JP2020186792A - Gate valve - Google Patents

Abstract

To increase a bore and reduce weight.SOLUTION: A gate valve comprises a valve element located in a valve box 10 comprising a first opening part 12a and a second opening part 12b, a rotating shaft rotatably supporting the valve element, a rotation driving part, a neutral valve part 30, a movable valve frame part 60, a valve frame biasing part 90, a movable valve plate part 50, a valve plate biasing part 80, and a valve box biasing part 70 capable of moving the movable valve frame part. An inner circumferential crank part 50c comprising plate sliding seal parts 50b and 52 at an outer circumferential position is provided in the entire circumference of an edge part of the movable valve plate part. A circumferential groove 59 having a depth in a direction of a flow passage H is provided in a circumferential direction of the inner circumferential crank part.SELECTED DRAWING: Figure 3

Description

The present invention relates to a partition valve, and particularly to a technique suitable for use in a pendulum valve capable of canceling back pressure.

In a vacuum device or the like, a partition valve is provided between a chamber, a pipe, a pump, etc., which partitions two spaces having different degrees of vacuum and connects the two partitioned spaces. As such a partition valve, various types of valves are known.

The present inventors have developed a partition valve capable of highly reliable partition operation and a 100% back pressure cancellation rate, and filed a patent application (Patent Document 1). In this partition valve, a valve box formed across the flow path, a neutral valve portion that can rotate by a rotation axis of an axis parallel to the flow path direction, and a neutral valve portion that slides in the flow path direction with respect to the neutral valve portion. Possible movable valve portions include a first movable valve portion that can be pressed against the opening of the flow path of the valve box and can be sealed, and a second movable valve portion that is slidable in the flow path direction with respect to the first movable valve portion. The valve portion, the first urging portion that can be sealed by pressing the first movable valve portion against the opening, and the second attachment that can adjust the thickness dimension of the first movable valve portion and the second movable valve portion. A urging portion and a third urging portion for urging the first movable valve portion with respect to the neutral valve portion were provided.

In devices, manufacturing lines, etc. where sluice valves are installed, it has been required to increase the diameter and at the same time, reduce the weight of the movable valve portion.

Japanese Patent No. 6358727

However, the weight of the valve body increases as the diameter increases. Therefore, the driving force required to drive the valve body also increases. Therefore, the conventional driving means has a problem that the driving of the valve body may be hindered as it is. Therefore, there has been a demand for weight reduction of the valve body.

However, if an attempt is made to reduce the weight of a pendulum valve having a large diameter, the strength of the valve body or the like may be insufficient, and in that case, the operation reliability may be lowered.
In particular, the pendulum valve is required to prevent a decrease in reliability of reverse pressure cancellation. That is, it is required that the sealing performance is maintained in the direction along the flow path partitioned by the pendulum valve in either direction.

The present invention has been made in view of the above circumstances, and an object of the present invention is to achieve the following objects.
1. 1. To be able to handle larger diameters in partition valves.
2. 2. To enable weight reduction of the valve body.
3. 3. To prevent deterioration of operation reliability.
4. Maintain the same level of reverse pressure canceling performance due to the difference in the differential pressure direction.

The partition valve of the present invention is a partition valve that partitions the flow path.
A valve box having a first opening and a second opening that are inserted into the flow path and communicate with each other to form the flow path.
A valve body located in the hollow portion of the valve box and capable of opening and closing the flow path,
A rotating shaft that rotatably supports the valve body between the retracted position and the valve opening shielding position in the hollow portion and has an axis extending in the flow path direction.
A rotary drive unit capable of rotationally driving the valve body and
A neutral valve portion that connects the valve body to the rotating shaft,
A movable valve frame portion provided on the valve body so that the position can be moved in the flow path direction with respect to the neutral valve portion.
A valve frame urging portion that connects the neutral valve portion and the movable valve frame portion,
A movable valve plate portion provided on the valve body so that the position can be moved in the flow path direction via the plate sliding seal portion with respect to the movable valve frame portion.
A valve plate urging portion that connects the movable valve frame portion and the movable valve plate portion,
A valve box urging portion provided in the valve box and capable of moving the movable valve frame portion at the valve opening shielding position toward a valve closing position in contact with the peripheral edge of the first opening.
A drive unit that drives the valve box urging unit and
Equipped with
An inner peripheral crank portion having the plate sliding seal portion at the outer peripheral position is provided on the entire circumference of the edge portion of the movable valve plate portion.
The above problem is solved by providing a peripheral groove having a depth in the flow path direction in the circumferential direction of the inner peripheral crank portion.
In the partition valve of the present invention, a plurality of the valve plate urging portions are provided at the edge portion of the movable valve plate portion, and the peripheral grooves are a plurality of the valve plate urging portions in the circumferential direction at the outer edge of the movable valve plate portion. It can be installed between the parts.
In the present invention, it is preferable that the peripheral groove is provided with a curved portion that is curved and connected between the bottom surface and the side surface.
In the partition valve of the present invention, the radius of curvature Rm of the curved portion in the peripheral groove is relative to the diameter dimension R1 of the first opening.
0.01 ≤ Rm / R1 ≤ 0.02
It can be set to be in the range of.
Further, in the partition valve of the present invention, the width dimension Rn of the peripheral groove in the radial direction of the movable valve plate portion is relative to the diameter dimension R1 of the first opening.
0.03 ≤ Rn / R1 0.04
It is also possible to adopt a means set to be within the range of.
In the partition valve of the present invention, in the inner peripheral crank portion, the width dimension of the outer peripheral wall of the peripheral groove in the radial direction of the movable valve plate portion is the inner peripheral wall of the peripheral groove in the radial direction of the movable valve plate portion. It can be set larger than the width dimension.
Further, the partition valve of the present invention is a thick portion having a thickness dimension larger than the radial outer side of the valve plate at the center position of the valve plate on the center side of the inner peripheral crank portion in the movable valve plate portion. Can be provided.
In the partition valve of the present invention, the diameter dimension Rk of the thick portion is relative to the diameter dimension R1 of the first opening.
0.36 ≤ Rk / R1 ≤ 0.55
Can be set to be in the range of.
In the partition valve of the present invention, in the movable valve plate portion, the inner peripheral crank portion and the valve plate on the center side of the inner peripheral crank portion are closer to the opening side of the peripheral groove than the bottom portion of the peripheral groove. Can be connected at the desired position.
In the partition valve of the present invention, a sliding seal member slidably contacting the movable valve frame portion is provided on the outer peripheral surface of the inner peripheral crank portion as the plate sliding seal portion, and the sliding seal is provided. An outer peripheral groove that does not contact the member can be provided.
In the partition valve of the present invention, the sliding seal member can be provided at a position closer to the opening side of the peripheral groove than the outer peripheral groove.
In the partition valve of the present invention, the movable valve frame portion of the movable valve plate portion comes into contact with the first opening portion at the valve opening shielding position, and the first one is more than the urging force of the valve plate urging portion. When the flow path pressure from the opening to the second opening increases, the seal member that comes into contact with the peripheral edge of the second opening is located at a radial outer position of the movable valve plate portion with respect to the peripheral groove. Can be provided in.

The partition valve of the present invention is a partition valve that partitions the flow path.
A valve box having a first opening and a second opening that are inserted into the flow path and communicate with each other to form the flow path.
A valve body located in the hollow portion of the valve box and capable of opening and closing the flow path,
A rotating shaft that rotatably supports the valve body between the retracted position and the valve opening shielding position in the hollow portion and has an axis extending in the flow path direction.
A rotary drive unit capable of rotationally driving the valve body and
A neutral valve portion that connects the valve body to the rotating shaft,
A movable valve frame portion provided on the valve body so that the position can be moved in the flow path direction with respect to the neutral valve portion.
A valve frame urging portion that connects the neutral valve portion and the movable valve frame portion,
A movable valve plate portion provided on the valve body so that the position can be moved in the flow path direction via the plate sliding seal portion with respect to the movable valve frame portion.
A valve plate urging portion that connects the movable valve frame portion and the movable valve plate portion,
A valve box urging portion provided in the valve box and capable of moving the movable valve frame portion at the valve opening shielding position toward a valve closing position in contact with the peripheral edge of the first opening.
A drive unit that drives the valve box urging unit and
Equipped with
An inner peripheral crank portion having the plate sliding seal portion at the outer peripheral position is provided on the entire circumference of the edge portion of the movable valve plate portion.
A peripheral groove having a depth in the flow path direction is provided in the circumferential direction of the inner peripheral crank portion.
As a result, the inner peripheral wall of the peripheral groove is connected to the valve plate, and the outer peripheral position of the outer peripheral wall of the peripheral groove is slidably contacted with the movable valve frame portion as a plate sliding seal portion. Therefore, even if the differential pressure of the flow path, which is the pressure at the front and back positions of the valve plate, changes and the magnitude of the pressure value on the front and back of the valve plate is reversed, the deformation due to the stress of the valve plate is caused by the inner peripheral wall of the peripheral groove. And it is fastened at the bottom, and the plate sliding seal part of the outer wall of the peripheral groove is not deformed. As a result, even when the differential pressure of the flow path changes, it is possible to maintain the seal with the movable valve frame portion at the plate sliding seal portion at the outer peripheral position of the outer peripheral wall of the peripheral groove.
Therefore, even when the diameter of the sluice valve is increased, that is, when the diameter of the first opening and the second opening is increased, the seal is maintained in response to the increase in the pressure applied to the valve body. can do.
As a result, even if the differential pressure generated in the flow path direction is large, for example, a pressure of about 1 MPa acts on one surface side of the movable valve plate portion and the other surface side of the movable valve plate portion is in a vacuum state, the partition valve. It is possible to maintain the sealed state in.
Moreover, when the valve bodies have the same diameter, the width dimension of the inner peripheral crank portion in the radial direction of the movable valve frame portion increases as compared with the configuration in which the peripheral groove is not provided. As a result, the diameter of the valve plate on the center side of the inner peripheral crank portion in the movable valve frame portion can be reduced. Therefore, by reducing the area of the valve plate, as a result, it is possible to reduce the deforming force acting on the valve plate due to the differential pressure in the flow path direction.
At the same time, even when the width dimension of the inner peripheral crank portion in the radial direction of the movable valve frame portion is increased to increase the strength of the movable valve frame portion, the weight corresponding to the constituent material of the inner portion of the peripheral groove is eliminated. As a result, the weight of the inner peripheral crank portion can be reduced and the weight can be reduced. Here, since the peripheral groove is provided on almost the entire circumference of the movable valve frame portion, when the diameter of the partition valve is large, for example, when the size exceeds 20 inches, it is in units of 1 kilogram or on the order of 10 kg. It is possible to reduce the weight.
That is, it is possible to realize both a large diameter and a light weight at the same time.

In the partition valve of the present invention, a plurality of the valve plate urging portions are provided at the edge portion of the movable valve plate portion, and the peripheral grooves are a plurality of the valve plate urging portions in the circumferential direction at the outer edge of the movable valve plate portion. It is installed between the parts.
As a result, the peripheral groove, which is a portion other than the valve plate urging portion, reduces the influence of stress due to the pressure difference in the flow path direction on the outer peripheral position of the inner peripheral crank portion, and the movable valve plate portion is deformed. It is possible to prevent the sealing property of the plate sliding seal portion from being deteriorated.
Here, for example, about four valve plate urging portions can be provided in the circumferential direction on the outer edge of the movable valve plate portion. Therefore, it is possible to prevent the plate sliding seal portion from being deformed all around the outer edge of the movable valve plate portion other than this.
Further, the inner peripheral crank portion provided with the valve plate urging portion has sufficient strength to reliably perform the operation by the urging force in the valve plate urging portion. Therefore, in the circumferential direction at the outer edge of the movable valve plate portion, sufficient deformation resistance can be provided at the portion of the valve plate urging portion and the peripheral groove portion, that is, the entire circumference of the outer edge of the movable valve plate portion.

In the present invention, the peripheral groove is provided with a curved portion that is curved and connected between the bottom surface and the side surface.
As a result, the stress generated when the differential pressure in the flow path direction acting on the valve plate is large is suppressed by the inner peripheral crank portion to prevent the plate sliding seal portion from being deformed, and the circumference of the inner peripheral crank portion. It is possible to avoid stress concentration in the vicinity of the groove and prevent the occurrence of deformation and the like. In particular, when the differential pressure in the flow path direction is large, stress concentration is likely to occur in the peripheral groove at the boundary position between the bottom surface and the side surface. Therefore, by providing a curved portion, stress concentration is suppressed in this portion. It becomes possible.

In the partition valve of the present invention, the radius of curvature Rm of the curved portion in the peripheral groove is relative to the diameter dimension R1 of the first opening.
0.01 ≤ Rm / R1 ≤ 0.02
It is set to be in the range of.
As a result, when the diameter of the partition valve is large, for example, when the size exceeds 20 inches and the differential pressure in the flow path direction is large, for example, a pressure of about 1 MPa acts on one surface side of the movable valve plate portion. However, even when the other surface side of the movable valve plate portion is in a vacuum state, it is possible to suppress stress concentration in the vicinity of the curved portion.

Further, in the partition valve of the present invention, the width dimension Rn of the peripheral groove in the radial direction of the movable valve plate portion is relative to the diameter dimension R1 of the first opening.
0.03 ≤ Rn / R1 ≤ 0.04
It is set to be in the range of.
As a result, even if the center position of the valve plate is deformed in the same direction as the opening of the peripheral groove due to the differential pressure in the flow path direction acting on the valve plate, the outer circumference of the peripheral groove is deformed. Prevents deformation on the wall and maintains the sealed body of the plate sliding seal.
Here, when the valve plate is deformed into a concave shape due to the above-mentioned differential pressure, the inner peripheral wall of the peripheral groove located inside in the radial direction of the movable valve plate portion is pulled in the convex deformation direction of the center of the valve plate. It is pulled inward in the radial direction of the movable valve plate. As a result, the inner peripheral wall of the peripheral groove absorbs the deformation stress so as to incline toward the center side of the movable valve plate portion, and the stress transmitted to the outer peripheral wall of the peripheral groove is suppressed. Therefore, it is possible to prevent the outer peripheral wall of the peripheral groove from inclining from a state where there is no differential pressure. Furthermore, when the differential pressure in the flow path direction is large, the deformation stress from the valve plate is absorbed by the bottom of the peripheral groove in addition to the inner peripheral wall of the peripheral groove, and the outer peripheral wall of the peripheral groove has no differential pressure. It can be prevented from tilting.

In the partition valve of the present invention, in the inner peripheral crank portion, the width dimension of the outer peripheral wall of the peripheral groove in the radial direction of the movable valve plate portion is the inner peripheral wall of the peripheral groove in the radial direction of the movable valve plate portion. It is set larger than the width dimension.
As a result, the inner peripheral wall and the bottom of the peripheral groove are positively deformed to absorb the stress caused by the deformation of the valve plate due to the differential pressure in the flow path direction and suppress the stress transmitted to the outer peripheral wall of the peripheral groove. To do. At the same time, the outer peripheral wall of the peripheral groove can have a strength capable of maintaining a state without differential pressure. Therefore, it is possible to maintain the sealed state without deforming the outer peripheral wall of the peripheral groove from the state where there is no differential pressure.

Further, the partition valve of the present invention is a thick portion having a thickness dimension larger than the radial outer side of the valve plate at the center position of the valve plate on the center side of the inner peripheral crank portion in the movable valve plate portion. Is provided.
As a result, in the valve plate thinned by weight reduction, it is possible to prevent the strength of the valve plate from being lowered by providing the thick portion. At the same time, it prevents the stress transmitted from the valve plate deformed by the differential pressure in the flow path direction to the inner peripheral wall of the peripheral groove from being distributed in different states in the circumferential direction of the movable valve plate portion, and prevents the stress in the flow path direction. The stress transmitted from the valve plate deformed by the differential pressure to the inner peripheral wall of the peripheral groove is made uniform in the circumferential direction of the movable valve plate portion, and non-uniform stress is applied to the plate sliding seal portion to reduce the sealing property. Can be prevented.

In the partition valve of the present invention, the diameter dimension Rk of the thick portion is relative to the diameter dimension R1 of the first opening.
0.36 ≤ Rk / R1 ≤ 0.55
It is set to be in the range of.
As a result, the deformation of the valve plate due to the deformation of the valve plate due to the differential pressure in the flow path direction is transmitted, and when this stress is absorbed by the deformation of the inner peripheral wall and the bottom of the peripheral groove, the plate sliding seal portion The deformation of the valve plate can be controlled so that the stress transmitted from the valve plate to the inner peripheral wall of the peripheral groove can be adjusted so as to maintain the sealed state of the valve plate.

In the partition valve of the present invention, in the movable valve plate portion, the inner peripheral crank portion and the valve plate on the center side of the inner peripheral crank portion are closer to the opening side of the peripheral groove than the bottom portion of the peripheral groove. It is connected at the position where it was.
Thereby, the connection position where the valve plate is connected to the inner peripheral wall of the peripheral groove can be set as a position closer to the opening end side than the center position in the depth direction (flow path direction). Therefore, when the center of the valve plate is deformed into a concave shape or a convex shape due to the differential pressure in the flow path direction, the inner peripheral wall of the peripheral groove is inclined to follow the inclination formed by the peripheral portion of the valve plate. The inclination of the inner peripheral wall prevents the deformation stress from being transmitted to the outer peripheral wall of the peripheral groove.
On the other hand, when the connection position where the valve plate is connected to the inner peripheral wall of the peripheral groove is set as a position on the bottom side from the center position in the depth direction (flow path direction), the inner peripheral wall of the peripheral groove is set. The tilting action becomes weaker, and the deformation stress transmitted to the outer peripheral wall of the peripheral groove increases.

In the partition valve of the present invention, a sliding seal member slidably contacting the movable valve frame portion is provided on the outer peripheral surface of the inner peripheral crank portion as the plate sliding seal portion, and the sliding seal is provided. An outer peripheral groove that does not contact the member is provided.
As a result, the inner peripheral crank portion is excavated from the outer peripheral surface thereof so as not to affect the seal between the movable valve frame portion and the movable valve plate portion by the sliding seal member, and the weight of the component material corresponding to the outer peripheral groove is reduced. Therefore, it is possible to reduce the wall thickness and weight.
Here, for example, if the partition valve has a diameter of about 22 inches, the weight of the valve body can be reduced by about 0.5 to 1 kg simply by providing an outer peripheral groove having a width of about 5 mm and a depth of about 5 mm. ..

In the partition valve of the present invention, the sliding seal member is provided at a position closer to the opening side of the peripheral groove than the outer peripheral groove.
As a result, when the center of the valve plate is deformed into a concave shape or a convex shape due to the differential pressure in the flow path direction and the peripheral edge portion of the valve plate is inclined, the valve plate is inclined following the inclination of the peripheral edge portion. Since the sliding seal member is located at a position away from the bottom of the peripheral groove, which is transmitted to the outer peripheral wall by the influence of the inner peripheral wall of the peripheral groove, the influence on the sliding seal member should be reduced and the sealing property should be maintained. Is possible.

In the partition valve of the present invention, the movable valve frame portion of the movable valve plate portion comes into contact with the first opening portion at the valve opening shielding position, and the first one is more than the urging force of the valve plate urging portion. When the flow path pressure from the opening to the second opening increases, the seal member that comes into contact with the peripheral edge of the second opening is located at a radial outer position of the movable valve plate portion with respect to the peripheral groove. It is provided in.
It is provided at a position close to the opening side.
As a result, when the center of the valve plate is deformed into a concave shape or a convex shape due to the differential pressure in the flow path direction and the peripheral edge portion of the valve plate is inclined, the valve plate is inclined following the inclination of the peripheral edge portion. Since the seal member is provided at a position away from the inner peripheral wall of the peripheral groove due to the influence of the inner peripheral wall, it is possible to reduce the influence on the seal member.

According to the present invention, in a pendulum operation type partition valve, it is possible to simultaneously realize a large diameter and a light weight, and to achieve the effect of improving seal certainty and operation certainty. ..

It is sectional drawing which is orthogonal to the flow path which shows the structure of the partition valve which concerns on 1st Embodiment of this invention, and shows the retracting position of a valve body, and the valve opening shielding position. It is sectional drawing along the flow path which shows the structure of the partition valve which concerns on 1st Embodiment of this invention, and shows the valve opening shielding position of a valve body. It is an enlarged sectional view along the flow path which shows the edge part of the valve body in the partition valve which concerns on 1st Embodiment of this invention. It is the top view which looked at the valve body in the partition valve which concerns on 1st Embodiment of this invention in the direction orthogonal to the flow path. It is sectional drawing along the flow path which shows the movable valve plate part in the partition valve which concerns on 1st Embodiment of this invention. It is a top view which looked at the movable valve plate part of the partition valve which concerns on 1st Embodiment of this invention in the direction orthogonal to the flow path. It is an enlarged sectional view along the flow path which shows the vicinity of the peripheral groove of the movable valve plate part in the partition valve which concerns on 1st Embodiment of this invention. It is an enlarged sectional view along the flow path which shows the vicinity of the urging part hole of the movable valve plate part in the partition valve which concerns on 1st Embodiment of this invention. It is explanatory drawing which shows the hydraulic drive means and the valve box urging part in the partition valve which concerns on 3rd Embodiment of this invention. It is sectional drawing along the flow path which shows the structure of the partition valve which concerns on 1st Embodiment of this invention, and shows the valve closed state by a movable valve frame. It is sectional drawing along the flow path which shows the structure of the partition valve which concerns on 1st Embodiment of this invention, and shows the valve closed state which cancels a back pressure by a movable valve plate part. It is the top view which looked at the movable valve plate part of the partition valve which concerns on 2nd Embodiment of this invention in the direction orthogonal to the flow path. It is an enlarged sectional view along the flow path which shows the vicinity of the peripheral groove of the movable valve plate part in the partition valve which concerns on 2nd Embodiment of this invention.

Hereinafter, the first embodiment of the partition valve according to the present invention will be described with reference to the drawings.
Further, in each of the drawings used in the following description, the dimensions and ratios of the respective components are appropriately different from the actual ones in order to make each component recognizable in the drawings.
The technical scope of the present invention is not limited to the embodiments described below, and various modifications can be made without departing from the spirit of the present invention.

FIG. 1 is a cross-sectional view orthogonal to the flow path showing the partition valve in the present embodiment.
FIG. 2 is a cross-sectional view taken along a flow path showing a partition valve in the present embodiment.
FIG. 3 is an enlarged cross-sectional view along a flow path showing the peripheral edge of the partition valve in the present embodiment.
In the figure, reference numeral 100 is a partition valve.

The partition valve 100 according to the present embodiment partitions the flow path H connecting the first space and the second space, and opens the partitioned state. That is, the partition valve 100 switches between a state in which the flow path H is closed and a state in which the first space and the second space are connected.
As shown in FIGS. 1 and 2, the partition valve 100 includes a valve box 10, a hollow portion 11, a valve body 5, a rotary shaft 20, a rotary drive portion 21, and a valve box urging portion (pressing cylinder). A 70 and a hydraulic drive means (drive unit) 700 are provided.

A hollow portion 11 is formed inside the valve box 10. The valve box 10 is composed of a frame having a hollow portion 11.
The valve box 10 is provided with a first opening 12a and a second opening 12b so as to face each other with the hollow portion 11 interposed therebetween.

The first opening 12a to the second opening 12b are communicated with each other via the hollow portion 11.
The flow path H is set from the first opening 12a toward the second opening 12b.
The first opening 12a and the second opening 12b have substantially the same contour.
The first opening 12a has a circular contour. The first opening 12a is exposed in the first space.
The second opening 12b has a circular contour. The second opening 12b is exposed in the second space. That is, the partition valve 100 is inserted between the first space and the second space.
In the following description, the direction along the flow path H may be referred to as the flow path H direction.

The valve body 5 is arranged in the hollow portion 11.
The valve body 5 is capable of blocking the first space and the second space at the valve closing position.
The valve body 5 is supported by a rotating shaft 20 as a position switching portion.
The rotating shaft 20 has an axis extending substantially parallel to the flow path H direction. The rotating shaft 20 penetrates the valve box 10. The rotary shaft 20 can be rotationally driven by the rotary drive unit 21.

A connecting member (not shown) is fixed to the rotating shaft 20.
The connecting member is, for example, a substantially flat plate-shaped member. The connecting member is fixed to one end of the rotating shaft 20 with a screw or the like.
A valve body 5 is fixed to the rotating shaft 20 via a connecting member (not shown).
Alternatively, the valve body 5 may be directly connected to the rotating shaft 20 without a connecting member (not shown).
The rotating shaft 20 functions as a position switching portion of the valve body 5.

