JP2021056071A - Pressure detection unit and pressure sensor using the same - Google Patents

Pressure detection unit and pressure sensor using the same Download PDF

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Publication number
JP2021056071A
JP2021056071A JP2019178661A JP2019178661A JP2021056071A JP 2021056071 A JP2021056071 A JP 2021056071A JP 2019178661 A JP2019178661 A JP 2019178661A JP 2019178661 A JP2019178661 A JP 2019178661A JP 2021056071 A JP2021056071 A JP 2021056071A
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pressure
pressure detection
housing
detection device
detection unit
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修 高月
Osamu Takatsuki
修 高月
倫久 青山
Tsunehisa Aoyama
倫久 青山
元桐 向井
Gento Mukai
元桐 向井
開 荻原
Kai Ogiwara
開 荻原
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Fujikoki Corp
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Fujikoki Corp
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Priority to JP2019178661A priority Critical patent/JP2021056071A/en
Priority to PCT/JP2020/035351 priority patent/WO2021065554A1/en
Priority to CN202080044863.2A priority patent/CN114424038A/en
Publication of JP2021056071A publication Critical patent/JP2021056071A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor

Abstract

To provide a pressure detection unit with which it is possible to reduce costs while effectively suppressing the influence of static electricity, and a pressure sensor that uses this unit.SOLUTION: In the pressure detection unit, a housing provided inside of a pressure receiving space and formed from a conductive material includes a bottomed cylinder part and a lid part for shielding an open end of the bottomed cylinder part, and a pressure detection device is arranged inside of an opening that allows the inside and outside of the housing to communicate, the housing being electrically connected to one of terminal pins connected to external wiring and maintained at zero potential. Even when a liquid medium filled in the pressure receiving space is charged with electricity by an external environment, as the pressure detection device is enclosed with the housing maintained at zero potential, the charging with electricity is avoided and the occurrence of output malfunction, etc., attributable to electrical charging of the pressure detection device is prevented.SELECTED DRAWING: Figure 2

Description

本発明は、圧力検出ユニット及びこれを用いた圧力センサに関する。 The present invention relates to a pressure detection unit and a pressure sensor using the same.

ダイアフラムで区画されてオイルが封入された受圧室内に半導体型圧力検出装置を収容した液封入式の圧力センサは、冷凍冷蔵装置や空調装置に装備されて冷媒圧力を検知し、また産業用機器に装備されて各種の流体圧力を検知するために使用されている。 A liquid-filled pressure sensor, which houses a semiconductor-type pressure detector in a pressure receiving chamber partitioned by a diaphragm and filled with oil, is installed in refrigerating and cooling equipment and air-conditioning equipment to detect refrigerant pressure, and is also used in industrial equipment. It is equipped and used to detect various fluid pressures.

半導体型圧力検出装置は、上記受圧室内に配置され、受圧空間内の圧力変化を圧力検出素子により電気信号に変換して外部に出力する機能を有している。 The semiconductor type pressure detection device is arranged in the pressure receiving chamber and has a function of converting a pressure change in the pressure receiving space into an electric signal by a pressure detecting element and outputting it to the outside.

受圧空間内に配置されるダイアフラムは、可撓性の金属板である。このため、半導体型圧力検出装置の圧力検出素子とダイアフラムとの間で電位差が発生して、封入されたオイルが静電気を帯びると、圧力検出素子あるいはその出力信号に不具合が生ずる場合がある。圧力検出素子とダイアフラムとの間の電位差は、例えば圧力センサが取り付けられる配管系から伝達される高周波ノイズなどに起因して生じうる。 The diaphragm arranged in the pressure receiving space is a flexible metal plate. Therefore, when a potential difference is generated between the pressure detection element of the semiconductor type pressure detection device and the diaphragm and the enclosed oil is charged with static electricity, a problem may occur in the pressure detection element or its output signal. The potential difference between the pressure sensing element and the diaphragm can be caused, for example, by high frequency noise transmitted from the piping system to which the pressure sensor is attached.

そこで、上記圧力検出素子が収容されている受圧空間内に導電性部材（除電板）をさらに配置し、この導電性部材を、ボンディングワイヤを用いてアース端子ピンに接続することにより、上記不具合の解消を図る圧力センサが下記の特許文献１に開示されている。 Therefore, by further arranging a conductive member (static elimination plate) in the pressure receiving space in which the pressure detecting element is housed and connecting the conductive member to the ground terminal pin using a bonding wire, the above-mentioned problem can be solved. A pressure sensor for eliminating the problem is disclosed in Patent Document 1 below.

