JP2021155690A - Pressure sensitive adhesive sheet - Google Patents

Abstract

To provide a pressure sensitive adhesive sheet capable of temporarily fixing an adherend in a peelable manner, the pressure sensitive adhesive sheet not requiring a laser beam irradiation of high output at peeling, while capable of eliminating a need for a process of cleaning the adherend after peeling.SOLUTION: A pressure sensitive adhesive sheet includes an adhesive layer having an ultraviolet light absorber and an active energy ray-curable adhesive. In the pressure sensitive adhesive sheet, light transmittance at wavelength 355 nm is 50% or less. In one embodiment, the adhesive layer is 20 μm thick or less. In one embodiment, visible light transmittance is 50% or more in the pressure sensitive adhesive sheet.SELECTED DRAWING: Figure 1

Description

The present invention relates to an adhesive sheet.

When processing various members represented by electronic parts, it is common practice to temporarily fix the member to a support using an adhesive sheet, and then peel off the processed member from the support after processing. For example, in Patent Document 1, a substrate (member to be processed) is processed in a state of being temporarily fixed to a support via an adhesive layer and a separation layer, and after processing, the separation layer is destroyed by laser light irradiation and bonded. A method of peeling the substrate together with the agent layer from the support and then removing the adhesive layer from the substrate is described.

Patent No. 5875850

However, the above method requires a step of removing the adhesive layer from the member and cleaning the non-adhesive surface of the member, which is problematic in terms of production cost. There is also a problem that the member is damaged when the laser beam is irradiated with a high output.

The present invention has been made to solve the above-mentioned conventional problems, and an object of the present invention is an adhesive sheet capable of temporarily fixing an adherend so that it can be peeled off, and a laser having a high output at the time of peeling. It is an object of the present invention to provide an adhesive sheet which does not require light irradiation and which can eliminate the step of cleaning the adherend after peeling.

The pressure-sensitive adhesive sheet of the present invention is a pressure-sensitive adhesive sheet including a pressure-sensitive adhesive layer containing an ultraviolet absorber and an active energy ray-curable pressure-sensitive adhesive, and the light transmittance of the pressure-sensitive adhesive sheet at a wavelength of 355 nm is 50% or less.
In one embodiment, the thickness of the pressure-sensitive adhesive layer is 20 μm or less.
In one embodiment, the pressure-sensitive adhesive sheet has a visible light transmittance of 50% or more.
In one embodiment, the pressure-sensitive adhesive sheet has a haze value of 70% or less.
In one embodiment, the active energy ray-curable pressure-sensitive adhesive further comprises a photopolymerization initiator and a photosensitizer.
In one embodiment, the 5% weight loss temperature of the UV absorber is 350 ° C. or lower.
In one embodiment, the pressure-sensitive adhesive layer further comprises particles.

According to the present invention, it is an adhesive sheet capable of temporarily fixing the adherend so that it can be peeled off, and a step of cleaning the adherend after peeling without requiring high-power laser light irradiation at the time of peeling. An adhesive sheet that may be unnecessary can be provided.

(A) is a schematic cross-sectional view of an adhesive sheet according to one embodiment of the present invention. (B) is a schematic cross-sectional view of an adhesive sheet according to another embodiment of the present invention.

A. Summary view of a pressure-sensitive adhesive sheet 1 (a) is a schematic sectional view of a pressure-sensitive adhesive sheet according to one embodiment of the present invention. The pressure-sensitive adhesive sheet 100 according to this embodiment includes a pressure-sensitive adhesive layer 10. The pressure-sensitive adhesive layer 10 contains an active energy ray-curable pressure-sensitive adhesive and an ultraviolet absorber. FIG. 1B is a schematic cross-sectional view of an adhesive sheet according to one embodiment of the present invention. The pressure-sensitive adhesive sheet 200 according to this embodiment further includes a base material 20, and the pressure-sensitive adhesive layer 20 is arranged on at least one side of the base material 20. Although not shown, the pressure-sensitive adhesive sheet of the present invention may be provided with a release liner on the outside of the pressure-sensitive adhesive layer for the purpose of protecting the pressure-sensitive adhesive surface until it is used. In addition, the pressure-sensitive adhesive sheet may further contain any suitable other layer as long as the effects of the present invention can be obtained. In one embodiment, the pressure-sensitive adhesive sheet of the present invention is composed of only one pressure-sensitive adhesive layer, as shown in FIG. 1 (a). In another embodiment, the pressure-sensitive adhesive sheet of the present invention comprises a substrate and an pressure-sensitive adhesive layer, the pressure-sensitive adhesive layer directly on the substrate (ie, via another layer). Not placed). In the present invention, as will be described later, since the adherend can be satisfactorily peeled off due to a decrease in the adhesive strength and deformation of the pressure-sensitive adhesive layer, other than the pressure-sensitive adhesive layer for separating the adherend from the pressure-sensitive adhesive sheet. It is possible to form an adhesive sheet without providing a layer (so-called separation layer).

In the present invention, since the pressure-sensitive adhesive layer contains an ultraviolet absorber, the adherend can be peeled off by laser light irradiation. More specifically, by irradiating the pressure-sensitive adhesive layer with laser light, the gas generated by the decomposition of the ultraviolet absorber, and / or by the gas generated by the decomposition of the pressure-sensitive adhesive layer by the heat generation of the ultraviolet absorber. , The pressure-sensitive adhesive layer is deformed, and as a result, peelability is exhibited in the portion irradiated with the laser beam. According to the present invention, since the deformation can be caused in a minute range as described above, the adherend can be satisfactorily peeled off even when the small adherend is processed. Further, even when the small adherend that requires peeling and the small adherend that does not require peeling are temporarily fixed adjacent to each other, only the small adherend that requires peeling can be peeled off. It is also possible to prevent unnecessary detachment of the small adherend.

Furthermore, the present invention is characterized in that the pressure-sensitive adhesive layer contains an active energy ray-curable pressure-sensitive adhesive. In such a pressure-sensitive adhesive sheet of the present invention, the adhesive strength of the entire pressure-sensitive adhesive layer is reduced by irradiating the pressure-sensitive adhesive sheet with active energy rays. The entire adhesive layer of the adhesive sheet to which the adherend is attached is irradiated with active energy rays to reduce the adhesive force, and then the laser beam is irradiated as described above to leave adhesive residue after peeling. Can be prevented. By using such an adhesive sheet, it is possible to omit cleaning the adherend after peeling. Further, by forming the pressure-sensitive adhesive layer containing the active energy ray-curable pressure-sensitive adhesive, the laser output at the time of peeling can be reduced. Since the adhesive sheet of the present invention exhibits peelability with low-power laser light, if the adhesive sheet is used, damage to the adherend at the time of peeling is reduced and damage to the adherend is prevented. be able to. Examples of the active energy ray include gamma ray, ultraviolet ray, visible ray, infrared ray (heat ray), radio wave, alpha ray, beta ray, electron beam, plasma flow, ionization ray, particle beam and the like. It is preferably ultraviolet light.

The light transmittance of the pressure-sensitive adhesive sheet of the present invention at a wavelength of 355 nm is 50% or less. In the present invention, the laser output at the time of peeling can be lowered by lowering the light transmittance. Since the adhesive sheet of the present invention exhibits peelability with low-power laser light, if the adhesive sheet is used, damage to the adherend at the time of peeling is reduced and damage to the adherend is prevented. be able to. The light transmittance of the pressure-sensitive adhesive sheet of the present invention at a wavelength of 355 nm is preferably 40% or less, more preferably 30% or less. Within such a range, the above effect becomes more remarkable. The light transmittance of the pressure-sensitive adhesive sheet is the light transmittance in the thickness direction of the pressure-sensitive adhesive sheet, and is the light transmittance measured for all the constituent layers of the pressure-sensitive adhesive sheet. In the present invention, the light transmittance of the pressure-sensitive adhesive sheet at a wavelength of 355 nm can be controlled by adjusting the content ratio of the ultraviolet absorber contained in the pressure-sensitive adhesive layer.

