JP2020143759A - valve - Google Patents

Abstract

To provide a valve in which a valve rod including a valve element in a tip end is long, which suppresses axial displacement between the valve element and a valve seat, and of which the lifetime is also prolonged in comparison with a conventional valve.SOLUTION: The present invention relates to a valve 1 comprising: a valve body 10 including an inflow passage 11 for a fluid, an outflow passage 12 and a valve seat 13 formed between the passages; and a valve rod 15 including a valve element 14 which is abutted/separated to/from the valve seat 13. The outflow passage 12 is formed from a pipe 30 in which the fluid flows, and the tube 30 and the valve rod 15 are coaxial. A guided part 40 formed while extending from a tip end of the valve element 14 in an axial direction of the valve rod 15 is provided in the valve element 14 and a side face of the guided part 40 is guided in the axial direction of the valve rod 15 by an inner peripheral surface of the pipe 30.SELECTED DRAWING: Figure 1

Description

The present invention relates to a valve.

In the semiconductor manufacturing process, the valve provided in the middle of the flow path connecting the vacuum chamber and the vacuum pump has a built-in heater, a bellows, and is used under high temperature conditions exceeding 200 ° C. is there. The valve described in Patent Document 1 is a bellows valve for high temperature, and has a heater built in the valve stem.

The valve has a valve body having a communication portion that communicates with the inflow passage and the outflow passage, and a valve body arranged in the communication portion. In the case of a manual valve, the valve body is driven by a handle provided on the upper part, and in the case of an automatic valve, the valve body is driven by a motor or the like, and a connection called a stem is connected between the handle or the motor or the like and the valve stem forming the valve body at the tip. A member is intervening.

For example, in the valve described in Patent Document 1, the valve stem having a valve body at the tip that contacts and separates from the valve seat is longer than that of a normal control valve because of precise adjustment of the flow rate.

Japanese Patent No. 4923105

If the valve stem having the valve body at the tip is long, the axis shift is likely to occur when the valve body and the valve seat come into contact with each other. When the shaft shift occurs, the pressure applied to the contact surface between the valve body and the valve seat becomes not constant, and bias occurs. If the contact pressure is biased, there is a high possibility that the fluid will leak into the outflow passage even when the valve is closed. Further, if the contact pressure is biased, uneven wear occurs on the valve seat and / or the valve body, which causes the life of the valve to be shortened.

An object of the present invention is to provide a centering function for suppressing a misalignment between the valve body and the valve seat in a valve having a valve body at the tip and a long valve rod, and to provide a bias in contact pressure between the two. It is to provide a valve that is suppressed and has a longer valve life than conventional valves.

In the present invention (1), a valve body having a fluid inflow passage, an outflow passage, and a valve seat formed between these passages, and a valve rod having a valve body that abuts and separates from the valve seat are provided. The outlet passage is formed by a pipe through which a fluid flows out, and the shaft of the pipe and the shaft of the valve rod are coaxial with each other, and the valve body has the valve body from the tip of the valve body to the valve body. A guided portion formed extending in the axial direction of the valve rod is provided, and the side surface of the guided portion is a valve guided in the axial direction of the valve rod by the inner peripheral surface of the pipe.

The present invention (1) is provided with a guided portion formed by extending from the tip of the valve body in the axial direction of the valve stem, and the side surface of the guided portion is inside a pipe through which a fluid flows out. Since the peripheral surface guides the valve stem in the axial direction, the guided portion guided by the inner surface of the pipe plays a role of suppressing the shaft shake of the valve stem.

By the action of such a guided portion, the shaft shake of the valve stem is suppressed, and the shaft shake of the valve body at the tip is also suppressed, so that the shaft deviation between the valve body and the valve seat is suppressed, and the relationship between the two is suppressed. The uneven contact pressure is suppressed, fluid leakage is less likely to occur, and the life of the valve is longer than that of a conventional valve.

In the present invention (2), the cross section of the valve body is circular, the cross section of the valve seat is ring-shaped, and the outer circumference of the cross section of the guided portion is circular. The valve according to the present invention (1), characterized in that the centers of the cross section, the cross section of the valve seat, and the cross section of the guided portion are concentric.

