JP2022106151A - Photodetection device - Google Patents

Abstract

To provide a photo detection device advantageous in reducing unintended influence and scattering of light on an element isolation part.SOLUTION: A photodetection device comprises: a plurality of photoelectric conversion elements which are two-dimensionally arranged to form a photoreception area; element isolation parts which are provided between the adjacent photoelectric conversion elements; and an inter-pixel light shielding film which defines a plurality of light transmission parts corresponding to the respective photoelectric conversion elements. A deviation amount and a deviation direction of the center location of each of the light transmission parts from the center location of the corresponding photoelectric conversion element are defined according to a distance and a direction of each of the light transmission parts from the center location of the photoreception area, a least some of shapes and sizes in plane view of the plurality of light transmission parts are different from those of the corresponding photoelectric conversion elements in plane view, and the inter-pixel light shielding film is provided so as to overlap with a plurality of crossing portions of the element isolation part in plan view.SELECTED DRAWING: Figure 4C

Description

The present disclosure relates to a photodetector.

By performing pupil correction that optimizes the relative position between the photodiode and the on-chip lens according to the image height in the solid-state image sensor, the difference in the amount of incident light between the center of the angle of view and the periphery of the angle of view is reduced. However, the shading characteristics can be improved (see Patent Document 1).

Japanese Unexamined Patent Publication No. 2017-59739

When an interpixel light-shielding film is provided between the on-chip lens and the photodiode, the relative position between the pixel-to-pixel light-shielding film and the photodiode is also adjusted according to the correction amount of pupil correction.

In particular, the amount of displacement of the interpixel light-shielding film with respect to the photodiode increases as the distance from the center of the angle of view increases. Therefore, when the element separation portion is provided between the photodiodes, a part or all of the element separation portion is exposed in the peripheral portion of the angle of view without being covered by the interpixel light-shielding film.

The photographing light incident on the exposed surface of the element separation portion is unintentionally reflected and scattered on the exposed surface, resulting in color mixing. In particular, as the image height increases, the amount of shift of the interpixel light-shielding film due to pupil correction and the exposed area of the element separation portion increase, and the degree of unintended light reflection and scattering on the exposed surface of the element separation portion also tends to increase. There is.

The present disclosure provides techniques advantageous for reducing unintended reflection and scattering of light at device separators.

One aspect of the present disclosure is a plurality of photoelectric conversion elements arranged two-dimensionally to form a light receiving region, an element separation unit provided between adjacent photoelectric conversion elements, and a plurality of corresponding to each of the plurality of photoelectric conversion elements. A light-shielding film between pixels that partitions the light transmitting portion of the light transmitting portion is provided, and the deviation amount and deviation direction of the center position of each light transmission portion from the center position of the corresponding photoelectric conversion element can be determined by each light from the center of the light receiving region. It is determined according to the distance and direction of the transmitting portion, and the shape and size of at least a part of the plurality of light transmitting portions in the plan view are different from the shape and size in the plan view of the corresponding photoelectric conversion element. The interpixel light-shielding film relates to an optical detection device provided so as to overlap a plurality of intersections of element separation portions in a plan view.

The inter-pixel light-shielding film may be provided so as to overlap the entire plurality of intersections of the element separation portions in a plan view.

The planar viewing area of each light transmitting portion may decrease as the distance of each light transmitting portion from the center of the light receiving region increases.

The inter-pixel light-shielding film may have a grid-like portion and a plurality of expansion portions that are integrated with the grid-like portion and overlap with a plurality of intersections of the element separation portions in a plan view.

Each of the plurality of extensions may have a triangular plan-view shape.

Each of the plurality of extensions may have a quadrangular plan view shape.

Each of the plurality of extensions may have a circular or elliptical plan view shape.

The interpixel light-shielding film may have a grid shape in a plan view.

Even if the minimum height of the part of the interpixel light-shielding film that overlaps with the plurality of intersections of the element separation part in plan view is smaller than the maximum height of the part that does not overlap with the plurality of intersections of the element separation part in plan view. good.

The inter-pixel light-shielding film may have a first light-shielding portion and a second light-shielding portion in which at least a part thereof is overlapped with the first light-shielding portion.

The minimum height of the part of the interpixel light-shielding film that overlaps with the plurality of intersections of the element separation part in the plan view is smaller than the maximum height of the part that does not overlap with the plurality of intersections of the element separation part in the plan view. Of the inter-pixel light-shielding film, the portion that overlaps with the plurality of intersections of the element separation portions in the plan view includes at least a first light-shielding portion, and among the inter-pixel light-shielding films, the plurality of intersections of the element separation portions in the plan view. The portion that does not overlap with the portion may include a second light-shielding portion at least partially.

The plurality of light transmitting portions are partitioned by a transmitting partition portion, and the transmitting partition portion has a plurality of compartment laminated portions stacked on each other, and at least one or more of the plurality of compartment laminated portions is light-shielded between pixels. It may be a membrane.

The partition stacking portion located closest to the element separation portion among the plurality of partition stacking portions may be an interpixel light-shielding film that overlaps with the plurality of intersections of the element separation portions in a plan view.

The element separation portion may include an insulating material.