特開２０１４−１７８１２５号公報Japanese Unexamined Patent Publication No. 2014-178125

ところで、上記不具合の解消を図るために、受圧空間に封入された絶縁性媒質としてのオイル全体の帯電を抑制する必要はなく、少なくとも半導体型圧力検出装置の周囲におけるオイルの帯電を抑制できれば足りる。また、オイルは比較的高価であるため、圧力センサでの使用量を減らしてコスト低減を図りたいとの要請もある。 By the way, in order to solve the above-mentioned problems, it is not necessary to suppress the charge of the entire oil as an insulating medium enclosed in the pressure receiving space, and it is sufficient if at least the charge of the oil around the semiconductor type pressure detection device can be suppressed. In addition, since oil is relatively expensive, there is also a demand to reduce the amount used in the pressure sensor to reduce the cost.

本発明は、かかる課題に鑑みてなされたものであり、静電気の影響を有効に抑えつつ、コスト低減を図れる圧力検出ユニット及びこれを用いた圧力センサを提供することを目的とする。 The present invention has been made in view of such a problem, and an object of the present invention is to provide a pressure detection unit capable of reducing costs while effectively suppressing the influence of static electricity, and a pressure sensor using the same.

上記目的を達成するために、本発明の圧力検出ユニットは、
流体の圧力を受けるダイアフラムと、
流体の圧力を受けるダイアフラムと、
前記ダイアフラムとの間に絶縁性媒質が封入された受圧空間を形成するベースと、
前記受圧空間内において前記ベースに配置され、前記絶縁性媒質に伝達された圧力を検出して電気的圧力信号に変換する圧力検出装置と、
前記ベースを貫通して配置され、前記受圧空間内で前記圧力検出装置と電気的に接続された複数の端子ピンと、
前記受圧空間内に設けられ導電性素材から形成された筐体と、を有し、
前記筐体は、有底筒部と、前記有底筒部の開放端を遮蔽する蓋部と、を備え、前記端子ピンのいずれかに電気的に接続されており、
前記圧力検出装置が、前記筐体の内外を連通する開口内に配置されている、ことを特徴とする。 In order to achieve the above object, the pressure detection unit of the present invention
The diaphragm that receives the pressure of the fluid and
The diaphragm that receives the pressure of the fluid and
A base that forms a pressure receiving space in which an insulating medium is sealed between the diaphragm and the diaphragm.
A pressure detection device arranged on the base in the pressure receiving space, detecting the pressure transmitted to the insulating medium, and converting the pressure into an electrical pressure signal.
A plurality of terminal pins arranged through the base and electrically connected to the pressure detector in the pressure receiving space.
It has a housing provided in the pressure receiving space and formed of a conductive material.
The housing includes a bottomed cylinder portion and a lid portion that shields the open end of the bottomed cylinder portion, and is electrically connected to any of the terminal pins.
The pressure detecting device is arranged in an opening that communicates with the inside and outside of the housing.

本発明によれば、静電気の影響を有効に抑えつつ、コスト低減を図れる圧力検出ユニット及びこれを用いた圧力センサを提供することができる。 According to the present invention, it is possible to provide a pressure detection unit capable of reducing costs while effectively suppressing the influence of static electricity, and a pressure sensor using the same.

図１は、本実施形態の圧力センサを示す縦断面図である。FIG. 1 is a vertical cross-sectional view showing the pressure sensor of the present embodiment. 図２は、圧力センサが備える圧力検出ユニットの縦断面図である。FIG. 2 is a vertical cross-sectional view of a pressure detection unit included in the pressure sensor. 図３は、図２のＡ−Ａ線における断面を底面視した図である。FIG. 3 is a bottom view of the cross section taken along the line AA of FIG. 図４は、ベースに固定される筐体の分解斜視図である。FIG. 4 is an exploded perspective view of the housing fixed to the base.

