JP2021105459A - Clean room - Google Patents

Abstract

To provide a clean room which enables clean chambers to be efficiently arranged in an existing room and can easily secure ceiling heights of the clean chambers without removing an existing ceiling.SOLUTION: A clean room includes: clean chambers 25 to 28; and at least two front chambers 23, 24 which are disposed adjacent to the clean chambers and enable ventilation between the front chambers 23, 24 and an existing room 10. Exhaust side fan filter units 40 to 43 which suction and clean air in the clean chambers and exhaust the air to the front chambers are provided on partition walls 30 to 33 which partition the front chambers 23, 24 from the clean chambers 25 to 28. A ceiling 21 is provided below an existing ceiling 11. The ceiling 21 is provided with an air supply side fan filter unit 45 which suctions and cleans air flowing out from at least the front chambers 23, 24 to the existing room 10 and supplies the air to the clean chambers.SELECTED DRAWING: Figure 1

Description

The present invention relates to a clean room.

The one described in Patent Document 1 is known as an example of a clean booth in which a work space having a partially high cleanliness can be easily constructed in an existing factory or the like.
This clean booth is a clean booth that forms a clean room by constructing a booth on the existing floor surface, and has an intake port on the skirting board installed on the floor surface to ensure airtightness. A return air passage is formed inside the pillars provided at at least four corners of the skirting board and the cleaning chamber or the surrounding wall forming the cleaning chamber to return the air sucked from the intake port to the space of the ceiling portion. An air blower installed in the ceiling space is configured to blow air into the cleaning room through a filter, and an air intake port from the outside is provided in the ceiling space, and a filter is installed in this air intake port. It is characterized by that.

According to such a clean booth, the air taken into the clean booth is filtered by a filter, so that it is possible to prevent air pollution and remove dust that causes clogging of the filter. Adopted a closed method that returns the blown clean air from the intake port provided on the baseboard to the inside of the chamber space on the ceiling via the return air passage formed inside the pillar or the surrounding wall. Therefore, the installation environment is not restricted to the clean area, and it can be installed in the general air-conditioning zone such as in the existing factory facility.

Japanese Unexamined Patent Publication No. 2001-133001

By the way, since the conventional clean booth described above basically has one cleaning room, if it is desired to provide a plurality of cleaning rooms in an existing room such as a factory, a plurality of clean booths will be installed. However, when a plurality of conventional clean booths are provided, the clean booth has a return duct cover provided on the outside of the clean room, and it is necessary to provide a predetermined space between adjacent clean booths. Therefore, the clean room is directly connected to the existing room. There is a problem that it is difficult to efficiently arrange the clean room as compared with the case where the cleaning room is provided.
Further, since the above-mentioned clean booth has one front room for one clean room, if a plurality of clean booths are installed in the existing room, the number of front rooms increases accordingly. However, there is a problem that it is difficult to efficiently arrange the cleaning room.

Further, in the conventional clean booth described above, a return duct cover for forming a ceiling chamber is provided on the upper side of the clean room, and the return duct cover is arranged below the existing ceiling of the existing room. Since the ceiling of the cleaning room is provided below, there is a problem that it is difficult to secure the ceiling height of the cleaning room.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a clean room in which a clean room can be efficiently arranged in an existing room and the ceiling height of the clean room can be easily secured.

In order to achieve the above object, the present invention is a clean room installed inside an existing room.
A plurality of cleaning chambers and at least one front chamber which is arranged adjacent to the cleaning chamber and can be ventilated from the existing chamber are provided.
An exhaust side fan filter unit that sucks in air from the cleaning chamber, cleans it, and exhausts it to the front chamber is provided on a partition wall that separates the front chamber from the cleaning chamber.
A ceiling is provided below the existing ceiling of the existing room.
The ceiling is provided with an air supply side fan filter unit that sucks and cleans at least the air flowing out from the front chamber to the existing chamber and supplies air to the cleaning chamber.
In this case, the number of clean rooms is set to be larger than the number of front rooms.

