JP2021063674A - Apparatus for testing vibration device having mems structure and method for presenting driving performance - Google Patents

Abstract

To provide a testing apparatus for a vibration device excellent in cost and portability.SOLUTION: A testing apparatus 1 for a vibration device 2 having a MEMS structure includes: a vibration speaker 4 driven by a vibration signal; an excitation table 3 on which the vibration device 2 having the MEMS structure is mounted and to which the vibration of the vibration speaker 4 is transmitted; and a measurement device 6 as a presentation unit which receives the output of the vibration device 2 excited by the vibration of the excitation table 3 and presents the driving performance of the vibration device 2.SELECTED DRAWING: Figure 1

Description

The present invention relates to a test device for a vibration device having a MEMS structure and a method for presenting drive performance.

There are various types of vibration devices, and as an example, a vibration power generation device that generates power by environmental vibration is known (see, for example, Patent Document 1). The vibration power generation device described in Patent Document 1 includes a fixed electrode on which a comb tooth electrode is formed and a movable electrode, and an electret is formed on one of them. When a disturbance is applied to the vibration power generation device, the movable electrode is displaced with respect to the fixed electrode, whereby vibration power generation is performed.

In order to evaluate the power generation by the vibration power generation device, it is necessary to vibrate the vibration power generation device under predetermined conditions and measure the output waveform. Generally, a vibration power generation device is attached to a vibration generator of a vibration test device, and the vibration power generation device is vibrated by the vibration power generator to measure the output waveform of the vibration power generation device.

JP-A-2018-88780

However, the general-purpose vibration exciter is larger than necessary compared to the vibration device formed by the MEMS (Microelectromechanical Systems) processing technology, and further, a function generator or an amplifier for vibrating the exciter is required. Therefore, the cost of the vibration test device is high, the entire test device is large, and the portability when the test device is transferred for an evaluation demonstration or the like is also poor.

In the test device for a vibration device having a MEMS structure according to the first aspect of the present invention, a vibration speaker driven by a vibration signal and a vibration device having a MEMS structure are mounted, and the vibration of the vibration speaker is transmitted. It includes a shaking table and a presenting unit that receives the output of the vibrating device vibrated by the vibration of the vibrating table and presents the driving performance of the vibrating device.
In the method of presenting the drive performance of a vibration device having a MEMS structure according to the second aspect of the present invention, a vibration speaker and a vibration device having a MEMS structure are placed on a vibration table, and a vibration signal is applied to the vibration speaker. The vibration table is vibrated, and the output of the vibration device excited by the vibration of the vibration table is received to present the driving performance of the vibration device.

According to the present invention, it is possible to provide a test device for a vibration device having excellent cost and portability. Further, according to the drive performance presentation method of the present invention, the vibration device can be easily tested and evaluated.

FIG. 1 is a diagram showing a schematic configuration of a test device. FIG. 2 is a diagram showing another example of the vibration table. FIG. 3 is a schematic view showing an example of a vibration power generation device. FIG. 4 is a diagram showing the procedure of the evaluation test. FIG. 5 is a diagram showing a comparative example of the test apparatus. FIG. 6 is a diagram showing a first modification of the test device. FIG. 7 is a diagram showing a second modification of the test device.

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration of the test apparatus 1. The test device 1 includes a vibration table 3 on which the vibration device 2 to be tested is mounted, a vibration speaker 4 that functions as a vibration machine that vibrates the vibration table 3, a controller 5 that controls the vibration speaker 4. It is provided with a measuring device 6 for measuring the output of the vibration device 2. In FIG. 1, a PC (personal computer) in which vibration measurement software for measurement is installed is used as the measurement device 6. Further, an oscilloscope or the like may be used as the measuring device 6.

In general, a normal speaker emits sound by directly vibrating air with a diaphragm built in the speaker. On the other hand, the vibrating speaker does not make a loud sound because it does not have the function of vibrating the air greatly by itself, but by installing the vibrating part of the vibrating speaker in close contact with the ceiling plate, wall plate, etc. And the wall plate vibrates the air to make a sound like a normal speaker. In the present embodiment, such a vibration speaker 4 is placed in close contact with the vibration table 3 to vibrate the vibration table 3 and vibrate the vibration device 2 mounted on the vibration table 3. Is. There are various forms and sizes of the vibrating speaker. As will be described later, as the vibration device of the present embodiment, the vibration device 2 in which the dimensions of the support portion 22 in FIG. 3 are about x = 20 mm and y = 20 mm is targeted. For the vibration of the vibration device of the embodiment, the vibration speaker 4 having a height of about 50 to 100 mm and a weight of about several hundred g can be used. A vibration speaker 4 of this size is suitable for a small device, and is suitable for vibration measurement of a device of the above size or smaller.