FIG. 1 is a block diagram showing a schematic configuration of an example of a solid-state image sensor (photodetector). FIG. 2 is an enlarged cross-sectional view showing a schematic configuration of an example of a pixel array portion (particularly, a central portion of an angle of view). FIG. 3A is a drawing relating to the inter-pixel light-shielding film of the first example (particularly, the inter-pixel light-shielding film located at the center of the angle of view), and is a plan view of a light receiving region. FIG. 3B is a plan view of the interpixel light-shielding film and the element separation portion in the region represented by the reference numeral “IIIB” in FIG. 3A. FIG. 3C is a cross-sectional view of the interpixel light-shielding film, the element separation portion, and the photoelectric conversion element along the cross-sectional line indicated by the reference numeral “IIIC” in FIG. 3B. FIG. 4A is a drawing relating to the inter-pixel light-shielding film of the first example (particularly, the inter-pixel light-shielding film located in the peripheral portion of the angle of view), and is a plan view of the light receiving region. FIG. 4B is a plan view of the interpixel light-shielding film and the element separation portion in the region (that is, the second quadrant) indicated by the reference numeral “IVB” in FIG. 4A, and the boundary between the grid-like portion and the expansion portion is shown by a dotted line. There is. FIG. 4C is a plan view of the interpixel light-shielding film and the element separation portion in the region (that is, the second quadrant) indicated by the reference numeral “IVB” in FIG. 4A, and the boundary between the grid-like portion and the expansion portion is not shown. FIG. 4D is a cross-sectional view of an interpixel light-shielding film, an element separation portion, and a photoelectric conversion element along a cross-sectional line indicated by the reference numeral “IVD” in FIGS. 4B and 4C. FIG. 5A is a plan view of an interpixel light-shielding film having no expansion portion and an element separation portion. FIG. 5B is a cross-sectional view of an interpixel light-shielding film, an element separation portion, and a photoelectric conversion element along a cross-sectional line indicated by the reference numeral “VB” in FIG. 5A. FIG. 6A is a drawing relating to the inter-pixel light-shielding film of the first example (particularly, the inter-pixel light-shielding film located in the peripheral portion of the angle of view), and is a plan view of the light receiving region. FIG. 6B is a plan view of the interpixel light-shielding film and the element separation portion in the region (that is, the first quadrant) indicated by the reference numeral “VIB” in FIG. 6A. FIG. 7A is a drawing relating to the inter-pixel light-shielding film of the first example (particularly, the inter-pixel light-shielding film located in the peripheral portion of the angle of view), and is a plan view of the light receiving region. FIG. 7B is a plan view of the interpixel light-shielding film and the element separation portion in the region (that is, the fourth quadrant) indicated by the reference numeral “VIIB” in FIG. 7A. FIG. 8A is a drawing relating to the inter-pixel light-shielding film of the first example (particularly, the inter-pixel light-shielding film located in the peripheral portion of the angle of view), and is a plan view of the light receiving region. FIG. 8B is a plan view of the interpixel light-shielding film and the element separation portion in the region (that is, the third quadrant) indicated by the reference numeral “VIIIB” in FIG. 8A. FIG. 9 is a plan view of the interpixel light-shielding film and the element separation portion of the second example. FIG. 10 is a plan view of the interpixel light-shielding film and the element separation portion of the third example. FIG. 11 is a plan view of the interpixel light-shielding film and the element separation portion of the fourth example. FIG. 12 is an enlarged cross-sectional view showing a schematic configuration of an example of a pixel array portion provided with a light-shielding film between pixels of the fifth example, and is a cross-sectional line (for example,) passing through an intersection of element separation portions in a peripheral portion of an angle of view. FIG. 4C shows a cross-sectional state along the reference numeral “IVD”). FIG. 13A is an enlarged cross-sectional view showing a schematic configuration of an example of a pixel array portion provided with an inter-pixel light-shielding film of the sixth example, particularly along a cross-sectional line passing through an intersection of element separation portions in the central portion of the angle of view. The cross-sectional state is shown. FIG. 13B is an enlarged cross-sectional view showing a schematic configuration of an example of a pixel array portion provided with an inter-pixel light-shielding film of the sixth example, particularly along a cross-sectional line passing through an intersection of element separation portions in the peripheral portion of the angle of view. The cross-sectional state is shown.

Hereinafter, embodiments of the technique of the present disclosure will be described with reference to the drawings. It should be noted that the size and scale of each element do not always exactly match between the drawings.

In the following, a solid-state image sensor (particularly a CMOS image sensor) will be described as an example, but the application of the technique of the present disclosure is not limited, and the technique of the present disclosure can be applied to the entire photodetector. be. Therefore, the solid-state image sensor to which the technique of the present disclosure can be applied may have a structure different from the specific structure shown in each drawing. Further, the technique of the present disclosure can be applied to a device using an image sensor (for example, a CCD image sensor) other than the CMOS image sensor.

Further, the application and technical field of the photodetector to which the technique of the present disclosure can be applied are not limited. For example, the optical detection device to which the technique of the present disclosure can be applied is not only a device whose main purpose is to acquire a subject image provided to a user, but also a device whose main purpose is sensing (for example, a sensor for a vehicle, a distance). It can also be configured as an image sensor and a deflection sensor).

FIG. 1 is a block diagram showing a schematic configuration of an example of a solid-state image sensor 1 (photodetector).

The solid-state image sensor 1 shown in FIG. 1 includes a pixel array unit 11 and a peripheral circuit unit.

The peripheral circuit unit includes, for example, a vertical drive unit 12, an AD conversion unit 13, a horizontal drive unit 14, a system control unit 15, a data storage unit 16, and a signal processing unit 17.

A plurality of pixels 10 are two-dimensionally arranged vertically and horizontally in the pixel array unit 11. Each pixel 10 has a photoelectric conversion unit that generates and stores a light charge according to the amount of received light. A vertical drive unit 12 is connected to each pixel 10 via a pixel drive line 18, and an AD conversion unit 13 is connected via an output signal line 19.

The vertical drive unit 12 outputs a drive signal via the pixel drive line 18 to drive a plurality of pixels 10 included in the pixel array unit 11 in units of individual pixels or in units of a plurality of pixels. For example, the vertical drive unit 12 includes a shift register and an address decoder, and can drive a plurality of pixels 10 included in the pixel array unit 11 simultaneously or row by row.

The pixel signal generated by each pixel 10 is output to the AD conversion unit 13 via the output signal line 19.

The AD conversion unit 13 performs AD conversion processing on the pixel signal output from each pixel 10 to convert the pixel signal from the analog format to the digital format, and stores the pixel signal in the digital format.

The horizontal drive unit 14 includes, for example, a shift register and an address decoder, and drives the AD conversion unit 13 to output digital-format pixel signals from the AD conversion unit 13 to the signal processing unit 17 in a predetermined order.

The system control unit 15 controls the vertical drive unit 12, the AD conversion unit 13, and the horizontal drive unit 14. For example, the system control unit 15 includes a timing generator, and the timing signal generated by the timing generator is output to the vertical drive unit 12, the AD conversion unit 13, and the horizontal drive unit 14. The vertical drive unit 12, the AD conversion unit 13, and the horizontal drive unit 14 drive according to the timing signal sent from the system control unit 15.

The signal processing unit 17 has an arithmetic processing function and performs signal processing of the pixel signal output from the AD conversion unit 13. The specific signal processing performed by the signal processing unit 17 is not limited. The signal processing unit 17 can perform, for example, noise reduction processing, black level adjustment, column variation correction, and / or other digital signal processing.

The data storage unit 16 stores data necessary for signal processing performed by the signal processing unit 17.

The pixel signal that has undergone signal processing in the signal processing unit 17 is output to the outside via the input / output terminals. A signal from the outside may be input to the solid-state image sensor 1 via the input / output terminal.

FIG. 2 is an enlarged cross-sectional view showing a schematic configuration of an example of the pixel array portion 11 (particularly the central portion of the angle of view).

The pixel array unit 11 shown in FIG. 2 is configured as a back-illuminated CMOS sensor, and in particular, an example of a pixel structure on the back surface side (that is, the upper side of FIG. 2) is shown.

Each pixel 10 shown in FIG. 2 has a semiconductor layer 26, a color filter layer 23, a flattening layer 22, and an on-chip lens 21 which are sequentially laminated.

The semiconductor layer 26 has a plurality of photoelectric conversion elements 26a corresponding to each pixel 10. These two-dimensionally arranged photoelectric conversion elements 26a form a light receiving region, and the optical axis of the solid-state image pickup device 1 passes through the center of the light receiving region.

The on-chip lens 21 has a plurality of microlenses assigned to each of the plurality of photoelectric conversion elements 26a. The light incident on each microlens is incident on the corresponding photoelectric conversion element 26a via the flattening layer 22 and the color filter layer 23.

