JP2020196001A - Discharge device and imprint device - Google Patents

Abstract

To suppress contamination by a discharge material leaked from a discharge port of a discharge head in a discharge device.SOLUTION: A discharge device 10 includes a discharge head 14 which has a discharge port 15 for discharging a liquid discharge material, a storage container 13 which communicates with the discharge head and stores the discharge material inside, and pressure control means which maintains a pressure of an inside of the storage container at a negative pressure. The pressure control means generates a first pressure, by which a meniscus of the discharge material can be formed in the discharge port during normal operation, in the inside of the storage container, and lowers the pressure in the storage container to at least the first pressure when the pressure in the storage container becomes a predetermined pressure exceeding the first pressure.SELECTED DRAWING: Figure 2

Description

The present invention relates to a discharge device that discharges a liquid discharge material from a discharge head, and an imprint device including the discharge device.

As a discharge device that discharges a liquid or a liquid discharge material contained in a storage container from a discharge port of a discharge head, Patent Document 1 discloses a configuration including a pressure control means for controlling the pressure in the storage container. ..

JP-A-2015-0902549

However, the discharge device disclosed in Patent Document 1 does not consider the treatment for leakage of the discharge material from the discharge port. Therefore, there is a risk that the substrate and the inside of the device will be contaminated by the discharge material leaked from the discharge port.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a discharge device and an imprint device capable of suppressing contamination by a discharge material leaking from a discharge port of a discharge head.

In the present invention, a discharge head having a discharge port for discharging a liquid discharge material, a storage container that communicates with the discharge head and stores the discharge material inside, and a pressure inside the storage container are maintained at a negative pressure. A discharge device including a pressure control means for the purpose, wherein the pressure control means applies a first pressure to the storage container so that a meniscus of the discharge material can be formed in the discharge port during normal operation. It is characterized in that when it is generated inside and the pressure in the storage container becomes a predetermined pressure exceeding the first pressure, the pressure in the storage container is reduced to at least the first pressure. ..

According to the present invention, it is possible to suppress contamination by the discharge material leaked from the discharge port of the discharge head.

It is a figure which shows the schematic structure of the imprint apparatus. It is a figure which shows the structure of the discharge device in 1st Embodiment. It is a partial enlarged view in the vicinity of a discharge port in a discharge head. It is a figure which shows the state which the discharge material leaked from the discharge head in a discharge device. It is a schematic diagram which shows the recovery state of the discharge material leaked from a discharge head. It is a flowchart which shows the recovery process of a discharge material. It is a figure which shows the structure of the discharge device in 2nd Embodiment. It is a figure which shows the structure of the discharge device in 3rd Embodiment. It is a figure which shows the structure of the discharge device in 4th Embodiment. It is a figure which shows the structure of the discharge device in 5th Embodiment. It is a figure which shows the structure of the discharge device in 6th Embodiment. It is a figure which shows the structure of the discharge device in 7th Embodiment. It is a figure which shows the structure of the discharge device in 8th Embodiment.

Hereinafter, embodiments will be described with reference to the drawings. The same or corresponding parts will be described with the same reference numerals. In addition, the relative arrangement, shape, and the like of the components described in the embodiment are merely examples.

<< First Embodiment >>
In the first embodiment, the imprint device and the discharge device applicable to the imprint device will be described in this embodiment.

<Imprint device>
FIG. 1 is a diagram showing a schematic configuration of an imprint device 101 applicable to the present embodiment. The imprint device 101 is used for manufacturing various devices such as semiconductor devices. The imprint device 101 includes a discharge device 10. The discharge device 10 discharges the discharge material L1 (resist) onto the substrate 111. The discharge material L1 is a photocurable resin having a property of being cured by receiving ultraviolet rays 108 and the like. The discharge material L1 is appropriately selected depending on various conditions such as a semiconductor device manufacturing process. In addition to the photocurable material, for example, a discharge material which is a thermosetting resist may be used. Further, the imprinting apparatus may be an apparatus for performing an imprinting process by curing the resist with heat. In the imprint device, the discharge material L1 is an imprint material.

The imprint device 101 performs an imprint process including the following series of processes. That is, the imprint device 101 discharges the discharge material L1 onto the substrate 111 by the discharge device 10. Then, the mold 107 having the pattern for molding is pressed against the discharge material L1 discharged on the substrate 111, and in that state, the discharge material L1 is cured by irradiation with light (ultraviolet rays). Then, the molding pattern of the mold 107 is transferred onto the substrate 111 by pulling the mold 107 away from the cured discharge material L1.

The imprint device 101 includes a light irradiation unit 102, a mold holding mechanism 103, a substrate stage 104, a discharge device 10, a control unit 16, a measurement unit 122, and a housing 123.

The light irradiation unit 102 includes a light source 109 and an optical element 110 for correcting the ultraviolet rays 108 emitted from the light source 109. The light source 109 is, for example, a halogen lamp that generates i-line or g-line. The ultraviolet rays 108 are applied to the discharge material L1 via the mold 107. The wavelength of the ultraviolet ray 108 is a wavelength corresponding to the discharge material L1 to be cured. In the case of an imprinting apparatus using a thermosetting resist as a resist, a heat source unit for curing the thermosetting resist is installed instead of the light irradiation unit 102.

The mold holding mechanism 103 has a mold chuck 115 and a mold driving mechanism 116. The mold 107 held by the mold holding mechanism 103 has a rectangular outer peripheral shape, and has a pattern portion 107a in which a concavo-convex pattern such as a circuit pattern to be transferred is three-dimensionally formed on a surface facing the substrate 111. The material of the mold 107 in the present embodiment is a material capable of transmitting ultraviolet rays 108, and for example, quartz is used.

The mold chuck 115 holds the mold 107 by vacuum suction or electrostatic force. The mold drive mechanism 116 moves the mold 107 by holding and moving the mold chuck 115. The mold drive mechanism 116 can move the mold 107 in the −Z direction (downward) and press the mold 107 against the discharge material L1. Further, the mold drive mechanism 116 can move the mold 107 in the ten Z direction (upward) to separate the mold 107 from the discharge material L1. The operation of pressing the mold 107 against the discharge material L1 or the operation of pulling the mold 107 away from the discharge material L1 may be realized by moving the substrate stage 104 in the 10Z direction. Alternatively, it may be realized by moving both the mold 107 and the substrate stage 104 relatively.

The board stage 104 has a board chuck 119, a board stage housing 120, and a stage reference mark 121, and moves in the X direction and the Y direction. The substrate 111 held on the substrate stage is a single crystal silicon substrate or an SOI (Silicon on insulator) substrate. A pattern (discharge material pattern) is formed by the discharge material L1 discharged from the discharge device 10 at a predetermined position on the surface to be processed of the substrate 111.

The substrate chuck 119 holds the substrate 111 by vacuum suction or the like. The substrate stage housing 120 moves the substrate 111 by moving in the X and Y directions while holding the substrate chuck 119 by mechanical means. The stage reference mark 121 is used to set a reference position of the substrate 111 in the alignment between the substrate 111 and the mold 107. For example, a linear motor is used as the actuator of the substrate stage housing 120. In addition, the actuator of the substrate stage housing 120 may include a plurality of drive systems such as a coarse movement drive system or a fine movement drive system.

The discharge device 10 includes a discharge cartridge 100 and a pressure control means described later that controls the pressure in the storage container 13 of the discharge cartridge 100. The discharge cartridge 100 includes a storage container 13 (see FIG. 2) for storing the discharge material, and a discharge head 14 (see FIG. 2) mounted on the storage container 13. Details of the configuration of the discharge device 10 will be described later.

The measuring unit 122 includes an alignment measuring instrument 127 and an observation measuring instrument 128. The alignment measuring instrument 127 measures the positional deviation between the alignment mark formed on the substrate 111 and the alignment mark formed on the mold 107 in the X and Y directions. The observation measuring instrument 128 is, for example, an imaging device such as a CCD camera, and images a pattern (discharge material pattern) of the discharge material L1 discharged on the substrate 111 and outputs the image information to the control unit 16.

The control unit 16 controls the operation of each component of the imprint device 101 and the like. The control unit 16 is composed of, for example, a computer having a CPU, a ROM, and a RAM. The control unit 16 is connected to each component of the imprint device 101 via a line, and the CPU controls the drive of each component according to the control program stored in the ROM. The control unit 16 controls the operation of each unit of the mold holding mechanism 103, the substrate stage 104, and the discharge device 10 based on the measurement information of the measurement unit 122. The control unit 16 may be integrally configured with other parts of the imprint device 101, or may be realized as another device different from the imprint device. Further, the control unit 16 may be composed of a plurality of computers instead of one computer.

