JP2022061937A - Pressure adjustment vacuum valve - Google Patents

Abstract

To provide a pressure adjustment vacuum valve capable of reducing vibration due to driving of a valve body.SOLUTION: A pressure adjustment vacuum valve comprises: a valve body; a drive unit 71 that drives the valve body to open and close; a control unit 72 as an opening control unit that controls the opening degree of the valve body driven by the drive unit 71; and a control unit 72 as a setting unit that sets drive parameters of valve body drive from a first opening at which the drive starts to a second opening at which the drive stops so as to reduce valve body drive power.SELECTED DRAWING: Figure 1

Description

The present invention relates to a pressure regulated vacuum valve.

In semiconductor manufacturing equipment such as film forming equipment and etching equipment used for manufacturing semiconductors, flat panel displays, touch screen panels, etc., thin film processing, etching processing, etc. are performed in a state where the gas supply is controlled and the pressure is adjusted. Do the process. In such a semiconductor manufacturing apparatus, a vacuum valve for adjusting the pressure of the vacuum chamber and shutting off between the vacuum chamber and the vacuum pump is arranged. The vacuum valve used for pressure adjustment of the vacuum chamber is called a pressure adjustment vacuum valve, an automatic pressure control valve, or the like, and for example, a vacuum valve as described in Patent Document 1 is known.

Japanese Unexamined Patent Publication No. 2018-11260

However, there is a problem that vibration of the valve body is likely to occur at the time of acceleration / deceleration of the valve body drive, particularly at the time of stopping, and the valve body vibration adversely affects the pressure measurement value and the pressure control.

The pressure adjusting vacuum valve according to the embodiment of the present invention includes a valve body, a drive unit for opening and closing the valve body, an opening degree control unit for controlling the opening degree of the valve body driven by the drive unit, and first. It is provided with a setting unit for setting the drive parameter of the valve body drive from the opening degree of the above to the start of the drive to the second opening degree so as to reduce the valve body drive power.

According to the present invention, it is possible to reduce the vibration associated with driving the valve body.

FIG. 1 is a block diagram showing a schematic configuration of a vacuum process apparatus including a pressure regulating vacuum valve. FIG. 2 is a plan view of the pressure adjusting vacuum valve as viewed from the intake port side. FIG. 3 is a diagram showing two types of patterns relating to changes in the valve body opening degree. FIG. 4 is a diagram showing each pressure response curve corresponding to the two types of patterns shown in FIG. FIG. 5 is a diagram showing a drive speed and a torque current in slow-up / slow-down drive. FIG. 6 is a diagram showing a drive pattern when the drive time T'is longer than the drive time T shown in FIG. FIG. 7 is a flowchart showing an example of the drive pattern setting procedure. FIG. 8 is a diagram showing an example of a conventional drive pattern setting method. FIG. 9 is a diagram showing an example of the drive pattern setting method of the present embodiment. FIG. 10 is a diagram showing an example of the functions F (V) and G (V). FIG. 11 is a diagram illustrating a trapezoidal pattern in the first modification. FIG. 12 is a diagram illustrating a triangular pattern in the first modification. FIG. 13 is a diagram illustrating a modification 2. FIG. 14 is a diagram showing an example of calibration mode operation. FIG. 15 is a block diagram of the pressure regulated vacuum valve and the valve controller according to the second embodiment. FIG. 16 is a diagram showing a drive speed, a torque current, and a drive power in the slow-up / slow-down drive. FIG. 17 is a flowchart showing an example of the drive parameter setting process according to the second embodiment. FIG. 18 is a diagram showing an example of driving pattern setting based on the driving amount Δθa at the time of pressure adjustment and the driving time Tu calculated as the upper limit value of the driving time T. FIG. 19 is a diagram showing the functions F1 (V), G11 (V), and G31 (V) in the modified example 3.

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.
-First embodiment-
FIG. 1 is a block diagram showing a schematic configuration of a vacuum process apparatus 100 including the pressure adjusting vacuum valve 1 of the present invention. The vacuum process device 100 is, for example, a CVD device, and a turbo molecular pump 3 is connected to the device chamber 2 via a pressure adjusting vacuum valve 1. The vacuum pump used for the vacuum exhaust of the apparatus chamber 2 is not limited to the turbo molecular pump 3. An auxiliary pump 4 such as a rotary pump or a dry pump is connected to the exhaust side of the turbo molecular pump 3. The pressure adjusting vacuum valve 1 is controlled by the valve controller 7. The turbo molecular pump 3 is controlled by the TMP controller 8. The equipment chamber 2 is provided with a vacuum gauge 6 for measuring the pressure inside the chamber and a mass flow controller (MFC) 5 for controlling the flow rate of the gas introduced into the equipment chamber 2. The MFC 5 is controlled by the device controller 9 of the vacuum process device 100. The pressure measurement value measured by the vacuum gauge 6 is input to the device controller 9 and the valve controller 7.

The valve controller 7 includes a drive unit 71 that drives a motor for driving the opening and closing of the pressure adjustment vacuum valve 1, and a control unit 72 that controls the opening degree of the pressure adjustment vacuum valve 1. The control unit 72 controls the opening degree based on the target pressure input from the device controller 9 and the pressure measurement value input from the vacuum gauge 6, and adjusts the pressure in the device chamber 2 to be the target pressure. The control unit 72 is a digital arithmetic unit, and includes, for example, a central processing unit (CPU), a read-only memory (ROM) for storing a control program, a random access memory (RAM), and an input / output interface (I / O interface). It is composed of a built-in microcomputer and FPGA (Field Programmable Gate Array).

The effective exhaust speed of the exhaust system including the pressure-adjusted vacuum valve 1 and the turbo molecular pump 3 is the combined exhaust speed of the conductance of the pressure-adjusted vacuum valve 1 and the exhaust speed of the turbo molecular pump 3. By changing the valve body opening degree, the conductance of the pressure adjusting vacuum valve 1 changes, and the effective exhaust speed of the exhaust system changes. Then, the pressure adjustment of the device chamber 2 is performed by controlling the valve body opening degree with respect to the flow rate of the gas introduced into the device chamber 2.

FIG. 2 is a plan view of the pressure adjusting vacuum valve 1 as viewed from the intake port side. The valve plate 11 which is a valve body is housed in the valve body 13 of the pressure adjusting vacuum valve 1. An intake port flange 132 having an opening 131 is provided on the intake side of the valve body 13. An exhaust port flange (not shown) to which the turbo molecular pump 3 of FIG. 1 is attached is provided coaxially with the intake port flange 132 on the exhaust side (opposite side to the intake side) of the valve body 13.

The motor 12 that opens and closes the valve plate 11 is driven to rotate in the forward and reverse directions to swing the valve plate 11 in a plane parallel to the intake flange 132. The rotational position of the motor 12 is detected by the encoder 121 provided in the motor 12 and transmitted to the valve controller 7 of FIG. When the valve plate 11 is oscillated, the valve plate 11 slides in the horizontal direction to open and close the valve. The valve plate 11 is driven to open and close between a position having an opening degree of 0% facing the entire opening 131 and a position having an opening degree of 100% retracted from the opening 131.