An element separation unit 25 extending in the depth direction is provided between the photoelectric conversion elements 26a of the adjacent pixels 10. The element separation unit 25 is composed of a light-shielding body that blocks light, and prevents light from leaking between adjacent photoelectric conversion elements 26a. Further, the element separation unit 25 can electrically separate the pixels from each other.

The element separation unit 25 shown in FIG. 2 has a DTI (Deep Trench Isolation) structure, and a light-shielding material (insulating material such as SiO ₂ in this example) is embedded in a trench formed in the semiconductor layer 26. Formed by. The trench of the element separation portion 25 shown in FIG. 2 is dug from the back surface side (that is, the upper side of FIG. 2) of the semiconductor layer 26, but is dug from the front surface side (that is, the lower side of FIG. 2) of the semiconductor layer 26. May be good.

The specific constituent material of the element separating portion 25 is not limited. For example, a metal material such as tungsten (W), aluminum (Al), copper (Cu), titanium (Ti), titanium nitride (TiN) and tantalum (Ta), a metal oxide (SiO ₂ etc.), or a plurality of materials. Depending on the combination, the element separation unit 25 can be configured.

An inter-pixel light-shielding film 24 is provided between the on-chip lens 21 and the semiconductor layer 26 (particularly, each photoelectric conversion element 26a). The inter-pixel light-shielding film 24 is composed of a light-shielding body that blocks light, and prevents light from leaking between adjacent pixels 10.

The inter-pixel light-shielding film 24 partitions a plurality of light transmitting portions 27 corresponding to each of the plurality of photoelectric conversion elements 26a. The light incident on the on-chip lens 21 passes through the corresponding light transmitting portion 27 and is incident on each photoelectric conversion element 26a. In the example shown in FIG. 2, the interpixel light-shielding film 24 is located in the color filter layer 23, and each light transmitting portion 27 is filled with the color filter layer 23.

The method of forming the interpixel light-shielding film 24 is not limited. For example, it is possible to form the inter-pixel light-shielding film 24 having a desired shape and a desired size by photolithography using a photomask corresponding to the shape of the inter-pixel light-shielding film 24 and etching.

The specific constituent material of the interpixel light-shielding film 24 is not limited. For example, the interpixel light-shielding film 24 is composed of a metal material such as tungsten (W), aluminum (Al), copper (Cu), titanium (Ti), titanium nitride (TiN) and tantalum (Ta), or an oxide of the metal material. It is possible to do. Further, the element separation portion 25 may be configured by a combination of other materials such as a resin having light absorption (for example, an organic resin material containing a carbon black pigment or a titanium black pigment) or a plurality of materials.

In the pixel array unit 11, pupil correction is performed, and the relative position between the microlens (particularly the optical axis of the microlens) and the photoelectric conversion element 26a (particularly the center of the photoelectric conversion element 26a) associated with each other is received. It is appropriately adjusted according to the distance and direction from the center of the region.

The amount and direction of deviation of the center position of each light transmitting portion 27 for pupil correction from the center position of the corresponding photoelectric conversion element 26a are the distance of each light transmitting portion 27 from the center of the light receiving region and the deviation direction. It is determined according to the direction.

For example, pupil correction is not required in the central portion of the angle of view corresponding to the central portion of the light receiving region. Therefore, from the viewpoint of ensuring good pixel sensitivity, as shown in FIG. 2, the inter-pixel light-shielding film 24 is positioned on the element separation part 25 in the central portion of the angle of view, and each photoelectric conversion element 26a has an inter-pixel light-shielding film 24. It is preferable not to be covered with. In this case, the plan-view shape of the inter-pixel light-shielding film 24 is the same as the grid shape of the element separation portion 25.

On the other hand, pupil correction is performed in the peripheral portion of the angle of view, the center position of each light transmitting portion 27 is largely deviated from the center position of the corresponding photoelectric conversion element 26a, and each photoelectric conversion element 26a is a light-shielding film between pixels 24 in a plan view. Will be partially covered by. In this case, if the inter-pixel light-shielding film 24 in the peripheral portion of the angle of view has the same grid-like plan view shape as the inter-pixel light-shielding film 24 in the central portion of the angle of view, a part of the element separation portion 25 or in the peripheral portion of the angle of view The whole is exposed without being covered with the inter-pixel light-shielding film 24.

When light is incident on the exposed surface of the element separating portion 25 thus generated, the light is unintentionally reflected and scattered on the exposed surface, and color mixing may occur.

Therefore, in the present embodiment, the plan view shape of the interpixel light-shielding film 24 changes according to the distance from the center of the light receiving region, and the exposure of the element separation portion 25 is suppressed.

Specifically, the inter-pixel light-shielding film 24 is provided so as to overlap a plurality of intersecting portions of the element separating portions 25 in a plan view. Therefore, the shape and size of at least a part of the plurality of light transmitting portions 27 (particularly, the plurality of light transmitting portions 27 located away from the center of the light receiving region) in the plan view are the shapes and sizes in the plan view of the corresponding photoelectric conversion element 26a. Different from shape and size.

Hereinafter, a specific example of such an interpixel light-shielding film 24 will be described.

[Light-shielding film between pixels of the first example]
3A to 3C are drawings relating to the inter-pixel light-shielding film 24 of the first example (particularly, the inter-pixel light-shielding film 24 located at the center of the angle of view).

FIG. 3A is a plan view of the light receiving region 20. In FIG. 3A, the center of the light receiving region 20 is indicated by the reference numeral “O”, and the orthogonal axis (that is, the vertical axis and the horizontal axis) passing through the center O of the light receiving region 20 is indicated by a single dotted line.

FIG. 3B is a plan view of the interpixel light-shielding film 24 and the element separation portion 25 in the region represented by the reference numeral “IIIB” in FIG. 3A. In FIG. 3B, the cross display indicates the center O (that is, the intersection center) of the intersection 25a of the element separation portion 25, and the triangle represented by the dotted line corresponds to the expansion portion 24b (see FIG. 4B) described later.

FIG. 3C is a cross-sectional view of the interpixel light-shielding film 24, the element separation portion 25, and the photoelectric conversion element 26a along the cross-sectional line indicated by the reference numeral “IIIC” in FIG. 3B.

The interpixel light-shielding film 24 shown in FIGS. 3B and 3C is located near the center of the light-receiving region 20 (see reference numeral “IIIB” in FIG. 3A).

The inter-pixel light-shielding film 24 of this example is integrally made of a common material throughout, and has the same lattice shape as the element separation portion 25 in a plan view at the center of the angle of view. That is, the interpixel light-shielding film 24 in the central portion of the angle of view has the same shape and size as the element separation portion 25 in a plan view, and is arranged at the same position as the element separation portion 25.

Therefore, the interpixel light-shielding film 24 in the central portion of the angle of view covers the entire element separation portion 25 and does not protrude from the element separation portion 25 in a plan view.

4A to 4D are drawings relating to the inter-pixel light-shielding film 24 of the first example (particularly, the inter-pixel light-shielding film 24 located in the peripheral portion of the angle of view).

