top plate portion 91 . The cover top plate portion 91 has a substantially flat plate shape, and a cover opening portion 92 is formed in the substantially central portion thereof. The cover opening 92 is formed at a position corresponding to the third opening 52 of the third fixing portion 50 .

Four downwardly extending portions 93 are integrally formed on the sides of the cover top plate portion 91 , and the sides of the cover top plate portion 91 are surrounded by the respective downwardly extending portions 93 . Each downwardly extending portion 93 extends downward, and a groove portion 94 is formed between each of the adjacent downwardly extending portions 93 , 93 . As shown in FIG. 1, the downwardly extending portion 93 is arranged so as to surround the optical driving device 1 .

Next, a method of manufacturing the optical driving device 1 will be described with reference to FIGS. 2 and 13A to 13C. First, each member shown in FIG. 2 is prepared. Note that the piezoelectric element 80, the first shaft 81, and the inertia member 82 that constitute the drive unit 3 are prepared in advance in a state in which these members are combined. In the assembly of these members, resin is used to bond the lower end of the first shaft 81 to the upper end of the piezoelectric element 80 , and resin is used to bond the upper end of the inertia member 82 to the lower end of the piezoelectric element 80 . It is formed by

The third fixing portion 50 may be prepared in advance with a portion of the circuit board 100 fixed to the stepped side surface 57 thereof. The circuit board 100 has a bent portion that is bent at a right angle. As for the optical element holding portion 60, as shown in FIG. Alternatively, the sensor magnet 103 may be placed on the stepped portion 63 for installing the magnetic body.

Next, the second fixing portion 30 is combined with the third fixing portion 50 shown in FIG. At this time, by engaging the wide fixing piece 53 a of the third fixing part 50 with the concave wide part 33 of the second fixing part 30 , the lower end of the wide protruding part 53 of the third fixing part 50 reaches the second fixing part 30 . is fixed to the upper surface of the second base portion 31 of the . Further, by engaging the narrow fixing piece 54a of the third fixing portion 50 with the concave narrow portion 34 of the second fixing portion 30, the lower end portion of the narrow projecting portion 54 of the third fixing portion 50 is second fixed. It is fixed to the upper surface of the second base portion 31 of the portion 30 . Thereby, the second fixing portion 30 is temporarily fixed to the third fixing portion 50 . When combining the third fixing portion 50 with the second fixing portion 30 , the optical element holding portion 60 is arranged between the second fixing portion 30 and the third fixing portion 50 .

Next, the aforementioned assembly of the piezoelectric element 80 , the first shaft 81 and the inertia member 82 is combined with the assembly of the second fixing portion 30 and the third fixing portion 50 . More specifically, the first shaft 81 is inserted through the second large diameter hole 42 of the second fixing portion 30 and the third large diameter hole 55 of the third fixing portion 50 in this order. As a result, the lower end of the first shaft 81 is arranged inside the second large diameter hole 42 of the second fixing portion 30 and held by the second fixing portion 30 (the second holding portion 45 shown in FIG. 8B). . Also, the upper end portion of the first shaft 81 is arranged inside the third large diameter hole 55 of the third fixing portion 50 and held by the third fixing portion 50 (the third holding portion 58 shown in FIG. 8B). At this time, the first shaft 81 is sandwiched between the pressing member 105 fixed to the optical element holding portion 60 and the engaging portion 106, and the first shaft 81 is engaged with each of the above members with a predetermined frictional force. The optical element holding portion 60 may be held by the 1 shaft 81 .

The first securing part 10 is then assembled into the assembly of the second securing part 30 and the third securing part 50 . The lower end of the second shaft 85 is previously adhesively fixed inside the first small-diameter hole 18 of the first fixing portion 10 with resin, and the lower end of the second shaft 85 is firmly held by the first fixing portion 10. Keep As the resin used at this time, an epoxy resin is preferable.

When the first fixing portion 10 is combined with the assembly of the second fixing portion 30 and the third fixing portion 50, the limiting convex portion 19 of the first fixing portion 10 is fitted with the limiting concave portion 44 (FIG. 5) of the second fixing portion 30. While fitting, the upper surface of the first base portion 11 of the first fixing portion 10 is brought into contact with the lower surface of the second base portion 31 of the second fixing portion 30 .