Here, "at least one anterior chamber arranged adjacent to a plurality of cleaning chambers" means that one anterior chamber is adjacently arranged to a plurality of cleaning chambers and a plurality of anterior chambers are adjacent to a plurality of cleaning chambers. Including the case where it is arranged. In addition, "when a plurality of anterior chambers are arranged adjacent to a plurality of cleaning chambers" means that one or a plurality of anterior chambers are arranged adjacent to one of the plurality of cleaning chambers and the rest. This includes the case where one or more anterior chambers are adjacent to one or more clean chambers.

In the present invention, since a plurality of cleaning chambers are adjacent to each other in at least one anterior chamber, unlike a conventional clean booth, an anterior chamber corresponding to the number of cleaning chambers is not required and is covered on the outside of the cleaning chamber. Since the ceiling can be provided directly below the existing ceiling, the cleaning room can be efficiently arranged in the existing room, and the ceiling height of the cleaning room can be easily secured without removing the existing ceiling. can.

In addition, the air in the cleaning chamber is sucked in by the exhaust side fan filter unit and cleaned, and then exhausted to the front chamber, and at least the air flowing out from the front chamber to the existing chamber is sucked in by the air supply side fan filter unit and cleaned. Since it is a closed type in which air is supplied to the cleaning room after being cleaned, the cleaning room can be maintained at a high degree of cleanliness.
Further, since the exhaust side fan filter unit is provided on the partition wall separating the front chamber and the cleaning chamber, the exhaust side fan filter unit is temporarily closed with a lid member or the like to temporarily block the cleaning chamber with hydrogen peroxide. It can be easily decontaminated with gas or the like.

Further, in the configuration of the present invention, an air conditioner may be provided in the front chamber.
The air conditioner may be, for example, one that can control temperature and humidity.

According to such a configuration, the temperature, humidity, etc. of the air in the anterior chamber can be controlled by the air conditioner provided in the anterior chamber, so that at least a part of the controlled air flows out from the anterior chamber to the existing chamber. Since at least a part of the outflowed air is supplied to the cleaning chamber by the air supply side fan filter unit, it is not necessary to install an air conditioner in each cleaning chamber, and the heat load can be canceled in the front chamber. Therefore, it can contribute to energy saving and cost saving.

Further, in the configuration of the present invention, the exhaust side fan filter unit may be provided below the partition wall.

According to such a configuration, in the cleaning room, the air cleaned by the air supply side fan filter unit provided on the ceiling is blown downward, and the exhaust side fan filter unit provided at the lower part of the partition wall blows out the air. Since the air is exhausted to the front chamber, the airflow flows from above to downward in the cleaning chamber, so that the turbulence of the airflow in the cleaning chamber can be suppressed.
Further, since the exhaust side fan filter unit is provided at the lower part of the partition wall, the installation / removal work and maintenance of the exhaust side fan filter unit can be facilitated as compared with the case where the exhaust side fan filter unit is provided on the ceiling. ..

Further, in the configuration of the present invention, the pressure in the cleaning chamber may be controlled by controlling the outputs of the air supply side fan filter unit and the exhaust side fan filter unit.

According to such a configuration, the pressure in the cleaning chamber can be controlled by controlling the outputs of the air supply side fan filter unit and the exhaust side fan filter unit, so that a plurality of cleaning chambers having different pressures can be used in the front chamber. It can be easily arranged adjacent to each other via a partition wall, and differential pressure management of a plurality of cleaning chambers can be easily performed.

According to the present invention, the cleaning room can be efficiently arranged in the existing room, and the ceiling height of the cleaning room can be easily secured.