The housing 123 includes a base surface plate 124 on which the board stage 104 is placed, a bridge surface plate 125 for fixing the mold holding mechanism 103, and a support column 126 erected on the base surface plate 124 to support the bridge surface plate 125. To be equipped. Further, the imprint device 101 includes a mold transfer mechanism (not shown) that conveys the mold 107 from the outside of the device to the mold holding mechanism 103, and a substrate transfer mechanism (not shown) that conveys the substrate 111 from the outside of the device to the substrate stage 104. , Equipped with.

<Configuration of discharge device>
FIG. 2 is a diagram showing a configuration of a discharge device 10 provided in the imprint device 101. The discharge device 10 includes a discharge cartridge 100 and a pressure control means for controlling the internal pressure of the discharge cartridge 100. The discharge cartridge 100 includes a storage container 13 having a housing 11 and a housing 12, and a discharge head 14.

The outer shell of the storage container 13 is formed by the housing 11 and the housing 12. An opening is formed in the housing 11 and the housing 12 at positions facing each other. The opening of the housing 11 is sealed by the film 1 to form the first liquid chamber 5. The first liquid chamber 5 is filled with a liquid discharge material L1 to be discharged onto the substrate 111. Further, the first liquid chamber 5 communicates with the external space via the discharge head 14.

On the other hand, the opening of the housing 12 is sealed by the film 2 to form the second liquid chamber 6. The second liquid chamber 6 is filled with the working liquid L2. The second liquid chamber 6 is connected to a sub tank (storage unit) 26 included in the pressure control means via a supply pipe 23 and a communication pipe 24. The working fluid is a substance in which the change in density (volume) due to external temperature and pressure is negligible compared to the gas. Therefore, even if the air temperature or atmospheric pressure around the discharge device 10 changes, the volume of the working liquid 3 hardly changes. As the working fluid 3, for example, a substance selected from a liquid such as water or a gel-like substance can be used. Usually, the difference between the density of the discharged material and the density of the working fluid is smaller than the difference between the density of the discharged material and the density of the gas.

As described above, the internal space of the storage container 13 is divided into a first liquid chamber 5 and a second liquid chamber 6 by the film 1 and the film 2 constituting the flexible partition wall. Further, an annular inter-film plate 7 is provided as a spacer between the peripheral edge of the film 1 and the peripheral edge of the film 2, and liquid and air are provided between the film 1 and the film 2 by this plate. The inter-film space 4 through which the film can be distributed is formed. Film 1 and film 2 are thin films with a thickness of 10 to 100 micrometers. The materials of the film 1 and the film 2 may be any material that is flexible and resistant to the discharge material and the hydraulic fluid. For example, it is possible to use a material such as PTFE (Poly Tera Fluoro Ethylene). Further, in the present embodiment, two films 1 and 2 are used, but it is also possible to use one flexible film as a flexible partition wall to divide the internal space of the storage container. ..

On the other hand, the discharge head 14 is provided at the bottom of the above-mentioned storage container 13 and communicates with the first liquid chamber 5. FIG. 3 shows an enlarged partial cross section of the discharge head 14 in the vicinity of the discharge port 15. The discharge head 14 is formed with discharge ports 15 at a density of 500 to 1000 per inch. A discharge mechanism (not shown) is mounted in the pressure chamber 19 provided corresponding to each discharge port 15. The discharge mechanism is composed of, for example, a pieso element or a heat generating element (not shown), and is provided from the discharge port 15 by applying energy such as pressure, vibration, or heat to the discharge material L1 supplied in the pressure chamber 19. The discharge material L1 can be discharged. The discharge mechanism may be any one capable of generating energy capable of discharging the discharge material L1 as fine droplets, for example, droplets of 1 pL or the like.

Each pressure chamber 19 communicates with the common liquid chamber 20, and the common liquid chamber 20 communicates with the first liquid chamber 5 of the storage container 13. The discharge material L1 discharged from the discharge port 15 is supplied from the storage container 13 to the pressure chamber 19 via the common liquid chamber 20. The discharge head 14 does not have a control valve for controlling the flow of the discharge material L1 between the discharge head 14 and the first liquid chamber 5. Therefore, the pressure inside the storage container 13 is controlled to be lower than the atmospheric pressure (atmospheric pressure) outside the discharge port 15 (negative pressure). By this negative pressure control, the discharge material in the discharge port forms a meniscus 17 at the lowermost end portion of the discharge port 15 (near the opening of the discharge port 15) to be in a state suitable for discharge, and the discharge material L1 is in an unintended timing. Can be suppressed from leaking (dropping) from the discharge port 15. In the present embodiment, the internal pressure of the storage container 13 is controlled to be 0.3 to 0.5 kPa lower than the atmospheric pressure (negative pressure). The discharge head 14 is arranged at a position where the vertical distance between the discharge port surface 15a on which the opening of the discharge port 15 is formed and the substrate 111 which is the object to be discharged is 500 um or less.

With the above configuration, when there is a difference in the internal pressure between the first liquid chamber 5 and the second liquid chamber 6, the flexible film 1 and the film 2 move to the lower pressure side at the same time, and the internal pressure difference Stops moving when there is no more. This movement is repeated each time a difference in internal pressure occurs. Therefore, the internal pressures of the first liquid chamber 5 and the second liquid chamber 6 can always be kept equal.

This will be described more specifically. When the discharge material L1 is discharged from the discharge head 14, the volume in the first liquid chamber 5 is reduced, and the internal pressure of the first liquid chamber 5 is reduced by the reduced volume. At this time, if the film 2 does not move, the volume inside the second liquid chamber 6 does not change, and the internal pressure of the second liquid chamber 6 becomes higher than the internal pressure of the first liquid chamber 5. However, in the present embodiment, since both the film 1 and the film 2 have flexibility, when the volume of the second liquid chamber 6 is reduced, the film 2 and the film 1 are combined with the first liquid chamber by the reduced volume. Move to the 5 side. At the same time, the working liquid L2 is sucked up from the sub tank 26 into the second liquid chamber 6 via the communication pipe 24. As a result, the internal pressures of the first liquid chamber 5 and the second liquid chamber 6 become equal again and reach an equilibrium state. In this embodiment, the film 1 and the film 2 are partially connected by welding or the like in order to smoothly move the film 1 and the film 2 at the same time.

Further, although it is possible to use a polytetrafluoroethylene-based material for the film 1 and the film 2 as described above, it is also possible to form the film 1 and the film 2 with other materials. Polytetrafluoroethylene-based films have high hardness and are technically difficult to form thin. Therefore, the film 1 may use a material such as PTFE that is resistant to the discharge material L1, and the film 2 may use a material that is resistant to the hydraulic fluid L2, for example, a nylon-based soft material. Further, the film 1 may be thinned and the film 2 thicker than the film 1 may be used. In this way, by using films of different materials and thicknesses for the two films 1 and 2, the rigidity of the entire film is lowered, and the movement of the film 1 and the film 2 due to the ejection of the ejection material L1 becomes smoother. It will be possible to do. In addition, the thickness of the film 1 may be made thicker than the thickness of the film 2 for the purpose of protecting the discharge material L1. According to this, the film 1 and the film 2 can be smoothly moved while more reliably protecting the discharge material L1.

Next, the pressure control means for controlling the internal pressure of the storage container 13 will be described. The pressure control means include a sub tank 26, a communication pipe 24, a supply pipe 23, first to fourth control valves 73, 21, 72, 31, liquid feed pumps 22, 32, a main tank 34, and a first discharge pipe 70. It includes a first discharge pump (negative pressure generating means) 71 and the like. The sub tank 26 is configured to be able to store the hydraulic fluid L2, and is connected to the second liquid chamber 6 via the communication pipe 24 and the supply pipe 23. A first control valve (first valve) 73 that can be opened and closed is provided in the middle of the communication pipe 24 to switch between communicating and shutting off the second liquid chamber 6 and the sub tank 26.

