JP2022086098A - Anticorrosive-gas permeable resistant liquid contact member, and diaphragm valve using the same - Google Patents

Abstract

To provide an anticorrosive-gas permeable resistant liquid contact member which effectively suppresses and prevents permeation of corrosive gas generated from a medical fluid while securing good chemical resistance against the medical fluid, avoids corrosion due to the corrosive gas, and effectively improves durability, and a diaphragm valve using the same as a diaphragm.SOLUTION: A diaphragm 30 is composed of an anticorrosive-gas permeable resistant liquid contact member composed of a laminate structure of a liquid contact sheet layer 32 that is brought into contact with a medical fluid and is composed of a perfluorocarbon-based resin, an intermediate sheet layer 34 that is arranged on a side of the liquid contact sheet layer 32 with the medical fluid not brought into contact and is composed of a polyvinylidene fluoride-based resin having tensile elastic modulus of 1,000 MPa or less, and a cushion rubber layer 36 that is arranged on a side opposite to the liquid contact sheet layer 32 of the intermediate sheet layer 34 and is composed of a rubber elastic body.SELECTED DRAWING: Figure 2

Description

The present invention relates to a corrosion-resistant / gas-resistant liquid contact member and a diaphragm valve using the same, and in particular, an instrument, an apparatus, a valve, etc. that handles corrosive liquids such as salt water, hydrochloric acid, concentrated sulfuric acid, and hypochlorite. It relates to a corrosion-resistant and gas-permeable wetted member preferably used in the above, and a diaphragm valve used in a transportation piping line for such corrosive liquid.

Conventionally, a wetted member having corrosion resistance against a corrosive liquid has been used as a diaphragm, which is a membrane plate for isolation, in a valve, a fuel pump, a gas pressure regulator, a controller, etc. It has been used to prevent the working fluid and working mechanism from coming into direct contact with each other, and in particular, using a corrosion-resistant wetted member as a diaphragm, pressing or separating it from the valve seat. As a result, diaphragm valves that block or allow the flow of corrosive liquids (chemicals) are being widely used.

By the way, various proposals have been made for corrosion-resistant liquid contact members to which such corrosive liquids come into contact in order to improve their durability. For example, JP-A-9-196199 and JP-A-9- In Japanese Patent Application Laid-Open No. 196200, a wetted sheet made of a perfluorocarbon resin such as polytetrafluoroethylene or a fluororesin and an ethylene-propylene-diene rubber lined with the wetted sheet (on the side in contact with a corrosive liquid). A corrosion-resistant liquid contact member as a diaphragm, which is composed of a laminated body with a rubber sheet made of a rubber-like elastic body such as EPDM), has been proposed. In the wetted parts of the above, the adverse effects of the corrosive liquid could not be sufficiently avoided for a long period of time.

That is, although the wetted sheet layer made of polytetrafluoroethylene has good chemical resistance, it is used in electrolytic processes such as electroplating, secondary batteries, hydrogen production lines, and electrolysis of salt water. When exposed to corrosive chemicals such as concentrated sulfuric acid and hypochlorous acid, it is not possible to sufficiently block the permeation of corrosive gases such as halogen gas such as chlorine generated from such chemicals. The corrosive gas that has passed through the wetted sheet layer causes chemical deterioration of the backing rubber layer located outside the wetted sheet layer, and further, the corrosive gas of the metal parts used for the diaphragm valve. There is a problem that chemical deterioration is caused by the above, and therefore, there is an inherent problem that the durability of the diaphragm member and the durability of the diaphragm valve are deteriorated.

Japanese Unexamined Patent Publication No. 9-196199 Japanese Unexamined Patent Publication No. 9-196200

Here, the present invention has been made in the background of such circumstances, and the problem to be solved thereof is the permeation of corrosive gas generated from the chemical solution while ensuring good chemical resistance to the chemical solution. Corrosion-resistant and gas-permeable wetted parts that effectively suppress or prevent corrosion, avoid corrosion based on such corrosive gas, and effectively improve durability, and diaphragms. It is to provide the diaphragm valve used as.

