JP2022081823A - X-ray diffraction measuring device - Google Patents

Abstract

To suppress variations in measurement results of an X-ray diffraction measuring device 10.SOLUTION: An X-ray diffraction measuring device 10 for emitting an X-ray toward an object to be measured includes: a substrate 26 provided with a detection sensor 40 for detecting an X-ray diffracted by the object to be measured on one surface; and a cooling member 28 provided on an opposite surface side to the one surface of the substrate 26 and having a flow path for flowing cooling water formed therein to cool the substrate 26.SELECTED DRAWING: Figure 2

Description

The present invention relates to an X-ray diffraction measuring device.

Conventionally, the residual stress of the measurement object is measured based on the light receiving signal of the detection sensor that irradiates the measurement object with X-rays from the X-ray emitter and receives the X-rays diffracted by the measurement object. X-ray diffraction measuring devices are known.

In this regard, Patent Document 1 discloses that a cooling device is provided in order to keep the temperature of the X-ray emitter constant.

Japanese Unexamined Patent Publication No. 2013-113734

However, even if the temperature of the X-ray emitter is kept constant, there is a problem that the measurement result of the X-ray diffraction measuring device varies.

The present invention has been made in view of such a problem, and an object of the present invention is to provide an X-ray diffraction measuring device capable of suppressing variations in measurement results.

Through various experiments, the inventors have found that the heat generated by the detection sensor provided on the substrate causes variations in the measurement results. In particular, the detection sensor is a sensor that integrates a sensor unit that detects X-rays diffracted by an object to be measured, such as an SOI (Silicon on Insulator) sensor, and a circuit unit that converts the detected X-rays into electrical signals. In this case, the variation in the measurement results was remarkable, so it was examined to suppress the variation in the measurement results by cooling this.

Specifically, in order to solve the above problems, the X-ray diffraction measuring device according to the first aspect of the present invention is an X-ray diffraction measuring device that emits X-rays toward a measurement object, and is a measurement object. A substrate on which a detection sensor for detecting X-rays diffracted in the above is provided on one surface and a flow path on the other surface of the substrate opposite to the one surface are formed inside to allow cooling water to flow. A cooling member for cooling the substrate is provided.

Further, in the X-ray diffraction measuring device according to the second aspect of the present invention, the cooling member has both thermal conductivity and electrical conductivity, and is sandwiched between the substrate and the cooling member to the substrate and the cooling member. An insulating member that comes into contact with the cooling member and has electrical insulation and thermal conductivity is further provided.

Further, in the X-ray diffraction measuring device according to the third aspect of the present invention, the flow path is formed so as to surround the detection sensor when the cooling member side is translucently viewed from the substrate side.

Further, in the X-ray diffraction measuring device according to the fourth aspect of the present invention, the detection sensor includes a sensor unit that detects X-rays diffracted by the measurement object and a circuit unit that converts the detected X-rays into an electric signal. And are integrated.

Further, in the X-ray diffraction measuring device according to the fifth aspect of the present invention, the detection sensor includes an SOI (Silicon on Insulator) sensor.

Further, the X-ray diffraction measuring apparatus according to the sixth aspect of the present invention further includes an X-ray emitter that emits X-rays toward the object to be measured, and the X-ray emitter is mounted on the cooling member. There is.

Further, in the X-ray diffraction measuring device according to the seventh aspect of the present invention, when the flow path is one flow path, the X-ray emitter is formed with the other flow path for flowing cooling water. There is.

Further, in the X-ray diffraction measuring device according to the eighth aspect of the present invention, the collimator attached to the surface of the cooling member opposite to the insulating member and extended to the substrate side to adjust the X-ray emission range. , Are further provided.

Further, in the X-ray diffraction measuring device according to the ninth aspect of the present invention, the insulating member and the substrate are provided with through holes from which the collimator protrudes.

According to the present invention, variations in measurement results can be suppressed.

It is a figure which shows an example of the whole structure of an X-ray diffraction measurement system. It is a figure which shows an example of a partial structure of an X-ray diffraction measuring apparatus. It is an exploded view of the X-ray diffraction measuring apparatus shown in FIG. It is a bottom view of the X-ray diffraction measuring apparatus shown in FIG. It is a partially enlarged view of the bottom view shown in FIG.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In order to facilitate understanding of the description, the same components are designated by the same reference numerals as possible in the drawings, and duplicate description is omitted.

