JP2021158804A5 - - Google Patents
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- JP2021158804A5 JP2021158804A5 JP2020057358A JP2020057358A JP2021158804A5 JP 2021158804 A5 JP2021158804 A5 JP 2021158804A5 JP 2020057358 A JP2020057358 A JP 2020057358A JP 2020057358 A JP2020057358 A JP 2020057358A JP 2021158804 A5 JP2021158804 A5 JP 2021158804A5
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- frequency
- piezoelectric
- difference
- voltage
- drive
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- 238000001514 detection method Methods 0.000 claims 26
- 238000000034 method Methods 0.000 claims 9
- 238000010408 sweeping Methods 0.000 claims 4
Claims (11)
を伸縮させることにより振動し、前記振動に基づいた検出信号が前記検出用圧電素子から
出力される圧電アクチュエーターを有する圧電駆動装置の制御方法であって、
前記駆動信号の周波数を目標周波数よりも高い値から前記目標周波数まで掃引するダウ
ンスイープステップと、
前記ダウンスイープステップによって前記周波数が前記目標周波数となった後、前記検
出信号を複数回検出し、検出した複数の前記検出信号の電圧差が予め定めた所定電圧差内
であるかを判断する判断ステップと、を実行し、
前記電圧差が前記所定電圧差内である場合は、前記検出信号の電圧が第１目標電圧とな
るように前記周波数を制御する周波数制御ステップを実行し、
前記電圧差が前記所定電圧差内ではない場合は、前記電圧差が前記所定電圧差内となる
まで前記ダウンスイープステップと判断ステップとを繰り返す繰返ステップを実行することを特徴とする圧
電駆動装置の制御方法。 A piezoelectric actuator comprising a drive piezoelectric element and a detection piezoelectric element, vibrating by applying a drive signal to expand and contract the drive piezoelectric element, and outputting a detection signal based on the vibration from the detection piezoelectric element A control method for a piezoelectric drive device comprising:
a down sweep step of sweeping the frequency of the drive signal from a value higher than the target frequency to the target frequency;
After the frequency becomes the target frequency by the downsweep step, the detection signal is detected a plurality of times, and a determination is made as to whether the voltage difference between the detected plurality of detection signals is within a predetermined voltage difference. Run the steps and
performing a frequency control step of controlling the frequency such that the voltage of the detection signal becomes a first target voltage when the voltage difference is within the predetermined voltage difference;
A piezoelectric driving device characterized in that, when the voltage difference is not within the predetermined voltage difference, a repeating step of repeating the down-sweep step and the determining step until the voltage difference is within the predetermined voltage difference is executed. control method.
を伸縮させることにより振動し、前記振動に基づいた検出信号が前記検出用圧電素子から
出力される圧電アクチュエーターを有する圧電駆動装置の制御方法であって、
前記駆動信号の周波数を目標周波数よりも高い値から前記目標周波数まで掃引するダウ
ンスイープステップと、
前記ダウンスイープステップによって前記周波数が前記目標周波数となった後、前記検
出信号と前記駆動信号との位相差を複数回検出し、検出した複数の前記位相差の差が予め
定めた所定位相差内であるかを判断する判断ステップと、を実行し、
前記差が前記所定位相差内である場合は、前記検出信号の電圧が第１目標電圧となるよ
うに前記周波数を制御する周波数制御ステップを実行し、
前記差が前記所定位相差内ではない場合は、前記差が前記所定位相差内となるまで前記
ダウンスイープステップと判断ステップとを繰り返す繰返ステップを実行することを特徴とする圧電駆動装
置の制御方法。 A piezoelectric actuator comprising a drive piezoelectric element and a detection piezoelectric element, vibrating by applying a drive signal to expand and contract the drive piezoelectric element, and outputting a detection signal based on the vibration from the detection piezoelectric element A control method for a piezoelectric drive device comprising:
a down sweep step of sweeping the frequency of the drive signal from a value higher than the target frequency to the target frequency;
After the frequency becomes the target frequency by the downsweep step, the phase difference between the detection signal and the drive signal is detected a plurality of times, and the detected phase differences are within a predetermined phase difference. and performing a determining step of determining whether
performing a frequency control step of controlling the frequency such that the voltage of the detection signal becomes a first target voltage when the difference is within the predetermined phase difference;
Control of a piezoelectric driving device characterized by executing a repeating step of repeating the downsweep step and the determining step until the difference is within the predetermined phase difference if the difference is not within the predetermined phase difference. Method.