The supply pipe 23 is provided with a liquid feed pump 22 and a control valve 21 that can be opened and closed to switch between communicating and shutting off the liquid feed pump 22 and the second liquid chamber. Further, in the supply pipe 23, one end of the first discharge pipe 70 is connected between the second control valve 21 and the second liquid chamber 6. The other end of the first discharge pipe 70 is connected to the first waste liquid container 69. The first discharge pipe 70 is provided with a first discharge pump 71 and a third control valve (second valve) 72. The third control valve 72 is composed of an openable / closable valve that switches between communicating and shutting off the supply pipe 23 and the first discharge pump 71. The control unit 16 drives the first to fourth control valves 73, 21, 72, 31, the liquid feed pumps 22, 32, the first and second discharge pumps 9, 71, etc. in the pressure control means of the present embodiment. It is controlled by (Fig. 1).

In the present embodiment, the first pressure control means for generating a negative pressure (first pressure) for forming a meniscus suitable for discharge in the discharge port 15 inside the storage container 13 is a sub tank 26. , The communication pipe 24 and the first control valve (first valve) 73 are included. Further, the second pressure control means for generating a pressure lower than the first pressure (second pressure) inside the storage container 13 includes a first discharge pump 71, a first discharge pipe 70, and the like. It is configured to include a third control valve (second valve) 72.

Further, when a part of the above-mentioned film 1 or film 2 provided in the storage container 13 is damaged and the discharge material L1 or the hydraulic fluid L2 leaks from the damaged portion into the inter-film space 4 in the discharge device 10. , A damage detection mechanism (damage detection means) for detecting this is provided. The damage detection mechanism includes a second discharge pipe 8 having one end connected to the space 4 between films of the storage container 13, a second discharge pump 9 provided in the second discharge pipe 8, and a leak sensor 3. It is configured to include a second waste liquid container 30.

The second discharge pump 9 is always in operation during the discharge operation period by the discharge device 10, and sucks the air in the space 4 between the films. Therefore, when the film 1 or the film 2 is damaged and the discharge material L1 or the hydraulic fluid L2 leaks into the inter-film space 4, the leaked liquid is sucked into the second discharge pipe 8. The leak sensor 3 can detect both the sucked discharge material L1 and the hydraulic fluid L2, and thereby can detect damage to the film 1 and the film 2. When damage to the film 1 or 2 is detected, the operations of the discharge device 10 and the imprint device 101 are stopped.

Further, the discharge device 10 is provided with a camera 74 that images the upper surface of the substrate 111. The camera 74 can identify the position of the discharge material L1 provided on the substrate 111 and confirm the state. It is also possible to detect which discharge port 15 the discharge material L1 has leaked from based on the image pickup result of the camera 74. Further, the discharge device 10 is provided with a full water sensor 28 for detecting that the hydraulic fluid L2 supplied to the sub tank 26 has exceeded the accommodating volume of the sub tank 26 and leaked from the intake pipe 25. Further, the sub tank 26 is provided with a liquid level sensor 41 that detects the position of the liquid level of the hydraulic liquid L2 stored inside. The CPU of the control unit 16 controls the drive of each unit based on the output results of the liquid level sensor 41, the full water sensor 28, the leak sensor 3, the camera 74, and the like.

<Operation of discharge device>
In the discharge device 10 configured as described above, as shown in FIG. 2, since the sub tank 26 communicates with the atmosphere through the intake pipe 25 which is an atmospheric communication pipe, its internal pressure is equal to that of the atmosphere. In the normal operation in which the leakage of the discharge material L1 from the discharge port 15 is not detected, the first control valve 73 is in the open state. Therefore, the communication pipe 24 that communicates the sub tank 26 and the second liquid chamber 6 is filled with the working liquid L2, and the sub tank 26 stores the working liquid L2.

The liquid level position (hereinafter, also referred to as “liquid level height”) of the working liquid L in the sub tank 26 in the vertical direction is set to a position lower than the discharge port 15 of the discharge head 14 by ΔH. The value of ΔH (head difference) is set so that the meniscus 17 of the discharge material L1 is maintained at a position suitable for discharge in the discharge port. That is, the value of the head difference ΔH is set so that the discharge material L1 does not leak or drip from the discharge port 15 to the outside and the meniscus 17 is not excessively drawn into the inner part (for example, near the common liquid chamber). ing. Specifically, the value of the head difference ΔH is set to 40 ± 4 mm so that the internal pressure of the first liquid chamber 6 is 0.40 ± 0.04 kPa lower than the atmospheric pressure. However, this value is an example, and the value of the head difference ΔH needs to be appropriately set according to the diameter of the discharge port 15 and the physical properties of the discharge material (for example, density, viscosity, etc.).

The discharge device 10 in the present embodiment is applied to an imprint device capable of discharging a liquid amount of about 1 pL (picolitre) or less from each discharge port 15 of the discharge head 14 by one discharge operation. A discharge device is assumed. The discharge material L1 is an imprint material and has a density substantially equal to that of water. The diameter of the discharge port 15 is about 10 μm (micron). In consideration of such conditions, the value of the head difference ΔH is set to 40 mm ± 4 mm.

However, depending on the discharge head, there is a discharge head having a diameter of several tens of μm and a coarse resolution, and there are discharge materials having various physical properties. Therefore, it is necessary to change the numerical value of the head difference ΔH depending on the application target of the discharge device.

When the height of the liquid level detected by the liquid level sensor 41 provided on the side surface of the sub tank 26 exceeds the range of ± 4 mm with respect to the reference water surface height (height 40 mm lower than the discharge port 15), A sequence for correcting the hydraulic fluid L2 in the sub tank 26 is performed. For example, when the discharge device 10 performs a discharge operation and the discharge material L1 in the discharge cartridge 100 is consumed, the hydraulic fluid 3 is pumped from the sub tank 26 by the consumed volume, and the liquid level in the sub tank 26 drops. To do. When the liquid level of the sub tank 26 drops, the head difference ΔH increases. At this time, if the head difference ΔH becomes excessive, the negative pressure of the storage container 13 becomes excessive, and there is a possibility that outside air is sucked from the discharge port 15.

Therefore, in the discharge device 10 shown in FIG. 2, when the liquid level in the sub tank 26 is measured by the liquid level sensor 41 provided on the side surface of the sub tank 26 and the liquid level drops beyond a predetermined range (here, 4 mm). Is a sequence of supplying the hydraulic fluid L2 to the sub tank 26. Specifically, the liquid feed pump 32 and the fourth control valve 31 are driven to supply the hydraulic fluid L2 from the main tank 34 to the sub tank 26. When the liquid level in the sub tank 26 rises beyond a predetermined range, the hydraulic fluid L2 is returned from the sub tank 26 to the main tank 34. As a result, the liquid level in the sub tank 26 is controlled within a desired range (so-called "liquid level adjusting function").

Further, in the normal operation in which leakage (leakage) is not detected, the third control valve 72 is closed and the second control valve 21 is opened to operate the liquid feed pump 22. As a result, the hydraulic fluid L2 in the sub tank 26 passes through the second control valve 21 and is supplied to the second liquid chamber 6, while the hydraulic fluid L2 in the second liquid chamber 6 is the first control valve. It passes through 73 and is supplied to the sub tank 26. That is, by operating the liquid feed pump 22, the hydraulic fluid L2 can be circulated between the sub tank 26 and the second liquid chamber 6. By this circulation operation, the air mixed in the second liquid chamber 6, the communication pipe 24, and the supply pipe 23 can be discharged to the sub tank 26.

As described above, in the discharge device 10 shown in FIG. 1, the first liquid chamber 5 and the second liquid chamber 6 are separated by the two flexible films 1 and 2. If the film 1 and the film 2 can be deformed independently, the pressure in the discharge head 14 cannot be controlled even if the liquid level height of the sub tank 26 is adjusted. For example, even if the liquid level of the sub tank 26 is controlled to be lower than the discharge port 15, only the film 2 moves in the + X direction shown in FIG. 2 until the internal pressure of the liquid chamber 6 becomes equal to the atmospheric pressure. Therefore, a large amount of the hydraulic fluid L2 flows out from the second liquid chamber 6 to the sub tank 26, and the hydraulic fluid L2 overflows from the intake pipe 25 of the sub tank 26. Alternatively, the hydraulic fluid L2 returned to the sub tank 26 by the liquid level adjusting function of the sub tank 26 is sent to the main tank 34. In either case, the hydraulic fluid eventually disappears from the second liquid chamber 6, and the film 2 sticks to the wall surface of the housing 12.