The vibration speaker 4 shown in FIG. 1 schematically shows an example of various types of vibration speakers. The vibration speaker 4 is in a form in which an audio signal converted into a digital signal is input by wireless communication, and the vibration unit 48 is vibrated and driven based on the audio signal. A magnet 42, a voice coil 43, a communication unit 44, a DA conversion unit 45, a drive unit 46, and a battery 47 are provided in the housing 41 of the vibration speaker 4. The vibrating portion 48 exposed to the outside of the housing 41 is fixed to the voice coil 43. A suction cup 49 is provided on the fixing surface of the vibrating portion 48, and the sucking cup 49 can attract and fix the vibrating portion 48 to the vibration table 3.

The suction cup 49 may be omitted, and the vibration speaker 4 may be placed so that the vibration unit 48 is in contact with the vibration table 3, or the vibration unit 48 may be adhered to the vibration table 3 or fixed with screws or the like. You may do it. The vibration table 3 is arranged on a floor, a desk, or the like. In that case, if the vibration table 3 is arranged directly on the floor, desk, or the like, the vibration of the vibration table 3 is easily absorbed by them, so it is preferable to arrange the vibration table 3 through a member that does not easily transmit the vibration. Further, as in the first modification shown in FIG. 6, the housing 41 of the vibration speaker 4 is arranged upside down on the floor FL and vibrated on the diaphragm 48 located on the upper side of the housing 41 in the drawing. The table 3 may be sucked and fixed, and the vibration device 2 may be arranged on the vibration table 3. With such a configuration, it is possible to suppress the vibration from being absorbed by the floor FL.

The communication unit 44 has a communication circuit for performing wireless communication with the controller 5, and for example, a communication unit for short-range wireless communication such as Bluetooth (registered trademark) is used. Wired communication may be used instead of wireless communication. The audio signal (digital signal) transmitted from the controller 5 is received by the communication unit 44. The digital signal received by the communication unit 44 is digital-analog converted by the DA conversion unit 45. The drive unit 46 supplies a drive current to the voice coil 43 based on the audio signal digitally-analog converted by the DA conversion unit 45. As a result, the voice coil 43 vibrates with respect to the magnet 42 in the vertical direction shown in the drawing, and the vibration table 3 is vibrated by the vibrating portion 48 that vibrates integrally with the voice coil 43.

The controller 5 includes a communication unit 51, a CPU 52, a storage unit 53, and the like. The CPU 52 generates an audio signal according to a vibration test control program stored in the storage unit 53. The original use of the vibrating speaker 4 is to vibrate a glass window, a table, or the like with a vibrating unit to output sound obtained by a normal speaker, and to output, for example, music to the vibrating unit of the vibrating speaker. Audio signal is applied. In that sense, the signal applied to the vibrating unit 48 of the vibrating speaker 4 is also referred to as an audio signal in the embodiment.

The audio signal is transmitted from the communication unit 51. In the embodiment, the audio signal for the test is automatically generated by the control program for the vibration test. For example, the operator operates the input operation unit (not shown) of the controller 5 to obtain the frequency, vibration waveform, and the like. It may be set so that a signal having a desired vibration waveform is generated as an audio signal.

Instead of providing the dedicated controller 5 as described above for the vibration speaker 4, the function generator application is installed in a mobile device such as a smartphone or tablet, and the vibration signal generated by the function generator application is transmitted from the mobile device. It may be transmitted to the vibration speaker 4.

A function generator application is software that can create a vibration signal having waveforms such as a sine wave, a square wave, a triangular wave, a sawtooth wave, and an impulse waveform. When using a smartphone as the controller 5, the function generator application is installed on the smartphone in advance. When the vibrating device 2 is vibrated, a vibration signal is supplied from the smartphone to the vibrating speaker 4 by short-range wireless communication such as Bluetooth to vibrate the vibrating unit 48.

