JP2021124475A - X-ray analyzer - Google Patents

Abstract

To accurately detect a pileup in a wide range from light elements to heavy elements.SOLUTION: One embodiment of an X-ray analyzer pertaining to the present invention comprises: X-ray detection units (3, 4) for detecting an X-ray and generating a stepwise signal having a level difference that corresponds to the energy of the X-ray; a differential operation unit (5) for converting the stepwise signal into a differential wave signal of a height that corresponds to the level difference of each step; a first conversion filter unit (82) for converting the differential wave signal into a triangular wave peak by a prescribed time constant; a second conversion filter unit (81) for converting the differential wave signal into a trapezoidal wave peak by a prescribed time constant; a pileup determination unit (87) for determining whether or not the peak width of the triangular wave peak is a pileup as compared with a prescribed determination condition; and a determination condition setting unit (88) for changing the determination condition in accordance with the crest value of the trapezoidal wave peak.SELECTED DRAWING: Figure 1

Description

The present invention relates to an X-ray analyzer, and more particularly to signal processing in an energy dispersive X-ray analyzer.

In the Energy dispersive X-ray spectroscopy device, the sample is irradiated with excitation rays such as X-rays and electron beams, and the characteristic X-rays emitted from the sample are emitted from the sample by a silicon drift detector or the like. Detected by a semiconductor detector. Characteristic X-rays have energy (wavelength) peculiar to the elements in the sample. Therefore, in the energy distribution type X-ray analyzer, signal processing that separates the output signal by the semiconductor detector for each wavelength (that is, energy) is performed, and the signal intensity (frequency) for each wavelength is examined to determine the qualitativeness of the elements in the sample. And quantification.

The device described in Patent Document 1 is known as a signal processing device (so-called multi-channel analyzer) for processing an output signal by a semiconductor detector to obtain a signal for each wavelength. In this signal processing device, the detection signal by the semiconductor detector is input to the preamplifier, and the stepped wave-shaped signal which is the output thereof is obtained. The height of each step of the staircase wavy signal corresponds to the wavelength of the X-ray incident on the semiconductor detector, that is, the energy. This stepped wavy signal is input to an analog differentiating circuit, converted into a differential wave, and then converted into digital data by an analog-digital converter. Then, the differential wave is converted into a peak signal which is a trapezoidal wave or a triangular wave by a digital filter, and the peak value of the peak which is a trapezoidal wave or a triangular wave is discriminated by the peak detection unit and the peak is counted for each peak value. Since this crest value corresponds to the energy of X-rays and the energy is unique to the type of element in the sample, it is possible to qualify and quantify the element in the sample based on the counting result for each crest value.

In order to accurately detect the peak peak value in the signal processing device, it is convenient that the peak top maintains a constant value for a long time. Therefore, when the peak detection unit discriminates the crest value, the trapezoidal wavy peak is more advantageous than the triangular wavy peak.

In such a signal processing device for X-ray analysis, if the time interval of the differential wave signal input to the digital filter for waveform conversion is too narrow, the waveform conversion by the digital filter is not performed properly and the adjacent peaks overlap. It shows the wrong peak value. This phenomenon is well known as pile-up or thumb peak. If the peak value is erroneously counted as described above, the correct analysis result cannot be obtained. Therefore, as described in Patent Document 2, the conventional signal processing device for X-ray analysis has a function called a pile-up rejector that excludes the peak determined to be in the pile-up state from the count. Has been done.

Japanese Unexamined Patent Publication No. 2015-21957 Japanese Unexamined Patent Publication No. 2016-125922

When high energy resolution is required in the above signal processing device, the peaking time (rise / fall time) of the waveform conversion digital filter is set long in order to improve the accuracy of the peak peak value. On the other hand, when high detection sensitivity is required, the peaking time of the waveform conversion digital filter is set short because it is necessary to increase the counting rate. In the pile-up determination method in the conventional pile-up rejector, the determination accuracy is generally high when the peaking time of the waveform conversion digital filter is relatively long, but the determination accuracy tends to decrease when the peaking time is short. That is, there is a problem that the pile-up is overlooked (false negative) and false judgment (false positive) is likely to occur. In particular, since heavy elements have a larger crest value than light elements, they are relatively susceptible to the influence of a short peaking time, and the pile-up accuracy tends to be low.