On the other hand, in the present embodiment, the film 1 and the film 2 move at the same time, and the internal pressures of the first liquid chamber 5 and the second liquid chamber 6 are kept equal. Therefore, by controlling the pressure of the second liquid chamber 6, the pressure of the first liquid chamber 5 and the discharge port 15 communicating with the first liquid chamber 5 can be controlled to an appropriate pressure. That is, by providing the head difference ΔH between the liquid level of the working liquid L2 in the sub tank 26 and the discharge port 15, it is possible to form a meniscus 17 suitable for discharge in the discharge port.

However, air may be mixed into the storage container 13 when the communication pipe 24 and the supply pipe 23 are connected to the storage container 13. In addition, air may enter the second liquid chamber 6 through a minute gap formed in the connecting portion between the storage container 13 and each pipe due to aging or the like. As described above, when air bubbles are generated in the hydraulic fluid L2 due to the intrusion of air into the second liquid chamber 6, the pressure in the first liquid chamber 5 may not be normally controlled. For example, the internal pressure of the first liquid chamber 5 and the second liquid chamber 6 changes from a negative pressure to a positive pressure due to the intrusion of air into the first liquid chamber 5, and the discharge material L1 leaks from the discharge port 15. Sometimes.

FIG. 4 is a diagram showing a state of the discharge device 10 when a liquid leaks from the discharge port 15 in the discharge device of the present embodiment. As described above, in the normal discharge operation, the internal pressure of the first liquid chamber 5 is lowered by 0.40 ± 0.04 kPa with respect to the atmospheric pressure, so that the head between the discharge port 15 and the sub tank 26 is reached. The difference ΔH is controlled to be 40 ± 4 mm.

However, when air bubbles are mixed into the communication pipe 24, the supply pipe 23, or the second liquid chamber 6, the meniscus 17 formed in the discharge port 15 collapses, and as shown in FIG. 4, the discharge port 15 to the substrate 111 The discharge material L1 may leak upward.

Therefore, in the present embodiment, the camera 74 provided adjacent to the discharge head 14 takes an image on the substrate 111, and detects whether or not the discharge material L1 has leaked from the discharge port 15 onto the substrate 111. Here, an example in which the camera 74 is used as the leakage detection means of the discharge material L1 is shown, but it is also possible to detect the leaked state of the discharge material L1 by using another sensor. For example, it is possible to detect leakage by using a leakage (leakage) sensor provided on the surface of the discharge head 14 or a signal detecting means for detecting a counter electromotive force signal of a piezoelectric element incorporated in the discharge head 14. is there. Further, the leakage (leakage) may be detected by a pressure sensor or the like provided in the housing 12. The discharge device 10 may be provided with any one of the above leak detection means.

Hereinafter, the process executed when the leakage of the discharge material L1 is detected will be described. When a leak (leakage) of the discharge material L1 from the discharge port 15 is detected by a leak detection sensor such as a camera 74, the first control valve 73 is switched from the open state to the closed state, and the sub tank 26 to the second liquid chamber. A process of stopping the supply of the hydraulic fluid L2 to No. 6 is performed.

After that, the second control valve 21 is switched from the open state to the closed state, and the third control valve 72 is switched from the closed state to the open state to drive the first discharge pump 71. The first discharge pump 71 sucks the working liquid L2 from the connecting portion with the supply pipe 23 into the first waste liquid container 69, and controls the internal pressure of the second liquid chamber 6. Specifically, the pressure is controlled to be less than -0.40 kPa and -3 kPa or more with respect to the atmospheric pressure. The pressure of less than −0.40 kPa is the pressure generated in the first and second liquid chambers 5 and 6 due to the head difference ΔH between the liquid level in the sub tank 26 and the discharge port 15 in the normal discharge operation. It is a pressure lower than (negative pressure) (large negative pressure). In other words, a pressure of less than −0.40 kPa with respect to atmospheric pressure means a pressure (large negative pressure) lower than the pressure (negative pressure) for forming and maintaining the meniscus 17 suitable for discharge in the discharge port 15. .. Further, the pressure of -3 kPa or more above the atmospheric pressure means the pressure at which air is not taken in from the discharge port 15.

By controlling the internal pressure of the first liquid chamber 5 to be as described above, as shown in FIG. 5, the discharge material L1 leaking (leaking) on the substrate 111 is sucked and recovered from the discharge port 15. It is possible. During the recovery operation of the discharge material L1, it is preferable to stop the movements of the discharge device 10 and the substrate transfer unit 62 in order to prevent the discharge material L1 leaking from the substrate 111 from adhering to unnecessary parts.

Although an example of using the discharge head 14 as a suction means for sucking and collecting the discharge material L1 leaked on the substrate 111 is shown here, a suction nozzle (not shown) different from the discharge head 14 is used for the discharge head 14. The discharge material L1 may be suction-recovered by providing it in the vicinity of. Further, when a leak (leakage) is detected, the heat exhaust from the heat exhaust mechanism (not shown) provided around the discharge device 10 is supplied to the organic exhaust mechanism (not shown) provided around the discharge device (not shown). It is preferable to switch to organic exhaust from (not shown). As a result, it is possible to prevent the odor of leakage (leakage) from diffusing to the surroundings, and it is possible to improve the working environment around the discharge device 10.

After the discharge material L1 leaked onto the substrate 111 is sucked and collected from the discharge port 15, the position of the discharge cartridge 100 is moved upward (10Z direction) in the vertical direction by an elevating mechanism (not shown), and the discharge port of the discharge head 14 is moved upward. The process of increasing the distance between the surface and the substrate 111 is performed. By this process, it is possible to prevent the discharge material L1 remaining in the gap between the substrate 111 and the discharge port surface of the discharge head 14 from getting wet and spreading on the substrate 111 due to the capillary force. As a method of increasing the distance between the discharge port surface of the discharge head 14 and the substrate 111 after suction recovery, it is also possible to adopt a method of moving the substrate stage 104 downward in the vertical direction (−Z direction).

When the suction and recovery of the discharge material L1 leaked to the position facing the discharge head 14 is completed in this way, the discharge material leaking to another place on the substrate 111 by the leak detection means such as the camera 74 is further completed. Detects L1. When the leakage of the discharge material L1 is detected here, the discharge head 14 is moved so that the discharge port 15 is located directly above the leaked discharge material L1. This movement is performed by moving the cartridge 13 with respect to the substrate 111. It can also be performed by moving the substrate 111 together with the substrate stage 104.

After that, the substrate 111 and the discharge port 15 are brought close to each other. The distance between the substrate 111 and the discharge port 15 is preferably 500 um or less. By doing so, it becomes possible to suck and recover the liquid that has leaked (leaked) to the substrate 111.

Although an example of specifying the leaked (leakage) location by the camera 74 has been described here, it is not always necessary to specify the location, and the discharge port 15 moves over the entire surface of the substrate 111 to remove the leaked discharge material L1. , Sequentially, suction recovery may be performed. Further, the leaked discharge material L1 may be collected after moving the camera 74 to a different place and observing the entire substrate 111.

Next, the procedure of the recovery process of the discharge material L1 executed by the control unit 16 of the discharge device 10 will be described with reference to the flowchart shown in FIG. In addition, S attached to each process number of the flowchart means a step.

As described above, the discharge device 10 in the present embodiment has a discharge function of the discharge material L1 and a recovery function of the leaked liquid. During the discharge operation of the discharge material L1, the first control valve 73 and the second control valve 21 are in the open state, and the third control valve 72 is in the closed state (S1). Further, during the discharge operation of the discharge material L1, the leakage detection means such as the camera 74 detects the leakage of the discharge material L1 from the discharge port 15 (S2). Here, when the leakage of the discharge material L1 is not detected, the first and second control valves 73 and 21 are maintained in the open state, the third control valve 72 is maintained in the closed state, and the discharge operation is continued in that state. (S3).

When the leakage of the discharge material L1 is detected, an error is displayed on a display unit (not shown) provided in the imprint device 101 (S4). Further, the first control valve 73 and the second control valve 21 are switched to the closed state, the third control valve 72 is switched to the open state (S5), and the second liquid chamber 6 is the first discharge pump 71. Communicate with.

Since the first discharge pump 71 is in a state of generating a negative pressure between the third control valve 72 and the first discharge pump 71 while the discharge device 10 is being driven, this negative pressure is the second. It is applied to the liquid chamber 6. The negative pressure applied by the first discharge pump 71 switches the first control valve 73 and the second control valve 21 from the open state to the closed state with respect to the atmospheric pressure, and closes the third control valve 72. Switch from the state to the open state. As a result, the second liquid chamber 6 communicates with the first discharge pump 71. The pressure of the first discharge pump 71 is controlled to a value of less than −0.40 kPa and -3 kPa or more with respect to the atmospheric pressure. When this negative pressure is applied to the second liquid chamber 6, a similar negative pressure is generated in the first liquid chamber 5. As a result, the discharge material L1 leaked onto the substrate 111 is sucked and recovered from the discharge port 15 by the negative pressure generated in the first liquid chamber 5.

