JP2022011296A - Bolt holding member and assembly of bolt and bolt holding member - Google Patents

Abstract

To provide a bolt holding member which can be used in high temperature and hold a bolt on a fastened member, and to provide an assembly of a bolt and the bolt holding member.SOLUTION: A bolt holding member 10 is made of a metal, holds a bolt on a fastened member, and includes: a cylindrical body part 11; first engagement pieces 12 which extend from the body part 11 to the inner side of the body part 11 so as to incline relative to an axial direction of the body part 11; and second engagement pieces 13 which extend from the body part 11 to the outer side of the body part 11 so as to incline relative to the axial direction.SELECTED DRAWING: Figure 3

Description

The present disclosure relates to a bolt holding member and a combination of a bolt and a bolt holding member.

A retaining ring has been proposed to prevent a bolt fastened to a member to be fastened from falling off (see, for example, Patent Document 1). The retaining ring of Patent Document 1 has a bolt engaging portion and has a substantially covered cylindrical shape, and is inserted into a mounting hole formed on the opposite side of the fastened member to the side where the bolt is inserted to form a bolt. By engaging the bolt engaging portion with the screw thread, the bolt is prevented from coming off.

Republished 2006-022103 Gazette

However, the retaining ring of Patent Document 1 is made of fluororubber or the like. In recent years, due to the high temperature of the fluid used in semiconductor manufacturing equipment, the retaining ring cannot be used when the equipment or the like is heated above the heat resistant temperature of fluororubber. Further, with the miniaturization of semiconductor manufacturing equipment, the bolt holes for fastening the equipment are also reduced, and it is difficult to have a larger holding space than the holes for inserting bolts.

Therefore, one of the purposes of the present disclosure is to provide a bolt holding member that can be used at a high temperature and can hold a bolt to a bolt to be fastened member, and a combination of a bolt and a bolt holding member.

In order to solve the above object, the bolt holding member according to one aspect of the present disclosure is a bolt holding member made of metal and holding a bolt to a member to be fastened, from a cylindrical main body portion and the main body portion. A first locking piece extending inward of the main body so as to be inclined with respect to the axial direction, and a second locking piece extending outward of the main body so as to be inclined with respect to the axial direction from the main body. And.

The first locking piece is located on one end side in the axial direction of the main body portion, and has a first base end portion connected to the main body portion and a first base end portion in the axial direction of the main body portion. It has a first tip portion located on the other end side, and the second locking piece is located on the other end side in the axial direction of the main body portion and is connected to the main body portion. It may have a portion and a second tip portion located on the one end side of the second base end portion in the axial direction of the main body portion.

The first locking piece has a first bent portion that bends outward of the main body portion, and the second locking piece has a second bent portion that bends inward of the main body portion. May be good.

A U-shaped first slit is formed in the main body portion, the first locking piece is formed by the portion surrounded by the first slit, and the U-shaped first slit is formed in the main body portion. Two slits may be formed, and the second locking piece may be formed by a portion surrounded by the second slit.

A U-shaped first slit is formed in the main body portion, the first locking piece is formed by the portion surrounded by the first slit, and the U-shaped first slit is formed in the main body portion. Two slits may be formed, and the second locking piece may be formed by a portion surrounded by the second slit.

A plurality of the first locking piece and the second locking piece may be provided respectively, and may be provided alternately in the circumferential direction of the main body portion.

A combination of a bolt and a bolt holding member according to one aspect of the present disclosure, wherein the bolt comprises a shank and a bolt having a head provided at one end of the shank, and the bolt holding made of metal. The member has a cylindrical shape, and a first locking piece that extends inward of the main body portion into which the shank is inserted and the main body portion so as to be inclined with respect to the axial direction thereof and abuts on the shank. And a second locking piece extending outward from the main body so as to be inclined with respect to the axial direction thereof.

The first locking piece is located on one end side in the axial direction of the main body portion, and is located on the first base end portion connected to the main body portion and the other end side in the axial direction of the main body portion. The second locking piece has a tip portion, and the second locking piece is located on the other end side in the axial direction of the main body portion, and has a second base end portion connected to the main body portion and a shaft of the main body portion. It has a second tip portion located on the one end side in the direction, and the head of the bolt may be located on the one end side in the axial direction of the main body portion.