Then, in the present invention, in order to solve such a problem, a liquid contact sheet layer made of a perfluorocarbon-based resin in which the chemical solution is brought into contact with one side surface, and the chemical solution of the wet contact sheet layer. An intermediate sheet layer made of a polyvinylidene fluoride resin having a tensile elastic modulus of 1000 MPa or less, which is arranged on the other side where the gas does not contact, and a rubber which is arranged on the opposite side of the intermediate sheet layer to the wetted sheet layer. The gist thereof is a corrosion-resistant and gas-permeable liquid-wetting member characterized by being composed of a laminated structure with a cushion rubber layer made of an elastic body.

According to one of the preferred embodiments of the corrosion-resistant and gas-permeable liquid-contacting member according to the present invention, the polyvinylidene fluoride-based resin provided with the intermediate sheet layer has a melting point of 130 to 170 ° C. be.

Further, according to another preferred embodiment of the corrosion-resistant and gas-permeable liquid-wetting member according to the present invention, the perfluorocarbon-based resin that provides the wet-contact sheet layer is polytetrafluoroethylene.

Further, the corrosion-resistant and gas-permeable wetted member according to the present invention preferably uses ethylene-propylene rubber as the rubber elastic body that provides the cushion rubber layer.

Furthermore, according to one of the desirable other embodiments of the corrosion-resistant and gas-permeable wet-contact member according to the present invention, the wet-contact sheet layer, the intermediate sheet layer, and the cushion rubber layer that give the laminated structure are the same. Each is molded into a predetermined shape, and the laminated structure is configured as a molded body having a certain shape.

In addition, the gist of the present invention is preferably a diaphragm member characterized by being composed of the corrosion-resistant and gas-permeable liquid-contacting member.

Further, the gist of the present invention is preferably a valve seat characterized by being composed of the corrosion-resistant and gas-permeable liquid-contacting member.

Then, in the present invention, the corrosion-resistant and gas-permeable liquid-wetting member having the above-mentioned structure is used as a diaphragm for shutting off or circulating the chemical liquid in the chemical liquid flow path by pressure contacting or separating operation with respect to the valve seat. The diaphragm valve is also the gist.

In addition, as a chemical liquid that is circulated or shut off by such a diaphragm valve, a liquid that generates a corrosive gas is advantageously targeted, and further, a liquid that generates such a corrosive gas is used. Preferably, hydrochloric acid, concentrated sulfuric acid, hypochlorite and the like that are circulated in the pipe in the electrolysis step are targeted.

As described above, in the corrosion-resistant and gas-permeable wetted member according to the present invention, the tensile elasticity is 1000 MPa between the wetted sheet layer made of a perfluorocarbon resin and the cushion rubber layer made of a rubber elastic body. Since it is composed of a laminated structure in which an intermediate sheet layer made of the following polyvinylidene fluoride resin is interposed, the permeation of corrosive gas is effectively blocked by the presence of the intermediate sheet layer. Therefore, deterioration of the outer sheet layer based on such a corrosive gas can be advantageously prevented, thereby improving the durability as a corrosion-resistant and gas-permeable wetted contact member. In addition to being able to be effectively achieved, corrosion of surrounding metal parts can be prevented, and the life thereof can be extended advantageously. Moreover, since the elastic modulus of the polyvinylidene fluoride resin that provides the intermediate sheet layer is close to the elastic modulus of the rubber elastic body that provides the cushion rubber layer, the cushioning property of the cushion rubber layer is effective for the wetted sheet layer. In addition to being able to exert its operating function advantageously, it effectively suppresses or prevents the generation of microcracks in the intermediate sheet layer, maintains its low gas permeability for a long time, and is durable. It will be possible to demonstrate the feature of being able to improve the sex.

A diaphragm valve whose durability as a valve can be significantly improved by using such a corrosion-resistant and gas-permeable liquid contact member as a diaphragm for shutting off or circulating a chemical solution in a diaphragm valve can be used. It could be offered in an advantageous way.

