JP2022146230A - Vibration actuator, pan head, and electronic device - Google Patents

Abstract

To provide a vibration actuator that achieves a silent, uniform, and smooth rotary motion without incurring a large cost.SOLUTION: A vibration actuator includes a vibrating body having an annular elastic body and an electro-mechanical energy conversion element, and an annular contact body that contacts the vibrating body, the contact body includes a first friction portion in contact with the vibrating body, and a first non-contact portion adjacent to the first friction portion and not in contact with the vibrating body, the elastic body includes a second friction portion in contact with the first friction portion, and a second non-contact portion adjacent to the second friction portion and not in contact with the contact body, and the first friction portion has a lower hardness than the second friction portion, and the first non-contact portion has a smaller root mean square roughness than the second non-contact portion.SELECTED DRAWING: Figure 3

Description

TECHNICAL FIELD The present invention relates to a vibration actuator including a vibrating body and a contact body.

Vibration-type actuators have been put to practical use, for example, as autofocus drive motors in the shooting lenses of single-lens reflex cameras, due to their low speed and high torque. there is For example, vibration actuators are expected to be applied to the joint drive of a robot arm, the rotation drive of a robot hand, the rotation drive of a camera platform of an imaging device such as a surveillance camera, and the rotation drive of a photosensitive drum of an image forming device.

For applications to such other uses, there have been proposed techniques for improving the productivity and reducing the cost of vibration-type actuators. there is (See Patent Document 1). In this method, the frictional sliding member is manufactured separately from the main body of the vibrating body, and then the two are bonded together. Similarly, a technology has also been proposed in which the frictional sliding member provided in the moving body (contacting body) is composed of a separate member.

The technique described in Patent Document 1 proposes smoothing the frictional sliding portion by processing in a post-process such as lapping after joining separate members for both the vibrating body and the contacting body. Vibration-type actuators are required to achieve a lower sound pressure level standard for quietness, which is required in recent years. This is because the

However, laps and the like for smoothing the frictional sliding portion take a long processing time and cause an increase in cost.

Japanese Patent No. 3450524

SUMMARY OF THE INVENTION Accordingly, the present invention provides a vibrating actuator that achieves a smooth rotational operation with low noise and little unevenness without incurring a large cost.

A vibrating body having an annular elastic body and an electro-mechanical energy conversion element; and an annular contact body in contact with the vibrating body, the contact body comprising a first friction portion in contact with the vibrating body, and the first friction portion. and a first non-contact portion that is adjacent to and not in contact with the vibrating body, and the elastic body includes a second friction portion that is in contact with the first friction portion and the contact body that is adjacent to the second friction portion. It has a second non-contact portion that is not in contact, wherein the first friction portion has a lower hardness than the second friction portion, and the first non-contact portion has a higher root mean square roughness than the second non-contact portion. To provide a vibration type actuator with a small

According to the above invention, it is possible to provide a vibrating actuator that suppresses the generation of abnormal noise and achieves smooth rotation at low cost.

1 is a cross-sectional view schematically showing the configuration of a vibration actuator according to a first embodiment of the present invention; FIG. FIG. 2 is a diagram for explaining a deformation mode of drive vibration excited by the vibrator in FIG. 1; 2A and 2B are a schematic diagram and a detailed diagram illustrating the configuration of a contact member and a vibrating member in FIG. 1; FIG. FIG. 2 is a diagram schematically showing a worn state of a friction member and an elastic body in FIG. 1; It is a figure which shows roughly the structure of the 1st modification of the contact body in FIG. It is a figure which shows roughly the structure of the 2nd modification of the contact body in FIG. It is a figure which shows roughly the structure of the 3rd modification of the contact body in FIG. It is a figure which shows roughly the structure of the 4th modification of the contact body in FIG. It is a figure which shows roughly the structure of the 5th modification of the contact body in FIG. It is a figure which shows roughly the structure of the 6th modification of the contact body in FIG. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram schematically showing the configuration of a pan head equipped with a vibration type actuator according to an embodiment of the present invention and an imaging device mounted on the pan head;

[Example 1]
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

<First Embodiment>
FIG. 1 is a cross-sectional view schematically showing the configuration of a vibration actuator 10 according to a first embodiment of the invention. The mechanical configuration of the vibrating body 20, the contact body 300 (moving body, driven body), the pressure mechanism 40, etc. in the vibration type actuator 10 is functionally similar to that of the vibration type actuator described in, for example, JP-A-2017-108615. are equivalent.