The visible light transmittance of the pressure-sensitive adhesive sheet of the present invention is preferably 50% or more, more preferably 60% or more, still more preferably 70% or more. Within such a range, it is possible to obtain an adhesive sheet in which the adherend to be peeled can be satisfactorily visually recognized through the adhesive sheet when the adherend is peeled by laser light irradiation. The higher the visible light transmittance of the pressure-sensitive adhesive sheet is, the more preferable it is, but the upper limit thereof is, for example, 95% (preferably 100%).

The haze value of the pressure-sensitive adhesive sheet of the present invention is preferably 70% or less, more preferably 65% or less. Within such a range, it is possible to obtain an adhesive sheet in which the adherend to be peeled can be satisfactorily visually recognized through the adhesive sheet when the adherend is peeled by laser light irradiation. The lower the haze value of the pressure-sensitive adhesive sheet is, the more preferable it is, but the lower limit thereof is, for example, 0.1%.

The initial adhesive force at 23 ° C. when the adhesive sheet of the present invention is attached to a stainless steel plate is preferably 0.1N / 20mm to 15N / 20mm, and more preferably 0.5N / 20mm to 10N / 20mm. .. Within such a range, an adhesive sheet that can hold the adherend well can be obtained. Adhesive strength is measured according to JIS Z 0237: 2000. Specifically, an adhesive sheet is attached to a stainless steel plate (arithmetic mean surface roughness Ra: 50 ± 25 nm) by one reciprocation of a 2 kg roller, left at 23 ° C. for 30 minutes, and then peeled off at a peeling angle of 180 °. The pressure (tensile speed) is measured by peeling off the adhesive sheet under the condition of 300 mm / min. The adhesive strength of the pressure-sensitive adhesive layer changes due to irradiation with active energy rays and laser light, but in the present specification, the "initial adhesive strength" means the adhesive strength before irradiation with active energy rays and laser light. ..

In one embodiment, the adhesive strength at 23 ° C. after the adhesive sheet is attached to a silicon mirror wafer ^{and irradiated with ultraviolet rays of 460 mJ / cm 2} is preferably 0.01 N / 20 mm to 0.3 N / 20 mm. It is more preferably 0.02N / 20mm to 0.2N / 20mm. Within such a range, an adhesive sheet with a small amount of adhesive residue can be obtained. For the above ultraviolet irradiation, for example, using an ultraviolet irradiation device (manufactured by Nitto Seiki Co., Ltd., trade name "UM-810"), ultraviolet rays of a high-pressure mercury lamp (characteristic wavelength: 365 nm, integrated light amount: 460 mJ / cm ² , irradiation energy: 70 W. The pressure-sensitive adhesive layer is irradiated with / cm ^{2, irradiation time: 6.6 seconds).}

The thickness of the pressure-sensitive adhesive sheet is preferably 1 μm to 300 μm, more preferably 5 μm to 200 μm.

B. Adhesive layer The thickness of the adhesive layer is preferably 20 μm or less. Within such a range, it is possible to lower the laser output at the time of peeling, and it is possible to obtain an adhesive sheet having excellent peeling property. The thickness of the pressure-sensitive adhesive layer is more preferably 10 μm or less, further preferably 8 μm or less, and more preferably 1 μm to 8 μm. Within such a range, the above effect becomes remarkable.

As described above, the pressure-sensitive adhesive layer contains an active energy ray-curable pressure-sensitive adhesive and an ultraviolet absorber.

(Active energy ray-curable adhesive)
In one embodiment, as an active energy ray-curable pressure-sensitive adhesive, an active energy ray-curable type containing a base polymer as a base material and an active energy ray-reactive compound (monomer or oligomer) capable of binding to the base polymer. The pressure-sensitive adhesive (A1) is used. In another embodiment, an active energy ray-curable pressure-sensitive adhesive (A2) containing an active energy ray-reactive polymer is used as the base polymer. Preferably, the base polymer has a functional group capable of reacting with the photopolymerization initiator. Examples of the functional group include a hydroxyl group and a carboxyl group.

Examples of the base polymer used in the pressure-sensitive adhesive (A1) include natural rubber, polyisobutylene rubber, styrene / butadiene rubber, styrene / isoprene / styrene block copolymer rubber, recycled rubber, butyl rubber, polyisobutylene rubber, and nitrile rubber. Examples thereof include rubber-based polymers such as (NBR); silicone-based polymers; acrylic-based polymers. These polymers may be used alone or in combination of two or more. Of these, an acrylic polymer is preferable.

Examples of the acrylic polymer include copolymers or copolymers of hydrocarbon group-containing (meth) acrylic acid esters such as (meth) acrylic acid alkyl ester, (meth) acrylic acid cycloalkyl ester, and (meth) acrylic acid aryl ester. Examples thereof include a copolymer of the hydrocarbon group-containing (meth) acrylic acid ester and another copolymerizable monomer. Examples of the (meth) acrylic acid alkyl ester include methyl ester, ethyl ester, propyl ester, isopropyl ester, butyl ester, isobutyl ester, s-butyl ester, t-butyl ester, pentyl ester and iso of (meth) acrylic acid. Pentyl ester, hexyl ester, heptyl ester, octyl ester, 2-ethylhexyl ester, isooctyl ester, nonyl ester, decyl ester, isodecyl ester, undecyl ester, dodecyl ester, that is, lauryl ester, tridecyl ester, tetradecyl ester, hexa. Examples include decyl esters, octadecyl esters, and eicosyl esters. Examples of the (meth) acrylic acid cycloalkyl ester include cyclopentyl ester and cyclohexyl ester of (meth) acrylic acid. Examples of the (meth) acrylic acid aryl ester include phenyl (meth) acrylic acid and benzyl (meth) acrylic acid. The content ratio of the constituent unit derived from the hydrocarbon group-containing (meth) acrylic acid ester is preferably 40 parts by weight or more, more preferably 60 parts by weight or more, based on 100 parts by weight of the base polymer.

Examples of the other copolymerizable monomer include a carboxy group-containing monomer, an acid anhydride monomer, a hydroxy group-containing monomer, a glycidyl group-containing monomer, a sulfonic acid group-containing monomer, a phosphoric acid group-containing monomer, acrylamide, and acrylonitrile. Examples include functional group-containing monomers. Examples of the carboxy group-containing monomer include acrylic acid, methacrylic acid, carboxyethyl (meth) acrylate, carboxypentyl (meth) acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid. Examples of the acid anhydride monomer include maleic anhydride and itaconic anhydride. Examples of the hydroxy group-containing monomer include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, and 6-hydroxyhexyl (meth) acrylate. Examples include 8-hydroxyoctyl acrylate, 10-hydroxydecyl (meth) acrylate, 12-hydroxylauryl (meth) acrylate, and (4-hydroxymethylcyclohexyl) methyl (meth) acrylate. Examples of the glycidyl group-containing monomer include glycidyl (meth) acrylate and methyl glycidyl (meth) acrylate. Examples of the sulfonic acid group-containing monomer include styrene sulfonic acid, allyl sulfonic acid, 2- (meth) acrylamide-2-methylpropane sulfonic acid, (meth) acrylamide propane sulfonic acid, sulfopropyl (meth) acrylate, and (meth). ) Acryloyloxynaphthalene sulfonic acid can be mentioned. Examples of the phosphoric acid group-containing monomer include 2-hydroxyethylacryloyl phosphate. Examples of acrylamide include N-acryloyl morpholine. These may be used individually by 1 type, and may be used in combination of 2 or more type. The content ratio of the structural unit derived from the copolymerizable monomer is preferably 60 parts by weight or less, and more preferably 40 parts by weight or less, based on 100 parts by weight of the base polymer.