以下、図面を参照して、本発明にかかる実施の形態を説明する。図１は、本実施形態の圧力センサ１を示す縦断面図である。図２は、圧力センサ１が備える圧力検出ユニット２の縦断面図である。図３は、図２のＡ−Ａ線における断面を底面視した図である。 Hereinafter, embodiments according to the present invention will be described with reference to the drawings. FIG. 1 is a vertical cross-sectional view showing the pressure sensor 1 of the present embodiment. FIG. 2 is a vertical cross-sectional view of the pressure detection unit 2 included in the pressure sensor 1. FIG. 3 is a bottom view of the cross section taken along the line AA of FIG.

図１に示すように、圧力センサ１は、横断面が例えば円管状である大筒部１０ａと、横断面が円環状、長円状、楕円状等である小筒部１０ｂとが同軸に配列され、それぞれの端部同士を、段部１０ｃを介して成形した形状の樹脂製のカバー１０を有する。カバー１０の大筒部１０ａの内側には、圧力検出ユニット２が取り付けられている。 As shown in FIG. 1, in the pressure sensor 1, for example, a large cylinder portion 10a having a circular tubular cross section and a small tubular portion 10b having a cross section having an annular shape, an oval shape, an elliptical shape, or the like are arranged coaxially. , Each end portion has a resin cover 10 having a shape formed via a step portion 10c. A pressure detection unit 2 is attached to the inside of the large cylinder portion 10a of the cover 10.

圧力検出ユニット２は、図示されない流体流入管が接続される接続ナット２０を支持する皿状の取付部材３０と、取付部材３０に対向配置される有底筒状のベース４０と、取付部材３０とベース４０とにより外周が挟持される金属製のダイアフラム５０とを備えている。取付部材３０及びダイアフラム５０は、例えばステンレス合金などより形成することができる。 The pressure detection unit 2 includes a dish-shaped mounting member 30 that supports a connection nut 20 to which a fluid inflow pipe (not shown) is connected, a bottomed tubular base 40 that is arranged to face the mounting member 30, and a mounting member 30. It includes a metal diaphragm 50 whose outer circumference is sandwiched between the base 40 and the base 40. The mounting member 30 and the diaphragm 50 can be formed of, for example, a stainless alloy.

ベース４０とダイアフラム５０で区画される受圧空間（受圧室）５２には、オイルなどの絶縁性の液状媒質が充填される。 The pressure receiving space (pressure receiving chamber) 52 partitioned by the base 40 and the diaphragm 50 is filled with an insulating liquid medium such as oil.

ベース４０は、図２において、ＳＵＳなどの導電性素材から形成された円筒部(導電部)４１と、円筒部４１の内側全周に固着されたハーメチックシールからなる円筒状の絶縁部４２とを有する。絶縁部４２は、上下方向に延在する３つの嵌合孔４２ａを具備する。嵌合孔４２ａには、後述する端子ピン７０，７２が密封的に嵌合している。ベース４０には、筐体１００が固定されている。 In FIG. 2, the base 40 has a cylindrical portion (conductive portion) 41 formed of a conductive material such as SUS and a cylindrical insulating portion 42 formed of a hermetic seal fixed to the entire inner circumference of the cylindrical portion 41. Have. The insulating portion 42 includes three fitting holes 42a extending in the vertical direction. Terminal pins 70 and 72, which will be described later, are hermetically fitted into the fitting holes 42a. The housing 100 is fixed to the base 40.

図４は、ベース４０に固定される筐体１００の分解斜視図である。アルミニウムなどの導電性素材から形成される筐体１００は、円筒状の有底筒部１０１と、円盤状の蓋部１１０とを有する。有底筒部１０１は、円形の底壁１０２と、円管状の周壁１０３とを連設してなるが、複数の部品を導電性接着剤などを用いて固着することにより形成されてもよい。底壁１０２が、接着剤を介してベース４０の絶縁部４２に固着される。 FIG. 4 is an exploded perspective view of the housing 100 fixed to the base 40. The housing 100 formed of a conductive material such as aluminum has a cylindrical bottomed tubular portion 101 and a disk-shaped lid portion 110. The bottomed tubular portion 101 is formed by connecting a circular bottom wall 102 and a circular tubular peripheral wall 103 in series, but may be formed by fixing a plurality of parts with a conductive adhesive or the like. The bottom wall 102 is fixed to the insulating portion 42 of the base 40 via an adhesive.