The vibration-type actuator of this embodiment includes a vibrating body having an elastic body and an electro-mechanical energy conversion element, and a contact body in contact with the vibrating body. In addition, a power supply member (flexible printed circuit board) for supplying power to the electro-mechanical energy conversion element is provided.

In FIG. 1 , the vibration actuator 10 includes an annular vibrating body 20 , an annular contact body 300 , and a pressure mechanism 40 . Also, the vibration type actuator 10 includes a shaft, a housing, and bearings.

The vibrating body 20 includes an elastic body 21, a piezoelectric element 22 that is an electro-mechanical energy conversion element joined to the elastic body 21, and a driving voltage that is an AC voltage is applied to the piezoelectric element 22 by joining to the piezoelectric element 22. It has a power supply member 100 for.

The pressure mechanism 40 has damping rubber 41 , pressure spring receiving member 42 , pressure spring receiving rubber 43 , pressure spring 44 and pressure spring fixing member 45 . The vibrating body 20 and the contact body 300 are arranged concentrically with the shaft as the center axis, and pressurized contact (frictional contact) with each other in the thrust direction of the shaft by the pressure mechanism 40 fixed to the shaft. Specifically, the pressure spring 44 whose movement is restricted by the pressure spring fixing member 45 fixed to the shaft comes into contact with the damping rubber 41 , the pressure spring bearing member 42 and the pressure spring bearing rubber 43 . The body 300 is pressed in the thrust direction. With this configuration, the contact body 300 and the vibrating body 20 are stably brought into contact with each other.

In the vibration-type actuator 10 , a drive voltage, which is an AC voltage, is applied to the piezoelectric element 22 through the power supply member 100 to excite drive vibration in the vibrator 20 . The mode of the drive vibration depends on the number and arrangement of the plurality of electrodes of the piezoelectric element 22, but the excited drive vibration progresses in the circumferential direction of the vibrating body 10 in the order of n (n=9 in this embodiment). The piezoelectric element 22 is designed to be a wave. Note that the nth-order drive vibration is bending vibration in which the number of waves in the circumferential direction of the vibrating body 20 is n. The driving vibration generated in the piezoelectric element 22 drives the contact body 300 in the circumferential direction around the shaft by the traveling wave generated at the contact portion 25 of the vibrating body 20 . That is, the contact member 300 rotates relative to the vibrating member 20 while maintaining its concentricity. The rotational force generated in the contact body 300 is output to the outside through the pressure mechanism 40 and the shaft.

The vibration type actuator 10 of the present embodiment illustrated in FIG. 1 has a housing fixed to a desired member, for example, and a movable object such as a camera is fixed to a flange surface that widens toward the bottom of the shaft. , the movable object can be freely rotated. On the other hand, it is also possible to drive the housing in rotation by fixing the shaft.

2A and 2B are diagrams for explaining a deformation mode of driving vibration excited in the vibrating body 20. FIG. In addition, in FIG. 2, the displacement is exaggerated more than the actual displacement in order to facilitate the understanding of the displacement of the drive vibration excited in the vibrating body 20. As shown in FIG.

FIG. 3(a) is a cross-sectional view schematically showing the configuration of the contact member 300 and the configuration of the vibrating body 20 having a shape different from the above vibrating body. The vibrating body 20 of this embodiment has a trapezoidal cross section. A certain elastic body 21 is provided. A piezoelectric element 22 that is an electro-mechanical energy conversion element is joined to the elastic body 21 . Note that other members such as a power supply member for applying a drive voltage to the piezoelectric element 22 are not shown because they are the same as those of the aforementioned vibration actuator. The contact body 300 has a body member 301 and a friction member 302 which is a member different from the body member 301 . The body member 301 and the friction member 302 are connected by adhesion or bonding.

The body member 301 has a base portion 301 a and a support portion 301 b extending in the radial direction of the contact body 300 . The support portion 301b has an L-shaped cross section, and a friction member 302 is connected to the end portion thereof. The body member 301 is configured in an annular shape.

