JP2020136579A - Thermoelectric conversion device - Google Patents

Abstract

To provide a thermoelectric conversion device capable of improving output.SOLUTION: A thermoelectric conversion device comprises: a first base material 2 and a third base material 3 having first faces 2a and 3a and second faces 2b and 3b which are opposite in a thickness direction; a plurality of first thermoelectric elements 4 which is provided in parallel to an inner-surface direction at a first face 2a side of the first base material 2; and a plurality of second thermoelectric elements 5 provided in parallel to an inner-surface direction at a first surface 3a side of the second base material 3. The first base material 2 and the second base material 3 are arranged in a state where the first faces 2a and 3a are faced each other, and an end part of the first thermoelectric element 4 and the end part of the second thermoelectric element 5 are arranged in a state where they face each other.SELECTED DRAWING: Figure 2

Description

The present invention relates to a thermoelectric conversion device.

For example, exhaust heat from an internal combustion engine, a combustion device, or the like is lost without being used. Therefore, from the viewpoint of energy saving, the use of this waste heat has been attracting attention in recent years. In particular, research on thermoelectric converters capable of converting heat to electricity has been actively conducted (see, for example, Patent Document 1 below).

Specifically, in Patent Document 1 below, an insulating substrate and one of p-type and n-type thermoelectric conversion materials are provided, and a plurality of them are arranged on the first surface of the insulating substrate at intervals. On the first surface side of the insulating substrate, the thermoelectric conversion material film (thermoelectric conversion element) formed, the first electrode and the second electrode formed on each thermoelectric conversion material film so as to be separated from each other. A first heat transfer plate that is arranged and provided with a convex portion that contacts the first electrode, and a second surface that is arranged on the second surface side of the insulating substrate and is on the second surface of the insulating substrate. A thermoelectric conversion module (thermoelectric conversion device) having a second heat transfer plate provided with a convex portion in contact with a region corresponding to the two electrodes is disclosed.

International Publication No. 2011/065185

By the way, although it is desired to improve the output of the thermoelectric conversion device as described above, it is difficult to increase the output of the conventional thermoelectric conversion device.

The present invention has been proposed in view of such conventional circumstances, and an object of the present invention is to provide a thermoelectric conversion device capable of improving output.

In order to achieve the above object, the present invention provides the following means.
[1] A first base material and a second base material having a first surface and a second surface facing each other in the thickness direction,
A plurality of first thermoelectric conversion elements provided side by side in the in-plane direction on the first surface side of the first base material, and
A plurality of second thermoelectric conversion elements provided side by side in the in-plane direction on the first surface side of the second base material are provided.
The first base material and the second base material are arranged with the first surface facing each other, and at the same time.
A thermoelectric conversion device characterized in that an end portion of the first thermoelectric conversion element and an end portion of the second thermoelectric conversion element are arranged in a state of facing each other.
[2] The end of the first thermoelectric conversion element and the end of the second thermoelectric conversion element, which are arranged between the first base material and the second base material and face each other in the thickness direction. The thermoelectric conversion device according to claim [1], further comprising a heat transfer portion that thermally joins the portions.
[3] A hot contact portion thermally connected to the end of the first thermoelectric conversion element and the end of the second thermoelectric conversion element on the hot contact side,
The first thermoelectric conversion element and the cold contact portion thermally connected to the end on the cold contact side of the second thermoelectric conversion element are provided.
The first base material has a first thick-walled portion provided on the second surface side corresponding to either the hot contact portion or the cold contact portion.
The second base material has a second thick-walled portion provided on the second surface side corresponding to any of the hot contact portion and the cold contact portion. The thermoelectric conversion device according to [1] or [2].
[4] The thermoelectric conversion device according to the above [3], wherein the first thick portion and the second thick portion are provided at positions shifted from each other in the thickness direction.
[5] The thermoelectric conversion device according to the above [3], wherein the first thick portion and the second thick portion are provided at positions facing each other in the thickness direction.
[6] At least one of the plurality of first thermoelectric conversion elements and the plurality of second thermoelectric conversion elements has a configuration in which thermoelectric conversion elements having the same conductive type are arranged side by side. The thermoelectric conversion device according to any one of the above [1] to [5].
[7] At least one of the plurality of first thermoelectric conversion elements and the plurality of second thermoelectric conversion elements has a configuration in which thermoelectric conversion elements having different conductive types are alternately arranged. The thermoelectric conversion device according to any one of the above [1] to [5].
[8] A group of first thermoelectric conversion elements configured by electrically connecting the plurality of first thermoelectric conversion elements.
A second thermoelectric conversion element group configured by electrically connecting the plurality of second thermoelectric conversion elements, and
The item according to any one of the above [1] to [7], which comprises a conductive portion that electrically connects the first thermoelectric conversion element group and the second thermoelectric conversion element group. The thermoelectric conversion device described.
[9] Other than the first electrode and the first thermoelectric conversion element provided on one end side of the first thermoelectric conversion element in the first direction in which the plurality of first thermoelectric conversion elements are arranged. A second electrode provided on the end side and
On the third electrode provided on one end side of the second thermoelectric conversion element and the other end side of the second thermoelectric conversion element in the second direction in which the plurality of second thermoelectric conversion elements are arranged. With the provided fourth electrode,
One wiring that electrically connects between the first electrodes or between the second electrodes provided in the first thermoelectric conversion element, which are adjacent to each other in the first direction.
The other wiring that electrically connects between the third electrodes or between the fourth electrodes provided in the second thermoelectric conversion element, which are adjacent to each other in the second direction.
The first electrode or the second electrode provided on the first thermoelectric conversion element and the third electrode or the third electrode provided on the second thermoelectric conversion element facing each other in the thickness direction. It is provided with a conductive portion that electrically connects to and from the electrode of 4.
The plurality of first thermoelectric conversion elements have a first conductive type and have a first conductive type.
The item according to any one of the above [1] to [5], wherein the plurality of second thermoelectric conversion elements have a second conductive type opposite to the first conductive type. Thermoelectric converter.
[10] The thermoelectric according to any one of the above [1] to [9], wherein a sealing material for sealing between the first base material and the second base material is provided. Conversion device.

As described above, according to the present invention, it is possible to provide a thermoelectric conversion device capable of improving the output.

It is a perspective view which shows the appearance of the thermoelectric conversion apparatus which concerns on 1st Embodiment of this invention. It is sectional drawing which shows the structure of the thermoelectric conversion apparatus shown in FIG. It is a developed view which shows the structure of the thermoelectric conversion apparatus shown in FIG. It is sectional drawing of the thermoelectric conversion apparatus by the line segment AA shown in FIG. It is sectional drawing of the thermoelectric conversion apparatus by the line segment BB shown in FIG. It is a developed view which shows the structure of the thermoelectric conversion apparatus which concerns on 2nd Embodiment of this invention. It is sectional drawing of the thermoelectric conversion apparatus by the line segment AA shown in FIG. It is sectional drawing of the thermoelectric conversion apparatus by the line segment BB shown in FIG. It is a developed view which shows the structure of the thermoelectric conversion apparatus which concerns on 3rd Embodiment of this invention. It is sectional drawing of the thermoelectric conversion apparatus by the line segment AA shown in FIG. It is sectional drawing of the thermoelectric conversion apparatus by the line segment BB shown in FIG. It is a developed view which shows the structure of the thermoelectric conversion apparatus which concerns on 4th Embodiment of this invention. It is sectional drawing of the thermoelectric conversion apparatus by the line segment CC shown in FIG. It is sectional drawing of the thermoelectric conversion apparatus by the line segment DD shown in FIG. It is a developed view which shows the structure of the thermoelectric conversion apparatus which concerns on 5th Embodiment of this invention. It is sectional drawing of the thermoelectric conversion apparatus by the line segment AA shown in FIG. It is sectional drawing of the thermoelectric conversion apparatus by the line segment BB shown in FIG. It is a developed view which shows the structure of the thermoelectric conversion apparatus which concerns on 6th Embodiment of this invention. It is sectional drawing of the thermoelectric conversion apparatus by the line segment AA shown in FIG. It is sectional drawing of the thermoelectric conversion apparatus by the line segment BB shown in FIG. It is sectional drawing which shows the structure of the thermoelectric conversion apparatus which concerns on 7th Embodiment of this invention. It is sectional drawing which shows the structure of the thermoelectric conversion apparatus which concerns on 8th Embodiment of this invention. It is sectional drawing which shows the structure of the thermoelectric conversion apparatus which concerns on 9th Embodiment of this invention. It is sectional drawing which shows the structure of the thermoelectric conversion apparatus which concerns on tenth embodiment of this invention. It is sectional drawing which shows the structure of the thermoelectric conversion apparatus which concerns on 11th Embodiment of this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
In addition, in the drawings used in the following description, in order to make the features easy to understand, the featured parts may be enlarged for convenience, and the dimensional ratio of each component may not be the same as the actual one. Make it not exist. Further, the materials and the like exemplified in the following description are examples, and the present invention is not necessarily limited to them, and the present invention can be appropriately modified without changing the gist thereof.

(First Embodiment)
First, as a first embodiment of the present invention, for example, the thermoelectric conversion device 1A shown in FIGS. 1 to 5 will be described.
Note that FIG. 1 is a perspective view showing the appearance of the thermoelectric conversion device 1A. FIG. 2 is a cross-sectional perspective view showing the configuration of the thermoelectric conversion device 1A. FIG. 3 is a developed view showing the configuration of the thermoelectric conversion device 1A. FIG. 4 is a cross-sectional view of the thermoelectric conversion device 1A using the line segments AA shown in FIG. FIG. 5 is a cross-sectional view of the thermoelectric conversion device 1A using the line segments BB shown in FIG.

Further, in the drawings shown below, the XYZ Cartesian coordinate system is set, the X-axis direction is the first direction X in the specific plane of the thermoelectric conversion device 1A, and the Y-axis direction is in the specific plane of the thermoelectric conversion device 1A. The second directions Y and Z-axis directions are shown as thickness directions Z orthogonal to the specific in-plane of the thermoelectric conversion device 1A, respectively.

As shown in FIGS. 1 to 5, the thermoelectric conversion device 1A of the present embodiment has a first substrate 2 on one side (upper side in the present embodiment) facing each other in the thickness direction Z and the other side (in the present embodiment). It is provided with a second substrate 3 (lower side). The thermoelectric conversion device 1A has a structure in which the periphery between the first substrate 2 and the second substrate 3 is sealed by the sealing material S. Further, the second substrate 3 protrudes to the outside (-X side in the present embodiment) from the range where the first substrate 2 and the first substrate 2 overlap in the thickness direction Z.

In the developed view of the thermoelectric conversion device 1A shown in FIG. 3, the surfaces of the first substrate 2 shown on the left side in FIG. 3 and the second substrate 3 on the right side shown on the right side in FIG. 3 are spread apart from each other. It is shown in the state of being. The same applies to the developed views of FIGS. 6, 9, 12, 12, 15, and 18 shown below.

The first substrate 2 is a first base material having a first surface (lower surface in the present embodiment) 2a and a second surface (upper surface in the present embodiment) 2b facing each other in the thickness direction Z. It is formed in a rectangular flat plate shape (rectangular shape in this embodiment) in a plan view.

On the other hand, the second substrate 3 is a second substrate having a first surface (upper surface in the present embodiment) 3a and a second surface 3b (lower surface in the present embodiment) facing each other in the thickness direction Z. It is larger than the first substrate 2 and is formed in a rectangular flat plate shape (rectangular shape in this embodiment) in a plan view.

As the first substrate 2 and the second substrate 3, for example, it is preferable to use a high resistance silicon (Si) substrate having a sheet resistance of 10 Ω or more. When the sheet resistance of the first substrate 2 and the second substrate 3 is 10Ω or more, it is possible to prevent an electrical short circuit from occurring between the plurality of thermoelectric conversion elements.

The first and second substrates 2 and 3 include, for example, an SOI (Silicon On Insulator) substrate having an oxide insulating layer in the substrate, a ceramic substrate, and the like, in addition to the high resistance Si substrate described above. A high resistance single crystal substrate or the like can be used. Further, as the first and second substrates 2 and 3, even if the sheet resistance is a low resistance substrate of 10Ω or less, a high resistance material is arranged between the low resistance substrate and the thermoelectric conversion element. Can be used.

The sealing material S is made of, for example, a high-temperature adhesive such as a silicone-based adhesive, and is sealed so as to surround the periphery between the first substrate 2 and the second substrate 3. Further, a space K1 is provided between the first substrate 2 and the second substrate 3 sealed by the sealing material S.

Further, this space K1 may be decompressed. The decompressed space K1 is provided by a method of sealing between the first substrate 2 and the second substrate 3 with a sealing material S in a decompressed atmosphere, or a hole in a part of the sealing material S. It is possible to form the space K1 by providing a method of depressurizing the space K1 through the hole and then sealing the hole.

The thermoelectric conversion device 1A of the present embodiment has a configuration in which the space between the first substrate 2 and the second substrate 3 is sealed by the sealing material S described above. The configuration is not necessarily limited, and the sealing material S may be omitted.

The thermoelectric conversion device 1A includes a plurality of (32 in this embodiment) first thermoelectric conversion elements 4 arranged on the first surface 2a side of the first substrate 2, and a first of the second substrates 3. It includes a plurality of (32 in this embodiment) second thermoelectric conversion elements 5 arranged on the surface 3a side.

The thermoelectric conversion device 1A has a first direction X and a second direction Y that intersect each other (orthogonally in the present embodiment) in a plane (in a specific plane) on the first surface 2a side of the first substrate 2. Among them, a plurality of first thermoelectric conversion elements 4 (eight in the present embodiment) arranged in the first direction X, respectively, and arranged in the second direction Y (in the present embodiment). It includes the first thermoelectric conversion element rows 4A to 4D (4 rows).

Further, the thermoelectric conversion device 1A has a first direction X and a second direction that intersect each other (orthogonally in the present embodiment) in a plane (in a specific plane) on the first surface 3a side of the second substrate 3. Of Y, a plurality of second thermoelectric conversion elements 5 (eight in the present embodiment) arranged in the first direction X are provided, and a plurality of second thermoelectric conversion elements 5 arranged in the second direction Y (this embodiment). In the embodiment, the second thermoelectric conversion element rows 5A to 5D (4 rows) are provided.

The first and second thermoelectric conversion elements 4 and 5 constituting the first and second thermoelectric conversion element trains 4A to 4D and 5A to 5D have the same size as each other and are rectangular in a plan view (in the present embodiment). It is formed in a rectangular shape). Further, the first and second thermoelectric conversion elements 4 and 5 are arranged in the first direction X at regular intervals with the first direction X as the lateral direction and the second direction Y as the longitudinal direction. Have been placed. Further, one thermoelectric conversion element array and the other thermoelectric conversion element array that are adjacent to each other in the second direction Y are arranged side by side in parallel with each other with a certain interval between them.

The first thermoelectric conversion element trains 4A to 4D are each a first thermoelectric conversion element 4 (hereinafter, if necessary) composed of either a p-type semiconductor or an n-type semiconductor (n-type semiconductor in this embodiment). It is distinguished as "one thermoelectric conversion element 41") and a first thermoelectric conversion element 4 (hereinafter, necessary) composed of either a p-type semiconductor or an n-type semiconductor (p-type semiconductor in this embodiment). Therefore, it is distinguished as "the other thermoelectric conversion element 42") and has a configuration in which they are arranged alternately. That is, the first thermoelectric conversion element sequences 4A to 4D have a configuration in which one thermoelectric conversion element 41 having different conductive types and the other thermoelectric conversion element 42 are alternately arranged.

Similarly, the second thermoelectric conversion element sequences 5A to 5D each include a second thermoelectric conversion element 5 (hereinafter, necessary) composed of either a p-type semiconductor or an n-type semiconductor (n-type semiconductor in the present embodiment). A second thermoelectric conversion element 5 (hereinafter, p-type semiconductor in the present embodiment) consisting of a p-type semiconductor and an n-type semiconductor (p-type semiconductor in the present embodiment) and a p-type semiconductor and an n-type semiconductor. , If necessary, it is distinguished as "the other thermoelectric conversion element 52") and has a configuration in which they are arranged alternately. That is, the second thermoelectric conversion element rows 5A to 5D have a configuration in which one thermoelectric conversion element 51 having different conductive types and the other thermoelectric conversion element 52 are alternately arranged.

When one of the thermoelectric conversion elements 41 and 51 is an n-type thermoelectric conversion film, for example, an n-type silicon (Si) film doped with a high concentration (10 ¹⁸ to 10 ¹⁹ cm ^-3 ) of antimony (Sb). A multilayer film of n-type silicon germanium (SiGe) alloy film and n-type silicon germanium (SiGe) alloy film can be used. Further, one of the thermoelectric conversion elements 41 and 51 may be an n-type semiconductor having the same configuration as each other, or may be an n-type semiconductor having different configurations from each other. When one of the thermoelectric conversion elements 41 and 51 is an n-type semiconductor, a current flows through the one thermoelectric conversion element 41 and 51 from the cold contact side to the hot contact side.

On the other hand, when the other thermoelectric conversion elements 42 and 52 are p-type thermoelectric conversion films, for example, p-type doped with high-concentration (10 ¹⁸ to 10 ¹⁹ cm ^-3 ) boron (B), respectively. A multilayer film of a silicon (Si) film and a p-type silicon-germanium (SiGe) alloy film can be used. Further, the other thermoelectric conversion elements 42 and 52 may be p-type semiconductors having the same configuration as each other, or may be p-type semiconductors having different configurations from each other. When the other thermoelectric conversion elements 42 and 52 are p-type semiconductors, a current flows through the other thermoelectric conversion elements 42 and 52 from the hot contact side to the cold contact side.

Further, the first and second thermoelectric conversion elements 4 and 5 are not necessarily limited to the multilayer film of the n-type or p-type semiconductor described above, and may be a single-layer film of the n-type or p-type semiconductor. Good. Further, an oxide semiconductor can also be used as the semiconductor. Further, for example, a thermoelectric conversion film made of an organic polymer film, a metal film, or the like can be used. Further, the first and second thermoelectric conversion elements 4 and 5 are not limited to the above-mentioned thermoelectric conversion film, and those made of bulk may be used.

The thermoelectric conversion device 1A includes one end side of each first thermoelectric conversion element 4 in the arrangement direction (first direction X) of the first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element trains 4A to 4D, and the like. The arrangement direction (first direction X) of the plurality of electrodes 6 (nine in the present embodiment) provided on the end side and the second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5D. ), A plurality of (9 in this embodiment) electrodes 7 provided on one end side and the other end side of each of the second thermoelectric conversion elements 5 are provided.

The plurality of electrodes 6 are arranged on the first surface 2a of the first substrate 2, and the side surfaces on one end side and the side surfaces on the other end side facing each other in the first direction X of the first thermoelectric conversion element 4. And the main surface (lower surface in this embodiment) along the side surface on one end side and the side surface on the other end side of the first thermoelectric conversion element 4, respectively, are arranged in contact with each other.

In the present embodiment, the electrodes 6 have the same size and a rectangular shape in a plan view over the entire longitudinal direction (second direction Y) of the first thermoelectric conversion element 4 (rectangular shape in the present embodiment). Is formed in. For the electrode 6, for example, copper (Cu) or gold (Au), which has high conductivity and thermal conductivity and is easy to shape, can be preferably used.

