JP2022147597A - Inspection device and inspection method, and manufacturing method for products, bearings, vehicles, and machines - Google Patents

Abstract

To achieve an accurate appearance inspection of an object by projecting illumination light to the object under certain preferred conditions and acquiring a desired and stable captured image of the object, and to acquire many images of the object in a short time.SOLUTION: An inspection device comprises: an illumination-integrated imaging part where an illumination part for projecting predetermined illumination light to an object and an imaging part for imaging the object are integrally provided; a robot mounted with the illumination-integrated imaging part; and a control part for controlling movement of the illumination-integrated imaging part and the robot and determining quality of the object on the basis of the captured image of the object that has been acquired by the imaging part. The control part sends to the robot a movement control command for moving the illumination-integrated imaging part in a predetermined route, and sends to the illumination-integrated imaging part an imaging control command for imaging the object while moving at predetermined time intervals.SELECTED DRAWING: Figure 3

Description

TECHNICAL FIELD The present invention relates to an inspection technique by imaging an object, and more particularly to an apparatus and method for inspecting the external shape of an object, and a method for manufacturing products, bearings, vehicles and machines using the same.

2. Description of the Related Art Conventionally, imaging apparatuses and inspection apparatuses for capturing an image of an object such as a workpiece (part) made of resin, metal, etc., performing image processing on the captured image, and inspecting the external shape of the object, and the like. Various systems have been proposed.

For example, Patent Document 1 discloses a light projecting unit for projecting so-called pattern light onto an object as illumination light for imaging, and a plurality of projectors for imaging the object projected with the pattern light from different directions. A three-dimensional measuring device has been proposed that includes an imaging means on a platform. This three-dimensional measurement device is intended to more appropriately measure the three-dimensional shape of an object with a strong specular reflection component by integrating a plurality of three-dimensional point cloud data obtained from a plurality of captured images. is.

JP 2015-21862 A

By the way, in a general object imaging device or inspection device, an imaging device (camera) is attached to a robot (actuator). They tend to be installed separately. However, in that case, depending on the geometrical positional relationship between the object and the illumination, it often happens that the desired captured image of the object cannot be obtained. In addition, depending on how the object is illuminated, the appearance of defects on the external surface may change. Furthermore, when performing a visual inspection of an object, a reference image for inspection of the object (non-defective product standard image) is compared with the actual captured image. In some cases, it is difficult to match the imaging conditions when the image was acquired. When this happens, it becomes difficult to accurately inspect the appearance of the object. In addition, there is also the problem that the position of the illumination restricts the imaging angle with respect to the object and the imageable part of the object. In addition, the conventional apparatus that performs imaging and measurement while the imaging device is stationary has the problem that it takes a long time to capture images of various parts of the object.

Therefore, the present disclosure has been made in view of such circumstances, and it is possible to obtain a desired and stable captured image of an object by projecting illumination light onto the object under certain suitable conditions. As a result, an inspection apparatus and method with excellent processing efficiency capable of realizing accurate visual inspection of an object and acquiring many images of the object in a short time, and a product using the same , bearings, vehicles and machines.

In order to solve the above problems, the present invention employs the following configurations.

[1] An example of an inspection apparatus according to the present disclosure is an inspection apparatus that images an object and inspects the object, and includes an illumination unit that projects predetermined illumination light onto the object; an illumination-integrated imaging unit integrally provided with an imaging unit for imaging the object, a robot to which the illumination-integrated imaging unit is attached, and an object drive having a rotation mechanism for rotating the held object unit, the illumination-integrated imaging unit, the robot, and the object driving unit, and determines the quality of the object based on the captured image of the object acquired by the imaging unit. and a control unit for determining. Then, the control unit sends to the robot a movement control command for moving the imaging unit integrated with illumination along a predetermined path, and instructs the imaging unit integrated with illumination to move the imaging unit integrated with illumination. An imaging control command is sent to perform (intermittently) imaging the object at predetermined time intervals while moving.

This configuration employs an illumination-integrated imaging unit in which an illumination unit for projecting predetermined illumination light onto an object is provided integrally with an imaging unit for imaging the object. The geometric positional relationship is always kept constant. As a result, it is possible to suppress the occurrence of restrictions on the imaging angle with respect to the object and the imageable part of the object. In addition, since the field of view (angle) of the object by the imaging unit and the projection condition of the illumination light from the illumination unit to the object do not change, a desired captured image of the object can be obtained. Therefore, an accurate visual inspection of the object can be performed. In addition, while moving the illumination-integrated imaging unit along a predetermined path by the robot, the image of the object can be continuously captured at predetermined time intervals. can be obtained.

[2] In the above configuration, the configuration of the illumination unit is not particularly limited. Specifically, for example, the illumination unit has a plurality of light sources, and at least one intensity ( It is preferably configured to include multi-channel illumination that creates multiple illumination emission patterns by combining basic intensities). Examples of such multi-channel illumination include MDMC (Multi Direction Multi Color) illumination, etc., and from among a large number of illumination emission patterns, the optimum illumination emission pattern according to the field of view and imaging part of the object is selected. can be used as

[3] In the above configuration, the control unit controls the movement control command and the imaging control so that an imaged part (imaged location) of the object is the same or substantially the same for each imaging by the imaging unit. A command may be sent to synchronize the movement of the illumination-integrated imaging section with the imaging. With this configuration, it is possible to prevent the imaged part (imaged part) of the object from being displaced each time an image is captured while the illumination-integrated imaging unit is moved.

