JP2022151628A - プローブ - Google Patents
プローブ Download PDFInfo
- Publication number
- JP2022151628A JP2022151628A JP2022019334A JP2022019334A JP2022151628A JP 2022151628 A JP2022151628 A JP 2022151628A JP 2022019334 A JP2022019334 A JP 2022019334A JP 2022019334 A JP2022019334 A JP 2022019334A JP 2022151628 A JP2022151628 A JP 2022151628A
- Authority
- JP
- Japan
- Prior art keywords
- test
- mass
- contained
- mass ratio
- plunger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 title claims abstract description 44
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 38
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 38
- 229910000679 solder Inorganic materials 0.000 abstract description 58
- 238000009792 diffusion process Methods 0.000 abstract description 36
- 239000000463 material Substances 0.000 description 198
- 229910045601 alloy Inorganic materials 0.000 description 40
- 239000000956 alloy Substances 0.000 description 40
- 230000000052 comparative effect Effects 0.000 description 22
- 229910052802 copper Inorganic materials 0.000 description 17
- 229910052763 palladium Inorganic materials 0.000 description 17
- 238000007689 inspection Methods 0.000 description 13
- 238000001878 scanning electron micrograph Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- 229910052709 silver Inorganic materials 0.000 description 11
- 238000005096 rolling process Methods 0.000 description 9
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 229910020830 Sn-Bi Inorganic materials 0.000 description 4
- 229910018728 Sn—Bi Inorganic materials 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 150000002736 metal compounds Chemical class 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 238000009472 formulation Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910020938 Sn-Ni Inorganic materials 0.000 description 1
- 229910008937 Sn—Ni Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Images
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020237034138A KR20230160837A (ko) | 2021-03-26 | 2022-03-18 | 프로브 |
| TW111110143A TW202248651A (zh) | 2021-03-26 | 2022-03-18 | 探針 |
| CN202280023514.1A CN117043370A (zh) | 2021-03-26 | 2022-03-18 | 探针 |
| PCT/JP2022/012576 WO2022202658A1 (ja) | 2021-03-26 | 2022-03-18 | プローブ |
| US18/284,072 US20240175897A1 (en) | 2021-03-26 | 2022-03-18 | Probe |
| EP22775446.2A EP4317490A1 (en) | 2021-03-26 | 2022-03-18 | Probe |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021053184 | 2021-03-26 | ||
| JP2021053184 | 2021-03-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022151628A true JP2022151628A (ja) | 2022-10-07 |
| JP2022151628A5 JP2022151628A5 (enrdf_load_stackoverflow) | 2024-12-19 |
Family
ID=83465315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022019334A Pending JP2022151628A (ja) | 2021-03-26 | 2022-02-10 | プローブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2022151628A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024053552A1 (ja) * | 2022-09-07 | 2024-03-14 | 石福金属興業株式会社 | プローブピン用合金材料 |
| WO2024053549A1 (ja) * | 2022-09-07 | 2024-03-14 | 株式会社ヨコオ | プローブ |
-
2022
- 2022-02-10 JP JP2022019334A patent/JP2022151628A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024053552A1 (ja) * | 2022-09-07 | 2024-03-14 | 石福金属興業株式会社 | プローブピン用合金材料 |
| WO2024053549A1 (ja) * | 2022-09-07 | 2024-03-14 | 株式会社ヨコオ | プローブ |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20241202 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20241202 |