JP2021018247A - Design information proposal device of product inspection apparatus - Google Patents

Abstract

To provide a device capable of selecting an optimal lighting device among a plurality of lighting devices, and proposing an optimal device and its installation condition obtained from a measurement result for an inspection condition of various devices such as a lighting device, a camera and a table.SOLUTION: This invention comprises: a camera 300 that can change an imaging condition including an imaging position for an inspection object; a lighting device 200 that can change a lighting condition including a lighting position for the inspection object; a memory that stores a determination result of determining the surface state of the inspection object from an imaging signal, the imaging condition, and the lighting condition in association with each other; and a monitor that displays the associated determination result, imaging condition and lighting condition.SELECTED DRAWING: Figure 1

Description

The present invention relates to an apparatus for designing an inspection apparatus used for product inspection and the like.

Generally, a device used for product inspection mainly includes a lighting device, a camera, and a table on which an object to be inspected is placed. The design of the inspection device was artificially determined so as to be suitable for the inspection site.

There was a method of calculating an appropriate arrangement position of a lighting device, a camera, a table, etc. by calculation.

Japanese Unexamined Patent Publication No. 2000-121931

However, in the conventional inspection device, the user of the inspection device determines the lighting device to be used in advance, and then the design of the installation of the lighting device is performed based on a predetermined calculation.

Therefore, the present invention has been made in view of the above circumstances, and is obtained from the measurement results for various inspection conditions such as a lighting device, a camera, a table, etc., while selecting the optimum lighting device from a plurality of lighting devices. It is an object of the present invention to provide a device capable of proposing the optimum device and its installation conditions.

The features of the design information proposal device according to the present invention are
A camera that captures an inspection object and outputs an imaging signal, and a camera that can change the imaging conditions including the imaging position with respect to the inspection object.
A lighting device that emits light to illuminate an inspection object and can change the lighting conditions including the lighting position with respect to the inspection object.
A judgment result of determining the surface state of the inspection object from the imaging signal, a memory for storing the imaging condition and the lighting condition in association with each other,
It is provided with a monitor for displaying the associated determination result, the imaging condition, and the lighting condition.

According to the present invention, it is possible to propose an optimum device and its installation conditions obtained from measurement results for various inspection conditions such as a lighting device, a camera, and a table.

It is a perspective view which shows the whole of the design apparatus by 1st Embodiment. It is a perspective view which shows the whole of the design apparatus in 1st Embodiment. It is a perspective view which shows the structure of the robot by 1st Embodiment. It is a perspective view which shows the structure of the robot by 1st Embodiment. It is a perspective view which shows the structure of the robot by 1st Embodiment. It is a perspective view which shows the whole of the inspection table by 1st Embodiment. It is a perspective view which shows the whole of the inspection table by 1st Embodiment. It is a front view which shows the arrangement of a lighting apparatus, a camera, a table, and an inspection object at the time of inspecting a defect by 1st Embodiment. It is a front view which shows the arrangement of a lighting apparatus, a camera, a table, and an inspection object at the time of inspecting a defect by 1st Embodiment. It is a figure which shows the system configuration of the design apparatus by 1st Embodiment. It is a figure which shows the system configuration of the robot by 1st Embodiment. It is a figure which shows the system configuration of the inspection table side by 1st Embodiment. It is a flowchart of inspection design processing by 1st Embodiment. It is a flowchart of inspection design processing by 1st Embodiment. It is a flowchart of the preparation process according to 1st Embodiment. It is a flowchart of lighting switching processing by 1st Embodiment. It is a flowchart of lighting switching processing by 1st Embodiment. It is a flowchart of lighting switching processing by 1st Embodiment. It is a flowchart of the camera angle adjustment process by 1st Embodiment. It is a flowchart of the illumination angle adjustment process by 1st Embodiment. It is a flowchart of the illumination distance adjustment processing by 1st Embodiment. It is a flowchart of the illumination X position adjustment process by 1st Embodiment. It is a flowchart of the diffusion plate adjustment process by 1st Embodiment. It is a flowchart of the image acquisition process by 1st Embodiment. It is a flowchart of image evaluation processing by 1st Embodiment. It is a flowchart of the S / N ratio evaluation process by 1st Embodiment. It is a flowchart of the peak value evaluation process by 1st Embodiment. It is a flowchart of the formation variation evaluation processing by 1st Embodiment. It is a flowchart of the scanning cycle evaluation process by 1st Embodiment. It is a top view image figure of the hand by 1st Embodiment. It is a side image view of the hand by 1st Embodiment. It is a top view image figure of the hand by 1st Embodiment. It is a side image view of the hand by 1st Embodiment. It is an inspection image diagram by 1st Embodiment. It is an inspection image diagram by 1st Embodiment. It is an inspection image diagram by 1st Embodiment. It is an inspection image diagram by 1st Embodiment. This is an example of a monitor display screen according to the first embodiment. It is a figure which shows the system configuration by 1st Embodiment. The example (a) of the inspection object 660 according to the second embodiment, and the imaging results (b) and (c) obtained when the inspection object 660 is imaged by the hyperspectral camera 300-2. Examples (a) to (d) of the inspection target object 660 when the inspection target object 660 is imaged by the hyperspectral camera 300-2 according to the second embodiment. It is a perspective view which shows the whole of the inspection table 600-2 by 2nd Embodiment. It is a figure which shows the system configuration of the design apparatus by 2nd Embodiment. It is a figure which shows the system configuration of the inspection table side by 2nd Embodiment. It is a flowchart which shows the process of generating the evaluation image for evaluating a defect. It is a flowchart which shows the process of determining the optimum wavelength for detecting a defect.

<<<< Overview of inspection equipment design equipment >>>>>
The design information proposal device of the inspection device (hereinafter, also referred to as a design device) is a device used mainly for manufacturing an inspection device used for inspecting whether or not a defect exists in an inspection object. By using this before actually manufacturing the inspection device, it is possible to manufacture the optimum inspection device according to the inspection target in advance. The inspection device design device selects the optimum one from multiple lighting devices, and further, the optimum lighting device position, angle, camera orientation, distance, and inspection target position (inspection target is listed). It is possible to design the position of the table to be placed) and the moving speed of the table.

<<<< Overview of the first embodiment >>>>>
The design device of the first embodiment mainly includes a robot and an inspection table. The robot grips the lighting device, adjusts the position and angle, and changes the lighting device. The inspection table is provided with a camera, a table, a diffuser, etc., and the position and angle of the camera, the height of the table, the moving speed, etc. can be changed so that defects on the inspection object on the table can be optimally detected.

<First embodiment>
The design information proposing device of the first embodiment is
A camera that captures an image of an inspection object and outputs an imaging signal, and a camera that can change the imaging conditions including the imaging position with respect to the inspection object.
A lighting device that emits light to illuminate an inspection object and can change the lighting conditions including the lighting position with respect to the inspection object.
A judgment result of determining the surface state of the inspection object from the imaging signal, a memory for storing the imaging condition and the lighting condition in association with each other,
It is a design information proposal device including a monitor for displaying the associated determination result, imaging conditions, and lighting conditions.

The design information proposing device of the first embodiment includes a camera (for example, camera 300), a lighting device (for example, lighting device 200), a memory (for example, RAM 730), and a monitor (for example, monitor 831). The illuminator illuminates the object to be inspected. The camera captures the object to be inspected. The memory stores the determination result, the imaging condition of the camera at the time of imaging, and the lighting condition of the lighting device in association with each other. The monitor displays the associated determination result, imaging condition, and lighting condition.

Defects to be inspected for inspection objects are typically convex defects, streak-like defects, concave defects, dents, and dust, and these defects are the inspection objects. Present on the surface. These defects can be detected by illuminating the inspection object with a lighting device. The defects to be inspected are not limited to these, and other types may be used as long as they can be optically detected.

As shown in FIG. 1, the design information proposal device includes a camera 300 and a lighting device 200. As shown in FIG. 34, the PC 700 has a determination result (for example, a score), an imaging condition (for example, a camera angle) when the camera 300 takes an image, and an illumination condition (for example, an illumination angle, an illumination distance, and an illumination X position). , Dimming output value) is stored in association with each other, and the associated determination result (for example, score), imaging condition, and illumination condition are displayed on the monitor 831.

In this way, the PC 700 (CPU 710) determines the imaging result of the camera 300, and the imaging result, the imaging condition at the time of imaging, and the lighting condition at the time of imaging are associated with each other and the data is displayed on the monitor. It is possible to propose design information of various inspection devices.

<Second embodiment>
The design information proposing device of the second embodiment is described in the first embodiment.
With more controllers
The controller
It is a design information proposal device that determines the state of the surface of an inspection object by determining the shape of the unevenness on the surface of the inspection object.

The PC700 (CPU710) performs a plurality of evaluations (S / N ratio evaluation processing in step 2500, peak value evaluation processing in step 2600, formation variation evaluation processing in step 2700) for the surface condition of the inspection object, and inspects the surface condition. The state of the surface is determined by determining the shape of the unevenness on the surface of the object.

In this way, by determining the shape of the unevenness on the surface of the inspection object and determining the surface condition of the inspection object, the surface condition (for example, when there is a defect) can be detected most clearly. Can be proposed.

<Third embodiment>
In the second embodiment, the design information proposing device according to the third embodiment is used.
Further equipped with a robot that grips the lighting device and moves it to a predetermined lighting position.
The controller is a design information proposal device that controls the robot.

As shown in FIGS. 1, 9, 12, 12 and the like, the PC 700 of the design information proposal device can control the robot 100 to move the position of the lighting device 200.

In this way, the PC 700 (CPU710) can change the imaging conditions, change the lighting conditions, determine the imaging data, and display them on the monitor 831 in association with each other. Therefore, the information was obtained in the design information proposal device. Optimal design information can be proposed based on the data.

<<<<< First Embodiment >>>>>
Hereinafter, the first embodiment of the present invention will be described with reference to the drawings. In the present specification and drawings, the components having the same reference numerals shall have substantially the same structure or function.

<<< Configuration of design information proposal device (design device) for inspection device >>>
The design apparatus of the inspection apparatus according to the first embodiment will be described with reference to FIGS. 1 and 2. The design device for the inspection device according to the first embodiment mainly includes a robot 100 and an inspection table 600.

In FIG. 1, the x-axis, the y-axis, and the z-axis are shown as three axes orthogonal to each other. The tip side of the arrow indicating each axis is "+ (positive)" and the base end side is "-(negative)". ) ”. Further, the z-axis direction in FIG. 1 is defined as the "z direction" or the "vertical direction", and the direction along the xy plane is defined as the "horizontal direction". Further, the + z-axis side is "upper" and the -z-axis side is "downward".

In the following, for convenience of explanation, the upper part may be referred to as "upper" or "upper side", and the lower part may be referred to as "lower side" or "lower side". Further, the side in which the second storage portion 910 is installed in FIG. 1 may be referred to as a "base end (side)", and the opposite side thereof may be referred to as a "tip (side)". The vertical direction is the vertical direction.

As used herein, the term "horizontal" refers to a direction that intersects the gravity of the earth at right angles, and includes not only a case where it is completely horizontal but also a case where it is tilted within ± 5 ° with respect to the horizontal. Similarly, as used herein, the term "vertical" refers to the direction of gravity or the direction perpendicular to the horizontal plane, not only when it is completely vertical, but also when it is tilted within ± 5 ° with respect to the vertical. Also includes. Further, in the present specification, "parallel" means that two straight lines on the same plane (or two planes of space or one straight line and one plane) do not intersect with each other no matter how long they extend, and the two lines (axises). Includes) or planes are not only perfectly parallel to each other, but also tilted within ± 5 °. Further, as used herein, the term "orthogonal" includes not only the case where two lines (including axes) or planes are completely orthogonal to each other but also the case where they are inclined within ± 5 °.

The robot 100 and the inspection table 600 are provided so as to face each other. A first storage unit 900 is provided on one side of the robot 100, and a second storage unit 910 is provided on the other side. A plurality of line lights 210 (six in this example) are stored in the first storage unit 900, and a plurality of plate-shaped light guides 220 (two in this example) are stored in the second storage unit 910. The robot 100 can grasp one line illumination 210 by the first storage unit 900 and take out the line illumination 210 from the first storage unit 900. The first storage unit 900 houses the first line illumination 211, the second line illumination 212, the third line illumination 213, the fourth line illumination 214, the fifth line illumination 215, and the sixth line illumination 216. The robot 100 can grasp one plate-shaped light guide 220 by the second storage unit 910 and take out the plate-shaped light guide 220 from the second storage unit 910. The first plate-shaped light guide 221 and the second plate-shaped light guide 222 are stored in the second storage portion 910. Hereinafter, the line illumination 210 and the plate-shaped light guide 220 may be collectively referred to as an illumination device 200.

The line illumination 210 is an illumination device mainly including a plurality of light sources (for example, LEDs and the like), a rod lens, and a diffuser lens. The line illumination 210 has a long box shape and is opened so that light can be emitted from one predetermined surface. The line illumination 210 is supplied with electric power from the power supply device 810 described later. The line illumination 210 receives a control signal emitted from the CPU 710 of the PC 700, which will be described later, via the power supply device 810, and controls the output of light.

