JP2021534970A - 圧電センサ付き超音波振動装置 - Google Patents
圧電センサ付き超音波振動装置 Download PDFInfo
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- JP2021534970A JP2021534970A JP2021532518A JP2021532518A JP2021534970A JP 2021534970 A JP2021534970 A JP 2021534970A JP 2021532518 A JP2021532518 A JP 2021532518A JP 2021532518 A JP2021532518 A JP 2021532518A JP 2021534970 A JP2021534970 A JP 2021534970A
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- piezoelectric sensor
- piezoelectric
- sensor element
- ultrasonic vibration
- measurement signal
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- 238000005259 measurement Methods 0.000 claims abstract description 51
- 238000000034 method Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 8
- 230000032683 aging Effects 0.000 abstract description 19
- 239000000919 ceramic Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 5
- 230000003679 aging effect Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000028161 membrane depolarization Effects 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000005616 pyroelectricity Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000005619 thermoelectricity Effects 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
Description
したがって示強性状態量の変化を測定するために、第1の測定信号と第2の測定信号が検出される。検出された両測定信号は互いに差し引かれて、差が得られる。場合によっては差が得られる前に、両測定信号の少なくとも1つに重み係数を掛ける必要がある。重み係数は1であってもよい。このようにして測定された差は、示強性状態量の変化の尺度である。
2 圧電アクチュエータ
3 第2の圧電センサ素子
4 第1の圧電センサ素子
5 絶縁部
6 (+)電極
7 測定電極
8 測定電極
9 保持フランジ
10 コンバータ
10´ コンバータ
11 ねじロッド
12 固定ナット
13 基体部
14 基体部
Claims (10)
- ソノトロードとコンバータを備えた超音波振動装置であって、
コンバータは交流電圧を機械的振動に変換するための圧電アクチュエータを有し、
機械的振動の振動振幅に応じて変化する第1の測定信号を出力する第1の圧電センサ素子が設けられており、
機械的振動の振動振幅に応じて変化する第2の測定信号を出力する第2の圧電センサ素子が設けられ、
前記第2の圧電センサ素子は、物理的特性において前記第1の圧電センサ素子とは異なることを特徴とする、超音波振動装置。 - 前記第1の測定信号と前記第2の測定信号を比較する比較装置が設けられていることを特徴とする、請求項1に記載の超音波振動装置。
- 前記第1の圧電センサ素子と前記第2の圧電センサ素子は、異なる焦電特性を有することを特徴とする、請求項1又は2に記載の超音波振動装置。
- 前記第1の圧電センサ素子と前記第2の圧電センサ素子は、結晶子サイズが異なる結晶を有することを特徴とする、請求項1〜3のいずれか1項に記載の超音波振動装置。
- 前記両圧電センサ素子のうち一方の圧電センサ素子は圧電性の単結晶を有し、他方の圧電センサ素子は圧電性の多結晶を有することを特徴とする、請求項4に記載の超音波振動装置。
- 少なくとも1つの圧電センサ素子と、好ましくは両圧電センサ素子がコンバータ内に配置されていることを特徴とする、請求項1〜5のいずれか1項に記載の超音波振動装置。
- 前記圧電アクチュエータと前記両圧電センサ素子は互いに並列に配置されており、好ましくは、前記両圧電センサ素子は縦方向に互いに並列に配置されていることを特徴とする、請求項6に記載の超音波振動装置。
- 前記圧電アクチュエータと前記第1の圧電センサ素子は同じ圧電材料からなることを特徴とする、請求項1〜7のいずれか1項に記載の超音波振動装置。
- 前記圧電アクチュエータは、前記第2の圧電センサ素子よりも縦方向に長いことを特徴とする、請求項1〜8のいずれか1項に記載の超音波振動装置。
- 請求項1〜9のいずれか1項に記載の超音波振動装置の構成要素の示強性状態量の変化を測定する方法であって、第1の重み係数を掛けた第1の測定信号と、第2の重み係数を掛けた第2の測定信号との差を求め、その差を示強性状態量の変化の尺度として利用することを特徴とする方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018120124.9A DE102018120124A1 (de) | 2018-08-17 | 2018-08-17 | Ultraschallschwingeinrichtung mit Piezosensor |
DE102018120124.9 | 2018-08-17 | ||
PCT/EP2019/071297 WO2020035384A1 (de) | 2018-08-17 | 2019-08-08 | Ultraschallschwingeinrichtung mit piezosensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021534970A true JP2021534970A (ja) | 2021-12-16 |
JP7210737B2 JP7210737B2 (ja) | 2023-01-23 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2021532518A Active JP7210737B2 (ja) | 2018-08-17 | 2019-08-08 | 圧電センサ付き超音波振動装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20210297012A1 (ja) |
EP (1) | EP3837512B1 (ja) |
JP (1) | JP7210737B2 (ja) |
CN (1) | CN112513592A (ja) |