The present invention has been made to solve these problems, and an object of the present invention is to improve the accuracy of pile-up determination for various elements from light elements to heavy elements, thereby achieving accurate analysis results. Is to provide an X-ray analyzer capable of obtaining the above.

One aspect of the X-ray analyzer according to the present invention made to solve the above problems is
An X-ray detector that detects X-rays and generates a stepped signal with a step corresponding to the energy of the X-rays.
A differential calculation unit that converts the stepped signal into a differential wave signal having a height corresponding to the step of each step.
A first conversion filter unit that converts the differential wave signal into a triangular wave-shaped peak with a predetermined time constant, and
A second conversion filter unit that converts the differential wave signal into a trapezoidal wavy peak with a predetermined time constant, and
A pile-up determination unit that determines whether or not the peak width of the triangular wavy peak is piled up in light of a given determination condition, and a pile-up determination unit.
A judgment condition setting unit that changes the judgment condition according to the peak value of the peak of the trapezoidal wave, and a judgment condition setting unit.
Is provided.

In the X-ray analyzer of the above aspect according to the present invention, the determination condition in the pile-up determination unit is typically a determination threshold value for determining the magnitude of the peak width, and if the peak width is equal to or greater than the determination threshold value, pile-up is achieved. If it falls below the determination threshold value, it can be determined that the pile-up is not achieved. In this case, the determination condition setting unit increases the determination threshold value when the peak value of the trapezoidal wave peak is high as compared with the case where it is low.

When the peaking time (rising / falling time) of the triangular wave filter is shortened in order to increase the detection sensitivity, the rising edge of the triangular wave-shaped peak output from the filter is the input signal of the differential wave rather than the peaking time of the filter. It is significantly affected by the rise time. Since the rise time of the differential wave becomes longer as the step of the staircase wave becomes larger, the rise time of the differential wave is longer in the heavy element having a large energy than in the light element having a small energy of the characteristic X-ray. As a result, the peak width of the triangular wave peak corresponding to the heavy element, in which the X-ray energy is relatively large and the peak peak value is relatively high, is the original peak as compared with the peak width of the triangular wave peak corresponding to the light element. The degree of spread with respect to the width increases.

On the other hand, in the X-ray analyzer of the above aspect, the determination threshold value for determining the peak width of the triangular wave peak is changed according to the peak value of the trapezoidal wave peak. Therefore, it is possible to more accurately determine the possibility of pile-up even if the degree of spread of the peak width of the triangular wave peak differs depending on the element, that is, the difference in the crest value.

According to the X-ray analyzer of the above aspect according to the present invention, it is possible to accurately determine pile-up during signal processing for characteristic X-rays derived from a wide variety of elements from light elements to heavy elements. That is, it is possible to improve the accuracy of the peak peak value and the accuracy of the energy spectrum waveform mainly by reducing the oversight of pile-up in the wavelength region of the light element. Further, by reducing false detection of pile-up mainly in the region of heavy elements, the accuracy of the peak count value can be improved and the intensity of the energy spectrum can be increased.

The block diagram of the main part of the energy dispersive X-ray fluorescence analysis (EDX) apparatus which is one Embodiment of this invention. The block block diagram of the pile-up determination processing part in the EDX apparatus of this embodiment. The explanatory view of the pile-up determination operation in the EDX apparatus of this embodiment. The explanatory view of the pile-up determination operation in the EDX apparatus of this embodiment.

Hereinafter, an energy dispersive fluorescent X-ray analysis device (hereinafter, abbreviated as “EDX” according to conventional practice), which is an embodiment of the X-ray analyzer according to the present invention, will be described with reference to the accompanying drawings.

[Configuration and Schematic Operation of EDX Device of the Present Embodiment]
FIG. 1 is a schematic configuration diagram of the entire EDX device of the present embodiment. FIG. 2 is a block configuration diagram of a pile-up determination processing unit in the EDX device of the present embodiment.

As shown in FIG. 1, the EDX apparatus of this embodiment includes an X-ray source 1, a detector 3, a preamplifier 4, a differentiating circuit 5, a main amplifier 6, an analog-to-digital converter (ADC) 7, and a digital signal processing unit 8. , CPU 9 for data processing, and the like.

