JP2021071128A - valve - Google Patents

Abstract

To provide a valve capable of suppressing a diaphragm from contacting a body holding a sheet in a closed state.SOLUTION: A body 11 has an inside annular part 11F projecting toward a diaphragm 13 and an outside annular part 11G located on the outer periphery of the inside annular part 11F and projecting toward the diaphragm 13. A sheet 20 has an annular rubber member 21 and an annular metal member 22 arranged on the inner peripheral side of the rubber member 21. The rubber member 21 has a base part 23 held by the body 11 and a protrusion part 24 protruding from an end surface 23A of the base part 23 toward the diaphragm 13. In the axial direction of the sheet 20, the tip of the inner annular part 11F is located closer to the end surface 23A than the position of half the height from the end surface 23A of the base part 23 to the tip of the protrusion part 24.SELECTED DRAWING: Figure 2

Description

The present disclosure relates to valves used in semiconductor manufacturing equipment and the like.

There is a valve in which a member in which a rubber member and a metal member are engaged is used as a valve seat, and the protruding portion of the static seal body is plastically deformed and pressed against the metal member to fix the valve seat to the static seal body. (See, for example, Patent Document 1.).

Japanese Unexamined Patent Publication No. 07-293518

However, in the above valve, since the position of the tip of the protrusion of the static seal body is close to the diaphragm, the diaphragm may come into contact with the protruding portion of the static seal body.

Therefore, one of the purposes of the present disclosure is to provide a valve capable of suppressing the diaphragm from coming into contact with the body holding the seat in the closed state.

In order to solve the above object, the valve according to one aspect of the present disclosure includes a valve chamber, an annular groove opening in the valve chamber, and a body in which a fluid passage is formed, and a body arranged in the annular groove and formed in the body. The body comprises an annular sheet that is held and a diaphragm that opens and closes the fluid passage by contacting and separating from the sheet, and the body has an inner annular portion that projects toward the diaphragm and the inner annular portion. It has an outer annular portion located on the outer periphery of the diaphragm and protrudes toward the diaphragm, the annular groove is defined by the inner annular portion and the outer annular portion, and the sheet is formed of an annular rubber member. The rubber member has an annular metal member arranged on the inner peripheral side of the rubber member, and the rubber member faces the diaphragm from the base portion held by the body and the end surface of the base portion on the valve chamber side. The tip of the inner annular portion is closer to the end face than the position of half the height from the end face of the base to the tip of the protrusion in the axial direction of the sheet. Located in.

The tip of the inner annular portion may be located on the same plane as the end face of the base or on the side opposite to the valve chamber side from the end face.

The inner annular portion and the outer annular portion may be crimped to the seat side.

The lower surface of the diaphragm retainer that presses the diaphragm has a spherical shape, and the end faces are an annular inner end surface located inside the protrusion and an annular outer end face located outside the protrusion. The width of the inner end face may be the same as the width of the outer end face or narrower than the width of the outer end face in the radial direction of the rubber member.

The rubber member may be made of fluororubber.

A thin film layer made of a carbon film or a fluororesin film may be formed on the sheet-side surface of the diaphragm.

According to the present disclosure, it is possible to provide a valve capable of suppressing the diaphragm from coming into contact with the body holding the seat in the closed state.

It is a partial cross-sectional view of the valve in an open state which concerns on embodiment. It is an enlarged sectional view near the seat of a valve. It is sectional drawing of a part of a sheet.

The valve 1 according to the embodiment of the present disclosure will be described with reference to the drawings.

FIG. 1 is a partial cross-sectional view of the valve 1 in the open state according to the present embodiment.
FIG. 2 is an enlarged cross-sectional view of the valve 1 in the vicinity of the seat 20.

As shown in FIG. 1, the valve 1 includes a valve portion 10 and an actuator 2. In the following description, the actuator 2 side of the valve 1 will be referred to as the upper side, and the valve portion 10 side will be referred to as the lower side. The valve 1 according to the present embodiment is in a closed state in a normal state (a state in which a driving fluid is not supplied).

The valve portion 10 includes a body 11, a seat 20 which is a valve seat, a bonnet 12, a diaphragm 13, a presser foot adapter 14, a diaphragm presser 15, a holder 16, and a compression coil spring 17.

As shown in FIGS. 1 and 2, the body 11 is formed with a valve chamber 11a, an inflow passage 11b, an outflow passage 11c, and an annular groove 11d. The inflow passage 11b and the outflow passage 11c communicate with the valve chamber 11a. The body 11 has an annular portion 11E that projects into the valve chamber 11a. The annular portion 11E has an inner annular portion 11F projecting toward the diaphragm 13 and an outer annular portion 11G located on the outer periphery of the inner annular portion 11F and projecting toward the diaphragm 13 at the tip thereof. The annular groove 11d is defined by the inner annular portion 11F and the outer annular portion 11G and opens toward the valve chamber 11a. The inflow passage 11b and the outflow passage 11c correspond to fluid passages.

