JP2022079848A - Vacuum breaking valve - Google Patents

Abstract

To provide a vacuum breaking valve capable of easily securing adhesivity to a valve seat while allowing easy replacement of a seal member.SOLUTION: A vacuum breaking valve includes a negative pressure side port part 11 communicating at one end with a vacuum chamber, a positive pressure side port part 12 communicating at one end with the atmosphere, and a switching valve 20 for closing the port parts 11, 12 in the normal state and opening them with manipulation when necessary, the switching valve 20 including a partition wall part 14 formed with a communication hole 13 to bring the other end of the negative pressure side port part 11 into communication with the other end of the positive pressure side port part 12, an operation rod part 21 penetrating through the communication hole 13 and supported movably along an axis Q3 direction by a body 10, a sealed face part 21b capable of contacting a first valve seat part 17 encircling an opening edge 13a on the positive pressure side port part 12 side of the communication hole 13, a seal member 26 capable of being pressed against a second valve seat part 18 on the outer periphery of the first valve seat part 17 from the outer periphery of the sealed face part 21b, and an energizing member 27 for energizing the sealed face part 21b and the seal member 26 toward the partition wall part 14.SELECTED DRAWING: Figure 3

Description

The present invention relates to a vacuum break valve, and more particularly to a vacuum break valve that artificially enables vacuum break.

Conventionally, in order to maintain the vacuum state of the vacuum chamber, a negative pressure side port communicating with the vacuum chamber, a positive pressure side port communicating with the atmosphere side, and a movable valve body for switching the communication state of each of these ports have been used. A vacuum break valve that breaks in vacuum when the valve is opened is known.

At this time, it is known that a valve seat that comes into contact with the valve body, that is, a packing or the like is provided on the fixed side facing the movable valve body, and a sealing member such as the packing or the like is used as the valve seat (for example). , Patent Document 1).

Japanese Unexamined Patent Publication No. 2016-180495

However, in the vacuum break valve described above, since the packing or the like is arranged on the fixed side, the pressure contact force with the movable side is loose and it is difficult to secure the adhesion, and when the sealing member such as the packing deteriorates. There was a problem that it was difficult to replace.

An object of the present invention is to provide a vacuum breaking valve capable of easily ensuring adhesion to a valve seat and easily replacing a seal member.

In order to achieve the above object, the present invention has a negative pressure side port portion formed in a metal main body and having one end communicated with a vacuum chamber, and a positive pressure side port formed in the main body and having one end communicated with the atmosphere. A switching valve provided in the main body, which closes the other end of the negative pressure side port portion and the other end of the positive pressure side port portion in a normal state and manually opens the valve when necessary. The switching valve penetrates the partition wall portion provided in the main body and formed a communication hole for communicating the other end of the negative pressure side port portion and the other end of the positive pressure side port portion, and the communication hole. Contact with the operation rod portion movably supported by the main body along the axial direction and the first valve seat portion provided on the operation rod portion and surrounding the opening edge portion on the positive pressure side port portion side of the communication hole. A possible sealing surface portion, a sealing member provided on the operating rod portion and capable of pressure contacting the second valve seat portion on the outer periphery of the first valve seat portion from the outer periphery of the sealing surface portion, and one end to the operating rod portion. It is provided with an urging member whose side is pressed against each other to urge the sealing surface portion and the sealing member toward the partition wall portion.

The vacuum break valve of the present invention includes a metal main body and a switching valve supported on the main body so as to be movable along the axial direction.

The main body communicates a negative pressure side port portion in which one end communicates with the vacuum chamber, a positive pressure side port portion in which one end communicates with the atmosphere, and the other end of the negative pressure side port portion and the other end of the positive pressure side port portion. A partition wall forming a communication hole and a partition wall are formed respectively.

Further, the partition wall is provided with a first valve seat portion surrounding the opening edge portion on the positive pressure side port portion side of the communication hole, and a second valve seat portion on the outer periphery of the first valve seat portion.

The switching valve includes an operation rod portion that penetrates the communication hole and is movably supported along the axial direction with respect to the main body, a sealing surface portion that can contact the first valve seat portion, and a second valve seat portion. It includes a sealing member that can be pressure-welded, and an urging member that urges the sealing surface portion and the sealing member toward the partition wall portion.

In this way, the switching valve on the movable side is provided with two valve bodies on the inner circumference and the outer circumference around the axis line, and the seal member is arranged on the outer peripheral side of the two valves. It is possible to adopt a seal structure with high adhesion using urging.