According to the present disclosure, it is possible to provide a bolt holding member that can be used at a high temperature and can hold a bolt to a fastened member, and a combination of a bolt and a bolt holding member.

It is a front view of the fluid control device. It is a side view of the partial assembly which constitutes the flow path of one system of a fluid control device. FIG. 2 is a cross-sectional view taken along the line IIB-IIB of FIG. 2A. It is a perspective view of the combination of a bolt and a bolt holding member. It is a perspective view of a bolt holding member. It is a top view of the bolt holding member. It is sectional drawing along the IVC-IVC line of FIG. 4B. It is a front view of the combination of a bolt and a bolt holding member, and the bolt holding member shows a cross section. It is explanatory drawing of the method of connecting an on-off valve to a joint block by a combination body, and is the figure which shows the state which inserted the combination body into the through hole of the body of an on-off valve. It is explanatory drawing of the method of connecting an on-off valve to a joint block by a combination body, and is the figure which shows the state which connected the on-off valve to a joint block by a combination body. It is a perspective view of the bolt holding member which concerns on a modification. It is a top view of the bolt holding member which concerns on a modification. It is a perspective view of the combination of a bolt and a bolt holding member which concerns on a modification. It is a perspective view of the bolt holding member which concerns on a modification. It is a top view of the bolt holding member which concerns on a modification.

A bolt holding member and a combination of bolts and bolt holding members according to an embodiment of the present disclosure will be described with reference to the drawings.

The bolt holding member 10 of the present embodiment and the combination 20 of the bolt 1 and the bolt holding member 10 are used, for example, in the fluid control device 100.

FIG. 1 is a front view of the fluid control device 100.
The fluid control device 100 has a metal base plate 110, and a plurality of rail portions 120 (only one is shown in FIG. 1) are provided on the base plate 110. A plurality of joint blocks 130, 140 and various fluid control devices 150A to 150E are installed in any of the plurality of rail portions 120. The plurality of joint blocks 130 and 140 form a flow path through which the fluid flows from the upstream side to the downstream side, respectively.

Here, the "fluid control device" is a device used for a fluid control device that controls a fluid flow, and includes a body that defines a fluid flow path, and at least two flows that open at the bottom surface of the body. It is a device with a roadway. Specific examples include, but are not limited to, an on-off valve (two-way valve) 150A, a regulator 150B, a pressure gauge 150C, an on-off valve (three-way valve) 150D, and a mass flow controller 150E.

For example, a process gas such as ammonia gas is introduced into the flow path of each system of the fluid control device 100 through the introduction pipe 161. Each process gas is supplied to a processing chamber (not shown) through the supply pipe 160.

2A and 2B are partial assemblies 50 constituting a flow path of one system of the fluid control device 100, FIG. 2A is a side view, and FIG. 2B is a partial cross section taken along the line IIB-IIB of FIG. 2A. It is a figure.

As shown in FIGS. 2A and 2B, the assembly 50 is a fluid control device arranged on a rail member 120, joint blocks 140 and 140 arranged on the rail member 120, and joint blocks 140 and 140. It has an on-off valve 150A. Further, gaskets 170 and 170 as sealing members are provided between the body 153 of the on-off valve 150A and the joint blocks 140 and 140. Further, the assembly 50 has a combination 20 composed of a bolt 1 and a bolt holding member 10 for connecting the body 153 of the on-off valve 150A to the joint blocks 140 and 140.

The rail member 120 is, for example, a long member made of metal such as a stainless alloy, and has a rectangular cross section. A groove-shaped guide portion 121 is formed on the upper surface of the rail member 120 along the longitudinal direction.

Each joint block 140 is a metal member such as a stainless alloy and has a rectangular parallelepiped shape. A fitting portion 141 extending along the longitudinal direction is provided on the bottom surface of each joint block 140. Each fitting portion 141 has a shape that can be fitted to the guide portion 121. Each joint block 140 can be inserted from both ends of the rail member 120 in the longitudinal direction.