The plurality of electrodes 6 may be arranged on the main surface along the side surface on one end side and the side surface on the other end side facing each other in the first direction X of the first thermoelectric conversion element 4. .. Further, the plurality of electrodes 6 are formed on the first surface 2a of the first substrate 2 on the side surface on one end side and the side surface on the other end side facing each other in the first direction X of the first thermoelectric conversion element 4. The configuration may be arranged in contact with each other.

Similarly, the plurality of electrodes 7 are arranged on the first surface 3a of the second substrate 3, and the side surfaces and the other ends of the second thermoelectric conversion element 5 facing each other in the first direction X. It is arranged in contact with the side surface and the main surface (upper surface in the present embodiment) along the side surface on one end side and the side surface on the other end side of the second thermoelectric conversion element 5.

In the present embodiment, the electrodes 7 have the same size and a rectangular shape in a plan view over the entire longitudinal direction (second direction Y) of the second thermoelectric conversion element 5 (rectangular shape in the present embodiment). Is formed in. For the electrode 7, for example, copper (Cu) or gold (Au), which has high conductivity and thermal conductivity and is easy to shape, can be preferably used.

The plurality of electrodes 7 may be arranged on the main surface along the side surface on one end side and the side surface on the other end side facing each other in the first direction X of the second thermoelectric conversion element 5. .. Further, the plurality of electrodes 7 are formed on the first surface 3a of the second substrate 3 on the side surface on one end side and the side surface on the other end side facing each other in the first direction X of the second thermoelectric conversion element 5. The configuration may be arranged in contact with each other.

The plurality of electrodes 6 are electrically connected to the cold contact side electrode that is electrically connected to the cold contact side end of the first thermoelectric conversion element 4 and the hot contact side end of the first thermoelectric conversion element 4. A plurality of (five in this embodiment) first electrodes 6a that are one of the hot contact side electrodes (cold contact side electrodes in the present embodiment) and one of the other (the present embodiment) connected to the above. It has a plurality of (four in this embodiment) second electrodes 6b that serve as hot contact side electrodes in the embodiment. The first electrode 6a and the second electrode 6b are arranged alternately side by side in the first direction X.

Therefore, the plurality of first thermoelectric conversion elements 4 are arranged between the first electrodes 6a and the second electrodes 6b that are alternately adjacent to each other in the arrangement direction (first direction X) of the plurality of electrodes 6. Then, it is electrically connected to the first electrode 6a and the second electrode 6b.

The first electrode 6a is one end side (−X side in this embodiment) of one thermoelectric conversion element 41 and the other end side (this) of the other thermoelectric conversion element 42 among the plurality of first thermoelectric conversion elements 4. In the embodiment, it is arranged on the + X side). The second electrode 6b is the other end side (+ X side in this embodiment) of one thermoelectric conversion element 41 and one end side of the other thermoelectric conversion element 42 (this embodiment) among the plurality of first thermoelectric conversion elements 4. In the form, it is arranged on the −X side).

As a result, in one thermoelectric conversion element 41 made of an n-type semiconductor, a current flows from the first electrode 6a side, which is the cold contact side electrode, to the second electrode 6b side, which is the warm contact side electrode. On the contrary, in the other thermoelectric conversion element 42 made of a p-type semiconductor, a current flows from the second electrode 6b side, which is the hot contact side electrode, to the first electrode 6a side, which is the cold contact side electrode.

Therefore, each of the first thermoelectric conversion element trains 4A to 4D is connected to each first thermoelectric conversion element 4 by connecting each of the plurality of first thermoelectric conversion elements 4 in series with each other via the electrode 6. The directions of the flowing currents are the same as each other. In FIG. 3, the direction of the current flowing through each of the first thermoelectric conversion elements 4 is represented by the direction of the arrow.

Similarly, the plurality of electrodes 7 include a cold contact side electrode that is electrically connected to the cold contact side end of the second thermoelectric conversion element 5, and a hot contact side end of the second thermoelectric conversion element 5. Of the hot contact side electrodes electrically connected to and one of the plurality of (five in the present embodiment) third electrodes 7a which are one of the hot contact side electrodes (cold contact side electrodes in the present embodiment) and the other. It has a plurality of (four in this embodiment) fourth electrodes 7b that serve as (warm contact side electrodes in this embodiment). The third electrode 7a and the fourth electrode 7b are arranged alternately side by side in the first direction X.

Therefore, the plurality of second thermoelectric conversion elements 5 are arranged between the third electrodes 7a and the fourth electrodes 7b that are alternately adjacent to each other in the arrangement direction (first direction X) of the plurality of electrodes 7. Then, it is electrically connected to the third electrode 7a and the fourth electrode 7b.

The third electrode 7a is the other end side (+ X side in this embodiment) of one thermoelectric conversion element 51 and one end side of the other thermoelectric conversion element 52 (this embodiment) among the plurality of second thermoelectric conversion elements 5. In the form, it is arranged on the −X side). The fourth electrode 7b is one end side (-X side in this embodiment) of one thermoelectric conversion element 51 and the other end side (this) of the other thermoelectric conversion element 52 among the plurality of second thermoelectric conversion elements 4. In the embodiment, it is arranged on the + X side).

As a result, in one thermoelectric conversion element 51 made of an n-type semiconductor, a current flows from the third electrode 7a side, which is the cold contact side electrode, to the fourth electrode 7b side, which is the warm contact side electrode. On the contrary, in the other thermoelectric conversion element 52 made of a p-type semiconductor, a current flows from the fourth electrode 7b side, which is the hot contact side electrode, to the third electrode 7a side, which is the cold contact side electrode.

Therefore, each of the second thermoelectric conversion element rows 5A to 5D is connected to each of the second thermoelectric conversion elements 5 by connecting the plurality of second thermoelectric conversion elements 5 in series with each other via the electrodes 7. The directions of the flowing currents are the same as each other. In FIG. 3, the direction of the current flowing through each of the second thermoelectric conversion elements 5 is indicated by the direction of the arrow.

The thermoelectric conversion device 1A connects one of the first thermoelectric conversion element sequences 4A to 4D adjacent to each other in the second direction Y and the other thermoelectric conversion element array in series with each other. Of the plurality of (three in this embodiment) first wirings 8a and 8b and the second thermoelectric conversion element sequences 5A to 5D, one thermoelectric conversion element array and the other thermoelectric conversion element array adjacent to each other in the second direction Y A plurality of (three in this embodiment) second wirings 9a and 9b for connecting each of the conversion element trains in series with each other are provided.

The first wirings 8a and 8b are arranged on the first surface 2a of the first substrate 2, and one of the first thermoelectric conversion element trains 4A to 4D adjacent to each other in the second direction Y is thermoelectric. The electrodes 6 located on one end side or the other end side in the first direction X of the conversion element train and the other thermoelectric conversion element train are electrically connected to each other.

As a result, the first thermoelectric conversion element sequences 4A to 4D are a group of first thermoelectric conversion elements in which a plurality of first thermoelectric conversion elements 4 are connected in series to each other via a plurality of first wirings 8a and 8b. It constitutes 40A. As the material of the first wirings 8a and 8b, the same material as that illustrated in the electrode 6 described above can be used.

Similarly, the second wirings 9a and 9b are arranged on the first surface 3a of the second substrate 3 and are adjacent to each other in the second direction Y of the second thermoelectric conversion element rows 5A to 5D. The electrodes 7 located on one end side or the other end side in the first direction X of one thermoelectric conversion element array and the other thermoelectric conversion element array are electrically connected to each other.

As a result, the second thermoelectric conversion element rows 5A to 5D are a group of second thermoelectric conversion elements in which a plurality of second thermoelectric conversion elements 5 are connected in series to each other via a plurality of second wirings 9a and 9b. It constitutes 50A. As the material of the second wirings 9a and 9b, the same material as that illustrated in the electrode 7 described above can be used.

As shown in FIGS. 3 to 5, the thermoelectric conversion device 1A is a pair electrically connected to the first thermoelectric conversion element trains 4A to 4D (first thermoelectric conversion element group 40A) connected in series with each other. First external connection terminals 10a and 10b are provided.

The pair of first external connection terminals 10a and 10b are on the first surface 3a of the second substrate 3 and are outside the range of overlapping with the first substrate 2 in the thickness direction Z (-X in this embodiment). It is located on the side). Further, on the first surface 3a of the second substrate 3, a pair of first land portions 11a, 11b electrically connected to the pair of first external connection terminals 10a, 10b are provided. ing.

Of these, one of the first external connection terminals 10a is the second thermoelectric conversion located on the most one end side (-Y side) in the second direction Y of the second thermoelectric conversion element trains 5A to 5D. It is arranged on the outer side (−X side) of the electrode 7 located on the most one end side (−X side) in the first direction X of the element train 5A. On the other hand, the other first external connection terminal 10b is located on the other end side (+ Y side) of the second thermoelectric conversion element trains 5A to 5D in the second direction Y. It is arranged on the outer side (-X side) of the electrode 7 located on the one end side (-X side) in the first direction X of the thermoelectric conversion element train 5D.

On the other hand, the first external connection terminal 10a is formed in a rectangular shape (rectangular shape in the present embodiment) in a plan view. Further, one of the first external connection terminals 10a is formed continuously with one of the first land portions 11a protruding toward the other end side (+ X side) of the first direction X. , Is electrically connected to one of the first land portions 11a.

Similarly, the other first external connection terminal 10b is formed in a rectangular shape (rectangular shape in the present embodiment) in a plan view. Further, the other first external connection terminal 10a is formed continuously with the other first land portion 11b projecting toward the other end side (+ X side) of the first direction X. , Is electrically connected to the other first land portion 11b.

On the other hand, a pair of second land portions 12a and 12b are provided on the first surface 2a of the first substrate 2. Of these, the second land portion 12a is the first thermoelectric conversion element sequence located on the most one end side (−Y side) in the second direction Y of the first thermoelectric conversion element sequences 4A to 4D. It is electrically connected to the electrode 6 located on the one end side (−X side) in the first direction X of 4A.

In the present embodiment, one second land portion 12a is formed continuously with the electrode 6, and is outside the electrode 6 (up to a position facing the first land portion 11a in the thickness direction Z). It is provided so as to project toward the −X side).

Further, the other second land portion 12b is the first thermoelectric conversion element row 4D located on the other end side (+ Y side) of the first thermoelectric conversion element rows 4A to 4D in the second direction Y. It is electrically connected to the electrode 6 located at one end side (−X side) in the first direction X of the above.

In the present embodiment, the other second land portion 12b is formed continuously with the electrode 6, and is outside the electrode 6 (up to a position facing the other first land portion 11a in the thickness direction Z). It is provided so as to project toward the −X side).

As for the first external connection terminals 10a and 10b and the first land portions 11a and 11b, the same materials as those exemplified for the above-mentioned electrode 7 can be used. Further, for the second land portions 12a and 12b, the same materials as those exemplified for the electrode 6 described above can be used.

The first land portions 11a and 11b and the second land portions 12a and 12b are electrically connected to each other via a pair of conductive portions 13a and 13b. The pair of conductive portions 13a and 13b are formed by, for example, a method of connecting the land portions 12a and 12b using silver paste, a method of connecting the land portions 12a and 12b using solder bumps and plating bumps, and the like. be able to.

Of these, one conductive portion 13a is arranged between one first land portion 11a and one second land portion 12a, and the first land portion 11a and the second land portion 12a There is an electrical connection between them. Similarly, the other conductive portion 13b is arranged between the other first land portion 11b and the other second land portion 12b, and the first land portion 11b and the second land portion 12b There is an electrical connection between them.

As a result, the first thermoelectric conversion element rows 4A to 4D (first thermoelectric conversion element group 40A) provided on the first substrate 2 side and the pair of first ones provided on the second substrate 3 side. It is possible to electrically connect the external connection terminals 10a and 10b. That is, the plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element sequences 4A to 4D (first thermoelectric conversion element group 40A) are located between the pair of first external connection terminals 10a and 10b. They are connected in series.

In FIG. 3, the direction of the current flowing between the first land portion 11a, 11b and the second land portion 11a, 11b, 12a, 12b is set to the arrow tip (direction toward the front of the paper) or the arrowhead (direction toward the front of the paper), respectively. It is represented by a symbol (direction toward the back of the paper).

The thermoelectric conversion device 1A has a pair of second external connection terminals 14a, which are electrically connected to the second thermoelectric conversion element trains 5A to 5D (second thermoelectric conversion element group 50A) connected in series with each other. It has 14b. The pair of second external connection terminals 14a and 14b are outside the range of overlapping the first substrate 2 in the thickness direction Z on the first surface 3a of the second substrate 3 (-X in this embodiment). It is located on the side).

Of these, one of the second external connection terminals 14a is the second thermoelectric conversion located on the most one end side (-Y side) in the second direction Y of the second thermoelectric conversion element trains 5A to 5D. It is arranged on the outer side (−X side) of the electrode 7 located on the most one end side (−X side) in the first direction X of the element train 5A. On the other hand, the other second external connection terminal 14b is located on the other end side (+ Y side) of the second thermoelectric conversion element trains 5A to 5D in the second direction Y. It is arranged on the outer side (-X side) of the electrode 7 located on the one end side (-X side) in the first direction X of the thermoelectric conversion element train 5D.

On the other hand, the second external connection terminal 14a is formed in a rectangular shape (rectangular shape in the present embodiment) in a plan view, and is extended toward the other end side (+ X side) of the first direction X. It is electrically connected to the electrode 7 via the third wiring 15a. Similarly, the other second external connection terminal 14b is formed in a rectangular shape (rectangular shape in the present embodiment) in a plan view, and is directed toward the other end side (+ X side) of the first direction X. It is electrically connected to the electrode 7 via the other extended third wire 15b. As for the second external connection terminals 14a and 14b and the third wirings 15a and 15b, the same materials as those exemplified for the above-mentioned electrode 7 can be used.

As a result, the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5D (second thermoelectric conversion element group 50A) are located between the pair of second external connection terminals 14a and 14b. Are connected in series with.

In the thermoelectric conversion device 1A of the present embodiment, the first substrate 2 and the second substrate 3 are arranged with the first surfaces 2a and 3a facing each other, so that each first thermoelectric conversion element is arranged. The end of 4 and the end of each of the second thermoelectric conversion elements 5 are arranged so as to face each other in the thickness direction Z.

The thermoelectric conversion device 1A is arranged between the first substrate 2 and the second substrate 3, and the ends of the first thermoelectric conversion element 4 and the second thermoelectric conversion element 5 facing each other in the thickness direction Z. It is provided with a plurality of (20 in this embodiment) first heat transfer portions 16 and a plurality of (16 in this embodiment) second heat transfer portions 17 that are thermally joined to the end portions. ..

The first heat transfer section 16 constitutes a part of the cold contact section 18 that is thermally connected to the ends of the first and second thermoelectric conversion elements 4 and 5 on the cold contact side. That is, the cold contact portion 18 thermally connects the first electrode 6a and the third electrode 7a constituting the cold contact side electrode, and the first electrode 6a and the third electrode 7a. It is composed of a first heat transfer unit 16.

The second heat transfer section 17 constitutes a part of the warm contact section 19 that is thermally connected to the ends of the first and second thermoelectric conversion elements 4 and 5 on the warm contact side. That is, the warm contact portion 19 thermally connects the second electrode 6b and the fourth electrode 7b constituting the hot contact side electrode, and the second electrode 6b and the fourth electrode 7b. It is composed of a second heat transfer unit 17.

The first heat transfer portion 16 is composed of a heat transfer member arranged between each of the first electrode 6a and the third electrode 7a facing each other in the thickness direction Z. Similarly, the second heat transfer portion 17 is composed of a heat transfer member arranged between each of the second electrode 6b and the fourth electrode 7b facing each other in the thickness direction Z.

The heat transfer member is made of a material having a higher thermal conductivity than air, more preferably a material having a higher thermal conductivity than the first substrate 2 and the second substrate 3. As such a heat transfer member, it is preferable to use a metal such as Cu or Al. On the other hand, in order to provide electrical insulation between each of the first electrode 6a and the third electrode 7a and between each of the second electrode 6b and the fourth electrode 7b, a metal heat transfer member and each electrode It is preferable to interpose a heat transfer member of an insulating material between the two. As a material for such a heat transfer member, for example, a UV curable resin, a silicone resin, a heat conductive grease (for example, a silicone grease, a non-silicone grease containing a metal oxide, etc.) can be used. ..

As a result, the first heat transfer unit 16 is electrically insulated from the first electrode 6a and the third electrode 7a, and between the first electrode 6a and the third electrode 7a. It is thermally joined. Similarly, the second heat transfer unit 17 is electrically insulated from the second electrode 6b and the fourth electrode 7b, and between the second electrode 6b and the fourth electrode 7b. It is thermally joined.

The thermoelectric conversion device 1A is provided on the second surface 2b side of the first substrate 2 corresponding to either the cold contact portion 18 or the hot contact portion 19 (warm contact portion 19 in this embodiment). Corresponding to either the cold contact portion 18 or the hot contact portion 19 (cold contact portion 18 in this embodiment) on the second surface 3b side of the first thick portion 20 and the second substrate 3. It has a second thick portion 21 provided. Therefore, the first thick portion 20 and the second thick portion 21 are provided at positions shifted from each other in the thickness direction Z (positions that do not overlap each other in the thickness direction Z).

Specifically, while the first surface 2a of the first substrate 2 is flat, the second surface 2b of the first substrate 2 has a plurality of first thick portions 20 first. It is provided side by side in the direction X of. The first thick portion 20 includes a range D1 that overlaps with each temperature contact portion 19 in the thickness direction Z, and is composed of a first convex portion 20a protruding from the second surface 2b at a constant height. .. On the other hand, the portion of the first substrate 2 other than the first thick portion 20 constitutes a first thin portion 22 having a thickness thinner than that of the first thick portion 20.

Further, while the first surface 3a of the second substrate 3 is flat, a plurality of second thick portions 21 are directed in the first direction on the second surface 3b of the second substrate 3. It is provided side by side with X. The second thick portion 21 includes a range D2 that overlaps each cold contact portion 18 in the thickness direction Z, and is composed of a first convex portion 21a that protrudes from the second surface 3b at a constant height. .. On the other hand, the portion of the second substrate 3 other than the second thick portion 21 constitutes a second thin portion 23 having a thickness thinner than that of the second thick portion 21.

In the thermoelectric conversion device 1A of the present embodiment having the above configuration, the first substrate 2 is arranged on the high temperature (heating) side, and the second substrate 3 is arranged on the low temperature (heat dissipation / cooling) side. Further, the first thick portions 20 of the first substrate 2 are arranged in contact with the heat source (not shown). On the other hand, when there is a cooling source (not shown), each second thick portion 21 of the second substrate 3 is arranged in contact with the cooling source.

As a result, the heat transferred from the heat source to the first substrate 2 via the first thick portion 20 is transferred to the second electrode 6b, the second heat transfer portion 17, and the fourth electrode constituting the warm contact portion 19. It will be transmitted to 7b. As a result, the temperature of the second electrode 6b side of the first thermoelectric conversion element 4 and the temperature of the fourth electrode 7b side of the second thermoelectric conversion element 4 become relatively high.

On the other hand, the heat transferred to the first thermoelectric conversion element 4 and the second thermoelectric conversion element 4 is from the first electrode 6a, the first heat transfer portion 16 and the third electrode 7a constituting the cold contact portion 18. It is transmitted to the substrate 3 of 2, and is radiated to the outside through the second thick portion 21. Further, when there is a cooling source, the cooling source cools each second thick portion 21 of the second substrate 3, so that the first electrodes 6a and the first electrodes 6a constituting the cold contact portion 18 are cooled. The heat transfer unit 16 and the third electrode 7a will be cooled. As a result, the temperature of the first electrode 6a side of the first thermoelectric conversion element 4 and the third electrode 7a side of the second thermoelectric conversion element 4 become relatively low.

