JP2021063801A - Capacitive pressure sensor - Google Patents

Abstract

To provide a compact capacitive pressure sensor for robots, capable of sensing pressure exerted on a robotic hand and soles of a traveling robot.SOLUTION: A capacitive pressure sensor provided herein comprises: a panel electrode E having a conductive surface at least on one side; a panel electrode S having a conductive surface at least on one side; at least one dielectric sheet inserted between the panel electrode E and/or the panel electrode S; and an elastic separator, containing air bubbles, inserted to directly or indirectly cover the panel electrode E or the panel electrode S.SELECTED DRAWING: Figure 2

Description

The present invention relates to a capacitance type pressure sensor, and more particularly to a capacitance type pressure sensor applicable to the fingertips of an industrial robot hand, the sole of a walking / traveling robot, and the like.

The structure of the conventional capacitance type pressure sensor is arranged between the outer skin cover, the pair of panel electrodes provided inside the outer skin cover, and the panel electrodes, for example, as described in Patent Document 1 below. It is configured to include a dielectric, a frame spacer provided on the periphery of the panel electrodes, a plurality of columnar spacers provided between the panel electrodes, and an air layer between the panel electrodes.

Since the capacitance type pressure sensor has a simple structure and excellent durability, its application to the tactile sensor of a robot, an industrial robot hand, the sole of a walking / traveling robot, etc. is being studied. There is. The performance required for pressure-sensitive sensors used in robot hands, soles, etc. is 1) flexibility to compress and deform uniformly even with a slight force (uniform sensitivity), and 2) resilience to quickly restore after pressure release. (Rapid response), 3) compression resistance (durability) that does not easily break even when a large force is repeatedly applied, and 4) wide range of measurable ability that can measure from a small force to a large force are required.

However, in the structure of the conventional capacitance type pressure sensor described above, a plurality of spacers are arranged between the opposing electrodes, and a predetermined air layer according to the sensitivity is formed based on the occupancy of the spacers between the electrodes. Must. However, in a small capacitance type pressure sensitive sensor, there is a problem that it is extremely difficult to form a desired air layer by a spacer having a small area. Further, the small capacitance type pressure sensor having a conventional structure has a problem that the spacer is worn out (not sufficiently durable) due to repeated loading. Further, there is a problem that it takes a long time to restore after releasing the load (lack of quick response) due to the sagging of the spacer. Therefore, there is a problem that the capacitance type pressure sensor having a conventional structure cannot be used as a sensor for detecting the pressure applied to the robot's hand (fingertip), sole, etc. Therefore, at present, there is no small capacitive pressure sensor that can be used for robot hands and the like.

Patent No. 6378001

Therefore, the subject of the present invention has been made in view of such circumstances, and the flexibility of uniformly compressing and deforming even with a slight force (uniform sensitivity) and the resilience of quick restoration after pressure release (quick response). ), Provides a compact capacitive pressure sensor with compression resistance (durability) that does not easily break even when a large force is repeatedly applied, and a wide range of measurable performance that can measure from a small force to a large force. That is the issue.

The first aspect of the present invention for solving the above problems is a panel electrode E having at least one side of a conductor, a panel electrode S having at least one side of a conductor, and the panel electrode E and / or the panel electrode S. It is provided with at least one dielectric sheet inserted between the two, and an elastic separator containing bubbles inserted so as to directly or indirectly cover the panel electrode E or the panel electrode S. It is a capacitive pressure-sensitive sensor, which is a feature.

The separator may be inserted indirectly through the dielectric sheet so as to cover the panel electrode E and the panel electrode S, or may be inserted so as to directly cover the panel electrode E and the panel electrode S without the dielectric sheet. You may insert it. One dielectric sheet may be used, or two or more dielectric sheets may be inserted. By inserting two dielectric sheets, the separator can indirectly cover both the panel electrode E and the panel electrode S via the dielectric sheet. This capacitive pressure sensor can ensure quick response due to the repulsive force of the bubbles contained in the separator. In addition, by providing a sealing layer that seals the separator so that it does not leak to the outside when it is compressed, the air bubbles contained in the separator are more completely sealed, and compression resistance (durability) and resilience (quick). Responsiveness) can be ensured.

