JP2020106135A - Processing device, attachment/detachment mechanism and link mechanism - Google Patents

Abstract

To provide a processing device capable of separating a lid body in a vertical direction even in a case where it is desired to move the lid body (movable body) in a fixed linear direction such as a case where an annular member, etc., for sealing a container is provided on a bottom face of the lid body, a case where an O ring, etc., is provided on a top face of the container, and a case that a clearance is narrow because of a complicated structure at the size of the container (stationary body) and at the side of the lid body (movable body).SOLUTION: In a processing device 100, an attachment/detachment mechanism 30 includes: a parallel link part 31; a slide mechanism part 40 for sliding and moving the parallel link part 31 at the side of a first end 31a in a horizontal direction; and a movement regulation part 70 for regulating movement of a lid body 20 in a substantially horizontal direction which is moved in a vertical direction by the parallel link part 31. The lid body 20 is moved in the vertical direction by rotating the parallel link part 31 in a state that the movement of the lid body 20 is regulated by the movement regulation part 70.SELECTED DRAWING: Figure 1

Description

The present invention relates to a processing device, an attachment/detachment mechanism, and a link mechanism, and more particularly to a processing device, an attachment/detachment mechanism, and a link mechanism to which a lid (moving body) is attached and detached.

BACKGROUND ART Conventionally, a container opening/closing lid device for attaching and detaching a lid has been known (see, for example, Patent Document 1).

The above Patent Document 1 discloses a container opening/closing lid device including a lid body that closes an opening of a container having an open upper end. In this opening/closing lid device, the lid has a plate shape. A front shaft and a rear shaft that penetrate the inside of the lid are provided along the surface of the plate-shaped lid. Further, an L-shaped front swing arm is connected to the front shaft. The front shaft is attached to one end side of the bent portion of the L-shaped front swing arm. Further, a rotatable front support wheel (roller) is attached to the other end side of the bent portion of the L-shaped front swing arm. Further, the L-shaped front swing arm functions as a handle lever that can be gripped by the user. Further, one end of a rear swing arm having a linear shape (rectangular plate shape) is connected to the rear side shaft. A rotatable rear support wheel (roller) is attached to the other end of the rear swing arm. The front swing arm and the rear swing arm form a pair of link portions.

Next, the opening/closing operation of the lid in Patent Document 1 will be described. First, it is assumed that a lid is arranged on the opening of the container so as to close the opening of the container. In this state, the user pushes down the front swing arm (handle lever). Since the front swing arm has an L-shape, the bent portion (corner) of the L-shaped front swing arm comes into contact with the upper surface of the container and rotates (for example, rotates counterclockwise). ) Do. Similarly, the rear swing arm also rotates (eg, rotates counterclockwise). As a result, the lid moves in an arc shape, and the state in which the lid covers the opening of the container is released (the lid rises). A front support wheel is provided at the other end of the front swing arm, and a back support wheel is provided at the other end of the rear swing arm. After the lid is lifted, the user horizontally pushes the front swing arm (handle lever) to move the lid horizontally, and the lid is retracted from above the opening of the container. ..

Japanese Utility Model Publication No. 6-78664

Here, an annular member for sealing the container may be provided on the lower surface of the lid. In this case, when the lid body is moved in an arc shape and the lid body covers the opening of the container as in the container opening/closing lid device described in Patent Document 1 described above, the lid body is lifted, An annular member abuts a wall surface that surrounds the space inside the container. Therefore, when the lid is moved in an arc shape, there is a problem that the lid cannot be detached in the vertical direction. Further, an O-ring or a packing for sealing the container and the lid may be provided on the upper surface of the container. At this time, if the lid is moved not in a vertical direction but in an arc shape (obliquely), there is a problem that the hermeticity is likely to be deteriorated and the life is shortened due to the twist of the O-ring and a partial load. Further, when the container side and the lid side are intricately structured and the gap is narrow, there is a problem that the lids do not move in a fixed linear direction and they interfere with each other when they are moved in an arc shape.

The present invention has been made to solve the above problems, and one object of the present invention is to seal a container (chamber body, fixed body) on the lower surface of a lid (moving body). When a ring-shaped member is provided, an O-ring or the like is provided on the upper surface of the container, or when the container (fixed body) side and the lid (moving body) side are intricate and the gap is narrow, It is an object of the present invention to provide a processing device, an attachment/detachment mechanism, and a link mechanism capable of detaching the lid body (moving body) in the vertical direction (moving direction) when it is desired to move the body in a fixed linear direction.

In order to achieve the above object, the processing apparatus according to the first aspect of the present invention includes a chamber main body for processing a substrate, a lid provided so as to cover the chamber main body, and an attachment/detachment mechanism for attaching/detaching the lid to/from the chamber main body. The attachment/detachment mechanism includes a parallel link part having a first end side attached to the chamber body side and a second end part side attached to the lid side, and a first end side and a second end side of the parallel link part. A slide mechanism part that slides one of the two along the horizontal direction, and a first movement restricting part that restricts movement of the lid body that moves in the vertical direction by the parallel link part in the substantially horizontal direction. 1 The lid body moves in the vertical direction by the rotation of the parallel link portion in the state where the movement regulation portion regulates the movement of the lid body. It should be noted that “sliding movement along the horizontal direction” is a concept including sliding movement in a direction slightly (eg, about 10 degrees) inclined with respect to the horizontal direction. However, this concept does not include the state where the parallelogram formed by the parallel link parts becomes a reflection point (a state in which the pair of links of the parallel link part and the part connecting the pair of links are in a straight line). .. Further, “moving the lid in a substantially horizontal direction” is a concept including that the lid moves linearly along the horizontal direction and that the lid moves in an arc shape.