It is a vertical cross-sectional explanatory view which shows one Embodiment of the diaphragm valve to which this invention is applied. It is explanatory drawing which takes out and shows the diaphragm used in the diaphragm valve shown in FIG. 1, (a) is the sectional explanatory view which shows the non-deformation form of the diaphragm in the closed state of the diaphragm valve, (b). ) Is an explanatory diagram showing a state in which the diaphragm valve is subjected to the deformation action of the diaphragm in the open state. It is a vertical cross-sectional explanatory view which shows one of the embodiments of a butterfly valve to which this invention is applied. FIG. 3 is a partial explanatory view showing an enlarged main portion (valve seat portion) of the butterfly valve shown in FIG.

Hereinafter, in order to clarify the present invention in more detail, embodiments of the present invention will be described in detail with reference to the drawings.

First, FIG. 1 shows an example of a diaphragm valve using a corrosion-resistant and gas-permeable wetted member according to the present invention as a diaphragm. There, the diaphragm valve 10 includes an inlet flow path 14 and an outlet flow path 16, and further includes a partition wall 18 located in the middle of the flow paths 14 and 16 and bending the flow path, and such a partition. It has a valve body 12 whose tip surface (upper surface) of the wall 18 is a valve seat 20. Further, a bonnet 22 is attached so as to cover the opening formed above the partition wall 18 of the valve body 12, and the spindle 24 supported by the bonnet 22 is operated by rotating the handle 26. It is possible to move in the vertical direction (axial direction). A diaphragm 30 having a circular or substantially rectangular planar shape, having a central portion attached to the compressor 28 fixed to the lower end portion of the spindle 24 and being able to be deformed and moved in the vertical direction, is a peripheral portion thereof. The opening of the valve body 12 is closed by being sandwiched between the peripheral edge of the opening of the valve body 12 and the lower end of the bonnet 22, while the spindle 24 moves up and down, and eventually the compressor. By the vertical movement of 28, the central portion of the diaphragm 30 is pressed against or separated from the valve seat 20, so that the flow of liquid flowing through the flow paths 14 and 16 can be blocked or passed (circulated). There is.

Then, in the diaphragm valve 10 having such a configuration, the diaphragm 30 that shuts off or communicates between the inlet flow path 14 and the outlet flow path 16 is a corrosion-resistant and gas-resistant contact according to the present invention, as shown in FIG. It is composed of liquid members. That is, the diaphragm 30 is a wetted sheet made of a perfluorocarbon-based resin, in which the chemical liquid circulated in the flow path (14, 16) is brought into contact with the one side surface (lower surface in the figure). The layer 32 and the intermediate sheet layer 34 made of a polyvinylidene fluoride-based resin having a tensile elastic modulus of 1000 MPa or less, which is arranged on the other side (upper side in the figure) of the wetted sheet layer 32 where the chemical solution does not come into contact. The intermediate sheet layer 34 is composed of a laminated structure with a cushion rubber layer 36 made of a predetermined rubber elastic body, which is arranged on the opposite side of the wetted sheet layer 32. Here, the wetted sheet layer 32, the intermediate sheet layer 34, and the cushion rubber layer 36 are each laminated in a form formed into a predetermined shape, and the laminated structure thereof is formed into a certain shape. It is configured as a body, and in a situation where it is not pulled up by the spindle 24, it exhibits a form as shown in FIG. 2 (a). Further, the wetted sheet layer 32 has a thick central portion, and the base portion of the connecting metal fitting 38 for attaching to the compressor 28 is embedded therein, and the connecting metal fitting 38 is the intermediate sheet layer 34. It is projected upward in a form that penetrates the central portion of the cushion rubber layer 36 through the central opening.

Further, in the diaphragm 30, an annular peripheral edge ridge 40 is formed along the peripheral edge portion of the lower surface which is the surface on the wetted contact side of the wetted contact sheet layer 32, and the central portion of the wetted contact sheet layer 32 is formed. A linear ridge 42 extending in the radial direction through the ridge 42 is integrally provided. The peripheral edge ridge 40 is for enhancing the sealing property between the opening peripheral edge of the valve body 12 and the wire when the diaphragm 30 is sandwiched between the valve body 12 and the bonnet 22. The ridge 42 has a fluid barrier property with the valve seat 20 when the diaphragm 30 is deformed and moved downward by the downward operation of the compressor 28 and is pressed against the valve seat 20 of the valve body 12. It is for improving.