Further, by arranging the seal member on the switching valve on the movable side, it is possible to easily replace the seal member due to deterioration or the like.

According to the present invention, the adhesion to the valve seat can be easily ensured, and the seal member can be easily replaced.

It is a perspective view of a vacuum switching valve. It is a side view of a vacuum switching valve. The cross-sectional structure of the vacuum switching valve is shown, (A) is a vertical cross-sectional view in a closed state, and (B) is a vertical cross-sectional view in a valve open state. The cross-sectional structure of the main part of the vacuum switching valve is shown, (A) is an enlarged cross-sectional view of the circled portion of FIG. 3 (A), and (B) is an enlarged cross-sectional view of the circled portion of FIG. 3 (B).

Next, the vacuum break valve according to the embodiment of the present invention will be described with reference to the drawings. In the embodiments shown below, for convenience, a part of the figure, such as chamfering of the mechanical structure and gaps, is shown in a simplified manner. Further, the overall arrangement of the vacuum switching valve in the vertical and horizontal directions as well as in the vertical and horizontal directions is arbitrary depending on the usage environment of the device to which it is applied, but in the following, for convenience, each direction shown in the figure will be described as an example.

In FIGS. 1 and 2, the vacuum break valve 1 is a metal main body 10 and a shaft supported so as to be movable along an axial direction (see the axis Q3 described later) with the upper end side of the drawing protruding from the main body 10. The shape switching valve 20, the metal cover 30 fixed to the main body 10 by a plurality of screws 31 (see FIG. 3) so as to close the lower surface side of the main body 10 shown, and the main body fixed to the upper surface of the main body 10 shown. A bracket 40 for fixing the 10 to various attached portions (not shown) is provided.

As shown in FIG. 3, the main body 10 has a negative pressure side port portion 11 having one end open to the right side in the drawing and communicating with the vacuum chamber, and similarly, the main body 10 has one end open to the right side in the drawing to communicate with the atmosphere. A positive pressure side port portion 12 and a partition wall portion 14 having a communication hole 13 for communicating the other end of the negative pressure side port portion 11 and the other end of the positive pressure side port portion 12 are formed. Further, in the main body 10, a shaft through hole portion 15 is formed above the partition wall portion 14, and a valve body moving space portion 16 having a diameter larger than that of the shaft through hole portion 15 is formed below the partition wall portion 14. In the present embodiment, the partition wall portion 14 and the shaft through hole portion 15 share a part.

The axis Q1 of the negative pressure side port portion 11 and the axis Q2 of the positive pressure side port portion 12 are parallel to each other, and the axis Q3 coaxial with the communication hole 13 and the shaft through hole portion 15 is orthogonal to the axis Q1 and the axis Q2. Therefore, as a whole, the cross-sectional structure forms a communication path in a folded state.

A connecting contact 50 is attached to the open end of the negative pressure side port portion 11 that communicates with the vacuum chamber, and the open end of the positive pressure side port portion 12 that communicates with the atmosphere is a muffler that reduces the vacuum release noise generated when the vacuum breaks. 60 is attached. The connection contact 50 and the muffler 60 can be attached to and detached from the main body 10 by, for example, screw structures of different sexes so that those having different diameters can be attached according to the usage environment.

Further, as shown in FIG. 4, the partition wall portion 14 is located on the outer periphery of the first valve seat portion 17 surrounding the opening edge portion 13a on the positive pressure side port portion 12 side of the communication hole 13 and the first valve seat portion 17. The second valve seat portion 18 and the second valve seat portion 18 are provided in the same plane.

The switching valve 20 is provided via an operation rod portion 21 that penetrates the communication hole 13 and is movably supported along the axis Q3 with respect to the main body 10 and a mounting bolt 22 on the upper end side of the operation rod portion 21 as shown. The cushion body 23, the adjusting nut 24 that is screwed into the mounting bolt 22 to adjust the length (height) of the mounting bolt 22, and the packing for the vacuum seal located above the negative pressure side port portion 11 in the drawing. 25 and.

The operation rod portion 21 is located in the shaft portion 21a on the operation portion side where the upper end of the figure protrudes from the shaft through hole portion 15 and the valve body moving space portion 16 and has a diameter larger than that of the shaft portion 21a. A sealing surface portion 21b that can come into contact with the portion 17, an urging block portion 21c having a larger diameter than the sealing surface portion 21b, and a driven side shaft provided below the urging block portion 21c and protruding from the cover 30. The portion 21d and the portion 21d are integrally formed.