[4] In the above configuration, the control unit considers a response delay time of the illumination-integrated imaging unit to the movement control command and a response delay time of the illumination-integrated imaging unit to the imaging control command, It is preferable to synchronize the movement of the illumination-integrated imaging section and the imaging. In general, the robot is a servo command device, and the imaging unit is sometimes classified as a trigger command device. Device lag time is taken into account. Therefore, for example, by sending a command to each device at a time earlier by the delay time of each device, it becomes easier to reliably synchronize the position (moving position) of the illumination-integrated imaging unit and the imaging timing.

[5] The above configuration may further include an object driving section having a rotating mechanism for rotating the held object, and the control section may rotate the object with respect to the object driving section. A driving control command may be sent, and an imaging control command for imaging the rotating object at predetermined time intervals may be sent to the illumination-integrated imaging unit. With this configuration, the object can be continuously imaged at predetermined time intervals while the illumination-integrated imaging unit is moved along a predetermined path and the object is rotated by the object driving unit. , more images of objects can be acquired in a shorter time.

[6] In the above configuration, the control unit controls the drive control command and the imaging control so that the imaging part (imaging location) of the object is the same or substantially the same for each imaging by the imaging unit. A command may be sent to synchronize the rotation of the object and the imaging. With this configuration, it is possible to prevent the imaged part (imaged part) of the object from shifting each time the object is imaged while the object is rotated.

[7] In the above configuration, the control unit considers the response delay time of the object driving unit with respect to the drive control command and the response delay time of the illumination-integrated imaging unit with respect to the imaging control command, It is preferable to synchronize the rotation of the object with the imaging. In general, the object driving unit is a servo command device, and the imaging unit is sometimes classified as a trigger command device. Each device's delay time to the command is taken into account. Therefore, for example, by sending a command to each device at a time earlier by the delay time of each device, it becomes easier to reliably synchronize the position (rotational position) of the imaging part of the object and the imaging timing.

[8] In the above configuration, it is preferable that the object driving section includes a mechanism for inverting the object. By inverting and similarly imaging the object having many parts on the front surface as described above, many parts on the back side of the object can also be imaged. In this way, it is possible to easily and efficiently capture an image of the entire object with a simple operation of reversing the object.

[9] In the above configuration, a plurality of robots to which the imaging units integrated with illumination are attached are provided, and each robot and each imaging unit integrated with illumination capture images of objects held in different positions and/or orientations. You may do so. By doing so, it is possible to operate a plurality of inspection apparatuses according to the present disclosure, so that the inspection work efficiency of the object can be further improved.

[10] An inspection method according to the present disclosure is a method for effectively inspecting an object using an inspection apparatus according to the present disclosure, wherein the control unit controls the operation of the illumination-integrated imaging unit and the robot. Then, a movement control command is sent to the robot to move the imaging unit integrated with illumination along a predetermined path, and the imaging unit integrated with illumination moves to the imaging unit integrated with illumination to move the object. An imaging control command for performing imaging at predetermined time intervals (intermittently) is sent, the object driving unit holds the object and rotates the object by the rotating mechanism, and the lighting unit performs predetermined illumination. Light is projected onto the object, the imaging unit images the object, and the control unit determines the quality of the object based on the captured image of the object acquired by the imaging unit. do.

[11] In addition, in the method for manufacturing a product according to the present disclosure, in the production process of the product, the inspection device according to any one of [1] to [9] or the inspection method according to [10] above is used to inspect the object. The method includes the step of conducting a visual inspection of a part of the product, a semi-finished product (semi-finished product), or a finished product.

[12] Further, in the bearing manufacturing method according to the present disclosure, in the production process of the bearing, the inspection device according to any one of [1] to [9] or the inspection method according to [10] above is used to inspect the object. The method includes the step of conducting a visual inspection of the parts, semi-finished products (semi-finished products), or finished products of the bearing as a part.

[13] A method for manufacturing a vehicle according to the present disclosure is a method using the method for manufacturing a bearing according to [12] above.

[14] A method of manufacturing a machine according to the present disclosure is a method using the method of manufacturing a bearing of [12] above.

In the present disclosure, the terms “unit” and “device” do not simply mean physical means, but also include a configuration in which the functions of the “unit” and “device” are implemented by software. In addition, the functions of one "part" and "device" may be realized by two or more physical means or devices, or the functions of two or more "parts" and "devices" may be combined into one physical unit. may be realized by any means or device. Furthermore, "unit" and "apparatus" are concepts that can be rephrased as, for example, "means" and "system".