Acrylic polymers may contain structural units derived from polyfunctional monomers to form crosslinked structures in the polymer backbone. Examples of the polyfunctional monomer include hexanediol di (meth) acrylate, (poly) ethylene glycol di (meth) acrylate, (poly) propylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, and pentaerythritol di. (Meta) Acrylate, Trimethylol Propanetri (Meta) Acrylate, Pentaerythritol Tri (Meta) Acrylate, Dipentaerythritol Hexa (Meta) Acrylate, Epoxy (Meta) Acrylate (ie, Polyglycidyl (Meta) Acrylate), Polyester (Meta) ) Acrylate and urethane (meth) acrylate can be mentioned. These may be used individually by 1 type, and may be used in combination of 2 or more type. The content ratio of the structural unit derived from the polyfunctional monomer is preferably 40 parts by weight or less, and more preferably 30 parts by weight or less, based on 100 parts by weight of the base polymer.

The weight average molecular weight of the acrylic polymer is preferably 100,000 to 3 million, more preferably 200,000 to 2 million. The weight average molecular weight can be measured by GPC (solvent: THF).

Examples of the active energy ray-reactive compound that can be used in the pressure-sensitive adhesive (A1) include functional groups having a polymerizable carbon-carbon multiple bond such as an acryloyl group, a methacryloyl group, a vinyl group, an allyl group, and an acetylene group. Examples thereof include photoreactive monomers or oligomers having. Specific examples of the photoreactive monomer include trimethylolpropantri (meth) acrylate, tetramethylolmethanetetra (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, and dipentaerythritol mono. (Hydroxypenta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, polyethylene glycol di (meth) acrylate, etc. Examples thereof include an esterified product of a meta) acrylic acid and a polyhydric alcohol; a polyfunctional urethane (meth) acrylate; an epoxy (meth) acrylate; and an oligoester (meth) acrylate. Further, monomers such as methacryloisocyanate, 2-methacryloyloxyethyl isocyanate (2-isocyanatoethyl methacrylate), m-isopropenyl-α, and α-dimethylbenzylisocyanate may be used. Specific examples of the photoreactive oligomer include 2 to pentamers of the above-mentioned monomers. The molecular weight of the photoreactive oligomer is preferably 100 to 3000.

Further, as the active energy ray-reactive compound, a monomer such as epoxidized butadiene, glycidyl methacrylate, acrylamide, vinyl siloxane; or an oligomer composed of the monomer may be used.

Further, as the active energy ray-reactive compound, a mixture of an organic salt such as an onium salt and a compound having a plurality of heterocycles in the molecule may be used. In the mixture, organic salts are cleaved by irradiation with active energy rays (for example, ultraviolet rays and electron beams) to generate ions, which act as a starting species to cause a ring-opening reaction of a heterocycle to form a three-dimensional network structure. Can be done. Examples of the organic salts include iodonium salt, phosphonium salt, antimonium salt, sulfonium salt, borate salt and the like. Examples of the heterocycle in the compound having a plurality of heterocycles in the molecule include oxylane, oxetane, oxolane, thiirane, and aziridine.

In the pressure-sensitive adhesive (A1), the content ratio of the active energy ray-reactive compound is preferably 0.1 part by weight to 500 parts by weight, and more preferably 5 parts by weight to 300 parts by weight with respect to 100 parts by weight of the base polymer. It is a part by weight, more preferably 40 parts by weight to 150 parts by weight.

As the active energy ray-reactive polymer (base polymer) contained in the pressure-sensitive adhesive (A2), for example, a functional group having a carbon-carbon multiple bond such as an acryloyl group, a methacryloyl group, a vinyl group, an allyl group, or an acetylene group can be used. Examples include the polymer having. Specific examples of the active energy ray-reactive polymer include a polymer composed of a polyfunctional (meth) acrylate; a photocationically polymerized polymer; a cinnamoyl group-containing polymer such as polyvinyl cinnamate; a diazotized aminonovolak resin; polyacrylamide. ; Etc. can be mentioned.

In one embodiment, an active energy ray-reactive polymer composed of an active energy ray-polymerizable carbon-carbon multiple bond introduced into the side chain, main chain and / or main chain terminal of the acrylic polymer is provided. Used. As a method for introducing a radiation-polymerizable carbon-carbon double bond into an acrylic polymer, for example, a raw material monomer containing a monomer having a predetermined functional group (first functional group) is copolymerized to obtain an acrylic polymer. After obtaining the compound, a compound having a predetermined functional group (second functional group) and a radiopolymerizable carbon-carbon double bond which can react with the first functional group to be bonded is carbon-carbon. Examples thereof include a method of subjecting an acrylic polymer to a condensation reaction or an addition reaction while maintaining the radiation polymerizable property of the double bond.

Examples of the combination of the first functional group and the second functional group include a carboxy group and an epoxy group, an epoxy group and a carboxy group, a carboxy group and an aziridyl group, an aziridyl group and a carboxy group, a hydroxy group and an isocyanate group, and an isocyanate group. And hydroxy groups. Of these combinations, a combination of a hydroxy group and an isocyanate group or a combination of an isocyanate group and a hydroxy group is preferable from the viewpoint of ease of reaction tracking. Further, it is technically difficult to prepare a polymer having a highly reactive isocyanate group, but from the viewpoint of easy preparation or availability of an acrylic polymer, the first functionality on the acrylic polymer side is described above. It is more preferable that the group is a hydroxy group and the second functional group is an isocyanate group. In this case, examples of the isocyanate compound having both a radiopolymerizable carbon-carbon double bond and an isocyanate group as a second functional group include methacryloyl isocyanate, 2-methacryloyloxyethyl isocyanate, and m-isopropenyl-α. Examples include α-dimethylbenzyl isocyanate. The acrylic polymer having the first functional group preferably contains the above-mentioned structural unit derived from the hydroxy group-containing monomer, such as 2-hydroxyethyl vinyl ether, 4-hydroxybutyl vinyl ether, and diethylene glucol monovinyl ether. Those containing a structural unit derived from the ether-based compound of the above are also preferable.

The pressure-sensitive adhesive (A2) may further contain the active energy ray-reactive compound (monomer or oligomer).

The active energy ray-curable pressure-sensitive adhesive may contain a photopolymerization initiator.

Any suitable initiator can be used as the photopolymerization initiator. Examples of the photopolymerization initiator include 4- (2-hydroxyethoxy) phenyl (2-hydroxy-2-propyl) ketone, α-hydroxy-α, α'-dimethylacetophenone, and 2-methyl-2-hydroxypropio. Α-Ketol compounds such as phenone and 1-hydroxycyclohexylphenyl ketone; methoxyacetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, 2-methyl-1- [4- (methylthio) -Phenyl] -2-Acetphenone compounds such as morpholinopropane-1, benzoin ether compounds such as benzoin ethyl ether, benzoin isopropyl ether and anisoin methyl ether; ketal compounds such as benzyl dimethyl ketal; 2-naphthalene sulfonyl chloride and the like. Aromatic sulfonyl chloride compounds; photoactive oxime compounds such as 1-phenone-1,1-propandion-2- (o-ethoxycarbonyl) oxime; benzophenone, benzoylbenzoic acid, 3,3'-dimethyl-4 -Benzophenone compounds such as methoxybenzophenone; thioxanthone, 2-chlorothioxanthone, 2-methylthioxanthone, 2,4-dimethylthioxanthone, isopropylthioxanthone, 2,4-dichlorothioxanthone, 2,4 Examples thereof include thioxanthone compounds such as-diethylthioxanthone and 2,4-diisopropylthioxanthone; camphorquinone; ketone halide; acylphosphinoxide; acylphosphonate and the like. The amount of the photopolymerization initiator used can be set to any suitable amount.

In one embodiment, a photopolymerization initiator having a maximum absorption wavelength in the range of 400 nm or less (preferably 380 nm or less, more preferably 340 nm or less) is used. When such a photopolymerization initiator is used, when the adhesive strength of the entire pressure-sensitive adhesive layer is reduced by irradiating with active energy rays, the curing reaction of the pressure-sensitive adhesive preferably occurs, and a pressure-sensitive adhesive sheet having a particularly small amount of adhesive residue can be obtained. can.

