JP2020160730A - Flow rate control unit for temperature adjustment - Google Patents

Abstract

To provide a small-sized flow rate control unit for temperature adjustment capable of reducing a piping space.SOLUTION: A flow rate control unit for temperature adjustment (1) comprises a main fluid input pipe (3) to which a main fluid is input, a main fluid output pipe (4) which outputs the main fluid, a pump (14) which controls a flow rate of the main fluid output from the main fluid output pipe, a low-temperature fluid input pipe (5) to which a low-temperature fluid at first temperature is input, a high-temperature fluid input pipe (7) to which a high-temperature fluid at higher temperature than the first temperature is input, and a fluid control section (24) which controls temperature of the main fluid to be a predetermined temperature by mixing the main fluid input to the main fluid input pipe (3), the low-temperature fluid input to the low-temperature fluid input pipe (5) and the high-temperature fluid input to the high-temperature fluid input pipe (7) and then outputs the controlled main fluid to the main fluid output pipe (4), which are integrally arranged and covered by a housing (2).SELECTED DRAWING: Figure 6

Description

The present invention relates to a flow rate adjusting unit for temperature adjustment.

For example, in a RIE (Reactive Ion Etching) type plasma processing apparatus used for manufacturing semiconductors, a wafer is placed on a susceptor provided in a processing container, and the temperature of the wafer is controlled to a predetermined temperature via the susceptor. In this state, etching processing is performed.

Conventionally, the susceptor controls the surface temperature of the susceptor by adjusting the temperature of the temperature control fluid flowing in the susceptor by using a heater and a chiller unit provided in the susceptor. However, when the temperature of the temperature control fluid is lowered, it takes time to adjust the temperature because it depends on the cooling performance of the chiller unit.

Therefore, Patent Document 1 describes a low-temperature flow path for flowing a low-temperature fluid from a low-temperature temperature control unit that stores a liquid at the first temperature and a liquid having a second temperature higher than the first temperature in a bypass flow path for circulating the fluid. A confluence is provided by connecting to a high-temperature flow path through which a high-temperature fluid flows from a high-temperature temperature control unit that stores The technology is disclosed. In this technology, the temperature of the fluid circulating in the susceptor is stabilized by controlling the valve opening of the variable valve so as to make the merging flow rate flowing from the merging part to the susceptor uniform and adjusting the flow rate distribution ratio of the three flow paths. In addition, the susceptor can be instantly cooled or heated to an arbitrary set temperature.

The technique described in Patent Document 1 includes a bypass flow path, a low temperature flow path, and a branch portion for dividing the fluid flowing through the susceptor into the high temperature flow path, and a check valve is provided on the downstream side of the branch portion. Each is arranged. As a result, the fluid flowing through the susceptor is divided into the bypass flow path, the low temperature flow path, and the high temperature flow path according to the valve opening of the variable valve, and circulates in the bypass flow path or the low temperature temperature. It is returned to the adjustment unit and high temperature temperature adjustment unit.

Japanese Patent No. 5912439

However, the above-mentioned prior art has the following problems. That is, in the technique described in Patent Document 1, since the variable valve and the check valve for adjusting the flow rate of the fluid supplied to the susceptor are not integrated, the piping space for the flow rate control is increased.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a compact flow rate control unit for temperature control that can reduce the piping space.

One aspect of the present invention has the following configuration. (1) A main fluid input pipe for inputting the main fluid, a main fluid output pipe for outputting the main fluid, a pump for controlling the flow rate of the main fluid output from the main fluid output pipe, and a first temperature. A low-temperature fluid input pipe for inputting a low-temperature fluid, a high-temperature fluid input pipe for inputting a high-temperature fluid higher than the first temperature, the main fluid input to the main fluid input pipe, and an input to the low-temperature fluid input pipe. By mixing the low temperature fluid and the high temperature fluid input to the high temperature fluid input pipe, the temperature of the main fluid is controlled to a predetermined temperature, and the fluid control unit and the housing are output to the main fluid output pipe. The main fluid input pipe, the main fluid output pipe, the pump, the low temperature fluid input pipe, the high temperature fluid input pipe, and the fluid control unit are integrated and arranged and covered with the housing. It is characterized by.

According to the temperature control flow control unit having the above configuration, the main fluid input pipe, the main fluid output pipe, the pump, the low temperature fluid input pipe, the high temperature fluid input pipe, and the fluid control unit are integrated and provided inside the housing, and the flow path is provided. Since the length is shortened, the piping space is reduced and the unit size can be made compact.

(2) In the temperature adjusting flow control unit according to (1), the fluid control unit has a spool device for adjusting the flow rate distribution ratio between the main fluid, the low temperature fluid, and the high temperature fluid, and the low temperature. It is preferable that the first filter is arranged in the fluid input pipe, the second filter is arranged in the high temperature fluid input pipe, and the third filter is arranged in the main fluid input pipe.

In the temperature control flow rate control unit having the above configuration, the first to third filters provided in the unit remove foreign matter from the fluid supplied to the spool device, so that the spool device may malfunction or malfunction due to foreign matter being caught. It can be suppressed from occurring. Further, it is not necessary to install a filter outside the unit, and the space for piping connected to the unit can be reduced.

(3) The temperature control flow control unit according to (1) has a low-temperature fluid output pipe for outputting the low-temperature fluid and a high-temperature fluid output pipe for outputting the high-temperature fluid. A diversion block connected to the main fluid input pipe to divert the main fluid into the first diversion flow path, the second diversion flow path, and the third diversion flow path, the main fluid, the low temperature fluid, and the high temperature fluid. A spool device that adjusts the flow rate distribution ratio of the fluid, a merging block that is coupled to the spool device and the main fluid output pipe, merges the fluid discharged from the spool device, and supplies the fluid to the main fluid output pipe, and the spool. It has a first flow path block, a second flow path block, and a third flow path block that are coupled to the apparatus and the diversion block, and the first flow path block has the first diversion flow path as described above. Having a main fluid supply flow path communicating with the spool device and a first check valve arranged in the main fluid supply flow path to prevent the main fluid from flowing back to the first diversion flow path side. The second flow path block includes a low temperature fluid supply flow path for communicating the low temperature fluid input pipe and the spool device, and a low temperature fluid discharge flow path for communicating the second diversion flow path with the low temperature fluid output pipe. The low-temperature fluid bypass flow path that communicates the low-temperature fluid supply flow path and the low-temperature fluid discharge flow path, and the low-temperature fluid discharge flow path are arranged so that the main fluid flows back to the second diversion flow path side. Having a second check valve to prevent, the third flow path block has a high temperature fluid supply flow path for communicating the high temperature fluid input pipe and the spool device, and the high temperature fluid for the third diversion flow path. The high-temperature fluid discharge flow path communicating with the output pipe, the high-temperature fluid bypass flow path communicating with the high-temperature fluid supply flow path and the high-temperature fluid discharge flow path, and the high-temperature fluid discharge flow path are arranged in the main. It is preferable to have a third check valve that prevents the fluid from flowing back to the third diversion flow path side.

According to the temperature control flow rate control unit having the above configuration, the spool device, the first to third flow path blocks, the divergence block, and the merging block are combined to integrate and arrange the spool device and the first to third check valves. Since the flow path is shortened, the piping space can be reduced and the unit size can be made compact.

(4) In the temperature control flow rate control unit described in (3), the temperature adjusting flow rate control unit is detachably attached to the second flow path block and is arranged at a connection portion between the low temperature fluid supply flow path and the low temperature fluid input pipe. The first filter block is detachably attached to the third flow path block, and the second filter block is arranged at a connection portion between the high temperature fluid supply flow path and the high temperature fluid input pipe. , Are preferred.

In the flow rate control unit for temperature adjustment having the above configuration, the first filter block removes foreign matter from the low temperature fluid supplied to the spool device, and the second filter block removes foreign matter from the high temperature fluid supplied to the spool device. It is possible to prevent the spool device from malfunctioning or malfunctioning due to the biting of foreign matter. Further, since the first filter block is detachably attached to the second flow path block and the second filter block is detachably attached to the third flow path block, maintenance of the first filter block and the second filter block is maintained. Good sex. Further, since it is not necessary to install a filter outside the unit 1, the space of the piping connected to the unit can be reduced.

(5) In the temperature control flow control unit according to (3) or (4), the main fluid input pipe is provided inside the first main fluid input pipe arranged outside the housing and inside the housing. Having a second main fluid input pipe to be arranged, a third filter block is arranged between the first main fluid input pipe and the second main fluid input pipe, and the third filter block is arranged. It is preferably held in the housing.

According to the temperature control flow rate control unit having the above configuration, the third filter block removes foreign matter from the main fluid supplied to the pump and the spool device, so that the pump and the spool device malfunction or malfunction due to the foreign matter being caught. Can be suppressed. Further, the temperature adjusting flow rate control unit can easily maintain the third filter block from the outside of the housing only by removing the first main fluid input pipe from the third filter block.

(6) In the temperature control flow control unit according to any one of (1) to (5), the main fluid input pipe and the main are controlled by the control target provided inside the processing container of the semiconductor manufacturing apparatus. The fluid output pipe is connected and arranged near the controlled object, and the low temperature fluid input pipe and the high temperature fluid input pipe are connected to a chiller unit that controls and circulates the temperature of the fluid. , Are preferred.

Since the temperature control flow rate control unit having the above configuration is arranged near the control target, the temperature of the control target can be controlled with good responsiveness.

According to the present invention, it is possible to realize a compact flow rate control unit for temperature control that can reduce the piping space.