It is a top view which shows the clean room which concerns on 1st Embodiment of this invention. FIG. 1 is a cross-sectional view taken along the line AA in FIG. It is sectional drawing of the main part which shows the mounting state of the air supply side fan filter unit provided in the clean room which concerns on 1st Embodiment of this invention. It is a side sectional view which shows the clean room which concerns on 2nd Embodiment of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First Embodiment)
1 and 2 show a first embodiment of a clean room according to the present invention, FIG. 1 is a plan view, and FIG. 2 is a sectional view taken along line AA in FIG.
The clean room 20 of the present embodiment is installed inside the existing room 10. The existing room 10 is, for example, a room having a rectangular shape in a plan view provided in a factory, a research institute, or the like, and the existing room 10 can be entered from a corridor or the like by opening a door 10c. As shown in FIG. 2, an existing ceiling 11 is provided above the existing room 10 below the floor slab 9 on the upper floor.

The clean room 20 is a room having a substantially rectangular shape in a plan view, and is arranged in a substantially central portion of the existing room 10. Further, the outer peripheral walls of the clean room 20 are formed, and the walls 20a and 20a on the long side facing each other are provided at predetermined intervals with respect to the walls 10a and 10a facing each other in the existing room 10. Further, the outer peripheral wall of the clean room 20 is formed, and one of the walls 20b and 20b on the short side facing each other is one wall 10b of the walls 10b and 10b facing each other in the existing room 10. The other wall 20b is provided close to the other wall 10b with a slight gap.
Further, the clean room 20 is provided below the existing ceiling 11, and the ceiling 21 of the clean room 20 is provided below the existing ceiling 11 at a predetermined interval above and below the existing ceiling 11.
Further, the walls 20a and 20b constituting the outer peripheral wall of the clean room 20 have an airtight structure. For example, the upper ends of the walls 20a and 20b are airtightly fixed to the ceiling 21 via a sealing member, and the lower ends of the walls 20a and 20b are airtightly fixed to the floor via a sealing member.

The walls (outer peripheral wall, inner wall, partition wall) and ceiling 21 constituting the clean room 20 and the clean room 20A of the second embodiment described later are formed of heat insulating panels and have an airtight structure, whereby the clean room 20 is formed. , 20A is highly airtight.

The clean room 20 is arranged adjacent to the plurality of clean rooms 25 to 29 and the clean rooms 25 to 28, and at least one (two in the present embodiment) front room 23 that can be ventilated between the existing room 10 and the clean room 20. , 24 and.
In FIG. 1, of the facing walls 20a and 20a, the front chamber 23 is arranged inside the wall 20a near the door 10c side. The front chamber 23 can be ventilated from the existing chamber 10. That is, a door 20c is provided on the wall 20a, and the front chamber 23 can be ventilated to and from the existing chamber 10 by opening the door 20c and / or a vent provided on the wall 20a. ing. Further, the wall 20a may be provided with a damper that allows air to pass through only in one direction from the front chamber 23 to the existing chamber 10, and the damper may allow the front chamber 23 to be ventilated from the existing chamber 10.
Further, by providing an opening in the ceiling 21 above the anterior chamber 23, the anterior chamber 23 may be ventilated between the existing room 10 and the ceiling 21 and the existing ceiling. A fan for supplying air may be provided between the 11 and 11. Further, the anterior chamber 23 is formed in a substantially L shape in a plan view.

Further, among the facing walls 20b and 20b, the anterior chamber 24 is arranged inside the wall 20b which is arranged close to the wall 20b with a slight gap, and the anterior chamber 24 also faces the wall 20a. The front chamber 24 can be ventilated from the existing chamber 10. That is, a door 20d is provided on the wall 20a, and the front chamber 24 can be ventilated to and from the existing chamber 10 by opening the door 20d and / or a vent provided on the wall 20a. ing. Further, the wall 20a may be provided with a damper that allows air to pass through only in one direction from the front chamber 24 to the existing chamber 10, and the damper may allow the front chamber 24 to be ventilated from the existing chamber 10.
Further, by providing an opening in the ceiling 21 above the anterior chamber 24, the anterior chamber 24 may be ventilated between the existing chamber 10 and the ceiling 21, and the air of the anterior chamber 24 may be further ventilated between the ceiling 21 and the existing ceiling. A fan for supplying air may be provided between the 11 and 11.
Further, the anterior chamber 24 is arranged adjacent to the anterior chamber 23, and is also adjacent to the cleaning chamber 25 described later.