A commercially available product may be used as the photopolymerization initiator. For example, as a photopolymerization initiator having a maximum absorption wavelength in the range of 400 nm or less, BASF's trade names "Irgacure 127", "Irgacure 369", "Irgacure 369E", "Irgacure 379", "Irgacure 379EG", "Irgacure 379EG" Examples thereof include "Irgacure 819", "Irgacure TOP", "Irgacure 784", and "Irgacure OXE01".

In one embodiment, the active energy ray-curable pressure-sensitive adhesive may include a photosensitizer.

In one embodiment, the photosensitizer can be used in combination with the photopolymerization initiator. Since the photosensitizer can generate radicals from the photopolymerization initiator by passing the energy obtained by absorbing light to the photopolymerization initiator, the absorption peak of the photopolymerization initiator itself is high. Polymerization can proceed with light on the long wavelength side that does not exist. Therefore, by containing the photosensitizer, it is possible to increase the difference between the absorption wavelength of the ultraviolet absorber and the wavelength at which radicals can be generated from the photopolymerization initiator. As a result, the photopolymerization of the pressure-sensitive adhesive layer and the peeling by the ultraviolet absorber can be performed without affecting each other. In one embodiment, 2,2-dimethoxy-1,2-diphenylethane-1-one (for example, manufactured by BASF, trade name "Irgacure 651") as a photopolymerization initiator and a photosensitizer are used. Is used together. Examples of such a photosensitizer include product names "UVS-581" and 9,10-diethoxyanthracene manufactured by Kawasaki Kasei Chemicals Co., Ltd. (for example, product name "UVS1101" manufactured by Kawasaki Kasei Chemicals Co., Ltd.). Be done.

Other examples of the above photosensitizer include 9,10-dibutoxyanthracene (for example, manufactured by Kawasaki Kasei Chemicals, trade name "UVS-1331"), 2-isopropylthioxanthone, benzophenone, thioxanthone derivative, 4,4. '-Bis (dimethylamino) benzophenone and the like can be mentioned. Examples of the thioxanthone derivative include ethoxycarbonylthioxanthone and isopropylthioxanthone.

The content ratio of the photosensitizer is preferably 0.01 parts by weight to 2 parts by weight, and more preferably 0.5 parts by weight to 2 parts by weight with respect to 100 parts by weight of the base polymer.

Preferably, the active energy ray-curable pressure-sensitive adhesive contains a cross-linking agent. Examples of the cross-linking agent include isocyanate-based cross-linking agents, epoxy-based cross-linking agents, oxazoline-based cross-linking agents, aziridine-based cross-linking agents, melamine-based cross-linking agents, peroxide-based cross-linking agents, urea-based cross-linking agents, and metal alkoxide-based cross-linking agents. Examples thereof include a metal chelate-based cross-linking agent, a metal salt-based cross-linking agent, a carbodiimide-based cross-linking agent, and an amine-based cross-linking agent.

When the pressure-sensitive adhesive layer has a single-layer structure, the content ratio of the cross-linking agent is preferably 0.5 parts by weight to 10 parts by weight, more preferably 1 part by weight, based on 100 parts by weight of the base polymer of the pressure-sensitive adhesive. ~ 8 parts by weight.

In one embodiment, an isocyanate-based cross-linking agent is preferably used. Isocyanate-based cross-linking agents are preferable because they can react with various functional groups. Specific examples of the isocyanate-based cross-linking agent include lower aliphatic polyisocyanates such as butylene diisocyanate and hexamethylene diisocyanate; alicyclic isocyanates such as cyclopentylene diisocyanate, cyclohexylene diisocyanate, and isophorone diisocyanate; 2,4- Aromatic isocyanates such as tolylene diisocyanate, 4,4'-diphenylmethane diisocyanate, xylylene diisocyanate; trimethylolpropane / tolylene diisocyanate trimer adduct (manufactured by Nippon Polyurethane Industry Co., Ltd., trade name "Coronate L"), tri Methylolpropane / hexamethylene diisocyanate trimeric adduct (manufactured by Nippon Polyurethane Industry Co., Ltd., trade name "Coronate HL"), isocyanurate of hexamethylene diisocyanate (manufactured by Japan Polyurethane Industry Co., Ltd., trade name "Coronate HX"), etc. Isocyanate adduct; etc. Preferably, a cross-linking agent having 3 or more isocyanate groups is used.

The active energy ray-curable pressure-sensitive adhesive may further contain any suitable additive, if desired. Examples of the additive include an active energy ray polymerization accelerator, a radical trapping agent, an antistatic agent, a plasticizer (for example, a trimellitic acid ester-based plasticizer, a pyromellitic acid ester-based plasticizer, etc.), a pigment, a dye, and a filling. Examples thereof include agents, antioxidants, conductive materials, antistatic agents, ultraviolet absorbers, light stabilizers, release modifiers, softeners, surfactants, flame retardants, antioxidants and the like.

(UV absorber)
As the ultraviolet absorber, any suitable ultraviolet absorber can be used as long as it is a compound that absorbs ultraviolet rays (for example, a wavelength of 355 nm). Examples of the ultraviolet absorber include benzotriazole-based ultraviolet absorbers, benzophenone-based ultraviolet absorbers, triazine-based ultraviolet absorbers, salicylate-based ultraviolet absorbers, cyanoacrylate-based ultraviolet absorbers, and the like. Of these, a triazine-based ultraviolet absorber or a benzotriazole-based ultraviolet absorber is preferable, and a triazine-based ultraviolet absorber is particularly preferable. In particular, when an acrylic pressure-sensitive adhesive is used as the pressure-sensitive adhesive A, a triazine-based ultraviolet absorber can be preferably used because the acrylic pressure-sensitive adhesive has high compatibility with the base polymer. The triazine-based ultraviolet absorber is more preferably composed of a compound having a hydroxyl group, and particularly preferably an ultraviolet absorber composed of a hydroxyphenyltriazine-based compound (hydroxyphenyltriazine-based ultraviolet absorber).

Examples of the hydroxyphenyltriazine-based ultraviolet absorber include 2- (4,6-bis (2,4-dimethylphenyl) -1,3,5-triazine-2-yl) -5-hydroxyphenyl and [(C10). -C16 (mainly C12-C13) alkyloxy) methyl] Reaction product with oxylane (trade name "TINUVIN 400", manufactured by BASF), 2- [4,6-bis (2,4-dimethylphenyl) -1 , 3,5-Triazine-2-yl] -5- [3- (dodecyloxy) -2-hydroxypropoxy] phenol), 2- (2,4-dihydroxyphenyl) -4,6-bis- (2, Reaction product of 4-dimethylphenyl) -1,3,5-triazine and (2-ethylhexyl) -glycidate (trade name "TINUVIN 405", manufactured by BASF), 2,4-bis (2-hydroxy-). 4-Butoxyphenyl) -6- (2,4-dibutoxyphenyl) -1,3,5-triazine (trade name "TINUVIN 460", manufactured by BASF), 2- (4,6-diphenyl-1,3) , 5-Triazine-2-yl) -5-[(hexyl) oxy] -phenol (trade name "TINUVIN 1577", manufactured by BASF), 2- (4,6-diphenyl-1,3,5-triazine- 2-Il) -5- [2- (2-ethylhexanoyloxy) ethoxy] -phenol (trade name "Adecastab LA-46", manufactured by ADEKA Co., Ltd.), 2- (2-Hydroxy-4- [1] -Octyloxycarbonylethoxy] phenyl) -4,6-bis (4-phenylphenyl) -1,3,5-triazine (trade name "TINUVIN 479", manufactured by BASF), trade name "TINUVIN 477" manufactured by BASF "And so on.