FIG. 3B is a detailed cross-sectional view of the contact body 300 and the frictional contact portion where the elastic body 21 contacts. The friction member 302 has a first contact portion 302 a that contacts the elastic body 21 and a first non-contact portion 302 b that is adjacent to the first friction portion 302 a and does not contact the elastic body 21 . The elastic body 21 has a second friction portion 21 a that is in contact with the first friction portion 302 a and a second non-contact portion 21 b that is adjacent to the second friction portion 21 a and is not in contact with the friction member 302 . That is, the first friction portion is held by the support portion, and both radial end portions of the annular contact body of the first friction portion have portions that do not come into contact with either the contact body or the vibrating body. It is

The friction member 302 has a lower hardness than the elastic body 21, and the second friction part 20b has a smaller root mean square roughness than the second friction part 21b of the elastic body. To put it simply, the friction member 302 has a soft and smooth surface texture with respect to the elastic body 21 , and the elastic body 21 has a hard and rough surface texture with respect to the friction member 302 .

The friction member 302 has a convex cross-sectional shape with a curvature with respect to the elastic body 21, and is configured in an annular shape. In this embodiment, the magnitude of the curvature is R0.6, which is the same throughout the convex shape, but it may be a variable curvature that varies depending on the position, and the curvature can be selected according to the environment and product life. Also good. The convex tip of the friction member 302 in the initial state, which is not worn, comes into point contact with the rough surface of the elastic body 21 . The rougher surfaces of the are also worn away, forming flat sections together. Further, since the friction member 302 is formed in an annular shape, it is in line contact on the periphery in the initial state, and becomes plane contact as the wear progresses.

4A and 4B are cross-sectional views schematically showing the state of frictional contact between the friction member 302 and the elastic body 21. FIG. 4A shows the initial state of the friction sliding portion without wear, and FIG. It shows a twisted friction slide. As shown in FIG. 4a, in the initial state, both the friction member 302 and the elastic body 21 are not worn, so the convex end of the friction member 302 and the protruding part of the rough surface of the elastic body 21 contact each other at points, resulting in high surface pressure. state. As shown in FIG. 4B, when the friction material 302 is operated multiple times, the convex tip of the friction material 302 is worn, and the hard and rough surface of the elastic body 21 is also worn to form a flat portion, resulting in a state in which the surface pressure is reduced. Become. The friction material 302 has a curvature in the radial direction and has a smooth surface even when wear progresses gradually. It is possible to maintain the

In addition, when confirming the operation of the shipping inspection in the manufacturing process, the rotation speed and load that are larger than the rotation speed and load that are used in normal use are applied. As it wears, the hard rough surface of the elastic body 21 flattens accordingly. Therefore, even if the wear of the friction material 302 progresses, it contacts the flat portion of the elastic body 21 where the initial wear is finished, so smooth rotation and quietness can be maintained. If the elastic body 21 is softer than the friction member 302 and wears easily, the friction member 302 wears in a groove-like manner and the friction member 302 fits in the groove, which hinders smooth rotation. The friction member 302 in the present embodiment is formed by pressing a plate material of SUS420j2 into a desired shape, and then performing a quenching treatment. The Vickers hardness was about 580 Hv, and the root-mean-square roughness Rq of the first contact portion 302a and the first non-contact portion 302b before initial wear occurred was 0.213 μm. In addition, the elastic body 21 is made of a steel-based material that is subjected to nitriding treatment, and is not subjected to treatment such as lapping that leads to an increase in cost to improve the smooth surface properties. The surface layer hardness of the elastic body was about 1100 Hv in terms of Vickers hardness, and the root-mean-square roughness Rq of the second contact portion 21a and the second non-contact portion 21b before initial wear occurred was 0.461 μm. As a result of observing a plurality of motors, the hardness of the first contact portion 302a and the first non-contact portion before initial wear and the second contact portion and the second non-contact portion before initial wear are 4<=5. , the root-mean-square roughness has a good relationship of 2<=2.5. Nitriding includes salt bath nitriding, gas nitriding, and ion nitriding, and any of them may be used. In the nitriding treatment, nitrogen penetrates and diffuses into the surface layer of the part to harden it, so a difference in hardness occurs between the surface layer and the base material. Therefore, it is preferable that the friction member 302 has a low hardness and is relatively easy to wear because the wear progresses at an accelerated rate when the wear exceeds the hardened layer.