FIG. 4A is a plan view of the light receiving region 20. In FIG. 4A, the center of the light receiving region 20 is indicated by the reference numeral “O”, and the orthogonal axis passing through the center O of the light receiving region 20 is indicated by a single dotted line.

FIG. 4B is a plan view of the interpixel light-shielding film 24 and the element separation portion 25 in the region (that is, the second quadrant) indicated by the reference numeral “IVB” in FIG. 4A, and the boundary between the grid-like portion 24a and the expansion portion 24b is a dotted line. Indicated by. In FIG. 4B, the cross-shaped display indicates the intersection center of the intersection portion 25a of the element separation portion 25.

FIG. 4C is a plan view of the interpixel light-shielding film 24 and the element separation portion 25 in the region indicated by the reference numeral “IVB” in FIG. 4A, and the boundary between the grid-like portion 24a and the expansion portion 24b is not shown.

FIG. 4D is a cross-sectional view of the interpixel light-shielding film 24, the element separation portion 25, and the photoelectric conversion element 26a along the cross-sectional line indicated by the reference numeral “IVD” in FIGS. 4B and 4C.

As shown in FIGS. 4B to 4D, the interpixel light-shielding film 24 in the peripheral portion of the angle of view partially covers each photoelectric conversion element 26a in a plan view, and also covers the entire plurality of intersections 25a of the element separation portions 25. It is provided so as to overlap and cover.

Specifically, the inter-pixel light-shielding film 24 in the peripheral portion of the angle of view has a grid-like portion 24a and a plurality of expansion portions 24b.

The planar view shape and the planar view size of the lattice-shaped portion 24a are the same as the planar view shape and the planar view size of the element separation portion 25, and therefore, the planar view of the interpixel light-shielding film 24 (see FIG. 3B) at the center of the angle of view. Same as shape and plan size.

However, the position of the grid-shaped portion 24a is deviated from the position of the element separating portion 25 for pupil correction. The amount of misalignment and the direction of misalignment of the grid-shaped portion 24a are determined according to the distance and direction from the center O of the light receiving region 20. That is, the grid-like portion 24a in the peripheral portion of the angle of view is positioned so as to be displaced from the element separation portion 25 in the direction toward the center O of the light receiving region 20.

On the other hand, the plurality of expansion portions 24b are integrated with the grid-like portion 24a (particularly, the intersection portion of the grid-like portion 24a), and overlap with the plurality of intersection portions 25a of the element separation portion 25 in a plan view.

The concept of "integration" here includes not only the case where each expansion portion 24b and the grid portion 24a are fused without a clear boundary, but also each expansion portion 24b is fixed to the grid portion 24a. It is also included when it is attached to.

Each expansion portion 24b of this example has a triangular planar view shape and covers the entire corresponding intersection portion 25a of the element separation portion 25.

As described above, according to the inter-pixel light-shielding film 24 of this example, the pupil correction is appropriately performed by the grid-like portion 24a, and the exposure of the element separation portion 25 is reduced by the expansion portion 24b. That is, the amount of deviation of the grid-like portion 24a increases as the distance from the center O of the light receiving region 20 increases, but the intersection 25a of the element separation portion 25 does not depend on the distance from the center O of the light receiving region 20. It is covered by the extension portion 24b.

Therefore, regardless of the distance from the center O of the light receiving region 20, the incident of light on the intersecting portion 25a of the element separating portion 25 is prevented by the expansion portion 24b. As a result, unintended reflection and scattering of light at the intersection 25a of the element separation portion 25 is prevented in the entire light receiving region 20, and thereby color mixing is also prevented.

5A and 5B are drawings relating to the inter-pixel light-shielding film 24 having no expansion portion 24b (particularly, the inter-pixel light-shielding film 24 located in the peripheral portion of the angle of view). FIG. 5A is a plan view of the interpixel light-shielding film 24 and the element separation portion 25 having no expansion portion 24b. FIG. 5B is a cross-sectional view of the interpixel light-shielding film 24, the element separation portion 25, and the photoelectric conversion element 26a along the cross-sectional line indicated by the reference numeral “VB” in FIG. 5A.

As is clear from FIGS. 5A and 5B, when the inter-pixel light-shielding film 24 does not have the expansion portion 24b, the intersection 25a of the element separation unit 25 responds to the deviation of the inter-pixel light-shielding film 24 due to pupil correction. The exposed surface increases. Therefore, light is incident on the exposed surface of the intersecting portion 25a of the element separating portion 25, and the light is reflected and scattered to bring about color mixing.

Considering the incident direction of light and the grid-like arrangement of the element separation portions 25, the light reflected and scattered at the intersection portion 25a of the element separation portions 25 tends to contribute relatively significantly to the generation of color mixing.

On the other hand, when the range in which the element separation portion 25 is covered by the inter-pixel light-shielding film 24 becomes large, the planar viewing area of each light transmission portion 27 becomes small, and as a result, the pixel sensitivity decreases.

Therefore, as in this example, by covering the intersection 25a of the element separation portion 25 mainly with the inter-pixel light-shielding film 24 (particularly the expansion portion 24b), color mixing is effectively reduced while maintaining good pixel sensitivity. can do.

In particular, by making the plan view shape of the expansion portion 24b triangular, the exposure of the intersection 25a of the element separation section 25 is surely prevented, the expansion of the plan view area of the interpixel light-shielding film 24 is suppressed, and the effect of pupil correction is achieved. Can be avoided to be significantly impaired.

As described above, according to the inter-pixel light-shielding film 24 of this example, it is possible to prevent color mixing due to unintended reflection and scattering of light at the intersection 25a of the element separation portion 25, and to secure good pixel sensitivity by pupil correction. , A good balance can be achieved.

As the distance from the center O of the light receiving region 20 increases, the amount of protrusion (that is, the amount of protrusion) of each expansion portion 24b from the grid-like portion 24a increases.

That is, the interpixel light-shielding film 24 has a grid-like planar shape near the center of the light-receiving region 20. In other words, in the vicinity of the center of the light receiving region 20, each expansion portion 24b is configured as a part of the grid-like portion 24a (see FIG. 3B).

Then, as the distance from the center O of the light receiving region 20 increases, the expansion portion 24b gradually overhangs toward the adjacent light transmitting portion 27, and the amount of the expansion portion 24b protruding from the grid-like portion 24a gradually increases. Therefore, the planar viewing area of each light transmitting portion 27 decreases as the distance of each light transmitting portion 27 from the center O of the light receiving region 20 increases.

The amount of protrusion of each expansion portion 24b from the grid-shaped portion 24a may increase steplessly (that is, continuously variable) as the distance from the center O of the light receiving region 20 increases, or gradually increases. You may.

When the plan view shape of each expansion portion 24b is anisotropic, from the viewpoint of realizing a uniform pupil correction effect regardless of the direction with respect to the center O of the light receiving region 20, the light receiving region 20 with respect to the center O. It is preferable to change the direction of each expansion portion 24b according to the direction.