Therefore, a temperature difference is generated between the first electrode 6a side and the second electrode 6b side of the first thermoelectric conversion element 4, and the first electrode 6a side and the second electrode 6a side of the first thermoelectric conversion element 4 are generated. Charges (carriers) move to and from the electrode 6b side of the. That is, an electromotive force (voltage) due to the Seebeck effect is generated between the first electrode 6a and the second electrode 6b provided on the first thermoelectric conversion element 4.

Here, although the electromotive force (voltage) generated by one first thermoelectric conversion element 4 is small, a plurality of first thermoelectric conversion elements 4 are located between the pair of first external connection terminals 10a and 10b. Are connected in series. Therefore, it is possible to take out a relatively high voltage as the total electromotive force between the pair of first external connection terminals 10a and 10b.

Similarly, a temperature difference is generated between the third electrode 7a side and the fourth electrode 7b side of the second thermoelectric conversion element 5, and the third electrode 7a side and the third electrode 7a side of the second thermoelectric conversion element 5 are generated. Charge (carrier) is transferred to and from the electrode 7b side of 4. That is, an electromotive force (voltage) due to the Seebeck effect is generated between the third electrode 7a and the fourth electrode 7b provided on the second thermoelectric conversion element 5.

Here, although the electromotive force (voltage) generated by one second thermoelectric conversion element 5 is small, a plurality of second thermoelectric conversion elements 5 are located between the pair of second external connection terminals 14a and 14b. Are connected in series. Therefore, a relatively high voltage can be taken out from between these pair of second external connection terminals 14a and 14b as the total electromotive force.

In FIG. 3, the direction of the current flowing from one first external connection terminal 10a toward the other first external connection terminal 10b and the direction of the current flowing from the other second external connection terminal 14b to the other first external connection terminal 14b. The direction of the current flowing toward the external connection terminal 14a of No. 2 is indicated by the direction of the arrow.

As described above, in the thermoelectric conversion device 1A of the present embodiment, the first thermoelectric conversion element 4 is provided between the first surfaces 2a and 3a of the first and second substrates 2 and 3 facing each other. The end portion and the end portion of each of the second thermoelectric conversion elements 5 are arranged so as to face each other in the thickness direction Z.

In the case of this configuration, as compared with the conventional configuration using a heat transfer plate, a plurality of first and first surfaces of the first and second substrates 2 and 3 face each other in the first surfaces 2a and 3a. It is possible to integrate and arrange the thermoelectric conversion elements 4 and 5 of 2. As a result, the number of integrated first and second thermoelectric conversion elements 4 and 5 can be increased with respect to the same in-plane size, and the output of the thermoelectric conversion device 1A can be improved. is there.

Further, in the thermoelectric conversion device 1A of the present embodiment, each of the end portions of the first thermoelectric conversion element 4 and the end portions of the second thermoelectric conversion element 5 facing each other in the thickness direction Z described above is the first. Alternatively, they are thermally joined via the second heat transfer portions 16 and 17.

In the case of this configuration, heat is easily transferred from the end side of the first thermoelectric conversion element 4 to the end side of the second thermoelectric conversion element 5 via the second heat transfer unit 17. On the other hand, heat is easily released from the end side of the first thermoelectric conversion element 4 to the end side of the second thermoelectric conversion element 5 via the first heat transfer unit 16. As a result, it is possible to increase the temperature difference at both ends of the first and second thermoelectric conversion elements 4 and 5 and obtain a high output.

Further, in the thermoelectric conversion device 1A of the present embodiment, the first thick portion 20 and the second substrate which overlap with the warm contact portion 19 in the thickness direction Z on the second surface 2b side of the first substrate 2 described above. A cold contact portion 18 and a second thick portion 21 overlapping in the thickness direction Z are provided on the second surface 3b side of the third.

In the case of this configuration, the heat transferred from the heat source to the first substrate 2 via the first thick portion 20 can be efficiently transferred to the warm contact portion 19. On the other hand, the heat transferred to the second substrate 3 via the cold contact portion 18 can be efficiently released from the second thick portion 21. As a result, it is possible to increase the temperature difference at both ends of the first and second thermoelectric conversion elements 4 and 5 and obtain a high output.

(Second Embodiment)
Next, as a second embodiment of the present invention, for example, the thermoelectric conversion device 1B shown in FIGS. 6 to 8 will be described.
Note that FIG. 6 is a developed view showing the configuration of the thermoelectric conversion device 1B. FIG. 7 is a cross-sectional view of the thermoelectric conversion device 1B using the line segments AA shown in FIG. FIG. 8 is a cross-sectional view of the thermoelectric conversion device 1B using the line segments BB shown in FIG. Further, in the following description, the same parts as those of the thermoelectric conversion device 1A will be omitted and the same reference numerals will be given in the drawings.

As shown in FIGS. 6 to 8, the thermoelectric conversion device 1B of the present embodiment is a pair of the first and second external connection terminals 10a, 10b, 14a, 14b provided in the thermoelectric conversion device 1A. It is provided with terminals 24a and 24b for external connection. The thermoelectric conversion device 1B comprises a plurality of first thermoelectric conversions constituting the first thermoelectric conversion element trains 4A to 4D (first thermoelectric conversion element group 40A) between the pair of external connection terminals 24a and 24b. The element 4 and a plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element trains 5A to 5D (second thermoelectric conversion element group 50A) have a structure in which they are connected in series with each other. There is.

Specifically, of the pair of external connection terminals 24a and 24b, one of the external connection terminals 24a has the same configuration as the one of the first external connection terminals 10a, and one of the first land portions. It is electrically connected to 11a.

Further, by omitting the other first external connection terminal 10b, the other first land portion 11b is the most in the second direction Y of the second thermoelectric conversion element trains 5A to 5D. It is electrically connected to the electrode 7 located on the one end side (−X side) in the first direction X of the second thermoelectric conversion element train 5D located on the other end side (+ Y side).

On the other hand, the other external connection terminal 24b has the same configuration as the one second external connection terminal 14a, and is electrically connected to the electrode 7 via the one third wiring 15a. ing. Further, the other second external connection terminal 14b and the other third wiring 15b are omitted.

The first land portions 11a and 11b and the second land portions 12a and 12b are electrically connected to each other via a pair of conductive portions 13a and 13b. That is, one conductive portion 13a electrically connects one first land portion 11a and one second land portion 12a. Similarly, the other conductive portion 13b electrically connects the other first land portion 11b and the other second land portion 12b.

As a result, the first thermoelectric conversion element rows 4A to 4D (first thermoelectric conversion element group 40A) provided on the first substrate 2 side and the second thermoelectric conversion provided on the second substrate 3 side. It is possible to electrically connect the element rows 5A to 5D (second thermoelectric conversion element group 50A). That is, a plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element trains 4A to 4D (first thermoelectric conversion element group 40A) and second thermoelectric conversion element trains 5A to 5D (second thermoelectric conversion element trains 5A to 5D). The plurality of second thermoelectric conversion elements 5 constituting the thermoelectric conversion element group 50A) are connected in series between a pair of external connection terminals 24a and 24b.

As a result, in the thermoelectric conversion device 1B of the present embodiment, a relatively high voltage can be taken out from between the pair of external connection terminals 24a and 24b as the total electromotive force generated by the thermoelectric conversion elements 4 and 5. Is.

In FIG. 5, the direction of the current flowing through the first and second thermoelectric conversion elements 4 and 5 and the direction of the current flowing from one external connection terminal 24a toward the other external connection terminal 24b are shown. , Each is represented by the direction of the arrow. Further, the direction of the current flowing between the first land portions 11a and 11b and the second land portions 12a and 12b is set to the direction of the arrow tip (direction toward the front of the paper surface) or the arrowhead (direction toward the back of the paper surface), respectively. It is represented by a symbol.

As described above, in the thermoelectric conversion device 1B of the present embodiment, with the plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element sequences 4A to 4D (first thermoelectric conversion element group 40A) described above. , A plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element trains 5A to 5D (second thermoelectric conversion element group 50A) are connected in series between the pair of external connection terminals 24a and 24b. It is possible to connect.

Further, in the thermoelectric conversion device 1B of the present embodiment, the number of integrated first and second thermoelectric conversion elements 4 and 5 can be increased as in the case of the thermoelectric conversion device 1A, and the output of the thermoelectric conversion device 1B can be increased. It is possible to improve. Further, it is possible to obtain a high output by expanding the temperature difference at both ends of the first and second thermoelectric conversion elements 4 and 5.

(Third Embodiment)
Next, as a third embodiment of the present invention, for example, the thermoelectric conversion device 1C shown in FIGS. 9 to 11 will be described.
Note that FIG. 9 is a developed view showing the configuration of the thermoelectric conversion device 1C. FIG. 10 is a cross-sectional view of the thermoelectric conversion device 1C using the line segments AA shown in FIG. FIG. 11 is a cross-sectional view of the thermoelectric conversion device 1C using the line segments BB shown in FIG. Further, in the following description, the same parts as those of the thermoelectric conversion devices 1A and 1B will be omitted and the same reference numerals will be given in the drawings.

In the thermoelectric conversion device 1C of the present embodiment, as shown in FIGS. 9 to 11, a plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element sequences 4A to 4D have the same conductive type with each other. A semiconductor (present) having a configuration composed of a semiconductor (p-type semiconductor in the present embodiment) in which a plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5D have the same conductive type as each other. In the embodiment, it has a configuration (n-type semiconductor).

Further, the thermoelectric conversion device 1C has a first electrode 25 provided on one end side (−X side) of each first thermoelectric conversion element 4 in the first direction instead of the electrode 6, and each first electrode It has a second electrode 26 provided on the other end side (+ X side) of the thermoelectric conversion element 4 in the first direction. The first electrode 25 and the second electrode 26 are electrically connected to each of the first thermoelectric conversion elements 4. As the materials of the first and second electrodes 25 and 26, the same materials as those exemplified in the above-mentioned electrode 6 can be used.

Each of the first thermoelectric conversion element trains 4A to 4D is a first thermoelectric conversion element 4 in which a current flows from the second electrode 26 side to the first electrode 25 side (hereinafter, if necessary, "one thermoelectric". It is distinguished as a "conversion element 41") and a first thermoelectric conversion element 4 in which a current flows from the first electrode 25 side to the second electrode 26 side (hereinafter, "the other thermoelectric conversion element" as necessary. It is distinguished as "42").

In the first thermoelectric conversion element rows 4A to 4D, one thermoelectric conversion element 41 and the other thermoelectric conversion element 42 in which the directions of the currents flowing between the first electrode 25 and the second electrode 26 are opposite to each other, respectively. And have a configuration in which they are arranged alternately in the first direction X.

Further, in the first thermoelectric conversion element sequences 4A to 4D, one thermoelectric conversion element 41 and the other thermoelectric conversion element in which the directions of the currents flowing between the first electrode 25 and the second electrode 26 are the same. 42 have a structure arranged side by side in parallel with the second direction Y.

In FIG. 9, the direction of the current flowing through one thermoelectric conversion element 41 and the direction of the current flowing through the other thermoelectric conversion element 42 are indicated by the directions of arrows.

The first electrode 25 and the second electrode 26 are arranged on the upper surface along the side surface on one end side and the side surface on the other end side facing each other in the first direction X of the first thermoelectric conversion element 4. .. Further, the first electrode 25 and the second electrode 26 are arranged on the first surface 2a of the first substrate 2 and face each other in the first direction X of the first thermoelectric conversion element 4. It may be configured to be in contact with the side surface on the side and the side surface on the other end side.

The first electrode 25 and the second electrode 26 have the same size as each other and have a rectangular shape in a plan view over the entire longitudinal direction (second direction Y) of the first thermoelectric conversion element 4 (the present embodiment). It is formed in a rectangular shape). Further, a first electrode 25 (or a second electrode) provided on one thermoelectric conversion element 41 is provided between each of the adjacent thermoelectric conversion element 41 and the other thermoelectric conversion element 42 in the first direction X. 26) and the second electrode 26 (or the first electrode 25) provided on the other thermoelectric conversion element 42 are arranged in a state of being separated from each other.

The thermoelectric conversion device 1C is a fourth of a plurality (28 in the present embodiment) in which each of the plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element trains 4A to 4D are connected in series with each other. Wiring 27a, 27b and one of the first thermoelectric conversion element sequences 4A to 4D, which are adjacent to each other in the second direction Y, and the other thermoelectric conversion element array are connected in series with each other. A plurality of (three in this embodiment) fifth wirings 28a and 28b are provided.

The fourth wiring 27a, 27b and the fifth wiring 28a, 28b are arranged on the first surface 2a of the first substrate 2 and are electrically connected to the first electrode 25 or the second electrode. It is formed continuously with 26. Therefore, as the material of the fourth and fifth wirings 27a, 27b, 28a, 28b, the same material as those exemplified in the first and second electrodes 25, 26 (electrode 6) described above can be used.

The fourth wirings 27a and 27b are the thermoelectric conversion elements 41 adjacent to each other in the first direction X among the plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element trains 4A to 4D. It is arranged between each of the other thermoelectric conversion element 42. Then, the fourth wirings 27a and 28b electrically connect between the first electrodes 25 provided on one thermoelectric conversion element 41 and the other thermoelectric conversion element 42 or between the second electrodes 26. You are connected.

Specifically, among the first thermoelectric conversion element sequences 4A to 4D shown in FIG. 9, the first thermoelectric conversion element array located 2m-1st from one end side (−Y side) in the second direction Y. Of the plurality of first thermoelectric conversion elements 4 constituting 4A and 4C, the first one located 2s-1 (s represents a natural number) from one end side (−X side) of the first direction X. The second electrode (hereinafter, referred to as “one second electrode”) 26 provided in the thermoelectric conversion element 4 and the first electrode located 2s from one end side (−X side) of the first direction X. The second electrode (hereinafter, referred to as “the other second electrode”) 26 provided in the thermoelectric conversion element 4 of the above is electrically connected via the fourth wiring 27a. (However, in this embodiment, m = 1 to 2 and s = 1 to 4).

Further, among the first thermoelectric conversion element trains 4A to 4D, a plurality of first thermoelectric conversion element trains 4B and 4D located 2 m from one end side (−Y side) in the second direction Y. Among the thermoelectric conversion elements 4 of 1, the first electrode provided on the first thermoelectric conversion element 4 located 2s-1st from one end side (−X side) in the first direction X (hereinafter, “one side”). The first electrode (hereinafter referred to as “the first electrode”) 25 and the first electrode (hereinafter referred to as “the first electrode”) provided on the first thermoelectric conversion element 4 located at the second position from one end side (−X side) of the first direction X. The other first electrode ") 25 is electrically connected via the fourth wiring 27a. (However, in this embodiment, m = 1 to 2 and s = 1 to 4).

The fourth wiring 27a has one end side (−Y side) in the longitudinal direction (second direction Y) of one second electrode 26 and the longitudinal direction (second direction Y) of the other second electrode 26. ), Which is continuous with one end side (-Y side), is bent at a position protruding outward (-Y side) from each second electrode 26, and is formed linearly in the first direction X between them. By being routed, it is routed between these second electrodes 26.

Further, the fourth wiring 27a has one end side (−Y side) in the longitudinal direction (second direction Y) of one first electrode 25 and the longitudinal direction (second direction) of the other first electrode 25. It bends at a position protruding outward (-Y side) from each first electrode 25 while being continuous with one end side (-Y side) in the direction Y), and is linear in the first direction X between them. By being formed in, it is routed between these first electrodes 25.

Further, among the first thermoelectric conversion element sequences 4A to 4D, a plurality of elements constituting the first thermoelectric conversion element sequences 4A and 4C located 2m-1st from one end side (−Y side) in the second direction Y. Of the first thermoelectric conversion element 4 of the above, the first electrode provided on the first thermoelectric conversion element 4 located at the second position from one end side (−X side) in the first direction X (hereinafter, “one side”). The first electrode (hereinafter, referred to as “the first electrode”) 25 and the first electrode (hereinafter, “the first electrode”) provided on the first thermoelectric conversion element 4 located 2s + 1th from one end side (−X side) of the first direction X The other first electrode ") 25 is electrically connected via the fourth wiring 27b. (However, in this embodiment, m = 1 to 2 and s = 1 to 3).

Further, among the first thermoelectric conversion element trains 4A to 4D, a plurality of first thermoelectric conversion element trains 4B and 4D located 2 m from one end side (−Y side) in the second direction Y. A second electrode (hereinafter, "one of the first") provided on the first thermoelectric conversion element 4 located at the second position from one end side (-X side) of the first direction X among the thermoelectric conversion elements 4 of 1. The second electrode (hereinafter referred to as "the other electrode") 26 and the second electrode provided on the first thermoelectric conversion element 4 located 2s + 1th from one end side (-X side) of the first direction X. The second electrode (referred to as) 26 is electrically connected via the fourth wiring 27b. (However, in this embodiment, m = 1 to 2 and s = 1 to 3).

The fourth wiring 27b has the other end side (+ Y side) of one first electrode 25 in the longitudinal direction (second direction Y) and the other end side (+ Y side) of the other first electrode 25 in the longitudinal direction (second direction Y). ) Is continuous with the other end side (+ Y side), but is bent at a position protruding outward (+ Y side) from each first electrode 25, and is formed linearly in the first direction X between them. By doing so, it is routed between these first electrodes 25.

Further, the fourth wiring 27b has the other end side (+ Y side) of one second electrode 26 in the longitudinal direction (second direction Y) and the other end side (+ Y side) of the other second electrode 26 in the longitudinal direction (second direction Y). It bends at a position protruding outward (+ Y side) from each second electrode 26 while being continuous with the other end side (+ Y side) of the direction Y), and linearly in the first direction X between them. By being formed, it is routed between these second electrodes 26.

The fifth wirings 28a and 28b are the first directions X of one thermoelectric conversion element array and the other thermoelectric conversion element array adjacent to each other in the second direction Y of the first thermoelectric conversion element sequences 4A to 4D. It is arranged between each of the first thermoelectric conversion elements 4 located on the one end side or the other end side. The fifth wirings 28a and 28b are provided in the first thermoelectric conversion element 4 located on one end side or the other end side in the first direction X of one thermoelectric conversion element array and the other thermoelectric conversion element array. The first electrode 25 and the second electrode 26 are electrically connected to each other.

Specifically, of the first thermoelectric conversion element rows 4A to 4D shown in FIG. 9, the first thermoelectric conversion element row 4B located 2 m from one end side (−Y side) in the second direction Y. The second electrode 26 provided on the first thermoelectric conversion element 4 located on the one end side (-X side) in the direction X and the position 2m + 1th from the one end side (-Y side) in the second direction Y. The first electrode 25 provided on the first thermoelectric conversion element 4 located on the most one end side (−X side) in the first direction X of the first thermoelectric conversion element train 4C is the fifth wiring. It is electrically connected via 28a. (However, in this embodiment, m = 1.)

The fifth wiring 28a includes the other end side (+ Y side) of the second electrode 26 in the longitudinal direction (second direction Y) and one end in the longitudinal direction (second direction Y) of the first electrode 25. While continuing to the side (-Y side), it bends at a position protruding outward from the second electrode 26 (+ Y side) and outward from the first electrode 25 (-Y side), and in between, the second electrode is bent. By being formed linearly in one direction X, it is routed between the second electrode 26 and the first electrode 25.