The diaphragm 30 shown in FIG. 2A shows an assembled state in the molded form, and usually, in such a form, the diaphragm 30 is assembled to the diaphragm valve 10 and has a central portion of the diaphragm 30. Is pressed against the valve seat 20 by being pressed by the compressor 28, so that the flow of liquid between the inlet flow path 14 and the outlet flow path 16 can be effectively blocked. There is. Further, when the compressor 28 is moved upward by the axial movement of the spindle 24, the diaphragm 30 is pulled upward as shown in FIG. 2B, and is curved upward (protruding). ) It will be deformed in the form. Then, in such a form, as shown in FIG. 1, the diaphragm 30 is not pressed against the valve seat 20 and is separated by a predetermined interval, so that the inlet flow path is separated. A predetermined liquid can be circulated between the 14 and the outlet flow path 16.

By the way, in the diaphragm 30, the wetted contact sheet layer 32 that comes into contact with the chemical solution is generally formed to have a thickness of about 0.8 to 4.5 mm, and the material thereof is In order to ensure corrosion resistance to such chemicals, polytetrafluoroethylene, tetrafluoroethylene-perfluoro (alkyl vinyl ether) copolymer, tetrafluoroethylene-hexafluoropropylene copolymer, ethylene-tetrafluoroethylene copolymer, etc. Various known perfluorocarbon-based resins such as ethylene-chlorotrifluoroethylene copolymer, polychlorotrifluoroethylene polymer, and tetrafluoroethylene-perfluoroalkoxyethylene copolymer resin will be appropriately selected. However, in particular, in the present invention, polytetrafluoroethylene is preferably used.

Further, the cushion rubber layer 36 that backs such a wetted sheet layer 32 is for effectively transmitting the operation of the compressor 28 to the wetted sheet layer 32, and generally has a thickness of about 2 to 15 mm. The material is not particularly limited, and a known material having rubber elasticity is appropriately adopted. For example, ethylene / propylene rubber such as EPDM, acrylic rubber, fluororubber, and butyl rubber are appropriately adopted. , Chloroprene rubber and the like can be mentioned, but among them, ethylene / propylene rubber, particularly EPDM, is preferably used.

The intermediate sheet layer 34 interposed between the wetted sheet layer 32 and the cushion rubber layer 36 blocks the corrosive gas penetrating the thin portion of the wetted sheet layer 32 to block the corrosive gas of the cushion rubber layer 36. The purpose is to avoid deterioration and the like, and it is made of a polyvinylidene fluoride-based resin having a tensile elastic modulus of 1000 MPa or less. Therefore, polyvinylidene fluoride (homopolymer) is advantageously used as the polyvinylidene fluoride-based resin, but vinylidene fluoride is copolymerized with a halogenated comonomer such as hexafluoropropylene, tetrafluoroethylene, or chlorotrifluoroethylene. It is also possible to use a known polyvinylidene fluoride-based copolymer. Then, such a polyvinylidene fluoride-based resin needs to have a tensile elastic modulus of 1000 MPa or less, which effectively prevents microcracks from being induced in the intermediate sheet layer 34. It is possible to maintain the low gas permeability for a long time. The lower limit of such a tensile elastic modulus is generally about 650 MPa. Further, the tensile elastic modulus is obtained according to JIS-K-7161: 2014.