FIG. 4 is a top view of the partition valve according to the present embodiment as viewed in a direction orthogonal to the flow path showing the valve body.
The valve body 5 can close the first opening 12a and / or the second opening 12b.
The valve body 5 operates between the valve closing position and the valve opening position.
At the valve closing position, the valve body 5 is brought into a closed state (FIG. 10) with respect to the first opening 12a and / or the second opening 12b.
At the valve opening position, the valve body 5 is brought into an open state (shown by a broken line in FIG. 1) retracted from the first opening 12a and / or the second opening 12b.
The valve body 5 is composed of a neutral valve portion 30 and a movable valve portion 40.

The neutral valve portion 30 extends in a direction orthogonal to the axis of the rotating shaft 20. The neutral valve portion 30 is arranged so as to be included in a plane parallel to the direction orthogonal to the axis of the rotation axis 20.

As shown in FIGS. 1 to 3, the neutral valve portion 30 has a circular portion 30a and a rotating portion 30b.
The circular portion 30a has a ring shape slightly larger than the contour of the first opening 12a and / or the second opening 12b.
The movable valve portion 40 is arranged at a position inside the circular portion 30a.
The inner circumference of the circular portion 30a is arranged so as to substantially overlap the first opening 12a and / or the second opening 12b in the direction of the flow path H.
The rotating portion 30b is located between the rotating shaft 20 and the circular portion 30a.
The rotating portion 30b rotates the circular portion 30a with the rotation of the rotating shaft 20.

The rotating portion 30b is formed in a flat plate shape extending so as to increase the diameter from the rotating shaft 20 toward the circular portion 30a.
The rotating portion 30b may have an arm shape in which a plurality of arms extend from the rotating shaft 20 toward the circular portion 30a.
The rotating shaft 20 and the neutral valve portion 30 rotate with respect to the valve box 10, but their positions do not change in the flow path H direction.

The movable valve portion 40 has a substantially disk shape.
The movable valve portion 40 is connected to the neutral valve portion 30 so that the position in the flow path H direction can be changed.
That is, the movable valve portion 40 is connected to the neutral valve portion 30 so as to be slidable only in the thickness direction.
The movable valve portion 40 is composed of two portions that can move to each other in the flow path H direction. That is, the movable valve portion 40 includes a movable valve frame portion 60 (slide valve frame) and a movable valve plate portion 50 (counter plate).

The movable valve frame portion 60 has a substantially annular shape that is substantially concentric with the circular portion 30a.
The movable valve frame portion 60 is located inside the circular portion 30a in the radial direction.
The movable valve frame portion 60 is fitted to the circular portion 30a. The movable valve frame portion 60 is slidable with respect to the neutral valve portion 30 in the flow path H direction. The movable valve frame portion 60 is movable in the position of the neutral valve portion 30 in the flow path H direction.
The movable valve frame portion 60 includes an outer peripheral crank portion 60c, an inner frame plate 60d, and an outer frame plate 60e.

The outer peripheral crank portion 60c is formed in a ring shape or a cylindrical shape having a contour slightly larger than the contour of the first opening 12a and / or the second opening 12b.
The outer peripheral crank portion 60c is formed on the entire circumference of the outer edge of the movable valve frame portion 60.
The outer peripheral crank portion 60c has a sliding surface 60b parallel to the flow path H direction.
The sliding surface 60b is provided on the inner peripheral surface of the outer peripheral crank portion 60c over the entire length in the circumferential direction.
The sliding surface 60b is positioned so as to be slidable with each other and opposed to the sliding surface 50b of the movable valve plate portion 50 described later.
The outer peripheral crank portion 60c and the inner peripheral crank portion 50c are fitted.

The inner frame plate 60d is provided around the outer peripheral crank portion 60c at a position inside the movable valve frame portion 60 in the radial direction and at the end portion of the outer peripheral crank portion 60c on the first opening 12a side in the flow path H direction.
The inner frame plate 60d is formed in a flange shape parallel to the valve plate 50d.
The inner peripheral crank portion 50c is located on the second opening 12b side of the inner frame plate 60d in the flow path H direction.
The width dimension of the movable valve frame portion 60 in the inner frame plate 60d in the radial direction is set to be substantially equal to the width dimension of the inner peripheral crank portion 50c in the radial direction of the movable valve frame portion 60.

The outer frame plate 60e is provided around the outer peripheral crank portion 60c at a position on the outer side of the movable valve frame portion 60 in the radial direction at the end on the second opening 12b side in the flow path H direction of the outer peripheral crank portion 60c.
The outer frame plate 60e is provided around the outer side of the movable valve frame portion 60 in the outer peripheral crank portion 60c as a ridge having a smaller dimension in the flow path H direction than the outer peripheral crank portion 60c.
A circular portion 30a is located on the side of the first opening 12a of the outer frame plate 60e in the flow path H direction.

A valve frame urging portion (auxiliary spring) 90 is arranged between the movable valve frame portion 60 and the neutral valve portion 30.
The movable valve frame portion 60 is mutably connected to the neutral valve portion 30 in the flow path H direction by the valve frame urging portion (auxiliary spring) 90.
The movable valve frame portion 60 and the circular portion 30a are concentric double rings.

The valve frame seal packing 61 is provided around the movable valve frame portion 60 on the surface facing (contacting) the inner surface 10A of the valve box.
The valve frame seal packing 61 is formed in an annular shape corresponding to the shape of the first opening 12a. The valve frame seal packing 61 is, for example, a seal portion made of an O-ring or the like.
The valve frame seal packing 61 can be brought into close contact with the inner surface 10A of the valve box located around the first opening 12a.

The valve frame seal packing 61 comes into contact with the valve box inner surface 10A which is the peripheral edge of the first opening 12a when the valve is closed, and is pressed by the movable valve frame portion 60 and the valve box inner surface 10A. As a result, the first space and the second space are in a partitioned state.
The valve frame seal packing 61 is provided on the end surface of the outer peripheral crank portion 60c on the first opening 12a side.
The valve frame seal packing 61 is provided at a position on the outermost peripheral side of the outer peripheral crank portion 60c.

FIG. 5 is a cross-sectional view in a direction orthogonal to the flow path showing the movable valve plate portion of the partition valve in the present embodiment.
FIG. 6 is a top view of the movable valve plate portion of the partition valve according to the present embodiment as viewed in the direction along the flow path.
FIG. 7 is an enlarged cross-sectional view of the partition valve in the present embodiment in the direction along the flow path showing the vicinity of the peripheral groove.
FIG. 8 is an enlarged cross-sectional view in a direction along a flow path showing the vicinity of the biased portion hole of the partition valve in the present embodiment.

The movable valve plate portion 50 is a plate body having a circular contour substantially concentric with the circular portion 30a.
The movable valve plate portion 50 is fitted inside the outer peripheral crank portion 60c of the movable valve frame portion 60 in the radial direction.
That is, at the radial outer position of the movable valve plate portion 50, the movable valve frame portion 60 is arranged so as to surround the circumference of the movable valve plate portion 50.

The inner peripheral crank portion 50c of the movable valve plate portion 50 and the movable valve frame portion 60 are concentric double rings.
The movable valve plate portion 50 is slidable with respect to the movable valve frame portion 60 in the flow path H direction.
The movable valve plate portion 50 includes an inner peripheral crank portion 50c and a valve plate 50d.

The valve plate 50d is provided so as to seal the inside of the inner peripheral crank portion 50c in the radial direction.
The valve plate 50d has a flat plate shape substantially orthogonal to the flow path H direction.

The inner peripheral crank portion 50c is formed in a ring shape or a cylindrical shape.
The inner peripheral crank portion 50c is formed on the entire circumference of the outer edge of the movable valve plate portion 50.
The inner peripheral crank portion 50c has an outer contour slightly larger than the contour of the first opening 12a and / or the second opening 12b.

The inner peripheral crank portion 50c has an inner contour slightly smaller than the contour of the first opening 12a and / or the second opening 12b.
The inner peripheral crank portion 50c has a thickness dimension smaller than that of the outer peripheral crank portion 60c, that is, a dimension in the flow path H direction.
The inner peripheral crank portion 50c has a thickness dimension larger than that of the valve plate 50d, that is, a dimension in the flow path H direction.

The inner peripheral crank portion 50c has a sliding surface 50b parallel to the flow path H direction.
The sliding surface 50b is provided on the outer peripheral surface of the inner peripheral crank portion 50c over the entire length in the circumferential direction.
The inner peripheral crank portion 50c and the outer peripheral crank portion 60c are fitted.
The sliding surface 50b and the sliding surface 60b of the movable valve frame portion 60 are positioned so as to be slidable with each other and face each other.

In the inner peripheral crank portion 50c, an urging portion hole 58 in which the valve plate urging portion (holding spring) 80 is housed and a peripheral groove 59 are alternately arranged in the circumferential direction of the movable valve plate portion 50.
A plurality of valve plate urging portions (holding springs) 80 are provided at equal intervals separated from each other in the circumferential direction of the movable valve plate portion 50.
It is preferable that a plurality of valve plate urging portions (holding springs) 80 are provided at three or more locations.

In the present embodiment, as the arrangement of the valve plate urging portions (holding springs) 80 separated from each other, the four valve plate urging portions (holding springs) 80 are positioned at the same angle (90 degrees) when viewed from the center O of the valve plate 50d. ) Shows a configuration example arranged so as to be separated from each other.
The angular position of the valve plate urging portion (holding spring) 80 when viewed from the center O of the valve plate 50d is configured to overlap the angular position of the valve box urging portion (pressing cylinder) 70 and the valve frame urging portion 90. Will be done.

The urging portion holes 58 are provided at four locations at equal intervals in the circumferential direction of the inner peripheral crank portion 50c, corresponding to the arrangement of the valve plate urging portion (holding spring) 80 as described above.
The peripheral groove 59 is provided around the inner peripheral crank portion 50c in the circumferential direction so as to connect between the adjacent biased portion holes 58.

The peripheral groove 59 opens on the first opening 12a side of the inner peripheral crank portion 50c in the flow path H direction. As a result, the inner peripheral crank portion 50c has an inner peripheral wall 59a erected in the flow path H direction with the peripheral groove 59 interposed therebetween, an outer peripheral wall 59b, and a bottom portion 59c between the inner peripheral wall 59a and the outer peripheral wall 59b. It is formed.

The inner peripheral wall 59a and the outer peripheral wall 59b extend in the flow path H direction.
The bottom portion 59c extends in a direction orthogonal to the flow path H direction substantially parallel to the valve plate 50d.
The inner peripheral wall 59a is provided around the inside of the peripheral groove 59 in the radial direction of the movable valve plate portion 50.

The outer peripheral wall 59b is provided on the outer side of the peripheral groove 59 in the radial direction of the movable valve plate portion 50.
The thickness dimension of the inner peripheral wall 59a, that is, the width dimension in the radial direction of the movable valve plate portion 50 is set smaller than the thickness dimension of the outer peripheral wall 59b.

The peripheral groove 59 is provided with a curved portion 59d that bends and connects the surface (bottom surface) of the bottom portion 59c and the surface (side surface) of the inner peripheral wall 59a.
The peripheral groove 59 is provided with a curved portion 59e that bends and connects the surface (bottom surface) of the bottom portion 59c and the surface (side surface) of the outer peripheral wall 59b.

The radius of curvature Rm of the curved portions 59d and 59e is relative to the diameter dimension R1 of the first opening 12a.
0.01 ≤ Rm / R1 ≤ 0.02
It is set to be in the range of.

The width dimension Rn of the peripheral groove 59, that is, the dimension in the radial direction of the movable valve plate portion 50 is relative to the radial dimension R1 of the first opening 12a.
0.03 ≤ Rn / R1 ≤ 0.04
It is set to be in the range of.

The bottom portion 59c of the peripheral groove 59 is located closer to the first opening 12a in the flow path H direction than the bottom portion 58c of the urging portion hole 58. That is, the bottom portion 59c of the peripheral groove 59 is formed to be thicker than the bottom portion 58c of the urging portion hole 58.
The bottom portion 58c of the urging portion hole 58 is flat, and a curved portion having the same degree of curvature deformation as the curved portions 59d and 59e can not be provided.

A valve plate 50d is connected to the inner peripheral wall 59a inside the movable valve plate portion 50 in the radial direction.
In the movable valve plate portion 50, the inner peripheral wall 59a of the inner peripheral crank portion 50c and the peripheral edge portion of the valve plate 50d are connected at a position closer to the opening side of the peripheral groove 59 than the bottom portion 59c of the peripheral groove 59.
Further, on the inner peripheral side of the inner peripheral wall 59a, a valve is located at a position closer to the first opening 12a than the central position of the inner peripheral crank portion 50c in the thickness direction of the movable valve plate portion 50 in the flow path H direction. It is preferable that the plate 50d is connected.