Therefore, in the interpixel light-shielding film 24 of this example, the orientation of each expansion portion 24b having a triangular planar view shape is changed according to the direction of the light receiving region 20 with respect to the center O.

6A, 7A and 8A are plan views of the light receiving region 20.

FIG. 6B is a plan view of the interpixel light-shielding film 24 and the element separation portion 25 in the region (that is, the first quadrant) indicated by the reference numeral “VIB” in FIG. 6A. FIG. 7B is a plan view of the interpixel light-shielding film 24 and the element separation portion 25 in the region (that is, the fourth quadrant) indicated by the reference numeral “VIIB” in FIG. 7A. FIG. 8B is a plan view of the interpixel light-shielding film 24 and the element separation portion 25 in the region (that is, the third quadrant) indicated by the reference numeral “VIIIB” in FIG. 8A.

In the inter-pixel light-shielding film 24 of this example, as shown in FIGS. 4C, 6B, 7B, and 8B, the orientation of the expansion portion 24b is also the direction of the light receiving region 20 having a line-symmetrical relationship. It is axisymmetric between regions. Similarly, for a region of the light receiving region 20 that has a point symmetry relationship, the orientation of the expansion portion 24b is also point symmetric between the regions.

[Light-shielding film between pixels in the second example]
In the inter-pixel light-shielding film 24 of this example, the same or corresponding elements as the inter-pixel light-shielding film 24 of the first example described above are designated by the same reference numerals, and are common to the inter-pixel light-shielding film 24 of the first example. Detailed explanation of the matter is omitted.

FIG. 9 is a plan view of the interpixel light-shielding film 24 and the element separation portion 25 of the second example. The interpixel light-shielding film 24 and the element separation unit 25 shown in FIG. 9 are located in the region (that is, the second quadrant) indicated by the reference numeral “IVB” in FIG. 4A.

The inter-pixel light-shielding film 24 of this example is integrally made of a common material throughout, like the inter-pixel light-shielding film 24 of the first example described above, and has an integrated grid-like portion 24a and a plurality of inter-pixel light-shielding films 24. Includes extension 24b.

However, each expansion portion 24b of the interpixel light-shielding film 24 of this example has a rectangular (especially rhombus) plan view shape and partially overlaps with the grid-like portion 24a (particularly the intersection of the grid-like portions 24a). It is provided.

Also in this example, similarly to the inter-pixel light-shielding film 24 of the first example described above, the grid-like portion 24a is displaced from the element separation portion 25 according to the distance from the center O of the light receiving region 20 for pupil correction. Each of the expansion portions 24b covers the corresponding intersection portion 25a of the element separation portion 25.

The misalignment direction between the grid-shaped portion 24a and the element separating portion 25 changes depending on the direction of the light receiving region 20 with respect to the center O. That is, the grid-like portion 24a is displaced with respect to the element separation portion 25 in the direction toward the center O of the light receiving region 20. Therefore, the corresponding intersection 25a of the element separation portion 25 covered by each expansion portion 24b is opposite to the direction toward the center O of the light receiving region 20 with respect to the grid portion 24a (particularly the intersection of the grid portions 24a). Located on the directional side.

As described above, also in this example, the pupil correction is appropriately performed by the grid-shaped portion 24a, the exposure of the element separation portion 25 is reduced by the expansion portion 24b, and the unintended reflection of light at the intersection portion 25a of the element separation portion 25 is performed. And scattering is prevented.

In particular, the plan-view shape (that is, the rhombus) of the extension portion 24b of this example has symmetry. Therefore, the inter-pixel light-shielding film 24 of this example is also advantageous from the viewpoint of realizing a uniform pupil correction effect regardless of the direction of the light-receiving region 20 with respect to the center O. Further, the inter-pixel light-shielding film 24 of this example is also advantageous in terms of design and manufacture of the inter-pixel light-shielding film 24.

The plurality of expansion portions 24b of the interpixel light-shielding film 24 may have the same plan view size over the entire light receiving region 20, or may have the same plan view size depending on the distance from the center O of the light receiving region 20. May change. For example, the plan-viewing area of each expansion portion 24b may increase as the distance from the center O of the light receiving region 20 increases.

[Light-shielding film between pixels in the third example]
In the inter-pixel light-shielding film 24 of this example, the same or corresponding elements as the inter-pixel light-shielding film 24 of the first example and the second example described above are designated by the same reference numerals, and the first example and the second example have the same reference numerals. Detailed description of matters common to the example interpixel light-shielding film 24 will be omitted.

FIG. 10 is a plan view of the interpixel light-shielding film 24 and the element separation portion 25 of the third example. The interpixel light-shielding film 24 and the element separation unit 25 shown in FIG. 10 are located in the region (that is, the second quadrant) indicated by the reference numeral “IVB” in FIG. 4A.

Similar to the above-mentioned first example and the second example, the inter-pixel light-shielding film 24 of this example is integrally made of a common material throughout, and has an integrated grid pattern. A portion 24a and a plurality of expansion portions 24b are included.

However, each expansion portion 24b of the interpixel light-shielding film 24 of this example has a circular or elliptical plan view shape, and is provided so as to partially overlap the grid-like portion 24a (particularly, the intersection of the grid-like portions 24a). Has been done.

Also in this example, similarly to the inter-pixel light-shielding film 24 of the first example and the second example described above, the grid-like portion 24a is an element according to the distance from the center O of the light receiving region 20 for pupil correction. Shifted from the separation section 25, each extension section 24b covers the corresponding intersection 25a of the element separation section 25.

The misalignment direction between the grid-shaped portion 24a and the element separating portion 25 changes according to the direction of the light receiving region 20 with respect to the center O, and the grid-shaped portion 24a has the center O of the light receiving region 20 with respect to the element separating portion 25. It is shifted in the direction toward. The corresponding intersection 25a of the element separation portion 25 covered by each expansion portion 24b is opposite to the direction toward the center O of the light receiving region 20 with respect to the grid portion 24a (particularly the intersection of the grid portions 24a). Located on the directional side.

As described above, also in this example, the pupil correction is appropriately performed by the grid-like portion 24a, the exposure of the element separation portion 25 is reduced by the expansion portion 24b, and the unintended reflection of light at the intersection portion 25a of the element separation portion 25 is performed. And scattering is prevented.

Further, the plan view shape of the expansion portion 24b of this example has symmetry, and the interpixel light-shielding film 24 of this example realizes a uniform pupil correction effect regardless of the direction of the light receiving region 20 with respect to the center O. It is advantageous from the viewpoint of

In particular, when each expansion portion 24b has an isotropic circular planar view shape, a uniform pupil correction effect is obtained without changing the direction of each expansion portion 24b according to the direction of the light receiving region 20 with respect to the center O. Can be realized. Therefore, the inter-pixel light-shielding film 24 of this example is also advantageous in terms of design and manufacture of the inter-pixel light-shielding film 24.

The plurality of expansion portions 24b of the interpixel light-shielding film 24 may have the same plan view size over the entire light receiving region 20, or may have the same plan view size depending on the distance from the center O of the light receiving region 20. May change.