The polyvinylidene fluoride-based resin having such a tensile elastic modulus is available on the market, and for example, those commercially available from Kureha Corporation, Solvay Japan Co., Ltd., etc. are appropriately adopted. .. Then, a predetermined intermediate sheet layer 34 is formed by using such a commercially available polyvinylidene fluoride-based resin, and such an intermediate sheet layer 34 is generally 0.3 to 1.5 mm. It will be formed to a certain thickness. Further, in the exemplary diaphragm 30, the intermediate sheet layer 34 is formed in a form in which an opening is provided in the center so as not to exist on the thick portion in the center of the wetted sheet layer 32. There is. Even if such an opening is provided in the intermediate sheet layer 34, a thick wetted sheet layer 32 is present there, and a lower flange portion of the connecting metal fitting 38 is present in the thick portion. This is because the permeation of the corrosive gas can be sufficiently suppressed or blocked. However, depending on the concentration of the corrosive gas, in order to protect the metal parts such as the spindle, the shape may be such that the upper part of the thick portion is covered.

Further, the polyvinylidene fluoride-based resin constituting the intermediate sheet layer 34 preferably has a melting point of 130 to 170 ° C, more preferably 140 to 160 ° C, whereby the intermediate sheet layer 34 can be used as the intermediate sheet layer 34. It is possible to make the best use of the characteristics of. When the melting point of this polyvinylidene fluoride-based resin is lower than 130 ° C, the gas permeability becomes high, and when it is further lower than 140 ° C, the fluidity becomes high, and when the intermediate sheet layer 34 is formed, the product dimensions are increased. When the melting point exceeds 160 ° C, microcracks are likely to occur in the intermediate sheet layer 34, and when the melting point exceeds 170 ° C, the elastic modulus becomes high. Problems such as heavy valve operating torque will be caused.

As described above, the diaphragm 30 according to the present invention is provided with an intermediate sheet layer 34 made of a polyvinylidene fluoride-based resin having a tensile elastic modulus of 1000 MPa or less between the wetted sheet layer 32 and the cushion rubber layer 36. However, it can be easily understood from the following comparative experimental results that the intermediate sheet layer 34 needs to have a tensile elastic modulus of 1000 MPa or less.

That is, in the comparative test, as shown in FIG. 2, in the diaphragm 30 made of a laminated molded body having a three-layer structure, polyvinylidene fluoride having a tensile elastic modulus of 750 to 850 MPa (melting point: 148 to 154) was used as the intermediate sheet layer 34. The one formed at (° C.) (n = 5) and the one formed at polyvinylidene fluoride (melting point: 173 ° C.) having a tensile modulus of elasticity of 1800 MPa were used, and the diaphragm sizes (diameter) were 25 mm and 50 mm, respectively. The opening and closing test was performed by setting them in the diaphragm valve 10 shown in FIG. 1 and measuring the number of times of opening and closing until microcracks were generated in the intermediate seat layer 34 in the diaphragm 30. did.

The valve opening / closing test was repeated under the conditions of opening / closing cycle operating pressure: 0.4 MPa, 1-minute open operation, and 1-minute closing operation, and after a predetermined number of opening / closing operations, the valve was disassembled. The state of the intermediate seat layer 34 in the diaphragm 30 was examined, and then the diaphragm 30 and the diaphragm valve 10 were reassembled, and the opening / closing test was continued until microcracks were generated in the intermediate seat layer 34. The results were shown in Table 1 below. Further, this valve opening / closing test was carried out in a state where no chemical solution was present in the flow path (14, 16) (in the presence of air). Further, the wetted sheet layer 32 is made of polytetrafluoroethylene as the material, while the cushion rubber layer 36 is made of EPDM as the material.

As is clear from the results in Table 1, the material of the intermediate sheet layer 34 interposed between the wetted sheet layer 32 constituting the diaphragm 30 and the cushion rubber layer 36 according to the present invention has a tensile elasticity of 1000 MPa or less. By using the polyvinylidene fluoride resin of the above, the generation of microcracks in the intermediate sheet layer 34 can be effectively suppressed, whereby the excellent chemical resistance of the vinylidene fluoride resin can be suppressed. And low gas permeation characteristics are advantageously secured, the occurrence of microcracks is prevented for a long period of time, and the permeation of corrosive gas such as halogen gas such as chlorine through such microcracks cushions the gas. The diaphragm 30, which is excellent in durability, effectively suppresses or prevents the deterioration of the rubber layer 36 and the deterioration of chemicals due to the corrosive gas of the metal parts arranged around the diaphragm 30. Further, the diaphragm valve 10 can be advantageously provided.