The first line illumination 211 is, for example, an illumination device that emits white light. The second line illumination 212 is, for example, an illumination device that emits red light. The third line illumination 213 is, for example, an illumination device that emits blue light. The fourth line illumination 214 is, for example, an illumination device including a diffuser in the illumination device. The fifth line illumination 215 is, for example, an illumination device having a thinner light emitting surface than other line illuminations. The sixth line illumination 216 is, for example, an illumination device in which a dark field mask is applied in a line shape at a constant width of a substantially central portion in the lateral direction of the light emitting surface.

The plate-shaped light guide 220 is a lighting device in which the tips of optical fibers are arranged in a row on one surface of the outlet of the plate-shaped light guide 220 to emit light to the outside to illuminate a predetermined direction. The light of the box lighting 820, which will be described later, is emitted through a cable (liquid light guide 157), and the emitted light is incident on the plate-shaped light guide 220, whereby the plate-shaped light guide 220 illuminates the object to be inspected. Can be done. The plate-shaped light guide 220 and the liquid light guide 157 are detachably attached in contact with each other. By doing so, the light emitted from the box lighting 820 can be guided to the plate-shaped light guide 220 without leakage, and the inspection object can be accurately illuminated.

The plate-shaped light guides 220 (two in this example) have different degrees of diffusion, for example.

The inspection table 600 includes a camera 300, a table 400 on which an inspection object 660 is placed, a diffusion plate 500 (first diffusion plate 510, a second diffusion plate 520), a third storage unit 920, and a fourth. It has a storage unit 930.

With this configuration, the inspection target object 660 can be illuminated with the light emitted from the lighting device 200 held by the robot 100, and the inspection target object 660 can be imaged by the camera 300. By imaging the inspection target 660, defects in the inspection target 660 can be found, and when the defects in the inspection target 660 can be found appropriately, the type of lighting device, the position and angle of the lighting device, the position and angle of the camera, etc. Data on the design of the optical system can be obtained.

<<< Explanation of components >>>
<< Robot 100 >>
Next, the configuration of the robot 100 will be described with reference to FIGS. 3 to 5. The robot 100 mainly has a base 101, a base 110, a first arm 120, a second arm 130, a third arm 140, and a hand 150. The robot 100 is a 6-axis robot and further has a hand 150. The robot 100 is attached in the order of base 101 ⇒ base 110 ⇒ first arm 120 ⇒ second arm 130 ⇒ third arm 140 ⇒ hand 150 from below, and the base 101 side is the rear end side (near end side). , The hand 150 side may be referred to as the front end side (far end side). For example, the front end side of the base 110 may be used so as to be attached to the rear end side of the first arm 120.

<Base 101>
The base 101 is installed at a fixed position on the floor or the base of the design device. The lower part of the base 110 is attached to the upper part of the base 101.

<Base 110>
The base 110 is attached to the upper part of the base 101. The base 110 has a base rotating portion 111. The base rotation unit 111 rotates around the base rotation axis ax1, that is, it rotates in the a1 direction (base rotation direction a1) shown in the drawing in the forward and reverse directions. Even when the base rotating portion 111 rotates in the a1 direction, the base 110 does not rotate.

<First arm 120>
The first arm 120 is attached to the base 110. The first arm 120 has a first arm swinging portion 121. The first arm swing portion 121 swings (forward and reverse rotation at an angle of 360 degrees or less) about the first arm swing shaft ax2, that is, in the a2 direction (first arm swing direction) shown in the figure. Swing to a2). When the first arm swinging portion 121 swings in the a2 direction, the first arm 120 swings in the a2 direction.

<Second arm 130>
The second arm 130 is attached to the first arm 120. The second arm 130 has a second arm swinging portion 131, a second arm rotating portion 132, and a second arm main body portion 135. The second arm swing portion 131 swings (forward and reverse rotation at an angle of 360 degrees or less) about the second arm swing shaft ax3, that is, in the a3 direction (second arm swing direction) shown in the figure. Swing to a3). When the second arm swinging portion 131 swings in the a3 direction, the second arm 130 swings in the a3 direction. The second arm rotation unit 132 rotates around the second arm rotation axis ax4, that is, rotates in the a4 direction (second arm rotation direction a4) shown in the drawing in the forward and reverse directions. When the second arm rotating portion 132 rotates in the a4 direction, the second arm main body portion 135 rotates in the a4 direction. Even when the second arm rotating portion 132 rotates in the a4 direction, the second arm swinging portion 131 does not rotate.

<Third arm 140>
The third arm 140 is attached to one end side of the second arm main body 135 of the second arm 130. The third arm 140 has a third arm swinging portion 141 and a third arm rotating portion 142. The third arm swing portion 141 swings (forward and reverse rotation at an angle of 360 degrees or less) about the third arm swing shaft ax5, that is, in the a5 direction (third arm swing direction) shown in the figure. Swing to a5). When the third arm swinging portion 141 swings in the a5 direction, the third arm 140 swings in the a5 direction. The third arm rotation unit 142 rotates around the third arm rotation axis ax6, that is, rotates in the a6 direction (third arm rotation direction a6) shown in the drawing in the forward and reverse directions. Even when the third arm rotating portion 142 rotates in the a6 direction, the third arm swinging portion 141 does not rotate.

<Hand 150>
The hand 150 is attached to the third arm rotating portion 142 of the third arm 140. The details of the hand 150 will be described later (see FIG. 5 if necessary), but it mainly has a first grip portion 151, a second grip portion 152, and a fixing portion 153. The first grip portion 151 and the second grip portion 152 move in the a7 direction by an air cylinder or the like (not shown) provided in the fixing portion 153. The lighting device 200 is gripped by the first grip portion 151 and the second grip portion 152.

<Operation of robot 100>
The robot 100 is basically driven so that the end portion of the third arm rotating portion 142 is in a desired position and a desired orientation. As a result, the illuminating device 200 gripped by the hand 150 has a desired position and a desired orientation, and the inspection object 660 can be illuminated at a desired distance and angle.

<< Inspection table 600 >>
Next, the configuration of the inspection table 600 will be described with reference to FIGS. 6 and 7. The inspection table 600 is a device for mounting the inspection target object 660 and imaging a defect of the inspection target object 660. The inspection table 600 is configured so that the position of the table 400, the position and angle of the camera 300, the distance to the inspection object 660, the presence / absence of the first diffusion plate 510 or the second diffusion plate 520, the position, and the like can be changed. In the first diffuser plate 510 and the second diffuser plate 520, minute irregularities are formed on the surface to diffuse the transmitted light (diffuser lens). The degree of diffusion can be determined by the size and shape of the unevenness.

The inspection table 600 includes an inspection table base 610, a table X stage 620, a table Z stage 621, a support portion 630, a first diffusion plate X stage 631, a first diffusion plate Z stage 632, and a second diffusion plate. It mainly has an X stage 640, a second diffusion plate Z stage 641, a camera θ stage 650, a camera θ guide 651, a camera linear motion stage 652, and a third storage unit 920.

<Inspection table base 610>
The inspection table base 610 is a base portion of the inspection table 600, and is installed at a predetermined position on the floor or the table of the design device. A table X stage 620, a camera linear motion stage 652, a support portion 630, a second diffusion plate X stage 640, a third storage portion 920, and the like are mainly attached to the inspection table base 610.

<Table X stage 620>
The table X stage 620 is attached to the inspection table base 610. The table X stage 620 is a stage for moving the table 400 in the X-axis direction (XT direction in the drawing). A table Z stage 621 is attached to the table X stage 620. By driving a motor or the like provided on the table X stage 620, the table Z stage 621 can move in the XT direction, that is, reciprocate in the + X direction and the −X direction.

<Table Z stage 621>
The table Z stage 621 is a stage for moving the table 400 in the ZT direction (both the + Z direction and the −Z direction) in the drawing. A table 400 is attached to the table Z stage 621. The table 400 moves in the ZT direction by driving a motor or the like provided on the table Z stage 621. That is, it can reciprocate in the + Z direction and the −Z direction.

<Table 400>
The table 400 is a table on which the inspection object 660 is placed. An opening 410 is formed in the table 400. The opening 410 allows light emitted from the illuminating device 200 to pass through. When the inspection object 660 is inspected by transmitted light, the inspection object 660 is placed in the opening 410, the lighting device 200 is positioned below the table 400, and the light emitted from the lighting device 200 is emitted from the opening 410. The inspection object 660 is irradiated through. When the inspection target object 660 is inspected by reflected light, the inspection target object 660 is placed in the opening 410, and the lighting device 200 is positioned above the table 400 to inspect the light emitted from the lighting device 200. The object 660 is irradiated. When the inspection object 660 is illuminated by the lighting device 200 from above the table 400, a glass plate or the like may be placed in the opening 410. When the inspection object 660 is illuminated by the lighting device 200 from below the table 400, it is preferable not to place a glass plate or the like on the opening 410.

<Camera direct motion stage 652>
The camera direct-acting stage 652 is attached to the inspection table base 610. A camera θ stage 650, a camera θ guide 651, and a camera support portion 653 are attached to the camera direct motion stage 652. The camera linear motion stage 652 is a stage for adjusting the distance between the camera 300 and the inspection object 660 of the table 400, and in FIG. 6, it moves in the LC direction. As will be described later, the camera direct-acting stage 652 can be rotated by the camera θ stage 650, and the LC direction is the radial direction. When a motor or the like provided in the camera direct-acting stage 652 is driven, the camera support portion 653, which will be described later, moves in the LC direction, and the position of the camera 300 moves in the LC direction. In this way, the position of the camera 300 can be adjusted by moving the camera 300 closer to or further from the inspection object 660.

<Camera θ stage 650, camera θ guide 651>
The camera θ stage 650 is a stage for adjusting the tilt of the camera direct motion stage 652, in other words, the tilt of the camera 300. When the motor or the like provided in the camera θ stage 650 is driven, the camera direct motion stage 652 moves along the camera θ guide 651, and thus moves in the θC direction in FIG. That is, the tilt of the camera 300 also moves in the θC direction. When θ = 0, the direction is vertical.

<Camera support 653>
The camera support portion 653 holds the camera 300 in a fixed position. As described above, the camera support portion 653 is attached to the camera linear motion stage 652. By driving a motor or the like provided in the camera direct motion stage 652, the camera support portion 653 moves in the LC direction, and the position of the camera 300 moves in the LC direction.

<Camera 300>
The camera 300 is a line sensor camera. The camera 300 is attached to the camera support portion 653. The camera 300 has, for example, an image pickup element such as a CCD imaging sensor element or a CMOS imaging element. The camera 300 uses an image sensor to photograph the surface and defects of the inspection object 660 and outputs an image pickup signal.

<Support part 630>
The support portion 630 has an elongated shape and is attached to the inspection table base 610 so as to extend in the vertical direction. The first diffusion plate X stage 631 is attached to the support portion 630.

<1st diffusion plate X stage 631>
The first diffusion plate X stage 631 is attached to the support portion 630. The first diffusion plate Z stage 632 is attached to the first diffusion plate X stage 631. The first diffusion plate X stage 631 is a stage for moving the first diffusion plate Z stage 632 in the XD1 direction in the drawing. That is, it can reciprocate in the + X direction and the −X direction. The first diffusion plate Z stage 632 moves in the XD1 direction by driving a motor or the like provided on the first diffusion plate X stage 631.

<1st diffusion plate Z stage 632>
The first diffusion plate Z stage 632 is attached to the first diffusion plate X stage 631. The first diffusion plate support portion 633 is attached to the first diffusion plate Z stage 632. The first diffusion plate Z stage 632 is a stage for moving the first diffusion plate support portion 633 in the ZD1 direction in the drawing. That is, it can reciprocate in the + Z direction and the −Z direction. The first diffuser plate support portion 633 moves in the ZD1 direction by being driven by a motor or the like provided on the first diffuser plate Z stage 632.

<First diffusion plate support portion 633, first diffusion plate grip portion 634>
The first diffusion plate support portion 633 is attached to the first diffusion plate Z stage 632. The first diffusion plate support portion 633 has a first diffusion plate grip portion 634. The first diffusion plate gripping portion 634 can be gripped by sandwiching the first diffusion plate 510 from above and below with two gripping plates. The two grip plates can grip the first diffusion plate 510 by driving a solenoid or the like. Further, by operating the first diffusion plate advancing / retreating cylinder 507 (not shown) with compressed air, the first diffusion plate support portion 633 can change the first diffusion plate 510 to the advance position and the retracted position. Further, by operating the first diffusion plate gripping cylinder 509 with compressed air, the first diffusion plate gripping portion 634 is configured to be able to grip the first diffusion plate 510.