Further, among the first thermoelectric conversion element sequences 4A to 4D, the first of the first thermoelectric conversion element sequences 4A and 4C located 2m-1st from one end side (−Y side) in the second direction Y. The first electrode 25 provided on the first thermoelectric conversion element 4 located on the other end side (+ X side) in the direction X, and the position 2 m from the one end side (−Y side) in the second direction Y. The second electrode 26 provided on the first thermoelectric conversion element 4 located on the other end side (+ X side) in the first direction X of the first thermoelectric conversion element trains 4B and 4D is the fifth. It is electrically connected via the wiring 28b of. (However, in this embodiment, m = 1 to 2).

The fifth wiring 28b is the other end side (+ Y side) of the first electrode 25 in the longitudinal direction (second direction Y) and one end in the longitudinal direction (second direction Y) of the second electrode 26. It bends at a position protruding outward from the first electrode 25 (+ Y side) and outward from the second electrode 26 (-Y side) while being continuous with the side (-Y side), and the second electrode is in between. By being formed linearly in the direction X of 1, it is routed between the first electrode 25 and the second electrode 26.

As a result, in the first thermoelectric conversion element trains 4A to 4D, the plurality of first thermoelectric conversion elements 4 are connected in series with each other via the plurality of fourth and fifth wirings 27a, 27b, 28a, 28b. It constitutes the first thermoelectric conversion element group 40B.

Similarly, the thermoelectric conversion device 1C has a third electrode 29 provided on one end side (−X side) of each of the second thermoelectric conversion elements 5 in the first direction X instead of the electrode 7. The second thermoelectric conversion element 5 has a fourth electrode 30 provided on the other end side (+ X side) in the first direction X. The third electrode 29 and the fourth electrode 30 are electrically connected to each of the second thermoelectric conversion elements 5. As the materials of the third and fourth electrodes 29 and 30, the same materials as those exemplified in the above-mentioned electrode 7 can be used.

The second thermoelectric conversion element trains 5A to 5D are each a second thermoelectric conversion element 5 in which a current flows from the third electrode 29 side to the fourth electrode 30 side (hereinafter, if necessary, "one thermoelectric". It is distinguished as a "conversion element 51") and a second thermoelectric conversion element 5 in which a current flows from the fourth electrode 30 side to the third electrode 29 side (hereinafter, "the other thermoelectric conversion element" as necessary. It is distinguished as "52").

In the second thermoelectric conversion element rows 5A to 5D, one thermoelectric conversion element 51 and the other thermoelectric conversion element 52 in which the directions of the currents flowing between the third electrode 29 and the fourth electrode 30 are opposite to each other, respectively. And have a configuration in which they are arranged alternately in the first direction X.

Further, in the second thermoelectric conversion element rows 5A to 5D, one thermoelectric conversion element 51 and the other thermoelectric conversion element in which the directions of the currents flowing between the third electrode 29 and the fourth electrode 30 are the same. 52 have a structure arranged side by side in parallel with the second direction Y.

In FIG. 9, the direction of the current flowing through one thermoelectric conversion element 51 and the direction of the current flowing through the other thermoelectric conversion element 52 are indicated by the directions of arrows.

The third electrode 29 and the fourth electrode 30 are arranged on the upper surface along the side surface on one end side and the side surface on the other end side facing each other in the first direction X of the second thermoelectric conversion element 5. .. Further, the third electrode 29 and the fourth electrode 30 are arranged on the first surface 3a of the second substrate 3, and one end facing each other in the first direction X of the second thermoelectric conversion element 5. The configuration may be such that the side surface on the side and the side surface on the other end side are in contact with each other.

The third electrode 29 and the fourth electrode 30 have the same size as each other and are rectangular in a plan view over the entire longitudinal direction (second direction Y) of the second thermoelectric conversion element 5 (the present embodiment). It is formed in a rectangular shape). Further, a third electrode 29 (or a fourth electrode) provided on one thermoelectric conversion element 51 is provided between each of the adjacent thermoelectric conversion element 51 and the other thermoelectric conversion element 52 in the first direction X. 30) and the fourth electrode 30 (or the third electrode 29) provided on the other thermoelectric conversion element 52 are arranged in a state of being separated from each other.

The thermoelectric conversion device 1C is a sixth (28 in this embodiment) of a plurality (28 in the present embodiment) of connecting each of the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element trains 5A to 5D in series with each other. Wiring 31a, 31b and the second thermoelectric conversion element sequences 5A to 5D, one thermoelectric conversion element array adjacent to each other in the second direction Y and the other thermoelectric conversion element array are connected in series with each other. A plurality of (three in this embodiment) seventh wirings 32a and 32b are provided.

The sixth wiring 31a, 31b and the seventh wiring 32a, 32b are arranged on the first surface 3a of the second substrate 3, and the third electrode 29 or the fourth electrode is electrically connected. It is formed continuously with 30. Therefore, as the materials of the sixth and seventh wirings 31a, 31b, 32a, 32b, the same materials as those exemplified in the above-mentioned third and fourth electrodes 29, 30 (electrodes 7) can be used.

The sixth wirings 31a and 31b are connected to one of the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element trains 5A to 5D, which is adjacent to each other in the first direction X. It is arranged between each of the other thermoelectric conversion elements 52. Then, the sixth wirings 31a and 31b electrically connect between the third electrodes 29 provided between one thermoelectric conversion element 51 and the other thermoelectric conversion element 52 or between the fourth electrodes 30. You are connected.

Specifically, among the second thermoelectric conversion element sequences 5A to 5D shown in FIG. 9, the second thermoelectric conversion element array located 2n-1th from one end side (−Y side) in the second direction Y. Of the plurality of second thermoelectric conversion elements 5 constituting the 5A and 5C, the second second thermoelectric conversion element 5 located 2t-1 (t represents a natural number) from one end side (−X side) of the first direction X. A fourth electrode (hereinafter, referred to as “one fourth electrode”) 30 provided on the thermoelectric conversion element 5 and a second electrode located 2t from one end side (−X side) of the first direction X. A fourth electrode (hereinafter, referred to as “the other fourth electrode”) 30 provided on the thermoelectric conversion element 5 of the above is electrically connected via a sixth wiring 31a. (However, in this embodiment, n = 1 to 2 and t = 1 to 4).

Further, among the second thermoelectric conversion element rows 5A to 5D, a plurality of second thermoelectric conversion element rows 5B and 5D located 2nth from one end side (−Y side) in the second direction Y. Of the two thermoelectric conversion elements 5, a third electrode provided on the second thermoelectric conversion element 5 located 2t-1st from one end side (-X side) in the first direction X (hereinafter, "one side"). 29, and a third electrode (hereinafter, “3rd electrode”) provided on the second thermoelectric conversion element 5 located 2t from one end side (−X side) in the first direction X. The other third electrode ") 29 is electrically connected via the sixth wiring 31a. (However, in this embodiment, n = 1 to 2 and t = 1 to 4).

The sixth wiring 31a has one end side (−Y side) in the longitudinal direction (second direction Y) of one fourth electrode 30 and the longitudinal direction (second direction Y) of the other fourth electrode 30. ) Is continuous with one end side (-Y side), but is bent at a position protruding outward (-Y side) from each fourth electrode 30, and is formed linearly in the first direction X between them. By being routed, it is routed between these fourth electrodes 30.

Further, the sixth wiring 31a has one end side (-Y side) in the longitudinal direction (second direction Y) of one third electrode 29 and the longitudinal direction (second direction) of the other third electrode 29. It bends at a position protruding outward (-Y side) from each third electrode 29 while being continuous with one end side (-Y side) of the direction Y), and is linear in the first direction X between them. By being formed in, it is routed between these third electrodes 29.

Further, among the second thermoelectric conversion element rows 5A to 5D, a plurality of second thermoelectric conversion element rows 5A and 5C located 2n-1th from one end side (−Y side) in the second direction Y. Of the second thermoelectric conversion element 5 of the above, a third electrode provided on the second thermoelectric conversion element 5 located 2t from one end side (−X side) in the first direction X (hereinafter, “one side”). 29 and a third electrode (hereinafter, “3rd electrode”) provided on the second thermoelectric conversion element 5 located 2t + 1th from one end side (−X side) of the first direction X. The other third electrode ") 29 is electrically connected via the sixth wiring 31b. (However, in this embodiment, n = 1 to 2 and t = 1 to 3).

Further, among the second thermoelectric conversion element rows 5A to 5D, a plurality of second thermoelectric conversion element rows 5B and 5D located at the 2nth position from one end side (−Y side) in the second direction Y. Of the two thermoelectric conversion elements 5, a fourth electrode (hereinafter, "one of the first") provided on the second thermoelectric conversion element 5 located 2t from one end side (-X side) of the first direction X. The fourth electrode (hereinafter referred to as "the other electrode") provided on the second thermoelectric conversion element 5 located 2t + 1th from one end side (-X side) of the first direction X and the "4 electrode") 30. The fourth electrode (referred to as "fourth electrode") 30 is electrically connected via the sixth wiring 31b. (However, in this embodiment, n = 1 to 2 and t = 1 to 3).

The sixth wiring 31b has the other end side (+ Y side) of one third electrode 29 in the longitudinal direction (second direction Y) and the other end side (+ Y side) of the other third electrode 29 in the longitudinal direction (second direction Y). ) Is continuous with the other end side (+ Y side), but is bent at a position protruding outward (+ Y side) from each third electrode 29, and is formed linearly in the first direction X between them. By doing so, it is routed between these third electrodes 29.

Further, the sixth wiring 31b has the other end side (+ Y side) of one fourth electrode 30 in the longitudinal direction (second direction Y) and the other end side (+ Y side) of the other fourth electrode 30 in the longitudinal direction (second direction Y). It bends at a position protruding outward (+ Y side) from each of the fourth electrodes 30 while continuing to the other end side (+ Y side) of the direction Y), and linearly in the first direction X between them. By being formed, it is routed between these fourth electrodes 30.

The seventh wiring 32a, 32b is a first direction X of one thermoelectric conversion element array and the other thermoelectric conversion element array adjacent to each other in the second direction Y in the second thermoelectric conversion element sequences 5A to 5D. It is arranged between each of the second thermoelectric conversion elements 5 located on the one end side or the other end side. The seventh wirings 32a and 32b are provided in the second thermoelectric conversion element 5 located on one end side or the other end side in the first direction X of one thermoelectric conversion element array and the other thermoelectric conversion element array. The third electrode 29 and the fourth electrode 30 are electrically connected to each other.

Specifically, of the second thermoelectric conversion element rows 5A to 5D shown in FIG. 9, the first thermoelectric conversion element row 5B located 2n from one end side (−Y side) in the second direction Y. The fourth electrode 30 provided on the second thermoelectric conversion element 5 located on the one end side (-X side) in the direction X and the position 2n + 1th from the one end side (-Y side) in the second direction Y. The third electrode 29 provided on the second thermoelectric conversion element 5 located on the one end side (−X side) in the first direction X of the second thermoelectric conversion element train 5C is the seventh wiring. It is electrically connected via 32a. (However, in this embodiment, n = 1.)

The seventh wiring 32a is formed on the other end side (+ Y side) of the fourth electrode 30 in the longitudinal direction (second direction Y) and one end in the longitudinal direction (second direction Y) of the third electrode 29. While continuous with the side (-Y side), it bends at a position protruding outward from the fourth electrode 30 (+ Y side) and outward from the third electrode 29 (-Y side), and in the meantime, the third electrode is bent. By being formed linearly in the direction X of 1, it is routed between the fourth electrode 30 and the third electrode 29.

Further, among the second thermoelectric conversion element sequences 5A to 5D, the first of the second thermoelectric conversion element sequences 5A and 5C located 2n-1th from one end side (−Y side) in the second direction Y. A third electrode 29 provided on the second thermoelectric conversion element 5 located on the other end side (+ X side) in the direction X, and a position 2n from one end side (−Y side) in the second direction Y. The fourth electrode 30 provided on the second thermoelectric conversion element 5 located on the other end side (+ X side) in the first direction X of the second thermoelectric conversion element trains 5B and 5D is the seventh. It is electrically connected via the wiring 32b of. (However, in this embodiment, n = 1 to 2).

The seventh wiring 32b is the other end side (+ Y side) of the third electrode 29 in the longitudinal direction (second direction Y) and one end in the longitudinal direction (second direction Y) of the fourth electrode 30. While continuous with the side (-Y side), it bends at a position protruding outward from the third electrode 29 (+ Y side) and outward from the fourth electrode 30 (-Y side), and in the meantime, the third electrode is bent. By being formed linearly in the direction X of 1, it is routed between the third electrode 29 and the fourth electrode 30.

As a result, in the second thermoelectric conversion element rows 5A to 5D, the plurality of thermoelectric conversion elements 5 are connected in series to each other via the plurality of sixth and seventh wirings 31a, 31b, 32a, 32b. It constitutes a thermoelectric conversion element group 50B.

The thermoelectric conversion device 1C of the present embodiment includes a pair of external connection terminals 24a and 24b, similarly to the thermoelectric conversion device 1B. Of the pair of external connection terminals 24a and 24b, one of the external connection terminals 24a is electrically connected to one of the first land portions 11a. Further, the other first land portion 11b is a second thermoelectric conversion element row 5D located on the other end side (+ Y side) of the second thermoelectric conversion element rows 5A to 5D in the second direction Y. It is electrically connected to the fourth electrode 30 located on the one end side (−X side) in the first direction X of the above via the sixth wiring 31b.

On the other hand, the other external connection terminal 24b is a second thermoelectric conversion element located on the most one end side (-Y side) in the second direction Y of the second thermoelectric conversion element rows 5A to 5D. It is electrically connected to the third electrode 29 located on the one end side (−X side) in the first direction X of the row 5A via the third wiring 15a on one side.

Further, of the second land portions 12a and 12b, one of the second land portions 12a is the most one end side (−Y side) in the second direction Y of the first thermoelectric conversion element trains 4A to 4D. It is electrically connected to the first electrode 25 located at one end side (−X side) in the first direction X of the first thermoelectric conversion element train 4A located at.

On the other hand, the other second land portion 12b is the first thermoelectric conversion located on the other end side (+ Y side) of the first thermoelectric conversion element trains 4A to 4D in the second direction Y. It is electrically connected to the second electrode 26 located on the one end side (−X side) in the first direction X of the element train 4D via the fourth wiring 27b.

The first land portions 11a and 11b and the second land portions 12a and 12b are electrically connected to each other via a pair of conductive portions 13a and 13b. That is, one conductive portion 13a electrically connects one first land portion 11a and one second land portion 12a. Similarly, the other conductive portion 13b electrically connects the other first land portion 11b and the other second land portion 12b.

With the above configuration, the thermoelectric conversion device 1C of the present embodiment connects the first thermoelectric conversion element rows 4A to 4D (first thermoelectric conversion element group 40B) between the pair of external connection terminals 24a and 24b. The plurality of first thermoelectric conversion elements 4 constituting and the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5D (second thermoelectric conversion element group 50B) are in series with each other. It has a structure connected to.

As a result, in the thermoelectric conversion device 1C of the present embodiment, a relatively high voltage can be taken out from between the pair of external connection terminals 24a and 24b as the sum of the electromotive forces generated by the thermoelectric conversion elements 4 and 5. Is.

In FIG. 9, the direction of the current flowing through the first and second thermoelectric conversion elements 4 and 5 and the direction of the current flowing from the other external connection terminal 24b toward the one external connection terminal 24a are shown. , Each is represented by the direction of the arrow. Further, the direction of the current flowing between the first land portions 11a and 11b and the second land portions 12a and 12b is set to the direction of the arrow tip (direction toward the front of the paper surface) or the arrowhead (direction toward the back of the paper surface), respectively. It is represented by a symbol.

The thermoelectric conversion device 1C includes a first cold contact side electrode 33a that is electrically connected to an end portion of each first thermoelectric conversion element 4 on the cold contact side, and a hot contact side of each first thermoelectric conversion element 4. The first hot contact side electrode 33b electrically connected to the end of each second thermoelectric conversion element 5 and the second cold contact side electrode 34a electrically connected to the cold contact side end of each second thermoelectric conversion element 5. And a second hot contact side electrode 34b that is electrically connected to the end of each second thermoelectric conversion element 5 on the hot contact side.

The first cold contact side electrode 33a is one of the plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element trains 4A to 4D, which is adjacent to each other in the first direction X. It is composed of a first electrode 25 provided in the above and a second electrode 26 provided in the other thermoelectric conversion element 42.

The first hot contact side electrode 33b is one of the plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element trains 4A to 4D, which is adjacent to each other in the first direction X. It is composed of a second electrode 26 provided in the above and a first electrode 25 provided in the other thermoelectric conversion element 42.

However, the first electrode 25 provided on one thermoelectric conversion element 41 located on the one end side (−X side) in the first direction X and the other end side (+ X side) in the first direction X. The second electrode 26 provided on the other thermoelectric conversion element 42 located in is independently forming the first cold contact side electrode 33a.

Therefore, the first cold contact side electrode 33a and the first warm contact side electrode 33b are arranged alternately in the first direction X and parallel to the second direction Y. There is.

Similarly, the second cold contact side electrode 34a is one of the plurality of second thermoelectric conversion elements 5 constituting each of the second thermoelectric conversion element rows 5A to 5D, which are adjacent to each other in the first direction X. It is composed of a third electrode 29 provided on the conversion element 51 and a fourth electrode 30 provided on the other thermoelectric conversion element 52.

The second hot contact side electrode 34b is one of the plurality of second thermoelectric conversion elements 5 constituting each of the second thermoelectric conversion element rows 5A to 5D, which is adjacent to each other in the first direction X. It is composed of a fourth electrode 30 provided in the above and a third electrode 29 provided in the other thermoelectric conversion element 52.

However, the third electrode 29 provided on one thermoelectric conversion element 51 located on the one end side (−X side) in the first direction X and the other end side (+ X side) in the first direction X. The fourth electrode 30 provided on the other thermoelectric conversion element 52 located in is independently forming the second cold contact side electrode 34a.

Therefore, the second cold contact side electrode 34a and the second warm contact side electrode 34b are arranged alternately in the first direction X and in parallel with the second direction Y. There is.

The thermoelectric conversion device 1C is arranged between the first substrate 2 and the second substrate 3, and the ends of the first thermoelectric conversion element 4 and the second thermoelectric conversion element 5 facing each other in the thickness direction Z. It includes a plurality of (32 in this embodiment) first heat transfer portions 35 and a plurality of (32 in this embodiment) second heat transfer portions 36 that are thermally joined to the end portions. .. As for the first and second heat transfer sections 35 and 36, the same materials (heat transfer members) as those exemplified in the first and second heat transfer sections 16 and 17 described above can be used.

The first heat transfer unit 35 constitutes a part of the cold contact portion 37 that is thermally connected to the end portions of the first thermoelectric conversion element 4 and the second thermoelectric conversion element 5 on the cold contact side. .. That is, the cold contact portion 37 is placed between the first cold contact side electrode 33a and the second cold contact side electrode 34a, and between the first cold contact side electrode 33a and the second cold contact side electrode 34a. It is composed of a first heat transfer unit 35 that is thermally connected.

The first heat transfer unit 35 is arranged between the first electrode 25 constituting the first cold contact side electrode 33a and the third electrode 29 constituting the second cold contact side electrode 34a. At the same time, it is arranged between the second electrode 26 forming the first cold contact side electrode 33a and the fourth electrode 30 forming the second cold contact side electrode 34a.