In the processing apparatus according to the first aspect of the present invention, as described above, the lid moves in the vertical direction due to the rotation of the parallel link portion in the state where the movement of the lid is restricted by the first movement restricting portion. As a result, the lid is moved in the vertical direction, so that an annular member for sealing the chamber body is provided on the lower surface of the lid, an O-ring or the like is provided on the upper surface of the container, and The lid can be detached in the vertical direction even when it is desired to move the lid in a constant linear direction, such as when the gap is narrow due to the structure in which the container side and the lid side are intricate.

In the processing apparatus according to the first aspect described above, preferably, the lid body is horizontally moved from above the chamber body by rotating the parallel link portion in a state where the movement limitation of the lid body is released by the first movement regulation portion. Is configured to be retracted to the first direction side. According to this structure, since the lid body is detached from the chamber body, the lid body can be easily moved to the first direction side in the horizontal direction.

In the processing apparatus according to the first aspect, preferably, the first movement restricting portion includes a first portion extending along the vertical direction, and the rotating body is provided on the side of the lid on which the first movement restricting portion is arranged. The lid body is configured to move in the vertical direction by the rotating body moving while rotating on the surface of the first portion of the first movement restricting portion. According to this structure, since the frictional force between the lid and the first movement restricting portion is reduced by the rotation of the rotating body, the lid can be easily moved in the vertical direction.

In this case, preferably, the rotating body includes a roller portion attached to the lid, and the first movement restricting portion is connected to the first portion and extends in a direction intersecting the vertical direction and away from the lid. A second portion is further included, and the cover is configured to be retracted from the upper side of the chamber main body to the first side in the horizontal direction when the roller portion passes over the second portion. According to this structure, when the lid body is moved to the second direction side from the position where the lid body is retracted from above the chamber body and the lid body is attached to the chamber body, the lid body is moved to the first direction side. The lid can be guided by the second part.

In the processing apparatus according to the first aspect, preferably, the slide mechanism unit is one of a guide unit arranged along the horizontal direction and one of a first end portion side and a second end portion side of the parallel link portion. And a moving pedestal part that moves along the guide part while also serving as a connecting part that connects one of the first end side and the second end side of the parallel link part to each other. According to this structure, the movable pedestal can be easily moved along the guide.

In this case, preferably, the slide mechanism section further includes a second movement restricting section that is provided on the second direction side of the guide section and restricts the movement pedestal section from moving in the second direction side. According to this structure, the movement of the parallel link portion in the second direction is restricted by the second movement restricting portion, so that the lid body can be moved in the vertical direction by the rotation of the parallel link portion.

The processing apparatus according to the first aspect described above preferably further includes a stretchable portion having a spring property that is connected to the pair of links of the parallel link portion and stretches and contracts as the pair of links rotates. According to this structure, for example, by constructing the expanding/contracting portion so that the expanding/contracting portion exerts the biasing force in the extending direction, the biasing force of the expanding/contracting portion serves as an assisting force for rotating the parallel link portion. This can reduce the burden on the user when moving the lid.

An attachment/detachment mechanism according to a second aspect of the present invention is an attachment/detachment mechanism for attaching and detaching a lid body provided so as to cover the container body from the container body, wherein the first end portion side is attached to the container body side and the second end portion is attached. Side is attached to the lid side, a parallel link part, a slide mechanism part for slidingly moving one of the first end side and the second end side of the parallel link part along the horizontal direction, and the vertical direction by the parallel link part. The movement of the lid body is restricted by the movement regulating portion that regulates the movement of the lid body that moves in a substantially horizontal direction. Moving. It should be noted that “sliding movement along the horizontal direction” is a concept including sliding movement in a direction slightly (eg, about 10 degrees) inclined with respect to the horizontal direction. However, this concept does not include the state where the parallelogram formed by the parallel link parts becomes a reflection point (a state in which the pair of links of the parallel link part and the part connecting the pair of links are in a straight line). .. Further, “moving the lid in a substantially horizontal direction” is a concept including that the lid moves linearly along the horizontal direction and that the lid moves in an arc shape.

In the attachment/detachment mechanism according to the second aspect of the present invention, as described above, the lid body moves in the vertical direction due to the rotation of the parallel link portion in the state where the movement regulation portion regulates the movement of the lid body. As a result, the lid is moved in the vertical direction, so that an annular member for sealing the chamber body is provided on the lower surface of the lid, an O-ring or the like is provided on the upper surface of the container, and The lid can be detached in the vertical direction even when it is desired to move the lid in a constant linear direction, such as when the gap is narrow due to the structure in which the container side and the lid side are intricate.