The second aspect of the present invention is at least inserted between the panel electrode E having at least one side of the conductor, the panel electrode S having at least one side of the conductor, and the panel electrode E and / or the panel electrode S. It is characterized by comprising one dielectric sheet and an elastic separator having an opening of a predetermined shape inserted so as to directly or indirectly cover the panel electrode E or the panel electrode S. It is a capacitance type pressure sensitive sensor.

As in the above invention, the separator may or may not be inserted through the dielectric sheet. In the capacitive pressure sensor of the present invention, the separator is provided with an opening having a predetermined shape. The opening becomes a gas layer (a layer of air, an inert gas, etc.), and by sealing the gas in the opening, the repulsive force of the gas in the opening can be used more effectively. As a result, compression resistance (durability) and resilience (quick response) can be ensured. Furthermore, by using a separator made of a material containing air bubbles to seal not only the gas at the opening but also the air bubbles contained in the separator, more compression resistance (durability) and resilience (quick response) can be achieved. Can be secured.

The third aspect of the present invention is a capacitance type pressure sensitive sensor that measures a compressive force by a change in capacitance between electrodes separated by a separator via a gas layer.
The lower panel electrode E, the first dielectric sheet formed on the lower panel electrode E, the first separator formed on the first dielectric sheet, and the first separator formed on the first separator. The panel electrode S, the insulator formed on the first panel electrode S, the second panel electrode S formed on the insulator, and the second separator formed on the second panel electrode S. A second dielectric sheet formed on the second separator and a second panel electrode E formed on the second dielectric sheet are provided.
The first separator has a first gas layer that separates the first panel electrode S and the first dielectric sheet.
The second separator is a capacitance type pressure-sensitive sensor characterized by having a second gas layer that separates the second panel electrode S and the second dielectric sheet layer.

The present invention is a multi-pole capacitive pressure-sensitive sensor in which a separator, a dielectric sheet, and a panel electrode E are laminated above and below a panel electrode S laminated on an insulator. The multi-pole structure makes it a more sensitive pressure sensor. In the present invention, the structure is such that a dielectric sheet is formed on the panel electrode E and a separator is formed on the dielectric sheet. However, a separator is formed on the panel electrode E and a dielectric sheet is formed on the separator. It may be a structure to be used.
Further, the order of forming (stacking) the dielectric sheet and the separator on the panel electrode may be such that the first separator is formed on the panel electrode E and the first dielectric sheet is formed on the first separator. .. Similarly, the second dielectric sheet may be formed on the second panel electrode S, and the second separator may be formed on the second dielectric sheet. Further, they may be configured to be combined.
It is preferable that the dielectric sheet in these inventions is fixed to the separator in a tensioned state. Since the dielectric sheet in the tensioned state (tensioned state) exerts a trampoline effect with the peripheral edge of the opening of the separator as a fulcrum, it is necessary to ensure quick resilience (quick response) after pressure release. Can be done.

The fourth aspect of the present invention is at least inserted between the panel electrode E having at least one side of the conductor, the panel electrode S having at least one side of the conductor, and the panel electrode E and / or the panel electrode S. It is characterized by comprising one dielectric sheet and an elastic separator having an opening of a predetermined shape inserted so as to directly or indirectly cover the panel electrode E or the panel electrode S. A capacitive pressure-sensitive sensor for a robot used for sensing the pressure applied to the fingertips of a robot hand and / or the soles of a traveling robot.
The present invention provides a compact capacitive pressure-sensitive sensor capable of sensing the pressure applied to the hands (fingertips) and soles of a robot, which could not be manufactured by a conventional capacitive sensor. ..

According to the present invention, it is possible to sensor (sense) the pressure applied to the sole of the robot, etc., the flexibility to compress and deform uniformly even with a slight force (uniform sensitivity), and the resilience to quickly restore after pressure release. (Rapid response), compression resistance (durability) that does not easily break even when a large force is repeatedly applied, and a small capacitance type pressure sensor with a wide range of measurable performance that can measure from a small force to a large force A sensor can be provided.