Examples of the benzotriazole-based ultraviolet absorber (benzotriazole-based compound) include 2- (2-hydroxy-5-tert-butylphenyl) -2H-benzotriazole (trade name "TINUVIN PS", manufactured by BASF) and benzene. Ester compounds of propanoic acid and 3- (2H-benzotriazole-2-yl) -5- (1,1-dimethylethyl) -4-hydroxy (C7-9 side chain and linear alkyl) (trade name "TINUVIN 384") -2 ", manufactured by BASF), Octyl 3- [3-tert-butyl-4-hydroxy-5- (5-chloro-2H-benzotriazole-2-yl) phenyl] propionate and 2-ethylhexyl-3- [ 3-tert-Butyl-4-hydroxy-5- (5-chloro-2H-benzotriazole-2yl) phenyl] propionate mixture (trade name "TINUVIN 109", manufactured by BASF), 2- (2H-benzotriazole), 2- (2H-benzotriazole) -2-yl) -4,6-bis (1-methyl-1-phenylethyl) phenol (trade name "TINUVIN 900", manufactured by BASF), 2- (2H-benzotriazole-2-yl) -6- (1-Methyl-1-phenylethyl) -4- (1,1,3,3-tetramethylbutyl) phenol (trade name "TINUVIN 928", manufactured by BASF), methyl 3- (3- (2H-benzotriazole) -2-yl) -5-tert-butyl-4-hydroxyphenyl) propionate / polyethylene glycol 300 reaction product (trade name "TINUVIN 1130", manufactured by BASF), 2- (2H-benzotriazole-2-yl) ) -P-cresol (trade name "TINUVIN P", manufactured by BASF), 2- (2H-benzotriazole-2-yl) -4,6-bis (1-methyl-1-phenylethyl) phenol (trade name) "TINUVIN 234", manufactured by BASF), 2- [5-chloro-2H-benzotriazole-2-yl] -4-methyl-6- (tert-butyl) phenol (trade name "TINUVIN 326", manufactured by BASF) ), 2- (2H-benzotriazole-2-yl) -4,6-di-tert-pentylphenol (trade name "TINUVIN 328", manufactured by BASF), 2- (2H-benzotriazole-2-yl) -4- (1,1,3,3-tetramethylbutyl) phenol (trade name "TINUVI" N 329 ", manufactured by BASF), 2,2'-methylenebis [6- (2H-benzotriazole-2-yl) -4- (1,1,3,3-tetramethylbutyl) phenol] (trade name" TINUVIN 360 ”, manufactured by BASF), reaction product of methyl 3- (3- (2H-benzotriazole-2-yl) -5-tert-butyl-4-hydroxyphenyl) propionate and polyethylene glycol 300 (trade name) "TINUVIN 213", manufactured by BASF), 2- (2H-benzotriazole-2-yl) -6-dodecyl-4-methylphenol (trade name "TINUVIN 571", manufactured by BASF), 2- [2-hydroxy -3- (3,4,5,6-tetrahydrophthalimide-methyl) -5-methylphenyl] Benzotriazole (trade name "Sumisorb 250", manufactured by Sumitomo Chemical Co., Ltd.), 2- (3-tert-butyl- 2-Hydroxy-5-methylphenyl) -5-chloro-2H-benzotriazole (trade name "SEESORB 703", manufactured by Cipro Kasei Co., Ltd.), 2- (2H-benzotriazole-2-yl) -4-methyl-6 -(3,4,5,6-Tetrahydrophthalimidylmethyl) phenol (trade name "SEESORB 706", manufactured by Cipro Kasei Co., Ltd.), 2- (4-benzoyloxy-2-hydroxyphenyl) -5-chloro-2H -Benzotriazole (trade name "SEESORB 7012BA" manufactured by Cipro Chemical Co., Ltd.), 2-tert-butyl-6- (5-chloro-2H-benzotriazole-2-yl) -4-methylphenol (trade name "KEMISORB 73") , 2'-Methylenebis [6- (2H-benzotriazole-2-yl) -4-tert-octylphenol] (trade name "Adecastab LA-31", manufactured by ADEKA Co., Ltd.) , 2- (2H-benzotriazole-2-yl) -p-cellulose (trade name "Adecastab LA-32", manufactured by ADEKA Co., Ltd.), 2- (5-chloro-2H-benzotriazole-2-yl) Examples thereof include -6-tert-butyl-4-methylphenol (trade name "Adecastab LA-36", manufactured by ADEKA Co., Ltd.).

The ultraviolet absorber may be a dye or a pigment. Examples of the pigment include azo-based, phthalocyanine-based, anthraquinone-based, rake-based, perylene-based, perinone-based, quinacridone-based, thioindigo-based, dioxandine-based, isoindoleinone-based, and quinophthalone-based pigments. Examples of the dye include azo dyes, phthalocyanine dyes, anthraquinone dyes, carbonyl dyes, indigo dyes, quinone imine dyes, methine dyes, quinoline dyes, and nitro dyes.

The molecular weight of the compound constituting the ultraviolet absorber is preferably 100 to 1500, more preferably 200 to 1200, and further preferably 200 to 1000. Within such a range, a pressure-sensitive adhesive sheet capable of forming a better deformed portion can be obtained by laser light irradiation.

The maximum absorption wavelength of the ultraviolet absorber is preferably 300 nm to 450 nm, more preferably 320 nm to 400 nm, and further preferably 330 nm to 380 nm. The difference between the maximum absorption wavelength of the ultraviolet absorber and the maximum absorption wavelength of the photopolymerization initiator is preferably 10 nm or more, more preferably 25 nm or more.

The 5% weight loss temperature of the ultraviolet absorber is preferably 350 ° C. or lower, more preferably 330 ° C. or lower. The lower limit of the 5% weight loss temperature of the UV absorber is, for example, 100 ° C. Within such a range, a pressure-sensitive adhesive sheet capable of forming a better deformed portion can be obtained by laser light irradiation. The 5% weight loss temperature of the UV absorber means the temperature at which the weight of the UV absorber when the temperature of the UV absorber is raised is reduced by 5% by weight with respect to the weight before the temperature rise. do. The 5% weight loss temperature is measured using a differential thermal analyzer under the measurement conditions of a temperature rise temperature of 10 ° C./min, an air atmosphere, and a flow rate of 25 ml / min.

The content ratio of the ultraviolet absorber is preferably 1 part by weight to 50 parts by weight, and more preferably 5 parts by weight to 20 parts by weight with respect to 100 parts by weight of the base polymer in the pressure-sensitive adhesive layer. Within such a range, when the adhesive strength of the entire pressure-sensitive adhesive layer is satisfactorily lowered by irradiation with active energy rays, the pressure-sensitive adhesive layer is cured well, and good peelability is achieved by laser light irradiation. An adhesive sheet showing the above can be obtained.

(particle)
The pressure-sensitive adhesive layer may further contain any suitable additive. In one embodiment, the pressure-sensitive adhesive layer further comprises particles. If the particles are contained, it is possible to prevent excessive embedding of the adherend (for example, a chip) in the pressure-sensitive adhesive layer, and as a result, a pressure-sensitive adhesive sheet exhibiting good peelability can be obtained. In particular, when the pressure-sensitive adhesive layer is thick, such an effect becomes remarkable.

The particles may be inorganic particles or organic particles. Examples of the inorganic particles include silica particles, titanium particles, alumina particles, zirconia particles and the like. Examples of the organic particles include melamine-based resin particles and acrylic-based resin particles.

The average particle size of the particles is preferably 5 nm to 1 μm, more preferably 10 nm to 500 nm. If the average particle size is too small, the effect of adding particles may be small. On the other hand, if the average particle size is too large, irregularities may be formed on the surface of the adhesive, and sufficient adhesive strength may not be obtained. The average particle size of the particles is a number average particle size obtained by laser diffraction.

The content ratio of the particles is preferably 0.5 parts by weight to 10 parts by weight, and more preferably 1 part by weight to 5 parts by weight, based on 100 parts by weight of the base polymer in the pressure-sensitive adhesive layer. If the content of particles is too small, the effect of adding particles may be reduced. On the other hand, if the content of the particles is too large, irregularities may be formed on the surface of the adhesive, and sufficient adhesive strength may not be obtained.

