JP2021140143A - Manufacturing method for liquid crystal panel - Google Patents

Abstract

To suppress erroneous determination.SOLUTION: A manufacturing method for a liquid crystal panel 10 includes a spacer formation step of forming a spacer 12, a height measurement step of measuring the height of the spacer 12, a bonding step of bonding a pair of substrates 10A and 10B, a distance measurement step of measuring the distance between the pair of substrates 10A and 10B, and a determination step of determining whether the liquid crystal panel 10 is good or not by determining whether at least one of the ratio obtained by dividing the distance by the height and the difference between the distance and the height is in a determination reference range. In the determination step, when the distance is "G", the height is "T", the maximum ratio obtained by dividing the reference maximum distance corresponding to the maximum value of the possible distance at the reference height by the reference height is "Rmax", and the minimum ratio obtained by dividing the reference minimum distance corresponding to the minimum value of the possible distance at the reference height by the reference height is "Rmin", the determination reference range is at least one of Expression (3) and Expression (4).SELECTED DRAWING: Figure 3

Description

The techniques disclosed herein relate to methods of manufacturing liquid crystal panels.

As an example of a conventional method for manufacturing a liquid crystal panel, the one described in Patent Document 1 below is known. The method for manufacturing a liquid crystal panel described in Patent Document 1 involves forming a columnar spacer on the main surface of the CF substrate, measuring the height of the columnar spacer, and bonding the TFT substrate and the CF substrate. It includes a step of measuring the gap between the TFT substrate and the CF substrate, and a step of determining the quality of the liquid crystal panel based on the difference between the measured height of the columnar spacer and the measured gap.

Japanese Unexamined Patent Publication No. 2014-102470

In Patent Document 1 described above, the quality of the liquid crystal panel is determined based on whether or not the difference between the measured height of the columnar spacer and the measured gap is within a predetermined determination reference range, and the determination criteria thereof. The range is constant. That is, there is an appropriate range in the numerical value of the gap according to the measured height of the columnar spacer, and the difference between the upper limit value and the lower limit value is constant. Here, each ratio obtained by dividing the upper limit value and the lower limit value of the gap in the measured height of the columnar spacer by the height of the measured columnar spacer varies depending on the height of the columnar spacer. Therefore, as the height of the columnar spacer becomes smaller, the numerical value of each ratio tends to become smaller and the difference between the upper limit value and the lower limit value of the ratio tends to become larger. It can be said that when the height of the columnar spacer is small, it tends to be judged as “good” as compared with the case where the height of the columnar spacer is large. For this reason, there is a risk that the liquid crystal panel, which should be judged as “No”, may be erroneously judged as a non-defective product and leak out.

The technique described in the present specification has been completed based on the above circumstances, and an object thereof is to prevent erroneous determination.

(1) The method for manufacturing a liquid crystal panel according to the technique described in the present specification includes a spacer forming step of forming a spacer on at least one of a pair of substrates, a height measuring step of measuring the height of the spacer, and the above-mentioned. A bonding step of bonding a pair of substrates, an interval measuring step of measuring the interval between the pair of substrates bonded, and the interval measured in the interval measuring step are measured in the height measuring step. At least one of the ratio divided by the measured height and the difference between the interval measured in the interval measuring step and the height measured in the height measuring step is within the judgment reference range. A determination step of determining the quality of the liquid crystal panel based on the presence or absence is provided. In the determination step, the interval measured in the interval measurement step is set to "G", and the height measurement step is performed. The measured height is defined as "T", and the maximum ratio obtained by dividing the reference maximum interval, which is the maximum value of the interval that can be tolerated at the reference height, which is the reference value of the height, by the reference height is "T". When "Rmax" is used and the minimum ratio obtained by dividing the reference minimum interval, which is the minimum value of the interval that can be tolerated at the reference height, by the reference height is "Rmin", the determination reference range is the following formula. It is at least one of (1) and equation (2).

[Number 1]
Rmin <G / T <Rmax (1)

[Number 2]
T. (Rmin-1) <GT <T. (Rmax-1) (2)

(2) Further, in addition to the above (1), the method for manufacturing the liquid crystal panel is based on whether or not the difference is within the determination reference range represented by the above formula (2) in the determination step. The quality of the liquid crystal panel may be determined.

(3) Further, in addition to the above (1) or (2), the method for manufacturing the liquid crystal panel is, in the determination step, from an upper limit value to a lower limit value which is acceptable for manufacturing the liquid crystal panel with respect to the height. A data table including at least a plurality of height sections in which a range is divided and a representative value of the height set for each of the plurality of height sections is the height measured in the height measuring step. The height for calculating at least one of the ratio and the difference of the representative value of the matched height section, which is used to match which of the plurality of height sections the fit fits into. It may be extracted as a height.

(4) Further, in the method for manufacturing the liquid crystal panel, in addition to the above (3), in the determination step, the above-mentioned formula (4) in which the representative value of each of the plurality of height sections is defined as the height "T". The data table in which the upper limit value and the lower limit value related to the difference obtained by substituting into 2) are individually linked to the plurality of height sections is measured in the interval measurement step. It may be used as the determination reference range when determining the difference between the interval and the height measured in the height measuring step.

(5) Further, in the method for manufacturing the liquid crystal panel, in addition to the above (4), in the determination step, the difference is related to at least the elapsed time from the bonding step to the determination step. The data table suitable for the elapsed time may be selected from the plurality of data tables in which a correction value is added to the upper limit value and the lower limit value, respectively.

(6) Further, the method for manufacturing the liquid crystal panel is performed in addition to any one of the above (1) to (5), and is performed prior to the bonding step to obtain a liquid crystal display on any one of the pair of substrates. It is a liquid crystal dropping step of dropping a material, and includes a liquid crystal dropping step in which the dropping amount of the liquid crystal material is adjusted based on whether or not the difference calculated in the determination step is within the determination reference range. May be good.

(7) Further, in the method for manufacturing the liquid crystal panel, in addition to any of the above (1) to (6), in the determination step, the upper limit value that is acceptable for manufacturing the liquid crystal panel with respect to the height is said. It may be set to the reference height.

(8) Further, the method for manufacturing the liquid crystal panel is in addition to any one of the above (1) to (7), and in the spacer forming step, the spacer is selectively applied to one of the pair of substrates. Is formed, and in the bonding step, the spacer may be brought into contact with the other substrate of the pair of substrates.

(9) Further, the method for manufacturing the liquid crystal panel is in addition to any one of the above (1) to (7), and in the spacer forming step, the spacer is formed on one of the pair of substrates. A first spacer component is formed, and a second spacer component that constitutes the spacer is formed on the other substrate. In the height measurement step, the height of the first spacer component and the second spacer configuration are formed. The height of each portion is measured, and in the bonding step, the first spacer constituent portion and the second spacer constituent portion may be brought into contact with each other.

According to the technique described in the specification of the present application, it is possible to make a false determination less likely to occur.

Schematic cross-sectional view of the liquid crystal panel according to the first embodiment A cross-sectional view showing a CF substrate in a state where the seal forming step included in the liquid crystal panel manufacturing method has been performed. A cross-sectional view showing a CF substrate in a state where the liquid crystal dropping step included in the method for manufacturing a liquid crystal panel has been performed. A cross-sectional view showing a CF substrate and an array substrate in a state before the bonding process included in the liquid crystal panel manufacturing method is performed. An enlarged cross-sectional view showing a CF substrate and an array substrate in a state before and after the bonding process included in the liquid crystal panel manufacturing method. The figure which shows the order of each process included in the manufacturing method of a liquid crystal panel. A table showing the data table used in the determination process included in the liquid crystal panel manufacturing method. A table showing the reference height, reference maximum interval, reference minimum interval, reference maximum difference, reference minimum difference, maximum ratio, and minimum ratio in the data table. Graph showing the relationship between height (measured value) and difference Graph showing the relationship between height (measured value) and ratio Graph showing the relationship between height (representative value of height section) and minimum difference and maximum difference Schematic cross-sectional view of the liquid crystal panel according to the second embodiment The figure which shows the order of each process included in the manufacturing method of a liquid crystal panel. A cross-sectional view showing a CF substrate and an array substrate in a state where the seal forming step included in the liquid crystal panel manufacturing method has been performed. A cross-sectional view showing a CF substrate and an array substrate in a state before the bonding process included in the liquid crystal panel manufacturing method is performed. A table showing a reference data table used in the determination step included in the liquid crystal panel manufacturing method according to the third embodiment. A table showing the first correction data table used in the determination process A table showing the reference height, reference maximum interval, reference minimum interval, reference maximum difference, reference minimum difference, maximum ratio, and minimum ratio in the first correction data table. A table showing the second correction data table used in the determination process A table showing the reference height, reference maximum interval, reference minimum interval, reference maximum difference, reference minimum difference, maximum ratio, and minimum ratio in the second correction data table. A table showing the third correction data table used in the determination process A table showing the reference height, reference maximum interval, reference minimum interval, reference maximum difference, reference minimum difference, maximum ratio, and minimum ratio in the third correction data table. A table showing the fourth correction data table used in the determination process A table showing the reference height, reference maximum interval, reference minimum interval, reference maximum difference, reference minimum difference, maximum ratio, and minimum ratio in the fourth correction data table. A table showing a data table used in the determination step included in the liquid crystal panel manufacturing method according to the fourth embodiment. A table showing the reference height, reference maximum interval, reference minimum interval, reference maximum difference, reference minimum difference, maximum ratio, and minimum ratio in the data table. A table showing a data table used in the determination step included in the liquid crystal panel manufacturing method according to the fifth embodiment. A table showing the reference height, reference maximum interval, reference minimum interval, reference maximum difference, reference minimum difference, maximum ratio, and minimum ratio in the data table.