The detector 3 is a semiconductor detector such as a silicon drift detector. The differentiating circuit 5 is a CR differentiating circuit including a capacitor 51 and a resistor 52. The digital signal processing unit 8 is a field program gate array (FPGA) circuit, and as functional blocks, a waveform conversion digital filter 80, a gain / offset adjustment unit 83, a peak detection unit 84, a histogram writing control unit 85, a histogram memory 86, and a pile. It includes an up determination processing unit 87, a determination threshold setting unit 88, and the like. The waveform conversion digital filter 80 includes a trapezoidal wave filter 81 and a triangular wave filter 82.

As shown in FIG. 2, the pile-up determination processing unit 87 includes a rectangular pulse generation unit 871, a pulse width determination unit 872, a pulse interval determination unit 873, a comprehensive determination unit 874, and the like as functional blocks.

The analysis operation in the EDX apparatus of this embodiment will be schematically described.
The X-ray source 1 irradiates the sample 2 with excited X-rays. As a result, characteristic X-rays (fluorescent X-rays) having a wavelength peculiar to the elements in the sample 2 are emitted from the sample 2. The detector 3 outputs a detection signal according to the energy of the incident X-ray (characteristic X-ray), and the preamplifier 4 amplifies the input signal. The output of the preamplifier 4 becomes a stepped signal having a step proportional to the energy of the incident X-ray and being reset at a predetermined timing. The differentiating circuit 5 converts the staircase wave into a differentiating wave having a height corresponding to the step of each step. One step of the staircase wave becomes one differential wave peak. The ADC 7 samples this differential wave at a predetermined sampling frequency and converts it into a digital signal.

In the waveform conversion digital filter 80, the trapezoidal wave filter 81 converts a differential wave, which is an input digital signal, into a trapezoidal wave. At the same time, the triangular wave filter 82 converts the differential wave, which is an input digital signal, into a triangular wave. That is, a trapezoidal wave peak and a triangular wave peak are generated for each differential wave peak. The gain / offset adjustment unit 83 adjusts the gain and offset of the trapezoidal wave digital signal, and the peak detection unit 84 detects the peak in the adjusted trapezoidal wave digital signal and the value of the flat portion of the peak top of each peak, that is, Finds the peak value.

The histogram memory 86 is a memory that stores the frequency (count value) for each peak peak value corresponding to the X-ray energy. The histogram writing control unit 85 receives the peak value of the peak and updates the count value by incrementing the count value corresponding to the peak value stored in the histogram memory 86. As a result, in the histogram memory 86, a histogram showing the number of times the X-rays are incident is created for each energy of the characteristic X-rays incident on the detector 3 (strictly, for each predetermined energy range). This histogram is sequentially sent to the CPU 9, and based on this histogram, the CPU 9 creates an energy spectrum in which the horizontal axis is the fluorescent X-ray energy and the vertical axis is the X-ray intensity, that is, the content of the element, and a display (not shown) is provided. Display in the section.

Since the trapezoidal wave filter 81 has a predetermined peak king time and a flat top time, if a plurality of differential wave peaks are input within a predetermined time, the trapezoidal wave peak corresponding to each differential wave peak cannot be output. .. That is, pile-up occurs. Therefore, the pile-up determination processing unit 87 determines the presence or absence of pile-up based on the triangular wave peak output from the triangular wave filter 82. Then, when the pile-up is detected, the histogram writing control unit 85 that receives the detection signal prohibits the increment of the count value based on the peak peak value corresponding to the time when the pile-up occurs. This prohibits updating the histogram based on improper, or trapezoidal peaks, where the peak value may be inaccurate when pile-up is occurring.

If only the counting of the peaks in which pile-up is detected is prohibited, the counting value will be smaller than the actual value. Therefore, normally, the CPU 9 performs a process of correcting the decrease in the counting value due to the pile-up. NS. This is similar to the conventional EDX device.

[Details of pile-up determination processing in the EDX device of the present embodiment]
Next, the pile-up determination executed mainly by the pile-up determination processing unit 87 will be described with reference to FIGS. 3 and 4 in addition to FIGS. 1 and 2. 3 and 4 are schematic waveform diagrams for explaining the pile-up determination operation.

The pile-up determination is not based on the trapezoidal wave filter 81 for detecting the peak value of the waveform conversion digital filter 80, but on the triangular wave peak which is the output from the triangular wave filter 82 which has a smaller peaking time and no flat top time. It is done based on.