<First diffusion plate 510>
The first diffusion plate 510 is gripped by the first diffusion plate grip portion 634 and is arranged above the table 400 as needed. When the illuminating device 200 illuminates the inspection object 660 from above the table, the light emitted from the illuminating device 200 is diffused by the first diffusing plate 510, and the diffused light is irradiated to the inspection object 660. The angle φ of the first diffuser plate 510 can be changed by a first diffuser plate angle motor 505 (not shown).

<Second diffusion plate X stage 640>
The second diffuser plate X stage 640 is attached to the inspection table base 610. The second diffusion plate Z stage 641 is attached to the second diffusion plate X stage 640. The second diffusion plate X stage 640 is a stage for moving the second diffusion plate Z stage 641 in the XD2 direction in the drawing. That is, it can reciprocate in the + X direction and the −X direction. The second diffuser plate Z stage 641 moves in the XD2 direction by being driven by a motor or the like provided in the second diffuser plate X stage 640.

<Second diffusion plate Z stage 641>
The second diffuser plate Z stage 641 is attached to the second diffuser plate X stage 640. A second diffuser plate support portion 642 is attached to the second diffuser plate Z stage 641. The second diffusion plate Z stage 641 is a stage for moving the second diffusion plate support portion 642 in the ZD2 direction in the drawing. That is, it can reciprocate in the + Z direction and the −Z direction. The second diffuser plate support portion 642 moves in the ZD2 direction by being driven by a motor or the like provided in the second diffuser plate Z stage 641.

<Second diffusion plate support portion 642, second diffusion plate grip portion 643>
The second diffuser plate support portion 642 is attached to the second diffuser plate Z stage 641. The second diffuser plate support portion 642 has a second diffuser plate grip portion 643. The second diffusion plate gripping portion 643 can be gripped by sandwiching the second diffusion plate 520 from above and below with two gripping plates. Further, by operating the second diffusion plate advancing / retreating cylinder 517 (not shown) with compressed air, the second diffusion plate support portion 642 can change the second diffusion plate 520 to the advance position and the retracted position. Further, by operating the second diffusion plate gripping cylinder 519 with compressed air, the second diffusion plate gripping portion 643 is configured to be able to grip the second diffusion plate 520.

<Second diffusion plate 520>
The second diffuser plate 520 is gripped by the second diffuser plate gripping portion 643 and is arranged below the table 400 as needed. When the lighting device 200 illuminates the inspection object 660 from below the table, the light emitted from the lighting device 200 is diffused by the second diffuser plate 520, and the diffused light is irradiated to the inspection object 660. The angle φ2 of the second diffuser plate 520 can be changed by a second diffuser plate angle motor 515 (not shown).

<Third storage unit 920>
The third storage unit 920 is attached to the inspection table base 610. The third storage unit 920 stores a plurality of first diffusion plates 510 (two in this example). It is possible to store a plurality of diffusion plates having different degrees of diffusion.

<4th storage unit 930>
The fourth storage unit 930 is attached to the inspection table base 610. The fourth storage unit 930 stores a plurality of second diffusion plates 520 (two in this example). It is possible to store a plurality of diffusion plates having different degrees of diffusion.

The first diffusion plate 510 and the second diffusion plate 520 may have the same degree of diffusion.

<<< Supplement to the functions of Robot 100 >>>
Next, the functions of the robot 100 will be supplementarily described with reference to FIGS. 3 to 5.

<Base rotating part 111>
By rotating the base rotating portion 111 of the base 110 in the a1 direction, the members on the far end side of the base 110 (the second arm 130, the third arm 140, and the hand 150 beyond the first arm 120) are integrated in the a1 direction. Rotate to.

<First arm swing portion 121>
When the first arm swinging portion 121 of the first arm 120 swings in the a2 direction, the first arm 120 swings in the a2 direction, and accordingly, a member on the far end side of the first arm 120 (the first member). The third arm 140 beyond the two arms 130 and the hand 150) integrally swing in the a2 direction.

<Second arm swinging part 131>
When the second arm swinging portion 131 of the second arm 130 swings in the a3 direction, the second arm 130 swings in the a3 direction, and accordingly, a member on the far end side of the second arm 130 (the first member). The hands 150) beyond the 3 arms 140 swing in the a3 direction as a unit.

<Second arm rotating part 132>
When the second arm rotating portion 132 of the second arm 130 rotates in the a4 direction, the second arm main body portion 135 rotates in the a4 direction, and accordingly, a member on the far end side of the second arm 130 (third). The hand 150) beyond the arm 140 rotates as a unit in the a4 direction.

<Third arm swinging part 141>
When the third arm swinging portion 141 of the third arm 140 swings in the a5 direction, the third arm 140 swings in the a5 direction, and accordingly, a member (hand) on the far end side of the third arm 140. 150) swings in the a5 direction as a unit.

<Third arm rotating part 142>
When the third arm rotating portion 142 of the third arm 140 rotates in the a6 direction, the hand 150 rotates in the a6 direction.

<<< Change of position / angle of lighting device 200 >>>
Next, the change of the position and the angle of the lighting device 200 will be described with reference to FIG. 8A. FIG. 8A is a front view showing the arrangement of the lighting device 200, the camera 300, the table 400, and the inspection object 660 when inspecting a defect. As described above, the lighting device 200 is gripped by the first grip portion 151 and the second grip portion 152 of the robot 100. Illumination light I is emitted from the illumination device 200 to the inspection object 660 placed on the table 400.

The position of the lighting device 200 and the inspection object 660 can be adjusted by swinging each swinging portion of the robot 100. Specifically, it is possible to move the position of the lighting device 200 in the distance direction from the inspection object 660 in FIG. 8A, horizontal to the table 400, and in the X direction.

By rotating each rotating portion of the robot 100, the angle of the lighting device 200, in other words, the emission angle of the illumination light I can be adjusted. Specifically, it is possible to change the angle θ of the illumination device 200 and the illumination light I in FIG. 8 (A).

<<< Change the position and angle of the diffuser >>
Next, the change of the position and the angle of the first diffusion plate 510 will be described with reference to FIG. 8 (B). FIG. 8B is a front view showing the arrangement of the lighting device 200, the camera 300, the table 400, the first diffusion plate 510, and the inspection object 660 when inspecting a defect. The lighting device 200 is gripped by the first grip portion 151 and the second grip portion 152 of the robot 100. Illumination light I is emitted from the illumination device 200 to the inspection object 660 placed on the table 400. In FIG. 8B, a first diffusion plate 510 is provided between the lighting device 200 and the inspection object 660. The first diffusion plate 510 can be moved in the distance direction from the inspection object 660 shown in FIG. 8B by the first diffusion plate X stage 631 and the first diffusion plate Z stage 632. Further, the angle φ of the first diffusion plate 510 can be changed by the first diffusion plate angle motor 505.

Although detailed description is omitted, when the illuminating device 200 illuminates the inspection object 660 from below the table 400, the illuminating device 200 can move between the table 400 and the illuminating device 200, in other words, the illuminating device 200. It is movable in the distance direction between the 200 and the table 400. The second diffuser plate 520 is movable between the lighting device 200 and the table 400 (movable in the distance direction), and the angle φ2 can be changed by the second diffuser plate angle motor 515.

<<< System configuration >>>
Next, the system configuration of the design apparatus will be described with reference to FIG.

The PC (personal computer) 700 mainly includes a CPU 710, a ROM 720, a RAM 730, a robot controller 740, a camera controller 750, a motion controller 760, a communication interface 780, and a communication interface 830.

The PC 700 controls the robot 100, the position and angle of the camera 300, the position of the table 400, the position and angle of the first diffusion plate 510, the position and angle of the second diffusion plate 520, and line illumination. Dimming control of 210 and the like are performed.

The robot controller 740 is a controller for controlling a drive source (motor or the like) of the robot 100. The robot controller 740 generates a drive signal from the control signal output from the CPU 710, and transmits the drive signal to the drive sources of each swinging portion and each rotating portion of the robot 100. Each drive source is driven in a rotation direction, a rotation speed, or the like according to a drive signal.

The camera controller 750 is a controller for controlling the imaging of the camera 300 and processing the image captured by the camera 300. The camera controller 750 and the camera 300 are connected by a cable or the like.

The motion controller 760 includes a table X stage 620, a table Z stage 621, a first diffusion plate X stage 631, a first diffusion plate Z stage 632, a first diffusion plate angle motor 505, and a second diffusion plate X provided in the inspection table 600. This is a controller for controlling the drive sources (motors, etc.) of the stage 640, the second diffuser plate Z stage 641, the second diffuser plate angle motor 515, the camera θ stage 650, and the camera linear motion stage 652. The motion controller 760 includes a motor driver, generates a drive signal from the control signal output from the CPU 710, and transmits the drive signal to the drive source of each stage. Each drive source is driven in a rotation direction, a rotation speed, or the like according to a drive signal. The motion controller 760 and the motion terminal block 770 are connected by a cable or the like, and the motion terminal block 770 and each stage or the like are connected by a cable or the like. The drive signal transmitted from the motion controller 760 will be transmitted to a drive source such as a corresponding stage via the motion terminal block 770.

The communication interface 780 is connected to the I / O unit 790 with a cable or the like. The I / O unit 790 is connected to the I / O terminal block 800 with a cable or the like. The I / O terminal block 800 includes a power supply device 810, a box lighting 820, a first diffusion plate advance / retreat cylinder 507, a second diffusion plate advance / retreat cylinder 517, a first diffusion plate grip cylinder 509, a second diffusion plate grip cylinder 519, and a hand grip. It is connected to the cylinder 190 with a cable or the like. The power supply device 810 is connected to the line illumination 210 by a cable or the like. The box lighting 820 is connected to the plate-shaped light guide 220 by a liquid light guide 157 or the like. The power supply device 810 transmits a command to the line illumination 210 based on the control command transmitted from the CPU 710, and the line illumination 210 emits light at a dimming value based on the received command. The box illumination 820 emits light based on a control command transmitted from the CPU 710, and causes the light to enter the plate-shaped light guide 220 via the liquid light guide 157. The first diffusion plate advance / retreat cylinder 507 operates based on a control command transmitted from the CPU 710. The second diffuser plate advance / retreat cylinder 517 operates based on a control command transmitted from the CPU 710. The first diffusion plate gripping cylinder 509 operates based on a control command transmitted from the CPU 710. The second diffuser plate gripping cylinder 519 operates based on the control command transmitted from the CPU 710. The hand gripping cylinder 190 operates based on a control command transmitted from the CPU 710.

The communication interface 830 is connected to a monitor 831 (in this example, the first monitor 8310 and the second monitor 8311 are provided), a mouse 832, and a keyboard 833. The monitor 831 displays an image captured by the camera 300. The mouse 832 and the keyboard 833 are used for setting measurement conditions and the like.

<<< System configuration of robot 100 >>>
Next, the system configuration of the robot 100 will be described with reference to FIG. As described above, the robot controller 740 transmits a drive signal to the drive sources of each swinging portion and each rotating portion of the robot 100. The hand cylinder controller 747 is connected to the I / O terminal block 800, and the CPU 710 transmits a drive signal to the hand gripping cylinder 190 via the I / O terminal block 800.

Specifically, when a drive signal is transmitted from the robot controller 740 to the first axis motor controller 741, the first axis motor controller 741 transmits a drive signal to the first axis drive motor 112 based on the received drive signal. To do. The first-axis drive motor 112 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the base rotation unit 111 rotates in the a1 direction shown in FIGS. 3 to 5.

When the drive signal is transmitted from the robot controller 740 to the second axis motor controller 742, the second axis motor controller 742 transmits the drive signal to the second axis drive motor 122 based on the received drive signal. The second axis drive motor 122 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the first arm swing portion 121 swings in the a2 direction shown in FIGS. 3 to 5.

When the drive signal is transmitted from the robot controller 740 to the third axis motor controller 743, the third axis motor controller 743 transmits the drive signal to the third axis drive motor 133 based on the received drive signal. The third axis drive motor 133 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the second arm swing portion 131 swings in the a3 direction shown in FIGS. 3 to 5.

When the drive signal is transmitted from the robot controller 740 to the fourth axis motor controller 744, the fourth axis motor controller 744 transmits the drive signal to the fourth axis drive motor 134 based on the received drive signal. The fourth axis drive motor 134 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the second arm rotation unit 132 rotates in the a4 direction shown in FIGS. 3 to 5.

When the drive signal is transmitted from the robot controller 740 to the fifth axis motor controller 745, the fifth axis motor controller 745 transmits the drive signal to the fifth axis drive motor 143 based on the received drive signal. The fifth-axis drive motor 143 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the third arm swing portion 141 swings in the a5 direction shown in FIGS. 3 to 5.

When the drive signal is transmitted from the robot controller 740 to the 6-axis motor controller 746, the 6-axis motor controller 746 transmits the drive signal to the 6-axis drive motor 144 based on the received drive signal. The sixth axis drive motor 144 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the third arm rotation unit 142 rotates in the a6 direction shown in FIGS. 3 to 5.