In particular, when demonstrating the power generation state of the vibrating device 2 at a booth such as an exhibition hall, the vibrating device can be easily vibrated simply by installing the function generator application on the smartphone of the explanation staff.

Further, as in the second modification shown in FIG. 7, a microcomputer 40 having a CPU, ROM, RAM, etc. is mounted on the vibration speaker 4, a function generator application is installed in the microcomputer 40 in advance, and the microcomputer 40 vibrates. The vibration speaker 4 may be vibrated by giving a signal output start instruction. In FIG. 7, instead of the measuring device 6 shown in FIG. 1, a light emitting device 7 is provided as a presenting unit for presenting the driving performance of the vibration device 2. The light emitting device 7 has an LED 71 that lights up with the generated power of the vibration device 2 which is a vibration power generation device. When the vibrating device 2 vibrates due to the vibration of the vibrating speaker 4, one or two LEDs 71 emit light according to the generated power generated. The number of LEDs is not limited to two, and may be one or three or more, and can be appropriately selected.

FIG. 2 is a diagram showing another example of the vibration table 3. The vibrating table 3A shown in FIG. 2A is formed with a peripheral frame portion 31 and a thin plate portion 32 having a thickness dimension smaller than that of the frame portion 31. In this case, the vibrating speaker 4 and the vibrating device 2 are arranged on the thin plate portion 32. The lower part of the thin plate portion 32 is hollow, and the portion (thin plate portion 32) on which the vibration device 2 of the vibration table 3A is placed has a structure shown in FIG. 1 with respect to the vibration by the vibration speaker 4. It is easier to vibrate than the vibration table 3.

Further, as in the vibration table 3B shown in FIG. 2B, the thickness of the frame portion 31b is set to be thicker than the frame portion 31 of the vibration table 3A, and the vibration speaker 4 is fixed to the back surface side of the thin plate portion 32b. You may. By arranging the vibration device 2 on the surface (upper surface in the drawing) opposite to the vibration speaker fixing surface of the thin plate portion 32b as shown in FIG. 2B, the vibration of the vibration speaker 4 makes the vibration device 2 more effective. Be transmitted.

The vibration device 2 to be tested by the test device 1 of the present embodiment is a small device formed by so-called MEMS processing technology, such as an acceleration sensor, a vibration power generation device as described in Patent Document 1, and the like. It has been known. FIG. 3 shows an example of the vibration device 2, and is a diagram schematically showing a vibration power generation device that generates power by utilizing environmental vibration.

The vibration device 2 is formed by processing an SOI substrate by a MEMS processing technique. The vibration device 2 includes a support portion 22, fixed electrodes 23a and 23b, a movable portion 24, movable electrodes 25a and 25b, and an elastic support portion 26. The load 28 is connected between the fixed electrode 23a on the left side of the drawing and the fixed electrode 23b on the right side of the drawing. The movable portion 24 is elastically supported by a pair of elastic support portions 26, and the other end of each elastic support portion 26 is fixed to the support portion 22.

The support portion 22 is formed on the lower Si layer of the SOI substrate, and the fixed electrodes 23a and 23b and the movable electrodes 25a and 25b are formed by the upper Si layer of the SOI substrate. _{An insulating layer (SiO 2} layer) is interposed between the lower Si layer and the upper Si layer.

The fixed electrodes 23a and 23b and the movable electrodes 25a and 25b form comb tooth electrodes, respectively. A plurality of fixed comb teeth 230 elongated in the x direction are arranged in the y direction on the fixed electrodes 23a and 23b, and the movable electrodes 25a and 25b are arranged. A plurality of movable comb teeth 250 elongated in the x direction are arranged in the y direction. The fixed comb teeth 230 and the movable comb teeth 250 alternately arranged in the y direction mesh with each other through a gap, and the side surface of the fixed comb tooth 230 and the side surface of the movable comb tooth 250 face each other through the gap.

When the vibration device 2 is placed on the vibration table 3, the support portion 22 of the vibration device 2 is held by a casing or the like, and the casing is placed on the surface of the vibration table 3. In that case, as shown in FIG. 1, it is preferable to place the vibration device 2 so that the vibration direction of the movable portion 24 and the vibration direction of the vibration table 3 coincide with each other. The casing may be fixed to the vibration table 3 with an adhesive, an adhesive or the like, or may be fixed to the vibration table 3 with a fastening material such as a screw. When an external force is applied to the vibrating device 2, the elastic support portion 26 is deformed and the movable portion 24 vibrates in the x direction as shown by the arrow R. When the movable portion 24 vibrates, the capacitance between the fixed electrodes 23a and 23b and the movable electrodes 25a and 25b changes, and power generation is performed. The output waveform is measured by measuring the voltage of the load 28 at that time with the measuring device 6.