DE (1) | DE102018120124A1 (ja) |
WO (1) | WO2020035384A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102021108462A1 (de) | 2021-04-01 | 2022-10-06 | Herrmann Ultraschalltechnik Gmbh & Co. Kg | Konverter mit integriertem Bolzen |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07163163A (ja) * | 1993-12-01 | 1995-06-23 | Canon Inc | 超音波振動子 |
US6286747B1 (en) * | 2000-03-24 | 2001-09-11 | Hong Kong Polytechnic University | Ultrasonic transducer |
JP2005146988A (ja) * | 2003-11-14 | 2005-06-09 | Honda Motor Co Ltd | 点火時期を制御する装置 |
JP2008500904A (ja) * | 2004-05-28 | 2008-01-17 | シュンク・ウルトラシャルテヒニーク・ゲーエムベーハー | 超音波発振器の振動振幅の測定及び/又は調整のための方法及び超音波溶接装置 |
JP2008513217A (ja) * | 2004-09-17 | 2008-05-01 | ヘッセ・ウント・クナイプス・ゲーエムベーハー | 装着具に設置されたセンサを備えた超音波トランスジューサ |
JP2013161955A (ja) * | 2012-02-06 | 2013-08-19 | Seiko Epson Corp | 圧電センサー装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US6279810B1 (en) * | 2000-02-23 | 2001-08-28 | Asm Assembly Automation Ltd | Piezoelectric sensor for measuring bonding parameters |
JP2003126967A (ja) * | 2001-10-16 | 2003-05-08 | Yazaki Corp | 超音波溶着装置 |
GB0809243D0 (en) * | 2008-05-21 | 2008-06-25 | Sra Dev Ltd | Improved torsional mode tissue dissector |
DE102009045942A1 (de) * | 2009-10-23 | 2011-04-28 | Robert Bosch Gmbh | Handgehaltene Elektrowerkzeugmaschine |
JP5754660B2 (ja) * | 2013-06-28 | 2015-07-29 | セイコーエプソン株式会社 | 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置 |
US10073340B2 (en) * | 2014-10-02 | 2018-09-11 | University Of Massachusetts | Protein films and methods of forming the same |
KR20160096935A (ko) * | 2015-02-06 | 2016-08-17 | 경북대학교 산학협력단 | 음향특성 및 열특성을 향상시키는 초음파 트랜스듀서 |
HUE059513T2 (hu) * | 2016-10-20 | 2022-11-28 | Grieshaber Vega Kg | Vibrációs szenzor integrált hõérzékelõvel |
JP7103019B2 (ja) * | 2018-07-25 | 2022-07-20 | セイコーエプソン株式会社 | 圧電駆動装置、ロボットおよびプリンター |
-
2018
- 2018-08-17 DE DE102018120124.9A patent/DE102018120124A1/de active Pending
-
2019
- 2019-08-08 JP JP2021532518A patent/JP7210737B2/ja active Active
- 2019-08-08 US US17/264,836 patent/US20210297012A1/en active Pending
- 2019-08-08 WO PCT/EP2019/071297 patent/WO2020035384A1/de unknown
- 2019-08-08 CN CN201980052019.1A patent/CN112513592A/zh active Pending
- 2019-08-08 EP EP19755309.2A patent/EP3837512B1/de active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07163163A (ja) * | 1993-12-01 | 1995-06-23 | Canon Inc | 超音波振動子 |
US6286747B1 (en) * | 2000-03-24 | 2001-09-11 | Hong Kong Polytechnic University | Ultrasonic transducer |
JP2005146988A (ja) * | 2003-11-14 | 2005-06-09 | Honda Motor Co Ltd | 点火時期を制御する装置 |
JP2008500904A (ja) * | 2004-05-28 | 2008-01-17 | シュンク・ウルトラシャルテヒニーク・ゲーエムベーハー | 超音波発振器の振動振幅の測定及び/又は調整のための方法及び超音波溶接装置 |
JP2008513217A (ja) * | 2004-09-17 | 2008-05-01 | ヘッセ・ウント・クナイプス・ゲーエムベーハー | 装着具に設置されたセンサを備えた超音波トランスジューサ |
JP2013161955A (ja) * | 2012-02-06 | 2013-08-19 | Seiko Epson Corp | 圧電センサー装置 |
Also Published As
Publication number | Publication date |
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EP3837512B1 (de) | 2023-10-04 |
JP7210737B2 (ja) | 2023-01-23 |
US20210297012A1 (en) | 2021-09-23 |
CN112513592A (zh) | 2021-03-16 |
DE102018120124A1 (de) | 2020-02-20 |
EP3837512A1 (de) | 2021-06-23 |
WO2020035384A1 (de) | 2020-02-20 |
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