A substantially U-shaped fluid flow path 140a is formed in each joint block 140. Two flow path openings 140b and 140c of the fluid flow path 140a are opened on the upper surface 143 of each joint block 140. The horizontal portion of each fluid flow path 140a is open to the side surface of each joint block 140. A closing member 142 is provided in the opening to close each opening.

In the longitudinal direction, each joint block 140 is formed with two screw holes 144 and 145 that are opened at the upper surface 143 and extend toward the bottom surface side. The screw holes 144 and 145 are located between the two flow path openings 140b and 140c opened at the upper surface 143. The screw holes 144 and 145 have, for example, M5 having at least three threads and a depth of about 3 mm, but are not limited thereto. The dimensional specifications of the joint block 140 are, for example, about 10 mm in width, about 30 mm in length, about 2.6 mm in diameter of the fluid flow path 140a, and about 13 mm in height, but are not limited thereto. .. The widths of the joint block 140 and the rail member 120 are approximately 10 mm, which are substantially the same.

The on-off valve 150A has an actuator portion 151, a valve portion 152, and a body 153, and is supported by the rail member 120 via the joint block 140. The width of the body 153 is consistent with the width of the joint block 140, and is, for example, about 10 mm, but is not limited thereto.

The body 153 defines a fluid flow path (not shown) that communicates with the fluid flow path 140a of each joint block 140. Through holes 154 for inserting the combination 20 (bolts 1 and bolt holding member 10) are formed at both ends of the body 153 in the longitudinal direction. The diameter of the through hole 154 is about 5.5 mm, and the clearance when only the bolt 1 is inserted is about 0.5 mm.

Next, the bolt holding member 10 and the combination 20 of the bolt 1 and the bolt holding member 10 will be described with reference to the drawings.

FIG. 3 is a perspective view of the combination 20 of the bolt 1 and the bolt holding member 10.
The bolt 1 has a head 2 and a shank 3, and a screw portion 4 is formed on the outer peripheral portion of the shank 3. The bolt holding member 10 is mounted on the outer periphery of the shank 3 of the bolt 1.

4A to 4C are views showing the bolt holding member 10, FIG. 4A is a perspective view, FIG. 4B is a top view, and FIG. 4C is a cross-sectional view taken along the IVC-IVC line of FIG. 4B. be.

The bolt holding member 10 is formed by rolling a single metal thin plate (for example, stainless spring steel) into a cylindrical shape, and the combination 20 is inserted through the through hole 154, so that the thickness is about 0.1 mm. However, it is not limited to this as long as it satisfies strength, springiness, and the like. The bolt holding member 10 includes a main body portion 11, a plurality of first locking pieces 12, and a plurality of second locking pieces 13.

The main body 11 has a cylindrical shape. Both ends of the main body 11 in the circumferential direction are not joined, and have a gap 11a extending from one end in the axial direction to the other end. A plurality of (three in this embodiment) U-shaped first slits 11b and a plurality of (three in this embodiment) U-shaped second slits 11c are provided in the main body portion 11 in the circumferential direction. It is formed alternately in. Each of the first slits 11b and each of the second slits 11c are formed in opposite directions in the vertical direction. That is, in each of the first slits 11b, the U-shaped opening is located on the upper end side in the axial direction of the main body portion 11, and in each of the second slits 11c, the U-shaped opening is located in the axial direction of the main body portion 11. It is located on the lower end side.

Each first locking piece 12 has a substantially rectangular shape and extends inward from the main body 11 so as to be inclined with respect to the axial direction thereof. Each first locking piece 12 is formed by a portion surrounded by each first slit 11b. Each first locking piece 12 is located on the upper end side in the axial direction of the main body portion 11 and is connected to the main body portion 11 from the first base end portion 12A and the first base end portion 12A in the axial direction of the main body portion 11. Also has a first tip portion 12B located on the lower end side. Each first locking piece 12 is bent inward of the main body 11 at the first base end portion 12A thereof. The first tip portion 12B is a free end. Each first locking piece 12 extends from the upper end side to the lower end side of the main body 11. The first locking piece 12 has a first bent portion 12C that bends outward of the main body portion 11 between the first base end portion 12A and the first tip portion 12B.