<Overall configuration>
FIG. 1 is a diagram showing an example of the overall configuration of the X-ray diffraction measurement system 1.
As shown in FIG. 1, the X-ray diffraction measurement system 1 includes, for example, an X-ray diffraction measurement device 10, a door box B, a storage tank 12, and a computer 14. In FIG. 1, the illustration of the X-ray diffraction measuring device 10 is simplified.

The X-ray diffraction measuring device 10 has a function of emitting X-rays toward a measurement object such as a gear or a shaft and measuring the diffraction intensity of the X-rays diffracted from the measurement object.

The door box B surrounds the X-ray diffraction measuring device 10. The door box B has a door, and the user can set the object to be measured in the X-ray diffraction measuring device 10 by opening the door.

The storage tank 12 is configured to be able to store cooling water. There may be a plurality of the storage tanks 12.

The computer 14 is connected to the X-ray diffraction measuring device 10 and has a function of controlling the X-ray diffraction measuring device 10. Further, the computer 14 receives the measurement result (electric signal) of the diffraction intensity from the X-ray diffraction measuring device 10, and analyzes and measures the structure and characteristics of the object to be measured based on the measurement result. In this embodiment, the residual stress of the object to be measured is analyzed and measured based on the measurement result.

<Structure of X-ray diffraction measuring device 10>
FIG. 2 is a diagram showing an example of a partial configuration of the X-ray diffraction measuring device 10. Further, FIG. 3 is an exploded view of the X-ray diffraction measuring device 10 shown in FIG.
As shown in FIGS. 2 and 3, the X-ray diffraction measuring device 10 includes, for example, a tube 20, a collimator 22, a first cooling flow path 24 as the other flow path, a substrate 26, and a cooling member 28. And an insulating member 30.

The tube 20 has a function as an X-ray emitter that generates X-rays and emits the generated X-rays toward an object to be measured. The tube 20 is placed on the cooling member 28.

The collimator 22 is attached to the surface of the cooling member 28 opposite to the insulating member 30 (see FIG. 3), extends to the substrate 26 side, and has a function of adjusting the X-ray emission range by the tube 20. The tip of the collimator 22 projects downward from the substrate 26 (see FIG. 2).

The first cooling flow path 24 is connected to the storage tank 12, and the cooling water sucked up from the storage tank 12 by a pump (not shown) circulates. As a result, the first cooling flow path 24 cools the tube 20.

A detection sensor 40 for detecting X-rays diffracted by an object to be measured is provided on one surface (lower surface in FIGS. 2 and 3) of the substrate 26. As the detection sensor 40, it is preferable that the sensor unit that detects the X-rays diffracted by the object to be measured and the circuit unit that converts the detected X-rays into an electric signal are integrated. Examples of such a detection sensor 40 include an SOI (Silicon on Insulator) sensor.

FIG. 4 is a bottom view of the X-ray diffraction measuring device 10 shown in FIG.
As shown in FIG. 4, two detection sensors 40 are provided on the left and right sides of one surface of the substrate 26. Further, a collimator 22 protrudes between the two detection sensors 40. Further, on one surface of the substrate 26, a connector 42 or the like for transmitting an electric signal converted by the detection sensor 40 to the computer 14 is provided.

Returning to FIGS. 2 and 3, the cooling member 28 is provided on the other side (tube 20 side) opposite to one side of the substrate 26, and is a second cooling flow path for flowing cooling water as one flow path. 32 is formed inside and has a function of cooling the substrate 26. The second cooling flow path 32 is connected to the storage tank 12 or another storage tank, and the cooling water sucked up from the storage tank 12 by a pump (not shown) circulates. As a result, the second cooling flow path 32 cools the cooling member 28, and by extension, the detection sensor 40 of the substrate 26 via the insulating member 30. In other words, the heat of the detection sensor 40 moves to the cooling member 28 via the substrate 26 and the insulating member 30 to cool the detection sensor 40.

FIG. 5 is a partially enlarged view of the bottom view shown in FIG.
As shown in FIG. 5, the second cooling flow path 32 is formed so as to surround the two detection sensors 40 when the cooling member 28 side is translucently viewed from the substrate 26 side. Specifically, when the cooling member 28 is a rectangular body, the second cooling flow path 32 is connected to the cooling flow path 32A extending from one end to the other end in the longitudinal direction of the cooling member 28 and the cooling flow path 32A. , A cooling flow path 32B extending from one end to the other end of the cooling member 28 in the lateral direction, and a cooling flow path 32C connected to the cooling flow path 32B and extending from the other end to one end in the longitudinal direction of the cooling member 28. ,including. The two detection sensors 40 are provided close to each other between the cooling flow path 32A, the cooling flow path 32B, and the cooling flow path 32C.