A link mechanism according to a third aspect of the present invention is a link mechanism for attaching and detaching a moving body provided so as to cover a fixed body to and from the fixed body, wherein the moving direction of the moving body and the detachable state of the moving body with respect to the fixed body Is substantially orthogonal to the surface, the first end portion side is attached to the fixed body side, the second end portion side is attached to the movable body side, and the first end portion side and the second end of the parallel link portion. A slide mechanism that slides one of the two sides along a direction perpendicular to the moving direction of the moving body, and a parallel link that moves relatively to the slide mechanism in the moving direction. The moving body moves in the moving direction due to the rotation of the parallel link portion in a state in which the movement restricting portion restricts the movement of the moving body, the moving restricting portion restricting the movement of the body in a direction substantially perpendicular to the moving direction. Moving. The "slide movement along a direction perpendicular to the moving direction of the moving body" means sliding in a direction slightly (for example, about 10 degrees) inclined with respect to the direction perpendicular to the moving direction of the moving body. It is a concept that includes things. However, this concept does not include the state where the parallelogram formed by the parallel link parts becomes a reflection point (a state in which the pair of links of the parallel link part and the part connecting the pair of links are in a straight line). .. In addition, “moving the moving body in a direction substantially perpendicular to the moving direction” includes moving linearly along a direction substantially perpendicular to the moving direction and moving in an arc shape. It is a concept.

In the link mechanism according to the third aspect of the present invention, as described above, the movable body moves in the moving direction by the rotation of the parallel link portion in the state in which the movement restricting portion regulates the movement of the movable body. Accordingly, even when the moving body is to be moved in a fixed linear direction, such as when the gap is narrow due to the structure in which the fixed body side and the moving body side are intricate, the moving body can be detached in the moving direction.

In the link mechanism according to the third aspect, preferably, the movable body moves from the fixed body to the slide movement direction of the slide mechanism portion by the rotation of the parallel link portion in a state where the regulation of the movable body by the movement regulation portion is released. Are configured to be retracted to the opposite side. According to this structure, the movable body is detached from the fixed body, and thus the movable body can be easily moved.

According to the present invention, as described above, when an annular member for sealing the container (chamber body, fixed body) is provided on the lower surface of the lid (moving body), an O-ring or the like is provided on the upper surface of the container. Even if you want to move the lid (moving body) in a fixed linear direction, such as when a container (fixed body) side and lid (moving body) side are intricate and the gap is narrow. The body can be detached in the moving direction.

FIG. 3 is a schematic diagram of a processing device according to the first embodiment (a diagram viewed from the Y direction). It is a schematic diagram (top view) of the processing apparatus by 1st Embodiment. FIG. 3 is a schematic view of the processing device according to the first embodiment (a view seen from the X direction). It is a figure (1) for demonstrating operation|movement of the processing apparatus by 1st Embodiment. It is a figure (2) for demonstrating operation|movement of the processing apparatus by 1st Embodiment. It is a figure for demonstrating the processing apparatus by 2nd Embodiment. It is a figure (1) for demonstrating operation|movement of the processing apparatus by 2nd Embodiment. It is a figure (2) for demonstrating operation|movement of the processing apparatus by 2nd Embodiment. It is a figure for demonstrating the processing apparatus by a modification. It is a figure for demonstrating the slide mechanism part of the processing apparatus by a modification.

Embodiments of the present invention will be described below with reference to the drawings.

[First Embodiment]
(Configuration of processing device)

The configuration of the processing apparatus 100 according to the first embodiment will be described with reference to FIGS. 1 to 5. The processing device 100 is provided adjacent to a transfer device 200 that transfers a substrate (not shown). Further, the processing apparatus 100 is configured to process the substrate transferred by the transfer apparatus 200. The plate member 50 is omitted in FIGS. 1, 2, 4, and 5.

As shown in FIG. 1, the processing apparatus 100 includes a chamber body 10. The chamber body 10 has a substantially cylindrical space 11 formed therein. The chamber body 10 is configured to process a substrate in the internal space 11. Further, the outer shape of the chamber body 10 has a substantially rectangular parallelepiped shape. The chamber body 10 is an example of the "container body" in the claims.

The processing device 100 also includes a lid 20. The lid 20 is provided so as to cover the chamber body 10. Specifically, the lid body 20 is configured to seal the space 11 inside the chamber body 10. Further, the lid 20 has a substantially cylindrical shape.

In addition, the processing device 100 includes an attachment/detachment mechanism 30. The attachment/detachment mechanism 30 is configured to attach/detach the lid 20 to/from the chamber body 10. The detailed configuration of the attachment/detachment mechanism 30 will be described below.

(Detailed structure of the attachment/detachment mechanism)

As shown in FIG. 1, the attachment/detachment mechanism 30 includes a parallel link portion 31. The parallel link portion 31 has the first end portion 31a side attached to the chamber body 10 side and the second end portion 31b side attached to the lid body 20 side. The parallel link portions 31 are provided on the side surface 10a on the Y1 direction side and the side surface 10a on the Y2 direction side of the chamber body 10, respectively. Further, the parallel link portion 31 includes a pair of links 32. The link 32 has a rectangular plate shape. The pair of links 32 are arranged substantially parallel to each other. The parallel link part 31 is made of, for example, metal.