In the valve of the present invention (2), the cross section of the valve body is circular, the cross section of the valve seat is ring-shaped, the outer circumference of the cross section of the guided portion is circular, and the cross section of the valve body. Since the center of the surface, the cross section of the valve seat and the cross section of the guided portion are concentric, the shape is simple and the manufacturing cost can be reduced.

According to the present invention (3), a valve body having a fluid inflow passage, an outflow passage, and a valve seat formed between these passages, and a valve rod having a valve body that contacts and separates from the valve seat. The valve seat has an annular shape in a plan view formed of a thin plate, the outer peripheral edge portion of the valve seat is fixed to the valve body, and the inner peripheral edge portion is the contact surface of the valve body. It is a valve provided with a surface inclined toward the outflow passage side so as to abut with the valve.

The valve of the present invention (3) is not provided with a guided portion as in the present inventions (1) and (2). Instead, the valve seat is an annular shape in a plan view formed by a thin plate, the outer peripheral edge portion of the valve seat is fixed to the valve body, and the inner peripheral edge portion abuts on the contact surface of the valve body. As described above, it is characterized by having a surface that can be inclined toward the outflow passage side.

In the present invention (3), since the valve seat is formed of a thin plate, it has elasticity, and even if the valve rod shaft shake occurs and the valve body shaft shake at the tip occurs, the shape of the valve seat surface. Is deformed to follow the contact surface of the valve body, so that the contact pressure generated on the contact surface between the valve body and the valve seat is less likely to be biased. As a result, fluid leaks are less likely to occur and the valve life is longer than with conventional valves.

In the present invention (4), the outer peripheral edge portion is fixed to the valve body by sandwiching the lower surface by an annular lower support plate and the upper surface by an annular upper support plate, and the outer peripheral edge portion and the said. The valve according to the present invention (3), which has a male screw tip storage space for accommodating a plurality of male screw tips screwed from below the lower support plate on the lower surface side between the inner peripheral edges. Is.

In the valve of the present invention (4), the annular upper support plate and the lower support plate, which sandwich the outer peripheral edge of the valve seat formed of a thin plate and fix it to the valve body, are screwed in from below the lower support plate. The male screw tip storage space for accommodating the plurality of male screw tips is provided on the lower surface side between the outer peripheral edge portion and the inner peripheral edge portion of the valve seat.

The distance between the tip of the plurality of male screw tips screwed from below the lower support plate and the lower surface of the valve seat can be adjusted by the degree of screwing of the male screw. By this adjustment, the elasticity of the valve seat formed of the thin plate can be adjusted, and the appropriate elasticity of the valve seat can be ensured without replacing the thin plate.

According to the valve of the present invention, in a valve having a valve body at the tip and a long valve rod, it is provided with a centering function for suppressing axial deviation between the valve body and the valve seat, and the contact pressure applied between the two is uneven. Can be suppressed, and the life of the valve can be extended as compared with the conventional valve.

Example 1 of the valve according to the present invention is shown. The perspective view of the guided portion used for the valve of Example 1 is shown. The perspective view of the guided portion used for the valve of Example 2 is shown. A part of Example 3 of the valve according to the present invention is shown. An enlarged cross-sectional view of the vicinity of the guided portion used for the valve of the third embodiment is shown. An enlarged cross-sectional view of the vicinity of the guided portion used for the valve of the fourth embodiment is shown.

Hereinafter, preferred embodiments of the present invention will be described in detail exemplarily with reference to the drawings. However, unless there is a specific description, the shapes of the components and their relative arrangements described in this embodiment are not intended to limit the scope of the present invention to them, but are merely explanatory examples. Further, for convenience, the directions of the members and the like may be referred to as up, down, left and right depending on the directions on the drawings, but these do not limit the scope of the present invention.

FIG. 1 shows a valve according to a first embodiment of the present invention. The valve has three components: a valve body 10, an actuator 24, and a stay 23 in between.