It is a circuit diagram of the flow rate control unit for temperature adjustment which concerns on embodiment of this invention. It is a front view of the flow rate control unit for temperature adjustment. It is a figure which looked at the flow rate control unit for temperature adjustment shown in FIG. 2 from the right direction in the figure. It is external perspective view of the flow rate control unit for temperature adjustment. It is a figure which shows the internal structure of the flow rate control unit for temperature adjustment. It is a figure which shows the internal structure of the flow rate control unit for temperature adjustment. It is a figure which shows the internal structure of the flow rate control unit for temperature adjustment. It is a figure which shows the internal structure of the flow rate control unit for temperature adjustment. It is a figure which shows the internal structure of the flow rate control unit for temperature adjustment. 9 is a cross-sectional view taken along the line AA of FIG. 9 is a cross-sectional view taken along the line BB of FIG. 9 is a cross-sectional view taken along the line CC of FIG. 9 is a cross-sectional view taken along the line EE of FIG. 9 is a cross-sectional view taken along the line DD of FIG. It is an exploded view of the 1st filter. It is a figure which shows the peripheral structure of a pump. FIG. 16 is an enlarged cross-sectional view taken along the line G of FIG. It is external perspective view of the heat radiation fin for low temperature piping.

Hereinafter, embodiments of the flow rate control unit for temperature control according to the present invention will be described with reference to the drawings.

(Outline configuration)
FIG. 1 is a circuit diagram of a flow rate control unit 1 for temperature adjustment (hereinafter, also referred to as “unit 1”) according to an embodiment of the present invention. The unit 1 of this embodiment is used, for example, in a temperature control system 1001 that controls the temperature of the semiconductor manufacturing apparatus 1000.

The semiconductor manufacturing apparatus 1000 of this embodiment is configured as a RIE (Reactive Ion Etching) type plasma processing apparatus. In the semiconductor manufacturing apparatus 1000, a wafer W is placed on a susceptor 1002 arranged in a processing container (not shown), and the wafer W controlled at a predetermined temperature is subjected to an etching process. The susceptor 1002 is an example of a controlled object.

The temperature of the wafer W is generally controlled according to the processing content. Therefore, the semiconductor manufacturing apparatus 1000 controls the temperature of the wafer W by uniformly heating the wafer W by controlling the temperature of the susceptor 1002 using the temperature control system 1001. The temperature control system 1001 includes a temperature control unit 1003 (hereinafter abbreviated as "temperature control unit 1003"), a unit 1, a chiller unit 1004, and a control device 1030.

The temperature control unit 1003 is provided inside the susceptor 1002, and circulates the temperature control fluid in the susceptor 1002. The temperature control fluid is a fluorine-based inert fluid with little change in physical properties over a wide temperature range. The temperature control fluid is, for example, Fluorinert manufactured by 3M. The temperature control fluid is an example of the main fluid.

The chiller unit 1004 includes a cold chiller 1020 and a hot chiller 1010. The cold chiller 1020 circulates a cold fluid controlled to a first temperature T1. The circulation pressure of the cold fluid is controlled by the cold side control valve 1023. Further, the hot chiller 1010 circulates a high temperature fluid controlled to a second temperature T2 higher than the first temperature T1. The circulation pressure of the high temperature fluid is controlled by the high temperature side control valve 1013. For example, the first temperature T1 is set lower than the set temperature T3 when controlling the temperature of the temperature control fluid, and the second temperature T2 is set higher than the set temperature T3 when controlling the temperature of the temperature control fluid.

The unit 1 includes a first input pipe 3, a first output pipe 4, a second input pipe 5, a second output pipe 6, a third input pipe 7, a third output pipe 8, a pump 14, and the like. A fluid control unit 24 is provided. The first input pipe 3 is an example of a main fluid input pipe. The first output pipe 4 is an example of a main fluid output pipe. The second input pipe 5 is an example of a low temperature fluid input pipe. The second output pipe 6 is an example of a low temperature fluid output pipe. The third input pipe 7 is an example of a high temperature fluid input pipe. The third output pipe 8 is an example of a high temperature fluid output pipe.

In the first input pipe 3, a third filter block 43, a buffer tank 12, a pump 14, and a third temperature sensor 63 are arranged in this order from the upstream side. The third filter block 43 is an example of the third filter. A fourth temperature sensor 64 and a flow rate sensor 23 are arranged in the first output pipe 4 in order from the upstream side. The fluid control unit 24 is connected to the temperature control unit 1003 via the first input pipe 3 and the first output pipe 4, and as shown in D1 in the figure, the temperature control fluid is connected to the temperature control unit 1003 and the fluid control unit 24. Circulate between.

A first filter block 41 is arranged in the second input pipe 5. The first filter block 41 is an example of the first filter. The fluid control unit 24 is connected to the cold chiller 1020 via the second input pipe 5 and the second output pipe 6, and as shown in D2 in the figure, the low temperature fluid flows into the fluid control unit 24. The temperature and pressure of the low-temperature fluid flowing into the fluid control unit 24 are measured by the first temperature sensor 61 and the first pressure sensor 51.

A second filter block 42 is arranged in the third input pipe 7. The second filter block 42 is an example of the second filter. The fluid control unit 24 is connected to the hot chiller 1010 via the third input pipe 7 and the third output pipe 8, and as shown in D3 in the drawing, the high temperature fluid flows into the fluid control unit 24. The temperature and pressure of the high temperature fluid flowing into the fluid control unit 24 are measured by the second temperature sensor 62 and the second pressure sensor 52.

The fluid control unit 24 includes a branch unit X, a first check valve 25, a second check valve 26, a third check valve 27, a spool device 21, and a confluence unit Y.

The branch portion X branches the first input pipe 3 into the first branch line L11, the second branch line L12, and the third branch line L13. The first branch line L11 is connected to the spool device 21 and is provided with a first check valve 25. The second branch line L12 is connected to the second output pipe 6 and is provided with a second check valve 26. Further, the third branch line L13 is connected to the third output pipe 8 and a third check valve 27 is arranged.

In the spool device 21, the spool 217 moves according to the driving force of the drive unit 211, so that the temperature control fluid input to the first input pipe 3 and the low temperature fluid input to the second input pipe 5 and the third input The flow rate distribution ratio with the high temperature fluid input to the pipe 7 is adjusted and output to the confluence portion Y. The confluence portion Y is connected to the first output pipe 4, mixes the temperature control fluid, the low temperature fluid, and the high temperature fluid whose flow rate is adjusted by the spool device 21, and outputs the mixture to the first output pipe 4.

The valve openings of the first to third check valves 25, 26, and 27 are automatically adjusted according to the flow rate distribution ratio controlled by the spool device 21. Therefore, approximately the same amount of the temperature control fluid as the low temperature fluid and the high temperature fluid supplied to the spool device 21 is returned to the cold chiller 1020 and the hot chiller 1010.

The unit 1 is communicably connected to the control device 1030 that controls the operation of the temperature control system 1001. The control device 1030 includes a control board 1031, a pump driver 1033, and a valve controller 1032.

The control board 1031 acquires the temperature measurement values measured by the first to fourth temperature sensors 61, 62, 63, 64 and the pressure measurement values measured by the first and second pressure sensors 51, 52 from the unit 1. A valve operation signal is generated so as to control the temperature of the temperature control fluid to a desired set temperature T3, and is transmitted to the unit 1 via the valve controller 1032. In the unit 1, the flow rate distribution ratio of the temperature control fluid, the low temperature fluid, and the high temperature fluid is adjusted by the spool device 21 operating according to the valve operation signal, and the temperature of the temperature control fluid is adjusted to the set temperature T3. Therefore, the temperature of the temperature control fluid is feedback-controlled and made uniform.

Further, the control board 1031 acquires the flow rate measurement value measured by the flow rate sensor 23 from the unit 1, generates a pump operation signal so as to control the flow rate of the temperature control fluid to a desired set flow rate, and uses the pump driver 1033. It is transmitted to the unit 1 via. The unit 1 adjusts the flow rate of the temperature control fluid to the set flow rate by operating the pump 14 according to the pump operation signal. Therefore, the circulation flow rate of the temperature control fluid is feedback-controlled and made uniform.

(Specific configuration of unit 1)
FIG. 2 is a front view of the unit 1. FIG. 3 is a view of the unit 1 shown in FIG. 2 as viewed from the right side in the drawing. FIG. 4 is an external perspective view of the unit 1. The appearance of the unit 1 is configured by the housing 2. The housing 2 is formed into a horizontally long rectangular parallelepiped shape by connecting the upper surface 2A, the lower surface 2B, the first side surface 2C, the second side surface 2D, the third side surface 2E, and the fourth side surface 2F with bolts. is there.

As shown in FIG. 4, in the unit 1, the ends of the first input pipe 3 and the first output pipe 4 penetrate the first side surface 2C and project to the outside of the housing 2, and the temperature is controlled through a joint (not shown). It can be connected to the first coupling pipe 1005 and the second coupling pipe 1006 (see FIG. 1) of the unit 1003. Further, in the unit 1, the ends of the second input pipe 5 and the second output pipe 6 penetrate the first side surface 2C and project to the outside of the housing 2, and the cold chiller 1020 goes to the cold side through a joint (not shown). It can be connected to the pipe 1022 and the cold side return pipe 1021 (see FIG. 1).

Further, as shown in FIG. 3, in the unit 1, the ends of the third input pipe 7 and the third output pipe 8 penetrate the third side surface 2E and project to the outside of the housing 2, and the unit 1 has a joint (not shown). The hot chiller 1010 can be connected to the hot side forward pipe 1012 and the hot side return pipe 1011 (see FIG. 1). The first to third input pipes 3, 5 and 7 and the first to third output pipes 4, 6 and 8 are provided with a heat insulating holder 36 between the first and third input pipes 3, 5 and 7 so as not to transfer heat to the housing 2. Has been made. A connector box 11 for electrically connecting an external device to the unit 1 is provided on the third side surface 2E.