基準とした前記検出信号の電圧の±２０％以内の範囲である請求項１に記載の圧電駆動装
置の制御方法。 2. The piezoelectric driving device according to claim 1, wherein the predetermined voltage difference is within a range of ±20% of the voltage of the reference detection signal, with reference to one of the plurality of detection signals. control method.
直前に実施した前記ダウンスイープステップの前記目標周波数よりも低い請求項１ないし
３のいずれか１項に記載の圧電駆動装置の制御方法。 The target frequency of the downsweep step performed in the repeating step is
4. The method of controlling a piezoelectric drive device according to claim 1, wherein the frequency is lower than the target frequency of the down-sweep step performed immediately before.
周波数を直前に実施した前記ダウンスイープステップの前記目標周波数から今回の前記目
標周波数まで掃引する請求項４に記載の圧電駆動装置の制御方法。 5. The piezoelectric driving device according to claim 4, wherein in said downsweep step performed in said repeating step, the frequency of said drive signal is swept from said target frequency of said downsweep step performed immediately before to said current target frequency. control method.
値未満となったときは、前記駆動信号の周波数を前記下限値以上である固定周波数に固定
し、前記圧電アクチュエーターの駆動を継続する周波数固定ステップを実行する請求項４
または５に記載の圧電駆動装置の制御方法。 When the frequency of the drive signal is less than a preset lower limit in the down sweep step, the frequency of the drive signal is fixed at a fixed frequency equal to or higher than the lower limit, and the piezoelectric actuator continues to be driven. 4. Performing a frequency locking step to
6. The control method of the piezoelectric driving device according to 5.
波数制御ステップに先立って、前記検出用圧電素子から出力される前記検出信号の電圧が
第２目標電圧となるように前記駆動信号の電圧を制御する電圧制御ステップを実行する請
求項１ないし６のいずれか１項に記載の圧電駆動装置の制御方法。 When the frequency control step is performed according to the determination in the determination step, prior to the frequency control step, the driving is performed so that the voltage of the detection signal output from the detection piezoelectric element becomes the second target voltage. 7. A control method for a piezoelectric drive device according to any one of claims 1 to 6, further comprising executing a voltage control step of controlling the voltage of the signal.
を伸縮させることにより振動し、前記振動に基づいた検出信号が前記検出用圧電素子から
出力される圧電アクチュエーターと、
前記圧電アクチュエーターの駆動を制御する制御装置と、を有し、
前記制御装置は、
前記駆動信号の周波数を目標周波数よりも高い値から前記目標周波数まで掃引し、
前記掃引によって前記周波数が前記目標周波数となった後、前記検出信号を複数回検出
し、検出した複数の前記検出信号の電圧差が予め定めた所定電圧差内であるかを判断し、
前記電圧差が前記所定電圧差内である場合は、前記検出信号の電圧が第１目標電圧とな
るように前記周波数を制御し、
前記電圧差が前記所定電圧差内ではない場合は、前記電圧差が前記所定電圧差内となる
まで前記掃引と前記判断とを繰り返すことを特徴とする圧電駆動装置。 A piezoelectric actuator comprising a drive piezoelectric element and a detection piezoelectric element, vibrating by applying a drive signal to expand and contract the drive piezoelectric element, and outputting a detection signal based on the vibration from the detection piezoelectric element When,
a control device that controls driving of the piezoelectric actuator;
The control device is
sweeping the frequency of the drive signal from a value higher than the target frequency to the target frequency;
After the frequency becomes the target frequency by the sweep, the detection signal is detected a plurality of times, and it is determined whether the voltage difference between the detected plurality of detection signals is within a predetermined voltage difference,
controlling the frequency so that the voltage of the detection signal becomes a first target voltage when the voltage difference is within the predetermined voltage difference;
A piezoelectric driving device, wherein when the voltage difference is not within the predetermined voltage difference, the sweep and the determination are repeated until the voltage difference is within the predetermined voltage difference.