Next, the control regarding the drive time of the valve plate 11 in the control unit 72 of the valve controller 7 will be described. As described above, when the valve body is driven, especially when the drive is stopped, the valve body vibration is likely to occur, and the valve body vibration adversely affects the measured pressure value and the actual pressure value. The vibration when the valve body is stopped increases as the acceleration when stopped increases. In order to reduce the acceleration, the time required to drive the valve body may be increased, and the longer the drive time, the smaller the acceleration of the valve body drive can be, and the vibration at the time of stopping can be made smaller.

However, if the driving time when the opening degree is changed is long, the pressure response when the opening degree is changed will be affected. The pressure control of the apparatus chamber 2 by the pressure adjusting vacuum valve 1 is performed by the opening degree control of the valve plate 11 based on the pressure response information of the apparatus chamber 2 and the pressure measurement value with respect to the change in the opening degree of the pressure adjusting vacuum valve 1. Here, the pressure response information is change information of the pressure estimated value when it is assumed that the valve body opening degree is changed instantaneously. In reality, it takes time to change the opening, and the longer the drive time, the larger the discrepancy between the change in the estimated pressure value in the pressure response information and the actual pressure change (that is, the change in the measured pressure value). As a result, the pressure control will be affected. Therefore, when the drive time is lengthened to suppress the vibration of the valve body, the influence of the drive time on the pressure response, that is, the influence on the pressure control is within an acceptable range. You need to set the length.

3 and 4 are diagrams for explaining the pressure response when the valve body opening degree θ is changed from θ1 to θ2 (<θ1). FIG. 3 shows two patterns for changing the valve body opening degree θ. The pattern a is a case where it is assumed that the valve body opening degree θ changes instantaneously from θ1 to θ2 at t = 0. The pattern c is a case where it is assumed that the pattern c changes instantaneously from θ1 to θ2 at t = T. FIG. 4 shows the pressure response curves La and Lc when the valve body opening degree θ is changed in the patterns a and c, respectively. La is the pressure characteristic when T = 0, and Lc represents the actual pressure characteristic.

The pressure response can be estimated based on the exhaust equation represented by the following equation (1).
P = Qin / Se (θ)-(V / Se (θ)) × (dP / dt)… (1)
In formula (1), V is the volume of the device chamber 2 (hereinafter referred to as chamber volume V), Se (θ) is the effective exhaust velocity of the exhaust system with respect to the device chamber 2, and Qin is introduced into the device chamber 2. The flow rate of the gas to be produced.

When the equation (1) is solved with the value of P at t = 0 as Pini (initial pressure value: pressure before changing the opening degree), the following equation (2) representing the pressure response curve is obtained.
P (t) = Po · (1-exp (-t / τ)) + Pini · exp (-t / τ) ... (2)
In equation (2), τ is the time constant of the pressure response curve and is given by τ = V / Se (θ). Further, Po is the pressure when the pressure converges to the steady state after the opening degree is changed, and is given by Po = Qin / Se (θ). Since the pressure response curve La (t) in FIG. 4 is a pressure response curve when the valve body opening is θ2, the time constant τ is set to τa = V / Se (θ2) in the equation (2) in the equation (3). expressed. Further, the pressure response curve Lc (t) is obtained by translating the pressure response curve La (t) by + T with respect to the time axis, and has the same time constant τa as the pressure response curve La (t) by the following equation (4). It is represented by.
La (t) = Po (1-exp (-t / τa)) + Pini · exp (-t / τa) ... (3)
Lc (t) = Po (1-exp (-(t-T) / τa)) + Pini · exp (-(t-T) / τa) ... (4)

(How to set the drive time T)
As described above, the drive time T needs to be set so that the influence on the pressure response, that is, the influence on the pressure control is within an acceptable range. Various indexes can be considered as an index showing the influence of the drive time T on the pressure response, but here, attention is paid to the pressure difference ΔPτ at t = τa of the two pressure response curves La and Lc shown in FIG. In FIG. 4, La (τa) is represented by the following equation (5), and ΔPτ is represented by the following equation (6). When the ratio ΔPτ / La (τa) is called the pressure error, the pressure error is expressed by the following equation (7).
La (τa) = 0.63Po + 0.37Pini ... (5)
ΔPτ = La (τa) −Lc (τa)… (6)
Pressure error = [La (τa) -Lc (τa)] / La (τa)… (7)

Now consider the case where T is sufficiently smaller than τa. For example, T = τa / 10. By substituting t = τa and T = τa / 10 into the equations (3) and (4), La (τa) and Lc (τa) are calculated by the following equations (8) and (9).
La (τa) = Po (1-exp (-1)) + Pini · exp (-1)
≒ 0.63Po + 0.37Pini ... (8)
Lc (τa) = Po (1-exp (-(τa-T / 10) / τa)) + Pini · exp (-(τa-T / 10) / τa)
= Po (1-exp (-0.9)) + Pini ・ exp (-0.9)
≒ 0.59Po + 0.41Pini ... (9)
If the equations (8) and (9) are substituted into the equation (7) and Po »Pini is satisfied, the Pini can be ignored, so that the pressure error is about 6% as shown in the following equation (10).
Pressure error = (0.63Po-0.59Po) /0.63Po≈0.06 ... (10)
When the chamber size is large, τa becomes large, so T, which has a similar pressure error, can also be increased.

The pressure error in the equation (7) is caused by the drive time T, and it is sufficient that the influence on the pressure response is negligible. The upper limit of such a pressure error is not uniformly determined, and depends on, for example, the pressure control accuracy required in the process performed in the vacuum chamber. Here, the pressure error required from the viewpoint of such pressure control accuracy is referred to as a requirement error ΔE. The drive time corresponding to this required error ΔE is defined as the drive time Tu as the upper limit value of the drive time T.

Generally, a stepping motor is used for the motor 12 that opens and closes the valve plate 11, and usually, slow-up / slow-down drive as shown in FIG. 5 is performed. FIG. 5 shows the drive speed and the torque current in the slow-up / slow-down drive. Generally, the torque generated by the motor is proportional to the drive current I. In the slow-up / slow-down drive, the drive time T is represented by a slow-up section S1 in which the speed increases, a constant speed section S2 in which the speed is constant at the upper limit speed vmax, and a slow-down section S3 in which the speed decreases. To. Since the area of the trapezoid shown in FIG. 5 is the time integral of the velocity, it represents the amount of change in the opening degree in the drive time T (hereinafter, referred to as the drive amount). The speed in the constant speed section is set to be the fastest in the driving period, and the speed in the constant speed section is the upper limit speed in the driving period. Therefore, the speed in the constant speed section is expressed as the upper limit speed vmax. Generally, in order to perform pressure control at high speed, the speed in the constant speed section is often set to the upper limit speed Vmax of the valve body driving ability.