<Embodiment 1>
The first embodiment will be described with reference to FIGS. 1 to 9. In this embodiment, a method for manufacturing the liquid crystal panel 10 will be illustrated. The liquid crystal panel 10 displays an image by using the light from the backlight device (lighting device). The X-axis, Y-axis, and Z-axis are shown in a part of each drawing, and each axis direction is drawn so as to be the direction shown in each drawing. Further, the upper side of FIGS. 1 to 3 is the front side, and the lower side is the back side.

FIG. 1 is a schematic cross-sectional view of the liquid crystal panel 10. As shown in FIG. 1, the liquid crystal panel 10 includes at least a pair of substrates 10A and 10B and a liquid crystal layer 10C sandwiched between the pair of substrates 10A and 10B. Each of the pair of substrates 10A and 10B is formed by laminating various films on the inner surface side of a transparent glass substrate. Of the pair of substrates 10A and 10B, the front side (front side) is the CF substrate (one substrate, facing substrate) 10A, and the back side (back side) is the array substrate (the other substrate, active matrix substrate, TFT substrate) 10B. It is said that. On the CF substrate 10A, a color filter in which R (red), G (green), B (blue) and other colored portions are arranged in a predetermined arrangement, and a light-shielding portion (black matrix) that partitions between adjacent colored portions. And, in addition to being provided, a structure such as an alignment film is provided. The array substrate 10B is provided with structures such as a switching element (for example, a TFT) connected to the source wiring and the gate wiring intersecting each other, a pixel electrode connected to the switching element, and an alignment film. The liquid crystal layer 10C is made of a liquid crystal material containing liquid crystal molecules, which are substances whose optical characteristics change with the application of an electric field. The liquid crystal panel 10 has a rectangular shape. For example, the long side direction of the pair of substrates 10A and 10B is the X-axis direction of each drawing, and the short side direction is the Y-axis direction of each drawing and the thickness direction ( The normal direction of the plate surface) coincides with the Z-axis direction of each drawing.

As shown in FIG. 1, the liquid crystal panel 10 has a seal portion 11 interposed between the outer peripheral ends of the pair of substrates 10A and 10B so as to surround the liquid crystal layer 10C, and is arranged on the center side of the seal portion 11. A spacer 12 is provided between the central portions of the pair of substrates 10A and 10B. The seal portion 11 is made of an ultraviolet curable resin material and has a frame shape so as to seal the liquid crystal layer 10C sandwiched between the pair of substrates 10A and 10B. The spacer 12 is selectively provided on the CF substrate 10A of the pair of substrates 10A and 10B. The spacer 12 is formed in a substantially columnar shape having a taper that protrudes from the CF substrate 10A through the liquid crystal layer 10C toward the array substrate 10B, and the protruding tip surface is brought into contact with the inner surface of the array substrate 10B. The distance between the pair of substrates 10A and 10B, that is, the thickness (cell gap) of the liquid crystal layer 10C is maintained. The spacer 12 is made of, for example, a light-transmitting resin material, and is formed in the plate surface of the CF substrate 10A by a photolithography method known in the same manner as other structures in the production of the CF substrate 10A. Although the spacer 12 has light transmittance, it tends to disturb the orientation of the liquid crystal material in the vicinity of itself, so that the spacer 12 is arranged so as to be superimposed on a light-shielding structure such as a light-shielding portion or wiring on the array substrate 10B side. Is preferable, but this is not always the case. The spacers 12 are preferably arranged regularly in the plate surface of the CF substrate 10A, but this is not always the case.

The liquid crystal panel 10 has the above-described configuration, and subsequently, an outline of a manufacturing method thereof will be described with reference to FIGS. 2A to 2C and FIG. 2A to 2C are cross-sectional views showing each step of the method for manufacturing the liquid crystal panel 10. FIG. 3 is a cross-sectional view showing a state before and after the bonding step included in the manufacturing method of the liquid crystal panel 10. The liquid crystal panel 10 is manufactured by a CF substrate manufacturing step of manufacturing the CF substrate 10A, an array substrate manufacturing step of manufacturing the array substrate 10B, and a seal portion forming step of forming the seal portion 11 on the CF substrate 10A (FIG. 2A). The liquid crystal display dropping step (FIG. 2B) of dropping the liquid crystal material onto the CF substrate 10A and the bonding step of bonding the pair of substrates 10A and 10B (FIG. 2C) are provided at least. In the method for manufacturing the liquid crystal panel 10 according to the present embodiment, a so-called drop injection method (ODF method) is adopted. In the CF substrate manufacturing process and the array substrate manufacturing process, various structures are formed on the large mother glass substrates 10AM and 10BM by various manufacturing devices, respectively. Therefore, in the CF substrate manufacturing process, a plurality of CF substrates 10A are formed on one mother glass substrate 10AM, and in the array substrate manufacturing process, a plurality of array substrates 10B are formed on one mother glass substrate 10BM. In the CF substrate manufacturing process, a plurality of spacers 12 are formed for each of the plurality of CF substrates 10B in the mother glass substrate 10AM. That is, the CF substrate manufacturing process includes a spacer forming process (see FIG. 4). In the spacer forming step, the height of the spacer 12 to be formed is set to be larger than the distance between the pair of substrates 10A and 10B constituting the liquid crystal panel 10. Specifically, in the spacer forming step of the present embodiment, the spacer 12 is formed by setting the target value at the height of the spacer 12 to be 3.2 μm and the dimensional tolerance to be ± 0.2 μm, whereas the liquid crystal panel is formed. The target value at the interval between the pair of substrates 10A and 10B constituting the 10 is set to 3 μm. That is, the upper limit of the dimensional tolerance with respect to the height of the spacer 12 is 3.4 μm, while the lower limit is 3 μm, which coincides with the target value at the interval between the pair of substrates 10A and 10B. There is. Further, the array substrate manufacturing step and the CF substrate manufacturing step include an alignment film forming step of forming an alignment film on the inner surfaces of the substrates 10A and 10B, and an alignment treatment step of applying the alignment treatment to the alignment film, respectively. (See Figure 4). In the CF substrate manufacturing process, the alignment film forming step is performed after the spacer forming step.