It is a figure which showed the plane of the capacitance type pressure sensor 1 which is 1st Example of this invention, and the laminated state of the member which comprises it. It is a figure which showed the laminated state of the member which comprises the capacitance type pressure sensor 1a and the capacitance type pressure sensor 1b which are 2nd Embodiment of this invention. It is a top view which shows the shape of a separator. It is a top view which shows the shape of another separator. It is sectional drawing of the capacitance type pressure-sensitive sensor 1c which formed the opening in the separator. It is a figure which showed the cross section of the multi-pole type capacitance type pressure sensor 1d. It is a figure which showed the cross section of the multi-pole type capacitance type pressure sensor 1D. The change in the capacitance value when a compressive load of 30 kg is applied to each of the multipolar capacitance type pressure sensor 1d and the magnification with respect to the reference value (change value of the separator without an opening) are shown. It is a figure. It is a figure which showed the laminated state of the capacitance type pressure sensor 1e which is 3rd Example of this invention, and the member which comprises the capacitance type pressure sensor 1f. It is a top view of the tension jig 100 which applies a tensile force to a dielectric sheet 12-1. It is sectional drawing of the tension jig 100 which applies a tensile force to a dielectric sheet 12-1. It is a measurement result of the capacitance type pressure sensor 1c using the dielectric sheet in the tension state. It is a measurement result of the capacitance type sensor 1e using the dielectric sheet in a tension state. It is a measurement result of the capacitance type pressure-sensitive sensor 1e using the dielectric sheet which is not in the tension state.

The present invention will be described with reference to the drawings based on the examples of the present invention, but the present invention is not limited thereto. FIG. 1 is a diagram showing a flat surface of the capacitance type pressure sensor 1 according to the first embodiment of the present invention and a laminated state of members constituting the plane.

As shown in FIG. 1A, the capacitance type pressure sensor 1 is a small capacitance type pressure sensor having a shape like a fingertip. The periphery is covered with an outer skin cover 16 and has a waterproof structure including an insulator 10 and the like inside. The lead wire 20e and the lead wire 20s are drawn out from the internal panel electrode E (panel electrode 11e) and the panel electrode S (panel electrode 11s), and are connected to an external measuring instrument (not shown).

As shown in FIG. 1B, the capacitance type pressure sensor 1 of the first embodiment has dielectric sheets 12 laminated on the upper and lower sides so as to sandwich the separator 14. The material of the separator 14 used in this example is a polyurethane foam having the property of low compression residual strain, which is one of the polymer elastic bodies containing bubbles, and the bubbles and the resin form a uniform cell structure. (Urethane foam). Further, in this embodiment, the air bubbles contained in the separator 14 are sealed by bringing the dielectric sheet 12 and the separator 14 into close contact with each other with an adhesive. As a result, even if the separator 14 is compressed, the air bubbles contained therein do not leak from the inside to the outside due to the seal, and the repulsive force can be utilized. The quick response of the sensor 1 can be ensured. In the present specification, the separator, which is a member that separates the panel electrodes, refers to an integral member that is inserted so as to cover the panel electrodes. On the other hand, the spacer refers to a member that separates the panel electrodes, for example, a frame spacer provided on the periphery of the capacitance type pressure-sensitive sensor, or a columnar member provided scattered between the panel electrodes.

FIG. 2 is a diagram showing a laminated state of the capacitance type pressure sensor 1a and the members constituting the capacitance type pressure sensor 1b, which is the second embodiment of the present invention. The difference between the capacitance type pressure sensor 1 and 1a and 1b shown in FIG. 1 is that the separator 14 has an opening 15 and the seal layer 13 is laminated so as to cover the opening 15. It is in.

The capacitive pressure-sensitive sensors 1a and 1b of the second embodiment seal the gas at the opening of the separator 14, so that the repulsive force is not required even if the polymer elastic body contains bubbles such as urethane foam. It is in a place where it can be used as a high separator. This is because the sealed gas replaces the function of the bubbles. Of course, it goes without saying that an opening may be provided in the polymer elastic body containing bubbles, and the bubbles and the gas in the openings may be used as a repulsive force.

In order to prevent the air bubbles contained in the separator 14 and the gas in the opening 15 from leaking to the outside when a compressive force is applied to the parator 14, for example, the separator 14 and the dielectric sheet 12 are brought into close contact with each other by using double-sided tape. To form a seal layer. Alternatively, the separator 14 is covered with a film and then brought into close contact with the dielectric sheet 12 with an adhesive or the like to form a seal layer. These can prevent the leakage of bubbles and gas.