The front room 23 is a room before entering the cleaning room 25, whereas the front room 24 is not a room before entering the cleaning room 25 but a room used as a machine room or the like. It will be a room. Further, although the anterior chamber 23 and the anterior chamber 24 are separate rooms separated by a wall, one room (anterior chamber) may be provided without the wall.

In the clean room 20 of the present embodiment, the anterior chamber 23 is arranged adjacent to the clean rooms 25 to 28. Further, the front chamber 24 is arranged adjacent to the cleaning chamber 25. That is, the anterior chamber 23 and the anterior chamber 24 are arranged adjacent to the cleaning chamber 25.
The cleaning room 25 is a room used as a primary changing room, and is equipped with a hand washer / dryer. The partition wall 30 that separates the cleaning chamber 25 and the front chamber 24 is provided with an exhaust side fan filter unit 40 that sucks in the air of the cleaning chamber 25, cleans it, and exhausts it to the front chamber 24. The partition wall 30 has a pair of walls 30a and 30a provided so as to be parallel to each other, and the exhaust side fan filter unit 40 is provided on these walls 30a and 30a. Further, although the door 25c is provided on the wall separating the cleaning chamber 25 and the front chamber 23, the wall separating the cleaning chamber 25 and the front chamber 24 is not provided with a door or a vent.
Further, the cleaning chamber 25 is maintained in a cleanliness grade C (equivalent to ISO8).

The cleaning room 26 is a room used as a preparation room, is arranged adjacent to the cleaning room 25, and a door 26c is provided on the wall partitioning the cleaning rooms 25 and 26. The cleaning chambers 25 and 26 are maintained at the same cleanliness because the doors 26c are opened and the cleaning chambers 25 and 26 are communicated with each other through the vents provided in the doors 26c. For example, the cleaning chambers 25 and 26 are maintained in cleanliness grade C (corresponding to ISO8).
Further, the partition wall 31 that separates the cleaning chamber 26 and the front chamber 23 is provided with an exhaust side fan filter unit 41 that sucks in the air of the cleaning chamber 26, cleans it, and exhausts it to the front chamber 23. The partition wall 31 has a pair of walls 31a and 31a provided so as to be parallel to each other, and the exhaust side fan filter unit 41 is provided on these walls 31a and 31a.
Further, the pressures of the cleaning chambers 25 and 26 are set higher than the pressures of the front chambers 23 and 24. Such pressure setting can be performed by adjusting the outputs of the exhaust side fan filter units 40 to 43 and the air supply side fan filter unit 45 described later.

The cleaning room 27 is a room used as a secondary clothing room, and is adjacent to the cleaning room 26 and the cleaning room 29 in addition to the front room 23. The partition wall 32 that separates the cleaning chamber 27 and the front chamber 23 is provided with an exhaust side fan filter unit 42 that sucks in the air of the cleaning chamber 27, cleans it, and exhausts it to the front chamber 23. The partition wall 32 has a pair of walls 32a and 32a provided so as to be parallel to each other, and the exhaust side fan filter unit 42 is provided on these walls 32a and 32a. A door 27c is provided on the wall separating the cleaning chamber 27 and the cleaning chamber 26. The cleanliness of the cleaning chamber 27 is maintained at grade B (corresponding to ISO7). The clean room 27 is set to have a higher degree of cleanliness than the clean room 26 adjacent thereto. The cleaning chamber 27 is communicated by opening the door 27c and by a vent provided in the door 27c. The cleaning chamber 27 is communicated with by adjusting the outputs of the exhaust side fan filter unit 42 and the air supply side fan filter unit 45 described later. By making the pressure of 27 higher than the pressure of the cleaning chamber 26, the cleanliness of the cleaning chamber 27 is maintained in grade B (corresponding to ISO7).