According to the present disclosure, by providing the illumination-integrated imaging unit, the geometrical positional relationship between the imaging unit and the illumination unit is always maintained constant, and the imaging angle with respect to the object and the imageable part of the object can be prevented from being restricted, and a desired captured image of the object can be obtained. As a result, it becomes possible to implement an accurate visual inspection of the object. Furthermore, by capturing an image of the object while the object is being rotated by the object driving unit, a large number of captured images of the object can be obtained in a short time, and inspection efficiency can be significantly improved. can be done. Furthermore, the manufacturing efficiency of products, bearings, vehicles and machines can be improved by using the inspection apparatus or inspection method according to the present disclosure.

1 is a perspective view (partial front view) schematically showing a schematic configuration of an example of an inspection apparatus according to an embodiment of the present disclosure; FIG. 1 is a plan view schematically showing an example hardware configuration of an inspection apparatus according to an embodiment of the present disclosure; FIG. 1 is a perspective view (partial front view) schematically showing an example of a state in which an inspection apparatus according to an embodiment of the present disclosure is operated; FIG. FIG. 10 is a perspective view (partial front view) schematically showing another example of a state in which the inspection device according to the embodiment of the present disclosure is operated; FIG. 11 is a perspective view (partial front view) schematically showing still another example of a state in which another inspection apparatus according to an embodiment of the present disclosure is operated; 1 is a perspective view (partial cross-sectional view) schematically showing a structure of a portion of a vehicle including bearings whose appearance has been inspected by an inspection apparatus according to the present disclosure; FIG. FIG. 2 is a cross-sectional view showing a schematic structure of a motor having a bearing that has been visually inspected by an inspection apparatus according to the present disclosure;

Hereinafter, an embodiment according to an example of the present disclosure will be described with reference to the drawings. However, the embodiments described below are merely examples, and an example of the present disclosure can be modified in various ways without departing from the scope of the present disclosure. In addition, in the description of the drawings, the same or similar parts are denoted by the same or similar reference numerals, and the drawings are schematic and do not necessarily correspond to actual dimensions, proportions, and the like. Furthermore, even between drawings, portions having different dimensions and ratios may be included. Furthermore, the embodiments described below are only some embodiments of the present disclosure, and other embodiments can be obtained by those skilled in the art based on the embodiments of the present disclosure without requiring creative actions. , are all included in the protection scope of the present disclosure.

(Embodiment 1)
(Configuration example)
FIG. 1 is a perspective view (partial front view) schematically showing a schematic configuration of an example of an inspection apparatus according to an embodiment of the present disclosure. For example, the inspection apparatus 100 captures an image of the workpiece 6 held by the support section 7 and determines the quality of the workpiece 6 (whether there is a scratch or the like) based on the captured image. The inspection apparatus 100 also includes a sensor 1 (imaging section), an illumination device 2 (illumination section), a robot 3, a servo device 4 (object driving section), and a control device 5 (control section).

The sensor 1 is an imaging sensor or a distance sensor that acquires measurement data including external shape information and three-dimensional position information of the workpiece 6 . Its specific configuration is not particularly limited, and includes, for example, a camera device equipped with a general optical sensor, and images the workpiece 6 at a predetermined viewing angle FV under predetermined measurement conditions. Here, the imaging method (measurement method) of the work 6 is not particularly limited, and for example, various active measurement methods and passive measurement methods can be appropriately selected and used. As the measurement data of the work 6, image data (for example, three-dimensional point cloud data, distance image, etc.) acquired by these various measurement methods, or, for example, three-dimensional model data of the work 6 can be collated. Possible appropriate data etc. can be exemplified.

The illumination device 2 is an illumination device having an appropriate optical system for projecting predetermined illumination light (measurement light) toward the workpiece 6 (arrow FA). So-called 3D lighting including scanning light and the like, so-called 2D lighting that is normal lighting, and projector type lighting can be used. The configuration of the optical system is also not particularly limited. For example, in the case of projecting pattern light as illumination light, a configuration including a laser light source, a pattern mask, and a lens is exemplified. It is also preferable to use multi-channel lighting such as MDMC (Multi Direction Multi Color) lighting as the light source.

Here, the sensor 1 is fixed to the housing of the illumination device 2 by a cantilever beam 1k so that the camera portion thereof faces the viewing window 2w provided in the illumination device 2. 1 can image a workpiece 6 at a viewing angle FV through a viewing window 2w. As described above, the inspection apparatus 100 includes the illumination-integrated sensor 10 (illumination-integrated imaging unit) in which the sensor 1 and the illumination device 2 are fixed and integrated. The visual field window 2w may be open as a frame, or may be closed by a translucent member.

The robot 3 is a vertical articulated robot, and more specifically, a base link 30, links 31 to 36, and joints J1 to J6 (indicating joints for connecting the links) 6. It is a 6-axis robot with degrees of freedom. Note that the joints J1 to J6 each have a predetermined rotation angle range set as a movable range.

The connection between these links will be described below. That is, first, the base link 30 and the link 31 are connected via a joint J1 that rotates in the direction of the arrow C1 around the vertical axis A1 in the drawing. As a result, the link 31 can rotate in the direction of the arrow C1 with the base link 30 as a fulcrum. Also, the links 31 and 32 are connected through a joint J2 that rotates in the direction of an arrow C2 around a horizontal axis A2 in the drawing. As a result, the link 32 can rotate in the arrow C2 direction with the link 31 as a fulcrum.