The second ends 31b of the pair of links 32 are connected to each other by a connecting portion 33. Further, the parallel link portion 31 is attached to the lid body 20 side together with the connecting portion 33. The connecting portion 33 is made of a flat metal plate or the like. In addition, the pair of links 32 are configured to be rotatable with respect to the lid body 20 about axes C1 and C2 along the Y direction. Further, the pair of links 32 are configured to be rotatable with respect to the slide mechanism section 40 about axes C3 and C4 along the Y direction. In addition, as shown in FIG. 1, the shaft C1 is located on the X2 direction side of the shaft C3 in a state where the lid body 20 covers the chamber body 10. The axis C2 is located on the X2 direction side of the axis C4.

The attachment/detachment mechanism 30 also includes a slide mechanism section 40. The slide mechanism unit 40 is configured to slide the first end 31a side of the parallel link unit 31 along the horizontal direction. Note that, as shown in FIG. 2, the slide mechanism portions 40 are provided on the Y1 direction side and the Y2 direction side of the chamber body 10, respectively.

Specifically, in the first embodiment, as shown in FIG. 1, the slide mechanism unit 40 includes a plurality of roller units 41 arranged in parallel along the horizontal direction (X direction). Each of the plurality of roller portions 41 is configured to be rotatable about an axis C5 along the Y direction. Further, as shown in FIG. 3, each of the plurality of roller portions 41 is fixed to a plate member 50 provided so as to be separated from the side surface 10 a of the chamber body 10. Further, the plate member 50 is provided with a plurality of holes 51 for adjusting the height position of the plate member 50 with respect to the chamber body 10. Then, the plate member 50 is fixed to the chamber body 10 by inserting the bolt members 52 extending toward the chamber body 10 into the two hole portions 51 of the plurality of hole portions 51. The bolt member 52 is composed of, for example, a reamer bolt. The roller portion 41 is an example of the "guide portion" in the claims.

Further, in the first embodiment, as shown in FIG. 1, the slide mechanism section 40 includes a moving pedestal section 42. The moving pedestal portion 42 is provided on the first end portion 31a side of the parallel link portion 31, serves also as a connecting portion that connects the first end portion 31a side of the parallel link portion 31, and moves along the plurality of roller portions 41. Is configured to. Specifically, as shown in FIG. 3, the cross section of the moving pedestal portion 42 has a substantially C shape. Further, the moving pedestal portion 42 is made of sheet metal or the like. Then, the inner side surface 42 a on the upper side of the substantially C-shaped moving base portion 42 abuts on the upper portion of the roller portion 41. As a result, the inner side surface 42a of the moving pedestal portion 42 moves so as to slide along the roller portion 41.

Further, as shown in FIG. 1, the pair of links 32 of the parallel link portion 31 are connected to the moving pedestal portion 42. As shown in FIG. 3, the pair of links 32 are attached to the moving pedestal portion 42 by bolt members 54. A bearing 55 is provided around the bolt member 54. As a result, the link 32 is configured to be rotatable with respect to the moving pedestal portion 42.

Further, as shown in FIG. 1, a roller portion 60 is provided on the X1 direction side of the chamber body 10. The roller portion 60 is configured to be rotatable around an axis C6 along the Y direction. The roller portion 60 is an example of the "rotating body" in the claims.

Here, in the first embodiment, as shown in FIG. 4, the attachment/detachment mechanism 30 includes a movement restricting portion 70. The movement restricting portion 70 is configured to restrict the movement of the lid body 20 that moves in the vertical direction by the parallel link portion 31 in the substantially horizontal direction (both the X1 direction side and the X2 direction side). Specifically, when the slide mechanism unit 40 moves to the X2 direction side (the left side of the paper surface), the lid body 20 also moves to the left side if there is no regulation by the movement regulation unit 70. Therefore, the movement restricting unit 70 restricts the movement of the lid body 20 to the left and changes the movement direction of the lid body 20 to the upward direction. For example, by providing the movement restricting portion 70 with the roller portion 60 that can move in the vertical direction, and by providing the groove portion that restricts the movement of the roller portion 60 in the substantially horizontal direction, the lid body 20 that moves in the substantially horizontal direction can be provided. It regulates movement. Further, in FIG. 4, the movement restricting portion 70 is arranged on the X1 direction side of the lid body 20, while the direction in which the movement restricting portion 70 is arranged is not limited to the X1 direction side of the lid body 20, and is X1. It may be arranged on a direction side other than the direction side. In the state of FIG. 4, the axis C1 is located on the X2 direction side of the axis C3. The axis C2 is located on the X2 direction side of the axis C4. In the X direction, the distance L12 between the C1 axis and the C3 axis in the state of FIG. 4 is smaller than the distance L11 between the C1 axis and the C3 axis in the state of FIG. The X1 direction and the X2 direction are examples of the “first direction” and the “second direction” in the claims, respectively. The movement restricting unit 70 is an example of the “first movement restricting unit” in the claims.

