JP2021164226A - Damper member and actuator - Google Patents

Damper member and actuator Download PDF

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JP2021164226A
JP2021164226A JP2020062079A JP2020062079A JP2021164226A JP 2021164226 A JP2021164226 A JP 2021164226A JP 2020062079 A JP2020062079 A JP 2020062079A JP 2020062079 A JP2020062079 A JP 2020062079A JP 2021164226 A JP2021164226 A JP 2021164226A
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gel
movable body
peripheral side
inner peripheral
damper
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JP7393278B2 (en
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章二 日向
Shoji Hiuga
優帆 小林
Yuho Kobayashi
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Nidec Sankyo Corp
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Abstract

To provide a damper member in which a first member and a second member, which have a frame shape are connected with a cylindrical gel-like member, capable of preventing a damper member from being damaged when a stress is converted to an inner peripheral part of the gel-like member.SOLUTION: A damper member 10 comprises: a first member 11; a second member 12 surrounding an outer peripheral side of the first member 11; and a gel-like member 14 arranged between the first member 11 and the second member 12. The gel-like member 14 comprises: a first gel-like member 141 connecting the first member 11 and the second member 12; and a second gel-like member 142 connected to a chamfered part 18 formed in an edge of an outer peripheral face 150 of the first member 11 and the first gel-like member 141. An adhesion force to the first member 11 of the second gel-like member 142 is larger than the adhesion force to the first member 11 of the first gel-like member 141. Therefore, the damper member 10 is hardly damaged when applying a stress to an inner peripheral part of the gel-like member 14.SELECTED DRAWING: Figure 4

Description

本発明は、可動体を固定体に対して振動させるアクチュエータ、および可動体と固定体とを接続するダンパー部材に関する。 The present invention relates to an actuator that vibrates a movable body with respect to a fixed body, and a damper member that connects the movable body and the fixed body.

アクチュエータとして、固定体および可動体と、固定体に対して可動体を振動させる磁気駆動機構を備えるとともに、可動体と固定体とをゲル状ダンパー部材によって接続したものがある。特許文献1では、可動体は、磁石が固定されたヨークを備えており、固定体(固定体)は、可動体を収容するカバーと、コイルを保持するホルダを備える。ゲル状ダンパー部材は、厚さ方向の一方の面がヨークに接着され、他方の面がカバー部材に接着されている。 Some actuators are provided with a fixed body and a movable body, a magnetic drive mechanism for vibrating the movable body with respect to the fixed body, and the movable body and the fixed body are connected by a gel-like damper member. In Patent Document 1, the movable body includes a yoke to which a magnet is fixed, and the fixed body (fixed body) includes a cover for accommodating the movable body and a holder for holding a coil. In the gel-like damper member, one surface in the thickness direction is adhered to the yoke, and the other surface is adhered to the cover member.

特開2019−13086号公報Japanese Unexamined Patent Publication No. 2019-13086

特許文献1では、ゲル状ダンパー部材は、シート状ゲルを矩形に切断したゲル状部材であり、ヨークとカバーとの間に挟まれている。しかしながら、切断したゲル状部材を単体で部品として取り扱う場合、取り扱いが難しい。また、特許文献1の構造では、ゲル状ダンパー部材は振動方向と直交する方向にも変形可能な状態に組み立てられている。従って、可動体が意図しない方向へ動きやすいという問題がある。 In Patent Document 1, the gel-like damper member is a gel-like member obtained by cutting a sheet-like gel into a rectangular shape, and is sandwiched between a yoke and a cover. However, when the cut gel-like member is handled as a single part, it is difficult to handle. Further, in the structure of Patent Document 1, the gel-like damper member is assembled so as to be deformable in a direction orthogonal to the vibration direction. Therefore, there is a problem that the movable body tends to move in an unintended direction.

そこで、本発明者らは、枠状の第1部材と第2部材(内枠と外枠)との隙間に筒状のゲル状部材を配置し、筒状のゲル状部材によって第1部材と第2部材とを接続した構造のダンパー部材を提案している。第1部材(内枠)を可動体側の部品であるシャフトに固定し、第2部材(外枠)を固定体側の部品であるケースに固定する構造のアクチュエータは、可動体が振動方向(軸線方向)と直交する方向に動きにくい。 Therefore, the present inventors arrange a tubular gel-like member in the gap between the frame-shaped first member and the second member (inner frame and outer frame), and use the tubular gel-like member to form the first member. We are proposing a damper member having a structure connected to a second member. In the actuator having a structure in which the first member (inner frame) is fixed to the shaft which is a component on the movable body side and the second member (outer frame) is fixed to the case which is a component on the fixed body side, the movable body is in the vibration direction (axial direction). ) Is difficult to move in the direction orthogonal to).

上記のような構造のダンパー部材では、可動体が軸線方向に振動する際、筒状のゲル状部材の内周部に応力が集中する。ゲル状部材の内周部は第1部材(内枠)の外周面に接続される。第1部材には、外周面の縁に製造時のバリを除去するための面取り部が設けられているため、ゲル状部材の縁は面取り部に接続される。ゲル状部材の縁がテーパー状の面取り部に入り込んだ形状になっていると、この部分に応力が集中したときにゲル状部材が第1部材からはがれやすい。従って、ダンパー部材が壊れやすく耐久性が低いという問題がある。 In the damper member having the above structure, when the movable body vibrates in the axial direction, stress is concentrated on the inner peripheral portion of the tubular gel-like member. The inner peripheral portion of the gel-like member is connected to the outer peripheral surface of the first member (inner frame). Since the first member is provided with a chamfered portion on the edge of the outer peripheral surface for removing burrs during manufacturing, the edge of the gel-like member is connected to the chamfered portion. If the edge of the gel-like member has a shape that penetrates into the tapered chamfered portion, the gel-like member tends to peel off from the first member when stress is concentrated on this portion. Therefore, there is a problem that the damper member is fragile and has low durability.

以上の問題点に鑑みて、本発明の課題は、枠状の第1部材と第2部材を筒状のゲル状部材によって接続したダンパー部材、および、筒状のゲル状部材を介して可動体および固体を接続するアクチュエータにおいて、ゲル状部材の内周部に応力が集中したときにゲル状部材が内周側の枠材からはがれにくい構造を提案することにある。 In view of the above problems, the subject of the present invention is a damper member in which the frame-shaped first member and the second member are connected by a tubular gel-like member, and a movable body via the tubular gel-like member. Another object of the present invention is to propose a structure in which the gel-like member is hard to be peeled off from the frame material on the inner peripheral side when stress is concentrated on the inner peripheral portion of the gel-like member in the actuator for connecting the solid.

上記課題を解決するために、本発明に係るダンパー部材は、第1部材、および前記第1部材の外周側を囲む第2部材と、前記第1部材と前記第2部材の間に配置されるゲル状部材と、を有し、前記ゲル状部材は、前記第1部材と前記第2部材を接続する第1ゲル状部
材と、前記第1部材の外周面の縁に形成された面取り部および前記第1ゲル状部材に接続される第2ゲル状部材と、を備え、前記第2ゲル状部材の前記第1部材に対する密着力は、前記第1ゲル状部材の前記第1部材に対する密着力よりも大きいことを特徴とする。
In order to solve the above problems, the damper member according to the present invention is arranged between the first member, the second member surrounding the outer peripheral side of the first member, and the first member and the second member. It has a gel-like member, and the gel-like member includes a first gel-like member that connects the first member and the second member, and a chamfered portion formed on the edge of the outer peripheral surface of the first member. A second gel-like member connected to the first gel-like member is provided, and the adhesion force of the second gel-like member to the first member is the adhesion force of the first gel-like member to the first member. It is characterized by being larger than.

本発明によれば、内周側の枠材(第1部材)と外周側の枠材(第2部材)の間にゲル状部材を成形して部品化している。従って、第1部材と第2部材を介してゲル状部材を可動体および固定体に接続できるので、可動体と固定体とを接続する際に、ゲル状部材の接着作業を行う必要がない。従って、アクチュエータの組立が容易である。また、ゲル状部材は、第1部材と第2部材を接続する部分にダンパー部材として必要な特性を備えた第1ゲル状部材を使用する一方、応力が集中する内周部において第1部材の面取り部に接続される部分は、補強用の第2ゲル状部材を用いて第1部材に対する密着性を高めている。従って、ゲル状部材の内周部に応力が集中したときにダンパー部材が面取り部からはがれにくく、ダンパー部材10が壊れにくい。よって、ダンパー部材として必要な特性を確保しながら、耐久性を高めることができる。 According to the present invention, a gel-like member is formed between a frame material on the inner peripheral side (first member) and a frame material on the outer peripheral side (second member) to form a component. Therefore, since the gel-like member can be connected to the movable body and the fixed body via the first member and the second member, it is not necessary to perform the bonding work of the gel-like member when connecting the movable body and the fixed body. Therefore, the actuator can be easily assembled. Further, as the gel-like member, the first gel-like member having the characteristics required as a damper member is used in the portion connecting the first member and the second member, while the first member has an inner peripheral portion where stress is concentrated. The portion connected to the chamfered portion uses a second gel-like member for reinforcement to improve the adhesion to the first member. Therefore, when stress is concentrated on the inner peripheral portion of the gel-like member, the damper member is less likely to come off from the chamfered portion, and the damper member 10 is less likely to break. Therefore, the durability can be improved while ensuring the characteristics required as a damper member.