5 and 9 are views showing the internal structure of the unit 1. FIG. 5 is a perspective view of the housing 2 with the upper surface 2A, the second side surface 2D, and the fourth side surface 2F removed. FIG. 6 is a diagram in which the heat insulating covers 31 and 39 shown in FIG. 5 are omitted. 7 is a perspective view of FIG. 6 as viewed from the front side, and FIG. 8 is a view of FIG. 6 as viewed from the upper surface side. FIG. 9 is a view of FIG. 5 as viewed from the back side. FIG. 10 is a cross-sectional view taken along the line AA of FIG. FIG. 11 is a cross-sectional view taken along the line BB of FIG. FIG. 12 is a cross-sectional view taken along the line CC of FIG. FIG. 13 is a cross-sectional view taken along the line EE of FIG. FIG. 14 is a cross-sectional view taken along the line DD of FIG.

As shown in FIGS. 5 and 6, inside the housing 2, the first input pipe 3, the buffer tank 12, the pump 14, the first flow path block 18, the second flow path block 19, and the third flow path block 20 , Spool device 21, 1st output pipe 4, 2nd input pipe 5, 2nd output pipe 6, 3rd input pipe 7, 3rd output pipe 8 and other parts used to control the flow rate and temperature of the temperature control fluid are integrated. Have been placed.

As shown in FIGS. 6 to 9, the first input pipe 3 includes a flange pipe 3A, a horizontal pipe 3B, a vertical pipe 3C, and a connecting pipe 3D in this order from the upstream side. The flange pipe 3A is an example of the first main fluid input pipe, and the horizontal pipe 3B is an example of the second main fluid input pipe.

As shown in FIG. 14, in the first input pipe 3, the flange pipe 3A arranged outside the housing 2 and the horizontal pipe 3B arranged inside the housing 2 are connected via the third filter block 43. Has been done. The third filter block 43 is a third filter body 431 in which a third element member 432 is housed.

In the third filter block 43, the third filter body 431 is integrally attached to the right end portion of the horizontal pipe 3B in the drawing, and a fixing screw (not shown) inserted through the flange pipe 3A is fastened to the third filter body 431. , The third element member 432 is sandwiched between the third filter body 431 and the flange pipe 3A.

As shown in FIG. 7, the horizontal pipe 3B is coupled to the side surface of the buffer tank 12 arranged near the first side surface 2C.

As shown in FIG. 6, the pump 14 is arranged below the buffer tank 12, the second input pipe 5, and the second output pipe 6. The pump 14 is connected to the buffer tank 12 via a vertical pipe 3C. The pump heat dissipation fins 15 are attached to the upper surface of the pump 14 in close contact with each other, and the heat transfer area for transmitting heat generated when the temperature control fluid stored in the buffer tank 12 is pumped is expanded. The liquid level switch 13 is attached to the upper surface of the buffer tank 12 and detects whether or not the temperature control fluid required for the pumping operation of the pump 14 is in the buffer tank 12.

As shown in FIG. 7, the connecting pipe 3D connects the pump 14 and the fluid control unit 24.

As shown in FIGS. 6 and 7, the fluid control unit 24 includes a flow dividing block 16, a first flow path block 18, a second flow path block 19, a third flow path block 20, a spool device 21, and the like. It is a block assembly in which the merging block 22 is brought into surface contact with each other and joined. The diversion block 16 constitutes a branch X (see FIG. 1), and the confluence block 22 constitutes a confluence Y (see FIG. 1).

As shown in FIG. 7, the flow dividing block 16 is supported by a support base 81 fixed to the lower surface 2B of the housing 2, and a gap is formed between the flow dividing block 16 and the lower surface 2B. The connecting pipe 3D is laid using the gap, and is connected to the lower surface of the flow dividing block 16 through an opening provided in the support base 81.

In this way, in the unit 1, the buffer tank 12 and the pump 14 are arranged vertically, and the connecting pipe 3D is laid below the pump 14 and the fluid control unit 24, so that the piping space and equipment of the first input pipe 3 are provided. The installation space is small.

As shown in FIG. 13, the flow dividing block 16 is formed with a bottomed hole along the axis from the left end surface in the figure located at one end in the longitudinal direction, and the opening of the hole is airtight with a lid 165. A common flow path 161 is formed by closing in. The connecting flow path 160 is formed so as to communicate with the common flow path 161 from the lower surface of the flow dividing block 16. In the diversion block 16, the first diversion flow path 162, the second diversion flow path 163, and the third diversion flow path 164 are opened on the same side surface and communicate with the common flow path 161.

A connecting pipe 3D is connected to the lower surface of the flow dividing block 16 so as to communicate with the connecting flow path 160. The third temperature sensor 63 is attached to the diversion block 16 and measures the temperature of the temperature control fluid flowing into the common flow path 161.

As shown in FIG. 7, the spool device 21 is horizontally arranged above the flow dividing block 16. The spool device 21 is bolted to the first to third flow path blocks 18, 19, 20 and the merging block 22.

As shown in FIG. 14, since the spool device 21 is, for example, a known spool device disclosed in Japanese Patent No. 5893419, detailed description thereof will be omitted, but briefly, the spool device 21 will be described. It includes a drive unit 211, a valve body 216, a spool 217, and a sleeve 218. The drive unit 211 includes a motor 2111, a heat insulating cover 2112, a mover 2114, and a valve cap 2115.

The spool 217 is slidably loaded in the valve chamber 215 of the valve body 216. The sleeve 218 is arranged between the inner wall of the valve chamber 215 and the spool 217 to reduce the sliding resistance generated when moving in the valve chamber 215. The valve body 216 is formed so that the first supply port 213a, the second supply port 213b, and the third supply port 213c communicate with the valve chamber 215 from one side surface 216a of the facing side surfaces 216a and 216b. Further, the valve body 216 is formed so that the first discharge port 214a, the second discharge port 214b, and the third discharge port 214c communicate with the valve chamber 215 from the other side surface 216b.

The spool 217 has a recess for opening the first supply port 213a to the first discharge port 214a, a recess for opening the second supply port 213b to the second discharge port 214b, and a third supply port 213c. The discharge port 214c is provided with a recess for opening.

The spool 217 is connected to a mover 2114 in the valve cap 2115 of the drive unit 211. As the mover 2114 moves according to the change in the current of the motor 2111, the spool 217 also moves in accordance with the mover 2114. The spool device 21 opens the first supply port 213a to the first discharge port 214a and the second supply port 213b to the second discharge port 214b by moving the spool 217 in the valve chamber 215. The open area and the open area for opening the third supply port 213c to the third discharge port 214c are changed to control the flow rate (flow rate distribution ratio) of the fluid discharged from the first to third discharge ports 214a, 214b, 214c. To do. Since the motor 2111 is covered with the heat insulating cover 2112, the heat generated during operation is not easily transferred to the internal air of the housing 2.

In the spool device 21, a merging block 22 is attached to the side surface 216b of the valve body 216. The merging block 22 has a bottomed hole formed along the axis from the end face located in the axial direction, and the hole is airtightly closed by a lid having a fourth temperature sensor 64 to join the merging block 22. Road 223 is formed.

In the merging block 22, the first flow path 224a, the second flow path 224b, and the third flow path 224c are opened on the same side surface and communicate with the merging flow path 223. The merging block 22 is attached to the side surface 216b of the valve body 216 so that the first to third flow paths 224a, 224b, 224c communicate with the first to third discharge ports 214a, 214b, 214c of the spool device 21. There is. On the lower surface of the merging block 22, a connecting flow path 222 is formed so as to communicate with the merging flow path 223.

As shown in FIG. 7, a first output pipe 4 is connected to the lower surface of the merging block 22 so as to communicate with the connecting flow path 222. The fourth temperature sensor 64 is attached to the confluence block 22 and measures the temperature of the temperature control fluid flowing through the confluence flow path 223.

The first output pipe 4 connects the first pipe portion 4A and the second pipe portion 4B via the flow rate sensor 23. The second piping section 4B and the flow rate sensor 23 are laid under the fluid control section 24 (merging block 22 and spool device 21), and the first piping section 4A is laid between the buffer tank 12 and the pump 14. ing. Therefore, the unit 1 has a small piping space for the first output piping 4.

As shown in FIG. 6, the first to third flow path blocks 18, 19, and 20 are thin rectangular parallelepiped blocks, and have substantially the same external dimensions.

As shown in FIG. 8, the first flow path block 18, the second flow path block 19, and the third flow path block 20 are arranged side by side at positions opposite to the confluence block 22 with the spool device 21 interposed therebetween. There is. The first flow path block 18, the second flow path block 19, and the third flow path block 20 are erected between the valve body 216 and the diversion block 16 of the spool device 21. The first flow path block 18, the second flow path block 19, and the third flow path block 20 are arranged so that wide surfaces are adjacent to each other, and the installation area is reduced.

As shown in FIG. 11, in the first flow path block 18, the first communication hole portion 181a, the first storage hole portion 181b, the first vertical flow path portion 181c, and the purge port 181g are included in the first block main body 181. Is formed in. The first communication hole portion 181a, the first storage hole portion 181b, and the first vertical flow path portion 181c form an example of the main fluid supply flow path.