The movement restricting portion 70 has, for example, a rectangular plate shape. And in 1st Embodiment, the movement control part 70 contains the 1st part 71 extended along a perpendicular direction. The surface 71a of the first portion 71 is arranged so as to face the lid 20.

Further, in the first embodiment, the movement restricting portion 70 includes a second portion 72 that is connected to the first portion 71 and extends in a direction intersecting the vertical direction and in a direction away from the lid body 20 (X1 direction side). .. The surface 71a of the first portion 71 and the surface 72a of the second portion 72 are continuous. The length L2 of the second portion 72 is smaller than the length L1 of the first portion 71. Further, at the height position of the boundary between the first portion 71 and the second portion 72, and the length L2 of the second portion 72, the lid body 20 moving in the X1 direction passes over the second portion 72. Is set to be possible.

Moreover, in the first embodiment, as shown in FIG. 1, the slide mechanism unit 40 includes a movement restricting unit 80. The movement restricting portion 80 is provided on the X2 direction side of the plurality of roller portions 41, and is configured to restrict the movement pedestal portion 42 from moving in the X2 direction side. For example, the movement restricting portion 80 is composed of a plate-shaped member. Then, the movement of the movable pedestal portion 42 is regulated by the end of the movable pedestal portion 42 moving in the X2 direction side contacting the movement regulation portion 80. Specifically, as shown in FIG. 3, a ball plunger 53 is inserted near the inner side surface 42b side below the moving pedestal portion 42. The tip of the ball plunger 53 is in contact with a contact surface member 53 a provided along the surface of the plate member 50. Then, the urging force of the ball plunger 53 locks the movable pedestal portion 42 whose movement is restricted. The movement restricting portion 80 is attached to the plate member 50 (see FIG. 3). The movement restricting unit 80 is an example of the "second movement restricting unit" in the claims.

In addition, in the first embodiment, the processing device 100 includes the damper unit 90 having a spring property. The damper part 90 is connected to the pair of links 32 of the parallel link part 31, and is configured so that a biasing force acts in a direction in which the damper part 90 extends in accordance with the rotation of the pair of links 32. Further, a reaction force is exerted in a direction in which the damper portion 90 contracts, and an urging force acts in a direction in which the distance between the pair of links 32 is increased. That is, the damper part 90 urges the lid body 20 in the lifting direction. The damper part 90 is an example of the "expandable part" in the claims.

(Operation of processing device)
Next, the operation of the processing device 100 (opening/closing operation of the lid 20) will be described. In the first embodiment, the lid body 20 moves in the vertical direction by the rotation of the parallel link portion 31 in the state where the movement regulating portion 70 regulates the movement of the lid body 20. Further, the lid body 20 moves in the X1 direction side by the rotation of the parallel link portion 31 in a state where the movement regulation portion 70 has released the movement regulation of the lid body 20. The details will be described below.

As shown in FIG. 1, with the lid 20 covering the chamber body 10, the parallel link portion 31 is in a state of being inclined (tilted) in the X2 direction. At this time, the slide mechanism section 40 (connecting section) is arranged on the X1 direction side, and the connecting section 33 is arranged on the X2 direction side. The roller portion 60 is in contact with the surface 71 a of the first portion 71 of the movement restricting portion 70.

Next, as shown in FIG. 4, the user lifts the lid body 20 upward or presses the slide mechanism portion 40 in the X2 direction, whereby the parallel link portion 31 rotates. Specifically, the first end portion 31a side of the parallel link portion 31 moves in the X2 direction side, and the second end portion 31b side of the parallel link portion 31 moves vertically upward. Further, as the parallel link portion 31 rotates, the roller portion 60 rotates and moves on the surface 71a of the first portion 71 of the movement restricting portion 70, whereby the lid body 20 moves in the vertical direction (upward) (straight line). Move to the shape). Then, the slide mechanism section 40 comes into contact with the movement restricting section 80, whereby the movement of the lid body 20 in the vertically upward direction is completed. At this time, the load for moving the lid body 20 of the user can be reduced by assisting the force of lifting the lid body 20 in the vertically upward direction by a constant load spring or the like (not shown). Instead of the user lifting the lid 20 in the vertical direction or pressing the slide mechanism 40, the lid 20 is lifted or the slide mechanism is driven by a motor, a pneumatic drive, or a hydraulic drive. You may press 40.

An annular member 12 (see FIG. 1) for sealing the chamber body 10 may be provided on the lower surface of the lid body 20. In this case, since the annular member 12 contacts the wall surface 13 surrounding the space 11 inside the chamber body 10, even if the lid body 20 is moved in an arc shape, the lid body 20 can be detached from the chamber body 10. Can not. Therefore, the attaching/detaching mechanism 30 of the first embodiment is configured so that the lid 20 can be moved upward.

Further, the user continues to lift the lid 20 upward or press the slide mechanism 40 in the X2 direction. As a result, the roller portion 60 passes over the surface 71a of the first portion 71 of the movement restricting portion 70, and then the roller portion 60 passes over the second portion 72. As a result, as shown in FIG. 5, the parallel link portion 31 tilts toward the X1 direction side with respect to the vertical direction. Note that the movement restricting unit 70 is omitted in FIG. Then, the lid body 20 moves to the X1 direction side. As a result, the lid 20 is retracted from above the chamber body 10 to the X1 direction side (the opposite side to the X2 direction side where the slide mechanism unit 40 slides when the lid 20 is lifted up). Further, when the lid body 20 moves in the X1 direction side, it moves so as to rotate (in an arc shape). Further, as viewed from above, to the position where the lid 20 does not overlap the chamber body 10 (or to the position where the end of the lid 20 slightly overlaps the end of the chamber body 10), the lid body 20 is moved to the X1 direction side. This allows the user to maintain the inside of the chamber body 10. As described above, the lid body 20 is retracted from above the chamber body 10 only by the user pressing the lid body 20, so that the lid body 20 can be retracted while suppressing the user's trouble. it can. In the state of FIG. 5, the shaft C1 is located on the X1 direction side of the shaft C3. The axis C2 is located on the X1 direction side of the axis C4.

Further, in the state where the lid body 20 shown in FIG. 5 has moved to the X1 direction side, the user moves the lid body 20 to the X2 direction side. Thereby, as shown in FIG. 4, the roller portion 60 moves vertically downward while rotating on the surface 71a of the first portion 71 of the movement restricting portion 70. Since the second portion 72 is inclined toward the X1 direction side, the second portion 72 functions as a guide for the roller portion 60 when the lid 20 is moved toward the X2 direction side. Then, when the roller portion 60 is guided by the surface 72 a of the second portion 72, the lid body 20 is rotated (moved in an arc shape), and the roller portion 60 is moved by the surface 71 a of the first portion 71. When moving up, the lid 20 moves vertically (downward). That is, the lid 20 moves vertically downward in a straight line. Thereby, as shown in FIG. 1, the lid 20 is arranged above the chamber body 10 so as to cover the chamber body 10 (to seal the space 11 inside the chamber body 10).

(Effects of the first embodiment)
In the first embodiment, the following effects can be obtained.

In the first embodiment, as described above, the lid 20 moves in the vertical direction due to the rotation of the parallel link portion 31 in the state where the movement restricting unit 70 regulates the movement of the lid 20. As a result, the lid body 20 is moved in the vertical direction. Therefore, when the lower surface of the lid body 20 is provided with the ring-shaped member 12 for sealing the chamber body 10, the upper surface of the container (chamber body 10) is O-shaped. Want to move the lid 20 (moving body) in a fixed linear direction, such as when a ring is provided, or when the gap is narrow due to the structure in which the container (fixed body) side and the lid 20 (moving body) side are intricate. Even in this case, the lid 20 can be detached in the vertical direction.

Further, in the first embodiment, as described above, the lid 20 is moved above the chamber main body 10 by the rotation of the parallel link portion 31 in the state where the movement restraint portion 70 restrains the movement of the lid body 20. To the X1 direction side. As a result, since the lid body 20 is detached from the chamber body 10, the lid body 20 can be easily moved to the X1 direction side.

In addition, in the first embodiment, as described above, the roller body 60 moves while rotating on the surface 71a of the first portion 71 of the movement restricting portion 70, so that the lid body 20 moves in the vertical direction. It is configured. As a result, the frictional force between the lid body 20 and the movement restricting portion 70 is reduced by the rotation of the roller portion 60, so that the lid body 20 can be easily moved in the vertical direction.

In addition, in the first embodiment, as described above, the lid body 20 is configured to be retracted from above the chamber body 10 when the roller portion 60 passes over the second portion 72. Accordingly, when the lid body 20 is moved to the X2 direction side again from the position where the lid body 20 is retracted from above the chamber body 10, the lid body 20 is moved to the X2 direction side when the lid body 20 is attached to the chamber body 10. The body 20 can be guided by the second part 72.

Further, in the first embodiment, as described above, the slide mechanism portion 40 is provided on the plurality of roller portions 41 arranged in parallel in the horizontal direction and the first end portion 31a side of the parallel link portion 31, The parallel link portion 31 also includes a moving pedestal portion 42 that also moves along the plurality of roller portions 41 while also serving as a connecting portion that connects the first end portions 31a side of the parallel link portions 31 to each other. As a result, the frictional force between the movable pedestal portion 42 and the plurality of roller portions 41 is relatively small, so that the movable pedestal portion 42 can be easily moved along the plurality of roller portions 41.

Further, in the first embodiment, as described above, the slide mechanism portion 40 is provided on the X2 direction side in the horizontal direction of the plurality of roller portions 41, and the moving pedestal portion 42 moves to the X2 direction side in the horizontal direction. A movement restricting unit 80 that restricts the movement is included. Accordingly, the movement of the parallel link part 31 in the X2 direction is restricted by the movement restricting part 80, so that the lid body 20 can be moved in the vertical direction by the rotation of the parallel link part 31.

In addition, in the first embodiment, as described above, the damper portion 90 that is connected to the pair of links 32 of the parallel link portion 31 and has the spring property that expands and contracts with the rotation of the pair of links 32 is provided. Accordingly, by configuring the damper part 90 so that the biasing force acts in the extending direction of the damper part 90, the biasing force of the damper part 90 serves as an assisting force for rotating the parallel link part 31. This can reduce the burden on the user when moving the lid 20.

