JP2021114810A - Actuator, lens device comprising the same and imaging apparatus - Google Patents

Abstract

To provide an actuator which can excellently control a driven body.SOLUTION: An actuator comprises: a plurality of vibrator units S1, S2, S3 each having first protrusion portions 2a and second protrusion portions 2b; a base member 4 which holds the plurality of vibrator units S1, S2, S3; and a driven member 5 which is in contact with the first protrusion portions 2a and the second protrusion portions 2b. The relative position between the plurality of vibrator units S1, S2, S3 and the driven member 5 changes with the vibration of the plurality of vibrator units S1, S2, S3. A first straight line B1 connecting the first protrusion portion 2a and the second protrusion portion 2b of the first vibrator unit S1 of the plurality of vibrator units S1, S2, S3 is not in parallel to the second straight line X1 in parallel to the direction of the change in the relative position on a rotational axis A1 of the first vibrator unit S1.SELECTED DRAWING: Figure 1

Description

The present invention relates to an actuator having a plurality of vibrating bodies.

A configuration having a plurality of vibrators has been proposed for a drive device for driving a lens barrel mounted on an image pickup device in the circumferential direction or the optical axis direction.

In Patent Document 1, a plurality of vibrators are arranged at equal intervals so that the driving direction is tangential to the ring with respect to the ring-shaped vibrator holder, and the plurality of vibrators are covered with a ring shape. A drive device that drives a driven body by bringing the drive body into contact with the driven body is described.

Japanese Unexamined Patent Publication No. 2012-5309

However, in Patent Document 1, when the driving characteristics of a plurality of vibrators are different from each other (there are individual differences), it becomes difficult to control the driven body well.

The present invention is to provide an actuator capable of satisfactorily controlling a driven body.

In order to achieve the above object, the actuator includes a plurality of vibrating bodies each having first and second protrusions, a base member holding the plurality of vibrating bodies, and the first and second protrusions. A sliding member that comes into contact with the portion is provided, and the relative positions of the plurality of vibrating bodies and the sliding member are changed by the vibration of the plurality of vibrating bodies, and the first vibrating body of the plurality of vibrating bodies is provided. The first straight line connecting the first and second protrusions and the second straight line parallel to the direction of change in the relative position on the rotation axis of the first vibrating body are non-parallel to each other. It is characterized by.

According to the present invention, it is possible to provide an actuator capable of satisfactorily controlling a vibrated body.

It is a front view which shows the structure of the main part of the actuator 10 of Example 1. FIG. It is a partially enlarged view of the vibrator unit S1 of Example 1. FIG. It is a perspective view of the oscillator unit S1. It is a front view of the actuator 10 of the first embodiment. It is a side view of the actuator 10. It is sectional drawing of the oscillator unit S1. It is a perspective view of the whole structure including the actuator 20 of Example 2. FIG. It is a side view of the whole structure including the actuator 20 of Example 2. FIG. It is a perspective view which shows the structure of the main part of the actuator 20 of Example 2. FIG. It is a front view which shows the structure of the main part of the actuator 20 of Example 2. FIG.

(Example 1)
Hereinafter, the actuator (vibration type actuator) 10 of the first embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a front view showing the configuration of the main part of the actuator 10 of the first embodiment, and shows a state in which the driven member 5 (sliding member) described later is removed. FIG. 2A is a partially enlarged view of the vibrator unit S1 (first vibrating body), and FIG. 2B is a perspective view thereof. FIG. 3A is a front view of the actuator 10, and FIG. 3B is a side view thereof, showing a state closer to a used state. In the first embodiment, the rotation direction (relative movement direction) of the driven member 5 is the X direction, the direction of the central axis passing through the rotation center z of the driven member 5 is the Z direction, and the center c of the vibrator unit S1. The direction of the axis passing through the rotation center z of the driven member 5 is the Y direction.