The first block main body 181 is formed with a pair of through holes arranged vertically from the left end edge in the drawing. The first communication hole portion 181a and the first storage hole portion 181b are airtight with the left opening (the opening located on the opposite side of the flow dividing block 16) of the pair of through holes in the figure by using lids 182 and 183, respectively. It is formed by closing it in. Further, in the first block main body 181, a cylindrical bottomed hole is formed from the upper surface in the drawing through the first communication hole portion 181a to the first storage hole portion 181b. The first block main body 181 has a first vertical flow path portion 181c formed by airtightly closing the opening of the bottomed hole with a lid 184.

In the first flow path block 18, the first communication hole portion 181a communicates with the first supply port 213a of the spool device 21, and the first storage hole portion 181b communicates with the first diversion flow path 162 of the diversion block 16. , It is coupled to the valve body 216 and the diversion block 16. The first storage hole portion 181b, the first vertical flow path portion 181c, and the first communication hole portion 181a form a first branch line L11 (see FIG. 1).

The first storage hole portion 181b is provided on the inner peripheral surface of the opening located on the flow dividing block 16 side in a conical shape in which the first valve seat portion 181f is reduced in diameter toward the flow dividing block 16 side. The first check valve 25 is arranged in the first storage hole portion 181b, and is urged in the direction of the first valve seat portion 181f by the first urging spring 251.

The purge port 181g is formed coaxially with the first vertical flow path portion 181c from the lower surface of the first block main body 181 and communicates with the first storage hole portion 181b. The purge port 181 g is connected to a purge mechanism 10 that supplies purge air.

As shown in FIG. 6, in the purge mechanism 10, one end of the purge pipe 100 projects to the outside of the housing 2 and is connected to a purge air supply source (not shown). The purge on-off valve 101 is arranged at a portion of the purge pipe 100 protruding from the housing 2. Since the purge pipe 100 is laid using the gap formed between the first to third flow path blocks 18, 19, 20 and the upper surface 2A of the housing 2, the purge mechanism 10 has a unit size. It can be provided in the unit 1 without increasing the size.

As shown in FIG. 12, the second flow path block 19 includes a second communication hole portion 191a, a second storage hole portion 191b, a second valve seat portion 191f, a second vertical flow path portion 191c, and a second. The check valve 26 and the lids 192 and 193 have the first communication hole portion 181a, the first storage hole portion 181b, the first valve seat portion 181f, and the first vertical flow path portion 181c of the first flow path block 18. The first check valve 25 and the lids 182 and 183 are configured in the same manner. Therefore, these explanations will be omitted.

Further, the second flow path block 19 has a low temperature fluid input flow path 191d as shown in FIG. Then, as shown in FIG. 13, the second flow path block 19 has a low temperature fluid output flow path 191e. Further, the second flow path block 19 has a low temperature fluid pressure port 191 g as shown in FIG. The second storage hole portion 191b and the low temperature fluid output flow path 191e form a second branch line L12 (see FIG. 1). The second communication hole portion 191a and the low temperature fluid input flow path 191d form an example of the low temperature fluid supply flow path. The second storage hole portion 191b and the low temperature fluid output flow path 191e form an example of the low temperature fluid discharge flow path. The second vertical flow path portion 191c constitutes an example of the low temperature fluid bypass flow path.

As shown in FIG. 14, the low-temperature fluid input flow path 191d is vertically hung from a wide surface located on the right side in the drawing of the second block main body 191 and communicates with the second communication hole portion 191a. The second input pipe 5 is connected to the second block main body 191 so as to communicate with the low temperature fluid input flow path 191d. A first filter block 41 is arranged between the second input pipe 5 and the second block main body 191.

FIG. 15 is an exploded view of the first filter block 41. The first filter block 41 is detachably attached to the second flow path block 19. The first filter block 41 is configured with the first element member 412 by winding a net-like first filter sheet 414 around the outer peripheral surface of the first shaft member 413. The first shaft member 413 includes a cylindrical portion 413a having a plurality of holes 413b, and makes it difficult for foreign matter to flow into the second flow path block 19 even if the first filter sheet 414 falls off. The first element member 412 is housed in the first filter body 411.

The first filter block 41 has a plurality of first fixing screws 415 in a state where the second block main body 191 of the second flow path block 19 and the flange portion 5A of the second input pipe 5 are in contact with the first filter body 411. Is inserted from the flange portion 5A into the first filter body 411 and fastened to the second block main body 191 to be attached to the side surface of the second flow path block 19.

As shown in FIG. 13, the low-temperature fluid output flow path 191e is vertically hung from a wide surface located on the right side in the drawing of the second block main body 191 and communicates with the second storage hole portion 191b. The second output pipe 6 is coupled to the second block main body 191 so as to communicate with the low temperature fluid output flow path 191e.

In such a second flow path block 19, the low temperature fluid input to the low temperature fluid input flow path 191d outputs the low temperature fluid through the second communication hole portion 191a, the second vertical flow path portion 191c, and the second storage hole portion 191b. It flows into the flow path 191e. Therefore, the second check valve 26 opens and closes according to the balance between the resultant force of the urging force of the second urging spring 261 and the pressure of the low temperature fluid and the pressure of the temperature controlling fluid flowing into the diversion block 16.

As shown in FIG. 12, the second flow path block 19 is formed so that the low temperature fluid pressure port 191 g communicates with the second storage hole portion 191b from the lower surface of the second block main body 191. In the second flow path block 19, a first temperature sensor 61 is provided on the lid 194, and the temperature of the low temperature fluid circulating in the second flow path block 19 is detected.

As shown in FIGS. 10, 13, and 14, in the third flow path block 20, the third block main body 201 and the lids 202, 203 and 204 are the second block main bodies 191 and the lid 192 of the second flow path block 19. , 193, 194, and so on. Further, as shown in FIGS. 14 and 15, the second filter block 42 is configured in the same manner as the first filter block 41. Therefore, specific description of the third flow path block 20 and the second filter block 42 will be omitted. The third storage hole 201b and the high-temperature fluid output flow path 201e form a third branch line L13 (see FIG. 1). The third communication hole portion 201a and the high temperature fluid input flow path 201d form an example of the high temperature fluid supply flow path. The third storage hole 201b and the high temperature fluid output flow path 201e form an example of the high temperature fluid discharge flow path. The third vertical flow path portion 201c constitutes an example of the high temperature fluid bypass flow path.

As shown in FIGS. 5 to 7, the unit 1 is provided with an electronic device inside the housing 2 in order to control the temperature and the flow rate of the temperature control fluid. The electronic devices are, for example, a first pressure sensor 51, a second pressure sensor 52, a cooling air flow rate indicator 53, a terminal block 28, and a control board 29.

As shown in FIGS. 6 and 7, the first pressure sensor 51 communicates with the low temperature fluid pressure port 191 g via the first tube 512 and measures the pressure of the low temperature fluid circulating in the second flow path block 19. indicate. The second pressure sensor 52 communicates with the high temperature fluid pressure port 201g via the second tube 522, and measures and displays the pressure of the high temperature fluid circulating in the third flow path block 20.

The terminal block 28 is connected to the connector box 11 and controls communication with an external device such as a control device 1030 (see FIG. 1). The terminal block 28 is connected to a first pressure sensor 51, a second pressure sensor 52, a first temperature sensor 61, a second temperature sensor 62, a third temperature sensor 63, a fourth temperature sensor 64, and the like. There is.

The cooling air flow rate indicator 53 shown in FIG. 7 displays the flow rate of the cooling air described later.

As shown in FIG. 6, the unit 1 collects and arranges electronic devices at a position away from the pump 14 in the rectangular parallelepiped housing 2, and the electronic devices may break down or malfunction due to the heat of the pump 14. It is prevented from doing. Specifically, as shown in FIGS. 6 and 7, the pump 14 is arranged near the first side surface 2C. On the other hand, as shown in FIGS. 2, 6 and 7, electronic devices such as the first pressure sensor 51, the second pressure sensor 52 and the cooling air flow rate indicator 53 are arranged near the third side surface 2E. ..

As shown in FIG. 5, in the third input pipe 7 and the third output pipe 8, heat insulating jackets 32 and 33 are detachably attached to portions arranged inside the housing 2, respectively. The first flow path block 18 and the third flow path block 20 are covered with the heat insulating cover 31, and the spool device 21 and the merging block 22 are covered with the heat insulating cover 39. Further, in the first input pipe 3 and the first output pipe 4, a heat insulating jacket 37 is detachably attached to a portion arranged inside the housing 2. Therefore, the heat of the high temperature fluid or the temperature control fluid is less likely to be transferred to the internal air of the housing 2, and the electronic device is less likely to malfunction or malfunction due to the heat of the high temperature fluid or the temperature control fluid.

As shown in FIGS. 6 and 8, the unit 1 includes a cooling mechanism 9 that supplies cooling air toward the pump 14 to cool the pump 14. The cooling mechanism 9 includes a cooling pipe 91, a manual valve 92, a cooling air flow meter 93, a spool-side flow control valve 94A, a pump-side flow control valve 94B, a cooling block 95, and a cooling air flow rate indicator 53. ..

The cooling pipe 91 is laid above the first to third flow path blocks 18, 19, 20. One end of the cooling pipe 91 projects outward from the third side surface 2E of the housing 2 and is connected to a cooling air supply source (not shown). The cooling pipe 91 is provided with a manual valve 92 at a portion protruding from the housing 2.

Inside the housing 2, the cooling pipe 91 is branched into a pump cooling pipe 91B that supplies cooling air to the pump 14 and a spool cooling pipe 91A that supplies cooling air to the drive unit 211 of the spool device 21.

