JP2022127120A - Pressure generating device - Google Patents

Pressure generating device Download PDF

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JP2022127120A
JP2022127120A JP2021025076A JP2021025076A JP2022127120A JP 2022127120 A JP2022127120 A JP 2022127120A JP 2021025076 A JP2021025076 A JP 2021025076A JP 2021025076 A JP2021025076 A JP 2021025076A JP 2022127120 A JP2022127120 A JP 2022127120A
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pressure
control valve
gas
primary
flow rate
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JP7483265B2 (en
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勝久 本島
Katsuhisa Motojima
良介 古瀬
Ryosuke Furuse
宏 西村
Hiroshi Nishimura
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Cosmo Instruments Co Ltd
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Abstract

To provide a pressure generating device in which a differential pressure between a pressure of gas to be supplied and a reference pressure is easily kept constant.SOLUTION: A pressure generating device according to the present invention comprises a flow rate control valve, a primary pressure setting part, a flow straightener, a laminar flow pipe, a pressure gauge, and a port. The flow rate control valve keeps a flow rate of gas constant. The primary pressure setting part sets a pressure of the gas on a primary side of the flow rate control valve to a predetermined primary pressure. The flow straightener is connected to a secondary side of the flow rate control valve. The laminar flow pipe discharges the gas outputted from the flow straightener, to a space at a reference pressure. The pressure gauge measures a pressure in a connection portion between the flow straightener and the laminar flow pipe. The port is formed in the connection portion between the flow straightener and the laminar flow pipe, and connected to an external gas circuit.SELECTED DRAWING: Figure 1

Description

本発明は、所定の圧力を発生させるための圧力発生装置に関する。 The present invention relates to a pressure generator for generating a predetermined pressure.

例えば、大気圧に対して少し高い圧力である微圧を発生するときには、図２に示した装置が利用されている。図２は、従来の圧力発生装置の構成例である。圧力発生装置９００は、手動で容積が変更できるタンク３００とガス回路３１で接続された圧力計１４０とポート１５０を備える。ポート１５０には、検査対象物を含む外部のガス回路が接続される。検査対象物の検査には差圧センサが用いられることが一般的であり、外部のガス回路は閉じた空間を形成している。圧力発生装置９００は、圧力計１４０を確認しながら、タンク３００の容積を微妙に変更することで、外部のガス回路の圧力を大気圧よりも所定の圧力だけ高い状態に維持する。なお、図２の例の他にも、いろいろな目的でガスの圧力を制御する技術が存在し、例えば、特許文献１，２なども知られている。 For example, the device shown in FIG. 2 is used when generating a slight pressure that is slightly higher than the atmospheric pressure. FIG. 2 is a configuration example of a conventional pressure generator. The pressure generator 900 includes a pressure gauge 140 and a port 150 which are connected to a tank 300 whose volume can be manually changed via a gas circuit 31 . The port 150 is connected to an external gas circuit containing the test object. A differential pressure sensor is generally used for inspection of an object to be inspected, and an external gas circuit forms a closed space. The pressure generator 900 subtly changes the volume of the tank 300 while checking the pressure gauge 140, thereby maintaining the pressure of the external gas circuit at a predetermined pressure higher than the atmospheric pressure. In addition to the example shown in FIG. 2, there are techniques for controlling gas pressure for various purposes, such as those disclosed in Patent Documents 1 and 2, for example.

特開昭６０－９８２７４号公報JP-A-60-98274 特開２００４－１３８１０４号公報JP 2004-138104 A

図２に示した従来技術は、閉じた空間内の気圧を一定に保つ技術であるが、気温が変化すると気圧も変化してしまうため、気圧の制御が難しいという問題がある。さらに、外部のガス回路が差圧センサを備え、ポート１５０から供給するガスの圧力と大気圧との差圧を検出している場合、大気圧の変動に伴ってポート１５０から供給するガスの圧力も調整する必要があるが、この調整も難しかった。特に、供給するガスの圧力が微圧の場合は、調整が困難である。 The prior art shown in FIG. 2 is a technique for keeping the air pressure in a closed space constant. Furthermore, if the external gas circuit is equipped with a differential pressure sensor and detects the differential pressure between the pressure of the gas supplied from the port 150 and the atmospheric pressure, the pressure of the gas supplied from the port 150 will change as the atmospheric pressure fluctuates. This adjustment was also difficult. In particular, when the pressure of the gas to be supplied is very low, adjustment is difficult.