In the seal portion forming step, as shown in FIG. 2A, the seal portion 11 is frame-shaped with respect to the outer peripheral end portion on the inner surface of each CF substrate 10A in the mother glass substrate 10AM that has undergone the CF substrate manufacturing process by using a dispenser or the like. Draw and form. In the liquid crystal dropping step, as shown in FIG. 2B, a predetermined amount of liquid crystal material is dropped on the inner surface of each CF substrate 10A in the mother glass substrate 10AM that has undergone the sealing portion forming step. The dropping amount (supply amount) of the liquid crystal material at this time affects the interval between the pair of substrates 10A and 10B constituting the liquid crystal panel 10, and the larger the dropping amount of the liquid crystal material, the more the pair of substrates 10A , The interval between 10B tends to be large. In the liquid crystal dropping step according to the present embodiment, the dropping amount of the liquid crystal material is adjusted to be 3 μm, which is a target value in the interval between the pair of substrates 10A and 10B. In the subsequent bonding step, as shown in FIG. 2C, the inner surface of each CF substrate 10A in the mother glass substrate 10AM on which the liquid crystal material was dropped through the liquid crystal dropping step was subjected to the array substrate manufacturing step in the mother glass substrate 10BM. The inner surfaces of the array substrates 10B are opposed to each other, and the pair of mother glass substrates 10AM and 10BM are bonded together in a vacuum environment. Along with the bonding, the liquid crystal material is spread between each CF substrate 10A and each array substrate 10B so as to have a uniform thickness. At the time of this bonding, as shown in FIG. 3, the protruding tip surfaces of the plurality of spacers 12 provided on each CF substrate 10A are in contact with the inner surface of each array substrate 10B, and the spacers 12 are in a slightly compressed state. Become. The reason is that each target value is set so that the height of the spacer 12 is larger than the distance between the pair of substrates 10A and 10B. In FIG. 3, the bonded array substrate 10B is illustrated by a chain double-dashed line. After that, an ultraviolet irradiation step is performed, and each seal portion 11 is irradiated with ultraviolet rays to temporarily cure each seal portion 11 (see FIG. 4). Then, when the after-cure step is performed, each seal portion 11 is finally cured (see FIG. 4). As a result, each liquid crystal layer 10C sandwiched between each CF substrate 10A and each array substrate 10B is sealed. After that, when the dividing step is performed, the plurality of liquid crystal panels 10 are taken out (see FIG. 4).

By the way, in the spacer forming step described above, although the spacer 12 is formed so that the height of the spacer 12 becomes the target value of 3.2 μm, the height of the spacer 12 varies within the range of the dimensional tolerance. Is inevitable. On the other hand, in the liquid crystal dropping step, although the dropping amount of the liquid crystal material is adjusted so as to be the target value of 3 μm at the interval between the pair of substrates 10A and 10B, the dropping amount of the liquid crystal material varies. Inevitable. Therefore, the difference between the height of the spacer 12 and the distance between the pair of substrates 10A and 10B may vary, and if the difference is too large, the spacer 12 will be excessively compressed. When the volume of the liquid crystal layer 10C changes with the temperature change, the spacer 12 cannot follow the volume, and bubbles may be generated in a low temperature environment. On the contrary, if the above difference is too small, the thickness of the liquid crystal layer 10C is not sufficiently maintained by the spacer 12, so that the liquid crystal material is moved downward due to gravity, for example, when the liquid crystal panel 10 is left leaning against it. There is a possibility that display defects (gravity unevenness) may occur due to the accumulation and unevenness in the thickness of the liquid crystal layer 10C.

Therefore, in the method for manufacturing the liquid crystal panel 10 according to the present embodiment, as shown in FIG. 4, the distance between the height measuring step for measuring the height of the spacer 12 and the pair of substrates 10A and 10B bonded to each other. The interval measurement step to measure, the ratio of the interval measured in the interval measurement step divided by the height measured in the height measurement step, and the interval and height measurement step measured in the interval measurement step. A determination step of determining the quality of the liquid crystal panel 10 based on the difference from the height measured in 1 and whether or not the latter is within the determination reference range, and selecting the liquid crystal panel 10 based on the determination result. It is equipped with a sorting process. Further, a process control system 20 is connected to various manufacturing devices used in each process provided in the manufacturing method of the liquid crystal panel 10. The process control system 20 includes at least a process control unit (main control unit) 21 connected to various manufacturing devices to perform process control, and a memory 22 connected to the process control unit 21 to store various data. .. Note that FIG. 4 illustrates the connection relationship between the process control unit 21 and various manufacturing devices used in each process only for convenience.

As shown in FIG. 4, the height measuring step is included in the CF substrate manufacturing step and is performed at least after the spacer forming step, for example, before the alignment treatment step. In the height measuring step, a height measuring device for measuring the height of the spacer 12 is used. Specifically, in the height measurement step, for example, one spacer 12 is selected from a plurality of spacers 12 existing in the plane of each CF substrate 10A in the mother glass substrate 10AM, and the height of the spacer 12 is high. The height is measured by the measuring device and the measured value (measured value) of the height is obtained. In addition to that, for example, a plurality of spacers 12 are selected from a plurality of spacers 12 existing in the plane of each CF substrate 10A in the mother glass substrate 10AM, and the height of the spacers 12 is measured by a height measuring device. Then, representative values such as the average value, the median value, and the mode value of the measured heights are extracted as the measured values of the heights. In any case, the height measurement value is associated with the lot number of the mother glass substrate 10AM, the individual number of the mother glass substrate 10AM, and the position information of each CF substrate 10A in the mother glass substrate 10AM by the process control unit 21. It is stored in the memory 22 in a form.

As shown in FIG. 4, the interval measuring step is performed at least after the bonding step, for example, after the after-cure step. In the interval measuring step, an interval measuring device for measuring the interval between the CF substrate 10A and the array substrate 10B is used. Specifically, in the interval measuring step, the interval between each CF substrate 10A and each array substrate 10B in the pair of mother glass substrates 10AM and 10BM bonded together is measured by an interval measuring device. The measured values of the intervals measured as described above are the lot numbers of the mother glass substrates 10AM and 10BM, the individual numbers of the mother glass substrates 10AM and 10BM, and the respective liquid crystal panels on the mother glass substrates 10AM and 10BM by the process control unit 21. It is stored in the memory 22 in a form associated with the position information of 10.

As shown in FIG. 4, the determination step is performed at least after the interval measurement step, and is performed, for example, between the interval measurement step and the division step. When the quality of each liquid crystal panel 10 is determined in the determination process, the process control unit 21 determines the lot number of the mother glass substrates 10AM and 10BM, the individual numbers of the mother glass substrates 10AM and 10BM, and the mother glass substrate 10AM. , 10BM is stored in the memory 22 in a form associated with the position information of each liquid crystal panel 10. The judgment result in the judgment step is used in the sorting step performed after the dividing step, and in the sorting step, the worker performs the work of sorting the liquid crystal panel 10 based on the judgment result stored in the memory 22. It is said. In this sorting process, the lot numbers of the mother glass substrates 10AM and 10BM, the individual numbers of the mother glass substrates 10AM and 10BM, the position information of each liquid crystal panel 10 and the judgment result are mutually exchanged on the monitor installed at the position where the worker can see. It is displayed in the form associated with. As a result, the efficiency of the sorting work is improved.

The determination reference range for determining the quality of the liquid crystal panel 10 in the determination step is defined as follows. First, the interval measured in the interval measurement step is defined as "G", the height measured in the height measurement step is defined as "T", and the interval that is acceptable in the reference height, which is the reference value of the height. The maximum ratio obtained by dividing the reference maximum interval, which is the maximum value, by the reference height is defined as "Rmax", and the reference minimum interval, which is the minimum value of the allowable interval in the reference height of the height, is divided by the reference height. The minimum ratio is "Rmin". At this time, the determination reference range is defined by the formula (4) of the following formulas (3) and (4).

[Number 3]
Rmin <G / T <Rmax (3)

[Number 4]
T. (Rmin-1) <GT <T. (Rmax-1) (4)

The above equation (4) is obtained as follows. First, the reference height, which is the reference value of the height of the spacer 12, is set to "Ts", the reference minimum interval, which is the minimum value of the interval that can be tolerated at the reference height, is set to "Gsmin", and the reference height can be allowed. The reference maximum interval, which is the maximum value of the interval, is defined as "Gsmax". At this time, the minimum ratio and the maximum ratio are represented by the following equations (5) and (6).

[Number 5]
Rmin = Gsmin / Ts (5)

[Number 6]
Rmax = Gsmax / Ts (6)

Next, the minimum interval which is the minimum value of the allowable interval at the measured height of the spacer 12 is set to "Gmin", and the maximum interval which is the maximum value of the allowable interval at the measured height of the spacer 12 is set. When "Gmax" is set, the minimum interval and the maximum interval are expressed by the following equations (7) and (8).

[Number 7]
Gmin = T · Rmin (7)

[Number 8]
Gmax = T · Rmax (8)

On the other hand, the determination reference range relating to the difference between the measured distance between the pair of substrates 10A and 10B and the measured height of the spacer 12 is expressed by the following equation (9).

[Number 9]
Gmin-T <GT <Gmax-T (9)

By substituting the equations (7) and (8) into the equation (9), the following equation (10) is obtained. Then, by modifying the equation (10), the above equation (4) can be obtained.

[Number 10]
T ・ Rmin-T <GT <T ・ Rmax-T (10)

Further, the difference obtained by subtracting the reference height "Ts" from the reference minimum interval "Gsmin" is defined as the reference minimum difference "Dsmin", and the difference obtained by subtracting the reference height "Ts" from the reference maximum interval "Gsmax" is defined as the reference maximum difference "Dsmin". When "Dsmax" is set, the reference minimum difference and the reference maximum difference are expressed by the following equations (11) and (12).