The actuator 10 of the first embodiment includes three vibrator units S1, S2, and S3 (a plurality of vibrating bodies), a base member 4 that holds the vibrator units S1, S2, and S3, and a driven member 5 (FIG. 3 (FIG. 3). A) It is composed of (see). The driven member 5 is held in a state of being in pressure contact with the vibrator units S1, S2, and S3. Since the vibrator units S1, S2, and S3 all have the same shape, the configuration thereof will be described below on behalf of the vibrator unit S1.

The vibrator unit S1 is composed of a diaphragm 2 made of a plate-shaped elastic body, a rectangular piezoelectric element 1 joined to the diaphragm 2, and a connecting member 3 for connecting the diaphragm 2 to a base member 4. The rectangle here is not limited to a strict rectangle, but also includes a substantially rectangle such as a square. The diaphragm 2 is provided with two protrusions 2a (first protrusions) and protrusions 2b (second protrusions), which are contact portions that come into contact with the driven member 5.

Further, a flexible printed circuit board (not shown) that electrically connects the piezoelectric element 1 to the outside is connected to the vibrator units S1, S2, and S3. By applying a predetermined input signal to the piezoelectric element 1 through the flexible printed circuit board, it is possible to excite vibrations in the vibrator units S1, S2, and S3. By exciting the vibrations of the vibrator units S1, S2, and S3 in two different vibration modes and superimposing them on each other, elliptical motion is generated on the upper surfaces of the protrusions 2a and 2b which are the contact parts with the driven member 5. Then, a force that changes the relative positions of the vibrator units S1, S2, S3 and the driven member 5 is generated in the X direction shown in FIG. This principle is as described in JP-A-2017-195743 and the like. However, the present invention is not limited to the configuration of the vibrator units S1, S2, and S3 described above, and a vibrator having a configuration for exciting vibration in another out-of-plane bending vibration mode may be used, or a configuration for exciting other vibration modes may be used. It may be an oscillator of.

FIG. 4 is a cross-sectional view of the vibrator unit S1 in a straight line B1 (first straight line, see FIG. 2A) connecting the protrusions 2a and 2b of the diaphragm 2. A boss 3a (convex portion) protruding in the direction of the rotation axis A1 passing through the center c of the vibrator unit S1 is formed substantially in the center of the connecting member 3 of the vibrator unit S1. Further, the base member 4 is formed with a concave portion 4a (recess) recessed in the direction of the rotation axis A1, the boss 3a is loosely fitted in the concave portion 4a, and the vibrator unit S1 rotates. It is rotatably held by the base member 4 around the boss 3a about the shaft A1. A concave portion may be formed in the vibrator unit S1 and a convex portion may be formed in the base member 4, that is, one of the vibrator unit S1 and the base member 4 is provided with a boss 3a protruding in the direction of the rotation axis A1. On the other side, a concave portion 4a corresponding to the boss 3a is provided.

As shown in FIGS. 2A and 2B, one end of the spring 7 (the urging member) is further fixed to the base member 4 by the screw 6, and the other end of the spring 7 is the vibrator unit. The connecting member 3 of S1 is urged by a urging force. The urging force of the spring 7 acts as a force for the vibrator unit S1 to rotate about the rotation axis A1. On the other hand, on the inner diameter side of the base member 4, an adjusting screw 8 (adjusting member) facing the spring 7 is provided so as to oppose the urging force of the spring 7 so as to face outward in the radial direction. The adjusting screw 8 can be moved forward and backward according to the tightening amount of the adjusting screw 8, and the tip portion 8a of the adjusting screw 8 presses the side surface of the connecting member 3. By this pressing, the vibrator unit S1 can rotate about the rotation axis A1.

The vibrator unit S1 is held at a predetermined position without rotating by receiving the urging force of the spring 7 with the adjusting screw 8. With such a configuration, the position of the vibrator unit S1 can be adjusted according to the tightening amount of the adjusting screw 8, and the connecting member 3 desires the vibrator unit S1 with respect to the base member 4. It has a function to fix it in a position.