In the constant speed section S2, a load torque (torque current I2) that compensates for the loss including friction is required in order to drive the valve plate 11 while maintaining a constant speed vmax. In the slow-up section S1, an acceleration torque is required in addition to the load torque, so that the torque current I1 is larger than that of I2. On the contrary, the torque required in the slowdown section S3 is a value obtained by subtracting the acceleration torque (torque current I1-I2) from the load torque (torque current I2). Normally, the load torque is smaller than the acceleration torque, so the torque current I3 in the slowdown section S3 has a negative value. In other words, it is regenerated to the power supply. Here, for the sake of simple explanation, since the absolute value of the slope (absolute value of acceleration) of the slow-up section S1 and the slow-down section S3 is the same, S1 = S3.

FIG. 6 is a diagram showing a drive pattern when the drive amount is the same but the drive time T'is longer than the drive time T shown in FIG. Also in the case of FIG. 6, S21 = S23 is set, and vmax2 <vmax, S21> S1, S22> S2, S23> S3 are set. Since the driving amount is the same in both the case of FIG. 5 and the case of FIG. 6, the trapezoidal area of FIG. 5 and the trapezoidal area of FIG. 6 are equal to each other. Since the load torques in the constant speed sections S2 and S22 are almost the same, the torque currents I2 and I22 are set to I2 = I22.

On the other hand, the absolute value of the inclination (absolute value of acceleration) of the slow-up section S21 and the slow-down section S23 in FIG. 6 is smaller than that in the case of the slow-up section S1 and the slow-down section S3 in FIG. The torque current value to be applied is small in each section. Therefore, I21 <I2, (absolute value of I23) <(absolute value of I3). By setting T'> T in this way, the absolute value of the inclination (absolute value of acceleration) of the slow-up section S21 and the slow-down section S23 becomes small, and the valve is valved when the valve body is driven (particularly when stopped). The vibration of the plate 11 can be suppressed to be smaller, and the adverse effect on the pressure control can be prevented. Further, by setting the drive time T'long within the range of the upper limit value Tu as in the case of FIG. 6, the capacity of the DC power supply to be prepared is reduced as compared with the case of FIG. 5 in which the drive time T is short. In addition, the output power at the time of slow-up can be suppressed.

(How to set the drive pattern)
As described above, once the drive time T is determined, the drive pattern for slow-up / slow-down drive is set according to the drive time T. FIG. 7 is a flowchart showing an example of the drive pattern setting procedure. The drive pattern setting program shown in FIG. 7 is executed by the control unit 72 of the valve controller 7. A standard drive pattern is stored as a reference drive pattern in the memory of the control unit 72.

The flowchart of FIG. 7 starts when the valve body opening degree θ2 (see FIG. 3) after the opening degree is changed is input from the device controller 9. The required error ΔE, which is the pressure error required for the process, is input in advance from the device controller 9. In step S10, the effective exhaust speed Se (θ2) is based on the valve body opening degree θ2 input from the device controller 9 and the opening degree / effective exhaust gas speed correlation Se (θ) stored in the memory of the control unit 72. ) Is calculated. In step S20, the time constant τ = V / Se (θ2) is calculated from the effective exhaust velocity Se (θ2) and the chamber volume V stored in the memory of the control unit 72. In step S30, the upper limit value Tu of the drive time T is set based on the valve body opening degree θ2 input from the device controller 9 and the pressure measurement value Pini measured by the vacuum gauge 6. In step S40, a drive pattern corresponding to the drive time Tu is set based on the reference drive pattern stored in the memory of the control unit 72 and the upper limit value Tu calculated in step S30.

FIG. 8 is a diagram showing an example of a conventional drive pattern setting method. The drive pattern on the left side of the figure shows a reference drive pattern, and the area of the trapezoidal shape is set to the reference drive amount Δθ. In FIG. 8, it is shown as S1 = S3. The drive pattern on the right side of the drawing is a drive pattern in the case of a drive amount Δθa (> Δθ), and is set based on a reference drive pattern. In the conventional drive pattern setting method shown in FIG. 8, in the drive pattern of the drive amount Δθa, the speed in the constant speed section is set to be the same as the speed vmax of the reference pattern, and the lengths of the slow-up section S2 and the slow-down section S3. It is also set to be the same as the reference pattern.

That is, in the conventional drive pattern setting method shown in FIG. 8, slow-up drive and slow-down drive are performed at the same acceleration regardless of the magnitude of the drive amount Δθa, and constant speed drive is performed at the same speed vmax. Therefore, the length of the constant speed section S2 changes according to the magnitude of the drive amount Δθa, but the lengths of the slow-up section S2 and the slow-down section S3 are the same for both drive patterns, so that vibration during drive stop occurs. The impact does not change. In FIG. 8, the case of Δθa> Δθ is shown, but the same applies to the case of Δθa <Δθ.

FIG. 9 is a diagram showing an example of a drive pattern setting method according to the present embodiment. The drive pattern on the left side of the figure is a conventional case, and the drive time Ta with respect to the drive amount Δθa is set by the procedure as described with reference to FIG. The drive pattern shown on the right side of the figure is the drive pattern in the present embodiment, and the drive amount is Δθa, which is the same as the conventional drive pattern on the left side of the figure. Here, in the drive pattern of the embodiment, it is assumed that the ratio S1b / S2b and the ratio S3b / S2b are set to the same values as the corresponding ratios S1 / S2a and S3 / S2a of the conventional drive pattern.

As described above, in the conventional drive pattern setting method, the speed in the constant speed section is set to the upper limit speed Vmax of the valve body drive capability, so that the drive time Ta is set to the shortest possible time. On the other hand, the drive time Tu is the drive time when the pressure error is equal to the upper limit value (= required error ΔE), and is a large value as compared with the drive time Ta in the conventional case. The drive amount Δθa is the same as the drive pattern on the left side of the drawing, but the drive time Tu is Tu> Ta, so the speed vmaxb in the constant speed section is smaller than the speed vmax in the constant speed section in the reference drive pattern. Further, the lengths of the slow-up section S1b, the constant speed section S2b, and the slow-down section S3b are longer than the lengths of the corresponding slow-up section S1, constant speed section S2a, and slow-down section S3 of the conventional drive pattern. As a result, the absolute value of the acceleration (inclination of the hypotenuse) of the slow-up section S1b and the slow-down section S3b becomes smaller than the absolute value of the acceleration of the slow-up section S1 and the slow-down section S3 in the conventional drive pattern, and the vibration It can be reduced.

(Velocity and acceleration in constant speed section)
When the drive time Tu (> Ta) is given, the speed (upper limit speed vmax) and acceleration in the constant speed section are set according to the drive pattern. The upper limit speed vmaxb of the drive pattern of the embodiment shown on the right side of FIG. 9, the absolute value α1 of the acceleration of the slow-up section S1b, and the absolute value α3 of the acceleration of the slow-down section S3b are calculated as follows. Here, the ratio shown in FIG. 9 is expressed as S1 / S2a = S1b / S2b = A1, S3 / S2a = S3b / S2b = A3 using the constants A1 and A3.