本発明において、前記ゲル状部材は、前記第1部材の全周を連続して囲むことが好ましい。このようにすると、第1部材が第2部材に対して径方向に相対移動する際には、ゲル状部材が潰れる方向に変形するので、第1部材が第2部材に対して軸線方向に相対移動する場合よりもばね定数が大きくなる。従って、可動体を軸線方向に振動させるアクチュエータを構成した場合に、可動体が振動方向とは異なる方向に移動することを抑制できる。 In the present invention, it is preferable that the gel-like member continuously surrounds the entire circumference of the first member. In this way, when the first member moves relative to the second member in the radial direction, the gel-like member is deformed in the crushing direction, so that the first member is relative to the second member in the axial direction. The spring constant is larger than when moving. Therefore, when an actuator that vibrates the movable body in the axial direction is configured, it is possible to prevent the movable body from moving in a direction different from the vibration direction.

本発明において、前記ゲル状部材は、円筒形状であることが好ましい。このようにすると、ゲル状部材が全周で均等に配置される。従って、ゲル状部材のばね定数を全周で均等にすることができるので、可動体を軸線方向に振動させるアクチュエータを構成した場合に、可動体が特定の方向へ動きやすくなることがない。よって、可動体を安定して支持できる。 In the present invention, the gel-like member preferably has a cylindrical shape. In this way, the gel-like members are evenly arranged all around. Therefore, since the spring constant of the gel-like member can be made uniform over the entire circumference, the movable body does not easily move in a specific direction when an actuator that vibrates the movable body in the axial direction is configured. Therefore, the movable body can be stably supported.

本発明において、前記第2ゲル状部材は、前記面取り部から前記第2部材まで延びている構造とすることができる。ゲル状部材を注型によって製造した場合には、ゲル状部材がこのような形状に拡がる。すなわち、型部材に第1部材と第2部材を位置決めし、第2ゲル状部材を形成するゲル材料を第1部材と第2部材の隙間に吐出すると、ゲル材料は型部材の底面に沿って拡がり、第1部材の面取り部から第2部材まで拡がる。これにより、面取り部を第2ゲル状部材によって保護できる。しかる後に、第1ゲル状部材を形成するゲル材料を吐出することにより、第1部材と第2部材とを接続できる。 In the present invention, the second gel-like member may have a structure extending from the chamfered portion to the second member. When the gel-like member is manufactured by casting, the gel-like member spreads in such a shape. That is, when the first member and the second member are positioned on the mold member and the gel material forming the second gel-like member is discharged into the gap between the first member and the second member, the gel material is discharged along the bottom surface of the mold member. It spreads and spreads from the chamfered part of the first member to the second member. Thereby, the chamfered portion can be protected by the second gel-like member. After that, the first member and the second member can be connected by discharging the gel material forming the first gel-like member.

次に、本発明のアクチュエータは、可動体および固定体と、前記可動体を前記固定体に対して振動させる駆動機構と、上記のダンパー部材と、を有し、前記可動体および前記固定体の一方は、前記可動体および前記固定体の他方の内周側に配置される内周側部分を備え、前記可動体および固定体の他方は、前記内周側部分の外周側を囲む外周側部分を備え、前記ダンパー部材は、前記第1部材が前記内周側部分に固定され、前記第2部材が前記外周側部分に固定されることを特徴とする。 Next, the actuator of the present invention has a movable body and a fixed body, a drive mechanism for vibrating the movable body with respect to the fixed body, and the damper member, and the movable body and the fixed body have the movable body and the fixed body. One is provided with an inner peripheral side portion arranged on the inner peripheral side of the other of the movable body and the fixed body, and the other of the movable body and the fixed body is an outer peripheral side portion surrounding the outer peripheral side of the inner peripheral side portion. The damper member is characterized in that the first member is fixed to the inner peripheral side portion and the second member is fixed to the outer peripheral side portion.

本発明によれば、第1部材と第2部材を介してゲル状部材を可動体および固定体に接続できる。従って、ダンパー部材を介して可動体と固定体とを接続する作業が容易であり、アクチュエータの組立が容易である。また、可動体が振動した際にゲル状部材が第1部材からはがれにくくダンパー部材が壊れにくいので、アクチュエータの耐久性を高めることができる。また、ダンパー部材の耐久性を高めることによって、可動体を振動させる際の振幅の許容範囲を大きくすることができる。従って、大きな振幅で可動体を振動させることができる。 According to the present invention, the gel-like member can be connected to the movable body and the fixed body via the first member and the second member. Therefore, the work of connecting the movable body and the fixed body via the damper member is easy, and the actuator can be easily assembled. Further, when the movable body vibrates, the gel-like member is hard to be peeled off from the first member and the damper member is hard to break, so that the durability of the actuator can be improved. Further, by increasing the durability of the damper member, the allowable range of amplitude when vibrating the movable body can be increased. Therefore, the movable body can be vibrated with a large amplitude.

本発明において、前記ダンパー部材は、前記可動体の振動方向の一端側および他端側で前記可動体と前記固定体を接続することが好ましい。このようにすると、可動体の振動方向の両端がダンパー部材によって支持される。従って、可動体を安定して支持でき、可動体が意図しない方向へ動くことを抑制できる。 In the present invention, it is preferable that the damper member connects the movable body and the fixed body on one end side and the other end side of the movable body in the vibration direction. In this way, both ends of the movable body in the vibration direction are supported by the damper members. Therefore, the movable body can be stably supported, and the movable body can be suppressed from moving in an unintended direction.

次に、本発明は、可動体と固定体の間に直接ゲル状部材を成形した形態のアクチュエータに適用することが可能である。すなわち、本発明のアクチュエータは、可動体および固定体と、前記可動体を前記固定体に対して振動させる駆動機構と、前記固定体と前記可動体とを接続するゲル状部材と、を有し、前記可動体および前記固定体の一方は、前記可動体および前記固定体の他方の内周側に配置される内周側部分を備え、前記可動体および固定体の他方は、前記内周側部分の外周側を囲む外周側部分を備え、前記ゲル状部材は、前記内周側部分と前記外周側部分とを接続する第1ゲル状部材と、前記内周側部分の縁に形成された面取り部および前記第1ゲル状部材に接続される第2ゲル状部材と、を備え、前記第2ゲル状部材の前記内周側部分に対する密着力は、前記第1ゲル状部材の前記内周側部分に対する密着力よりも大きいことを特徴とする。 Next, the present invention can be applied to an actuator in which a gel-like member is formed directly between a movable body and a fixed body. That is, the actuator of the present invention has a movable body and a fixed body, a drive mechanism for vibrating the movable body with respect to the fixed body, and a gel-like member connecting the fixed body and the movable body. One of the movable body and the fixed body includes an inner peripheral side portion arranged on the inner peripheral side of the other of the movable body and the fixed body, and the other of the movable body and the fixed body is on the inner peripheral side of the movable body and the fixed body. The gel-like member includes an outer peripheral side portion surrounding the outer peripheral side of the portion, and the gel-like member is formed on the edge of the first gel-like member connecting the inner peripheral side portion and the outer peripheral side portion and the inner peripheral side portion. A chamfered portion and a second gel-like member connected to the first gel-like member are provided, and the adhesion force of the second gel-like member to the inner peripheral side portion is the inner circumference of the first gel-like member. It is characterized by having a greater adhesion than the side portion.

本発明によれば、上記のダンパー部材によって可動体と固定体を接続しているので、可動体が振動した際にゲル状部材が内周側部分からはがれにくい。従って、アクチュエータの耐久性を高めることができる。また、アクチュエータの耐久性が高いので、可動体を振動させる際の振幅の許容範囲を大きくすることができる。従って、大きな振幅で可動体を振動させることができる。これにより、可動体を振動させる際の振幅の許容範囲を大きくすることができるので、大きな振幅で可動体を振動させることができる。 According to the present invention, since the movable body and the fixed body are connected by the damper member, the gel-like member is unlikely to be peeled off from the inner peripheral side portion when the movable body vibrates. Therefore, the durability of the actuator can be improved. Further, since the durability of the actuator is high, the allowable range of amplitude when vibrating the movable body can be increased. Therefore, the movable body can be vibrated with a large amplitude. As a result, the allowable range of amplitude when vibrating the movable body can be increased, so that the movable body can be vibrated with a large amplitude.

本発明において、前記ゲル状部材は、前記内周側部分の全周を連続して囲むことが好ましい。このようにすると、可動体の全周にゲル状部材が配置される。従って、可動体が振動方向以外の方向へ移動する際には、ゲル状部材が潰れる方向に変形するので、可動体が振動方向に移動する場合よりもゲル状部材のばね定数が大きくなる。従って、可動体が振動方向とは異なる方向に移動することを抑制できる。 In the present invention, it is preferable that the gel-like member continuously surrounds the entire circumference of the inner peripheral side portion. In this way, the gel-like member is arranged on the entire circumference of the movable body. Therefore, when the movable body moves in a direction other than the vibration direction, the gel-like member is deformed in the crushing direction, so that the spring constant of the gel-like member becomes larger than when the movable body moves in the vibration direction. Therefore, it is possible to prevent the movable body from moving in a direction different from the vibration direction.

本発明において、前記ゲル状部材は、円筒形状であることが好ましい。このようにすると、ゲル状部材が全周で均等に配置される。従って、ゲル状部材のばね定数を全周で均等にすることができるので、可動体が特定の方向へ動きやすくなることがない。従って、可動体を安定して支持できる。 In the present invention, the gel-like member preferably has a cylindrical shape. In this way, the gel-like members are evenly arranged all around. Therefore, since the spring constant of the gel-like member can be made uniform over the entire circumference, the movable body does not easily move in a specific direction. Therefore, the movable body can be stably supported.