The evaluation test of the vibration device 2 using the test device 1 is performed, for example, by the procedure shown in FIG. In step 1, the vibration device 2 is installed on the vibration table 3. A vibration speaker 4 is already installed on the vibration table 3. In step 2, as shown in FIG. 1, the output wiring 200 connected to the output terminal of the vibration device 2 is connected to the measuring device 6. In step 3, the controller 5 is operated to set conditions for the generated audio signal, for example, conditions such as frequency and vibration waveform. In the case of the controller 5 having a configuration that automatically generates a signal for the vibration test, the control program for the vibration test is stored in the storage unit 53 in advance.

In step 4, the controller 5 is operated to start transmitting the vibration signal to the vibration speaker 4, and the vibration speaker 4 vibrates the vibration device 2. In step 5, the output (for example, voltage waveform) of the vibration device 2 is measured by the measuring device 6. Instead of measuring the output waveform with the measuring device 6, the output wiring 200 may be connected to the LED device to determine whether or not power generation is being performed based on whether or not the LED emits light.

Conventionally, when evaluating the vibration of a test object, it is common to use a test device as shown in FIG. The vibration device 2 is installed on the vibration table 100a of the general-purpose vibration machine 100 used for the vibration test. An amplifier 101 is required to drive the vibrator 100, a vibration signal generated by the function generator 102 is input to the amplifier 101, and a drive current based on the vibration signal is supplied from the amplifier 101 to the vibration machine 100. Will be done. As a result, the vibration device 2 is vibrated in a desired vibration form.

As described above, in the test apparatus shown in FIG. 5, since the exciter 100, the amplifier 101, and the function generator 102 are required as the exciter, there is a problem that the test apparatus becomes expensive. Further, the vibrating device 100 becomes larger than necessary as compared with the vibration device 2 which is a test body, and the amplifier 101 and the function generator 102 are required, so that the vibrating device becomes larger than necessary. Therefore, when an evaluation test demonstration of the vibration device 2 is performed at an exhibition or the like, there is a problem in the portability of the device.

On the other hand, in the case of the test apparatus 1 of the present embodiment shown in FIG. 1, the vibration speaker 4 is small enough to be grasped with one hand, and the installation area is large enough to mount the vibration speaker 4 and the vibration device 2. A vibration device is configured by the vibration table 3 and the controller 5. Therefore, the size and weight of the entire device can be reduced, and the portability is excellent. Further, since the vibration speaker 4 is cheaper than the device including the vibrator 100, the amplifier 101, and the function generator 102 of FIG. 5, the cost of the test device 1 can be reduced.

The effects of the above-described embodiments can be summarized as follows.
(1) In the test device 1 of the vibration device 2 having a MEMS structure, a vibration speaker 4 driven by a vibration signal and a vibration device 2 having a MEMS structure are mounted, and the vibration of the vibration speaker 4 is transmitted. The table 3 is provided with a measuring device 6 or a light emitting device 7 as a presenting unit that receives the output of the vibrating device 2 vibrated by the vibration of the vibrating table 3 and presents the driving performance of the vibrating device 2. Since the vibrating table 3 on which the vibrating device 2 is mounted is vibrated by the vibrating speaker 4, the vibrating device including the vibrating table 3 and the vibrating speaker 4 can be compactly configured and inexpensively. Can be manufactured. That is, the cost of the test apparatus 1 can be reduced and the portability can be improved.

(2) Further, as shown in FIG. 2, the vibration table 3 supports the thin plate portions 32, 32b, which are the diaphragms on which the vibration speaker 4 and the vibration device 2 are mounted, and the peripheral edges of the thin plate portions 32, 32b. It has frame portions 31, 31a, which are supporting portions. The thin plate portions 32, 32b on which the vibration speaker 4 is placed vibrate with an amplitude larger than the vibration of the frame portions 31, 31a, and the vibrating device 2 can be vibrated more effectively.