C. Substrate The substrate may be composed of any suitable resin. Examples of the resin include polyolefin resins such as polyethylene resins, polypropylene resins, polybutene resins, and polymethylpentene resins, polyurethane resins, polyester resins, polyimide resins, polyether ketone resins, and polystyrene resins. Examples thereof include resins, polyvinyl chloride-based resins, polyvinylidene chloride-based resins, fluorine-based resins, silicon-based resins, cellulose-based resins, and ionomer resins. Of these, a polyolefin resin is preferable.

The thickness of the base material is preferably 2 μm to 300 μm, more preferably 2 μm to 100 μm, and further preferably 2 μm to 50 μm.

The light transmittance of the base material at a wavelength of 355 nm is preferably 70% or more, more preferably 80% or more, further preferably 90% or more, and particularly preferably 95% or more. The upper limit of the total light transmittance of the base material is, for example, 98% (preferably 99%).

D. Method for Producing Adhesive Sheet The pressure-sensitive adhesive sheet can be produced by any suitable method. The pressure-sensitive adhesive sheet can be obtained by applying the above-mentioned pressure-sensitive adhesive on, for example, a base material or a release liner. Coating methods include bar coater coating, air knife coating, gravure coating, gravure reverse coating, reverse roll coating, lip coating, die coating, dip coating, offset printing, flexographic printing, screen printing, etc. Various methods can be adopted. Alternatively, a method of separately forming an adhesive layer on the release liner and then laminating it to the base material may be adopted.

E. How to use the pressure-sensitive adhesive sheet The pressure-sensitive adhesive sheet of the present invention can be used to temporarily fix the work-working member when processing any suitable work-working member (for example, an electronic component). As a method of using the adhesive sheet of the present invention, for example, (i) a member to be processed is attached to and fixed to an adherend sheet, (ii) the member to be processed is processed, and (iii) an adhesive for the adhesive sheet. The entire layer is irradiated with active energy rays (for example, ultraviolet rays) to reduce the adhesive strength of the pressure-sensitive adhesive sheet, and (iv) laser light is irradiated to a portion where peelability is desired to be exhibited so that the member to be processed is peeled off. And how to use it. According to this method, the member to be processed can be peeled off by free fall. Further, when a plurality of members to be processed are temporarily fixed, it is possible to peel off only a part of them. By using the adhesive sheet of the present invention, the adhesive force can be reduced to the extent that it naturally falls, so that even a very small member to be processed (for example, 50 μm square) can be individually peeled off. Is.

Hereinafter, the present invention will be specifically described with reference to Examples, but the present invention is not limited to these Examples. The tests and evaluation methods in the examples are as follows. Unless otherwise specified, "parts" and "%" are based on weight.

(1) Peelability The PET separator of the adhesive sheet was peeled off and attached to a large slide glass (manufactured by Matsunami Glass, trade name "S9111") using a hand roller. Then, the PET separator on the other surface was peeled off, and a 100 μm square silicon chip was attached to the adhesive surface.
From the surface side of the slide glass, an ultraviolet irradiation device (manufactured by Nitto Seiki Co., Ltd., trade name "UM-810") was used to irradiate the entire surface with ^{ultraviolet rays of a high-pressure mercury lamp (specific wavelength: 365 nm, integrated light intensity: 350 mJ / cm 2).}
A laser beam with a wavelength of 355 nm is irradiated only to the target member position from the large slide glast side with an irradiation area of 80 μmφ and outputs of 0.3 W, 0.2 W, 0.1 W, and 0.05 W (1 plus per chip), and is natural. The case where it fell was regarded as a pass (○), and the case where it did not fall naturally was regarded as a fail (×).

(2) Damage to the adherend After the operation in (1) above, observe the appearance of the peeled silicon chip with a microscope, pass if there is no damage in appearance (○), and fail if there is damage. Passed (x).

(3) Contamination property After the operation of (1) above, the surface of the peeled silicon chip is observed with a microscope to confirm the presence or absence of contamination by the decomposed components of the adhesive layer, and if there is no contamination, the result is passed (〇). ), If there was contamination, it was rejected (x).

(4) Wavelength 355 nm Light transmittance A state in which the PET separator of the adhesive sheet is peeled off, attached to a large slide glass (manufactured by Matsunami Glass, trade name "S9111") using a hand roller, and the PET separator on the other surface is peeled off. So, I made a measurement. Specifically, a spectrophotometer (trade name "Spectrophotometer U-4100", manufactured by Hitachi High-Tech Science) is used to measure the transmittance of the adhesive sheet itself at a wavelength of 355 nm for the adhesive sheet on a large slide glass. bottom.

(5) Visible light transmittance The PET separator of the adhesive sheet is peeled off, attached to a large slide glass (manufactured by Matsunami Glass, trade name "S9111") using a hand roller, and the PET separator on the other side is peeled off. , The measurement was performed. Specifically, a spectrophotometer (trade name "Spectrophotometer U-4100", manufactured by Hitachi High-Tech Science) was used to measure the light transmittance of the adhesive sheet on glass over a wavelength range of 280 nm to 800 nm. .. Using the obtained measured values, it was calculated based on the method for calculating the visible light transmittance of JIS R 3106: 1998.

(6) Using a haze value haze meter (trade name "HAZE METER HM-150", manufactured by Murakami Color Technology Laboratory), a large slide glass (Matsunami) so that the incident light is perpendicular to the surface of the slide glass. Made of glass, trade name "S9111") was set, and the haze value was measured. Then, the PET separator of the adhesive sheet was peeled off, and the large slide glass after the haze value was measured was attached to the large slide glass using a hand roller, and the haze value was measured again with the PET separator on the other surface peeled off. From the obtained haze value, the haze value of only the slide glass was subtracted to obtain the haze value of the adhesive sheet.

(7) 5% weight loss temperature of UV absorber Measurement using a differential thermal analyzer (manufactured by TA Instruments, trade name "Discovery TGA") at a temperature rise temperature of 10 ° C./min, in an air atmosphere, and a flow rate of 25 ml / min. Under the conditions, the 5% weight loss temperature of the UV absorber was measured.

[Production Example 1] Preparation of Acrylic Polymer I A monomer composition was prepared by mixing 90 parts by weight of lauryl methacrylate and 10 parts by weight of 2-hydroxyethyl methacrylate.
Next, nitrogen was introduced into a reaction vessel equipped with a nitrogen introduction tube, a thermometer, and a stirrer, and under a nitrogen atmosphere, 43 parts by weight of toluene, 100 parts by weight of the monomer composition, and 0.2 of azoisobutynitrile (AIBN). The parts by weight were charged and stirred at 60 ° C. for 4 hours. Then, the mixture is cooled to room temperature, 9 parts by weight of 2-methacryloyloxyethyl isocyanate is added and reacted to add an NCO group to the side chain terminal OH group of 2-hydroxyethyl acrylate in the copolymer, and carbon is added to the terminal. An acrylic polymer solution I containing an acrylic polymer I having a carbon double bond and a weight average molecular weight of 1 million was obtained.

[Production Example 2] Preparation of Acrylic Polymer II A monomer composition was prepared by mixing 100 parts by weight of 2-methoxyethyl acrylate, 27 parts by weight of acryloyl morpholine, and 22 parts by weight of 2-hydroxyethyl acrylate.
Next, nitrogen was introduced into a reaction vessel equipped with a nitrogen introduction tube, a thermometer, and a stirrer, and under a nitrogen atmosphere, 500 parts by weight of toluene, 149 parts by weight of the above-mentioned monomer composition, and 0.3 of benzoyl peroxide (BPO). The parts by weight were charged and stirred at 60 ° C. for 5 hours. Then, the mixture is cooled to room temperature, 24 parts by weight of 2-methacryloyloxyethyl isocyanate is added and reacted to add an NCO group to the side chain terminal OH group of 2-hydroxyethyl acrylate in the copolymer, and carbon is added to the terminal. An acrylic polymer solution II containing an acrylic polymer II having a carbon double bond and a weight average molecular weight of 1 million was obtained.