底壁１０２には、それぞれ筐体１００の内外を連通する、矩形状の開口１０４と３つの貫通孔１０５が形成されている。図３に示すように、開口１０４の内側には、隙間を空けて圧力検出装置６４が配置され、また貫通孔１０５の内側には、隙間を空けて端子ピン７０，７２が配置されている。圧力検出装置６４の表面(検出部)は、底壁１０２より蓋部１１０側に突出していると好ましい。 The bottom wall 102 is formed with a rectangular opening 104 and three through holes 105 that communicate with each other inside and outside the housing 100. As shown in FIG. 3, the pressure detection device 64 is arranged with a gap inside the opening 104, and the terminal pins 70 and 72 are arranged with a gap inside the through hole 105. It is preferable that the surface (detection portion) of the pressure detection device 64 projects toward the lid portion 110 from the bottom wall 102.

蓋部１１０は、円盤状の本体部１１１と、本体部１１１より薄い厚さで且つ本体部１１１から径方向外側に張り出したフランジ部１１２とを連接してなる。本体部１１１は、３つの連通孔１１３を有している。連通孔１１３は、取付部材３０側から見て（底面視で）、圧力検出装置６４と重ならないよう、外周近傍に設けられている。すなわち、連通孔１１３は圧力検出装置６４と対向していないため、ダイアフラム５０側から侵入するノイズに直接さらされることがない。 The lid portion 110 is formed by connecting a disk-shaped main body portion 111 and a flange portion 112 having a thickness thinner than the main body portion 111 and projecting outward in the radial direction from the main body portion 111. The main body 111 has three communication holes 113. The communication hole 113 is provided in the vicinity of the outer periphery so as not to overlap with the pressure detecting device 64 when viewed from the mounting member 30 side (viewed from the bottom surface). That is, since the communication hole 113 does not face the pressure detection device 64, it is not directly exposed to noise entering from the diaphragm 50 side.

図１において、圧力検出素子（半導体チップ）を備える圧力検出装置６４が、受圧空間５２側における、ベース４０の絶縁部４２の中央に固定されている。 In FIG. 1, a pressure detecting device 64 including a pressure detecting element (semiconductor chip) is fixed to the center of an insulating portion 42 of the base 40 on the pressure receiving space 52 side.

図３において、圧力検出装置６４の圧力検出素子は、その外周近傍にボンディングパッド（電極）として、センサ入力電源パッド６４ａ、グラウンドパッド６４ｂ及びセンサ出力パッド６４ｃを備えている。ただし、ボンディングパッドの数は３つに限られない。本実施形態では、センサ入力電源パッド６４ａは５Ｖに維持され、グラウンドパッド６４ｂは０Ｖに維持され、センサ出力パッド６４ｃの電圧は、検出した圧力に応じて０Ｖ以上、５Ｖ以下（好ましくは０．５Ｖ以上、４．５Ｖ以下）の範囲で変化する。また、ボンディングパッドの配置は、以上に限られない。 In FIG. 3, the pressure detection element of the pressure detection device 64 includes a sensor input power supply pad 64a, a ground pad 64b, and a sensor output pad 64c as bonding pads (electrodes) in the vicinity of the outer periphery thereof. However, the number of bonding pads is not limited to three. In the present embodiment, the sensor input power pad 64a is maintained at 5V, the ground pad 64b is maintained at 0V, and the voltage of the sensor output pad 64c is 0V or more and 5V or less (preferably 0.5V) depending on the detected pressure. Above, it changes in the range of 4.5V or less). Further, the arrangement of the bonding pad is not limited to the above.

半導体形の圧力検出装置６４の周囲には、ベース４０を貫通するようにして複数本（この例においては３本）の端子ピン７０、７２が配置されている。端子ピン７０、７２は、上述したように、絶縁部４２の嵌合孔４２ａに嵌合し絶縁封止されている。 A plurality of (three in this example) terminal pins 70 and 72 are arranged around the semiconductor-type pressure detecting device 64 so as to penetrate the base 40. As described above, the terminal pins 70 and 72 are fitted into the fitting holes 42a of the insulating portion 42 and are insulated and sealed.

複数の端子ピンのうちの１つは、グラウンド用の端子ピン７０である。グラウンド以外の端子ピン７２と、１本のグラウンド用の端子ピン７０は、図１に示す中継基板９０の配線に接続される。 One of the plurality of terminal pins is a ground terminal pin 70. The terminal pin 72 other than the ground and one terminal pin 70 for the ground are connected to the wiring of the relay board 90 shown in FIG.