As shown in FIG. 8, the spool cooling pipe 91A is connected to the heat insulating cover 2112 (see FIG. 14) of the drive unit 211. As shown in FIG. 14, a cooling space 2113 is formed between the heat insulating cover 2112 and the motor 2111. The heat insulating cover 2112 is provided so that a discharge hole (not shown) opens on the lower surface 2B side of the housing 2 so that cooling air flows through the cooling space 2113.

On the other hand, as shown in FIG. 8, the pump cooling pipe 91B is connected to the upper surface of the cooling block 95. The cooling block 95 is provided so as to eject the cooling air supplied from the pump cooling pipe 91B to the heat radiation fin 15 for the pump. The heat radiation fin 15 for a pump is made of a metal having good heat transfer property such as an aluminum alloy.

FIG. 16 is a diagram showing a peripheral structure of the pump 14. The cooling block 95 has a plate shape. The cooling block 95 is fixed to the pump support base 82 that supports the pump 14 with a wide surface in close contact with the side surface of the pump 14. As shown in FIG. 8, the cooling block 95 is arranged between the pump 14 and the first side surface 2C of the housing 2, and the installation space is small.

As shown in FIG. 16, the cooling block 95 has a connection port 951 formed on the upper surface to which the pump cooling pipe 91B is connected. In the cooling block 95, an elongated hole 952 communicating with the connection port 951 is formed long along the width direction of the pump 14 (pump heat dissipation fin 15).

FIG. 17 is an enlarged cross-sectional view of the G portion of FIG. The cooling block 95 is formed so that a plurality of ejection ports 953 communicate with the elongated hole 952. Each of the ejection ports 953 is formed in the cooling block 95 so as to eject the cooling air along the gap S formed between the projecting portions 151 of the heat radiation fin 15 for the pump.

As shown in FIG. 2, the housing 2 is provided with an opening 2H in a slit shape near an end portion of the second side surface 2D connected to the first side surface 2C. An adjustment cover 71 provided with a slit 71a is slidably provided on the second side surface 2D at a position covering the opening 2H. The opening area of the opening 2H is adjusted by the position of the adjusting cover 71, keeps the internal pressure of the unit 1 positive, and prevents the intrusion of outside air.

As shown in FIG. 6, in the cooling pipe 91, the cooling air flow meter 93 is arranged on the upstream side from the position where the spool cooling pipe 91A and the pump cooling pipe 91B are branched. The cooling air flow meter 93 is communicably connected to the cooling air flow rate indicator 53 so that the user can check the supply amount of the cooling air from the outside of the unit 1.

In the cooling mechanism 9, the spool side flow rate control valve 94A is arranged in the spool cooling pipe 91A, the pump side flow rate control valve 94B is arranged in the pump cooling pipe 91B, and the drive unit 211 and the pump 14 of the spool device 21 have. The diversion ratio of the supplied cooling air is adjusted.

As shown in FIG. 5, the unit 1 has a leakage sensor 30 arranged near the control board 29 and detects whether or not drainage is accumulated in the housing 2. When the leak sensor 30 detects water or a temperature control fluid, it notifies the user by an alarm or the like. In this case, the user can drain the drain from the drain discharge port 2G provided on the third side surface 2E of the housing 2 to prevent the control board 29 and the like from getting wet with water and failing.

Subsequently, the operation of the unit 1 will be described.

(Temperature control)
When the temperature control fluid is input from the first coupling pipe 1005 of the temperature control unit 1003 to the first input pipe 3, the unit 1 temporarily stores the temperature control fluid in the buffer tank 12. In response to the drive of the pump 14, the temperature control fluid stored in the buffer tank 12 is pumped to the diversion block 16. In the diversion block 16, the temperature control fluid flows from the connecting flow path 160 through the common flow path 161 to the first diversion flow path 162, the second diversion flow path 163, and the third diversion flow path 164 at a uniform pressure. The third temperature sensor 63 measures the temperature of the temperature control fluid input to the unit 1, and transmits the temperature measurement value to the control device 1030 via the terminal block 28 and the connector box 11.

For example, when the temperature measurement value of the third temperature sensor 63 is lower than the set temperature T3, the spool device 21 responds to a command from the control device 1030 between the first supply port 213a and the first discharge port 214a, and , The space between the third supply port 213c and the third discharge port 214c is opened, while the space between the second supply port 213b and the second discharge port 214b is blocked.

The temperature control fluid and the high temperature fluid are prepared according to the ratio of the open area between the first supply port 213a and the first discharge port 214a and the open area between the third supply port 213c and the third discharge port 214c. , The flow rate is adjusted.

The internal pressure of the first flow path block 18 (pressure of the first communication hole portion 181a, the first vertical flow path portion 181c, the pressure of the first storage hole portion 181b) and the internal pressure of the third flow path block 20 (third communication hole portion 201a). , The pressure of the third vertical flow path portion 201c and the pressure of the third storage hole portion 201b) decreases according to the flow rate distribution ratio of the temperature control fluid and the high temperature fluid flowing through the spool device 21. As a result, the valve closing force of the first check valve 25 and the third check valve 27 is reduced, and the first valve seat portion is opposed to the urging force of the first urging spring 251 and the third urging spring 271. The 181f and the third valve seat portion 201f are separated from each other. At this time, the length of the flow path from the spool device 21 to the first check valve 25 and the length of the flow path from the spool device 21 to the third check valve 27 are short. Therefore, the valve openings of the first check valve 25 and the third check valve 27 are adjusted with good responsiveness according to the flow rate distribution ratio of the temperature control fluid and the high temperature fluid flowing through the spool device 21.

On the other hand, the low temperature fluid does not flow from the spool device 21 to the merging block 22. Therefore, the low-temperature fluid input to the second input pipe 5 passes through the low-temperature fluid input flow path 191d, the second vertical flow path portion 191c, and the low-temperature fluid output flow path 191e of the second flow path block 19, and the second output pipe 6 Flow to. At this time, the second check valve 26 comes into close contact with the second valve seat portion 191f due to the urging force of the second urging spring 261 and the pressure of the low-temperature fluid flowing through the second flow path block 19, and shuts off the flow path.

The temperature control fluid flowing into the common flow path 161 of the diversion block 16 depends on the valve opening degree of the first check valve 25 and the third check valve 27, that is, according to the flow rate distribution ratio of the spool device 21. The fluid is divided into the first storage hole portion 181b of the first flow path block 18 and the third storage hole portion 201b of the third flow path block 20.

The temperature control fluid flowing through the first storage hole 181b flows to the merging block 22 via the first supply port 213a and the first discharge port 214a of the spool device 21.

When the high-temperature fluid flows from the third input pipe 7 to the high-temperature fluid input flow path 201d of the third flow path block 20, a third is supplied according to the open area between the third supply port 213c and the third discharge port 214c. It flows to the merging block 22 through the communication hole portion 201a, the third supply port 213c of the spool device 21, the valve chamber 215, and the third discharge port 214c.

In the merging block 22, the temperature control fluid flowing from the first discharge port 214a into the first flow path 224a and the high temperature fluid flowing into the third flow path 224c from the third discharge port 214c merge at the merging flow path 223. The temperature control fluid is heated. The heated temperature control fluid flows from the connection flow path 222 of the confluence block 22 to the first output pipe 4, and is output to the temperature control unit 1003.

Here, as shown in FIG. 14, the third input pipe 7, the high temperature fluid input flow path 201d of the third flow path block 20, the third communication hole portion 201a, and the third supply port 213c of the spool device 21. , The valve chamber 215, the third discharge port 214c, the third flow path 224c of the merging block 22, and the merging flow path 223 are formed on the same cross section. Therefore, the length of the flow path from the third input pipe 7 to the merging block 22 is short. Further, the first flow path block 18 is short because the flow path for supplying the temperature control fluid from the flow dividing block 16 to the spool device 21 is formed in a U shape (U shape). Therefore, the unit 1 has a small piping space and can reduce the unit size. Further, since the high temperature fluid smoothly flows from the third input pipe 7 to the merging flow path 223, the pressure loss generated before being supplied to the spool device 21 is small, and the spool device 21 can accurately adjust the flow rate of the high temperature fluid.

The remaining portion of the high-temperature fluid that did not flow to the spool device 21 is returned to the hot chiller 1010 via the third vertical flow path portion 201c of the third flow path block 20, the high-temperature fluid output flow path 201e, and the third output pipe 8. ..

The temperature control fluid diverted into the third storage hole 201b is controlled by the third check valve 27 to the same amount as the high temperature fluid flowing from the spool device 21 to the merging block 22, and the third vertical flow path 201c is controlled. It merges with the rest of the hot fluid that has flowed and flows into the hot chiller 1010. Therefore, in the hot chiller 1010, the flow rate of the hot side going pipe 1012 and the flow rate of the hot side return pipe 1011 become uniform, and the storage amount of the high temperature fluid is stable.

Here, as shown in FIG. 13, the common flow path 161 of the diversion block 16, the third diversion flow path 164, the third storage hole portion 201b of the third flow path block 20, and the high temperature fluid output flow path 201e , The third output pipe 8 is formed on the same cross section. Therefore, the temperature control fluid can flow into the high temperature fluid output flow path 201e by merging with the rest of the high temperature fluid flowing down the third vertical flow path portion 201c without staying in the third flow path block 20. ..

On the other hand, when the temperature measurement value of the third temperature sensor 63 is higher than the set temperature T3, the spool device 21 receives a command from the control device 1030 between the first supply port 213a and the first discharge port 214a. , And open between the second supply port 213b and the second discharge port 214b, while blocking between the third supply port 213c and the third discharge port 214c.

The temperature control fluid and the low temperature fluid are prepared according to the ratio of the open area between the first supply port 213a and the first discharge port 214a and the open area between the second supply port 213b and the second discharge port 214b. , The flow rate is adjusted.