本発明において、前記第2ゲル状部材は、前記面取り部から前記外周側部分まで延びている構造とすることができる。上記のように、ゲル状部材を注型によって製造した場合に、ゲル状部材がこのような形状に拡がる。すなわち、内周側部分を備えた部材と外周側部分を備えた部材を型部材に位置決めし、両部材の隙間に第2ゲル状部材を形成するゲル材料を吐出すると、ゲル材料は型部材の底面に沿って拡がり、内周側部分の面取り部から外周側部分まで拡がる。これにより、面取り部を第2ゲル状部材によって保護できる。しかる後に、第1ゲル状部材を形成するゲル材料を吐出することにより、内周側部分と外周側部分とを接続できる。 In the present invention, the second gel-like member may have a structure extending from the chamfered portion to the outer peripheral side portion. As described above, when the gel-like member is manufactured by casting, the gel-like member expands into such a shape. That is, when the member having the inner peripheral side portion and the member having the outer peripheral side portion are positioned on the mold member and the gel material forming the second gel-like member is discharged into the gap between the two members, the gel material becomes the mold member. It spreads along the bottom surface and extends from the chamfered part on the inner peripheral side to the outer peripheral side. Thereby, the chamfered portion can be protected by the second gel-like member. After that, by discharging the gel material forming the first gel-like member, the inner peripheral side portion and the outer peripheral side portion can be connected.

本発明において、前記ゲル状部材は、前記可動体の振動方向の一端側および他端側で前記可動体と前記固定体を接続することが好ましい。このようにすると、可動体の振動方向の両端がゲル状部材によって支持される。従って、可動体を安定して支持でき、可動体が意図しない方向へ動くことを抑制できる。 In the present invention, it is preferable that the gel-like member connects the movable body and the fixed body on one end side and the other end side of the movable body in the vibration direction. In this way, both ends of the movable body in the vibration direction are supported by the gel-like members. Therefore, the movable body can be stably supported, and the movable body can be suppressed from moving in an unintended direction.

本発明によれば、内周側の枠材(第1部材、もしくは内周側部分)と外周側の枠材(第
2部材、もしくは外周側部分)とがゲル状部材によって接続される。ゲル状部材は、内周側の枠材と外周側の枠材を接続する部分にダンパー部材として必要な特性を備えた第1ゲル状部材を使用する一方、応力が集中する内周部において内周側の枠材の面取り部に接続されてはがれやすくなってしまう部分は、補強用の第2ゲル状部材を用いて内周側の枠材に対する密着性を高めている。従って、ゲル状部材の内周部に応力が集中したときに内周側の枠材からゲル状部材がはかれにくいので、ダンパー部材として必要な特性を確保しながら、耐久性を高めることができる。
According to the present invention, the inner peripheral side frame material (first member or inner peripheral side portion) and the outer peripheral side frame material (second member or outer peripheral side portion) are connected by a gel-like member. For the gel-like member, the first gel-like member having the characteristics required as a damper member is used for the portion connecting the frame material on the inner peripheral side and the frame material on the outer peripheral side, while the inner peripheral portion where stress is concentrated is used. A second gel-like member for reinforcement is used in the portion connected to the chamfered portion of the frame material on the peripheral side and easily peeled off to improve the adhesion to the frame material on the inner peripheral side. Therefore, when stress is concentrated on the inner peripheral portion of the gel-like member, it is difficult for the gel-like member to be peeled off from the frame material on the inner peripheral side, so that the durability can be improved while ensuring the characteristics required as the damper member. ..

本発明の実施形態に係るアクチュエータの断面図である。It is sectional drawing of the actuator which concerns on embodiment of this invention. 図1のアクチュエータを軸線方向の一方側から見た分解斜視図である。It is an exploded perspective view which looked at the actuator of FIG. 1 from one side in the axial direction. 図1のアクチュエータを軸線方向の他方側から見た分解斜視図である。It is an exploded perspective view which looked at the actuator of FIG. 1 from the other side in the axial direction. ダンパー部材の構成を模式的に示す断面図である。It is sectional drawing which shows typically the structure of a damper member. ダンパー部材の製造方法の説明図である。It is explanatory drawing of the manufacturing method of a damper member. 変形例のダンパー部材の構成を模式的に示す断面図である。It is sectional drawing which shows typically the structure of the damper member of the modification.

以下に、図面を参照して、本発明の実施形態を説明する。なお、以下の説明において、軸線Lとは可動体3の中心軸線である。また、軸線Lが延在する方向(軸線L方向)の一方側をL1とし、軸線L方向の他方側をL2とする。本発明を適用したアクチュエータ1は、可動体3が固定体2に対して軸線L方向に振動する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the axis L is the central axis of the movable body 3. Further, one side in the direction in which the axis L extends (axis L direction) is L1, and the other side in the axis L direction is L2. In the actuator 1 to which the present invention is applied, the movable body 3 vibrates in the axis L direction with respect to the fixed body 2.

以下に説明する実施形態では、可動体3は、軸線L方向の一方側L1、および他方側L2の2箇所において、ダンパー部材10によって固定体2と接続されるが、本発明では、ダンパー部材10が1箇所もしくは3箇所以上に配置される態様を採用してもよい。また、以下に説明する実施形態では、可動体3は、固定体2の内周側に配置されるが、本発明では、可動体3が固定体2の外周側に配置される態様を採用してもよい。 In the embodiment described below, the movable body 3 is connected to the fixed body 2 by the damper member 10 at two positions, one side L1 and the other side L2 in the axis L direction, but in the present invention, the damper member 10 May be adopted in the manner in which is arranged in one place or three or more places. Further, in the embodiment described below, the movable body 3 is arranged on the inner peripheral side of the fixed body 2, but in the present invention, the movable body 3 is arranged on the outer peripheral side of the fixed body 2. You may.

また、以下に説明する実施形態では、可動体3を固定体2に対して振動させる駆動機構として、磁気駆動機構6を用いる。磁気駆動機構6は、可動体3に配置される磁石61と、固定体2に配置されるコイル62とを備えているが、本発明では、磁石61とコイル62の配置を逆にした構成を採用することも可能である。すなわち、磁気駆動機構6は、可動体3に配置されるコイル62と、固定体2に配置される磁石61とを備える態様を採用してもよい。 Further, in the embodiment described below, the magnetic drive mechanism 6 is used as the drive mechanism for vibrating the movable body 3 with respect to the fixed body 2. The magnetic drive mechanism 6 includes a magnet 61 arranged on the movable body 3 and a coil 62 arranged on the fixed body 2, but in the present invention, the arrangement of the magnet 61 and the coil 62 is reversed. It is also possible to adopt it. That is, the magnetic drive mechanism 6 may employ an embodiment including a coil 62 arranged on the movable body 3 and a magnet 61 arranged on the fixed body 2.

(全体構成)
図1は、本発明の実施形態に係るアクチュエータ1の断面図である。図2は、図1に示すアクチュエータ1を軸線方向の一方側L1から見た分解斜視図である。図3は、図1に示すアクチュエータ1を軸線方向の他方側L2から見た分解斜視図である。アクチュエータ1は、固定体2および可動体3と、固定体2と可動体3とを接続するダンパー部材10と、可動体3を固定体2に対して相対移動させる磁気駆動機構6とを備える。磁気駆動機構6は、可動体3に配置される磁石61と、固定体2に配置されるコイル62とを備えており、固定体2に対して可動体3を軸線L方向に相対移動させる。
(overall structure)
FIG. 1 is a cross-sectional view of the actuator 1 according to the embodiment of the present invention. FIG. 2 is an exploded perspective view of the actuator 1 shown in FIG. 1 as viewed from one side L1 in the axial direction. FIG. 3 is an exploded perspective view of the actuator 1 shown in FIG. 1 as viewed from the other side L2 in the axial direction. The actuator 1 includes a fixed body 2 and a movable body 3, a damper member 10 that connects the fixed body 2 and the movable body 3, and a magnetic drive mechanism 6 that moves the movable body 3 relative to the fixed body 2. The magnetic drive mechanism 6 includes a magnet 61 arranged on the movable body 3 and a coil 62 arranged on the fixed body 2, and moves the movable body 3 relative to the fixed body 2 in the axis L direction.

(ダンパー部材)
可動体3は、軸線L方向の一方側L1の端部、および軸線L方向の他方側L2の端部の各位置において、ダンパー部材10を介して固定体2と接続される。以下、軸線L方向の一方側L1に配置されるダンパー部材10を第1ダンパー部材10Aとし、軸線L方向の他方側L2に配置されるダンパー部材10を第2ダンパー部材10Bとする。第1ダンパー部材10Aと第2ダンパー部材10Bは同一部材であり、軸線L方向で逆向きに配置さ
れる。
(Damper member)
The movable body 3 is connected to the fixed body 2 via the damper member 10 at each position of the end portion of one side L1 in the axis L direction and the end portion of the other side L2 in the axis L direction. Hereinafter, the damper member 10 arranged on one side L1 in the axis L direction is referred to as a first damper member 10A, and the damper member 10 arranged on the other side L2 in the axis L direction is referred to as a second damper member 10B. The first damper member 10A and the second damper member 10B are the same member, and are arranged in opposite directions in the axis L direction.

ダンパー部材10は、第1部材11と、第1部材11の外周側を囲む第2部材12と、第1部材11と第2部材12の間に配置されるゲル状部材14を備える。本形態では、第1部材11および第2部材12は円筒状であり、同軸に配置される。ゲル状部材14は、径方向の厚さが一定の円筒形状である。ゲル状部材14の内周部は、第1部材11に接続され、ゲル状部材14の外周部は、第2部材12に接続される。 The damper member 10 includes a first member 11, a second member 12 that surrounds the outer peripheral side of the first member 11, and a gel-like member 14 that is arranged between the first member 11 and the second member 12. In this embodiment, the first member 11 and the second member 12 are cylindrical and are arranged coaxially. The gel-like member 14 has a cylindrical shape having a constant radial thickness. The inner peripheral portion of the gel-like member 14 is connected to the first member 11, and the outer peripheral portion of the gel-like member 14 is connected to the second member 12.