As for the friction portion, the first friction portion may be configured to fit inside and/or outside the support portion in the radial direction of the annular contact body. A ring-shaped wire rod may be used for the first friction portion.

The contact member 300 contacts the vibrating member 20 at the friction surface 302a, and the support portion 301b functions as a contact spring. Variation in the spring rigidity of the contact spring causes abnormal noise (squeal) of the vibration actuator. Therefore, the support portion 301b, which is a contact spring, is preferably made of a material with a low Young's modulus, such as an aluminum alloy or brass, so that variations in spring rigidity do not occur even if there is a manufacturing error. On the other hand, since the friction member 302 is in frictional contact with the vibrating body 20, it is preferably made of a material such as steel having a lower hardness than the elastic body 21 but a high abrasion resistance. In general, materials with high wear resistance such as steel are harder and have a higher Young's modulus than materials such as aluminum alloys and brass. That is, the Young's modulus of the material forming the support portion 301 b is preferably lower than that of the material forming the friction member 302 .

Also, the base portion 301a is in contact with the damping rubber 41, and suppresses abnormal noise of the vibration actuator by a damping effect.

Materials and processing methods for the main body member 301 and the friction member 302 will be described. The friction member 302 is preferably made of a highly wear-resistant material, and can be manufactured by press working and quenching using a plate material of a steel material such as stainless steel. On the other hand, since the main body member 301 is required to have a vibration damping function, it is made of a material with high damping properties, and is preferably made of a free-cutting material that can be machined with high accuracy. It can be manufactured by cutting using brass or the like. The main body member 301 may be surface-treated, for example, if it is an aluminum alloy, it may be anodized. The method of manufacturing the friction member 302 and the main body member 301 is not limited to the above methods. As a processing method for the friction member 302, laser processing, electric discharge processing, cutting, etching, etc., or a combination thereof can be considered. Further, the heat treatment of the friction member 302 may be nitriding, carburizing, or the like, and hardening treatment such as plating may be used in addition to the heat treatment. As a method for processing the main body member 301, die casting, forging, etc., or a method combining them can be considered.

Assembly of the body member 301 and the friction member 302 will be described. Since the main body member 301 has high rigidity, it can be manufactured with higher accuracy than the friction member 302 . In particular, pan heads and robot hands, which require high positioning accuracy, require high flatness of the contact surface between the contact body and the vibrating body in order to perform smooth operations. Since the main body member 301 has high rigidity, the surface 301c on the side that contacts the vibrating body 20 can obtain high flatness.

On the other hand, the friction member 302 is greatly distorted during manufacturing processes such as press working and quenching. However, since the friction member 302 has low rigidity as a part, it can be easily elastically deformed. Therefore, the friction surface 302a becomes highly flat while elastically deforming the friction member 302 with the high-precision main body member 301 as a reference.

In this embodiment, the friction member 302 is subjected to chemical polishing treatment after quenching treatment, and smoothing treatment such as lapping is not performed. The manufacturing method of the friction member 302 is mentioned above, but in order to remove cutting marks and burrs generated during pressing, a smoothing process such as lapping is performed to obtain smooth rotation and quietness. It takes time, which leads to increased costs. Chemical polishing can remove cut marks, burrs, etc. in a short period of time, and by obtaining smooth surface properties, it is possible to obtain smooth rotation and quietness. Electrolytic polishing may be used instead of chemical polishing. Chemical polishing and electropolishing may involve surface modification with a phosphoric acid-based or sulfuric acid-based solution. Buffing is another method for smoothing the surface properties other than these. Since it is polished with a cloth-like soft material, it is possible to obtain a smooth surface even on parts with curvature. Since the surface 301c on the side contacting the vibrating body 20 has a high degree of flatness, the friction member 302 that follows the surface can be made smooth while maintaining its curvature without performing processing such as lapping that takes a long time to process. Surface properties and high flatness can be obtained.

In order to avoid metal-to-metal friction, the body member 301 and the friction member 302 are preferably connected by adhesion or bonding. As a result, it is possible to suppress abnormal noise (squeal) in the vibration type actuator.