After the leaked discharge material L1 is sucked and recovered, a process of separating the discharge port 15 and the substrate 111 in the + Z direction is performed (S7). This can be done by raising the cartridge 13 in the + Z direction (upward) by a position control mechanism (not shown) of the cartridge 13, or lowering the board stage 104 in the −Z direction by a spring or the like (not shown) provided on the board stage 104. Do by. By separating the discharge port 15 from the substrate 111, it is possible to prevent the liquid remaining in the gap between the surface of the discharge port 15 and the substrate 111 from being wetted and spread by the capillary force.

After that, a location at another position is imaged on the substrate 111 by a leak detecting means such as a camera 74, and when a leak of the discharge material L1 is detected, the discharge port 15 is moved to that location to suck the discharge material L1. Collect it. This recovery operation is sequentially executed to recover all the discharge materials L1 leaking to the substrate (S7).

As described above, according to the present embodiment, since the discharge material L1 leaked from the discharge port 15 of the discharge head 14 can be sucked and recovered, the leaked discharge material L1 adheres to the substrate, the device, or the like. Contamination due to can be reduced.
Although the mode of controlling the pressure to the second pressure after the discharge material L1 leaks from the discharge port 15 has been described, the present invention is not limited to this mode. That is, even if the discharge material L1 does not leak from the discharge port 15, the leakage of the discharge material L1 can be prevented by increasing the negative pressure and controlling the pressure to the second pressure before the leakage is about to occur. Further, even if the leakage of the discharge material is not actually detected, it is determined from the pressure in the container that the leakage of the discharge material has been detected or the discharge material is likely to leak, and the pressure of this pressure is increased. Pressure control may be performed based on the result. That is, when the pressure in the storage container exceeds the first pressure and becomes a predetermined pressure, the pressure in the storage container may be controlled so as to change from the predetermined pressure to the second pressure.

<< Second Embodiment >>
Next, a second embodiment will be described with reference to FIG. 7. In the first embodiment, an example is shown in which the second discharge pump 9 and the second waste liquid container 30 are connected to the second discharge pipe 8. On the other hand, in the second embodiment, the second discharge pipe 8 and the first discharge pipe 70 are merged, and the first discharge pump 71 is connected to the merged flow path. Therefore, a negative pressure can be generated in the first discharge pipe 8 and the second discharge pipe 70 only by the first discharge pump 71. The discharge pump 71 is controlled to generate a pressure of less than −0.4 kPa and more than -3 kPa. Other configurations are the same as those in the first embodiment. With such a configuration, the leakage (leakage) can be detected by the leakage sensor (leakage sensor), and the discharge material L1 leaked from the discharge port 15 can be recovered only by the first discharge pump 71. This makes it possible to reduce the size of the discharge device.

<< Third Embodiment >>
Next, the third embodiment will be described with reference to FIG. In the second embodiment described above, one end of the first discharge pipe 70 is connected in the middle of the supply pipe 23, and the other end of the first discharge pipe 70 is connected to the second through the third control valve 72. It is connected to the discharge pipe 8. On the other hand, in the third embodiment, one end of the first discharge pipe 70 is connected to the sub tank (storage part) 26, and the other end of the first discharge pipe 70 is connected to the second discharge pipe 8. Has been done. A control valve 77 is connected to the second discharge pipe 8. Further, a third control valve 72 is connected in the middle of the first discharge pipe 70. Further, in the first discharge pipe 70, an intake pipe 25 is connected between the sub tank 26 and the third control valve 72. The intake pipe 25 communicates with the atmosphere via a fifth control valve 76. Other configurations are the same as those in the second embodiment.

In the case of normal operation in which leakage (leakage) is not detected, the first control valve 73, the second control valve 21, and the fifth control valve 76 are opened, and the third control valve 72 is closed. .. As a result, the sub tank 26 communicates with the atmosphere through the intake pipe 25. Therefore, during normal operation, a negative pressure suitable for discharging the discharge material L1 is generated in the discharge head 14 due to the head difference between the liquid level of the hydraulic liquid L2 in the sub tank 26 and the meniscus 17 of the discharge port 15. Can be done.

In the present embodiment, the first pressure control means for generating a negative pressure (first pressure) for forming a meniscus suitable for discharge in the discharge port 15 inside the storage container 13 is a sub tank. 26, a communication pipe 24, an intake pipe 25, and a fifth control valve (first valve) 76 are included. Further, the second pressure control means for generating a pressure lower than the first pressure (second pressure) inside the storage container 13 includes the following components. That is, the second pressure control means includes a first discharge pump (negative pressure generating means) 71, a first discharge pipe 70, a third control valve (second valve) 72, a sub tank 26, and the like. It is configured to include a communication pipe 24 and the like.

On the other hand, when leakage of the discharge material L1 is detected, the second control valve 21 and the fifth control valve 76 are closed, and the first and third control valves 73 and 72 are opened. As a result, the negative pressure (less than -0.4 kPa and more than -3 kPa) generated by the first discharge pump (second pressure control means) 71, which is larger than that during normal discharge operation, becomes the second. It is applied to the first and second liquid chambers 5 and 6 and the discharge port 15. Due to this negative pressure, the discharge material L1 leaked onto the substrate 111 is sucked from the discharge port 15 and recovered. In the present embodiment, the first control valve 73 is always kept in an open state. Therefore, it is possible to omit the first control valve 73.

<< Fourth Embodiment >>
Next, a fourth embodiment will be described with reference to FIG. The fourth embodiment includes a configuration assuming a state in which the power supply from the main power supply to the discharge device is cut off due to an abnormality in the power supply, a power failure, or the like. Generally, when the power supply from the power supply is cut off, the control valve or the like that controls the negative pressure in the cartridge 13 cannot be operated normally. In addition, since sensors such as the leak sensor (leakage sensor) 3, the full water sensor 28, and the liquid level sensor 41 do not operate, it becomes difficult to grasp the pressure state in the cartridge 13.

Normally, the internal pressure of the cartridge 13 is maintained at a slight negative pressure of around −0.4 kPa with respect to the atmospheric pressure. Therefore, due to an abnormality in the power supply or the like, the internal pressure of the cartridge 13 (first and second liquid chambers 5, The internal pressure of 6) may become positive pressure. When the internal pressure of the cartridge 13 becomes positive, the discharge material L1 leaks from the discharge port 15 and adheres to the substrate 111, the substrate stage 104, and the base surface plate 124 to contaminate the inside of the apparatus. It takes time.

Therefore, in the discharge device 10 of the present embodiment, when a power failure or a power failure occurs, the internal pressure of the cartridge 13 is made lower than usual (higher negative pressure), and the discharge material L1 leaks from the discharge port 15. Is configured to suppress.

In the discharge device 10 of the present embodiment, the following two types of solenoid valves are arranged in a flow path for controlling the internal pressure of the cartridge 13. That is, a normally closed solenoid valve that is open when energized and closed when not energized and a normally open solenoid valve that is closed when energized and open when not energized are arranged in the flow path. ..

In FIG. 9, the sub tank (storage unit) 26 of the discharge device 10 is provided with an intake pipe 25 as in the first embodiment. The intake pipe 25 is provided with a first valve 81, which is a normally closed solenoid valve. Further, in the intake pipe 25, a pipe 80 is connected between the connecting portion with the sub tank 26 and the first valve 81. The pipe 80 is provided with a second valve 82, which is a normally open solenoid valve. Further, the discharge pipe 8 is provided with a third valve 83, which is a normally closed solenoid valve.

The pipe 80 and the discharge pipe 8 communicate with the vacuum source 84. The vacuum generation source 84 is provided in a facility where a discharge device is installed, such as an exhaust facility. The power supply of the vacuum generation source 84 is supplied from a power supply device (storage battery or generator) provided in the facility via a path different from that of the discharge device 10. The pressure of the vacuum source 84 is controlled to be less than −0.4 kPa and more than -3 kPa. The vacuum generation source 84 generates a slight negative pressure generated by the sub tank 26, that is, a pressure lower than the first pressure (second pressure) at which the meniscus 17 is formed at an appropriate position of the discharge port 15.