The cleaning room 29 is a room used as a secondary dressing room, and a door 29c is provided on the wall separating the cleaning room 29 and the cleaning room 26. The cleaning chambers 29 and 26 are maintained at the same cleanliness because the door 29c is opened and the door 29c and the cleaning chamber 29 are communicated with each other through a vent provided in the wall separating the cleaning chamber 29 and the cleaning chamber 26. Therefore, the cleaning chamber 29 is maintained in cleanliness grade C (corresponding to ISO8). Further, the pressure of the cleaning chamber 29 is set to be equal to the pressure of the cleaning chambers 25 and 26. In such a pressure setting, the cleaning chambers 29, 25, and 26 are communicated with each other by a vent provided in the partition wall partitioning the cleaning chambers, and further, the exhaust side fan filter units 40, 41 and the air supply side fan described later are used. This can be done by adjusting the output of the filter unit 45.

The cleaning chamber 28 is a chamber used as a cell regulation chamber, and is adjacent to the cleaning chambers 27 and 29 in addition to the anterior chamber 23. A door 28d is provided on the wall separating the cleaning chamber 27 and the cleaning chamber 28, and a door 28c is provided on the wall separating the cleaning chamber 29 and the cleaning chamber 28.
The partition wall 33 that separates the cleaning chamber 28 and the front chamber 23 is provided with an exhaust side fan filter unit 43 that sucks in the air of the cleaning chamber 28, cleans it, and exhausts it to the front chamber 23. The partition wall 33 has a pair of walls 33a and 33a provided so as to be parallel to each other, and the exhaust side fan filter unit 43 is provided on these walls 33a and 33a.

Further, the cleaning chamber 28 is maintained in cleanliness grade B (corresponding to ISO7). The pressure in the cleaning chamber 28 is equal to the pressure in the cleaning chamber 27 and is set higher than the pressure in the cleaning chamber 29. Such pressure setting can be performed by adjusting the outputs of the exhaust side fan filter unit 42 and the air supply side fan filter unit 45.
Further, a safety cabinet 50 is installed in the cleaning chamber 28, and the inside of the safety cabinet 50 is maintained in cleanliness grade A (equivalent to ISO5). An equipment installation space 51 is provided on the side of the safety cabinet 50.

The exhaust side fan filter units 40 to 43 are integrally provided with a blower and a high-performance filter (for example, a HEPA filter), and can control the output, that is, the rotation speed of the blower.
Further, air supply side fan filter units 45 are provided on the ceilings of the cleaning chambers 25 to 28, respectively. Like the exhaust side fan filter units 40 to 43, the air supply side fan filter unit 45 is integrally provided with a blower and a high-performance filter (HEPA filter), and controls the output, that is, the rotation speed of the blower. It is possible.

Further, the air supply side fan filter unit 45 can be maintained from the lower side of the ceiling 21, that is, from the cleaning chambers 25 to 28 side. For example, as shown in FIG. 3, the ceiling 21 of the cleaning chambers 25 to 28 is provided with a rising wall 22 that rises upward in a tubular shape from the upper surface of the ceiling 21, and the lower end of the rising wall 22 is the cleaning chamber 25 to 25. It opens to 28, and the upper end opens in the space between the ceiling 21 and the existing ceiling 11. An air supply side fan filter unit 45 is provided inside the rising wall 22. The air supply side fan filter unit 45 includes a filter 45a such as a HEPA filter and a fan 45b, and as shown in FIG. 3A, the fan 45b may be arranged on the lower surface side of the filter 45a. As shown in FIG. 3B, the filter 45a may be arranged on the lower surface side of the fan 45b.

By providing the air supply side fan filter unit 45 on the rising wall 22 provided on the ceiling 21 in this way, maintenance of the air supply side fan filter unit 45 can be performed from the lower side of the ceiling 21, that is, from the cleaning chambers 25 to 28 side. You can.
Further, since it is not necessary to maintain the air supply side fan filter unit 45 from behind the ceiling, that is, from the upper side of the ceiling 21, it is necessary to secure a work space between the upper end of the rising wall 22 and the existing ceiling 11. Instead, it is only necessary to provide a predetermined gap through which air can flow. Therefore, the ceiling height of the cleaning chambers 25 to 28 can be increased as compared with the case where maintenance is performed from behind the ceiling.