中継基板９０につながるリード線９４は、当該圧力センサ１が設置された冷凍冷蔵装置や空調装置等の制御盤内に設けられた、図示されない電気回路に接続される。かかる電気回路から、リード線９４、端子ピン７０、７２を介して圧力検出装置６４に電源電圧を印加することができ、また圧力検出用の信号を出力できる。 The lead wire 94 connected to the relay board 90 is connected to an electric circuit (not shown) provided in a control panel of a refrigerating / cooling device, an air conditioner, or the like in which the pressure sensor 1 is installed. From such an electric circuit, a power supply voltage can be applied to the pressure detection device 64 via the lead wire 94, the terminal pins 70, and 72, and a signal for pressure detection can be output.

図３において、半導体形の圧力検出装置６４における、グラウンドパッド６４ｂ以外の、センサ入力電源パッド６４ａ、センサ出力パッド６４ｃと、端子ピン７２とは、ボンディングワイヤ８０で接続（結線）される。また本実施形態では、グラウンドパッド６４ｂが、筐体１００の底壁１０２にボンディングワイヤ８２を介して接続（結線）されるとともに、底壁１０２とグラウンド用の端子ピン７０とが、ボンディングワイヤ８１を介して接続（結線）される。 In FIG. 3, in the semiconductor type pressure detection device 64, the sensor input power supply pad 64a and the sensor output pad 64c other than the ground pad 64b and the terminal pin 72 are connected (connected) by a bonding wire 80. Further, in the present embodiment, the ground pad 64b is connected (connected) to the bottom wall 102 of the housing 100 via the bonding wire 82, and the bottom wall 102 and the terminal pin 70 for the ground connect the bonding wire 81. It is connected (connected) via.

図１，２において、接続ナット２０の上端に円筒部２０ａが突出して形成されており、取付部材３０の中央に形成された円孔３０ａにろう付けなどの手法により密封的に嵌合固着されている。円筒部２０ａの内部には貫通路２０ｂが形成されていて、これを介して、取付部材３０の内部と接続ナット２０の内部とは連通している。 In FIGS. 1 and 2, a cylindrical portion 20a is formed so as to project from the upper end of the connection nut 20, and is hermetically fitted and fixed to a circular hole 30a formed in the center of the mounting member 30 by a method such as brazing. There is. A gangway 20b is formed inside the cylindrical portion 20a, through which the inside of the mounting member 30 and the inside of the connecting nut 20 communicate with each other.

組み付け時には、不図示の型に対して円筒部４１と端子ピン７０，７２とを所定の位置に配置した後、円筒部４１内に液状のハーメチックシールを注入し固化させて、絶縁部４２を形成する。更に離型後に、圧力検出装置６４を絶縁部４２に固着し、図３に示す位置関係を維持しつつ、有底筒部１０１を絶縁部４２に固着する。その後、上述したようにワイヤボンディングを行った後、有底筒部１０１の開放端を蓋部１１０で遮蔽する。具体的には、有底筒部１０１の開放端と蓋部１１０のフランジ部１１２との間に導電性接着剤を付与して、両者を接着する。これにより、圧力検出装置６４が面する空間は、グラウンドと同電位となる導電性素材から形成された筐体１００により周囲を囲われることとなる。 At the time of assembly, after the cylindrical portion 41 and the terminal pins 70 and 72 are arranged at predetermined positions with respect to the mold (not shown), a liquid hermetic seal is injected into the cylindrical portion 41 and solidified to form the insulating portion 42. To do. Further, after the mold release, the pressure detection device 64 is fixed to the insulating portion 42, and the bottomed cylinder portion 101 is fixed to the insulating portion 42 while maintaining the positional relationship shown in FIG. Then, after performing wire bonding as described above, the open end of the bottomed cylinder portion 101 is shielded by the lid portion 110. Specifically, a conductive adhesive is applied between the open end of the bottomed tubular portion 101 and the flange portion 112 of the lid portion 110 to bond the two. As a result, the space facing the pressure detection device 64 is surrounded by the housing 100 formed of the conductive material having the same potential as the ground.