In addition, the inertia member 82 is arranged inside the fixing concave portion 17 of the first fixing portion 10, and the inertia member 82 is held by the first fixing portion 10 (the first holding portion 21 shown in FIG. 8B). The convex portions 170a to 170c (see FIG. 4) of the fixing concave portion 17 are preliminarily calibrated for surface shape in accordance with the surface shape of the bottom surface 820 of the inertia member . The details of the method for calibrating the surface shape of the fixed surface 171 will be described later.

Also, the second shaft 85 is inserted through the second small-diameter hole 43 of the second fixing portion 30 and the third small-diameter hole 56 of the third fixing portion 50 in this order. At this time, as shown in FIG. 7, the second shaft 85 is sandwiched between a pair of contact projections 69a, 69a (FIG. 3B) formed on the pair of shaft fixing projections 69, 69 of the optical element holding portion 60. As shown in FIG. As a result, the fixing projections 69, 69 are frictionally engaged with the second shaft 85 with a predetermined frictional force, and the second shaft 85 can fix the optical element holding portion 60 so as to be movable in the Z-axis direction. .

Next, the inertia member 82 shown in FIG. 2 is adhesively fixed inside the fixing recess 17 with resin, and the inertia member 82 is firmly held by the first fixing portion 10 . Also, the lower end of the first shaft 81 is adhesively fixed inside the second large diameter hole 42 with resin, and the lower end of the first shaft 81 is firmly held by the second fixing portion 30 . Also, the upper end of the first shaft 81 is adhesively fixed inside the third large-diameter hole 55 with resin, and the upper end of the first shaft 81 is firmly held by the third fixing portion 50 . Although it is preferable to use a silicone-based resin for adhesive fixing, an epoxy-based resin may also be used. The timing of the adhesive fixing is not particularly limited. It may be done when combining into an assembly.

Furthermore, the upper end portion of the second shaft 85 is adhesively fixed inside the third small-diameter hole 56 with resin, and the upper end portion of the second shaft 85 is firmly held by the third fixing portion 50 . As the resin used at this time, a silicone-based resin is preferable.

Next, a method for calibrating the surface shape of the protrusions 170a to 170c (see FIG. 4) of the fixing recess 17 will be described with reference to FIGS. 13A to 13C. First, the surface shape (three-dimensional shape) of the bottom surface 820 of the inertia member 82 is measured using a measuring device, and information (three-dimensional data) on the surface shape of the bottom surface 820 is acquired based on the measured value. This three-dimensional data is obtained, for example, as three-dimensional position coordinates at n (n is a natural number) arbitrarily selected positions L1 to Ln on the bottom surface 820 . However, the positions L1, L2 . . . Ln are preferably selected to cover the entire bottom surface 820.

Next, information (three-dimensional data) on the manufacturing error (variation in processing accuracy) of the surface shape of the bottom surface 820 is obtained. Here, information ( 3D data). This three-dimensional data is obtained, for example, by calculating differences Δ1 to Δn between the Z-axis coordinates of the bottom surface 820 and the Z-axis coordinates of the ideal surface indicated by the two-dot chain line at the positions L1 to Ln described above. In the example shown in FIG. 13A, the bottom surface 820 is formed with a bottom inclined portion 821, and the bottom surface 820 is located on the Z-axis negative direction side ( (side on which the reference plane 110 is located). In this case, the manufacturing errors Δ1 to Δn of the bottom surface 820 are, for example, positive values at the positions L1 to Ln.

Next, from the information on the manufacturing errors Δ1 to Δn of the bottom surface 820 at the positions L1 to Ln described above, the manufacturing errors Δa to Δc (where Δa, Δb, Δc is an integer). However, if a manufacturing error occurs from the ideal surface toward the Z-axis negative direction, Δa to Δc assume positive values.

Next, using a measuring device, the surface shape (three-dimensional shape) of the top portions 170a1 to 170c1 of the convex portions 170a to 170c of the fixing concave portion 17 is measured. Get shape information (three-dimensional data). This three-dimensional data is obtained, for example, as three-dimensional position coordinates of the tops 170a1 to 170c1.