The valve body 10 is provided with an inflow passage 11 and an outflow passage 12, and a valve seat 13 is provided between the inflow passage 11 and the outflow passage 12. A valve body 14 having a contact surface that comes into contact with and is separated from the valve seat 13 is vertically provided, and the valve body 14 is formed on the lower tip side of the valve stem 15. The position of the valve body 14 in the axial direction is not constant when the valve body 14 is suspended by the valve rod 15 and is not provided with the guided portion 40 described later. In the valve of the first embodiment, the heater 17 for preventing dew condensation of the fluid (gas) is housed in the heater storage space 16 inside the valve stem 15. The power line 21 is for heating the heater 17. A bellows 18 is provided to prevent fluid leakage. The upper part of the valve body 10 is covered with a lid member 19 and a cover material 20 through which the valve rod 15 penetrates. The upper end of the valve stem 15 is connected to the stem 22, and the stem 22 is connected to the shaft of the actuator 24 and is driven up and down by the actuator 24. The actuator 24 is attached to the valve body 10 by a stay 23.

A guided portion 40 extending downward in the axial direction of the valve stem 15 from the lower end of the valve body 14 is provided. The fluid outflow passage 12 is provided inside a pipe 30 attached to the lower part of the valve di 10. The shaft of the pipe 30 and the shaft of the valve stem 15 are adjusted to be coaxial.

In the first embodiment, the guided portion 40 has a flat plate shape, and the side surface of the flat plate is guided by the inner peripheral surface of the pipe 30. With this structure, even if the valve rod 15 has a very long length, the axis deviation of the valve stem 15 can be suppressed, so that the bias of the contact pressure applied between the two can be suppressed, and the life of the valve can be extended. It can be made longer than a conventional valve without such a structure.

FIG. 2 shows a perspective view of the guided portion 40 used for the valve of the first embodiment. The guided portion neck 42 projects downward from the center of the tip portion of the valve stem 15, and the guided portion plate 41 is formed below the guided portion neck 42. The guided portion plate 41 has a disk-like basic shape and is provided with four guided portion holes 44. Fluid passes through this hole. The side surface 43 of the guided portion plate 41 is guided by the inner surface of the pipe 30.

FIG. 3 shows a perspective view of a guided portion used for the valve of the second embodiment. The basic configuration of the valve of the second embodiment is the same as that of the first embodiment, but only the shape of the guided portion is different. In the guided portion 50 of the valve of the second embodiment, the guided portion neck 52 protrudes downward from the center of the tip portion of the valve rod 15 and is covered below the guided portion neck 52, similarly to the guided portion 40 of the first embodiment. A guide plate 51 is formed. The guided portion plate 51 has a cross shape instead of a disk shape, and the side surface 53 is a part of a cylindrical surface along the inner peripheral surface of the pipe 30.

FIG. 4 shows a part of Example 3 of the valve according to the present invention. The basic structure is the same as that of the valve of the first embodiment of FIG. 1, but the valve of the third embodiment has no guided portion. Instead, the valve seat structure is different. The valve seat 61 has an annular shape in a plan view formed by a thin plate, the valve body 14 penetrates the through hole in the center, and the contact surface of the valve body comes into contact with the contact surface of the valve seat 61. -It has a structure that separates.

The valve seat 61 is sandwiched between the annular upper support plate 62 and the annular lower support plate 63, and the valve body bottom plate 65 has a hole in the center of the bottom of the valve body 10 through which the valve body 14 penetrates. It is fixed by the holding bolt 64. It is preferable that the holding bolts 64 are provided at equal intervals of 4 to 12 on the circumference. The inner peripheral edge portion of the valve seat 61 is provided with a surface that can be inclined toward the outflow passage side so as to abut the contact surface of the valve body 14. As a result, the valve seat 61 is deformed along the valve body 14 whose axis is deviated, and leakage can be prevented. Further, by adjusting the pressing force of the actuator 24 with respect to the valve body 14, the valve seat 61 in which the displaced portion abuts with respect to the deviation of the axial center of the valve body 14 is tilted, and the valve is valved by the restoring force of the tilted portion. It is also possible to correct the deviation of the body 14 (alignment function) and restore the valve body 14 to an accurate position.

