JP2022091406A5

JP2022091406A5 -

Info

Publication number: JP2022091406A5
Application number: JP2020204226A
Authority: JP
Filing date: 2020-12-09
Publication date: 2022-09-14

Claims

a mounting base on which an object to be pressurized can be mounted;
a housing facing the mounting base and capable of forming a pressure medium chamber therein;
a medium supply unit capable of supplying a pressure medium into the pressure medium chamber;
a leaf-shaped film-like member disposed between the mounting base and the housing so as to cover the pressurized object;
A pressurizing device capable of repeatedly pressurizing the object to be pressurized by the pressure medium via the film member,
The film-like member is attached to either the mounting base or the housing via a holding jig having a frame-like first member and a second member fitted to the outer peripheral side of the first member. ,
The holding jig holds a first portion near the outer peripheral portion of the film member between the first member and the second member, and holds a second portion inside the first portion to the first portion. A pressurizing device, characterized in that it is configured to be capable of being sucked into a groove provided in an end surface of a member on a contact side with the film-like member.

The pressurizing device according to claim 1, wherein the groove is formed in the contact-side end surface of the first member so as to have an annular shape in plan view.

3. The pressurizing device according to claim 1, wherein the holding jig has a first elastic seal member arranged between the first member and the second member.

The holding jig includes a second elastic sealing member arranged at least on the end face opposite to the second member among the end faces located on both sides of the groove on the contact side end face of the first member. The pressurizing device according to any one of claims 1 to 3, characterized by comprising:

further comprising an auxiliary contact portion that is provided on the inner peripheral side of the first member of the holding jig and that is formed of a convex portion or a concave portion that contacts a third portion of the film member that is inner than the second portion of the film member. The pressurizing device according to any one of claims 1 to 4, characterized by:

6. The pressurizing device according to claim 5, wherein the auxiliary contact portion is provided on the placing surface of the placing base on the outer peripheral side of the object to be pressurized.

The pressurizing device according to claim 5 or 6, wherein the auxiliary contact portion is composed of discontinuous ridges or grooves.

a foil-like member disposed between the film-like member and the pressurized object;
The pressure device according to any one of claims 1 to 7, further comprising an air supply mechanism capable of supplying air between the film-like member and the foil-like member.

9. The method according to any one of claims 1 to 8, wherein the first member comprises a plate-like member that covers a part of the third portion inside the second portion of the film-like member from the first member side. A pressure device according to any one of claims 1 to 3.

having a lower space formed between the film member and the mounting base when the pressure medium chamber is formed;
The pressurizing device according to any one of claims 1 to 9, further comprising a depressurizing section capable of depressurizing the pressure medium chamber and the lower space.

The decompression unit is
a first flow path communicating with the pressure medium chamber;
a second flow path communicating with the lower space;
a bypass channel that bypasses the first channel and the second channel;
a first on-off valve that opens and closes the first flow path;
a second on-off valve that opens and closes the second flow path;
a pressure adjustment mechanism connected to the bypass channel;
11. The pressurizing device according to claim 10, comprising:

The decompression unit is
a first flow path communicating with the pressure medium chamber;
a second flow path communicating with the lower space;
a first on-off valve that opens and closes the first flow path;
a second on-off valve that opens and closes the second flow path;
a first pressure regulating mechanism connected to the first flow path via the first on-off valve;
a second pressure regulating mechanism connected to the second flow path via the second on-off valve;
11. The pressurizing device according to claim 10, comprising:

The first on-off valve has a valve body that moves back and forth to close and open the first flow path,
The valve body is configured such that, when the first on-off valve is in a closed state, a forward end surface thereof is flush with a wall surface of the pressure medium chamber or protrudes from the wall surface. The pressure device according to claim 11 or 12.

A mounting base on which an object to be pressurized can be mounted, a housing arranged opposite to the mounting base and capable of forming a pressure medium chamber therein, and a pressure medium capable of being supplied to the pressure medium chamber. and a sheet-like film-like member disposed between the mounting base and the housing so as to cover the pressurized object, and A holding jig used in a pressurizing device capable of repeatedly pressurizing the object to be pressurized by the pressure medium,
A frame-shaped first member and a second member fitted on the outer peripheral side of the first member are provided, and a first portion near the outer peripheral portion of the film-like member is interposed between the first member and the second member. It is configured to be able to be clamped, and is configured to be capable of sucking a second portion inside the first portion into a groove portion provided in an end surface of the first member on the contact side with the film member.
A holding jig characterized by:

a first elastic seal disposed between the first member and the second member
15. The holding jig according to claim 14, characterized in that:

Further provided is an auxiliary contact portion that is provided on the inner peripheral side of the first member of the holding jig and that is formed of a convex portion or a concave portion that contacts a third portion of the film member that is inner than the second portion of the film member.
16. The holding jig according to claim 14 or 15, characterized in that: