JP2021025867A - Magnetic particle inspection device and magnetic particle inspection method - Google Patents

Abstract

To provide a magnetic particle inspection device which can easily distinguish a portion where a flaw is formed from a portion where the flaw is not formed on a surface of an inspection object and accurately inspect the flaw.SOLUTION: A magnetic particle inspection device comprises: a magnetization unit 1 which magnetizes an inspection object MA1; an inspection liquid supply unit 2 which supplies inspection liquid containing fluorescent magnetic particles to the inspection object MA1 to make the fluorescent magnetic particles adhere to the surface of the inspection object MA1; a cleaning liquid supply unit 4 which supplies cleaning liquid FL2 to the inspection object MA1 to wash out the excessive fluorescent magnetic particles; a measurement unit 7 which emits the ultraviolet ray to the surface of the inspection object MA1, images the fluorescence light emitted by the fluorescent magnetic particles and measures the luminance of an acquired image IM1; and an adjustment unit which adjusts the supply of the cleaning liquid FL2 to the inspection object MA1 such that the measurement value of the luminance LM1 of the image IM1 measured by the measurement unit 7 falls within a prescribed range.SELECTED DRAWING: Figure 1

Description

The present invention relates to a magnetic particle flaw detector and a magnetic particle flaw detector method.

A magnetic powder containing a fluorescent substance is attached to the surface of the object to be inspected, and the fluorescent substance contained in the magnetic powder adhering to the surface of the object to be inspected is photographed to emit fluorescence. A magnetic particle flaw detector that detects objects is used.

In such a magnetic particle inspection device, the fluorescent magnetic powder supplied to the surface of the object to be inspected adheres not only to the part of the surface of the object to be inspected where scratches are formed but also to the part where scratches are not formed. I have something to do. In such a case, scratches are formed on the surface of the inspected object from the image obtained by imaging the fluorescence emitted by the fluorescent substance contained in the fluorescent magnetic powder adhering to the surface of the inspected object. It is difficult to distinguish between the part that is present and the part that is not scratched. Therefore, a method is conceivable in which a test solution containing fluorescent magnetic powder is supplied to the surface of the object to be inspected to adhere the magnetic powder, and then a cleaning solution is supplied to wash away excess fluorescent magnetic powder among the fluorescent magnetic powder adhering to the surface. Be done.

According to Patent Document 1, in a magnetic particle inspection method for a metal material, a magnetic powder solution is sprayed while magnetizing the material to be inspected, and then water is sprinkled on the surface of the material to be inspected in a state where the magnetization force is increased from the time when the magnetic powder solution is sprayed. A technique for washing away excess magnetic powder liquid excluding the magnetic particle pattern on the surface flaw of the material to be inspected is disclosed.

Japanese Unexamined Patent Publication No. 5-288718

However, even when the cleaning liquid is supplied to wash away the excess fluorescent magnetic powder, the excess fluorescent magnetic powder remains on the surface of the object to be inspected where no scratches are formed, or on the part where the scratches are formed. The adhered fluorescent magnetic powder may be washed away, and it is not possible to easily distinguish between the scratched portion and the non-scratched portion from the captured image, and the scratch cannot be detected accurately.

In order to solve the above-mentioned problems of the prior art, the present invention can easily distinguish between a portion of the surface of the object to be inspected where scratches are formed and a portion where scratches are not formed, and the scratches can be easily identified. It is an object of the present invention to provide a magnetic particle flaw detector and a magnetic particle flaw detector method capable of detecting flaws with high accuracy.

A brief description of typical inventions disclosed in the present application is as follows.

The magnetic particle flaw detector of the present invention includes a magnetizing portion that magnetizes an object to be inspected, an inspection liquid supply unit that supplies an inspection solution containing fluorescent magnetic powder to the object to be inspected, and adheres the fluorescent magnetic powder to the surface of the object to be inspected. It has a cleaning liquid supply unit for supplying a cleaning liquid to the object to be inspected and washing away excess fluorescent magnetic powder among the fluorescent magnetic powder adhering to the surface of the object to be inspected. In addition, the magnetic particle inspection device irradiates the surface of the object to be inspected from which the fluorescent magnetic powder has been washed away with ultraviolet rays, and emits fluorescence to the fluorescent magnetic powder remaining on the surface of the fluorescent magnetic powder, and the fluorescent magnetic powder emits light. The image pickup unit that captures the fluorescence to be acquired and acquires the image, the measurement unit that measures the brightness of the image acquired by the image pickup unit, and the supply of the cleaning liquid to the object to be inspected or the magnetization of the object to be inspected by the magnetized part is adjusted. It has an adjustment unit and an adjustment unit.
Then, the magnetic particle flaw detector may adjust the supply of the cleaning liquid or the magnetization of the object to be inspected by the adjusting unit so that the measured value of the brightness of the image measured by the measuring unit falls within a predetermined range. It is possible.

The magnetic particle flaw detection method of the present invention has the following steps (a) to (g).
(A) A step of magnetizing an object to be inspected, supplying an inspection solution containing fluorescent magnetic powder to the object to be inspected, and adhering the fluorescent magnetic powder to the surface of the object to be inspected.
(B) A step of magnetizing an object to be inspected to which fluorescent magnetic powder is attached to the surface,
(C) A step of supplying a cleaning liquid to the object to be inspected and washing away excess fluorescent magnetic powder adhering to the surface of the object to be inspected.
(D) A step of irradiating the surface of an object to be inspected from which the fluorescent magnetic powder has been washed away with ultraviolet rays, and causing the fluorescent magnetic powder remaining on the surface of the object to be inspected to emit fluorescence.
(E) A step of acquiring an image by imaging the fluorescence emitted by the fluorescent magnetic powder.
(F) Step of measuring the brightness of the acquired image,
(G) A step of adjusting the supply of the cleaning liquid to the object to be inspected or the magnetization of the object to be inspected In the step (g), the measured value of the brightness of the measured image is within a predetermined range. As such, the supply of cleaning liquid or the magnetization of the object to be inspected is adjusted.

According to the magnetic particle flaw detection device and the magnetic particle flaw detection method of the present invention, it is possible to easily distinguish between the scratched portion and the non-scratched portion of the surface of the object to be inspected from the captured image. It is possible to detect scratches with high accuracy.

It is a figure which shows typically the whole of the 1st Embodiment of the magnetic particle inspection apparatus of this invention. It is a figure which shows a part of the 2nd Embodiment of the magnetic particle inspection apparatus of this invention schematically. It is a flow chart which shows a part of the magnetic particle inspection method using the magnetic particle inspection apparatus of this invention. It is a figure which shows a part of the 3rd Embodiment of the magnetic particle inspection apparatus of this invention schematically. It is a figure which shows a part of the 4th Embodiment of the magnetic particle inspection apparatus of this invention schematically.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

It should be noted that the disclosure is merely an example, and those skilled in the art can easily conceive of appropriate changes while maintaining the gist of the invention are naturally included in the scope of the present invention. Further, in order to clarify the description, the drawings may schematically represent the width, thickness, shape, etc. of each part as compared with the embodiment, but this is just an example, and the interpretation of the present invention is used. It is not limited.

Further, in the present specification and each figure, the same elements as those described above with respect to the above-mentioned figures may be designated by the same reference numerals, and detailed description thereof may be omitted as appropriate.

Further, in the drawings used in the embodiments, hatching (shading) added to distinguish the structures may be omitted depending on the drawings.

In the following embodiments, when the range is indicated as "A to B", A or more and B or less are indicated unless otherwise specified.

The magnetic particle flaw detector and the magnetic particle flaw detector according to the embodiment of the present invention described below attach a magnetic powder containing a fluorescent substance to the surface of the object to be inspected, and are contained in the magnetic powder adhering to the surface of the object to be inspected. This is a magnetic particle inspection device and a magnetic particle inspection method for detecting scratches formed on the surface of an object to be inspected based on an image obtained by imaging the fluorescence emitted by the fluorescent substance.

(First Embodiment)
FIG. 1 is a diagram schematically showing the whole of the first embodiment of the magnetic particle flaw detector of the present invention.

As shown in FIG. 1, the magnetic particle flaw detector of the present embodiment includes a magnetizing unit 1, an inspection liquid supply unit 2, a magnetizing unit 3, a cleaning liquid supply unit 4, an irradiation unit 5, and an imaging unit 6. It has a measuring unit 7 and a control unit 8.

As shown in FIG. 1, consider a case where the object to be inspected MA1 has a rod-like shape extending in a certain direction (length direction).
The magnetizing portion 1 and the magnetizing portion 3 magnetize the object to be inspected MA1 respectively. The magnetization of the object to be inspected MA1 by the magnetizing portion 1 and the magnetization of the object to be inspected MA1 by the magnetizing portion 3 can be performed individually or simultaneously.
As shown in FIG. 1, as the magnetizing portion 1, a power source 11 that energizes the inspected object MA1 in the length direction of the inspected object MA1 is used. Then, by energizing an alternating current or a direct current between both ends of the object MA1 to be inspected by the power supply 11, an alternating magnetic field or a direct current magnetic field along the circumferential direction of the object to be inspected MA1 is applied to the object to be inspected MA1. Then, the object to be inspected MA1 is magnetized.

As shown in FIG. 1, as the magnetizing portion 3, an exciting coil (electromagnet) 12 provided so as to vertically surround the rod-shaped object to be inspected MA1 is used. By passing an alternating current or a direct current through the exciting coil 12 by the power source 13, an alternating current or a direct current along the central axis of the exciting coil 12 is applied to the object MA1 to be inspected to magnetize the object MA1 to be inspected.

The test liquid supply unit 2 supplies the test liquid FL1 containing the fluorescent magnetic powder to the object to be inspected MA1 during or after being magnetized by the magnetized part 1 or the magnetized part 3, and the fluorescent magnetic powder is supplied to the surface of the object to be inspected MA1. To adhere. The test liquid supply unit 2 is connected to, for example, a storage tank 21 as a storage unit in which the test liquid FL1 is stored and the storage tank 21 via a pipe 22, and discharges the test liquid FL1 to the object to be inspected MA1. A nozzle 23 including a nozzle 23 is used.
As the fluorescent magnetic powder, for example, a magnetic powder such as iron oxide having a median diameter of about 1 to 100 μm and whose surface is coated with a phosphor is used.

In addition to magnetizing the object to be inspected MA1 to which the fluorescent magnetic powder is not attached, the magnetizing part 1 and the magnetizing part 3 magnetize the object to be inspected MA1 to which the fluorescent magnetic powder is attached to the surface after supplying the test solution FL1. Also magnetizes.
Further, even when the magnetized portion 1 and the magnetized portion 3 replace the object to be inspected MA1 with another object to be inspected MA2, the object to be inspected MA2 is in a state where fluorescent magnetic powder is not attached to the object to be inspected MA2. Magnetizes the inspected object MA2 to which fluorescent magnetic powder is attached to the surface.
In the magnetizing part 1 and the magnetizing part 3, there are cases where the object to be inspected in which the fluorescent magnetic powder is not attached is magnetized and cases where the object to be inspected in which the fluorescent magnetic powder is attached to the surface is magnetized. The amounts may be set to the same amount or different amounts.
That is, the amount of magnetization in each case may be set based on the degree of adhesion of the fluorescent magnetic powder from the test solution and the degree of removal of excess fluorescent magnetic powder by the cleaning solution.

The cleaning liquid supply unit 4 supplies the cleaning liquid FL2 to the object to be inspected MA1 during or after being magnetized by the magnetized part 1 or the magnetized part 3, and is a surplus of the fluorescent magnetic powder adhering to the surface of the object to be inspected MA1. Rinse off the fluorescent magnetic powder.
As the cleaning liquid supply unit 4, for example, a storage tank 41 as a storage unit in which the cleaning liquid FL2 is stored, and a nozzle connected to the storage tank 41 via a pipe 42 and discharging and supplying the cleaning liquid FL2 to the inspected object MA1. 43 is provided.
Further, the cleaning liquid supply unit 4 includes a pump 44 provided in the storage tank 41 or on the pipe 42 between the storage tank 41 and the nozzle 43. The pump 44 compresses the cleaning liquid FL2 in the storage tank 41 or the cleaning liquid FL2 in the pipe 42, and sends the cleaning liquid FL2 toward the nozzle 43.
Further, the cleaning liquid supply unit 4 includes a flow rate adjusting valve 45 provided on the pipe 42 between the pump 44 and the nozzle 43 and adjusting the flow rate of the cleaning liquid FL2 supplied from the nozzle 43. As the cleaning liquid FL2, for example, pure water or a liquid containing pure water as a main component can be used.
The flow rate adjusting valve 45 has a configuration in which the opening degree of the valve can be changed continuously or stepwise. The flow rate of the cleaning liquid FL2 can be adjusted by controlling the flow rate adjusting valve 45 with the control unit 8 and changing the opening degree of the valve of the flow rate adjusting valve 45. That is, the flow rate adjusting valve 45 in the present embodiment constitutes an adjusting portion of the magnetic particle flaw detector of the present invention that adjusts the supply of the cleaning liquid FL2.

The irradiation unit 5 irradiates the surface of the object to be inspected MA1 from which the excess fluorescent magnetic powder has been washed away with ultraviolet rays, and causes the fluorescent magnetic powder remaining on the surface of the object to be inspected MA1 to emit fluorescence.
As the irradiation unit 5, for example, an LED (Light Emitting Diode) black light that irradiates ultraviolet rays in the wavelength region of UVA of 315 to 400 nm can be used.

The imaging unit 6 acquires an image IM1 by imaging the fluorescence emitted by the fluorescent magnetic powder remaining on the surface of the object to be inspected MA1.
As the image pickup unit 6, for example, a CCD (Charge-Coupled Device) camera can be used.

The measuring unit 7 measures the brightness LM1 of the image IM1 acquired by the imaging unit 6.
As the measuring unit 7, a computer or the like that is connected to the imaging unit 6 and has image analysis software installed can be used. The measuring unit 7 calculates the average value of the brightness data in each pixel of the image IM1 input from the imaging unit 6 to the measuring unit 7, and uses the calculated average value as the measured value of the brightness of the image IM1. As a result, the brightness LM1 of the image IM1 is measured.
Note that FIG. 1 shows an image IM1 including two regions having two different types of hatching and an image having one type of hatching within the frame line representing the measurement unit 7. Then, the image IM1 on the left side is converted into an image having one type of hatching on the right side, so that the brightness LM1 is obtained as the average value of the brightness data of the image IM1.

The control unit 8 controls the amount of the cleaning liquid FL2 supplied by the cleaning liquid supply unit 4. The control unit 8 is electrically connected to the measurement unit 7.
As the control unit 8, a computer such as a microcomputer built in the flow rate adjusting valve 45 described above, or a computer such as a computer provided separately from the flow rate adjusting valve 45 and controlling the flow rate adjusting valve 45. Can be used.

In the magnetic particle flaw detector of the present embodiment, the control unit 8 is electrically connected to the measurement unit 7. The control unit 8 supplies the cleaning liquid by the cleaning liquid supply unit 4 so that the measured value of the brightness LM1 of the image IM1 measured by the measuring unit 7 falls within the range between the predetermined lower limit value and the upper limit value. The liquid volume of FL2 is controlled.
That is, when the measured value of the brightness LM1 of the image IM1 is larger than the predetermined upper limit value, the control unit 8 increases the amount of the cleaning liquid FL2 supplied from the cleaning liquid supply unit 4. As a result, it is possible to prevent or suppress excess fluorescent magnetic powder from remaining in the portion where the scratch is not formed.
Further, when the measured value of the brightness LM1 of the image IM1 is smaller than the predetermined lower limit value, the control unit 8 reduces the amount of the cleaning liquid FL2 supplied from the cleaning liquid supply unit 4. As a result, it is possible to prevent or suppress the fluorescent magnetic powder adhering to the scratched portion from being washed away.
Therefore, from the captured image IM1, the portion where the scratch is formed and the portion where the scratch is not formed can be easily distinguished, and the scratch can be detected with high accuracy.

As an image processing method for controlling the amount of the cleaning liquid, it is possible to determine whether or not the scratch is a scratch from the upper limit value or the lower limit value of the contrast between the scratch and the bag.
Alternatively, it can be determined whether or not the scratch is made from the upper limit value or the lower limit value of the scratch length. Alternatively, it can be determined whether or not the scratch is made from the upper limit value or the lower limit value of the scratched area. Alternatively, it can be determined whether or not the scratch is made from the upper limit value or the lower limit value of the number of breaks in the length direction of the scratch. Alternatively, it can be determined whether or not the scratch is made from the upper limit value or the lower limit value of the width of the scratch.
Alternatively, by adjusting the exposure time (aperture) of the camera, it is possible to detect smaller scratches and moving objects to be inspected. Alternatively, by applying masking processing to the pseudo pattern and excluding it from the detection site, it is possible to reduce erroneous determination as to whether or not it is a scratch. Alternatively, shallow scratches that generate less leakage magnetic flux in magnetic particle inspection can be inspected simultaneously or on adjacent lines with a visible light camera to detect more scratches. Even when such a method is used, the amount of the cleaning liquid can be controlled, and it is possible to more easily distinguish between the scratched portion and the non-scratched portion from the captured image. it can.

(Second Embodiment)
FIG. 2 is a diagram schematically showing a part of a second embodiment of the magnetic particle flaw detector of the present invention.

As shown in FIG. 2, the magnetic particle flaw detector of the present embodiment has a liquid receiving portion 9 below the objects to be inspected MA1 and MA2.
The liquid receiving unit 9 receives the test liquid FL1 and the cleaning liquid FL2 supplied to the objects to be inspected MA1 and MA2 by the test liquid supply unit 2 and the cleaning liquid supply unit 4.

Further, the first storage tank 21 and the nozzle 23 are connected by a pipe 22, and a pump 24 and a flow rate adjusting valve 25 are arranged on the pipe 22.
The pump 24 compresses the test liquid FL1 (including the test liquid in the pipe 22) in the first storage tank 21 to send the test liquid FL1 toward the nozzle 23 through the pipe 22.
The flow rate adjusting valve 25 is a valve that adjusts the flow rate of the test liquid FL1 supplied from the nozzle 23.

Further, the second storage tank 41 and the nozzle 43 are connected by a pipe 42, and the pump 44 and the flow rate adjusting valve 45 are arranged on the pipe 42.
The pump 44 compresses the cleaning liquid FL2 (including the cleaning liquid in the pipe 42) in the second storage tank 41, so that the inspection liquid FL2 is sent toward the nozzle 43 through the pipe 42.
The flow rate adjusting valve 45 is a valve that adjusts the flow rate of the cleaning liquid FL2 supplied from the nozzle 43.

In the present embodiment, the nozzle 23 for supplying the test liquid FL1 and the nozzle 43 for supplying the cleaning liquid FL2 are arranged in two upper and lower stages, and the nozzle 43 is arranged above the nozzle 23. Actually, the nozzle 23 and the nozzle 43 are arranged so that the plane positions of the nozzle 23 and the nozzle 43 are shifted so that the cleaning liquid FL2 supplied from the nozzle 43 does not come into contact with the nozzle 23.

A pipe 51 is connected to the bottom of the liquid receiving portion 9, and the pipe 51 is switchably connected to the first storage tank 21 and the second storage tank 41 via a three-way valve 52.
When the test liquid FL1 is supplied to the objects to be inspected MA1 and MA2 from the nozzle 23 of the test liquid supply unit 2, the three-way valve 52 is connected to the first storage tank 21 side, and the test liquid FL1 received by the liquid receiving unit 9 is connected. Is flowed into the first storage tank 21 through the pipe 51 and the three-way valve 52.
When the cleaning liquid FL2 is supplied to the objects to be inspected MA1 and MA2 from the nozzle 43 of the cleaning liquid supply unit 4, the three-way valve 52 is connected to the second storage tank 41 side, and the cleaning liquid FL2 received by the liquid receiving unit 9 is piped. It flows into the second storage tank 41 through 51 and the three-way valve 52.
In this way, the test solution FL1 can be collected in the first storage tank 21 and circulated as the test solution again for use, and the cleaning solution FL2 can be collected in the second storage tank 41 and circulated again as the cleaning solution. Can be used.

In FIG. 2, each part of the magnetizing part, the irradiation part, the imaging part, and the measuring part that magnetizes the objects to be inspected MA1 and MA2 is not shown.
In the present embodiment, the magnetized portion can have the same configuration as the magnetized portion 1 and the magnetized portion 3 of the magnetic particle flaw detector according to the first embodiment shown in FIG. Further, it may have the same configuration as only the magnetized portion 1 of FIG. 1 or only the magnetized portion 3 of FIG.

Since the other configurations are the same as those of the magnetic particle flaw detector of the first embodiment shown in FIG. 1, the same reference numerals are given and duplicate description will be omitted.

In the magnetic particle flaw detector of the present embodiment, the control unit 8 makes sure that the measured value of the brightness of the image measured by the measuring unit (not shown) falls within the range between the predetermined lower limit value and the upper limit value. , The amount of the cleaning liquid FL2 supplied by the cleaning liquid supply unit 4 is controlled.
That is, when the measured value of the brightness of the image is larger than the predetermined upper limit value, the control unit 8 increases the amount of the cleaning liquid FL2 supplied from the cleaning liquid supply unit 4. As a result, it is possible to prevent or suppress excess fluorescent magnetic powder from remaining in the portion where the scratch is not formed.
Further, when the measured value of the brightness of the image is smaller than the predetermined lower limit value, the control unit 8 reduces the amount of the cleaning liquid FL2 supplied from the cleaning liquid supply unit 4. As a result, it is possible to prevent or suppress the fluorescent magnetic powder adhering to the scratched portion from being washed away.
Therefore, from the captured image, the portion where the scratch is formed and the portion where the scratch is not formed can be easily distinguished, and the scratch can be detected with high accuracy.

Further, in the present embodiment, the test solution FL1 can be collected in the first storage tank 21 and circulated again as the test solution for use, and the cleaning solution FL2 is further collected in the second storage tank 41 and circulated again as the cleaning solution. Can be used. As a result, the amount of the test solution FL1 and the cleaning solution FL2 used can be reduced.

(Magnetic particle inspection method)
FIG. 3 is a flow chart showing a part of the magnetic particle flaw detection method using the magnetic particle flaw detector of the present invention.
The magnetic particle flaw detection method shown in FIG. 3 is a magnetic particle flaw detection method applied to each magnetic particle flaw detector according to the first embodiment shown in FIG. 1 or the second embodiment shown in FIG.
The magnetic particle flaw detection method shown in FIG. 3 can be performed as follows.

First, the object to be inspected MA1 is magnetized by the magnetizing portion 1, the inspection liquid FL1 containing the fluorescent magnetic powder is supplied to the inspected object MA1 from the inspection liquid supply unit 2, and the fluorescent magnetic powder adheres to the surface of the inspected object MA1. (Step S1).
Next, the object to be inspected MA1 to which the fluorescent magnetic powder is attached to the surface is further magnetized by the magnetizing portion 1 (step S2).
Next, the cleaning liquid FL2 is supplied to the inspected object MA1 by the cleaning liquid supply unit 4, and the excess fluorescent magnetic powder among the fluorescent magnetic powder adhering to the surface of the inspected object MA1 is washed away (step S3).
Next, the surface of the object to be inspected MA1 from which the excess fluorescent magnetic powder has been washed away is irradiated with ultraviolet rays by the irradiation unit 5, and of the fluorescent magnetic powder adhered by the magnetizing part 1, it remains on the surface of the object to be inspected MA1. Fluorescence is emitted from the fluorescent magnetic powder (step S4).
Next, the fluorescence emitted by the fluorescent magnetic powder remaining on the surface of the object to be inspected MA1 is imaged by the imaging unit 6 to acquire the image IM1 (step S5).
Next, the brightness LM1 of the image IM1 acquired by the imaging unit 6 is measured by the measuring unit 7 (step S6).
Further, the control unit 8 controls the amount of the cleaning liquid FL2 supplied by the cleaning liquid supply unit 4 (step S7).

In this magnetic particle inspection method, in step S7, as described above, the control unit controls the amount of the cleaning liquid FL2 so that the measured value of the brightness LM1 of the image IM1 measured by the measuring unit 7 falls within a predetermined range. It is controlled by 8. As a result, as described above, it is prevented or suppressed that excess fluorescent magnetic powder remains in the portion where the scratch is not formed, and the fluorescent magnetic powder adhering to the portion where the scratch is formed is prevented or suppressed from being washed away. be able to. Therefore, the portion where the scratch is formed and the portion where the scratch is not formed can be easily distinguished from the captured image IM1, and the scratch can be detected with high accuracy.

Further, when adjusting the flow rate of the cleaning liquid FL2 in step S7, the flow rate adjusting valve 45 is controlled by the control unit 8 to adjust the flow rate of the cleaning liquid FL2. As an alternative method, FIG. 2 shows. The water pressure of the second storage tank 41 (including the cleaning liquid in the pipe 42), the supply amount of the cleaning liquid FL2 per unit time, and the time for supplying the cleaning liquid FL2 may be adjusted by the control unit 8. ..
Alternatively, the control unit 8 controls the magnetization of the object to be inspected MA1 when the cleaning liquid FL2 is supplied so that the measured value of the brightness LM1 of the image IM1 measured by the measurement unit 7 falls within a predetermined range. It may be adjusted by doing. That is, it is also possible to adjust by controlling the current value or the time for energizing the coil 12 of the magnetizing portion 1 and the magnetizing portion 3.
In this case, the water pressure of the cleaning liquid FL2 and the supply amount per unit time are determined by, for example, changing the water discharge pressure or the water discharge amount of the pump 44 in FIG. 2 so that the water discharge pressure or the water discharge amount can be changed. Can be adjusted by.
Further, the time for supplying the cleaning liquid FL2 can be adjusted, for example, by controlling the on / off of the pump 44 in FIG. 2 by the control unit 8. In this case, the pump 44 corresponds to the adjusting portion of the magnetic particle flaw detector of the present invention. That is, the pump 44, which is an adjusting unit, adjusts the supply (supply state or on / off operation) of the cleaning liquid to the object to be inspected.
Further, the current value or the energizing time for energizing the coil 12 of the magnetizing unit 1 and the magnetizing unit 3 is determined by controlling the current value or energizing of the power supplies 11 and 13 of the magnetizing unit 1 and the magnetizing unit 13 with the control unit 8. , Can be adjusted. In this case, the power supplies 11 and 13 correspond to the adjusting unit of the magnetic particle flaw detector of the present invention. That is, the magnetization (magnetization state or operation) of the object to be inspected is adjusted by the on / off operation of the power supplies 11 and 13 which are the adjusting units.

In step S1, a continuous method may be performed in which the application of the magnetic field by the magnetizing portion 1 is started after the supply of the test liquid FL1 is started, and the application of the magnetic field is terminated after the supply of the inspection liquid FL1 is completed. The residual method may be performed in which the supply of the test solution FL1 is started after the application of the magnetic field is completed.
Further, in steps S2 and S3, a method may be performed in which the application of the magnetic field by the magnetizing portion 1 is started, the supply of the cleaning liquid FL2 is started, and the application of the magnetic field is ended after the supply of the cleaning liquid FL2 is completed. A method of supplying the cleaning liquid FL2 without applying a magnetic field by the magnetizing portion 1 may be performed.

Preferably, after performing each step of steps S1 to S7 using a standard sample as the inspected object MA1, the inspected object MA1 is replaced with another inspected object MA2 (step S8).
Then, as the object to be inspected MA2, using the sample to be inspected to be actually subjected to magnetic particle flaw detection, each step of step S9 to step S14 corresponding to each step of steps S1 to S5 is performed to acquire an image. be able to.
When a standard sample is used as the MA1 to be inspected, a sample having predetermined scratches, for example, scratches having predetermined dimensions such as length, width, and depth can be used as the standard sample.

That is, after step S7 is performed to control the amount of the cleaning liquid FL2 by the control unit 8, the object to be inspected MA2 is magnetized by the magnetizing unit 1 in the same manner as in step S1, and the inspection liquid FL1 is supplied to the object to be inspected MA2. It is supplied by the part 2 and the fluorescent magnetic powder is adhered to the surface of the sample to be detected (step S9).
In step S9, as in step S1, a continuous method of starting the supply of the test solution FL1 before the application of the magnetic field by the magnetizing unit 1 is completed may be performed, and the application of the magnetic field by the magnetizing unit 1 is completed. The residual method may be performed in which the supply of the test solution FL1 is started from.
Next, similarly to step S2, the object to be inspected MA2 to which the fluorescent magnetic powder is attached to the surface is magnetized again by the magnetizing portion 1 (step S10).
Next, as an effective method for washing away excess fluorescent magnetic powder from the fluorescent magnetic powder adhering to the surface of the inspected object MA2, the cleaning liquid FL2 is applied to the inspected object MA2 in the cleaning liquid supply unit 4 as in step S3. To wash away the fluorescent magnetic powder (step S11).
In steps S10 and S11, as in steps S2 and S3, a continuous method of starting the supply of the cleaning liquid FL2 before the application of the magnetic field by the magnetizing portion 1 is completed may be performed, and the application of the magnetic field by the magnetizing portion 1 may be performed. The residual method may be performed in which the supply of the cleaning liquid FL2 is started after the above is completed.
Next, in the same manner as in step S4, the surface of the object to be inspected MA2 from which the excess fluorescent magnetic powder has been washed away is irradiated with ultraviolet rays by the irradiation unit 5, and the adhered fluorescent magnetic powder remains on the surface of the object to be inspected MA2. Fluorescence is emitted from the fluorescent magnetic powder (step S12).
Next, in the same manner as in step S5, the fluorescence emitted by the fluorescent magnetic powder remaining on the surface of the object to be inspected MA2 is imaged by the imaging unit 6 to acquire the image IM2 (step S13).
Next, similarly to step S6, the brightness LM2 of the image IM2 acquired by the imaging unit 6 is measured by the measuring unit 7 (step S14).

Further, when performing the processes of steps S9 to S14, in step S11, the amount of the cleaning liquid FL2 supplied by the cleaning liquid supply unit 4 is the same as the amount of the cleaning liquid FL2 supplied by the cleaning liquid supply unit 4 in step S3. The liquid amount of the cleaning liquid FL2 may be controlled by the control unit 8 so as to be equal.

For example, when performing a magnetic particle flaw detection process using a magnetic particle flaw detector for one day, first, a standard sample is used as the object to be inspected MA1, and the measured value of the brightness of the image IM1 measured by the measuring unit 7 is predetermined. After optimizing the liquid amount of the cleaning liquid FL2 so as to be within the range between the lower limit value and the upper limit value, the cleaning liquid FL2 having a liquid amount equal to the optimized liquid amount is supplied. In such a case, it is necessary to further prevent or suppress the excess fluorescent magnetic powder from remaining in the portion where the scratch is not formed, and further prevent or suppress the fluorescent magnetic powder adhering to the portion where the scratch is formed from being washed away. Can be done. Therefore, the portion where the scratch is formed and the portion where the scratch is not formed can be more easily distinguished from the captured image, and the scratch can be detected more accurately.

In the flowchart shown in FIG. 3, the case where the object to be inspected MA1 and MA2 are magnetized by the magnetized portion 1 has been described, but the object to be inspected MA1 is magnetized by the magnetized portion 3 or by both the magnetized portion 1 and the magnetized portion 3. , MA2 is magnetized, the same steps are performed.

(Third Embodiment)
FIG. 4 is a diagram schematically showing a part of a third embodiment of the magnetic particle flaw detector of the present invention.
The magnetic particle flaw detector of the present embodiment has a configuration including two processing units.
Note that, in FIG. 4, only the adhesion processing unit UN1, the cleaning processing unit UN2, and the control unit 8 are extracted and shown from the configuration of the magnetic particle inspection device. The irradiation unit, the image pickup unit, the measurement unit, and the like can adopt the configuration of the magnetic particle flaw detection device of the first embodiment shown in FIG. 1 and the second embodiment shown in FIG.

As shown in FIG. 4, the magnetic particle flaw detector of the present embodiment has an adhesion treatment unit UN1 that performs an adhesion treatment for adhering fluorescent magnetic powder to the surface of the object to be inspected MA1 and fluorescence adhering to the surface of the object to be inspected. It is provided with a cleaning treatment unit UN2 that performs a cleaning treatment for washing away excess fluorescent magnetic powder among the magnetic powders. The cleaning processing unit UN2 is adjacent to the adhesion processing unit UN1 in a plan view.
The adhesion processing unit UN1 has a first magnetization unit 1, an inspection liquid supply unit 2, and a first liquid receiving unit 9a.
The cleaning processing unit UN2 has a second magnetizing unit 31, a cleaning liquid supply unit 4, and a second liquid receiving unit 9b.

The first liquid receiving unit 9a receives the test liquid FL1 supplied to the inspected object MA1 by the test liquid supply unit 2 in the adhesion processing unit UN1.
The second liquid receiving unit 9b receives the cleaning liquid FL2 supplied to the inspected object MA1 by the cleaning liquid supply unit 4 in the cleaning processing unit UN2. The second liquid receiving portion 9b is adjacent to the first liquid receiving portion 9a.

Further, the first magnetizing portion 1 and the second magnetizing portion 31 are excited coils 12, 32 provided so as to surround the inspected objects MA1 and MA2 by using the inspected objects MA1 and MA2 having a T-shaped cross section. Each has an electromagnet consisting of. By passing an alternating current or a direct current through the exciting coils 12 and 32, an alternating magnetic field or a direct current magnetic field along the central axis of the exciting coils 12 and 32 is applied to the objects MA1 and MA2 to be inspected. MA2 can be magnetized.
The first magnetizing unit 1 magnetizes the objects to be inspected MA1 and MA2. Then, the test liquid supply unit 2 supplies the test liquid FL1 to the objects MA1 and MA2 to be inspected during or in the magnetized state by the first magnetized unit 1.
Further, the second magnetizing portion 31 magnetizes the objects to be inspected MA1 and MA2. Then, the cleaning liquid supply unit 4 supplies the cleaning liquid FL2 to the objects to be inspected MA1 and MA2 magnetized by the second magnetization unit 31.
If the objects to be inspected MA1 and MA2 are not magnetized when the cleaning liquid is supplied, the second magnetized portion 31 can be omitted from the configuration of FIG. In this case, in the cleaning processing unit UN2, the cleaning liquid FL2 is supplied to the objects to be inspected MA1 and MA2 by the cleaning liquid supply unit 4.

The objects to be inspected, MA1 and MA2, to which the inspection liquid FL1 was supplied to the adhesion processing unit UN1 and the fluorescent magnetic powder was attached, then moved as shown by the arrow 35, and the second magnetizing portion 31 of the cleaning processing unit UN2 moved. It is installed in the exciting coil 32.

In the present embodiment, the cleaning liquid supply unit 4 and the second liquid receiving unit 9b are provided in the cleaning processing unit UN2 different from the adhesion processing unit UN1 in which the inspection liquid supply unit 2 and the first liquid receiving unit 9a are provided. As a result, the cleaning liquid FL2 after being supplied to the inspected object MA1 contains the fluorescent magnetic powder in a content smaller than the content of the fluorescent magnetic powder in the inspection liquid FL1 after being supplied to the inspected object MA1. It is possible to prevent or suppress the cleaning liquid FL2 from being mixed with the test liquid FL1 after being supplied to the object to be inspected MA1.
Since it is possible to prevent the water in the cleaning liquid FL2 from mixing with the test liquid FL1, the test liquid FL1 can be recovered and circulated again as the test liquid for use. Further, the cleaning liquid FL2 can be recovered and recirculated as a cleaning liquid for use, and the amount of the cleaning liquid FL2 used can be reduced while maintaining the cleaning effect of the cleaning liquid FL2 constant.

Further, by arranging the cleaning treatment unit UN2 and the adhesion treatment unit UN1 next to each other, it is possible to perform the cleaning treatment on the inspected object MA2 immediately after the adhesion treatment unit UN1 performs the adhesion treatment on the objects to be inspected MA1 and MA2. .. As a result, it is possible to prevent or suppress the removal of the fluorescent magnetic powder from the scratched portion while the objects to be inspected MA1 and MA2 move from the adhesion treatment unit UN1 to the cleaning treatment unit UN2. Therefore, it is possible to reliably identify the portion where the scratch is formed in the captured image IM1.

Further, since the objects to be inspected MA1 and MA2 are moved from the adhesion treatment unit UN1 to the cleaning treatment unit UN2, the cleaning treatment for one inspected object MA1 and the adhesion treatment for the other inspected object MA2 are simultaneously executed. It is possible to do.

(Fourth Embodiment)
FIG. 5 is a diagram schematically showing a part of a fourth embodiment of the magnetic particle flaw detector of the present invention.
The magnetic particle flaw detector of the present embodiment has a configuration including a filter, a heating unit for heating the cleaning liquid, and a supply unit for supplying air.
Note that FIG. 5 shows only the cleaning processing unit UN2 and the control unit 8 extracted from the configuration of the magnetic particle inspection device. As the adhesion treatment unit, the configuration of the adhesion treatment unit UN1 of the magnetic particle flaw detector according to the third embodiment shown in FIG. 4 can be adopted. Further, the irradiation unit, the image pickup unit, the measurement unit, and the like can adopt the configuration of the magnetic particle flaw detection device of the first embodiment shown in FIG. 1 and the second embodiment shown in FIG.
Further, when the objects to be inspected MA1 and MA2 are not magnetized when the cleaning liquid is supplied, the second magnetized portion 31 can be omitted from the configuration of FIG. In this case, in the cleaning processing unit UN2, the cleaning liquid FL2 is supplied to the objects to be inspected MA1 and MA2 by the cleaning liquid supply unit 4.

As shown in FIG. 5, the cleaning processing unit UN2 is provided on the pipe 51b between the second liquid receiving portion 9b and the storage tank 41, and stores the cleaning liquid FL2 received by the second liquid receiving portion 9b. It has a storage tank 53 as a storage unit and a filter 54 as a filter unit for separating fluorescent magnetic powder from the cleaning liquid FL2 stored in the storage tank 53.
Further, the cleaning liquid supply unit 4 circulates and supplies the cleaning liquid FL2 stored in the storage tank 53 and from which the fluorescent magnetic powder is separated by the filter 54 to the inspected object MA1.

The portion of the pipe 51b on the storage tank 53 side of the pipe 51c, which is the part between the second liquid receiving portion 9b and the storage tank 53, is connected to the inside of the filter 54 provided inside the storage tank 53 and is connected to the pipe. When the cleaning liquid FL2 stored inside the filter 54 passes through the filter 54 from the inside to the outside of the filter 54, the fluorescent magnetic powder is separated from the cleaning liquid FL2.
As a result, when the cleaning liquid FL2 is recovered and reused, the content of the fluorescent magnetic powder in the cleaning liquid FL2 can be extremely reduced and kept constant, so that the cleaning effect of the cleaning liquid FL2 can be maintained more constant. Can be done.

The portion of the pipe 51b on the storage tank 53 side of the pipe 51d, which is a portion between the storage tank 53 and the storage tank 41, is connected to the outside of the filter 54 arranged inside the storage tank 53, and is fluorescent magnetic powder. The cleaning liquid FL2 from which is separated is stored in the storage tank 41 from the filter 54 through the pipe 51d. A pump 55 is provided on the pipe 51d between the storage tank 53 and the storage tank 41. The pump 55 sends the cleaning liquid FL2 toward the storage tank 41 by compressing the cleaning liquid FL2 (including the cleaning liquid in the pipe 51d) outside the filter 54 inside the storage tank 41.

Further, the storage tank 53 and the filter 54 of FIG. 5 can also be applied to the cleaning processing unit UN2 of the magnetic particle inspection device of the third embodiment shown in FIG. When applied to the third embodiment, the storage tank 53, the filter 54, and the pump 55 of FIG. 5 are provided between the second liquid receiving portion 9b of FIG. 4 and the storage tank 41.

As shown in FIG. 5, the magnetic particle flaw detector of the present embodiment has a heating unit 63 including, for example, a power supply 61 and a heater 62 that heat the cleaning liquid FL2. Then, the cleaning liquid supply unit 4 supplies hot water heated by the heating unit 63 as the cleaning liquid FL2 to the object to be inspected MA1 being magnetized or magnetized by the second magnetizing unit 31. As a result, the temperature of the cleaning liquid FL2 can be raised above room temperature, and the time required for drying the surface of the object to be inspected MA1 after supplying the cleaning liquid FL2 to wash away the excess fluorescent magnetic powder can be shortened. , The time required for magnetic particle inspection can be shortened.
The temperature of the cleaning liquid FL2 supplied to the surface of the object to be inspected MA1 by the cleaning liquid supply unit 4 is preferably, for example, 30 to 60 ° C., and more preferably 40 to 60 ° C. When the temperature of the cleaning liquid FL2 is 30 ° C. or higher, the effect of shortening the time for drying the surface of the object to be inspected MA1 is enhanced as compared with the case where the temperature of the cleaning liquid FL2 is less than 30 ° C., and the temperature of the cleaning liquid FL2 is 40 ° C. or higher. In the case of, the effect of shortening the drying time is further enhanced. Further, when the temperature of the cleaning liquid FL2 is 60 ° C. or lower, the effect of reducing the power consumption of the heating unit 63 is enhanced as compared with the case where the temperature of the cleaning liquid FL2 exceeds 60 ° C.
As shown in FIG. 5, the heating unit 63 is connected to the control unit 8 and is controlled by the control unit 8. As a result, the control unit 8 can control the heating unit 8 to adjust the temperature of the cleaning liquid FL2.
The heating unit 63 shown in FIG. 5 can also be applied to the configuration of the magnetic particle flaw detector of each of the above-described embodiments.

The control unit 8 can control the amount of the cleaning liquid FL2 and further control the temperature of the cleaning liquid FL2 so that the measured value of the brightness LM1 of the image IM1 measured by the measuring unit falls within a predetermined range. preferable. For example, by increasing the amount of the cleaning liquid FL2 and raising the temperature of the cleaning liquid FL2, it is possible to prevent the time for drying the surface of the inspected object MA1 from becoming too long even when the amount of the liquid increases. Alternatively, by reducing the liquid amount of the cleaning liquid FL2 and lowering the temperature of the cleaning liquid FL2, when the liquid amount is reduced, the time for drying the surface of the inspected object MA1 is not so long. As a result, the power consumption of the heating unit 63 can be reduced.

The cleaning liquid FL2 preferably contains a dispersant. As the dispersant, for example, a nonionic surfactant or an anionic surfactant can be used. Generally, the test solution FL1 contains a dispersant, but since the test solution FL1 contains a dispersant, the test solution FL1 can be uniformly sprayed on the surface of the object to be inspected MA1, and the test solution FL1 can be uniformly sprayed. The fluorescent magnetic powder contained in the material can be uniformly adhered to the surface of the object to be inspected MA1. On the other hand, since the cleaning liquid FL2 contains a dispersant, the cleaning liquid FL2 can be uniformly sprayed on the surface of the inspected object MA1, and the excess fluorescent magnetic powder adhering to the surface of the inspected object MA1 is uniformly dispersed. Can be washed away. That is, the magnetic powder on the surface (non-inspected part) having a small leakage magnetic flux is originally difficult to adhere, but continues to stagnate (residue) on the forged skin, the cast skin, the apex of the edge, and the uneven portion such as the root. The magnetic powder in that part is difficult to remove with pure water alone, and the cleaning effect can be improved by mixing a dispersant with a high dispersion effect.

The control unit 8 controls the amount of the cleaning liquid FL2 so that the measured value of the brightness LM1 of the image IM1 measured by the measuring unit 7 falls within a predetermined range, and the dispersant (surfactant) in the cleaning liquid FL2. It is preferable to control the concentration of the activator). For example, the variance (variance) is measured in addition to the average value of the brightness LM1 as the measured value of the brightness LM1 of the image IM1, and when the measured average value of the brightness LM1 is large and the variation of the brightness LM1 is large, the cleaning liquid FL2 By increasing the amount of the liquid and increasing the concentration of the dispersant (surface active agent) in the cleaning liquid FL2, the average value of the brightness LM1 can be reduced and the variation in the brightness LM1 can be reduced.
Alternatively, when the average value of the measured brightness LM1 is small and the variation in brightness is large, the brightness is reduced by reducing the amount of the cleaning liquid FL2 and increasing the concentration of the dispersant, that is, the surfactant in the cleaning liquid FL2. It is possible to increase the average value of the LM1 and reduce the variation in the brightness LM1.
The cleaning liquid FL2 containing the dispersant described above can be applied not only to the magnetic particle flaw detector of the present embodiment but also to the magnetic particle flaw detector of another embodiment described above.

As shown in FIG. 5, the magnetic particle flaw detector of the present embodiment includes an air supply unit 71. The air supply unit 71 supplies air to the objects to be inspected MA1 and MA2 when the cleaning liquid FL2 is supplied to the objects to be inspected MA1 and MA2 magnetized by the second magnetizing unit 31 by the cleaning liquid supply unit 4. To do. The air supply unit 71 is provided separately from the nozzle 43 that supplies the cleaning liquid FL2, and has a nozzle 72 that discharges and supplies the air GS1 to the surfaces of the objects to be inspected MA1 and MA2.

Instead of connecting the air supply unit 71 to the nozzle 72 provided separately from the nozzle 43 that supplies the cleaning liquid FL2, the air supply unit 71 is connected to the nozzle 43, and the air GS1 and the cleaning liquid supplied from the air supply unit 71 are connected. The FL2 may be mixed and discharged from the nozzle 43 to be supplied.
Further, a nozzle 72 is provided separately from the nozzle 43 for supplying the cleaning liquid FL2, the air supply unit 71 is connected to the respective nozzles 43 and 72, and the air GS1 is discharged and supplied from the nozzle 43 and the nozzle 72. May be.
In the case of these configurations, the nozzle 43 mixes the air GS1 supplied from the air supply unit 71 and the cleaning liquid FL2, and discharges and supplies the cleaning liquid FL2 mixed with the air GS1 to the surface of the object to be inspected MA1.
When only the cleaning liquid FL2 is supplied, the fluorescent magnetic powder may be excessively washed away depending on the flow rate of the cleaning liquid FL2.
On the other hand, when the cleaning liquid FL2 mixed with the air GS1 is supplied, or when the air GS1 is supplied when the cleaning liquid FL2 is supplied, the amount of the fluorescent magnetic powder washed away is larger than that when only the cleaning liquid FL2 is supplied. It can be fine-tuned so that it does not become too much. That is, the air GS1 is supplied to prevent over-cleaning of scratches and to appropriately clean the non-inspected portion.
In each configuration having the above-mentioned air supply unit, instead of supplying the air GS1 together with the supply of the cleaning liquid FL2, it may be performed after the supply of the cleaning liquid FL2 is completed.

Preferably, the control unit 8 controls the amount of the cleaning liquid FL2 so that the measured value of the brightness LM1 of the image IM1 measured by the measuring unit 7 falls within a predetermined range, and the nozzle 43 or the nozzle 43 or The supply amount of the air GS1 supplied by the nozzle 72 is controlled.
For example, by increasing the amount of the cleaning liquid FL2 and the amount of air GS1 supplied, even if the amount of the cleaning liquid FL2 is increased, the amount of excess fluorescent magnetic powder washed away does not become too large, that is, scratches. It can be fine-tuned to prevent over-cleaning and to provide adequate cleaning of non-inspected areas.
Alternatively, by reducing the amount of the cleaning liquid FL2 and the amount of air GS1 supplied, the amount of excess fluorescent magnetic powder washed away when the amount of the cleaning liquid FL2 is reduced is not too small, that is, scratches. It can be fine-tuned to prevent over-cleaning and to achieve proper cleaning of non-inspected areas.

(Modification example)
In each of the above-described embodiments, the magnetic particle flaw detector is provided with a control unit 8, and the control unit 8 automatically controls the flow rate adjusting valve 45 to adjust the flow rate of the cleaning liquid FL2.
The magnetic particle flaw detector and the magnetic particle flaw detector of the present invention are not limited to the configuration in which the magnetic particle flaw detector is provided with a control unit. That is, the supply of the cleaning liquid or the magnetization of the object to be inspected may be adjusted by manually controlling the adjusting unit such as the flow rate adjusting valve without providing the control unit in the magnetic particle inspection device. Examples of the adjusting unit include a flow rate adjusting valve, a pump for supplying a cleaning liquid, a power source for the magnetizing unit, and the like, as described above.
When manually controlling the adjustment unit such as the flow rate adjustment valve, a display unit that displays the measurement result or an alarm unit that generates a warning sound is provided based on the measurement result of the brightness. Then, the adjustment unit such as the flow rate adjustment valve is manually controlled based on the display of the display unit and the warning sound of the alarm unit.
The display unit and the alarm unit may be used in combination to display the measurement result and generate the warning sound at the same time.
As the display unit, a display that displays the luminance value, one or a plurality of lamps that turn on and off according to the luminance value, and the like can be considered. For example, using three lamps, the lighting of each lamp can indicate less than a predetermined range, within a predetermined range, or exceeding a predetermined range with respect to a predetermined range of brightness.

Although the present invention has been specifically described above based on the embodiment thereof, it goes without saying that the present invention is not limited to the above-described embodiment and can be variously modified without departing from the gist thereof. ..

Within the scope of the idea of the present invention, those skilled in the art can come up with various modified examples and modified examples, and it is considered that these modified examples and modified examples also belong to the scope of the present invention.

For example, a person skilled in the art appropriately adds, deletes, or changes the design of each of the above-described embodiments, or adds, omits, or changes the conditions of the process of the present invention. As long as it has a gist, it is included in the scope of the present invention.

1 (1st) Magnetized part 2 Test liquid supply part 3 Magnetized part 4 Cleaning liquid supply part 5 Irradiation part 6 Imaging part 7 Measurement part 8 Control part 9 Liquid receiving part 9a First liquid receiving part 9b Second liquid receiving part 11, 31 , 61 Power supply 12, 32 Excitation coil 21, 41, 53 Storage tank 22, 42, 51, 51a to 51d Piping 23, 43, 72 Nozzle 24, 44, 55 Pump 25, 45 Flow control valve 31 Second magnetized part 52 Three-way Valve 54 Filter 62 Heater 63 Heating unit 71 Air supply unit FL1 Inspection liquid FL2 Cleaning liquid GS1 Air IM1, IM2 Image LM1, LM2 Brightness MA1, MA2 Inspected object UN1 Adhesion processing unit UN2 Cleaning processing unit

Claims (12)

The magnetized part that magnetizes the object to be inspected and
An inspection liquid supply unit that supplies an inspection liquid containing fluorescent magnetic powder to the object to be inspected and attaches the fluorescent magnetic powder to the surface of the object to be inspected.
A cleaning liquid supply unit that supplies a cleaning liquid to the object to be inspected and flushes away excess fluorescent magnetic powder from the fluorescent magnetic powder adhering to the surface of the object to be inspected.
An irradiation unit that irradiates the surface of the object to be inspected from which the fluorescent magnetic powder has been washed away with ultraviolet rays and causes the fluorescent magnetic powder remaining on the surface of the fluorescent magnetic powder to emit fluorescence.
An imaging unit that captures the fluorescence emitted by the fluorescent magnetic powder and acquires an image,
A measuring unit that measures the brightness of the image acquired by the imaging unit,
An adjusting unit that adjusts the supply of the cleaning liquid to the object to be inspected or the magnetization of the object to be inspected by the magnetizing part.
Have,
It is possible to adjust the supply of the cleaning liquid or the magnetization of the object to be inspected by the adjusting unit so that the measured value of the brightness of the image measured by the measuring unit falls within a predetermined range. Flaw detector. Further having a control unit for controlling the adjustment unit
The control unit controls the adjustment unit so that the measured value of the brightness of the image measured by the measurement unit falls within a predetermined range, and supplies the cleaning liquid or magnetizes the object to be inspected. The magnetic particle flaw detector according to claim 1, which is adjusted. An adhesion treatment unit that performs a treatment to attach fluorescent magnetic powder to the surface of the object to be inspected,
A cleaning treatment unit that is adjacent to the adhesion treatment unit in a plan view and that performs a treatment for washing away the fluorescent magnetic powder.
With
The magnetized portion has a first magnetized portion that magnetizes the object to be inspected before supplying the cleaning liquid, and a second magnetized portion that magnetizes the object to be inspected after supplying the inspection liquid.
The adhesion processing unit has a first magnetization unit, a test liquid supply unit, and a first liquid receiving unit that receives the test liquid supplied to the object to be inspected by the test liquid supply unit.
The cleaning processing unit includes the second magnetization unit, the cleaning liquid supply unit, and a second liquid receiving unit that receives the cleaning liquid supplied to the object to be inspected by the cleaning liquid supply unit.
The magnetic particle flaw detector according to claim 1 or 2. The cleaning processing unit further includes a storage unit for storing the cleaning liquid received by the second liquid receiving unit and a filter unit for separating fluorescent magnetic powder from the cleaning liquid stored in the storage unit. ,
The magnetic particle flaw detector according to claim 3, wherein the cleaning liquid supply unit supplies the cleaning liquid from which fluorescent magnetic powder is separated by the filter unit to the object to be inspected. In addition, it has an air supply unit that supplies air.
The item according to any one of claims 1 to 4, wherein the air supply unit supplies air to the object to be inspected when the cleaning liquid is supplied to the magnetized object to be inspected by the cleaning liquid supply unit. Magnetic particle flaw detector. The magnetic particle flaw detector according to any one of claims 1 to 5, wherein the adjusting unit is a flow rate adjusting valve for adjusting the flow rate of the cleaning liquid, which is arranged in a pipe for supplying the cleaning liquid in the cleaning liquid supply unit. .. (A) A step of magnetizing an object to be inspected, supplying an inspection solution containing fluorescent magnetic powder to the object to be inspected, and adhering the fluorescent magnetic powder to the surface of the object to be inspected.
(B) A step of magnetizing the object to be inspected to which fluorescent magnetic powder is attached to the surface.
(C) A step of supplying a cleaning liquid to the object to be inspected and washing away excess fluorescent magnetic powder among the fluorescent magnetic particles adhering to the surface of the object to be inspected.
(D) A step of irradiating the surface of the object to be inspected from which the fluorescent magnetic powder has been washed away with ultraviolet rays to cause the fluorescent magnetic powder remaining on the surface of the object to be inspected to emit fluorescence.
(E) A step of acquiring an image by imaging the fluorescence emitted by the fluorescent magnetic powder.
(F) Step of measuring the brightness of the acquired image,
(G) A step of adjusting the supply of the cleaning liquid to the inspected object or the magnetization of the inspected object.
Have,
In step (g), a magnetic particle flaw detection method in which the supply of the cleaning liquid or the magnetization of the object to be inspected is adjusted so that the measured value of the measured brightness of the image falls within a predetermined range. In the step (g), the amount of the cleaning liquid supplied to the object to be inspected is adjusted so that the measured value of the brightness of the measured image falls within a predetermined range.
The magnetic particle flaw detection method according to claim 7. (H) After the step (g), a second inspected object different from the inspected object is magnetized, the inspection liquid is supplied to the second inspected object, and the surface of the second inspected object is supplied. The fluorescent magnetic powder is attached to the surface, the second inspected object having the fluorescent magnetic powder attached to the surface is magnetized, and the cleaning liquid is supplied to the magnetized second inspected object to supply the cleaning liquid to the second inspected object. The excess fluorescent magnetic powder of the fluorescent magnetic powder adhering to the surface is washed away, and the surface of the second inspected object from which the fluorescent magnetic powder has been washed away is irradiated with the ultraviolet rays, and the second inspected object of the fluorescent magnetic powder is irradiated with the ultraviolet rays. A step of causing the fluorescent magnetic powder remaining on the surface to emit fluorescence, capturing the fluorescence emitted by the fluorescent magnetic powder to acquire an image, and measuring the brightness of the acquired image.
Have,
In the step (h), the amount of the cleaning liquid supplied to the second object to be inspected is adjusted so that the amount of the cleaning liquid is equal to the amount of the cleaning liquid in the step (g). Item 8. The magnetic particle flaw detection method according to Item 8. It is provided with an adhesion treatment unit that performs a treatment for adhering fluorescent magnetic powder to the surface of the object to be inspected, and a cleaning treatment unit that is adjacent to the adhesion treatment unit in a plan view and performs a treatment for washing away the fluorescent magnetic powder.
The adhesion treatment unit supplies a first magnetizing portion that magnetizes the object to be inspected before supplying the inspection solution, and an inspection solution containing fluorescent magnetic powder to the magnetized object to be inspected, and supplies the inspection solution to the object to be inspected. It has an inspection liquid supply unit for adhering the fluorescent magnetic powder to the surface of the inspection object, and a first liquid receiving unit for receiving the inspection liquid supplied to the inspection object by the inspection liquid supply unit.
The cleaning treatment unit supplies the cleaning liquid to the second magnetizing portion that magnetizes the object to be inspected after supplying the inspection liquid and the magnetized object to be inspected, and adheres to the surface of the object to be inspected. A magnetic particle flaw detector having a cleaning liquid supply unit for washing away excess fluorescent magnetic powder and a second liquid receiving unit for receiving the cleaning liquid supplied to the object to be inspected by the cleaning liquid supply unit is used. The magnetic particle flaw detection method according to claim 7, wherein the magnetic particle flaw detection method is performed. The cleaning processing unit has a storage unit for storing the cleaning liquid received by the second liquid receiving unit and a filter unit for separating fluorescent magnetic powder from the cleaning liquid stored in the storage unit.
The magnetic particle flaw detection method according to claim 10, wherein in the step (c), the cleaning liquid from which the fluorescent magnetic powder is separated by the filter unit is supplied to the object to be inspected by the cleaning liquid supply unit. The magnetic particle flaw detection method according to any one of claims 7 to 11, wherein in the step (c), air is supplied to the object to be inspected when the cleaning liquid is supplied to the object to be magnetized. ..

Images