Next, information (three-dimensional data) on the manufacturing error (variation in processing accuracy) of the surface shape of the tops 170a1 to 170c1 of the projections 170a to 170c is obtained. Here, information (three-dimensional data) indicating the size, range, etc., such as inclination and unevenness (distortion) of the tops 170a1 to 170c1 is used to specify how much the tops 170a1 to 170c1 deviate from the ideal plane. to get This three-dimensional data is obtained, for example, by calculating the difference between the Z-axis coordinates of each of the tops 170a1 to 170c1 and the Z-axis coordinates of the ideal surface.

In the following description, for the sake of simplicity, there is no manufacturing error (variation in processing accuracy) in the surface shape of the tops 170a1 to 170c1 of the projections 170a to 170c. It is assumed that they are approximately equal. The height of the projections 170a to 170c is the height of the portion of the fixing surface 171 where the projections 170a to 170c are not formed. Alternatively, the heights of the projections 170a to 170c may be the heights from the reference plane 110. FIG.

Next, based on the manufacturing errors Δa to Δc of the bottom surface 820 of the inertia member 82, the processing amount (laser irradiation amount) for the convex portions 170a to 170c is calculated. The amount of machining is determined based on the correction value P as described below. In the example shown in FIG. 13A, the manufacturing errors Δa and Δb of the surface shape of the bottom surface 820 at each position corresponding to the convex portions 170a and 170b are substantially equal (Δa=Δb, Δa>0, Δb>0). Also, the manufacturing error Δc of the surface shape of the bottom surface 820 at the position corresponding to the convex portion 170c is larger than the manufacturing errors Δa and Δb (Δc>Δa, Δc>Δb). In this case, the correction value P is approximately equal to the difference between Δc and Δa (or Δc and Δb), which is P=Δc−Δa (or P=Δc−Δb).

Next, as shown in FIG. 13A, a laser irradiation device 90 is used to irradiate the top portion 170c1 of the convex portion 170c with a laser beam, thereby forming an irradiation mark 174 (see FIG. 10) having a depth corresponding to the correction value P. It is formed (the top part 170c1 is subjected to a surface leveling process). In the illustrated example, a melted portion 173 is formed in the convex portion 170c by irradiating the top portion 170c1 with laser. In addition, in FIG. 13A, the top portion 170c1 before the fusion portion 173 is formed is indicated by a dashed line. The cross-sectional shape of the tip of the projection 170c after the fusion zone 173 is formed is the same as the cross-sectional shape of the tip of the projection 170c before the fusion zone 173 is formed. good. For example, the cross-sectional shape of the tip of the convex portion 170c after the fusion portion 173 is formed may be circular, square, polygonal, or the like.

When the values of Δa, Δb, and Δc are all different, for example, a laser is irradiated to the top of each of the two convex portions with a large error among the convex portions 170a to 170c, and the melted portion 173 (irradiation mark 174). Further, when Δa=Δb=Δc, it is not necessary to irradiate the top of any of the projections 170a to 170c with the laser. That is, in this case, the melted portion 173 is not formed on the top portions 170a1 to 170c1 of the convex portions 170a to 170c.

Next, as shown in FIG. 13B, the interior of the fixing recess 17 is filled with a predetermined amount of resin 200 (for example, ultraviolet curable resin). At this time, a sufficient amount of resin 200 is filled inside the fixing concave portion 17 so that the upper surface of the resin 200 is positioned higher than the top portions 170a1 to 170c1 of the convex portions 170a to 170c.

Next, as shown in FIG. 13C, the inertia member 82 is accommodated inside the fixing concave portion 17, and the bottom surface 820 is fixed to the convex portions 170a to 170c. At this time, the inertia member 82 is fixed inside the fixing concave portion 17 so that the inclination direction of the bottom inclined portion 821 of the bottom surface 820 and the inclination direction of the virtual plane S (see FIG. 10) substantially match. Finally, the bottom surface 820 of the inertia member 82 is fixed to the fixing surface 171 by curing the resin 200 .