Furthermore, the links 32 and 33 are connected via a joint J3 that rotates in the direction of arrow C3 around the horizontal axis A3 in the drawing. As a result, the link 33 can rotate in the direction of arrow C3 with the link 32 as a fulcrum. Furthermore, the links 33 and 34 are connected through a joint J4 that rotates about the axis A4 in the direction of the arrow C4 in the drawing. As a result, the link 34 can rotate in the arrow C4 direction with the link 33 as a fulcrum. Furthermore, the links 34 and 35 are connected through a joint J5 that rotates about the axis A5 in the direction of the arrow C5 in the drawing. As a result, the link 35 can rotate in the direction of arrow C5 with the link 34 as a fulcrum. The links 35 and 36 are connected via a joint J6 that rotates about the axis A6 in the direction of the arrow C6 in the drawing. As a result, the link 36 can rotate in the direction of arrow C6 with the link 35 as a fulcrum.

The posture of the robot 3 having such a structure can generally be determined by the rotation angles of the joints J1 to J6. That is, when the rotation angles of the joints J1 to J6 are θ1 to θ6, and the rotation angles θ1 to θ6 are the values of the coordinate axes, the posture of the robot 3 is represented by the configuration space It can be expressed as a coordinate point on (a space represented by a coordinate system with at least two of the rotation angles θ1 to θ6 as coordinate axes).

The lighting device 2 in the lighting-integrated sensor 10 is joined to the link 36 of the robot 3 having the above configuration via the cantilever beam 2k. Accordingly, the illumination-integrated sensor 10 has the same degree of freedom in rotation as the link 36, and is rotatable along with the link 36 in the arrow C6 direction with the link 35 as a fulcrum.

Further, the servo device 4 has a rotating mechanism for rotating (continuously rotating) the work 6 held by the support portion 7 in the horizontal direction indicated by the illustrated arrow C40, for example. This rotating mechanism is a type of winding transmission device, and is mainly composed of a servomotor 41, a first pulley 42 connected to its rotary shaft K1, and an endless belt 43 connected to the first pulley 42. It is composed of a second pulley 44 and a turntable 45 connected to its rotary shaft K2. With such a configuration. The rotational force of the servomotor 41 is transmitted to the turntable 45, and the workpiece 6 rotates together with the turntable 45 around the rotation axis K2. These members 41 to 45 are incorporated in the housing of the support section 7. In this respect, the support section 7 can also be regarded as a part of the servo device 4 (that is, the "object driving section"). .

Further, the control device 5 is connected to each of the sensor 1, the lighting device 2, the robot 3, and the servo device 4, and performs imaging processing of the work 6 by the sensor 1, illumination light projection processing of the work 6 by the lighting device 2, In addition to the drive processing of the robot 3 and the drive processing of the servo device 4, it controls processing related to various operations and calculations required in the inspection device 100. FIG.

Next, FIG. 2 is a plan view schematically showing an example of a hardware configuration of an inspection device (inspection device 100) according to an embodiment of the present disclosure. In the example of this figure, the inspection apparatus 100 also includes the sensor 1, the lighting device 2, the robot 3, the servo device 4, and the control device 5 illustrated in FIG. Here, the control device 5 includes a control calculation unit 51, a communication interface (I/F) unit 52, a storage unit 53, an input unit 54, and an output unit 55, and each unit can communicate with each other via a bus line 56. connected to Note that the support portion 7 connected to the control device 5 will be described later in "Operation Example 3".

The control calculation unit 51 includes a CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read Only Memory), etc., and performs control of each component and various calculations according to information processing. Also, the communication I/F unit 52 is, for example, a communication module for communicating with “units” and “apparatuses” that are other components by wire or wirelessly. The communication method used by the communication I/F unit 52 for communication is not particularly limited and is arbitrary. Examples thereof include LAN (Local Area Network) and USB (Universal Serial Bus). Lines can also be applied. The sensor 1, the lighting device 2, and the robot 3 can all be provided to communicate with the control calculation section 51 and the like via the communication I/F section 52. FIG.

The storage unit 53 is an auxiliary storage device such as a hard disk drive (HDD), solid state drive (SSD), etc., and stores various calculation programs executed by the control calculation unit 51, the sensor 1, lighting Control programs for controlling the motions of the device 2 and the robot 3, captured images and point cloud data output from the sensor 1, a database including imaging parameters and various calculation parameters, and various calculation results. data, data relating to the status of the work 6, and furthermore, comparative reference images for visual inspection of the work 6, three-dimensional CAD model data, and the like are stored. As described above, various processing functions of the inspection apparatus 100 are realized by executing the calculation program and the control program stored in the storage unit 53 in the control calculation unit 51 .