FIG. 5 is a diagram showing an example of a modification of this embodiment. The contact body 310 has a body member 311 and a friction member 312 which is a separate member from the body member 311 . The body member 311 has a base portion 311a and a support portion 311b extending in the radial direction of the contact body 310 and having an L-shaped cross-sectional end portion, and is configured in an annular shape. The friction member 312 includes a first friction portion 312 a that contacts the elastic body 21 (not shown), a first non-contact portion 312 b adjacent to the first friction portion 312 a and not in contact with the elastic body 21 , and a center of the contact body 310 . It has a fitting portion 312c that extends in the direction along the axis and fits with the support portion 311b. The first friction portion and the first non-contact portion may be composed of one continuous member. Further, the first friction portion and the first non-contact portion may form curved surfaces along the radial direction of the annular contact body.

The friction member 312 may be greatly distorted during manufacturing processes such as press working and quenching. However, since the friction member 312 has low rigidity as a component, it can be easily elastically deformed. Therefore, with the support portion 311b of the main body member 311 having high precision as a reference, the fitting portion 312c is internally fitted while the friction member 312 is elastically deformed. As a result, it is possible to keep the friction surface 312a in a state of high flatness, suppress misalignment of the friction member 312, and improve the circularity of the friction surface 312a. A similar effect can be obtained with outer diameter fitting as shown in FIG.

FIG. 7 is a diagram showing an example of a modification of this embodiment. The contact body 320 has a main body member 321 and a friction member 322 which is a separate member from the main body member. The main body member 321 is provided with a groove 321c on the surface on the elastic body 21 (not shown) side, and holding portions 321d are provided on both sides of the groove 321c. The friction member 322 has a function of a contact spring because the friction member 322 is arranged on the holding portion 321d in the form of a beam supported on both sides. Since the friction member 322 has the function of a contact spring, the rigidity of the contact spring can be adjusted by changing the plate thickness of the friction member 322 and the groove 321c. The friction member 322 has a curved portion that has a first friction portion that contacts the second friction portion and a first non-contact portion, and has been given a smooth surface by chemical polishing or the like to achieve smooth rotation and quietness. It can be realized.

FIG. 8 is a diagram showing an example of a modification of this embodiment. The body member 331 has a base portion 331 a and a support portion 331 b extending in the radial direction of the contact body 330 . A V-shaped groove 331e is formed in the surface of the support portion 331b contacting the elastic body 21 (not shown), and the linear friction member 332 is fitted and joined to the V-shaped groove 331e. In this embodiment, the annular friction member 332 is used by welding both ends of a SUS420j2 wire, but the wire ends may be joined by adhesion, diffusion bonding, or the like. Alternatively, both ends of the wire may be fitted into the V groove 331c without joining. The grooves may be rectangular or U-shaped instead of V-shaped, but V-shaped is preferable because positioning is easy. Smooth rotation and quietness can be realized even if the side surface of the wire, which has been given a smooth surface by chemical polishing or the like, is used as a friction member. In FIG. 9, the tip of the support portion 331b has an L-shaped cross section, and a linear friction member 332 is fitted to the outer diameter side of the support portion 331b. Similar effects can be obtained with such a form.

FIG. 10 is a diagram showing an example of a modification of this embodiment. In this embodiment, the body member 341 and the friction member 342 are integrated. Therefore, the contact body 340 as a whole is made of quenched SUS420j2 with high wear resistance. Since it is manufactured by cutting, cutting marks remain on the first friction part, but by applying chemical polishing in a post-process, the surface texture becomes smooth and smooth rotation and quietness can be realized.

<Second embodiment>
In the second embodiment, the configuration of a pan head of an imaging device such as a monitoring camera will be described as an example of a device including the vibration actuator 10 described in the first embodiment.

In this embodiment, a rotary table and a camera platform including a vibration actuator provided on the rotary table will be described below.

FIG. 6 is a diagram schematically showing the configuration of a camera platform 800 and an imaging device 840 mounted on the camera platform 800. As shown in FIG. The platform 800 includes a base 820, a head 810 having two vibration actuators 870 and 880, and an L angle 830 for fixing an imaging device 840. FIG. A vibration actuator 880 provided on the pan axis is an actuator for rotating the head 810, the L angle 830, and the imaging device 840 with respect to the base 820 around the pan axis. A vibration type actuator 870 provided on the tilt axis is an actuator for rotating the L angle 830 and the imaging device 840 with respect to the head 810 around the tilt axis.