As described above, in the optical driving device 1 according to the present embodiment, as shown in FIG. 10, the fusion portion 173 is formed on the top portion 170c1 of the convex portion 170c. At the position where the melted portion 173 is formed, the top portion 170c1 of the convex portion 170c is scooped out, and the height of the convex portion 170c from the reference plane 110 is lower than before the melted portion 173 is formed. Therefore, even if the bottom surface 820 of the inertial member 82 fixed to the fixing surface 171 has variations in processing accuracy, the range of the fusion zone 173 and the like are appropriately adjusted according to the degree of variation (that is, the reference plane of the convex section 170c). By adjusting the height from 110), it is possible to absorb variations in processing accuracy with the convex portion 170c. As a result, it is possible to assemble the driving portion 3 with respect to the first fixed portion 10 (FIG. 2) with high assembly accuracy, and the verticality of the driving portion 3 with respect to the reference plane 110 can be sufficiently ensured.

Further, in the present embodiment, a plurality of crater-shaped irradiation marks 174 (see FIG. 11) are formed in the melted portion 173, and the height of the convex portion 170c is greater than the depth of the recesses of the irradiation marks 174. It's becoming By forming a plurality of such irradiation marks 174 on the top portion 170c1 of the convex portion 170c, the range of the melted portion 173 can be adjusted with high accuracy. Further, when the height of the convex portion 173 is made larger than the depth of the depression of the irradiation mark 174, the height of the convex portion 170c is increased by irradiating the top portion 170c1 of the convex portion 170c with a high-energy beam such as a laser beam in multiple stages. can be dynamically adjusted.

Further, the heights of the protrusions 170a to 170c are greater than variations in machining accuracy of the bottom surface 820 of the inertia member 82 fixed to the fixing surface 171. FIG. Therefore, it is possible to adjust the height of the convex portion 170c from the reference surface 110 by a height that is approximately the same as the variation in machining accuracy of the bottom surface 820 of the inertia member 82 fixed to the fixing surface 171. Variation in machining accuracy of the bottom surface 820 of the fixed inertial member 82 can be reliably absorbed by the convex portion 170c.

Further, in this embodiment, a plurality of projections 170a to 170c are discretely formed on the outer edge of the fixing surface 171. As shown in FIG. Therefore, when the bottom surface 820 of the inertia member 82 is fixed to the fixing surface 171, rattling of the driving portion 3 (bottom surface 820 of the inertia member 82) is effectively prevented at the top portions 170a1 to 170c1 of the projections 170a to 170c. can do.

Further, in this embodiment, the fixed surface 171 is formed with three convex portions 170a to 170c, and one of the three convex portions 170a to 170c has a melting portion 170c1 at its top portion 170c1. It is In this case, the height of the protrusion 170c on which the fusion zone 173 is formed is lower than the heights of the remaining two protrusions 170b and 170c, and the imaginary plane S formed by the tops 170a to 170c of the three protrusions is inclined with respect to the reference plane 110 . Therefore, for example, even if the bottom surface 820 of the inertia member 82 fixed to the fixed surface 171 is inclined due to variations in processing accuracy, the direction of this inclination is matched with the direction of the inclination of the virtual plane S described above. Therefore, when the bottom surface 820 of the inertia member 82 is fixed to the fixing surface 171 (three convex portions 170a to 170c), the variation in machining accuracy of the bottom surface 820 of the inertia member 82 fixed to the fixing surface 171 can be reduced to the convex portion 170c. can be absorbed by

Further, in the present embodiment, since a plurality of protrusions 170a to 170c are formed on the fixed surface 171, one end (inertial member 82) of the drive section 3 is stably held via the protrusions 170a to 170c. can be fixed to the fixing surface 171 with .

Second Embodiment An optical driving device according to a second embodiment of the present invention shown in FIG. It works and works. In the drawings, members common to each member in the optical drive device 1 of the first embodiment are denoted by common reference numerals, and descriptions thereof are omitted.

As shown in FIG. 15A, a protrusion 170d is formed in the fixing recess 17A in addition to the protrusions 170a to 170c. Each of the convex portions 170a to 170d is arranged at predetermined intervals so as to form the vertices of a quadrangle. In the illustrated example, the distance between the convex portions 170a and 170b and the distance between the convex portions 170c and 170d are substantially equal. Also, the distance between the convex portions 170a and 170d and the distance between the convex portions 170b and 170c are substantially equal. These distances may all be equal. The formation positions of the projections 170 a to 170 d are not limited to the positions shown in the drawings, and may be changed as appropriate within the range of the outer edge of the fixing surface 171 . The protrusions 170a to 170d are arranged along the wall surface of the outer wall 172, respectively.