Next, the driven member 5 of the actuator 10 of the first embodiment will be described. As shown in FIG. 3A, in the first embodiment, the driven member 5 is formed in an annular shape, and the bottom surface 5a on the right side in FIG. 3B is a plane orthogonal to the Z direction. It is formed flat so as to be parallel to. The protrusions 2a and 2b of the diaphragm 2 come into contact with the bottom surface 5a, and the bottom surface 5a functions as a sliding surface on which the protrusions 2a and 2b slide. The driven member 5 is guided by a guide member (not shown) so as to be rotatable around a central axis in the Z direction, and other axial movements and linear movements are restricted.

As shown in FIG. 1, the three oscillator units S1, S2, and S3 are arranged on substantially concentric circles with respect to the center of rotation z and at positions separated from each other at positions that substantially divide the circumferential direction into three equal parts. The vibrator units S1, S2, and S3 are fixed to the base member 4 so that the upper surfaces of the protrusions 2a and 2b in contact with the driven member 5 are parallel to the plane orthogonal to the Z direction.

When a predetermined signal is input to each of the vibrator units S1, S2, and S3, a force for relatively moving the driven member 5 in the X direction is generated. In response to this force, the driven member 5 rotates around the center of rotation z. A cam ring or the like is connected to the driven member 5 integrally or separately, and by moving the lens holding frame or the like in the Z direction by rotating the cam ring, zooming, focusing, or the like can be performed. Then, a lens barrel (lens device) provided with a lens holding frame or the like driven by the actuator 10 can be applied to the image pickup device, and further, an image pickup element that receives light from the lens barrel is provided. It can also be applied to an imaging device.

In the present invention, a plurality of vibrator units S1 are provided, but the reason why the plurality of vibrator units S1 are provided is to achieve high torque and miniaturization of the actuator 10. When trying to obtain the same torque with a single oscillator unit S1, it is unavoidable to increase the size of the oscillator unit S1, but by providing a plurality of single oscillator units S1, it is possible to avoid increasing the size of the unit. Can be done.

Next, an example of a manufacturing method (assembly procedure) of the actuator 10 will be described. The oscillator units S1, S2, and S3 are assembled in the unit assembly process. A signal is applied to each of the assembled vibrator units S1, S2, and S3 through the flexible printed circuit board described above, and desired characteristics are individually inspected in the checking step. From the result of the check process, the characteristics of the vibrator units S1, S2, and S3 are ranked in the ranking process.

An example of the characteristics referred to here is the feed amount when input signals of the same frequency and the same amplitude are applied. Alternatively, it may be a characteristic obtained by measuring the feed amount or the push-up amount at several different frequencies and capturing it as a frequency characteristic. What is important is that the outputs obtained when the same signal is applied are aligned between the oscillator units S1, S2, and S3, and if it is a check item that can identify it, the measurement contents and the like have these characteristics. Not limited to.

As a result of evaluating the measured characteristics, in the ranking process, for example, the characteristics are divided into four stages, A rank, B rank, C rank, and D rank. Rank B has average performance and the frequency of sample occurrence is highest. Rank A has higher performance than rank B, and the frequency of sample occurrence is lower than that of rank B. C rank is a usable level, but its performance is lower than that of B rank, and the frequency of sample occurrence is low. Since the D rank does not reach the predetermined performance due to assembly defects, defective parts, etc., it cannot be used, and the frequency of occurrence of the D rank sample is the lowest.

Next, the assembling process of the vibrator units S1, S2, and S3 will be described. The vibrator unit S1 is centered on the rotation axis A1 with respect to the base member 4 by fitting the boss 3a formed on the connecting member 3 to the concave portion 4a provided on the base member 4 with an appropriate clearance. It is held rotatably as. Then, the connecting member 3 of the vibrator unit S1 is urged by the spring 7 provided on the base member 4, and the spring 7 is attached by the adjusting screw 8 provided on the inner diameter side of the base member 4. The vibrator unit S1 is positioned on the base member 4 with respect to the force. The vibrator units S2 and S3 are also assembled to the base member 4 in the same manner as the vibrator unit S1.