[Second Embodiment]
(Configuration of processing device)
The configuration of the processing device 300 according to the second embodiment will be described with reference to FIGS. 6 to 8.

As shown in FIG. 6, the processing device 300 includes an attachment/detachment mechanism 230. The attachment/detachment mechanism 230 includes a parallel link portion 231. The parallel link portion 231 is attached to the chamber body 10 side and the lid body 20 side. Further, on the chamber body 10 side of the parallel link portion 231, a slide mechanism portion 240 including a roller portion is provided.

The attachment/detachment mechanism 230 also includes a link-shaped movement restricting portion 270. The movement restricting portion 270 is attached to the chamber body 10 side and the lid body 20 side. Further, a roller portion 271 is provided on the lid 20 side of the movement restricting portion 270. Further, the movement restricting portion 270 is provided with a cylinder 272 for expanding and contracting the movement restricting portion 270. Note that members other than the cylinder 272 may be provided in the movement restricting unit 270 as long as they are members for expanding and contracting the movement restricting unit 270. The movement restriction unit 270 is an example of the “first movement restriction unit” in the claims. The cylinder 272 is an example of the "expandable portion" in the claims.

The operation of the processing device 300 (attachment/detachment mechanism 230) will be described.

First, as shown in FIG. 7, the slide mechanism portion 240 including a roller portion provided below the parallel link portion 231 moves to the X2 direction side. The roller portion 271 of the movement restricting portion 270 also moves in the X2 direction. Note that the lid 20 also tries to move in the X2 direction side as the slide mechanism section 240 moves in the X2 direction side. On the other hand, since the entire length of the movement restricting portion 270 is constant (does not change), the movement restricting portion 270 restricts the movement of the lid 20 in the X2 direction. As a result, the lid body 20 moves in the vertical direction (upward direction).

Further, as shown in FIG. 8, the length of the movement restricting portion 270 is extended by the cylinder 272. That is, the restriction on the movement of the lid 20 by the movement restriction unit 270 is released. Note that the slide mechanism unit 240 including the roller unit does not move. At this time, the parallel link part 231 rotates in the X1 direction side about the slide mechanism part 240 composed of a roller part. As a result, the lid body 20 moves in an arc shape and is retracted from above the chamber body 10.

[Modification]
The embodiments and examples disclosed this time are to be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description of the embodiments and examples but by the scope of claims for patent, and includes meanings equivalent to the scope of claims for patent and all modifications (modifications) within the scope.

For example, in the above-described first embodiment, the example in which the slide mechanism portion 40 is attached to the first end portion 31a side (the chamber body 10 side) of the parallel link portion 31 is shown, but the present invention is not limited to this. Absent. For example, the slide mechanism section 40 may be attached to the parallel link section 31 on the lid body 20 side. Similarly in the second embodiment, the slide mechanism part 240 may be attached to the lid 20 side of the parallel link part 231.

Moreover, in the said 1st and 2nd embodiment, although the example which the slide mechanism part 40 (slide mechanism part 240) contained the roller part 41 was shown, this invention is not limited to this. For example, as in the modified example shown in FIGS. 9 and 10, the slide mechanism section 340 includes a pair of rail sections 341 and a sliding member 342 that slides on the rail sections 341 while the pair of rail sections 341 are inserted. It may be configured by. The slide mechanism unit 340 is attached to the plate member 350 of the processing device 400. Further, the slide mechanism section 340 is provided on both the Y1 direction side and the Y2 direction side of the lid body 20. Further, the surface 342a on the X direction side of the sliding member 342 contacts the movement restricting portion 80 (see FIG. 1). A cover member 343 is provided so as to cover the rail portion 341 and the sliding member 342. The cover member 343 moves together with the sliding member 342. Further, the parallel link portion 31 is rotatably attached to the cover member 343. The rail portion 341 is an example of the “guide portion” in the claims. The sliding member 342 is an example of the "moving pedestal portion" in the claims.

Further, in the above-described first embodiment, an example in which the movement restricting portion 70 has a rectangular plate shape is shown, but the present invention is not limited to this. For example, the movement restricting portion 70 may have a flat plate shape, a cylindrical shape, or the like.

Moreover, in the said 1st Embodiment, although the movement regulation part 70 showed the example including the 1st part 71 and the 2nd part 72, this invention is not limited to this. For example, the movement restricting portion 70 may include only the first portion 71.

Moreover, in the said 1st Embodiment, although the moving pedestal part 42 showed the example which also serves as the connection part which connects the parallel link part 31 (a pair of link 32), this invention is not limited to this. For example, the moving pedestal portion 42 and the connecting portion may be separately provided.

Further, in the above-described first embodiment, an example in which the movement restricting portion 80 is configured by a plate-shaped member has been shown, but the present invention is not limited to this. For example, the movement restricting portion 80 may be formed of a columnar member or the like.

Further, in the above-described first embodiment, the example in which the damper part 90 that expands and contracts with the rotation of the pair of links 32 is provided is shown, but the present invention is not limited to this. The present invention can also be applied to a configuration in which the damper section 90 is not provided. Further, a cylinder other than the damper section 90 may be provided.