更に組み付けの一例として、図２に示す状態から天地を逆にして、筐体１００を組み付けたベース４０の円筒部４１の内側にオイルなどの絶縁性媒質を注入する。このとき、注入された絶縁性媒質は、ベース４０内に貯留されると共に、連通孔１１３から筐体１００内へと進入するので、圧力検出装置６４の周囲が絶縁性媒質で満たされる。その後、取付部材３０、ベース４０の円筒部４１，及びダイアフラム５０の外周部を重ねて溶接して溶接部Ｗを形成することで、これらを一体化できる。尚、絶縁性媒質の注入方法は以上に限られない。 Further, as an example of assembly, the top and bottom are reversed from the state shown in FIG. 2, and an insulating medium such as oil is injected into the inside of the cylindrical portion 41 of the base 40 to which the housing 100 is assembled. At this time, the injected insulating medium is stored in the base 40 and enters the housing 100 through the communication hole 113, so that the periphery of the pressure detection device 64 is filled with the insulating medium. After that, the mounting member 30, the cylindrical portion 41 of the base 40, and the outer peripheral portion of the diaphragm 50 are overlapped and welded to form the welded portion W, whereby these can be integrated. The method of injecting the insulating medium is not limited to the above.

図１において、端子ピン７０，７２を中継基板９０の配線層にはんだ付けし、リード線９４に接続したコネクタ９２を中継基板９０に係合させる。その後、リード線９４をカバー１０内に通しつつ、圧力検出ユニット２のベース４０の端部を、カバー１０の大筒部１０ａの内側に形成された段部１０ｄに突き当てる。かかる状態を維持しつつ、大筒部１０ａの下端側及び小筒部１０ｂの上端側（リード線９４が導出される側）からカバー１０の内部に樹脂Ｐを充填し、これを固化させる。これによりカバー１０内に、圧力検出ユニット２の電気的構造部が密封固定される。 In FIG. 1, the terminal pins 70 and 72 are soldered to the wiring layer of the relay board 90, and the connector 92 connected to the lead wire 94 is engaged with the relay board 90. Then, while passing the lead wire 94 through the cover 10, the end portion of the base 40 of the pressure detection unit 2 is abutted against the step portion 10d formed inside the large cylinder portion 10a of the cover 10. While maintaining such a state, the resin P is filled inside the cover 10 from the lower end side of the large cylinder portion 10a and the upper end side of the small cylinder portion 10b (the side from which the lead wire 94 is led out) and solidified. As a result, the electrical structure of the pressure detection unit 2 is sealed and fixed in the cover 10.

圧力検出装置６４は、外部の電気回路から入力電源用の端子ピン７２を介して給電されることで動作する。流体が接続ナット２０に導入されて、取付部材３０の内側の流体導入室３２内に進入すると、流体圧力でダイアフラム５０が弾性変形し、受圧空間５２内の絶縁性媒質を加圧する。圧力検出装置６４は、連通孔１１３を介して筐体１００内に出入り可能な絶縁性媒質の圧力変動を検知して電気信号に変換し、端子ピン７２を介して電気信号、すなわち圧力検出用の信号を外部に出力する。かかる圧力検出用の信号を入力した外部の電気回路は、それに基づき、接続ナット２０に導入された流体の圧力を精度よく検出することができる。 The pressure detection device 64 operates by supplying power from an external electric circuit via a terminal pin 72 for an input power source. When the fluid is introduced into the connecting nut 20 and enters the fluid introduction chamber 32 inside the mounting member 30, the diaphragm 50 is elastically deformed by the fluid pressure and pressurizes the insulating medium in the pressure receiving space 52. The pressure detection device 64 detects the pressure fluctuation of the insulating medium that can enter and exit the housing 100 through the communication hole 113, converts it into an electric signal, and converts the electric signal into an electric signal, that is, for pressure detection via the terminal pin 72. Output the signal to the outside. The external electric circuit that has input the signal for pressure detection can accurately detect the pressure of the fluid introduced into the connecting nut 20 based on the signal.

本実施形態においては、図１、２に示すように、半導体形の圧力検出装置６４の周囲が筐体１００で囲われている。又、筐体１００の底壁１０２と、グラウンドパッド６４ｂとは、ボンディングワイヤ８２により接続されており、また底壁１０２と、グラウンド用の端子ピン７０とは、ボンディングワイヤ８１により接続されている。 In the present embodiment, as shown in FIGS. 1 and 2, the semiconductor-type pressure detection device 64 is surrounded by the housing 100. Further, the bottom wall 102 of the housing 100 and the ground pad 64b are connected by a bonding wire 82, and the bottom wall 102 and the ground terminal pin 70 are connected by a bonding wire 81.