The operation rod portion 21 is provided on the sealing member 26 that can be pressure-contacted with the second valve seat portion 18 on the outer periphery of the first valve seat portion 17 from the outer periphery of the sealing surface portion 21b, and the sealing surface portion 21b provided on the urging block portion 21c. And a plurality of urging members 27 for urging the seal member 26 toward the partition wall portion 14.

The sealing surface portion 21b includes an annular pocket portion 21e having a diameter larger than that of the shaft portion 21a of the operation rod portion 21 and a smaller diameter toward the direction away from the contact surface with the first valve seat portion 17.

The seal member 26 is an annular packing that is partially bitten and held in the annular pocket portion 21e by elasticity so as to be interlocked with the movement of the operation rod portion 21 along the axis Q3 direction. Therefore, the sealing member 26 made of the annular packing has a circular shape whose cross-sectional shape can be deformed, its wall thickness is thicker than the wall thickness in the illustrated height direction of the sealing surface portion 21b, and its inner diameter is that of the annular pocket portion 21e. It is preferable to use one having a smaller diameter than the outer diameter.

The urging member 27 is a spring structure, for example, a coil spring, which is housed in a plurality of storage holes 21f opened in the lower end surface of the urging block portion 21c in the drawing. In addition, other types of springs may be used. In the urging member 27, the lower end of the illustration abuts on the cover 30, the upper end of the illustration abuts on the bottom surface of the storage hole 21f, and the operation rod portion 21 is on the upper side of the drawing, that is, the sealing surface portion 21b is on the first valve seat portion 17. , And the seal member 26 is urged to press contact with the second valve seat portion 18, respectively.

In such a basic configuration, the vacuum break valve 1 according to the present embodiment is formed in a negative pressure side port portion 11 formed in a metal main body 10 and having one end communicated with a vacuum chamber, and an atmosphere formed in the main body 10. The positive pressure side port portion 12 having one end communicated with the main body 10 and the other end of the negative pressure side port portion 11 and the other end of the positive pressure side port portion 12 provided in the main body 10 are closed in normal times and artificially closed when necessary. A switching valve 20 that is opened by operation is provided, and the switching valve 20 is provided in the main body 10 and forms a communication hole 13 that communicates the other end of the negative pressure side port portion 11 and the other end of the positive pressure side port portion 12. The partition wall portion 14 and the operation rod portion 21 that penetrates the communication hole 13 and is movably supported by the main body 10 along the axial direction, and the positive pressure side port portion 12 of the communication hole 13 provided in the operation rod portion 21. A sealing surface portion 21b that can come into contact with the first valve seat portion 17 surrounding the opening edge portion 13a on the side, and a second outer periphery of the first valve seat portion 17 from the outer periphery of the sealing surface portion 21b provided on the operation rod portion 21. It includes a seal member 26 that can be pressed against the valve seat portion 18, and an urging member 27 that has one end side press contacted with the operation rod portion 21 to urge the sealing surface portion 21b and the seal member 26 toward the partition wall portion 14. This makes it possible to easily secure the adhesion to the valve seat and to easily replace the seal member.

Specifically, when the vacuum chamber is in a vacuum state, as shown in FIGS. 3 (A) and 4 (A), the sealing surface portion 21b becomes the first valve seat portion due to the urging of the urging member 27. 17 and the seal member 26 are in pressure contact with the second valve seat portion 18, respectively, to close the negative pressure side port portion 11.

On the other hand, when it is desired to break the vacuum, the cushion body 23 is artificially pushed down with a finger or the like in the illustrated state, so that the operation rod portion 21 moves downward along the axis Q3 against the urging of the urging member 27. Then, at the same time that the sealing surface portion 21b is separated from the first valve seat portion 17, the seal member 26 is separated from the second valve seat portion 18 and the valve is opened, and the atmosphere is changed from the positive pressure side port portion 12 to the negative pressure side port portion 11. Flows in and is destroyed in a vacuum.

At this time, since the muffler 60 is provided in the positive pressure side port portion 12, it is possible to reduce the vacuum release sound generated at the time of vacuum breakage. The muffler 60 may be omitted when the generated vacuum release sound is sufficiently small or not generated, or when the generation of the vacuum release sound is not a particular problem.

As described above, the switching valve 20 on the movable side is provided with a first valve seat portion 17 and a second valve seat portion 18 as two valve bodies on the inner circumference and the outer circumference around the axis Q3, and the outer circumference thereof. Since the seal member 26 that can be pressure-contacted is arranged on the second valve seat portion 18 located on the side, it is possible to adopt a seal structure having high adhesion using the urging of the urging member 27.