The position where the inner peripheral wall 59a and the valve plate 50d are connected is from the end position of the inner peripheral wall 59a on the first opening 12a side to the center position of the inner peripheral crank portion 50c in the flow path H direction. Can be set as appropriate between.
In the present embodiment, the position where the inner peripheral wall 59a and the valve plate 50d are connected is the inner peripheral wall 59a which is closer to the first opening 12a than the center position of the inner peripheral crank portion 50c in the flow path H direction. It can be set to a position close to the end side.

A sliding surface 50b is provided around the outer peripheral wall 59b on the radial outer surface of the movable valve plate portion 50.
On the outer peripheral wall 59b, a sliding seal packing (sliding seal member) 52 made of an O-ring or the like is arranged as a plate sliding seal portion on the radial outer surface of the movable valve plate portion 50.
A groove 52m for accommodating the sliding seal packing (sliding seal member) 52 is provided around the outer peripheral wall 59b.

The sliding seal packing (sliding seal member) 52 is provided at a position closer to the opening side of the peripheral groove 59 than the outer peripheral groove 56, that is, at a position closer to the end side of the outer peripheral wall 59b in the flow path H direction.
That is, the groove 52m is provided at a position closer to the opening side of the peripheral groove 59 than the outer peripheral groove 56, that is, at a position closer to the end side of the outer peripheral wall 59b in the flow path H direction.
The groove 52m is located on the first opening 12a side of the outer peripheral wall 59b in the thickness direction of the movable valve plate portion 50 in the flow path H direction.

On the outer peripheral wall 59b, a ridge provided with a groove 51 m for accommodating a counter cushion (seal member) 51 made of an O-ring or the like is provided around the movable valve plate portion 50 at a radial outer position.
The groove 51m is provided on the end surface of the ridge on the side of the second opening 12b.
The ridge provided with the groove 51 m is located on the second opening 12b side of the outer peripheral wall 59b in the thickness direction of the movable valve plate portion 50 in the flow path H direction.
The groove 51m is located outside the outer peripheral wall 59b in the radial direction of the movable valve plate portion 50.

An outer peripheral groove 56 is provided on the outer surface of the outer peripheral wall 59b between the groove 52m and the groove 51m in the flow path H direction.
The outer peripheral groove 56 is arranged so as not to come into contact with the sliding seal packing (sliding seal member) 52.

The sliding seal packing (sliding seal member) 52 is arranged between the inner peripheral crank portion 50c and the outer peripheral crank portion 60c.
The sliding seal packing 52 maintains a sealed state between the sliding surface 50b and the sliding surface 60b during sliding.

The sliding surface 50b, the sliding seal packing (sliding seal member) 52, and the sliding surface 60b form a plate sliding seal portion.

The valve plate 50d of the movable valve plate portion 50 has a thick portion 50k having a large thickness dimension in the region on the center O side of the movable valve plate portion 50 with respect to the peripheral edge portion connected to the inner peripheral crank portion 50c. It is said that. Is provided.
That is, the valve plate 50d is provided with a thick portion 50k on the center O side of the valve plate 50d.

The diameter dimension Rk of the thick portion 50k is relative to the diameter dimension R1 of the first opening.
0.36 ≤ Rk / R1 ≤ 0.55
It is set to be in the range of.
The thick portion 50k is formed concentrically with the center O of the valve plate 50d.

The edge portion of the thick portion 50k is formed so that the thickness dimension changes gently from the outside in the radial direction.
The thickness dimension Tk of the thick portion 50k is set so as to be substantially uniform within the region of the thick portion 50k.

The movable valve plate portion 50 and the movable valve frame portion 60 are connected by a valve plate urging portion 80 (holding spring).

The movable valve plate portion 50 and the movable valve frame portion 60 can slide relative to each other in the reciprocating direction indicated by reference numerals B1 and B2 in FIG.
The reciprocating directions B1 and B2 are directions perpendicular to the surfaces of the movable valve plate portion 50 and the movable valve frame portion 60. The reciprocating directions B1 and B2 are the flow path H directions parallel to the axial direction of the rotating shaft 20.

A counter cushion (seal member) 51 is provided around the movable valve plate portion 50 on a surface facing (contacting) the inner surface 10B of the valve box.
The counter cushion (seal member) 51 is formed in an annular shape corresponding to the shape of the second opening 12b.
The counter cushion (seal member) 51 can be brought into close contact with the inner surface 10B of the valve box, which is the peripheral edge of the second opening 12b when the valve is closed.

The counter cushion (seal member) 51 is a seal portion made of an O-ring or the like.
The counter cushion (seal member) 51 is provided on the end surface of the inner peripheral crank portion 50c on the second opening 12b side.
The counter cushion (seal member) 51 is provided at the outermost outer peripheral position of the inner peripheral crank portion 50c.

The counter cushion (seal member) 51 comes into contact with the valve box inner surface 10B which is the peripheral edge of the second opening 12b when the valve is closed, and is pressed by the movable valve plate portion 50 and the valve box inner surface 10B.
As a result, the first space and the second space are in a partitioned state.

The counter cushion (seal member) 51 is an elastic body.
The counter cushion (seal member) 51 elastically deforms when the movable valve plate portion 50 and the valve box inner surface 10B collide with each other.
The counter cushion (seal member) 51 cushions the impact when the movable valve plate portion 50 collides with the valve box inner surface 10B. This makes it possible to prevent the generation of dust.

The counter cushion (seal member) 51, the sliding seal packing (sliding seal member) 52, and the valve frame seal packing 61 are arranged on substantially the same cylindrical surface.
That is, the counter cushion (seal member) 51, the sliding seal packing (sliding seal member) 52, and the valve frame seal packing 61 are arranged so as to overlap each other when viewed in the flow path H direction.
Therefore, a back pressure cancellation rate of about 100% can be obtained.

The movable valve plate portion 50 is provided with a vent hole 53.
The air vent hole 53 communicates with the inside of the outer peripheral groove 56 and the surface of the inner peripheral crank portion 50c on the center side of the counter cushion 51, which is the second opening 12b.
When the movable valve plate portion 50 and the valve box inner surface 10B collide with each other, a closed space is formed by the movable valve plate portion 50, the valve box inner surface 10B, and the counter cushion 51. The vent hole 53 removes gas from this enclosed space.

The valve plate urging portion (holding spring) 80 is built in the urging portion hole 58 of the movable valve plate portion 50.
The valve plate urging portion 80 is a region where the movable valve frame portion 60 and the movable valve plate portion 50 overlap in the direction of the flow path H, that is, the inner frame plate 60d of the movable valve frame portion 60 and the inside of the movable valve plate portion 50. It is arranged on the peripheral crank portion 50c.

A plurality of valve plate urging portions (holding springs) 80 are provided at equal intervals separated from each other in the circumferential direction of the movable valve plate portion 50.
The valve plate urging portion 80 is preferably provided at three or more locations, and is provided at a distance from each other.
FIG. 6 shows a configuration example in which the four valve plate urging portions 80 are arranged at the same angular position (90 °) when viewed from the center O of the valve plate 50d.

The valve plate urging portion 80 guides (regulates) the movement of the movable valve plate portion 50 by the long shaft portion of the bolt-shaped guide pin 81. The guide pin 81 is fixed to the inner frame plate 60d of the movable valve frame portion 60.
The holding spring 82 constituting the valve plate urging portion 80 is an elastic member such as a spring, and is arranged to have an urging shaft parallel to the axis of the urging portion hole 58.

The thickness dimension of the valve plate urging portion 80 between the movable valve frame portion 60 and the movable valve plate portion 50 in the flow path H direction can be changed.
The valve plate urging portion 80 interlocks the movable valve plate portion 50 with the moving reciprocating directions B1 and B2 of the movable valve frame portion 60.

The guide pin 81 is made of a rod-shaped body having a uniform thickness.
The guide pin 81 penetrates the valve plate urging portion 80. The guide pin 81 is erected in the flow path H direction and fixed to the inner frame plate 60d of the movable valve frame portion 60.
The guide pin 81 is fitted in the hole portion 58g formed in the lid portion 58f that closes the urging portion hole 58 of the movable valve plate portion 50.
The guide pin 81 guides the position regulation of the movable valve plate portion 50 and the movable valve frame portion 60.

One end of the holding spring 82 is fixed to the enlarged diameter portion 81a of the end portion of the guide pin 81 which is the bottom portion of the urging portion hole 58 of the movable valve plate portion 50.
The other end of the holding spring 82 is in contact with the lid portion 58f that closes the urging portion hole 58.
The holding spring 82 urges the enlarged diameter portion 81a of the guide pin 81 on the bottom side of the urging portion hole 58 of the movable valve plate portion 50 and the lid portion 58f that closes the urging portion hole 58.
The holding spring 82 may be provided in double, for example, to strengthen the urging force.

In the valve plate urging portion 80, when the movable valve plate portion 50 and the movable valve frame portion 60 slide with each other, the guide pin 81 moves in the axial direction in the hole portion 58g formed in the lid portion 58f. Then, the holding spring 82 contracts.
By the urging force of the contracted holding spring 82, the lid portion 58f that closes the urging portion hole 58 is urged against the enlarged diameter portion 81a of the guide pin 81 that is on the bottom side of the urging portion hole 58. As a result, the movable valve plate portion 50 and the movable valve frame portion 60 move with each other in the direction in which the lid portion 58f and the enlarged diameter portion 81a of the guide pin 81 are separated from each other.

The valve plate urging portion 80 can regulate the sliding direction so as not to deviate from the reciprocating directions B1 and B2 when the movable valve plate portion 50 and the movable valve frame portion 60 slide with each other.
Further, even when the movable valve plate portion 50 and the movable valve frame portion 60 slide, the movable valve plate portion 50 and the movable valve frame portion 60 can be moved in parallel without changing their postures.

The valve plate urging portion 80 (holding spring) and the valve frame urging portion (auxiliary spring) 90 are provided so as to have an urging force capable of urging in the flow path H direction which is opposite to each other.

The valve frame urging portion (auxiliary spring) 90 includes a circular portion 30a of the neutral valve portion 30 and an outer frame plate 60e that serves as a position regulating portion of the movable valve frame portion 60 that overlaps the circular portion 30a when viewed in the direction of the flow path H. Placed between ,.
The valve frame urging portion (auxiliary spring) 90 urges the neutral valve portion 30 toward the central position in the flow path H direction of the movable valve frame portion 60.

The valve frame urging portion (auxiliary spring) 90 is built in the urging portion hole 68 of the outer frame plate 60e.
The valve frame urging portion (auxiliary spring) 90 is a region where the neutral valve portion 30 and the movable valve frame portion 60 overlap in the direction of the flow path H, that is, the circular portion 30a of the neutral valve portion 30 and the movable valve frame portion 60. It is arranged on the outer frame plate 60e of.

The plurality of valve frame urging portions (auxiliary springs) 90 are arranged at equal intervals in the circumferential direction of the circular portion 30a.
The valve frame urging portion (auxiliary spring) 90 is preferably provided at three or more locations corresponding to the valve plate urging portion 80, and is provided at a distance from each other.
FIG. 4 shows a configuration example in which four valve frame urging portions (auxiliary springs) 90 are arranged at the same angular position (90 °) when viewed from the center O of the valve body.
The angular position of the valve frame urging portion (auxiliary spring) 90 in the circumferential direction of the circular portion 30a when viewed from the center O of the valve plate 50d is the valve plate urging portion (holding spring) 80 in the circumferential direction of the movable valve plate portion 50. It is configured to overlap the angular position of.

The valve frame urging portion (auxiliary spring) 90 guides (regulates) the movement of the movable valve frame portion 60 by the long shaft portion of the guide pin 91.
The guide pin 91 is fixed to the bottom of the urging portion hole 68 provided in the outer frame plate 60e of the movable valve frame portion 60.
The guide pin 91 may be fixed to a lid portion that closes the bottom portion of the urging portion hole 68 of the movable valve frame portion 60.

The urging portion hole 68 is provided in the outer frame plate 60e by opening in the same direction as the urging portion hole 58. That is, the urging portion hole 68 opens on the side facing the first opening 12a in the flow path H direction. The urging portion hole 68 is formed in a cylindrical shape having an axis in the flow path H direction.
The auxiliary spring constituting the valve frame urging portion (auxiliary spring) 90 is, for example, an elastic member such as a spring, and is arranged to have an urging shaft parallel to the axis of the urging portion hole 68.