Since the sum of each section S1b, S2b, and S3b is Tu, (A1 + 1 + A3) S2b = Tu holds, and S1b, S2b, and S3b are expressed by the following equations (16) to (18).
S1b = B1 ・ Tu ... (16)
S2b = B2 ・ Tu ... (17)
S3b = B3 ・ Tu ... (18)
However, B1 = A1 / (A1 + 1 + A3), B2 = 1 / (A1 + 1 + A3), B3 = A3 / (A1 + 1 + A3).

Since the area of the trapezoid in the drive pattern of the embodiment of FIG. 9 is equal to the drive amount Δθa, the relationship of the following equation (19) holds between the upper limit speed vmaxb and the drive amount Δθa.
vmaxb ・ (S1b / 2 + S2b + S3b / 2) = Δθa ... (19)
When the equation (19) is rearranged using the equations (16) to (18), the equation (20) is obtained, and the maximum velocity vmaxb is calculated by the equation (21).
vmaxb · Tu (B1 + 2 · B2 + B3) = 2Δθa ... (20)
vmaxb = 2D (Δθa / Tu)… (21)
However, D = (A1 + 1 + A3) / (A1 + 2 + A3).

Further, the absolute value α1 of the acceleration in the slow-up section S1b and the absolute value α3 of the acceleration in the slow-down section S3b are
α1 = vmaxb / S1b = vmaxb / (B1 ・ Tu)
= (1 / B1) ・ (vmaxb / Tu)
= (1 / B1) · (2D (Δθa / Tu) / Tu)
= (2D / B1) · (Δθa / Tu ² ) ... (22)
α3 = vmaxb / S3b = vmaxb / (B3 ・ Tu)
= (1 / B3) ・ (vmaxb / Tu)
= (2D / B3) · (Δθa / Tu ² ) ... (23)

Here, when the value of the drive time Tu is set to a value of 0.1τa to which the pressure error can be ignored, the upper limit speed vmaxb and the absolute values α1 and α3 of the acceleration are calculated as follows. The time constant τa is the time constant of the pressure response curve La shown in FIG. 4, and is expressed as τa = V / Se (θ2) using the chamber volume V and the effective exhaust velocity Se (θ2). Substituting Tu = 0.1τa = 0.1 (V / Se (θ2)) into equations (21) to (23) gives equations (24) to (26), respectively.
vmaxb = 20D {Δθa / (V / Se (θ2))}… (24)
α1 = 100 (2D / B1) ・ {Δθa / (V / Se (θ2)) ² }… (25)
α3 = 100 (2D / B3) ・ {Δθa / (V / Se (θ2)) ² }… (26)

As shown in the equations (24) to (26), the values vmaxb, α1 and α3 depend on the chamber volume V and the effective exhaust velocity Se (θ2). Therefore, when the valve body opening θ2 for each control is different, optimization can be achieved by variably setting the values vmaxb, α1, and α3 for each control. Further, since it is complicated to change the above value for each control, it may be a function of only the chamber volume V, which is usually a fixed value. In that case, a representative value is used for the changing effective exhaust velocity Se (θ2). For example, when the effective exhaust speed changes from 1500 L / s to 15 L / s with the change of the opening degree, the geometric mean √ (15 × 1500) = 150 L / s is used as a representative value. In that case, the values vmaxb, α1, and α3 are functions of the chamber volume V as in the following equations (27) to (29).
vmaxb = F (V) = 3000D (Δθa / V)… (27)
α1 = G1 (V) = 200 ・ 150 ² (D / B1) ・ {Δθa / V ² }… (28)
α3 = G3 (V) = 200 ・ 150 ² (D / B3) ・ {Δθa / V ² }… (29)
The drive amount Δθb is set to a fixed value of about 70 deg in the slide type pressure adjustment vacuum valve.

As shown in the following equations (27) to (29), the function F (V) is proportional to 1 / V, and the function G (V) is proportional to 1 / V ² , so that the function F (V), G (V) varies with respect to the chamber volume V as shown in FIG. The values vmaxb, α1 and α3 increase as the chamber volume V decreases, but since there is an upper limit to the valve body driving capacity of the valve controller 7, the chamber volume V decreases and the values of F (V) and G (V). When reaches each upper limit value, the functions F (V) and G (V) are set to constant values. Instead of the functions F (V) and G (V) represented by the formulas (27) to (29), as shown by the broken line, a straight line descending to the right with respect to the increase in the chamber volume V may be used, or the chamber volume may be used. A function that monotonically decreases with increasing V may be used. Further, although not shown, it may be a function that decreases stepwise.

(Modification 1)
In the example shown in FIG. 9, the drive pattern is set so that the ratio S1b / S2b and the ratio S3b / S2b of the drive pattern of the embodiment have the same values as the ratios S1 / S2a and S3 / S2a in the conventional case. In the first modification, the upper limit speed vmaxb is first determined for the calculated Tu. When the upper limit speed vmaxb is set for a given drive amount Δθa and drive time Tu, if Δθa> Tu × vmaxb / 2 is set, the shape of the drive pattern becomes a trapezoid as shown in FIG. Further, when Δθa = Tu × vmaxb / 2, the shape of the drive pattern becomes a triangle as shown in FIG. However, the upper limit speed vmaxb cannot be set as Δθa <Tu × vmaxb / 2. That is, the upper limit speed vmaxb is set as vmaxb ≦ 2Δθa / Tu.

In the pattern A of FIG. 11, S1b = S3b is set, and the shape of the drive pattern is an isosceles trapezoid. The drive amount Δθa is represented by the sum “Δθ1 + Δθ2 + Δθ3” of the drive amount Δθ1 in the section S1b, the drive amount Δθ2 in the section S2b, and the drive amount Δθ3 in the section S3b. On the other hand, the pattern B on the lower side of the drawing shows a case where S1b'≠ S3b'. Since the pattern B is set as S3b <S3b', the magnitude of the acceleration in the slowdown section is smaller than that of the pattern A, and the vibration when the valve body is stopped can be made smaller.

Since the driving amounts Δθa of the patterns A and B are equal, Δθ1 + Δθ3 = Δθ1'+ Δθ3'. That is, in the case of the trapezoidal pattern shown in FIG. 11, when the upper limit speed vmaxb is set as Δθa> Tu × vmaxb / 2 from the drive amount Δθa and the drive time Tu, the value of Δθ1 + Δθ3 is determined. Next, under the condition of "Δθ1 + Δθ3 = constant", the drive amounts Δθ1 and Δθ3 of the sections S1b and S3b, that is, the lengths of the sections S1b and S3b are determined to be desired values.

FIG. 12 is a diagram showing a case where the shape of the drive pattern is a triangle. Pattern C is a case where S1b = S3b is set, and pattern D is a case where S1b'≠ S3b'. Naturally, the value of the upper limit speed vmaxb in FIG. 12 is larger than the value of the upper limit speed vmaxb in FIG. Also in the case of the triangular pattern shown in FIG. 12, the upper limit speed vmaxb is set so as to satisfy Δθa = Tu × vmaxb / 2 from the drive amount Δθa and the drive time Tu. In this case, Δθa = Δθ1 + Δθ3. Then, the drive amounts Δθ1 and Δθ3 of the sections S1b and S3b, that is, the lengths of the sections S1b and S3b are determined to be desired values.