In the present embodiment, the first pressure control means for generating the first pressure inside the storage container 13 includes a sub tank 26, a communication pipe 24, and a first valve 81. ing. Further, the second pressure control means for generating the second pressure inside the accommodating container 13 includes the pipe 80, the second valve 82, and the vacuum generation source 84.

During normal operation in which electric power is normally supplied to the discharge device 10, the first valve 81 and the third valve 83 are in the open state, and the second valve 82 is in the closed state. Therefore, the sub tank 26 communicates with the atmosphere through the first valve 81 in the open state, while the communication with the vacuum generation source 84 is cut off by the second valve 82. At this time, the internal pressure of the cartridge 13 is −0.40 kPa with respect to the atmospheric pressure, and the state of a slight negative pressure is maintained. Further, since the second valve 82 is in the closed state and the third valve 83 is in the open state, the vacuum generation source 84 communicates with the inter-film space 4. As a result, the internal pressure of the inter-film space 4 is maintained at a negative pressure of less than −0.4 kPa and -3 kPa or more.

When an abnormality occurs in the power supply of the discharge device 10, the discharge device 10 is in the following state. When the power supply to the discharge device 10 is stopped due to an abnormality in the power supply, the first valve 81, which is a normally open solenoid valve, is opened, and the second valve 82 and the third valve 83, which are normally closed solenoid valves, are opened. It automatically switches to the closed state. At this time, the sub tank 26 is cut off from the atmosphere by the first valve 81 in the closed state. Further, since the second valve 82 is in the open state and the third valve 83 is in the closed state, the sub tank 26 communicates with the vacuum generation source 84, and the internal pressure of the cartridge 13 is the pressure during normal operation (−0). It switches from .40 kPa) to a pressure of less than -0.4 kPa and more than -3 kPa. That is, the pressure is switched to a pressure lower than the pressure during normal operation (large negative pressure).

As described above, according to the present embodiment, when an abnormality occurs in the power supply, the internal pressure of the cartridge 13 is automatically switched from a slight negative pressure to a lower pressure (a larger negative pressure), so that the pressure is discharged. The risk of the discharge material L1 leaking from the outlet 15 can be reduced.

In the present embodiment, an example in which the first to third valves 81 to 83 are composed of solenoid valves is shown, but other valves can be substituted. For example, it is possible to use a condenser type valve that opens and closes by storing electricity in the condenser in the flow path of the discharge device 10, and the same effect can be expected.

Further, by using the configuration of the present embodiment, it is also possible to suck and recover the discharged material L1 leaked onto the substrate 111. That is, when the camera 74 detects a liquid leak on the substrate 111, the second valve is switched from the closed state to the open state, and the vacuum generation source 84 applies a lower negative pressure to the sub tank 26. To. According to this, the discharge material L1 leaked on the substrate 111 can be sucked and recovered as in the first to third embodiments described above.

On the contrary, in the configuration of the first to third embodiments described above, by appropriately arranging two types of solenoid valves as in the present embodiment, the cartridge 13 automatically lowers the pressure when the power supply or the like is abnormal. It is also possible to configure it so that it is applied inside.

Further, in the present embodiment, an example assuming an abnormal power supply is shown, but the present invention is not limited to this, and even in a state where the discharge device 10 does not perform a discharge operation, for example, a standby state waiting for discharge, the discharge port 15 is used. The risk of leakage of the discharge material L1 can be reduced.

<< Fifth Embodiment >>
Next, a fifth embodiment will be described with reference to FIG. Here, the parts different from the other embodiments described above will be mainly described. The present embodiment includes a second pressure control means capable of applying a negative pressure larger than the negative pressure applied into the cartridge 13 by the sub tank (storage unit) 26 into the cartridge 13. The second pressure control means includes a connecting pipe 90, a second sub tank 85 connected to the second liquid chamber 6 of the storage container 13 by the connecting pipe 90, and a second sub-tank 85 provided in the middle of the connecting pipe 90. It is configured to include a valve 92. The connecting pipe 90 is filled with the hydraulic fluid L2. In the second sub tank 85, the hydraulic fluid L2 is stored up to a position vertically above the lower end of the connecting pipe 90. The second sub tank 85 communicates with the atmosphere.

The head difference between the hydraulic fluid L2 in the second sub tank 26 and the hydraulic fluid L2 in the sub tank 26 is ΔH1, and the hydraulic fluid level of the hydraulic fluid L2 in the second sub tank 85 is always the sub tank 26. It is located below the liquid level of the working liquid L2 inside in the direction of gravity. Therefore, the head difference between the liquid level of the hydraulic liquid L2 in the second sub tank 26 and the discharge port 15 is (ΔH + ΔH1). Therefore, according to the second pressure control means, it is possible to generate a negative pressure (lower pressure) larger than the negative pressure generated by the head difference ΔH between the hydraulic fluid L2 in the sub tank 26 and the discharge port 15.

A first valve 91 is provided in the communication pipe 24 that connects the sub tank 26 and the second liquid chamber 6. Further, the supply pipe 23 connecting the sub tank 26 and the second liquid chamber 6 is provided with a liquid feed pump 22 and a second control valve 21 as in other embodiments. Further, in the supply pipe 23, a third valve 93 is provided between the second control valve 21 and the second liquid chamber 6. The first valve 91 and the third valve 93 are both normally closed solenoid valves, and the second valve 92 is a normally open solenoid valve.

During normal operation in which power is normally supplied to the discharge device 10, the first valve 91 and the third valve 93 are in the open state, and the second valve 92 is in the closed state. At this time, the sub tank 26 communicates with the second liquid chamber 6 via the first valve 91 and the third valve 93 in the open state. Therefore, a negative pressure generated by the head difference ΔH between the liquid level in the sub tank 26 and the discharge port 15 is applied to the cartridge 13. As described above, this negative pressure is −0.40 kPa with respect to the atmospheric pressure, and the inside of the cartridge 13 maintains a slightly negative pressure state.

Here, when an abnormality occurs in the power supply of the discharge device 10, the energization of the first valve 91 to the third valve 93 is stopped, so that the first valve 91 and the third valve 93 are automatically closed, respectively. Switch to the state. As a result, the communication between the sub tank 26 and the second liquid chamber 6 is cut off.

On the other hand, since the second valve 92 is switched to the open state, the second sub tank 85 communicates with the second liquid chamber 6. As a result, a larger negative pressure (lower pressure) than during normal operation is applied to the inside of the cartridge 13 due to the head difference between the liquid level in the second sub tank 85 and the discharge port 15. As a result, the risk of the discharge material L1 leaking from the discharge port 15 can be reduced.

<< 6th Embodiment >>
Next, the sixth embodiment will be described with reference to FIG. The present embodiment has a configuration in which a part of the above-mentioned fifth embodiment is modified. Therefore, the same parts as those in the fifth embodiment are designated by the same reference numerals, and the details of the description thereof will be omitted. In the present embodiment, the first pressure control means for generating a negative pressure (first pressure) for forming a meniscus suitable for discharging the discharge material L1 in the discharge port 15 inside the storage container 13 is , The sub tank 26, the communication pipe 24, and the first valve 91 are included. Further, the second pressure control means for generating a pressure lower than the first pressure (second pressure) inside the storage container 13 includes the following components. That is, the second pressure control means includes a second sub tank (second storage portion) 85, a connecting pipe 90, a second control valve (second valve) 92, and a second discharge pump (negative). The pressure generating means) 86, the pump pipe 87, and the fourth valve 81 are included.

Here, the second discharge pump 86 communicates with the second liquid chamber 6 of the storage container 13 via the connecting pipe 90. In the middle of the connecting pipe 90, a second valve 92 for switching whether to communicate or shut off the second sub tank 85 and the second liquid chamber 6 is provided. The second discharge pump 86 can generate a pressure (second pressure) lower than the first pressure (−0.40 kPa) generated by using the sub tank 26.

Further, the second discharge pump 86 is connected to the second sub tank 85 via a pump pipe 87. A fourth valve 81 is provided in the middle of the pump pipe 87. The fourth valve 81 switches between communicating and shutting off the second sub tank 85 and the second discharge pump 86.

The first valve 91 connected to the communication pipe 24, the third valve 21 provided in the supply pipe 23, and the fourth valve 81 are normally closed solenoid valves. The second valve 92 provided in the connecting pipe 90 is a normally open solenoid valve.