FIG. 2B shows a capacitance type pressure sensor 1b. The difference between the capacitance type pressure sensor 1b and the capacitance type pressure sensor 1a is that the capacitance type pressure sensor 1a has a seal layer 13 laminated on one surface of the dielectric sheet 12. .. On the other hand, in the capacitance type pressure sensitive sensor 1b, the seal layer 13 is laminated on the other surface of the dielectric sheet 12 in addition to the capacitance type pressure sensor 1b. This is because by laminating a plurality of seal layers, it is possible to more completely prevent the leakage of air bubbles contained in the separator 14.

Examples of the polymer elastic body used as the material of the separator 14 include urethane foam, silicone elastomer, styrene-based thermoplastic elastomer, natural rubber, nitrile rubber, acrylic rubber, urethane rubber, urea rubber, and fluororubber.

3 and 4 are views showing the shape of the separator 14. FIG. 3A is a plan view of the separator 14 made of a polymer elastic body containing bubbles. 3 (b) and 3 (c) are plan views of the separators 14a and 14b having an opening formed in the center of the separator. In the separator shown in FIG. 4A, the openings are evenly distributed along the shape of the separator to ensure the uniformity of the openings. FIG. 4B is a diagram showing the shape of a separator arranged symmetrically with an opening in both the vertical and horizontal directions.

By providing the separator with the opening 15 as shown in FIGS. 3 and 4, the material of the separator is not limited to the polymer elastic body containing bubbles. By determining the occupied area of the opening according to the object to be measured, desired measurement conditions, range of measured values, and the like, a capacitance type pressure sensitive sensor having a desired sensitivity can be manufactured.

FIG. 5 is a cross-sectional view of a capacitance type pressure sensitive sensor 1c incorporating a separator having an opening 15. The seal layer 13, the dielectric sheet 12, the panel electrode 11e and the panel electrode 11s, the insulator 10, and the outer skin cover 16 are laminated with the separator 14a having the opening 15 interposed therebetween. Lead wires 20e and 20s are drawn out from the ends of the panel electrode E and the panel electrode S, respectively, and are connected to an external measuring instrument (not shown). The opening 15 is filled with an inert gas (gas) such as air or nitrogen, and in the present specification, the opening is also referred to as a gas layer.

(Comparative experiment)
We verified the difference in sensor sensitivity depending on the presence or absence of the separator opening, and the difference in sensor sensitivity due to the difference in the shape of the opening (opening area ratio). In this comparative experiment, the capacitance type pressure sensor 1d of the multi-pole type capacitance type pressure sensor (the panel electrode E is formed with two poles sandwiching the panel electrode S) as shown in FIG. Was used. Then, the above-mentioned four types of separators were incorporated into the capacitance type pressure sensor 1d, respectively, four capacitance type pressure sensors were prepared, and a comparative experiment was conducted.

In the capacitance type pressure sensor 1d, as shown in FIG. 6, the separator 14a having the opening 15 includes a panel electrode 11s, a lower panel electrode 11e (lower panel electrode 11e shown in FIG. 6), and a panel electrode 11s. Two are inserted between the upper panel electrode 11e and the upper panel electrode 11e (upper panel electrode 11 shown in FIG. 6). A seal layer 13, a dielectric sheet 12, a panel electrode 11e, an insulator 10, and an outer skin cover 16 are laminated on the separator 14a, respectively. Lead wires 20e and 20s are drawn out from the ends of the panel electrode E and the panel electrode S, respectively, and are connected to an external measuring instrument (not shown).

As the panel electrode E of the capacitance type pressure sensor 1d, a polycarbonate sheet (thickness 0.1 mm to 0.3 mm) coated with a conductor on one side was used. Further, in order to seal the air in the opening, the dielectric sheet 12 and the separator 14a, the separator 14a and the panel electrode 11s, the panel electrode 11s and the separator 14a, and the separator 14a and the dielectric sheet 12 were laminated and integrally formed by double-sided tape. As the material of the separator, urethane foam having a density (JIS K6401) of 480 kg / m ³ , a residual strain of 5.9%, and a thickness of 0.8 mm was used. Examples of the formation of the seal layer for sealing the air in the opening of the separator 14a include a double-sided tape and an adhesive.