Further, by arranging the seal member 26 in contact with the second valve seat portion 18 on the switching valve 20 on the movable side, the operation rod portion can be simply removed by removing the cover 30 from the main body 10 and the mounting bolt 22 from the operation rod portion 21. 21 can be taken out from the main body 10, and the seal member 26 due to deterioration or the like can be easily replaced.

The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit and technical idea.

Hereinafter, embodiments of the present invention have been described in detail with reference to the accompanying drawings. However, it goes without saying that the scope of the technical idea of the present invention is not limited to the embodiments described here. Any person who has ordinary knowledge in the field of the art to which the present invention belongs has come up with the idea of making various changes, modifications, combinations, etc. within the scope of the technical idea of the present invention described in the claims. It's clear that you can. Therefore, the techniques after these changes, modifications, combinations, etc. naturally belong to the scope of the technical idea of the present invention.

Specifically, although not shown, in the above embodiment, the first valve seat portion 17 and the second valve seat portion 18 are located in the same plane, but for example, the first valve seat portion 17 And the second valve seat portion 18, the first valve seat portion 17 has a concave shape (downward in the drawing) higher than the second valve seat portion 18 in the cross-sectional shape shown in FIGS. 3 and 4, or the first valve seat portion 17 May be provided with a step so as to have a convex shape (downward in the drawing) lower than that of the second valve seat portion 18.

In the above description, when there is a description such as "vertical (orthogonal)", "parallel", "plane", etc., the description does not have a strict meaning. That is, those "vertical (orthogonal)", "parallel", and "planar" are "substantially vertical (orthogonal)", "substantially parallel", and "substantially parallel" because tolerances and errors in design and manufacturing are allowed. It means "plane".

In addition, although not illustrated one by one, the present invention is carried out with various modifications within a range not deviating from the gist thereof.

As described above, the vacuum break valve according to the present invention has the effect that the adhesion to the valve seat can be easily ensured and the seal member can be easily replaced, which is artificial. It is useful for all vacuum break valves that enable vacuum break.

1 Vacuum break valve 10 Main body 11 Negative pressure side port part 12 Positive pressure side port part 13 Communication hole 13a Opening edge part 14 Partition wall part 15 Shaft through hole part 16 Valve body movement space part 17 First valve seat part 18 Second valve seat part 20 Switching valve 21 Operation rod part 21a Shaft part 21b Sealing surface part 21c Bounce block part 21d Driven side shaft part 21e Circular pocket part 21f Storage hole 25 Packing 26 Seal member 27 Bounce member 50 Connection joint 60 Muffler Q1 Axis line Q2 Axis line Q3

Claims (4)

The negative pressure side port part, which is formed in a metal body and one end communicates with the vacuum chamber,
A positive pressure side port portion formed in the main body and having one end communicating with the atmosphere,
A switching valve provided on the main body to close the other end of the negative pressure side port portion and the other end of the positive pressure side port portion in a normal state and manually open the valve when necessary.
Equipped with
The switching valve is
A partition wall portion provided on the main body and having a communication hole for communicating the other end of the negative pressure side port portion and the other end of the positive pressure side port portion.
An operation rod portion that penetrates the communication hole and is movably supported by the main body along the axial direction.
A sealing surface portion provided on the operation rod portion and capable of contacting the first valve seat portion surrounding the opening edge portion on the positive pressure side port portion side of the communication hole.
A sealing member provided on the operation rod portion and capable of pressure contact with the second valve seat portion on the outer periphery of the first valve seat portion from the outer periphery of the sealing surface portion.
An urging member whose one end side is pressed against the operation rod portion to urge the sealing surface portion and the sealing member toward the partition wall portion.
A vacuum break valve characterized by being equipped with. The sealing surface portion is
It is provided with an annular pocket portion having a diameter larger than that of the shaft portion of the operation rod portion and having a smaller diameter in a direction away from the contact surface with the first valve seat portion.
The seal member is
An annular packing that is partially bitten and held in the annular pocket portion so as to be interlocked with the movement of the operation rod portion along the axial direction.
The vacuum break valve according to claim 1. The opening edge is chamfered.
The vacuum break valve according to claim 1 or 2, characterized in that. The negative pressure side port portion is
A muffler is attached to the open end on the atmosphere side to reduce the vacuum release noise generated when the vacuum breaks.
The vacuum break valve according to any one of claims 1 to 3, wherein the vacuum break valve is characterized.

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