JP2021002639A5

JP2021002639A5 -

Info

Publication number: JP2021002639A5
Application number: JP2019226437A
Authority: JP
Filing date: 2019-12-16
Publication date: 2022-10-13

Claims

A substrate holding device that rotates the substrate about its axis while circularly moving the substrate,
a plurality of rollers capable of contacting the periphery of the substrate;
a plurality of electric motors for rotating the plurality of rollers;
a plurality of eccentric shafts arranged around a predetermined central axis;
Equipped with multiple actuators,
The plurality of eccentric shafts have a plurality of first shaft portions and a plurality of second shaft portions eccentric from the plurality of first shaft portions,
the plurality of rollers are respectively fixed to the plurality of second shaft portions, the plurality of first shaft portions are respectively connected to the plurality of electric motors,
The plurality of eccentric shafts are composed of a plurality of movable shafts and a plurality of reference shafts,
The plurality of actuators are respectively connected to the plurality of movable shafts,
The substrate holding device, wherein the plurality of actuators are configured to move the plurality of movable axes in a direction toward the plurality of reference axes and a direction away from the plurality of reference axes.

The plurality of eccentric shafts further have a plurality of intermediate shaft portions connecting the plurality of first shaft portions and the plurality of second shaft portions,
2. The substrate holding device according to claim 1, wherein said plurality of first shafts are respectively fixed to said plurality of intermediate shafts, and said plurality of second shafts are respectively fixed to said plurality of intermediate shafts.

3. The substrate holding apparatus according to claim 1, further comprising an operation control section that rotates said plurality of electric motors at the same speed and in the same phase.

4. The substrate holder according to any one of claims 1 to 3, wherein the direction toward the plurality of reference axes and the direction away from the plurality of reference axes are the direction toward the central axis and the direction away from the central axis. Device.

each of the plurality of actuators,
a piston;
a housing spaced apart from the piston;
5. The substrate holding device according to claim 1, further comprising a partition film forming a pressure chamber between said piston and said housing.

The partition membrane is
a central portion contacting the ends of the piston;
an inner wall portion connected to the central portion and extending along the side of the piston;
a folded portion connected to the inner wall portion and having a curved cross section;
6. The substrate holding device according to claim 5, further comprising an outer wall portion connected to said folded portion and located outside said inner wall portion.

2. The substrate holding apparatus according to claim 1 , further comprising at least one non-contact distance sensor for measuring a travel distance of at least one of said plurality of movable axes.

Whether or not an abnormality has occurred in the substrate holding device is determined by comparing the measured value of the movement distance or an index value calculated from a plurality of measured values of the movement distance with a preset threshold value. 8. The substrate holding apparatus of claim 7, further comprising an operation controller configured to determine .

9. The substrate holding apparatus according to claim 8, wherein said index value is an average value of positions of at least one of said plurality of movable shafts when said plurality of rollers rotates one or more rotations.

9. The substrate according to claim 8, wherein the index value is a difference between a maximum value and a minimum value of the position of at least one of the plurality of movable axes during one or more rotations of the plurality of rollers. holding device.

A substrate holding device that rotates the substrate about its axis while circularly moving the substrate,
a plurality of rollers capable of contacting the periphery of the substrate;
a plurality of electric motors for rotating the plurality of rollers;
a plurality of eccentric shafts arranged around a predetermined central axis;
with an actuator,
The plurality of eccentric shafts have a plurality of first shaft portions and a plurality of second shaft portions eccentric from the plurality of first shaft portions,
the plurality of rollers are respectively fixed to the plurality of second shaft portions, the plurality of first shaft portions are respectively connected to the plurality of electric motors,
The plurality of eccentric shafts are composed of a movable shaft and a plurality of reference shafts,
The actuator is connected to the movable shaft,
The actuator is configured to move the movable axis in a direction approaching the plurality of reference axes and a direction away from the plurality of reference axes,
The actuator is
a piston;
a housing spaced apart from the piston;
A substrate holding device comprising a partition membrane forming a pressure chamber between the piston and the housing.

The plurality of eccentric shafts further have a plurality of intermediate shaft portions connecting the plurality of first shaft portions and the plurality of second shaft portions,
12. The substrate holding device according to claim 11, wherein the plurality of first shaft portions are respectively fixed to the plurality of intermediate shaft portions, and the plurality of second shaft portions are respectively fixed to the plurality of intermediate shaft portions.

13. The substrate holding apparatus according to claim 11, further comprising an operation control section that rotates said plurality of electric motors at the same speed and in the same phase.

14. The substrate holder according to any one of claims 11 to 13, wherein the direction toward the plurality of reference axes and the direction away from the plurality of reference axes are the direction toward the central axis and the direction away from the central axis. Device.

The partition membrane is
a central portion contacting the ends of the piston;
an inner wall portion connected to the central portion and extending along the side of the piston;
a folded portion connected to the inner wall portion and having a curved cross section;
15. The substrate holding device according to claim 11, further comprising an outer wall portion connected to said folded portion and located outside said inner wall portion.

12. The substrate holding device according to claim 11 , further comprising a non-contact distance sensor that measures the moving distance of said movable axis.

Whether or not an abnormality has occurred in the substrate holding device is determined by comparing the measured value of the movement distance or an index value calculated from a plurality of measured values of the movement distance with a preset threshold value. 17. The substrate holding apparatus of claim 16, further comprising a motion controller configured to determine .

18. The substrate holding device according to claim 17, wherein said index value is an average value of positions of said movable shaft when said plurality of rollers rotates one or more times.

18. The substrate holding apparatus according to claim 17, wherein said index value is a difference between a maximum value and a minimum value of positions of said movable shaft while said plurality of rollers are rotating one or more times.

A substrate holding device according to any one of claims 1 to 19;
A substrate processing apparatus comprising a processing head for processing a first surface of a substrate by bringing a processing tool into contact with the first surface.