[Light-shielding film between pixels in the fourth example]
In the inter-pixel light-shielding film 24 of this example, the same or corresponding elements as the inter-pixel light-shielding film 24 of the first to third examples described above are designated by the same reference numerals, and between the pixels of the first to third examples. Detailed description of matters common to the light-shielding film 24 will be omitted.

FIG. 11 is a plan view of the interpixel light-shielding film 24 and the element separation portion 25 of the fourth example. The interpixel light-shielding film 24 and the element separation unit 25 shown in FIG. 11 are located in the region (that is, the second quadrant) indicated by the reference numeral “IVB” in FIG. 4A.

The interpixel light-shielding film 24 of this example has a grid shape in a plan view over the entire light receiving region 20, and covers the entire element separation portion 25 (see the dotted line portion in FIG. 11).

The inter-pixel light-shielding film 24 of this example is displaced from the element separation unit 25 according to the distance from the center O of the light-receiving region 20 for pupil correction, but is expanded so as to cover the entire element separation unit 25.

Therefore, as the distance from the center O of the light receiving region 20 increases, the lattice width in the plan view of the interpixel light-shielding film 24 gradually increases, and the planar view area of each light transmitting portion 27 partitioned by the pixel-to-pixel light-shielding film 24. Gradually becomes smaller.

According to the inter-pixel light-shielding film 24 of this example, the element separation portion 25 is not exposed, and it is possible to reliably prevent color mixing due to reflection and scattering of incident light on the exposed surface of the element separation portion 25.

Further, since the inter-pixel light-shielding film 24 of this example has a grid-like plan view shape as a whole, it is easy to design and manufacture the inter-pixel light-shielding film 24.

[Light-shielding film between pixels in the fifth example]
In the inter-pixel light-shielding film 24 of this example, the same or corresponding elements as the inter-pixel light-shielding film 24 of the first to fourth examples described above are designated by the same reference numerals, and between the pixels of the first to fourth examples. Detailed description of matters common to the light-shielding film 24 will be omitted.

FIG. 12 is an enlarged cross-sectional view showing a schematic configuration of an example of the pixel array portion 11 provided with the interpixel light-shielding film 24 of the fifth example, and particularly passes through the intersection portion 25a of the element separation portion 25 in the peripheral portion of the angle of view. The cross-sectional state along the cross-sectional line (see, for example, the reference numeral “IVD” in FIG. 4C) is shown.

The interpixel light-shielding film 24 of this example has a first light-shielding portion 24c and a second light-shielding portion 24d whose at least a part is overlapped with the first light-shielding portion 24c.

The first light-shielding portion 24c shown in FIG. 12 has the same plan-view shape (that is, a grid shape) as the element separation portion 25 throughout. That is, the first light-shielding portion 24c has the same shape and size as the element separation portion 25 in a plan view, is arranged at the same position as the element separation portion 25, and covers the entire element separation portion 25 (including the intersection portion 25a). It covers and does not protrude from the element separation portion 25.

On the other hand, the second light-shielding portion 24d partially or completely overlaps with the first light-shielding portion 24c in a plan view.

In the central portion of the angle of view that does not require pupil correction, the second light-shielding portion 24d has the same plan-view shape and plan-view size as the first light-shielding portion 24c (same as the element separation portion 25 in this example). That is, the second light-shielding portion 24d in the central portion of the angle of view has the same shape and size as the first light-shielding portion 24c in a plan view, is arranged at the same position as the first light-shielding portion 24c, and is the entire first light-shielding portion 24c. And does not protrude from the first light-shielding portion 24c.

On the other hand, in the peripheral portion of the angle of view, as shown in FIG. 12, the second light-shielding portion 24d partially overlaps with the first light-shielding portion 24c, but does not overlap with the element separation portion 25 in a plan view (that is, a photoelectric conversion element). Extend to the range that overlaps with 26a).

The expansion amount of the second light-shielding portion 24d with respect to the first light-shielding portion 24c is determined according to the correction amount of the pupil correction. Therefore, as the distance from the center O of the light receiving region 20 increases, the amount of protrusion of the second shading portion 24d from the first shading portion 24c in a plan view increases, and the photoelectric conversion element 26a covered by the second shading portion 24d. The range becomes large.

As described above, the portion of the interpixel light-shielding film 24 that overlaps with the plurality of intersections 25a of the element separation portions 25 in a plan view includes at least a first light-shielding portion 24c. In the specific example shown in FIG. 12, the entire first light-shielding portion 24c and a part of the second light-shielding portion 24d form a portion of the inter-pixel light-shielding film 24 that overlaps with the plurality of intersections 25a of the element separation portions 25 in a plan view. Has been done.

On the other hand, the portion of the interpixel light-shielding film 24 that does not overlap with the plurality of intersections 25a of the element separation portions 25 in a plan view includes at least a second light-shielding portion 24d. In the specific example shown in FIG. 12, a part of the second light-shielding portion 24d constitutes a portion of the inter-pixel light-shielding film 24 that does not overlap with the plurality of intersections 25a of the element separation portions 25 in a plan view.

The minimum height of the portion of the interpixel light-shielding film 24 that overlaps with the plurality of intersections 25a of the element separation portions 25 in a plan view is the maximum of the portion that does not overlap with the plurality of intersections 25a of the element separation portions 25 in a plan view. Less than height.

In the specific example shown in FIG. 12, the minimum height of the portion of the element separating portion 25 that overlaps with the plurality of intersecting portions 25a in a plan view corresponds to the height of the first light-shielding portion 24c. On the other hand, the maximum height of the portion of the element separating portion 25 that does not overlap with the plurality of intersecting portions 25a in a plan view corresponds to the height of the second light-shielding portion 24d.

As described above, in this example, the interpixel light-shielding film 24 includes a plurality of layers (that is, the first light-shielding portion 24c and the second light-shielding portion 24d), and adjusts the relative position and the overlapping state between these layers. As a result, the exposure of the element separation unit 25 is suppressed while performing pupil correction.

In particular, it is possible to improve the pixel sensitivity by forming the inter-pixel light-shielding film 24 by combining a plurality of light-shielding portions having different heights as in the inter-pixel light-shielding film 24 of this example. That is, by setting the height position of the first light-shielding portion 24c lower than the height position of the second light-shielding portion 24d, it is possible to reduce the blocking of incident light by the first light-shielding portion 24c, and a larger amount of light can be obtained. Can be incident on the corresponding photoelectric conversion element 26a.

Although FIG. 12 shows an example in which the inter-pixel light-shielding film 24 has a two-layer structure, the inter-pixel light-shielding film 24 may have three or more layer structures (that is, three or more light-shielding portions). ..

Further, the plurality of layers included in the interpixel light-shielding film 24 (that is, the plurality of light-shielding portions (first light-shielding portion 24c and the second light-shielding portion 24d)) may have the same composition or different compositions from each other. You may.