There are two conditions for determining pile-up, the first is the peak width of the triangular wave peak itself, and the second is the peak interval between two temporally adjacent triangular wave peaks.
That is, when two differential wave peaks are close to each other and appear as one triangular wave peak, the peak width of the triangular wave peak is usually wider than the original peak width. Therefore, when the peak width of the triangular wave peak is equal to or larger than a given width determination threshold value, it can be determined that there is a high possibility of pile-up. Even if two differential wave peaks that are adjacent in time can be observed as one triangular wave peak each, when the interval is very narrow, the trapezoidal wave peak for obtaining the peak value is obtained. Then there is a possibility that they will become one (that is, they cannot be separated). Therefore, if the interval between the two triangular wave peaks that are adjacent in time is within a given interval determination threshold value, it can be determined that there is a high possibility of pile-up.

In FIGS. 3 and 4, Fout shows the waveform of the triangular wave digital signal which is the output of the triangular wave filter 82. The square wave generation unit 871 in the pile-up determination processing unit 87 generates a binary rectangular wave pulse Dout by comparing the voltage value of the triangular wave digital signal Fout with the given shaping threshold voltage Vth. The pulse width of this square wave pulse Dout corresponds to the peak width of the triangular wave peak.

The pulse width determination unit 872 compares the pulse width of the square wave pulse Dout with the width determination threshold value, and outputs the first determination signal INH1 if the pulse width is larger. FIG. 3B1 is an example in which the pulse width of the square wave pulse Dout is smaller than the width determination threshold value, and FIG. 3B2 is an example in the case where the pulse width of the square wave pulse Dout is larger than the width determination threshold value. In the latter, the pulse of the first determination signal INH1 is output as shown by the dotted line in FIG. 3 (B2), and pile-up is detected. However, in FIG. 3, the width determination threshold FPKTM * 2 + α is constant.

On the other hand, the pulse interval determination unit 873 compares the interval between two temporally adjacent rectangular wave pulses Dout with the interval determination threshold value, and outputs the second determination signal INH2 if the interval is larger. As shown in FIGS. 3A and 3A, the distance between the two square wave pulses Dout is defined by the distance between the rising edges of the square wave pulse Dout (upward arrow in the figure). FIG. 3 (A1) shows an example in which the interval between the two square wave pulses Dout is larger than the interval determination threshold value, and FIG. 3 (A2) shows an example in which the interval between the two square wave pulse Douts is smaller than the interval determination threshold value. be. In the latter, the pulse of the second determination signal INH2 is output as shown by the dotted line in FIG. 3 (A2), and pile-up is detected. Like the width determination threshold, the interval determination threshold SLOW_PKTM + SLOW_FTM + α is constant.

That is, in the cases shown in FIGS. 3 (A2) and 3 (B2), it is determined that they are in the pile-up state, respectively. When it is determined that the pile-up state is obtained under at least one of the determination conditions of the peak width and the peak interval, it is necessary to prohibit the update of the histogram based on the peak value. Therefore, the comprehensive determination unit 874 performs an operation (OR operation) of the logical sum of the first determination signal INH1 and the second determination signal INH2, and outputs the result as a pile-up determination result.

The determination threshold value of the peak interval can be uniquely determined by the peaking time + flat top time of the trapezoidal wave filter 81. That is, the interval determination threshold is obtained by adding the flat top time SLOW_FTM to the peaking time SLOW_PKTM of the trapezoidal wave filter 81, and further adding a predetermined margin α. On the other hand, the determination of the peak width has the following problems.

In order to realize high detection sensitivity, it is necessary to increase the number of counts per unit time, and for that purpose, it is necessary to reduce the peaking time and the flat top time of the waveform conversion digital filter 80. On the other hand, the differential wave peak itself input to the ADC 7 has a certain rise time, and the output waveform of the waveform conversion digital filter 80 is also affected by the rise time. Therefore, the flat time of the trapezoidal wave filter 81 needs to be set to be equal to or greater than the rise time of the differential peak so that the trapezoidal wave peak absorbs the rise time of the differential peak. On the other hand, in order to perform the pile-up determination, the peaking time of the triangular wave filter 82 needs to be smaller than the peaking time of the trapezoidal wave filter 81. Therefore, at the time of high counting, the influence of the rising edge of the input waveform becomes larger on the output of the triangular wave filter 82 than the setting of the peaking time. This is even more pronounced when the rise time is large compared to the peaking time. The effect of the rising edge of the input waveform appears as the peak width of the triangular wave peak is wider than it should be. Since the degree of spread of the peak width depends on the peak value of the peak, the effect is small for light elements with a relatively small peak value, but the effect is large for heavy elements with a relatively large peak value, and the peak width is actually Tends to spread more than.