本発明は、供給するガスの圧力と基準となる圧力との差圧を一定に保ちやすい圧力発生装置を提供することを目的とする。 SUMMARY OF THE INVENTION An object of the present invention is to provide a pressure generator capable of easily maintaining a constant differential pressure between the pressure of a supplied gas and the reference pressure.

本発明の圧力発生装置は、流量制御弁、一次圧設定部、整流器、層流管、圧力計、ポートを備える。流量制御弁は、ガスの流量を一定に保つ。一次圧設定部は、流量制御弁の一次側のガスの圧力をあらかじめ定めた一次圧に設定する。整流器は、流量制御弁の二次側に接続される。層流管は、整流器から出力されるガスを、基準となる圧力の空間に排出する。圧力計は、整流器と層流管との接続部分の圧力を計測する。ポートは、整流器と層流管との接続部分に形成され、外部のガス回路に接続される。 A pressure generator according to the present invention includes a flow control valve, a primary pressure setting section, a rectifier, a laminar flow tube, a pressure gauge, and a port. A flow control valve keeps the gas flow constant. The primary pressure setting unit sets the pressure of the gas on the primary side of the flow control valve to a predetermined primary pressure. A rectifier is connected to the secondary side of the flow control valve. The laminar flow tube discharges the gas output from the rectifier into a reference pressure space. A pressure gauge measures the pressure at the connection between the rectifier and the laminar flow tube. A port is formed at the connection between the rectifier and the laminar flow tube and is connected to an external gas circuit.

本発明の圧力発生装置は、流体抵抗が一定の層流管に一定の流量のガスを流す構造である。したがって、気温の変化、基準となる圧力の変化（大気圧の変化）の影響を受けることなく、供給するガスの圧力を一定に保てる。 The pressure generator of the present invention has a structure in which a constant flow rate of gas is passed through a laminar flow tube with constant fluid resistance. Therefore, the pressure of the supplied gas can be kept constant without being affected by changes in temperature and changes in reference pressure (changes in atmospheric pressure).

本発明の圧力発生装置の構成例を示す図。The figure which shows the structural example of the pressure generator of this invention. 従来の圧力発生装置の構成例を示す図。The figure which shows the structural example of the conventional pressure generator.

以下、本発明の実施の形態について、詳細に説明する。なお、同じ機能を有する構成部には同じ番号を付し、重複説明を省略する。 BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail. Components having the same function are given the same number, and redundant description is omitted.

図１に本発明の圧力発生装置の構成例を示す。圧力発生装置１００は、流量制御弁１１０、一次圧設定部２００、整流器１２０、層流管１３０、圧力計１４０、ポート１５０を備える。ガス回路２２は一次圧設定部２００と流量制御弁１１０とを接続する。ガス回路２３は流量制御弁１１０と整流器１２０を接続する。ガス回路２４は、整流器１２０、層流管１３０、圧力計１４０、ポート１５０を接続する。 FIG. 1 shows a configuration example of the pressure generator of the present invention. The pressure generator 100 includes a flow control valve 110 , a primary pressure setting section 200 , a rectifier 120 , a laminar flow tube 130 , a pressure gauge 140 and a port 150 . The gas circuit 22 connects the primary pressure setting section 200 and the flow control valve 110 . Gas circuit 23 connects flow control valve 110 and rectifier 120 . Gas circuit 24 connects rectifier 120 , laminar flow tube 130 , pressure gauge 140 and port 150 .

流量制御弁１１０は、ガスの流量を一定に保つ。流量制御弁１１０には、例えばニードルバルブを用いればよい。ニードルバルブであれば、流量制御弁の一次圧と二次圧は、流量が一定となる条件を満たすように設定すればよい。このように設定すれば、ガスの流量を一定にできる。流量制御弁１１０に、サーボバルブを利用してもよい。サーボバルブを利用する場合は、サーボバルブのオリフィスプレートの穴をできるだけ細くする方が望ましい。なお、サーボバルブに関しては、実開昭６２－８１１０９の記載を参考にすればよい。 A flow control valve 110 keeps the gas flow constant. A needle valve, for example, may be used for the flow control valve 110 . In the case of a needle valve, the primary pressure and secondary pressure of the flow control valve may be set so as to keep the flow rate constant. With this setting, the gas flow rate can be kept constant. A servo valve may be used for the flow control valve 110 . When using a servovalve, it is desirable to make the hole in the orifice plate of the servovalve as thin as possible. As for the servo valve, the description of Japanese Utility Model Application Laid-Open No. 62-81109 can be referred to.