When a drive signal is transmitted from the CPU 710 to the hand cylinder controller 747 via the I / O terminal block 800, the hand cylinder controller 747 transmits a drive signal to the hand grip cylinder 190 based on the received drive signal. The hand gripping cylinder 190 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the first grip portion 151 and the second grip portion 152 move in the a7 direction shown in FIG.

<<< System configuration on the inspection table 600 side >>>
Next, the system configuration on the inspection table 600 side will be described with reference to FIG. As described above, the motion controller 760 transmits a drive signal to a drive source (motor or the like) such as each stage on the inspection table 600 side via the motion terminal block 770.

When the drive signal is transmitted from the motion controller 760 to the camera θ controller 771, the camera θ controller 771 transmits the drive signal to the camera θ drive motor 310 of the camera θ stage 650 based on the received drive signal. The camera θ drive motor 310 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the camera direct motion stage 652 is tilted along the camera θ guide 651 (in the θC direction in FIG. 6), and the camera 300 is accompanied by this. Tilts in the θC direction of FIG.

When the drive signal is transmitted from the motion controller 760 to the camera direct motion controller 772, the camera linear motion controller 772 transmits a drive signal to the camera direct motion drive motor 320 of the camera linear motion stage 652 based on the received drive signal. .. The camera direct drive motor 320 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, the camera support portion 653 moves in the LC direction shown in FIGS. 6 and 7, and the camera 300 moves accordingly in FIG. And move in the LC direction of FIG.

When the drive signal is transmitted from the motion controller 760 to the table X controller 773, the table X controller 773 transmits the drive signal to the table X drive motor 430 of the table X stage 620 based on the received drive signal. The table X drive motor 430 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the table 400 moves in the XT direction shown in FIGS. 6 and 7. When the inspection target object 660 is placed on the table 400, the placed inspection target object 660 also moves in the XT direction.

When the drive signal is transmitted from the motion controller 760 to the table Z controller 774, the table Z controller 774 transmits the drive signal to the table Z drive motor 440 of the table Z stage 621 based on the received drive signal. The table Z drive motor 440 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the table 400 moves in the ZT direction shown in FIGS. 6 and 7. When the inspection target object 660 is placed on the table 400, the placed inspection target object 660 also moves in the ZT direction.

When a drive signal is transmitted from the motion controller 760 to the first diffusion plate X controller 775, the first diffusion plate X controller 775 drives the first diffusion plate X of the first diffusion plate X stage 631 based on the received drive signal. A drive signal is transmitted to the motor 501. The first diffusion plate X drive motor 501 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the first diffusion plate Z stage 632 and the like are integrally moved in the XD1 direction shown in FIGS. 6 and 7. Along with this, the first diffusion plate 510 moves in the XD1 direction of FIGS. 6 and 7.

When a drive signal is transmitted from the motion controller 760 to the first diffusion plate Z controller 776, the first diffusion plate Z controller 776 drives the first diffusion plate Z of the first diffusion plate Z stage 632 based on the received drive signal. A drive signal is transmitted to the motor 502. The first diffusion plate Z drive motor 502 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the first diffusion plate support portion 633 or the like is integrally moved in the ZD1 direction shown in FIGS. 6 and 7. Along with this, the first diffusion plate 510 moves in the ZD1 direction of FIGS. 6 and 7.

When the drive signal is transmitted from the motion controller 760 to the first diffuser angle controller 504, the first diffuser angle controller 504 transmits the drive signal to the first diffuser angle motor 505 based on the received drive signal. The first diffusion plate angle motor 505 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the first diffusion plate grip portion 634 rotates, and the angle of the first diffusion plate 510 changes accordingly.

When a drive signal is transmitted from the motion controller 760 to the second diffuser plate X controller 777, the second diffuser plate X controller 777 drives the second diffuser plate X of the second diffuser plate X stage 640 based on the received drive signal. A drive signal is transmitted to the motor 511. The second diffusion plate X drive motor 511 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the second diffusion plate Z stage 641 and the like are integrally moved in the XD2 direction shown in FIGS. 6 and 7. Along with this, the second diffusion plate 520 moves in the XD2 direction of FIGS. 6 and 7.

When a drive signal is transmitted from the motion controller 760 to the second diffusion plate Z controller 778, the second diffusion plate Z controller 778 drives the second diffusion plate Z of the second diffusion plate Z stage 641 based on the received drive signal. A drive signal is transmitted to the motor 512. The second diffusion plate Z drive motor 512 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the second diffusion plate support portion 642 or the like is integrally moved in the ZD2 direction shown in FIGS. 6 and 7. Along with this, the second diffusion plate 520 moves in the ZD2 direction of FIGS. 6 and 7.

When the drive signal is transmitted from the motion controller 760 to the second diffuser angle controller 514, the second diffuser angle controller 514 transmits the drive signal to the second diffuser angle motor 515 based on the received drive signal. The second diffusion plate angle motor 515 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, and the second diffusion plate grip portion 643 rotates, and the angle of the second diffusion plate 520 changes accordingly.

When a drive signal is transmitted from the I / O terminal block 800 to the first diffusion plate advance / retreat controller 506, the first diffusion plate advance / retreat controller 506 sends a drive signal to the first diffusion plate advance / retreat cylinder 507 based on the received drive signal. Send. The first diffusion plate advance / retreat cylinder 507 is driven in response to a drive signal, and the position of the first diffusion plate 510 changes to an advance position and a retract position.

When a drive signal is transmitted from the I / O terminal block 800 to the first diffusion plate gripping controller 508, the first diffusion plate gripping controller 508 sends a drive signal to the first diffusion plate gripping cylinder 509 based on the received drive signal. Send. The first diffusion plate gripping cylinder 509 is driven in response to a drive signal, and the first diffusion plate gripping portion 634 can grip the first diffusion plate 510.

When a drive signal is transmitted from the I / O terminal block 800 to the second diffuser plate advance / retreat controller 516, the second diffuser plate advance / retreat controller 516 sends a drive signal to the second diffuser plate advance / retreat cylinder 517 based on the received drive signal. Send. The second diffusion plate advance / retreat cylinder 517 is driven in response to a drive signal, and the position of the second diffusion plate 520 changes to an advance position and a retract position.

When a drive signal is transmitted from the I / O terminal block 800 to the second diffusion plate gripping controller 518, the second diffusion plate gripping controller 518 sends a drive signal to the second diffusion plate gripping cylinder 519 based on the received drive signal. Send. The second diffusion plate gripping cylinder 519 is driven in response to a drive signal, and the second diffusion plate gripping portion 643 can grip the second diffusion plate 520.

As described above, the illuminating device 200 illuminates the inspection object 660 from above the table 400 (illuminating device 200 shown by the solid line in FIG. 11) and illuminates the inspection object 660 from below the table 400 (lighting device 200). There is a lighting device 200) shown by a broken line in FIG.

<<< Inspection design process >>>
Next, FIGS. 12 and 13 are flowcharts of the inspection design process for designing the inspection device. In order to explain the procedure for designing the inspection device in order, it should be added that both the process performed by the inspector (the person who operates the design device) and the process performed by the design device are included. Although the explanation is omitted, the initialization process is performed when the power is turned on, and at the time of the inspection design process, the data related to the previous inspection does not remain and the setting related to the new inspection can be input.

First, in step 1400, a preparatory process described later is executed. Next, in step 1202, the CPU 710 determines whether or not the inspection start button has been pressed by the inspector. The inspection start button is an image imitating a button displayed on the monitor 831 connected to the PC 700, and the inspection start button is pressed by pressing the image imitating the button by operating the mouse 832 or the keyboard 833. It becomes. If NO in step 1202, step 1202 is performed again, and the process waits until the inspection start button is pressed.

If YES in step 1202, in step 1500, the CPU 710 executes the lighting switching process described later. Next, in step 1800, the CPU 710 executes a camera angle adjustment process described later. Next, in step 1900, the CPU 710 executes the illumination angle adjustment process described later. Next, in step 2000, the CPU 710 executes the illumination distance adjustment process described later. Next, in step 2100, the CPU 710 executes the illumination X position adjustment process described later. Next, in step 2200, the CPU 710 executes a diffuser plate adjustment process described later. Next, in step 1206, the CPU 710 executes an automatic dimming process and adjusts the amount of light of the lighting device 200 so as to have a predetermined dimming value. Further, in the automatic dimming process, the scanning cycle of the table 400 is also adjusted. That is, in the automatic dimming process, the amount of light taken in by the element of the camera 300 is adjusted by adjusting the amount of light of the lighting device 200 and the scanning period of the table 400. Next, in step 2800, the CPU 710 executes a scanning cycle evaluation process described later. Next, in step 2300, the CPU 710 executes an image acquisition process described later. Next, in step 1208, the CPU 710 executes a defect detection process for detecting defects. Next, in step 2400, the CPU 710 executes an image evaluation process described later. Next, in step 1210, the CPU 710 executes a result output process of displaying the result on the monitor 831 or the like based on the result of the defect detection process.

Next, in step 1220, the CPU 710 has completed switching of the diffuser plate distance (distance direction from the table 400 shown in FIG. 8), in other words, the position of the diffuser plate 500 in the distance direction reaches the maximum allowable position. Determine if it has been reached.

If NO in step 1220, the process proceeds to the diffuser plate adjustment process of step 2200, and the CPU 710 moves the position of the diffuser plate 500 in the distance direction.

If YES in step 1220, in step 1222, the CPU 710 has completed switching of the illumination X position (horizontal to the table 400 and in the X direction), in other words, the X position of the illumination device 200 (with the table 400). It is determined whether or not the horizontal position (position in the X direction) has reached the maximum allowable position.

If NO in step 1222, the process proceeds to the illumination X position adjustment process in step 2100, and the CPU 710 controls the robot 100 to move the position of the illumination device 200 horizontally with the table 400 and in the X direction.

If YES in step 1222, after the CPU 710 returns the illumination X position to the start position, in step 1224, the CPU 710 has completed switching of the illumination distance (distance direction from the table 400 shown in FIG. 8). In other words, it is determined whether or not the position of the lighting device 200 in the distance direction has reached the maximum allowable position.

If NO in step 1224, the process proceeds to the illumination distance adjustment process in step 2000, and the CPU 710 controls the robot 100 to move the position of the illumination device 200 in the distance direction.

If YES in step 1224, the CPU 710 returns the illumination distance to the start position, and then in step 1226, the CPU 710 determines whether or not the illumination angle switching is completed, in other words, the angle of the illumination device 200 is the maximum allowable. Determine if the angle has been reached.

If NO in step 1226, the process proceeds to the illumination angle adjustment process of step 1900, and the CPU 710 controls the robot 100 to change the angle of the illumination device 200.

If YES in step 1226, after the CPU 710 returns the illumination angle to the start angle, in step 1228, the CPU 710 has completed the switching of the camera angle (θC direction shown in FIG. 6), in other words, the camera. It is determined whether or not the angle of 300 has reached the maximum allowable angle.

If NO in step 1228, the process proceeds to the camera angle adjustment process of step 1800, and the CPU 710 moves the camera θ stage 650 to change the angle of the camera 300.

If YES in step 1228, the CPU 710 returns the camera angle to the start angle, and then in step 1230, the CPU 710 performs all inspections under the selected and set conditions, in other words, whether or not the inspection is completed. Determine if it has been done.

If NO in step 1230, the process proceeds to the lighting switching process of step 1500, and the CPU 710 switches the lighting device 200.

If YES in step 1230, the CPU 710 stores the last inspected lighting device 200 (for example, the sixth line lighting 216 when the sixth line lighting 216 is selected) (in this example, the first storage unit 900). After returning to), in step 1232, the CPU 710 executes the inspection design end processing and ends the inspection.

In the inspection design end process, for example, it is confirmed whether or not the robot 100, the camera 300, the table 400, etc. have been returned to the initial position, and if not, the robot 100, the camera 300, the table 400, etc. are returned to the initial position. It is confirmed whether or not the plate 510, the second diffusion plate 520, etc. are stored, and if they are not stored, processing such as storing them is performed. The initial position is a reference position (home position) for controlling (control such as moving) the robot 100, the camera 300, the table 400, the first diffusion plate 510, the second diffusion plate 520, and the like.

When the inspection is completed, the inspector or the user (requester of the inspection device design) confirms the inspection result on the monitor 831 or the like connected to the PC 700, and when the defect of the inspection object 660 is most clearly imaged. It is possible to grasp the type of the lighting device 200, the position and angle of the lighting device 200, the position and angle of the camera 300, the presence / absence and type of the first diffusion plate 510 or the second diffusion plate 520, and the like. Based on this result, the user can assemble (manufacture) the inspection device at the user's inspection site. In addition, based on this result, a more detailed inspection can be performed by reducing the inspection range, the amount of movement of each device, and the like and performing the inspection again.

<< Preparation process >>
Next, FIG. 14 is a flowchart of the preparatory process of step 1400 in FIG. In the first embodiment, this preparatory process includes a process indicating the operation of the inspector, but can be made into a program process by automating. First, in step 1402, the inspector sets the inspection object 660 on the table 400.