The input unit 54 is an interface device for receiving various input operations from the user who uses the inspection apparatus 100, and can be implemented by, for example, a mouse, keyboard, touch panel, voice microphone, or the like. The output unit 55 is an interface device for notifying the user or the like of the inspection apparatus 100 of various types of information by display, sound, printing, etc., and can be realized by, for example, a display, a speaker, a printer, or the like.

According to the inspection apparatus 100 configured as described above, the illumination integrated sensor 10 is configured by integrating the illumination device 2 for projecting predetermined illumination light onto the workpiece 6 and the sensor 1 for imaging the workpiece 6. , the geometrical positional relationship between the sensor 1 and the illumination device 2 is always kept constant. As a result, it is possible to prevent restrictions on the imaging angle with respect to the workpiece 6 and the imageable parts of the workpiece 6 . In addition, since the field of view (angle) of the work 6 by the sensor 1 and the projection condition (impact) of the illumination light from the lighting device 2 to the work 6 do not change even if the imaging position or the imaging part is different, the work 6 can be processed as desired. can be obtained. As a result, it is possible to perform an accurate and efficient visual inspection of the workpiece 6 .

In addition, by using multi-channel illumination such as MDMC illumination as the light source of the illumination device 2, the optimum illumination emission pattern according to the field of view of the work 6 and the imaging part can be selected from a large number of illumination emission patterns. Therefore, the accuracy and efficiency of visual inspection can be further improved. Furthermore, since the robot 3 can image the workpiece 6 while moving the lighting-integrated sensor 10 along a predetermined path, it is possible to image and measure the workpiece 6 while the sensor 1 is stationary. , a large number of captured images of the workpiece 6 can be acquired in a short time, and a significant improvement in processing efficiency can be realized. In addition, since it is possible to take an image while rotating the workpiece 6 by the servo device 4, the image of the workpiece 6 can be captured in a shorter time than when the workpiece 6 is imaged and measured in a stationary state. , a larger amount can be obtained, and the processing efficiency can be further improved.

(Operation example 1)
Next, an example of the operation of the inspection apparatus according to the present disclosure will be described with reference to FIG. FIG. 3 is a perspective view (partial front view) schematically showing an example of a state in which an inspection device (inspection device 100) according to an embodiment of the present disclosure is operated. Note that the operations and processes described below are merely examples, and each operation and process may be changed as much as possible within the scope of the technical concept of the present disclosure. Also, in the operations described below, steps can be omitted, replaced, and added as appropriate (the same applies hereinafter).

Here, first, the control calculation unit 51 of the control device 5 causes the robot 3 to move the lighting-integrated sensor 10 to the position and orientation indicated by the arrow (A) in FIG. posture) to the position and posture indicated by the arrow (B) along a predetermined path C20. Based on the movement control command, the robot 3 appropriately operates the links 31 to 36 to move the lighting-integrated sensor 10 from the position and orientation indicated by arrow (A) to the position and orientation indicated by arrow (B). The control calculation unit 51 also sends a drive control command to the servo device 4 to operate the servomotor 4 to rotate the workpiece 6 . Based on the drive control command, the servo device 4 operates the servomotor 4, transmits its rotational force to the turntable 45, and rotates the workpiece 6 around the rotation axis K2. Furthermore, the control calculation unit 51 sends an imaging control command to the illumination-integrated sensor 10 to capture an image of the workpiece 6 that is rotating while moving along the predetermined path C20. As a result, the lighting-integrated sensor 10 projects a predetermined illumination light emission pattern from the lighting device 2 onto the workpiece 6 while moving along the predetermined path C20, and the sensor 1 picks up an image of the rotating workpiece 6. is performed several times (intermittently) at predetermined time intervals. 51.

Next, if necessary, while the work 6 is being rotated, the control calculation unit 51 of the control device 5 moves the robot 3 to the position indicated by the arrow (B) in FIG. A movement control command to continuously move the lighting-integrated sensor 10 from the orientation along a predetermined path C20 to the position and orientation indicated by the arrow (A), that is, to continuously move the lighting-integrated sensor 10 in the opposite direction. to send out. As a result, the illumination-integrated sensor 10 projects a predetermined illumination light emission pattern from the illumination device 2 onto the workpiece 6 while moving in the opposite direction along the predetermined path C20, and the sensor 1 detects the rotating workpiece. 6 is captured (intermittently) a plurality of times at predetermined time intervals, and the captured image data (captured image from the side to the upper side of the workpiece 6) obtained from the predetermined path C20 of the workpiece 6 is transferred to the control device 5. is transmitted to the control calculation unit 51 of .

Then, the control calculation unit 51 of the control device 5 appropriately extracts the captured images used in the appearance inspection of the workpiece 6 from the obtained plurality of captured images, and extracts the comparison reference image for the appearance inspection of the workpiece 6 and the three-dimensional CAD image. It is possible to judge whether the external appearance of the work 6 is good or bad by comparing it with model data or the like.

According to the operation of the inspection apparatus 100 as described above, while the illumination-integrated sensor 10 is moved along the predetermined path C20 and while the workpiece 6 is rotated, the workpiece 6 is exposed to light from various directions. Imaging can be performed. As a result, desired imaging data of the workpiece 6 can be obtained accurately and quickly, and a large amount of information regarding the external appearance of the workpiece 6 can be obtained in a short period of time.