The valve frame urging portion (auxiliary spring) 90 can change the thickness dimension of the neutral valve portion 30 and the movable valve frame portion 60 in the flow path H direction.
The valve frame urging portion (auxiliary spring) 90 moves the movable valve frame portion 60 in the reciprocating directions B1 and B2 with respect to the neutral valve portion 30 that does not move in the flow path H direction. The movable valve plate portion 50 follows the position movement of the movable valve frame portion 60 in the flow path H direction by the valve plate urging portion 80, and moves in the reciprocating directions B1 and B2. This does not apply when a differential pressure in the flow path H direction is applied to the valve plate 50d.

The guide pin 91 is made of a rod-shaped body having a uniform thickness.
The guide pin 91 penetrates inside the valve frame urging portion (auxiliary spring) 90. The guide pin 91 is erected in the flow path H direction and fixed to the outer frame plate 60e of the movable valve frame portion 60.
The guide pin 91 is fitted in a hole portion 68g formed in the circular portion 30a of the neutral valve portion 30.
The guide pin 91 guides the position regulation of the movable valve frame portion 60 with respect to the neutral valve portion 30.

One end of the auxiliary spring 92 is in contact with the bottom of the urging portion hole 68 of the movable valve frame portion 60.
The other end of the auxiliary spring 92 is in contact with the circular portion 30a surrounding the hole portion 68g of the neutral valve portion 30.
The auxiliary spring 92 urges the bottom of the urging portion hole 68 of the movable valve frame portion 60 and the circular portion 30a surrounding the hole portion 68g of the neutral valve portion 30.

In the valve frame urging portion (auxiliary spring) 90, when the movable valve frame portion 60 moves with respect to the neutral valve portion 30, the guide pin 91 is axially moved in the hole portion 68 g formed in the circular portion 30a. Moving. Then, the auxiliary spring 92 contracts.
The urging force of the contracted auxiliary spring 92 urges the bottom of the urging portion hole 68 with respect to the circular portion 30a surrounding the hole 68g. As a result, the movable valve frame portion 60 moves with respect to the neutral valve portion 30 in the direction in which the bottom portion of the urging portion hole 68 and the circular portion 30a are separated from each other.

When the movable valve frame 60 moves with respect to the neutral valve 30 by the valve frame urging portion (auxiliary spring) 90, the moving direction of the movable valve frame 60 does not deviate from the reciprocating directions B1 and B2. Can be regulated to.
Further, even when the movable valve frame portion 60 moves in position with respect to the neutral valve portion 30, the movable valve frame portion 60 can move in parallel without changing the posture with respect to the neutral valve portion 30. That is, when the movable valve frame portion 60 is moved in the flow path H direction with respect to the neutral valve portion 30 by the valve frame urging portion (auxiliary spring) 90, the valve plate 50d of the movable valve plate portion 50 is rotated. It is possible to maintain a state in which the posture perpendicular to the axis of 20 is maintained, that is, a state in which the valve plate 50d of the movable valve plate portion 50 is not tilted with respect to the axis of the rotating shaft 20.

A plurality of valve box urging portions (pressing cylinders) 70 are built in the valve box 10.
The valve box urging portion (pressing cylinder) 70 constitutes an elevating mechanism that presses the movable valve frame portion 60 in the direction toward the seal surface.
The valve box urging unit (pressing cylinder) 70 is connected to the hydraulic drive means (drive unit) 700 and is driven by flood control.

The valve box urging portion (pressing cylinder) 70 is located at a position where the movable valve frame portion 60 can be urged in the direction close to the first opening 12a in the flow path H direction, that is, around the second opening 12b. Placed in position.

The valve box urging portion (pressing cylinder) 70 has a hydraulic drive portion (fixed portion) 71 and a telescopic rod (movable portion) 72.
The hydraulic drive unit (fixed unit) 71 is connected to the hydraulic drive means (drive unit) 700. The hydraulic drive unit (fixed unit) 71 is capable of expanding and contracting the telescopic rod (movable unit) 72 by the flood control (pressurized incompressible fluid) supplied from the hydraulic drive means 700.
The hydraulic drive unit (fixed portion) 71 is arranged to be embedded inside the frame which is outside the valve box inner surface 10B with respect to the hollow portion 11.

The movable portion 72 is extendable from the fixed portion 71 in a direction close to the first opening 12a along the flow path H direction.
The valve box urging portion (pressing cylinder) 70 is provided with a multi-stage sealing means so that oil, which is a working fluid, does not leak to the vacuum side on the movable valve frame portion 60 side during hydraulic drive.
For example, a ring-shaped seal member (O-ring) 75 is provided around the movable portion 72 at a position on the tip end portion 72a side. The telescopic rod (movable portion) 72 is expandable and contractible in a state where the hydraulic drive portion (fixed portion) 71 side and the vacuum side, which is the movable valve frame portion 60 side, are sealed.

The valve box urging portion (pressing cylinder) 70 has a function of moving the movable valve frame portion 60 toward the first opening 12a. The valve box urging portion (pressing cylinder) 70 abuts the movable valve frame portion 60 against the valve box inner surface 10A and presses the movable valve frame portion 60 against the valve box inner surface 10A to close the flow path H (closed). Valve operation).

The plurality of valve box urging portions (pressing cylinders) 70 are arranged in the valve box 10 as positions that can be urged without changing the posture of the movable valve frame portion 60.
Specifically, the valve box urging portion (pressing cylinder) 70 is arranged so that the axis of the telescopic rod (movable portion) 72 coincides with the guide pin 91 axis of the valve frame urging portion (auxiliary spring) 90. Cylinder.
The plurality of valve box urging portions (pressing cylinders) 70 are provided apart from each other along the periphery of the second opening 12b.

The valve box urging portion (pressing cylinder) 70 is preferably provided at three or more locations corresponding to the valve plate urging portion 80 and the valve frame urging portion (auxiliary spring) 90, and are provided at equal intervals from each other. ..
In FIG. 4, when viewed from the center O of the valve body, the four valve box urging portions (pressing cylinders) 70 are located at the same angular position (90 °) as in the valve frame urging portion (auxiliary spring) 90. The arranged configuration example is shown.
The angular position of the valve box urging portion (pressing cylinder) 70 in the circumferential direction of the circular portion 30a when viewed from the center O of the valve plate 50d is the valve plate urging portion (holding spring) 80 in the circumferential direction of the movable valve plate portion 50. It is configured to overlap the angular position of the valve frame urging portion (auxiliary spring) 90.
That is, the valve box urging portion (pressing cylinder) 70, the valve plate urging portion (holding spring) 80, and the valve frame urging portion (auxiliary spring) 90 are located on the same straight line passing through the center O of the valve plate 50d. Arranged like this.

When the valve is changed from the valve open state (FIG. 18) to the valve closed state (FIG. 23), the valve box urging portion (pressing cylinder) 70 extends the telescopic rod (movable portion) 72 by flood control.

At this time, the valve box urging portion (pressing cylinder) 70 urges the movable valve frame portion 60 in contact with the tip portion 72a. As a result, the movable valve frame portion 60 moves toward the first opening 12a in the flow path H direction. The valve frame seal packing 61 is in close contact with the inner surface 10A of the valve box around the first opening 12a.

In the plurality of valve box urging portions (pressing cylinders) 70, the extension operations of the telescopic rods (movable portions) 72 can all be operated at substantially the same time.

FIG. 9 is an explanatory view showing the hydraulic drive means and the urging portion (pressing cylinder) in FIG.
As shown in FIG. 9, the hydraulic drive means 700 includes a hydraulic generator 701, a hydraulic pipe 702, a switching valve (spool valve) 800, a drive unit 705, a control unit (controller) 706, a power supply 707, and the like. Has.

The oil pressure generating unit 701 generates the oil pressure that supplies the oil pressure to the oil pressure driving unit (fixing unit) 71 of the valve box urging unit (pressing cylinder) 70.
The hydraulic pipe 702 is connected from the oil pressure generating unit 701 to the oil pressure driving unit (fixing unit) 71.
The switching valve (spool valve) 800 is provided in the hydraulic pipe 702 to cut off the hydraulic supply at the end of the opening operation of the movable valve frame portion 60, and is provided in the hydraulic pipe 702 so that the rotation of the rotating shaft 20 is in the closed position. It is possible to switch the hydraulic supply by detecting that.

The drive unit 705 is a motor or the like that drives the oil pressure generating unit 701. The drive unit 705 is connected to and controlled by the control unit (controller) 706. The drive unit 705 is connected to the power supply 707 to supply electric power for driving the drive unit 705.
Further, the oil pressure generating unit 701 is configured to be normally closed.

Hereinafter, the operation of the partition valve 100 according to the present embodiment will be described in detail.

First, in the partition valve 100 according to the present embodiment, consider a state in which the movable valve portion 40 is in a retracted position as a hollow portion 11 in which the flow path H is not provided. At this time, the movable valve portion 40 is not in contact with the valve box inner surface 10A and the valve box inner surface 10B. In this state, the rotation shaft 20 is rotated in the direction indicated by the reference numeral R01 (the direction intersecting the direction of the flow path H). Then, the neutral valve portion 30 and the movable valve portion 40 rotate and move along the direction R01 by a pendulum motion. By this rotation, the movable valve portion 40 moves from the retracted position to the valve opening shielding position (sliding preparation position) which is a position facing the first opening 12a.

At the valve opening shielding position (sliding preparation position), the valve box urging portion (pressing cylinder) 70 extends the telescopic rod (movable portion) 72 in the direction close to the first opening 12a in the flow path H direction. .. The telescopic rod (movable portion) 72 abuts on the movable valve frame portion 60 and presses it. The movable valve frame portion 60 moves in a direction close to the first opening 12a.
The movable valve frame portion 60 comes into contact with the valve box inner surface 10A by the valve box urging portion (pressing cylinder) 70. At this time, the valve frame seal packing 61 comes into close contact with the valve box inner surface 10A located around the first opening 12a. As a result, the flow path H is closed (valve closing operation).

On the contrary, the valve box urging portion (pressing cylinder) 70 retracts the telescopic rod (movable portion) 72. The urging force from the telescopic rod (movable portion) 72 to the movable valve frame portion 60 is reduced. Then, the movable valve frame portion 60 is pulled away from the inner surface of the valve box 10 by the urging force of the valve frame urging portion 90. The sealed state of the movable valve frame portion 60 and the valve box inner surface 10A is released. As a result, the flow path H is opened (release operation).
The valve closing operation and the releasing operation of the movable valve portion 40 are performed by a mechanical contact operation by the valve box urging portion 70 and a mechanical separation operation by the valve frame urging portion 90.

After the release operation, the rotation shaft 20 is rotated in the direction indicated by the reference numeral R02. Then, the movable valve portion 40 moves from the valve opening shielding position (sliding preparation position) to the retracted position (evacuated operation).
By this release operation and the retracting operation, a valve opening operation for putting the movable valve portion 40 into the valve opening state is performed.
In a series of operations (valve closing operation, releasing operation, retracting operation), the valve plate urging portion 80 links the movable valve frame portion 60 and the movable valve plate portion 50.

[State of valve body in retractable position (FREE)]
In FIG. 3, the movable valve portion 40 (movable valve frame portion 60, movable valve plate portion 50) at the valve opening shielding position (sliding preparation position) is in contact with any of the valve box inner surfaces 10A and 10B of the valve box 10. Indicates a non-existing state. This state is referred to as a state in which the valve body is FREE. In the state where the valve body is FREE, the telescopic rod (movable part) 72 of the valve box urging portion (pressing cylinder) 70 does not protrude from the valve box inner surface 10B and is in a degenerate state inside the valve box 10. That is, the valve box urging portion (pressing cylinder) 70 is not in contact with the valve body 5.

FIG. 10 is an enlarged cross-sectional view along a flow path showing the peripheral edge of the partition valve in the present embodiment.
Next, the valve box urging portion (pressing cylinder) 70 is driven from the state where the valve body is FREE. Then, the tip portion 72a of the telescopic rod (movable portion) 72 comes into contact with the lower surface 60sb of the movable valve frame portion 60, as shown by the arrow F1 in FIG. As a result, the movable valve frame portion 60 moves toward the inner surface 10A of the valve box. Further, the movable valve frame portion 60 is moved and the valve frame seal packing 61 is in contact with the valve box inner surface 10A, which is the state of the valve closed position (valve closed state). At this time, the movable valve plate portion 50 is moved in the same direction as the movable valve frame portion 60 by the valve plate urging portion (holding spring) 80. At the same time, the movable valve plate portion 50 and the movable valve frame portion 60 maintain the sliding seal state via the sliding seal packing 52.
In a state where the valve body is FREE, the valve box urging portion (pressing cylinder) 70 brings the movable valve frame portion 60 into contact with the valve box inner surface 10A of the valve box 10 to close the flow path H (valve closing operation).