ダンパー部材10は、弾性および粘弾性のうちの少なくとも一方を備える。本形態では、ゲル状部材14は粘弾性体である。後述するように、本形態のゲル状部材14は、異なる2種類のゲル状部材から構成される。ゲル状部材14の大部分(後述する第1ゲル状部材141)は、針入度が90度から110度のシリコーンゲルからなる。 The damper member 10 includes at least one of elastic and viscoelastic. In this embodiment, the gel-like member 14 is a viscoelastic body. As will be described later, the gel-like member 14 of the present embodiment is composed of two different types of gel-like members. Most of the gel-like member 14 (the first gel-like member 141 described later) is made of a silicone gel having a needle insertion degree of 90 degrees to 110 degrees.

第1部材11は可動体3に固定される。第1部材11は可動体3と一体になって軸線L方向に振動する。従って、第1部材11は、可動体3の質量を調節するための錘として用いることができる。第2部材12は固定体2に固定される。ゲル状部材14は、第1部材11および第2部材12を介して固定体2と可動体3を接続する。可動体3が軸線L方向に振動する際、ゲル状部材14は、せん断方向に変形する。 The first member 11 is fixed to the movable body 3. The first member 11 is integrated with the movable body 3 and vibrates in the L direction of the axis. Therefore, the first member 11 can be used as a weight for adjusting the mass of the movable body 3. The second member 12 is fixed to the fixed body 2. The gel-like member 14 connects the fixed body 2 and the movable body 3 via the first member 11 and the second member 12. When the movable body 3 vibrates in the L direction of the axis, the gel-like member 14 is deformed in the shear direction.

(固定体)
固定体2は、筒状のケース20と、ケース20の軸線L方向の一方側L1の開口を塞ぐ第1蓋部材21と、ケース20の軸線L方向の他方側L2の開口を塞ぐ第2蓋部材22と、ケース20の内側で第1蓋部材21と第2蓋部材22との間に配置されるコイルホルダ4を備える。本形態では、ケース20、第1蓋部材21、第2蓋部材22、およびコイルホルダ4は樹脂製である。
(Fixed body)
The fixed body 2 includes a cylindrical case 20, a first lid member 21 that closes the opening of the case 20 on one side L1 in the axis L direction, and a second lid that closes the opening of the case 20 on the other side L2 in the axis L direction. A member 22 and a coil holder 4 arranged between the first lid member 21 and the second lid member 22 inside the case 20 are provided. In this embodiment, the case 20, the first lid member 21, the second lid member 22, and the coil holder 4 are made of resin.

図2、図3に示すように、第1蓋部材21および第2蓋部材22は、それぞれ、3箇所に爪部27を備えている。爪部27は径方向内側に弾性変形可能であり、ケース20の内周側に押し込まれる。爪部27の先端がケース20の縁に設けられた係止部28に係止されることにより、第1蓋部材21および第2蓋部材22がケース20から外れることが規制される。 As shown in FIGS. 2 and 3, each of the first lid member 21 and the second lid member 22 is provided with claw portions 27 at three locations. The claw portion 27 is elastically deformable inward in the radial direction and is pushed into the inner peripheral side of the case 20. By locking the tip of the claw portion 27 to the locking portion 28 provided on the edge of the case 20, the first lid member 21 and the second lid member 22 are restricted from coming off from the case 20.

コイルホルダ4は、ホルダ環状部41と、ホルダ環状部41から軸線L方向の他方側L2へ突出する胴部42を備える。ホルダ環状部41がケース20の内側に圧入されることにより、コイルホルダ4はケース20に固定される。ホルダ環状部41には、L1側から第1蓋部材21が固定される。ホルダ環状部41は円形の開口部44を備えており、開口部44に第1ダンパー部材10Aが固定される。本形態では、開口部44に第1ダンパー部材10Aの第2部材12が圧入されている。 The coil holder 4 includes a holder annular portion 41 and a body portion 42 projecting from the holder annular portion 41 to the other side L2 in the axis L direction. The coil holder 4 is fixed to the case 20 by press-fitting the holder annular portion 41 into the case 20. The first lid member 21 is fixed to the holder annular portion 41 from the L1 side. The holder annular portion 41 includes a circular opening 44, and the first damper member 10A is fixed to the opening 44. In this embodiment, the second member 12 of the first damper member 10A is press-fitted into the opening 44.

コイルホルダ4の胴部42にはコイル62が固定される。コイル62から引き出されたコイル線(図示省略)の端部は、ホルダ環状部41から径方向外側へ突出する端子ピンに絡げられている。コイル線は、端子ピンを介して基板63に接続される。図2に示すように、基板63は、ケース20の外周面に設けられた凹部24に固定される。 The coil 62 is fixed to the body portion 42 of the coil holder 4. The end of the coil wire (not shown) drawn out from the coil 62 is entwined with a terminal pin protruding radially outward from the holder annular portion 41. The coil wire is connected to the substrate 63 via a terminal pin. As shown in FIG. 2, the substrate 63 is fixed to the recess 24 provided on the outer peripheral surface of the case 20.

図1に示すように、ケース20は、第2蓋部材22のL1側の位置から内周側へ突出するケース環状部25を備える。第2蓋部材22は、ケース環状部25にL2側から固定される。また、ケース環状部25は円形の開口部26を備えており、開口部26に第2ダンパー部材10Bが固定される。本形態では、開口部26に第2ダンパー部材10Bの第2部材12が圧入されている。 As shown in FIG. 1, the case 20 includes a case annular portion 25 that protrudes from the position on the L1 side of the second lid member 22 toward the inner peripheral side. The second lid member 22 is fixed to the case annular portion 25 from the L2 side. Further, the case annular portion 25 is provided with a circular opening 26, and the second damper member 10B is fixed to the opening 26. In this embodiment, the second member 12 of the second damper member 10B is press-fitted into the opening 26.

(可動体)
可動体3は、固定体2の径方向の中心において軸線L方向に延びるシャフト31と、シャフト31の軸線L方向の略中央に固定される磁石61と、磁石61にL1側で重なる第1ヨーク32と、磁石61にL2側で重なる第2ヨーク33を備える。
(Movable body)
The movable body 3 has a shaft 31 extending in the axis L direction at the center of the fixed body 2 in the radial direction, a magnet 61 fixed substantially in the center of the shaft 31 in the axis L direction, and a first yoke that overlaps the magnet 61 on the L1 side. A second yoke 33 that overlaps the magnet 61 on the L2 side is provided with the 32.

磁石61は円筒状であり、軸線L方向においてN極とS極とに分極するように着磁されている。シャフト31は、固定体2の径方向の中心において軸線L方向に延びている。磁石61の外周側には、コイルホルダ4の胴部42が磁石61と同軸に配置される。従って、磁石61とコイル62は同軸に配置される。 The magnet 61 has a cylindrical shape and is magnetized so as to be polarized into the north and south poles in the L direction of the axis. The shaft 31 extends in the axis L direction at the center of the fixed body 2 in the radial direction. On the outer peripheral side of the magnet 61, the body portion 42 of the coil holder 4 is arranged coaxially with the magnet 61. Therefore, the magnet 61 and the coil 62 are arranged coaxially.

第1ヨーク32は、外径寸法が磁石61の外径寸法よりわずかに大きい磁性板である。第1ヨーク32の外周面は、磁石61の外周面より径方向外側に張り出している。第1ヨーク32は、磁石61のL1側の面に接着等の方法で固定される。 The first yoke 32 is a magnetic plate whose outer diameter dimension is slightly larger than the outer diameter dimension of the magnet 61. The outer peripheral surface of the first yoke 32 projects radially outward from the outer peripheral surface of the magnet 61. The first yoke 32 is fixed to the surface of the magnet 61 on the L1 side by a method such as adhesion.

第2ヨーク33は、2枚の磁性板(第1磁性板34、第2磁性板35)によって構成される。第1磁性板34は、磁石61のL2側の面に接着等の方法で固定される端板部341と、端板部341の外縁からL1側に延在する円筒状の側板部342とを備える。側板部342は、コイルホルダ4の胴部42の外周側に配置される。第2磁性板35は、第1磁性板34の端板部341よりわずかに小さな円板状である。第2磁性板35は、第1磁性板34の端板部341にL1側で積層され、端板部341に溶接されている。第2磁性板35は、磁石61のL2側の面に接着等の方法で固定される。 The second yoke 33 is composed of two magnetic plates (first magnetic plate 34, second magnetic plate 35). The first magnetic plate 34 has an end plate portion 341 fixed to the surface of the magnet 61 on the L2 side by an adhesive or the like, and a cylindrical side plate portion 342 extending from the outer edge of the end plate portion 341 to the L1 side. Be prepared. The side plate portion 342 is arranged on the outer peripheral side of the body portion 42 of the coil holder 4. The second magnetic plate 35 has a disk shape slightly smaller than the end plate portion 341 of the first magnetic plate 34. The second magnetic plate 35 is laminated on the end plate portion 341 of the first magnetic plate 34 on the L1 side and welded to the end plate portion 341. The second magnetic plate 35 is fixed to the surface of the magnet 61 on the L2 side by a method such as adhesion.

シャフト31は、第1ヨーク32からL1側に突出する第1端部311と、第2ヨーク33からL2側に突出する第2端部312を備える。第1端部311には、第1ダンパー部材10Aの第1部材11が固定される。また、第2端部312には、第2ダンパー部材10Bの第1部材11が固定される。シャフト31の両端に固定される2個の第1部材11は、可動体3と一体になって移動する。 The shaft 31 includes a first end portion 311 projecting from the first yoke 32 toward the L1 side and a second end portion 312 projecting from the second yoke 33 toward the L2 side. The first member 11 of the first damper member 10A is fixed to the first end portion 311. Further, the first member 11 of the second damper member 10B is fixed to the second end portion 312. The two first members 11 fixed to both ends of the shaft 31 move integrally with the movable body 3.