In this embodiment, melted portions 173 are formed at the tops 170c1 and 170d1 of two of the four protrusions 170a to 170d, 170c and 170d, respectively. In this case, the heights of the convex portions 170c and 170d on which the fusion portions 173 are formed from the reference plane 110 are lower than the heights of the other two convex portions 170a and 170b from the reference plane 110, and the four convex portions A virtual plane formed by the tops 170a to 170d of the inertia member 82 (a virtual plane forming a contact surface with the bottom surface 820 of the inertia member 82) is inclined with respect to the reference plane 110. As shown in FIG.

Therefore, for example, even if one side (toward a certain side) of the bottom surface 820 of the inertia member 82 fixed to the fixing surface 171 (projections 170a to 170d) is unevenly inclined due to variations in processing accuracy, By matching the direction of this inclination with the direction of the inclination of the imaginary plane described above, when the bottom surface 820 of the inertia member 82 is fixed to the fixing surface 171 (projections 170a to 170d), the surface of the bottom surface 820 can be machined. Variations in precision can be absorbed by the convex portions 170a to 170d.

It should be noted that the convex portion to be formed into the fusion portion 173 may be appropriately changed according to the shape of the bottom surface of the bottom surface 820 of the inertia member 82 . That is, when the bottom surface 820 is fixed to the projections 170a to 170d, if the verticality of the drive unit 3 with respect to the reference plane 110 can be sufficiently ensured, the fusion zone 173 is formed on the projections 170a and 170b. may be Alternatively, fusion zone 173 may be formed on protrusions 170b and 170c, or may be formed on protrusions 170a and 170d.

Third Embodiment An optical driving device according to a third embodiment of the present invention shown in FIG. It works and works. In the drawings, members common to each member in the optical drive device 1 of the first embodiment are denoted by common reference numerals, and descriptions thereof are omitted.

As shown in FIG. 15B, the fixing recess 17A is formed with protrusions 170d and 170e in addition to the protrusions 170a to 170c. Each of the projections 170a to 170e is arranged at predetermined intervals so as to form the vertices of a pentagon. In the illustrated example, the distance between the protrusions 170a and 170b, the distance between the protrusions 170b and 170c, the distance between the protrusions 170c and 170d, and the protrusion 170d and the convex portion 170e and the distance between the convex portion 170e and the convex portion 170a are substantially equal. The formation positions of the projections 170a to 170e are not limited to the illustrated positions, and may be changed within the range of the fixing surface 171 as appropriate.

In this embodiment, melted portions 173 are formed at the tops 170c1 to 170e1 of three of the five projections 170a to 170e, respectively. In this case, the heights of the protrusions 170c to 170e on which the fusion zone 173 is formed from the reference plane 110 are lower than the heights of the other two protrusions 170a and 170b from the reference plane 110. A virtual plane formed by the tops 170a to 170e of the inertia member 82 (a virtual plane forming a contact surface with the bottom surface 820 of the inertia member 82) is inclined with respect to the reference plane 110. As shown in FIG.

Therefore, for example, even if one side (toward a certain side) of the bottom surface 820 of the inertia member 82 fixed to the fixing surface 171 (projections 170a to 170e) is unevenly inclined due to variations in processing accuracy, By matching the direction of this inclination with the direction of the inclination of the imaginary plane described above, when the bottom surface 820 of the inertia member 82 is fixed to the fixing surface 171 (projections 170a to 170e), the surface of the bottom surface 820 can be machined. Variations in precision can be absorbed by the convex portions 170a to 170e.

It should be noted that the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the present invention.

In the above-described first embodiment, the tops 170a1 to 170c1 of the projections 170a to 170c do not necessarily need to be irradiated with laser, and the tops 170a1 to 170c1 may not be provided with the melting portion 173. FIG. The same applies to the above-described second embodiment. Also in this case, as described below, the same effects as those of the first and second embodiments can be obtained.

