JP2020204609A5 - Power cycle test equipment - Google Patents

Claims (10)

Power for testing a power semiconductor device having a signal terminal and an element terminal inserted in close contact with a heating cooler equipped with a first circulating water pipe for inflowing a liquid and a second circulating water pipe for discharging the liquid. A cycle test device,
a connection structure connected to the element terminal;
a connection wiring connected to the connection structure;
a signal wiring connected to the signal terminal;
a gate driver circuit connected to the signal wiring;
a power supply that supplies a test current or test voltage;
a first switch circuit that is turned on to supply the test current or test voltage to the device terminals of the power semiconductor device via the connection wiring and the connection structure;
The gate driver circuit applies a signal voltage for turning on or off the power semiconductor element to the signal wiring,
The heating cooler and the power semiconductor element are arranged in a first chamber having airtightness,
A power cycle test apparatus, wherein dry air for preventing dew condensation is flowed into the first chamber. A power for testing a power semiconductor device having a signal terminal and an element terminal inserted in close contact with a heating cooler equipped with a first circulating water pipe for inflowing a liquid and a second circulating water pipe for discharging the liquid. A cycle test device,
a connection structure connected to the element terminal;
a connection wiring connected to the connection structure;
a signal wiring connected to the signal terminal;
a gate driver circuit connected to the signal wiring;
a power supply that supplies a test current or test voltage;
a first switch circuit that is turned on to supply the test current or test voltage to the device terminals of the power semiconductor device via the connection wiring and the connection structure;
a second switch circuit that short-circuits the output of the power supply when turned on;
The gate driver circuit applies a signal voltage for turning on or off the power semiconductor element to the signal wiring,
The heating cooler and the power semiconductor element are arranged in a first chamber,
A power cycle test apparatus, wherein the first switch circuit and the second switch circuit are arranged in a second chamber. A power for testing a power semiconductor device having a signal terminal and an element terminal fixed in close contact with a heating/cooling plate to which a first circulating water pipe for inflowing liquid and a second circulating water pipe for discharging said liquid are attached. A cycle test device,
a connection structure connected to the element terminal;
a connection wiring connected to the connection structure;
a signal wiring connected to the signal terminal;
a gate driver circuit connected to the signal wiring;
a terminal voltage measuring circuit connected to the signal wiring;
a power supply that supplies a test current or test voltage;
a first switch circuit that is turned on to supply the test current or test voltage to the device terminals of the power semiconductor device via the connection wiring and the connection structure;
The gate driver circuit applies a signal voltage for turning on or off the power semiconductor element to the signal wiring,
The terminal voltage measuring circuit measures the terminal voltage between the device terminals of the power semiconductor device in synchronization with the signal voltage, and stops the test of the power semiconductor device or changes the control method based on the terminal voltage. Characterized power cycle test equipment. A power for testing a power semiconductor device having a signal terminal and an element terminal fixed in close contact with a heating/cooling plate to which a first circulating water pipe for inflowing liquid and a second circulating water pipe for discharging said liquid are attached. A cycle test device,
a connection structure connected to the element terminal;
a connection wiring connected to the connection structure;
a signal wiring connected to the signal terminal;
a gate driver circuit connected to the signal wiring;
a terminal voltage measuring circuit connected to the signal wiring;
a constant current circuit connected to the signal wiring;
a power supply that supplies a test current or test voltage;
a first switch circuit that is turned on to supply the test current or test voltage to the device terminals of the power semiconductor device via the connection wiring and the connection structure;
a second switch circuit that short-circuits the output of the power supply when turned on;
The gate driver circuit applies a signal voltage for turning on or off the power semiconductor element to the signal wiring,
A power cycle test apparatus, wherein the constant current circuit supplies a constant current to the signal wiring, and the terminal voltage measuring circuit measures a voltage between terminals to which the constant current is supplied. 5. The power cycle test apparatus according to claim 1, wherein a recess is formed in said connecting structure, and a heat pipe is in close contact with said recess. further comprising a support base having a slide groove for arranging the connection structure;
5. The power cycle test apparatus according to claim 1, wherein the connection structure is slid into the slide groove to connect the connection structure and the device terminal. . The connection structure has a connection part or a pressing tool and a connection fitting part,
The element terminal is sandwiched between the connecting portion or the pressing member and the connecting fitting portion for connection,
5. The power cycle test apparatus according to claim 1, 2, 3, or 4, wherein a surface of said connecting portion or said pressing portion is roughened. Further comprising a water leakage sensor that detects the leaked liquid,
grooves are formed for drainage of said leaked liquid;
5. The power cycle test apparatus according to claim 1, 2, 3, or 4, wherein operation of said water leakage sensor stops the power cycle test apparatus or issues an alarm. The device terminals are arranged on a first end face of the power semiconductor device, and the signal terminals are arranged on a second end face facing the first end face,
the connection wiring is connected to the element terminal;
5. The power cycle test apparatus according to claim 1, wherein said signal wiring is connected to said signal terminal. The first switch circuit is mounted on a switch circuit board to which a first conductor plate and a second conductor plate are attached,
The first switch circuit short-circuits the first conductor plate and the second conductor plate by being turned on,
The power semiconductor element is arranged in a first chamber,
the first switch circuit board is disposed in a second chamber;
an opening is formed between the first chamber and the second chamber;
5. The power cycle test apparatus according to claim 1, wherein said element terminal and said first conductor plate are connected through said opening.