(アクチュエータの動作)
アクチュエータ1は、コイル62に通電することにより、磁気駆動機構6が、可動体3を軸線L方向に駆動する駆動力を発生させる。コイル62への通電を切ると、可動体3は、ゲル状部材14の復帰力によって原点位置へ戻る。従って、コイル62への通電を断続的に行うことにより、可動体3は、軸線L方向で振動する。
(Actuator operation)
When the actuator 1 energizes the coil 62, the magnetic drive mechanism 6 generates a driving force for driving the movable body 3 in the axis L direction. When the energization of the coil 62 is turned off, the movable body 3 returns to the origin position by the returning force of the gel-like member 14. Therefore, by intermittently energizing the coil 62, the movable body 3 vibrates in the axis L direction.

第1ダンパー部材10Aは、シャフト31とコイルホルダ4との間において、シャフト31のL1側の端部を全周で囲むゲル状部材14を備えている。また、第2ダンパー部材10Bは、シャフト31とケース環状部25との間において、シャフト31のL2側の端部を全周で囲むゲル状部材14を備えている。第1ダンパー部材10Aおよび第2ダンパー部材10Bにおいて、ゲル状部材14は、第1部材11と第2部材12の間に隙間なく充填されており、全周に連続して配置される。 The first damper member 10A includes a gel-like member 14 that surrounds the end of the shaft 31 on the L1 side between the shaft 31 and the coil holder 4. Further, the second damper member 10B includes a gel-like member 14 that surrounds the end of the shaft 31 on the L2 side between the shaft 31 and the case annular portion 25. In the first damper member 10A and the second damper member 10B, the gel-like member 14 is filled between the first member 11 and the second member 12 without a gap, and is continuously arranged on the entire circumference.

可動体3が固定体2に対して軸線L方向に振動する際、ダンパー部材10は、ゲル状部材14の内周部に固定された第1部材11とゲル状部材14の外周部に固定された第2部材12とが軸線L方向に相対移動する。従って、ゲル状部材14は、可動体3の振動に追従してせん断方向に変形する。 When the movable body 3 vibrates in the L direction along the axis with respect to the fixed body 2, the damper member 10 is fixed to the first member 11 fixed to the inner peripheral portion of the gel-like member 14 and the outer peripheral portion of the gel-like member 14. The second member 12 and the second member 12 move relative to each other in the L direction of the axis. Therefore, the gel-like member 14 is deformed in the shearing direction following the vibration of the movable body 3.

ダンパー部材10は、可動体3が径方向に移動する場合には、ゲル状部材14が潰れる方向に変形する。ゲル状部材14が潰れる方向に変形する場合のバネ定数は、ゲル状部材14がせん断方向に変形する場合のバネ定数の3倍程度になる。従って、可動体3が振動方向(軸線L方向)とは異なる方向に移動することが抑制されている。 When the movable body 3 moves in the radial direction, the damper member 10 is deformed in the direction in which the gel-like member 14 is crushed. The spring constant when the gel-like member 14 is deformed in the crushing direction is about three times the spring constant when the gel-like member 14 is deformed in the shearing direction. Therefore, it is suppressed that the movable body 3 moves in a direction different from the vibration direction (axis L direction).

(ゲル状部材)
図4は、ダンパー部材10の構成を模式的に示す断面図である。図4において、LAはダンパー部材10の中心軸線である。LA1は軸線LAが延在する方向(軸線LA方向)の一方側であり、LA2は軸線LA方向の他方側である。図1に示すように、ダンパー部材10は、アクチュエータ1の軸線Lとダンパー部材10の軸線LAとが一致するように組み立てられる。
(Gel-like member)
FIG. 4 is a cross-sectional view schematically showing the configuration of the damper member 10. In FIG. 4, LA is the central axis of the damper member 10. LA1 is one side in the direction in which the axis LA extends (axis LA direction), and LA2 is the other side in the axis LA direction. As shown in FIG. 1, the damper member 10 is assembled so that the axis L of the actuator 1 and the axis LA of the damper member 10 coincide with each other.

第1部材11は円筒形状であり、大径部15と、大径部15よりも小径の小径部16を備える。第1部材11の中心には軸穴17が形成されている。大径部15は第2部材12の内周側に配置される。小径部16は、大径部15から一方側LA1へ延びている。ゲル状部材14の内周は大径部15の外周面150に接続され、ゲル状部材14の外周部は第2部材12の内周面120に接続される。 The first member 11 has a cylindrical shape, and includes a large diameter portion 15 and a small diameter portion 16 having a diameter smaller than that of the large diameter portion 15. A shaft hole 17 is formed in the center of the first member 11. The large diameter portion 15 is arranged on the inner peripheral side of the second member 12. The small diameter portion 16 extends from the large diameter portion 15 to LA1 on one side. The inner circumference of the gel-like member 14 is connected to the outer peripheral surface 150 of the large-diameter portion 15, and the outer peripheral portion of the gel-like member 14 is connected to the inner peripheral surface 120 of the second member 12.

第1部材11および第2部材12はいずれも金属製である。大径部15の外周面150の他方側LA2の縁には、第1部材11の製造時に形成されたバリを除去するための面取り部18が形成されている。図4に示すように、面取り部18は外周面150の縁を斜めに切欠いたテーパー形状であり、全周に形成されている。なお、図4では図示を省略しているが、第1部材11および第2部材12の他の部位にも面取り部が形成されている。例えば、小径部16の外周面の縁、第1部材11の内周面の縁、第2部材12の外周面の縁、および、第2部材12の内周面120の縁にも、それぞれ、同様の面取り部が形成されている。 Both the first member 11 and the second member 12 are made of metal. A chamfered portion 18 for removing burrs formed during the manufacture of the first member 11 is formed on the edge of the LA2 on the other side of the outer peripheral surface 150 of the large diameter portion 15. As shown in FIG. 4, the chamfered portion 18 has a tapered shape in which the edge of the outer peripheral surface 150 is notched diagonally, and is formed on the entire circumference. Although not shown in FIG. 4, chamfered portions are also formed in other portions of the first member 11 and the second member 12. For example, the edge of the outer peripheral surface of the small diameter portion 16, the edge of the inner peripheral surface of the first member 11, the edge of the outer peripheral surface of the second member 12, and the edge of the inner peripheral surface 120 of the second member 12, respectively. A similar chamfer is formed.

ゲル状部材14は注型品であり、第1部材11および第2部材12の隙間にゲル材料を注入し固化させて製造される。ゲル状部材14の他方側LA2の端面は製造用の型に接する面であるため、平坦面であり、第1部材11の他方側LA2の端面および第2部材12の他方側LA2の端面と同一面上に位置する。 The gel-like member 14 is a cast product, and is manufactured by injecting a gel material into the gap between the first member 11 and the second member 12 and solidifying the gel material. Since the end surface of the gel-like member 14 on the other side LA2 is a surface in contact with the mold for manufacturing, it is a flat surface and is the same as the end surface of the other side LA2 of the first member 11 and the end surface of the other side LA2 of the second member 12. Located on the surface.

ゲル状部材14は、第1ゲル状部材141と第2ゲル状部材142の2種類のゲル状部材からなる。なお、図1−3には第1ゲル状部材141および第2ゲル状部材142の図示を省略し、ゲル状部材14の全体形状のみを図示している。第2ゲル状部材142は、ゲル状部材14の他方側LA2の端面全体に拡がっており、第1部材11の面取り部18に接続されている。本形態では、第2ゲル状部材142は、面取り部18からから第2部材12の内周面120まで延びている。第1ゲル状部材141は、第2ゲル状部材142の一方側LA1に積層されており、第1部材11と第2部材12を接続している。 The gel-like member 14 is composed of two types of gel-like members, a first gel-like member 141 and a second gel-like member 142. Note that FIG. 1-3 omits the illustration of the first gel-like member 141 and the second gel-like member 142, and shows only the overall shape of the gel-like member 14. The second gel-like member 142 extends over the entire end surface of LA2 on the other side of the gel-like member 14, and is connected to the chamfered portion 18 of the first member 11. In this embodiment, the second gel-like member 142 extends from the chamfered portion 18 to the inner peripheral surface 120 of the second member 12. The first gel-like member 141 is laminated on one side LA1 of the second gel-like member 142, and connects the first member 11 and the second member 12.

第2ゲル状部材142は、面取り部18に対するゲル状部材14の密着力を高めるための補強用ゲルである。従って、第2ゲル状部材142の第1部材11に対する密着力は、第1ゲル状部材141の第1部材11に対する密着力よりも大きい。ここで、密着力(密着強度)は、垂直引張試験によって計測可能な特性である。垂直引張試験は、例えば、試料であるゲル状部材を固定面(本形態の場合は、第1部材11の外周面)に接続し、固定面に対して垂直な方向にゲル状部材を引っ張ってゲル状部材が剥離したときの引っ張り力を測定することにより行う。 The second gel-like member 142 is a reinforcing gel for increasing the adhesion of the gel-like member 14 to the chamfered portion 18. Therefore, the adhesion force of the second gel-like member 142 to the first member 11 is larger than the adhesion force of the first gel-like member 141 to the first member 11. Here, the adhesion force (adhesion strength) is a characteristic that can be measured by a vertical tensile test. In the vertical tensile test, for example, a gel-like member as a sample is connected to a fixed surface (in the case of this embodiment, the outer peripheral surface of the first member 11), and the gel-like member is pulled in a direction perpendicular to the fixed surface. This is done by measuring the tensile force when the gel-like member is peeled off.