Next, in step 1404, the inspector adjusts the height of the table 400 according to the thickness of the inspection object 660. Specifically, the inspector sets the thickness of the inspection object 660 on the PC 700. The PC 700 (CPU 710) drives the table Z stage 621 according to the set value to adjust the height of the table 400.

Next, in step 1406, the inspector sets the focus of the camera 300. Specifically, the inspector uses the PC 700 to match the rotation axis of the camera 300 with the focus position of the camera 300.

Next, in step 1408, the inspector sets the measurement conditions for acquiring a temporary image using the PC 700.

Next, in step 1410, the CPU 710 causes the lighting device 200 to emit light, acquires a temporary image with the camera 300, and outputs the temporary image to the monitor 831 or the like.

Next, in step 1412, the inspector sets the measurement conditions in the inspection with reference to the output result of step 1410. If the inspector does not set the measurement conditions used for the inspection, the predetermined measurement conditions are set. The measurement conditions to be set are, for example,
(1) Type of lighting device 200 to be inspected (2) Inspection range of camera angle (3) Angle of camera 300 changed by camera angle adjustment processing (4) Inspection range of lighting angle (5) Change by lighting angle adjustment processing Angle of lighting device 200 (6) Inspection range of lighting distance (7) Movement amount of lighting device 200 changed by lighting distance adjustment processing (8) Inspection range of lighting X position (9) Lighting changed by lighting X position adjustment processing The amount of movement of the device 200 (10) the presence / absence and type of the diffuser plate 500 (11) the amount of movement of the diffuser plate 500 to be changed by the diffuser plate adjustment process. When the process of step 1412 is completed, the caller returns.

<< Lighting switching process >>
Next, FIGS. 15 to 17 are flowcharts of the lighting switching process of step 1500 in FIG. First, in step 1501, the CPU 710 determines whether or not the first plate-shaped light guide 221 is selected in step 1412. If YES in step 1501, in step 1502, the CPU 710 determines whether or not the inspection has been completed by the first plate-shaped light guide 221. If NO in step 1502, in step 1508, the CPU 710 controls the robot 100, sets the first plate-shaped light guide 221 on the hand 150, moves it to the lighting start position, and returns to the caller.

If YES in step 1502, that is, if the inspection has been performed by the first plate-shaped light guide 221, in step 1504, the CPU 710 has stored the first plate-shaped light guide 221 in the second storage unit 910. To judge. If NO in step 1504, in step 1506, the CPU 710 controls the robot 100, stores the first plate-shaped light guide 221 in the second storage unit 910, and proceeds to the process of step 1509. In the case of NO in step 1501 and the case of YES in step 1504, the process proceeds to step 1509.

Next, in step 1509, the CPU 710 determines whether or not the second plate-shaped light guide 222 is selected in step 1412. If YES in step 1509, in step 1510 the CPU 710 determines whether or not the second plate-shaped light guide 222 has been inspected. If NO in step 1510, in step 1516, the CPU 710 controls the robot 100, sets the second plate-shaped light guide 222 on the hand 150, moves it to the lighting start position, and returns to the caller.

If YES in step 1510, that is, if the inspection has been performed by the second plate-shaped light guide 222, in step 1512, the CPU 710 has stored the second plate-shaped light guide 222 in the second storage unit 910. To judge. If NO in step 1512, in step 1514, the CPU 710 controls the robot 100, stores the second plate-shaped light guide 222 in the second storage unit 910, and proceeds to the process of step 1517. In the case of NO in step 1509 and the case of YES in step 1512, the process proceeds to step 1517.

Next, in step 1517, the CPU 710 determines whether or not the first line illumination 211 is selected in step 1412. If YES in step 1517, in step 1518, the CPU 710 determines whether or not the first line illumination 211 has been inspected. If NO in step 1518, in step 1524, the CPU 710 controls the robot 100 to set the first line illumination 211 on the hand 150, move it to the illumination start position, and return to the caller.

If YES in step 1518, that is, if the inspection has been performed by the first line illumination 211, in step 1520, the CPU 710 determines whether or not the first line illumination 211 has been stored in the first storage unit 900. If NO in step 1520, in step 1522, the CPU 710 controls the robot 100, stores the first line illumination 211 in the first storage unit 900, and proceeds to the process of step 1525. In the case of NO in step 1517 and the case of YES in step 1520, the process proceeds to step 1525.

Next, in step 1525, the CPU 710 determines whether or not the second line illumination 212 is selected in step 1412. If YES in step 1525, in step 1526, the CPU 710 determines whether or not the second line illumination 212 has been inspected. If NO in step 1526, in step 1532, the CPU 710 controls the robot 100, sets the second line illumination 212 on the hand 150, moves it to the illumination start position, and returns to the caller.

If YES in step 1526, that is, if the inspection has been performed by the second line illumination 212, in step 1528, the CPU 710 determines whether or not the second line illumination 212 has been stored in the first storage unit 900. If NO in step 1528, in step 1530, the CPU 710 controls the robot 100, stores the second line illumination 212 in the first storage unit 900, and proceeds to the process of step 1533. In the case of NO in step 1525 and the case of YES in step 1528, the process proceeds to step 1533.

Next, in step 1533, the CPU 710 determines whether or not the third line illumination 213 is selected in step 1412. If YES in step 1533, in step 1534 the CPU 710 determines whether or not it has been inspected by the third line illumination 213. If NO in step 1534, in step 1540, the CPU 710 controls the robot 100 to set the third line illumination 213 on the hand 150, move it to the illumination start position, and return to the caller.

If YES in step 1534, that is, if the third line illumination 213 has been inspected, in step 1536, the CPU 710 determines whether or not the third line illumination 213 has been stored in the first storage unit 900. If NO in step 1536, in step 1538, the CPU 710 controls the robot 100, stores the third line illumination 213 in the first storage unit 900, and proceeds to the process of step 1541. In the case of NO in step 1533 and the case of YES in step 1536, the process proceeds to step 1541.

Next, in step 1541, the CPU 710 determines whether or not the fourth line illumination 214 is selected in step 1412. If YES in step 1541, in step 1542, the CPU 710 determines whether or not the fourth line illumination 214 has been inspected. If NO in step 1542, in step 1548, the CPU 710 controls the robot 100 to set the fourth line illumination 214 on the hand 150, move it to the illumination start position, and return to the caller.

If YES in step 1542, that is, if the inspection has been performed by the fourth line illumination 214, in step 1544, the CPU 710 determines whether or not the fourth line illumination 214 has been stored in the first storage unit 900. If NO in step 1544, in step 1546, the CPU 710 controls the robot 100, stores the fourth line illumination 214 in the first storage unit 900, and proceeds to the process of step 1549. If NO in step 1541 and YES in step 1544, the process proceeds to step 1549.

Next, in step 1549, the CPU 710 determines whether or not the fifth line illumination 215 is selected in step 1412. If YES in step 1549, in step 1550 the CPU 710 determines whether or not the fifth line illumination 215 has been inspected. If NO in step 1550, in step 1556, the CPU 710 controls the robot 100 to set the fifth line illumination 215 on the hand 150, move it to the illumination start position, and return to the caller.

If YES in step 1550, that is, if the fifth line illumination 215 has been inspected, in step 1552, the CPU 710 determines whether or not the fifth line illumination 215 has been stored in the first storage unit 900. If NO in step 1552, in step 1554, the CPU 710 controls the robot 100, stores the fifth line illumination 215 in the first storage unit 900, and proceeds to the process of step 1557. When NO in step 1549 and YES in step 1552, the process proceeds to step 1557.

Next, in step 1557, the CPU 710 determines whether or not the sixth line illumination 216 is selected in step 1412. If YES in step 1557, in step 1558 the CPU 710 determines whether or not the sixth line illumination 216 has been inspected. If NO in step 1558, in step 1564, the CPU 710 controls the robot 100 to set the sixth line illumination 216 on the hand 150, move it to the illumination start position, and return to the caller.

If YES in step 1558, that is, if the inspection has been performed by the sixth line illumination 216, in step 1560, the CPU 710 determines whether or not the sixth line illumination 216 has been stored in the first storage unit 900. If NO in step 1560, in step 1562, the CPU 710 controls the robot 100, stores the sixth line illumination 216 in the first storage unit 900, and returns to the caller. In the case of NO in step 1557 and the case of YES in step 1560, the caller is returned.

<< Camera angle adjustment processing >>
Next, FIG. 18 is a flowchart of the camera angle adjustment process of step 1800 in FIG. First, in step 1802, the CPU 710 determines whether or not the inspection has been completed at the start angle of the camera angle under the measurement conditions.

If YES in step 1802, in step 1804, the CPU 710 controls the camera θ stage to change the camera angle by the angle (ΔθC) set as the measurement condition.

If NO in step 1802 and the process in step 1804 is completed, the caller is returned.

As described above, if the inspector does not set the measurement conditions used for the inspection, the predetermined measurement conditions are set.

<< Lighting angle adjustment processing >>
Next, FIG. 19 is a flowchart of the illumination angle adjustment process of step 1900 in FIG. First, in step 1902, the CPU 710 determines whether or not it has been inspected at the start angle of the illumination angle under the measurement conditions.

If YES in step 1902, in step 1904, the CPU 710 controls the robot 100 and changes the illumination angle by an angle (Δθ) set as a measurement condition.

If NO in step 1902 and the process in step 1904 is completed, the caller is returned.

As described above, if the inspector does not set the measurement conditions used for the inspection, the predetermined measurement conditions are set.

<< Lighting distance adjustment processing >>
Next, FIG. 20 is a flowchart of the illumination distance adjustment process in step 2000 in FIG. First, in step 2002, the CPU 710 determines whether or not the inspection has been completed at the start position of the illumination distance under the measurement conditions.

If YES in step 2002, in step 2004, the CPU 710 controls the robot 100 and changes the illumination distance in the distance direction by the distance (ΔLL) set as the measurement condition.

If NO in step 2002 and the process in step 2004 is completed, the caller is returned.

As described above, if the inspector does not set the measurement conditions used for the inspection, the predetermined measurement conditions are set.

<< Lighting X position adjustment processing >>
Next, FIG. 21 is a flowchart of the illumination X position adjustment process in step 2100 in FIG. First, in step 2102, the CPU 710 determines whether or not the inspection has been completed at the start position of the illumination X position under the measurement conditions.

If YES in step 2102, in step 2104, the CPU 710 controls the robot 100 and changes the illumination X position by a distance (ΔXL) that is horizontal to the table 400 and is set as a measurement condition in the X direction.

By changing the illumination X position, the illumination light I is irradiated to a position deviated from the defect, and the diffuse reflection of the illumination light I makes it possible to detect a defect that cannot be detected when the defect is directly irradiated, or to detect a defect. In some cases, defects that are difficult to detect when directly irradiated can be easily detected.

If NO in step 2102 and the process in step 2104 is completed, the caller is returned.

As described above, if the inspector does not set the measurement conditions used for the inspection, the predetermined measurement conditions are set.

<< Diffusion plate adjustment processing >>
Next, FIG. 22 is a flowchart of the diffuser plate adjusting process in step 2200 in FIG. First, in step 2202, the CPU 710 determines whether or not the first diffusion plate 510 is set as a measurement condition in step 1412. If YES in step 2202, in step 2204, the CPU 710 determines whether or not the first diffusion plate 510 has been inspected.

If NO in step 2204, in step 2206, the CPU 710 determines whether or not the set first diffusion plate 510 has been set.

If NO in step 2206, that is, if the set first diffusion plate 510 is not set, in step 2208, the CPU 710 sets the set first diffusion plate 510 and proceeds to the process of step 2218. .. If YES in step 2206, that is, even if the first diffusion plate 510 has already been set, the process proceeds to step 2218.

On the other hand, if NO in step 2202 and YES in step 2204, the process proceeds to step 2210.

Next, in step 2210, the CPU 710 determines whether or not the second diffuser plate 520 is set as a measurement condition in step 1412.

If YES in step 2210, in step 2212, the CPU 710 determines whether or not the second diffuser plate 520 has been inspected.

If NO in step 2212, that is, if the second diffuser plate 520 has not yet been inspected, the process proceeds to step 2214.

Next, in step 2214, the CPU 710 determines whether or not the set second diffuser plate 520 has been set.

If NO in step 2214, that is, if the set second diffuser plate 520 is not set, in step 2216, the CPU 710 sets the second diffuser plate 520 set as the measurement condition, and the process of step 2218 is performed. Move to.

If YES in step 2214, that is, even if the second diffusion plate 520 has already been set, the process proceeds to step 2218.

Next, in step 2218, the angle of the diffuser plate 500 (first diffuser plate 510 or second diffuser plate 520) set as the measurement condition is adjusted to the illumination angle. Specifically, the CPU 710 drives the first diffuser plate angle motor 505 or the second diffuser plate angle motor 515, and adjusts the angle (φ or φ2) of the diffuser plate 500 to the illumination angle.

