JP2022102960A5

JP2022102960A5 -

Info

Publication number: JP2022102960A5
Application number: JP2020218051A
Authority: JP
Filing date: 2020-12-25
Publication date: 2023-07-07

Description

上記目的を達成するために、本発明に係るプラズマ処理装置は、被処理物を殺菌処理するプラズマ処理装置であって、供給された誘導ガスから大気圧においてプラズマを生成するプラズマ生成部と、所定の搬送方向に沿って前記被処理物を通過させるプラズマ処理室と、を備え、前記プラズマ生成部と前記プラズマ処理室とは、隔離壁により隔てられており、前記隔離壁には、前記プラズマ生成部と前記プラズマ処理室とを連通する１又は複数の貫通孔が形成され、前記プラズマ生成部において生成されたプラズマは、前記貫通孔を介して前記プラズマ処理室に導入されて前記被処理物を殺菌処理する。 In order to achieve the above object, a plasma processing apparatus according to the present invention is a plasma processing apparatus for sterilizing an object to be processed, comprising: a plasma generation unit for generating plasma at atmospheric pressure from a supplied induction gas ; a plasma processing chamber through which the object to be processed passes along a predetermined transport direction, wherein the plasma generation unit and the plasma processing chamber are separated by a partition wall, and the partition wall includes the plasma One or a plurality of through-holes are formed to communicate between the generation unit and the plasma processing chamber, and plasma generated in the plasma generation unit is introduced into the plasma processing chamber through the through-holes to the object to be processed. be sterilized.

本発明は、プラズマ生成部とプラズマ処理室とが隔離され、大気圧においてプラズマが安定して生成されることにより、被処理物がプラズマ処理室内を搬送される間に、被処理物の全面が大気圧プラズマに晒されるため、被処理物を高速で殺菌することができる。 According to the present invention, the plasma generating section and the plasma processing chamber are separated from each other, and the plasma is stably generated at atmospheric pressure. Since it is exposed to atmospheric pressure plasma, the object to be treated can be sterilized at high speed.

Claims

A plasma processing apparatus for sterilizing an object to be processed,
a plasma generator that generates plasma at atmospheric pressure from the supplied induction gas ;
a plasma processing chamber through which the object to be processed passes along a predetermined transport direction;
with
The plasma generation unit and the plasma processing chamber are separated by a partition wall,
one or a plurality of through-holes are formed in the isolation wall to communicate the plasma generation unit and the plasma processing chamber;
A plasma processing apparatus, wherein the plasma generated in the plasma generation unit is introduced into the plasma processing chamber through the through hole to sterilize the object to be processed.

2. The plasma processing apparatus according to claim 1 , wherein the through hole is provided with a guide portion for guiding the flow direction of the induction gas toward the discharge side in the transport direction.

3. The plasma processing apparatus according to claim 1 , wherein the opening area of said through-hole is set so as to expand from upstream to downstream in the flow direction of said induction gas.

4. The through hole is inclined outward in a width direction orthogonal to the conveying direction from upstream to downstream in a flow direction of the induction gas. 3. The plasma processing apparatus according to .

further comprising a support for supporting the object to be processed passing through the plasma processing chamber;
A support is provided in the plasma processing chamber for supporting the passing object to be processed,
A non-supported area of the surface of the object to be processed that is not supported by the supporting portion is changed as the object to be processed passes through the plasma processing chamber. 2. The plasma processing apparatus according to claim 1, wherein the plasma processing apparatus is set so as to cover the entire surface area of the object.

6. The plasma processing apparatus according to any one of claims 1 to 5, wherein the induction gas contains water vapor.

A money processing apparatus having therein the plasma processing apparatus according to any one of claims 1 to 6,
The object to be processed is money,
A money processing device, wherein the plasma processing device sterilizes the money inserted from the outside .

A plasma processing method using a plasma processing apparatus for sterilizing an object to be processed,
The plasma processing apparatus is
a plasma generator that generates plasma at atmospheric pressure from the supplied induction gas;
a plasma processing chamber through which the object to be processed passes along a predetermined transport direction;
with
The plasma generation unit and the plasma processing chamber are separated by a partition wall,
one or a plurality of through-holes are formed in the isolation wall to communicate the plasma generation unit and the plasma processing chamber;
A plasma processing method, wherein the plasma generated in the plasma generation unit is introduced into the plasma processing chamber through the through hole to sterilize the object to be processed.