As shown in FIG. 2A, a straight line parallel to (that is, in contact with) the rotation direction X, which is the direction of change in the relative position of the driven member 5, at the center c (rotation axis A1) of the transducer unit S1. The line in the Y direction is substantially orthogonal to X1 (the second straight line, a line parallel to the direction of change in the relative position). If all of the vibrator units S1, S2, and S3 have the same rank B, the angle θ1 formed by the straight line B1 and the straight line X1 connecting the protrusions 2a and 2b of the diaphragm 2 is 0 degrees (that is, parallel). ), It is desirable to arrange the vibrator unit S1. The reason is that the direction of the elliptical motion generated in the diaphragm 2 is the direction in which the protrusion 2a and the protrusion 2b are connected, and a force for relatively moving the driven member 5 is generated in that direction. Naturally, it is better that the direction of the straight line B1 where the force is generated and the direction of the straight line X1 (the rotation direction X of the driven member 5 can be regarded as the straight line direction on the rotation axis A1) are the same. The loss in transmission is smaller.

When all of the vibrator units S1, S2, and S3 have the same rank B, the angle θ1 formed by the straight line B1 and the straight line X1 connecting the protrusions 2a and 2b of the diaphragm 2 is adjusted to be 0 degrees. The vibrator unit S1 is assembled to the base member 4 by adjusting the tightening amount of the screw 8. The remaining oscillator unit S2 (second vibrating body) and oscillator unit S3 are also assembled to the base member 4 in the same manner as the oscillator unit S1.

As described above, when the actuator 10 is assembled by the vibrator units S1, S2, and S3 of the same rank, problems such as a decrease in rotational speed and deterioration in controllability do not occur. Or, even if it occurs, it is a slight problem, so it is not a problem that affects the drive characteristics. However, for example, when the oscillator units S1, S2, and S3 have different ranks only for the oscillator unit S1, such as A rank, B rank, and B rank, the desired rotation results. You may not be able to get the speed. Specifically, even when the same input vibration mode is given, the drive characteristics obtained as outputs of the vibrator units S1, S2, and S3 are different. Further, not only the rotation speed but also the reaction to the control such as acceleration, deceleration, and braking becomes unstable, so that the desired drive cannot be realized, and the controllability may be deteriorated. On the other hand, as an example of the conventional countermeasure method, by applying different drive signals to the vibrator units S1, S2, S3, the output of each vibrator unit S1, S2, S3 is set to a certain level. It can be mentioned that it corresponds by control so as to align with. However, setting separate vibration modes complicates control. Further, if the control is applied, another electric component, a flexible printed circuit board, or the like needs to be added for the control, so that there is a concern that the cost will increase. Further, since the size of the electric board on which they are mounted and connected becomes large, there is a concern that the product size will increase.

In the present invention, when there is a difference in drive characteristics among the three vibrator units S1, S2, and S3, the drive characteristics are adjusted by the following adjustment steps. As an example, a case where the oscillator unit S1 has an A rank and the oscillator units S2 and S3 have a B rank will be described. For the vibrator unit S2 having no difference in drive characteristics, the angle formed by the line B2 (third straight line) and the line X2 (fourth straight line) is 0 degrees (parallel) as shown in FIG. It is assembled to the base member 4. The same applies to the vibrator unit S3 as in the vibrator unit S2.

For the vibrator unit S1 having high performance (A rank), the straight line B1 connecting the protrusions 2a and 2b of the diaphragm 2 and the straight line X1 on the rotation axis A1 have an angle θ1 of 0 degrees. Instead, it is adjusted to a predetermined angle (for example, 1 degree or more) so as to be non-parallel. Specifically, the tightening amount of the adjusting screw 8 is adjusted, and the vibrator unit S1 is rotated on the rotation axis A1 to adjust its position (angle θ1). The magnitude of the angle θ1 may be a predetermined value, or may be an individual value calculated from the difference in the drive characteristics of the vibrator units S1, S2, and S3. By this adjustment, the direction in which the force for relative movement is generated (the direction of the straight line B1) and the direction of the straight line X1 become non-parallel, so that a loss is generated in the transmission of the force generated by the vibrator unit S1 and the vibrator unit. The drive characteristics of S1 are reduced. However, the vibrator unit S1 has a rank A having higher performance than the rank B, and when the same input signal is given by lowering the drive characteristics of the vibrator unit S1, the vibrator units S1, S2, The feed amounts between S3 can be substantially matched.