Each of the second locking pieces 13 has a substantially rectangular shape and extends from the main body portion 11 to the outside of the main body portion 11 so as to be inclined with respect to the axial direction thereof. Each second locking piece 13 is formed by a portion surrounded by each second slit 11c. Each of the second locking pieces 13 is located on the lower end side in the axial direction of the main body portion 11, and is connected to the main body portion 11 with the second base end portion 13A and the second base end portion 13A in the axial direction of the main body portion 11. It has a second tip portion 13B located on the upper end side of the vehicle. Each second locking piece 13 is bent outward from the main body portion 11 at the second base end portion 13A thereof. The second tip portion 13B is a free end. Each second locking piece 13 extends from the lower end side of the main body 11 toward the upper end side. The second locking piece 13 has a second bent portion 13C that bends inward of the main body portion 11 between the second base end portion 13A and the second tip portion 13B.

The inner diameter of the main body 11 is larger than the outer diameter (thread diameter) of the screw portion 4 of the bolt 1, and the outer diameter of the main body 11 is smaller than the inner diameter of the through hole 154. As shown in FIG. 4B, the diameter of the virtual circle C1 formed by the innermost end portion (first bent portion 12C) of the three first locking pieces 12 is the outer diameter (screw) of the threaded portion 4 of the bolt 1. It is configured to be smaller than the mountain diameter). The diameter of the virtual circle C2 formed by the outermost ends (second bent portions 13C) of the three second locking pieces 13 is larger than the inner diameter of the through hole 154.

FIG. 5 is a front view of the combination 20 of the bolt 1 and the bolt holding member 10, and the bolt holding member 10 shows a cross section.

As shown in FIG. 5, in the combination body 20, the shank 3 of the bolt 1 is inserted into the main body portion 11. In this state, the first locking piece 12 is in contact with the shank 3 (screw portion 4) with elastic force. Specifically, the vicinity of the first bent portion 12C of the first locking piece 12 abuts on the shank 3 (screw portion 4), and the first tip portion 12B of the first locking piece 12 is the shank 3 (screw portion 4). ) Is separated. The first locking piece 12 functions as a leaf spring.

Next, a method of connecting the on-off valve 150A to the joint blocks 140 and 140 by the combination body 20 will be described.

6A and 6B are explanatory views of a method of connecting the on-off valve 150A to the joint blocks 140 and 140 by the combination body 20, and FIG. 6A shows the combination 20 being connected to the through-hole 154 of the body 153 of the on-off valve 150A. FIG. 6B is a diagram showing a state in which the on-off valve 150A is connected to the joint blocks 140 and 140 by the combination body 20.

As shown in FIG. 6A, the combination 20 is inserted into the through hole 154 of the body 153. In this state, the second locking piece 13 is in contact with the surface defining the through hole 154 with elastic force. Specifically, the vicinity of the second bent portion 13C of the second locking piece 13 abuts on the surface defining the through hole 154, and the second tip portion 13B of the second locking piece 13 defines the through hole 154. It is separated from the surface. The second locking piece 13 functions as a leaf spring.

As shown in FIG. 6B, the body 153 of the on-off valve 150A to which the combination 20 is mounted is brought into contact with the joint blocks 140 and 140 to rotate each bolt 1, and the screw portion 4 of each bolt 1 is inserted into each screw hole. Screw to 144. In this way, the on-off valve 150A is connected to the joint blocks 140 and 140 by the combination body 20.

As described above, according to the bolt holding member 10 of the present embodiment, the cylindrical main body portion 11 and the first locking extending inward from the main body portion 11 so as to be inclined with respect to the axial direction thereof. A piece 12 and a second locking piece 13 extending outward from the main body 11 so as to be inclined with respect to the axial direction thereof are provided. According to such a configuration, when the bolt 1 is inserted into the main body portion 11, the first locking piece 12 can be brought into contact with the shank 3 of the bolt 1 with elastic force. When the bolt 1 to which the bolt holding member 10 is mounted is inserted into the through hole 154 of the body 153 of the on-off valve 150A, the second locking piece 13 is elastically contacted with the surface defining the through hole 154. Can be made to.