As a result, the first heat transfer unit 35 is electrically insulated from the first cold contact side electrode 33a and the second cold contact side electrode 34a, and is in a state of being electrically insulated from the first cold contact side electrode 33a. It is thermally bonded to the second cold contact side electrode 34a.

The second heat transfer section 36 constitutes a part of the warm contact section 38 that is thermally connected to the end of the first thermoelectric conversion element 4 and the second thermoelectric conversion element 5 on the warm contact side. .. That is, the hot contact portion 38 is located between the first hot contact side electrode 33b and the second warm contact side electrode 34b, and between the first warm contact side electrode 33b and the second warm contact side electrode 34b. It is composed of a second heat transfer unit 36 that is thermally connected.

The second heat transfer unit 36 is arranged between the second electrode 26 constituting the first warm contact side electrode 33b and the fourth electrode 30 forming the second warm contact side electrode 34b. At the same time, it is arranged between the first electrode 25 constituting the first warm contact side electrode 33b and the third electrode 29 forming the second warm contact side electrode 34b.

As a result, the second heat transfer unit 36 is electrically insulated from the first warm contact side electrode 33b and the second warm contact side electrode 34b, and is in a state of being electrically insulated from the first warm contact side electrode 33b. It is thermally bonded to the second hot contact side electrode 34b.

The thermoelectric conversion device 1C is provided on the second surface 2b side of the first substrate 2 corresponding to either the cold contact portion 37 or the hot contact portion 38 (warm contact portion 38 in this embodiment). Corresponding to either the cold contact portion 37 or the hot contact portion 38 (cold contact portion 37 in the present embodiment) on the second surface 3b side of the first thick portion 20 and the second substrate 3. It has a second thick portion 21 provided. Therefore, the first thick portion 20 and the second thick portion 21 are provided at positions shifted from each other in the thickness direction Z (positions that do not overlap each other in the thickness direction Z).

The first thick portion 20 includes a range D3 that overlaps with each temperature contact portion 38 in the thickness direction Z, and is composed of a first convex portion 20a protruding from the second surface 2b at a constant height. .. On the other hand, the portion of the first substrate 2 other than the first thick portion 20 constitutes a first thin portion 22 having a thickness thinner than that of the first thick portion 20.

The second thick portion 21 includes a range D4 that overlaps each cold contact portion 37 in the thickness direction Z, and is composed of a first convex portion 21a that protrudes from the second surface 3b at a constant height. .. On the other hand, the portion of the second substrate 3 other than the second thick portion 21 constitutes a second thin portion 23 having a thickness thinner than that of the second thick portion 21.

As described above, in the thermoelectric conversion device 1C of the present embodiment, the plurality of first thermoelectric conversion elements 4 having the same conductive type on the first substrate 2 side and the same on the second substrate 3 side are the same. It is possible to arrange a plurality of second thermoelectric conversion elements 5 having a conductive type.

In the case of this configuration, a plurality of first and second thermoelectric conversion elements 4 and 5 having the same conductive type are mounted on the first surfaces 2a and 3a of the first and second substrates 2 and 3, respectively. Since it can be collectively formed in the same process in No. 3, such a thermoelectric conversion device 1C can be manufactured at low cost.

Further, in the thermoelectric conversion device 1C of the present embodiment, similarly to the thermoelectric conversion device 1B, a plurality of first thermoelectric conversion element sequences 4A to 4D (first thermoelectric conversion element group 40B) constituting the above-mentioned first thermoelectric conversion element strings 4A to 4D (first thermoelectric conversion element group 40B) are formed. The thermoelectric conversion element 4 of the above and the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5D (second thermoelectric conversion element group 50B) are connected to a pair of external connection terminals 24a, It is possible to connect in series between 24b.

Further, in the thermoelectric conversion device 1C of the present embodiment, the number of integrated first and second thermoelectric conversion elements 4 and 5 can be increased as in the case of the thermoelectric conversion device 1A, and the output of the thermoelectric conversion device 1C can be increased. It is possible to improve. Further, it is possible to obtain a high output by expanding the temperature difference at both ends of the first and second thermoelectric conversion elements 4 and 5.

(Fourth Embodiment)
Next, as a fourth embodiment of the present invention, for example, the thermoelectric conversion device 1D shown in FIGS. 12 to 14 will be described.
Note that FIG. 12 is a developed view showing the configuration of the thermoelectric conversion device 1D. FIG. 13 is a cross-sectional view of the thermoelectric conversion device 1D using the line segments CC shown in FIG. FIG. 14 is a cross-sectional view of the thermoelectric conversion device 1D using the line segments DD shown in FIG. Further, in the following description, the same parts as those of the thermoelectric conversion devices 1A, 1B and 1C will be omitted and the same reference numerals will be given in the drawings.

As shown in FIGS. 12 to 14, the thermoelectric conversion device 1D of the present embodiment has a plurality of (four in this embodiment) first thermoelectric conversion elements 4 arranged in the first direction X, respectively. A plurality of first thermoelectric conversion element rows 4A to 4H arranged side by side in the second direction Y (8 rows in the present embodiment) and a plurality (4 in the present embodiment) arranged side by side in the first direction X. Each of the second thermoelectric conversion elements 5 is provided with a plurality of (8 rows in this embodiment) second thermoelectric conversion element rows 5A to 5H arranged side by side in the second direction Y.

Each of the first and second thermoelectric conversion elements 4 and 5 constituting the first and second thermoelectric conversion element trains 4A to 4H and 5A to 5H has a first direction X as a longitudinal direction and a second direction Y. Are formed in a rectangular shape (rectangular shape in the present embodiment) in a plan view with the same size as each other.

Further, in the thermoelectric conversion device 1D, similarly to the thermoelectric conversion device 1C, a semiconductor in which a plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element sequences 4A to 4H have the same conductive type with each other (the present invention). A semiconductor (in this embodiment) having a configuration composed of a p-type semiconductor in the embodiment, and having a plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5H having the same conductive type with each other. It has a configuration consisting of an n-type semiconductor).

Further, the thermoelectric conversion device 1D includes a first electrode 25 provided on one end side (−Y side) of each of the first thermoelectric conversion elements 4 in the second direction Y, and each of the first thermoelectric conversion elements 4. It has a second electrode 26 provided on the other end side (+ Y side) in the second direction Y.

Each of the first thermoelectric conversion element trains 4A to 4H is a first thermoelectric conversion element 4 in which a current flows from the second electrode 26 side to the first electrode 25 side (hereinafter, if necessary, "one thermoelectric". It is distinguished as a "conversion element 41") and a first thermoelectric conversion element 4 in which a current flows from the first electrode 25 side to the second electrode 26 side (hereinafter, "the other thermoelectric conversion element" as necessary. It is distinguished as "42").

In the first thermoelectric conversion element rows 4A to 4H, one thermoelectric conversion element 41 and the other thermoelectric conversion element 42 in which the directions of the currents flowing between the first electrode 25 and the second electrode 26 are opposite to each other, respectively. And have a configuration in which they are arranged alternately in the first direction X.

Further, in the first thermoelectric conversion element trains 4A to 4H, one thermoelectric conversion element 41 and the other thermoelectric conversion element in which the directions of the currents flowing between the first electrode 25 and the second electrode 26 are opposite to each other. 42 and 42 have a configuration in which they are arranged alternately in the second direction Y.

In FIG. 12, the direction of the current flowing through one thermoelectric conversion element 41 and the direction of the current flowing through the other thermoelectric conversion element 42 are indicated by the directions of arrows.

The first electrode 25 and the second electrode 26 are arranged on the upper surface along the side surface on one end side and the side surface on the other end side facing each other in the second direction Y of the first thermoelectric conversion element 4. .. Further, the first electrode 25 and the second electrode 26 are arranged on the first surface 2a of the first substrate 2 and face each other in the second direction Y of the first thermoelectric conversion element 4. The configuration may be such that the side surface on the side and the side surface on the other end side are in contact with each other.

The first electrode 25 and the second electrode 26 have the same size and a rectangular shape in a plan view over the entire longitudinal direction (first direction X) of the first thermoelectric conversion element 4 (the present embodiment). It is formed in a rectangular shape). Further, between each of the adjacent thermoelectric conversion element 41 and the other thermoelectric conversion element 42 in the second direction Y, the first electrode 25 (or the second electrode) provided on the one thermoelectric conversion element 41 is provided. 26) and the second electrode 26 (or the first electrode 25) provided on the other thermoelectric conversion element 42 are arranged in a state of being separated from each other.

The thermoelectric conversion device 1D is a fourth of a plurality (24 in this embodiment) in which each of the plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element trains 4A to 4H are connected in series with each other. Wiring 27a, 27b and one of the first thermoelectric conversion element rows 4A to 4H adjacent to each other in the second direction Y and the other thermoelectric conversion element row are connected in series with each other. It is provided with a plurality of (7 in this embodiment) fifth wirings 28a and 28b.

The fourth wirings 27a and 27b are the thermoelectric conversion elements 41 adjacent to each other in the first direction X among the plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element rows 4A to 4H. It is arranged between each of the other thermoelectric conversion elements 42. Then, the fourth wirings 27a and 28b electrically connect between the first electrodes 25 provided on one thermoelectric conversion element 41 and the other thermoelectric conversion element 42 or between the second electrodes 26. You are connected.

The fifth wirings 28a and 28b are the first directions X of one thermoelectric conversion element array and the other thermoelectric conversion element array adjacent to each other in the second direction Y of the first thermoelectric conversion element sequences 4A to 4H. It is arranged between each of the first thermoelectric conversion elements 4 located on the one end side or the other end side. The fifth wirings 28a and 28b are provided in the first thermoelectric conversion element 4 located on one end side or the other end side in the first direction X of one thermoelectric conversion element array and the other thermoelectric conversion element array. The first electrodes 25 are electrically connected to each other.

As a result, in the first thermoelectric conversion element trains 4A to 4H, the plurality of first thermoelectric conversion elements 4 are connected in series with each other via the plurality of fourth and fifth wirings 27a, 27b, 28a, 28b. It constitutes the first thermoelectric conversion element group 40C.

Similarly, the thermoelectric conversion device 1D includes a third electrode 29 provided on one end side (−Y side) of each second thermoelectric conversion element 5 in the second direction Y, and each second thermoelectric conversion element 5. It has a fourth electrode 30 provided on the other end side (+ Y side) in the second direction Y of the above.

The second thermoelectric conversion element trains 5A to 5H each have a second thermoelectric conversion element 5 in which a current flows from the third electrode 29 side to the fourth electrode 30 side (hereinafter, if necessary, "one thermoelectric". It is distinguished as a "conversion element 51") and a second thermoelectric conversion element 5 in which a current flows from the fourth electrode 30 side to the third electrode 29 side (hereinafter, "the other thermoelectric conversion element" as necessary. It is distinguished as "52").

In the second thermoelectric conversion element rows 5A to 5H, one thermoelectric conversion element 51 and the other thermoelectric conversion element 52 in which the directions of the currents flowing between the third electrode 29 and the fourth electrode 30 are opposite to each other, respectively. And have a configuration in which they are arranged alternately in the first direction X.

Further, in the second thermoelectric conversion element rows 5A to 5D, one thermoelectric conversion element 51 and the other thermoelectric conversion element in which the directions of the currents flowing between the third electrode 29 and the fourth electrode 30 are opposite to each other. 52 and 52 have a configuration in which they are arranged alternately in the second direction Y.

In FIG. 12, the direction of the current flowing through one thermoelectric conversion element 51 and the direction of the current flowing through the other thermoelectric conversion element 52 are indicated by the directions of arrows.

The third electrode 29 and the fourth electrode 30 are arranged on the upper surface along the side surface on one end side and the side surface on the other end side facing each other in the second direction Y of the second thermoelectric conversion element 5. .. Further, the third electrode 29 and the fourth electrode 30 are arranged on the first surface 3a of the second substrate 3, and one end of the second thermoelectric conversion element 5 facing each other in the second direction Y. It may be configured to be in contact with the side surface on the side and the side surface on the other end side.

The third electrode 29 and the fourth electrode 30 have the same size as each other and are rectangular in a plan view over the entire longitudinal direction (first direction X) of the second thermoelectric conversion element 5 (the present embodiment). It is formed in a rectangular shape). Further, a third electrode 29 (or a fourth electrode) provided on one thermoelectric conversion element 51 is provided between each of the adjacent thermoelectric conversion element 51 and the other thermoelectric conversion element 52 in the second direction Y. 30) and the fourth electrode 30 (or the third electrode 29) provided on the other thermoelectric conversion element 52 are arranged in a state of being separated from each other.

The thermoelectric conversion device 1D is a sixth of a plurality of (24 in this embodiment) in which each of the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element trains 5A to 5H are connected in series with each other. Wiring 31a, 31b and the second thermoelectric conversion element rows 5A to 5H, one of the adjacent thermoelectric conversion element rows and the other thermoelectric conversion element row are connected in series to each other in the second direction Y. A plurality of (7 in this embodiment) 7th wirings 32a and 32b are provided.

The sixth wirings 31a and 31b are connected to one of the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5H, which is adjacent to each other in the first direction X. It is arranged between each of the other thermoelectric conversion elements 52. Then, the sixth wirings 31a and 31b electrically connect between the third electrodes 29 provided between one thermoelectric conversion element 51 and the other thermoelectric conversion element 52 or between the fourth electrodes 30. You are connected.

The seventh wiring 32a, 32b is a first direction X of one thermoelectric conversion element array and the other thermoelectric conversion element array adjacent to each other in the second direction Y in the second thermoelectric conversion element sequences 5A to 5H. It is arranged between each of the second thermoelectric conversion elements 5 located on the one end side or the other end side. The seventh wirings 32a and 32b are provided in the second thermoelectric conversion element 5 located on one end side or the other end side in the first direction X of one thermoelectric conversion element array and the other thermoelectric conversion element array. The third electrodes 29 are electrically connected to each other.

As a result, in the second thermoelectric conversion element rows 5A to 5H, the plurality of thermoelectric conversion elements 5 are connected in series to each other via the plurality of sixth and seventh wirings 31a, 31b, 32a, 32b. It constitutes a thermoelectric conversion element group 50C.

In the thermoelectric conversion device 1D of the present embodiment, similarly to the thermoelectric conversion device 1C, the first thermoelectric conversion element trains 4A to 4H (first thermoelectric conversion element group) are provided between the pair of external connection terminals 24a and 24b. The plurality of first thermoelectric conversion elements 4 constituting 40C) and the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element trains 5A to 5H (second thermoelectric conversion element group 50C) , Have a structure connected in series with each other.

Specifically, of the pair of external connection terminals 24a and 24b, one of the external connection terminals 24a is electrically connected to one of the first land portions 11a. Further, the other first land portion 11b is a second thermoelectric conversion element row 5H located on the other end side (+ Y side) of the second thermoelectric conversion element rows 5A to 5H in the second direction Y. It is electrically connected to the third electrode 29 located on the one end side (−X side) in the first direction X of the above via the sixth wiring 31a.

On the other hand, the other external connection terminal 24b is a second thermoelectric conversion element located at one end side (−Y side) in the second direction Y of the second thermoelectric conversion element rows 5A to 5H. It is electrically connected to the third electrode 29 located on the one end side (−X side) in the first direction X of the row 5A via the third wiring 15a on one side.

Of the pair of second land portions 12a and 12b, one of the second land portions 12a is the most one end side (-Y side) in the second direction Y of the first thermoelectric conversion element trains 4A to 4H. It is electrically connected to the first electrode 25 located at one end side (−X side) in the first direction X of the first thermoelectric conversion element train 4A located in the above via a fifth wiring 28a. ..

Further, the other second land portion 12b is the first thermoelectric conversion element row 4H located on the other end side (+ Y side) of the first thermoelectric conversion element rows 4A to 4H in the second direction Y. It is electrically connected to the first electrode 25 located on the one end side (−X side) in the first direction X of the above via the fourth wiring 27a.

The first land portions 11a and 11b and the second land portions 12a and 12b are electrically connected to each other via a pair of conductive portions 13a and 13b. That is, one conductive portion 13a electrically connects one first land portion 11a and one second land portion 12a. Similarly, the other conductive portion 13b electrically connects the other first land portion 11b and the other second land portion 12b.

With the above configuration, the thermoelectric conversion device 1E of the present embodiment has the first thermoelectric conversion element rows 4A to 4H (first thermoelectric conversion element group 40C) between the pair of external connection terminals 24a and 24b. The plurality of first thermoelectric conversion elements 4 constituting and the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5H (second thermoelectric conversion element group 50C) are in series with each other. It has a structure connected to.

As a result, in the thermoelectric conversion device 1D of the present embodiment, a relatively high voltage can be taken out from between the pair of external connection terminals 24a and 24b as the sum of the electromotive forces generated by the thermoelectric conversion elements 4 and 5. Is.

In FIG. 12, the direction of the current flowing through the first and second thermoelectric conversion elements 4 and 5 and the direction of the current flowing from the other external connection terminal 24b toward the other external connection terminal 24a are shown. , Each is represented by the direction of the arrow. Further, the direction of the current flowing between the first land portions 11a and 11b and the second land portions 12a and 12b is set to the direction of the arrow tip (direction toward the front of the paper surface) or the arrowhead (direction toward the back of the paper surface), respectively. It is represented by a symbol.

The thermoelectric conversion device 1D has a first cold contact side electrode 33a that is electrically connected to an end on the cold contact side of each first thermoelectric conversion element 4, and a hot contact side of each first thermoelectric conversion element 4. The first hot contact side electrode 33b electrically connected to the end of each second thermoelectric conversion element 5 and the second cold contact side electrode 34a electrically connected to the cold contact side end of each second thermoelectric conversion element 5. And a second hot contact side electrode 34b that is electrically connected to the end of each second thermoelectric conversion element 5 on the hot contact side.

The first cold contact side electrode 33a is one of the plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element trains 4A to 4H, which is adjacent to each other in the second direction Y. It is composed of a first electrode 25 provided in the above and a second electrode 26 provided in the other thermoelectric conversion element 42.

The first hot contact side electrode 33b is one of the plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element trains 4A to 4H, which is adjacent to each other in the second direction Y. It is composed of a second electrode 26 provided in the above and a first electrode 25 provided in the other thermoelectric conversion element 42.

However, the first electrode 25 provided on the one thermoelectric conversion element 41 located on the one end side (−Y side) in the second direction Y and the other end side (+ Y side) in the second direction Y. The second electrode 26 provided on the other thermoelectric conversion element 42 located in is independently forming the first cold contact side electrode 33a.

Further, the first electrode 25 provided on the other thermoelectric conversion element 42 located on the one end side (−Y side) in the second direction Y and the other end side (+ Y side) in the second direction Y. The second electrode 26 provided on one of the thermoelectric conversion elements 41 located in the above side independently constitutes the first hot contact side electrode 33b.

Therefore, the first cold contact side electrode 33a and the first warm contact side electrode 33b are arranged alternately in the first direction X and alternately arranged in the second direction Y. There is.

Similarly, the second cold contact side electrode 34a is one of the plurality of second thermoelectric conversion elements 5 constituting each of the second thermoelectric conversion element rows 5A to 5H, which are adjacent to each other in the second direction Y. It is composed of a third electrode 29 provided on the conversion element 51 and a fourth electrode 30 provided on the other thermoelectric conversion element 52.

The second hot contact side electrode 34b is one of the plurality of second thermoelectric conversion elements 5 constituting each of the second thermoelectric conversion element rows 5A to 5H, which is adjacent to each other in the second direction Y. It is composed of a fourth electrode 30 provided in the above and a third electrode 29 provided in the other thermoelectric conversion element 52.