By adjusting the drive characteristics of the vibrator unit S1 as in the first embodiment, the effect of substantially matching the drive characteristics of the vibrator units S1, S2, and S3 in the assembled state can be obtained. By aligning the drive characteristics of the three vibrator units S1, S2, and S3 within a predetermined range, it is possible to avoid the occurrence of problems such as a decrease in rotational speed and deterioration in controllability as described above. Further, since it is not necessary to apply separate inputs (drive signals) to align the outputs of the three oscillator units S1, S2, and S3, it is possible to avoid complicated control, increase in cost of the electric board, and increase in size. The excellent effect of being able to do is obtained.

Further, in the first embodiment, in addition to the above effects, another effect described below can be obtained. When the angle θ1 is 0 degrees, the radial positions of the sliding locations on the driven member 5 that is rotationally driven while in contact with the protrusions 2a and 2b are the same. That is, it is the same rut that the protrusions 2a and 2b slide. When the angles θ1 of the vibrator units S1, S2, and S3 are all 0 degrees, a total of six protrusions 2a and 2b slide on the same rut. As a result, the driven member 5 is worn quickly, and the durability may be deteriorated.

On the other hand, when the angle θ1 is adjusted to other than 0 degrees, the places where the protrusions 2a and 2b slide are divided into the inner diameter side and the outer diameter side, so that the positions of the sliding places on the driven member 5 in the radial direction are different. , The ruts formed on the driven member 5 are not one. By separating the sliding places, it becomes possible to suppress the wear of the driven member 5, and the durability is improved. Further, if the angle θ1 is slightly different between the vibrator units S1, S2, and S3, all the six protrusions 2a and 2b will slide on different ruts, further improving the durability. Is possible.

(Example 2)
Next, the actuator 20 of the second embodiment of the present invention will be described with reference to FIGS. 5 to 8 attached, focusing on the difference from the first embodiment. FIG. 5 is a perspective view of the entire configuration including the actuator 20 of the second embodiment. FIG. 6 is a side view of the entire configuration including the actuator 20. FIG. 7 is a perspective view showing the configuration of the main part of the actuator 20. FIG. 8 is a front view showing the configuration of the main portion of the actuator 20 shown in FIGS. 5 to 7, and is a view seen from the directions of the sliders 25a and 25b (sliding members), and is a projection portion of the diaphragm 2. It is a figure facing 2a (first protrusion) and protrusion 2b (second protrusion). In the second embodiment, the driving direction of the driven member 25 is the X direction, and the direction orthogonal to the X direction is the Y direction.

The actuator 20 of the second embodiment is configured to drive the lens holding frame 21. The lens holding frame 21 is provided with a lens holding portion 21a, a slider holding portion 21b, a sleeve portion 21c, and a U groove portion 21d. At least one lens is held in the lens holding portion 21a. The two sliders 25a and 25b, which are the driven members 25, are fixed to the slider holding portion 21b, and the fixing method may be adhesive or screwed.

Further, the main guide bar 22 is inserted and incorporated into the sleeve portion 21c. A U-groove portion 21d is provided on the opposite side of the optical axis OA when viewed from the sleeve portion 21c, and a sub-guide bar 23 is inserted through the U-groove portion 21d. The positions of the main guide bar 22 and the sub guide bar 23 are fixed by another member (not shown). This configuration constitutes a guide mechanism, and the lens holding frame 21 is guided straight to the main guide bar 22 and can move in the extending direction of the main guide bar 22. Further, the rotational movement of the lens holding frame 21 is suppressed by the sub guide bar 23 centering on the main guide bar 22. The stretching direction of the main guide bar 22 and the optical axis OA are substantially the same, and no particular distinction is made thereafter.