更に、グラウンド用の端子ピン７０は、リード線９４（図１）を介して当該圧力センサ１が設置された冷凍冷蔵装置や空調装置等の制御盤内に設けられた電気回路のゼロ電位に導通される。つまり、導電性素材からなる筐体１００全体はゼロ電位に維持される。 Further, the ground terminal pin 70 conducts to the zero potential of an electric circuit provided in a control panel of a refrigerating / cooling device, an air conditioner, or the like in which the pressure sensor 1 is installed via a lead wire 94 (FIG. 1). Will be done. That is, the entire housing 100 made of the conductive material is maintained at zero potential.

本実施形態によれば、外部環境により受圧空間５２内に充填された絶縁性媒質に帯電が生じた場合においても、圧力検出装置６４が、ゼロ電位に維持された筐体１００により囲われているため、帯電の影響を回避して、圧力検出装置６４の帯電に起因する出力誤動作などの発生が防止される。 According to the present embodiment, the pressure detection device 64 is surrounded by the housing 100 maintained at zero potential even when the insulating medium filled in the pressure receiving space 52 is charged by the external environment. Therefore, the influence of charging is avoided, and the occurrence of output malfunction due to charging of the pressure detecting device 64 is prevented.

また、圧力検出装置６４及び筐体１００は、円筒部４１に接することなく、絶縁部４２のみに固定されているので、接続ナット２０などを介して伝達されるノイズが、圧力検出装置６４に伝達されることを有効に阻止できる。 Further, since the pressure detection device 64 and the housing 100 are fixed only to the insulating portion 42 without being in contact with the cylindrical portion 41, the noise transmitted through the connection nut 20 or the like is transmitted to the pressure detection device 64. It can be effectively prevented from being done.

更に本実施形態によれば、受圧空間５２内に筐体１００を設けることで、その体積分、絶縁性媒質の使用量を抑えることができ、それによりコスト削減に貢献する。 Further, according to the present embodiment, by providing the housing 100 in the pressure receiving space 52, it is possible to suppress the volume integral and the amount of the insulating medium used, which contributes to cost reduction.

本発明は、以上述べた実施形態に限られない。例えば筐体１００に電気的接続される端子ピンは、センサ入力電源パッド６４ａ、又はセンサ出力パッド６４ｃに接続される端子ピン７２であっても良い。また、上述した実施の形態とは逆に、筐体１００の蓋部１１０をベース４０側に配置し、有底筒部１０１をダイアフラム５０側に配置してもよい。 The present invention is not limited to the embodiments described above. For example, the terminal pin electrically connected to the housing 100 may be the sensor input power pad 64a or the terminal pin 72 connected to the sensor output pad 64c. Further, contrary to the above-described embodiment, the lid portion 110 of the housing 100 may be arranged on the base 40 side, and the bottomed cylinder portion 101 may be arranged on the diaphragm 50 side.

また、蓋部１１０の直径は、筐体１００の直径と異なっていてもよい。すなわち、蓋部１１０の直径は、筐体１００の直径と同一のみならず、それより短くても長くてもよい。蓋部１１０の直径を筐体１００の直径より短くする場合、例えば筐体１００の内側に段差部を設け、この段差部に蓋部１１０を嵌合載置することができる。この場合、段差部の直径を蓋部１１０の本体部１１１の直径とすることで、フランジ部１１２を省略できる。 Further, the diameter of the lid portion 110 may be different from the diameter of the housing 100. That is, the diameter of the lid 110 is not only the same as the diameter of the housing 100, but may be shorter or longer. When the diameter of the lid portion 110 is made shorter than the diameter of the housing 100, for example, a step portion may be provided inside the housing 100, and the lid portion 110 may be fitted and placed on the step portion. In this case, the flange portion 112 can be omitted by setting the diameter of the step portion to the diameter of the main body portion 111 of the lid portion 110.