During normal operation in which power is normally supplied to the discharge device 10, the first valve 91, the third valve 21, and the fourth valve 81 are in the open state, and the second valve 92 is in the closed state. is there. Therefore, the sub tank 26 is in a state of communicating with the second liquid chamber 6 via the communication pipe 24 and the supply pipe 23. Therefore, a negative pressure due to the head difference ΔH between the liquid level in the sub tank 26 and the discharge port 15 is applied to the second liquid chamber 6. This negative pressure is −0.40 kPa, and the internal pressure of the storage container 13 is maintained at a slight negative pressure. At this time, the fourth valve 81 is in the open state, and the second sub tank 85 communicates with the second discharge pump 86. Therefore, during normal operation, the internal pressure of the second sub-tank 85 is reduced to a negative pressure equivalent to that of the discharge pump 86, that is, a pressure lower than −0.40 kPa (second pressure) by the second discharge pump 86. Be kept.

Here, if an abnormality occurs in the power supply of the discharge device 10, the energization of the first valve 91 to the fourth valve 94 is stopped, so that the first valve 91, the third valve 21, and the fourth valve 81 are stopped. Automatically switch to the closed state. As a result, the communication between the sub tank 26 and the second liquid chamber 6 is cut off. Further, the communication between the second discharge pump 86 and the second sub tank 85 is also cut off.

On the other hand, since the second valve 92 automatically switches to the open state when the energization is stopped, the second sub tank 85 and the second liquid chamber 6 communicate with each other. As a result, when the power supply is in the normal state, the negative pressure held in the second sub tank 85 by the second discharge pump 86 is applied to the storage container 13 via the connecting pipe 90. The negative pressure applied to the storage container 13 is a negative pressure (lower pressure) larger than the negative pressure generated in the storage container 13 due to the head difference between the liquid level in the sub tank 26 and the discharge port 15 during normal operation. Is. Therefore, also in this embodiment, the risk of the discharge material L1 leaking from the discharge port 15 due to a power failure is reduced.

<< 7th Embodiment >>
Next, a seventh embodiment will be described with reference to FIG. The present embodiment has a configuration in which a part of the above-mentioned sixth embodiment is modified. Therefore, the same parts as those in the sixth embodiment are designated by the same reference numerals, and the details of the description thereof will be omitted. Also in this embodiment, it is possible to apply a negative pressure (second pressure) larger than the negative pressure (first pressure) generated in the cartridge 13 into the cartridge 13 by using the sub tank (reservoir) 26. A second pressure control means is provided. However, in the present embodiment, one end 90a of the connecting pipe 90 connected to the second sub tank 85 is connected to the sub tank 26 instead of the second liquid chamber 6. One end 90a of the connecting pipe 90 is deeply inserted into the working fluid L2 stored in the sub tank 26, and due to the fluctuation of the liquid level of the working fluid L2 in the sub tank 26, the one end 90a of the connecting pipe 90 is inserted into the working fluid L2. It is configured to stay close to.

Further, the first valve 91 provided in the communication pipe 24 of the sixth embodiment is omitted in the present embodiment, and the sub tank 26 and the second liquid chamber 6 are always in a communication state by the communication pipe 24. It is in.

In the present embodiment, the first pressure control means for generating a negative pressure (first pressure) for forming a meniscus suitable for discharging the discharge material L1 in the discharge port 15 inside the storage container 13 is , Sub tank 26 and communication pipe 24 are included. Further, the second pressure control means for generating a pressure lower than the first pressure (second pressure) inside the storage container 13 includes the following components. That is, the second pressure control means includes a second sub tank 85, a connecting pipe 90, a second control valve (second valve) 92, a second discharge pump (negative pressure generating means) 86, and the like. It includes a pump pipe 87, a fourth valve 94, a sub tank 26, and a communication pipe 24.

During normal operation in which power is normally supplied to the discharge device 10, the second valve 92 is in the closed state and the fourth valve 94 is in the open state. The sub tank 26 is in a state of communicating with the second liquid chamber 6 via the communication pipe 24, and the internal pressure of the cartridge 13 is a slight negative pressure (−0) due to the head difference ΔH between the liquid level in the sub tank 26 and the discharge port 15. It is kept at .40 kPa). Further, since the fourth valve 94 is in the open state, the internal pressure of the second sub tank 85 is maintained at a pressure lower than −0.40 kPa (large negative pressure) by the discharge pump 86.

When an abnormality occurs in the power supply of the discharge device 10, the energization of the second valve 92 and the fourth valve 94 is stopped, so that the second valve 92 is in the open state and the fourth valve 94 is in the closed state. It switches automatically. As a result, the communication between the second discharge pump 86 and the second sub tank 85 is cut off. Therefore, even if the second discharge pump 86 is stopped due to an abnormality in the power supply, the communication between the second discharge pump 86 and the second sub tank 85 is cut off, so that the internal pressure of the second sub tank 85 is during the energization operation. It is kept in the same negative pressure as.

On the other hand, the sub tank 26 and the second sub tank 85 communicate with each other via the open second valve 92, and the sub tank 26 has a negative pressure during the energization operation maintained in the second sub tank 85. Is applied. As a result, the internal pressure of the sub tank 26 and the cartridge 13 communicating with the sub tank 26 becomes a negative pressure (lower pressure) larger than the negative pressure during normal operation, and the risk of the discharge material L1 leaking from the discharge port 15 is reduced.

<< Eighth Embodiment >>
Next, an eighth embodiment will be described with reference to FIG. The same parts as those in the above-described embodiment are designated by the same reference numerals, and the details of the description thereof will be omitted. In the above-described embodiment, an example is shown in which a negative pressure lower than the negative pressure generated in the cartridge 13 during normal operation is generated by a driving force of a pump or the like. On the other hand, in the discharge device 10 of the present embodiment, when an abnormality occurs in the power supply, the hydraulic fluid L2 in the sub tank (storage unit) 26 is moved to the second sub tank 95 arranged below the sub tank 26 to move the cartridge. The internal pressure of 13 is configured to be kept lower than that during normal operation.

This will be described more specifically. A second sub tank (second storage portion) 95 is provided below the sub tank 26 in the vertical direction. The upper portion of the second sub tank 95 is connected to the bottom of the sub tank 26 via a pipe 96. A second valve 97A, which is a normally open solenoid valve, is provided in the middle of the pipe 96. A ventilation pipe 98 is provided above the second sub tank 95. The ventilation pipe 98 extends vertically upward from the liquid level of the working liquid L2 stored in the sub tank 26, and an atmospheric communication port 98a is formed at the tip thereof.

A drainage portion 99 is provided below the second sub tank 95 in the vertical direction. The upper surface portion of the drainage portion 99 is connected to the bottom portion of the second sub tank 95 via the drainage pipe 99a. A first valve 97B, which is a normally closed solenoid valve, is provided in the middle of the drain pipe 99a.

As described above, in the present embodiment, the first method for generating a negative pressure (first pressure) for forming a meniscus suitable for discharging the discharge material L1 in the discharge port 15 is generated inside the storage container 13. The pressure control means is configured to include a sub tank 26 and a communication pipe 24. Further, the second pressure control means for generating a pressure lower than the first pressure (second pressure) inside the storage container 13 includes the following components. That is, the second pressure control means includes a second sub tank 95, a pipe 96, a second valve 97A, a sub tank 26, and a communication pipe 24.

During normal operation in which power is normally supplied to the discharge device 10, the second valve 97A is in the closed state and the first valve 97B is in the open state. Therefore, the communication between the sub tank 26 and the second sub tank 95 is cut off, and the second liquid chamber 6 and the drainage unit 99 are in communication with each other. At this time, a negative pressure (−0.40 kPa) due to the head difference ΔH between the liquid level of the hydraulic liquid L2 in the sub tank 26 and the discharge port 15 is applied to the cartridge 13, and the internal pressure of the sub tank 26 is maintained at a slight negative pressure. ing.

Here, when an abnormality occurs in the power supply of the discharge device 10, the energization of the first valve 97B and the second valve 97A is stopped. Therefore, the first valve 97B is automatically switched to the closed state, and the second valve 97A is automatically switched to the open state. As a result, the hydraulic fluid L2 stored in the sub tank 26 flows to the second sub tank 95. Since the first valve 97B is in the closed state, the discharge material L1 that has flowed into the second sub tank 95 is stored in the second sub tank 95.