FIG. 7 is a view showing a cross section of the multi-pole capacitance type pressure sensor 1D. The multi-pole capacitive pressure sensor 1D has basically the same configuration as the multi-polar capacitive pressure sensor shown in FIG. 6, but the seal layer 13 is below the separator 14a1. , The difference is that they are provided on the upper side of the separator 14a2. The position of the seal layer 13 does not matter as long as it can seal (seal) the gas at the opening of the separator 14. Further, instead of forming the dielectric sheet 12 on the panel electrode 11e and forming the separator 14 on the panel electrode 11e, the separator 14 may be formed on the panel electrode 11e and the dielectric sheet 12 may be formed on the separator 14. good. Further, the dielectric sheet 12 may be formed on the panel electrode 11s, and the separator 14 may be formed on the dielectric sheet 12.

FIG. 8 shows the change in the capacitance value when a compressive load of 30 kg is applied to each of the multipolar capacitive pressure-sensitive sensors 1d incorporating the four types of separators shown in FIG. 6 described above, and the reference value. It is a figure which showed the magnification with respect to (the change value of the capacitance of the multi-pole type capacitance type pressure sensor 1d which incorporated the separator without an opening).

No openings in the separator N surface area 397 mm ² shown in FIG. 8, the separator S has an opening in the central portion, the surface area except for the opening 352 mm ² (the opening surface area 45 mm ^2), the separator P is the separator It has an opening along the shape, the surface area excluding the opening is 316.5 mm ² (opening surface area ^{80.5 mm 2} ), and the separator T has openings in the vertical and horizontal directions, and the surface area excluding the opening. Is 313 mm ² (opening surface area 84 mm ² ).

The capacitance value of the capacitance type pressure sensor 1d using the separator N when no load is applied is 15.2PF. When this was loaded with a compressive load of 30 kg, the capacitance value showed 69.3 PF. The amount of change in capacitance is 54.1 PF.

The capacitance value of the capacitance type pressure sensor 1d using the separator S was 15.3PF when no load was applied, but the capacitance value was 76.5PF when a compressive load of 30 kg was applied. .. The amount of change in capacitance is 61.2PF. When the amount of change in the separator N is used as a reference value, the changed magnification is 1.131 times.

The capacitance value of the capacitance type pressure sensor 1d using the separator P was 14.4 PF when no load was applied, but the capacitance value was 86.4 PF when a compressive load of 30 kg was applied. .. The amount of change in capacitance is 72 PF. When the amount of change in the separator N is used as a reference value, the changed magnification is 1.33 times.

The capacitance value of the capacitance type pressure sensor 1d using the separator T was 16.1 PF when no load was applied, but the capacitance value was 95.6 PF when a compressive load of 30 kg was applied. .. The amount of change in capacitance is 79.5 PF. When the amount of change in the separator N is used as a reference value, the changed magnification is 1.469 times.

In order to compare the multipolar type and the unipolar type, the separator N was incorporated into the unipolar capacitive pressure sensor shown in FIG. 2B, and an experiment was conducted under the same conditions to measure the amount of change. As a result, the capacitance value at no load was 8.4 PF, but it showed 30.1 PF by applying a compressive load of 30 kg. The amount of change in capacitance was 21.7 PF, and the magnification changed with respect to the reference value was 0.401 times.

From the above comparative experiments, the sensitivity can be improved by using a multi-pole capacitive pressure sensor. Further, the sensitivity can be changed by changing the shape of the opening provided in the separator and the area occupied by the opening. Furthermore, it was confirmed in the experiment that the compression resistance was improved and the resilience after the load was released was remarkably improved by sealing the air bubbles and / or the gas at the opening contained in the separator.

FIG. 9 is a diagram showing a laminated state of the capacitance type pressure sensor 1e and the members constituting the capacitance type pressure sensor 1f, which are the third embodiment of the present invention. The feature of the capacitive pressure-sensitive sensors 1e and 1f shown in FIG. 9 is that the dielectric sheet 12-1 is tightly fixed to the separator 14-1 or the separator 14 in a tensioned state (tensile state). Where you are.