[Number 11]
Dsmin = Gsmin-Ts (11)

[Number 12]
Dsmax = Gsmax-Ts (12)

As described above, in deriving the above-mentioned equation (4) which is the judgment reference range in the judgment step according to the present embodiment, the reference height "Ts" which is the reference value of the height of the spacer 12 is set, and the reference height "Ts" is set. A maximum ratio "Rmax" is set by dividing the reference maximum interval "Gsmax", which is the maximum value of the allowable interval at the reference height "Ts", by the reference height "Ts", and further at the reference height "Ts". The minimum ratio "Rmin" is set by dividing the reference minimum interval "Gsmin", which is the minimum value of the allowable interval, by the reference height "Ts". By doing so, the upper limit value and the lower limit value in the above formula (3) are set to the constants "Rmax" and "Rmin", whereas the upper limit value and the lower limit value in the above formula (4) are set. Will include the variable "T". Therefore, the judgment reference range (the range represented by the above equation (3)) relating to the ratio obtained by dividing the distance between the pair of substrates 10A and 10B by the height of the spacer 12 is the measured height of the spacer 12. Since the height of the spacer 12 is constant regardless of the value of, regardless of whether the height of the measured spacer 12 is small or large, it is less likely to cause a bias in the judgment of good or bad as in the conventional case, and it is optimized. .. On the other hand, the judgment reference range (range represented by the above equation (4)) relating to the difference between the distance between the pair of substrates 10A and 10B and the height of the spacer 12 is the measured height of the spacer 12. It will change according to the value and is being optimized. As a result, the determination of the liquid crystal panel 10 is optimized and erroneous determination is less likely to occur, so that the outflow of defective products is suppressed. Moreover, in the determination step, the liquid crystal panel 10 is based on whether or not the difference between the distance between the pair of substrates 10A and 10B and the height of the spacer 12 is within the determination reference range shown in the above equation (4). Since the quality is judged, whether or not the ratio obtained by dividing the distance between the pair of substrates 10A and 10B by the height of the spacer 12 is within the judgment reference range shown in the above equation (3). Compared to the case where the determination step is performed based on the above, the calculated difference becomes a rational number, so that the calculation speed becomes faster and an error is less likely to occur. As a result, the throughput is improved and erroneous determination is less likely to occur.

The height measurement process and the determination process will be described in more detail. In the height measuring step, the measured value of the height of the spacer 12 is converted into a predetermined representative value by using the data table shown in FIG. 5 stored in the memory 22 in advance. In this data table, a plurality of upper limit values of the dimensional tolerance with respect to the height of the spacer 12, that is, a range from 3.4 μm, which is an upper limit value acceptable for manufacturing the liquid crystal panel 10, to 3 μm, which is a lower limit value, are divided. At least the height section and the representative value of the height set for each of the plurality of height sections are included. In the present embodiment, the range from the upper limit value to the lower limit value in the height section is 0.02 μm, and a total of 21 height sections are set. A representative value of the height is set for each of these 21 height sections, and the representative value coincides with the lower limit value in the height section. For example, in the height section where the height is 3 μm or more and less than 3.02 μm, the representative value is 3 μm. In FIG. 5, the representative value of the height is described as “T”. In the height measurement step, the process control unit 21 identifies the height section to which the measured value of the height of the spacer 12 corresponds from the plurality of height sections described in the data table shown in FIG. The representative value of the height in the height section is to be extracted. To explain with a specific example, for example, when the measured value of the height of the spacer 12 is 3.21 μm, the height section in which the height is 3.2 μm or more and less than 3.22 μm is defined. Since this is the case, 3.2 μm, which is a representative value of the height in the height section, is extracted. The representative value of the height extracted in this way is defined as the height "T", and is used as the lot number of the mother glass substrate 10AM, the individual number of the mother glass substrate 10AM, and the position information of each CF substrate 10A in the mother glass substrate 10AM. It is stored in the memory 22 in a linked form. By using the representative value instead of the measured value as the height of the spacer 12 as described above, the calculation for obtaining the difference is simplified in the determination process performed later, the calculation speed is increased, and the throughput is increased. It will be improved.

In the determination step, the data table shown in FIG. 5 stored in the memory 22 is used when determining the quality of the liquid crystal panel 10. In the data table, as shown in FIG. 5, the minimum interval "Gmin" which is the minimum value of the allowable interval at the height "T" of the spacer 12 and the allowable interval at the height "T" of the spacer 12 are shown. The maximum interval "Gmax", which is the maximum value of, is described in the form of being individually linked to each height section. In calculating the minimum interval "Gmin" and the maximum interval "Gmax", the reference height "Ts" of the spacer 12 shown in FIG. 6, the reference minimum interval "Gsmin", the reference maximum interval "Gsmax", and the minimum ratio "Rmin" are calculated. And the maximum ratio "Rmax" are appropriately used. Specifically, by substituting the numerical values of the minimum ratio "Rmin" and the maximum ratio "Rmax" into the equations (7) and (8), the minimum interval "Gmin" and the maximum interval "Gmax" in each height section are used. Is obtained. Further, in the data table, the minimum difference "Dmin" which is the difference obtained by subtracting the height "T" of the spacer 12 from the above-mentioned minimum interval "Gmin" and the height of the spacer 12 from the above-mentioned maximum interval "Gmax" are displayed. The maximum difference "Dmax", which is the difference obtained by subtracting "T", is described in the form of being individually associated with each height section. The minimum difference "Dmin" coincides with the lower limit value related to the difference "GT" obtained by substituting each representative value related to each height section into the above equation (4) as the height "T". There is. The maximum difference "Dmax" coincides with the upper limit value related to the difference "GT" obtained by substituting each representative value related to each height section into the above equation (4) as the height "T". There is. The reference minimum difference "Dsmin", which is the difference obtained by subtracting the reference height "Ts" from the reference minimum interval "Gsmin", and the reference maximum, which is the difference obtained by subtracting the reference height "Ts" from the reference maximum interval "Gsmax". The difference "Dsmax" and each numerical value related to the difference are as shown in FIG.

In the determination step, the process control unit 21 was obtained from the distance "G" between the pair of substrates 10A and 10B measured in the interval measurement step, and from the height of the spacer 12 measured in the height measurement step. The difference "D" is obtained by performing the operation of subtracting the height "T" which is a representative value. The difference "D" is "GT". The process control unit 21 refers to the data table shown in FIG. 5, and finds that the obtained difference "D" is the maximum difference "Dmax" and the minimum difference in the height section to which the height "T" of the spacer 12 belongs. It is checked whether or not it is in the range of "Dmin". That is, the range of the maximum difference "Dmax" and the minimum difference "Dmin" is the judgment reference range related to the difference "D", and if the difference "D" to be judged is within the judgment reference range, the liquid crystal panel. 10 is determined to be "good (OK)", and if it is out of the determination reference range, the liquid crystal panel 10 is determined to be "no (NG)". As described above, the liquid crystal panel using the data table in which the maximum difference "Dmax" and the minimum difference "Dmin", which are the judgment reference ranges related to the difference "D", are individually linked to a plurality of height sections. Since the quality of 10 is determined, the calculation for determination is simplified, the calculation speed is faster, and the throughput is further improved.

In particular, in the present embodiment, the reference height "Ts" is, as shown in FIG. 6, an upper limit value of the dimensional tolerance with respect to the height of the spacer 12, that is, an upper limit value acceptable for manufacturing the liquid crystal panel 10. It is set to 4 μm. In this way, as compared with the case where the height of the spacer, which is smaller than the upper limit value allowed in the manufacture of the liquid crystal panel 10 is set to the reference height "Ts", the maximum ratio "Rmax" and Both the minimum ratio "Rmin" tend to be high and the difference between the maximum ratio "Rmax" and the minimum ratio "Rmin" tends to be small. That is, since the determination reference range tends to be narrowed, the situation where the defective liquid crystal panel 10 leaks out is less likely to occur.