[Valve body in valve closed position (no positive pressure or differential pressure)]
FIG. 10 shows a state in which the flow path H is closed by the valve closing operation.
This state is referred to as a valve closed state with no positive pressure / no differential pressure. The valve closed state with no positive pressure / differential pressure is a state in which the valve body 5 is in contact with one inner surface of the valve box 10 and not in contact with the other inner surface. That is, in the valve closed state with no positive pressure / differential pressure, the valve body 5 comes into contact with the inner surface 10A of the valve box around the first opening 12a. At the same time, the valve body 5 is not in contact with the valve box inner surface 10B located around the second opening 12b.
In the valve closed state with no positive pressure / differential pressure, the telescopic rod (movable part) 72 is maintained in the valve box urging portion (pressing cylinder) 70 in a state of being extended in the direction toward the movable valve frame portion 60. That is, the state in which the tip portion 72a is in contact with the lower surface 60sb of the movable valve frame portion 60 is maintained. Further, the valve frame seal packing 61 is maintained in contact with the inner surface 10A) of the valve box around the first opening 12a of the valve box 10.

[Valve closed when the valve body is in the reverse pressure position]
FIG. 11 is an enlarged cross-sectional view along a flow path showing the peripheral edge of the partition valve in the present embodiment.
FIG. 11 shows a state in which the flow path H is closed in a reverse pressure state.
This state is referred to as a reverse pressure valve closed state. The reverse pressure valve closed state is a state in which the valve body 5 is in contact with both valve box inner surfaces 10A and 10B in the flow path H direction. That is, in the reverse pressure valve closed state, the valve body 5 is kept in contact with the valve box inner surface 10A around the first opening 12a, and also on the valve box inner surface 10B located around the second opening 12b. It is in contact. Here, the reverse pressure means that pressure is applied to the valve body in the direction from the valve closed state to the valve open state.

When the valve body 5 receives a reverse pressure, the movable valve plate portion 50 moves while sliding in the reciprocating direction B2 (FIG. 11) with respect to the movable valve frame portion 60 by the valve plate urging portion 80. A sealed state is maintained between the movable valve frame portion 60 and the movable valve plate portion 50 via the sliding seal packing 52.
As a result, the movable valve plate portion 50 collides with the valve box inner surface 10B around the second opening 12b. At this time, the counter cushion 51 alleviates the impact caused by the collision at the movable valve plate portion 50. The reverse pressure canceling mechanism is a mechanism in which the force received by the valve body 5 is received by the valve box inner surface 10B (back side body) of the valve box 10.

Further, positive pressure / no differential pressure is set, and in this state, the movable valve frame portion 60 is separated from the inner surface of the valve box 10 by the valve frame urging portion 90, and the movable valve frame portion 60 is retracted to retract the flow path H. Is released (release operation).

In the partition valve 100 of the present embodiment, the inner peripheral wall 59a of the peripheral groove 59 is connected to the valve plate 50d, and the sliding surface 50b and the sliding seal packing (sliding seal member) are located at the outer peripheral positions of the outer peripheral wall 59b of the peripheral groove 59. ) 52 is provided and slidably contacts the movable valve frame portion 60.

In the partition valve 100 of the present embodiment, in any of the following cases, the deformation due to the stress of the valve plate 50d is absorbed by the inner peripheral wall 59a and the bottom 59c of the peripheral groove 59, and the outer peripheral wall 59b of the peripheral groove 59 is deformed. do not do.
-When a differential pressure in the flow path H, which is a pressure difference between the front and back positions of the valve plate 50d, occurs.
-When the differential pressure of the flow path H is further changed and the differential pressure directions on the front and back of the valve plate 50d are reversed.

First, consider the case where a differential pressure in the flow path H direction is generated when the valve body is in the valve closed position.
For example, the upper first opening 12a side shown in FIGS. 2 and 10 is in a low pressure state such as vacuum, and the lower second opening 12b side is in a high pressure state such as atmospheric pressure.

Then, due to the differential pressure between the upper side and the lower side of the valve body 5 generated in the flow path H direction, the deformation pressure acts in the direction in which the center O of the valve plate 50d is deformed into a convex shape.
Therefore, the center O of the valve plate 50d is convex, that is, curved so as to project upward in the flow path H direction. At the same time, the peripheral portion of the valve plate 50d is inclined so that the radial center side is on the upper side as compared with the radial outer side.

At this time, the tilt deformation of the peripheral edge of the valve plate 50d tilts the inner peripheral wall 59a in the same direction. That is, the inner peripheral wall 59a is inclined following the inclination formed by the peripheral edge of the valve plate 50d, and the opening side of the upper end is inclined outward in the radial direction with respect to the bottom portion 59c side of the lower end.
Following the inclination of the inner peripheral wall 59a, the bottom portion 59c is also deformed in the peripheral groove 59. In the bottom portion 59c, the outer peripheral wall 59b side on the outer upper side in the radial direction is inclined downward in the flow path H direction with respect to the inner peripheral wall 59a side on the inner side in the radial direction.

That is, when a positive differential pressure is generated in the flow path H direction, the width dimension of the opening of the peripheral groove 59 is smaller than the width dimension of the bottom portion 59c in the peripheral groove 59 in the radial direction of the valve plate 50d. It transforms to become.

The deformation of the bottom portion 59c is smaller than the deformation of the inner peripheral wall 59a. Due to the inclination / deformation of the inner peripheral wall 59a and the bottom portion 59c, the deformation stress of the valve plate 50d can be prevented from being transmitted to the outer peripheral wall 59b.

As a result, when a positive pressure difference is generated in the flow path H direction, the sliding surface 50b, which is a plate sliding seal portion, and the sliding seal packing (sliding seal) at the outer peripheral position of the outer peripheral wall 59b of the peripheral groove 59. The member) 52 is not tilted or deformed.

At the same time, in this case, since the movable valve frame portion 60 is connected to the movable valve plate portion 50 via the inner frame plate 60d, even if the movable valve plate portion 50 is deformed, it is a sliding seal portion. Deformation is not transmitted to the outer peripheral crank portion 60c having the surface 60b.
Therefore, even when a positive pressure difference is generated in the flow path H direction, the sealed state between the movable valve frame portion 60 and the movable valve plate portion 50 can be maintained.

Further, when a positive pressure difference is generated in the flow path H direction, the outer peripheral crank portion 60c is prevented from being deformed, so that the valve frame seal packing 61 provided on the outer peripheral crank portion 60c and the first opening 12a The close contact with the valve box inner surface 10A located around the valve box can be maintained.
Therefore, the sealed state between the movable valve frame portion 60 and the first opening 12a of the valve box 10 can be maintained.

Next, consider the case where the valve body is in the valve closed position and a differential pressure is generated in the opposite direction in the flow path H direction.
For example, the upper first opening 12a side shown in FIGS. 2 and 11 is in a high pressure state of about atmospheric pressure, and the lower second opening 12b side is in a low pressure state such as vacuum.

Then, due to the differential pressure between the upper side and the lower side of the valve body 5 generated in the flow path H direction, the deformation pressure in the movable valve plate portion 50 in the direction in which the center O of the valve plate 50d is deformed into a concave shape (convex shape). Works.
Therefore, the center O of the valve plate 50d is concave, that is, curved so as to project downward in the flow path H direction. At the same time, the peripheral portion of the valve plate 50d is inclined so that the center side in the radial direction is lower than the outer side in the radial direction.

The tilt deformation of the peripheral edge of the valve plate 50d tilts the inner peripheral wall 59a in the same direction. That is, the inner peripheral wall 59a is inclined in accordance with the inclination formed by the peripheral edge of the valve plate 50d, and the opening side of the upper end is inclined inward in the radial direction with respect to the bottom portion 59c side of the lower end.
Following the inclination of the inner peripheral wall 59a, the bottom portion 59c is also deformed in the peripheral groove 59. In the bottom portion 59c, the outer peripheral wall 59b side on the outer upper side in the radial direction is inclined upward in the flow path H direction with respect to the inner peripheral wall 59a side on the inner side in the radial direction.

At this time, the valve plate 50d is connected at a position closer to the open end portion of the peripheral groove 59 than the bottom portion 59c.
First, consider a state in which the position of the bottom portion 59c to be the end portion on the outer peripheral wall 59b side is fixed, that is, a state in which this position does not move. Then, with respect to this fixed position, the length of the bottom 59c in the radial direction and the height of the inner peripheral wall 59a from the bottom 59c to the connecting portion of the valve plate 50d are the same as the valve plate 50d. It is a part that can be displaced to the connection position.

That is, the total length in the radial direction of the bottom 59c and the height distance of the inner peripheral wall 59a from the bottom 59c to the connection position with the valve plate 50d are set with the position of the outer peripheral wall 59b side end of the bottom 59c as the swing center. It is considered to be a displaceable area.

That is, when a differential pressure of reverse pressure is generated in the flow path H direction, the width dimension of the opening of the peripheral groove 59 is larger than the width dimension of the bottom portion 59c in the peripheral groove 59 in the radial direction of the valve plate 50d. It transforms to become.

The deformation of the bottom portion 59c is smaller than the deformation of the inner peripheral wall 59a. Due to the inclination / deformation of the inner peripheral wall 59a and the bottom portion 59c, the deformation stress of the valve plate 50d can be prevented from being transmitted to the outer peripheral wall 59b.

As a result, when a differential pressure of reverse pressure is generated in the flow path H direction, the sliding surface 50b, which is a plate sliding seal portion, and the sliding seal packing (sliding seal) at the outer peripheral position of the outer peripheral wall 59b of the peripheral groove 59. The member) 52 is not tilted or deformed.

At the same time, in this case, since the movable valve frame portion 60 is connected to the movable valve plate portion 50 via the inner frame plate 60d, even if the movable valve plate portion 50 is deformed, the inner frame plate 60d remains in the peripheral groove 59. It can be absorbed with a slight inclination following the deformation. As a result, the deformation is not transmitted to the outer peripheral crank portion 60c having the sliding surface 60b which is the plate sliding seal portion.

Therefore, even when a differential pressure of the reverse pressure is generated in the flow path H direction, the sealed state between the movable valve frame portion 60 and the movable valve plate portion 50 can be maintained.

Further, when a differential pressure of a reverse pressure is generated in the flow path H direction, the outer peripheral crank portion 60c is prevented from being deformed, so that the valve frame seal packing 61 provided on the outer peripheral crank portion 60c and the first opening 12a The close contact with the valve box inner surface 10A located around the valve box can be maintained.
Therefore, the sealed state between the movable valve frame portion 60 and the first opening 12a of the valve box 10 can be maintained.

Further, in the inner peripheral crank portion 50c, the counter cushion (seal member) 51 is arranged at the outer position in the radial direction from the outer peripheral wall 59b of the peripheral groove 59, so that the opening side of the peripheral groove 59 can be expanded. As a result, the seal state between the valve box inner surface 10B and the movable valve plate portion 50 by the counter cushion (seal member) 51 can be maintained.

As a result, when a differential pressure of reverse pressure is generated in the flow path H direction, for example, a pressure of about atmospheric pressure acts on one surface side of the movable valve plate portion 50, and the other surface side of the movable valve plate portion 50 is evacuated. Even in such a case, the sealed state of the partition valve 100 can be maintained.

Further, consider the case where the differential pressure of the reverse pressure increases in the flow path H direction.
For example, the upper side of the first opening 12a shown in FIGS. 2 and 11 is in a high pressure state of about 1.2 MPa, and the lower side of the second opening 12b is in a low pressure state such as vacuum.

Even in this case, when a differential pressure of reverse pressure is generated in the flow path H direction, in the radial direction of the valve plate 50d, in the peripheral groove 59, the width dimension of the opening of the peripheral groove 59 is relative to the width dimension of the bottom portion 59c. Transforms to be even larger.
That is, the sealed state between the movable valve frame portion 60 and the movable valve plate portion 50 can be maintained.

Further, since the counter cushion (seal member) 51 is pressed against the inner surface 10B of the valve box to be sealed, even if the differential pressure becomes large, the counter cushion (seal member) 51 can move in the direction of reinforcing the sealed state. The pressing force on the valve plate portion 50 increases.