The sheet 20 has an annular shape, is arranged in the annular groove 11d, and is held by the annular portion 11E. The inner annular portion 11F and the outer annular portion 11G are crimped to the seat 20 side, whereby the seat 20 is held by the body 11. The configuration of the sheet 20 will be described later.

As shown in FIG. 1, the bonnet 12 has a substantially cylindrical shape with a lid, and is fixed to the body 11 so as to cover the valve chamber 11a by screwing the lower end portion thereof into the body 11.

The outer peripheral edge of the diaphragm 13 is sandwiched and held by the pressing adapter 14 arranged at the lower end of the bonnet 12 and the bottom surface forming the valve chamber 11a of the body 11. The diaphragm 13 is made of metal, and is made of, for example, a nickel-cobalt alloy, stainless steel, or the like. The fluid passage is opened and closed by separating and abutting (pressing) the diaphragm 13 with respect to the sheet 20.

As shown in FIG. 2, a thin film layer 13B is formed on the wetted surface 13A on the sheet 20 side of the diaphragm 13. The thin film layer 13B is, for example, a carbon film or a fluororesin film. The carbon film is, for example, a DLC (Diamond like Carbon) film, and the fluororesin film is, for example, fluorinated ethylene resin (PTFE), tetrafluoroethylene hexafluoropropylene copolymer (FEP), or tetrafluoroethylene. -Perfluoroalkyl vinyl ether copolymer (PFA).

As shown in FIGS. 1 and 2, the diaphragm retainer 15 is provided on the upper side of the diaphragm 13 and is configured to be able to press the central portion of the diaphragm 13. The diaphragm retainer 15 is fitted to the holder 16. The lower surface of the diaphragm retainer 15 has a spherical shape.

The holder 16 has a substantially columnar shape and is arranged in the bonnet 12 so as to be vertically movable. The stem (not shown) of the actuator 2 is screwed into the upper part of the holder 16.

The compression coil spring 17 is provided in the bonnet 12 and always urges the holder 16 downward. The valve 1 is kept in a closed state by the compression coil spring 17 in a normal state (when the actuator 2 is not operating).

The actuator 2 is, for example, an air-driven type, and has a substantially cylindrical shape as a whole. The drive fluid moves the stem, holder 16, and diaphragm retainer 15, which are not shown, to the side away from the diaphragm 13, the diaphragm 13 separates from the seat 20, and the inflow path 11b and the outflow path 11c communicate with each other to form a valve. 1 is in the open state.

Next, the sheet 20 will be described with reference to FIGS. 2 and 3.
FIG. 3 is a cross-sectional view of a part of the sheet 20.

The sheet 20 includes a rubber member 21 and a metal member 22. The rubber member 21 is made of, for example, fluororubber (for example, perfluoroelastomer (FFKM)). Examples of FFKM include Callets (registered trademark) and Viton (registered trademark).

The rubber member 21 has an annular shape and has a base portion 23 and a protruding portion 24. The base portion 23 has an inner peripheral groove 23d over the entire inner circumference, and has a substantially horizontal U-shape in cross section. The base 23 has an end face 23A on the valve chamber 11a side. The end face 23A is orthogonal to the axial direction of the sheet 20. The end face 23A has an annular inner end face 23B located inside the protrusion 24 and an annular outer end face 23C located outside the protrusion 24. In the radial direction of the rubber member 21, the width W1 of the inner end surface 23B is the same as the width W2 of the outer end surface 23C or narrower than the width W2 of the outer end surface 23C. The projecting portion 24 projects from the end surface 23A of the base portion 23 toward the diaphragm 13. When the valve 1 is in the closed state, the diaphragm 13 comes into contact with the protrusion 24.

The metal member 22 has an annular shape and is made of, for example, stainless steel. The metal member 22 has a flange portion 25 that projects over the entire outer circumference. The flange portion 25 is inserted into the inner peripheral groove 23d of the base portion 23, and the rubber member 21 and the metal member 22 are integrated. The metal member 22 has an end face 23A flush with the end face 23A of the rubber member 21. Further, the inner peripheral surface of the rubber member 21 and the inner peripheral surface of the metal member 22 are flush with each other.

As shown in FIG. 2, in the axial direction of the sheet 20, the tip of the inner annular portion 11F is located closer to the end face 23A than the position of half the height from the end face 23A of the base portion 23 to the tip of the protruding portion 24. In the present embodiment, in the axial direction of the sheet 20, the tip of the inner annular portion 11F is located on the same plane as the end surface 23A of the base portion 23. In the axial direction of the seat 20, the tip of the inner annular portion 11F may be located on the side opposite to the valve chamber 11a side of the end surface 23A of the base portion 23.