However, the third electrode 29 provided on one thermoelectric conversion element 51 located on the one end side (−Y side) in the second direction Y and the other end side (+ Y side) in the second direction Y. The fourth electrode 30 provided on the other thermoelectric conversion element 52 located in is independently forming the second cold contact side electrode 34a.

Further, a third electrode 29 provided on the other thermoelectric conversion element 52 located on the one end side (−Y side) in the second direction Y and the other end side (+ Y side) in the second direction Y. The fourth electrode 30 provided on one of the thermoelectric conversion elements 51 located in is independently forming the second hot contact side electrode 34b.

Therefore, the second cold contact side electrode 34a and the second warm contact side electrode 34b are arranged alternately in the first direction X and alternately arranged in the second direction Y. There is.

Similar to the thermoelectric conversion device 1C, the thermoelectric conversion device 1D is arranged between the first substrate 2 and the second substrate 3, and the end portion of the first thermoelectric conversion element 4 facing each other in the thickness direction Z. A plurality of (32 in this embodiment) first heat transfer portions 35 and a plurality of (32 in this embodiment) second heat transfer portions (32 in this embodiment) that thermally join between and the end portion of the second thermoelectric conversion element 5. The heat transfer unit 36 is provided.

The first heat transfer unit 35 constitutes a part of the cold contact portion 37 that is thermally connected to the end portions of the first thermoelectric conversion element 4 and the second thermoelectric conversion element 5 on the cold contact side. .. That is, the cold contact portion 37 is placed between the first cold contact side electrode 33a and the second cold contact side electrode 34a, and between the first cold contact side electrode 33a and the second cold contact side electrode 34a. It is composed of a first heat transfer unit 35 that is thermally connected.

The first heat transfer unit 35 is arranged between the first electrode 25 constituting the first cold contact side electrode 33a and the third electrode 29 constituting the second cold contact side electrode 34a. At the same time, it is arranged between the second electrode 26 forming the first cold contact side electrode 33a and the fourth electrode 30 forming the second cold contact side electrode 34a.

As a result, the first heat transfer unit 35 is electrically insulated from the first cold contact side electrode 33a and the second cold contact side electrode 34a, and is in a state of being electrically insulated from the first cold contact side electrode 33a. It is thermally bonded to the second cold contact side electrode 34a.

The second heat transfer section 36 constitutes a part of the warm contact section 38 that is thermally connected to the end of the first thermoelectric conversion element 4 and the second thermoelectric conversion element 5 on the warm contact side. .. That is, the hot contact portion 38 is located between the first hot contact side electrode 33b and the second warm contact side electrode 34b, and between the first warm contact side electrode 33b and the second warm contact side electrode 34b. It is composed of a second heat transfer unit 36 that is thermally connected.

The second heat transfer unit 36 is arranged between the second electrode 26 constituting the first warm contact side electrode 33b and the fourth electrode 30 forming the second warm contact side electrode 34b. At the same time, it is arranged between the first electrode 25 constituting the first warm contact side electrode 33b and the third electrode 29 forming the second warm contact side electrode 34b.

As a result, the second heat transfer unit 36 is electrically insulated from the first warm contact side electrode 33b and the second warm contact side electrode 34b, and is in a state of being electrically insulated from the first warm contact side electrode 33b. It is thermally bonded to the second hot contact side electrode 34b.

The thermoelectric conversion device 1D is provided on the second surface 2b side of the first substrate 2 corresponding to either the cold contact portion 37 or the hot contact portion 38 (warm contact portion 38 in this embodiment). Corresponding to either the cold contact portion 37 or the hot contact portion 38 (cold contact portion 37 in the present embodiment) on the second surface 3b side of the first thick portion 20 and the second substrate 3. It has a second thick portion 21 provided. Therefore, the first thick portion 20 and the second thick portion 21 are provided at positions shifted from each other in the thickness direction Z (positions that do not overlap each other in the thickness direction Z).

The first thick portion 20 includes a range D5 that overlaps with each temperature contact portion 38 in the thickness direction Z, and is composed of a first convex portion 20a protruding from the second surface 2b at a constant height. .. On the other hand, the portion of the first substrate 2 other than the first thick portion 20 constitutes a first thin portion 22 having a thickness thinner than that of the first thick portion 20.

The second thick portion 21 includes a range D6 that overlaps each cold contact portion 37 in the thickness direction Z, and is composed of a first convex portion 21a that protrudes from the second surface 3b at a constant height. .. On the other hand, the portion of the second substrate 3 other than the second thick portion 21 constitutes a second thin portion 23 having a thickness thinner than that of the second thick portion 21.

As described above, in the thermoelectric conversion device 1D of the present embodiment, similarly to the thermoelectric conversion device 1C, a plurality of first thermoelectric conversion elements 4 having the same conductive type on the first substrate 2 side described above are used. It is possible to arrange a plurality of second thermoelectric conversion elements 5 having the same conductive type on the second substrate 3 side.

Further, in the thermoelectric conversion device 1D of the present embodiment, similarly to the thermoelectric conversion device 1B, a plurality of first thermoelectric conversion element trains 4A to 4H (first thermoelectric conversion element group 40C) constituting the above-mentioned first thermoelectric conversion element strings 4A to 4H The thermoelectric conversion element 4 and the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5H (second thermoelectric conversion element group 50C) are connected to a pair of external connection terminals 24a, It is possible to connect in series between 24b.

Further, in the thermoelectric conversion device 1D of the present embodiment, the number of integrated first and second thermoelectric conversion elements 4 and 5 can be increased as in the case of the thermoelectric conversion device 1A, and the output of the thermoelectric conversion device 1D can be increased. It is possible to improve. Further, it is possible to obtain a high output by expanding the temperature difference at both ends of the first and second thermoelectric conversion elements 4 and 5.

(Fifth Embodiment)
Next, as a fifth embodiment of the present invention, for example, the thermoelectric conversion device 1E shown in FIGS. 15 to 17 will be described.
Note that FIG. 15 is a developed view showing the configuration of the thermoelectric conversion device 1E. FIG. 16 is a cross-sectional view of the thermoelectric conversion device 1E using the line segments AA shown in FIG. FIG. 17 is a cross-sectional view of the thermoelectric conversion device 1E using the line segments BB shown in FIG. Further, in the following description, the same parts as those of the thermoelectric conversion devices 1A, 1B and 1C will be omitted and the same reference numerals will be given in the drawings.

As shown in FIGS. 15 to 17, the thermoelectric conversion device 1E of the present embodiment has a plurality of first thermoelectric conversion elements constituting the first thermoelectric conversion element sequences 4A to 4D, similarly to the thermoelectric conversion device 1C. 4 has a configuration composed of semiconductors having the same conductive type as each other (p-type semiconductor in this embodiment), and a plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5D are It has a configuration composed of semiconductors having the same conductive type (n-type semiconductor in this embodiment).

Further, the thermoelectric conversion device 1E has the same as the thermoelectric conversion device 1C, the first electrode 25 provided on one end side (−X side) in the first direction X of each first thermoelectric conversion element 4. Each first thermoelectric conversion element 4 has a second electrode 26 provided on the other end side (+ X side) in the first direction X.

Therefore, in the first thermoelectric conversion element sequences 4A to 4D, one thermoelectric conversion element 41 and the other thermoelectric conversion in which the directions of the currents flowing between the first electrode 25 and the second electrode 26 are opposite to each other, respectively. The elements 42 have a configuration in which the elements 42 are arranged alternately in the first direction X.

Further, in the first thermoelectric conversion element sequences 4A to 4D, one thermoelectric conversion element 41 and the other thermoelectric conversion element in which the directions of the currents flowing between the first electrode 25 and the second electrode 26 are the same. 42 have a structure arranged side by side in parallel with the second direction Y.

The thermoelectric conversion device 1E includes a plurality of (16 in this embodiment) fourth wirings 27a. The fourth wiring 27a corresponds to the "one wiring" of the present invention.

The fourth wiring 27a includes one thermoelectric conversion element 41 adjacent to each other in the first direction X and the other of the plurality of first thermoelectric conversion elements 4 constituting the first thermoelectric conversion element sequences 4A to 4D. It is arranged between each of the thermoelectric conversion elements 42. Then, the fourth wiring 27a electrically connects between the first electrodes 25 provided on one thermoelectric conversion element 41 and the other thermoelectric conversion element 42 or between the second electrodes 26. ing. The fourth wiring 27a is joined to a part of the first electrode 25 or a part of the second electrode 26.

Specifically, among the first thermoelectric conversion element sequences 4A to 4D shown in FIG. 15, the first thermoelectric conversion element array located 2m-1st from one end side (−Y side) in the second direction Y. Of the plurality of first thermoelectric conversion elements 4 constituting 4A and 4C, the first thermoelectric conversion element 4 located 2s-1th from one end side (−X side) in the first direction X is provided. It is provided on the first electrode (hereinafter, referred to as “one first electrode”) 25 and the first thermoelectric conversion element 4 located second s from one end side (−X side) in the first direction X. The first electrode (hereinafter, referred to as “the other first electrode”) 25 is electrically connected via the fourth wiring 27a. (However, in this embodiment, m = 1 to 2 and s = 1 to 4).

Further, among the first thermoelectric conversion element trains 4A to 4D, a plurality of first thermoelectric conversion element trains 4B and 4D located 2 m from one end side (−Y side) in the second direction Y. Among the thermoelectric conversion elements 4 of 1, the second electrode provided on the first thermoelectric conversion element 4 located 2s-1st from one end side (−X side) in the first direction X (hereinafter, “one side”). The second electrode (hereinafter referred to as "the second electrode") 26 and the second electrode provided on the first thermoelectric conversion element 4 located at the second position from one end side (-X side) of the first direction X (hereinafter, "" The other second electrode ") 26 is electrically connected via the fourth wiring 27a. (However, in this embodiment, m = 1 to 2 and s = 1 to 4).

Further, the thermoelectric conversion device 1E has a third electrode 29 provided on one end side (−X side) in the first direction X of each of the second thermoelectric conversion elements 5 and a third electrode 29, similarly to the thermoelectric conversion device 1C. Each of the second thermoelectric conversion elements 5 has a fourth electrode 30 provided on the other end side (+ X side) in the first direction X.

Therefore, in the second thermoelectric conversion element rows 5A to 5D, one thermoelectric conversion element 51 and the other thermoelectric conversion in which the directions of the currents flowing between the third electrode 29 and the fourth electrode 30 are opposite to each other, respectively. The elements 52 have a configuration in which the elements 52 are arranged alternately in the first direction X.

Further, in the second thermoelectric conversion element rows 5A to 5D, one thermoelectric conversion element 51 and the other thermoelectric conversion element in which the directions of the currents flowing between the third electrode 29 and the fourth electrode 30 are the same. 52 have a structure arranged side by side in parallel with the second direction Y.

In the thermoelectric conversion device 1E of the present embodiment, a plurality of first thermoelectric conversion element trains 4A to 4D (first thermoelectric conversion element group 40B) are formed between the pair of external connection terminals 24a and 24b. The thermoelectric conversion element 4 and the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5D (second thermoelectric conversion element group 50B) are connected in series with each other. Have.

Specifically, the thermoelectric conversion device 1E includes a plurality of (12 in this embodiment) sixth wirings 31b and a plurality of (three in this embodiment) seventh wirings 32a and 32b. .. The sixth wiring 31b corresponds to the "other wiring" of the present invention.

The sixth wiring 31b includes one thermoelectric conversion element 51 adjacent to each other in the first direction X and the other of the plurality of second thermoelectric conversion elements 5 constituting each of the second thermoelectric conversion element rows 5A to 5D. It is arranged between each of the thermoelectric conversion elements 52. Then, the sixth wiring 31b electrically connects between the third electrodes 29 provided on one thermoelectric conversion element 51 and the other thermoelectric conversion element 52 or between the fourth electrodes 30. ing. The sixth wiring 31b is joined to a part of the third electrode 29 or a part of the fourth electrode 30.

Specifically, among the second thermoelectric conversion element sequences 5A to 5D shown in FIG. 15, the second thermoelectric conversion element array located 2n-1th from one end side (−Y side) in the second direction Y. Of the plurality of second thermoelectric conversion elements 5 constituting the 5A and 5C, the third thermoelectric conversion element 5 provided on the second thermoelectric conversion element 5 located 2t from one end side (−X side) of the first direction X. Electrode (hereinafter referred to as “one third electrode”) 29 and the second thermoelectric conversion element 5 located 2t + 1th from one end side (−X side) of the first direction X. The third electrode (hereinafter, referred to as “the other third electrode”) 29 is electrically connected via the sixth wiring 31b. (However, in this embodiment, n = 1 to 2 and t = 1 to 3).

Further, among the second thermoelectric conversion element rows 5A to 5D, a plurality of second thermoelectric conversion element rows 5B and 5D located at the 2nth position from one end side (−Y side) in the second direction Y. Of the two thermoelectric conversion elements 5, a fourth electrode (hereinafter, "one of the first") provided on the second thermoelectric conversion element 5 located 2t from one end side (-X side) of the first direction X. The fourth electrode (hereinafter referred to as "the other electrode") provided on the second thermoelectric conversion element 5 located 2t + 1th from one end side (-X side) of the first direction X and the "4 electrode") 30. The fourth electrode (referred to as "fourth electrode") 30 is electrically connected via the sixth wiring 31b. (However, in this embodiment, n = 1 to 2 and t = 1 to 3).

The seventh wirings 32a and 32b are the second thermoelectric conversion element 5 and the other thermoelectric conversion element of one of the second thermoelectric conversion element trains 5A to 5D adjacent to each other in the second direction Y. This is a wiring that electrically connects the second thermoelectric conversion element 5 in the row. In the present embodiment, the seventh wirings 32a and 32b are formed by connecting one thermoelectric conversion element array and the other thermoelectric conversion element array adjacent to each other in the second direction Y among the second thermoelectric conversion element sequences 5A to 5D. It is arranged between each of the second thermoelectric conversion elements 5 located on one end side or the other end side in the first direction X. The seventh wirings 32a and 32b are provided in the second thermoelectric conversion element 5 located on one end side or the other end side in the first direction X of one thermoelectric conversion element array and the other thermoelectric conversion element array. The third electrode 29 and the fourth electrode 30 are electrically connected to each other.

Specifically, of the second thermoelectric conversion element rows 5A to 5D shown in FIG. 15, the first thermoelectric conversion element row 5B located 2n from one end side (−Y side) in the second direction Y. The fourth electrode 30 provided on the second thermoelectric conversion element 5 located on the one end side (-X side) in the direction X and the position 2n + 1th from the one end side (-Y side) in the second direction Y. The third electrode 29 provided on the second thermoelectric conversion element 5 located on the one end side (−X side) in the first direction X of the second thermoelectric conversion element train 5C is the seventh wiring. It is electrically connected via 32a. (However, in this embodiment, n = 1.)

Further, among the second thermoelectric conversion element sequences 5A to 5D, the first of the second thermoelectric conversion element sequences 5A and 5C located 2n-1th from one end side (−Y side) in the second direction Y. A third electrode 29 provided on the second thermoelectric conversion element 5 located on the other end side (+ X side) in the direction X, and a position 2n from one end side (−Y side) in the second direction Y. The fourth electrode 30 provided on the second thermoelectric conversion element 5 located on the other end side (+ X side) in the first direction X of the second thermoelectric conversion element trains 5B and 5D is the seventh. It is electrically connected via the wiring 32b of. (However, in this embodiment, n = 1 to 2).

The thermoelectric conversion device 1E has a first electrode 25 or a second electrode 26 provided on the first thermoelectric conversion element 4 and a third electrode 26 provided on the second thermoelectric conversion element 5 facing each other in the thickness direction Z. A plurality of (16 in this embodiment) first conductive portions 39a and a plurality of (16 in this embodiment) second conductive portions electrically connected to the electrode 29 or the fourth electrode 30 of the above. It has 39b. As for the first and second conductive portions 39a and 39b, the same materials as those exemplified in the above-mentioned conductive portions 13a and 13b can be used.

Specifically, among the first thermoelectric conversion element rows 4A to 4D shown in FIG. 15, the first thermoelectric conversion element train 4A located 2m-1st from one end side (−Y side) in the second direction Y. Of the plurality of first thermoelectric conversion elements 4 constituting the 4C, the first thermoelectric conversion element 4 located 2s-1th from one end side (−X side) of the first direction X. Of the 2 electrodes 26 and the second thermoelectric conversion element rows 5A to 5D, the second thermoelectric conversion element rows 5A and 5C located 2n-1th from one end side (−Y side) in the second direction Y. A fourth thermoelectric conversion element 5 provided on the second thermoelectric conversion element 5 located 2t-1st from one end side (−X side) of the first direction X among the plurality of second thermoelectric conversion elements 5 constituting the above. A first conductive portion 39a is arranged between the electrode 30 and the electrode 30. (However, in this embodiment, m = 1 to 2, s = 1 to 4, n = 1 to 2, and t = 1 to 4).

As a result, the second electrode 26 which is not joined to the fourth wiring 27a and the fourth electrode 30 which is not joined to the sixth wiring 31b, which face each other in the thickness direction Z, are first. It is electrically connected via the conductive portion 39a.

Further, among the first thermoelectric conversion element rows 4A to 4D shown in FIG. 15, the first thermoelectric conversion element rows 4B and 4D located 2 m from one end side (−Y side) in the second direction Y are configured. Of the plurality of first thermoelectric conversion elements 4, the first electrode 25 provided on the first thermoelectric conversion element 4 located at the second position from one end side (−X side) in the first direction X, and Of the second thermoelectric conversion element rows 5A to 5D, a plurality of second thermoelectric conversion element rows 5B and 5D that are located 2nth from one end side (−Y side) in the second direction Y. Among the thermoelectric conversion elements 5, the first one is between the thermoelectric conversion element 5 and the third electrode 29 provided on the second thermoelectric conversion element 5 located 2t from one end side (−X side) in the first direction X. The conductive portion 39a is arranged. (However, in this embodiment, m = 1 to 2, s = 1 to 4, n = 1 to 2, and t = 1 to 4).

As a result, the first electrode 25, which is not joined to the fourth wiring 27a, and the third electrode 29, which is not joined to the sixth wiring 31b, are opposed to each other in the thickness direction Z. It is electrically connected via the conductive portion 39a.

Similarly, among the first thermoelectric conversion element rows 4A to 4D shown in FIG. 15, the first thermoelectric conversion element rows 4A, which are located 2m-1st from one end side (−Y side) in the second direction Y, Of the plurality of first thermoelectric conversion elements 4 constituting 4C, the second electrode provided on the first thermoelectric conversion element 4 located at the second position from one end side (−X side) of the first direction X. 26 and the second thermoelectric conversion element rows 5A and 5C located 2n-1th from one end side (−Y side) in the second direction Y among the second thermoelectric conversion element rows 5A to 5D. Between the plurality of second thermoelectric conversion elements 5 and the fourth electrode 30 provided on the second thermoelectric conversion element 5 located 2t from one end side (−X side) in the first direction X. A second conductive portion 39b is arranged therein. (However, in this embodiment, m = 1 to 2, s = 1 to 4, n = 1 to 2, and t = 1 to 4).

As a result, the second electrode 26 which is not joined to the fourth wiring 27a and the fourth electrode 30 which is not joined to the sixth wiring 31b, which face each other in the thickness direction Z, are second. It is electrically connected via the conductive portion 39b.