The actuator 20 of the second embodiment is composed of two vibrator units S1 and S2, a base member 24 which is a fixing member for holding the vibrator units S1 and S2, and sliders 25a and 25b. The slider 25a is held in the vibrator unit S1 and the slider 25b is held in the vibrator unit S2 in a state of being in pressure contact with each other. The vibrator units S1 and S2 are composed of the piezoelectric element 1, the diaphragm 2, and the connecting member 3 that connects the diaphragm 2 to the base member 24, as in the first embodiment. The diaphragm 2 is provided with two protrusions 2a and 2b, which are contact portions that come into contact with the driven member 25.

Further, a flexible printed circuit board (not shown) for electrically connecting the piezoelectric element 1 and the outside is connected to the vibrator units S1 and S2. Here, as in the first embodiment, by applying a predetermined input signal to the vibrator units S1 and S2 through the flexible printed circuit board or the like, the relative positions of the vibrator units S1 and S2 and the sliders 25a and 25b are changed. Such force is generated. Since the sliders 25a and 25b are fixed to the lens holding frame 21 so as to be integrated, the lens holding frame 21 is driven (linearly moved) in the X direction of the optical axis OA by receiving this force.

The shape of the connecting member 3 of the vibrator unit S1 is the same as that of the first embodiment, and as shown in FIG. 4, the shape of the connecting member 3 is substantially in the center of the connecting member 3 in the direction of the rotation axis A1 passing through the center c of the vibrator unit S1. A protruding boss 3a (convex portion) is formed. Further, the base member 24 is formed with a concave portion 24a (recess) recessed in the direction of the rotation axis A1, the boss 3a is loosely fitted in the concave portion 24a, and the vibrator unit S1 rotates. It is rotatably held by the base member 24 around the boss 3a about the shaft A1. A concave portion may be formed in the vibrator unit S1 and a convex portion may be formed in the base member 24. That is, one of the vibrator unit S1 and the base member 24 is provided with a boss 3a protruding in the direction of the rotation axis A1. On the other side, a concave portion 24a corresponding to the boss 3a is provided.

As shown in FIG. 8, one end of the spring 7 is further fixed to the base member 24 by a screw 6, and the other end of the spring 7 urges the connecting member 3 of the vibrator unit S1 with an urging force. ing. The urging force of the spring 7 acts as a force for the vibrator unit S1 to rotate about the rotation axis A1. On the other hand, the wall portion 24b projecting in the direction of the rotation axis A1 of the base member 24 is provided with an adjusting screw 8 facing the spring 7 so as to oppose the urging force of the spring 7. The adjusting screw 8 can be moved forward and backward according to the tightening amount of the adjusting screw 8, and the tip portion 8a of the adjusting screw 8 presses the side surface of the connecting member 3. By this pressing, the vibrator unit S1 can rotate about the rotation axis A1.

Next, sliders 25a and 25b, which are driven members 25 of the actuator 20 of the second embodiment, will be described. As shown in FIG. 5, in the second embodiment, the sliders 25a and 25b are formed so as to have a flat surface (not shown), and the protrusions 2a and 2b of the diaphragm 2 come into contact with the flat surface. The flat surface functions as a sliding surface on which the protrusions 2a and 2b slide. The flat surface is formed so as to be parallel to the plane including the tips of the two protrusions 2a and 2b.

As shown in FIGS. 7 and 8, the two vibrator units S1 and S2 are arranged side by side in the Y direction, respectively. The vibrator units S1 and S2 are fixed to the base member 24 so that the upper surfaces of the protrusions 2a and 2b in contact with the sliders 25a and 25b are parallel to the flat surface.

Next, the manufacturing method (assembly procedure) of the actuator 20 will be described, but the unit assembly process, the check process, and the ranking process of the vibrator units S1 and S2 are the same as those in the first embodiment. In the assembling process of the vibrator units S1 and S2, the matters different from those of the first embodiment will be described below.