１ 圧力センサ
２ 圧力検出ユニット
１０ カバー
２０ 接続ナット
３０ 取付部材
３２ 流体導入室
４０ ベース
５０ ダイアフラム
５２ 受圧空間
６４ 圧力検出装置
７０ グラウンド用の端子ピン
７２ 端子ピン
８０ ボンディングワイヤ
８１、８２ グラウンド用のボンディングワイヤ
９０ 中継基板
９２ コネクタ
９４ リード線
１００ 筐体
１０１ 有底筒部
１１０ 蓋部

1 Pressure sensor 2 Pressure detection unit 10 Cover 20 Connecting nut 30 Mounting member 32 Fluid introduction chamber 40 Base 50 Diaphragm 52 Pressure receiving space 64 Pressure detection device 70 Terminal pin for ground 72 Terminal pin 80 Bonding wire 81, 82 Bonding wire for ground 90 Relay board 92 Connector 94 Lead wire 100 Housing 101 Bottomed cylinder 110 Lid

Claims (5)

流体の圧力を受けるダイアフラムと、
前記ダイアフラムとの間に絶縁性媒質が封入された受圧空間を形成するベースと、
前記受圧空間内において前記ベースに配置され、前記絶縁性媒質に伝達された圧力を検出して電気的圧力信号に変換する圧力検出装置と、
前記ベースを貫通して配置され、前記受圧空間内で前記圧力検出装置と電気的に接続された複数の端子ピンと、
前記受圧空間内に設けられ導電性素材から形成された筐体と、を有し、
前記筐体は、有底筒部と、前記有底筒部の開放端を遮蔽する蓋部と、を備え、前記端子ピンのいずれかに電気的に接続されており、
前記圧力検出装置が、前記筐体の内外を連通する開口内に配置されている、
ことを特徴とする圧力検出ユニット。 The diaphragm that receives the pressure of the fluid and
A base that forms a pressure receiving space in which an insulating medium is sealed between the diaphragm and the diaphragm.
A pressure detection device arranged on the base in the pressure receiving space, detecting the pressure transmitted to the insulating medium, and converting the pressure into an electrical pressure signal.
A plurality of terminal pins arranged through the base and electrically connected to the pressure detector in the pressure receiving space.
It has a housing provided in the pressure receiving space and formed of a conductive material.
The housing includes a bottomed cylinder portion and a lid portion that shields the open end of the bottomed cylinder portion, and is electrically connected to any of the terminal pins.
The pressure detection device is arranged in an opening that communicates with the inside and outside of the housing.
A pressure detection unit characterized by that. 前記ベースは、前記複数の端子ピンが貫通する絶縁部と、前記絶縁部の周囲に配置された導電部とを有し、前記筐体と前記圧力検出装置は、前記絶縁部に固定されている、
ことを特徴とする請求項１に記載の圧力検出ユニット。 The base has an insulating portion through which the plurality of terminal pins penetrate and a conductive portion arranged around the insulating portion, and the housing and the pressure detecting device are fixed to the insulating portion. ,
The pressure detection unit according to claim 1. 前記有底筒部の底壁には、前記開口と、前記端子ピンが挿通される貫通孔とが形成され、前記蓋部には、前記筐体の内部と外部とを連通する連通孔が形成されている、
ことを特徴とする請求項１又は２に記載の圧力検出ユニット。 The bottom wall of the bottomed cylinder portion is formed with the opening and a through hole through which the terminal pin is inserted, and the lid portion is formed with a communication hole for communicating the inside and the outside of the housing. Has been
The pressure detection unit according to claim 1 or 2. 前記筐体が電気的に接続される端子ピンは、前記圧力検出装置のグラウンドに接続された端子ピン、前記圧力検出装置の電源電圧端子に接続された端子ピン、または前記圧力検出装置の電気的圧力信号を出力する端子ピンである、
ことを特徴とする請求項１〜３のいずれか一項に記載の圧力検出ユニット。 The terminal pin to which the housing is electrically connected is a terminal pin connected to the ground of the pressure detection device, a terminal pin connected to a power supply voltage terminal of the pressure detection device, or an electrical terminal pin of the pressure detection device. A terminal pin that outputs a pressure signal,
The pressure detection unit according to any one of claims 1 to 3. 請求項１〜４のいずれか一項に記載の圧力検出ユニットを有することを特徴とする圧力センサ。


A pressure sensor comprising the pressure detection unit according to any one of claims 1 to 4.
JP2019178661A 2019-09-30 2019-09-30 Pressure detection unit and pressure sensor using the same Pending JP2021056071A (en)

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