In addition to the diaphragm 30 in the diaphragm valve 10 as described above, the corrosion-resistant and gas-permeable wetted member according to the present invention can be used as various members that come into contact with corrosive chemicals in various devices and instruments. It can be suitably used, and can be advantageously used, for example, as a valve seat (valve seat) in a butterfly valve as shown in FIG.

Specifically, the butterfly valve 50 shown in FIG. 3 has a valve body 52 having an opening located in the flow path of the chemical solution, and is charged in the valve body 52 and rotated about an axis. A disk-shaped disk that is integrally provided with the stem 54 and is rotated in an opening located in the chemical flow path of the valve body 52 to open or shut off the opening. 56, and further includes a valve seat 60 attached so as to cover the peripheral edge of the opening of the valve body 52. Liners 58 made of polytetrafluoroethylene are provided on the surfaces of the disc 56 on both sides in contact with the chemical solution, respectively, at a predetermined thickness. Further, the arrangement form of the disk 56 shown in FIG. 3 shows a state in which the opening of the valve main body 52 arranged in the chemical solution flow path is closed, and therefore a state in which the flow of the chemical solution is blocked. By being rotated by about 90 °, the opening of the valve body 52 is in a fully open state (a state in which the chemical solution is distributed).

The valve seat 60 on which the disc 56 is seated on the outer peripheral portion thereof is a wetted sheet layer 62 to be brought into contact with the chemical liquid in the chemical liquid flow path and the wetted liquid, as shown in an enlarged manner in FIG. It is composed of a laminated structure having a predetermined shape of an intermediate sheet layer 64 located inside the sheet layer 62 and a cushion rubber layer 66 located inside the intermediate sheet layer 64, and in such a laminated form, It is arranged in an annular shape so as to surround the entire inner peripheral edge of the opening of the valve body 52. In the valve seat 60, the wetted sheet layer 62 is made of a perfluorocarbon resin according to the present invention, and even in the intermediate sheet layer 64, the polyvinylidene fluoride-based having a tensile elastic modulus of 1000 MPa or less. It is made of resin, and the cushion rubber layer 66 is made of a predetermined rubber elastic body.

Therefore, in the butterfly valve 50 having such a configuration, the stem 54 is rotated around the axis of the butterfly valve 50 in order to prevent the flow of the chemical liquid, and the disk 56 is arranged at the position as shown in FIG. The liner 58 provided on the bulging portions 56a and 56a on the outer peripheral portion of the disc 56 is brought into contact with the annular wetted sheet layer 62 in the valve seat 60 over the entire circumference thereof. As a result, the opening in the valve body 52 is closed. At that time, since the valve seat 60 is provided with the cushion rubber layer 66, the wetted sheet layer 62 elastically contacts the peripheral edge portion of the disk 56 with a predetermined pressure, and the valve seat 60 is provided. A more effective flow of the chemical solution is blocked by preventing a gap from being formed between the disk 56 and the disk 56, where the wetted sheet layer 62 and the cushion rubber layer 66 are separated from each other. The intermediate sheet layer 64 according to the present invention is interposed, whereby even if the corrosive gas generated from the chemical solution permeates through the wetted sheet layer 62, it is effectively suppressed from reaching the cushion rubber layer 66. Or it will be prevented, and thus the deterioration of the cushion rubber layer 66 due to the corrosive gas can be effectively prevented, and its durability can be advantageously improved.

Although the typical embodiments of the present invention have been described in detail above, they are merely examples, and the present invention is limited by the specific description relating to such embodiments. It should be understood that it is not to be interpreted as.

For example, the above-mentioned diaphragm valve 10 and butterfly valve 50 are given as examples of those in which the corrosion-resistant and gas-resistant wetted parts according to the present invention can be advantageously used, but they are also used in other devices and instruments. It goes without saying that it can be applied in the same manner, and even in the illustrated diaphragm valve 10 and butterfly valve 50, not only the illustrated structure but also various known diaphragm valves and butterfly valves are used. It goes without saying that it is applicable to the structure.