That is, in the case where the fixed surface 171 is provided with the protrusions 170a to 170c as in the optical drive device 1 according to the first embodiment, when the bottom surface 820 of the inertia member 82 is fixed to the fixed surface 171, the bottom surface 820 is , and the positions of the protrusions 170a to 170c, etc., the fixing surface 171 is locally abutted, and the contact points between the bottom surface 820 and the fixing surface 171 are limited to the positions of the protrusions 170a to 170c. Therefore, even if the bottom surface 820 fixed to the fixing surface 171 has variations in machining accuracy, there is a limited possibility that the part affected by the variations will come into contact with the fixing surface 171 (however, FIG. 10). 2 shows an example in which the relevant portion is in contact with the fixed surface 171), the variation in machining accuracy is greater than that in the case where the bottom surface 820 and the fixed surface 171 are entirely in contact with each other. The influence on the verticality of the drive unit 3 with respect to the Therefore, it is possible to assemble the driving unit 3 with respect to the first fixing unit 10 with high assembly accuracy. The device 1 can be realized.

Further, even if the fixing surface 171 itself has variations in machining accuracy, if the variations do not occur at the positions of the projections 170a to 170c, when fixing the bottom surface 820 of the inertia member 82 to the fixing surface 171, the Not affected by variability. Therefore, even in such a case, the effects described above can be obtained.

In the first embodiment, the fusion zone 173 is formed only on one projection 170c out of the three projections 170a to 170c, but the fusion zone 173 may be formed on two projections.

In the above-described second embodiment, in the example shown in FIG. 15A, of the four convex portions 170a to 170d, two convex portions 170c and 170d are formed with the melted portion 173, but three or more convex portions are melted. A portion 173 may be formed.

Further, in the example shown in FIG. 15B, the melted portions 173 are formed in the three protrusions 170c to 170e out of the five protrusions 170a to 170e, but the melted portions 173 are formed in four or more protrusions. may be

In each of the above embodiments, the case where the number of protrusions is 3 to 5 was exemplified, but the number of protrusions may be 6 or more.

In the first embodiment, the bottom surface 820 of the inertia member 82 has an external shape having a quadrilateral shape with four sides when viewed from the Z-axis direction. It may have a polygonal shape.

REFERENCE SIGNS LIST 1 Optical driving device 2 Movable part 3 Driving part 4 Fixed part 10 First fixed part 11 First base member 110 Reference surfaces 17, 17A Fixing recesses 170a to 170e Convex parts 170a1 to 170e1 Top portion 171 Fixed surface 172 Outer wall portion 173 Melted portion 174 Irradiation mark 175 Tapered surface 60 Optical element holding portion 80 Piezoelectric element 81 First shaft 82 Inertia member 820 Bottom surface 821 Inclined portion 90 Laser Irradiation device 200...Resin

Claims (10)

a movable part to which an optical element can be attached;
a drive unit that movably holds the movable unit;
a fixing portion in which one end of the driving portion is fixed to a fixing surface via a joint member;
The optical driving device, wherein the fixed surface has a convex portion. 2. The optical driving device according to claim 1, wherein the convex portion is plural. 3. The optical driving device according to claim 1, wherein a melted portion is formed on the top of the convex portion. A plurality of crater-shaped irradiation marks are formed in the fusion zone,
4. The optical driving device according to any one of claims 1 to 3, wherein the height of the projection is greater than the depth of the depression of the irradiation mark. 5. The optical driving device according to claim 1, wherein the height of said convex portion is greater than variations in machining accuracy of the surface of said driving portion fixed to said fixing surface. The fixing surface is formed with three protrusions,
6. The optical driving device according to claim 3, wherein the fusion zone is formed on the top of at least one of the three projections. The fixing surface is formed with four protrusions,
The optical driving device according to any one of claims 3 to 5, wherein the fusion zone is formed on the top of at least two of the four projections. Five protrusions are formed on the fixing surface,
The optical driving device according to any one of claims 3 to 5, wherein the fusion zone is formed on the tops of at least three of the five projections. 9. The optical driving device according to claim 1, wherein a plurality of said protrusions are discretely formed on the outer edge of said fixed surface. The optical driving device according to any one of claims 1 to 9, wherein the cross-sectional shape of the convex portion is substantially trapezoidal.

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