[Light-shielding film between pixels in the sixth example]
In the inter-pixel light-shielding film 24 of this example, the same or corresponding elements as those of the above-mentioned inter-pixel light-shielding film 24 of the first to fifth examples are designated by the same reference numerals, and between the pixels of the first to fifth examples. Detailed description of matters common to the light-shielding film 24 will be omitted.

FIG. 13A is an enlarged cross-sectional view showing a schematic configuration of an example of the pixel array portion 11 provided with the inter-pixel light-shielding film 24 of the sixth example, and particularly passes through the intersection portion 25a of the element separation portion 25 in the central portion of the angle of view. The cross-sectional state along the cross-sectional line (see, for example, the reference numeral “IVD” in FIG. 4C) is shown.

FIG. 13B is an enlarged cross-sectional view showing a schematic configuration of an example of the pixel array portion 11 provided with the interpixel light-shielding film 24 of the sixth example, and particularly passes through the intersection portion 25a of the element separation portion 25 in the peripheral portion of the angle of view. The cross-sectional state along the cross-sectional line (see, for example, the reference numeral “IVD” in FIG. 4C) is shown.

In this example, each light transmitting portion 27 is partitioned by a transmitting partition portion 31. The transmission partition portion 31 has a plurality of compartment stacking portions 31a and 31b stacked on each other, and at least one or more of these compartment stacking portions 31a and 31b constitutes the inter-pixel light-shielding film 24.

In the example shown in FIG. 12, the transmission section 31 is provided so as to penetrate the color filter layer 23, and has a first section stacking section 31a and a second section stacking section 31b.

The first section stacking portion 31a is located on the element separation section 25 side, and the second section stacking section 31b is stacked on the first section stacking section 31a on the side opposite to the element separation section 25.

The first section laminated portion 31a is provided as an interpixel light-shielding film 24, and overlaps with a plurality of intersecting portions 25a of the element separating portions 25 in a plan view. The specific shape and size of the first section laminated portion 31a are not limited, and for example, even if they have the same shape and size as the interpixel light-shielding film 24 (see FIGS. 3A to 4D) of the first example described above. good.

The first section laminated portion 31a (that is, the inter-pixel light-shielding film 24) is located at a distance from the center O of the light-receiving region 20 for pupil correction, similarly to the inter-pixel light-shielding film 24 of the first to fifth examples described above. Correspondingly, it covers a plurality of intersecting portions 25a of the element separating portion 25 while being located in a range deviated from the element separating portion 25. As a result, it is possible to perform pupil correction while preventing color mixing due to unintended reflection and scattering of light at the intersection 25a of the element separation unit 25.

Further, by providing the partition stacking portion 31a located on the element separation portion 25 side of the plurality of compartment stacking portions 31a and 31b as the inter-pixel light-shielding film 24, the height range of the inter-pixel light-shielding film 24 can be suppressed. As a result, the blocking of the incident light by the first light-shielding portion 24c can be suppressed, and a larger amount of light can be incident on the corresponding photoelectric conversion element 26a to improve the pixel sensitivity.

On the other hand, the second section laminated portion 31b is provided as an arbitrary functional layer.

Therefore, the second section laminated portion 31b may be provided as a layer having a light-shielding property (that is, an inter-pixel light-shielding film 24), or may be provided as a layer having no light-shielding property.

For example, the second compartment laminated portion 31b may be provided as a low refractive index layer having a lower refractive index than the first compartment laminated portion 31a (that is, the interpixel light-shielding film 24). In this case, the pixel sensitivity can be improved more effectively while suppressing the color mixing.

Generally, by providing the inter-pixel light-shielding film 24 high, it is possible to reduce color mixing due to light leakage between adjacent pixels, but it also reduces pixel sensitivity. On the other hand, by laminating the low refractive index layer (second compartment laminated portion 31b) on the inter-pixel light-shielding film 24 (first compartment laminated portion 31a), it is possible to improve the pixel sensitivity while suppressing color mixing.

In the examples shown in FIGS. 13A and 13B, one layer of the second compartment laminated portion 31b is provided on the first compartment laminated portion 31a, but even if two or more layers are laminated on the first compartment laminated portion 31a. good.

For example, the first low-refractive index layer and the second low-refractive index layer (not shown) having a refractive index lower than that of the first compartment laminated portion 31a (that is, the interpixel light-shielding film 24) are used as the first compartment laminated portion. It may be laminated on the laminated portion 31a. By laminating the first low refractive index layer on the first section laminated portion 31a and laminating the second low refractive index layer having a refractive index lower than that of the first low refractive index layer on the first low refractive index layer. The refractive index of the transmission section 31 gradually increases toward the element separation section 25.

In this case, it is possible to achieve both suppression of color mixing and improvement of pixel sensitivity in a well-balanced manner.

The above-mentioned compartmentalized laminated portion provided as the low refractive index layer includes any inorganic material (for example, SiN, SiO ₂ and SiON) and an organic material (for example, styrene resin, acrylic resin, styrene-acrylic copolymer resin and styrene resin). It can be composed of a cycloxane resin).

Further, the refractive index of the above-mentioned compartmentalized laminated portion provided as the low refractive index layer may be appropriately set in the range of, for example, about 1.00 to 1.70. In this case, the on-chip lens 21 may be appropriately set in the range of, for example, about 1.50 to 2.0.

As described above, according to the solid-state imaging device 1 of the present embodiment provided with the above-mentioned interpixel light-shielding film 24, the exposure of the element separation unit 25 is suppressed while performing pupil correction, and the exposed surface of the element separation unit 25 is used. It is possible to reduce the color mixing that may occur due to the reflection and scattering of light and improve the image quality of the captured image.

It should be noted that the embodiments and variations disclosed herein are merely exemplary in all respects and are not to be construed in a limited way. The above-described embodiments and modifications can be omitted, replaced or modified in various forms without departing from the scope and purpose of the attached claims. For example, the above-described embodiments and modifications may be combined in whole or in part, and embodiments other than the above may be combined with the above-mentioned embodiments or modifications. Moreover, the effects of the present disclosure described herein are merely examples, and other effects may be brought about.

The technical categories that embody the above-mentioned technical ideas are not limited. For example, the above-mentioned technical idea may be embodied by a computer program for causing a computer to execute one or a plurality of procedures (steps) included in the method of manufacturing or using the above-mentioned device. Further, the above-mentioned technical idea may be embodied by a computer-readable non-transitory recording medium in which such a computer program is recorded.

[Additional Notes]
The present disclosure may also have the following structure.

[Item 1]
Multiple photoelectric conversion elements arranged two-dimensionally to form a light receiving region,
An element separation unit provided between adjacent photoelectric conversion elements and
An interpixel light-shielding film that partitions a plurality of light transmitting portions corresponding to each of the plurality of photoelectric conversion elements,
Equipped with
The amount and direction of deviation of the center position of each light transmitting portion from the center position of the corresponding photoelectric conversion element are determined according to the distance and direction of each light transmitting portion from the center of the light receiving region.
The shape and size of at least a part of the plurality of light transmitting portions in a plan view are different from the shape and size of the corresponding photoelectric conversion element in a plan view.
The interpixel light-shielding film is a photodetector provided so as to overlap a plurality of intersections of the element separation portions in a plan view.