The internal pressure of the first flow path block 18 (pressure of the first communication hole portion 181a, the first vertical flow path portion 181c, the pressure of the first storage hole portion 181b) and the internal pressure of the second flow path block 19 (second communication hole portion 191a). , The pressure of the second vertical flow path portion 191c and the pressure of the second storage hole portion 191b) decreases according to the flow rate distribution ratio of the temperature control fluid and the low temperature fluid flowing through the spool device 21. As a result, the valve closing force of the first check valve 25 and the second check valve 26 is reduced, and the first valve seat portion is opposed to the urging force of the first urging spring 251 and the second urging spring 261. The 181f and the second valve seat portion 191f are separated from each other. At this time, the length of the flow path from the spool device 21 to the first check valve 25 and the length of the flow path from the spool device 21 to the second check valve 26 are short. Therefore, the valve opening degree of the first check valve 25 and the second check valve 26 is adjusted with good responsiveness according to the flow rate distribution ratio of the temperature control fluid and the low temperature fluid flowing through the spool device 21.

On the other hand, the high temperature fluid does not flow from the spool device 21 to the merging block 22. Therefore, the high-temperature fluid input to the third input pipe 7 passes through the high-temperature fluid input flow path 201d, the third vertical flow path portion 201c, and the high-temperature fluid output flow path 201e of the third flow path block 20, and the third output pipe 8 Flow to. At this time, the third check valve 27 comes into close contact with the third valve seat portion 201f due to the urging force of the third urging spring 271 and the pressure of the high-temperature fluid flowing through the third flow path block 20, and shuts off the flow path.

The temperature control fluid flowing into the common flow path 161 of the diversion block 16 depends on the valve opening degree of the first check valve 25 and the second check valve 26, that is, according to the flow rate distribution ratio of the spool device 21. The fluid is divided into the first storage hole portion 181b of the first flow path block 18 and the second storage hole portion 191b of the second flow path block 19.

The temperature control fluid flowing through the first storage hole 181b flows to the merging block 22 via the first supply port 213a and the first discharge port 214a of the spool device 21.

When the low-temperature fluid flows from the second input pipe 5 to the low-temperature fluid input flow path 191d of the second flow path block 19, a second is supplied according to the open area between the second supply port 213b and the second discharge port 214b. The fluid flows to the merging block 22 via the communication hole portion 191a, the second supply port 213b of the spool device 21, the valve chamber 215, and the second discharge port 214b.

In the merging block 22, the temperature control fluid flowing from the first discharge port 214a into the first flow path 224a and the low temperature fluid flowing from the second discharge port 214b into the second flow path 224b merge at the merging flow path 223. The temperature control fluid is cooled. The cooled temperature control fluid flows from the connection flow path 222 of the confluence block 22 to the first output pipe 4, and is output to the temperature control unit 1003.

Here, as shown in FIG. 14, the second input pipe 5, the low temperature fluid input flow path 191d of the second flow path block 19, the second communication hole portion 191a, and the second supply port 213b of the spool device 21. , The valve chamber 215, the second discharge port 214b, the second flow path 224b of the merging block 22, and the merging flow path 223 are formed on the same cross section. Therefore, the length of the flow path from the second input pipe 5 to the merging block 22 is short. Therefore, the unit 1 can reduce the piping space and the unit size. Further, since the low-temperature fluid smoothly flows from the second input pipe 5 to the merging flow path 223, the pressure loss that occurs before being supplied to the spool device 21 is small, and the spool device 21 can accurately adjust the flow rate of the low-temperature fluid.

The remaining portion of the low-temperature fluid that did not flow to the spool device 21 is returned to the cold chiller 1020 via the second vertical flow path portion 191c of the second flow path block 19, the low-temperature fluid output flow path 191e, and the second output pipe 6. ..

The temperature control fluid diverted into the second storage hole 191b is controlled by the second check valve 26 to the same amount as the low temperature fluid flowing from the spool device 21 to the merging block 22, and the second vertical flow path 191c is controlled. It merges with the rest of the cold fluid that has flowed and flows into the cold chiller 1020. Therefore, in the cold chiller 1020, the flow rate of the cold side forward pipe 1022 and the flow rate of the cold side return pipe 1021 become uniform, and the storage amount of the low temperature fluid becomes stable.

Here, as shown in FIG. 13, the common flow path 161 of the diversion block 16, the second diversion flow path 163, the second storage hole portion 191b of the second flow path block 19, and the low temperature fluid output flow path 191e. , The second output pipe 6 is formed on the same cross section. Therefore, the temperature control fluid can flow into the low temperature fluid output flow path 191e by merging with the rest of the low temperature fluid flowing down the second vertical flow path portion 191c without staying in the second flow path block 19. ..

Further, when the temperature measurement value of the third temperature sensor 63 is the set temperature T3, the spool device 21 opens between the first supply port 213a and the first discharge port 214a in response to a command from the control device 1030. On the other hand, the space between the second supply port 213b and the second discharge port 214b and the space between the third supply port 213c and the third discharge port 214c are cut off. In this case, the unit 1 outputs from the first output pipe 4 to the temperature control unit 1003 without mixing the low temperature fluid and the high temperature fluid with the temperature control fluid input from the temperature control unit 1003 to the first input pipe 3.

By the way, in the unit 1, the first filter block 41 removes foreign matter from the low temperature fluid flowing from the second input pipe 5 into the low temperature fluid input flow path 191d of the second flow path block 19. Further, the second filter block 42 removes foreign matter from the high temperature fluid flowing from the third input pipe 7 into the high temperature fluid input flow path 201d of the third flow path block 20. Further, the third filter block 43 removes foreign matter from the temperature control fluid flowing from the flange pipe 3A of the first input pipe 3 to the horizontal pipe 3B. In this way, the foreign matter is removed before the temperature control fluid, the high temperature fluid, and the low temperature fluid are supplied to the spool device 21, so that the spool device 21 is located between the spool 217 and the inner peripheral surface of the valve chamber 215. It is possible to prevent foreign matter from being caught and causing malfunction or failure.

Then, for example, the second filter block 42 is arranged horizontally. Therefore, even if the second filter sheet 424 of the second element member 422 comes off from the second shaft member 423, the foreign matter removed by the second filter sheet 424 falls to the lower part of the inner peripheral surface of the second filter body 421, and the second It is difficult to flow to the 3 flow path block 20 side. Moreover, in the second shaft member 423, a plurality of holes 423b are formed in the cylindrical portion 423a, and when the high temperature fluid flows through the holes to the second flow path block 19, foreign matter is removed. Therefore, the second filter block 42 can efficiently remove foreign matter. Since the first filter block 41 and the third filter block 43 function in the same manner as the second filter block 42, the description thereof will be omitted.

(About cooling operation)
The motor 2111 of the pump 14 and the spool device 21 is constantly driven during temperature control and generates heat. The pump 14 and the fluid control unit 24 are integrated and housed in the housing 2 together with the electronic devices. Therefore, the internal space of the housing 2 is narrow, and the internal temperature tends to rise due to the heat generated from the pump 14 and the motor 2111. If the internal temperature of the housing 2 rises excessively, the electronic device may malfunction or malfunction.

However, the unit 1 does not have a heat insulating material attached to the second input pipe 5 and the second output pipe 6 through which the low temperature fluid flows. The second input pipe 5 and the second output pipe 6 have the same temperature as the temperature of the low temperature fluid (-10 ° C in this embodiment) and cool the surrounding air. The pump 14 is arranged below the second input pipe 5 and the second output pipe 6 and is cooled by the cooled air. Moreover, the pump 14 is easily cooled because the heat transfer area is expanded by the protruding portion 151 of the heat radiation fin 15 for the pump. Therefore, in the unit 1, it is suppressed that the internal temperature of the housing 2 rises excessively, and it is possible to prevent the electronic device from causing a failure or malfunction due to heat.

Further, when the manual valve 92 is opened, the unit 1 sends cooling air to the pump heat radiation fin 15 via the cooling pipe 91, the pump cooling pipe 91B, the connection port 951 of the cooling block 95, the elongated hole 952, and the ejection port 953. It is supplied and cools the pump 14. The cooling air is, for example, dry air having a dew point lower than the first temperature T1 of the low temperature fluid, and the temperature is adjusted to about room temperature.

The pump radiating fin 15 has a protruding portion 151 provided along the second input pipe 5 and the second output pipe 6. Therefore, when the cooling air is ejected into the gap S formed between the projecting portions 151, it flows along the second input pipe 5 and the second output pipe 6, and the pump 14 passes through the pump heat dissipation fins 15. The heat exchange with the second input pipe 5 and the second output pipe 6 is promoted. Therefore, the pump 14 is efficiently cooled.

Further, the cooling air is supplied to the heat insulating cover 2112 of the drive unit 211 via the spool cooling pipe 91A. The cooling air flows through the cooling space 2113 and cools the motor 2111.

In this way, since the cooling mechanism 9 cools the pump 14 and the motor 2111, an increase in the internal temperature of the housing 2 can be suppressed, and a failure or malfunction of the electronic device can be prevented.

When the cooling mechanism 9 continues to supply the cooling air, the internal air of the housing 2 flows into the opening 2H of the housing 2 and is discharged to the outside of the housing 2. The opening 2H is provided near the pump 14 and the drive unit 211. Therefore, in the housing 2, the air warmed by the pump 14 and the motor 2111 is preferentially discharged to the outside of the housing 2. Therefore, the internal temperature of the housing 2 is adjusted to around room temperature, and the electronic device is prevented from being damaged or malfunctioning due to heat.