Therefore, the bolt 1 is held by the body 153 of the on-off valve 150A which is a member to be fastened, and the workability at the time of assembling the assembly 50 can be improved. Further, since the bolt holding member 10 is made of metal, it can be applied to a fluid control device used at a high temperature. Further, the bolt holding member 10 allows the bolt 1 to be held by the body 153 without requiring a large space for holding the bolt 1.

The first locking piece 12 is located on the upper end side in the axial direction of the main body portion 11 and is connected to the main body portion 11 as opposed to the first base end portion 12A and the first base end portion 12A in the axial direction of the main body portion 11. It has a first tip portion 12B located on the lower end side. The second locking piece 13 is located on the lower end side in the axial direction of the main body portion 11 and is connected to the main body portion 11 from the second base end portion 13A and the second base end portion 13A in the axial direction of the main body portion 11. Also has a second tip portion 13B located on the upper end side.

Therefore, by inserting the bolt 1 along the direction in which the first locking piece 12 extends from the upper side of the main body portion 11 (the direction from the first base end portion 12A toward the first tip portion 12B), the first locking is performed. It is possible to prevent the piece 12 from being caught by the screw portion 4 of the bolt 1. Therefore, the bolt 1 can be easily inserted into the main body 11. Further, when the bolt holding member 10 is inserted into the body 153 of the on-off valve 150A, the moving direction of the body 153 with respect to the bolt holding member 10 is the direction in which the second locking piece 13 extends (from the second base end portion 13A to the second tip). Since it is the same as the direction toward the portion 13B), it is possible to prevent the second locking piece 13 from being caught on the surface defining the through hole 154. Therefore, the bolt holding member 10 can be easily inserted into the through hole 154 of the body 153.

The first locking piece 12 has a first bent portion 12C that bends toward the outside of the main body portion 11, and the second locking piece 13 has a second bent portion 13C that bends toward the inside of the main body portion 11. is doing. According to such a configuration, when it becomes necessary to pull out the bolt 1 from the bolt holding member 10, the bolt 1 can be easily pulled out from the bolt holding member 10. Further, when it becomes necessary to pull out the bolt holding member 10 from the through hole 154 of the body 153, the bolt holding member 10 can be easily pulled out from the through hole 154 of the body 153.

Since the main body portion 11 has a gap 11a extending from one end to the other end in the axial direction, the main body portion 11 can be expanded and reduced in diameter. Therefore, the bolt 1 can be more easily inserted into the main body 11, and the bolt holding member 10 can be more easily inserted into the through hole 154 of the body 153.

A U-shaped first slit 11b and a second slit 11c are formed in the main body portion 11, and a first locking piece 12 is formed by a portion surrounded by the first slit 11b and surrounded by the second slit 11c. The second locking piece 13 is formed by the slit portion. Therefore, the first locking piece 12 and the second locking piece 13 can be easily provided to the main body 11.

A plurality of the first locking pieces 12 and the second locking pieces 13 are provided respectively, and are provided alternately in the circumferential direction of the main body portion 11. Therefore, the bolt 1 is held in a well-balanced manner with respect to the bolt holding member 10, and the bolt holding member 10 is held in a well-balanced manner with respect to the through hole 154 of the body 153.

The present disclosure is not limited to the above-mentioned examples. A person skilled in the art can make various additions and changes within the scope of the present disclosure.

For example, the main body 11 of the bolt holding member 10 in the above embodiment is not joined at both ends in the circumferential direction of the main body 11, but has a gap 11a extending from one end to the other end in the axial direction. As shown in the bolt holding member 10A shown in FIGS. 7A and 7B, both ends of the main body portion 11 in the circumferential direction may be joined so that the main body portion 11 does not have a gap. The bolt holding member 10A has the same configuration as the bolt holding member 10 except that it has no gap. Even with the bolt holding member 10A having such a configuration, it is possible to obtain substantially the same effect as the bolt holding member 10 described above.

FIG. 8A is a perspective view of the combination 20A of the bolt 1 and the bolt holding member 10B according to the modified example.
FIG. 8B is a perspective view of the bolt holding member 10B according to the modified example.
FIG. 8C is a top view of the bolt holding member 10B according to the modified example.