[Production Example 3] Preparation of Acrylic Polymer III A monomer composition was prepared by mixing 70 parts by weight of methyl acrylate, 30 parts by weight of 2-hydroxyethyl acrylate, and 10 parts by weight of acrylic acid.
Next, nitrogen was introduced into a reaction vessel equipped with a nitrogen introduction tube, a thermometer, and a stirrer, and under a nitrogen atmosphere, 165 parts by weight of toluene, 110 parts by weight of the above-mentioned monomer composition, and 0.2 parts of benzoyl peroxide (BPO) were introduced. The parts by weight were charged and stirred at 60 ° C. for 4 hours to obtain an acrylic polymer solution III containing an acrylic polymer III having a weight average molecular weight of 1 million.

[Production Example 4] Preparation of Acrylic Polymer IV A monomer composition was prepared by mixing 70 parts by weight of ethyl acrylate, 30 parts by weight of 2-hydroxyethyl acrylate, 5 parts by weight of methyl methacrylate acrylate, and 4 parts by weight of hydroxyethyl acrylate. ..
Next, nitrogen was introduced into a reaction vessel equipped with a nitrogen introduction tube, a thermometer, and a stirrer, and under a nitrogen atmosphere, 295 parts by weight of toluene, 109 parts by weight of the above-mentioned monomer composition, and 0.2 parts of benzoyl peroxide (BPO) were introduced. The parts by weight were charged and stirred at 60 ° C. for 4 hours to obtain an acrylic polymer solution IV containing an acrylic polymer IV having a weight average molecular weight of 500,000.

[Production Example 5] Preparation of Acrylic Polymer V A monomer composition was prepared by mixing 100 parts by weight of 2-hydroxyethyl acrylate and 4 parts by weight of hydroxyethyl acrylate.
Next, nitrogen was introduced into a reaction vessel equipped with a nitrogen introduction tube, a thermometer, and a stirrer, and under a nitrogen atmosphere, 163 parts by weight of toluene, 104 parts by weight of the above-mentioned monomer composition, and 0.2 parts of azoisobutynitrile (AIBN) were introduced. A part by weight was charged and stirred at 60 ° C. for 4 hours to obtain an acrylic polymer solution V containing an acrylic polymer V having a weight average molecular weight of 550,000.

[Example 1]
(Preparation of adhesive)
In an acrylic polymer solution I containing 100 parts by weight of acrylic polymer I, 5 parts by weight of a cross-linking agent (Nippon Polyurethane Industry Co., Ltd., trade name "Coronate L"), a photopolymerization initiator (manufactured by IGM Resins BV, trade name) Add 3 parts by weight of "Omnirad 369") and 1 part by weight of an ultraviolet absorber (manufactured by BASF Japan, trade name "Tinuvin 477", 5% weight reduction temperature of the ultraviolet absorber: 320.2 ° C.) to obtain the adhesive (1). rice field.
(Adhesive sheet)
The above-mentioned pressure-sensitive adhesive (1) was applied to the silicone-treated surface of the PET separator (thickness: 38 μm), and then heated at 130 ° C. for 2 minutes to form a pressure-sensitive adhesive layer having a thickness of 5 μm.
A PET separator was bonded onto the pressure-sensitive adhesive layer using a hand roller to obtain a pressure-sensitive adhesive sheet with a separator.

[Example 2]
An adhesive sheet with a separator was obtained in the same manner as in Example 1 except that the amount of the ultraviolet absorber (manufactured by BASF Japan, trade name "Tinuvin 477") was 5 parts by weight.

[Example 3]
An adhesive sheet with a separator was obtained in the same manner as in Example 1 except that the amount of the ultraviolet absorber (manufactured by BASF Japan, trade name "Tinuvin 477") was 20 parts by weight.

[Example 4]
UV absorber (manufactured by BASF Japan, trade name "Tinuvin 477") instead of 1 part by weight, UV absorber (manufactured by Chemipro Kasei, trade name "KEMISORB111", 5% weight loss temperature of UV absorber: 153.6 ° C. ) An adhesive sheet with a separator was obtained in the same manner as in Example 1 except that 5 parts by weight was used.

[Example 5]
UV absorber (manufactured by BASF Japan, trade name "Tinuvin 477") Instead of 1 part by weight, UV absorber (manufactured by Chemipro Kasei, trade name "KEMISORB111", 5% weight loss temperature of UV absorber: 153.6 ° C. A pressure-sensitive adhesive sheet with a separator was obtained in the same manner as in Example 1 except that 5 parts by weight was used and the thickness of the pressure-sensitive adhesive layer was 10 μm.

[Example 6]
With a separator in the same manner as in Example 5, except that 3 parts by weight of silica particles (manufactured by Admatech, trade name "YA050C", average particle diameter: 10 nm, specific surface area 300 m ^{2 / g) were further added to the adhesive.} An adhesive sheet was obtained.

[Example 7]
Silica particles in the pressure-sensitive adhesive: the except that was further added (Admatechs Co., Ltd., trade name "SO-C1", average particle diameter 200 nm to 400 nm, a specific surface area of ^{10m 2 / g~300m 2 / g)} 3 parts by weight, performed An adhesive sheet with a separator was obtained in the same manner as in Example 5.

[Example 8]
UV absorber (manufactured by BASF Japan, trade name "Tinuvin 477") Instead of 1 part by weight, UV absorber (manufactured by Tokushiki, trade name "9155YELLOW", 5% weight reduction temperature of UV absorber: 277.6 ° C) An adhesive sheet with a separator was obtained in the same manner as in Example 1 except that 5 parts by weight was used.

[Example 9]
UV absorber (manufactured by BASF Japan, trade name "Tinuvin 477") Instead of 1 part by weight, UV absorber (manufactured by Tokushiki, trade name "9156BLUE", 5% weight reduction temperature of UV absorber: 330.9 ° C) An adhesive sheet with a separator was obtained in the same manner as in Example 1 except that 5 parts by weight was used.

[Example 10]
UV absorber (manufactured by BASF Japan, trade name "Tinuvin 477") Instead of 1 part by weight, UV absorber (manufactured by Tokushiki, trade name "9157GREEN", 5% weight loss temperature of UV absorber: 311.1 ° C) An adhesive sheet with a separator was obtained in the same manner as in Example 1 except that 5 parts by weight was used.

[Example 11]
(Preparation of adhesive)
In an acrylic polymer solution II containing 100 parts by weight of acrylic polymer II, 3 parts by weight of a cross-linking agent (manufactured by Nippon Polyurethane Industry Co., Ltd., trade name "Coronate L"), a photopolymerization initiator (manufactured by IGM Resins BV), trade name " 3 parts by weight of Polymerd369 "), an ultraviolet absorber (manufactured by BASF Japan, trade name" Tinuvin 477 ", 5% weight reduction temperature of the ultraviolet absorber: 320.2 ° C.) was added by 5 parts by weight to obtain a pressure-sensitive adhesive (2). ..
(Making an adhesive sheet)
The above-mentioned pressure-sensitive adhesive (2) was applied to the silicone-treated surface of the PET separator (thickness: 38 μm), and then heated at 130 ° C. for 2 minutes to form a pressure-sensitive adhesive layer having a thickness of 5 μm.
A PET separator was bonded onto the pressure-sensitive adhesive layer using a hand roller to obtain a pressure-sensitive adhesive sheet with a separator.

[Example 12]
The pressure-sensitive adhesive sheet with a separator was prepared in the same manner as in Example 11 except that the amount of the ultraviolet absorber (manufactured by BASF Japan, trade name "Tinuvin 477") was 20 parts by weight and the thickness of the pressure-sensitive adhesive layer was 10 μm. Obtained.

[Example 13]
Instead of 5 parts by weight of the UV absorber (manufactured by BASF Japan, trade name "Tinuvin 477"), the UV absorber (manufactured by BASF Japan, trade name "Tinuvin 384-2", 5% weight loss temperature of the UV absorber: 264. An adhesive sheet with a separator was obtained in the same manner as in Example 11 except that 20 parts by weight (4 ° C.) was used.