For the above reason, if the width determination threshold value is set large so as to facilitate the detection of pile-up in heavy elements, the pile-up in light elements does not get caught in the width determination threshold value, and the sum peak increases. Conversely, if the width determination threshold is reduced to reliably detect pile-up in light elements, the sum peaks of light elements are removed, but the cases of heavy elements are removed even though the peaks do not overlap. Therefore, heavy elements do not appear in the energy spectrum. In order to avoid such a problem, in the EDX apparatus of the present embodiment, the width determination threshold value is changed according to the peak value of the peak itself so that the pile-up determination based on the peak width can be performed satisfactorily for both heavy and light elements. I am trying to do it. Specifically, the following processing is carried out.

Generally, when the pulse width determination unit 872 determines the peak width, the width determination threshold value is set to about twice the peaking time of the output of the triangular wave filter 82 + α (α is a fixed value). On the other hand, in the EDX device of the present embodiment, the width determination threshold value is set to twice the peaking time + α + β (however, β is a variable value). The determination threshold value setting unit 88 changes the value of β according to the peak value fed back from the peak detection unit 84. That is, when the element to be analyzed is a light element and the crest value is small, the value of β is decreased, and when the element to be analyzed is a heavy element and the crest value is large, the value of β is increased. For example, the determination threshold value setting unit 88 calculates the value of β by β = [the peak value at that time] × constant, and adaptively changes the width determination threshold value according to the peak value.

A specific example will be given. Now, it is assumed that the sampling time of the ADC 7 is ts. For example, when the peaking time tp of the triangular wave filter 82 is tp = ts ×× 4, the peak width becomes about ts × 10 when the peak value = 200 due to the influence of the rising slope of the input waveform on the filter 82. It is assumed that the peak width when the peak value = 700 is about ts × 15. Further, it is assumed that α = ts × 1 and β = peak value × 0.01 × ts. At this time, as described with reference to FIGS. 3 (B1) and 3 (B2), when the width determination threshold value is constant without considering β, the width is wide regardless of whether the peak value is 200 or 700. The determination threshold is a fixed value such as ts × 11 or ts × 16.

4 (A1) and 4 (A2) are cases where the width determination threshold value is constant and small. When the pulse width of the rectangular pulse Dout is narrow as shown in (A1), no pulse is output to the first determination signal INH1, and the pile-up is detected correctly. However, when the pulse width of the rectangular pulse Dout is wide as shown in (A2), the pulse is output to the first determination signal INH1 even though it is not piled up. That is, pile-up is erroneously detected.

FIGS. 4 (B1) and 4 (B2) show a case where the width determination threshold value is constant and large. When the pulse width of the rectangular pulse Dout is wide as shown in (B2), no pulse is output to the first determination signal INH1, and the pile-up is detected correctly. However, when the pulse width of the rectangular pulse Dout is narrow as shown in (B1), the pulse is not output to the first determination signal INH1 even though the pulse is piled up. In other words, pile-up is overlooked.

On the other hand, in the EDX device of the present embodiment, for example, when the peak value is 200, the width determination threshold value is ts × 11, and when the peak value is 700, the width determination threshold value is ts × 16, and the width determination threshold value is ts × 16. It changes according to the crest value.
FIGS. 4 (C1) and 4 (C2) show the case where the width determination threshold value changes according to the peak value. As shown in (C1), when the pulse width of the rectangular pulse Dout is narrow because it is a light element, the width determination threshold value is also small. On the other hand, as shown in (C2), when the element is a heavy element and the pulse width of the rectangular pulse Dout is wide, the width determination threshold value is also large. Therefore, when pile-up occurs in a light element and the peak width widens, it can be detected without overlooking. On the other hand, when the pile-up does not occur in the heavy element, it can be avoided that the pile-up is erroneously determined.

As described above, in the EDX apparatus of the present embodiment, both oversight and false detection of pile-up are reduced by adaptively changing the width determination threshold value for pile-up determination according to the peak peak value. can do.

Of course, the method of adaptively changing the width determination threshold value is not limited to the method of adding a value obtained by multiplying the peak value by a constant (β above) to the fixed value as described above.

Further, in the EDX apparatus of the above embodiment, only one triangular wave filter 82 for pile-up determination is provided, but a plurality of triangular wave filters having different peaking times are used, and their outputs are determined under different width determination threshold values. However, those determination results may be combined. As a result, the pile-up determination accuracy can be further improved.