7 to 9 are graphs of the data table shown in FIG. FIG. 7 is a graph in which the height (measured value) of the spacer 12 is on the horizontal axis and the difference is on the vertical axis. In addition, in FIG. 7, the minimum difference "Dmin" and the maximum difference "Dmax" are shown. FIG. 8 is a graph in which the height (measured value) of the spacer 12 is on the horizontal axis and the ratio is on the vertical axis. In addition, in FIG. 8, the minimum ratio “Rmin” and the maximum ratio “Rmax” are shown. FIG. 9 is a graph in which the height of the spacer 12 (representative value of the height section) is on the horizontal axis and the minimum difference “Dmin” and the maximum difference “Dmax” are on the vertical axis. In addition, in FIG. 9, the minimum difference "Dmin" and the maximum difference "Dmax" are shown. According to FIG. 7, it can be seen that as the height (measured value) of the spacer 12 changes, both the minimum difference “Dmin” and the maximum difference “Dmax” continuously and gradually change. This is because the variable "T" is included in the upper limit value and the lower limit value in the above equation (4). According to FIG. 8, it can be seen that the minimum ratio “Rmin” and the maximum ratio “Rmax” are constant regardless of the height (measured value) of the spacer 12. This is because the minimum ratio "Rmin" and the maximum ratio "Rmax" shown in the above equations (5) and (6) are constants. Then, according to FIG. 9, as the height of the spacer 12 (representative value of the height section) changes, both the minimum difference "Dmin" and the maximum difference "Dmax" gradually change stepwise (stepwise). It turns out that it changes). This is because the measured value of the height of the spacer 12 is converted into a representative value of the height section selected from the plurality of height sections. In the determination step, the representative value of the height section is set to the height "T" of the spacer, the difference "D" is calculated based on the height "T", and those values are plotted on the graph shown in FIG. , It is possible to determine the quality of the liquid crystal panel 10 based on whether or not the plot is within the range of the minimum difference "Dmin" and the maximum difference "Dmax".

Further, in the present embodiment, the determination result in the determination step is fed back to adjust the dropping amount of the liquid crystal material in the liquid crystal dropping step. Specifically, when it is determined that the difference "D" calculated in the determination step is within the determination reference range, the process management unit 21 may change the dropping amount of the liquid crystal material in the liquid crystal dropping step. No. On the other hand, when it is determined that the difference "D" calculated in the determination step is outside the determination reference range, the process management unit 21 changes the dropping amount of the liquid crystal material in the liquid crystal dropping step. Specifically, when the difference "D" often exceeds the maximum difference "Dmax" which is the upper limit of the judgment reference range, the interval between the pair of 10A and 10B is larger than the height of the spacer 12. Since it is too small, the process control unit 21 increases the amount of liquid crystal material dropped in the liquid crystal dropping step and increases the interval between the pair of 10A and 10B. On the other hand, when the difference "D" is often less than the minimum difference "Dmin" which is the lower limit of the judgment reference range, the interval between the pair of 10A and 10B is larger than the height of the spacer 12. Therefore, the amount of the liquid crystal material dropped in the liquid crystal dropping step is reduced, and the interval between the pair of 10A and 10B is reduced. As a result, the relationship between the height of the spacer 12 and the distance between the pair of 10A and 10B is optimized, so that the non-defective rate can be improved.

As described above, the method for manufacturing the liquid crystal panel 10 of the present embodiment includes a spacer forming step of forming the spacer 12 on at least one of the pair of substrates 10A and 10B, and a height measuring step of measuring the height of the spacer 12. , A bonding step of bonding a pair of substrates 10A and 10B, an interval measuring step of measuring the interval between the pair of substrates 10A and 10B bonded together, and a height measurement of the interval measured in the interval measuring step. Whether at least one of the ratio divided by the height measured in the step and the difference between the interval measured in the interval measuring step and the height measured in the height measuring step is within the judgment reference range. A determination step of determining the quality of the liquid crystal panel 10 based on whether or not the liquid crystal panel 10 is provided is provided. In the determination step, the interval measured in the interval measurement step is set to "G", and the height measured in the height measurement step. Is "T", and the maximum ratio obtained by dividing the reference maximum interval, which is the maximum value of the interval that can be tolerated at the reference height, which is the reference value of the height, by the reference height is "Rmax", and is allowed at the reference height. When the minimum ratio obtained by dividing the reference minimum interval, which is the minimum possible interval, by the reference height is "Rmin", the judgment reference range is at least one of the above equations (3) and (4). NS.

First, in the spacer forming step, the spacer 12 is formed on at least one of the pair of substrates 10A and 10B. In the height measuring step, the height of the spacer 12 formed through the spacer forming step is measured. In the bonding step, a pair of substrates 10A and 10B are bonded together. In the interval measuring step, the interval between the pair of substrates 10A and 10B bonded through the bonding step is measured. In the determination step, is the ratio obtained by dividing the interval between the pair of substrates 10A and 10B measured in the interval measurement step by the height of the spacer 12 measured in the height measurement step within the determination reference range? The quality of the liquid crystal panel 10 can be judged based on whether or not the liquid crystal panel 10 is good or bad, but the distance between the pair of substrates 10A and 10B measured in the interval measurement step and the spacer 12 measured in the height measurement step It is also possible to determine the quality of the liquid crystal panel 10 based on whether or not the difference between the height and the height is within the determination reference range.

The determination reference range in the determination step described above is at least one of the above equations (3) and (4). In deriving the above equations (3) and (4), first, the reference height which is the reference value of the height of the spacer 12 is set, and then the reference maximum which is the maximum value of the allowable interval at the reference height. The maximum ratio obtained by dividing the interval by the reference height and the minimum ratio obtained by dividing the reference minimum interval, which is the minimum value of the allowable interval at the reference height, by the reference height are set. By doing so, the upper limit value and the lower limit value in the above formula (3) are set to the constants "Rmax" and "Rmin", whereas the upper limit value and the lower limit value in the above formula (4) are set. Will include the variable "T". Therefore, the judgment reference range related to the ratio obtained by dividing the distance between the pair of substrates 10A and 10B by the height of the spacer 12 is constant regardless of the measured height value of the spacer 12, and is measured. Regardless of whether the height of the spacer 12 is small or large, the quality of the spacer 12 is less likely to be biased as in the conventional case, and is optimized. On the other hand, the judgment reference range relating to the difference between the distance between the pair of substrates 10A and 10B and the height of the spacer 12 is optimized because it changes according to the measured height value of the spacer 12. Is planned. As a result, the determination of the liquid crystal panel 10 is optimized and erroneous determination is less likely to occur.

Further, in the determination step, the quality of the liquid crystal panel 10 is determined based on whether or not the difference is within the determination reference range represented by the above equation (4). In this way, the calculated difference becomes a rational number as compared with the case where the determination step is performed based on whether or not the ratio is within the determination reference range shown in the above equation (3). As the calculation speed increases, errors are less likely to occur. As a result, the throughput is improved and erroneous determination is less likely to occur.

Further, in the determination step, a plurality of height sections in which a range from an upper limit value to a lower limit value acceptable for manufacturing the liquid crystal panel 10 in terms of height is divided, and a height set for each of the plurality of height sections. A data table containing at least a representative value is used to match which of the multiple height sections the height measured in the height measurement step fits into, and the representative value of the fitted height section. Is extracted as the height for calculating at least one of the ratio and the difference. The height of the spacer 12 measured in the height measuring step is within the range from the upper limit value to the lower limit value set so as to conform to the specifications of the manufactured liquid crystal panel 10. When the determination step is performed, by referring to the data table, it is collated to see which of the plurality of height sections the height of the spacer 12 measured in the height measurement step fits, and the matching height section The representative value of is extracted. The extracted representative value is used as a height for calculating at least one of the ratio and the difference. By using a representative value instead of an actually measured value as the height of the spacer 12 in this way, the calculation for obtaining the ratio and the difference is simplified, the calculation speed is increased, and the throughput is improved.

Further, in the determination step, the upper limit value and the lower limit value related to the difference obtained by substituting the representative value of each of the plurality of height sections as the height "T" into the above equation (4) are the plurality of height sections. The data table, which is individually linked to the above, is used as a judgment reference range when determining the difference between the interval measured in the interval measurement process and the height measured in the height measurement process. .. In this way, when the determination step is performed, the data table is referred to, and the representative value of the height section to which the height of the spacer 12 measured in the height measurement step matches is extracted. , The extracted representative value is taken as the height, and the difference from the interval measured in the interval measuring step is calculated. Then, by referring to the data table, the range of the upper limit value and the lower limit value related to the difference associated with the height section to which the representative value of the extracted height belongs is extracted as the judgment reference range related to the difference. Therefore, the quality of the liquid crystal panel 10 is determined based on whether or not there is a difference calculated as described above in the extracted determination reference range. As described above, the quality of the liquid crystal panel 10 is determined by using the data table in which the upper limit value and the lower limit value, which are the determination reference ranges related to the difference, are individually linked to the plurality of height sections. The calculation for judgment is simplified, the calculation speed is faster, and the throughput is further improved.