Further, the air supply side fan filter unit 45 sucks and cleans the air that has flowed out from at least the front chambers 23 and 24 to the existing chamber 10 and has flowed in between the existing ceiling 11 and the ceiling 21 of the clean room 20 to clean the clean chamber 25 to 25 to. It is designed to supply air to 28. Further, the air supply side fan filter unit 45 sucks and flows in the air inside the existing room 10 and outside the clean room 20 between the existing ceiling 11 and the ceiling 21 of the clean room 20.

Further, air conditioners 46 are provided in the front chambers 23 and 24, respectively. The air conditioner 46 has a function of controlling temperature and humidity, and is fixed to the wall surface or the floor of the front chambers 23 and 24, respectively. Further, a monitoring device 47 is fixed to the wall surface of the anterior chamber 23, and the monitoring device 47 includes air cleanliness, temperature, humidity, and anterior chambers 23, 24 of the anterior chambers 23, 24 and the cleaning chambers 25 to 29. The pressure of the cleaning chambers 25 to 29 and the outputs of the exhaust side fan filter units 40 to 43 and the air supply side fan filter unit 45 are displayed.
Further, the monitoring device 47 has a function of controlling the output of the exhaust side fan filter units 40 to 43, the output of the air supply side fan filter unit 45, and the output of the air conditioner 46. By inputting the output set value, the exhaust side fan filter units 40 to 41, the air supply side fan filter unit 45 and the air conditioner 46 are automatically controlled, thereby the front chambers 23 and 24 and the cleaning chambers 25 to 25. It is possible to control the cleanliness, temperature, humidity, and pressure of the front chambers 23 and 24 and the clean chambers 25 to 29 of 29.

As described above, in the clean room 20, a plurality of clean rooms 25 to 28 having different cleanliness are adjacent to the anterior chamber 23 or the anterior chamber 24 via a partition wall 30 to 33, and the partition walls 30 to 33 are adjacent to each other. The partition walls that separate the clean rooms are all airtight. For example, the upper ends of the partition walls 30 to 33 and the partition walls that partition the adjacent cleaning chambers are airtightly fixed to the ceiling 21 via a sealing member, and the partition walls 30 to 33 and the partition walls that partition the adjacent cleaning chambers are separated from each other. The lower end is airtightly fixed to the floor via a sealing member.
Then, by controlling the outputs of the air supply side fan filter units 45 provided on the ceilings of the cleaning chambers 25 to 28 and the exhaust side fan filter units 40 to 43 provided on the partition walls 30 to 33, the cleaning chambers 25 to 25 to 28 cleanliness is maintained.

In the clean room 20 of the present embodiment, since a plurality of clean rooms 25 to 28 are arranged adjacent to the two front rooms 23 and 24, unlike the conventional clean booth, the front according to the number of clean rooms 25 to 28. No room is required, no cover needs to be provided on the outside of the clean rooms 25 to 28, and the ceiling 21 of the clean room 20 can be directly provided below the existing ceiling 11 of the existing room 10. Therefore, the clean room 25 can be provided in the existing room 10. ~ 29 can be efficiently arranged, and the ceiling height of the clean rooms 25 to 29 can be easily secured without removing the existing ceiling 11.

Further, the air in the cleaning chambers 25 to 28 is sucked by the exhaust side fan filter units 40 to 43 to be cleaned, and then exhausted to the front chambers 23 and 24, and at least flows out from the front chambers 23 and 24 to the existing chamber 10. The air is sucked in by the fan filter unit 45 on the air supply side, cleaned, and then supplied to the cleaning chambers 25 to 28. Since it is a closed type, the cleaning chambers 25 to 28 should be maintained at a high degree of cleanliness. Can be done.