を伸縮させることにより振動し、前記振動に基づいた検出信号が前記検出用圧電素子から
出力される圧電アクチュエーターと、
前記圧電アクチュエーターの駆動を制御する制御装置と、を有し、
前記制御装置は、
前記駆動信号の周波数を目標周波数よりも高い値から前記目標周波数まで掃引し、
前記掃引によって前記周波数が前記目標周波数となった後、前記検出信号と前記駆動信
号との位相差を複数回検出し、検出した複数の前記位相差の差が予め定めた所定位相差内
であるかを判断し、
前記差が前記所定位相差内である場合は、前記検出信号の電圧が第１目標電圧となるよ
うに前記周波数を制御し、
前記差が前記所定位相差内ではない場合は、前記差が前記所定位相差内となるまで前記
掃引と前記判断とを繰り返すことを特徴とする圧電駆動装置。 A piezoelectric actuator comprising a drive piezoelectric element and a detection piezoelectric element, vibrating by applying a drive signal to expand and contract the drive piezoelectric element, and outputting a detection signal based on the vibration from the detection piezoelectric element When,
a control device that controls driving of the piezoelectric actuator;
The control device is
sweeping the frequency of the drive signal from a value higher than the target frequency to the target frequency;
After the frequency becomes the target frequency by the sweep, the phase difference between the detection signal and the driving signal is detected a plurality of times, and the plurality of detected phase differences are within a predetermined phase difference. determine whether
controlling the frequency so that the voltage of the detection signal becomes a first target voltage when the difference is within the predetermined phase difference;
The piezoelectric driving device, wherein when the difference is not within the predetermined phase difference, the sweep and the determination are repeated until the difference is within the predetermined phase difference.
前記圧電アクチュエーターによって駆動される被駆動体と、を有することを特徴とする
圧電モーター。 A piezoelectric driving device according to claim 8 or 9;
and a driven body driven by the piezoelectric actuator.
前記第１部材に対して回動する第２部材と、
前記第１部材に対して前記第２部材を回動させる請求項８または９に記載の圧電駆動装
置と、を有することを特徴とするロボット。 a first member;
a second member that rotates with respect to the first member;
10. A robot, comprising: the piezoelectric driving device according to claim 8 or 9, which rotates the second member with respect to the first member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020057358A JP7363635B2 (en) | 2020-03-27 | 2020-03-27 | Control method of piezoelectric drive device, piezoelectric drive device, piezoelectric motor and robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020057358A JP7363635B2 (en) | 2020-03-27 | 2020-03-27 | Control method of piezoelectric drive device, piezoelectric drive device, piezoelectric motor and robot |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021158804A JP2021158804A (en) | 2021-10-07 |
| JP2021158804A5 true JP2021158804A5 (en) | 2023-01-26 |
| JP7363635B2 JP7363635B2 (en) | 2023-10-18 |
Family
ID=77918942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020057358A Active JP7363635B2 (en) | 2020-03-27 | 2020-03-27 | Control method of piezoelectric drive device, piezoelectric drive device, piezoelectric motor and robot |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7363635B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115996306A (en) * | 2021-10-18 | 2023-04-21 | Oppo广东移动通信有限公司 | Drive control circuit and method, drive module, camera module and electronic equipment |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012235656A (en) * | 2011-05-09 | 2012-11-29 | Canon Inc | Drive controller of vibration-type actuator |
| JP6399824B2 (en) * | 2014-06-30 | 2018-10-03 | キヤノン株式会社 | Control device and control method for vibration actuator, and imaging device |
| JP2019114671A (en) * | 2017-12-25 | 2019-07-11 | セイコーエプソン株式会社 | Piezoelectric actuator, piezoelectric drive device, robot, electronic component transfer device, printer and projector |
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2020
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