(Operation example 2)
In this operation example 2, when the work 6 is imaged according to the above operation example 1, the movement control command sent from the control calculation unit 51 of the control device 5 to the robot 3, the servo device 4, and the illumination-integrated imaging unit 10, By controlling the timing of the drive control command and the imaging control command, the illumination-integrated sensor 10 is moved so that the imaged part (imaged part) of the workpiece 6 becomes the same or substantially the same every time the sensor 1 takes an image. This is an example of performing the same processing as the operation example 1 shown in FIG. By doing so, it is possible to prevent the imaged part (imaged part) of the work 6 from being shifted each time an image is taken, so there is an advantage that the appearance inspection of the work 6 or the like can be reliably performed easily.

More specifically, the control calculation unit 51 of the control device 5 calculates the response delay time of the robot 3 with respect to the movement control command, the response delay time of the servo device 4 with respect to the drive control command, and the illumination-integrated sensor 10 with respect to the imaging control command. By taking the response delay time into consideration, the position (rotational position) of the imaging portion of the workpiece 6 and the timing of imaging by the sensor 1 can be reliably synchronized.

Here, the movement control command is, for example, a servo command in which the operation of various motors for driving each link of the robot 3 can be rate-determining. The time .DELTA.S0) from when each link is activated to when the lighting-integrated sensor 10 moves can be measured in advance or can be predicted from the operation characteristics of the robot 3. FIG. Further, the drive control command is, for example, a servo command in which the operation of the servo motor 41 can be rate-determining. The time .DELTA.S1) to the time can be measured in advance or predicted from the operating characteristics of the servo device 4. FIG. Further, the imaging control command is, for example, a trigger command in which the operation of the sensor 1 can be rate-determining, and the response delay time of the lighting-integrated sensor 10 with respect to the trigger command (the sensor 1 actually operates from the time when the trigger command arrives). The time .DELTA.S2) up to this point can also be measured in advance or can be predicted from the operation characteristics of the lighting-integrated sensor 10. FIG.

Therefore, for example, the servo command to the robot 3 is sent earlier by the delay time ΔS0, the servo command to the servo device 4 is sent earlier by the delay time ΔS1, and the servo command is sent to the servo device 4 by the delay time ΔS2. At an early time, a trigger command is sent to the illumination-integrated sensor 10 . As a result, the movement of the illumination-integrated sensor 10 by the robot 3, the rotation of the workpiece 6, and the imaging can be more reliably synchronized, and as a result, the visual inspection of the workpiece 6 can be more reliably performed. can.

(Operation example 3)
Next, another example of the operation of the inspection apparatus according to the present disclosure will be described with reference to FIG. FIG. 4 is a perspective view (partial front view) schematically showing another example of a state in which the inspection device (inspection device 100) according to an embodiment of the present disclosure is operated.

In this operation example 3, the work 6 is moved from the state shown in FIG. 3, more specifically, the work 6 is turned upside down from the state shown in FIG. Except for the above, this is an example of performing the same processing as the operation example 1 shown in FIG. Here, for example, the support portion 7 that holds the work 6 has an appropriate drive mechanism that changes the position and/or orientation of the work 6 and turns the work 6 upside down. In this regard, in this operation example 3, the support section 7 also corresponds to the "object driving section".

First, prior to imaging the work 6, the control calculation section 51 of the control device 5 sends to the support section 7 an inversion control command for vertically inverting the work 6 from the state shown in FIG. The support part 7 reverses the workpiece 6 upside down based on the reverse control command and maintains the state. Then, the control calculation unit 51 repeats the same commands as in the operation example 1 to move the lighting-integrated sensor 10 along the predetermined path C20 and rotate the workpiece 6 in the upside-down state shown in FIG. Imaging is repeatedly performed while Then, in the same manner as in the operation example 1, the control calculation unit 51 of the control device 5 appropriately extracts the captured image to be used for the visual inspection of the work 6 from the plurality of captured images obtained, The quality of the external appearance of the work 6 is determined by comparing it with a comparative reference image, three-dimensional CAD model data, or the like.

According to such an operation of the inspection apparatus 100, as an example, the work 6 is held and rotated in various positions and/or orientations as if the work 6 were inverted, and along the predetermined path C20. Since images can be captured by the moving illumination-integrated sensor 10, it is possible to obtain captured images of a large number of workpieces 6 different from each other. In addition, as in this operation example 3, by turning over the work 6 in which many parts on the front side and the front side are imaged and similarly imaging, many parts on the back side and the back side of the work 6 are also picked up. Images can be taken in the same way. In this way, the entire workpiece 6 can be imaged by a simple operation of turning over the workpiece 6, so that the processing time (tact) can be shortened and the inspection work efficiency of the workpiece 6 can be improved.

(Operation example 4)
Furthermore, still another example of the operation of the inspection apparatus according to the present disclosure will be described with reference to FIG. FIG. 5 is a perspective view (partial front view) schematically showing still another example of a state in which another inspection device (inspection device 200) according to an embodiment of the present disclosure is operated.