Next, in step 2220, the CPU 710 controls the first (second) diffusion plate X stage and the first (second) diffusion plate Z stage, and diffuses the diffusion plate 500 in the X direction (XD1 direction, XD2 direction). The plate 500 is moved in the Z direction (ZD1 direction, ZD2 direction). As a result, the first diffusion plate 510 or the second diffusion plate 520 moves in the distance direction shown in FIG. 8 (B).

Next, in step 2222, the CPU 710 determines whether or not the movement in the distance direction exceeds the maximum allowable position.

If YES in step 2222, in step 2224, the CPU 710 returns the set diffuser plate 500 to the start state (for example, start position, start angle) and returns to the caller.

If NO in step 2210, YES in step 2212, and NO in step 2222, the caller is returned.

As described above, if the inspector does not set the measurement conditions used for the inspection, the predetermined measurement conditions are set.

<< Image acquisition process >>
Next, FIG. 23 is a flowchart of the image acquisition process of step 2300 in FIG. First, in step 2302, the CPU 710 transmits a control signal from the camera controller 750 to the camera 300, and the camera 300 starts image acquisition based on the received control signal. For example, the camera 300 starts imaging after the table 400 has moved 10 mm from the movement start position (initial position). The image captured by the camera 300 is stored in a RAM or the like in the camera controller 750.

When the image acquisition is started in step 2302, in step 2304, the CPU 710 controls the table X stage 620 and starts moving the table 400 in the XT direction (+ X direction) shown in FIGS. 6 and 7. The table 400 is moved by a predetermined amount of movement.

Next, in step 2306, the camera 300 executes an imaging process, performs imaging at predetermined timing intervals, and acquires a predetermined number of images to image the inspection object 660. That is, in the imaging process, the camera 300 repeatedly acquires an image within the imaging range of the camera 300 while the table 400 is moving. The camera 300 can take an image of the entire surface of the inspection object 660 by taking an image until the table 400 is stopped.

Next, in step 2308, when the movement of the table 400 in the + X direction by a predetermined movement amount is completed, the CPU 710 stops the movement of the table 400 in the + X direction.

If the maximum permissible range is not reached even after the movement control for the predetermined movement amount is completed, it is assumed that some abnormality (for example, a motor malfunction of the table X stage 620) has occurred and the + X direction of the table 400 is reached. The movement to the monitor 831 may be stopped and the monitor 831 may be notified that an error has occurred.

Next, in step 2310, the CPU 710 transmits a control signal from the camera controller 750 to the camera 300, and the camera 300 ends image acquisition based on the received control signal.

Next, in step 2312, the CPU 710 controls the table X stage 620 to return the table 400 to the initial position and return to the caller.

In this way, the camera 300 can inspect the entire inspection object 660 by repeating the imaging within the imaging range of the camera 300 many times.

<< Image evaluation processing >>
Next, FIG. 24 is a flowchart of the image evaluation process of step 2400 in FIG. The image evaluation process is a process for evaluating an captured image. First, in step 2500, the CPU 710 executes the S / N ratio evaluation process described later. Next, in step 2600, the CPU 710 executes a peak value evaluation process described later. Next, in step 2700, the CPU 710 executes the formation variation evaluation process described later. Next, in step 2402, the CPU 710 sums the evaluation results of each evaluation process (scanning cycle evaluation process, S / N ratio evaluation process, crest value evaluation process, formation variation evaluation process). When the process of step 2402 is completed, the caller returns.

The formation is the state of the surface where there is no defect when the inspection object 660 is imaged by the camera 300, for example, the scattering of the incident light incident on the inspection object 660 and the transmitted light transmitted through the inspection object 660. The state of the surface determined by the degree of absorption, the degree of absorption, and the degree of reflection. Specifically, the state of the surface can be specified by the intensity of light (brightness, darkness), color (brightness, hue, saturation), and the like. The formation variation is a variation in light intensity (brightness, darkness), a variation in color (brightness, hue, saturation), and the like. The wave height is the light intensity or color of the defective portion obtained by photographing the inspection object 660 with the camera 300, and is the light intensity or color based on the formation.

<S / N ratio evaluation processing>
Next, FIG. 25 is a flowchart of the S / N ratio evaluation process of step 2500 in FIG. 24. First, in step 2502, the CPU 710 calculates the S / N ratio (peak value / formation variation). The crest value is the difference between the formation average value and the maximum brightness of the defect / the difference between the formation average value and the minimum brightness of the defect. The formation variation is the difference between the maximum brightness and the minimum brightness of the formation portion.

Next, in step 2504, the CPU 710 determines whether or not the calculation result is 2 or less. If YES in step 2504, the CPU 710 stores the score (0 points) in step 2506. When the calculation result is 2 or less, the defect cannot be discriminated, so the score is low (0 points here).

Next, if NO in step 2504, in step 2508, the CPU 710 determines whether or not the calculation result is 2 to 10. If NO in step 2508, the CPU 710 stores the score (100 points) in step 2512. When the calculation result is 10 or more, the defect can be clearly identified, so that the score is uniformly high (100 points here).

If YES in step 2508, in step 2510, the CPU 710 stores a score (0 to 100 points) according to the calculation result. In step 2510, a function of a straight line passing through two points (X _1, Y ₁ ) = (2, 0), (X _2, Y ₂ ) = (10, 100), where X is calculated and Y is scored. The score can be obtained by.

When the processing of step 2506, step 2510, and step 2512 is completed, the caller returns.

The average brightness of the defect may be used as the peak value.

<Wave height evaluation process>
Next, FIG. 26 is a flowchart of the peak value evaluation process of step 2600 in FIG. 24. First, in step 2602, the CPU 710 calculates the crest value / threshold value (crest value / binarization threshold value) ratio. As the threshold value, a binarization threshold value, which is a threshold value for binarizing an image (eg, white and black), is used.

Next, in step 2604, the CPU 710 determines whether or not the calculation result is 1.5 or less. If YES in step 2604, the CPU 710 stores the score (0 points) in step 2606. If the calculation result is 1.5 or less, it may not be possible to stably determine the defect, so the score is set low (0 points here).

Next, if NO in step 2604, in step 2608, the CPU 710 determines whether or not the calculation result is 1.5 to 4. If NO in step 2608, the CPU 710 stores the score (100 points) in step 2612. When the calculation result is 4 or more, the defect can be stably determined, so that the score is uniformly high (100 points in this case).

If YES in step 2608, in step 2610, the CPU 710 stores a score (0 to 100 points) according to the calculation result. In step 2610, a straight line passing through two points (X _1, Y ₁ ) = (1.5, 0) and (X _2, Y ₂ ) = (4, 100), where X is calculated and Y is scored. The score can be calculated by the function of.

When the processing of step 2606, step 2610, and step 2612 is completed, the caller returns.

<Formation variation evaluation processing>
Next, FIG. 27 is a flowchart of the formation variation evaluation process of step 2700 in FIG. 24. First, in step 2702, the CPU 710 calculates the threshold value / formation variation (binarization threshold value / formation variation) ratio.

Next, in step 2704, the CPU 710 determines whether or not the calculation result is 0.5 or less. If YES in step 2704, the CPU 710 stores the score (0 points) in step 2706. If the calculation result is 0.5 or less, it may not be possible to stably determine the defect, that is, it is easy to make a false detection, so a low score (0 points in this case) is set.

Next, if NO in step 2704, in step 2708, the CPU 710 determines whether or not the calculation result is 0.5 to 3. If NO in step 2708, the CPU 710 stores the score (100 points) in step 2712. When the calculation result is 3 or more, the defect can be stably determined, so that the score is uniformly high (100 points in this case).

If YES in step 2708, in step 2710, the CPU 710 stores a score (0 to 100 points) according to the calculation result. In step 2710, a straight line passing through two points (X _1, Y ₁ ) = (0.5, 0) and (X _2, Y ₂ ) = (3, 100), where X is calculated and Y is scored. The score can be calculated by the function of.

When the processing of step 2706, step 2710, and step 2712 is completed, the caller returns.

<Scanning cycle evaluation process>
Next, FIG. 28 is a flowchart of the scanning cycle evaluation process of step 2800 in FIG. The scanning cycle is the time required for the camera 300 to take an image of a predetermined range once. That is, the camera 300 repeats imaging a plurality of times to create one image. If the resolution of the camera 300 is fixed, slowing down the scanning cycle (in other words, the moving speed of the table 400) increases the amount of light taken in by the elements of the camera 300, and the image becomes brighter.

First, in step 2802, the CPU 710 calculates the speed / target speed related to the moving speed of the table 400. The target speed is an assumed speed when a person (user) who uses the inspection device manufactured by using the design device actually uses the inspection device.

Next, in step 2804, the CPU 710 determines whether or not the calculation result is 1.25 or less. If NO in step 2804, the CPU 710 stores the score (100 points) in step 2806. When the calculation result is 1.25 or more, it is possible to inspect at a speed higher than the user expects, so the score is uniformly high (100 points here).

If YES in step 2804, in step 2808, the CPU 710 stores a score (0 to 100 points) according to the calculation result. In step 2808, a straight line passing through two points (X _1, Y ₁ ) = (0, 0) and (X _2, Y ₂ ) = (1.25, 100), where X is calculated and Y is scored. The score can be calculated by the function of.

If the evaluation result is less than or equal to the predetermined value, it is judged that the image cannot be properly imaged or does not satisfy the design conditions desired by the user, and the image is not imaged (for example, the inspection under the predetermined setting conditions is not performed, etc. ) May be done.

<<< Top view of hand 150 (line lighting 210) >>>
Next, FIG. 29 (A) is an image view of a top view of the hand 150. FIG. 29A is an image diagram when the hand 150 grips the line illumination 210. As described above, in the third arm 140, the front end side of the third arm swinging portion 141 and the rear end side of the third arm rotating portion 142 are attached.

Next, the front end side of the third arm rotating portion 142 is attached to the rear end side of the fixing portion 153 of the hand 150. Hand drive units 154 are attached to both sides of the fixed portion 153. Further, a long grip portion extending toward the front end side of the hand 150 is attached to the hand drive portion 154, one of which is the first grip portion 151 and the other of which is the second grip portion 152. The hand driving unit 154 is driven by a hand gripping cylinder 190 (not shown) provided in the fixing unit 153, and the first gripping unit 151 and the second gripping unit 152 move in the a7 direction shown in FIG.

The first grip portion 151 and the second grip portion 152 are provided with a grip portion convex portion 158, and in this example, the first grip portion 151 is provided with one grip portion convex portion 158 on the front end side. The second grip portion 152 is provided with a total of two grip portion convex portions 158, one on the front end side and one near the center. In this example, the second grip portion 152 is longer than the first grip portion 151, but the length may be the same.

Next, the adapter 155 is attached to the front end side of the fixing portion 153. A pilot hole 159 is provided in the lower portion of the adapter 155 so that the line illumination cable 156 can be passed through.

Next, a lighting fixture 170 is attached to the front end side of the adapter 155. The lighting fixture 170 is provided with two positioning protrusions 171 extending toward the front end side. When the lighting device 200 is changed in the lighting switching process of step 1500, if the positioning projection 171 does not fit into the positioning receiving portion (not shown) of the lighting device 200, an error occurs and the operation of the design device is temporarily operated. Stop or stop.

The line illumination cable 156 is connected to a line illumination connection portion 218 provided on the rear end side of the line illumination 210. As a result, the control command transmitted from the PC 700 is transmitted to the line illumination 210.

A line illumination recess 217 is provided on the side of the line illumination 210, and one line illumination recess 217 corresponding to the convex portion 158 of the grip portion 151 of the first grip portion 151 is provided to grip the second grip portion 152. Two line illumination recesses 217 corresponding to the convex portions 158 are provided.

The hand drive unit 154 described above is driven by a hand grip cylinder 190 (not shown) or the like, and the first grip portion 151 and the second grip portion 152 move in the a7 direction shown in FIG. 5, whereby the first grip portion 151 The line illumination 210 is gripped by the hand 150 by fitting the convex portion 158 of the grip portion of the second grip portion 152 and the concave portion 217 of the line illumination.

<<< Side view of hand 150 (line lighting 210) >>>
Next, FIG. 29B is an image of a side view of the hand 150. FIG. 29B is an image diagram when the hand 150 grips the line illumination 210. The portion described with reference to FIG. 29 (A) will be omitted, and FIG. 29 (B) will supplementarily explain the configuration of the adapter 155 simply described with reference to FIG. 29 (A).

The adapter 155 is L-shaped, and the upper surface of the lower portion and the lower surface of the fixing portion 153 are in contact with each other and fixed. A first hole 160 is provided in a part of the upper part. The line illumination cable 156 is connected to the line illumination connection portion 218 through the first hole 160.

<<< Top view of hand 150 (plate-shaped light guide 220) >>>
Next, FIG. 30A is an image of a top view of the hand 150. FIG. 30A is an image diagram when the hand 150 grips the plate-shaped light guide 220. The difference from FIG. 29 (A) is that the plate-shaped light guide 220 is gripped, and the plate-shaped light guide 220 has a shorter length in the lateral direction than the line illumination 210. The plate-shaped light guide 220 is provided with a light guide recess 223.
<<< Side view of hand 150 (plate-shaped light guide 220) >>>
Next, FIG. 30B is an image view of the plan view 2 of the hand 150. FIG. 30B is an image diagram when the hand 150 grips the plate-shaped light guide 220. FIG. 30B describes a plate-shaped light guide adapter 180 through which the liquid light guide 157 can be passed.