本形態では、第2ゲル状部材142は、ゲル状部材14のばね定数にほとんど影響しない程度の薄さである。従って、ゲル状部材14のばね定数は、第1ゲル状部材141によって規定される。本形態では、上記のように、第1ゲル状部材141は、針入度が90度から110度のシリコーンゲルからなる。第2ゲル状部材142は、針入度が90度から110度のシリコーンゲルであってもよいし、そうでなくてもよい。なお、第2ゲル状部材142の厚さを本形態よりも厚くすることもできる。この場合は、ゲル状部材14のば
ね定数は、第1ゲル状部材141のばね定数と第2ゲル状部材142のばね定数を合成した値になる。
In this embodiment, the second gel-like member 142 is thin enough to have almost no effect on the spring constant of the gel-like member 14. Therefore, the spring constant of the gel-like member 14 is defined by the first gel-like member 141. In this embodiment, as described above, the first gel-like member 141 is made of a silicone gel having a needle insertion degree of 90 degrees to 110 degrees. The second gel-like member 142 may or may not be a silicone gel having a needle insertion degree of 90 to 110 degrees. The thickness of the second gel-like member 142 can be made thicker than that of the present embodiment. In this case, the spring constant of the gel-like member 14 is a value obtained by combining the spring constant of the first gel-like member 141 and the spring constant of the second gel-like member 142.

(ダンパー部材の製造方法)
図5は、ダンパー部材10の製造方法の説明図である。ダンパー部材10の製造に用いる製造用治具90は、円形凹部91と、円形凹部91の底面中央から突出するピン92を備える。ダンパー部材10の製造方法は、製造用治具90に対して第1部材11および第2部材12を組み付ける第1工程と、第1部材11と第2部材12の隙間Sにゲル材料を充填する第2工程と、ゲル材料を加熱硬化させる第3工程と、製造用治具90からダンパー部材10を取り外す第4工程と、を含む。
(Manufacturing method of damper member)
FIG. 5 is an explanatory diagram of a method for manufacturing the damper member 10. The manufacturing jig 90 used for manufacturing the damper member 10 includes a circular recess 91 and a pin 92 protruding from the center of the bottom surface of the circular recess 91. The method for manufacturing the damper member 10 is a first step of assembling the first member 11 and the second member 12 to the manufacturing jig 90, and filling the gap S between the first member 11 and the second member 12 with a gel material. It includes a second step, a third step of heat-curing the gel material, and a fourth step of removing the damper member 10 from the manufacturing jig 90.

第1工程では、製造用治具90に対して第1部材11および第2部材12を当接させて位置決めすることによって、第1部材11と第2部材12の間に径方向の隙間Sを形成する。図5に示すように、第1工程では、円形凹部91の中央から突出するピン92を第1部材11の軸穴17に挿入し、第1部材11の大径部15の端面を円形凹部91の底面94にL1側から当接させる。また、円形凹部91の内周面に第2部材12を内接させるとともに、第2部材12の端面を円形凹部91の底面94の外周領域に当接させる。これにより、第1部材11と第2部材12が軸線L方向および径方向に位置決めされ、第1部材11の大径部15と第2部材12の間には、環状の隙間Sが形成される。環状の隙間Sは全周にわたって形成され、径方向の幅が全周で一定である。 In the first step, the first member 11 and the second member 12 are brought into contact with the manufacturing jig 90 for positioning, thereby creating a radial gap S between the first member 11 and the second member 12. Form. As shown in FIG. 5, in the first step, a pin 92 protruding from the center of the circular recess 91 is inserted into the shaft hole 17 of the first member 11, and the end surface of the large diameter portion 15 of the first member 11 is inserted into the circular recess 91. The bottom surface 94 of the above is brought into contact with the bottom surface 94 from the L1 side. Further, the second member 12 is inscribed on the inner peripheral surface of the circular recess 91, and the end surface of the second member 12 is brought into contact with the outer peripheral region of the bottom surface 94 of the circular recess 91. As a result, the first member 11 and the second member 12 are positioned in the axis L direction and the radial direction, and an annular gap S is formed between the large diameter portion 15 of the first member 11 and the second member 12. .. The annular gap S is formed over the entire circumference, and the width in the radial direction is constant over the entire circumference.

本形態では、第2工程で隙間Sにゲル材料を入れる前に、ゲル状部材14と接する面にプライマー13を塗布しておく。具体的には、大径部15の外周面150および第2部材12の内周面120にプライマー13を塗布する。プライマー13は、面取り部18にも塗布する。なお、プライマー13を塗布する作業は、製造用治具90に対して第1部材11および第2部材12を組み付ける前に行ってもよいし、組み付けた後に行ってもよい。 In this embodiment, the primer 13 is applied to the surface in contact with the gel-like member 14 before the gel material is put into the gap S in the second step. Specifically, the primer 13 is applied to the outer peripheral surface 150 of the large diameter portion 15 and the inner peripheral surface 120 of the second member 12. The primer 13 is also applied to the chamfered portion 18. The work of applying the primer 13 may be performed before assembling the first member 11 and the second member 12 to the manufacturing jig 90, or may be performed after assembling.

第2工程では、第1部材11と第2部材12との隙間Sに硬化前のゲル材料を充填する。本形態のゲル状部材14は、第1ゲル状部材141と第2ゲル状部材142の2層を備えているため、第2工程では、2種類のゲル材料を順に充填する。図5に示すように、第2工程では、まず、ディスペンサー93から少量の第2ゲル材料G2を隙間Sへ吐出する。第2ゲル材料G2は隙間Sの底部全体に広がり、円形凹部91の底面94と面取り部18との隙間に入り込む。次に、ディスペンサー93から第1ゲル材料G1を吐出して、隙間Sに充填する。 In the second step, the gap S between the first member 11 and the second member 12 is filled with the gel material before curing. Since the gel-like member 14 of the present embodiment includes two layers of the first gel-like member 141 and the second gel-like member 142, the two types of gel materials are sequentially filled in the second step. As shown in FIG. 5, in the second step, first, a small amount of the second gel material G2 is discharged from the dispenser 93 into the gap S. The second gel material G2 spreads over the entire bottom of the gap S and enters the gap between the bottom surface 94 of the circular recess 91 and the chamfered portion 18. Next, the first gel material G1 is discharged from the dispenser 93 to fill the gap S.

第3工程では、ゲル材料(第1ゲル状部材141および第2ゲル状部材142)を製造用治具90ごと加熱し、規定の温度で規定の時間維持することにより硬化させる。これにより、隙間Sにはゲル状部材14が形成される。ゲル材料(第1ゲル材料G1および第2ゲル材料G2)は、加熱硬化する際に、プライマー13に接する部分がプライマー13と反応して、大径部15の外周面150および第2部材12の内周面120に固定される。従って、硬化後のゲル状部材14は、接着剤を用いることなく、ゲル状部材14自体の接着力によって第1部材11および第2部材12に固定される。 In the third step, the gel materials (first gel-like member 141 and second gel-like member 142) are heated together with the manufacturing jig 90 and cured by maintaining the gel material at a specified temperature for a specified time. As a result, the gel-like member 14 is formed in the gap S. When the gel materials (first gel material G1 and second gel material G2) are heat-cured, the portion in contact with the primer 13 reacts with the primer 13, and the outer peripheral surface 150 of the large diameter portion 15 and the second member 12 It is fixed to the inner peripheral surface 120. Therefore, the cured gel-like member 14 is fixed to the first member 11 and the second member 12 by the adhesive force of the gel-like member 14 itself without using an adhesive.

第4工程では、完成したダンパー部材10を製造用治具90から取り外す。例えば、製造用治具90の第1部材11が当接する面および第2部材12が当接する面に突き出しピンを配置するための貫通孔(図示せず)を設けておき、突き出しピンを用いてダンパー部材10を製造用治具90から取り外す。 In the fourth step, the completed damper member 10 is removed from the manufacturing jig 90. For example, a through hole (not shown) for arranging the protrusion pin is provided on the surface of the manufacturing jig 90 that the first member 11 contacts and the surface that the second member 12 contacts, and the protrusion pin is used. The damper member 10 is removed from the manufacturing jig 90.

(本形態の主な効果)
以上のように、本形態のダンパー部材10は、第1部材11および第1部材11の外周
側を囲む第2部材12と、第1部材11と第2部材12の間に配置されるゲル状部材14を有する。ゲル状部材14は、第1部材11と第2部材12を接続する第1ゲル状部材141と、第1部材11の外周面150の縁に形成された面取り部18および第1ゲル状部材141に接続される第2ゲル状部材142と、を備える。第2ゲル状部材142の第1部材11に対する密着力は、第1ゲル状部材141の第1部材11に対する密着力よりも大きい。
(Main effect of this form)
As described above, the damper member 10 of the present embodiment is in the form of a gel arranged between the first member 11 and the second member 12 surrounding the outer peripheral side of the first member 11 and between the first member 11 and the second member 12. It has a member 14. The gel-like member 14 includes a first gel-like member 141 that connects the first member 11 and the second member 12, a chamfered portion 18 formed on the edge of the outer peripheral surface 150 of the first member 11, and the first gel-like member 141. A second gel-like member 142 connected to is provided. The adhesion force of the second gel-like member 142 to the first member 11 is larger than the adhesion force of the first gel-like member 141 to the first member 11.

また、本形態のアクチュエータ1は、可動体3および固定体2と、可動体3を固定体2に対して振動させる磁気駆動機構6と、上記のダンパー部材10とを有する。本形態では、可動体3は固定体2の内周側に配置される。可動体3は、アクチュエータ1の径方向の中心に配置されるシャフト31(内周側部分)を備え、固定体2は、シャフト31の外周側を囲む外周側部分(ホルダ環状部41およびケース環状部25)を備える。ダンパー部材10は、第1部材11が内周側部分に固定され、第2部材12が外周側部分に固定される。 Further, the actuator 1 of the present embodiment includes a movable body 3 and a fixed body 2, a magnetic drive mechanism 6 that vibrates the movable body 3 with respect to the fixed body 2, and the damper member 10 described above. In this embodiment, the movable body 3 is arranged on the inner peripheral side of the fixed body 2. The movable body 3 includes a shaft 31 (inner peripheral side portion) arranged at the center of the actuator 1 in the radial direction, and the fixed body 2 has an outer peripheral side portion (holder annular portion 41 and a case annular portion) surrounding the outer peripheral side of the shaft 31. Part 25) is provided. In the damper member 10, the first member 11 is fixed to the inner peripheral side portion, and the second member 12 is fixed to the outer peripheral side portion.