In this operation example 4, the inspection apparatus 200 is an inspection system provided with a plurality of robots 3 (a plurality of units: here, for example, two units) to which the illumination-integrated sensor 10 is attached. This operation example 4 is the operation shown in FIG. This is an example in which the same processing as in example 1 and operation example 2 or operation example 3 shown in FIG. 4 is performed. That is, as shown in FIG. 5, the robot 3 and the lighting-integrated sensor 10 (hereinafter referred to as "inspection unit") installed on the back side of the figure execute the operation example 1, and at the same time, the inspection unit installed on the front side of the figure Operation example 2 or operation example 3 is executed by the unit. By doing so, it is possible to operate a plurality of inspection apparatuses 100 at the same time, so that the inspection work efficiency (throughput) of the work 6 can be significantly improved.

(Embodiment 2)
Next, in this embodiment, in the production process of various products, the above-described inspection devices 100 and 200 or the inspection method using the ), or an example of a method of manufacturing a product, including the step of performing a visual inspection of the finished product. As described above, the control calculation unit 51 of the control device 5 in the inspection apparatuses 100 and 200 according to the first embodiment receives the captured image used in the visual inspection of the workpiece 6, the comparative reference image for the visual inspection of the workpiece 6, and the three-dimensional CAD The external appearance of the workpiece 6 is judged to be good or bad by comparing it with the model data and the like. Work 6 judged to be "good" is transferred to the next production process as an acceptable product, and work 6 judged to be "failed" is repaired as an unacceptable product, and then the appearance inspection is performed again. Alternatively, for example, depending on the degree of defect, disposal processing is performed.

(Embodiment 3)
In addition, the present embodiment is an example of a bearing manufacturing method that performs the same processing as in the above-described Embodiment 2, except that various bearings are manufactured as an example of a product. It is also an example of a method of manufacturing, for example, a vehicle having the bearing shown in FIG. 6 or a machine having the motor shown in FIG.

Here, FIG. 6 is a perspective view (partial cross-sectional view) schematically showing the structure of a portion of a vehicle 600 including the hub unit bearing 60 whose appearance has been inspected by the inspection apparatuses 100 and 200 according to the present disclosure. . The hub unit bearing 60 may be applied to either the drive wheel or the driven wheel, and FIG. 6 shows the hub unit bearing 60 for the drive wheel. This drive wheel hub unit bearing 60 has an outer ring 62 , a hub 63 and a plurality of rolling elements 64 . The outer ring 62 is fixed to a suspension knuckle 61 using bolts or the like. The wheel 65 is fixed to a rotating flange provided on the hub 63 using bolts or the like. Further, vehicle 600 can have a support structure similar to hub unit bearing 60 for driving wheels described above with respect to hub unit bearing 60 for driven wheels. The hub unit bearing 60 used in such a vehicle 600 also undergoes an appearance inspection using the inspection apparatuses 100 and 200 according to the first embodiment in its production process to determine whether it is good or bad.

FIG. 7 is a cross-sectional view showing a schematic structure of a motor 71 having bearings 70A and 70B that have been visually inspected by inspection apparatuses 100 and 200 according to the present disclosure. These bearings 70A and 70B support the rotating shaft 73 of the motor 71. As shown in FIG. More specifically, the motor 71 is a brushless motor and has a cylindrical center housing 75 and a substantially disk-shaped front housing 77 closing one open end of the center housing 75 . Inside the center housing 75, a rotatable rotary shaft 73 is supported along its axis via bearings 70A and 70B arranged at the bottom of the front housing 77 and the center housing 75. As shown in FIG. A motor-driving rotor 79 is provided around the rotating shaft 73 , and a stator 78 is fixed to the inner peripheral surface of the center housing 75 . A motor 71 having such a configuration is generally mounted on a machine or vehicle, and rotates a rotating shaft 73 supported by bearings 70A and 70B. The bearings 70A and 70B used in such a motor 71 are also subjected to an appearance inspection using the inspection apparatuses 100 and 200 according to the first embodiment in the production process to determine whether the bearings are good or bad.

The above examples have been described in detail above as examples of the present disclosure. It goes without saying that improvements and modifications can be made. In addition, each of the above examples may be partially replaced, may be configured in combination as appropriate, and may be appropriately modified as described in each example.

For example, in the inspection apparatus 200, a single control device 5 may be provided for a plurality of units of the robot 3 and the lighting-integrated sensor 10, or a control device 5 may be installed for each unit. , and a plurality of these control devices 5 may be connected to each other. Furthermore, in the inspection apparatus 200, the servo device 4, the workpiece 6, and the support table 7 are transferred between the plurality of inspection units by suitable transfer means (transfer table, transfer rail, transfer or transfer robot, conveyor, etc.). It is also possible to perform imaging of the workpiece 6 . At this time, the position and orientation of the workpiece 6 may be appropriately changed during or after the transfer to the next inspection unit. As a result, the inspection work efficiency (throughput) of the work 6 can be further improved.