Further, since the pressure of the cleaning chambers 25 to 28 can be controlled by controlling the outputs of the air supply side fan filter unit 45 and the exhaust side fan filter units 40 to 43, a plurality of cleaning chambers 25 to 28 having different pressures can be controlled. Can be easily arranged adjacent to the front chambers 23 and 24 via partition walls 30 to 33, differential pressure management of a plurality of cleaning chambers 25 to 28 can be easily performed, and the cleanliness of the cleaning chambers 25 to 28 is ensured. Can be held in.
Further, since the exhaust side fan filter units 40 to 43 are provided on the partition walls 30 to 33 that partition the front chambers 23 and 24 and the cleaning chambers 25 to 28, the exhaust side fan filter units 40 to 43 are temporarily used. The cleaning chambers 25 to 28 can be easily decontaminated with hydrogen peroxide gas or the like by blocking and curing with a lid member or the like.

Further, since the air conditioner 46 capable of controlling the temperature and humidity is provided in the anterior chambers 23 and 24, at least a part of the air whose temperature and humidity are controlled by the air conditioner 46 is from the anterior chambers 23 and 24 to the existing room. Since at least a part of the outflowed air is supplied to the cleaning chambers 25 to 28 by the air supply side fan filter unit 45, it is not necessary to provide an air conditioner in the cleaning chambers 25 to 28, and the front chamber The heat load can be canceled at 23 and 24. Therefore, it can contribute to energy saving and cost saving.
Further, since the exhaust side fan filter units 40 to 43 are provided below the partition walls 30 to 33, they were cleaned by the air supply side fan filter unit 45 provided on the ceiling 21 in the cleaning chambers 25 to 28. Since the air is blown downward and exhausted to the front chambers 23 and 24 by the exhaust side fan filter units 40 to 43 provided in the lower part of the partition walls 30 to 33, the air flow is upward in the cleaning chambers 25 to 28. Since it goes downward from, the turbulence of the airflow can be suppressed.
Further, since the exhaust side fan filter units 40 to 43 are provided at the lower part of the partition wall 30 to 33, the exhaust side fan filter units 40 to 43 have the exhaust side fan filter units 40 to 43 as compared with the case where the exhaust side fan filter unit is provided on the ceiling. Easy installation and removal work and maintenance.

(Second Embodiment)
FIG. 4 shows a second embodiment of the clean room according to the present invention, and is a side sectional view.
In FIG. 4, the same components as those in FIG. 2 may be designated by the same reference numerals and the description thereof may be omitted.
The clean room 20A of the present embodiment includes three clean rooms 55 to 57 and one front room 53 which is arranged adjacent to the clean rooms 55 and 56 and can be ventilated from the existing room 10. Purifying chambers 55 and 56 are arranged adjacent to the anterior chamber 53 via partition walls 60 and 61 with the anterior chamber 53 on the left and right. Further, a cleaning chamber 57 is adjacent to the cleaning chamber 56 via a partition wall 62. An air conditioner 46 is provided in the front chamber 53.

The partition wall 60 that separates the cleaning chamber 55 and the front chamber 53 is provided with an exhaust side fan filter unit 70 that sucks in the air of the cleaning chamber 55, cleans it, and exhausts it to the front chamber 53. The partition wall 60 has a pair of walls 60a and 60a provided so as to be parallel to each other, and an exhaust side fan filter unit 70 is provided below the partition wall 60 on these walls 60a and 60a. Further, the cleaning chamber 55 is provided with an internal device 80 as a heat source.

The partition wall 61 that separates the cleaning chamber 56 and the front chamber 53 is provided with an exhaust side fan filter unit 71 that sucks in the air of the cleaning chamber 56, cleans it, and exhausts it to the front chamber 53. The partition wall 61 has a pair of walls 61a and 61a provided so as to be parallel to each other, and an exhaust side fan filter unit 71 is provided below the partition wall 61 on these walls 61a and 61a. Further, the cleaning chamber 56 is provided with an internal device 80 as a heat source.
A damper 75 is provided on the partition wall 62 that separates the cleaning chamber 57 and the cleaning chamber 56. The damper 75 allows air to pass through only in one direction from the cleaning chamber 57 to the cleaning chamber 56, and is provided on the upper portion of the partition wall 62.