In both the trapezoidal pattern of FIG. 11 and the triangular pattern of FIG. 12, the value of the sum "S1b + S3b" is determined from the drive amount Δθa, the drive time Tu, and the upper limit speed vmaxb. In that case, by setting the value of the sum "S1b + S3b" to a larger value, it is possible to further reduce the vibration when the valve body drive is stopped. The value of the sum "S1b + S3b" becomes the largest when the shape of the drive pattern is a triangle as shown in FIG. The upper limit speed vmaxb at that time is given by vmaxb = 2Δθa / Tu.

(Modification 2)
FIG. 13 is a diagram illustrating a modification 2. In the case of a valve having a high valve body driving ability, it is better to set the upper limit speed vmaxb to a value as high as possible and change only the absolute values α1 and α3 of the acceleration by the function of V. In this case, S1c / S2c ≠ S1 / S2a and S3c / S2c ≠ S3 / S2b, and the absolute values α1 and α3 of the acceleration are smaller than those of the drive pattern of the embodiment on the left side of the figure. In FIG. 13, the upper limit speed vmaxb is set to the upper limit value of the drive capacity of the valve controller 7.

(Calibration mode)
When the pressure is controlled by the pressure adjusting vacuum valve 1, the control is performed based on the chamber volume V of the apparatus chamber 2 and the effective exhaust speed Se (θ) of the exhaust system (pressure adjusting vacuum valve 1, turbo molecular pump 3). Therefore, it is common to measure the chamber volume V of the apparatus chamber 2 and the effective exhaust velocity Se (θ) of the exhaust system before the process of attaching the exhaust system to the apparatus chamber 2 is performed. Since the time constant τ representing the characteristics of the pressure response curve described above is also expressed by the ratio of the chamber volume V and the effective exhaust rate Se (θ) as τ = V / Se (θ), the chamber volume V and the effective Accurately grasping the exhaust speed Se (θ) is important for improving the control accuracy of the pressure control and for appropriately setting the drive time T.

FIG. 14 is a diagram showing an example of calibration mode operation, showing the opening degree θ (solid line L31) of the pressure adjusting vacuum valve 1 and the pressure P (broken line L32) of the device chamber 2 measured by the vacuum gauge 6. It is a thing. In the calibration mode operation shown in FIG. 14, the effective exhaust velocity S (θ) at a plurality of openings θ (i) is first measured, and then the chamber volume V is measured.

In the measurement of the effective exhaust gas velocity S (θ), the pressure (pressure that can be regarded as almost equilibrium pressure) P at a plurality of openings θ (i) is measured with respect to the gas flow rate Qin, and the formula “S (θ) = Qin / The effective exhaust velocity S (θ) is calculated by "P". In the measurement of the chamber volume V, the pressure adjusting vacuum valve 1 is fully closed (effective exhaust speed = 0) in the state of the gas flow rate Qin, and the pressure change rate dP / dt is measured. The chamber volume V is calculated by the calculation formula "V = Qin / (dP / dt)".

First, the opening degree θ is set to 100%, a gas having a predetermined flow rate of Qin is made to flow into the apparatus chamber 2, and the pressure value is stabilized. Next, a process of acquiring pressures at a plurality of openings θ (i) is performed. However, i = 1, 2, 3, ..., N. At time t1, the opening degree θ is changed from 100% to θ (1) = 0%, and when the pressure becomes stable, the pressure value P (1) is measured by the vacuum gauge 6. The opening degree = 0% is a state in which the valve plate 11 is arranged at a position facing the opening 131 as shown in FIG. 2, and the valve plate 11 is pressed against the valve seat (fully closed state). is not. Therefore, the pressure value increases due to the change in the opening degree, but when the pressure increase becomes zero and the pressure value is stable, the pressure value corresponds to the valve conductance at the opening degree = 0%.

Similarly, at times t2, t3, ..., TN, the opening degree is set to θ (2), θ (3), ..., θ (N) = 100%, and a plurality of opening degree θ (2). ), θ (3), ..., θ (N) = 100%, and the pressure values P (2), P (3), ..., P (N) are acquired, respectively. Then, the effective exhaust speed S (θ1) to S (θN) is calculated from the acquired pressure values P (1) to P (N) and the flow rate Qin.

Next, at time ta, the opening degree θ is set to a fully closed state from 100%, and a plurality of pressure values are measured at a plurality of different times in the pressure rising process. Then, the pressure change rate dP / dt is calculated based on the plurality of pressure values, and the chamber volume V is calculated from V = Qin / (dP / dt). The calculated chamber volume V and effective exhaust speeds S (θ1) to S (θN) are stored in a memory provided in the control unit 72 of the valve controller 7.

By executing the calibration mode as described above, more accurate values can be obtained for the chamber volume V and the effective exhaust speed S (θ) in the state where the exhaust system is connected to the apparatus chamber 2. As a result, it is possible to set a more appropriate drive time while ensuring the accuracy of pressure control. Here, the chamber volume V and the effective exhaust speed S (θ) in the state where the exhaust system is connected to the apparatus chamber 2 are obtained by the calibration mode operation and stored in the memory of the control unit. However, the user controls the effective exhaust speed calculation value of the exhaust system calculated from the volume of the apparatus chamber 2 calculated from the design drawing, the conduction data of the pressure adjusting valve 1, and the exhaust property data of the turbo molecular pump. You may store it in the memory of.

-Second embodiment-
In the first embodiment described above, for example, as in the case of FIG. 6, the drive time T', which is a drive parameter, is set long within the range of the upper limit value Tu, and the slow-up section S21 and the slow-down section S23 are set. By reducing the absolute value of tilt (absolute value of acceleration), vibration during valve body drive was reduced. As can be seen from FIG. 5, the magnitude of the absolute value of the acceleration represents the magnitude of the torque current (that is, the electric power), and the vibration is reduced by making the electric power in the slow-up section S21 and the slow-down section S23 smaller. ..

By the way, in the pressure adjusting vacuum valve, for example, the minimum power supply capacity capable of such a driving operation is defined by the specification with respect to the valve body operating speed (or acceleration) set as shown in FIG. The user had to prepare a power supply having a power supply capacity equal to or higher than the minimum power supply capacity. Therefore, when a power supply having a power supply capacity smaller than the minimum power supply capacity is used, for example, motor control in a slow-up section with a large power cannot be performed correctly, and accurate pressure regulation control may not be possible. In the second embodiment, valve control that can prevent the occurrence of such inconvenience, that is, a function of changing the drive parameter setting of the valve body according to the capacity of the supply power supply will be described.

FIG. 15 is a block diagram of the pressure adjusting vacuum valve 1 and the valve controller 7. As described above, the pressure adjusting vacuum valve 1 is provided with a motor 12 for driving the valve plate 11 (see FIG. 2) to open and close, and an encoder 121 for detecting the rotational position of the motor 12. The position of the valve plate 11 can be obtained from the amount of rotation of the motor 12.