Examples of application of the bearing are not limited to those described above, machines having rotating parts, various manufacturing equipment, for example, screw devices such as ball screw devices, and actuators (a combination of a linear guide bearing and a ball screw, XY table, etc.), or a steering column, universal joint, intermediate gear, rack and pinion, electric power steering device, and worm reduction gear. Rotation support parts of vehicles such as motorcycles and railroads can be mentioned.

1... Sensor (imaging unit), 2... Illumination device (illumination unit), 1k, 2k... Cantilever, 2w... Visual field window, 3... Robot, 4... Servo device (target object driving unit), 5... Control device ( Control unit), 6 Work, 7 Support unit (object driving unit), 10 Illumination-integrated sensor (illumination-integrated imaging unit), 30 Base link, 31 to 36 Link, 41 Servo motor, 42 1st pulley 43 endless belt 44 second pulley 45 turntable 51 control calculation unit 52 communication interface (I/F) unit 53 storage unit 54 input unit 55 Output part 56 Bus line 60 Hub unit bearing 61 Knuckle 62 Outer ring 63 Hub 64 Rolling element 65 Wheel 70A, 70B Bearing 71 Motor 73 Rotating shaft 75 Center housing 77 Front housing 78 Stator 79 Rotor 100, 200 Inspection device 600 Vehicle A1 to A6 Axis C20 Predetermined path FV Viewing angle J1 to J6 Joints, K1, K2...Rotating shafts.

Claims (14)

An inspection device for imaging an object and inspecting the object,
an illumination-integrated imaging unit integrally provided with an illumination unit for projecting predetermined illumination light onto the object and an imaging unit for imaging the object;
a robot to which the lighting-integrated imaging unit is attached;
a control unit that controls the operation of the illumination-integrated imaging unit and the robot, and determines the quality of the object based on the captured image of the object acquired by the imaging unit;
with
The control unit sends to the robot a movement control command for moving the imaging unit integrated with illumination along a predetermined path, and the imaging unit integrated with illumination moves relative to the imaging unit integrated with illumination. while transmitting an imaging control command for imaging the object at predetermined time intervals;
inspection equipment. The illumination unit includes multi-channel illumination having multiple light sources and creating multiple illumination emission patterns by combining basic and variable intensities of illumination light from each light source.
The inspection device according to claim 1. The control unit sends the movement control command and the imaging control command so that the imaging part of the object is the same or substantially the same for each imaging by the imaging unit, and the illumination-integrated imaging unit to synchronize the movement of the
The inspection device according to claim 1 or 2. The control unit moves the lighting-integrated imaging unit in consideration of a response delay time of the lighting-integrated imaging unit to the movement control command and a response delay time of the lighting-integrated imaging unit to the imaging control command. to synchronize imaging with
The inspection device according to claim 3. further comprising an object driving unit having a rotating mechanism for rotating the held object;
The control unit sends a drive control command to the object driving unit to rotate the object, and instructs the illumination-integrated imaging unit to take a predetermined image of the rotating object. sending imaging control commands at time intervals;
The inspection device according to any one of claims 1 to 4. The control unit sends the drive control command and the imaging control command so that the imaging part of the object is the same or substantially the same each time the imaging unit takes an image, and rotates the object. to synchronize imaging with
The inspection device according to claim 5. The control unit controls the rotation and imaging of the object in consideration of the response delay time of the object driving unit with respect to the drive control command and the response delay time of the illumination-integrated imaging unit with respect to the imaging control command. synchronize,
The inspection device according to claim 5 or 6. The object driving unit includes a mechanism for inverting the object,
The inspection device according to any one of claims 5 to 7. A plurality of robots to which the illumination-integrated imaging unit is attached,
Each robot and each illumination-integrated imaging unit images each object held in a different position and/or orientation,
The inspection device according to any one of claims 1 to 8. A method of inspecting an object by means of an inspection apparatus comprising an illumination-integrated imaging unit in which an illumination unit and an imaging unit are integrally provided, a robot to which the illumination-integrated imaging unit is attached, and a control unit. ,
The control unit controls operations of the illumination-integrated imaging unit and the robot, sends a movement control command to the robot to move the illumination-integrated imaging unit along a predetermined path, and controls the illumination-integrated imaging unit. to the unit, an imaging control command for performing imaging of the object at predetermined time intervals while the illumination-integrated imaging unit moves,
The illumination unit projects predetermined illumination light onto the object,
The imaging unit images the object,
The control unit determines the quality of the object based on the captured image of the object acquired by the imaging unit,
Inspection methods. In the production process of a product, the inspection apparatus according to any one of claims 1 to 9 or the inspection method according to claim 10 is used to inspect the appearance of the part of the product, the semi-finished product, or the finished product as the object. A method of manufacturing a product, comprising the step of performing Appearance inspection of bearing parts, semi-finished products, or finished products as the target object by the inspection apparatus according to any one of claims 1 to 9 or the inspection method according to claim 10 in a bearing production process. A method of manufacturing a bearing, comprising: A vehicle manufacturing method using the bearing manufacturing method according to claim 12 . A method of manufacturing a machine using the method of manufacturing a bearing according to claim 12 .

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