一次圧設定部２００は、流量制御弁１１０の一次側のガスの圧力をあらかじめ定めた一次圧に設定する。一次圧設定部２００は、例えば、図１に示すように一次圧よりも高い圧力のガスを供給するガス供給源２１０、ガス圧を調整する調整弁２２０、一次圧を計測する圧力計２３０を備えればよい。ガス回路２１は、ガス供給源２１０と調整弁２２０を接続する。ガス回路２２は、調整弁２２０と圧力計２３０に接続されると共に、流量制御弁１１０に接続される。ただし、一次圧設定部２００は、その他の構成でも構わない。 The primary pressure setting unit 200 sets the pressure of the gas on the primary side of the flow control valve 110 to a predetermined primary pressure. The primary pressure setting unit 200 includes, for example, a gas supply source 210 that supplies gas having a pressure higher than the primary pressure, a regulating valve 220 that adjusts the gas pressure, and a pressure gauge 230 that measures the primary pressure, as shown in FIG. All you have to do is The gas circuit 21 connects the gas supply source 210 and the regulating valve 220 . The gas circuit 22 is connected to the regulating valve 220 and the pressure gauge 230 as well as to the flow control valve 110 . However, the primary pressure setting unit 200 may have other configurations.

整流器１２０は、流量制御弁１１０の二次側に接続される。整流器１２０は、流量制御弁１１０から出力されるガスの流れを整流する役割を果たす。 A rectifier 120 is connected to the secondary side of the flow control valve 110 . The rectifier 120 serves to rectify the gas flow output from the flow control valve 110 .

層流管１３０は、整流器１２０から出力されるガスを、基準となる圧力の空間に排出する。基準となる圧力としては、大気圧を想定している。しかし、大気圧でなくても本発明の効果は得られる。層流管１３０は一定の流体抵抗を有するので、層流管１３０に一定の流量のガスを流すと、ガス回路２４内の圧力と基準となる圧力との差圧を、あらかじめ定めた圧力に維持できる。したがって、気温の変化、基準となる圧力の変化（大気圧の変化）の影響を受けることなく、供給するガスの差圧を一定に保てる。 The laminar flow tube 130 discharges the gas output from the rectifier 120 to a reference pressure space. Atmospheric pressure is assumed as the reference pressure. However, the effect of the present invention can be obtained even if the pressure is not atmospheric pressure. Since the laminar flow tube 130 has a constant fluid resistance, when a constant flow rate of gas flows through the laminar flow tube 130, the pressure difference between the pressure in the gas circuit 24 and the reference pressure is maintained at a predetermined pressure. can. Therefore, the differential pressure of the supplied gas can be kept constant without being affected by changes in temperature and changes in reference pressure (changes in atmospheric pressure).

圧力計１４０は、整流器１２０と層流管１３０との接続部分の圧力を計測する。ポート１５０は、整流器１２０と層流管１３０との接続部分に形成され、外部のガス回路に接続される。外部のガス回路は、正常なときは閉じた空間であり、基準となる圧力との差圧を検出する差圧センサを利用するガス回路にすればよい。「正常なとき」とは、例えば外部のガス回路で検査する対象物に亀裂などの穴がない状態を意味している。 Pressure gauge 140 measures the pressure at the connection between rectifier 120 and laminar flow tube 130 . A port 150 is formed at the connecting portion between the rectifier 120 and the laminar flow tube 130 and is connected to an external gas circuit. The external gas circuit is normally a closed space, and may be a gas circuit that utilizes a differential pressure sensor that detects a pressure difference from a reference pressure. "Normal" means, for example, a state in which there are no holes such as cracks in the object to be inspected in the external gas circuit.

閉じた空間の場合は、気温が変化するとボイルシャルルの法則により、気圧が変化してしまう。しかし、圧力発生装置１００によれば、層流管１３０を介して基準となる圧力の空間（例えば、大気）とつながっている。そして、層流管１３０には一定の流量のガスが流れるので、気温に関わらず、層流管１３０の整流器１２０側と基準となる圧力の空間側との差圧を一定にできる。したがって、気温の変化、基準となる圧力の変化（大気圧の変化）の影響を受けることなく、供給するガスの圧力を基準となる圧力に対して一定に保てる。 In the case of a closed space, when the temperature changes, the air pressure changes according to Boyle-Charles' law. However, according to the pressure generator 100 , it is connected to a reference pressure space (for example, the atmosphere) via the laminar flow tube 130 . Since a constant flow rate of gas flows through the laminar flow tube 130, the differential pressure between the rectifier 120 side of the laminar flow tube 130 and the reference pressure space side can be made constant regardless of the temperature. Therefore, the pressure of the gas to be supplied can be kept constant with respect to the reference pressure without being affected by temperature changes and reference pressure changes (atmospheric pressure changes).