The dielectric sheet 12-1 of the capacitance type pressure sensor 1c shown in FIG. 9A is in a tension state, and its end portion is fixed to the separator 14-1. Therefore, when a load is applied to the dielectric sheet 12-1 in the tension state, the dielectric sheet 12-1 supports the peripheral end portion of the separator 14-1 together with the gas in the opening of the separator 14-1. It bends as a point, and when the load is removed, it quickly recovers due to its repulsive force. Such an effect is similar to the repulsive force obtained from the structure of the trampoline that supports the flexible sheet in the tension state at the elastic body support point. In the present specification, this effect is referred to as a trampoline effect, but by adopting a structure that exerts a trampoline effect, a capacitance type pressure-sensitive sensor having high durability, quick resilience, etc., which could not be achieved by a conventional structure, can be obtained. It can be realized.

Examples of the member of the dielectric sheet 12-1 for obtaining the trampoline effect include elastic bodies such as silicone elastomer, styrene-based thermoplastic elastomer, natural rubber, nitrile rubber, acrylic rubber, urethane rubber, urea rubber, and fluororubber, and rubber elasticity. The body can be raised. In addition to the rubber elastic body, a flexible material may be used.

The dielectric sheet 12-1 of the capacitance type pressure sensor 1f shown in FIG. 9B is in a tension state and is fixed to the separator 14. When a load is applied to the two dielectric sheets 12-1 in a tensioned state, the two dielectric sheets 12-1 are bent together with the gas in the separator 14 with the peripheral edge of the opening of the separator 14 as a support point. Restore to.

FIG. 10 is a plan view of the tension jig 100 that applies tension to the dielectric sheet 12-1. Further, FIG. 11 (a) is a cross-sectional view of the tension jig 100 before applying tension to the dielectric sheet 12-1, and FIG. 11 (b) shows tension in a state where a tensile force is applied to the dielectric sheet 12-1. It is sectional drawing of the jig 100.

When the tension is applied by the tension jig 100, the tightening bolt 121 of the tension portion 124 is loosened, and the dielectric sheet is sandwiched between the upper plate 122 and the bottom plate 123 (FIG. 11A). Next, the dielectric sheet is fixed to the tension portion 124 by tightening the tightening bolts 121 on the four sides, and the nuts on the four sides are rotated evenly. 1 is obtained. The tension is adjusted by the number of rotations of the nut, and the dielectric sheet 12-1 in the tensioned state is fixed to the peripheral end of the opening of the separator.

(Comparative experiment 2)
In order to verify the performance of the capacitance type pressure sensor using the dielectric sheet in the tension state, the capacitance type pressure sensor 1c shown in FIG. 5 and the capacitance type pressure sensor 1f shown in FIG. 9 are used. A load of 15 kg was applied to each, and the change in capacitance was measured.

FIG. 12 shows the measurement results of the capacitance type pressure sensor 1c. The capacitance of 4.4 pf before the load became 20.6 pf by the load of 15 kg, and returned to the capacitance of 4.4 pf before the load 0.087 seconds after the load was removed. The change in capacitance before and after the load was 16.2 pf.

FIG. 13 is a measurement result of the capacitance type sensor 1f. The capacitance of the capacitance type sensor 1f before loading becomes 47.7 pf due to the load of 15 kg, and returns to the capacitance of 5.3 pf before load 0.093 seconds after the load is removed. It was. The change in capacitance before and after the load was 42.4 pf.

FIG. 14 is a measurement result of the capacitance type pressure sensor 1e (no tensile force is applied to the dielectric sheet) for verification of the trampoline effect. The capacitance of 5 pf before the load became 31.9 pf by the load of 15 kg, and became stable at the capacitance of 5.6 pf 0.14 seconds after the load was removed. The change in capacitance before and after the load was 26.9 pf.

By using a dielectric sheet in a tensioned state as a constituent member in the above comparative experiment, it can be used for the hands, soles, etc. of robots, and has flexibility (uniform sensitivity) to uniformly compress and deform even with a slight force, and pressure release. Hands with recoverability (quick response) that restores quickly later, compression resistance (durability) that does not easily break even when a large force is repeatedly applied, and wide measurable performance that can measure from small force to large force It has become clear that a small capacitive pressure sensor can be provided.