If the vibrator units S1 and S2 have the same rank B, a straight line B1 (first straight line) and a straight line X1 (second straight line) connecting the protrusions 2a and 2b of the diaphragm 2 are formed. It is desirable to arrange the vibrator unit S1 so that the angle θ2 is 0 degrees (that is, parallel). The reason is that the direction of the elliptical motion generated in the diaphragm 2 is the direction in which the protrusion 2a and the protrusion 2b are connected, and a force for relatively moving the lens holding frame 21 is generated in that direction. As a matter of course, when the direction of the straight line B1 at which the force is generated and the direction of the straight line X1 (the driving direction of the lens holding frame 21) match, the loss in force transmission becomes smaller.

On the other hand, when there is a difference in the drive characteristics between the two vibrator units S1 and S2, the drive characteristics are adjusted by the following adjustment steps. As an example, a case where the vibrator unit S1 has rank A and the vibrator unit S2 has rank B will be described. For the B-rank oscillator unit S2 having average performance, the line B2 (third straight line) and the line X2 (fourth straight line) connecting the protrusions 2a and 2b of the diaphragm 2 are formed. It is assembled to the base member 24 so that the angle is 0 degrees (parallel).

For the vibrator unit S1 having high performance (A rank), the straight line B1 connecting the protrusions 2a and 2b of the diaphragm 2 and the straight line X1 on the rotation axis A1 have an angle θ2 of 0 degrees. It is adjusted to a predetermined angle (for example, 1 degree or more) so as to be non-parallel. Specifically, the tightening amount of the adjusting screw 8 is adjusted, and the vibrator unit S1 is rotated on the rotation axis A1 to adjust its position (angle θ2). The magnitude of the angle θ2 may be a predetermined value or an individual value calculated from the difference in the drive characteristics of the vibrator units S1 and S2. By this adjustment, the direction in which the force for relative movement is generated (the direction of the straight line B1) and the direction of the straight line X1 (the direction parallel to the direction of change in the relative position) become non-parallel, so that the vibrator unit S1 is generated. A loss is generated in the transmission of the force to be applied, and the drive characteristics of the transducer unit S1 are deteriorated. However, the vibrator unit S1 has a rank A having higher performance than the rank B, and by lowering the drive characteristics of the vibrator unit S1, the vibrator units S1 and S2 are given the same input signal. The feed amounts between them can be substantially matched.

By adjusting the drive characteristics of the vibrator unit S1 as in the second embodiment, it is possible to substantially match the drive characteristics of the vibrator units S1 and S2 in the assembled state. By aligning the drive characteristics of the two vibrator units S1 and S2 within a predetermined range, it is possible to avoid the above-mentioned problems such as a decrease in drive speed and deterioration in controllability. Further, since it is not necessary to apply separate inputs (drive signals) to align the outputs of the two oscillator units S1 and S2, it is possible to avoid complicated control, increase in cost and increase in size of the electric board. The excellent effect of being able to do it is obtained.

Further, in the second embodiment, as an example, the configuration of a lens barrel (lens device) for moving the lens holding frame 21 in the direction of the optical axis OA such as focus and zoom according to the straight-ahead guidance of the main guide bar 22 and the sub guide bar 23. explained. However, for example, since it is moved in the direction of two axes orthogonal to the optical axis OA, it can also be applied to the configuration of a camera shake correction unit that employs a two-stage configuration (parent turtle child turtle structure). The parent turtle structure is a general structure for an image stabilization unit, as disclosed in Japanese Patent Application Laid-Open No. 2008-90031 and Japanese Patent Application Laid-Open No. 7-191361. Then, the lens barrel driven by the actuator 20 can be applied to the image pickup device, and further, it can be applied to the image pickup device provided with the image pickup element that receives the light from the lens barrel.

In the description of the first embodiment (and the second embodiment), three (or two) oscillator units S1, S2, and S3 are configured, but three or four may be used depending on the required torque. , The present invention can be applied as long as it is composed of a plurality of units. Further, although the angle θ1 (θ2) is adjusted in one oscillator unit S1 among the plurality of oscillator units S1, S2, and S3, all of the plurality of oscillator units S1, S2, and S3 may be adjusted. .. Further, when adjusting the plurality of vibrator units S1, S2, and S3, the angles θ1 (θ2) do not have to be the same value, and a plurality of different values may be adjusted.