According to the valve 1 of the present embodiment described above, the body 11 has an inner annular portion 11F projecting toward the diaphragm 13 and an outer annular portion 11G located on the outer periphery of the inner annular portion 11F and projecting toward the diaphragm 13. The rubber member 21 has a base portion 23 held by the body 11 and a protruding portion 24 protruding from the end surface 23A of the base portion 23 toward the diaphragm 13, and has an inner annular shape in the axial direction of the sheet 20. The tip of the portion 11F is located closer to the end face 23A than the position of half the height from the end face 23A of the base portion 23 to the tip of the protruding portion 24.

According to such a configuration, in the valve 1 in the closed state, it is possible to prevent the diaphragm 13 which is pressed by the diaphragm retainer 15 and comes into contact with the protruding portion 24 from coming into contact with the inner annular portion 11F of the body 11.

By positioning the tip of the inner annular portion 11F in the axial direction of the seat 20 on the same plane as the end surface 23A of the base 23 or on the side opposite to the end surface 23A of the base 23 with respect to the valve chamber 11a side, the diaphragm 13 can be moved. Contact with the inner annular portion 11F can be reliably suppressed.

Since the inner annular portion 11F and the outer annular portion 11G are crimped to the seat 20 side, the seat 20 is firmly fixed to the body 11.

The lower surface of the diaphragm retainer 15 has a spherical shape, and the width W1 of the inner end surface 23B is the same as the width W2 of the outer end surface 23C or narrower than the width W2 of the outer end surface 23C in the radial direction of the rubber member 21. According to such a configuration, the protrusion 24 can be positioned inward as compared with the case where the width W1 of the inner end surface 23B is wider than the width W2 of the outer end surface 23C. As a result, the position where the protruding portion 24 comes into contact with the diaphragm 13 becomes more inward, so that the diaphragm 13 can be further prevented from coming into contact with the inner annular portion 11F. Further, the surface pressure can be reduced, and the valve 1 can be closed with a small thrust.

The rubber member 21 is made of fluororubber, and a thin film layer 13B made of a carbon film or a fluororesin film is formed on the wetted surface 13A on the sheet 20 side of the diaphragm 13. Thereby, the valve 1 that can be used even at a high temperature can be provided, and the transfer of the rubber member 21 to the diaphragm 13 can be suppressed.

The present disclosure is not limited to the above-described examples. A person skilled in the art can make various additions and changes within the scope of the present disclosure.

1: Valve 11: Body 11a: Valve chamber 11b: Inflow path 11c: Outflow path 11d: Circular groove 11F: Inner annular portion 11G: Outer annular portion 13: Diaphragm 20: Seat 21: Rubber member 22: Metal member 23: Base 24 : Protruding portion 23A: End face 23B: Inner end face 23C: Outer end face

Claims (6)

A valve chamber, an annular groove opening into the valve chamber, and a body having a fluid passage formed therein.
An annular sheet arranged in the annular groove and held by the body,
A diaphragm that opens and closes the fluid passage by contacting and separating from the sheet is provided.
The body has an inner annular portion that projects toward the diaphragm and an outer annular portion that is located on the outer periphery of the inner annular portion and projects toward the diaphragm.
The annular groove is defined by the inner annular portion and the outer annular portion.
The sheet has an annular rubber member and an annular metal member arranged on the inner peripheral side of the rubber member.
The rubber member has a base portion held by the body and a protruding portion protruding from an end surface of the base portion on the valve chamber side toward the diaphragm.
A valve in which the tip of the inner annular portion is located on the end face side of the axial direction of the seat with respect to a position of half the height from the end face of the base to the tip of the protrusion. The valve according to claim 1, wherein the tip of the inner annular portion is located on the same plane as the end surface of the base portion or on the side opposite to the valve chamber side from the end surface. The valve according to claim 1 or 2, wherein the inner annular portion and the outer annular portion are crimped to the seat side. The lower surface of the diaphragm retainer that presses the diaphragm has a spherical shape.
The end face has an annular inner end face located inside the protrusion and an annular outer end face located outside the protrusion.
The method according to any one of claims 1 to 3, wherein the width of the inner end face is the same as the width of the outer end face or narrower than the width of the outer end face in the radial direction of the rubber member. valve. The valve according to any one of claims 1 to 4, wherein the rubber member is made of fluororubber. The valve according to any one of claims 1 to 5, wherein a thin film layer made of a carbon film or a fluororesin film is formed on the surface of the diaphragm on the seat side.

Images