When the internal temperature of the housing 2 is adjusted to around room temperature, frost may be generated on the surfaces of the second input pipe 5 and the second output pipe 6 to which the heat insulating material is not attached. However, the cooling air has a dew point lower than the first temperature T1 of the low temperature fluid and is dry. Therefore, the internal air of the housing 2 is dried, and frost is unlikely to be generated on the surfaces of the second input pipe 5 and the second output pipe 6.

When the user slides the adjustment cover 71 while looking at the cooling air flow rate indicator 53 so as to put the housing 2 in a positive pressure state and adjusts the opening area of the opening 2H, moisture is contained through the opening 2H. It is possible to prevent air from flowing into the inside of the housing 2. By keeping the inside of the housing 2 in a dry state, dew condensation is unlikely to occur inside the housing 2 even if the temperature control fluid is repeatedly heated and cooled. Therefore, it is possible to prevent the electronic device from malfunctioning or malfunctioning due to dew condensation.

The cooling air flow rate indicator 53 issues an alarm when the measured cooling air flow rate becomes equal to or less than the lower limit value of the cooling air flow rate set as a value necessary for maintaining the positive pressure state of the housing 2. The alarm may be a voice or a display such as a lamp. As a result, the user can adjust the flow rate of the cooling air before the housing 2 is out of the positive pressure state, and the housing 2 is prevented from being in the low temperature state due to the change of the set temperature T3 of the temperature control fluid. It is possible to prevent frost and dew condensation from forming inside.

The pump 14 makes an emergency stop when the cooling air flow rate indicator 53 gives an alarm. Therefore, the pump 14 is driven under the condition that the housing 2 is not in a positive pressure state, prevents the internal temperature of the housing 2 from rising excessively, and prevents dew condensation and frost from being formed inside the housing 2, and electronic devices. Can be protected from heat and moisture.

The temperature of the pump 14 is monitored by a thermostat (not shown) provided on the pump 14. The thermostat (not shown) causes the pump 14 to be urgently stopped when the temperature of the pump 14 exceeds the upper limit of the pump temperature. As a result, it is possible to prevent the internal temperature of the housing 2 from rising too high due to the malfunction of the pump 14, and to prevent the failure or malfunction of the electronic device.

(About maintenance)
At the time of maintenance of the semiconductor manufacturing apparatus 1000, the purge on-off valve 101 of the purge mechanism 10 is opened, and purge air is supplied to the purge port 181 g of the first flow path block 18 via the purge pipe 100. At this time, the spool device 21 opens between the first supply port 213a and the first discharge port 214a, while the second supply port 213b and the second discharge port 214b, and the third supply port 213c. It is in a state of being cut off from the third discharge port 214c.

The purge air pressurizes the temperature control fluid remaining in the unit 1 and the temperature control unit 1003. The first check valve 25 is closed by the urging force of the first urging spring 251. On the other hand, the second check valve 26 and the third check valve 27 are opened by the pressure of the temperature control fluid. Therefore, the temperature control fluid remaining in the unit 1 and the temperature control unit 1003 passes through the second check valve 26 and the third check valve 27 and flows to the cold chiller 1020 and the hot chiller 1010. As a result, the temperature control fluid remaining in the unit 1 and the temperature control unit 1003 is replaced with purge air, and the user can easily perform maintenance on the parts in the unit 1.

When performing maintenance of the first to third filter blocks 41, 42, 43 at the time of maintenance, the user removes the heat insulating jackets 32, 33, 37 from each pipe. For example, the heat insulating jackets 32, 33, 37 can be easily removed by cutting the cable tie and removing the heat insulating sheet from the pipe.

For example, when performing maintenance on the first filter block 41, the first fixing screw 415 is removed, and the second input pipe 5, the first filter body 411, and the first element member 412 are disassembled. Then, the old first element member 412 is replaced with a new first element member 412 and stored in the first filter body 411, and the first fixing screw 415 is transferred from the flange portion 5A of the second input pipe 5 to the first filter body 411. It is inserted and fastened to the second flow path block 19. As described above, since the first filter block 41 is detachably provided in the second flow path block 19, maintenance can be easily performed. The second filter block 42 can also be easily maintained.

Further, in the third filter block 43, if the flange tube 3A is removed from the outside of the unit 1, the third element member 432 can be removed from the third filter body 431 and replaced with a new third element member 432. Therefore, the unit 1 can easily maintain the third filter block 43 from the outside of the housing 2.

(Summary)
As described above, the unit 1 of this embodiment is output from (1) a first input pipe 3 for inputting a temperature control fluid, a first output pipe 4 for outputting a temperature control fluid, and a first output pipe 4. The pump 14 that controls the flow rate of the temperature control fluid, the second input pipe 5 that inputs the low temperature fluid of the first temperature T1, the third input pipe 7 that inputs the high temperature fluid higher than the first temperature T1, and the second By mixing the temperature control fluid input to the 1 input pipe 3 and the low temperature fluid input to the 2nd input pipe 5 and the high temperature fluid input to the 3rd input pipe 7, the temperature of the temperature control fluid is brought to a predetermined temperature. It has a fluid control unit 24 that controls and outputs to the first output pipe 4, a housing 2, and a first input pipe 3, a first output pipe 4, a pump 14, a second input pipe 5, and a third input pipe. It is characterized in that the 7 and the fluid control unit 24 are integrated and arranged and covered with the housing 2.

According to the unit 1 having the above configuration, the first input pipe 3, the first output pipe 4, the pump 14, the second input pipe 5, the third input pipe 7, and the fluid control unit 24 are integrated and provided inside the housing 2. Since the flow path is shortened, the piping space can be reduced and the unit size can be made compact.

(2) In the unit 1 described in (1), the fluid control unit 24 has a spool device 21 for adjusting the flow rate distribution ratio of the temperature control fluid, the low temperature fluid, and the high temperature fluid, and the second input pipe 5 has a second. It is preferable that the 1 filter block 41 is arranged, the second filter block 42 is arranged in the third input pipe 7, and the third filter block 43 is arranged in the first input pipe 3.

In the unit 1 having the above configuration, since the first to third filter blocks 41, 42, 43 provided in the unit 1 remove foreign matter from the fluid supplied to the spool device 21, the spool device 21 is caught by the foreign matter. It is possible to suppress the occurrence of malfunctions and failures. Further, it is not necessary to install a filter outside the unit 1, and the space of the piping connected to the unit 1 can be reduced.

(3) The unit 1 described in (1) has a second output pipe 6 for outputting a low-temperature fluid and a third output pipe 8 for outputting a high-temperature fluid, and the fluid control unit 24 has a first input. A diversion block 16 which is connected to the pipe 3 and diverts the temperature control fluid into the first diversion flow path 162, the second diversion flow path 163, and the third diversion flow path 164, and the flow rate of the temperature control fluid, the low temperature fluid, and the high temperature fluid. A spool device 21 that adjusts the distribution ratio, a merging block 22 that is coupled to the spool device 21 and the first output pipe 4 and that merges the fluid discharged from the spool device 21 and supplies the fluid to the first output pipe 4, and the spool device. It has a first flow path block 18 coupled to 21 and a flow diversion block 16, a second flow path block 19, and a third flow path block 20, and the first flow path block 18 is a first flow path. A main fluid supply flow path (first communication hole portion 181a, first storage hole portion 181b, first vertical flow path portion 181c) for communicating 162 with the spool device 21, and a main fluid supply flow path (first storage hole portion 181b). ), The second flow path block 19 has a first check valve 25 that prevents the temperature control fluid from flowing back to the first diversion flow path 162 side, and the second flow path block 19 has a second input pipe 5. A low-temperature fluid supply flow path (second communication hole portion 191a, low-temperature fluid input flow path 191d) that communicates with the spool device 21 and a low-temperature fluid discharge flow path that communicates the second diversion flow path 163 with the second output pipe 6 A low-temperature fluid bypass that communicates the second storage hole portion 191b, the low-temperature fluid output flow path 191e), the low-temperature fluid supply flow path (second communication hole portion 191a), and the low-temperature fluid discharge flow path (second storage hole portion 191b). A second that is arranged in the flow path (second vertical flow path portion 191c) and the low temperature fluid discharge flow path (second storage hole portion 191b) to prevent the temperature control fluid from flowing back to the second diversion flow path 163 side. Having 2 check valves 26, the third flow path block 20 has a high temperature fluid supply flow path (third communication hole portion 201a, high temperature fluid input flow path) for communicating the third input pipe 7 and the spool device 21. 201d), a high-temperature fluid discharge flow path (third storage hole 201b, high-temperature fluid output flow path 201e) that communicates the third diversion flow path 164 with the third output pipe 8, and a high-temperature fluid supply flow path (third communication). A high-temperature fluid bypass flow path (third vertical flow path section 201c) for communicating the hole portion 201a) and the high-temperature fluid discharge flow path (third storage hole portion 201b) and a high-temperature fluid discharge flow path (third storage hole portion 201b). ), It is preferable to have a third check valve 27, which prevents the temperature control fluid from flowing back to the third diversion flow path 164 side. I'm sorry.

According to the unit 1 having the above configuration, the spool device 21, the first to third flow path blocks 18, 19, 20 and the flow dividing block 16 and the merging block 22 are combined to form the spool device 21 and the first to third check valves. Since the valves 25, 26, and 27 are integrated and arranged to shorten the flow path, the piping space can be reduced and the unit size can be made compact.