The plate-shaped light guide adapter 180 is L-shaped and is fixed in contact with the lower surface of the lower portion of the adapter 155. A second hole 161 is provided in a part of the plate-shaped light guide adapter 180. The liquid light guide 157 is attached to the light guide connection portion 224 through the second hole 161 of the plate-shaped light guide adapter 180. For example, the surface of the light guide connection portion 224 and the surface of the tip of the liquid light guide 157 may be attached in contact with each other, or a recess is provided in the light guide connection portion 224 and the tip of the liquid light guide 157 is connected to the light guide. It may be attached so as to fit in the recess of the portion 224.

<< Image during inspection >>
Next, FIG. 31A is an image diagram in the case where the inspection object 660 is illuminated by the lighting device 200 from above the table 400 without using the diffuser plate 510.

The inspection object 660 is placed on the upper surface of the table 400. The illuminating device 200 is located above the table 400 and emits illumination light I to the inspection object 660. Here, the illumination light I is emitted at an incident angle of 40 °.

The table 400 is moved in the XT direction (+ X direction) shown in FIG. 6 by the table X stage 620.

The camera 300 takes an image of each part of the inspection object 660 (in other words, for each imageable range of the camera 300) as the table 400 moves in the XT direction (+ X direction).

Next, FIG. 31B is an image diagram in the case where the inspection object 660 is illuminated by the lighting device 200 from above the table 400 using the first diffusion plate 510.

The inspection object 660 is placed on the upper surface of the table 400. The illuminating device 200 is located above the table 400 and emits illumination light I to the inspection object 660. Here, the illumination light I is diffused in a plurality of directions by the first diffusion plate 510.

Since the camera 300 and the table 400 are the same as those in FIG. 31 (A), the description thereof will be omitted.

Next, FIG. 32 is an image diagram in the case where the inspection object 660 is illuminated by the lighting device 200 from below the table 400 without using the second diffusion plate 520.

The inspection object 660 is placed on the upper surface of the table 400. The illuminating device 200 is located below the table 400 and emits illumination light I to the inspection object 660.

Since the camera 300 and the table 400 are the same as those in FIG. 31 (A), the description thereof will be omitted.

Next, FIG. 33 is an image diagram in the case where the inspection object 660 is illuminated by the lighting device 200 from below the table 400 using the second diffusion plate 520.

The inspection object 660 is placed on the upper surface of the table 400. The illuminating device 200 is located below the table 400 and emits illumination light I to the inspection object 660. Here, the illumination light I is diffused in a plurality of directions by the second diffuser plate 520.

Since the camera 300 and the table 400 are the same as those in FIG. 31 (A), the description thereof will be omitted.

<< Inspection result screen >>
Next, FIGS. 34 (A) and 34 (B) are examples of output screens output in the result output process of step 1210 of FIG. The inspection result data is mainly displayed on the first monitor 8310, and the image showing the defect is mainly displayed on the second monitor 8311.

FIG. 34A is a display screen of the first monitor 8310 on which the inspection result data is displayed. When displaying the test result data, the scores are displayed in descending order.

The inspector or the user can operate the mouse 832 to select the inspection result displayed on the first monitor 8310, and the image showing the defect captured by the selected inspection result is displayed on the second monitor 8311. To.

FIG. 34B is a display screen of the second monitor 8311 on which an image showing a defect is displayed. Two test results displayed in FIG. 34 (A) can be selected. Here, the defect imaged by the test result selected by the first monitor 8310 (the one with the highest score is selected) is detected. The images shown are displayed in the areas F1 and F2 of FIG. 34 (B). The entire image of the inspection object 660 is displayed in the area F1, and an enlarged image of the defect is displayed in the area F2. When two test results are selected, the first selected test result is displayed in the area F1 and the area F2, and the next selected test result is displayed in the area F3 and the area F4. When two test results are selected, the image of the defect of the test result having the higher score is displayed in the area F1 and the area F2, and the defect of the test result having the lower score is displayed in the area F3 and the area F4. The image of may be displayed.

<< Change example >>
In the first embodiment, the scores in the image evaluation process in step 2400 and the scanning cycle evaluation process in step 2800 are all shown with 100 points as the maximum value, but the points may be weighted. For example, when the result of the S / N ratio evaluation process is important, the maximum score of the S / N ratio evaluation process can be increased to 150 points, which is 1.5 times. The score shown in the first embodiment is merely an example and can be changed as appropriate.

<< Communication with the outside >>
Next, FIG. 35 is a system configuration diagram showing a case where the design device shown in the first embodiment is connected to an external data server. The main differences from FIG. 9 are that the communication unit 840 is provided in the PC 700, the network 1000 is added, the data server 1100 is added, and the PC 1200 is added.

When the design device is installed at the manufacturer's agency, etc., by using the design device installed at the agency, the design data of the inspection device that the user wants to manufacture (inspection result, defect image, etc.) ) Can be obtained. At this time, the inspection result and the image data of the defect acquired by the design apparatus can be uploaded to the data server 1100 via the network 1000.

Further, the network 1000 is connected to the PC1200 of the manufacturer that developed the design device.

With this configuration, the manufacturer who developed the design device can check the design data even when the design device is located in a remote place, and can give appropriate advice to the user.

<<<<<< Outline of the second embodiment >>>>>
In the first embodiment, a plurality of lighting devices are prepared, one lighting device is selected, and light having a predetermined wavelength is illuminated to detect a defect.

In the second embodiment, a lighting device 200-2 (see FIG. 40) that emits light including a wide range of wavelengths and a hyperspectral camera 300-2 are used. The inspection object 660 is irradiated with the light emitted from the lighting device 200-2, and the inspection object 660 is photographed by the hyperspectral camera 300-2. From the data obtained by imaging, defects existing in the inspection object 660 are detected.

In the second embodiment, similar configurations are designated by the same reference numerals as those in the first embodiment.

<< Lighting device 200-2 >>
The illuminating device 200-2 has a transmission light having, for example, a halogen lamp or the like. The illuminating device 200-2 emits light having a wide range of wavelengths such as 400 to 1000 nm and 900 to 1700 nm. The illuminating device 200-2 preferably emits light in the infrared region as well as visible light.

The lighting device 200-2 includes a box lighting 820-2 and a rod-shaped light guide 230 (see FIG. 39). The box illumination 820-2 has a halogen lamp (not shown) that emits light of 400 to 1700 nm.

The rod-shaped light guide 230 is a light guide having a long shape. The light emitted from the halogen lamp is incident on an incident surface (not shown) at the end of the rod-shaped light guide 230. The light incident from the incident surface is repeatedly totally reflected inside the rod-shaped light guide 230 to make the brightness uniform. Light with uniform brightness is emitted from a long exit surface (not shown) of the rod-shaped light guide 230. The light emitted from the rod-shaped light guide 230 uniformly illuminates the irradiated surface. The light guide may have an exit surface according to the shape and size of the area to be illuminated.

<< Hyper Spectrum Camera 300-2 >>
The hyperspectral camera 300-2 is a camera capable of taking a picture by splitting light for each wavelength. The hyperspectral camera 300-2 can acquire shooting data for each wavelength. The hyperspectral camera 300-2 can receive light having a wavelength of, for example, 400 to 2500 nm.

<Area camera>
The hyperspectral camera 300-2 has an elongated slit (opening) (not shown). The hyperspectral camera 300-2 receives the light that has passed through the slit. The hyperspectral camera 300-2 can photograph the inspection object 660 through the slit. The range that the hyperspectral camera 300-2 can capture is determined by the shape of the slit.

The hyperspectral camera 300-2 has a spectroscope and an area camera (not shown). The spectroscope decomposes (splits) the incident light into each color (wavelength) and emits it. The light emitted from the spectroscope is dispersed in different directions (angles) for each wavelength. For example, it can be dispersed to a maximum of 450 wavelengths. The area camera captures a two-dimensional range in the X direction (first direction) and the Y direction (second direction). The hyperspectral camera 300-2 passes through a long slit and captures light dispersed in different directions by a spectroscope with an area camera.

The longitudinal direction of the long slit corresponds to the X direction of the area camera, and the direction in which the dispersed light is dispersed for each wavelength corresponds to the Y direction of the area camera. Therefore, in the area camera of the hyperspectral camera 300-2, the longitudinal direction (also referred to as the width direction) of the long shooting range is associated with the X direction, and the direction in which light is dispersed and spread for each wavelength is associated with the Y direction. Then, a two-dimensional image in the X direction and the Y direction is taken. Specifically, the inspection target object 660 is imaged by dispersing it in the Y direction at 450 wavelengths and making the width direction (longitudinal direction of the slit) of the inspection target object 660 correspond to the X direction.

As described above, the hyperspectral camera 300-2 captures a long region through a long slit. On the other hand, the inspection object 660 basically has a plate-like shape and extends two-dimensionally. Therefore, when the entire plate-shaped inspection object 660 is photographed, the inspection object 660 is photographed while being moved in the lateral direction of the slit (the direction perpendicular to the longitudinal direction). It should be noted that the hyperspectral camera 300-2 may be moved and photographed instead of the inspection object 660.

<Example of imaging>
FIG. 36A is an example of the inspection object 660. In the example of FIG. 36 (a), the inspection object 660 has a rectangular shape. The horizontal direction in FIG. 36A is the moving direction X of the inspection object 660. The vertical direction of FIG. 36A is the longitudinal direction of the slit of the hyperspectral camera 300-2, and is the range of the longitudinal direction (direction of the imaging width) that can be imaged by the hyperspectral camera 300-2.

First, the hyperspectral camera 300-2 positions the inspection object 660 so as to be located at xs in FIG. 36 (a). The hyperspectral camera 300-2 is positioned at a fixed position on the inspection table 600. While moving the inspection target 660 to the left in FIG. 36 (a), the inspection target 660 is imaged by the hyperspectral camera 300-2. Imaging ends when the hyperspectral camera 300-2 is located at xe in FIG. 36 (a).

In the example of FIG. 36 (a), the defect DF of a black triangle exists in the center of the inspection object 660. 36 (b) and 36 (c) are imaging results obtained when the inspection object 660 is imaged with the hyperspectral camera 300-2. FIGS. 36 (b) and 36 (c) show data at two different imaging positions x1 and x2 of the total data (so-called data cubes) obtained at 300-2 with a hyperspectral camera.

The horizontal directions of FIGS. 36 (b) and 36 (c) show the wavelengths of the light received when the inspection object 660 is imaged by the hyperspectral camera 300-2. That is, the wavelengths of the light dispersed by the spectroscope of the hyperspectral camera 300-2 are in the lateral directions of FIGS. 36 (b) and 36 (c). The vertical direction of FIGS. 36 (b) and 36 (c) is the longitudinal direction (direction of the imaging width) of the slit of the hyperspectral camera 300-2, as in FIG. 36 (a).

In FIGS. 36 (b) and 36 (c), the number of vertical lines in the figure indicates the clarity of the image of the imaged inspection object 660. That is, an image in a wavelength region having a large number of vertical lines means that it is clear, and an image in a wavelength region having a small number of vertical lines means that it is unclear. In the examples shown in FIGS. 36 (b) and 36 (c), the number of vertical lines is the largest in the wavelength region near λ1, and the image of the inspection object 660 is clear. Next, in the wavelength region near λ0, the number of vertical lines decreases, and the image of the inspection object 660 is clear to some extent. Further, in the wavelength region near λ2, the number of vertical lines is reduced, and the image of the inspection object 660 becomes unclear. Next, in the wavelength region near λ3, the number of vertical lines is further reduced, and the image of the inspection object 660 becomes more unclear.

FIG. 36 (b) shows the imaging result captured when the hyperspectral camera 300-2 is located at x1 in FIG. 36 (a). In the wavelength region centered on the wavelength λ1, the portion of the defective DF located at x1 is imaged. FIG. 36 (c) shows the imaging result captured when the hyperspectral camera 300-2 was located at x2 in FIG. 36 (a). In the wavelength region centered on the wavelength λ1, the portion of the defective DF located at x2 is imaged.

As shown in FIGS. 36 (b) and 36 (c), the hyperspectral camera 300-2 images the inspection target 660 at each position of the inspection target 660. Therefore, a plurality of imaging data can be obtained according to the number of positions where the inspection object 660 is imaged. The captured data is sequentially stored in a storage device (for example, a RAM 730, a hard disk drive (not shown), or the like).