Further, in the liquid crystal dropping step in which the liquid crystal material is dropped on one of the pair of substrates 10A and 10B prior to the bonding step, the difference calculated in the judgment step is within the judgment reference range. A liquid crystal dropping step is provided in which the dropping amount of the liquid crystal material is adjusted based on whether or not the liquid crystal material is dropped. In this way, for example, when the difference calculated in the determination step often exceeds the upper limit of the determination reference range, the distance between the pair of substrates 10A and 10B becomes large in the liquid crystal dropping step. Therefore, the amount of the liquid crystal material dropped is adjusted to be large. On the contrary, when the difference calculated in the determination step is often less than the lower limit of the determination reference range, the liquid crystal material is dropped in the liquid crystal dropping step so that the interval between the pair of substrates 10A and 10B becomes small. Adjusted to reduce the amount. As described above, the determination result in the determination step is fed back to the amount of the liquid crystal material dropped in the liquid crystal dropping step, so that the non-defective rate can be improved.

Further, in the determination step, an upper limit value that is acceptable for manufacturing the liquid crystal panel 10 in terms of height is set as a reference height. In this way, both the maximum ratio and the minimum ratio are higher than if the height is set to a value smaller than the upper limit value acceptable for manufacturing of the liquid crystal panel 10 as the reference height. At the same time, the difference between the maximum ratio and the minimum ratio tends to be small. That is, since the determination reference range tends to be narrowed, the situation where the defective liquid crystal panel 10 leaks out is less likely to occur.

Further, in the spacer forming step, the spacer 12 is selectively formed on the CF substrate (one substrate) 10A of the pair of substrates 10A and 10B, and in the bonding step, the spacer 12 is paired on the substrates 10A and 10B. The array substrate (the other substrate) 10B of the above is abutted. In this way, when the bonding step is performed and the pair of substrates 10A and 10B are bonded together, the spacer 12 formed on the CF substrate 10A is brought into contact with the array substrate 10B.

<Embodiment 2>
The second embodiment will be described with reference to FIGS. 10 to 12B. In the second embodiment, the structure of the spacer 112 is changed, and the spacer forming step and the bonding step are changed. It should be noted that duplicate description of the same structure, action and effect as in the first embodiment will be omitted.

As shown in FIG. 10, the spacer 112 according to the present embodiment according to the present embodiment includes a first spacer component 13 formed on the CF substrate 110A and a second spacer component 14 formed on the array substrate 110B. It is different from the above-described first embodiment in that it is composed of. The first spacer component 13 and the second spacer component 14 are arranged at positions where they overlap each other when viewed on a plane, and are in contact with each other. The sum of the heights of the first spacer component 13 and the second spacer component 14 coincides with the height of the spacer 112. The height of the first spacer component 13 is larger than the height of the second spacer component 14.

A main part of the method for manufacturing the liquid crystal panel 110 according to the present embodiment will be described with reference to FIGS. 11, 12A, and 12B. As shown in FIG. 11, the liquid crystal panel 110 is manufactured by a CF substrate manufacturing step including a first spacer constituent forming step of forming the first spacer constituent 13 on the CF substrate 110A and a second spacer on the array substrate 110B. An array substrate manufacturing process including a second spacer component forming step for forming the component 14, a height measuring step for measuring the heights of the first spacer component 13 and the second spacer component 14, respectively, and a CF substrate 110A. A seal portion forming step (see FIG. 12A) for forming the seal portion 111, a liquid crystal dropping step of dropping a liquid crystal material onto the CF substrate 110A, and a bonding step of bonding a pair of substrates 110A and 110B (see FIG. 12B). ), And whether or not the difference between the interval measuring step for measuring the interval between the pair of substrates 110A and 110B and the interval measured in the interval measuring step and the height measured in the height measuring step is within the judgment reference range. It is provided with at least a determination step of determining the quality of the liquid crystal panel 110 based on the above. It can be said that the first spacer component forming step and the second spacer component forming step described above constitute the spacer forming step. The seal portion forming step, the liquid crystal dropping step, and the interval measuring step are the same as those in the above-described first embodiment.

In the first spacer component forming step included in the CF substrate manufacturing step, as shown in FIG. 12A, a plurality of first spacer component 13s are formed in the plane of the CF substrate 110A with a predetermined distribution. In the second spacer component forming step included in the array substrate manufacturing step, a plurality of second spacer component 14s are formed in the plane of the array substrate 110B with a predetermined distribution. In the height measurement step, the height of the first spacer component 13 on the CF substrate 110A is measured, and the height of the second spacer component 14 on the array substrate 110B is measured. When the pair of substrates 110A and 110B are bonded in the bonding step, as shown in FIG. 12B, the protruding tip surface of the first spacer component 13 and the protruding tip surface of the second spacer component 14 are formed. They are designed to come into contact with each other. The spacer 112 is configured by the first spacer component 13 and the second spacer component 14 that are in contact with each other. In the determination step, the process control unit 121 sets the sum of the height of the first spacer component 13 and the height of the second spacer component 14 as the height of the spacer 112, and sets the distance between the pair of substrates 110A and 110B as the height of the spacer 112. After calculating the difference, it is determined whether or not the difference is within the determination reference range.

As described above, according to the present embodiment, in the spacer forming step, the first spacer component 13 constituting the spacer 112 is formed on the CF substrate 110A of the pair of substrates 110A and 110B, and the spacer is formed on the array substrate 110B. The second spacer component 14 constituting the 112 is formed, and in the height measurement step, the height of the first spacer component 13 and the height of the second spacer component 14 are measured, respectively, and the bonding step is performed. Then, the first spacer component 13 and the second spacer component 14 are brought into contact with each other. In this way, when the height measuring step is performed, the height of the first spacer constituent portion 13 and the height of the second spacer constituent portion 14 are measured, respectively. When the bonding process is performed and the pair of substrates 110A and 110B are bonded together, the first spacer component 13 formed on the CF board 110A and the second spacer component 14 formed on the array board 110B are formed. They are in contact with each other. In the determination step, the sum of the height of the first spacer component 13 and the height of the second spacer component 14 is used as the height of the spacer 112.

<Embodiment 3>
The third embodiment will be described with reference to FIGS. 13 to 21. In the third embodiment, the data table used in the determination step is changed from the first embodiment described above. It should be noted that duplicate description of the same structure, action and effect as in the first embodiment will be omitted.

The determination step according to the present embodiment is performed in consideration of at least the elapsed time from the bonding step to the determination step. The reason is that the distance between the pair of substrates tends to gradually decrease as time passes after the bonding process is completed, especially after the after-cure process is completed. If the determination process is performed without considering the elapsed time, for example, even if the difference value between the two liquid crystal panels is the same immediately after the aftercure process, the process leading up to the determination process is achieved. If the time is different, the difference obtained due to the change in the distance between the pair of substrates in each liquid crystal panel will be different, and the determination result may be different. That is, there is a possibility that an erroneous determination may occur depending on the elapsed time.

Therefore, the data table used in the determination step according to the present embodiment has an upper limit value (maximum difference "Dmax") and a lower limit value (minimum difference "Dmin") related to the difference between the distance between the pair of substrates and the height of the spacer. ”) With correction values added according to the elapsed time described above are prepared. Specifically, in the determination process, the data tables include a reference data table with an elapsed time of 0 to 30 minutes (FIG. 13) and a first correction data table with an elapsed time of 30 to 60 minutes (FIG. 14). A second correction data table with an elapsed time of 60 to 120 minutes (FIG. 16), a third correction data table with an elapsed time of 120 to 240 minutes (FIG. 18), and an elapsed time of 240 to 300 minutes. A total of five correction data tables (FIG. 20) are used. In the present embodiment, the measurement of the elapsed time starts when the after-cure process is completed and ends when the determination process is started. Further, in each data table, the reference height "Ts" of the spacer is unified to "3.4 μm" which is the same as that of the first embodiment.