As shown in FIGS. 8A-8C, each of the first locking pieces 12 and each of the second locking pieces 13 of the bolt holding member 10B does not have a bent portion, and each first locking piece 12 has a first locking piece 12. One base end portion 12A extends flatly to the first tip portion 12B, and each second locking piece 13 extends flatly from the second base end portion 13A to the second tip portion 13B. As shown in FIG. 8C, the diameter of the virtual circle C3 formed by the innermost end portion (first tip portion 12B) of the three first locking pieces 12 is the outer diameter (screw) of the screw portion 4 of the bolt 1. It is configured to be smaller than the mountain diameter). The diameter of the virtual circle C4 formed by the outermost ends (second tip 13B) of the three second locking pieces 13 is larger than the inner diameter of the through hole 154.

In this modification, in the combination 20A, each first locking piece 12 abuts on the shank 3 (screw portion 4) with elastic force, and the first tip portion 12B is closer to the valley side than the ridge of the screw portion 4. Since it enters, it is possible to further prevent the bolt 1 from coming off the bolt holding member 10B.

The method of connecting the on-off valve 150A to the joint blocks 140 and 140 by the combination body 20A is the same as the method of connecting the on-off valve 150A to the joint blocks 140 and 140 by the combination body 20 of the above embodiment.

In the above embodiment, each first locking piece 12 and each second locking piece 13 extend orthogonally to the circumferential direction of the main body portion 11, but may not be orthogonal to each other and may not be orthogonal to each other. It suffices if it is tilted.

1: Bolt 2: Head 3: Shank 10, 10A, 10B: Bolt holding member 11: Main body 11a: Gap 11b: First slit 11c: Second slit 12: First locking piece 12A: First base end 12B : 1st tip 12C: 1st bent 13: 2nd locking piece 13A: 2nd base end 13B: 2nd tip 13C: 2nd bent 20, 20A: combination

Claims (8)

A bolt holding member made of metal that holds a bolt to a member to be fastened.
Cylindrical body and
A first locking piece extending inward from the main body so as to be inclined with respect to the axial direction.
A bolt holding member including a second locking piece extending outward from the main body so as to be inclined with respect to the axial direction thereof. The first locking piece is
A first base end portion located on one end side in the axial direction of the main body portion and connected to the main body portion,
It has a first tip portion located on the other end side of the first base end portion in the axial direction of the main body portion.
The second locking piece is
A second base end portion located on the other end side in the axial direction of the main body portion and connected to the main body portion.
The bolt holding member according to claim 1, further comprising a second tip portion located on one end side of the second base end portion in the axial direction of the main body portion. The first locking piece has a first bent portion that bends outward of the main body portion.
The bolt holding member according to claim 1 or 2, wherein the second locking piece has a second bent portion that bends toward the inside of the main body portion. The bolt holding member according to any one of claims 1 to 3, wherein the main body portion has a gap extending from one end to the other end in the axial direction. A U-shaped first slit is formed in the main body portion, and the first locking piece is formed by a portion surrounded by the first slit.
Any one of claims 1 to 4, wherein a U-shaped second slit is formed in the main body portion, and the second locking piece is formed by a portion surrounded by the second slit. The bolt holding member according to item 1. The first lock piece and the second lock piece are provided in a plurality of each, and are alternately provided in the circumferential direction of the main body portion, according to any one of claims 1 to 5. The described bolt holding member. A combination of bolts and bolt holding members
The bolt is
A bolt having a shank and a head provided at one end of the shank.
The bolt holding member made of metal is
The main body, which has a cylindrical shape and has the shank inserted,
A first locking piece that extends from the main body to the inside of the main body so as to be inclined with respect to the axial direction and abuts on the shank.
A combination of a bolt and a bolt holding member comprising a second locking piece extending outward from the main body so as to be inclined with respect to the axial direction thereof. The first locking piece is
A first base end portion located on one end side in the axial direction of the main body portion and connected to the main body portion,
It has a first tip portion located on the other end side in the axial direction of the main body portion, and has.
The second locking piece is
A second base end portion located on the other end side in the axial direction of the main body portion and connected to the main body portion.
It has a second tip portion located on the one end side in the axial direction of the main body portion, and has.
The combination of a bolt and a bolt holding member according to claim 7, wherein the head of the bolt is located on one end side in the axial direction of the main body.

Images