Further, in the above-described first and second embodiments, the example in which the present invention is applied to the attachment/detachment mechanism for attaching/detaching the lid body to/from the chamber body for processing the substrate has been shown, but the present invention is not limited to this. The present invention can also be applied to an attaching/detaching mechanism for attaching/detaching a lid to/from a container body other than the chamber body. The present invention can also be applied to a link mechanism that moves a moving body that covers the fixed body from a fixed body other than the chamber body and the container.

Further, in the above embodiment, an example in which the roller portion 60 is provided on the X1 direction side of the chamber body 10 has been shown, but the present invention is not limited to this. For example, a linear guide including a bearing (rotating body) inside may be provided on the X1 direction side of the chamber body 10 and the chamber body 10 may be moved in the vertical direction together with the linear guide.

10 Chamber body (container body)
20 Lid body 30 Attachment/detachment mechanism 31, 231 Parallel link part 31a First end part 31b Second end part 32 Link 40, 240, 340 Sliding mechanism part 41, 341 Roller part (guide part)
42, 342 Moving base 60 Roller (rotating body)
70, 270 Movement restriction section (first movement restriction section)
71 1st part 71a surface 72 2nd part 72a surface 80 Movement regulation part (2nd movement regulation part)
90 Damper part (expandable part)
100, 300, 400 Processor 272 Cylinder (Expansion/contraction part)

Claims (10)

A chamber body for processing the substrate,
A lid provided so as to cover the chamber body,
An attaching/detaching mechanism for attaching/detaching the lid body to/from the chamber body,
The attachment/detachment mechanism is
A parallel link portion having a first end portion side attached to the chamber body side and a second end portion side attached to the lid body side;
A slide mechanism portion that slides one of the first end portion side and the second end portion side of the parallel link portion along the horizontal direction;
A first movement restricting portion that restricts movement of the lid body moving in the vertical direction by the parallel link portion in a substantially horizontal direction,
The processing device, wherein the lid body moves in the vertical direction by the rotation of the parallel link portion in a state where the movement of the lid body is regulated by the first movement regulation section. The lid is retracted from above the chamber body to the first side in the horizontal direction by the rotation of the parallel link portion in a state in which the regulation of the movement of the lid body by the first movement regulation portion is released. The processing device according to claim 1, wherein the processing device is configured to be. The first movement restricting portion includes a first portion extending along the vertical direction,
Further comprising a rotating body provided on a side of the lid on which the first movement restricting portion is arranged,
The lid body is configured to move in the vertical direction by moving the rotating body while rotating on the surface of the first portion of the first movement restricting unit. Processing equipment. The rotating body includes a roller unit attached to the lid,
The first movement restricting portion further includes a second portion connected to the first portion and extending in a direction intersecting the vertical direction and in a direction away from the lid body,
The process according to claim 3, wherein the lid is configured to be retracted from above the chamber main body toward the first direction side in the horizontal direction when the roller portion passes over the second portion. apparatus. The slide mechanism part is provided on one of the guide part arranged along the horizontal direction and the first end part side and the second end part side of the parallel link part. 5. A moving pedestal part that moves along the guide part while also serving as a connecting part that connects one of the first end part side and the second end part side to each other. The processing apparatus according to item 1. The slide mechanism unit further includes a second movement restricting unit that is provided on the horizontal second direction side of the guide unit and restricts the movement pedestal unit from moving toward the second direction side. The processing device according to 5. The processing device according to claim 1, further comprising an elastic part that is connected to the pair of links of the parallel link part and that expands and contracts as the pair of links rotates. A detachable mechanism for attaching and detaching a lid provided to cover the container body from the container body,
A parallel link portion having a first end portion side attached to the container body side and a second end portion side attached to the lid body side;
A slide mechanism portion that slides one of the first end portion side and the second end portion side of the parallel link portion along the horizontal direction;
A movement restricting portion that restricts movement of the lid body that moves in the vertical direction by the parallel link portion in a substantially horizontal direction,
An attachment/detachment mechanism in which the lid body moves in the vertical direction by the rotation of the parallel link portion in a state where the movement regulation portion regulates the movement of the lid body. A link mechanism for attaching and detaching a moving body provided so as to cover the fixed body from the fixed body,
The moving direction of the moving body and a surface on which the moving body is attached to and detached from the fixed body are substantially orthogonal to each other,
A parallel link part having a first end side attached to the fixed body side and a second end side attached to the movable body side;
A slide mechanism unit that slides one of the first end portion side and the second end portion side of the parallel link portion along a direction perpendicular to the moving direction of the moving body,
The parallel link portion, in the movement direction, a movement restricting portion that restricts movement of the movable body that moves relative to the slide mechanism portion in a direction substantially perpendicular to the movement direction,
A link mechanism in which the movable body moves in the movement direction by the rotation of the parallel link portion in a state in which the movement regulation unit regulates the movement of the movable body. The movable body is retracted from the fixed body to the side opposite to the sliding movement direction of the slide mechanism portion by the rotation of the parallel link portion in the state where the regulation of the movable body by the movement regulation portion is released. The link mechanism according to claim 9, which is configured as follows.

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