1 Capacitive sensing sensor 10 Insulator 11 11e 11s Panel electrode 12 Dielectric sheet 13 Seal layer 14 Separator 15 Opening (gas layer)
16 Outer cover 20 Lead wire 100 Pulling jig 110 Nut 111 Rod 112 Jig frame 113 Bottom plate 120 Fixing part 121 Tightening bolt 122 Top plate 123 Bottom plate 124 Pulling part

Claims (13)

A panel electrode E whose at least one side is a conductor,
A panel electrode S whose at least one side is a conductor,
With at least one dielectric sheet inserted between the panel electrode E and / or the panel electrode S,
A capacitance type pressure-sensitive sensor including an elastic separator containing bubbles inserted so as to directly or indirectly cover the panel electrode E or the panel electrode S. The capacitance type pressure-sensitive sensor according to claim 1, further comprising a seal layer for sealing air bubbles contained in the separator. A panel electrode E whose at least one side is a conductor,
A panel electrode S whose at least one side is a conductor,
With at least one dielectric sheet inserted between the panel electrode E and / or the panel electrode S,
A capacitance-type pressure-sensitive sensor including an elastic separator having an opening having a predetermined shape inserted so as to directly or indirectly cover the panel electrode E or the panel electrode S. .. The capacitance type pressure-sensitive sensor according to claim 3, further comprising a seal layer for sealing the gas in the opening. The capacitance type pressure sensor according to any one of claims 1 to 4, wherein the dielectric sheet is fixed to the separator in a tensioned state. In a capacitive pressure-sensitive sensor that measures compressive force by a change in capacitance between electrodes separated by a separator via a gas layer.
The lower panel electrode E, the first dielectric sheet formed on the lower panel electrode E, the first separator formed on the first dielectric sheet, and the first separator formed on the first separator. The panel electrode S, the insulator formed on the first panel electrode S, the second panel electrode S formed on the insulator, and the second separator formed on the second panel electrode S. A second dielectric sheet formed on the second separator and a second panel electrode E formed on the second dielectric sheet are provided.
The first separator has a first gas layer that separates the first panel electrode S and the first panel electrode E.
The second separator is a capacitance type pressure sensitive sensor characterized by having a second gas layer that separates the second panel electrode S and the second panel electrode E. A first seal layer that seals the first gas layer between the first dielectric sheet and the first separator, and the second gas layer between the second dielectric sheet and the second separator. The capacitance type pressure sensitive sensor according to claim 6, further comprising a second sealing layer for sealing. In a capacitive pressure-sensitive sensor that measures compressive force by a change in capacitance between electrodes separated by a separator via a gas layer.
The lower panel electrode E, the first separator formed on the lower panel electrode E, the first dielectric sheet formed on the first separator, and the first dielectric sheet formed on the first dielectric sheet. The panel electrode S, the insulator formed on the first panel electrode S, the second panel electrode S formed on the insulator, and the second dielectric formed on the second panel electrode S. A sheet, a second separator formed on the second dielectric sheet, and a second panel electrode E formed on the second separator are provided.
The first separator has a first gas layer that separates the first panel electrode S and the first panel electrode E.
The second separator is a capacitance type pressure sensitive sensor characterized by having a second gas layer that separates the second panel electrode S and the second panel electrode E. A first seal layer that seals the first gas layer between the first dielectric sheet and the first separator, and the second gas layer between the second dielectric sheet and the second separator. The capacitance type pressure sensitive sensor according to claim 8, further comprising a second sealing layer for sealing. The capacitance type pressure sensor according to any one of claims 6 to 9, wherein the dielectric sheet is fixed to the separator in a tensioned state. The first separator and / or the second separator is any one of a silicone elastomer, a styrene-based thermoplastic elastomer, a natural rubber, a nitrile rubber, an acrylic rubber, a urethane rubber, a urea rubber, and a fluororubber. The capacitive pressure sensitive sensor according to any one of 6 to 10. A panel electrode E whose at least one side is a conductor,
A panel electrode S whose at least one side is a conductor,
With at least one dielectric sheet interposed between the panel electrode E and / or the panel electrode S,
A fingertip of a robot hand and / or a robot hand provided with an elastic separator having a predeterminedly shaped opening inserted so as to directly or indirectly cover the panel electrode E or the panel electrode S. Alternatively, a capacitive pressure-sensitive sensor for robots used to detect the pressure applied to the soles of traveling robots. The robot capacitance used for sensing the pressure applied to the fingertip of the robot hand and / or the sole of the traveling robot according to claim 12, further comprising a seal layer for sealing the gas in the opening. Type pressure sensor.

Images