Further, in the EDX apparatus of the above embodiment, the circuit from the output of the ADC 7 to the input of the CPU 9 is composed of a logic circuit by FPGA, but the same function is installed on the computer by installing software on the computer. It can also be achieved by executing it.

Further, the present invention can be applied to an X-ray analyzer in which the excitation line is not an X-ray but another excitation line such as an electron beam.

Further, the above embodiment is an example of the present invention, and it is clear that the present invention is included in the claims even if it is further modified, modified or added as appropriate within the scope of the present invention.

[Various aspects]
It will be understood by those skilled in the art that the above-described exemplary embodiments are specific examples of the following embodiments.

(Clause 1) One aspect of the X-ray analyzer according to the present invention is
An X-ray detector that detects X-rays and generates a stepped signal with a step corresponding to the energy of the X-rays.
A differential calculation unit that converts the stepped signal into a differential wave signal having a height corresponding to the step of each step.
A first conversion filter unit that converts the differential wave signal into a triangular wave-shaped peak with a predetermined time constant, and
A second conversion filter unit that converts the differential wave signal into a trapezoidal wavy peak with a predetermined time constant, and
A pile-up determination unit that determines whether or not the peak width of the triangular wavy peak is piled up in light of a given determination condition, and a pile-up determination unit.
A judgment condition setting unit that changes the judgment condition according to the peak value of the peak of the trapezoidal wave, and a judgment condition setting unit.
To be equipped.

According to the X-ray analyzer of the above aspect according to the present invention, characteristic X-rays derived from a wide variety of elements from light elements to heavy elements, which have different energies of characteristic X-rays, are piled up during signal processing. Can be accurately determined. That is, it is possible to improve the accuracy of the peak peak value and the accuracy of the energy spectrum waveform mainly by reducing the oversight of pile-up in the wavelength region of the light element. Further, by reducing false detection of pile-up mainly in the region of heavy elements, the accuracy of the peak count value can be improved and the intensity of the energy spectrum can be increased.

(Item 2) In the X-ray analyzer according to the item 1, the first conversion filter unit and the second conversion filter unit may be digital filters.

(Term 3) In the X-ray analyzer according to the first or second paragraph, the determination condition setting unit sets a variable value obtained by multiplying the peak value by a predetermined coefficient to obtain a peak of the second conversion filter unit. By adding it to a fixed value that reflects the time, it is possible to obtain a threshold value for determining the peak width.

1 ... X-ray source 2 ... Sample 3 ... Detector 4 ... Preamplifier 5 ... Differentiating circuit 51 ... Capacitor 52 ... Resistance 6 ... Main amplifier 7 ... Analog-to-digital converter (ADC)
8 ... Digital signal processing unit 80 ... Waveform conversion digital filter 81 ... Trapezoidal wave filter 82 ... Triangle wave filter 83 ... Gain / offset adjustment unit 84 ... Peak detection unit 85 ... histogram writing control unit 86 ... histogram memory 87 ... Pile-up judgment processing unit 871 ... Rectangular pulse generation unit 872 ... Pulse width determination unit 873 ... Pulse interval determination unit 874 ... Comprehensive determination unit 88 ... Judgment threshold setting unit 9 ... CPU

Claims (3)

An X-ray detector that detects X-rays and generates a stepped signal with a step corresponding to the energy of the X-rays.
A differential calculation unit that converts the stepped signal into a differential wave signal having a height corresponding to the step of each step.
A first conversion filter unit that converts the differential wave signal into a triangular wave-shaped peak with a predetermined time constant, and
A second conversion filter unit that converts the differential wave signal into a trapezoidal wavy peak with a predetermined time constant, and
A pile-up determination unit that determines whether or not the peak width of the triangular wavy peak is piled up in light of a given determination condition, and a pile-up determination unit.
A judgment condition setting unit that changes the judgment condition according to the peak value of the peak of the trapezoidal wave, and a judgment condition setting unit.
X-ray analyzer. The X-ray analyzer according to claim 1, wherein the first conversion filter unit and the second conversion filter unit are digital filters. The determination condition setting unit obtains a threshold value for determining the peak width by adding a variable value obtained by multiplying the peak value by a predetermined coefficient to a fixed value reflecting the peak time of the second conversion filter unit. Item 2. The X-ray analyzer according to item 1 or 2.

Images