実際に圧力発生装置１００を構成して実験した。実験では、一次圧を大気圧に対して約１００ｋＰａ高い圧力とし、ポート１５０の圧力（流量制御弁１１０にニードルバルブを用いて層流管１３０の整流器１２０側の圧力）が大気圧よりも５００Ｐａ高い状態とした。約３分の計測時間では、ポート１５０の大気圧との差圧の変化の最大値を０．５Ｐａ未満に抑えることができた。 The pressure generator 100 was actually constructed and tested. In the experiment, the primary pressure was about 100 kPa higher than the atmospheric pressure, and the pressure at the port 150 (pressure on the rectifier 120 side of the laminar flow tube 130 using a needle valve for the flow control valve 110) was 500 Pa higher than the atmospheric pressure. state. In the measurement time of about 3 minutes, the maximum value of the change in the pressure difference from the atmospheric pressure at the port 150 could be suppressed to less than 0.5 Pa.

２１、２２、２３、２４、３１ ガス回路
１００、９００ 圧力発生装置
１１０ 流量制御弁 １２０ 整流器
１３０ 層流管 １４０、２３０ 圧力計
１５０ ポート ２００ 一次圧設定部
２１０ ガス供給源 ２２０ 調整弁
３００ タンク 21, 22, 23, 24, 31 gas circuits 100, 900 pressure generator 110 flow control valve 120 rectifier 130 laminar flow tube 140, 230 pressure gauge 150 port 200 primary pressure setting unit 210 gas supply source 220 regulating valve 300 tank

Claims (5)

ガスの流量を一定に保つ流量制御弁と、
前記流量制御弁の一次側のガスの圧力をあらかじめ定めた一次圧に設定する一次圧設定部と、
前記流量制御弁の二次側に接続された整流器と、
前記整流器から出力されるガスを、基準となる圧力の空間に排出する層流管と、
前記整流器と前記層流管との接続部分の圧力を計測する圧力計と、
前記整流器と前記層流管との接続部分に形成された外部のガス回路と接続するためのポート
を備える圧力発生装置。 a flow control valve that keeps the gas flow rate constant;
a primary pressure setting unit that sets the pressure of the gas on the primary side of the flow control valve to a predetermined primary pressure;
a rectifier connected to the secondary side of the flow control valve;
a laminar flow tube for discharging the gas output from the rectifier to a space having a reference pressure;
a pressure gauge for measuring the pressure at the connecting portion between the rectifier and the laminar flow tube;
A pressure generator comprising a port for connection with an external gas circuit formed at a connection portion between the rectifier and the laminar flow tube. 請求項１記載の圧力発生装置であって、
前記流量制御弁はニードルバルブであり、前記一次圧と前記流量制御弁の二次圧は、流量が一定となる条件を満たすように設定される
ことを特徴とする圧力発生装置。 A pressure generator according to claim 1,
The pressure generator, wherein the flow rate control valve is a needle valve, and the primary pressure and the secondary pressure of the flow rate control valve are set so as to satisfy a condition that the flow rate is constant. 請求項１記載の圧力発生装置であって、
前記流量制御弁はサーボバルブである
ことを特徴とする圧力発生装置。 A pressure generator according to claim 1,
A pressure generator, wherein the flow control valve is a servo valve. 請求項１～３のいずれかに記載の圧力発生装置であって、
前記基準となる圧力とは大気圧である
ことを特徴とする圧力発生装置。 The pressure generator according to any one of claims 1 to 3,
The pressure generator, wherein the reference pressure is atmospheric pressure. 請求項１～４のいずれかに記載の圧力発生装置であって、
前記ポートは、正常なときは閉じた空間を形成しているガス回路に接続される
ことを特徴とする圧力発生装置。 The pressure generator according to any one of claims 1 to 4,
A pressure generator, wherein the port is connected to a gas circuit that normally forms a closed space.
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