(4) In the unit 1 described in (3), the unit 1 is detachably attached to the second flow path block 19 and is attached to the connection portion between the low temperature fluid supply flow path (low temperature fluid input flow path 191d) and the second input pipe 5. It is detachably attached to the first filter block 41 and the third flow path block 20 to be arranged, and is arranged at the connection portion between the high temperature fluid supply flow path (high temperature fluid input flow path 201d) and the third input pipe 7. It is preferable to have a second filter block 42 and the like.

In the unit 1 having the above configuration, the first filter block 41 removes foreign matter from the low temperature fluid supplied to the spool device 21, and the second filter block 42 removes foreign matter from the high temperature fluid supplied to the spool device 21. It is possible to prevent the spool device 21 from malfunctioning or malfunctioning due to the biting of foreign matter. Further, since the first filter block 41 is detachably attached to the second flow path block 19 and the second filter block 42 is detachably attached to the third flow path block 20, the first filter block 41 and the first filter block 41 are detachably attached. 2 The maintenance of the filter block 42 is good. Further, since it is not necessary to install a filter outside the unit 1, the space of the piping connected to the unit 1 can be reduced. As a result, the unit 1 can be arranged near the susceptor 1002, and the temperature of the susceptor 1002 can be controlled with good responsiveness.

(5) In the unit 1 described in (3) or (4), the first input pipe 3 is a flange pipe 3A arranged outside the housing 2 and a horizontal pipe 3B arranged inside the housing 2. It is preferable that the third filter block 43 is disposed between the flange pipe 3A and the horizontal pipe 3B, and the third filter block 43 is held in the housing 2.

According to the temperature control flow rate control unit having the above configuration, the third filter block removes foreign matter from the temperature control fluid supplied to the pump 14 and the spool device, so that the pump 14 and the spool device operate by biting the foreign matter. It is possible to suppress the occurrence of defects and failures. Further, the unit 1 can easily maintain the third filter block from the outside of the housing 2 only by removing the flange tube 3A from the third filter block 43.

(6) In the unit 1 described in any one of (1) to (6), the first input pipe 3 and the first output pipe 4 are connected to the susceptor 1002 provided inside the processing container of the semiconductor manufacturing apparatus 1000. Is connected and arranged near the susceptor 1002, and it is preferable that the second input pipe 5 and the third input pipe 7 are connected to the chiller unit 1004 that controls and circulates the temperature of the fluid. ..

Since the unit 1 having the above configuration is arranged near the susceptor 1002, the distance from the spool device 21 to the susceptor 1002 can be shortened, and the temperature of the susceptor 1002 can be controlled with good responsiveness.

The present invention is not limited to the above embodiment, and various applications are possible.

(1) For example, as shown in FIG. 18, heat dissipation fins 300 for low temperature piping may be attached to the second input pipe 5 and the second output pipe 6. The heat radiation fin 300 for low temperature piping is an example of the first heat radiation fin. According to such a configuration, the area for transferring the heat of the low-temperature fluid to the inside of the housing 2 is increased by the heat-dissipating fin 300 for low-temperature piping, so that the cooling effect of the pump 14 can be enhanced.

(2) For example, in the above embodiment, the first to third filter blocks 41, 42, and 43 are provided, but these may be omitted.

(3) For example, in the above embodiment, the flow rate distribution ratio is controlled by one spool device 21, but a valve unit including three flow control valves may be replaced with the spool device 21. However, by controlling a plurality of fluids with one spool device 21, the installation space of the equipment can be made smaller than when a plurality of valves are installed, and it is possible to contribute to the compactification of the unit size.

(4) For example, in the above embodiment, the first to third check valves 25, 26, 27 are provided in the first to third flow path blocks 18, 19, 20, but the first to third flow dividing blocks 16 are provided. 3 Check valves 25, 26, 27 may be arranged.

(5) For example, the cooling mechanism 9 of the above embodiment may not be provided.

(6) For example, the heat radiation fin 15 for the pump may be omitted, and the cooling mechanism 9 may directly blow the cooling air to the pump 14.

(7) For example, the opening 2H does not have to be covered with the adjusting cover 71. In this case, since the opening area of the opening 2H is constant, for example, the flow rate of the cooling air may be increased or decreased by using the manual valve 92 to adjust the positive pressure state of the housing 2.

(8) For example, when the cooling air reaches the lower limit of the cooling air flow rate, the alarm may not be generated.

(9) For example, when the cooling air reaches the lower limit of the cooling air flow rate, only an alarm may be generated and the pump 14 may not be stopped.

(10) For example, when the pump exceeds the pump temperature upper limit value, the pump may not be stopped.

(11) For example, the heat insulating jackets 32, 33, 37 may be a type of heat insulating material that adheres to the pipe surface. However, the maintainability of the internal equipment of the unit 1 is improved by making the heat insulating jackets 32, 33, 37 detachable from the pipe surface so that the heat insulating sheet wound around the pipe surface is fixed with a binding band. be able to.

(12) For example, the arrangement of the pump 14 and the electronic device is not limited to the above embodiment.

(13) For example, the leakage sensor 30 may not be provided.

(14) For example, in the above embodiment, the unit 1 is used for the semiconductor manufacturing apparatus 1000, but may be used for temperature control of a device other than the semiconductor manufacturing apparatus 1000.

1 Unit 2 Housing 3 1st input piping 4 1st output piping 5 2nd input piping 6 2nd output piping 7 3rd input piping 8 3rd output piping 14 Pump 24 Fluid control unit

Claims (6)

Main fluid input piping for inputting the main fluid and
The main fluid output pipe that outputs the main fluid and
A pump that controls the flow rate of the main fluid output from the main fluid output pipe,
A low-temperature fluid input pipe that inputs low-temperature fluid at the first temperature,
A high-temperature fluid input pipe that inputs a high-temperature fluid higher than the first temperature, and
The temperature of the main fluid is adjusted by mixing the main fluid input to the main fluid input pipe, the low temperature fluid input to the low temperature fluid input pipe, and the high temperature fluid input to the high temperature fluid input pipe. A fluid control unit that controls to a predetermined temperature and outputs it to the main fluid output pipe,
With a housing,
The main fluid input pipe, the main fluid output pipe, the pump, the low temperature fluid input pipe, the high temperature fluid input pipe, and the fluid control unit are integrated and arranged and covered with the housing.
A flow rate control unit for temperature control. In the flow rate control unit for temperature adjustment according to claim 1,
The fluid control unit has a spool device that adjusts the flow rate distribution ratio between the main fluid, the low temperature fluid, and the high temperature fluid.
A first filter is provided in the low temperature fluid input pipe.
A second filter is provided in the high temperature fluid input pipe.
A third filter is provided in the main fluid input pipe,
A flow rate control unit for temperature control. In the flow rate control unit for temperature adjustment according to claim 1,
The low-temperature fluid output pipe that outputs the low-temperature fluid and
Having a high-temperature fluid output pipe that outputs the high-temperature fluid,
The fluid control unit
A diversion block that is connected to the main fluid input pipe and diverts the main fluid into the first diversion flow path, the second diversion flow path, and the third diversion flow path.
A spool device that adjusts the flow rate distribution ratio of the main fluid, the low temperature fluid, and the high temperature fluid, and
A confluence block that is coupled to the spool device and the main fluid output pipe, merges the fluid discharged from the spool device, and supplies the fluid to the main fluid output pipe.
It has a first flow path block, a second flow path block, and a third flow path block that are coupled to the spool device and the diversion block.
The first flow path block is
A main fluid supply flow path that communicates the first diversion flow path with the spool device, and
Having a first check valve, which is arranged in the main fluid supply flow path and prevents the main fluid from flowing back toward the first diversion flow path side.
The second flow path block is
A low-temperature fluid supply flow path that communicates the low-temperature fluid input pipe and the spool device,
A low-temperature fluid discharge flow path that communicates the second diversion flow path with the low-temperature fluid output pipe,
A low-temperature fluid bypass flow path that communicates the low-temperature fluid supply flow path and the low-temperature fluid discharge flow path,
A second check valve, which is arranged in the low temperature fluid discharge flow path and prevents the main fluid from flowing back to the second diversion flow path side.
To have
The third flow path block is
A high-temperature fluid supply flow path that connects the high-temperature fluid input pipe and the spool device,
A high-temperature fluid discharge flow path that communicates the third diversion flow path with the high-temperature fluid output pipe,
A high-temperature fluid bypass flow path that communicates the high-temperature fluid supply flow path and the high-temperature fluid discharge flow path,
A third check valve, which is arranged in the high temperature fluid discharge flow path and prevents the main fluid from flowing back to the third diversion flow path side.
To have
A flow rate control unit for temperature control. In the flow rate control unit for temperature adjustment according to claim 3,
A first filter block that is detachably attached to the second flow path block and is arranged at a connection portion between the low temperature fluid supply flow path and the low temperature fluid input pipe.
It has a second filter block that is detachably attached to the third flow path block and is arranged at a connection portion between the high temperature fluid supply flow path and the high temperature fluid input pipe.
A flow rate control unit for temperature control. In the flow rate control unit for temperature adjustment according to claim 4,
The main fluid input pipe has a first main fluid input pipe arranged outside the housing and a second main fluid input pipe arranged inside the housing.
A third filter block is disposed between the first main fluid input pipe and the second main fluid input pipe, and the third filter block is held in the housing.
A flow rate control unit for temperature control. In the flow rate control unit for temperature adjustment according to any one of claims 1 to 5.
The main fluid input pipe and the main fluid output pipe are connected to a control target provided inside the processing container of the semiconductor manufacturing apparatus, and are arranged near the control target.
The low temperature fluid input pipe and the high temperature fluid input pipe are connected to a chiller unit that controls and circulates the temperature of the fluid.
A flow rate control unit for temperature control.

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