(3) Further, it is preferable that the vibration speaker 4 is provided with a suction cup 49 which is a suction unit that sucks on the vibration table 3. By adsorbing the suction cup 49 to the vibration table 3, the vibration of the vibration table 3 is performed more effectively than when the suction cup 49 is simply placed. Further, the vibration speaker 4 can be easily fixed to the vibration table 3.

(4) Further, a controller 5 which is a control unit that generates a vibration signal and outputs the vibration signal to the vibration speaker 4 may be further provided. The vibration speaker 4 vibrates with the vibration signal output from the controller 5. By providing the controller 5 separately from the vibrating speaker 4, the operability of the vibrating speaker 4 is improved.

(5) Further, the controller 5 which is a control unit is composed of a mobile communication device having a short-range wireless communication function, a vibration signal is generated by a function generator application installed in the mobile communication device, and vibration is performed by short-range wireless communication. The signal may be transmitted to the vibration speaker 4. Cost reduction can be achieved by using a mobile communication device in which a function generator application is installed instead of the dedicated controller 5.

(6) In the method of presenting the drive performance of the vibration device 2 having the MEMS structure, the vibration speaker 4 and the vibration device 2 having the MEMS structure are placed on the vibration table 3, and the vibration signal is applied to the vibration speaker 4 to apply the vibration. The shaking table 3 is vibrated, and the output of the vibrating device 2 excited by the vibration of the shaking table 3 is received to present the driving performance of the vibrating device 2. Since the drive performance of the vibration device 2 is presented only by placing the vibration device 2 on the vibration table 3 which is vibrated by the inexpensive vibration speaker 4, the drive performance of the vibration device 2 can be presented easily at low cost. It can be carried out.

Although various embodiments and modifications have been described above, the present invention is not limited to these contents. Other aspects conceivable within the scope of the technical idea of the present invention are also included within the scope of the present invention.

1 ... Test device, 2 ... Vibration device, 3, 3A, 3B ... Vibration table, 4 ... Vibration speaker, 5 ... Controller, 6 ... Measuring device, 31, 31b ... Frame part, 32, 32b ... Thin plate part, 48 ... Vibrating part, 49 ... Sucker

Claims (7)

A vibration speaker driven by a vibration signal and
A vibration table on which a vibration device having a MEMS structure is mounted and the vibration of the vibration speaker is transmitted, and
A test device for a vibration device having a MEMS structure, comprising a presentation unit that receives an output of the vibration device that is vibrated by the vibration of the vibration table and presents the driving performance of the vibration device. In the test apparatus for a vibration device having the MEMS structure according to claim 1.
The vibration table has a vibration plate on which the vibration speaker and the vibration device are placed, and a support portion that supports the peripheral edge of the vibration plate.
A test device for a vibrating device having a MEMS structure, in which the diaphragm vibrates with an amplitude larger than that of the support portion. In the test apparatus for a vibration device having the MEMS structure according to claim 1.
The vibration speaker is
The housing installed at the installation location of the vibration speaker and
A vibrating portion in which the vibration table is fixed and is exposed to the outside from the housing and vibrates with respect to the housing.
A test device for a vibration device having a MEMS structure, which is provided in the housing and includes a drive unit that vibrates the vibration unit. In the test apparatus for a vibration device having the MEMS structure according to any one of claims 1 to 3.
The vibration speaker is a test device for a vibration device having a MEMS structure, which includes a suction portion that sucks on the vibration table. In the test apparatus for a vibration device having the MEMS structure according to any one of claims 1 to 4.
A control unit that generates the vibration signal and outputs the vibration signal to the vibration speaker is further provided.
The vibration speaker is a test device for a vibration device having a MEMS structure that vibrates with the vibration signal output from the control unit. In the test apparatus for a vibration device having the MEMS structure according to claim 5.
The control unit is a mobile communication device having a short-range wireless communication function, generates the vibration signal by a function generator application installed in the mobile communication device, and transmits the vibration signal to the vibration speaker by short-range wireless communication. A test device for a vibrating device having a MEMS structure to transmit. A vibration speaker and a vibration device having a MEMS structure are placed on a vibration table.
A vibration signal is applied to the vibration speaker to vibrate the vibration table.
A method for presenting the drive performance of a vibration device having a MEMS structure, which receives the output of the vibration device excited by the vibration of the vibration table and presents the drive performance of the vibration device.

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