Returning to FIGS. 2 and 3, the cooling member 28 preferably has thermal conductivity from the viewpoint of enhancing the cooling performance. Specifically, the cooling member 28 preferably has a higher thermal conductivity than water. Further, the cooling member 28 preferably has a higher thermal conductivity than quartz glass. Further, the cooling member 28 is preferably a plate material from the viewpoint of increasing the contact area with the substrate 26. Further, the cooling member 28 preferably does not have electrical conductivity in order to prevent the substrate 26 from being short-circuited. However, in the present embodiment, the case where the cooling member 28 is a copper plate having not only thermal conductivity but also electrical conductivity will be described. In this case, the insulating member 30 is provided between the substrate 26 and the cooling member 28 as follows.

The insulating member 30 is sandwiched between the substrate 26 and the cooling member 28 and comes into contact with the substrate 26 and the cooling member 28, and has electrical insulation and thermal conductivity. Examples of such an insulating member 30 include a silicon sheet. The insulating member 30 and the substrate 26 are provided with through holes 30A and 26A from which the collimator 22 protrudes.

As described above, as shown in FIGS. 2 and 3, the X-ray diffraction measuring device 10 has a configuration in which an insulating member 30, a cooling member 28, and a tube 20 are sequentially laminated on a substrate 26.

<Effect>
As described above, in the present embodiment, the X-ray diffraction measuring device 10 that emits X-rays toward the object to be measured has the substrate 26 provided with the detection sensor 40 that detects the X-rays diffracted by the object to be measured. A cooling member 28 is provided on the other side of the substrate 26 opposite to one surface, a flow path for flowing cooling water is formed inside, and the substrate 26 is cooled.
According to this configuration, even if heat is generated when the detection sensor 40 is driven, the detection sensor 40 is cooled by the cooling member 28, so that the variation in the measurement result by the detection sensor 40 can be suppressed. Further, since the cooling member 28 is provided on the other surface side of the substrate 26, the cooling member 28 can be provided up to the vicinity of the detection sensor 40, and the cooling efficiency can be improved.

Further, in the present embodiment, the cooling member 28 has both thermal conductivity and electrical conductivity, is sandwiched between the substrate 26 and the cooling member 28, and comes into contact with the substrate 26 and the cooling member 28 to be electrically insulated. Further, an insulating member 30 having properties and thermal conductivity is provided.
According to this configuration, the cooling member 28 having thermal conductivity can cool the substrate 26 via the insulating member 30 having thermal conductivity, and even if the cooling member 28 has electrical conductivity. Since it is insulated by the insulating member 30, it is possible to prevent the electronic circuit of the substrate 26 including the detection sensor 40 from being short-circuited. Further, as compared with the case where the substrate 26 and the cooling member 28 are brought into direct contact with each other, it is possible to suppress dew condensation on the substrate 26.

Further, in the present embodiment, the second cooling flow path 32 is formed so as to surround the detection sensor 40 when the cooling member 28 side is translucently viewed from the substrate 26 side.
According to this configuration, the cooling efficiency of the detection sensor 40 can be improved, so that the variation in the measurement result by the detection sensor 40 can be further suppressed.

Further, in the present embodiment, the detection sensor 40 integrates a sensor unit that detects X-rays diffracted by the object to be measured and a circuit unit that converts the detected X-rays into an electric signal.
According to this configuration, since the sensor unit and the circuit unit are integrated, heat is likely to be generated in the detection sensor 40, but the cooling member 28 can suppress the variation in the measurement result caused by the heat generation of the detection sensor 40. ..

Further, in the present embodiment, the detection sensor 40 includes an SOI (Silicon on Insulator) sensor.
According to this configuration, heat is more likely to be generated in the detection sensor 40, but the cooling member 28 can suppress variations in the measurement results caused by the heat generated by the detection sensor 40.

Further, in the present embodiment, an X-ray emitter (tube 20) that emits X-rays toward the object to be measured is further provided, and the tube 20 is mounted on the cooling member 28.
According to this configuration, the position of the tube 20 can be stabilized.

Further, in the present embodiment, the tube 20 is formed with a first cooling flow path 24 for flowing cooling water.
According to this configuration, the tube 20 can be cooled, and heat can be suppressed from being transferred from the tube 20 side to the detection sensor 40 side from the portion in contact with the cooling member 28.