Each data table will be described in sequence. First, the reference data table shown in FIG. 13 has the same contents as those in FIG. 5 described in the above-described first embodiment. If the elapsed time is from 0 minutes to 30 minutes, the distance between the pair of substrates does not change so much, so there is little need to make corrections, and it is appropriate to perform the determination process using the reference data table. There is. In the first correction data table shown in FIG. 14, "-0.0025 μm" is added as a correction value to the minimum difference "Dmin" and the maximum difference "Dmax" described in the reference data table, respectively. As shown in FIG. 15, the correction value of the minimum difference "Dmin" is the first minimum difference correction value "C1min", and the correction value of the maximum difference "Dmax" is the first maximum difference correction value "C1max". .. Along with this, the reference minimum interval "Gsmin", the reference maximum interval "Gsmax", the reference minimum difference "Dsmin", the reference maximum difference "Dsmax", the minimum ratio "Rmin", and the maximum ratio "Rmax" are shown in FIG. 15, respectively. It is a value that can be calculated.

In the second correction data table shown in FIG. 16, "-0.005 μm" is added as a correction value to the minimum difference "Dmin" and the maximum difference "Dmax", respectively. As shown in FIG. 17, the correction value of the minimum difference "Dmin" is the second minimum difference correction value "C2min", and the correction value of the maximum difference "Dmax" is the second maximum difference correction value "C2max". .. Along with this, the reference minimum interval "Gsmin", the reference maximum interval "Gsmax", the reference minimum difference "Dsmin", the reference maximum difference "Dsmax", the minimum ratio "Rmin", and the maximum ratio "Rmax" are shown in FIG. 17, respectively. It is a value that can be calculated. In the third correction data table shown in FIG. 18, "-0.01 μm" is added as a correction value to the minimum difference "Dmin" and the maximum difference "Dmax", respectively. As shown in FIG. 19, the correction value of the minimum difference "Dmin" is the third minimum difference correction value "C3min", and the correction value of the maximum difference "Dmax" is the third maximum difference correction value "C3max". .. Along with this, the reference minimum interval "Gsmin", the reference maximum interval "Gsmax", the reference minimum difference "Dsmin", the reference maximum difference "Dsmax", the minimum ratio "Rmin", and the maximum ratio "Rmax" are shown in FIG. It is a value that can be calculated. In the fourth correction data table shown in FIG. 20, "−0.02 μm" is added as a correction value to the minimum difference "Dmin" and the maximum difference "Dmax", respectively. As shown in FIG. 21, the correction value of the minimum difference "Dmin" is the fourth minimum difference correction value "C4min", and the correction value of the maximum difference "Dmax" is the fourth maximum difference correction value "C4max". .. Along with this, the reference minimum interval "Gsmin", the reference maximum interval "Gsmax", the reference minimum difference "Dsmin", the reference maximum difference "Dsmax", the minimum ratio "Rmin", and the maximum ratio "Rmax" are shown in FIG. It is a value that can be calculated.

As described above, according to each data table, each correction value is set so that the absolute value becomes larger as the elapsed time becomes longer. Along with this, the absolute values of the reference minimum difference "Dsmin" and the reference maximum difference "Dsmax" increase as the elapsed time increases, and the reference minimum interval "Gsmin" and the reference maximum interval "Gsmax" increase as the elapsed time increases. Furthermore, the minimum ratio "Rmin" and the maximum ratio "Rmax" tend to decrease as the elapsed time increases.

The specific operation will be explained. When the after-cure process of the liquid crystal panel manufacturing method is completed, the process management unit starts the measurement of the elapsed time and ends the measurement at the timing of starting the determination process. The elapsed time measured at this time is stored in the memory in a form associated with the lot number of the mother glass substrate, the individual number of the mother glass substrate, and the position information of each liquid crystal panel on the mother glass substrate. In the determination process, the process control unit reads the elapsed time stored in the memory based on the lot number of the mother glass substrate to be processed, the individual number of the mother glass substrate, and the position information of each liquid crystal panel on the mother glass substrate. Select the data table that matches the elapsed time read from the five data tables. When any of the correction data tables is selected as the data table, the minimum difference "Dmin" and the maximum difference "Dmax" described in the correction data table are added with correction values according to the elapsed time. There is. That is, since the minimum difference "Dmin" and the maximum difference "Dmax" to which the correction value is added are used as the judgment reference range for judging the difference between the height of the spacer and the distance between the pair of substrates, the pair. Even when the distance between the substrates changes with time, the quality of the liquid crystal panel can be appropriately determined.

As described above, according to the present embodiment, in the determination step, correction values are added to the upper limit value and the lower limit value related to the difference at least according to the elapsed time from the bonding step to the determination step. A data table suitable for the elapsed time is selected from a plurality of data tables. The interval between the pair of substrates changes according to the elapsed time from the bonding step or the interval measuring step to the determination step, and the longer the elapsed time, the smaller the interval tends to be. In view of this, it is preferable that a correction value according to the elapsed time is added to the upper limit value and the lower limit value related to the difference, and a plurality of data tables associated with the elapsed time are prepared. Then, in the determination process, a data table associated with the elapsed time is selected from a plurality of data tables, and the upper limit related to the difference included in the data table and to which the correction value is added is added. Judgment related to the difference is performed using the value and the lower limit value as the judgment reference range. As a result, even when the distance between the pair of substrates changes with time, the quality of the liquid crystal panel can be appropriately determined.

<Embodiment 4>
Embodiment 4 will be described with reference to FIG. 22 or FIG. In the fourth embodiment, the reference height "Ts" of the spacer is changed from the first embodiment. It should be noted that duplicate description of the same structure, action and effect as in the first embodiment will be omitted.

In the determination step according to the present embodiment, the data table shown in FIG. 22 is used. FIG. 22 is a data table in which the reference height “Ts” of the spacer is set to 3.2 μm, that is, the target value of the height of the spacer formed in the spacer forming step. Along with this, the reference minimum interval "Gsmin", the reference maximum interval "Gsmax", the reference minimum difference "Dsmin", the reference maximum difference "Dsmax", the minimum ratio "Rmin", and the maximum ratio "Rmax" are shown in FIG. 23, respectively. It is a value that can be calculated. Of these, the numerical values of the reference minimum difference "Dsmin" and the reference maximum difference "Dsmax" are the same as those in the first embodiment. The maximum ratio "Rmax" and the minimum ratio "Rmin" according to the present embodiment are both lower values than those of the above-described first embodiment. Further, the difference between the maximum ratio "Rmax" and the minimum ratio "Rmin" according to the present embodiment is larger than that of the first embodiment described above. This means that the judgment reference range according to the present embodiment is wider than that of the above-described first embodiment. It is also possible to perform the determination step using such a determination reference range, and it is possible to sufficiently appropriately determine the quality of the liquid crystal panel.

<Embodiment 5>
Embodiment 5 will be described with reference to FIG. 24 or FIG. In the fifth embodiment, the reference height "Ts" of the spacer is changed from the fourth embodiment. It should be noted that duplicate description of the same structure, action and effect as in the fourth embodiment will be omitted.

In the determination step according to the present embodiment, the data table shown in FIG. 24 is used. FIG. 24 is a data table in which the reference height “Ts” of the spacer is set to 3 μm, that is, the lower limit of the dimensional tolerance of the height of the spacer formed in the spacer forming step (the lower limit value acceptable for manufacturing the liquid crystal panel). Is. Along with this, the reference minimum interval "Gsmin", the reference maximum interval "Gsmax", the reference minimum difference "Dsmin", the reference maximum difference "Dsmax", the minimum ratio "Rmin", and the maximum ratio "Rmax" are shown in FIG. 25, respectively. It is a value that can be calculated. Of these, the numerical values of the reference minimum difference "Dsmin" and the reference maximum difference "Dsmax" are the same as those of the first and fourth embodiments. The maximum ratio "Rmax" and the minimum ratio "Rmin" according to the present embodiment are both lower values than those of the above-described fourth embodiment. Further, the difference between the maximum ratio "Rmax" and the minimum ratio "Rmin" according to the present embodiment is even larger than that of the above-described fourth embodiment. This means that the judgment reference range according to the present embodiment is wider than that of the above-described fourth embodiment. It is also possible to perform the determination step using such a determination reference range, and it is possible to sufficiently appropriately determine the quality of the liquid crystal panel.

<Other embodiments>
The technology disclosed herein is not limited to the embodiments described above and in the drawings, and for example, the following embodiments are also included in the technical scope.

(1) In the judgment step, is the ratio obtained by dividing the interval measured in the interval measurement step by the height measured in the height measurement step within the judgment reference range represented by the above formula (3)? The quality of the liquid crystal panels 10 and 110 may be determined based on whether or not the liquid crystal panels 10 and 110 are good or bad.

(2) In the determination step, the ratio obtained by dividing the interval measured in the interval measurement step by the height measured in the height measurement step, and the interval and height measurement step measured in the interval measurement step are used. The quality of the liquid crystal panels 10 and 110 is judged based on whether or not the difference from the height measured by the above is within each judgment reference range represented by the above equations (3) and (4), respectively. It doesn't matter.