The discharge material L1 that has flowed into the second sub tank 95 infiltrates into the inside of the ventilation pipe 98, and finally, the liquid level in the sub tank 26 and the liquid level in the ventilation pipe 98 become the same height. At this time, the height of the liquid level of the hydraulic liquid L2 (position in the vertical direction) is lower than the position of the liquid level of the hydraulic liquid L2 stored in the sub tank 26 during normal operation. That is, a head difference ΔH2 occurs between the liquid level in the sub tank 26 during normal operation and the liquid level in the sub tank 26 when the power supply is abnormal. The internal pressure of the cartridge 13 decreases (the negative pressure increases) by the amount of this head difference ΔH2. By increasing the negative pressure in the cartridge 13, it is possible to suppress the leakage of the discharge material L1 from the discharge port 15 even in a situation where the energization is cut off. When the power supply of the discharge device 10 is restored, the second valve 97A is in the closed state and the first valve 97B is in the open state, and the discharge material L1 stored in the second sub tank 95 is stored in the drainage unit 99. It is discharged and discarded.
From the first embodiment, the first pressure control means generates a first pressure inside the storage container, and then the second pressure control means creates a pressure lower than the first pressure inside the storage container. The form of generating the pressure of 2 has been described. In the present invention, after the first pressure is generated inside the storage container, when the pressure inside the storage container increases beyond the first pressure (the negative pressure decreases), the pressure inside the storage container is increased. It may be in the form of controlling so as to reduce the pressure to at least the first pressure. That is, assuming that the pressure in the state where the pressure inside the storage container exceeds the first pressure is a predetermined pressure (third pressure), the first pressure, the predetermined pressure (third pressure), and the first It will be controlled in the order of pressure. Even in such a form, contamination by the discharge material leaked from the discharge port of the discharge head can be suppressed. Further, it is sufficient to reduce the pressure to at least the first pressure, and it is not necessary to finally stop at the first pressure, and the pressure is controlled to be lower than the first pressure (for example, the second pressure). You may. That is, as described in the previous embodiments, the first pressure, the predetermined pressure (third pressure), the first pressure, and the second pressure may be controlled in this order.

<< Other Embodiments >>
In the above embodiment, an example is shown in which the internal space of the storage container provided in the discharge device is divided into a first liquid chamber and a second liquid chamber by a flexible partition wall. However, the present invention is also applicable to a configuration in which the internal space of the storage container is divided into three or more, or a configuration in which the internal space of the storage container is not divided. For example, the present invention can also be applied to a discharge device that discharges a discharge material contained in a storage container whose internal space is not divided from a discharge head.

Further, in the above embodiment, the discharge device 10 provided in the imprint device 101 is shown, but the discharge device according to the present invention can be applied to devices other than the imprint device. For example, the present invention can be applied to an apparatus for forming a wiring pattern on a substrate by discharging a liquid containing a conductive material from a discharge head. Further, the present invention can be applied to a drawing apparatus for drawing an image by using an ultraviolet curable liquid for image recording, a liquid (ink) composed of a solvent and a coloring agent for image recording, or the like as a discharge material.

10 Discharge device 13 Containment container 14 Discharge head 15 Discharge port 26 Sub tank (first pressure control means)
71 First discharge pump (second pressure control means)
L1 discharge material

Claims (18)

A discharge head having a discharge port for discharging a liquid discharge material,
A storage container that communicates with the discharge head and houses the discharge material inside.
A pressure control means for keeping the pressure inside the storage container at a negative pressure,
It is a discharge device equipped with
The pressure control means
During normal operation, a first pressure capable of forming a meniscus of the discharge material in the discharge port is generated inside the storage container, and a predetermined pressure inside the storage container exceeds the first pressure. A discharge device characterized in that when a pressure is reached, the pressure in the storage container is reduced to at least the first pressure. The pressure control means sets the pressure in the storage container to at least the first pressure when the pressure in the storage container becomes the predetermined pressure and an abnormality occurs in which the discharge material leaks from the discharge port. The discharge device according to claim 1, wherein the pressure is reduced to. The pressure control means
A first pressure control means that generates the first pressure inside the container during normal operation, and
A second pressure control means for generating a second pressure lower than the first pressure inside the storage container when the abnormality occurs is provided.
The discharge device according to claim 2, wherein when the pressure in the storage container reaches the predetermined pressure, the pressure in the storage container is reduced to the second pressure. The discharge device according to claim 3, further comprising a suction means for sucking and recovering the discharge material leaked to the object to be discharged of the discharge material by the second pressure. The discharge device according to claim 4, wherein the suction means moves relative to the discharge object and sucks the discharge material leaked to the discharge object. The suction means is composed of the discharge head.
The discharge device according to claim 4 or 5, wherein the discharge head sucks the discharge material leaked to the discharge object by the second pressure applied to the inside of the storage container from the discharge port. It has a leak detection means for detecting the discharge material leaked from the discharge port to the object to be discharged.
The discharge device according to any one of claims 1 to 6, wherein the pressure in the storage container is reduced to at least the first pressure based on the result detected by the leak detecting means. The leak detecting means identifies the position of the discharged material leaked from the discharge port to the discharged object, and determines the position of the discharged material.
After the suction means for sucking and collecting the discharged material leaked to the discharged object moves to a position facing the position specified by the leak detecting means, a second pressure lower than the first pressure causes the suction means. The discharge device according to claim 7, which sucks the discharge material. The discharge device according to claim 4 or 8, further comprising a mechanism for increasing the distance between the suction means and the discharge object after the suction means sucks the discharge material leaked to the discharge object. 7. The leak detecting means is at least one of a leak sensor, a camera, a signal detecting means for detecting a counter electromotive force signal of a piezoelectric element incorporated in the discharge head, and a pressure sensor provided in the discharge device. Or the discharge device according to 8. The discharge device according to any one of claims 1 to 10, wherein the pressure control means reduces the pressure in the storage container to at least the first pressure when an abnormality of the power supply occurs. The first pressure control means has a storage unit that communicates with the atmosphere and is connected to the storage container, and the storage unit and the storage container when the pressure in the storage container reaches the predetermined pressure. The water head difference between the liquid level of the liquid stored in the storage unit and the discharge port by communicating the storage unit and the storage container with the first valve, including a first valve that shuts off communication. The discharge device according to any one of claims 3 to 6, wherein the first pressure is generated inside the storage container. The second pressure control means has a negative pressure generating means for generating the second pressure and a second valve for switching whether the negative pressure generating means and the storage container communicate with each other or shut off. ,
When the communication between the storage unit and the storage container is cut off, the second valve communicates the negative pressure generating means and the storage unit so that the pressure inside the storage container is lower than the first pressure. The discharge device according to claim 12, which generates the pressure of 2. The second pressure control means communicates with the atmosphere and switches between communicating with or blocking the second storage unit connected to the storage container and the second storage unit and the storage container. Has a valve and
When the storage unit and the storage container communicate with each other by the first valve, the second valve blocks the communication between the second storage unit and the storage container, and the storage unit and the storage container When the communication is cut off by the first valve, the difference between the liquid level of the liquid stored in the second storage unit and the discharge port by communicating the second storage unit and the storage container. The discharge device according to claim 13, wherein the second pressure is generated inside the storage container. The second pressure control means includes a second storage unit connected to the storage container, a second valve provided between the second storage unit and the storage container, and the second storage unit. The unit has a negative pressure generating means for generating the second pressure.
When the storage unit and the storage container communicate with each other by the first valve, the second valve blocks the communication between the second storage unit and the storage container, and the storage unit and the storage container When the communication is cut off by the first valve, the second storage portion and the storage container are communicated with each other, and the second pressure generated in the second storage portion by the negative pressure generating means is applied. The discharge device according to claim 13, which is applied to the storage container. The second pressure control means includes a second storage unit connected to the storage unit, a second valve provided between the second storage unit and the storage unit, and the second storage unit. The unit has a negative pressure generating means for generating the second pressure.
When the storage unit and the storage container communicate with each other by the first valve, the second valve blocks the communication between the second storage unit and the storage unit, and the storage unit and the storage container When the communication is cut off by the first valve, the second storage portion and the storage portion are communicated with each other, and the second pressure generated in the second storage portion by the negative pressure generating means is applied. The discharge device according to claim 13, wherein the second pressure is generated inside the storage container by applying the pressure to the storage unit. The discharge device according to any one of claims 1 to 16 and a mold for forming a pattern are provided.
An imprint device that forms a pattern on the discharge material by pressing the mold against the discharge material discharged to the object to be discharged by the discharge device and curing the mold. The imprinting apparatus according to claim 17, wherein the discharging material is a resist used for the imprinting process.

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