Further, the wetted seat layer 32, the intermediate seat layer 34 and the cushion rubber layer 36 constituting the diaphragm 30 in the exemplary diaphragm valve 10, and the wetted seat layer 62 constituting the valve seat (valve seat) 60 in the butterfly valve 50, Both the intermediate sheet layer 64 and the cushion rubber layer 66 are separately molded and then laminated to be used as a laminated body having a three-layer structure, and are intermediate between the wetted sheet layers 32 and 62. It can also be used in a laminated structure in which the sheet layers 34 and 64 and the cushion rubber layers 36 and 66 are fixed and integrated with each other.

Further, at least one of the wetted sheet layers 32, 62, the intermediate sheet layers 34, 64 and the cushion rubber layers 36, 66 is not formed into a predetermined product shape, and has a flat sheet shape. It can also be used as it is.

In addition, the cushion rubber layers 36 and 66 are composed only of the rubber elastic body, and the cushion rubber layers 36 and 66 are reinforced by mixing reinforcing fibers in the rubber elastic body or interposing the reinforcing fiber layer. It is also possible to do it.

Furthermore, even in the drive type of the compressor 28 in the example diaphragm valve 10, instead of the manual rotation operation of the handle 26 as in the example, a pneumatic drive method by air pressure or an electric drive method by a motor or the like can be adopted. Therefore, a known drive type is appropriately adopted as the drive type.

10 Diaphragm valve 12 Valve body 14 Inlet flow path 16 Outlet flow path 18 Partition wall 20,60 Valve seat 22 Bonnet 24 Spindle 26 Handle 28 Compressor 30 Diaphragm 32,62 Wet contact sheet layer 34,64 Intermediate sheet layer 36,66 Cushion rubber Layer 38 Connecting bracket 40 Peripheral ridge 42 Linear ridge 50 Butterfly valve 52 Valve body 54 Stem 56 Disc 58 Liner

Claims (9)

A wetted sheet layer made of a perfluorocarbon resin that is brought into contact with the chemical solution on one side surface, and a polyfoil having a tensile elastic modulus of 1000 MPa or less arranged on the other side of the wetted contact sheet layer that is not in contact with the chemical solution. It shall be composed of a laminated structure of an intermediate sheet layer made of a vinylidene-based resin and a cushion rubber layer made of a rubber elastic body arranged on the opposite side of the intermediate sheet layer from the wetted sheet layer. Corrosion resistant and gas permeable liquid contact member. The corrosion-resistant and gas-permeable liquid-wetting member according to claim 1, wherein the polyvinylidene fluoride-based resin that provides the intermediate sheet layer has a melting point of 130 to 170 ° C. The corrosion-resistant and gas-permeable wet-contact member according to claim 1 or 2, wherein the perfluorocarbon-based resin that provides the wet-contact sheet layer is polytetrafluoroethylene. The corrosion-resistant and gas-permeable wetted member according to any one of claims 1 to 3, wherein the rubber elastic body that provides the cushion rubber layer is an ethylene-propylene rubber. The wetted sheet layer, the intermediate sheet layer, and the cushion rubber layer that give the laminated structure are each molded into a predetermined shape, and the laminated structure is configured as a molded body having a certain shape. The corrosion-resistant and gas-permeable liquid-wetting member according to any one of claims 1 to 4, wherein the member is characterized by being. A diaphragm member comprising the corrosion-resistant and gas-permeable liquid-contacting member. A valve seat characterized by being made of the corrosion-resistant and gas-permeable wetted member. The corrosion-resistant and gas-permeable liquid-contact member according to any one of claims 1 to 5 is used as a diaphragm for shutting off or circulating the chemical liquid in the chemical liquid flow path by pressure welding or separation operation to the valve seat. Diaphragm valve characterized by becoming. The diaphragm valve according to claim 8, wherein the chemical solution is a liquid that generates a corrosive gas.

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