Further, in the first embodiment (and the second embodiment), the angle θ1 (θ2) is adjusted based on the result of the characteristic inspection or the like with the plurality of vibrator units S1, S2, and S3 as a single unit. Whether or not and the magnitude of the angle θ1 (θ2) are determined. However, without performing a performance inspection or the like in a single state, some performance inspection or the like is performed with the vibrator units S1, S2, and S3 assembled to the base member 4 (24), and the angle θ1 (θ2). May be adjusted.

In the first embodiment (and the second embodiment), the connecting member 3 is urged with respect to the base member 4 (24) by the spring 7, and the adjusting screw 8 is advanced and retreated in a direction opposite to the urging direction of the spring 7. As a result, the vibrator unit S1 is held without play and the angle θ1 (θ2) is adjusted. However, the adjusting means for the angle θ1 (θ2) is not limited to the spring 7 and the adjusting screw 8 as in the first embodiment (and the second embodiment), and other means may be used.

Although the present invention has been described above, the present invention is not limited to these Examples 1 and 2, and various modifications and modifications can be made within the scope of the gist thereof. In addition, of course, it can be combined with other examples.

2a protrusion (first protrusion)
2b protrusion (second protrusion)
4, 24 Base member 5, 25 Driven member (sliding member)
S1 oscillator unit (first vibrating body)
S1-S3 oscillator unit (plural vibrators)
10, 20 Actuator A1 Rotation axis B1 Straight line (first straight line)
X1 straight line (second straight line)

Claims (10)

A plurality of vibrating bodies, each having first and second protrusions,
A base member holding the plurality of vibrating bodies and
A sliding member that comes into contact with the first and second protrusions is provided.
The relative positions of the plurality of vibrating bodies and the sliding member change due to the vibration of the plurality of vibrating bodies, and the relative positions of the plurality of vibrating bodies change.
Of the plurality of vibrating bodies, the first straight line connecting the first and second protrusions of the first vibrating body is parallel to the direction of change in the relative position on the rotation axis of the first vibrating body. An actuator characterized in that the second straight line is non-parallel to each other. The actuator according to claim 1, wherein the angle formed by the first straight line and the second straight line is 1 degree or more in a cross section including the plurality of vibrating bodies. In the cross section including the plurality of vibrating bodies, the angle formed by the first straight line and the second straight line is the first and second protrusions of the second vibrating body among the plurality of vibrating bodies. According to claim 1 or 2, the angle formed by the third straight line to be connected and the fourth straight line parallel to the direction of change in the relative position on the rotation axis of the second vibrating body is different. The actuator described. In the cross section including the plurality of vibrating bodies, the difference between the angle formed by the first straight line and the second straight line and the angle formed by the third straight line and the fourth straight line is 1 degree or more. The actuator according to claim 3, wherein the actuator is provided. The first vibrating body and one of the base members are provided with a convex portion protruding in the direction of the rotation axis, and the other is provided with a concave portion corresponding to the convex portion. The actuator according to any one of 1 to 4. The actuator according to claim 5, wherein the first vibrating body is provided with the convex portion, and the base member is provided with the concave portion. The base member includes an urging member and an adjusting member facing the urging member.
The actuator according to any one of claims 1 to 6, wherein the first vibrating body is positioned by the urging member and the adjusting member. A lens device comprising the actuator according to any one of claims 1 to 7 and a lens driven by the actuator. An image pickup apparatus comprising the lens apparatus according to claim 8 and an image pickup device that receives light from the lens apparatus. A plurality of vibrating bodies each having first and second protrusions, a base member holding the plurality of vibrating bodies, and a sliding member in contact with the first and second protrusions are provided. A method for manufacturing an actuator in which the relative positions of the plurality of vibrating bodies and the sliding member are changed by the vibration of the plurality of vibrating bodies.
Of the plurality of vibrating bodies, the first straight line connecting the first and second protrusions of the first vibrating body is parallel to the direction of change in the relative position on the rotation axis of the first vibrating body. A manufacturing method comprising a step of adjusting the first vibrating body so that the second straight line is non-parallel to each other.

Images