Further, in the present embodiment, the collimator 22 which is attached to the surface of the cooling member 28 opposite to the insulating member 30 and extends to the substrate 26 side to adjust the X-ray emission range is further provided.
According to this configuration, the adhesion between the cooling member 28 and the insulating member 30 can be improved as compared with the case where the collimator 22 is attached to the surface of the cooling member 28 on the insulating member 30 side, so that the cooling efficiency can be improved. Can be done.

Further, in the present embodiment, the insulating member 30 and the substrate 26 are provided with through holes 30A and 26A from which the collimator 22 protrudes.
According to this configuration, even if the collimator 22 has electrical conductivity, it is possible to prevent the electronic circuit of the substrate 26 from being short-circuited. Further, by irradiating X-rays from the middle of the detection sensors 40 arranged on the left and right, the imaging range of the diffraction ring formed by the diffracted X-rays can be expanded.

<Modification example>
The present invention is not limited to the above embodiment. That is, those skilled in the art with appropriate design changes to the above embodiments are also included in the scope of the present invention as long as they have the features of the present invention. Further, the elements included in the above-described embodiment and the modifications described later can be combined as much as technically possible, and the combination thereof is also included in the scope of the present invention as long as the features of the present invention are included. ..

For example, in the above embodiment, the substrate 26 is not provided with the blowing means, but the substrate 26 may be provided with the blowing means in order to prevent dew condensation. In particular, it is preferable that the blowing means is provided on one surface of the substrate 26 provided with the detection sensor 40. Further, it is preferable to blow the air blowing means toward the detection sensor 40. As a result, not only the dew condensation can be suppressed, but also the cooling efficiency of the detection sensor 40 can be further improved.

Further, although the thickness of the insulating member 30 is not mentioned in the above embodiment, it is preferable to make the thickness thinner in order to improve the cooling efficiency of the substrate 26 by the cooling member 28. For example, the insulating member 30 is preferably thinner than the cooling member 28 and the substrate 26.

Further, in the above embodiment, the case where the cooling member 28 is a copper plate has been described, but an aluminum plate or a silicon plate may be used. Here, when the cooling member 28 has an insulating property like a silicon plate, the insulating member 30 can be omitted. However, the other surface of the substrate 26 has irregularities due to soldering or the like, and from the viewpoint of absorbing the irregularities and increasing the contact area with the substrate 26, a flexible member is provided between the substrate 26 and the cooling member 28. It is preferable to provide it in.

10: X-ray diffraction measuring device, 26: substrate, 28: cooling member, 40: detection sensor

Claims (9)

An X-ray diffraction measuring device that emits X-rays toward an object to be measured.
A substrate provided with a detection sensor on one surface for detecting X-rays diffracted by the measurement object, and a substrate.
A cooling member provided on the other side of the substrate opposite to the one surface, a flow path for flowing cooling water is formed inside, and the substrate is cooled.
An X-ray diffraction measuring device comprising. The cooling member has both thermal conductivity and electrical conductivity.
An insulating member that is sandwiched between the substrate and the cooling member and comes into contact with the substrate and the cooling member to have electrical insulation and thermal conductivity.
The X-ray diffraction measuring apparatus according to claim 1. The flow path is formed so as to surround the detection sensor when the cooling member side is translucently viewed from the substrate side.
The X-ray diffraction measuring device according to claim 1 or 2. The detection sensor integrates a sensor unit that detects X-rays diffracted by the measurement object and a circuit unit that converts the detected X-rays into an electric signal.
The X-ray diffraction measuring device according to any one of claims 1 to 3. The detection sensor includes an SOI (Silicon on Insulator) sensor.
The X-ray diffraction measuring device according to claim 4. An X-ray emitter that emits X-rays toward the object to be measured is further provided.
The X-ray emitter is mounted on the cooling member.
The X-ray diffraction measuring device according to any one of claims 1 to 5. When the flow path is one of the flow paths
The X-ray emitter is formed with the other flow path for flowing cooling water.
The X-ray diffraction measuring device according to claim 6. A collimator, which is attached to a surface of the cooling member opposite to the insulating member and extends to the substrate side to adjust the X-ray emission range.
The X-ray diffraction measuring apparatus according to claim 2. The insulating member and the substrate are provided with through holes from which the collimator protrudes.
The X-ray diffraction measuring device according to claim 8.

Images