The valve controller 7 is connected to the external DC power supply 10 and the device controller 9 via the external interface 73. The target pressure from the device controller 9 is input to the control unit 72 via the communication unit 74. The drive unit 71 drives the motor 12 based on the control signal from the control unit 72. The pressure adjusting vacuum valve 1 is supplied with electric power from the external DC power supply 10, and the power supply unit 75 supplies electric power of a voltage corresponding to each unit such as the drive unit 71 and the control unit 72. Normally, PWM control is used for motor drive. At this time, the drive voltage becomes the voltage of the external DC power supply 10, and the drive current becomes a PWM-controlled and smoothed torque current. As will be described later, the control unit 72 monitors the power supply voltage signal and the torque current signal, compares them with the threshold value, determines them, and issues an alarm. The user can make the settings described later by manually operating the operation unit 76 provided on the valve controller 7. The display unit 77 displays the state, setting, alarm, and the like of the pressure adjusting vacuum valve 1.

Generally, a DC power supply has an overload (overcurrent) protection function, and when an overload is detected, the output voltage is lowered, and when an overload is detected as an output short circuit level, the output is shut down. The output voltage drop of the external DC power supply 10 is detected by the power supply unit 75, and the detection result is input to the control unit 72. In the present embodiment, the overload (overcurrent) is determined by monitoring the voltage drop of the external DC power supply 10, and the drive parameters described later are determined based on the determination result.

FIG. 16 is a graph of changes in driving power added to FIG. Generally, the torque current that contributes to the torque generation generated by the motor is proportional to the drive current Idc supplied from the power source. Assuming that the power supply voltage that is the drive voltage is Vdc, the product of the drive voltage Vdc and the drive current Idc (Vdc × Idc) is the drive power P. Assuming that the power supply capacity is Pps and the maximum power required for a control system other than the drive power is Pα, the maximum value Pmax of the drive power is expressed by the following equation (30).
Pmax = Pps-Pα ... (30)

In FIG. 16, the maximum value of the electric power used for driving the valve body, that is, the electric power that can be provided by the external DC power supply 10, is Pmax, and at this time, the maximum value of the torque current, that is, the motor current is Imax. The drive parameters in valve body drive include drive time, drive acceleration, and drive speed, but in the present embodiment, the maximum speed is limited to Imax so that the motor current during drive does not exceed the maximum value Imax. The valve body drive is controlled by vmax and the magnitude (absolute value) αmax of acceleration.

The setting of the drive parameters according to the capacity of the power supply is carried out when the pressure adjusting vacuum valve 1 is mounted on the chamber and started to be used, or at the first stage of the calibration mode described in the first embodiment. As the drive parameters, the drive speed vmax in the constant speed section S2 of FIG. 16 and the magnitudes α1 and α3 of the accelerations in the slow-up section S1 and the slow-down section S3 can be considered. Here, αmax = α1 = α3, and vmax and αmax are used as driving parameters. vmax and αmax are the magnitudes of the maximum velocity and acceleration corresponding to the above-mentioned Imax (Pmax). The number of setting stages n of the drive parameters (vmax, αmax) will be described by taking the case of n = 5 as an example. That is, regarding the drive parameters, a set of drive parameters (vmax1, αmax1), (vmax2, αmax2), (vmax3, αmax3), (vmax4, αmax4), (vmax5, αmax5) corresponding to the five maximum powers Pmax1 to Pmax5. Is preset in the memory of the control unit 72. It is assumed that Pmax1 <Pmax2 <Pmax3 <Pmax4 <Pmax5.

FIG. 17 is a flowchart showing an example of the drive parameter setting process executed by the control unit 72. In step S110, the preset number of drive parameter stages n is set to 5. In step S120, the drive parameter is set to the drive parameter (vmax5, αmax5) corresponding to the maximum maximum power Pmax5. In step S130, the valve body drive operation is performed with the drive parameters (vmax5, αmax5). For example, αmax5 is used to perform slow-up drive as shown in FIG. At this time, the drive current Imax5 flows, but if this is an overload (overcurrent) for the external DC power supply 10, the output voltage of the external DC power supply 10 drops.

In step S140, it is determined whether or not the output voltage of the external DC power supply 10 has decreased, and if there is a voltage decrease, the process proceeds to step S150, and if there is no voltage decrease, the process proceeds to step S145. If the output voltage of the external DC power supply 10 does not decrease, the external DC power supply 10 can output the maximum power Pmax5. Therefore, in step S145, the drive parameters (vmaxn, αmaxn) having the current number of stages n = 5 are determined as the drive parameters. .. On the other hand, if it is determined in step S140 that there is a voltage drop, the process proceeds to step S150.

In step S150, it is determined whether or not the current drive parameter setting is (vmax1, αmax1). When it is determined that the current drive parameter setting is (vmax1, αmax1) (yes), the external DC power supply 10 cannot be used even with the drive parameter of the smallest power Pmax1, so the process proceeds from step S150 to step S155. Issue an alarm with. For example, the display unit 76 may indicate that the capacity of the external DC power supply 10 is insufficient, or an alarm signal indicating that the capacity of the external DC power supply 10 may be insufficient may be output to the device controller 9. On the other hand, if it is determined in step S150 that the current drive parameter setting is not (vmax1, αmax1), the process proceeds to step S160, the number of stages n of the drive parameter is reduced by 1, and the process returns to step S120.

As described above, the processes from step S120 to step S160 are repeatedly executed until it is determined in step S140 that there is no voltage decrease, and the drive parameter (vmaxn) of the number of stages n when it is determined in step S140 that there is a voltage decrease. , Αmaxn) is determined as the drive parameter actually used. If it is determined in step S140 that there is a voltage drop even with the drive parameter setting (vmax1, αmax1) of the smallest maximum power Pmax1, an alarm is issued in step S155 to notify that the capacity of the external DC power supply 10 is insufficient. ..

(Setting of drive pattern at the time of pressure adjustment control)
FIG. 18 is a diagram showing an example of driving pattern setting based on the driving amount Δθa at the time of pressure adjustment and the driving time Tu calculated as the upper limit value of the driving time T. The drive pattern shown on the left side of FIG. 18 is a drive pattern set based on the drive parameters (vmaxn, αmaxn) and the drive time Tu. When the drive parameters (vmaxn, αmaxn) are determined, the magnitude of the acceleration in the slow-up section S1 and the slow-down section S3 is set as in the following equation (31), and the time in those sections is also automatically determined. The time S2a in the speed section is calculated by the following equation (32). The drive amount Δθ in this drive pattern is generally different from the drive amount Δθa.
α1 = α2 = αmaxn… (31)
S2a = Tu- (S1 + S3) ... (32)

FIG. 18 shows the case where Δθ> Δθa. In this case, the times S1, S2a and S3 are fixed so that the drive amount is Δθa as shown in the drive pattern shown on the right side of the drawing. The speed in the speed section and the magnitude of the acceleration in the slow-up section and slow-down section are corrected to vmaxnb, α11, and α31, and the corrected value is adopted as the drive parameter. vmaxnb <vmaxn and α11 = α31 <αmaxn. When Δθ <Δθa, α1 = α2 = αmaxn is set, and S2a is increased from the value calculated by the equation (32) so that Δθ = Δθa. When Δθ = Δθa, the drive parameters (vmaxn, αmaxn) are used for control.