本形態のダンパー部材10は、内周側の枠材(第1部材11)と外周側の枠材(第2部材12)の間にゲル状部材14を成形して部品化されている。従って、第1部材11と第2部材12を介してゲル状部材14を可動体3および固定体2に接続できるので、可動体3と固定体2とを接続する際に、ゲル状部材14の接着作業を行う必要がない。従って、アクチュエータ1の組立が容易である。 The damper member 10 of this embodiment is made into a component by molding a gel-like member 14 between a frame material on the inner peripheral side (first member 11) and a frame material on the outer peripheral side (second member 12). Therefore, since the gel-like member 14 can be connected to the movable body 3 and the fixed body 2 via the first member 11 and the second member 12, the gel-like member 14 can be connected to the movable body 3 and the fixed body 2. There is no need to perform bonding work. Therefore, the actuator 1 can be easily assembled.

また、ゲル状部材14は、第1部材11と第2部材12を接続する部分はダンパーとして必要な特性を備えた第1ゲル状部材141によって構成する一方、応力が集中する内周部において第1部材11の面取り部18に接続される部分は、補強用の第2ゲル状部材142を用いて第1部材11に対する密着性を高める。従って、ゲル状部材14の内周部に応力が集中したときに面取り部18からゲル状部材14がはがれにくく、ダンパー部材10が壊れにくい。よって、ダンパー部材10として必要な特性を確保しながら、耐久性を高めることができる。 Further, in the gel-like member 14, the portion connecting the first member 11 and the second member 12 is composed of the first gel-like member 141 having the characteristics required as a damper, while the inner peripheral portion where stress is concentrated is the first. The portion of the 1 member 11 connected to the chamfered portion 18 uses a second gel-like member 142 for reinforcement to improve the adhesion to the first member 11. Therefore, when stress is concentrated on the inner peripheral portion of the gel-like member 14, the gel-like member 14 is hard to peel off from the chamfered portion 18, and the damper member 10 is hard to break. Therefore, the durability can be improved while ensuring the characteristics required for the damper member 10.

このようなダンパー部材10を用いれば、可動体3が振動した際にゲル状部材14が第1部材11からはがれにくくダンパー部材10が壊れにくい。従って、アクチュエータ1の耐久性を高めることができる。また、ダンパー部材10を壊れにくくしたことによって、可動体3を振動させる際の振幅の許容範囲を大きくすることができる。従って、大きな振幅で可動体3を振動させることができる。 When such a damper member 10 is used, the gel-like member 14 is hard to be peeled off from the first member 11 when the movable body 3 vibrates, and the damper member 10 is hard to break. Therefore, the durability of the actuator 1 can be improved. Further, by making the damper member 10 hard to break, it is possible to increase the allowable range of amplitude when the movable body 3 is vibrated. Therefore, the movable body 3 can be vibrated with a large amplitude.

本形態では、ゲル状部材14は、第1部材11の全周を連続して囲んでいる。これにより、第1部材11を可動体3に接続し、第2部材12を固定体2に接続したときは、可動体3の全周にゲル状部材14が配置される。従って、可動体3が振動方向以外の方向へ移動する際には、ゲル状部材14が潰れる方向に変形するが、ゲル状部材14が潰れる方向に変形するときのばね定数は、せん断方向に変形するときのばね定数よりも大きい。従って、可動体3が振動方向とは異なる方向に移動することを抑制できる。 In this embodiment, the gel-like member 14 continuously surrounds the entire circumference of the first member 11. As a result, when the first member 11 is connected to the movable body 3 and the second member 12 is connected to the fixed body 2, the gel-like member 14 is arranged on the entire circumference of the movable body 3. Therefore, when the movable body 3 moves in a direction other than the vibration direction, the gel-like member 14 is deformed in the crushing direction, but the spring constant when the gel-like member 14 is deformed in the crushing direction is deformed in the shearing direction. It is larger than the spring constant when it is used. Therefore, it is possible to prevent the movable body 3 from moving in a direction different from the vibration direction.

本形態では、ゲル状部材14は、円筒形状であり、全周で均等に配置される。従って、ゲル状部材14のばね定数を全周で均等にすることができるので、可動体3が特定の方向へ動きやすくなることがない。よって、可動体3を安定して支持できる。 In this embodiment, the gel-like member 14 has a cylindrical shape and is evenly arranged on the entire circumference. Therefore, since the spring constant of the gel-like member 14 can be made uniform over the entire circumference, the movable body 3 does not easily move in a specific direction. Therefore, the movable body 3 can be stably supported.

本形態では、第2ゲル状部材142は、面取り部18から第2部材12まで延びている。本形態では、上記のようにゲル状部材14を注型によって製造するので、ゲル状部材14がこのような形状に拡がる。本形態では、ゲル状部材14として熱硬化性ゲルを用いるので、硬化に要する時間が長い。従って、注型によって第1部材11と第2部材12の間
に直接ゲル状部材14を成形すれば、ダンパー部材10を容易に製造できる。
In this embodiment, the second gel-like member 142 extends from the chamfered portion 18 to the second member 12. In this embodiment, since the gel-like member 14 is manufactured by casting as described above, the gel-like member 14 expands into such a shape. In this embodiment, since the thermosetting gel is used as the gel-like member 14, the time required for curing is long. Therefore, if the gel-like member 14 is formed directly between the first member 11 and the second member 12 by casting, the damper member 10 can be easily manufactured.

本形態のアクチュエータ1では、ダンパー部材10は、可動体3の振動方向の一端側および他端側で可動体3と固定体2を接続する。従って、可動体3の振動方向の両端がダンパー部材10によって支持されるので、可動体3を安定して支持でき、可動体3が意図しない方向へ動くことを抑制できる。 In the actuator 1 of the present embodiment, the damper member 10 connects the movable body 3 and the fixed body 2 at one end side and the other end side of the movable body 3 in the vibration direction. Therefore, since both ends of the movable body 3 in the vibration direction are supported by the damper members 10, the movable body 3 can be stably supported and the movable body 3 can be suppressed from moving in an unintended direction.

(変形例)
(1)上記形態のダンパー部材10は、枠状の第1部材11および第2部材12の間にゲル状部材14を成形して部品化したものであったが、本発明は、可動体3と固定体2の間に直接ゲル状部材14を成形する形態に適用可能である。例えば、第1部材11がシャフト31に固定もしくは一体化され、第2部材12がホルダ環状部41およびケース環状部25にそれぞれ固定もしくは一体化されたアクチュエータでは、第1部材11は可動体3に設けられた内周側部分を構成し、第2部材12は固定体2に設けられた外周側部分を構成する。可動体3と固定体2とを接続するゲル状部材14は、上記形態と同様に第1ゲル状部材141および第2ゲル状部材142からなる。すなわち、第1ゲル状部材141は、内周側部分と外周側部分とを接続し、第2ゲル状部材142は、内周側部分の縁に形成された面取り部および第1ゲル状部材141に接続される。第2ゲル状部材142の内周側部分に対する密着力は、第1ゲル状部材141の内周側部分に対する密着力よりも大きい。
(Modification example)
(1) The damper member 10 of the above-described embodiment is formed by molding a gel-like member 14 between the frame-shaped first member 11 and the second member 12, but the present invention describes the movable body 3. It can be applied to the form in which the gel-like member 14 is directly formed between the fixed body 2 and the fixed body 2. For example, in an actuator in which the first member 11 is fixed or integrated with the shaft 31 and the second member 12 is fixed or integrated with the holder annular portion 41 and the case annular portion 25, respectively, the first member 11 is attached to the movable body 3. The inner peripheral side portion provided is formed, and the second member 12 constitutes the outer peripheral side portion provided on the fixed body 2. The gel-like member 14 that connects the movable body 3 and the fixed body 2 is composed of a first gel-like member 141 and a second gel-like member 142 as in the above embodiment. That is, the first gel-like member 141 connects the inner peripheral side portion and the outer peripheral side portion, and the second gel-like member 142 is a chamfered portion and a first gel-like member 141 formed on the edge of the inner peripheral side portion. Connected to. The adhesion force of the second gel-like member 142 to the inner peripheral side portion is larger than the adhesion force of the first gel-like member 141 to the inner peripheral side portion.

このようにすると、上記形態と同様に、内周側部分の面取り部に接続される部分は、補強用の第2ゲル状部材142を用いて内周側部分に対する密着性を高めることができる。従って、ゲル状部材14の内周部に応力が集中したときにゲル状部材14が内周側部分からはがれにくいので、アクチュエータの耐久性を高めることができる。その結果、可動体3を振動させる際の振幅の許容範囲を大きくすることができるので、大きな振幅で可動体3を振動させることができる。 In this way, as in the above embodiment, the portion connected to the chamfered portion of the inner peripheral side portion can be improved in adhesion to the inner peripheral side portion by using the second gel-like member 142 for reinforcement. Therefore, when stress is concentrated on the inner peripheral portion of the gel-like member 14, the gel-like member 14 is unlikely to be peeled off from the inner peripheral side portion, so that the durability of the actuator can be improved. As a result, the allowable range of amplitude when vibrating the movable body 3 can be increased, so that the movable body 3 can be vibrated with a large amplitude.