Further, air supply side fan filter units 45 are provided on the ceilings of the cleaning chambers 55 to 57, respectively. The air supply side fan filter unit 45 sucks and cleans the air that has flowed out from at least the front chamber 53 to the existing chamber 10 and has flowed in between the existing ceiling 11 and the ceiling 21 of the clean room 20A, and supplies air to the clean chambers 55 to 57. It is designed to do. Further, the air supply side fan filter unit 45 sucks and inflows the air inside the existing room 10 and outside the clean room 20A between the existing ceiling 11 and the ceiling 21 of the clean room 20A.

The cleanliness of the cleaning chamber 55 is maintained in grade B (equivalent to ISO7), and the cleanliness of the cleaning chambers 56 and 57 is maintained in grade C (equivalent to ISO8). If the pressure index of the anterior chamber 53 is "± 0", the pressure index of the cleaning chamber 55 is "+3", the pressure index of the cleaning chamber 56 is "+1", and the pressure index of the cleaning chamber 57 is "+2". As described above, the outputs of the air supply side fan filter unit 45 and the exhaust side fan filter units 70 and 71 are controlled.

In the clean room 20A of the second embodiment, the air in the cleaning chamber 55 is sucked by the exhaust side fan filter unit 70, cleaned, and then exhausted to the front chamber 53, and the air in the cleaning chamber 56 is exhausted to the exhaust side fan. It is sucked by the filter unit 71, washed, and then exhausted to the front chamber 53.
Further, the air in the cleaning chamber 57 flows into the cleaning chamber 56 through the damper 75, is sucked by the exhaust side fan filter unit 71 together with the air in the cleaning chamber 56, is cleaned, and then exhausted to the front chamber 53. Will be done. As described above, also in the present embodiment, since the clean room 20A is a closed type, the clean rooms 55 to 57 can be maintained at a high degree of cleanliness.

Further, the cleaning chambers 55 to 57 are each provided with internal equipment 80 as a heat source, but since the air conditioner 46 capable of controlling the temperature and humidity is provided in the front chamber 53, the temperature and humidity are provided by the air conditioner 46. At least a part of the controlled air flows out from the front chamber 53 to the existing chamber 10, and at least a part of the outflowed air is supplied to the cleaning chambers 55 to 57 by the air supply side fan filter unit 45. The heat load can be canceled in the front chamber 53 without providing an air conditioner in the cleaning chambers 55 to 57. Therefore, it can contribute to energy saving and cost saving.
In addition, also in this embodiment, the same effect as in the first embodiment can be obtained.

10 Existing room 11 Existing ceiling 20, 20A Clean room 21 Ceiling 23, 24, 53 Front room 25-28, 55-57 Clean room 30-33, 60, 61 Partition wall 40-43, 70, 71 Exhaust side fan filter unit 45 Air supply side fan filter unit 46 Air conditioner

Claims (4)

A clean room installed inside an existing room
A plurality of cleaning chambers and at least one front chamber which is arranged adjacent to the cleaning chamber and can be ventilated from the existing chamber are provided.
An exhaust side fan filter unit that sucks in air from the cleaning chamber, cleans it, and exhausts it to the front chamber is provided on a partition wall that separates the front chamber from the cleaning chamber.
A ceiling is provided below the existing ceiling of the existing room.
A clean room characterized in that the ceiling is provided with an air supply side fan filter unit that sucks and cleans at least the air flowing out from the front chamber to the existing chamber and supplies air to the clean chamber. The clean room according to claim 1, wherein an air conditioner is provided in the front room. The clean room according to claim 1 or 2, wherein the exhaust side fan filter unit is provided in the lower part of the partition wall. The clean room according to any one of claims 1 to 3, wherein the pressure in the clean room can be controlled by controlling the outputs of the air supply side fan filter unit and the exhaust side fan filter unit.

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