FIG. 5 shows an enlarged cross-sectional view of the vicinity of the guided portion used for the valve of the third embodiment. Since the contact surface of the valve seat 61 that comes into contact with the contact surface of the valve seat 14 is free in this way, even if the valve stem 15 is displaced, the valve seat 61 is also biased due to the bias of the valve body 14. Since it is deformed, in a valve having a long valve rod 15 having a valve body 14 at the tip, the bias of the contact pressure applied between the two is suppressed, and the life of the valve does not have such a conventional valve seat structure. It can be longer than the valve.

FIG. 6 shows an enlarged cross-sectional view of the vicinity of the guided portion used for the valve of the fourth embodiment. The difference from the valve seat 61 of FIG. 6 is that the valve seat 61 is screwed into the lower surface side between the outer peripheral edge portion and the inner peripheral edge portion of the valve seat 61 from below the lower support plate 63 as shown in the drawing. It is to have a male screw tip storage space 67 for accommodating the tips of a plurality of male screws 66.

The male screw 66 is screwed in from below, and the structure is such that the distance between the screw tip and the back surface of the valve seat 61 can be adjusted. By appropriately adjusting this distance, the bending of the valve seat 61 can be optimized, and the degree of deformation of the valve seat 61 with respect to the bias of the valve body 14 can be adjusted. The lower support plate 63 is cut with a female screw (unsigned) that meshes with the male screw 66. It is preferable that the male threads 66 are provided on the circumference at equal intervals of 4 to 12. The inner peripheral edge portion of the valve seat 61 is provided with a surface that is inclined toward the outflow passage side so as to abut the contact surface of the valve body 14.

Similar to the valve of the third embodiment, in a valve having a long valve rod 15 having a valve body 14 at the tip, the bias of the contact pressure applied between the two is suppressed, and the life of the valve is as long as that of the conventional valve. It can be made longer than a valve that does not have a seat structure.

1; valve 10; valve body 11; inflow passage 12; outflow passage 13; valve seat 14; valve body 15; valve rod 16; heater storage space 17; heater 18; bellows 19; lid member 20; cover material 21; power line 22; Stem 23; Stay 24; Actuator 40; Guided portion 41; Guided portion plate 42; Guided portion neck 43; Side surface 44; Guided portion hole 50; Guided portion 51; Guided portion plate 52; Guided portion plate 52; Radical 53; Side surface 61; Valve seat 62; Upper support plate 63; Lower support plate 64; Holding bolt 65; Valve body bottom plate 66; Male screw 67; Male screw tip storage space

Claims (4)

A valve body having a fluid inflow passage, an outflow passage and a valve seat formed between these passages,
A valve having a valve rod provided with a valve body that contacts and separates from the valve seat.
The outflow passage is formed by a pipe through which a fluid flows out, and the shaft of the pipe and the shaft of the valve stem are coaxial.
The valve body is provided with a guided portion formed by extending from the tip of the valve body in the axial direction of the valve rod, and the side surface of the guided portion is formed by the inner peripheral surface of the pipe. A valve characterized by being guided in the axial direction of the rod. The cross section of the valve body is circular, the cross section of the valve seat is ring-shaped, the outer circumference of the cross section of the guided portion is circular, the cross section of the valve body, and the valve seat. The valve according to claim 1, wherein the center of the cross section and the cross section of the guided portion are concentric. A valve body having a fluid inflow passage, an outflow passage and a valve seat formed between these passages,
A valve having a valve rod provided with a valve body that contacts and separates from the valve seat.
The valve seat is an annular shape in a plan view formed of a thin plate, the outer peripheral edge portion of the valve seat is fixed to the valve body, and the inner peripheral edge portion is in contact with the contact surface of the valve body. A valve with a surface that can be tilted toward the outflow passage side. The outer peripheral edge portion is fixed to the valve body by sandwiching the lower surface with an annular lower support plate and the upper surface with an annular upper support plate.
The claim is characterized in that, on the lower surface side between the outer peripheral edge portion and the inner peripheral edge portion, a male screw tip storage space for accommodating a plurality of male screw tips screwed from below the lower support plate is provided. The valve according to 3.

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