(Modification 3)
In the first embodiment, vmaxb and α1 are set as in the equations (27) and (28) by using the functions F (V) and G1 (V) of the chamber volume V as shown in FIG. Explained.
vmaxb = F (V) = 3000D (Δθa / V)… (27)
α1 = G1 (V) = 200 ・ 150 ² (D / B1) ・ {Δθa / V ² }… (28)
In the second embodiment, the drive parameters (vmaxn, αmaxn) are determined by the process shown in FIG. 17, and therefore, instead of the functions F (V), G1 (V), and G3 (V) in FIG. 10, FIG. F1 (V), G11 (V), and G31 (V) as shown in 19 are adopted. The values of F1 (V), G11 (V), and G31 (V) are limited to vmaxn and αmaxn in a region where the chamber volume V is small.

(Modification example 4)
In the second embodiment described above, the drive parameter is set to a value corresponding to the power supply capacity in the calibration mode. By the way, a temporary increase in load may occur in driving the valve body due to foreign matter adhering to the inside of the valve. Since the control unit 72 monitors the decrease in the power supply voltage in real time, the change in the setting of the drive parameter can be applied to such a temporary increase in load. That is, if a decrease in the power supply voltage is detected while driving the valve body, the drive parameter is lowered by one step. As a result, it is possible to prevent the overload (overcurrent) protection function of the external DC power supply 10 from operating due to a temporary increase in the load of the valve body drive.

(Modification 5)
In the second embodiment and the modification 4 described above, the control unit 72 is configured to automatically set the drive parameter, but the drive parameter may be input and set from the outside. For example, a configuration may be further added so that the user can operate the operation unit 76 to set the drive parameter. By operating the operation unit 76, the display unit 77 displays the drive parameter setting screen, and a desired drive parameter is selected from a plurality of types of settings. For example, a standard mode and one or more modes having a smaller maximum power than the standard mode may be prepared so that the user can select one from them. The standard mode is set to a mode that uses the drive parameters determined during the calibration mode. Further, instead of the user operating the operation unit 76, the mode to be set may be set by a command from the device controller 9.

It will be understood by those skilled in the art that the above-described exemplary embodiments and variations are specific examples of the following embodiments.

[1] The pressure adjusting vacuum valve according to one aspect includes a valve body, a drive unit for opening and closing the valve body, and an opening degree control unit for controlling the opening degree of the valve body driven by the drive unit. It is provided with a setting unit for setting the drive parameter of the valve body drive from the first opening degree to the start of the drive to the second opening degree so as to reduce the valve body drive power.
By setting the drive parameter of the valve body drive so as to reduce the valve body drive power, it is possible to reduce the vibration accompanying the valve body drive from the start of the drive to the stop of the drive.

[2] In the pressure adjustment vacuum valve according to the above [1], the drive parameter is the valve body drive time, and the setting unit sets the valve body drive time based on an index indicating the influence on the pressure response. Set.
For example, in the first embodiment described above, the valve body drive power is suppressed by applying the pressure error estimation value at the time of pressure control due to the drive time as an index showing the influence on the pressure response, and the valve body is used. It is possible to reduce the vibration of the drive.

[3] In the pressure adjustment vacuum valve according to the above [2], a pressure error estimated value at the time of pressure control due to the drive time is applied as an index showing the influence on the pressure response, and the opening degree control unit is used. , The valve body drive time is set so that the estimated pressure error value is equal to or less than a predetermined allowable value. For example, the above-mentioned pressure error "ΔPτ / La (τa)" is applied to the pressure error estimated value so that the pressure error "ΔPτ / La (τa)" is equal to or less than a predetermined allowable value (= required error ΔE). Set the valve body drive time to Tu.

As shown in FIGS. 3 and 4, when the drive time T is T = 0, the pressure response curve has a time constant τ = V / Se (θ) like the curve La, so that there is no influence on the pressure response. However, when T> 0, the influence of the drive time T on the pressure response occurs as shown in the pressure response curve Lb. For example, in the case of driving with the drive pattern shown on the right side of FIG. 9, in order to reduce the vibration during valve body drive, the larger the drive time T is, the better, but conversely, the larger the drive time T is. The effect on the pressure response increases. Therefore, by setting the drive time to Tu so that the pressure error ΔPτ / La (τa) satisfies the required error ΔE, the vibration is reduced while suppressing the influence on the pressure response.

Further, as described in another setting method of the drive time T, the upper limit value Tu of the drive time T may be set based on the pressure response curves La and Lc shown in FIG. In this case, assuming that the pressure error, which is an index showing the influence on the pressure response, is, for example, 6%, Tu is about 1/10 of the time constant τa. That is, by setting the drive time T to T = 0.1τa, it is possible to reduce the vibration while suppressing the influence on the pressure response.

[4] In the pressure adjusting vacuum valve according to the above [2] or [3], the opening degree control unit calculates the valve body driving time according to the volume of the chamber in which the pressure adjusting vacuum valve is mounted. The time constant τ is expressed as τ = V / Se (θ) from the chamber volume V and the effective exhaust velocity Se (θ) of the exhaust system. Therefore, for example, when the drive time T is set at T = 0.1τa, the time constant τa = V / Se (θ) using the actual volume V of the device chamber 2 is used to reflect the device configuration. An appropriate drive time T can be set.

[5] In the pressure adjusting vacuum valve according to any one of the above [2] to [4], the opening control unit sets the valve body drive speed and the valve body drive acceleration based on the valve body drive time. do. For example, a drive pattern as shown on the right side of the drawing in FIG. 9 is set based on the set drive time Tu. Specifically, it is set as S1b = B1 · Tu, S2b = B2 · Tu, S3b = B3 · Tu and vmaxb = 2D (Δθa / Tu). By setting in this way, the magnitude of the inclination of the hypotenuse of the trapezoidal pattern, that is, the absolute values α1 and α3 of the accelerations of the sections S1b and S3b are made smaller than the conventional case shown in the left side of FIG. It is possible to reduce vibration.

[6] In the pressure adjusting vacuum valve according to the above [5], the opening control unit has the longest sum of the acceleration drive time and the deceleration drive time based on the valve body drive time. The valve body drive speed and the valve body drive acceleration are set. For example, as shown in FIG. 12, a drive pattern having a triangular shape may be adopted. By setting the drive pattern in this way, the value of the sum of the acceleration drive time S1b and the deceleration drive time S3b can be set to be the largest, and the vibration when the valve body drive is stopped can be minimized. ..

[7] In the pressure adjusting vacuum valve according to the above [6], it is preferable that the deceleration drive time is set longer than the acceleration drive time. Thereby, the vibration when the valve body is stopped can be further reduced.