Further, among the first thermoelectric conversion element rows 4A to 4D shown in FIG. 15, the first thermoelectric conversion element rows 4B and 4D located 2 m from one end side (−Y side) in the second direction Y are configured. The first electrode 25 provided on the first thermoelectric conversion element 4 located 2s-1st from one end side (−X side) of the first direction X among the plurality of first thermoelectric conversion elements 4 Of the second thermoelectric conversion element rows 5A to 5D, a plurality of second thermoelectric conversion element rows 5B and 5D located 2n from one end side (−Y side) in the second direction Y. Among the thermoelectric conversion elements 5 of 2, between the thermoelectric conversion element 5 and the third electrode 29 provided on the second thermoelectric conversion element 5 located 2t-1st from one end side (−X side) in the first direction X. , The second conductive portion 39b is arranged. (However, in this embodiment, m = 1 to 2, s = 1 to 4, n = 1 to 2, and t = 1 to 4).

As a result, the first electrode 25, which is not joined to the fourth wiring 27a, and the third electrode 29, which is not joined to the sixth wiring 31b, which face each other in the thickness direction Z, are second. It is electrically connected via the conductive portion 39b.

The thermoelectric conversion device 1E of the present embodiment includes a pair of external connection terminals 24a and 24b, similarly to the thermoelectric conversion device 1B. On the other hand, the first and second land portions 11a, 11b, 12a, 12b and the conductive portions 13a, 13b are omitted.

Of the pair of external connection terminals 24a and 24b, one of the external connection terminals 24a is located on the other end side (+ Y side) of the second thermoelectric conversion element trains 5A to 5D in the second direction Y. The second thermoelectric conversion element train 5D is electrically connected to the fourth electrode 30 located on the one end side (−X side) in the first direction X via the sixth wiring 31c.

On the other hand, the other external connection terminal 24b is a second thermoelectric conversion element located on the most one end side (-Y side) in the second direction Y of the second thermoelectric conversion element rows 5A to 5D. It is electrically connected to the third electrode 29 located on the one end side (−X side) in the first direction X of the row 5A via the third wiring 15a on one side.

With the above configuration, in the thermoelectric conversion device 1E of the present embodiment, the first thermoelectric conversion element rows 4A to 4D (first thermoelectric conversion element group 40B) between the pair of external connection terminals 24a and 24b. The plurality of first thermoelectric conversion elements 4 constituting the above and the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5D (second thermoelectric conversion element group 50B) are connected to each other. They are connected in series.

As a result, in the thermoelectric conversion device 1E of the present embodiment, a relatively high voltage can be taken out from between the pair of external connection terminals 24a and 24b as the sum of the electromotive forces generated by the thermoelectric conversion elements 4 and 5. Is.

In FIG. 15, the direction of the current flowing through the first and second thermoelectric conversion elements 4 and 5 and the direction of the current flowing from the other external connection terminal 24b toward the one external connection terminal 24a are shown. , Each is represented by the direction of the arrow. Further, the direction of the current flowing through the first conductive portion 39a and the second conductive portion 39b is represented by a symbol of an arrow tip (direction toward the front of the paper surface) or an arrowhead (direction toward the back of the paper surface), respectively.

Similar to the thermoelectric conversion device 1C, the thermoelectric conversion device 1E has a first cold contact side electrode 33a electrically connected to an end portion of each first thermoelectric conversion element 4 on the cold contact side, and each first. The first hot contact side electrode 33b, which is electrically connected to the end of the thermoelectric conversion element 4 on the hot contact side, and the end of each of the second thermoelectric conversion elements 5 on the cold contact side are electrically connected. It has a second cold contact side electrode 34a and a second hot contact side electrode 34b that is electrically connected to the end of each second thermoelectric conversion element 5 on the warm contact side.

Similar to the thermoelectric conversion device 1C, the thermoelectric conversion device 1E is arranged between the first substrate 2 and the second substrate 3, and the end portion of the first thermoelectric conversion element 4 facing each other in the thickness direction Z. A plurality of (32 in this embodiment) first heat transfer portions 35 and a plurality of (32 in this embodiment) second heat transfer portions (32 in this embodiment) that thermally join between and the end portion of the second thermoelectric conversion element 5. The heat transfer unit 36 is provided.

Similar to the thermoelectric conversion device 1C, the thermoelectric conversion device 1E has either a cold contact portion 37 or a hot contact portion 38 on the second surface 2b side of the first substrate 2 (in this embodiment, the hot contact portion 38). Either the cold contact portion 37 or the hot contact portion 38 on the second surface 3b side of the first thick-walled portion 20 and the second substrate 3 provided corresponding to 38) (in the present embodiment). It has a second thick-walled portion 21 provided corresponding to the cold contact portion 37).

As described above, in the thermoelectric conversion device 1E of the present embodiment, similarly to the thermoelectric conversion device 1C, a plurality of first thermoelectric conversion elements 4 having the same conductive type on the first substrate 2 side described above are used. It is possible to arrange a plurality of second thermoelectric conversion elements 5 having the same conductive type on the second substrate 3 side.

Further, in the thermoelectric conversion device 1E of the present embodiment, a plurality of first thermoelectric conversion elements 4 constituting the above-mentioned first thermoelectric conversion element sequences 4A to 4D (first thermoelectric conversion element group 40B) and a second thermoelectric conversion element 4 A pair of a plurality of second thermoelectric conversion elements 5 constituting the thermoelectric conversion element trains 5A to 5D (second thermoelectric conversion element group 50B) are used with the first and second conductive portions 39a and 39b. It is possible to connect in series between the external connection terminals 24a and 24b.

Further, in the thermoelectric conversion device 1E of the present embodiment, the number of integrated first and second thermoelectric conversion elements 4 and 5 can be increased as in the case of the thermoelectric conversion device 1A, and the output of the thermoelectric conversion device 1E can be increased. It is possible to improve. Further, it is possible to obtain a high output by expanding the temperature difference at both ends of the first and second thermoelectric conversion elements 4 and 5.

(Sixth Embodiment)
Next, as a sixth embodiment of the present invention, for example, the thermoelectric conversion device 1F shown in FIGS. 18 to 20 will be described.
Note that FIG. 18 is a developed view showing the configuration of the thermoelectric conversion device 1F. FIG. 19 is a cross-sectional view of the thermoelectric conversion device 1F using the line segments AA shown in FIG. FIG. 20 is a cross-sectional view of the thermoelectric conversion device 1F using the line segments BB shown in FIG. Further, in the following description, the parts equivalent to the thermoelectric conversion devices 1A, 1B, 1C, and 1E will be omitted and the same reference numerals will be given in the drawings.

As shown in FIGS. 18 to 20, the thermoelectric conversion device 1F of the present embodiment has a plurality of first thermoelectric conversion elements constituting the first thermoelectric conversion element sequences 4A to 4D, similarly to the thermoelectric conversion device 1C. 4 has a configuration composed of semiconductors having the same conductive type as each other (p-type semiconductor in this embodiment), and a plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5D are It has a configuration composed of semiconductors having the same conductive type (n-type semiconductor in this embodiment).

Further, the thermoelectric conversion device 1E is the same as the thermoelectric conversion device 1C, with the first electrode 25 provided on one end side (−Y side) of each first thermoelectric conversion element 4 in the first direction. It has a second electrode 26 provided on the other end side (+ Y side) of the first thermoelectric conversion element 4 in the first direction.

Therefore, in the first thermoelectric conversion element sequences 4A to 4D, one thermoelectric conversion element 41 and the other thermoelectric conversion in which the directions of the currents flowing between the first electrode 25 and the second electrode 26 are opposite to each other, respectively. The elements 42 have a configuration in which the elements 42 are arranged alternately in the first direction X.

Further, in the first thermoelectric conversion element sequences 4A to 4D, one thermoelectric conversion element 41 and the other thermoelectric conversion element in which the directions of the currents flowing between the first electrode 25 and the second electrode 26 are the same. 42 have a structure arranged side by side in parallel with the second direction Y.

Similar to the thermoelectric conversion device 1C, the thermoelectric conversion device 1F has a plurality of first thermoelectric conversion elements 4 that form the first thermoelectric conversion element sequences 4A to 4D and are connected in series to each other. Of the second wirings 27a and 27b and the first thermoelectric conversion element sequences 4A to 4D of 28) in the embodiment, one thermoelectric conversion element array and the other thermoelectric conversion element array adjacent to each other in the second direction Y. It is provided with a plurality of (three in this embodiment) fifth wirings 28a and 28b for connecting each of the and in series with each other.

As a result, the first thermoelectric conversion element rows 4A to 4D constitute the first thermoelectric conversion element group 40B connected in series with each other via the plurality of fourth and fifth wirings 27a, 27b, 28a, 28b. are doing.

Further, the thermoelectric conversion device 1F includes a third electrode 29 provided on one end side (−Y side) of each of the second thermoelectric conversion elements 5 in the first direction X, similarly to the thermoelectric conversion device 1C. Each of the second thermoelectric conversion elements 5 has a fourth electrode 30 provided on the other end side (+ Y side) in the first direction X.

Therefore, in the second thermoelectric conversion element rows 5A to 5D, one thermoelectric conversion element 51 and the other thermoelectric conversion in which the directions of the currents flowing between the third electrode 29 and the fourth electrode 30 are opposite to each other, respectively. The elements 52 have a configuration in which the elements 52 are arranged alternately in the first direction X.

Further, in the second thermoelectric conversion element rows 5A to 5D, one thermoelectric conversion element 51 and the other thermoelectric conversion element in which the directions of the currents flowing between the third electrode 29 and the fourth electrode 30 are the same. 52 have a structure arranged side by side in parallel with the second direction Y.

Similar to the thermoelectric conversion device 1C, the thermoelectric conversion device 1F has a plurality of second thermoelectric conversion elements 5 that form each of the second thermoelectric conversion element rows 5A to 5D and are connected in series to each other. Of the second wirings 31a and 31b and the second thermoelectric conversion element sequences 5A to 5D (28 in the embodiment), one thermoelectric conversion element array and the other thermoelectric conversion element array adjacent to each other in the second direction Y. It is provided with a plurality of (three in this embodiment) seventh wirings 32a and 32b for connecting each of the wires in series with each other.

As a result, the second thermoelectric conversion element rows 5A to 5D form a second thermoelectric conversion element group 50B connected in series with each other via a plurality of sixth and seventh wirings 31a, 31b, 32a, 32b. are doing.

Similar to the thermoelectric conversion device 1C, the thermoelectric conversion device 1F includes a first cold contact side electrode 33a electrically connected to an end portion of each first thermoelectric conversion element 4 on the cold contact side, and each first. The first hot contact side electrode 33b, which is electrically connected to the end of the thermoelectric conversion element 4 on the hot contact side, and the end of each of the second thermoelectric conversion elements 5 on the cold contact side are electrically connected. It has a second cold contact side electrode 34a and a second hot contact side electrode 34b that is electrically connected to the end of each second thermoelectric conversion element 5 on the warm contact side.

In the thermoelectric conversion device 1F of the present embodiment, a plurality of first thermoelectric conversion element trains 4A to 4D (first thermoelectric conversion element group 40B) are formed between the pair of external connection terminals 24a and 24b. The thermoelectric conversion element 4 of the above and a plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5D (second thermoelectric conversion element group 50B) are connected in parallel to each other. Have.

Specifically, the thermoelectric conversion device 1F is a plurality of second (32 in this embodiment) electrically connecting the first hot contact side electrode 33b and the second hot contact side electrode 34b. It includes a conductive portion 39b.

The second conductive portion 39b is arranged between the second electrode 26 constituting the first warm contact side electrode 33b and the fourth electrode 30 forming the second warm contact side electrode 34b. , The first electrode 25 constituting the first warm contact side electrode 33b and the third electrode 29 constituting the second warm contact side electrode 34b are arranged. As a result, the second conductive portion 39b electrically connects the first hot contact side electrode 33b and the second warm contact side electrode 34b.

In the thermoelectric conversion device 1F of the present embodiment, instead of electrically connecting the first hot contact side electrode 33b and the second hot contact side electrode 34b described above by the second conductive portion 39b, instead of electrically connecting them. The first cold contact side electrode 33a and the second cold contact side electrode 34a may be electrically connected by the first conductive portion 39a.

The thermoelectric conversion device 1F of the present embodiment includes a pair of external connection terminals 24a and 24b, similarly to the thermoelectric conversion device 1B. Of the pair of external connection terminals 24a and 24b, one of the external connection terminals 24a is located on the other end side (+ Y side) of the second thermoelectric conversion element trains 5A to 5D in the second direction Y. The second thermoelectric conversion element train 5D is electrically connected to the fourth electrode 30 located on the one end side (−X side) in the first direction X via the sixth wiring 31b.

On the other hand, the other external connection terminal 24b is a second thermoelectric conversion element located on the most one end side (-Y side) in the second direction Y of the second thermoelectric conversion element rows 5A to 5D. It is electrically connected to the third electrode 29 located on the one end side (−X side) in the first direction X of the row 5A via the third wiring 15a on one side.

Of the pair of first land portions 11a and 11b, one first land portion 11a is electrically connected to the other third wiring 15a connected to the other external connection terminal 24b. On the other hand, the other first land portion 11b is electrically connected to the sixth wiring 31b connected to the one external connection terminal 24a.

Further, of the second land portions 12a and 12b, one of the second land portions 12a is the most one end side (−Y side) in the second direction Y of the first thermoelectric conversion element trains 4A to 4D. It is electrically connected to the first electrode 25 located at one end side (−X side) in the first direction X of the first thermoelectric conversion element train 4A located at.

On the other hand, the other second land portion 12b is the first thermoelectric conversion located on the other end side (+ Y side) of the first thermoelectric conversion element trains 4A to 4D in the second direction Y. It is electrically connected to the second electrode 26 located on the one end side (−X side) in the first direction X of the element train 4D via the fourth wiring 27b.

The first land portions 11a and 11b and the second land portions 12a and 12b are electrically connected to each other via a pair of conductive portions 13a and 13b. That is, one conductive portion 13a electrically connects one first land portion 11a and one second land portion 12a. Similarly, the other conductive portion 13b electrically connects the other first land portion 11b and the other second land portion 12b.

With the above configuration, in the thermoelectric conversion device 1F of the present embodiment, the first thermoelectric conversion element rows 4A to 4D (first thermoelectric conversion element group 40B) between the pair of external connection terminals 24a and 24b. The plurality of first thermoelectric conversion elements 4 constituting the above and the plurality of second thermoelectric conversion elements 5 constituting the second thermoelectric conversion element rows 5A to 5D (second thermoelectric conversion element group 50B) are connected to each other. They are connected in parallel.

As a result, in the thermoelectric conversion device 1F of the present embodiment, it is possible to pass a current from the other external connection terminal 24b side to the one external connection terminal 24a side.

In FIG. 18, the direction of the current flowing through the first and second thermoelectric conversion elements 4 and 5 and the direction of the current flowing from the other external connection terminal 24b toward the one external connection terminal 24a are shown. , Each is represented by the direction of the arrow. Further, the direction of the current flowing between the first land portion 11a, 11b and the second land portion 11a, 11b, 12a, 12b is set to the arrow tip (direction toward the front of the paper surface) or the arrowhead (in the back of the paper surface), respectively. It is represented by the symbol of (direction).

Although the first hot contact side electrode 33b and the second hot contact side electrode 34b are electrically connected via the second conductive portion 39b, the direction of the current flowing between them is the same. , No current flows, or current flows in either direction, so it is not specified.

Similar to the thermoelectric conversion device 1C, the thermoelectric conversion device 1F is arranged between the first substrate 2 and the second substrate 3, and the end portion of the first thermoelectric conversion element 4 facing each other in the thickness direction Z. A plurality of (32 in this embodiment) first heat transfer portions 35 and a plurality of (32 in this embodiment) second heat transfer portions (32 in this embodiment) that thermally join between and the end portion of the second thermoelectric conversion element 5. The heat transfer unit 36 is provided.

Similar to the thermoelectric conversion device 1C, the thermoelectric conversion device 1F has either a cold contact portion 37 or a hot contact portion 38 on the second surface 2b side of the first substrate 2 (in this embodiment, the hot contact portion 38). Either the cold contact portion 37 or the hot contact portion 38 on the second surface 3b side of the first thick-walled portion 20 and the second substrate 3 provided corresponding to 38) (in the present embodiment). It has a second thick-walled portion 21 provided corresponding to the cold contact portion 37).

As described above, in the thermoelectric conversion device 1F of the present embodiment, similarly to the thermoelectric conversion device 1C, a plurality of first thermoelectric conversion elements 4 having the same conductive type on the first substrate 2 side described above are used. It is possible to arrange a plurality of second thermoelectric conversion elements 5 having the same conductive type on the second substrate 3 side.

Further, in the thermoelectric conversion device 1F of the present embodiment, the number of integrated first and second thermoelectric conversion elements 4 and 5 can be increased as in the case of the thermoelectric conversion device 1A, and the output of the thermoelectric conversion device 1F can be increased. It is possible to improve. Further, it is possible to obtain a high output by expanding the temperature difference at both ends of the first and second thermoelectric conversion elements 4 and 5.

(7th Embodiment)
Next, as a seventh embodiment of the present invention, for example, the thermoelectric conversion device 1G shown in FIG. 21 will be described.
Note that FIG. 21 is a cross-sectional perspective view showing the configuration of the thermoelectric conversion device 1G. Further, in the following description, the same parts as those of the thermoelectric conversion device 1A will be omitted and the same reference numerals will be given in the drawings.

In the thermoelectric conversion device 1G of the present embodiment, as shown in FIG. 21, in addition to the configuration of the thermoelectric conversion device 1A, the first and second convex portions constituting the first and second thick portions 20, 21 are formed. A low thermal conductive member 60 having a thermal conductivity lower than that of the first and second substrates 2 and 3 is arranged between the portions 20a and 21a.

The low thermal conductive member 60 is provided in a state of being embedded between the first and second convex portions 20a and 21a constituting the first and second thick portions 20 and 21. As the low thermal conductive member 60, for example, aluminum oxide (Al ₂ O ₃ ), polytetrafluoroethylene (PTFE), polyimide resin, or the like can be used.

As a result, in the thermoelectric conversion device 1G of the present embodiment, by providing the low thermal conductive member 60 on the surface of the first thin portion 22, the low thermal conductive member 60 is concentrated from the first thick portion 20 between the low thermal conductive members 60. Can transfer heat to. Further, by providing the low heat conductive member 60 on the surface of the second thin portion 23, heat can be intensively released from the second thick portion 21 between the low heat conductive members 60.

As described above, in the thermoelectric conversion device 1G of the present embodiment, by providing the above-mentioned low heat conductive member 60, the heat transferred from the heat source to the first substrate 2 via the first thick portion 20 is transferred to the hot contact portion. It can be efficiently transmitted to 19. On the other hand, the heat transferred to the second substrate 3 via the cold contact portion 18 can be efficiently released from the second thick portion 21. As a result, it is possible to increase the temperature difference at both ends of the first and second thermoelectric conversion elements 4 and 5 and obtain a high output.

Although the thermoelectric conversion device 1G illustrates the case where it is applied to the configuration of the thermoelectric conversion device 1A, the same configuration as that of the thermoelectric conversion device 1G is also applied to the configurations of the thermoelectric conversion devices 1B to 1F. It is possible to do.