[Example 14]
(Preparation of adhesive)
In an acrylic polymer solution III containing 100 parts by weight of acrylic polymer III, 60 parts by weight of a urethane acrylate-based polyfunctional oligomer (manufactured by Nippon Synthetic Chemical Co., Ltd., product name "UV-1700TL"), a cross-linking agent (manufactured by Japan Polyurethane Industry, trade name "" Coronate L ") 1 part by weight, melamine resin (DIC, trade name" Amidia J-820-60N ") 1 part by weight, photopolymerization initiator (IGM Resins BV, trade name" Omnirad 369 ") 3 weight A pressure-sensitive adhesive (3) was obtained by adding 5 parts by weight of an ultraviolet absorber (manufactured by BASF Japan, trade name "Tinuvin 477", 5% weight reduction temperature of the ultraviolet absorber: 320.2 ° C.).
(Making an adhesive sheet)
The above-mentioned pressure-sensitive adhesive (3) was applied to the silicone-treated surface of the PET separator (thickness: 38 μm), and then heated at 130 ° C. for 2 minutes to form a pressure-sensitive adhesive layer having a thickness of 5 μm.
A PET separator was bonded onto the pressure-sensitive adhesive layer using a hand roller to obtain a pressure-sensitive adhesive sheet with a separator.

[Example 15]
(Preparation of adhesive)
In an acrylic polymer solution I containing 100 parts by weight of acrylic polymer I, 5 parts by weight of a cross-linking agent (Nippon Polyurethane Industry Co., Ltd., trade name "Coronate L"), a photopolymerization initiator (manufactured by BASF, trade name "Irgacure 651"" ) 3 parts by weight and 5 parts by weight of an ultraviolet absorber (manufactured by BASF Japan, trade name "Tinuvin 477", 5% weight loss temperature of the ultraviolet absorber: 320.2 ° C.) were added to obtain a pressure-sensitive adhesive (4).
(Adhesive sheet)
The above-mentioned pressure-sensitive adhesive (4) was applied to the silicone-treated surface of the PET separator (thickness: 38 μm), and then heated at 130 ° C. for 2 minutes to form a pressure-sensitive adhesive layer having a thickness of 5 μm.
A PET separator was bonded onto the pressure-sensitive adhesive layer using a hand roller to obtain a pressure-sensitive adhesive sheet with a separator.

[Example 16]
An adhesive sheet with a separator was obtained in the same manner as in Example 15 except that 1 part by weight of a photosensitizer (manufactured by Kawasaki Kasei Chemicals Co., Ltd., trade name "UVS-581") was further added to the adhesive.

[Example 17]
An adhesive sheet with a separator was obtained in the same manner as in Example 15 except that 1 part by weight of a photosensitizer (manufactured by Kawasaki Kasei Chemicals Co., Ltd., trade name "UVS-1101") was further added to the adhesive.

[Example 18]
Example 11 and Example 11 except that 5 parts by weight of the ultraviolet absorber (manufactured by BASF Japan, trade name "Tinuvin 477") was replaced with 5 parts by weight of the ultraviolet absorber (manufactured by BASF Japan, product name "Tinuvin 405"). In the same manner, an adhesive sheet with a separator was obtained.

[Example 19]
Instead of 5 parts by weight of the UV absorber (manufactured by BASF Japan, trade name "Tinuvin 477"), the UV absorber (manufactured by BASF Japan, trade name "Tinuvin 928", 5% weight loss temperature of the UV absorber: 227.6 ° C. ) An adhesive sheet with a separator was obtained in the same manner as in Example 11 except that 5 parts by weight was used.

[Comparative Example 1]
An adhesive sheet with a separator was obtained in the same manner as in Example 1 except that the amount of the ultraviolet absorber (manufactured by BASF Japan, trade name "Tinuvin 477") was 0.5 parts by weight.

[Comparative Example 2]
An adhesive sheet with a separator was prepared in the same manner as in Example 1 except that the photopolymerization initiator was not blended and the amount of the ultraviolet absorber (manufactured by BASF Japan, trade name "Tinuvin 477") was 5 parts by weight. Obtained.

[Comparative Example 3]
(Preparation of adhesive)
In an acrylic polymer solution IV containing 100 parts by weight of acrylic polymer IV, 5 parts by weight of a cross-linking agent (manufactured by Nippon Polyurethane Industry Co., Ltd., trade name "Coronate L") and phenol resin (manufactured by Sumitomo Bakelite, trade name "Sumilite Resin PR12603") An adhesive (4) was obtained by adding 10 parts by weight and 20 parts by weight of an ultraviolet absorber (manufactured by BASF Japan, trade name "Tinuvin 477").
(Making an adhesive sheet)
The above-mentioned pressure-sensitive adhesive (4) was applied to the silicone-treated surface of the PET separator (thickness: 38 μm), and then heated at 130 ° C. for 2 minutes to form a pressure-sensitive adhesive layer having a thickness of 5 μm.
A PET separator was bonded onto the pressure-sensitive adhesive layer using a hand roller to obtain a pressure-sensitive adhesive sheet with a separator.

[Comparative Example 4]
(Preparation of adhesive)
In an acrylic polymer solution V containing 100 parts by weight of acrylic polymer V, 4 parts by weight of a cross-linking agent (manufactured by Nippon Polyurethane Industry Co., Ltd., trade name "Coronate HX") and an ultraviolet absorber (manufactured by BASF Japan, trade name "Tinuvin 477") are added. 20 parts by weight was added to obtain the pressure-sensitive adhesive (5).
(Making an adhesive sheet)
The above-mentioned pressure-sensitive adhesive (5) was applied to the silicone-treated surface of the PET separator (thickness: 38 μm), and then heated at 130 ° C. for 2 minutes to form a pressure-sensitive adhesive layer having a thickness of 5 μm.
A PET separator was bonded onto the pressure-sensitive adhesive layer using a hand roller to obtain a pressure-sensitive adhesive sheet with a separator.

As is clear from Table 1, when the light transmittance of the pressure-sensitive adhesive sheet at a wavelength of 355 nm was 50% or less, excellent peelability was exhibited by laser light irradiation with a low output (0.2 W or less). Further, by forming the pressure-sensitive adhesive layer containing the active energy ray-curable pressure-sensitive adhesive, contamination of the silicon chip could be prevented. When the adhesive sheet of the example was used, it was not necessary to clean the peeled silicon chip. In addition, the pressure-sensitive adhesive sheet of the example is also advantageous in that it has a high visible light transmittance and the silicon chip can be satisfactorily visually recognized through the pressure-sensitive adhesive sheet when the adherend is peeled off by laser light irradiation.

10 Adhesive layer 20 Base material 100, 200 Adhesive sheet

Claims (7)

A pressure-sensitive adhesive sheet comprising a pressure-sensitive adhesive layer containing an ultraviolet absorber and an active energy ray-curable pressure-sensitive adhesive.
The light transmittance of the pressure-sensitive adhesive sheet at a wavelength of 355 nm is 50% or less.
Adhesive sheet. The pressure-sensitive adhesive sheet according to claim 1, wherein the pressure-sensitive adhesive layer has a thickness of 20 μm or less. The adhesive sheet according to claim 1 or 2, wherein the visible light transmittance is 50% or more. The adhesive sheet according to any one of claims 1 to 3, wherein the haze value is 70% or less. The pressure-sensitive adhesive sheet according to any one of claims 1 to 4, wherein the active energy ray-curable pressure-sensitive adhesive further contains a photopolymerization initiator and a photosensitizer. The pressure-sensitive adhesive sheet according to any one of claims 1 to 5, wherein the 5% weight loss temperature of the ultraviolet absorber is 350 ° C. or lower. The pressure-sensitive adhesive sheet according to any one of claims 1 to 6, wherein the pressure-sensitive adhesive layer further contains particles.

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