By using two vibration type actuators 870 and 880 in the pan head 800, it is possible to change the orientation of the imaging device 840 at high speed, high response, quietness, and high accuracy. In addition, since the vibration type actuator has high holding torque even when no power is supplied, the orientation of the imaging device 40 can be maintained without consuming the power of the vibration type actuator even if there is a shift in the center of gravity of the imaging device 840 around the tilt axis. can be done.

In addition, it is possible to provide an electronic device comprising a member desired by a user of the present invention and a vibration type actuator provided on the member.

REFERENCE SIGNS LIST 10 vibration type actuator 20 vibrating body 21 elastic body 21a second contact portion 21b second non-contact portion 22 piezoelectric element 100 power feeding member 300, 310, 320, 330, 340 contact body 301, 311, 321, 331, 341 body member 301a , 311a, 331a, 341a base portion 301b, 311b, 331b, 341b support portion 321c groove 321d holding portion 331e V-shaped groove 302, 312, 322, 332, 342 friction member 302a, 312a, 322a, 332a, 342a first contact Part 302b, 312b, 322b, 332b, 342b First non-contact part 312c Fitting part

Claims (17)

a vibrating body having an annular elastic body and an electro-mechanical energy conversion element;
comprising an annular contact body in contact with the vibrating body;
The contact member has a first friction portion in contact with the vibrating body and a first non-contact portion adjacent to the first friction portion and not in contact with the vibrating body,
The elastic body has a second friction portion in contact with the first friction portion and a second non-contact portion adjacent to the second friction portion and not in contact with the contact body,
The vibration type actuator, wherein the first friction portion has lower hardness than the second friction portion, and the first non-contact portion has a lower mean square roughness than the second non-contact portion. The contact member has a base portion and a supporting portion annularly extending along the radial direction of the annular contact member connecting the base portion and the first friction portion,
2. The vibration type actuator according to claim 1, wherein said first friction portion is provided at an end portion of said support portion. 3. The vibration type actuator according to claim 1, wherein the first friction portion is a separate member from the base portion and the support portion. The vibration type actuator according to any one of claims 1 to 3, wherein the first friction portion and the first non-contact portion are one continuous member. 5. The vibration type actuator according to claim 4, wherein said first friction portion and said first non-contact portion have curvature in a radial direction of said annular contact body. 6. The vibration type actuator according to claim 5, wherein the first friction portion and the first non-contact portion form curved surfaces along the radial direction of the annular contact body. The annular elastic body includes a surface layer including the second friction portion and a base material adjacent to the surface layer,
7. The vibration type actuator according to claim 1, wherein hardness of said surface layer is higher than hardness of said base material. The first friction portion is held by the support portion, and both end portions of the first friction portion with respect to the radial direction of the annular contact body are:
4. The vibration type actuator according to claim 3, having a portion that contacts neither the contact member nor the vibrating member. The first friction portion is arranged in a radial direction of the annular contact body with respect to the support portion,
4. The vibratory actuator according to claim 3, which is internally fitted and/or externally fitted. 4. The vibration type actuator according to claim 3, wherein the first friction portion has a curved portion that contacts the second friction portion. The vibration type actuator according to any one of claims 1 to 7, wherein the contact member has a groove having a V-shaped cross section in the radial direction, and the first friction portion is accommodated in the groove. 4. The vibration type actuator according to claim 3, wherein the first friction portion is an annular wire rod. 5. The vibration type actuator according to claim 4, wherein the first friction portion is integrated with the base portion of the contact body. a step of obtaining a vibrating body using an annular elastic body and an electro-mechanical energy conversion element;
chemically polishing, electrolytically polishing or buffing the annular member to obtain an annular contact body;
14. A method of manufacturing a vibration type actuator, comprising the step of obtaining the vibration type actuator according to any one of claims 1 to 13 using the vibration body and the contact body. 15. The method of manufacturing a vibration type actuator according to claim 14, wherein the chemical polishing and the electrolytic polishing are performed by surface modification with a phosphoric acid-based or sulfuric acid-based solution. A pan head comprising a turntable and the vibration type actuator according to any one of claims 1 to 13 provided on the turntable. An electronic device comprising: a member; and the vibration type actuator according to any one of claims 1 to 13 provided on the member.

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