(8th Embodiment)
Next, as an eighth embodiment of the present invention, for example, the thermoelectric conversion device 1H shown in FIG. 22 will be described.
Note that FIG. 22 is a cross-sectional perspective view showing the configuration of the thermoelectric conversion device 1H. Further, in the following description, the same parts as those of the thermoelectric conversion device 1G will be omitted and the same reference numerals will be given in the drawings.

As shown in FIG. 22, the thermoelectric conversion device 1H of the present embodiment has a pair on the second surfaces 2b, 3b side of the first and second substrates 2, 3 in addition to the configuration of the thermoelectric conversion device 1G. It has a configuration in which heat transfer plates 61a and 61b are arranged.

That is, in this thermoelectric conversion device 1H, the low thermal conductive member 60 is provided in a state of being embedded between the first and second convex portions 20a and 21a constituting the first and second thick portions 20 and 21. Has been done. In the thermoelectric conversion device 1H, it is possible to provide a space between each of the first and second convex portions 20a and 21a by omitting the low thermal conductive member 60. Further, this space may be decompressed.

Further, one heat transfer plate 61a is provided on the second surface 2b side of the first substrate 2 in a state of being in contact with the first thick portion 20. Similarly, the other heat transfer plate 61b is provided on the second surface 3b side of the second substrate 3 in a state of being in contact with the second thick portion 21.

The pair of heat transfer plates 61a and 61b are made of a material having a higher thermal conductivity than air, preferably a material having a higher thermal conductivity than the first and second substrates 2 and 3. As a material for such heat transfer plates 61a and 61b, it is preferable to use metal, and among them, among them, aluminum (Al), copper (Cu), etc., which have high thermal conductivity and are easy to shape. Can be preferably used. Further, the heat transfer plates 61a and 61b may be composed of a plurality of heat transfer members.

Of the pair of heat transfer plates 61a and 61b, one of the heat transfer plates 61a is thermally joined to the first thick portion 20. The other heat transfer plate 61b is thermally joined to the second thick portion 21.

As a result, in the thermoelectric conversion device 1H of the present embodiment, the low heat conductive member 60 is provided on the surface of the first thin-walled portion 22, and one of the heat transfer plates thermally joined to the first thick-walled portion 20. By providing 61a, heat can be concentratedly transferred from one heat transfer plate 61a to the first thick portion 20. Further, by providing the low heat conductive member 60 on the surface of the second thin portion 23 and providing the other heat transfer plate 61b thermally joined to the second thick portion 21, the second thick portion is provided. Heat can be intensively released from the portion 21 to the other heat transfer plate 61b.

As described above, in the thermoelectric conversion device 1H of the present embodiment, by providing the above-mentioned low heat conductive member 60 and heat transfer plates 61a and 61b, the first substrate 2 is provided from the heat source via the first thick portion 20. The heat transferred to can be efficiently transferred to the hot contact portion 19. On the other hand, the heat transferred to the second substrate 3 via the cold contact portion 18 can be efficiently released from the second thick portion 21. As a result, it is possible to increase the temperature difference at both ends of the first and second thermoelectric conversion elements 4 and 5 and obtain a high output.

Although the thermoelectric conversion device 1H illustrates the case where it is applied to the configuration of the thermoelectric conversion device 1A, the same configuration as that of the thermoelectric conversion device 1H is also applied to the configurations of the thermoelectric conversion devices 1B to 1F. It is possible to do.

(9th embodiment)
Next, as a ninth embodiment of the present invention, for example, the thermoelectric conversion device 1I shown in FIG. 23 will be described.
Note that FIG. 23 is a cross-sectional perspective view showing the configuration of the thermoelectric conversion device 1I. Further, in the following description, the same parts as those of the thermoelectric conversion device 1H will be omitted and the same reference numerals will be given in the drawings.

As shown in FIG. 23, the thermoelectric conversion device 1I of the present embodiment has the first and second thick walls provided on the first and second substrates 2 and 3 sides in the configuration of the thermoelectric conversion device 1H. Instead of the parts 20 and 21, a third heat transfer part 62 is provided on one heat transfer plate 61a side, and a fourth heat transfer part 63 is provided on the other heat transfer plate 61b side. ing.

That is, the third heat transfer portion 62 includes the range D1 that overlaps with each temperature contact portion 19 in the thickness direction Z, and at a constant height from the surface of one heat transfer plate 61a facing the first substrate 2. It is composed of a protruding third convex portion 62a. Further, the fourth heat transfer portion 63 includes a range D1 that overlaps with each cold contact portion 18 in the thickness direction Z, and at a constant height from the surface of the other heat transfer plate 61b facing the second substrate 3. It is composed of a protruding fourth convex portion 63a. In the first and second substrates 2 and 3, the second surfaces 2b and 3b are formed of flat surfaces.

Of the pair of heat transfer plates 61a and 61b, one of the heat transfer plates 61a is thermally joined to the first substrate 2 via the third heat transfer portion 62. The other heat transfer plate 61b is thermally joined to the second substrate 3 via the fourth heat transfer portion 63.

Further, the low heat conductive member 60 is provided in a state of being embedded between each of the third and fourth convex portions 62a and 63a constituting the third and fourth heat transfer portions 62 and 63. In the thermoelectric conversion device 1I, by omitting the low thermal conductive member 60, it is possible to provide a space between each of the third and fourth convex portions 62a and 63a. Further, this space may be decompressed.

As a result, in the thermoelectric conversion device 1I of the present embodiment, heat can be intensively transferred from one heat transfer plate 61a to the third heat transfer unit 62. Further, heat can be intensively released from the fourth heat transfer unit 63 to the other heat transfer plate 61b.

As described above, the thermoelectric converter 1I of the present embodiment is provided with the heat transfer plates 61a and 61b provided with the low heat conductive member 60 and the third and fourth heat transfer portions 62 and 63 described above, thereby providing a heat source. The heat transferred to the first substrate 2 via the third heat transfer section 62 can be efficiently transferred to the hot contact section 19. On the other hand, the heat transferred to the second substrate 3 via the cold contact portion 18 can be efficiently released from the fourth heat transfer portion 63. As a result, it is possible to increase the temperature difference at both ends of the first and second thermoelectric conversion elements 4 and 5 and obtain a high output.

Although the thermoelectric conversion device 1I illustrates the case where it is applied to the configuration of the thermoelectric conversion device 1A, the same configuration as that of the thermoelectric conversion device 1I is also applied to the configurations of the thermoelectric conversion devices 1B to 1F. It is possible to do.

(10th Embodiment)
Next, as a tenth embodiment of the present invention, for example, the thermoelectric conversion device 1J shown in FIG. 24 will be described.
Note that FIG. 24 is a cross-sectional perspective view showing the configuration of the thermoelectric conversion device 1J. Further, in the following description, the same parts as those of the thermoelectric conversion device 1A will be omitted and the same reference numerals will be given in the drawings.

In the thermoelectric conversion device 1J of the present embodiment, as shown in FIG. 24, the first and second external connection terminals 10a, 10b, 14a, 14b of the configuration of the thermoelectric conversion device 1A are the second substrate 3 It has a configuration arranged on the second surface 3b side of the above. Note that FIG. 24 shows only one of the second external connection terminals 14a.

That is, the first and second external connection terminals 10a, 10b, 14a, and 14b are electrically connected to a plurality of (four in this embodiment) through electrodes 64 that penetrate the second substrate 3, respectively. In the state, it is arranged on the second surface 3b of the second substrate 3.

One of the first external connection terminals 10a is electrically connected to the other first land portion 11a via a through electrode 64. The other first external connection terminal 10b is electrically connected to the other first land portion 11b via a through electrode 64. One of the second external connection terminals 14a is electrically connected to the other third wiring 15a via a through electrode 64. The other second external connection terminal 14b is electrically connected to the other third wiring 15b via a through electrode 64.

The through electrode 64 is provided in a state of being embedded in a hole 64a penetrating the second substrate 3 in the thickness direction by through-hole plating or the like. For the through electrode 64, for example, copper (Cu) or gold (Au) can be preferably used as the conductive material that can be embedded in such a hole 64a. Further, the through electrode 64 is not limited to the state of being embedded in the hole 64a in a solid state, but can also be in a state of being hollowly embedded around the hole 64a.

As a result, the first and second external connection terminals 10a, 10b, 14a, and 14b can be arranged on the second surface 3b side of the second substrate 3. Further, in the case of this configuration, it is possible to omit the portion of the second substrate 3 that protrudes outside the range of overlapping with the first substrate 2 in the thickness direction Z (-X side in the present embodiment). Yes, it is possible to make the first substrate 2 and the second substrate 3 the same size.

Although the thermoelectric conversion device 1J illustrates the case where it is applied to the configuration of the thermoelectric conversion device 1A, the same configuration as that of the thermoelectric conversion device 1J is also applied to the configurations of the thermoelectric conversion devices 1B to 1F. It is possible to do.

(11th Embodiment)
Next, as the eleventh embodiment of the present invention, for example, the thermoelectric conversion device 1K shown in FIG. 25 will be described.
Note that FIG. 25 is a cross-sectional perspective view showing the configuration of the thermoelectric conversion device 1K. Further, in the following description, the same parts as those of the thermoelectric conversion device 1A will be omitted and the same reference numerals will be given in the drawings.

As shown in FIG. 25, the thermoelectric conversion device 1K of the present embodiment is provided on the second surface 2b side of the first substrate 2 in the configuration of the thermoelectric conversion device 1A, corresponding to the hot contact portion 19. It has a first thick-walled portion 20 and a second thick-walled portion 21 provided on the second surface 3b side of the second substrate 3 corresponding to the warm contact portion 19. Therefore, the first thick portion 20 and the second thick portion 21 are provided at positions facing each other in the thickness direction Z (positions overlapping each other in the thickness direction Z).

Further, the thermoelectric conversion device 1K has a configuration in which a pair of heat transfer plates 61a and 61b are arranged on the second surfaces 2b and 3b of the first and second substrates 2 and 3. Of the pair of heat transfer plates 61a and 61b, one of the heat transfer plates 61a is thermally joined to the first thick portion 20. The other heat transfer plate 61b is thermally joined to the second thick portion 21.

On the other hand, the first heat transfer section 16 constituting the cold contact section 18 is omitted. As a result, the cold contact portion 18 is composed of the first electrode 6a and the third electrode 7a that form the cold contact side electrode.

Further, the thermoelectric conversion device 1K includes a pair of partition walls 65a and 65b that seal between the pair of heat transfer plates 61a and 61b. The sealing material S is omitted. The pair of partition walls 65a and 65b are located at both ends in the first direction X, and seal between the pair of heat transfer plates 61a and 61b in the second direction Y. As a result, a space K2 is provided between the first heat transfer plate 61a and the first substrate 2 and between the second heat transfer plate 61b and the third substrate 3.

Further, the space K2 may be depressurized or may be filled with the above-mentioned low thermal conductive member 60. The partition walls 65a and 65b are made of a material having a higher thermal conductivity than air, preferably a material having a higher thermal conductivity than the first and second substrates 2 and 3, like the heat transfer plates 61a and 61b. It is preferable to use it.

In the thermoelectric conversion device 1K of the present embodiment having the above configuration, the first heat transfer plate 61a is arranged on the high temperature (heating) side, and the second heat transfer plate 61b is arranged on the high temperature (heating) side. .. Further, the refrigerant CL is circulated in the space K1 between the first substrate 2 and the second substrate 3 sealed by the sealing material S.

As a result, in the thermoelectric conversion device 1K of the present embodiment, heat W can be intensively transferred from one heat transfer plate 61a to the first thick portion 20. Further, heat W can be intensively transferred from the other heat transfer plate 61b to the second thick portion 21. On the other hand, by circulating the refrigerant CL in the space K1, the ends of the first and second thermoelectric conversion elements 4 and 5 on the cold contact side can be cooled.

As described above, in the thermoelectric conversion device 1K of the present embodiment, the heat transferred from the heat source to the first and second substrates 2 and 3 via the first and second thick portions 20 and 21 is transferred to the hot contact portion 19. Can be efficiently communicated to. On the other hand, heat can be efficiently dissipated from the ends of the first and second thermoelectric conversion elements 4 and 5 on the cold contact side. As a result, it is possible to increase the temperature difference at both ends of the first and second thermoelectric conversion elements 4 and 5 and obtain a high output.

Although the thermoelectric conversion device 1K illustrates the case where it is applied to the configuration of the thermoelectric conversion device 1A, the same configuration as that of the thermoelectric conversion device 1K is also applied to the configurations of the thermoelectric conversion devices 1B to 1F. It is possible to do.

The present invention is not necessarily limited to that of the above embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, in the thermoelectric conversion devices 1A to 1J, the case where the first substrate 2 described above is arranged on the high temperature (heat source) side and the second substrate 3 is arranged on the low temperature (radiation / cooling) side is illustrated. It is also possible to arrange the second substrate 3 on the high temperature (heat source) side and the first substrate 2 on the low temperature (heat dissipation / cooling) side. In this case, since the hot contact portion 19 described above becomes the cold contact portion 18 and the cold contact portion 18 becomes the hot contact portion 19, the directions of the currents flowing through the first and second thermoelectric conversion elements 4 and 5 are opposite to each other. Become.

Further, in the thermoelectric conversion device 1K, the first heat transfer plate 61a is arranged on the low temperature (heat dissipation / cooling) side, the second heat transfer plate 61b is arranged on the low temperature (heat dissipation / cooling) side, and is sealed. It is also possible to circulate the heat medium in the space K1 between the first substrate 2 and the second substrate 3 sealed by the material S. In this case, since the hot contact portion 19 described above becomes the cold contact portion 18 and the cold contact portion 18 becomes the hot contact portion 19, the directions of the currents flowing through the first and second thermoelectric conversion elements 4 and 5 are opposite to each other. Become.

1A ~ 1K ... Thermoelectric conversion device 2 ... First substrate 2a ... First surface 2b ... Second surface 3 ... Second substrate 3a ... First surface 3b ... Second surface 4 ... First thermoelectric conversion Elements 4A to 4H ... First thermoelectric conversion element sequence 5 ... Second thermoelectric conversion element 5A to 5H ... Second thermoelectric conversion element sequence 6 ... Electrode 6a ... First electrode 6b ... Second electrode 7 ... Electrode 7a ... 3rd conductor 7b ... 4th electrode 8a, 8b ... 1st wiring 9a, 9b ... 2nd wiring 10a, 10b ... 1st external connection terminal 11a, 11b ... 1st land portion 12a, 12b ... 2nd land portion 13a, 13b ... Conductive portion 14a, 14b ... 2nd external connection terminal 15a, 15b ... 3rd wiring 16 ... 1st heat transfer portion 17 ... 2nd heat transfer portion 18 ... Cold Contact part 19 ... Warm contact part 20 ... First thick part 21 ... Second thick part 22 ... First thin part 23 ... Second thin part 24a, 24b ... External connection terminal 25 ... First Electrodes 26 ... 2nd electrodes 27a, 27b ... 4th wiring 28a, 28b ... 5th wiring 29 ... 3rd electrode 30 ... 4th electrodes 31a, 31b ... 6th wiring 32a, 32b ... 7th Wiring 33a ... 1st cold contact side electrode 33b ... 1st hot contact side electrode 34a ... 2nd cold contact side electrode 34b ... 2nd hot contact side electrode 35 ... 1st heat transfer part 36 ... 2nd Heat transfer part 37 ... Cold contact part 38 ... Warm contact part 39a ... First conductive part 39b ... Second conductive part 40A, 40B, 40C ... First thermoelectric conversion element group 50A, 50B, 50C ... Second thermoelectric conversion element Group 60 ... Low heat conductive members 61a, 61b ... Heat transfer plate 62 ... Third heat transfer part 63 ... Fourth heat transfer part 64 ... Through electrodes 65a, 65b ... Partition S ... Encapsulant K1, K2 ... Space W ... Heat CL ... Refrigerator

Claims (10)

A first base material and a second base material having a first surface and a second surface facing each other in the thickness direction,
A plurality of first thermoelectric conversion elements provided side by side in the in-plane direction on the first surface side of the first base material, and
A plurality of second thermoelectric conversion elements provided side by side in the in-plane direction on the first surface side of the second base material are provided.
The first base material and the second base material are arranged with the first surface facing each other, and the first base material is arranged.
A thermoelectric conversion device characterized in that an end portion of the first thermoelectric conversion element and an end portion of the second thermoelectric conversion element are arranged in a state of facing each other. The end of the first thermoelectric conversion element and the end of the second thermoelectric conversion element, which are arranged between the first base material and the second base material and face each other in the thickness direction. The thermoelectric conversion device according to claim 1, further comprising a heat transfer unit that thermally joins the two. A hot contact portion that is thermally connected to the end of the first thermoelectric conversion element and the end of the second thermoelectric conversion element on the hot contact side,
The first thermoelectric conversion element and the cold contact portion thermally connected to the end on the cold contact side of the second thermoelectric conversion element are provided.
The first base material has a first thick-walled portion provided on the second surface side corresponding to either the hot contact portion or the cold contact portion.
A claim characterized in that the second base material has a second thick-walled portion provided on the second surface side corresponding to any of the hot contact portion and the cold contact portion. Item 2. The thermoelectric conversion device according to item 1 or 2. The thermoelectric conversion device according to claim 3, wherein the first thick portion and the second thick portion are provided at positions shifted from each other in the thickness direction. The thermoelectric conversion device according to claim 3, wherein the first thick portion and the second thick portion are provided at positions facing each other in the thickness direction. A claim, wherein at least one of the plurality of first thermoelectric conversion elements and the plurality of second thermoelectric conversion elements has a configuration in which thermoelectric conversion elements having the same conductive type are arranged side by side. The thermoelectric conversion device according to any one of 1 to 5. A claim characterized in that at least one of the plurality of first thermoelectric conversion elements and the plurality of second thermoelectric conversion elements has a configuration in which thermoelectric conversion elements having different conductive types are alternately arranged. Item 2. The thermoelectric conversion device according to any one of Items 1 to 5. A group of first thermoelectric conversion elements configured by electrically connecting the plurality of first thermoelectric conversion elements,
A group of second thermoelectric conversion elements configured by electrically connecting between the plurality of second thermoelectric conversion elements,
The thermoelectricity according to any one of claims 1 to 7, further comprising a conductive portion that electrically connects the first thermoelectric conversion element group and the second thermoelectric conversion element group. Conversion device. On the first electrode provided on one end side of the first thermoelectric conversion element and the other end side of the first thermoelectric conversion element in the first direction in which the plurality of first thermoelectric conversion elements are arranged. With the second electrode provided
On the third electrode provided on one end side of the second thermoelectric conversion element and the other end side of the second thermoelectric conversion element in the second direction in which the plurality of second thermoelectric conversion elements are arranged. With the provided fourth electrode,
One wiring that electrically connects between the first electrodes or between the second electrodes provided in the first thermoelectric conversion element, which are adjacent to each other in the first direction.
The other wiring that electrically connects between the third electrodes or between the fourth electrodes provided in the second thermoelectric conversion element, which are adjacent to each other in the second direction.
The first electrode or the second electrode provided on the first thermoelectric conversion element and the third electrode or the third electrode provided on the second thermoelectric conversion element facing each other in the thickness direction. It is provided with a conductive portion that electrically connects to and from the electrode of 4.
The plurality of first thermoelectric conversion elements have a first conductive type and have a first conductive type.
The thermoelectric conversion device according to any one of claims 1 to 5, wherein the plurality of second thermoelectric conversion elements have a second conductive type opposite to the first conductive type. .. The thermoelectric conversion device according to any one of claims 1 to 9, further comprising a sealing material for sealing between the first base material and the second base material.

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