Therefore, even if the differential pressure of the reverse pressure increases in the flow path H direction, the valve box inner surface 10B and the movable valve plate portion 50 are sealed by the counter cushion (seal member) 51 at the outer position of the outer peripheral wall 59b of the peripheral groove 59. The state can be maintained.

As a result, when the differential pressure of the reverse pressure generated in the flow path H direction is large, for example, a pressure of about 1.2 MPa acts on one surface side of the movable valve plate portion 50, and the other surface side of the movable valve plate portion 50 is in a vacuum state. Even if it is determined, the sealed state of the partition valve 100 can be maintained.

According to the present embodiment, when the center O of the valve plate 50d is deformed into a concave shape or a convex shape due to the differential pressure in the flow path H direction and the peripheral edge portion of the valve plate 50d is inclined, the peripheral edge of the valve plate 50d is inclined. The sliding surface 50b and the sliding seal packing (sliding seal member) are located at a position away from the bottom 59c where the influence of the inner peripheral wall 59a of the peripheral groove 59 that inclines according to the inclination of the portion is transmitted to the outer peripheral wall 59b. Since sliding seal members (seal members) such as 52, the valve frame seal packing 61, and the counter cushion (seal member) 51 are located, the influence on these seal members is reduced and the sealability of the partition valve 100 is maintained. It becomes possible.

The inclination / deformation of the valve plate 50d, the inner peripheral wall 59a of the peripheral groove 59, the outer peripheral wall 59b, the bottom portion 59c, etc. means a state in which stress is generated so that the actual deformation / inclination occurs. Therefore, it includes the state where the deformation / inclination occurs and the state where only the stress is generated without the deformation / inclination.

Further, even when the differential pressure of the flow path H changes, the width dimension of the opening of the peripheral groove 59 changes with respect to the width dimension of the bottom portion 59c in the peripheral groove 59 in the radial direction of the valve plate 50d. Prevents deformation of the outer peripheral wall 59b.

In this way, even when the differential pressure of the flow path H changes, the sliding surface 50b and the sliding seal packing (sliding seal member) 52, which are the plate sliding seal portions at the outer peripheral position of the outer peripheral wall 59b of the peripheral groove 59. It is possible to maintain the sealed state between the movable valve frame portion 60 and the movable valve plate portion 50.

At the same time, even if the differential pressure of the flow path H changes, the sealed state of the valve box inner surface 10B and the movable valve plate portion 50 by the counter cushion (sealing member) 51 at the outer position of the outer peripheral wall 59b of the peripheral groove 59 is maintained. be able to.
As a result, even when the differential pressure generated in the flow path H direction is large, for example, a pressure of about 1 MPa acts on one surface side of the movable valve plate portion 50 and the other surface side of the movable valve plate portion 50 is in a vacuum state. , The sealed state of the partition valve 100 can be maintained.

Moreover, when the diameters are the same, the width dimension of the inner peripheral crank portion 50c in the radial direction of the movable valve plate portion 50 increases as compared with the configuration in which the peripheral groove 59 is not provided. As a result, the diameter dimension of the valve plate 50d in the movable valve plate portion 50 can be reduced. Therefore, by reducing the area of the valve plate 50d, as a result, it is possible to reduce the deforming force acting on the valve plate 50d due to the differential pressure in the flow path H direction.

Here, consider a case where the partition valve 100 is increased in diameter to increase the diameter, that is, a case where the diameter dimension R1 of the first opening 12a and the second opening 12b is increased.
Even in this case, the deformation of the valve plate 50d, which increases in response to the increase in pressure applied to the valve plate 50d, can be absorbed in the vicinity of the peripheral groove 59, and excessive deformation of the outer peripheral wall 59b can be prevented.
Therefore, the seal can be maintained even if the diameter is increased.

As a result, when it is expected that the diameter will be increased and the deformation will be large, for example, a pressure of about 1 MPa acts on one surface side of the valve plate 50d having a diameter of about 22 inches, and the other surface side of the valve plate 50d is in a vacuum state. Even if it is determined, the sealed state of the partition valve 100 can be maintained.

At the same time, even when the width dimension of the inner peripheral crank portion 50c in the radial direction of the movable valve plate portion 50 is increased to increase the strength of the movable valve plate portion 50, the constituent material corresponding to the internal volume of the peripheral groove 59 Weight can be reduced. As a result, the weight of the inner peripheral crank portion 50c can be reduced, and the weight can be reduced.

Here, since the peripheral groove 59 is provided on almost the entire circumference of the movable valve plate portion, when the diameter of the partition valve 100 is large, for example, when the size exceeds 20 inches, the order is 1 kg or 10 kg. It is possible to reduce the weight of the.

Therefore, in the partition valve 100 of the present embodiment, it is possible to simultaneously realize a large diameter and a light weight.

In the partition valve 100 of the present embodiment, the biased portion holes 58 and the peripheral grooves 59 are alternately arranged in the circumferential direction on the edge portion of the movable valve plate portion 50.
Here, the periphery of the urging portion hole 58 has a wall thickness that satisfies sufficient strength because the constituent material has not been excavated in order to reliably perform the operation by the urging force in the valve plate urging portion 80. ..
Further, the peripheral groove 59 has sufficient deformation resistance as described above.

As a result, in the circumferential direction at the outer edge of the movable valve plate portion 50, sufficient wall thickness and strength are provided in the vicinity of the urging portion hole 58 and the peripheral groove 59, that is, the entire circumference at the outer edge of the movable valve plate portion 50. -Can have deformation resistance.
Therefore, the inner peripheral crank portion 50c has sufficient strength to cope with the influence of the deformation of the valve plate 50d on the entire circumference.
Therefore, even if the valve plate 50d is deformed on the entire circumference of the inner peripheral crank portion 50c, sufficient seal resistance can be maintained.

In the present embodiment, when suppressing the stress due to the differential pressure in the flow path H direction, the curved portions 59d and 59e of the peripheral groove 59 avoid the stress concentration in the vicinity of the peripheral groove 59 of the inner peripheral crank portion 50c, and deform or the like. To prevent the occurrence of.

In the present embodiment, the value of the ratio Rm / R1 of the radius of curvature Rm of the curved portions 59d and 59e to the diameter dimension R1 of the first opening 12a is set in the above range, so that the diameter exceeds 20 inches. Even with the partition valve 100 of the above, it is possible to prevent stress concentration in the peripheral groove 59 and deformation of the inner peripheral crank portion 50c and the like. Moreover, even when the differential pressure in the flow path H direction is large, it is possible to suppress stress concentration in the vicinity of the curved portions 59d and 59e.

In the present embodiment, the value of the ratio Rn / R1 of the width dimension Rn of the peripheral groove 59 and the diameter dimension R1 of the first opening 12a is set in the above range, so that the seal is sealed by the differential pressure in the flow path H direction. It is possible to prevent the occurrence of defects.

Here, when the valve plate 50d is deformed into a concave shape due to the differential pressure in the flow path H direction, the inner peripheral wall 59a of the peripheral groove 59 is convexly deformed at the center O of the valve plate 50d in the movable valve plate portion 50. It is pulled in the direction and is pulled inward in the radial direction of the movable valve plate portion 50. As a result, the inner peripheral wall 59a of the peripheral groove 59 absorbs the deformation stress so that the opening end side is inclined toward the center O side, and suppresses the stress transmitted to the outer peripheral wall 59b of the peripheral groove 59.

By setting the width dimension Rn of the peripheral groove 59, it is possible to prevent the outer peripheral wall 59b of the peripheral groove 59 from inclining from a state where there is no differential pressure.
Further, by setting the width dimension Rn of the peripheral groove 59, the diameter dimension of the valve plate 50d can be reduced and the differential pressure acting on the valve plate 50d can be reduced.
Further, by setting the width dimension Rn of the peripheral groove 59, the weight reduced in the movable valve plate portion 50 can be increased and sufficient strength can be maintained.

In the circumferential groove 59 of the present embodiment, the width dimension of the outer peripheral wall 59b, which is the side that is not desired to be deformed, is set to be larger than the width dimension of the inner peripheral wall 59a, which is the side that is positively deformed. Therefore, the sealed state can be maintained.

Further, the valve plate 50d of the present embodiment can have sufficient strength so that the deformation generated by the differential pressure does not become too large due to the thick portion 50k when the weight is reduced. And is provided. Also,
As a result, in the valve plate thinned by weight reduction, it is possible to prevent a decrease in the strength of the valve plate by providing a thick portion having a diameter dimension Rk in the above range. At the same time, the distribution state of stress in the circumferential direction can be made uniform in the circumferential direction of the valve plate 50d to improve the sealing property.

In the present embodiment, the weight of the movable valve plate portion 50 can be reduced by the outer peripheral groove 56, and the sliding seal packing (sliding) as a plate sliding seal portion on the opening side of the peripheral groove 59 with respect to the outer peripheral groove 56. Since the moving seal member) 52 is provided, the influence of stress due to the differential pressure can be reduced.
Here, the outer peripheral groove 56 can be excavated from the outer peripheral surface of the outer peripheral wall 59b to reduce the weight so as not to come into contact with the sliding seal packing (sliding seal member) 52. In the partition valve 100 having a diameter of about 22 inches, the weight of the valve body 5 can be reduced by about 0.5 to 1 kg only by providing the outer peripheral groove 56 having a width of about 5 mm and a depth of about 5 mm.

In the movable valve plate portion 50 of the present embodiment, the counter cushion (seal member) 51, the sliding seal packing (sliding seal member) 52, and the valve frame seal packing 61 are positioned so as to overlap each other in the flow path H direction. These are arranged at a radial outer position of the movable valve plate portion 50 with respect to the peripheral groove 59 when viewed in the flow path H direction.
As a result, when the center of the valve plate 50d is deformed into a concave shape or a convex shape due to the differential pressure in the flow path H direction, the deformation of the valve plate 50d is the sealing state of the sealing members 51, 52, 61 and the like. It is possible to reduce the influence on.

In the present embodiment, in the movable valve plate portion 50, the connection position of the valve plate 50d with respect to the inner peripheral crank portion 50c is closer to the opening side of the peripheral groove 59 than the bottom portion 59c of the peripheral groove 59, or the circumference. The position is set closer to the opening side of the peripheral groove 59 than the intermediate position in the depth direction of the groove 59, but the position is not limited to these. For example, the connection position of the valve plate 50d can be set at the opening end position of the peripheral groove 59.

Hereinafter, a second embodiment of the partition valve according to the present invention will be described with reference to the drawings.
FIG. 12 is a top view of the movable valve plate portion of the partition valve according to the present embodiment as viewed in the direction along the flow path.
FIG. 13 is an enlarged cross-sectional view of the partition valve according to the present embodiment in the direction along the flow path showing the vicinity of the peripheral groove.
In this embodiment, what is different from the above-mentioned first embodiment is the number of peripheral grooves, and the other configurations corresponding to the above-mentioned first embodiment are designated by the same reference numerals and the description thereof will be described. Omit.

In this embodiment, as shown in FIGS. 12 and 13, the inner peripheral groove 59A is further described on the center O side of the peripheral groove 59 in the inner peripheral crank portion 50c.
The inner peripheral groove 59A is provided in the inner peripheral crank portion 50c so that the side opposite to the peripheral groove 59 in the flow path H direction opens.
Therefore, the width dimension of the inner peripheral crank portion 50c is larger than that of the first embodiment by the amount that the inner peripheral groove 59A is provided.
The inner peripheral groove 59A can be continuous with the total length in the circumferential direction of the movable valve plate portion 50.

The outer peripheral wall 59Ab in the inner peripheral groove 59A is also used as the radial inner side of the inner peripheral wall 59a of the peripheral groove 59.
A bottom portion 59Ac is provided around the inner peripheral groove 59A on the side of the second opening 12b in the flow path H direction inside the outer peripheral wall 59Ab in the radial direction. The bottom portion 59Ac is formed substantially parallel to the bottom portion 59c and the valve plate 50d.

An inner peripheral wall 59Aa is provided around the inside of the bottom portion 59Ac in the radial direction.
The inner peripheral wall 59Aa is formed in a cylindrical shape parallel to the inner peripheral wall 59a or the outer peripheral wall 59Ab and the outer peripheral wall 59b.
The outer peripheral wall 59b, the inner peripheral wall 59a (outer peripheral wall 59Ab), and the inner peripheral wall 59Aa extend in the flow path H direction.

The inner peripheral wall 59a (outer peripheral wall 59Ab) and the inner peripheral wall 59Aa may be set to have substantially the same width dimension in the radial direction.
The width dimension of the inner peripheral groove 59A, that is, the dimension in the radial direction of the movable valve plate portion 50 is set to be substantially equal to the width dimension Rn of the peripheral groove 59.