[8] In the pressure adjusting vacuum valve according to any one of the above [5] to [7], the upper limit speed of the valve body drive speed is set to a speed corresponding to the drive upper limit capacity of the drive unit. As a result, the drive time can be shortened while reducing vibration.

[9] In the pressure adjusting vacuum valve according to any one of [2] to [8] above, a calibration process for measuring the volume of the chamber and the effective exhaust speed of the pressure adjusting vacuum valve connected to the chamber is executed. In the calibration process, the valve body is driven with a drive time longer than the valve body drive time set by the opening degree control unit.

In the calibration process as shown in FIG. 14, the valve body opening θ (i) is changed to a plurality of values, and each valve body is based on the pressure value P measured at each valve body opening θ (i). The effective exhaust speed S (θ) at the opening θ (i) is calculated. Since the error of the pressure measurement value P causes an error of the effective exhaust speed S (θ), when acquiring the pressure measurement value P, it is necessary to sufficiently reduce the influence of the vibration when the opening degree is changed on the pressure measurement value P. be. Therefore, it is preferable to set the drive time T when the opening degree is changed in the calibration process to be longer than the valve body drive time set by the opening degree control unit. For example, it is set to about four times the valve body drive time set by the opening degree control unit.

[10] In the pressure adjusting vacuum valve according to the above [1], the driving parameters are the valve body driving speed and the valve body driving acceleration at the time of valve body driving, and the setting unit applies power to the pressure adjusting vacuum valve. The valve body drive maximum power is set based on the output maximum power of the external power supply to be supplied, and the valve body drive speed and the valve body drive acceleration are set so that the drive power is equal to or less than the valve body drive maximum power.
For example, as in the process of steps S130 to S145 of FIG. 17, the valve body drive maximum power is set based on the output maximum power of the external DC power supply 10, and the drive parameter is equal to or less than the output maximum power that does not decrease the output voltage. The valve body drive is controlled by (vmaxn, αmaxn). In this way, since the drive parameters are set according to the maximum outputable power of the external DC power supply 10, it is possible to prevent the occurrence of motor control failure in the slow-up section where the drive power becomes large, and the drive power can be reduced. It is suppressed and vibration can be reduced.

[11] In the pressure adjusting vacuum valve according to the above [10], the setting unit determines the maximum outputable power based on the decrease in the supply voltage of the external power supply when the valve body is driven, and the determination result is used. The drive parameters are set based on the above. For example, as in the process of step S140 in FIG. 17, the maximum outputable power of the external DC power supply 10 is determined based on whether or not the output voltage of the external DC power supply 10 is lowered in the valve body drive operation.

[12] In the pressure adjustment vacuum valve according to the above [1], the drive parameters are the valve body drive speed and the valve body drive acceleration at the time of valve body drive, and the drive parameters for reducing the valve body drive power are input. Further, the setting unit sets the drive parameter input by the input unit as the drive parameter for driving the valve body. For example, the drive parameter for reducing the valve body drive power may be set by the user by operating the operation unit 76, or may be set by a command from the device controller 9 input via the external interface 73. Is also good.

Although various embodiments and modifications have been described above, the present invention is not limited to these contents. For example, one or more of the modifications can be combined with the above-described embodiment. Other aspects considered within the scope of the technical idea of the present invention are also included within the scope of the present invention.

1 ... pressure adjustment vacuum valve, 2 ... device chamber, 3 ... turbo molecular pump, 6 ... vacuum meter, 7 ... valve controller, 8 ... TMP controller, 9 ... device controller, 10 ... external DC power supply, 11 ... valve plate, 12 ... motor, 71 ... drive unit, 72 ... control unit, 73 ... external interface, 74 ... communication unit, 75 ... power supply unit, 76 ... operation unit, 77 ... display unit

Claims (12)

With the valve body,
A drive unit that drives the valve body to open and close,
An opening control unit that controls the opening degree of the valve body driven by the driving unit, and an opening control unit.
A pressure adjusting vacuum valve including a setting unit for setting the driving parameters of the valve body drive from the first opening to the driving stop at the second opening so as to reduce the valve body driving power. .. In the pressure adjusting vacuum valve according to claim 1,
The drive parameter is the valve body drive time.
The setting unit is a pressure adjusting vacuum valve that sets the valve body drive time based on an index indicating the influence on the pressure response. In the pressure adjusting vacuum valve according to claim 2.
As an index showing the influence on the pressure response, the pressure error estimation value at the time of pressure control due to the drive time is applied.
The opening degree control unit is a pressure adjusting vacuum valve that sets the valve body drive time so that the pressure error estimated value is equal to or less than a predetermined allowable value. In the pressure adjusting vacuum valve according to claim 2 or 3.
The opening degree control unit is a pressure-adjusting vacuum valve that calculates the valve body drive time according to the volume of the chamber in which the pressure-adjusting vacuum valve is mounted. In the pressure adjusting vacuum valve according to any one of claims 2 to 4.
The opening degree control unit is a pressure adjusting vacuum valve that sets a valve body drive speed and a valve body drive acceleration based on the valve body drive time. In the pressure adjusting vacuum valve according to claim 5.
The opening degree control unit sets the valve body drive speed and the valve body drive acceleration so that the sum of the acceleration drive time and the deceleration drive time becomes the longest based on the valve body drive time. Vacuum valve. In the pressure adjusting vacuum valve according to claim 6,
A pressure-adjusted vacuum valve in which the deceleration drive time is set longer than the acceleration drive time. In the pressure adjusting vacuum valve according to any one of claims 5 to 7.
The upper limit speed of the valve body drive speed is a pressure adjusting vacuum valve set to a speed corresponding to the drive upper limit capacity of the drive unit. In the pressure adjusting vacuum valve according to any one of claims 2 to 8.
Further equipped with a calibration control unit that performs a calibration process to measure the volume of the chamber and the effective exhaust rate of the pressure regulating vacuum valve connected to the chamber.
In the calibration process, a pressure adjusting vacuum valve in which the valve body is driven with a drive time longer than the valve body drive time set by the opening degree control unit. In the pressure adjusting vacuum valve according to claim 1,
The drive parameters are the valve body drive speed and the valve body drive acceleration when the valve body is driven.
The setting unit sets the valve body drive maximum power based on the maximum outputable power of the external power supply that supplies power to the pressure adjustment vacuum valve, and the valve body is set so that the drive power is equal to or less than the valve body drive maximum power. A pressure-adjusted vacuum valve that sets the drive speed and the valve body drive acceleration. In the pressure adjusting vacuum valve according to claim 10.
The setting unit determines the maximum outputable power based on the decrease in the supply voltage of the external power supply when the valve body is driven, and sets the drive parameter based on the determination result. In the pressure adjusting vacuum valve according to claim 1,
The drive parameters are the valve body drive speed and the valve body drive acceleration when the valve body is driven.
It also has an input unit for inputting drive parameters that reduce the valve body drive power.
The setting unit is a pressure adjusting vacuum valve that sets the drive parameter input by the input unit as the drive parameter for driving the valve body.

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