[Item 2]
The photodetector according to item 1, wherein the inter-pixel light-shielding film is provided so as to overlap the entire of the plurality of intersections of the element separation portion in a plan view.

[Item 3]
The photodetector according to item 1 or 2, wherein the planar viewing area of each light transmitting portion decreases as the distance of each light transmitting portion from the center of the light receiving region increases.

[Item 4]
The interpixel light-shielding film is
Lattice part and
A plurality of expansion portions that are integrated with the grid-like portion and overlap with the plurality of intersections of the element separation portion in a plan view.
The photodetector according to any one of items 1 to 3.

[Item 5]
The photodetector according to item 4, wherein each of the plurality of expansion portions has a triangular planar view shape.

[Item 6]
The photodetector according to item 4, wherein each of the plurality of expansion portions has a quadrangular plan view shape.

[Item 7]
The photodetector according to item 4, wherein each of the plurality of expansion portions has a circular or elliptical plan view shape.

[Item 8]
The photodetector according to any one of items 1 to 4, wherein the interpixel light-shielding film has a grid shape in a plan view.

[Item 9]
The minimum height of the portion of the interpixel light-shielding film that overlaps the plurality of intersections of the element separation portion in a plan view is the maximum height of the portion that does not overlap the plurality of intersections of the element separation portion in a plan view. The photodetector according to any one of items 1 to 8, which is smaller than the above.

[Item 10]
The interpixel light-shielding film is
The first shading part and
Item 6. The photodetector according to any one of Items 1 to 9, wherein the photodetector has a second light-shielding portion whose at least a part thereof is overlapped with the first light-shielding portion.

[Item 11]
The minimum height of the portion of the interpixel light-shielding film that overlaps the plurality of intersections of the element separation portion in a plan view is the maximum height of the portion that does not overlap the plurality of intersections of the element separation portion in a plan view. Smaller than that
The portion of the interpixel light-shielding film that overlaps the plurality of intersections of the element separation portion in a plan view includes at least a part of the first light-shielding portion.
The photodetector according to item 10, wherein the portion of the interpixel light-shielding film that does not overlap with the plurality of intersections of the element separation portion in a plan view is at least partially including the second light-shielding portion.

[Item 12]
The plurality of light transmitting portions are partitioned by a transmitting partition portion, and the plurality of light transmitting portions are partitioned by a transmitting partition portion.
The transmission compartment has a plurality of compartments stacked on top of each other.
Item 6. The photodetector according to any one of Items 1 to 11, wherein at least one of the plurality of compartments and laminated portions is the interpixel light-shielding film.

[Item 13]
Item 12. The item 12 is the inter-pixel light-shielding film in which the partition stacking portion located closest to the element separation portion among the plurality of compartment stacking portions is a light-shielding film between pixels that overlaps with the plurality of intersections of the element separation portions in a plan view. Photodetector.

[Item 14]
The photodetector according to items 1 to 13, wherein the element separating portion includes an insulating material.

1 Solid-state image sensor 10 Pixel 11 Pixel array unit 12 Vertical drive unit 13 AD conversion unit 14 Horizontal drive unit 15 System control unit 16 Data storage unit 17 Signal processing unit 18 Pixel drive line 19 Output signal line 20 Light receiving area 21 On-chip lens 22 Flattening layer 23 Color filter layer 24 Inter-pixel light-shielding film 24a Pixel-like part 24b Expansion part 24c First light-shielding part 24d Second light-shielding part 25 Element separation part 25a Crossing part 26 Semiconductor layer 26a Photoelectric conversion element 27 Light transmission part 31 Transmission section Part 31a First section laminated section 31b Second section laminated section O Center of light receiving area

Claims (14)

Multiple photoelectric conversion elements arranged two-dimensionally to form a light receiving region,
An element separation unit provided between adjacent photoelectric conversion elements and
An interpixel light-shielding film that partitions a plurality of light transmitting portions corresponding to each of the plurality of photoelectric conversion elements,
Equipped with
The amount and direction of deviation of the center position of each light transmitting portion from the center position of the corresponding photoelectric conversion element are determined according to the distance and direction of each light transmitting portion from the center of the light receiving region.
The shape and size of at least a part of the plurality of light transmitting portions in a plan view are different from the shape and size of the corresponding photoelectric conversion element in a plan view.
The interpixel light-shielding film is a photodetector provided so as to overlap a plurality of intersections of the element separation portions in a plan view. The photodetector according to claim 1, wherein the inter-pixel light-shielding film is provided so as to overlap the entire of the plurality of intersections of the element separation portion in a plan view. The light detection device according to claim 1, wherein the planar viewing area of each light transmitting portion decreases as the distance of each light transmitting portion from the center of the light receiving region increases. The interpixel light-shielding film is
Lattice part and
A plurality of expansion portions that are integrated with the grid-like portion and overlap with the plurality of intersections of the element separation portion in a plan view.
The photodetector according to claim 1. The photodetector according to claim 4, wherein each of the plurality of expansion portions has a triangular planar view shape. The photodetector according to claim 4, wherein each of the plurality of expansion portions has a quadrangular plan view shape. The photodetector according to claim 4, wherein each of the plurality of expansion portions has a circular or elliptical plan view shape. The photodetector according to claim 1, wherein the interpixel light-shielding film has a grid shape in a plan view. The minimum height of the portion of the interpixel light-shielding film that overlaps the plurality of intersections of the element separation portion in a plan view is the maximum height of the portion that does not overlap the plurality of intersections of the element separation portion in a plan view. The photodetector according to claim 1, which is smaller than the above. The interpixel light-shielding film is
The first shading part and
The photodetector according to claim 1, further comprising a second light-shielding portion having at least a part thereof overlapped with the first light-shielding portion. The minimum height of the portion of the interpixel light-shielding film that overlaps the plurality of intersections of the element separation portion in a plan view is the maximum height of the portion that does not overlap the plurality of intersections of the element separation portion in a plan view. Smaller than that
The portion of the interpixel light-shielding film that overlaps the plurality of intersections of the element separation portion in a plan view includes at least a part of the first light-shielding portion.
The photodetector according to claim 10, wherein a portion of the interpixel light-shielding film that does not overlap with the plurality of intersections of the element separation portion in a plan view includes at least a part of the second light-shielding portion. The plurality of light transmitting portions are partitioned by a transmitting partition portion, and the plurality of light transmitting portions are partitioned by a transmitting partition portion.
The transmission compartment has a plurality of compartments stacked on top of each other.
The photodetector according to claim 1, wherein at least one of the plurality of compartments and laminated portions is the interpixel light-shielding film. 12. The interpixel light-shielding film, wherein the partition stacking portion located closest to the element separation portion among the plurality of compartment stacking portions is an interpixel light-shielding film that overlaps with the plurality of intersections of the element separation portions in a plan view. Photodetector. The photodetector according to claim 1, wherein the element separating portion includes an insulating material.

Images