The inner peripheral groove 59A is provided with a curved portion 59Ad that bends and connects the surface (bottom surface) of the bottom portion 59Ac and the surface (side surface) of the inner peripheral wall 59Aa.
The inner peripheral groove 59A is provided with a curved portion 59Ae that bends and connects the surface (bottom surface) of the bottom portion 59Ac and the surface (side surface) of the outer peripheral wall 59Ab.

Further, in the present embodiment, the position where the edge portion of the valve plate 50d is connected to the inner peripheral crank portion 50c is closer to the opening end side of the inner peripheral groove 59A than the central position of the inner peripheral crank portion 50c in the flow path H direction. Can be the position.

The position where the inner peripheral wall 59Aa and the valve plate 50d are connected is the flow path in the inner peripheral crank portion 50c from the end position of the inner peripheral wall 59Aa on the second opening 12b side in the flow path H direction. It can be appropriately set up to the center position in the H direction.

In the present embodiment, the position where the inner peripheral wall 59Aa and the valve plate 50d are connected is the inner peripheral wall 59Aa which is on the second opening 12b side of the center position of the inner peripheral crank portion 50c in the flow path H direction. It can be set to a position close to the end side.

The case where the differential pressure in the flow path H direction is generated in the present embodiment will be described.

For example, consider the case where the valve body is in the valve closed position and a differential pressure is generated in the opposite direction in the flow path H direction.
Due to the differential pressure generated in the flow path H direction, the deformation pressure acts in the movable valve plate portion 50 in the direction in which the center O of the valve plate 50d is deformed into a concave shape (convex shape), and the center O of the valve plate 50d is concave. That is, it is curved so as to project downward in the flow path H direction. At the same time, the peripheral portion of the valve plate 50d is inclined so that the center side in the radial direction is lower than the outer side in the radial direction.

The tilt deformation of the peripheral edge of the valve plate 50d tilts the inner peripheral wall 59Aa in the same direction. That is, the inner peripheral wall 59Aa is inclined following the inclination formed by the peripheral edge of the valve plate 50d. The opening side of the lower end of the inner peripheral wall 59Aa is inclined outward in the radial direction with respect to the bottom portion 59Ac side of the upper end.
Following the inclination of the inner peripheral wall 59Aa, the bottom portion 59Ac is also deformed in the inner peripheral groove 59A. The bottom portion 59Ac is radially inward connected to the inner peripheral wall 59Aa, and the radial outer side connected to the outer peripheral wall 59Ab (inner peripheral wall 59a) is inclined upward in the flow path H direction.

The tilt deformation of the bottom portion 59Ac tilts the inner peripheral wall 59a in the same direction. That is, the inner peripheral wall 59a is inclined following the inclination formed by the bottom portion 59Ac. The inner peripheral wall 59a is inclined outward in the radial direction with respect to the bottom portion 59ac side at the upper end and the bottom portion 59c side at the lower end.
Following the inclination of the inner peripheral wall 59a, the bottom portion 59c is also deformed in the peripheral groove 59. In the bottom portion 59c, the radial outer side connected to the outer peripheral wall 59b is inclined upward in the flow path H direction with respect to the radial inner side connected to the inner peripheral wall 59a.

Here, the deformation of the inner peripheral wall 59Aa is smaller than the deformation of the valve plate 50d.
The deformation of the bottom 59Ac is smaller than the deformation of the inner wall 59Aa.
The deformation of the inner peripheral wall 59a is smaller than the deformation of the bottom portion 59Ac.
The deformation of the bottom 59c is smaller than the deformation of the inner peripheral wall 59a.
The deformation stress of the valve plate 50d can be prevented from being transmitted to the outer peripheral wall 59b due to the inclination / deformation of the inner peripheral wall 59Aa, the bottom portion 59Ac, the inner peripheral wall 59a, and the bottom portion 59c.

In this way, when a differential pressure of reverse pressure is generated in the flow path H direction, the inner peripheral groove 59A and the peripheral groove 59 allow the sliding surface 50b, which is a plate sliding seal portion at the outer peripheral position of the outer peripheral wall 59b, to slide. The dynamic seal packing (sliding seal member) 52 and the valve frame seal packing 61 are not tilted or deformed.
Therefore, the sealed state of the partition valve 100 can be maintained.

Also in this embodiment, when suppressing the stress due to the differential pressure in the flow path H direction, the curved portions 59Ad and 59Ae of the inner peripheral groove 59A avoid stress concentration in the vicinity of the inner peripheral groove 59A of the inner peripheral crank portion 50c. , Prevents deformation, etc.

In the present embodiment, the width dimension of the inner peripheral groove 59A is added to the peripheral groove 59 to increase the width dimension of the inner peripheral crank portion 50c, so that the strength and weight of the movable valve plate portion 50 can be further reduced. It becomes.

In the present embodiment, the width dimension of the inner peripheral groove 59A may be added to the peripheral groove 59 to further reduce the diameter dimension of the valve plate 50d to reduce the stress acting from the differential pressure in the flow path H direction. it can.

In the present embodiment, the capacity of the inner peripheral groove 59A is added to the peripheral groove 59, so that the weight can be further reduced.

In the present embodiment, the inner peripheral groove 59A can be added to the peripheral groove 59 to absorb the deformation and inclination, and the seal resistance can be further improved.
Further, in the present embodiment, in addition to the peripheral groove 59 divided in the circumferential direction by the urging portion hole 58, the inner peripheral groove 59A arranged on the entire circumference absorbs the deformation / inclination, further further. It is possible to improve the seal resistance.
This makes it possible to cope with further increase in diameter.

In the present embodiment, the peripheral groove 59 opens to the first opening 12a side and the inner peripheral groove 59A opens to the second opening 12b side, but the peripheral groove 59 opens to the second opening 12b side. It is also possible to have a configuration in which the inner peripheral groove 59A is opened to the side of the first opening 12a.
Further, in addition to the peripheral groove 59 and the inner peripheral groove 59A, it is possible to provide three or more peripheral grooves.

Further, in the present embodiment, the connection position of the valve plate 50d with respect to the inner peripheral crank portion 50c in the movable valve plate portion 50 is set to a position closer to the opening side of the inner peripheral groove 59A than the bottom portion 59Ac of the inner peripheral groove 59A. However, it is not limited to this. For example, the connection position of the valve plate 50d can be set to the opening end position of the inner peripheral groove 59A.
That is, when a plurality of peripheral grooves are provided, the connection position between the inner peripheral crank portion 50c and the valve plate 50d in the flow path H direction is the opening in the peripheral groove closest to the connection position of the valve plate 50d in the radial direction. It is preferable to set it on the side.

The present invention is a partition valve for switching between a state in which a flow path connecting two spaces having different properties such as a degree of vacuum, a temperature, and a gas atmosphere in a vacuum device or the like is connected and a state in which the partition state is opened. Widely applicable to.

5 ... Valve body 10 ... Valve box 11 ... Hollow portion 12a ... First opening 12b ... Second opening 20 ... Rotating shaft 21 ... Rotating drive unit 30 ... Neutral valve portion 30a ... Circular portion 30b ... Rotating portion 40 ... Movable valve Part 50 ... Movable valve plate part 50b ... Sliding surface (plate sliding seal part)
50c ... Inner circumference crank part 50d ... Valve plate 50k ... Thick part 51 ... Counter cushion (seal member)
51m, 52m ... Groove 52 ... Sliding seal packing (sliding seal member; plate sliding seal part)
56 ... Outer groove 58 ... Biasing hole 58g ... Hole 59 ... Circumferential groove 59A ... Inner peripheral groove 59a, 59Aa ... Inner peripheral wall 59b, 59Ab ... Outer wall 59c, 59Ac ... Bottom 59d, 59e, 59Ad, 59Ae ... 60 ... Movable valve frame portion 60b ... Sliding surface 60c ... Outer crank portion 60d ... Inner frame plate 60e ... Outer frame plate 61 ... Valve frame seal packing (seal member)
70 ... Valve box urging part (pressing cylinder)
71 ... Hydraulic drive unit (fixed unit)
72 ... Telescopic rod (moving part)
80 ... Valve plate urging part (holding spring)
90 ... Valve frame urging part (auxiliary spring)
100 ... Partition valve 700 ... Hydraulic drive means (drive unit)
O ... center

Claims (12)

A partition valve that partitions the flow path
A valve box having a first opening and a second opening that are inserted into the flow path and communicate with each other to form the flow path.
A valve body located in the hollow portion of the valve box and capable of opening and closing the flow path,
A rotating shaft that rotatably supports the valve body between the retracted position and the valve opening shielding position in the hollow portion and has an axis extending in the flow path direction.
A rotary drive unit capable of rotationally driving the valve body and
A neutral valve portion that connects the valve body to the rotating shaft,
A movable valve frame portion provided on the valve body so that the position can be moved in the flow path direction with respect to the neutral valve portion.
A valve frame urging portion that connects the neutral valve portion and the movable valve frame portion,
A movable valve plate portion provided on the valve body so that the position can be moved in the flow path direction via the plate sliding seal portion with respect to the movable valve frame portion.
A valve plate urging portion that connects the movable valve frame portion and the movable valve plate portion,
A valve box urging portion provided in the valve box and capable of moving the movable valve frame portion at the valve opening shielding position toward a valve closing position in contact with the peripheral edge of the first opening.
A drive unit that drives the valve box urging unit and
Equipped with
An inner peripheral crank portion having the plate sliding seal portion at the outer peripheral position is provided on the entire circumference of the edge portion of the movable valve plate portion.
A partition valve characterized in that a peripheral groove having a depth in the flow path direction is provided in the circumferential direction of the inner peripheral crank portion. A plurality of the valve plate urging portions are provided on the edge portion of the movable valve plate portion, and the peripheral groove is provided between the plurality of valve plate urging portions in the circumferential direction on the outer edge of the movable valve plate portion. The partition valve according to claim 1, wherein the partition valve is characterized in that. The partition valve according to claim 1 or 2, wherein the peripheral groove is provided with a curved portion that is curved and connected between the bottom surface and the side surface. The radius of curvature Rm of the curved portion in the peripheral groove is relative to the diameter dimension R1 of the first opening.
0.01 ≤ Rm / R1 ≤ 0.02
The partition valve according to claim 3, wherein the partition valve is set so as to fall within the range of. The width dimension Rn of the peripheral groove in the radial direction of the movable valve plate portion is relative to the diameter dimension R1 of the first opening.
0.03 ≤ Rn / R1 ≤ 0.04
The partition valve according to any one of claims 1 to 4, wherein the partition valve is set so as to fall within the range of. In the inner peripheral crank portion, the width dimension of the outer peripheral wall of the peripheral groove in the radial direction of the movable valve plate portion is set to be larger than the width dimension of the inner peripheral wall of the peripheral groove in the radial direction of the movable valve plate portion. The partition valve according to any one of claims 1 to 5, wherein the partition valve is characterized in that. The claim is characterized in that, in the movable valve plate portion, a thick portion having a thickness dimension larger than the radial outer side of the valve plate is provided at the center position of the valve plate on the center side of the inner peripheral crank portion. Item 6. The partition valve according to any one of Items 1 to 6. The diameter dimension Rk of the thick portion is relative to the diameter dimension R1 of the first opening.
0.36 ≤ Rk / R1 ≤ 0.55
7. The partition valve according to claim 7, wherein the partition valve is set so as to fall within the range of. In the movable valve plate portion, the inner peripheral crank portion and the valve plate on the center side of the inner peripheral crank portion are connected at a position closer to the opening side of the peripheral groove than the bottom portion of the peripheral groove. The partition valve according to any one of claims 1 to 8, wherein the partition valve is characterized. On the outer peripheral surface of the inner peripheral crank portion, a sliding seal member that slidably contacts the movable valve frame portion is provided as the plate sliding seal portion, and an outer peripheral groove that does not contact the sliding seal member is provided. Provided,
The partition valve according to any one of claims 1 to 9, wherein the partition valve is characterized in that. The partition valve according to claim 10, wherein the sliding seal member is provided at a position closer to the opening side of the peripheral groove than the outer peripheral groove. In the movable valve plate portion, the movable valve frame portion contacts the first opening at the valve opening shielding position, and the first opening to the second opening are more than the urging force of the valve plate urging portion. A feature is that a seal member that comes into contact with the peripheral edge of the second opening is provided at a radial outer position of the movable valve plate portion with respect to the peripheral groove when the flow path pressure toward the portion increases. The partition valve according to any one of claims 1 to 11.

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