FIG. 37 is an image (evaluation image) generated by extracting the imaging data captured by the hyperspectral camera 300-2 for each wavelength and rearranging them so as to reproduce the shape of the inspection object 660 in the real space. It is a figure which shows. FIG. 37A is a diagram in which imaging data having a wavelength of λ0 is extracted and arranged so as to reproduce the inspection object 660. FIG. 37B is a diagram in which imaging data having a wavelength of λ1 is extracted and arranged so as to reproduce the inspection target object 660. FIG. 37 (c) is a diagram in which imaging data having a wavelength of λ2 is extracted and arranged so as to reproduce the inspection target object 660. FIG. 37 (d) is a diagram in which imaging data having a wavelength of λ3 is extracted and arranged so as to reproduce the inspection target object 660.

In FIG. 37, the number of diagonal lines indicates clarity. As shown in FIG. 37 (a), at the wavelength λ0, the image of the inspection object 660 is clear to some extent. As shown in FIG. 37 (b), at the wavelength λ1, the image of the inspection object 660 is the clearest. As shown in FIG. 37 (c), at the wavelength λ2, the image of the inspection object 660 is somewhat unclear. As shown in FIG. 37 (d), at the wavelength λ3, the image of the inspection object 660 becomes considerably unclear.

37 (a) to 37 (d) are evaluation images for evaluation in the image evaluation process, as will be described later. By executing the image evaluation process, it is possible to determine the wavelength at which the inspection object 660 is most clearly imaged.

In this example, the defective DF is most clearly imaged with light having a wavelength of λ1, but the wavelength that can be clearly imaged differs depending on the type of defect. Further, depending on the type of defect, it may be possible to clearly image at a plurality of wavelengths. In this way, the wavelength of light to be illuminated can be determined according to the type and nature of the defect to be found.

<Configuration of inspection table 600-2>
FIG. 38 is a perspective view showing the entire inspection table 600-2 according to the second embodiment. FIG. 38 corresponds to FIG. 6 of the first embodiment. The same reference numerals are given to the configurations similar to those of the first embodiment. The inspection table 600-2 has a hyperspectral camera 300-2. A hyperspectral camera 300-2 is provided in place of the camera 300 provided on the inspection table 600 of the first embodiment. The inspection table 600 may be provided with a camera 300 and a hyperspectral camera 300-2 so as to be selectable. If necessary, it is possible to switch to either the camera 300 or the hyperspectral camera 300-2.

Similar to the first embodiment, the inspection table 600-2 has a camera θ stage 650, a camera θ guide 651, and a camera linear motion stage 652. The camera θ stage 650, the camera θ guide 651, and the camera linear motion stage 652 have the same configurations and functions as those in the first embodiment. The hyperspectral camera 300-2 can be positioned at a desired position by the camera θ stage 650, the camera θ guide 651, and the camera linear motion stage 652.

<System configuration of design equipment>
FIG. 39 is a diagram showing a system configuration of the design apparatus according to the second embodiment. FIG. 39 corresponds to FIG. 9 of the first embodiment. The same reference numerals are given to the configurations similar to those of the first embodiment. The hyperspectral camera 300-2 is connected to the camera controller 750-2 with a cable or the like. The camera controller 750-2 is a controller for controlling the imaging of the hyperspectral camera 300-2 and processing the image captured by the hyperspectral camera 300-2.

The box illumination 820-2 is connected to the rod-shaped light guide 230 by a liquid light guide 157, a fiber, or the like. The rod-shaped light guide 230 is housed in the second storage portion 910 in the same manner as the plate-shaped light guide 220 of the first embodiment. The robot 100 can grip the rod-shaped light guide 230 with the second storage unit 910 and take out the plate-shaped light guide 220 from the second storage unit 910. The robot 100 moves and positions the removed rod-shaped light guide 230 so as to have a desired position and a desired direction.

<System configuration on the inspection table side>
FIG. 40 is a diagram showing a system configuration on the inspection table side according to the second embodiment. FIG. 40 corresponds to FIG. 11 of the first embodiment. The same reference numerals are given to the configurations similar to those of the first embodiment.

When the drive signal is transmitted from the motion controller 760 to the camera direct motion controller 772, the camera linear motion controller 772 transmits a drive signal to the camera direct motion drive motor 320 of the camera linear motion stage 652 based on the received drive signal. .. The camera direct drive motor 320 is driven in a rotation direction, a rotation speed, or the like according to a drive signal, the camera support portion 653 moves in the LC direction shown in FIG. 38, and the hyperspectral camera 300-2 is shown in FIG. Move in the LC direction of 38.

The illuminating device 200-2 illuminates the inspection object 660 from above the table 400 (illumination device 200-2 shown by the solid line in FIG. 40) and illuminates the inspection object 660 from below the table 400 (lighting device 200-2). There is a lighting device 200-2) shown by a broken line in FIG. 40.

<Image generation process for evaluation>
FIG. 41 is a flowchart showing a process of generating an evaluation image for evaluating a defect. As described with reference to FIG. 36, an image in which defects are clearly captured can be extracted from the imaging data of the hyperspectral camera 300-2, and the wavelength at that time can be determined as the optimum wavelength. The number of imaging data is the number of positions (imaging positions) in which the inspection object 660 is moved and imaged. The imaging position is, for example, in the case of the example of FIG. 36, the number of the inspection objects 660 positioned between xs and x. The evaluation image generation process of FIG. 41 is a process of generating an evaluation image for determining whether or not a defect is clear. Whether or not the defect is clear is determined by the optimum wavelength determination process shown in FIG. 42, which will be described later.

This process may be executed by the PC 700 or the hyperspectral camera 300-2. In the following, as an example, it will be described as being executed by the PC 700.

First, the CPU 710 of the PC 700 sets the extraction wavelength to the minimum wavelength (step S4111). As described above, the hyperspectral camera 300-2 can perform imaging with a maximum dispersion of 450 wavelengths. The process of step S4111 is a process of setting the smallest wavelength of 450 wavelengths.

Next, the CPU 710 of the PC 700 sets the shooting position x as the start position (step S4113). For example, in the case of the example of FIG. 36, the process of step S4113 is a process of designating the first imaging position xs.

Next, the CPU 710 of the PC 700 reads out the imaging data captured at the imaging position x (step S4115). As described above, as many imaging data as the number of imaging positions where the inspection object 660 is positioned can be obtained. Therefore, by designating the imaging position, the imaging data captured at the imaging position can be read from the storage device (RAM 730 or the like).

For example, when xs is designated as the imaging position x by the process of step S4113, the imaging data captured at the position xs is read out. When x1 is designated as the imaging position x by the process of step S4123 described later, the imaging data captured at the position x1 is read out.

Next, the CPU 710 of the PC 700 extracts the data of the extraction wavelength portion of the read imaging data (step S4117). When the minimum wavelength is specified as the extraction wavelength in the process of step S4111, the portion of the minimum wavelength is extracted. The wavelengths to be extracted are sequentially designated by repeatedly executing the process of step S4129 described later. For example, when the wavelength λ1 is specified as the extraction wavelength by the process of step S4129, the portion of the wavelength λ1 in the read imaging data is extracted.

Next, the CPU 710 of the PC 700 arranges the extracted data in the storage area of the RAM 730 of the PC 700 according to the imaging position (step S4119). By repeatedly executing the process of step S4119, the extracted data is gradually arranged and stored in the storage area of the RAM 730.

Next, the CPU 710 of the PC 700 determines whether or not the imaging data corresponding to all the imaging positions has been read (step S4121). For example, in the case of the example of FIG. 36, the process of step S4211 is a determination of whether or not the image data corresponding to all the imaging positions from the first imaging position xs to the last imaging position xe has been read.

When the CPU 710 of the PC 700 determines that the imaging data corresponding to all the imaging positions has not been read (NO), the CPU 710 determines the next imaging position (step S4123), and returns the process to step S4115.

When the CPU 710 of the PC 700 determines that the imaging data corresponding to all the imaging positions has been read (YES), the process of step S4119 is repeatedly executed to evaluate the image generated in the storage area of the RAM 730 of the PC 700. It is stored as an image in another storage area of the RAM 730 (step S4125).

Next, the CPU 710 of the PC 700 determines whether or not all the wavelengths have been extracted (step S4127). That is, the process of step S4127 is a process of determining whether or not all the 450 wavelengths have been extracted. When all the wavelengths have not been extracted yet (NO), the CPU 710 of the PC 700 determines the next largest wavelength as the extraction wavelength (step S4129), and returns the process to step S4113.

By the process described above, an evaluation image corresponding to each of the 450 wavelengths is generated. For example, in the case of the example of FIG. 36, as shown in FIGS. 37 (a) to 37 (d), evaluation images of λ0, λ1, λ2, and λ3 are generated. An image of the inspection object 660 is formed on the evaluation image according to the wavelength.

The CPU 710 of the PC 700 ends this subroutine when all wavelengths have been extracted (YES).

<Optimal wavelength determination processing>
FIG. 42 is a flowchart showing a process of determining and displaying an optimum wavelength for detecting a defect.

First, the CPU 710 of the PC 700 sets the read wavelength λ to the minimum wavelength (step S4211).

Next, the CPU 710 of the PC 700 reads out an evaluation image of the read wavelength λ (step S4213). For example, when the read wavelength is λ1 shown in FIG. 36, the evaluation image of λ1 (FIG. 37 (b)) is read.

Next, the CPU 710 of the PC 700 calls the image evaluation process of FIG. 24 described in the first embodiment, and executes the image evaluation process on all the generated evaluation images (S4215).

Next, the CPU 710 of the PC 700 determines whether or not the defect included in the evaluation image of the read wavelength λ read out in the process of step S4213 is clear (step S4217). Scores are given by executing image evaluation processing on the evaluation image. An evaluation image with a high score is defined as an image with clear defects.

When the defect contained in the evaluation image of the read wavelength λ is clear (YES), the CPU 710 of the PC 700 stores the read wavelength λ in the RAM 730 of the PC 700 (step S4219).

Whether or not the CPU 710 of the PC 700 has read all wavelengths when the defect contained in the evaluation image of the read wavelength λ is not clear (NO) or when the process of step S4219 is executed. (Step S4221). That is, it is determined whether or not the defect contained in each evaluation image of 450 wavelengths is clear or not.

When the CPU 710 of the PC 700 determines that all wavelengths have not been read (NO), it determines the next read wavelength λ (step S4223), and returns the process to step S4213.

When the CPU 710 of the PC 700 reads out all the wavelengths (YES), the CPU 710 displays the wavelengths stored in step S4219 on a display or the like (step S4225), and ends this subroutine. In this way, the image evaluation process is executed for the evaluation image corresponding to each of the 450 wavelengths, and the wavelength with clear defects is determined and displayed.

In the second embodiment, it is sufficient that the inspection object 660 can be photographed for each wavelength, and a multispectral camera may be used instead of the hyperspectral camera. The camera and the lighting may be selected by appropriately selecting according to the type of defect.

The design information proposal device is
A lighting device that emits light to illuminate an inspection object, a lighting device that can change the lighting conditions including the illumination position with respect to the inspection object, and emits light containing a plurality of wavelengths.
A camera that images an inspection object and outputs imaging signals for each of a plurality of wavelengths, and a camera that can change the imaging conditions including the imaging position with respect to the inspection object.
A judgment result of determining the surface state of the inspection object from the imaging signal, a memory for storing the imaging condition and the lighting condition in association with each other,
It includes a monitor that displays the associated determination result, imaging conditions, and lighting conditions.

Furthermore, the design information proposal device is
The wavelength at which defects in the inspection object can be displayed is displayed on the monitor.

100 Robot 200 Lighting device 200-2 Lighting device 300 Camera 300-2 Hyperspectral camera 400 Table 510 1st diffuser 520 2nd diffuser 600 Inspection table 600-2 Inspection table 900 1st storage section 910 2nd storage section 920th 3 storage unit 930 4th storage unit

Claims (4)

A camera that captures an image of an inspection object and outputs an imaging signal, and a camera that can change the imaging conditions including the imaging position with respect to the inspection object.
A lighting device that emits light to illuminate an inspection object and can change the lighting conditions including the lighting position with respect to the inspection object.
A judgment result of determining the surface state of the inspection object from the imaging signal, a memory for storing the imaging condition and the lighting condition in association with each other,
A design information proposing device including a monitor that displays an associated determination result, an imaging condition, and a lighting condition. With more controllers
The controller
The design information proposing device according to claim 1, wherein the state of the surface of the inspection target is determined by determining the shape of the unevenness on the surface of the inspection target. Further equipped with a robot that grips the lighting device and moves it to a predetermined lighting position.
The design information proposing device according to claim 2, wherein the controller controls the robot. A lighting device that emits light to illuminate an inspection object, a lighting device that can change the lighting conditions including the illumination position with respect to the inspection object, and emits light containing a plurality of wavelengths.
A camera that images an inspection object and outputs imaging signals for each of a plurality of wavelengths, and a camera that can change the imaging conditions including the imaging position with respect to the inspection object.
A judgment result of determining the surface state of the inspection object from the imaging signal, a memory for storing the imaging condition and the lighting condition in association with each other,
A design information proposing device including a monitor that displays an associated determination result, an imaging condition, and a lighting condition.

Images