(2)図6は、変形例のダンパー部材110の断面図である。図6のダンパー部材110は、第2ゲル状部材142が面取り部18の近傍のみに配置され、第2部材12まで延びていない。上記形態では、注型により第2ゲル状部材142を形成したために第2ゲル状部材142が面取り部18から第2部材12まで延びているが、他の製造方法で製造することにより、図6に示す形態のダンパー部材110を製造できる。例えば、第2ゲル材料G2を面取り部18に塗布した後に製造用治具90に第1部材11および第2部材12を位置決めし、第1部材11と第2部材12の隙間Sに第1ゲル材料G1を充填してゲル状部材を成形すればよい。 (2) FIG. 6 is a cross-sectional view of the damper member 110 of the modified example. In the damper member 110 of FIG. 6, the second gel-like member 142 is arranged only in the vicinity of the chamfered portion 18, and does not extend to the second member 12. In the above embodiment, since the second gel-like member 142 is formed by casting, the second gel-like member 142 extends from the chamfered portion 18 to the second member 12, but by manufacturing by another manufacturing method, FIG. The damper member 110 having the form shown in the above can be manufactured. For example, after applying the second gel material G2 to the chamfered portion 18, the first member 11 and the second member 12 are positioned on the manufacturing jig 90, and the first gel is formed in the gap S between the first member 11 and the second member 12. The gel-like member may be formed by filling the material G1.

1…アクチュエータ、2…固定体、3…可動体、4…コイルホルダ、6…磁気駆動機構、10…ダンパー部材、10A…第1ダンパー部材、10B…第2ダンパー部材、11…第1部材、12…第2部材、13…プライマー、14…ゲル状部材、15…大径部、16…小径部、17…軸穴、18…面取り部、20…ケース、21…第1蓋部材、22…第2蓋部材、24…凹部、25…ケース環状部、26…開口部、27…爪部、28…係止部、31…シャフト、32…第2ヨーク、33…第2ヨーク、34…第1磁性板、35…第2磁性板、41…ホルダ環状部、42…胴部、44…開口部、61…磁石、62…コイル、63…基板、90…製造用治具、91…円形凹部、92…ピン、93…ディスペンサー、94…底面、110…ダンパー部材、120…内周面、141…第1ゲル状部材、142…第2ゲル状部材、150…外周面、311…第1端部、312…第2端部、341…端板部、342…側板部、G1…第1ゲル材料、G2…第2ゲル材料、L…軸線、L1…一方側、L2…他方側、LA…軸線、LA1…一方側、LA2…他方側、S…隙間 1 ... actuator, 2 ... fixed body, 3 ... movable body, 4 ... coil holder, 6 ... magnetic drive mechanism, 10 ... damper member, 10A ... first damper member, 10B ... second damper member, 11 ... first member, 12 ... 2nd member, 13 ... Primer, 14 ... Gel-like member, 15 ... Large diameter part, 16 ... Small diameter part, 17 ... Shaft hole, 18 ... Chamfered part, 20 ... Case, 21 ... First lid member, 22 ... 2nd lid member, 24 ... concave, 25 ... case annular part, 26 ... opening, 27 ... claw part, 28 ... locking part, 31 ... shaft, 32 ... second yoke, 33 ... second yoke, 34 ... second 1 magnetic plate, 35 ... second magnetic plate, 41 ... holder annular part, 42 ... body, 44 ... opening, 61 ... magnet, 62 ... coil, 63 ... substrate, 90 ... manufacturing jig, 91 ... circular recess , 92 ... pin, 93 ... dispenser, 94 ... bottom surface, 110 ... damper member, 120 ... inner peripheral surface, 141 ... first gel-like member, 142 ... second gel-like member, 150 ... outer peripheral surface, 311 ... first end , 312 ... 2nd end, 341 ... end plate, 342 ... side plate, G1 ... 1st gel material, G2 ... 2nd gel material, L ... axis, L1 ... one side, L2 ... other side, LA ... Axis line, LA1 ... one side, LA2 ... other side, S ... gap

Claims (11)

第1部材、および前記第1部材の外周側を囲む第2部材と、
前記第1部材と前記第2部材の間に配置されるゲル状部材と、を有し、
前記ゲル状部材は、
前記第1部材と前記第2部材を接続する第1ゲル状部材と、
前記第1部材の外周面の縁に形成された面取り部および前記第1ゲル状部材に接続される第2ゲル状部材と、を備え、
前記第2ゲル状部材の前記第1部材に対する密着力は、前記第1ゲル状部材の前記第1部材に対する密着力よりも大きいことを特徴とするダンパー部材。
A first member and a second member surrounding the outer peripheral side of the first member,
It has a gel-like member arranged between the first member and the second member, and has.
The gel-like member is
A first gel-like member connecting the first member and the second member,
A chamfered portion formed on the edge of the outer peripheral surface of the first member and a second gel-like member connected to the first gel-like member are provided.
A damper member characterized in that the adhesion force of the second gel-like member to the first member is larger than the adhesion force of the first gel-like member to the first member.
前記ゲル状部材は、前記第1部材の全周を連続して囲むことを特徴とする請求項1に記載のダンパー部材。 The damper member according to claim 1, wherein the gel-like member continuously surrounds the entire circumference of the first member. 前記ゲル状部材は、円筒形状であることを特徴とする請求項1または2に記載のダンパー部材。 The damper member according to claim 1 or 2, wherein the gel-like member has a cylindrical shape. 前記第2ゲル状部材は、前記面取り部から前記第2部材まで延びていることを特徴とする請求項1から3の何れか一項に記載のダンパー部材。 The damper member according to any one of claims 1 to 3, wherein the second gel-like member extends from the chamfered portion to the second member. 可動体および固定体と、
前記可動体を前記固定体に対して振動させる駆動機構と、
請求項1から4の何れか一項に記載のダンパー部材と、を有し、
前記可動体および前記固定体の一方は、前記可動体および前記固定体の他方の内周側に配置される内周側部分を備え、前記可動体および固定体の他方は、前記内周側部分の外周側を囲む外周側部分を備え、
前記ダンパー部材は、
前記第1部材が前記内周側部分に固定され、
前記第2部材が前記外周側部分に固定されることを特徴とするアクチュエータ。
Movable and fixed bodies,
A drive mechanism that vibrates the movable body with respect to the fixed body,
The damper member according to any one of claims 1 to 4 is provided.
One of the movable body and the fixed body includes an inner peripheral side portion arranged on the inner peripheral side of the other of the movable body and the fixed body, and the other of the movable body and the fixed body is the inner peripheral side portion of the movable body and the fixed body. It has an outer peripheral side that surrounds the outer peripheral side of the
The damper member is
The first member is fixed to the inner peripheral side portion, and the first member is fixed to the inner peripheral side portion.
An actuator characterized in that the second member is fixed to the outer peripheral side portion.
前記ダンパー部材は、前記可動体の振動方向の一端側および他端側で前記可動体と前記固定体を接続することを特徴とする請求項5に記載のアクチュエータ。 The actuator according to claim 5, wherein the damper member connects the movable body and the fixed body on one end side and the other end side in the vibration direction of the movable body. 可動体および固定体と、
前記可動体を前記固定体に対して振動させる駆動機構と、
前記固定体と前記可動体とを接続するゲル状部材と、を有し、
前記可動体および前記固定体の一方は、前記可動体および前記固定体の他方の内周側に配置される内周側部分を備え、前記可動体および固定体の他方は、前記内周側部分の外周側を囲む外周側部分を備え、
前記ゲル状部材は、
前記内周側部分と前記外周側部分とを接続する第1ゲル状部材と、
前記内周側部分の縁に形成された面取り部および前記第1ゲル状部材に接続される第2ゲル状部材と、を備え、
前記第2ゲル状部材の前記内周側部分に対する密着力は、前記第1ゲル状部材の前記内周側部分に対する密着力よりも大きいことを特徴とするアクチュエータ。
Movable and fixed bodies,
A drive mechanism that vibrates the movable body with respect to the fixed body,
It has a gel-like member that connects the fixed body and the movable body, and has
One of the movable body and the fixed body includes an inner peripheral side portion arranged on the inner peripheral side of the other of the movable body and the fixed body, and the other of the movable body and the fixed body is the inner peripheral side portion of the movable body and the fixed body. It has an outer peripheral side that surrounds the outer peripheral side of the
The gel-like member is
A first gel-like member connecting the inner peripheral side portion and the outer peripheral side portion,
A chamfered portion formed on the edge of the inner peripheral side portion and a second gel-like member connected to the first gel-like member are provided.
An actuator characterized in that the adhesion force of the second gel-like member to the inner peripheral side portion is larger than the adhesion force of the first gel-like member to the inner peripheral side portion.
前記ゲル状部材は、前記内周側部分の全周を連続して囲むことを特徴とする請求項7に記載のアクチュエータ。 The actuator according to claim 7, wherein the gel-like member continuously surrounds the entire circumference of the inner peripheral side portion. 前記ゲル状部材は、円筒形状であることを特徴とする請求項7または8に記載のアクチ
ュエータ。
The actuator according to claim 7 or 8, wherein the gel-like member has a cylindrical shape.
前記第2ゲル状部材は、前記面取り部から前記外周側部分まで延びていることを特徴とする請求項7から9の何れか一項に記載のアクチュエータ。 The actuator according to any one of claims 7 to 9, wherein the second gel-like member extends from the chamfered portion to the outer peripheral side portion. 前記ゲル状部材は、前記可動体の振動方向の一端側および他端側で前記可動体と前記固定体を接続することを特徴とする請求項7から10の何れか一項に記載のアクチュエータ。 The actuator according to any one of claims 7 to 10, wherein the gel-like member connects the movable body and the fixed body on one end side and the other end side in the vibration direction of the movable body.
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