(3) The numerical value of the difference between the upper limit value and the lower limit value in the height section of the spacers 12 and 112 in the data table may be a numerical value other than 0.02 μm. In that case, the number of divisions in the height section will also be changed. Further, the representative value of the height in the height section of the spacers 12 and 112 in the data table may be a value other than the minimum value of the height in the height section. Further, the reference height "Ts" of the spacers 12 and 112 may be a value other than the upper limit value, the lower limit value and the target value of the dimensional tolerance of the heights of the spacers 12 and 112.

(4) The description order, item names, number of items, etc. of various data recorded in the data table can be changed as appropriate.

(5) The target value of the heights of the spacers 12 and 112 in the spacer forming step can be appropriately changed to a numerical value other than 3.2 μm. Further, the dimensional tolerance related to the heights of the spacers 12 and 112 in the spacer forming step can be appropriately changed to a numerical value other than ± 0.2 μm.

(6) The height measurement step may be performed before the alignment film forming step. Further, the height measurement step may be performed after the orientation treatment step and before the bonding step.

(7) The interval measurement step may be performed after the division step. In that case, the distance between the pair of substrates 10A, 110A, 10B, 110B in each of the divided liquid crystal panels 10 and 110 is measured individually.

(8) The determination step may be performed after the division step. In that case, each of the divided liquid crystal panels 10 and 110 is determined individually.

(9) The interval measurement step may be performed after the bonding step and before the aftercure step.

(10) The determination step may be performed after the bonding step and before the aftercure step.

(11) In the sorting step, the liquid crystal panels 10 and 110 may be automatically sorted by using a device for sorting the liquid crystal panels 10 and 110.

(12) In the above-described first, third, fourth, and fifth embodiments, a plurality of types of spacers 112 having different heights may be provided. For example, it is possible to form a first spacer whose target value is a height larger than the distance between the pair of substrates 10A and 10B, and a second spacer whose target value is a height smaller than the same distance. Is. In this case, the height of the first spacer is measured in the height measuring step, the height of the second spacer is not measured, and the liquid crystal panels 10, 110 are measured based on the height of the first spacer in the determination step. Will be judged. In addition to the above examples, it is of course possible to provide three or more types of spacers 12 having different heights.

(13) In the second embodiment described above, a plurality of types of spacers 112 having different sums of heights may be provided. For example, a first spacer having a target value of the sum of heights larger than the distance between the pair of substrates 110A and 110B and a second spacer having a target value of the sum of heights smaller than the same distance are formed. It is possible to do. In this case, the heights of the first spacer component 13 and the second spacer component 14 that form the first spacer are measured in the height measurement step, and the first spacer component 13 and the first spacer component 14 that form the second spacer are measured. 2 The height of the spacer component 14 is not measured, and in the determination step, the liquid crystal panels 10, 110 are based on the sum of the heights of the first spacer component 13 and the second spacer component 14 that form the first spacer. Will be judged. In addition to the above examples, it is of course possible to provide three or more types of spacers 112 having different sums of heights.

(14) In the above-described first, third, fourth, and fifth embodiments, in the spacer forming step, spacers 12, 112 are selectively formed on the array substrates 10B, 110B of the pair of substrates 10A, 110A, 10B, 110B. It is also possible.

(15) In the seal portion forming step, it is also possible to form the seal portions 11, 111 made of a thermosetting resin material.

(16) It is also possible to adopt a so-called vacuum injection method when forming the liquid crystal layer 10C. In that case, after performing the bonding step, a vacuum injection step of vacuum-injecting the liquid crystal material between the pair of substrates 10A, 110A, 10B, 110B in a vacuum environment is performed.

(17) In the above-described first, third, fourth, and fifth embodiments, the spacer 12 is in the plane of any one of the pair of substrates 10A and 10B, in addition to the columnar spacer formed by the photolithography method in the spacer forming step. Spherical spacers (spacer beads) sprayed on the surface may be used.

(18) The specific planar shapes of the liquid crystal panels 10 and 110 can be appropriately changed, and are, for example, a square shape, a triangular shape, a trapezoidal shape, an inverted trapezoidal shape, a circular shape, an elliptical shape, and the like when viewed in a plane. It doesn't matter.

(19) The liquid crystal panels 10 and 110 may be a reflective type or a semitransparent type in addition to the transmissive type.

10,110 ... Liquid crystal panel, 10A, 110A ... CF substrate (a pair of substrates, one substrate), 10B, 110B ... Array substrate (a pair of substrates, the other substrate), 12,112 ... Spacer, 13 ... First spacer Component, 14 ... Second spacer component

Claims (9)

A spacer forming step of forming a spacer on at least one of a pair of substrates,
A height measuring step for measuring the height of the spacer, and
The bonding process of bonding the pair of substrates and
An interval measuring step for measuring the interval between the pair of substrates bonded together, and an interval measuring step.
The ratio of the interval measured in the interval measuring step divided by the height measured in the height measuring step, and the interval measured in the interval measuring step and the height measuring step. A determination step of determining the quality of the liquid crystal panel based on whether or not at least one of the difference from the height measured in the above is within the determination reference range is provided.
In the determination step, the interval measured in the interval measuring step is defined as "G", the height measured in the height measuring step is defined as "T", and is a reference value of the height. The maximum ratio obtained by dividing the reference maximum interval, which is the maximum value of the interval that can be tolerated at the height, by the reference height is defined as "Rmax", and the reference minimum, which is the minimum value of the interval that can be tolerated at the reference height. A method for manufacturing a liquid crystal panel, wherein the determination reference range is at least one of the following equations (1) and (2) when the minimum ratio obtained by dividing the interval by the reference height is "Rmin".
[Number 1]
Rmin <G / T <Rmax (1)
[Number 2]
T. (Rmin-1) <GT <T. (Rmax-1) (2) The method for manufacturing a liquid crystal panel according to claim 1, wherein in the determination step, the quality of the liquid crystal panel is determined based on whether or not the difference is within the determination reference range represented by the above formula (2). In the determination step, a plurality of height sections in which a range from an upper limit value to a lower limit value acceptable for manufacturing the liquid crystal panel is divided with respect to the height, and the height set for each of the plurality of height sections. The representative value of the height and the data table containing at least the height are used to match which of the plurality of height sections the height measured in the height measuring step fits, and the fitted said. The method for manufacturing a liquid crystal panel according to claim 1 or 2, wherein the representative value of the height section is extracted as the height for calculating at least one of the ratio and the difference. In the determination step, there are a plurality of upper limit values and lower limit values related to the difference obtained by substituting the representative value of each of the plurality of height sections into the above equation (2) as the height "T". The data table included in a form individually linked to the height section is the difference between the interval measured in the interval measuring step and the height measured in the height measuring step. The method for manufacturing a liquid crystal panel according to claim 3, which is used as the determination reference range when determining. In the determination step, a plurality of data tables in which correction values are added to the upper limit value and the lower limit value related to the difference according to the elapsed time from at least the bonding step to the determination step. The method for manufacturing a liquid crystal panel according to claim 4, wherein the data table suitable for the elapsed time is selected from the inside. A liquid crystal dropping step of dropping a liquid crystal material onto one of the pair of substrates, which is performed prior to the bonding step, and the difference calculated in the determination step is within the determination reference range. The method for manufacturing a liquid crystal panel according to any one of claims 1, 2, 2, 4, and 5, further comprising a liquid crystal dropping step in which the dropping amount of the liquid crystal material is adjusted based on whether or not the liquid crystal material is dropped. In the determination step, any one of claims 1, 2, 2, 4, and 5 in which the upper limit value acceptable for manufacturing the liquid crystal panel with respect to the height is set to the reference height. The method for manufacturing a liquid crystal panel described in 1. In the spacer forming step, the spacer is selectively formed on one of the pair of substrates.
The liquid crystal panel according to claim 1, claim 2, claim 4, or claim 5, wherein in the bonding step, the spacer is brought into contact with the other substrate of the pair of substrates. Production method. In the spacer forming step, a first spacer component constituting the spacer is formed on one of the pair of substrates, and a second spacer component constituting the spacer is formed on the other substrate. ,
In the height measuring step, the height of the first spacer component and the height of the second spacer component are measured, respectively.
The liquid crystal panel according to any one of claims 1, 2, 2, 4, and 5, in which the first spacer component and the second spacer component are brought into contact with each other in the bonding step. Manufacturing method.

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